Anode target disc outgassing detection apparatus and detection method

Abstract

The application provides an anode target disc outgassing detection device and method for evaluating the outgassing performance of an anode target disc as a whole or its constituent components. The device comprises a quartz bell jar, a carrier platform, a vacuum system, a vacuum gauge, a medium-frequency induction heating coil and a mass spectrometer. The quartz bell jar and the carrier platform form a sealed detection chamber, the vacuum system maintains a high vacuum environment, and the medium-frequency induction heating coil surrounds the outer periphery of the quartz bell jar and can be lifted to achieve non-contact rapid heating and adjust the coupling efficiency. After heat preservation and cooling, one cycle is completed. The vacuum gauge monitors the vacuum degree change throughout the process, and the mass spectrometer analyzes the gas composition and partial pressure. Whether the workpiece is qualified is determined according to the cycle number, peak pressure, abnormal gas and characteristic partial pressure. The application can independently and accurately detect the outgassing characteristics of the target disc and its components before the tube is assembled, shorten the detection period, reduce the interference of the whole tube test, and provide direct basis for material optimization and process improvement.

Description

Technical Field

[0001] This application relates to the field of X-ray equipment technology, specifically to an anode target plate venting detection device and method. Background Technology

[0002] One of the core components of a CT (Computed Tomography) scanner is the X-ray tube, which contains a rotating anode target disk. The operating environment of the rotating anode target disk in a CT tube is extremely harsh, requiring a high vacuum (typically 10⁻⁶). -6 It features a range of characteristics including Pa-level temperature, ultra-high temperature (the instantaneous temperature at the focal spot of the target disk track layer can reach 2600℃, and the overall temperature of the target disk can reach over 1300℃), and high rotation speed (the target disk rotation speed is 8000~10000r / min during operation).

[0003] During the operation of a CT X-ray tube, when the high-speed electron beam bombards the anode target disk, approximately 99% of the energy is converted into heat, causing a rapid increase in the target disk temperature. If the target disk material contains or adsorbs gases (including gases adsorbed on the material surface and gases dissolved within the material), the high temperature will cause a large amount of these gases to be released, i.e., outgassing. This outgassing behavior directly disrupts the high vacuum environment inside the X-ray tube, leading to high-pressure breakdown or shortening the tube's lifespan, becoming one of the main causes of X-ray tube failure. Therefore, high processing precision and bonding strength between the target disk and the substrate are required, along with a high degree of cleanliness, i.e., a low gas content.

[0004] Currently, the testing of the venting performance of anode target disks is typically conducted after the target disk has been assembled into the X-ray tube, using whole-tube venting and aging tests to obtain relevant venting volume and data. However, this testing method is time-consuming and expensive, and the venting data is affected by the venting of other components such as bearings within the X-ray tube. It cannot accurately and independently reflect the venting volume and type of the anode target disk components themselves, which is detrimental to target disk material development and quality problem attribution. Furthermore, this testing method can only test the target disk as a whole and cannot perform individual testing on the target disk components (such as graphite components and composite metal substrates) before tube assembly.

[0005] Therefore, there is an urgent need for a device and method that can perform venting tests on the entire or component materials of the anode target plate before tube mounting, in order to replace the existing whole-tube venting test method, shorten the testing cycle, reduce testing costs, improve testing accuracy, and enable individual testing of the target plate components. Summary of the Invention

[0006] The first aspect of this application provides an anode target disk venting detection device, comprising: Quartz bell jar, which provides a sealed testing chamber; The loading platform is located at the bottom of the detection chamber and is used to support the workpiece to be tested; the workpiece to be tested includes the entire anode target disk or components that make up the anode target disk; A vacuum system, connected to the detection chamber, is used to evacuate the detection chamber during the detection process; A vacuum gauge, connected to the detection chamber, is used to detect the vacuum level inside the detection chamber in real time. A medium-frequency induction heating coil is arranged around the outer periphery of a quartz bell jar to induction heat the workpiece to be tested on a platform. The medium-frequency induction heating coil can be raised and lowered relative to the platform to change the coupling distance between the medium-frequency induction heating coil and the workpiece to be tested. A mass spectrometer, whose sampling port is connected to the detection chamber, is used to detect the composition and partial pressure of the gas released by the workpiece during the heating process.

[0007] The second aspect of this application provides a method for detecting venting of an anode target disk, implemented using the venting detection device for an anode target disk as described in the first aspect of this application, including the following steps: The workpiece to be tested is placed on the platform, and the quartz bell jar is sealed to the platform to form a closed testing chamber. The vacuum system is activated to evacuate the detection chamber, bringing it to the reference vacuum level. The vacuum system is then kept in a continuous evacuation state during subsequent testing. The intermediate frequency induction heating coil is controlled to heat and maintain the temperature of the workpiece under test. The heating and maintaining parameters are determined based on the temperature rise curve of the anode target plate under actual working conditions. Control the medium-frequency induction heating coil to stop heating, allowing the workpiece to be tested to cool down; The process of repeatedly controlling the medium-frequency induction heating coil to heat and keep the workpiece under test, as well as controlling the medium-frequency induction heating coil to stop heating, continues until the maximum number of cycles is reached or the early termination condition is met. During the heating, heat preservation and cooling processes, the vacuum level change data in the detection chamber is detected and recorded in real time by a vacuum gauge, while the gas composition and partial pressure data in the detection chamber are continuously detected and recorded by a mass spectrometer. Based on the vacuum degree change data, gas composition and partial pressure data, determine whether the workpiece to be tested is qualified.

[0008] In some implementations, the qualification of the workpiece under test is determined based on vacuum degree change data, gas composition and partial pressure data, including at least one of the following: The number of cycles required to reach the preset vacuum level in the detection chamber is determined based on the vacuum level change data. If the required number of cycles exceeds the preset threshold, the workpiece to be tested is determined to be unqualified. If the vacuum level in the detection chamber does not reach the preset vacuum level when the maximum number of cycles is reached, the workpiece to be tested is determined to be unqualified. Based on the vacuum level change data, the peak pressure of the detection chamber in each cycle is determined; if the peak pressure of any cycle exceeds the preset pressure threshold, the workpiece to be tested is determined to be unqualified. If abnormal gas is determined to be present based on gas composition and partial pressure data, the workpiece to be tested is determined to be unqualified. If, based on the gas composition and partial pressure data, it is determined that there is a characteristic gas with a partial pressure exceeding the preset partial pressure threshold, then the workpiece to be tested is determined to be unqualified.

