Valve device and semiconductor apparatus
Patent Information
- Application Number
- CN202611055069.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-15
- Publication Date
- 2026-10-27
Smart Images
Figure CN122981401A_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of semiconductor equipment technology, and more particularly to a valve device and a semiconductor device. Background Technology
[0002] In semiconductor manufacturing, many processes require high vacuum conditions, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD). These processes are typically performed in dedicated process chambers. After completion, the wafers are transferred to a low-vacuum transport module (TM) for initial cooling before being transported to the equipment front-end module (EFEM) in atmospheric conditions. Due to significant pressure differences between the process chamber, the TM chamber, and the EFEM chamber, it is necessary to isolate adjacent chambers. Summary of the Invention
[0003] This disclosure provides a valve device and a semiconductor device.
[0004] As one aspect of this disclosure, an embodiment provides a valve device for mounting to a cavity of a semiconductor device to open or close an opening in the cavity. The valve device includes: an outer door for sliding connection with the cavity of a semiconductor device; the outer door includes: an outer door shell, an air bladder, and an outer door magnetic clasp, the air bladder and the outer door magnetic clasp being mounted to the outer door shell; an inner door, disposed on the side of the outer door facing the opening of the cavity; the inner door includes an inner door panel and an inner door magnetic clasp, the inner door magnetic clasp being mounted to the inner door panel; wherein, when the air bladder is in an inflated state, the air bladder generates a pushing force to make the inner door overcome the magnetic attraction between the outer door magnetic clasp and the inner door magnetic clasp, and push the inner door along the direction facing the opening of the cavity until the inner door closes the opening of the cavity; when the pressure inside the air bladder is lower than a preset pressure, under the action of the outer door magnetic clasp and the inner door magnetic clasp, the inner door moves in a direction away from the opening of the cavity until it is fixed to the outer door shell; a driving member, connected to the outer door shell, for driving the outer door and the inner door to move along a first direction, the first direction being perpendicular to the direction of movement of the inner door relative to the outer door.
[0005] In one embodiment, a first gas channel is provided inside the outer door shell, and an airbag mounting hole is provided in the outer door shell, and the airbag mounting hole communicates with the first gas channel; the airbag is installed in the airbag mounting hole, and the airbag and the outer door shell surround to form an inflation cavity.
[0006] In one embodiment, the airbag mounting holes have at least two, and the number of airbags is the same as the number of airbag mounting holes; wherein at least two of the airbag mounting holes are spaced apart along the length direction of the inner door panel.
[0007] In one embodiment, the outer door further includes an outer door magnetic chuck fixing plate, at least a portion of the outer door magnetic chuck is sandwiched between the outer door magnetic chuck fixing plate and the outer door shell, and the outer door magnetic chuck fixing plate is fastened to the outer door shell.
[0008] In one embodiment, there are multiple outer door magnetic connectors; the number of inner door magnetic connectors is the same as the number of outer door magnetic connectors; wherein at least two of the outer door magnetic connectors are spaced apart along the length direction of the inner door panel.
[0009] In one embodiment, at least two of the outer door magnetic closures are located on opposite sides of the airbag.
[0010] In one embodiment, the valve device further includes an elastic element connected between the outer door housing and the inner door panel.
[0011] In one embodiment, the outer door further includes an outer door spring clip fixing block, and the inner door further includes an inner door spring clip fixing block; the elastic element includes a spring clip, one end of which is clamped between the outer door spring clip fixing block and the outer door shell, the outer door spring clip fixing block being fastened to the outer door shell, and the other end of which is clamped between the inner door spring clip fixing block and the inner door panel, the inner door spring clip fixing block being fastened to the inner door panel.
[0012] In one embodiment, the elastic element has a plurality of elastic elements; wherein at least two of the elastic elements are spaced apart along the length direction of the inner door panel; and one of the elastic elements is located between the outer door magnetic closure and the airbag.
[0013] In one embodiment, the outer door has two ends spaced apart along its length; the drive member is located at one of the ends of the outer door.
[0014] In one embodiment, the valve device further includes a cylinder connecting block, which is fixedly connected to the outer door shell; the cylinder connecting block is provided with a second gas passage, which communicates with the first gas passage; the driving component includes a cylinder, and the piston rod of the cylinder is fixedly connected to the cylinder connecting block.
[0015] In one embodiment, the valve device further includes: a guide rail and a guide rail slider, the guide rail slider being connected to the cylinder connecting block, and the guide rail being used to connect to the cavity; wherein the guide rail slider slides relative to the guide rail along the first direction.
[0016] In one embodiment, the valve device further includes: a guide block extending along the first direction for guiding the outer door shell to move relative to the cavity along the first direction; the guide block and the guide rail slider are respectively located on opposite sides of the cavity; at least a portion of the inner door panel is located between the guide block and the guide rail slider.
[0017] In one embodiment, the guide block is provided with a guide groove; the outer door shell is provided with a first guide protrusion, which is fixed in the guide groove; the guide groove is also used to slide with a second guide protrusion provided in the cavity.
[0018] In one embodiment, an inner door receiving groove is provided on the side of the outer door shell facing the opening of the cavity; when the pressure inside the airbag is lower than a preset pressure, under the action of the outer door magnetic attractor and the inner door magnetic attractor, the inner door moves in a direction away from the opening of the cavity until it is at least partially received in the inner door receiving groove.
[0019] As one aspect of this disclosure, an embodiment of this disclosure provides a semiconductor device, including: a cavity; and a valve device as described in any of the preceding claims.
[0020] The embodiments disclosed herein employ the above-described technical solution to achieve sealing of the cavity, and the structure is relatively simple, small in size, and easy to maintain.
[0021] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of this disclosure will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description
[0022] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this disclosure and should not be construed as limiting the scope of this disclosure.
[0023] Figure 1 A partially exploded structural schematic diagram of a valve device according to an embodiment of the present disclosure is shown; Figure 2 A partially exploded structural diagram of an inner door according to an embodiment of the present disclosure is shown. Figure 3 A schematic diagram of the valve device and cavity according to an embodiment of the present disclosure is shown. Figure 1 ; Figure 4 A schematic diagram of the valve device and cavity according to an embodiment of the present disclosure is shown. Figure 2; Figure 5 The valve device and cavity according to an embodiment of the present disclosure are shown. Figure 4 A cross-sectional view at point AA.
[0024] Explanation of reference numerals in the attached drawings: 110, outer door; 111, outer door shell; 1111, first guide protrusion; 1112, inner door receiving groove; 112, outer door magnetic clasp; 113, outer door magnetic clasp fixing plate; 114, airbag; 115, airbag fixing block; 116, outer door spring clip fixing block; 120, inner door; 121, inner door panel; 122, spring clip; 123, inner door spring clip fixing block; 124, inner door magnetic clasp; 131, cylinder; 132, cylinder connecting block; 133, guide rail slider; 134, guide rail; 135, guide block; 200, cavity; 201, second guide protrusion; 210, first seal. Detailed Implementation
[0025] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this disclosure. Therefore, the drawings and description are to be considered exemplary in nature and not restrictive.
