A programmable radial neutral particle measurement system

Abstract

The application discloses a programmable radial neutral particle measurement system and relates to the technical field of laser-induced fluorescence collection. The programmable radial neutral particle measurement system comprises a support table, a programmable linear driving mechanism, a fluorescence collection mechanism, a lens barrel, a laser and a controller. The programmable linear driving mechanism is connected with the support table. The fluorescence collection mechanism is connected with the programmable linear driving mechanism. The lens barrel is connected with the programmable linear driving mechanism and connected with the fluorescence collection mechanism. The laser is arranged opposite to the fluorescence collection mechanism to emit laser to the fluorescence collection mechanism. The programmable linear driving mechanism and the fluorescence collection mechanism are respectively electrically connected with the controller to change the working state under control. The programmable radial neutral particle measurement system can realize scanning measurement of different radial positions, is accurate in positioning and has a high degree of automation.

Description

Technical Field

[0001] This invention relates to the field of laser-induced fluorescence collection technology, and more specifically to a programmable radial neutral particle measurement system. Background Technology

[0002] Two-photon laser-induced fluorescence (TALIF) is a cutting-edge optical diagnostic technology that excites fluorescent molecules through a two-photon absorption process, enabling high-precision measurement of neutral particle density. The core of this technology lies in the fact that when two photons are simultaneously absorbed by a fluorescent molecule, their combined energy is sufficient to excite the molecule to a high-energy state, thereby triggering fluorescence emission. Due to its high sensitivity and non-invasive nature, TALIF systems are playing an increasingly important role in scientific research and industrial applications, especially in situations requiring precise measurement of the distribution of neutral particles in gases or liquids.

[0003] The TALIF system has a wide range of applications. In chemical kinetics research, TALIF helps scientists track intermediate products in reaction processes, thereby gaining a deeper understanding of complex chemical reaction mechanisms. In the biomedical field, TALIF can be used for in vivo imaging to observe the dynamic changes of specific molecules within cells, providing important information for disease diagnosis and treatment. In materials science, TALIF can be used to study structures and properties at the nanoscale, which is crucial for the development of novel materials and devices.

[0004] While the TALIF system offers significant advantages in single-point measurements, its main limitation is that it can only provide neutral particle density data at a specific location. This means that although we can obtain a precise measurement at a single point, we cannot know the distribution of neutral particle density over the entire spatial region. This limitation restricts the use of the TALIF system in applications requiring comprehensive analysis of particle distribution, such as in fluid dynamics research, where understanding particle concentration variations across the entire flow field is crucial for optimizing design and control processes. Summary of the Invention

[0005] This invention provides a programmable radial neutral particle measurement system, which aims to achieve programmable, high-precision, and automated displacement of the laser focus and the fluorescence collection area in the radial direction, thereby enabling rapid switching measurement of neutral particle parameters at different radial positions, while ensuring the stability of optical path alignment and the efficiency of fluorescence signal collection.

[0006] This invention is achieved through the following technical solution:

[0007] A programmable radial neutral particle measurement system, comprising:

[0008] Support platform;

[0009] A programmable linear drive mechanism, wherein the programmable linear drive mechanism is connected to the support platform;

[0010] A fluorescence collection mechanism, wherein the fluorescence collection mechanism is connected to the programmable linear drive mechanism;

[0011] An microscope tube, which is connected to the programmable linear drive mechanism and the fluorescence collection mechanism;

[0012] A laser, which is arranged opposite to the fluorescence collection mechanism to emit a laser beam toward the fluorescence collection mechanism;

[0013] The controller, the programmable linear drive mechanism, and the fluorescence collection mechanism are electrically connected to the controller to controllably change their operating states.

[0014] In some alternative embodiments, the programmable linear drive mechanism includes:

[0015] The first slide rail is connected to the support platform;

[0016] The second slide rail is connected to the support platform, and the length direction of the second slide rail is parallel to or coincides with the length direction of the first slide rail.

[0017] A support frame, which cooperates with the second slide rail and is connected to the fluorescence collection mechanism;

[0018] A guide slide rod is rotatably connected to the support platform and drives the support frame so that the support frame moves along the length of the guide slide rod when the guide slide rod moves.