[0009] In some embodiments, controlling the intermediate frequency induction heating coil to heat the workpiece to be tested includes: raising the temperature of the workpiece to be tested from room temperature to 1300°C to 1500°C within 20 minutes, with a heating rate of 65°C / min to 75°C / min.

[0010] In some implementations, controlling the intermediate frequency induction heating coil to heat and maintain the temperature of the workpiece under test includes: The intermediate frequency induction heating coil is controlled to be powered by a first voltage for a first time, a second voltage for a second time, and a third voltage for a third time in sequence to heat the workpiece to be tested; the first voltage is less than the second voltage, the second voltage is less than the third voltage, the first time is greater than the second time, and the first time is greater than the third time; The intermediate frequency induction heating coil is controlled to be powered by a third voltage for a fourth time to keep the workpiece under test warm; the fourth time is equal to the sum of the first time, the second time and the third time.

[0011] In some implementations, controlling the intermediate frequency induction heating coil to cool the workpiece under test includes: The intermediate frequency induction heating coil is controlled to be powered by a fourth voltage for a fifth time, and then power is stopped for a sixth time; wherein the fourth voltage is half of the third voltage; and the sum of the fifth and sixth times is equal to the fourth time.

[0012] In some implementations, the first voltage is 140V, the second voltage is 155V, the third voltage is 170V, and the fourth voltage is 85V; the first time is 10min, the second time is 5min, the third time is 5min, the fourth time is 20min, the fifth time is 5min, and the sixth time is 15min.

[0013] In some embodiments, the method further includes, before placing the workpiece to be tested onto the platform: Control the intermediate frequency induction heating coil to descend to the avoidance position; After sealing the quartz bell jar with the platform, the method also includes controlling the intermediate frequency induction heating coil to rise to the height of the workpiece to be measured.

[0014] In some implementations, the reference vacuum level is 3.0 × 10⁻⁶.-5 Pa ~ 8.0 × 10 -5 Pa.

[0015] In some implementations, the preset pressure threshold is 3.0 × 10⁻⁶. -3 Pa ~ 8.0 × 10 -3 Pa. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an anode target plate venting detection device according to an embodiment of this application.

[0017] Figure 2 This is a schematic flowchart of an embodiment of the anode target plate venting detection method of this application.

[0018] Figure 3 This is a vacuum degree change curve according to one embodiment of this application.

[0019] Figure 4 This is a curve showing the change of venting type and venting amount with temperature in one embodiment of this application.

[0020] Figure reference numerals: 10 is the anode target plate venting detection device, 11 is the quartz bell jar, 111 is the detection chamber, 12 is the loading platform, 13 is the vacuum system, 14 is the vacuum gauge, 15 is the medium frequency induction heating coil, 151 is the heating system, 16 is the mass spectrometer, and 100 is the workpiece to be tested. Detailed Implementation

[0021] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0022] like Figure 1 As shown, the first aspect of this application provides an anode target disk venting detection device 10. The device 10 includes a quartz bell jar 11, a platform 12, a vacuum system 13, a vacuum gauge 14, a medium-frequency induction heating coil 15, and a mass spectrometer 16.

[0023] The quartz bell jar 11 provides a sealed detection chamber. A seal is provided between the quartz bell jar 11 and the platform 12. The seal can be an O-ring or a flange seal. The quartz bell jar 11 achieves an airtight seal with the platform 12 through the seal, thereby forming a sealed detection chamber between the quartz bell jar 11 and the platform 12. This allows the detection chamber to maintain the required vacuum level under the suction of the vacuum system 13. The quartz bell jar 11 can be made of quartz glass. Quartz glass has high light transmittance, allowing infrared light to pass through the quartz bell jar 11, facilitating non-contact temperature measurement of the workpiece inside the detection chamber by an infrared thermometer.

[0024] The platform 12 is located at the bottom of the testing chamber and is used to support the workpiece to be tested. The workpiece includes the entire anode target disk and the various components that make up the anode target disk, such as graphite components, composite metal substrates such as molybdenum alloy substrates, or tungsten-rhenium alloy substrates. The upper surface of the platform 12 is designed as a planar structure, which allows the workpiece to be placed stably on the platform 12. The platform 12 is made of high-temperature resistant materials, such as alumina ceramic or heat-resistant steel, to withstand the high temperatures transferred by the workpiece during the heating process.

[0025] Vacuum system 13 is connected to the detection chamber via vacuum tubing and is used to evacuate the detection chamber during the detection process. Vacuum system 13 may include a mechanical pump and a molecular pump. The mechanical pump is used to evacuate the detection chamber from atmospheric pressure to a low vacuum state, and the molecular pump is used to evacuate the detection chamber from a low vacuum state to a high vacuum state. The two work together to bring the detection chamber to the required reference vacuum level. During the detection process, vacuum system 13 maintains a continuous evacuation state to continuously extract the gas released by the workpiece during heating from the detection chamber, preventing the released gas from accumulating in the detection chamber.

[0026] Vacuum gauge 14 is connected to the detection chamber via a vacuum line and is used to detect the vacuum level within the detection chamber in real time. For example, vacuum gauge 14 can be a combination of a resistance gauge and an ionization gauge. The resistance gauge is used for measurements in the low vacuum range, and the ionization gauge is used for measurements in the high vacuum range. Together, they achieve full-range vacuum measurement from atmospheric pressure to high vacuum. For example, vacuum gauge 14 can be an ionization gauge for high vacuum range (10... -3 Pa-10 -8 The vacuum gauge 14 continuously collects vacuum level data within the testing chamber during the testing process. This data reflects the outgassing rate and total outgassing amount of the workpiece under different temperature conditions. When outgassing occurs in the vacuum, the outgassing rate is greater than the pumping rate, and the vacuum level in the testing chamber decreases. After outgassing is completed, the vacuum system 13 extracts the gas from the testing chamber, and the vacuum level recovers. The outgassing amount of the workpiece under test can be calculated from the vacuum level change data measured by the vacuum gauge 14.

[0027] A medium-frequency induction heating coil 15 is arranged around the outer periphery of the quartz bell jar 11 to induction heat the workpiece to be tested on the platform 12. The medium-frequency induction heating coil 15 is connected to a medium-frequency induction heating power supply. When energized, the medium-frequency induction heating coil 15 generates an alternating magnetic field around itself, which induces eddy currents inside the workpiece placed in the alternating magnetic field. As the eddy currents flow inside the workpiece, they generate heat due to the resistance heating effect, thereby achieving non-contact heating of the workpiece to be tested.

