Image measurement device

Abstract

An image measuring device is provided. In a case where a measuring head is replaceable, the measuring head in an installed state can be positioned with high accuracy with respect to a base. The image measuring device includes: a measuring head (H) that houses an imaging section (15) and is detachably connected to an arm section (11); a connection section (400) that has a plurality of pairs of a receiving surface (411, 413) and a contact member (421, 423), one of which is provided to the arm section (11) and the other of which is provided to the measuring head (H), and that restricts a degree of freedom of the measuring head (H) with respect to the arm section (11) by contact of the plurality of pairs of the receiving surface (411, 413) and the contact member (421, 423); and a measurement control section (110A) that is communicably connected to the measuring head (H), identifies the connected measuring head (H), and controls measurement of a workpiece.

Description

Technical Field

[0001] This disclosure relates to an image measuring device. Background Technology

[0002] Image measuring devices use images generated by a camera unit capturing images of a workpiece to perform dimensional measurements of various parts. For example, the image measuring device in Patent Document 1 includes an adjustment unit for adjusting the focus of the camera unit, and can determine the height of the workpiece, with the light-transmitting plate as a reference, based on the control parameters of the adjustment unit when focusing on the workpiece and the control parameters of the adjustment unit when focusing on the light-transmitting plate used to mount the workpiece. Furthermore, the image measuring device in Patent Document 2 can acquire the brightness distribution of a newly generated image of the workpiece from the camera unit during operation, and determine measurement points on the newly generated workpiece image based on the position and brightness information of measurement points pre-stored in the storage unit.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent No. 7252019

[0006] Patent Document 2: Japanese Patent No. 7280810 Summary of the Invention

[0007] The problem the invention aims to solve

[0008] In addition, when the camera unit of an image measuring device is high-performance and high-functionality, sometimes the image measuring device becomes too large, making it difficult to ensure installation space, or the cost of implementing the image measuring device becomes too high, thus hindering its widespread adoption.

[0009] Therefore, it is possible to prepare in advance a high-performance measuring head that houses a high-performance and high-function camera unit, as well as a lower-performance and simplified measuring head, so that any measuring head can be mounted on the base according to the user's setup environment and budget.

[0010] However, if the measuring head is allowed to be easily installed and removed, the relative position and orientation of the measuring head and the base in the installed state may deviate from the design values. If the relative position and orientation of the measuring head and the base in the installed state are not predetermined to be as designed, it will adversely affect the measurement accuracy. Therefore, the positioning of the measuring head and the base becomes important.

[0011] This disclosure was made in view of this purpose, and its object is to enable the measuring head in the installed state to be positioned with high precision relative to the base, while allowing the measuring head to be replaced.

[0012] Solution for solving the problem

[0013] To achieve the above objectives, one aspect of the image measuring apparatus disclosed herein includes: a stage for placing a workpiece; a base to which the stage is movably connected; a camera unit disposed above the stage for capturing images of the workpiece placed on the stage and generating an image containing the workpiece image; a measuring head housing the camera unit and detachably connected to the base; a connecting part having multiple pairs of receiving surfaces and contact members, one of which is disposed on the base and the other on the measuring head, wherein the degrees of freedom of the measuring head relative to the base are constrained by the contact of the multiple pairs of receiving surfaces and contact members; a storage unit storing setting information including a measuring position or measuring item for the workpiece image, and measuring elements and measuring conditions corresponding to the measuring position or measuring item; and a measuring control unit communicatively connected to the measuring head, identifying the connected measuring head, and controlling the measuring of the workpiece based on the setting information stored in the storage unit.

[0014] According to this structure, for example, by pre-preparing multiple measuring heads with different camera units, it is possible to install measuring heads corresponding to the user's setup environment and budget onto the base for use. When installing the measuring head onto the base, the contact element contacts the receiving surface constituting the connecting part to connect the measuring head to the base. At this time, since there are multiple pairs of receiving surfaces and contact elements, multiple degrees of freedom of the measuring head relative to the base can be constrained. As a result, the measuring head in the installed state is positioned with high precision relative to the base.

[0015] The effects of the invention

[0016] As explained above, when the measuring head can be replaced, the measuring head in the installed state can be positioned with high precision relative to the base. Attached Figure Description

[0017] Figure 1 This is a diagram showing the outline structure of the image measuring apparatus according to this embodiment.

[0018] Figure 2 This is a block diagram of an image measuring device.

[0019] Figure 3 This is a diagram illustrating the automated functions of the image measuring device.

[0020] Figure 4 This is a flowchart illustrating an example of the processing performed by the image measuring device.

[0021] Figure 5 This is a flowchart illustrating the operation of the image measuring device.

[0022] Figure 6This is a schematic side view showing the connection structure of the measuring head.

[0023] Figure 7 This is a schematic diagram obtained by observing the connection structure of the measuring head from the inside.

[0024] Figure 8 It is equivalent to the time before the measuring head is installed. Figure 6 The image.

[0025] Figure 9 It is equivalent to the time before the measuring head is installed. Figure 7 The image.

[0026] Figure 10 This is equivalent to the case where a damper is installed. Figure 8 The image.

[0027] Figure 11 This is equivalent to the case where a damper is installed. Figure 9 The image.

[0028] Figure 12 This is equivalent to the case where a pressing mechanism is installed. Figure 6 The image. Detailed Implementation

[0029] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Furthermore, the following description of preferred embodiments is merely illustrative and is not intended to limit the invention, its application, or its uses. For example, the relative sizes and positional relationships of the components shown in the figures are used to illustrate one embodiment and do not limit the invention.

[0030] Figure 1 This is a diagram showing the general structure of the image measuring device 1 according to an embodiment of the present invention. Figure 2 This is a block diagram schematically showing the structure of the image measuring device 1. The image measuring device 1 measures, for example, the dimensions of various workpieces W that are the objects of measurement.

[0031] like Figure 1 As shown, the image measuring device 1 includes a device main body 2, a personal computer 100, a display unit 101, a keyboard 103, and a mouse 104. A general-purpose personal computer equipped with computer programs (software) for performing the control and processing described later can be used as the personal computer 100.

