Modular low temperature heavy ion irradiation terminal device and multi-low temperature point synchronous irradiation method

Abstract

The present application belongs to the technical field of space environment ground simulation and electronic device radiation effect test, and particularly relates to a modular low-temperature heavy ion irradiation terminal device and a multi-low-temperature point synchronous irradiation method. The irradiation terminal device includes, in sequence along the propagation direction of the heavy ion beam, a beam input interface unit, a modular low-temperature vacuum irradiation unit, and an atmospheric sample table unit. The modular low-temperature vacuum irradiation unit includes a standby vacuum module and N low-temperature vacuum modules arranged in series. The standby vacuum module is used to replace any low-temperature vacuum module that has completed a test temperature point. Adjacent low-temperature vacuum modules are connected through a vacuum module connecting mechanism. Each low-temperature vacuum module forms an independent low-temperature temperature zone and includes an independent low-temperature temperature point under the same beam energy condition. The present scheme can connect multiple independently temperature-controlled low-temperature vacuum modules in series along the beam direction, form multiple low-temperature temperature zones that are thermally isolated, and achieve multi-low-temperature point synchronous irradiation under single beam output.

Description

Technical Field

[0001] This invention belongs to the field of space environment ground simulation and electronic device radiation effect testing technology, and particularly relates to modular low temperature heavy ion irradiation terminal equipment and multi-low temperature point synchronous irradiation method. Background Technology

[0002] With the rapid development of deep space exploration, lunar exploration and commercial navigation, electronic devices are increasingly facing service scenarios involving the coupling effect of low temperature and even extremely low temperature with irradiation. In such environments, temperature itself will significantly affect the single-event response characteristics of the device (such as the single-event flip cross section drifting as the temperature decreases). Therefore, low temperature environment and heavy ion irradiation must be tested as a coupling effect in a systematic way, rather than simply studied separately.

[0003] Existing ground-based simulation devices in China are capable of conducting heavy-ion irradiation testing of electronic components. Current technology can also solve the problems of heavy-ion single-event effect testing and single-temperature point control, enabling temperature testing from low to high temperatures over a relatively wide temperature range. Taking the single-event test platform in the Harbin Institute of Technology's space environment ground-based simulation device as an example, this platform represents the current technical capability level of low-temperature heavy-ion irradiation testing in China—it can perform single-temperature point control and heavy-ion irradiation on devices in a vacuum environment. However, even with this as a representative example, existing technologies still have the following core challenges: First, the low-temperature setup process is extremely time-consuming, and multi-temperature point testing is costly: the cooling and stabilization process of the low-temperature system itself has great thermal inertia. Existing solutions are usually single-sample stage or single-temperature zone structures. If data from multiple low-temperature points are to be obtained, the test can only be performed in series in the manner of "setting temperature - cooling - stabilizing temperature - beam calibration - irradiation - re-temperature adjustment". Each temperature switch requires a long cooling and stabilization process, and time is extremely precious in heavy ion machines. This series mode will compress the effective irradiation time ratio many times over.

[0004] Second, the horizontal comparability of multi-temperature data is seriously insufficient: the existing scheme acquires different temperature data at different time points in sequence. The sample state, beam state, test bias state and external environment are all prone to drift. For the experimental requirements of studying the response differences of the same batch of device sample groups at multiple low temperature points, it is difficult to rigorously prove that the response differences are entirely due to temperature changes rather than experimental condition drift.

[0005] Third, the low-temperature environment presents unique thermal requirements for parallel multi-temperature zone experiments. This problem is specific to low-temperature experiments and differs fundamentally from parallel multi-LET experiments at room temperature (which can be achieved by physically adjusting the beam current LET value through a de-energizer) and parallel multi-temperature point experiments at high temperatures (where thermal management aims to prevent heat loss). In low-temperature environments, achieving the synchronous establishment of multiple independent temperature points cannot simply rely on room-temperature multi-cavity architectures or high-temperature localized heating architectures. Each low-temperature point requires an independent cold source, a thermal shielding layer (to prevent radiant heat leakage), thermally insulating supports (to prevent solid-borne heat conduction), and a cable thermal anchoring structure (to prevent heat leakage from conductors from compromising low-temperature stability). This is to avoid thermal interference between adjacent temperature zones and maintain the independent stability of each zone. These unique thermal constraints of low temperatures have not been addressed in existing solutions.