[0026] In related technologies, vacuum valves commonly used in semiconductor equipment typically employ a rectangular structure and achieve the L-shaped movement of the valve plate through complex transmission components. Specifically, a vertical cylinder pushes an actuator below the door, causing the door to move upwards and downwards in a linear motion, while a horizontal cylinder pushes the door to perform a parallel clamping motion during opening and closing. Not only do the two cylinders occupy a large installation space and are complex to maintain, but the L-shaped movement of the valve plate also requires the cooperation of transmission components such as connecting rods, cams, and gears, resulting in a large installation space, a long maintenance process, and increased maintenance costs.
[0027] This embodiment provides a valve device and a semiconductor device that can achieve isolation between two adjacent spaces. The valve device has a simple structure, small size, and is easy to maintain.
[0028] The following is in conjunction with the appendix Figure 1 To be continued Figure 5 The structure, function, and implementation process of this embodiment are illustrated with examples.
[0029] Please refer to Figures 1 to 5This embodiment provides a valve device for installation into a cavity 200 of a semiconductor device to open or close the opening of the cavity 200. The valve device includes: an outer door 110 for sliding connection with the cavity 200 of the semiconductor device; the outer door 110 includes: an outer door shell 111, an airbag 114, and an outer door magnetic 112, the airbag 114 and the outer door magnetic 112 being installed to the outer door shell 111; an inner door 120 disposed on the side of the outer door 110 facing the opening of the cavity 200; the inner door 120 includes an inner door panel 121 and an inner door magnetic 124, the inner door magnetic 124 being installed to the inner door panel 121; wherein, when the airbag 114 is in an inflated state, the airbag 114 generates a pushing force, causing the inner door 120 to overcome the outer door magnetic 114. The magnetic attraction between the outer door magnetic 112 and the inner door magnetic 124 pushes the inner door 120 in the direction of the opening towards the cavity 200 until the inner door 120 closes the opening of the cavity 200; when the pressure inside the airbag 114 is lower than the preset pressure, under the action of the outer door magnetic 112 and the inner door magnetic 124, the inner door 120 moves in the direction away from the opening of the cavity 200 until it is fixed with the outer door shell 111; the driving member, connected to the outer door shell 111, is used to drive the outer door 110 and the inner door 120 to move in a first direction, the first direction being perpendicular to the direction of movement of the inner door 120 relative to the outer door 110.
[0030] The outer door 110 is slidably connected to the cavity 200 of the semiconductor device and moves relative to the cavity 200 under the drive of the driving member. The outer door 110 includes an outer door shell 111, an airbag 114, and an outer door magnetic clasp 112, both of which are mounted on the outer door shell 111. The outer door shell 111 may be made of a metal material with sufficient mechanical strength and corrosion resistance, such as stainless steel or aluminum alloy.
[0031] The airbag fixing block 115 secures the airbag 114 to the outer door shell 111 using screws. For example, a portion of the airbag 114 is clamped between the airbag fixing block 115 and the outer door shell 111, and the airbag fixing block 115 is fastened to the outer door shell 111 using screws. The airbag fixing block 115 can be annular to avoid interfering with the movement of the airbag 114 pushing the inner door panel 121. Alternatively, the airbag 114 can be directly fixed to the outer door shell 111 by bonding or welding.
[0032] The outer door magnetic connector 112 can be fixed to the outer door shell 111 by screws, or by being clamped and fixed by a fixing plate and the outer door shell 111.
[0033] The inner door 120 is located on the side of the outer door 110 facing the opening of the cavity 200 and is movable relative to the outer door 110. The inner door 120 includes an inner door panel 121 and an inner door magnetic member 124 mounted on the inner door panel 121. The inner door panel 121 is used to engage with the opening of the cavity 200 to close the opening of the cavity 200. For example, if the opening of the cavity 200 is rectangular, then the inner door panel 121 is a rectangular panel. In other examples, if the opening of the cavity 200 is circular, elliptical, or oblong, then the inner door panel 121 is correspondingly circular, elliptical, or oblong.
[0034] Optionally, the side of the inner door panel 121 facing the cavity 200 can cooperate with the first sealing member 210 provided on the wall of the cavity 200 to form an opening, so as to press the first sealing member 210 when the inner door 120 presses against the cavity 200 to form a seal and ensure reliable isolation.
[0035] The inner door magnetic connector 124 can be fixed to the inner door panel 121 by screws, or by being clamped and fixed by a fixing plate and the inner door panel 121. For example, the inner door panel 121 has a mounting hole on the surface facing the outer door 110, and part of the inner door magnetic connector 124 is accommodated in the mounting hole to prevent the inner door magnetic connector 124 from moving relative to the inner door panel 121 and affecting the magnetic attraction effect.
[0036] The outer door magnetic clasp 112 and the inner door magnetic clasp 124 cooperate to form a magnetic attraction structure. The outer door magnetic clasp 112 can be rectangular or other shapes, and the inner door magnetic clasp 124 has the same shape as the outer door magnetic clasp 112. Under the magnetic attraction between the outer door magnetic clasp 112 and the inner door magnetic clasp 124, the inner door 120 is held close to the outer door 110. This magnetic attraction ensures that the inner door 120 reliably moves synchronously with the outer door 110, preventing the inner door 120 from wobbling or shifting relative to the outer door 110 during overall movement.
[0037] The outer door housing 111 is provided with a first air supply channel communicating with the airbag 114, so that gas (e.g., inert gas) can be supplied to the airbag 114 through the first air supply channel. Alternatively, the valve device also includes an air supply line for supplying gas to the airbag 114; wherein the outer door housing 111 may be provided with a limiting groove, and at least a portion of the air supply line is located in the limiting groove.
[0038] When the airbag 114 is in the inflated state, it expands and generates a pushing force toward the inner door 120. As the airbag 114 continues to expand, the pushing force gradually increases. When this pushing force exceeds the magnetic attraction between the outer door magnetic member 112 and the inner door magnetic member 124, the inner door 120 overcomes the magnetic attraction and moves relative to the outer door 110 toward the opening of the cavity 200, gradually approaching the cavity 200. When the inner door 120 moves to contact the cavity 200, the airbag 114 continues to provide a pushing force, causing the inner door 120 to press against the first sealing member 210 located at the opening of the cavity 200, thereby completing the sealing and isolation of the opening of the cavity 200. By adjusting the air supply pressure, the pushing force exerted by the airbag 114 on the inner door 120 can be adjusted to regulate the sealing pressure when the inner door 120 presses against the sealing member; by adjusting the air supply flow rate, the expansion speed of the airbag 114 can also be adjusted, thereby adjusting the closing speed of the inner door 120.
[0039] When it is necessary to open the cavity 200, the pressure inside the airbag 114 is reduced. When the pressure inside the airbag 114 is lower than the preset pressure, the pushing force generated by the airbag 114 is reduced to a level insufficient to overcome the magnetic attraction between the outer door magnetic 112 and the inner door magnetic 124. Under the magnetic attraction, the inner door 120 moves relative to the outer door 110 in a direction away from the opening of the cavity 200 until it is fixed to the outer door shell 111, thereby causing the inner door 120 to detach from the cavity 200 and releasing the seal and isolation of the opening of the cavity 200.