[0032] The personal computer 100 includes a control unit 110 and a storage unit 120. The control unit 110 comprises a central processing unit, ROM, RAM, etc., as found in the personal computer 100. The storage unit 120 is connected to the control unit 110. The storage unit 120 may be, for example, an SSD (Solid State Drive) or a hard disk drive. The control unit 110 is connected to each piece of hardware and controls the operation of each piece of hardware, executing software functions according to computer programs stored in the storage unit 120. The control unit 110 executes software functions, thereby enabling... Figure 2 The measurement control unit 110A, drawing import unit 111, drawing receiving unit 112, measurement setting unit 113, matching unit 114, and display screen generation unit 115 are configured as shown. The measurement control unit 110A, drawing import unit 111, drawing receiving unit 112, measurement setting unit 113, matching unit 114, and display screen generation unit 115 can also be configured using a combination of software functions and hardware. Furthermore, a portion of the measurement control unit 110A, drawing import unit 111, drawing receiving unit 112, measurement setting unit 113, matching unit 114, and display screen generation unit 115 can be configured using a different processing unit than the control unit 110. In the RAM of the control unit 110, a loading module expands during the execution of a computer program to store temporary data generated during the execution of the computer program.

[0033] The display unit 101, for example, is composed of a liquid crystal display or an organic EL display, and is connected to the control unit 110. The control unit 110 controls the display unit 101 to display various user interface screens on the display unit 101.

[0034] Keyboard 103 and mouse 104 are typical examples of components used to operate control unit 110. When a user operates keyboard 103 and mouse 104, control unit 110 detects the operating status of keyboard 103 and mouse 104 and controls various parts according to the operating status of keyboard 103 and mouse 104. Components used to operate control unit 110 may also be touch panels capable of detecting user touch operations, various indicating devices, etc.

[0035] Furthermore, in the description of this embodiment, regarding the device body 2 of the image measuring device 1, the side facing the user in the intended access direction is referred to as the front side or near-front side, and the side facing the back is referred to as the back side or inner side. Additionally, the side on the left side when viewed from the user's perspective is referred to as the left side, and the side on the right side is referred to as the right side. If the definitions are consistent when viewed from the user's perspective, the front side can be referred to as the near-front side, and the back side can also be referred to as the inner side. These definitions are merely for ease of explanation and do not limit the actual direction of use.

[0036] like Figure 1 As shown, the main body 2 of the device includes a base portion (base) 10. The base portion 10 has an arm portion 11 extending upward from its inner side. A worktable 12, which serves as a mounting table for placing a workpiece W, is movably connected to the upper part of the base portion 10. The worktable 12 extends approximately horizontally. A light-transmitting plate 12a, which allows light to pass through, is provided near the center of the worktable 12. The workpiece W is placed on the upper surface of the light-transmitting plate 12a.

[0037] The worktable 12 with the light-transmitting plate 12a can pass through Figure 2 The table drive unit 12c shown drives in both the horizontal and vertical directions. The table drive unit 12c drives the table 12 in the left-right (X) direction, the depth (Y) direction, and the height (Z) direction. If the table drive unit 12c receives an instruction from the control unit 110 and is within the specified drive range, it drives the table 12 in the indicated direction by the indicated amount of movement. The table 21 can be moved by an electric actuator or the like, but it can also be moved manually by the user.

[0038] like Figure 2 As shown, the main body 2 of the device includes an illumination unit 13. The illumination unit 13 includes a direct illumination unit 13a and a transmissive illumination unit 13b. The transmissive illumination unit 13b is disposed below the light-transmitting plate 12a and is oriented to illuminate upwards. The light irradiated from the transmissive illumination unit 13b passes upwards through the light-transmitting plate 12a and illuminates the workpiece W placed on the upper surface of the light-transmitting plate 12a from below. In other words, the transmissive illumination unit 13b is a component that irradiates the workpiece W placed on the light-transmitting plate 12a with transmissive illumination light.

[0039] The incident illumination unit 13a is disposed above the light-transmitting plate 12a and is oriented to illuminate downwards. The light emanating from the incident illumination unit 13a illuminates the workpiece W placed on the light-transmitting plate 12a from above. In other words, the incident illumination unit 13a is a component that illuminates the workpiece W placed on the light-transmitting plate 12a with incident illumination light.

[0040] like Figure 2 As shown, the illumination unit 13 may also include an optical axis A formed to surround the imaging unit 15. Figure 1 The ring-shaped illumination section 13c (as shown) and the slit illumination section 13d that illuminates the workpiece W from the side are examples of such illumination sections.

[0041] An operation unit 14 is provided on the base 10. The operation unit 14 includes various buttons, switches, dials, etc., operated by the user. Among the buttons included in the operation unit 14, a measurement start button can be selected. The control unit 110 can also detect the operation status of the operation unit 14 and control each part according to the operation status of the operation unit 14.

[0042] The incident illumination unit 13a and the transmitted illumination unit 13b are controlled by the control unit 110. For example, when the control unit 110 detects that the measurement of workpiece W has started through the operation unit 14, it can turn on the incident illumination unit 13a or the transmitted illumination unit 13b to illuminate the workpiece with incident illumination light or transmitted illumination light.

[0043] like Figure 1 As shown, a camera unit 15 is provided on the main body 2 of the device, positioned above the worktable 12. The camera unit 15 is the part that captures an image of the workpiece W placed on the worktable 12 and generates an image containing the workpiece image. In the following description, the image containing the workpiece image will be referred to as the workpiece image.

[0044] As a typical example of the camera unit 15, one could cite a camera with imaging elements such as CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor). Figure 1 As shown, the optical axis A of the imaging unit 15 is set vertically downward, and the optical system 15a, including the light-receiving lens and the imaging lens, is coaxial with the optical axis A of the imaging unit 15. The optical system 15a is configured to be able to change the magnification.

[0045] Light illuminating the workpiece W from the incident illumination unit 13a and reflected by the workpiece W, and light illuminating the workpiece from the transmitted illumination unit 13b and passing through the light-transmitting plate 12a of the worktable 12, are incident on the imaging unit 15. Regarding the method for adjusting the focus performed by the optical system 15a, for example, methods can be used that adjust based on a position that maximizes the sharpness, contrast, and maximum brightness of the workpiece image, or methods can be used that equip a distance sensor and adjust based on the measurement signal from the distance sensor.

[0046] The camera unit 15 is connected to the control unit 110, and the workpiece image generated by the camera unit 15 is sent to the control unit 110 as image data. Furthermore, the control unit 110 can control the camera unit 15. For example, when the control unit 110 detects that the measurement operation of workpiece W has started via the operation unit 14, it causes the camera unit 15 to perform imaging processing while the incident illumination unit 13a or the transmitted illumination unit 13b is turned on and illuminated. As a result, the camera unit 15 generates a workpiece image, which is then sent to the control unit 110.