[0019] A drive source is connected to the guide slide rod to drive the guide slide rod to move.

[0020] In some alternative embodiments, the guide slide is configured with an adjusting handwheel so that the guide slide is actuated when the adjusting handwheel is driven by an external force.

[0021] In some alternative embodiments, the drive source is configured as a stepper motor.

[0022] In some alternative embodiments, the lens barrel includes:

[0023] The housing has a continuous first laser channel inside, and the housing has an assembly window that connects the inside and outside of the housing.

[0024] A confocal lens, which is connected to the housing and located at one end of the first laser channel;

[0025] A focusing deflection lens, which is connected to the housing and located at the other end of the first laser channel;

[0026] A cover body, which is detachably connected to the housing and located in the assembly window to close the assembly window.

[0027] In some alternative embodiments, an internal track is also included, at least partially located within the lens barrel, and a focusing lens is connected to the internal track and is capable of moving along the length of the internal track.

[0028] In some alternative embodiments, the fluorescence collection mechanism is configured to be assembled from multiple plates surrounding the fluorescence detector.

[0029] In some alternative embodiments, the fluorescence collection mechanism includes:

[0030] A base plate, which is connected to the programmable linear drive mechanism;

[0031] A first side baffle is connected to the bottom plate;

[0032] The second side baffle is connected to the bottom plate and is arranged parallel to and spaced apart from the first side baffle.

[0033] The upper cover plate, the first side baffle and the second side baffle are respectively connected to the upper cover plate to form a second laser channel together with the first side baffle, the second side baffle and the bottom plate;

[0034] An end plate, the bottom plate, the first side baffle, the second side baffle and the top cover plate are respectively connected to the end plate, the end plate is located at one end of the second laser channel, the lens barrel is located at the other end of the second laser channel, and the bottom plate, the first side baffle, the second side baffle and the top cover plate are respectively connected to the lens barrel.

[0035] In some alternative embodiments, the base plate is configured as a breadboard.

[0036] In some alternative embodiments, a reinforcing plate is also connected to the fluorescence collecting mechanism, wherein the reinforcing plate is arranged to surround the base plate, the first side baffle and the second side baffle, and the reinforcing plate is located on the side of the fluorescence collecting mechanism closer to the lens barrel.

[0037] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0038] 1. This invention enables the fluorescence collection mechanism and the microscope tube to be translated as a whole in the radial direction by setting a programmable linear drive mechanism, thereby realizing scanning measurement of plasma at different radial positions.

[0039] 2. This invention fixes the fluorescence collection mechanism to the microscope tube and drives them as a whole to translate radially through a programmable linear drive mechanism. Since the relative position between the fluorescence collection mechanism and the microscope tube remains constant, the spatial relationship between the focal point of the laser after it is focused by the microscope tube and the collection area of ​​the fluorescence collection mechanism remains constant. This ensures that changes in the measurement position will not disrupt the calibrated optical path system, solving the alignment problem caused by adjusting multiple components separately.

[0040] 3. This invention achieves fully automated control of the measurement position switching and fluorescence signal acquisition process through the electrical connection between the controller and the programmable linear drive mechanism and the fluorescence collection mechanism. Operators only need to preset the measurement program, and the system can automatically complete the particle parameter measurement at multiple radial positions according to the set time and position sequences, resulting in a high degree of automation.

[0041] 4. The programmable linear drive mechanism of this invention adopts a structure in which a first slide rail and a second slide rail cooperate with a support frame. The guide slide rod is driven by the support frame, ensuring that the movement of the fluorescence collection mechanism and the microscope tube in the radial direction has extremely high straightness and repeatability. Compared with the traditional lead screw and nut mechanism, the double slide rail structure of this invention has better resistance to off-center loads and smoother movement, thereby ensuring the positional accuracy of the microscope tube and the fluorescence collection mechanism. Attached Figure Description

[0042] To more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort. In the drawings:

[0043] Figure 1 This is a schematic diagram of the programmable radial neutral particle measurement system provided in an embodiment of the present invention;

[0044] Figure 2 This is a schematic diagram of the lens barrel structure provided in an embodiment of the present invention;

[0045] Figure 3 This is a front view schematic diagram of the fluorescence collection mechanism structure provided in an embodiment of the present invention;