[0006] Therefore, how to overcome the efficiency trap of "serial testing" in cryogenic systems, achieve the synchronous establishment and irradiation of multiple independent cryogenic temperature points under the same beam conditions, and realize modular layout while meeting the requirements of cryogenic thermal isolation, has become a unique problem that urgently needs to be solved in the evaluation of deep space exploration devices. Summary of the Invention

[0007] In view of this, the present invention aims to provide a modular low-temperature heavy ion irradiation terminal device and a method for simultaneous irradiation at multiple low-temperature points, in order to solve the problems of existing low-temperature heavy ion experiments, which are caused by the single-temperature zone structure, which means that multiple low-temperature points can only be tested serially, the cooling and stabilization time is long and the data comparability is poor, as well as the lack of thermal isolation and independent temperature control structure support when multiple low-temperature zones are parallel.

[0008] To achieve the above objectives, the technical solution created by this invention is implemented as follows: The modular low-temperature heavy ion irradiation terminal equipment includes, in sequence along the heavy ion beam propagation direction: a beam input interface unit, a modular low-temperature vacuum irradiation unit, and an atmospheric sample stage unit; the beam input interface unit is used to connect with the front-end particle accelerator and to connect the particle accelerator beamline with the beam channel of the terminal equipment. The modular low-temperature vacuum irradiation unit includes multiple vacuum modules, specifically a spare vacuum module and N low-temperature vacuum modules arranged in series, where N≥2; the spare vacuum module is used to replace any low-temperature vacuum module that has completed the test temperature point; adjacent low-temperature vacuum modules are connected by a vacuum module connection mechanism to achieve detachable and sealed connection and coaxial alignment of the beamlines; Each vacuum module is equipped with an independent electrical connection and signal output structure, beam monitoring and measurement structure, and low-temperature sample stage. The low-temperature sample stage of each vacuum module is equipped with an independent cooling source, heating compensator, temperature sensor, and temperature closed-loop control circuit. External heat is prevented from leaking into the sample area where the low-temperature sample stage is located through thermal shielding components and thermal insulation support components, so that each low-temperature vacuum module forms an independent low-temperature zone that is thermally isolated from each other under the same beam energy conditions.

[0009] Furthermore, it also includes room temperature control sample sites to obtain comparative data on room temperature and low temperature responses in the same batch of tests.

[0010] Furthermore, the low-temperature sample stages are arranged in parallel, and each low-temperature sample stage has an independent sample bearing surface; the horizontal projections of the low-temperature sample stages in each low-temperature vacuum module do not overlap, and the projected area is not greater than the beam area of ​​the particle accelerator.

[0011] Furthermore, each vacuum module is an independent vacuum chamber module, and each vacuum module includes a vacuum chamber shell; the vacuum chamber shell is provided with a beam inlet end and a beam outlet end along the beam direction, and the vacuum chamber shell also includes a vacuum pumping interface, a vacuum measurement interface, an electrical connector interface, and an observation and maintenance interface; the vacuum pumping interface is connected to the vacuum pump group, the vacuum measurement interface is equipped with a vacuum gauge, and the electrical connector interface is used to bias the sample of the device under test and to lead the power supply and test signal to the external test system of the vacuum chamber shell.

[0012] Furthermore, the low-temperature sample stage is also equipped with independent cooling and thermal anchoring components; the cooling components are used to transfer cold energy to the corresponding low-temperature zone; the thermal anchoring components are used to thermally anchor the cables and signal lines introduced into the low-temperature zone.