[0047] The control unit 110 can also generate a linked image, which is formed by linking multiple images, as a workpiece image. That is, the control unit 110 issues an instruction to the worktable drive unit 12c, thereby moving the worktable 12 in the horizontal direction and then using the camera unit 15 to capture images of other parts of the worktable 12. By linking multiple images obtained by repeating this process, a linked image can be generated.

[0048] In the control unit 110, the workpiece image sent from the camera unit 15 can be programmed into a user interface screen and displayed on the display unit 101 and the main display unit 16. This process is performed by the display screen generation unit 115. Hereinafter, various screens displayed on the display unit 101 and the main display unit 16 are generated by the display screen generation unit 115 and displayed by the display screen generation unit 115.

[0049] The main display unit 16 is composed of, for example, a liquid crystal display or an organic EL display. The control unit 110 can control the main display unit 16 so that various user interface screens are also displayed on the main display unit 16.

[0050] A measurement control unit 110A is provided in the control unit 110. The measurement control unit 110A extracts the edges (contours) of the workpiece W and generates an edge image by performing image processing such as edge extraction processing on the workpiece image sent from the camera unit 15. The measurement control unit 110A uses the generated edge image to measure the dimensions of each part of the workpiece W. As described later, the measurement locations can be pre-specified by the user. The measurement control unit 110A calculates the dimensions corresponding to the measurement locations determined by the user.

[0051] The main body 2 of the device also includes a top-view camera 17. The top-view camera 17 is positioned above the light-transmitting plate 12a and is used to capture images of the workpiece W placed on the light-transmitting plate 12a from a top-down perspective and generate a top-down image. The top-down image generated by the top-view camera 17 is sent to the control unit 110.

[0052] (Measurement setup)

[0053] The image measuring device 1 is equipped with automated functions that can almost automatically align the workpiece image with the drawing data, specify the measuring elements, adjust the camera unit, and adjust the lighting unit. Figure 3 An overview of the automation functions of the image measuring device 1 is shown. In steps SA1 and SA2, the user inputs the workpiece image and drawing data generated by the camera unit 15 into the image measuring device 1, respectively. In step SA2, CAD data, PDF data, image data, and paper drawings can all be input.

[0054] In step SA3, the image measuring device 1 imports inspection data based on the drawing data. At this time, it can also automatically determine the area of ​​the projection image containing a large amount of information related to the measurement from the drawing data and suggest the determined measurement location to the user (step SA4).

[0055] In step SA5, the image measuring device 1 aligns the workpiece image input in step SA1 with the drawing data input in step SA2. When selecting a measurement dimension in step SA6, in step SA7, measurement elements are generated simultaneously based on information related to the outline extracted from the drawing data; or in step SA8, the position of the measurement elements is suggested based on information related to the outline extracted from the drawing data, and measurement elements are generated sequentially based on the user's instructions regarding the suggested measurement element positions. In step SA9, the measurement conditions are adjusted for each measurement element, and in step SA10, the user can confirm the measurement results. At this point, in step SA11, the image measuring device 1 suggests other candidates for the measurement conditions; furthermore, in step SA12, the image measuring device 1 suggests readjusting the measurement conditions. Thus, the image measuring device 1 generates measurement data.

[0056] exist Figure 4 In the flowchart shown, firstly, the display screen generation unit 115 of the control unit 110 generates a main screen (not shown) and displays it on the display unit 101 and the main display unit 16. Step SB1 is the drawing data category selection step. The drawing data can be CAD data or non-CAD data. Non-CAD data is data containing information needed to create the measurement program, such as the design values ​​and tolerances of the workpiece being measured, and where the design values ​​(dimensions) and leader lines (lines used to annotate dimensions), such as PDFs and images, are not associated. However, raster and vector formats are not limited. Image data includes JPEG data, PNG data, TIFF data, and data obtained by scanning paper drawings.

[0057] In step SB1, the user can select the type of drawing data by operating, for example, a drawing data category selection button displayed on the main screen. That is, the control unit 110 includes a drawing import unit 111 and a drawing receiving unit 112. The drawing import unit 111 selectively imports drawing data containing workpiece shapes according to the user's import instruction. The drawing receiving unit 112 receives the drawing data containing workpiece shapes imported by the drawing import unit 111.

[0058] The drawing import unit 111 accepts the selection of "electronic file" or "paper drawing" as the category of the drawing data to be imported. After accepting the selection of the drawing data category in step SB1, the drawing import unit 111 imports the electronic file if the drawing data category is "electronic file". If the imported electronic file is CAD data, it proceeds to step SB2. The CAD data imported by the drawing import unit 111 is then processed by the drawing acceptance unit 112.

[0059] Furthermore, after the drawing import unit 111 accepts the selection of the drawing data type in step SB1, it imports the electronic file if the drawing data type is "electronic file". If the imported electronic file is vector data, it proceeds to step SB3. The vector data imported by the drawing import unit 111 is then processed by the drawing acceptance unit 112.

[0060] Furthermore, after the drawing import unit 111 accepts the selection of the drawing data type in step SB1, it imports the electronic file if the drawing data type is "electronic file". If the imported electronic file is raster data, it proceeds to step SB4. The raster data imported by the drawing import unit 111 is then accepted by the drawing acceptance unit 112.

[0061] If the drawing data category is "paper drawing", proceed to step SB5. When importing paper drawing data, proceed to step SB6, where the user places the paper drawing on the upper surface of the worktable 12. Then, proceed to step SB7, where the image measuring device 1 performs automatic drawing import processing. Specifically, when the user gives the import instruction after placing the paper drawing on the upper surface of the worktable 12, the control unit 110 captures an image of the paper drawing using the camera unit 15 and imports it as drawing data via the drawing import unit 111. Thus, in the case of paper drawings, the drawing import unit 111 can import the image obtained by capturing the paper drawing as drawing data.

[0062] When photographing paper drawings, if the paper drawing is larger than the field of view of the camera unit 15, the control unit 110 issues an instruction to the worktable drive unit 12c, thereby moving the worktable 12 horizontally and then photographing other parts of the paper drawing through the camera unit 15. By linking multiple images obtained by repeating this process, images of the desired range of the paper drawing can be automatically imported as drawing data.