[0040] The drive unit is connected to the outer door shell 111 and is used to drive the outer door 110 and the inner door 120, which moves synchronously with the outer door 110, to move along a first direction. The first direction is perpendicular to the direction of movement of the inner door 120 relative to the outer door 110. For ease of understanding, the first direction is referred to as the axial direction of the cavity 200, that is, the vertical direction (or the up-down direction); and the direction of movement of the inner door 120 relative to the outer door 110 is referred to as the front-back direction, as an example. In some application scenarios, when the valve device switches from the closed state to the open state, the gas pressure in the airbag 114 is gradually released, and the inner door panel 121 moves forward toward the outer door shell 111 and then the driving component drives the outer door 110 plate and the inner door panel 121 to move downward. When the valve device switches from the open state to the closed state, the driving component drives the outer door 110 plate and the inner door panel 121 to move upward, and gas is introduced into the airbag 114. As the airbag 114 gradually expands, the inner door 120 overcomes the magnetic attraction and moves relative to the outer door 110 in the direction toward the opening of the cavity 200 until the inner door 120 presses against the first sealing member 210 set at the opening of the cavity 200.
[0041] The movement of the inner door 120 relative to the outer door 110 is used to seal and release the seal of the cavity 200 opening. The driving component drives the outer door 110 and the inner door 120 as a whole to move along a first direction, moving the valve device to an open or closed position. Specifically, the valve device being in the open position when the inner door 120 releases the seal corresponds to the open state, and the valve device being in the closed position when the inner door 120 seals corresponds to the closed state. Since the movement of the inner door 120 relative to the outer door 110 and the overall movement of the valve device occur in two mutually perpendicular directions, the sealing action and the overall movement are independent of each other, which helps improve the movement stability and sealing reliability of the valve device.
[0042] The driving component can be a cylinder 131, an electric push rod, a lead screw drive mechanism, a linear motor, or other driving mechanisms capable of providing linear driving force; this application does not limit this. The driving component drives the outer door 110 to move upwards, switching the valve device between the open and closed positions. When the valve device moves to the closed position, the airbag 114 pushes the inner door 120 to complete the sealing; when opening is required, the pressure inside the airbag 114 is first reduced to release the seal of the inner door 120, and then the driving component drives the valve device to move downwards, thereby completing the opening process.
[0043] Optionally, the driving component is preferably a cylinder 131, which supplies air to the airbag 114 through a first gas passage within the outer door housing 111 to simplify the air path structure. In other embodiments, the driving component may also be other linear drive mechanisms capable of achieving the same driving function.
[0044] The position switching of the inner door 120 is accomplished by the joint action of the airbag 114 and the magnetic attraction structure, while the overall position switching of the valve device is accomplished by the drive component. The two are independent of each other, which gives the valve device good sealing performance, movement stability and high reliability.
[0045] In the valve device provided in this application, the inner door 120 is disposed on the side of the outer door 110 facing the opening of the cavity 200. The movement of the inner door 120 relative to the outer door 110 is achieved through the cooperation of the airbag 114 and the magnetic attractor. When the airbag 114 is in the ventilated state, the airbag 114 generates a pushing force to push the inner door 120 toward the opening of the cavity 200, thereby pressing the seal at the opening of the cavity 200 and sealing the cavity 200. When the pressure inside the airbag 114 drops below the preset pressure, the inner door 120 returns and is fixed to the outer door 110 under the magnetic attraction between the outer door magnetic attractor 112 and the inner door magnetic attractor 124, thereby releasing the seal. At the same time, the driving member drives the outer door 110 and the inner door 120 as a whole to move in a first direction perpendicular to the relative movement direction of the inner door 120, thereby realizing the opening or closing of the valve device as a whole. By separating the sealing action of the inner door 120 from the overall movement of the valve device, the sealing process and the opening and closing process of the valve device are made independent of each other, avoiding mutual interference between the two. This is beneficial to improving the movement stability and sealing reliability of the valve device. The sealing pressure can be adjusted by adjusting the pressure of the airbag 114. Moreover, the structure is relatively simple, the size is small, and the maintenance is convenient.
[0046] In some embodiments, a first gas channel is provided inside the outer door shell 111, and an airbag 114 mounting hole is provided in the outer door shell 111, and the airbag 114 mounting hole communicates with the first gas channel. The airbag 114 is installed in the airbag 114 mounting hole, and the airbag 114 and the outer door shell 111 surround to form an inflation cavity, which communicates with the first gas channel.
[0047] The first gas passage is used to communicate with an external gas supply device or cylinder 131 to deliver gas to the airbag 114. The first gas passage can be formed inside the outer door shell 111 by drilling, milling or other processing methods, and its specific orientation can be set according to the structure of the outer door shell 111. This embodiment does not limit this.
[0048] The outer door shell 111 is provided with an airbag 114 mounting hole, which communicates with the first gas channel. The airbag 114 is installed in the airbag 114 mounting hole, and the airbag 114 and the hole wall together form an inflation chamber. The first gas channel introduces gas into the inflation chamber, increasing the gas pressure inside the chamber, which in turn pushes the airbag 114 to inflate towards the inner door 120, thereby applying a pushing force to the inner door 120. The airbag 114 mounting hole can be a blind hole or a through hole.
[0049] Optionally, the edge of the airbag 114 is sealed to the mounting hole of the airbag 114 to prevent gas leakage and improve inflation efficiency and sealing reliability. The volume of the inflation chamber and the size of the airbag 114 can be designed according to the required pushing force of the inner door 120 to meet the usage requirements of valve devices of different specifications.
[0050] By providing a first gas channel within the outer door housing 111 and connecting the mounting hole of the airbag 114 to this first gas channel, an external gas source can be directly introduced into the inflation chamber formed by the airbag 114 and the outer door housing 111. This allows the airbag 114 to expand stably under pressure and provide a pushing force to the inner door 120, eliminating the need for an additional air chamber structure and resulting in a more compact structure. Furthermore, utilizing the mounting hole of the airbag 114 as the mounting and positioning structure improves the stability of the airbag 114 installation and the sealing of the gas path, thereby ensuring the stability of the airbag 114's output thrust and enhancing the sealing reliability of the valve device.
[0051] In some examples, there are at least two airbag 114 mounting holes, and the number of airbags 114 is the same as the number of airbag 114 mounting holes; wherein at least two airbag 114 mounting holes are spaced apart along the length of the inner door panel 121.
[0052] Each airbag 114 mounting hole is connected to the first gas channel. One airbag 114 is installed within each airbag 114 mounting hole. At least two airbag 114 mounting holes are spaced apart along the length of the inner door panel 121, and correspondingly, at least two airbags 114 are also spaced apart along the length of the inner door panel 121. When the first gas channel supplies air to each inflation chamber, each airbag 114 inflates substantially simultaneously and acts on different positions along the length of the inner door panel 121, causing the inner door panel 121 as a whole to move towards the opening of the cavity 200.