[0013] Furthermore, the electrical connection and signal output structure includes a vacuum connector, low thermal leakage wires, a shielded grounding structure, and an external test interface; the power lines, ground lines, and signal lines of the device under test samples in each low-temperature vacuum module are all led out through low thermal leakage wires and connected to the intermediate temperature level or cold plate through thermal anchoring components before entering the low-temperature zone; they are led out to external test equipment through the external test interface to perform online biasing, functional monitoring, single-event upset counting, single-event interruption capture, and single-event transient sampling on the device under test samples.

[0014] Furthermore, the beam monitoring and metrology structure includes a flux meter, a beam spot monitor, a dose recording unit, and a time recording unit. The beam monitoring and metrology structure is used to record beam intensity, beam spot position, flux, and irradiation time in real time.

[0015] Furthermore, the beam input interface unit includes a beam channel interface, a sealing structure, and a beamline gate valve; the beam channel interface is connected to the vacuum beamline flange of the particle accelerator, and the beamline gate valve is used to introduce or block the beam.

[0016] Furthermore, it also includes a control system, with each vacuum module containing a control system interface connected to the control system. The control system includes a temperature control subsystem, a vacuum and valve management subsystem, a beam interlocking subsystem, and a data recording subsystem. The temperature control subsystem is used to perform closed-loop adjustment of the corresponding cooling source and heating compensator based on feedback data from the temperature sensors in each cryogenic sample stage, so as to stabilize the target temperature of each cryogenic sample stage. The vacuum and valve management subsystem is used to control the vacuuming and isolation valve operation of each cryogenic vacuum module. The beam interlocking subsystem is used to prevent the beam from being turned on when any cryogenic temperature zone located on the beam path has not reached a stable target temperature, the vacuum does not meet the working conditions, the sample loading status is abnormal, or the safety shielding door is not closed. The data recording subsystem is used to synchronously record the temperature, flux, bias status, and device response signals of each cryogenic temperature zone.

[0017] The method for simultaneous irradiation at multiple low-temperature points using a modular low-temperature heavy ion irradiation terminal equipment, which operates using the aforementioned modular low-temperature heavy ion irradiation terminal equipment, includes the following steps: S1. Determine the test requirements; S2. Configure the corresponding number of low-temperature vacuum modules according to the target temperature point set, and set the target temperature for each low-temperature vacuum module; S3. Mount the device under test sample onto the low-temperature sample stage of the corresponding low-temperature vacuum module; S4. Start vacuuming and enter the pre-cooling stage; S5. Perform beam preparation and calibration; after the temperature of each cryogenic vacuum module has stabilized, perform beam alignment, beam spot uniformity check and beam metering calibration. S6. Turn on the beam and simultaneously cover the temperature control area of ​​each low-temperature vacuum module to achieve simultaneous irradiation of multiple low-temperature points; S7. When the sample of the device under test in a certain low-temperature vacuum module reaches the target injection volume, the corresponding low-temperature vacuum module is replaced by the spare vacuum module; at this time, other low-temperature vacuum modules continue to work. S8. The test is completed and the samples are ready.

[0018] Compared with the prior art, the present invention can achieve the following beneficial effects: 1. Significantly reduces the total time of multi-temperature point experiments: This invention transforms the original serial low-temperature experiment, which required "multiple cooling-multiple temperature stabilization-multiple irradiation", into a parallel mode of "one overall pre-cooling-multiple independent fine-tuning-one synchronous irradiation", avoiding the waste of machine time in repeatedly undergoing a long cooling process for each temperature point, and significantly increasing the effective irradiation time ratio of low-temperature heavy ion experiments.

[0019] 2. The data from multiple low-temperature points have extremely high consistency and comparability: Since multiple temperature zones are simultaneously irradiated under the same beam output period, the same beam energy conditions, and the same test bias conditions, the interference of time drift, beam drift, and sample state drift on the comparison results is effectively eliminated, providing a more reliable data basis for studying the physical mechanism of temperature on single-particle flip-off cross section and threshold drift.