[0046] Figure 4 This is a top view schematic diagram of the fluorescence collection mechanism structure provided in an embodiment of the present invention;

[0047] Figure 5 This is a schematic diagram of the internal structure of the fluorescence collection mechanism provided in an embodiment of the present invention;

[0048] Figure 6This is a front view schematic diagram of the programmable linear drive mechanism provided in an embodiment of the present invention;

[0049] Figure 7 This is a top view schematic diagram of the programmable linear drive mechanism provided in an embodiment of the present invention;

[0050] Figure 8 This is a schematic diagram of the operation of a programmable radial neutral particle measurement system provided in an embodiment of the present invention;

[0051] Figure 9 This is a schematic diagram of the internal track installation position provided in an embodiment of the present invention;

[0052] Figure 10 This is a schematic diagram of the internal track structure provided in an embodiment of the present invention.

[0053] The attached diagram shows the markings and corresponding component names:

[0054] 1-Eye tube, 1a-Confocal lens, 1b-Focusing deflecting lens, 1c-House, 1d-Cover, 2-Fluorescence collection mechanism, 2a-Reinforcing plate, 2b-First side baffle, 2c-Second side baffle, 2d-Top cover plate, 2e-End plate, 2f-Bottom plate, 2g-Wire groove, 2h-Fluorescence detector, 3-Programmable linear drive mechanism, 3a-First slide rail, 3b-Guide slide rod, 3c-Second slide rail, 3d-Support frame, 3e-Adjusting handwheel, 4-Support platform; 5-Controller, 6-Laser, 7-Measuring position, 8-Internal track, 8a-Track gear, 8b-Track threaded rod. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of the present invention are only used to explain the present invention and are not intended to limit the present invention.

[0056] Example 1

[0057] like Figure 1 and Figure 8 As shown, this embodiment provides a programmable radial neutral particle measurement system, including a support stage 4, a programmable linear drive mechanism 3, a fluorescence collection mechanism 2, a mirror tube 1, a laser 6, and a controller 5.

[0058] The support platform 4 serves as the base of the entire system, used to support and fix the programmable linear drive mechanism 3.

[0059] The programmable linear drive mechanism 3 is fixedly connected to the upper surface of the support platform 4, and its driving direction is along the laser emission direction of the laser 6. The fluorescence collection mechanism 2 is fixedly connected to the movable part of the programmable linear drive mechanism 3, and the lens barrel 1 is fixedly connected to the movable part of the programmable linear drive mechanism 3 and fixedly connected to the fluorescence collection mechanism 2.

[0060] In this embodiment, the fluorescence collection mechanism 2 is spatially located between the lens tube 1 and the laser 6. That is, along the propagation direction of the laser beam, the laser 6 is located on the outermost side, the fluorescence collection mechanism 2 is located in front of the laser 6, and the lens tube 1 is located in front of the fluorescence collection mechanism 2 and close to the signal source. The lens tube 1 and the fluorescence collection mechanism 2 are fixedly connected and jointly mounted on the movable part of the programmable linear drive mechanism 3, while the laser 6 is fixedly arranged relative to the support platform 4.

[0061] The laser beam emitted by laser 6 first passes through a portion of the fluorescence collection mechanism 2, then enters the lens tube 1. After being focused and deflected by optical elements inside the lens tube 1, the laser beam exits from the exit end of the lens tube 1 and reflects back into the excitation region inside the fluorescence collection mechanism 2, where it excites neutral particles to produce fluorescence. The fluorescence signal is collected by the fluorescence detector 2h installed in the fluorescence collection mechanism 2.

[0062] This system constructs an excitation optical path from the laser 6 through the fluorescence collection mechanism 2 into the lens tube 1, and then reflected back into the excitation region inside the fluorescence collection mechanism 2. It also constructs a collection optical path, where the laser signal is collected inside the fluorescence collection mechanism 2 and transmitted to the fluorescence detector 2h. By rigidly connecting the lens tube 1 and the fluorescence collection mechanism 2 and mounting them as a whole on the programmable linear drive mechanism 3, the focal point at the end of the excitation optical path and the object-side field of view of the collection optical path constitute a defined and invariant measurement volume element in space. When the programmable linear drive mechanism 3 performs displacement, this measurement volume element migrates as a whole with the support frame 3d, while the geometric angle between the excitation and collection optical paths remains constant. This ensures that the fluorescence signal intensity measured at different radial positions is only related to the density of the neutral particles being measured, and is independent of the optical path coupling efficiency.