[0053] Optionally, the two airbags 114 are symmetrically arranged along the length of the inner door panel 121, so that the pushing force generated by the two airbags 114 acts on both sides of the inner door panel 121 respectively. This makes the force on the inner door panel 121 more uniform, reduces the tilt and local deformation of the inner door panel 121 during movement, improves the uniformity of force and sealing reliability when the inner door panel 121 presses against the sealing element, and helps to improve the movement stability of the valve device during opening and closing. The two airbags 114 can be symmetrical about the vertical centerline of the outer door shell 111.
[0054] For example, two airbag 114 mounting holes are symmetrically arranged on both sides of the inner door panel 121 along the length of the inner door panel 121, so that the pushing force generated by each airbag 114 acts evenly on the inner door panel 121. In other examples, the number of airbag 114 mounting holes may be three, four or more, and they may be spaced apart according to the size of the inner door panel 121 and the force requirements. This application does not limit this.
[0055] By setting at least two airbags 114 and arranging them at intervals along the length of the inner door panel 121, multiple airbags 114 can apply pushing force to different positions of the inner door panel 121, thereby making the force on the inner door panel 121 more uniform and reducing local deformation or tilting caused by single-point force. This helps to improve the uniformity of force and sealing reliability when the inner door panel 121 presses against the sealing element. At the same time, the multiple airbags 114 provide pushing force together, which can improve the support stability of the inner door panel 121 and make the movement of the inner door panel 121 more smooth during opening and closing.
[0056] In some embodiments, the outer door 110 further includes an outer door magnetic chuck fixing plate 113, at least a portion of the outer door magnetic chuck 112 is sandwiched between the outer door magnetic chuck fixing plate 113 and the outer door shell 111, and the outer door magnetic chuck fixing plate 113 is fastened to the outer door shell 111.
[0057] The outer door magnetic clasp 112 is disposed on the side of the outer door shell 111 facing the inner door 120, and at least a portion of the outer door magnetic clasp 112 is clamped between the outer door magnetic clasp fixing plate 113 and the outer door shell 111.
[0058] For example, the outer door magnetic clasp 112 includes a magnetic clasp main body and a magnetic clasp fixing part disposed at the edge of the magnetic clasp main body. The thickness of the magnetic clasp fixing part is less than the thickness of the magnetic clasp main body. A portion of the magnetic clasp main body can be located in the clearance hole of the outer door magnetic clasp fixing plate 113, and the magnetic clasp fixing part is clamped between the outer door magnetic clasp fixing plate 113 and the outer door shell 111. Optionally, the surface of the magnetic clasp main body facing the inner door panel 121 can be flush with the surface of the outer door magnetic clasp fixing plate 113 facing the inner door panel 121.
[0059] Alternatively, the outer door magnetic clasp 112 may be flat, and the inner door magnetic clasp 124 may be located in the clearance hole of the outer door magnetic clasp fixing plate 113, so that the inner door magnetic clasp 124 may contact the outer door magnetic clasp 112.
[0060] The outer door magnetic chuck fixing plate 113 is fixedly connected to the outer door shell 111 by fasteners, thereby reliably fixing the outer door magnetic chuck 112 to the outer door shell 111. Optionally, the outer door magnetic chuck fixing plate 113 is connected to the outer door shell 111 by screws, so that the outer door magnetic chuck 112 is kept in a fixed position under clamping action. The outer door magnetic chuck fixing plate 113 can be provided with corresponding clearance structures or pressing structures according to the shape of the outer door magnetic chuck 112 to improve the positioning effect of the outer door magnetic chuck 112.
[0061] During assembly, after placing the outer door magnetic connector 112 in the predetermined installation position, the outer door magnetic connector fixing plate 113 is then securely connected to the outer door shell 111, thus completing the installation of the outer door magnetic connector 112. When it is necessary to replace the outer door magnetic connector 112, only the outer door magnetic connector fixing plate 113 needs to be removed to complete the disassembly and assembly, making assembly and maintenance relatively convenient.
[0062] By setting an outer door magnetic suction fixing plate 113 and clamping at least part of the outer door magnetic suction 112 between the outer door magnetic suction fixing plate 113 and the outer door shell 111, the outer door magnetic suction 112 can be reliably fixed to the outer door shell 111, reducing the possibility of the outer door magnetic suction 112 becoming loose or shifting position during repeated opening and closing of the valve device. This helps maintain the relative position between the outer door magnetic suction 112 and the inner door magnetic suction 124, improving the stability of the magnetic attraction. At the same time, it facilitates the assembly, disassembly, and replacement of the outer door magnetic suction 112, improving maintenance convenience.
[0063] In other embodiments, the outer door magnetic connector 112 can also be fixedly connected to the outer door shell 111 by fastening, bonding, or welding.
[0064] In some embodiments, there are multiple outer door magnetic suction members 112; the number of inner door magnetic suction members 124 is the same as the number of outer door magnetic suction members 112, and each outer door magnetic suction member 112 and the corresponding inner door magnetic suction member 124 cooperate with each other to form multiple magnetic suction units. At least two outer door magnetic suction members 112 are distributed at intervals along the length direction of the inner door panel 121, and correspondingly, at least two inner door magnetic suction members 124 are arranged along the length direction of the inner door panel 121.
[0065] Optionally, at least two magnetic suction units are symmetrically arranged along the length of the inner door panel 121, so that the inner door 120 can return to the outer door 110 more smoothly after the seal is released, reducing the deflection caused by uneven force and improving the stability and reliability of the cooperation between the inner door 120 and the outer door 110.
[0066] For example, there are two outer door magnetic suction units 112, which are symmetrically arranged on both sides of the inner door panel 121 along its length. Correspondingly, two inner door magnetic suction units 124 are respectively arranged with the two outer door magnetic suction units 112. When the airbag 114 is depressurized, the two magnetic suction units act simultaneously on both sides of the inner door 120, causing the inner door 120 to move away from the opening of the cavity 200 and be re-fixed to the outer door 110.
[0067] In other embodiments, the number of outer door magnetic connectors 112 and inner door magnetic connectors 124 may be set to three, four or more depending on the size of the inner door panel 121 and the magnetic attraction requirements, and there is no limitation thereto.
[0068] By setting multiple outer door magnetic suction components 112 and corresponding multiple inner door magnetic suction components 124, and by arranging at least two outer door magnetic suction components 112 at intervals along the length of the inner door panel 121, the magnetic attraction can be distributed at multiple positions of the inner door panel 121, thereby improving the stability of the magnetic connection between the inner door 120 and the outer door 110, reducing the possibility of the inner door 120 tilting, shifting, or partially lifting during movement, which is conducive to the smooth movement of the inner door 120 relative to the outer door 110 and improves the movement stability of the valve device during opening and closing.
[0069] In some examples, at least two of the outer door magnetic clasps 112 are located on opposite sides of the airbag 114.