[0020] 3. Solved the engineering challenges of thermal isolation and thermal anchoring for low-temperature applications: This solution achieves low thermal interference between adjacent low-temperature zones through the system integration of independent cold sources, thermal insulation support components, thermal shielding components, and cable thermal anchoring structures, ensuring that each temperature zone is independently and stably at the target low temperature point. This provides an engineering-feasible structural guarantee for synchronous irradiation of multiple low-temperature zones. Attached Figure Description

[0021] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments and descriptions of the invention are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a schematic diagram of the overall architecture of the low-temperature heavy ion irradiation terminal equipment in an embodiment of the present invention; Figure 2 This is an overall flowchart of the multi-low temperature point synchronous irradiation method in an embodiment of the present invention. Detailed Implementation

[0022] To make the purpose, technical solution, and advantages of this invention clearer, the following description is provided in conjunction with the appendix. Figure 1 , 2 The present invention will be further described in detail below with reference to specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the present invention and do not constitute a limitation thereof.

[0023] This invention provides a modular low-temperature heavy ion irradiation terminal device, which includes, in sequence along the heavy ion beam propagation direction: a beam input interface unit, a modular low-temperature vacuum irradiation unit, and an atmospheric sample stage unit. The beam input interface unit is used to connect to the front-end particle accelerator and to connect the particle accelerator beamline to the beam channel of the terminal device. The modular low-temperature vacuum irradiation unit includes multiple vacuum modules, specifically including a spare vacuum module and N low-temperature vacuum modules arranged in series, where N≥2. The spare vacuum module is used to replace any low-temperature vacuum module that has completed the test temperature point. Adjacent low-temperature vacuum modules are connected by a vacuum module connection mechanism to achieve detachable and sealed connection and coaxial alignment of the beamline. This embodiment can also set a room temperature control sample position to obtain comparative data of room temperature and low temperature responses in the same batch of tests.

[0024] Each vacuum module is equipped with an independent electrical connection and signal output structure, beam monitoring and measurement structure, and low-temperature sample stage. Each vacuum module includes a backup vacuum module and N low-temperature vacuum modules. The low-temperature sample stage is equipped with an independent cooling source, heating compensator, temperature sensor, and temperature closed-loop control loop. External heat leakage into the sample area where the low-temperature sample stage is located is prevented by thermal shielding components and thermal insulation support components. This allows each low-temperature vacuum module to form an independent low-temperature zone that is thermally isolated from each other under the same beam energy conditions, and includes an independent low-temperature point T, specifically low-temperature points T1, T2, T3...TN. The cooling source can be a mechanical refrigerator, cold head, liquid nitrogen cold source, liquid helium cold source, or other low-temperature cold source. The heating compensator is used to implement fine regenerative temperature control on the basis of low temperature. The temperature sensor is used to collect the actual temperature of each temperature zone in real time.

[0025] The sample area refers to the local space area where the low-temperature sample stage and the sample under test it carries are located. The low-temperature sample stage is the physical carrier of the sample area. The low-temperature sample stage is also equipped with independent cooling and thermal anchoring components. The cooling components are used to transfer the cold energy of the cooling source to the low-temperature sample stage, so that the low-temperature sample stage and the sample under test it carries reach the target low temperature. The heating compensator is used to implement fine heat recovery temperature control on the basis of low temperature to stabilize the temperature of the sample area. The temperature sensor collects the temperature of the sample area in real time. The temperature closed-loop control loop adjusts the output of the cooling source and the heating compensator according to the feedback data of the temperature sensor, so that the sample area is stabilized at the preset target low temperature point. The thermal shielding component and the thermal insulation support component are set between the sample area and the vacuum chamber shell, which are used to reduce radiative heat leakage and reduce heat conduction, respectively. The thermal anchoring component is used to thermally anchor the cables and signal lines introduced into the low-temperature area to reduce cable heat leakage. Through the above structure, the sample areas in each low-temperature vacuum module form independent low-temperature areas that are thermally isolated from each other and do not interfere with each other or have low interference.