[0063] When the projected image is larger than the field of view of the camera unit 15, the control unit 110 issues an instruction to the worktable drive unit 12c, thereby moving the worktable 12 horizontally and then capturing images of other parts of the projected image by the camera unit 15. By linking multiple images obtained through repeating this process, images of the area corresponding to the selected projected image from the paper drawing can be automatically imported as drawing data.

[0064] In step SB8, the user selects the import range from the CAD data processed in step SB2. Specifically, while observing the CAD data on the user interface screen displayed on the display unit 101, the user operates the mouse 104 and other means to specify the range so that the area to be dimensionally measured is the import range.

[0065] In step SB9, it is determined whether a scale (scaling value) has been read from the CAD data received in step SB2. Normally, CAD data contains scale information, but sometimes it may not be included for various reasons. Therefore, the measurement setting unit 113 of the control unit 110 determines whether scale information is included in the CAD data. If scale information is included in the CAD data, the measurement setting unit 113 determines "yes" in step SB9. If scale information is not included in the CAD data for various reasons, the measurement setting unit 113 determines "no" in step SB9.

[0066] If the determination in step SB9 is "No", proceed to step SB10. In step SB10, the measurement setting unit 113 acquires the dimensional information contained in the drawing data and estimates the drawing scale based on the acquired dimensional information. In the case of CAD data, dimensions are associated with lines used for dimensioning, so the drawing scale can be estimated based on the associated dimensions and lines used for dimensioning. In addition, the measurement setting unit 113 can also acquire the title block information of the CAD data and set the scale contained in the title block information as the drawing scale.

[0067] In step SB11, after receiving non-CAD data, the user selects the import range for the non-CAD data in the same way as in step SB8.

[0068] In step SB12, the measurement setting unit 113 performs vectorization on the range imported in step SB11 from the non-CAD data. By converting the raster data into vector data, it can be set into a form that can be recognized as a specified object such as a line, circle, or arc.

[0069] In the case of non-CAD data, even after vectorization, dimensions are not associated with dimension lines and other lines used for dimensioning, unlike in CAD data. Therefore, it is impossible to perform the same operations as in CAD data. Figure 4The scaling estimation is described in step SB10. Therefore, scaling candidates are calculated by matching the OCR information of dimensions obtained through OCR processing of the drawing data, the intersections of dimension lines and dimension auxiliary lines on the drawing, and the arrow information of the dimension lines. In the scaling estimation process, the corresponding dimensions and dimension lines are determined separately based on the positional relationships of multiple dimensions and multiple dimension lines. Scaling candidates are calculated based on the dimension values ​​from the dimension-based OCR information and the length of the dimension line corresponding to the dimension in the drawing.

[0070] In step SB13, the measurement setting unit 113 performs scaling estimation processing on the non-CAD data. In the scaling estimation processing, the measurement setting unit 113 acquires the dimensional information contained in the imported non-CAD data and estimates the scale of the drawing based on the acquired dimensional information.

[0071] Next, in step SB14, the user places the workpiece W on the upper surface of the worktable 12. The workpiece W placed on the upper surface of the worktable 12 is captured by the camera unit 15 and the overhead camera 17, and a real-time image is generated. The generated real-time image is displayed on the display unit 101, the main display unit 16, etc.

[0072] In step SB15, the camera unit 15 captures an image of the workpiece W placed on the upper surface of the worktable 12, thereby generating a workpiece image. The workpiece image is stored, for example, in a storage unit 120.

[0073] In step SB16, the matching unit 114 of the control unit 110 performs a matching process that matches the workpiece shape contained in the drawing data received by the drawing receiving unit 112 with the workpiece image contained in the workpiece image generated by the imaging unit 15. As an example of the matching process, the matching unit 114 performs a contour extraction process for the workpiece W based on the workpiece image obtained by the imaging unit 15 of the workpiece W illuminated by transmitted illumination light from the transmitted illumination unit 13b, and performs a pattern search using the contour of the workpiece W extracted by the contour extraction process, thereby enabling the workpiece shape contained in the drawing data to be matched with the workpiece image contained in the workpiece image generated by the imaging unit 15.

[0074] In step SB17, it is confirmed whether the workpiece shape contained in the drawing data and the workpiece image contained in the image generated by the camera unit 15 can be aligned. If they cannot be aligned, the matching unit 114 performs matching processing on the workpiece shape contained in the drawing data and the workpiece image contained in the image generated by the camera unit 15 based on the user's manual adjustment instructions for translation or rotation of the drawing data.

[0075] In step SB18, a procedure creation aid is executed to select measurement elements associated with the dimensions from information on dimensions and lines used for dimensioning, or to suggest measurement elements as measurement candidates.

[0076] For each measurement element, the measurement conditions for extracting each measurement element corresponding to each measurement position or measurement item specified by the measurement setting unit 113 are adjusted. The setting information, including the measurement position or measurement item for the workpiece image, the measurement element corresponding to the measurement position or measurement item, and the measurement conditions, is stored in the storage unit 120.

[0077] The measurement conditions include, for example, the lighting conditions of the lighting unit 13, the imaging conditions of the imaging unit 15, and the edge extraction conditions in the edge extraction processing performed by the measurement control unit 110A. The adjustment results include the lighting conditions of the lighting unit 13, the imaging conditions of the imaging unit 15, and the edge extraction conditions, which are stored in the storage unit 120, etc.

[0078] The lighting conditions of the lighting unit 13 include, for example, lighting type and lighting height. The lighting conditions of the lighting unit 13 include switching between incident lighting unit 13a, transmitted lighting unit 13b, and ring lighting unit 13c. Lighting types include incident lighting unit 13a, transmitted lighting unit 13b, ring lighting unit 13c, etc., and also include multi-angle lighting from multiple directions, lighting from the near front side, lighting from the inside side, lighting from the left side, lighting from the right side, etc.

[0079] The lighting unit 13 can adjust the light intensity and lighting time of each illumination unit, for example, the lighting conditions for the incident illumination unit 13a or the transmitted illumination unit 13b, including the light intensity and lighting time of the incident illumination unit 13a and the light intensity and lighting time of the transmitted illumination unit 13b. Furthermore, the lighting height can also be adjusted, including illumination from a position higher than the workpiece W and illumination from a position lower than the workpiece W.

[0080] The imaging conditions of the imaging unit 15 include, for example, at least one of the following: exposure time, magnification of the optical system 15a of the imaging unit 15, aperture of the optical system 15a of the imaging unit 15, and height of the imaging unit 15 above the worktable 12. By using the worktable drive unit 12c to move the worktable 21 in the Z direction, the height of the imaging unit 15 above the worktable 12 can be adjusted.