[0070] For example, the outer door 110 is provided with two outer door magnetic closures 112 and two corresponding inner door magnetic closures 124. The two outer door magnetic closures 112 are respectively disposed on opposite sides of the airbag 114, with the airbag 114 located between the two outer door magnetic closures 112. Correspondingly, the two inner door magnetic closures 124 are respectively disposed opposite to the corresponding outer door magnetic closures 112 to form two magnetic closure units.
[0071] When the airbag 114 is inflated, it is positioned between the two outer door magnetic closures 112 and applies a pushing force toward the inner door 120, so that the pushing force acts on the area between the two magnetic closure units. As the pushing force generated by the airbag 114 increases, the inner door 120 overcomes the magnetic attraction of the two magnetic closure units and moves in the direction toward the opening of the cavity 200.
[0072] After the airbag 114 is depressurized, the two magnetic units are located on both sides of the airbag 114, and at the same time apply a magnetic attraction to the inner door 120, causing the inner door 120 to move back to a position close to the outer door 110 and be fixed to the outer door 110.
[0073] Since the airbag 114 is located between the two magnetic suction components, when the airbag 114 expands, the pushing force is applied along the middle of the inner door 120, and the two magnetic suction components are located on both sides of the pushing force, so that the force on the inner door 120 is more balanced when it opens, reducing the possibility of the inner door 120 swaying or getting stuck; when returning to its original position, the magnetic suction components on both sides simultaneously attract the inner door 120, which helps to maintain the relative position accuracy between the inner door 120 and the outer door 110 and improves the long-term stability of the valve device.
[0074] By distributing at least two outer door magnetic suction units 112 on opposite sides of the airbag 114, the pushing force generated by the airbag 114 is distributed among multiple magnetic suction units. This allows the pushing force to act more evenly on the inner door 120, reducing tilting or displacement of the inner door 120 caused by misalignment of the pushing position. Simultaneously, the multiple magnetic suction units distributed on both sides of the airbag 114 can act on both sides of the inner door 120 after the airbag 114 is depressurized, enabling the inner door 120 to return to its original position more smoothly, improving the stability of the inner door 120's movement and the reliability of the fit between the inner door 120 and the outer door 110.
[0075] In some examples, the outer door magnetic connector 112 is a magnet, and the inner door magnetic connector 124 is a magnet mating block. The magnet mating block is made of a strongly magnetic metal material and is fixed to the inner door panel 121 with screws. In other examples, the outer door magnetic connector 112 is a magnet mating block, and the inner door magnetic connector 124 is a magnet; the inner door magnetic connector 124 is fixed to the inner door panel 121 by a fixing block.
[0076] In some embodiments, the valve device further includes an elastic element connected between the outer door housing 111 and the inner door panel 121 to maintain the connection between the outer door 110 and the inner door 120 and to allow the inner door 120 to move relative to the outer door 110. When the pressure inside the airbag 114 is lower than a preset pressure, the elastic element cooperates with the magnetic attraction between the outer door magnetic member 112 and the inner door magnetic member 124 to move the inner door 120 in a direction away from the opening of the cavity 200.
[0077] When the airbag 114 is inflated, it generates a pushing force that acts on the inner door 120, causing the inner door 120 to overcome the magnetic attraction between the outer door magnetic 112 and the inner door magnetic 124 and move in the direction toward the opening of the cavity 200 to complete the sealing of the opening of the cavity 200.
[0078] When the pressure inside the airbag 114 drops below the preset pressure, the pushing force of the airbag 114 on the inner door 120 decreases, and the magnetic attraction between the outer door magnetic member 112 and the inner door magnetic member 124 is re-established. At this time, the elastic member, under the action of the restoring force, cooperates with the magnetic attraction to make the inner door 120 move away from the opening of the cavity 200 and gradually approach the outer door 110 until it returns to its initial position.
[0079] The elastic element always connects the outer door 110 and the inner door 120 during the movement of the inner door 120, so that the inner door 120 maintains stable guidance during opening and closing, and ensures that the inner door 120 can move as a whole with the outer door 110.
[0080] By providing an elastic element between the outer door shell 111 and the inner door panel 121, and cooperating with the magnetic attraction between the elastic element and the outer door magnetic attraction element 112 and the inner door magnetic attraction element 124, when the airbag 114 is depressurized, the elastic element can assist the inner door 120 to move towards the outer door 110, while maintaining the connection between the inner door 120 and the outer door 110. This makes the return process of the inner door 120 smoother and reduces the possibility of the inner door 120 shaking, shifting, or getting stuck. At the same time, the elastic element can provide elastic support during the movement of the inner door 120, improving the stability of the cooperation between the inner door 120 and the outer door 110, thereby improving the long-term reliability of the valve device.
[0081] For example, the outer door 110 also includes an outer door spring clip fixing block 116, and the inner door 120 also includes an inner door spring clip fixing block 123. The elastic element includes a spring clip 122, one end of which is clamped between the outer door spring clip fixing block 116 and the outer door shell 111, and the outer door spring clip fixing block 116 is fastened to the outer door shell 111. The other end of the spring clip 122 is clamped between the inner door spring clip fixing block 123 and the inner door panel 121, and the inner door spring clip fixing block 123 is fastened to the inner door panel 121.
[0082] For example, the spring clip 122 can be in the shape of a rectangular plate, and the length direction of the spring clip 122 is perpendicular to the length direction of the inner door panel 121. The upper end of the spring clip 122 is sandwiched between the outer door spring clip fixing block 116 and the outer door shell 111. A screw passes through the outer door spring clip fixing block 116 and the upper end of the spring clip 122 and is threadedly connected to the outer door shell 111. Alternatively, a screw passes through the outer door shell 111 and the upper end of the spring clip 122 and is threadedly connected to the outer door spring clip fixing block 116, thereby reliably fixing the upper end of the spring clip 122 to the outer door shell 111.
[0083] The lower end of the spring clip 122 is clamped between the inner door spring clip fixing block 123 and the inner door panel 121. The screw passes through the inner door spring clip fixing block 123 and the lower end of the spring clip 122 and is threadedly connected to the inner door panel 121. Alternatively, the screw passes through the inner door panel 121 and the lower end of the spring clip 122 and is threadedly connected to the inner door spring clip fixing block 123, thereby reliably fixing the lower end of the spring clip 122 to the inner door panel 121.
[0084] The spring piece 122 is connected between the outer door shell 111 and the inner door panel 121, which can maintain the connection between the outer door 110 and the inner door 120, and also allow the inner door panel 121 to move relative to the outer door shell 111.
[0085] Optionally, the spring sheet 122 is made of a metal material with high tensile strength, elastic limit and fatigue resistance, such as spring steel, stainless steel spring sheet 122 or other elastic metal materials, to ensure that the spring sheet 122 still has good elastic recovery ability during long-term repeated deformation.
[0086] When the airbag 114 inflates, the inner door panel 121 moves relative to the outer door shell 111 toward the opening of the cavity 200 under the push of the airbag 114, and the spring piece 122 undergoes elastic deformation. When the pressure inside the airbag 114 drops below the preset pressure, the spring piece 122, under the action of the restoring force, cooperates with the magnetic attraction between the outer door magnetic 112 and the inner door magnetic 124 to make the inner door panel 121 move away from the opening of the cavity 200 and return to its initial position.