[0028] The intermediate frequency induction heating coil 15 is vertically adjustable relative to the platform 12. It can be driven vertically up and down via a screw and nut mechanism or a linear guide mechanism to change the relative position between the coil and the workpiece. This allows the coil to be lowered to a clearance position when picking up or placing the workpiece, making it easier for operators or automated robots to handle. Furthermore, when the coil rises, it surrounds the quartz bell jar 11 and corresponds to the height of the workpiece, resulting in a closer coupling distance and higher heating efficiency. Conversely, when the coil descends, it moves further away from the workpiece, increasing the coupling distance and reducing heating efficiency. The coupling distance can be adjusted by regulating the lifting position of the coil, thereby controlling the heating efficiency.

[0029] The reason for choosing a medium-frequency induction heating coil as the heating element is determined by the detection scenario.

[0030] Induction heating is a heating method that uses electromagnetic induction to generate eddy currents inside a conductive workpiece, thereby directly heating the workpiece itself. Compared to radiation heating or resistance heating, induction heating is faster and can achieve non-contact heating.

[0031] Induction heating at different frequencies exhibits different heating characteristics. Higher frequencies result in a stronger skin effect from electromagnetic induction, causing the current to tend to flow only on the surface of the workpiece, leading to a shallower heating depth. Lower frequencies, on the other hand, result in a deeper heating depth. High-frequency induction heating typically operates between 40kHz and 500kHz, with a heating depth of approximately 1 to 2 millimeters, and is often used for surface heating or quenching of small workpieces. Medium-frequency induction heating generally ranges from 1kHz to 20kHz, with a typical value of around 8kHz, and achieves a heating depth of approximately 3 to 10 millimeters, making it suitable for penetrating heating of larger workpieces.

[0032] The anode target disk is of medium to large size, and its base material (such as molybdenum alloy, tungsten-rhenium alloy, etc.) has a certain thickness. To ensure uniform heating of the entire target disk or its components and to reach the target temperature during the heating process, the heating energy needs to penetrate to a certain depth into the workpiece, rather than remaining only on the surface. Therefore, high-frequency induction heating has insufficient penetration depth, while low-frequency induction heating is inefficient and requires bulky equipment, making both unsuitable for the application scenarios of this invention. Medium-frequency induction heating, with its power and heating rate, can meet the testing requirements for rapid target disk heating.

[0033] The use of medium-frequency induction heating coils can not only simulate the thermal shock environment of the target plate during actual operation by utilizing the non-contact and rapid heating characteristics of induction heating, but also achieve effective penetrating heating of the workpiece according to the overall size and material thickness of the target plate. Therefore, medium-frequency induction heating coils are selected as the heating element.

[0034] For example, the device 10 may also include a heating system 151 electrically connected to the intermediate frequency induction heating coil 15 for supplying power to the intermediate frequency induction heating coil 15 and adjusting the magnitude and duration of the supply voltage.

[0035] The sampling port of mass spectrometer 16 is connected to the detection chamber via a sampling pipeline, and is used to detect the composition and partial pressure of the gas released by the workpiece under test during heating. Mass spectrometer 16 can ionize and perform mass spectrometry analysis on gas molecules in the detection chamber, identify each component in the gas based on the different ion mass-to-charge ratios, and measure the corresponding partial pressure values ​​of each component. Mass spectrometer 16 can determine the type of gas released by the workpiece under test, such as normal outgassing gases like water vapor, oxygen, carbon monoxide, carbon dioxide, and hydrogen, as well as abnormal gases that may be produced at high temperatures, such as molybdenum oxide. Mass spectrometer 16 continuously samples and detects throughout the entire heating, holding, and cooling process to obtain data on the outgassing behavior of the workpiece under test over a complete temperature change cycle.

[0036] The quartz bell jar 11 and the platform 12 form a sealed detection chamber through a sealing element. This chamber provides a sealed space similar to the internal environment of a CT tube for the gas release test of the workpiece under test. The vacuum system 13 evacuates the detection chamber to a high vacuum level similar to the working environment of the CT tube, while continuously extracting the gas released from the workpiece under test to ensure that the gas release test can be carried out continuously through multiple heating cycles. The vacuum gauge 14 and the mass spectrometer 16 detect the gas state in the detection chamber from different dimensions. The vacuum gauge 14 detects the change in vacuum caused by gas release, reflecting the total amount and rate of gas release. The mass spectrometer 16 detects the specific components and partial pressures of the gas release, reflecting the type and source of gas release. The combination of the two can comprehensively describe the gas release behavior of the workpiece under test. The intermediate frequency induction heating coil 15 surrounds the outer periphery of the quartz bell jar 11 to perform induction heating on the workpiece under test. This can simulate the rapid heating effect generated when the electron beam in the CT tube bombards the target disk. The quartz bell jar 11 allows the infrared thermometer to monitor the workpiece temperature in real time without interfering with the magnetic field penetration of the intermediate frequency induction heating coil 15. This enables heating, temperature measurement, vacuum detection, and venting detection to be performed simultaneously, forming a test system that is basically consistent with the actual working environment of the anode target disk.

[0037] This device can perform outgassing tests on the workpiece before tube loading, eliminating the need to load the workpiece into the CT tube. Therefore, it avoids interference from other components during the overall tube venting process, and the test results accurately reflect the outgassing characteristics of the anode target plate itself or its individual components. Thanks to the coordinated operation of the detection chamber, vacuum system 13, intermediate frequency induction heating coil 15, and mass spectrometer 16, the device can simultaneously acquire outgassing volume and composition data, providing comprehensive data support for evaluating outgassing performance. This device allows for individual testing of the anode target plate as a whole or its components, such as graphite parts and composite metal substrates, before tube loading. When outgassing is found to exceed the standard, the problem can be accurately located to a specific component, guiding targeted improvements to the production process.

[0038] This application also provides an anode target plate outgassing detection method 20, which is implemented using the aforementioned anode target plate outgassing detection device 10. For example... Figure 2 As shown, method 20 includes the following steps: Step 210: Place the workpiece to be tested on the platform and seal the quartz bell jar with the platform to form a closed testing chamber.