[0081] The edge extraction conditions applied during the edge extraction processing performed by the measurement control unit 110A include at least one of the following: scanning direction, edge direction, priority specification, edge intensity threshold, scanning interval, and scanning width, and these conditions can be adjusted.

[0082] In the scan direction setting, you can specify whether the scan proceeds from the center of the edge extraction area outwards or from the outside towards the center. In the edge direction setting, you can specify whether to extract edges from areas where bright areas transition to dark areas or from areas where dark areas transition to bright areas. In the scan interval setting, you can set the scan interval for edge extraction. In the scan width setting, you can set the scan width for edge extraction.

[0083] As measuring tools that utilize edges, there are measuring tools for measuring distances between lines, between a line and a circle, between points, between circles, etc., and measuring tools for measuring angles. It is possible to select any of these measuring tools.

[0084] (When using an image measuring device)

[0085] Next, based on Figure 5 The flowchart shown illustrates the operation of the image measuring device 1. In step SM1, the measuring control unit 110A reads the measuring setting data. The measuring setting data includes the measuring elements set by the measuring setting unit 113 and the pre-adjusted measuring conditions, and therefore includes the measuring position and measuring items set for the workpiece image contained in the image generated by the imaging unit 15.

[0086] In step SM2, the user places the workpiece W on the worktable 12. In step SM3, the user operates the measurement start button included in the operation unit 14. In step SM4, the measurement control unit 110A measures the workpiece according to measurement setting data, which is generated based on the measurement position and measurement elements set by the measurement setting unit 113, and the pre-adjusted measurement conditions. For example, the measurement control unit 110A acquires the measurement items and measurement elements set by the measurement setting unit 113, and the pre-adjusted measurement conditions. Based on the acquired measurement items, measurement elements, and measurement conditions, it extracts edges from the workpiece image generated by the camera unit 15, and uses these edges to measure the measurement elements. In other words, the measurement control unit 110A controls the measurement of the workpiece based on the setting information stored in the storage unit 120. The measurement control unit 110A acquires the measurement results according to the measurement setting data.

[0087] When the measurement control unit 110A finishes measuring each measurement element, it proceeds to step SM5. In step SM5, the measurement control unit 110A compares the measurement result obtained in step SM4 with the judgment threshold. If the measurement result does not exceed the judgment threshold, it is judged as "qualified"; otherwise, if the measurement result exceeds the judgment threshold, it is judged as "unqualified". The judgment result is output to the outside.

[0088] (Mechanism for attaching and detaching the measuring head)

[0089] As in Figure 1 As schematically shown, the image measuring device 1 of this embodiment includes a detachable measuring head H. The measuring head H houses the camera unit 15, the incident illumination unit 13a, etc., and is detachably connected to the near front side of the arm 11 of the base unit 10. When a top-view camera 17 is provided, the top-view camera 17 is mounted on the measuring head H.

[0090] Multiple measuring heads H are prepared. For example, high-performance measuring heads including a high-performance camera unit 15 and illumination, and lower-performance measuring heads including a low-performance camera unit 15 and illumination, can be prepared in advance, and a measuring head can be mounted on the base 10 for use according to the user's wishes. Furthermore, compact measuring heads, large measuring heads, etc., can also be prepared in advance, and a measuring head can be mounted on the base 10 for use according to the installation space of the image measuring device 1.

[0091] The measurement control unit 110A is communicatively connected to the measuring head H and identifies the connected measuring head H. For example, when the measuring head H is mounted on the base unit 10 and powered on, the measurement control unit 110A begins communication with the measuring head H. As a result of this communication, the measurement control unit 110A can identify the type, model, etc. of the measuring head H mounted on the base unit 10. This process can be called a pairing process. Based on the identification result of the measuring head H obtained through the pairing process, the measurement control unit 110A controls the camera unit 15 and illumination of the measuring head H.

[0092] Furthermore, even when measuring the same workpiece W, the measurement results will differ if the measuring head H is different. In contrast, the measurement control unit 110A uses a correction value to control the measurement of workpiece W, which corrects at least one of the relative position and rotation angle of the imaging unit 15 relative to the XY direction of the worktable 12. This correction value can be a value predetermined for each measuring head H and stored in the storage unit 120, or it can be a value obtained through correction processing when the measuring head H is installed during the setup of the image measuring device 1. In particular, since the rotation angle of the imaging unit 15 affects the measurement accuracy during image linking, the correction value obtained through correction processing is used to control the measurement of workpiece W.

[0093] Figure 6 The diagram shows a measuring head H mounted on an arm 11 of a base 10. A support member 200 for supporting the base 10 is provided on the arm 11. The support member 200 is positioned near the front of the arm 11. On the other hand, a highly rigid head frame 300 is provided on the inner side of the measuring head H, that is, on the side facing the support member 200. A camera unit 15 and the like are mounted on the head frame 300.

[0094] The image measuring device 1 has a connecting part 400 that allows the measuring head H to be detachably connected to the arm 11. For example, in Figure 7 , Figure 8 As also shown in the diagram, the connecting portion 400 has a first receiving surface 411, a second receiving surface 412, and a third receiving surface 413 disposed on the support member 200, and a first contact member 421, a second contact member 422, and a third contact member 423 disposed on the head frame 300. The first receiving surface 411 and the first contact member 421 are paired, and are referred to as the first pair. Similarly, the second receiving surface 412 and the second contact member 422 are paired, and are referred to as the second pair. In addition, the third receiving surface 413 and the third contact member 423 are paired, and are referred to as the third pair. Thus, the connecting portion 400 has three pairs: the first receiving surface 411 and the first contact member 421, the second receiving surface 412 and the second contact member 422, and the third receiving surface 413 and the third contact member 423.

[0095] The connecting part 400 constrains the degree of freedom of the measuring head H relative to the arm 11 through the contact of the first receiving surface 411 of the first pair with the first contact member 421, the contact of the second receiving surface 412 of the second pair with the second contact member 422, the contact of the third receiving surface 413 of the third pair with the third contact member 423, the guide groove 210 described later, and the insertion member 310, thereby positioning the measuring head H relative to the arm 11 at a predetermined position.