[0087] By setting an outer door spring clip fixing block 116 and an inner door spring clip fixing block 123, and using the fixing blocks to fix both ends of the spring clip 122 respectively, the spring clip 122 can reliably connect the outer door shell 111 and the inner door panel 121, allowing the inner door 120 to move relative to the outer door 110 while ensuring connection strength. The fixing block clamping installation structure helps to improve the firmness of the spring clip 122 installation and reduces the possibility of the spring clip 122 loosening or falling off during long-term reciprocating motion. At the same time, when the airbag 114 is depressurized, the spring clip 122 can provide elastic restoring force, and with the magnetic attraction, the inner door 120 can be smoothly returned to its original position, thereby improving the stability of the valve device movement and the reliability of long-term operation; when the spring clip 122 is damaged, it can be replaced simply by removing the fixing block, making maintenance relatively convenient.
[0088] In other embodiments, the elastic element may also include a spring, the extension direction of which is parallel to the movement direction of the inner door panel 121 relative to the outer door shell 111, one end of the spring being fixedly connected to the outer door shell 111, and the other end of the spring being fixedly connected to the inner door panel 121. Alternatively, the elastic element may also include a rubber post, one end of which is fixedly connected to the outer door shell 111, and the other end of which is fixedly connected to the inner door panel 121.
[0089] In some examples, there are multiple elastic elements. At least two elastic elements are spaced apart along the length of the inner door panel 121. One of the elastic elements is located between the outer door magnetic closure 112 and the airbag 114. For example, at least two elastic elements are respectively located between the corresponding outer door magnetic closure 112 and the airbag 114.
[0090] Optionally, there are two elastic elements, which are symmetrically arranged along the length of the inner door panel 121 and located between the corresponding outer door magnetic closure 112 and airbag 114. The two elastic elements are respectively connected to both sides of the inner door panel 121 along its length, so that the inner door panel 121 remains stably connected during its movement relative to the outer door shell 111.
[0091] When the airbag 114 inflates, it is positioned between the two elastic elements, applying a pushing force to the center of the inner door panel 121. The two elastic elements undergo elastic deformation to allow the inner door panel 121 to move toward the opening of the cavity 200. When the pressure inside the airbag 114 decreases below the preset pressure, the two elastic elements, under the action of restoring force, cooperate with the magnetic attraction between the outer door magnetic closure 112 and the inner door magnetic closure 124 to smoothly return the inner door panel 121 to a position close to the outer door shell 111.
[0092] By setting multiple elastic elements and having at least two elastic elements spaced apart along the length of the inner door panel 121, the elastic support is distributed at multiple positions of the inner door panel 121, which helps to improve the stability of the connection between the inner door panel 121 and the outer door shell 111 and reduces the possibility of the inner door panel 121 tilting or shaking during reciprocating motion.
[0093] Furthermore, the elastic element is placed between the corresponding outer door magnetic suction element 112 and the airbag 114, so that the pushing force generated by the airbag 114 is located between multiple elastic elements. The elastic elements are located on both sides of the pushing area, which can provide more balanced elastic support and guidance for the inner door panel 121, so that the inner door panel 121 is subjected to more uniform force and moves more smoothly during opening and closing, thereby improving the movement stability and sealing reliability of the valve device.
[0094] In some examples, two airbags 114 are installed in the middle of the inner door panel 121, so that the pushing force mainly acts on the middle area of the inner door panel 121; two outer door magnetic closures 112 are located on both sides of the airbags 114, providing magnetic attraction to both sides of the inner door panel 121; two spring clips 122 are located between the corresponding outer door magnetic closures 112 and the airbags 114, providing elastic connection and support to both sides of the inner door panel 121.
[0095] Two airbags 114 are symmetrically arranged along the length of the inner door panel 121. Two outer door magnetic closures 112 are symmetrically arranged along the length of the inner door panel 121. Two spring clips 122 are symmetrically arranged along the length of the inner door panel 121. This creates a symmetrical force distribution layout, making the force on the inner door panel 121 more balanced during opening and closing, reducing the possibility of tilting, swaying, or local deformation of the inner door panel 121, and improving the stability of the inner door panel 121's movement.
[0096] Since the pushing force acts on the middle of the inner door panel 121, while the magnetic attraction and elastic support act on both sides of the inner door panel 121 respectively, the force on the inner door panel 121 along the direction of movement is more balanced. This can suppress the inner door panel 121 from rotating around itself, improve the consistency of the inner door panel 121's movement posture, reduce the possibility of the inner door panel 121 deviating, jamming, or changing its posture during movement relative to the outer door 110, improve the movement reliability during valve opening and closing, and thus enable the inner door panel 121 to maintain a better planar posture during movement. This allows the inner door panel 121 to more evenly press the sealing element, thereby improving the valve's sealing reliability and reducing the risk of leakage caused by insufficient local sealing.
[0097] In some embodiments, one of the inner door panel 121 and the outer door shell 111 is provided with at least one guide post, and the other is provided with a guide hole that cooperates with the guide post, so as to guide the inner door panel 121 to move relative to the outer door shell 111 in the front-back direction.
[0098] For example, the inner door panel 121 has multiple guide posts on the side facing the outer door shell 111, with the axial direction of the guide posts parallel to the direction of movement of the inner door panel 121 relative to the outer door shell 111, and the outer door shell 111 has guide holes that mate with the guide posts. Alternatively, the outer door shell 111 has multiple guide posts on the side facing the inner door panel 121, with the axial direction of the guide posts parallel to the direction of movement of the inner door panel 121 relative to the outer door shell 111, and the inner door panel 121 has guide holes that mate with the guide posts.
[0099] In some embodiments, the outer door 110 has two ends spaced apart along its length. A drive member is located at one end of the outer door 110.
[0100] The driving force output by the drive unit can directly act on the outer door 110 to drive the outer door 110 and the inner door 120 to move together in the first direction, thereby switching the valve device between the open and closed positions.
[0101] For example, the drive unit is disposed on one side of the cavity 200 and connected to one end of the outer door shell 111, thereby positioning the drive unit on one side of the opening of the cavity 200, while the main body of the outer door 110 is disposed corresponding to the opening of the cavity 200. After the valve device is opened, the outer door 110 moves as a whole to the side of the opening of the cavity 200, keeping the opening of the cavity 200 unobstructed, and ensuring that the bottom of the outer door 110 is unobstructed, facilitating equipment maintenance personnel to access the equipment from below for maintenance, thus improving the convenience of equipment maintenance.
[0102] In some embodiments, the valve device further includes a cylinder connecting block 132, which is fixedly connected to the outer door housing 111; the cylinder connecting block 132 is provided with a second gas passage, which communicates with the first gas passage. The driving component includes a cylinder 131, and the piston rod of the cylinder 131 is fixedly connected to the cylinder connecting block 132.
[0103] A second gas passage is provided inside the cylinder connecting block 132, which is connected to a first gas passage provided inside the outer door shell 111 to form a connected gas supply path. The second gas passage is used to connect to a gas source, deliver gas to the first gas passage, and further deliver it to the airbag 114 to realize the inflation and depressurization of the airbag 114.