[0039] The workpiece to be tested includes the entire anode target disk or components that make up the anode target disk, such as graphite components, molybdenum alloy substrates, or tungsten-rhenium alloy substrates. Before placing the workpiece, the intermediate frequency induction heating coil can be lowered to a clearance position, ensuring an unobstructed view above the platform, facilitating the placement of the workpiece in the center of the platform by operators or automated robots. After the workpiece is placed, the quartz bell jar is closed and sealed to the platform using a sealing element, forming a sealed testing chamber. This chamber provides a closed space isolated from the external environment for subsequent vacuuming and venting tests.

[0040] Step 220: Start the vacuum system to evacuate the detection chamber, so that the inside of the detection chamber reaches the reference vacuum level, and keep the vacuum system in a continuous evacuation state during subsequent detection.

[0041] The reference vacuum level is the initial vacuum level that the testing chamber needs to reach before heating begins. Its value can be preset according to actual testing requirements, for example, it can be preset to 3.0 × 10⁻⁶. -5 Pa up to 8.0 × 10 -5 Pa. The reference vacuum level is set to 3.0 × 10⁻⁶. - 5 Pa up to 8.0 × 10 -5 The pressure of Pa is to ensure that the vacuum environment within the detection chamber is essentially the same as the actual working vacuum environment of the anode target disk inside the CT tube. The internal vacuum level of the CT tube is typically maintained at 10 Pa during operation. -6 The Pa level was measured, and the detection chamber was evacuated to 3.0 × 10⁻⁶ Pa before heating began.-5 Pa up to 8.0 × 10 -5 A vacuum level of 8.0 × 10⁻⁶ Pa allows the workpiece to be placed in a low-pressure atmosphere similar to the actual working environment before heating. At this vacuum level, the concentration of residual background gas in the detection chamber is low, resulting in minimal background interference to the mass spectrometer results. If the reference vacuum level is higher than 8.0 × 10⁻⁶ Pa… -5 Excessive background gas remaining in the detection chamber can interfere with the accuracy of mass spectrometer detection of outgassing components. If the reference vacuum is below 3.0 × 10⁻⁶ Pa, further interference will occur. - 5 A vacuum level of 3.0 × 10⁻⁶ Pa would place excessive demands on the pumping capacity of the vacuum system, significantly increasing manufacturing costs and pumping time. Therefore, a reference vacuum level of 3.0 × 10⁻⁶ Pa is recommended. -5 Pa up to 8.0 × 10 -5 Pa can balance the simulation of the detection environment with the feasibility of the equipment.

[0042] The vacuum system employs a combination of mechanical and molecular pumps. The mechanical pump evacuates the detection chamber from atmospheric pressure to a low vacuum, while the molecular pump further evacuates it to a high vacuum until the reference vacuum level is reached. Throughout the subsequent testing process, the vacuum system maintains continuous evacuation, rather than shutting off the pumps after reaching the reference vacuum level. This is because the workpiece continuously releases gas during heating. If the vacuum system were to stop operating, the released gas would accumulate within the detection chamber, causing the vacuum level to deteriorate and making it impossible to perform multiple heating cycles of gas release testing. Continuous evacuation ensures that the gas released from the workpiece is continuously removed from the detection chamber, guaranteeing that the gas released in each heating cycle is promptly expelled. This ensures that the gas release data detected in subsequent heating cycles accurately reflects the remaining gas content inside the workpiece.

[0043] Step 230: Control the intermediate frequency induction heating coil to heat and maintain the temperature of the workpiece under test. The heating and maintaining parameters are determined based on the temperature rise curve of the anode target plate under actual working conditions.

[0044] The parameters for heating and heat preservation may include the magnitude of the voltage applied to the medium-frequency induction heating coil and the power supply duration, as well as the heating rate, target temperature, heat preservation time, and heating power.

[0045] The actual temperature rise curve under operating conditions refers to the temperature change of the target disk over time when the electron beam intermittently bombards the anode target disk in the CT tube. In actual firing, the electron beam does not bombard the target disk continuously, but rather in intermittent pulses. Each bombardment causes the target disk temperature to rise rapidly, and after the bombardment stops, the temperature naturally decreases. After multiple bombardment cycles, the target disk temperature accumulates to reach the operating temperature. The heating and holding parameters are determined based on the actual temperature rise curve to simulate the thermal shock environment of the target disk under actual operating conditions.

[0046] For example, controlling the intermediate frequency induction heating coil to heat the workpiece to be tested includes raising the workpiece to be tested from room temperature to 1300°C to 1500°C within 20 minutes, at a heating rate of 65°C / min to 75°C / min.

[0047] The above-mentioned temperature rise parameters were determined based on the temperature rise curve of the anode target disk under actual working conditions. In actual target firing, the electron beam does not bombard the anode target disk continuously, but rather in an intermittent pulsed manner. Each bombardment causes the target disk temperature to rise rapidly, and after the bombardment stops, the target disk temperature naturally decreases. After multiple bombardment cycles, the target disk temperature gradually accumulates and rises to the operating temperature. In actual target firing, the target disk temperature typically rises from room temperature to 1300℃ to 1500℃ after approximately 15 bombardment cycles. The traditional pipe-mounted venting process uses 15 heating and cooling cycles to simulate the above intermittent bombardment process, with each heating cycle lasting 1 minute followed by 4 minutes of cooling, for a total heating time of approximately 15 minutes, ultimately bringing the target disk temperature to 1300℃ to 1500℃.

[0048] This embodiment equates the above-described heating process to a continuous heating curve, i.e., continuously heating the workpiece under test from room temperature to 1300°C to 1500°C within 20 minutes. Since the heating mechanism of medium-frequency induction heating differs from that of electron beam bombardment, medium-frequency induction heating generates heat inside the workpiece through the eddy current effect. Its heating efficiency is slightly lower than the instantaneous heating efficiency of electron beam bombardment. Therefore, the total heating time is appropriately extended from 15 minutes in the traditional process to 20 minutes to compensate for the difference in heating efficiency and ensure that the workpiece under test reaches the required final temperature. The heating rate of 65°C / min to 75°C / min is calculated from the total heating time of 20 minutes and the total heating range of approximately 1300°C to 1500°C. This heating rate can simulate the rapid temperature rise thermal shock characteristics of the target disk under actual working conditions. If the heating rate is too slow, it cannot simulate the rapid temperature rise effect of the target disk under actual working conditions caused by electron beam bombardment, resulting in the slow release of gas inside the material under mild heating conditions, failing to truly reflect the gas release behavior of the target disk at the working temperature. If the heating rate is too fast, it may cause excessive internal thermal stress in the workpiece under test, resulting in thermal shock damage and affecting the reliability of the test results. A heating rate of 65℃ / min to 75℃ / min can strike a balance between simulating a real thermal shock environment and protecting the integrity of the workpiece under test.