[0063] In operation, the controller 5 sends a displacement command to the programmable linear drive mechanism 3, driving the fluorescence collection mechanism 2 and the mirror tube 1 as a whole to translate radially to the target position. Upon reaching the target position, the controller 5 activates the laser 6 to emit a laser beam. The laser beam passes through the fluorescence collection mechanism 2 and enters the mirror tube 1. After being focused and deflected by the mirror tube 1, it returns to the excitation region inside the fluorescence collection mechanism 2, exciting neutral particles to produce fluorescence. This fluorescence can be collected by the fluorescence detector 2h in the fluorescence collection mechanism 2. After collection, the controller 5 controls the programmable linear drive mechanism 3 to translate the fluorescence collection mechanism 2 and the mirror tube 1 to the next target position, repeating the above process to achieve programmed scanning measurement of neutral particle parameters at different radial positions.

[0064] In this embodiment, the laser 6 is fixedly arranged on the support platform 4 or set independently of the support platform 4, and its position remains unchanged during system operation. Since the laser beam is a parallel beam, it is not affected by the overall translation of the fluorescence collection mechanism 2 as it passes through the fluorescence collection mechanism 2 and enters the lens barrel 1. Instead, the final focusing position is determined only by the focusing deflection lens 1b and the confocal lens 1a inside the lens barrel 1. Therefore, the overall translation of the fluorescence collection mechanism 2 and the lens barrel 1 will not disrupt the coupling relationship between the excitation light path and the collection light path.

[0065] Example 2

[0066] See also Figure 6 and Figure 7 This embodiment provides a detailed description of the specific structure of the programmable linear drive mechanism 3. The programmable linear drive mechanism 3 includes a first slide rail 3a, a second slide rail 3c, a support frame 3d, a common slider, a guide slide rod 3b, and a drive source.

[0067] The first slide rail 3a is fixedly connected to the upper surface of the support platform 4. The first slide rail 3a is preferably a precision linear guide with an I-shaped or V-shaped cross-section to provide high-precision linear guidance. The second slide rail 3c is also fixedly connected to the upper surface of the support platform 4, and the length direction of the second slide rail 3c is parallel to or coincides with the length direction of the first slide rail 3a. The first slide rail 3a and the second slide rail 3c are spaced apart in the length direction; that is, they are not arranged parallel to each other, but rather one in front of the other in the radial direction. Viewed along the direction of movement of the programmable linear drive mechanism 3, the first slide rail 3a is in front, and the second slide rail 3c is behind, separated by a certain distance in the direction of movement.

[0068] A support frame 3d is mounted on the second slide rail 3c. The bottom of the support frame 3d has a slider or guide groove that mates with the second slide rail 3c, allowing the support frame 3d to slide slidably against the second slide rail 3c. The upper part of the support frame 3d is fixedly connected to the fluorescence collecting mechanism 2. In other words, the support frame 3d only mates with the second slide rail 3c, and the fluorescence collecting mechanism 2 is supported on the second slide rail 3c by the support frame 3d. Because the fluorescence collecting mechanism 2 has a large mass, the cooperation between the support frame 3d and the second slide rail 3c achieves stable support and precise guidance for this large component.

[0069] The lens barrel 1 can be slidably connected to the first slide rail 3a via a slider.

[0070] The fluorescence collecting mechanism 2 is fixedly connected to the microscope tube 1 via a rigid connector. When the drive source drives the guide slide rod 3b to move, the support frame 3d moves along the second slide rail 3c. Through the rigid connection between the fluorescence collecting mechanism 2 and the microscope tube 1, it drives the microscope tube 1 and the slider below it to move synchronously along the first slide rail 3a. Thus, the fluorescence collecting mechanism 2 and the microscope tube 1 move synchronously as a whole.