[0096] The constraint on the degrees of freedom by the connecting part 400 does not constrain all degrees of freedom; it does not constrain the degree of freedom of the measuring head H in the loading and unloading direction. That is, as... Figure 8 As indicated by the arrow, the measuring head H is mounted by moving relative to the arm 11 from top to bottom and is configured in... Figure 6 The installation location is shown. On the other hand, it is configured in... Figure 6 The measuring head H, in the shown mounting position, is removed from the arm 11 by moving upward. Therefore, the connecting part 400 is configured to restrict the degrees of freedom of the measuring head H in the mounted state in the downward direction, the front-back direction, the left-right direction, the direction about the vertical axis, and the direction about the horizontal axis, but not restrict the degree of freedom in the upward direction.

[0097] In the following description, an example is described where the first receiving surface 411, the second receiving surface 412, and the third receiving surface 413 are provided on the support member 200, and the first contact element 421, the second contact element 422, and the third contact element 423 are provided on the head frame 300. However, the present invention is not limited thereto. That is, the first receiving surface 411, the second receiving surface 412, and the third receiving surface 413 may also be provided on the head frame 300, and the first contact element 421, the second contact element 422, and the third contact element 423 may be provided on the support member 200. In addition, in this embodiment, an example with three pairs of receiving surfaces and contacts is described, but the number of pairs of receiving surfaces and contacts is not limited to three pairs; multiple pairs of receiving surfaces and contacts are acceptable.

[0098] The first receiving surface 411 and the first contact member 421 of the first pair are arranged spaced apart from each other in the left-right direction (horizontal direction) with the second receiving surface 412 and the second contact member 422 of the second pair. The third receiving surface 413 and the third contact member 423 of the third pair are arranged separately in the vertical direction from the first receiving surface 411 and the first contact member 421, and from the second receiving surface 412 and the second contact member 422. Thus, the connecting part 400 of this embodiment becomes a vertical kinematic coupling in which three pairs of receiving surfaces and contacts are arranged spaced apart from each other in the vertical and left-right directions. However, it is not limited to this and can also be a planar kinematic coupling in which three pairs of receiving surfaces and contacts are arranged spaced apart from each other in the front-back and left-right directions.

[0099] More specifically, such as Figure 7 and Figure 9As shown, assuming a virtual line L1 on the head side extending vertically through the center of the measuring head H in the left-right direction and a virtual line L2 on the arm side extending vertically through the center of the arm 11 in the left-right direction, the virtual lines L1 and L2 overlap when viewed in the front-back direction. However, this is not limited to the overlapping position of the virtual lines L1 and L2 when viewed in the front-back direction; for example, it is acceptable as long as the center of gravity of the measuring head H is located between the first receiving surface 411 of the first pair and the second receiving surface 412 of the second pair. In the case of the overlapping position of the virtual lines L1 and L2 when viewed in the front-back direction, the force exerted on the first receiving surface 411 from the measuring head H is equal to the force exerted on the second receiving surface 412 of the second pair from the measuring head H, and this positional relationship is valid in this respect. The first receiving surface 411 and the first contact element 421 of the first pair are positioned to the right of the virtual lines L1 and L2, and the second receiving surface 412 and the second contact element 422 of the second pair are positioned to the left of the virtual lines L1 and L2. When viewed in the front-back direction, the virtual lines L1 and L2 are positioned at the center of the first receiving surface 411 and the first contact element 421 of the first pair and the second receiving surface 412 and the second contact element 422 of the second pair.

[0100] The third receiving surface 413 is positioned at the center in the left-right direction of the arm 11. Additionally, the third contact member 423 is positioned at the center in the left-right direction of the measuring head H. When viewed in the front-back direction, the virtual lines L1 and L2 are straight lines that pass through the third receiving surface 413 and the third contact member 423 and extend in the vertical direction. The first receiving surface 411 and the first contact member 421 are arranged linearly symmetrically with the virtual lines (virtual lines L1 and L2) that pass through the third receiving surface 413 and the third contact member 423 and extend in the vertical direction as the center of symmetry. This arrangement is effective in ensuring that the force exerted on the first receiving surface 411 from the measuring head H is equal to the force exerted on the second receiving surface 412 from the measuring head H. In addition, the third receiving surface 413 can be located below the virtual line connecting the first receiving surface 411 and the second receiving surface 41, for example, it can be located to the right of the first receiving surface 411, to the left of the second receiving surface 412, or other separated positions.

[0101] The first receiving surface 411 has a first vertical surface 411a and a first horizontal surface 411b extending horizontally from the lower part of the first vertical surface 411a. The second receiving surface 412 has a second vertical surface 412a and a second horizontal surface 412b extending horizontally from the lower part of the second vertical surface 412a. The first vertical surface 411a and the second vertical surface 412a are arranged toward the inward side of the arm portion 11. That is, the rear surface of the support member 200 is a surface arranged toward the inward side of the arm portion 11, and the first vertical surface 411a and the second vertical surface 412a are provided on the rear surface of the support member 200. The first vertical surface 411a and the second vertical surface 412a are at the same position in the depth direction, therefore, the first vertical surface 411a and the second vertical surface 412a are positioned on the same virtual vertical surface. This configuration is effective in ensuring that the force exerted on the first receiving surface 411 from the measuring head H is equal to the force exerted on the second receiving surface 412 from the measuring head H. However, it is not limited to the positional relationship where the first vertical surface 411a and the second vertical surface 412a are positioned on the same virtual vertical surface.

[0102] The first horizontal plane 411b extends from the lower part of the first vertical plane 411a toward the inner side of the arm portion 11. The second horizontal plane 412b extends from the lower part of the second vertical plane 412a toward the inner side of the arm portion 11. That is, a protrusion 201 that protrudes inward and extends in the left-right direction is provided at the middle part of the support member 200 in the vertical direction. The upper surface of the protrusion 201 is a surface disposed on the inner side of the arm portion 11, and the first horizontal plane 411b and the second horizontal plane 412b are provided on the upper surface of the protrusion 201. The first horizontal plane 411b and the second horizontal plane 412b are at the same position in the Z direction, and therefore, the first horizontal plane 411b and the second horizontal plane 412b are positioned on the same virtual horizontal plane. With this configuration, it is effective in that the force received by the first receiving surface 411 from the measuring head H is equal to the force received by the second receiving surface 412 from the measuring head H. However, it is not limited to the positional relationship where the first horizontal plane 411b and the second horizontal plane 412b are positioned on the same virtual horizontal plane.