[0049] The aforementioned heating rate and target temperature range are applicable not only to the outgassing detection of the complete anode target disk, but also to the individual testing of components such as graphite parts and composite metal substrates. For workpieces of different materials and sizes, appropriate adjustments can be made to the above heating parameters, such as adjusting the heating rate according to the heat capacity and thermal conductivity of the workpiece, but all should remain within the range of 65℃ / min to 75℃ / min.

[0050] By heating the workpiece under test from room temperature to 1300°C to 1500°C within 20 minutes at a heating rate of 65°C / min to 75°C / min, the heating process of this embodiment can simulate the rapid heating characteristics of the anode target plate under actual working conditions. This causes the workpiece material to undergo thermal shock similar to real working conditions during the heating process, thereby promoting the release of gases adsorbed on the material surface and dissolved gases inside the material under conditions close to actual working conditions. This allows the detected outgassing data to truly reflect the outgassing performance of the workpiece under test during actual use.

[0051] In some implementations, the intermediate frequency induction heating coil is controlled to heat and maintain the temperature of the workpiece under test using a stepped transformer method.

[0052] The intermediate frequency induction heating coil is controlled to be powered by a first voltage for a first time, a second voltage for a second time, and a third voltage for a third time in sequence to heat the workpiece under test. The first voltage is less than the second voltage, and the second voltage is less than the third voltage, that is, the supply voltage increases step by step in the order of the first voltage, the second voltage, and the third voltage.

[0053] The use of a stepped voltage increase method for heating ensures that the temperature of the workpiece under test rises steadily at a preset rate. In the initial heating stage, the workpiece is at room temperature, and its internal temperature distribution has not yet been established. Directly applying high-power heating would result in a large temperature difference between the workpiece surface and interior, generating significant thermal stress and potentially causing thermal shock damage. Therefore, a lower initial voltage is used to gradually establish a temperature gradient at lower power. As heating progresses, the workpiece temperature gradually increases, and its internal temperature distribution becomes more uniform. At this point, higher second and third voltages can be used to rapidly raise the workpiece to the target temperature at the target rate. The first heating time is longer than the second, and vice versa; that is, the heating time is longer with lower voltages and shorter with higher voltages. This is because when using lower voltages in the initial heating stage, the workpiece has a higher heat absorption efficiency, requiring a longer heating time for sufficient preheating. As the voltage gradually increases, the workpiece temperature is already higher, and the required heating time for further heating is correspondingly shorter.

[0054] The intermediate frequency induction heating coil is powered by a third voltage for a fourth time to maintain the temperature of the workpiece under test. The third voltage is the highest voltage during the heating stage and is also the power supply voltage used during the heat preservation stage. Maintaining the temperature with the highest voltage is to keep a constant high power input during the heat preservation stage to offset the heat lost by the workpiece under test to the surrounding environment through thermal radiation at high temperatures, thereby maintaining the temperature of the workpiece under test within the target temperature range. If a lower voltage is used for heat preservation, the input power will be insufficient to compensate for the heat loss, and the temperature of the workpiece under test will gradually decrease, making it impossible to maintain the target temperature. The fourth time is equal to the sum of the first time, the second time, and the third time.

[0055] As an optional implementation, the first time is 10 minutes, the second time is 5 minutes, the third time is 5 minutes, and the fourth time is 20 minutes, that is, the heating time is 20 minutes and the holding time is 20 minutes.

[0056] The aforementioned stepped voltage boost heating and holding method matches the heating process of the workpiece under test in actual working conditions. In actual target bombardment, the target disk temperature rises rapidly when bombarded by the electron beam. However, as the temperature increases, the heat radiation loss from the target disk to the surrounding environment gradually increases, requiring continuous electron beam bombardment to maintain the temperature. The stepped voltage boost heating in this embodiment simulates the gradual cumulative increase in target disk temperature during electron beam bombardment, while the holding stage uses continuous power supply at the highest voltage to simulate the continuous electron beam bombardment to maintain the target disk temperature. Through this method, the heating process experienced by the workpiece under test during the heating and holding stages is essentially consistent with the thermal shock environment under actual working conditions.

[0057] Furthermore, the aforementioned stepped transformer heating and insulation method also considers the load characteristics of the medium-frequency induction heating coil. The impedance characteristics of the medium-frequency induction heating coil differ between cold and hot states. Step-by-step voltage increases allow the output power of the medium-frequency induction heating power supply to gradually increase, avoiding power instability or harmonic interference caused by a single high-power load. Setting the first time interval to be longer than the second and third times results in a longer low-voltage power supply period during the initial heating phase, which is beneficial for the medium-frequency induction heating power supply and coil to complete preheating and stabilization under lower loads, creating stable operating conditions for subsequent high-voltage power supply.

[0058] Step 240: Control the intermediate frequency induction heating coil to stop heating, so that the workpiece to be tested can be cooled.

[0059] Cooling can be achieved through natural cooling, that is, after the power supply to the medium frequency induction heating coil is stopped, the workpiece under test is cooled down naturally by thermal radiation in a vacuum environment.

[0060] In some implementations, the cooling of the workpiece under test by the intermediate frequency induction heating coil is carried out by a stepped voltage transformation method.

[0061] The intermediate frequency induction heating coil is controlled to be powered by a fourth voltage for a fifth time, and then the power supply is stopped for a sixth time, in order to cool the workpiece under test. The fourth voltage is half of the third voltage.

[0062] The fifth time, when power is supplied at the fourth voltage, actually involves reducing the supply voltage of the intermediate frequency induction heating coil, allowing the coil to input energy to the workpiece under test at a lower power. At this point, the input power is lower than the heat power lost by the workpiece to the surrounding environment through thermal radiation at high temperatures, so the temperature of the workpiece begins to decrease, but the cooling rate is relatively slow. The sixth time, when power is cut off, is when the power supply to the intermediate frequency induction heating coil is completely cut off. At this point, the workpiece no longer receives any energy from the coil and only dissipates heat naturally in the vacuum environment through thermal radiation, resulting in a relatively faster cooling rate.