[0026] like Figure 1 As shown, the low-temperature heavy ion irradiation terminal equipment is provided with a beam input interface unit, a low-temperature vacuum module one, a low-temperature vacuum module two, ... a low-temperature vacuum module N, and an atmospheric sample stage unit along the direction of heavy ion beam propagation. The atmospheric sample stage unit is located at the end of the terminal equipment. Adjacent vacuum devices are connected through a vacuum device connection mechanism. The irradiation terminal equipment also includes a backup vacuum module. The low-temperature heavy ion irradiation terminal equipment also includes a control system. Each vacuum module includes a control system interface connected to the control system. Low-temperature vacuum module one, low-temperature vacuum module two, ... low-temperature vacuum module N, and the backup vacuum module all include a control system interface and a low-temperature sample stage.

[0027] The beam input interface unit is used to connect the beamline of the particle accelerator to the beam channel of the terminal equipment, ensuring that the beam enters the irradiation terminal equipment with a preset energy. The beam input interface unit includes at least a beam channel interface, a sealing structure, and a beamline gate valve. The beam channel interface is connected to the vacuum beamline flange of the particle accelerator, and the beamline gate valve is used to introduce or block the beam.

[0028] The low-temperature sample stages are arranged in parallel, each with an independent sample bearing surface. The horizontal projections of the low-temperature sample stages in each low-temperature vacuum module do not overlap, and the projected area is no larger than the beam area of ​​the particle accelerator. Each vacuum module is an independent vacuum chamber module, and each vacuum module includes a vacuum chamber shell.

[0029] The vacuum chamber housing is provided with a beam inlet end and a beam outlet end along the beam direction. The vacuum chamber housing also includes a vacuum pumping interface, a vacuum measurement interface, an electrical connector interface, and an observation and maintenance interface. The vacuum pumping interface is connected to the vacuum pump group, the vacuum measurement interface is equipped with a vacuum gauge, and the electrical connector interface is used to bias the sample of the device under test and to lead the power supply and test signal to the external test system of the vacuum chamber housing.

[0030] The vacuum equipment connection mechanism enables mechanical connection, vacuum sealing, beam alignment, and module isolation between adjacent cryogenic vacuum modules. The vacuum equipment connection mechanism includes a sealing connection component and a beam coaxial positioning component. The sealing connection component adopts a gate valve structure to provide isolation, allowing gas to be released only from the cryogenic vacuum module when sample replacement or maintenance is required without disrupting the vacuum conditions of other cryogenic vacuum modules. This enables highly efficient test organization with no or minimal downtime. The beam coaxial positioning component adopts an adjustable coaxial structure, and the connection mechanism provides fine-tuning capability so that precise coaxiality of the beam can be achieved after assembly.

[0031] The electrical connection and signal lead-out structure is used to support online biasing and functional testing during cryogenic irradiation. The electrical connection and signal lead-out structure includes a vacuum electrical connector, low thermal leakage wires, a shielded grounding structure, and an external test interface. The power lines, ground lines, and signal lines of the device under test samples in each cryogenic vacuum module are all led out through low thermal leakage wires and connected to the intermediate temperature level or cold plate through thermal anchoring components before entering the cryogenic temperature zone. The external test interface leads to external test equipment to perform online biasing, functional monitoring, single-event upset counting, single-event functional interruption capture, and single-event transient sampling on the device under test samples.

[0032] The beam monitoring and metrology structure includes a flux meter, a beam spot monitor, a dose recording unit, and a time recording unit. The beam monitoring and metrology structure is used to record beam intensity, beam spot position, flux, and irradiation time in real time to ensure that the beam parameters of each temperature control zone are traceable during the synchrotron irradiation process. The beam input interface unit includes a beam channel interface, a sealing structure, and a beamline gate valve. The beam channel interface is connected to the vacuum beamline flange of the particle accelerator, and the beamline gate valve is used to introduce or block the beam.

[0033] The control system coordinates the vacuum system, cryogenic system, beam system, and data acquisition system. Specifically, the control system includes a temperature control subsystem, a vacuum and valve management subsystem, a beam interlock subsystem, and a data recording subsystem. The temperature control subsystem uses feedback data from temperature sensors in each cryogenic sample stage to perform closed-loop regulation of the corresponding cooling source and heating compensator to stabilize the target temperature of each temperature zone and each cryogenic sample stage. The vacuum and valve management subsystem controls the vacuuming and isolation valve operation of each cryogenic vacuum module. The beam interlock subsystem prevents the beam from starting when any cryogenic temperature zone on the beam path fails to reach its stable target temperature, the vacuum does not meet operating conditions, the sample loading status is abnormal, or the safety shielding door is not closed. The data recording subsystem synchronously records the temperature, flux, bias status, and device response signals of each cryogenic temperature zone.