[0071] In this embodiment, the fluorescence collecting mechanism 2 achieves heavy-load support through the cooperation of the support frame 3d and the second slide rail 3c, while the lens barrel 1 achieves light-load guidance through the cooperation of the slider and the first slide rail 3a. On the one hand, the fluorescence collecting mechanism 2, as the heaviest component in the system, obtains sufficient load-bearing rigidity and guiding accuracy through the cooperation of the support frame 3d and the slide rail; on the other hand, the lens barrel 1 is directly mounted on the first slide rail 3a through the slider, avoiding the structural complexity and weight increase brought about by the additional support frame 3d. At the same time, since the fluorescence collecting mechanism 2 and the lens barrel 1 are rigidly connected and fixed as one unit, they maintain strict synchronization during movement and there is no relative displacement, thereby ensuring the consistency of optical path alignment.

[0072] The guide slide rod 3b is rotatably connected to the support platform 4. Specifically, both ends of the guide slide rod 3b can be mounted on the support platform 4 via bearing seats, and the guide slide rod 3b can rotate freely around its own axis. The guide slide rod 3b is driven by the support frame 3d. When the guide slide rod 3b rotates, the support frame 3d moves along the length of the guide slide rod 3b. As an optional transmission method, the guide slide rod 3b is a lead screw, and a lead screw nut that cooperates with the lead screw is fixedly connected to the support frame 3d; as another optional transmission method, the guide slide rod 3b is a smooth rod, and the support frame 3d cooperates with the guide slide rod 3b through friction transmission or rack and pinion transmission. The drive source is driven by the guide slide rod 3b to drive the guide slide rod 3b to rotate.

[0073] Preferably, one end of the guide slide rod 3b is equipped with an adjusting handwheel 3e. The adjusting handwheel 3e is fixedly connected to the end of the guide slide rod 3b, and the operator can manually rotate the adjusting handwheel 3e to drive the guide slide rod 3b to move, thereby causing the support frame 3d to drive the fluorescence collection mechanism 2 and the lens tube 1 to move in the radial direction.

[0074] The rim of the adjusting handwheel 3e can be set with scale marks or angle indicators. The operator can judge the rotation angle of the guide slide rod 3b according to the scale marks, and then convert it into the linear displacement of the support frame 3d.

[0075] This embodiment provides a parallel operation mode of manual adjustment and electric drive. In the event of a malfunction in controller 5 or the drive source, the operator can still manually adjust the measurement position 7 using handwheel 3e, improving system reliability and emergency operation capabilities. Furthermore, during the initial installation and commissioning phase, the operator can perform coarse adjustments using handwheel 3e and then fine adjustments using controller 5, improving commissioning efficiency.

[0076] Preferably, the drive source is configured as a stepper motor. The output shaft of the stepper motor is connected to the end of the guide slide 3b via a gear. The stepper motor is electrically connected to the controller 5, which sends pulse signals to the stepper motor. Each time the stepper motor receives a pulse signal, it rotates by a fixed step angle. Through the transmission between the guide slide 3b and the support frame 3d, the rotational motion is converted into the linear displacement of the support frame 3d.

[0077] The stepper motor is preferably a two-phase hybrid stepper motor with a step angle of 1.8° or 0.9°. Combined with the pitch of the guide slider 3b, micron-level linear displacement resolution can be achieved. For example, when the guide slider 3b is a lead screw with a pitch of 2mm and the stepper motor's step angle is 1.8°, the linear displacement corresponding to each pulse is 2mm × 1.8° / 360° = 0.01mm (i.e., 10μm), which meets the spatial positioning accuracy requirements of neutral particle fluorescence measurement.

[0078] The controller 5 can store a displacement-pulse number lookup table or calculation formula in advance. The operator can set the target position sequence through programming. The controller 5 will automatically calculate and output the corresponding pulse signal sequence to drive the stepper motor to move in sequence.

[0079] Preferably, the driving source is coated with a permalloy layer. Permalloy is a nickel-iron alloy with extremely high magnetic permeability and low coercivity, providing good shielding against low-frequency magnetic fields.