[0104] The driving component includes a cylinder 131, and the piston rod of the cylinder 131 is fixedly connected to the cylinder connecting block 132. When the cylinder 131 is activated, the piston rod drives the cylinder connecting block 132 to move, which in turn drives the outer door shell 111 and the inner door 120 to move as a whole in the first direction, thereby realizing the switching of the valve device between the open position and the closed position.
[0105] Optionally, the piston rod can be provided with a third gas passage, which communicates with the second gas passage and also with the ventilation space of the cylinder. The third gas passage is equipped with a control valve to control the opening and closing of the ventilation space between the third gas passage and the cylinder. This eliminates the need for a separate gas source for the airbag 114, simplifying the structure of the valve device.
[0106] Optionally, a second seal is provided between the cylinder connecting block 132 and the outer door housing 111 to seal the connection between the second gas passage and the first gas passage. A third seal is provided between the cylinder connecting block 132 and the piston rod to seal the connection between the second gas passage and the third gas passage.
[0107] By setting up a cylinder connecting block 132 and setting up a second gas channel that communicates with the first gas channel in the cylinder connecting block 132, the cylinder connecting block 132 can simultaneously realize the mechanical connection between the outer door shell 111 and the cylinder 131 and the gas delivery function, thereby simplifying the structure of the valve device and making the overall structure of the valve device more compact.
[0108] In some embodiments, the valve device further includes a guide rail 134 and a guide rail slider 133, wherein the guide rail slider 133 is connected to the cylinder connecting block 132, and the guide rail 134 is used to connect to the cavity 200. The guide rail 134 extends along a first direction. The guide rail slider 133 slides relative to the guide rail 134 along the first direction.
[0109] The guide rail 134 cooperates with the guide rail slider 133 to guide and support the movement of the outer door 110, so that the outer door 110 moves smoothly along the first direction under the drive of the driving component.
[0110] When cylinder 131 is activated, the piston rod drives cylinder connecting block 132 to move, and guide rail slider 133 slides along the extension direction of guide rail 134, thereby guiding outer door shell 111 and inner door 120 to move in the first direction.
[0111] By setting the guide rail 134 and the guide rail slider 133, and making the guide rail slider 133 slide relative to the guide rail 134, the movement trajectory of the outer door 110 is guided and constrained, so that the outer door 110 can move stably in the first direction, reducing the possibility of the outer door 110 deviating or shaking during the movement, and improving the smoothness and positioning accuracy of the movement of the outer door 110.
[0112] In other embodiments, the guide rail 134 can be fixed to the cylinder connecting block 132, and the guide rail slider 133 can be fixed to the cavity 200, as long as the relative sliding between the guide rail 134 and the guide rail slider 133 can be achieved.
[0113] In some embodiments, the valve device further includes: a guide block 135 for guiding the outer door shell 111 to move relative to the cavity 200 in a first direction to limit the outer door shell 111 from deviating from the first direction relative to the cavity 200; the guide block 135 and the guide rail slider 133 are respectively located on opposite sides of the cavity 200; at least a portion of the inner door panel 121 is located between the guide block 135 and the guide rail slider 133.
[0114] The guide block 135 cooperates with the outer door shell 111 and the cavity 200 to guide and limit the outer door shell 111.
[0115] The guide block 135 and the guide rail slider 133 are located on opposite sides of the cavity 200, and the inner door panel 121 is at least partially located between the guide block 135 and the guide rail slider 133. The guide rail slider 133 is located on one side of the outer door shell 111, providing guidance and support for the outer door shell 111; the guide block 135 is located on the other side of the outer door shell 111, limiting the movement of the outer door shell 111 away from the first direction.
[0116] When the driving component drives the outer door shell 111 to move in the first direction, the guide rail slider 133 slides along the guide rail 134, and the outer door shell 111, along with the guide block 135, slides relative to the cavity 200 or the outer door shell 111 slides relative to the guide block 135 fixed on one side of the cavity 200, so that the outer door shell 111 maintains a stable posture, thereby ensuring that the outer door shell 111 moves smoothly in the first direction.
[0117] By setting a guide block 135 on the opposite side of the guide rail slider 133, and positioning the guide block 135 and the guide rail slider 133 on opposite sides of the cavity 200, the guide rail slider 133 provides guidance and support, and the guide block 135 limits the movement of the outer door shell 111, so that the outer door shell 111 can maintain a stable posture during movement, reducing the possibility of the outer door shell 111 swaying, tilting or jamming, and improving the stability and positioning accuracy of the movement of the outer door shell 111.
[0118] This embodiment adopts a structure combining a single guide rail 134 and a guide block 135. The guide rail 134 undertakes the main guiding and bearing functions, while the guide block 135 restricts the outer door shell 111 from deviating from the direction of movement. While ensuring the stability of the movement of the outer door shell 111, the requirements for the installation accuracy of the guiding mechanism are reduced, the risk of movement jamming is reduced, and the reliability of the valve device is improved.
[0119] In some examples, the guide block 135 is provided with a guide groove; the outer door shell 111 is provided with a first guide protrusion 1111, which is fixed in the guide groove; the guide groove is also used for sliding connection with the second guide protrusion 201 provided in the cavity 200.
[0120] The guide grooves respectively mate with the first guide protrusion 1111 and the second guide protrusion 201, forming a guiding connection between the outer door shell 111 and the cavity 200. The outer door shell 111 is provided with the first guide protrusion 1111, which extends into the guide groove and is fixed in the guide groove by means of connection such as adhesive, welding, snap-fit, or fastening. The cavity 200 is provided with the second guide protrusion 201, which also extends into the guide groove and slides within it.
[0121] When the driving component drives the outer door shell 111 to move along the first direction, the outer door shell 111 moves together with the guide block 135. At the same time, the guide block 135 moves relative to the second guide protrusion 201, thereby restricting the outer door shell 111 from deviating from the first direction and maintaining the movement posture of the outer door shell 111 relative to the cavity 200.
[0122] Optionally, the cross-sectional shape of the guide groove can be designed as a rectangular groove, a dovetail groove, or other groove shape that can achieve the guiding function, depending on the guiding requirements. This application does not limit this.
[0123] This embodiment can not only provide stable constraints on the movement of the outer door shell 111 along the first direction, reducing the possibility of the outer door shell 111 swaying or deviating during the movement, thus improving the smoothness and positioning accuracy of the valve device movement, but also helps to simplify the guide structure and reduce the number of parts.
[0124] In some embodiments, an inner door receiving groove 1112 is provided on the side of the outer door shell 111 facing the opening of the cavity 200; when the pressure in the airbag 114 is lower than the preset pressure, under the action of the outer door magnetic suction member 112 and the inner door magnetic suction member 124, the inner door 120 moves in a direction away from the opening of the cavity 200 until it is at least partially received in the inner door receiving groove 1112.