[0063] The reason for employing a two-stage cooling system is that directly and completely cutting off the power to allow the workpiece under test to cool naturally at high temperatures could generate excessive thermal stress. At temperatures between 1300°C and 1500°C, the internal temperature distribution of the workpiece material is relatively uniform. If the power is cut off directly at this point, the surface of the workpiece cools rapidly due to radiative heat dissipation, while the internal temperature drops more slowly, creating a large temperature gradient between the surface and the interior. This temperature gradient can generate thermal stress within the material, and if this thermal stress exceeds the material's strength limit, it may lead to cracks or deformation. By incorporating a slow cooling stage with low-voltage power supply before complete power-off, the temperature of the workpiece begins to decrease at a slower rate, helping to reduce the temperature gradient between the surface and the interior, thus mitigating the risk of thermal stress. After the slow cooling stage, the temperature of the workpiece has dropped to a relatively low level, and the temperature gradient generated by complete power-off and natural cooling is small enough to cause thermal damage to the workpiece.

[0064] The sum of the fifth and sixth times equals the fourth time. The fourth time is the duration of the heat preservation phase. The sum of the fifth and sixth times equals the fourth time, meaning the total duration of the cooling phase is equal to the total duration of the heat preservation phase.

[0065] As an optional implementation, the fourth voltage is 85V, the third voltage is 170V, 85V is half of 170V, the fifth time is 5min, the sixth time is 15min, and the fourth time is 20min. That is, the total duration of the cooling stage is 5min + 15min = 20min, which is equal to the 20min duration of the heat preservation stage.

[0066] Repeat steps 230 and 240 until the maximum number of loops is reached or the early termination condition is met.

[0067] The maximum number of cycles is a preset upper limit for heating cycles, used to prevent indefinite testing if the venting volume of the workpiece under test remains below standard. The early termination condition refers to the conditions under which the test can be terminated before reaching the maximum number of cycles, based on the test data. For example, if the difference in the decrease in vacuum level inside the test chamber between two adjacent heating cycles is less than a preset threshold, it indicates that the venting of the workpiece under test has stabilized, and the test can be terminated early. By setting both the maximum number of cycles and the early termination condition, the test can be prevented from proceeding indefinitely while also allowing for timely termination when venting is fully completed, thus improving testing efficiency.

[0068] During the heating, holding, and cooling processes, a vacuum gauge continuously monitors and records changes in the vacuum level within the detection chamber, while a mass spectrometer continuously monitors and records the gas composition and partial pressure within the chamber. The vacuum gauge operates continuously throughout the heating, holding, and cooling phases, collecting data on the vacuum level changes over time. Similarly, the mass spectrometer operates continuously throughout these three phases, performing real-time sampling and analysis of the gas within the detection chamber. Since gas release occurs not only during the heating and holding phases but also during the cooling phase as the temperature decreases, residual gas inside the workpiece continues to be released. Therefore, covering the entire heating, holding, and cooling process with the vacuum gauge and mass spectrometer ensures complete gas release data and avoids missing gas release information during the cooling phase.

[0069] There is a logical sequence and synergy among the above steps. The vacuuming step is performed before the heating step to ensure that the detection chamber reaches the reference vacuum level before heating begins. If heating begins before reaching the reference vacuum level, the large amount of residual gas in the detection chamber will interfere with the outgassing test results. The vacuum system is continuously evacuated throughout the heating, holding, and cooling processes, coordinating with the heating and cooling steps to ensure that the gas released in each cycle is promptly discharged, rather than accumulating in the detection chamber and affecting the accuracy of subsequent cycles. Vacuum gauges and mass spectrometers continuously monitor throughout the heating, holding, and cooling processes, synchronized with heating and cooling control. This ensures that the outgassing volume data, outgassing type data, and temperature change data correspond one-to-one over time, thus establishing a complete curve of outgassing behavior as a function of temperature. The cycle control step works in conjunction with the aforementioned steps, gradually removing the gas inside the workpiece through multiple heating cycles. During each cycle, the vacuum gauge and mass spectrometer record the attenuation trend of the outgassing data with the number of cycles, until the outgassing stabilizes or the maximum number of cycles is reached.

[0070] Step 250: Determine whether the workpiece to be tested is qualified based on the vacuum degree change data, gas composition and partial pressure data.

[0071] Vacuum degree change data reflects the total amount and rate of gas release from the workpiece under test. If the number of heating cycles required to reach the preset vacuum degree in the test chamber exceeds the preset threshold (e.g., 3-5 cycles, determined according to actual needs), it indicates that the gas content of the workpiece under test is high, and multiple heating cycles are required to exhaust the internal gas to the standard level. Therefore, the workpiece under test is unqualified.

[0072] If the vacuum level in the testing chamber still does not reach the preset vacuum level when the maximum number of cycles is reached (e.g., 6-10 times, determined according to actual needs), it means that the workpiece under test still cannot meet the qualified venting standard after the preset heating cycle, and the workpiece under test is unqualified.

[0073] If, based on vacuum level change data, the peak pressure in the detection chamber exceeds the preset pressure threshold in any cycle, it indicates a significant amount of concentrated venting during the heating cycle, rendering the workpiece unqualified. Understandably, peak pressure exceeding the preset threshold typically occurs in the first two cycles.

[0074] For example, the preset pressure threshold is 3.0 × 10⁻⁶. - ³Pa to 8.0×10 - ³Pa. The preset pressure threshold is a critical pressure value used to determine whether the workpiece under test is qualified. This critical value is compared with the actual peak pressure in the detection chamber during the testing process. The peak pressure refers to the pressure value corresponding to the lowest vacuum level reached in a heating cycle when the vacuum level in the detection chamber decreases due to the release of gas from the workpiece under test. During the heating cycle, the gas released by the workpiece under test causes the vacuum level in the detection chamber to decrease and the pressure to increase. The highest pressure value recorded by the vacuum gauge is the peak pressure of that cycle. If the peak pressure in the detection chamber exceeds the preset pressure threshold in a certain heating cycle, it indicates that the amount of gas released from the workpiece under test in that cycle is too large, causing the gas pressure in the detection chamber to rise to an unacceptable level. The preset pressure threshold is set to 3.0 × 10⁻⁶ Pa. - ³Pa to 8.0×10 - The pressure is 3Pa because within this pressure range, the vacuum level of the detection chamber has significantly deteriorated, but it is still within a level that the vacuum system can gradually restore through continuous evacuation. If the peak pressure exceeds 8.0 × 10⁶ Pa, the vacuum level will be significantly reduced. - A peak pressure of 3.0 × 10³ Pa indicates that the workpiece under test generated a large amount of gas release during heating, exceeding the pumping capacity of the vacuum system. The vacuum level could not be restored within an acceptable time, and the gas content of the workpiece was significantly high. If the peak pressure is below 3.0 × 10³ Pa... - A value of 3 Pa indicates that the outgassing volume of the workpiece under test is small and falls within an acceptable normal level. Therefore, this threshold is set to 3.0 × 10⁻⁶ Pa. - ³Pa can prevent test pieces with normal venting volume from being mistakenly judged as unqualified. The preset pressure threshold is set to 3.0 × 10⁻⁶. - ³Pa to 8.0×10 - ³Pa can be used as an effective critical value to determine whether the gas release of the workpiece under test is too high. It will not cause qualified products to be misjudged due to the threshold being too low, nor will it cause unqualified products to be missed due to the threshold being too high.