[0103] The third receiving surface 413 is formed by a surface extending in the vertical direction. This third receiving surface 413 is arranged facing towards the front. That is, the front surface of the support member 200 is a surface arranged facing towards the front of the arm portion 11, and the third receiving surface 413 is provided on the front surface of the support member 200. Since the third receiving surface 413 is provided on the front surface of the support member 200, it is positioned forward of the first vertical surface 411a and the second vertical surface 412a provided on the rear surface of the support member 200. Furthermore, the third receiving surface 413 is parallel to the first vertical surface 411a and the second vertical surface 412a. This relationship is effective in ensuring that the force received by the first receiving surface 411 from the measuring head H is equal to the force received by the second receiving surface 412 from the measuring head H. However, the third receiving surface 413 only needs to be approximately parallel to the first vertical surface 411a and the second vertical surface 412a.

[0104] The first contact 421 and the second contact 422 are supported by an upper rod 301 disposed on the upper part of the head frame 300. Upper brackets 302 are disposed on the left and right sides of the upper part of the head frame 300. The upper brackets 302 protrude inwards. The upper rod 301 extends approximately horizontally in the left-right direction. The left and right sides of the upper rod 301 are supported by the upper brackets 302 respectively.

[0105] like Figure 6 As shown, in the installed state of the measuring head H, the first contact 421 is configured to contact the first horizontal surface 411b and the first vertical surface 411b. Furthermore, in the installed state of the measuring head H, the second contact 422 is configured to contact the second horizontal surface 412b and the second vertical surface 412b.

[0106] The first contact 421 and the second contact 422 are composed of cylindrical rollers supported by the rod 301 in a manner that allows them to rotate about a horizontal axis extending in the left-right direction. This is effective in reducing the impact of friction through rotatable support. Alternatively, the first contact 421 and the second contact 422 can also be cylindrical rollers fixed to the rod 301, which is effective in simplifying the construction. Since the first contact 421 and the second contact 422 are composed of cylindrical rollers with an axis extending in the left-right direction, the first contact 421 is in line contact with the first horizontal surface 411b and the first vertical surface 411b, and the second contact 422 is in line contact with the second horizontal surface 412b and the second vertical surface 412b. This ensures that the contact area between the first contact 421 and the first bearing surface 411 is large, and also ensures that the contact area between the second contact 422 and the second bearing surface 412b is large.

[0107] The third contact member 423 is supported by the lower rod 303 in a manner that allows it to rotate about a horizontal axis extending in the left-right direction. This is effective in reducing the impact of friction through rotatable support. Alternatively, the third contact member 421 can also be a cylindrical roller fixed to the rod 301, which is effective in simplifying the construction. At the lower part of the head frame 300, lower brackets 304 are provided on both the left and right sides. The lower brackets 304 protrude inwards. The lower rod 303 extends approximately horizontally in the left-right direction. The left and right sides of the lower rod 303 are supported by the lower brackets 304 respectively.

[0108] Similar to the first contact 421, the third contact 423 is also composed of a cylindrical roller. This ensures a large contact area between the third contact 423 and the third bearing surface 413. Furthermore, the first contact 421, the second contact 422, and the third contact 423 can also be composed of spherical components.

[0109] The first contact 421, the second contact 422, and the third contact can also all be composed of cylindrical rollers. In this case, such as Figure 7 As shown, the first contact 421 and the second contact 422 are constructed with the same cylindrical diameter on the same virtual straight line L3. Furthermore, in this case, the virtual straight line L4, which intersects the left and right sides of the third contact 423 perpendicularly, is preferably parallel to the aforementioned virtual straight line L3. With this configuration, the vertical movement of the measuring head H is restricted, but its horizontal movement along the extension directions of the virtual straight lines L3 and L4 is unrestricted. Since horizontal movement is not restricted by the structure described above, it is possible to prevent the measuring head H from tilting or deviating in an unexpected direction due to friction between the measuring head H and each contact surface. Errors caused by horizontal deviation can be reduced by image processing performed by the measuring control unit 110A during measurement. Conversely, tilting or deviation in unexpected directions other than horizontal are generally difficult to correct by image processing performed by the measuring control unit 110A during measurement. In other words, tilting or deviation in unexpected directions is a major cause of measurement errors. Therefore, a structure that does not restrict correctable left-right movements is effective in preventing uncorrectable deviations and tilts in unexpected directions and in suppressing measurement errors.

[0110] Adjusting shims can be provided on the first vertical plane 411a, the first horizontal plane 411b, the second vertical plane 412a, the second horizontal plane 412b, and the third receiving surface 413. By providing adjusting shims on the first horizontal plane 411b and the second horizontal plane 412b, the vertical positions of the first horizontal plane 411b and the second horizontal plane 412b can be finely adjusted. Additionally, by providing adjusting shims on the third receiving surface 413, the front-back position of the third receiving surface 413 can be finely adjusted. Adjusting shims can be provided as needed or omitted.

[0111] A guide groove 210 extending vertically is formed on the upper part of the support member 200. The guide groove 210 is open on the upper end face of the support member 200. On the other hand, an insertion member 310 is provided on the head frame 300, which is inserted into the guide groove 210. When installing the measuring head H, the insertion member 310 is inserted into the guide groove 210 from above, thereby positioning the measuring head H in the left-right direction. That is, the insertion member 310 and the guide groove 210 are used to restrict the degree of freedom of the measuring head H in the left-right direction.

[0112] like Figure 10 and Figure 11 As shown, the image measuring device 1 may also include a first damper 501, which is used to mitigate the downward impact when the first contact member 421 and the second contact member 422 come into contact with the first horizontal surface 411b and the second horizontal surface 412b, respectively. The first damper 501 is fixed to the protrusion 201 of the support member 200 and has a rod 501a protruding upward from the upper surface of the protrusion 201. The rod 501a can move downward, and at this time, for example, the flow resistance of the fluid filled into the first damper 501 plays a role in limiting the movement speed of the rod 501a. In this embodiment, two first dampers 501 are provided, but the number of first dampers 501 can be one or more.

[0113] The rod 501a of the first damper 501 is configured to abut against the upper rod 301 mounted on the head frame 300 from below. Therefore, when the measuring head H is installed, the downward movement speed of the measuring head H can be reduced by the first damper 501, resulting in the mitigation of the downward impact when the first contact 421 and the second contact 422 contact the first horizontal surface 411b and the second horizontal surface 412b, respectively.