[0125] The inner door receiving groove 1112 is formed by an inward recess from the outer door shell 111, and its shape is adapted to the outer shape of the inner door panel 121. The dimensions of the inner door receiving groove 1112 are adapted to the inner door panel 121 to accommodate at least a portion of the inner door panel 121. Thus, when the inner door panel 121 moves relative to the outer door shell 111, the groove wall of the inner door receiving groove 1112 can guide the inner door panel 121.
[0126] For example, when the pressure inside the airbag 114 drops below the preset pressure, the pushing force of the airbag 114 on the inner door panel 121 decreases, and the magnetic attraction between the outer door magnetic member 112 and the inner door magnetic member 124 is re-established. Under the combined action of the magnetic attraction and the elastic member (if provided), the inner door panel 121 moves in a direction away from the opening of the cavity 200 and gradually enters the inner door receiving groove 1112.
[0127] After the inner door panel 121 enters the inner door receiving groove 1112, the inner door panel 121 is at least partially embedded in the outer door shell 111, thereby maintaining the relative position between the inner door panel 121 and the outer door shell 111, and moving as a whole with the outer door shell 111 under the driving action of the cylinder 131.
[0128] The valve device provided in this embodiment has a simple structure, small size, small space occupation, lower processing difficulty, and low cost, making it convenient for maintenance personnel to maintain the internal structure of semiconductor equipment. Moreover, the arrangement of the airbag 114, magnetic suction component, and spring 122 makes the connection between the structures more robust. The expansion degree of the airbag 114 can be controlled according to the air pressure, realizing precise thrust control of the inner door 120, thereby accurately adjusting the opening and closing speed and sealing pressure of the valve, improving the operational stability and controllability of the equipment.
[0129] This embodiment also provides a semiconductor device, including: a cavity 200; and a valve device as described in any of the foregoing embodiments.
[0130] Other configurations of the valve device and semiconductor device in the above embodiments can be adopted from various technical solutions now and in the future known to those skilled in the art, and will not be described in detail here.
[0131] In the description of this specification, it should be understood that the terms "center," "length," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.
[0132] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, "multiple" means two or more, unless otherwise explicitly specified.
[0133] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.
[0134] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0135] The foregoing disclosure provides many different implementations or examples for carrying out different structures of this disclosure. To simplify the disclosure, specific examples of components and arrangements have been described above. Of course, these are merely examples and are not intended to limit the scope of this disclosure. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.
[0136] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this disclosure, and these should all be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.
Claims
1. A valve device for mounting to a cavity of a semiconductor device to open or close an opening of the cavity, characterized in that, The valve device includes: An outer door is used for sliding connection with the cavity of a semiconductor device; the outer door includes: an outer door shell, an airbag, and an outer door magnetic connector, wherein the airbag and the outer door magnetic connector are installed to the outer door shell; An inner door is located on the side of the outer door facing the opening of the cavity; the inner door includes an inner door panel and an inner door magnetic closure, the inner door magnetic closure being installed on the inner door panel; wherein, when the airbag is in the inflated state, the airbag generates a pushing force to make the inner door overcome the magnetic attraction between the outer door magnetic closure and the inner door magnetic closure, and push the inner door in the direction towards the opening of the cavity until the inner door closes the opening of the cavity; when the pressure inside the airbag is lower than a preset pressure, under the action of the outer door magnetic closure and the inner door magnetic closure, the inner door moves in the direction away from the opening of the cavity until it is fixed to the outer door shell; A driving component, connected to the outer door shell, is used to drive the outer door and the inner door to move along a first direction, the first direction being perpendicular to the direction in which the inner door moves relative to the outer door.
2. The valve device according to claim 1, characterized in that, The outer door shell is provided with a first gas channel, and the outer door shell is provided with an airbag mounting hole, and the airbag mounting hole is connected to the first gas channel. The airbag is installed in the airbag mounting hole, and the airbag and the outer door shell surround to form an inflation cavity.
3. The valve device according to claim 2, characterized in that, The airbag mounting hole has at least two, and the number of airbags is the same as the number of airbag mounting holes; At least two of the airbag mounting holes are spaced apart along the length of the inner door panel.
4. The valve device according to claim 2, characterized in that, The outer door also includes an outer door magnetic suction fixing plate, at least a portion of which is sandwiched between the outer door magnetic suction fixing plate and the outer door shell, and the outer door magnetic suction fixing plate is fastened to the outer door shell.
5. The valve device according to claim 1, characterized in that, The outer door magnetic connector has multiple components; the number of the inner door magnetic connector is the same as the number of the outer door magnetic connector. At least two of the outer door magnetic closures are spaced apart along the length of the inner door panel.
6. The valve device according to claim 5, characterized in that, At least two of the outer door magnetic closures are located on opposite sides of the airbag.
7. The valve device according to claim 1, characterized in that, The valve device further includes an elastic element connected between the outer door shell and the inner door panel.
8. The valve device according to claim 7, characterized in that, The outer door also includes an outer door spring clip fixing block, and the inner door also includes an inner door spring clip fixing block; The elastic element includes a spring sheet, one end of which is clamped between the outer door spring sheet fixing block and the outer door shell, the outer door spring sheet fixing block being fastened to the outer door shell, and the other end of which is clamped between the inner door spring sheet fixing block and the inner door panel, the inner door spring sheet fixing block being fastened to the inner door panel.
9. The valve device according to claim 7, characterized in that, The elastic element has multiple components; At least two of the elastic elements are distributed at intervals along the length direction of the inner door panel; One of the elastic elements is located between the outer door magnetic closure and the airbag.
10. The valve device according to claim 1, characterized in that, The outer door has two ends spaced apart along its length; The drive unit is located at one end of the outer door.
11. The valve device according to claim 2, characterized in that, The valve device further includes a cylinder connecting block, which is fixedly connected to the outer door shell; the cylinder connecting block is provided with a second gas passage, which is connected to the first gas passage. The driving component includes a cylinder, and the piston rod of the cylinder is fixedly connected to the cylinder connecting block.
12. The valve device according to claim 11, characterized in that, Also includes: A guide rail and a guide rail slider, wherein the guide rail slider is connected to the cylinder connecting block, and the guide rail is used to connect to the cavity; The guide rail slider slides relative to the guide rail along the first direction.
13. The valve device according to claim 12, characterized in that, Also includes: A guide block, extending along the first direction, is used to guide the outer door shell to move relative to the cavity along the first direction; The guide block and the guide rail slider are located on opposite sides of the cavity; At least a portion of the inner door panel is located between the guide block and the guide rail slider.
14. The valve device according to claim 13, characterized in that, The guide block is provided with a guide groove; The outer door shell is provided with a first guide protrusion, which is fixed in the guide groove; the guide groove is also used to slide with a second guide protrusion provided in the cavity.
15. The valve device according to claim 1, characterized in that, An inner door receiving groove is provided on the side of the outer door shell facing the opening of the cavity; When the pressure inside the airbag is lower than the preset pressure, under the action of the outer door magnetic suction member and the inner door magnetic suction member, the inner door moves in a direction away from the cavity opening until it is at least partially accommodated in the inner door receiving groove.
16. A semiconductor device, characterized in that, include: cavity; The valve device as described in any one of claims 1 to 15.