[0075] There is a correlation between the aforementioned reference vacuum level setting and the preset pressure threshold setting. The reference vacuum level is at 10... -5 The pressure is on the order of Pa, while the preset pressure threshold is 10. - The difference is on the order of ³Pa, approximately two orders of magnitude. Before heating began, the vacuum level in the detection chamber was 3.0 × 10³ Pa. -5 Pa up to 8.0 × 10-5 Pa, at which point the background gas concentration is extremely low. When the workpiece under test releases gas during heating, the pressure in the detection chamber rises from the reference vacuum level to 10 Pa. - The pressure rise is on the order of ³Pa, with an increase of approximately two orders of magnitude. This increase is sufficient for accurate measurement by a vacuum gauge and can clearly distinguish the pressure change caused by venting from background noise, providing a reliable detection window for determining whether the venting volume exceeds the limit. The reference vacuum level ensures a sufficiently low initial baseline for detection, giving the pressure rise caused by venting a sufficient dynamic range. The preset pressure threshold defines the boundary between acceptable and unacceptable levels within this dynamic range. The combination of these two factors ensures the reliability of the judgment result.

[0076] The gas composition and partial pressure data reflect the type of gas released by the workpiece under test.

[0077] If the mass spectrometer detects abnormal gases, such as molybdenum oxide or other characteristic gases that should not be present at high temperatures, it indicates that there is a problem with the material purity or surface cleanliness of the workpiece being tested, and the workpiece is unqualified.

[0078] If the mass spectrometer detects that the partial pressure of a certain characteristic gas exceeds the preset partial pressure threshold, it indicates that the outgassing amount of that gas component is too large, and the workpiece to be tested is unqualified.

[0079] The above-mentioned criteria can be used individually or in combination. Depending on the specific testing requirements, one or more of these criteria can be selected for evaluation. For example, when testing graphite components individually, the focus can be on detecting abnormal gases, as impurities in graphite components at high temperatures may release abnormal gases, thus determining whether the material quality of the graphite components is up to standard. When testing composite metal matrices individually, the focus can be on the number of cycles and peak pressure, as the content of dissolved gases in the metal matrix is ​​usually released gradually through multiple cycles, thus determining whether the processing of the composite metal matrix is ​​adequate. By applying the above criteria to the entire anode target disk or its constituent components, this method can pinpoint the gas release problem to a specific component, thereby providing precise guidance for production process improvement.

[0080] This method allows for the detection of gas release in the workpiece before tube loading, eliminating the need for full-tube gas release testing within the CT tube. This significantly shortens the testing cycle and reduces costs. Since interference from gas release from bearings and other tube components is eliminated during the testing process, the results accurately reflect the gas release characteristics of the anode target itself or its individual components, improving accuracy. Through coordinated detection using a vacuum gauge and mass spectrometer, this method can simultaneously acquire gas release volume and composition data, enabling a comprehensive evaluation of the workpiece's gas release performance. By testing the anode target as a whole or individual components such as graphite parts and composite metal substrates, when excessive gas release is detected, the problem can be accurately pinpointed to a specific component, guiding targeted improvements to the production process.

[0081] Figure 3 The diagram shows the vacuum level change curves within the detection chamber of a finished target disk over six cycles. The peak pressure in each cycle is marked with a red dot, and the red line represents the trend of peak pressure change. The trough pressure in each cycle is marked with a green dot, and the green line represents the trend of trough pressure change. The blue line represents the vacuum level change trend. The orange line represents the temperature change curve during the cycles, with a maximum temperature of approximately 1350℃. It should be noted that an infrared thermometer is used in this embodiment to measure the temperature of the workpiece. Infrared thermometers have low measurement accuracy below 600℃. Figure 3 Temperature data below 600℃ is not displayed, but this does not mean that the temperature of the workpiece under test will not drop below 600℃ during the cycle.

[0082] Figure 3 In the corresponding embodiments, the voltage and time corresponding to the heating-heating-cooling cycle are shown in Table 1.

[0083] Table 1 from Figure 3 It can be seen that in the first cycle, the workpiece released a large amount of gas, and the vacuum level in the detection chamber decreased significantly, with the peak pressure remaining at a high level. As the number of heating cycles increased, the rate of decrease in vacuum level in the detection chamber gradually decreased, and the peak pressure gradually decreased, indicating that the gas adsorbed on the surface of the workpiece and the dissolved gas inside were continuously discharged after each heating cycle. When the cycle reached the 5th and 6th cycles, the rate of decrease in vacuum level in each cycle became consistent, and the vacuum level in the detection chamber remained basically stable, indicating that the amount of gas released from the workpiece had stabilized, and the amount of residual releasable gas had decreased to a low level, meaning the workpiece met the quality requirements.

[0084] Figure 4The curves showing the changes in the type and amount of gas release as a function of temperature during a specific heating cycle when degassing finished graphite products are presented. Figure 3 In the corresponding embodiments, the voltage and time corresponding to the heating-heating-cooling cycle are also shown in Table 1.

[0085] Depend on Figure 4 It is evident that within the temperature range of room temperature to 600℃, the released gases are mainly water vapor and nitrogen adsorbed on the surface, as well as carbon monoxide and carbon dioxide produced by the decomposition of unstable oxygen-containing groups. Above 600℃, the released gases are mainly hydrogen produced by the decomposition, diffusion, and release of hydrogen atoms dissolved within the graphite lattice or in defects. As shown in the curve, the relative peak values ​​(trends) of each gas conform to both the theoretical and required values, indicating that the workpiece meets the requirements.