[0034] The method for simultaneous irradiation at multiple low-temperature points using a modular low-temperature heavy ion irradiation terminal equipment, which operates using the aforementioned modular low-temperature heavy ion irradiation terminal equipment, includes the following steps: S1. Determine the test requirements, set the target low temperature point set T1, T2, T3...TN, and determine the number of test device samples, target injection amount, and whether online bias testing is required for each temperature point.

[0035] S2. Configure the corresponding number of low-temperature vacuum modules according to the target temperature point set, and set the target temperature for each low-temperature vacuum module.

[0036] S3. Mount the device under test sample onto the low-temperature sample stage of the corresponding low-temperature vacuum module.

[0037] S4. Close the vacuum irradiation chamber, start the vacuum pumping and enter the pre-cooling stage.

[0038] S5. Perform beam preparation and calibration; after the temperature of each cryogenic vacuum module stabilizes, perform beam alignment, beam spot uniformity check and beam metering calibration.

[0039] S6. Turn on the beam and simultaneously cover the temperature control zone of each low-temperature vacuum module to achieve synchronous irradiation of multiple low-temperature points. During the irradiation process, the temperature, flux, and electrical response of each temperature zone are recorded simultaneously.

[0040] S7. When the sample of the device under test in a certain low-temperature vacuum module reaches the target injection volume, close the valve body corresponding to the low-temperature vacuum module, replace the corresponding low-temperature vacuum module with the spare vacuum module, and only replace the low-temperature vacuum module. Perform the venting, sample replacement and re-vacuuming operations. At this time, other low-temperature vacuum modules continue to work.

[0041] S8. After the test is completed and the sample is discharged, the beam is turned off after all tests are completed, the temperature is restored according to the set program, and the chamber is opened and the sample is discharged after backfilling with dry inert gas or dry nitrogen to a safe pressure. All test data are saved.

[0042] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this invention can be achieved, and this is not limited herein.

[0043] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A modular low-temperature heavy ion irradiation terminal device, characterized in that, Along the direction of heavy ion beam propagation, the components are sequentially: a beam input interface unit, a modular low-temperature vacuum irradiation unit, and an atmospheric sample stage unit. The beam input interface unit is used to connect to the front-end particle accelerator and to connect the particle accelerator beamline to the beam channel of the terminal equipment. The modular low-temperature vacuum irradiation unit includes multiple vacuum modules, specifically a spare vacuum module and N low-temperature vacuum modules arranged in series, where N≥2; the spare vacuum module is used to replace any low-temperature vacuum module that has completed the test temperature point; adjacent low-temperature vacuum modules are connected by a vacuum module connection mechanism to achieve detachable and sealed connection and coaxial alignment of the beamlines; Each vacuum module is equipped with an independent electrical connection and signal output structure, beam monitoring and measurement structure, and low-temperature sample stage. The low-temperature sample stage of each vacuum module is equipped with an independent cooling source, heating compensator, temperature sensor, and temperature closed-loop control circuit. External heat is prevented from leaking into the sample area where the low-temperature sample stage is located through thermal shielding components and thermal insulation support components, so that each low-temperature vacuum module forms an independent low-temperature zone that is thermally isolated from each other under the same beam energy conditions.

2. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, It also includes room temperature control samples to obtain comparative data on room temperature and low temperature responses in the same batch of tests.

3. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, The low-temperature sample stages are arranged in parallel, and each low-temperature sample stage has an independent sample bearing surface; the horizontal projections of the low-temperature sample stages in each low-temperature vacuum module do not overlap, and the projected area is not greater than the beam area of ​​the particle accelerator.

4. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, Each vacuum module is an independent vacuum chamber module, and each vacuum module includes a vacuum chamber shell. The vacuum chamber shell is provided with a beam inlet end and a beam outlet end along the beam direction. The vacuum chamber shell also includes a vacuum pumping interface, a vacuum measurement interface, an electrical connector interface, and an observation and maintenance interface. The vacuum pumping interface is connected to the vacuum pump group, the vacuum measurement interface is equipped with a vacuum gauge, and the electrical connector interface is used to bias the sample of the device under test and to lead the power supply and test signal to the external test system of the vacuum chamber shell.

5. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, The low-temperature sample stage is also equipped with independent cooling and thermal anchoring components; the cooling component is used to transfer cold energy to the corresponding low-temperature zone; the thermal anchoring component is used to thermally anchor the cables and signal lines introduced into the low-temperature zone.

6. The modular low-temperature heavy ion irradiation terminal equipment according to claim 5, characterized in that, The electrical connection and signal output structure includes a vacuum connector, low thermal leakage wires, a shielded grounding structure, and an external test interface. The power lines, ground lines, and signal lines of the device under test samples in each low-temperature vacuum module are all led out through low thermal leakage wires and connected to the intermediate temperature level or cold plate through thermal anchoring components before entering the low-temperature zone. The external test interface leads to external test equipment to perform online biasing, functional monitoring, single-event upset counting, single-event interruption capture, and single-event transient sampling on the device under test samples.

7. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, The beam monitoring and metrology structure includes a flux meter, a beam spot monitor, a dose recording unit, and a time recording unit. The beam monitoring and metrology structure is used to record beam intensity, beam spot position, flux, and irradiation time in real time.

8. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, The beam input interface unit includes a beam channel interface, a sealing structure, and a beamline gate valve; the beam channel interface is connected to the vacuum beamline flange of the particle accelerator, and the beamline gate valve is used to introduce or block the beam.

9. The modular low-temperature heavy ion irradiation terminal equipment according to claim 1, characterized in that, It also includes a control system, with each vacuum module containing a control system interface connected to the control system. The control system includes a temperature control subsystem, a vacuum and valve management subsystem, a beam interlocking subsystem, and a data recording subsystem. The temperature control subsystem is used to perform closed-loop adjustment of the corresponding cooling source and heating compensator based on feedback data from the temperature sensors in each cryogenic sample stage, so as to stabilize the target temperature of each cryogenic sample stage. The vacuum and valve management subsystem is used to control the vacuuming and isolation valve operation of each cryogenic vacuum module. The beam interlocking subsystem is used to prevent the beam from being turned on when any cryogenic temperature zone located on the beam path has not reached a stable target temperature, the vacuum does not meet the working conditions, the sample loading status is abnormal, or the safety shielding door is not closed. The data recording subsystem is used to synchronously record the temperature, flux, bias status, and device response signals of each cryogenic temperature zone.

10. A method for simultaneous irradiation at multiple low-temperature points using a modular low-temperature heavy ion irradiation terminal equipment, operated using the modular low-temperature heavy ion irradiation terminal equipment as described in any one of claims 1-9, characterized in that... Includes the following steps: S1. Determine the test requirements; S2. Configure the corresponding number of low-temperature vacuum modules according to the target temperature point set, and set the target temperature for each low-temperature vacuum module; S3. Mount the device under test sample onto the low-temperature sample stage of the corresponding low-temperature vacuum module; S4. Start vacuuming and enter the pre-cooling stage; S5. Perform beam preparation and calibration; after the temperature of each cryogenic vacuum module has stabilized, perform beam alignment, beam spot uniformity check and beam metering calibration. S6. Turn on the beam and simultaneously cover the temperature control area of ​​each low-temperature vacuum module to achieve simultaneous irradiation of multiple low-temperature points; S7. When the sample of the device under test in a certain low-temperature vacuum module reaches the target injection amount, replace the corresponding low-temperature vacuum module with the spare vacuum module. Meanwhile, the other cryogenic vacuum modules continue to operate; S8. The test is completed and the samples are ready.

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