[0080] The permalloy layer can be a shield made of multiple layers of permalloy strips wound together. When a strong external magnetic field acts on the shield, the permalloy layer utilizes its extremely high permeability to provide a low magnetic reluctance path for the magnetic field, causing most of the magnetic field lines to close along the shield wall, while the magnetic flux density passing through the internal cavity of the shield attenuates to below the level of the Earth's magnetic field. At the same time, the alternating leakage magnetic field generated by the stepper motor stator coil is also confined inside the shield and cannot radiate into the surrounding space, thus ensuring that the fluorescent detector installed in a nearby location will not be subject to electromagnetic interference for 2 hours.

[0081] The thickness of the permalloy layer can typically range from 0.5 mm to 2 mm, preferably 1 mm. An insulating layer can be provided between the inner wall of the permalloy layer and the housing of the stepper motor to prevent the formation of a conductive path between the permalloy layer and the stepper motor housing. The seams of the permalloy layer can adopt an overlapping structure and be welded or riveted to ensure the continuity of magnetic shielding.

[0082] If a conventional stepper motor is directly exposed to a strong magnetic field in a measurement environment, the magnetic field of its internal permanent magnet may be interfered with by the external magnetic field, leading to a decrease in torque, loss of steps, or even demagnetization. Simultaneously, the alternating magnetic field generated by the stepper motor during operation may also cause electromagnetic interference to the signal acquisition of the fluorescence detector. The permalloy layer effectively attenuates the penetration of external magnetic fields into the stepper motor and also suppresses the leakage of the stepper motor's magnetic field outward, thus providing bidirectional magnetic shielding.

[0083] As an alternative implementation method, the permalloy layer can also adopt a multi-layer structure, that is, a copper layer or an aluminum layer is added to the inner or outer side of the permalloy layer to supplement the shielding of the high-frequency magnetic field by utilizing the eddy current effect.

[0084] Example 3

[0085] See also Figure 2 This embodiment provides a detailed description of the specific structure of the lens barrel 1. The lens barrel 1 includes a housing 1c, a focusing deflection lens 1b, a confocal lens 1a, and a cover 1d.

[0086] The housing 1c has a cylindrical structure, forming a continuous first laser channel inside. The housing 1c is preferably made of aluminum alloy or stainless steel and precision machined. Its inner wall can be blackened or sandblasted to reduce stray light reflection. The housing 1c has an assembly window connecting its interior and exterior, extending axially along the housing 1c, with a length at least covering the optical path area between the focusing deflection lens 1b and the confocal lens 1a. A light inlet is located at one end of the housing 1c near the fluorescence collection mechanism 2, which connects to the light output end of the second laser channel of the fluorescence collection mechanism 2 to receive the beam from the laser 6.

[0087] A focusing deflecting lens 1b is fixedly connected to one end of the housing 1c near the fluorescence collecting mechanism 2. The light beam from the laser 6, passing through the fluorescence collecting mechanism 2, first enters the focusing deflecting lens 1b. The focusing deflecting lens 1b is used to deflect the light beam from the laser 6 and to perform preliminary focusing or shaping of the beam. As an optional implementation, the focusing deflecting lens 1b can be replaced by a combination of a separate reflector and a focusing lens.

[0088] The confocal lens 1a is fixedly connected to the end of the housing 1c near the signal source. The light beam, after being initially shaped by the focusing deflection lens 1b, enters the confocal lens 1a after passing through the first laser channel. The confocal lens 1a serves as the final objective lens, used to focus the light beam with high precision and reflect it back into the preset measurement position 7 inside the fluorescence collection mechanism 2.

[0089] The cover 1d is detachably connected to the housing 1c and located in the assembly window to close the assembly window. A sealing treatment, such as a sealing gasket, is used between the cover 1d and the housing 1c to ensure the airtightness of the first laser channel and prevent dust or moisture from entering and contaminating the optical components. The cover 1d can be detachably connected to the housing 1c via screws or clips.

[0090] This embodiment, by providing an assembly window and a removable cover 1d on the housing 1c, allows operators to inspect, clean, or replace internal optical components (such as the focusing deflection lens 1b, confocal lens 1a, etc.) without removing the lens barrel 1, greatly simplifying maintenance operations and avoiding disruption of the optical path alignment due to disassembly of the lens barrel 1. The optical arrangement of placing the focusing deflection lens 1b in front and the confocal lens 1a behind allows the confocal lens 1a, as the final objective lens, to be closer to the measurement area, minimizing the working distance and reducing the impact of environmental vibrations on focus drift.