[0114] Additionally, the image measuring device 1 may also include a second damper 502, which is used to mitigate the horizontal impact when the third contact member 423 contacts the third bearing surface 413. The second damper 502 is fixed to the lower part of the support member 200 and has a rod 502a protruding forward from the front surface of the support member 200. The rod 502a can move rearward, at which time, for example, the flow resistance of the fluid filled into the second damper 502 plays a role in limiting the movement speed of the rod 502a. In this embodiment, one second damper 502 is provided, but the number of second dampers 502 may also be two or more.

[0115] The rod 502a of the second damper 502 is configured to abut against the rear surface of the head frame 300 from the rear. As a result, when the measuring head H is installed, the inward movement speed of the lower part of the measuring head H can be reduced by the second damper 502, and as a result, the impact when the third contact 423 contacts the third bearing surface 413 is mitigated.

[0116] The image measuring device 1 may also include a pressing mechanism 510, which presses the first contact 421 and the second contact 422 against the first vertical surface 411a and the second vertical surface 412a, respectively. The pressing mechanism 510 may be, for example, a mechanism that applies a pressing force that presses the upper rod 301 from the inside toward the near front side from an obliquely upward position, or a mechanism that applies a pressing force that presses the first contact 421 and the second contact 422 from the inside toward the near front side from an obliquely upward position.

[0117] The above-described embodiments are merely illustrative in all respects and should not be interpreted as limiting. Furthermore, all modifications and alterations falling within the equivalent scope of the claims are within the scope of this invention.

[0118] Industrial availability

[0119] As explained above, the technology disclosed herein can be used in situations such as measuring the dimensions of various workpieces.

[0120] Explanation of reference numerals in the attached figures

[0121] 10: Base (base); 12: Worktable (platform); 15: Camera unit; 400: Connecting part; 411: First receiving surface; 411a: First vertical surface; 411b: First horizontal surface; 412: Second receiving surface; 412a: Second vertical surface; 412b: Second horizontal surface; 413: Third receiving surface; 421: First contact element; 422: Second contact element; 423: Third contact element; H: Measuring head.

Claims

1. An image measuring device, comprising: A stage, used to hold workpieces; The base, wherein the platform is movably connected to the base; A camera unit is disposed above the mounting platform to capture images of the workpiece placed on the mounting platform and generate an image containing the workpiece image. A measuring head that houses the camera unit and is detachably connected to the base; as well as The connecting part has multiple pairs of receiving surfaces and contact elements. One of the receiving surfaces and contact elements is disposed on the base, and the other is disposed on the measuring head. The degree of freedom of the measuring head relative to the base is constrained by the contact between each receiving surface and the corresponding contact element in the multiple pairs of receiving surfaces and contact elements.

2. The image measuring device according to claim 1, wherein, It also has: The storage unit stores setting information, which includes the measurement position or measurement item for the workpiece image, as well as the measurement elements and measurement conditions corresponding to the measurement position or measurement item. as well as The measurement control unit is connected to the measuring head in a communicable manner, identifies the connected measuring head, and controls the measurement of the workpiece based on the setting information stored in the storage unit.

3. The image measuring device according to claim 2, wherein, The platform is connected to the base in a manner that allows it to move relative to the base in a first and a second mutually orthogonal direction. The measurement control unit uses a correction value to control the measurement of the workpiece, wherein the correction value is used to correct at least one of the relative position and rotation angle of the camera unit relative to the first direction and the second direction of the mounting stage.

4. The image measuring device according to claim 1, wherein, The connecting portion has 3 pairs of receiving surfaces and contact elements. The first receiving surface and the first contact member constituting the first pair are arranged at intervals from each other in the horizontal direction with respect to the second receiving surface and the second contact member constituting the second pair. The third receiving surface and the third contact member constituting the third pair are arranged in a manner that separates them from the first receiving surface and the first contact member, as well as the second receiving surface and the second contact member, in the vertical direction.

5. The image measuring device according to claim 4, wherein, The first receiving surface has a first vertical surface and a first horizontal surface extending horizontally from the lower part of the first vertical surface. The first contact element is configured to contact the first horizontal plane and the first vertical plane when the measuring head is mounted on the base. The second receiving surface has a second vertical surface and a second horizontal surface extending horizontally from the lower part of the second vertical surface. The second contact is configured to contact the second horizontal plane and the second vertical plane when the measuring head is mounted on the base.

6. The image measuring device according to claim 5, wherein, The connecting part allows for the upward movement of the measuring head. The image measuring device also includes a first damper, which is used to mitigate the downward impact when the first contact and the second contact come into contact with the first horizontal plane and the second horizontal plane, respectively.

7. The image measuring device according to claim 5, wherein, The connecting part allows for the upward movement of the measuring head. The image measuring device also includes a pressing mechanism, which presses the first contact member and the second contact member onto the first vertical surface and the second vertical surface, respectively.

8. The image measuring device according to claim 5, wherein, The first horizontal plane and the second horizontal plane are positioned on the same virtual horizontal plane. The first vertical plane and the second vertical plane are positioned on the same virtual vertical plane.

9. The image measuring device according to claim 5, wherein, The third receiving surface is composed of a surface extending in the vertical direction and is parallel to the first vertical surface and the second vertical surface.

10. The image measuring apparatus according to claim 8, wherein, It also includes a second damper, which is used to mitigate the impact when the third contact member comes into contact with the third bearing surface.

11. The image measuring apparatus according to claim 10, wherein, The second damper is used to mitigate the horizontal impact when the third contact member comes into contact with the third bearing surface.

12. The image measuring device according to claim 4, wherein, When the image measuring device is viewed from the front, the first receiving surface and the first contact member are arranged in a linearly symmetrical manner with the second receiving surface and the second contact member as the center of a virtual line that passes through the third receiving surface and the third contact member and extends in the vertical direction.

13. The image measuring apparatus according to claim 5, wherein, When viewed from the front, the measuring head is connected to the front portion of the base. The first vertical plane and the second vertical plane are arranged facing inward toward the base. The first horizontal plane extends from the lower part of the first vertical plane toward the inside of the base. The second horizontal plane extends from the lower part of the second vertical plane toward the inside of the base. The third receiving surface is configured to face the front side of the base.

14. The image measuring apparatus according to claim 1, wherein, The contact element is made of rollers.

15. The image measuring apparatus according to claim 14, wherein, The connecting part allows for the upward movement of the measuring head. The roller is cylindrical and rotates about a horizontal axis.

Images