[0086] As can be seen from the curve, the data curves for each gas during the test process meet the requirements. Specifically, at low temperatures, the main process is the volatilization of H2O, as well as the adsorption of N2 and CO2 in the air. As the temperature increases, the hydrogen atoms dissolved in the graphite lattice or defects decompose and volatilize. (The partial pressures of each gas detected by the mass spectrometer are mainly relative values, and the relative peak values ​​(trends) of each gas meet the theoretical or required values.)

[0087] Principles and steps not explicitly described in this application are all obtainable by those skilled in the art through conventional technical means, and therefore will not be elaborated upon. Obviously, those skilled in the art can make various modifications and variations to this application without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include these modifications and variations.

Claims

1. A device for detecting venting of an anode target plate, characterized in that, include: A quartz bell jar, which provides a sealed detection chamber; A loading platform is located at the bottom of the detection chamber and is used to support the workpiece to be tested; the workpiece to be tested includes the entire anode target disk or components that make up the anode target disk; A vacuum system, connected to the detection chamber, is used to evacuate the detection chamber during the detection process; A vacuum gauge, connected to the detection chamber, is used to detect the vacuum level inside the detection chamber in real time; A medium-frequency induction heating coil is arranged around the outer periphery of the quartz bell jar to perform induction heating on the workpiece to be tested on the platform; the medium-frequency induction heating coil is vertically adjustable relative to the platform to change the coupling distance between the medium-frequency induction heating coil and the workpiece to be tested. A mass spectrometer, whose sampling port is connected to the detection chamber, is used to detect the composition and partial pressure of the gas released by the workpiece under test during the heating process.

2. A method for detecting venting of an anode target disk, characterized in that, The implementation using the anode target plate venting detection device as described in claim 1 includes the following steps: The workpiece to be tested is placed on the loading platform, and the quartz bell jar is sealed to the loading platform to form a closed testing chamber; The vacuum system is activated to evacuate the detection chamber, bringing the interior of the detection chamber to a reference vacuum level, and the vacuum system is kept in a continuous evacuation state during subsequent detection processes; The medium-frequency induction heating coil is controlled to heat and maintain the temperature of the workpiece under test. The heating and maintaining parameters are determined based on the temperature rise curve of the anode target plate under actual working conditions. The intermediate frequency induction heating coil is controlled to stop heating, allowing the workpiece to be tested to cool down; Repeat the steps of controlling the medium-frequency induction heating coil to heat and keep the workpiece under test, and controlling the medium-frequency induction heating coil to stop heating, until the maximum number of cycles is reached or the early termination condition is met; During the heating, heat preservation and cooling processes, the vacuum level change data in the detection chamber is detected and recorded in real time by a vacuum gauge, and the gas composition and partial pressure data in the detection chamber are continuously detected and recorded by a mass spectrometer. Based on the vacuum degree change data, the gas composition and partial pressure data, determine whether the workpiece to be tested is qualified.

3. The method for detecting venting of the anode target disk according to claim 2, characterized in that, The determination of whether the workpiece to be tested is qualified based on the vacuum degree change data, the gas composition and partial pressure data includes at least one of the following: The number of cycles required to reach a preset vacuum level in the detection chamber is determined based on the vacuum change data. If the required number of cycles exceeds the preset threshold, the workpiece to be tested is determined to be unqualified. If the vacuum level of the detection chamber does not reach the preset vacuum level when the maximum number of cycles is reached, the workpiece to be tested is determined to be unqualified. Based on the vacuum change data, determine the peak pressure of the detection chamber in each cycle; If the peak pressure of any cycle exceeds the preset pressure threshold, the workpiece to be tested is determined to be unqualified. If the presence of abnormal gas is determined based on the gas composition and partial pressure data, then the workpiece to be tested is determined to be unqualified. If, based on the gas composition and partial pressure data, it is determined that there is a characteristic gas with a partial pressure exceeding a preset partial pressure threshold, then the workpiece to be tested is determined to be unqualified.

4. The method for detecting venting of the anode target disk according to claim 2, characterized in that, Controlling the medium-frequency induction heating coil to heat the workpiece to be tested includes: raising the temperature of the workpiece to be tested from room temperature to 1300°C to 1500°C within 20 minutes, with a heating rate of 65°C / min to 75°C / min.

5. The method for detecting venting of the anode target disk according to claim 2, characterized in that, Controlling the medium-frequency induction heating coil to heat and maintain the temperature of the workpiece under test includes: The intermediate frequency induction heating coil is controlled to be powered by a first voltage for a first time, a second voltage for a second time, and a third voltage for a third time in sequence to heat the workpiece to be tested; the first voltage is less than the second voltage, the second voltage is less than the third voltage; the first time is greater than the second time, and the first time is greater than the third time. The intermediate frequency induction heating coil is controlled to be powered by the third voltage for a fourth time to keep the workpiece under test warm; the fourth time is equal to the sum of the first time, the second time and the third time.

6. The method for detecting venting of the anode target disk according to claim 5, characterized in that, Controlling the intermediate frequency induction heating coil to cool the workpiece under test includes: The intermediate frequency induction heating coil is controlled to be powered by a fourth voltage for a fifth time and to stop power supply for a sixth time in sequence; wherein the fourth voltage is half of the third voltage; and the sum of the fifth time and the sixth time is equal to the fourth time.

7. The method for detecting venting of the anode target disk according to claim 6, characterized in that, The first voltage is 140V, the second voltage is 155V, the third voltage is 170V, and the fourth voltage is 85V; the first time is 10min, the second time is 5min, the third time is 5min, the fourth time is 20min, the fifth time is 5min, and the sixth time is 15min.

8. The method for detecting venting of the anode target disk according to claim 2, characterized in that, Before placing the workpiece to be tested onto the loading platform, the method further includes: Control the intermediate frequency induction heating coil to descend to the avoidance position; After sealing the quartz bell jar with the loading platform, the method further includes: controlling the intermediate frequency induction heating coil to rise to the height of the workpiece to be tested.

9. The method for detecting venting of the anode target disk according to claim 2, characterized in that, The reference vacuum level is 3.0 × 10⁻⁶. -5 Pa ~ 8.0 × 10 -5 Pa.

10. The method for detecting venting of the anode target disk according to claim 3, characterized in that, The preset pressure threshold is 3.0 × 10⁻⁶. -3 Pa ~ 8.0 × 10 -3 Pa.

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