[0091] Example 4

[0092] Please refer to them together. Figure 1 and Figures 3-5 This embodiment describes the structure of the fluorescence collection mechanism 2. The fluorescence collection mechanism 2 is configured to be assembled by multiple plates surrounding the fluorescence detector 2h.

[0093] Traditional fluorescence collection mechanisms 2 are mostly integrally cast or welded, with a closed internal space, which is not conducive to the installation, debugging, and maintenance of the fluorescence detector 2h. This embodiment adopts a modular structure, with each plate fixedly connected by detachable connectors such as screws, bolts, or locating pins. This allows the internal space of the fluorescence collection mechanism 2 to be opened as needed, facilitating the installation, replacement, and optical path calibration of the fluorescence detector 2h.

[0094] Specifically, the fluorescence collection mechanism 2 includes a base plate, a first side baffle 2b, a second side baffle 2c, an upper cover plate 2d, and an end plate 2e. Each plate can be made of a non-magnetic material, and the inner surface of the plate can be blackened to reduce the reflection of stray light.

[0095] The base plate serves as the fundamental support for the fluorescence collection mechanism 2, and its lower surface is fixedly connected to the support frame 3d of the programmable linear drive mechanism 3. A first side baffle 2b is vertically connected to one edge of the base plate, and a second side baffle 2c is vertically connected to the other edge of the base plate, with the first side baffle 2b and the second side baffle 2c arranged parallel to each other at intervals. An upper cover plate 2d covers the top of the first side baffle 2b and the second side baffle 2c, and the first side baffle 2b and the second side baffle 2c are respectively connected to the upper cover plate 2d. The base plate, the first side baffle 2b, the second side baffle 2c, and the upper cover plate 2d together form the second laser channel.

[0096] The second laser channel runs axially through the entire fluorescence collection mechanism 2, with one end (closer to the laser 6) being the incident end and the other end (closer to the lens barrel 1) being the exit end. A light-transmitting hole or window is provided on the end plate 2e near the laser 6. The light beam from the laser 6 enters the incident end of the second laser channel through this light-transmitting hole or window, propagates along the length of the second laser channel, and exits from the exit end of the second laser channel before entering the lens barrel 1.

[0097] End plate 2e is connected to one end of the second laser channel (i.e., the end closest to laser 6). The base plate, first side baffle 2b, second side baffle 2c, and top cover plate 2d are respectively connected to end plate 2e. Lens tube 1 is connected to the other end of the second laser channel. The base plate, first side baffle 2b, second side baffle 2c, and top cover plate 2d are respectively connected to the housing 1c of lens tube 1. A light-transmitting hole for the laser beam to pass through is provided on end plate 2e, and the position of this light-transmitting hole is opposite to the light outlet of laser 6.

[0098] The photosensitive surface of the fluorescence detector 2h faces the interior of the second laser channel, and its collection field of view covers the excitation area inside the second laser channel near the side of the mirror tube 1.

[0099] In this embodiment, the fluorescence collection mechanism 2 serves both as a collection cavity for fluorescence signals and as part of the laser beam transmission channel, achieving compact integration of the optical path. Furthermore, the modular structure facilitates the installation, debugging, and maintenance of internal components.

[0100] Preferably, the base plate is configured as a breadboard (i.e., an optical breadboard). Specifically, the upper surface of the base plate (i.e., the side facing the second laser channel) has an array of multiple threaded holes, with the spacing between the threaded holes being a standard grid size. The first side baffle 2b, the second side baffle 2c, the end plate 2e, and the housing 1c of the lens barrel 1 can all be fixedly connected to the corresponding threaded holes on the base plate by screws.

[0101] The mounting positions of each plate and optical element can be adjusted at any threaded hole position on the base plate according to actual needs, which has strong flexibility and versatility; the standardized threaded hole array ensures the verticality and positional accuracy of each component installation; when the system needs to be upgraded or adapted to different models of fluorescence detectors, it is only necessary to rearrange the positions of each component on the base plate, without redesigning and manufacturing the entire base plate.

[0102] As an alternative implementation, the base plate can also be an optical breadboard with a honeycomb core structure, which significantly reduces weight while ensuring high rigidity, thus helping to reduce the load on the programmable linear drive mechanism 3.

[0103] Furthermore, a 2g cable tray can be connected to the base plate to facilitate wiring connections.

[0104] Furthermore, a reinforcing plate 2a is also connected to the fluorescence collection mechanism 2. The reinforcing plate 2a surrounds the base plate, the first side baffle 2b, and the second side baffle 2c, and the reinforcing plate 2a is located on the side of the fluorescence collection mechanism 2 closer to the lens tube 1.

[0105] Specifically, the reinforcing plate 2a is U-shaped, with its bottom fixedly connected to the base plate, and its two side walls fixedly connected to the first side baffle 2b and the second side baffle 2c, respectively. The reinforcing plate 2a can be fixedly connected to the base plate, the first side baffle 2b, and the second side baffle 2c by screws. A connection interface is provided on the side of the reinforcing plate 2a near the lens barrel 1, which mates with the housing 1c of the lens barrel 1. The lens barrel 1 is fixedly connected to the reinforcing plate 2a through this connection interface, thereby achieving overall connection with the fluorescence collection mechanism 2.

[0106] The reinforcing plate 2a can enhance the structural rigidity of the fluorescence collection mechanism 2, preventing relative displacement or deformation between the plates due to inertial forces during the reciprocating motion of the programmable linear drive mechanism 3; it provides a more stable connection interface for the lens barrel 1, and transmits the weight and vibration load of the lens barrel 1 more evenly to the overall structure of the fluorescence collection mechanism 2; it forms a closed structure on the side of the fluorescence collection mechanism 2 near the lens barrel 1, reducing the possibility of stray light from the outside entering the second laser channel from that side.

[0107] Example 5

[0108] See also Figure 9 and Figure 10 This embodiment is a further optimization based on any of the above embodiments. Specifically, an internal track 8 is provided inside the lens barrel 1. The internal track 8 is a linear displacement mechanism with its own motor. The internal track 8 may include a track thread rod 8b (i.e., a typical rod with external threads) and a track gear 8a. A focusing lens is driven and coupled to the track thread rod 8b, and the track gear 8a is driven and coupled to the motor to rotate, thereby driving the track thread rod 8b to rotate and causing the focusing lens to move. The relative position of the focusing lens and the focusing lens at the top of the lens barrel 1 changes, which enables rapid movement of the measurement point.

[0109] The following provides a detailed description of the workflow of the programmable radial neutral particle measurement system of the present invention.

[0110] During the system initialization phase, the operator sets the measurement parameters through the input interface of the controller 5 (such as a touch screen or host computer software), including: the sequence of measurement positions 7 (i.e., the coordinates of multiple target positions along the radial direction), the laser emission parameters of each measurement position 7 (such as laser power, pulse width, wavelength, etc.), the fluorescence signal acquisition parameters of each measurement position 7 (such as acquisition time, gain, sampling rate, etc.), and the moving speed and dwell time between each measurement position 7.

[0111] After the measurement begins, the controller 5 first controls the programmable linear drive mechanism 3 to move the fluorescence collection mechanism 2 and the microscope tube 1 from the initial position to the first target position. During the movement, the controller 5 can monitor the actual position of the support frame 3D in real time through an encoder or grating ruler, and perform a closed-loop comparison with the target position to ensure positioning accuracy.

[0112] Upon reaching the first target position, controller 5 sends a trigger signal to laser 6, which then emits a laser beam. The laser beam first passes through the light-transmitting hole on the end plate 2e of the fluorescence collection mechanism 2 near the laser 6, enters the incident end of the second laser channel, propagates along the length of the second laser channel, exits from the exit end of the second laser channel, and enters the light inlet of the lens barrel 1 near the fluorescence collection mechanism 2. After entering the lens barrel 1, the beam is first deflected and initially focused by the focusing deflection lens 1b, then passes through the first laser channel of the housing 1c, reaches the confocal lens 1a, and undergoes further aberration correction and high-precision focusing by the confocal lens 1a. The laser beam exits from the lens barrel 1 and is reflected back into the excitation region of the second laser channel of the fluorescence collection mechanism 2 near the lens barrel 1, forming a high-energy-density focal point in this region, exciting neutral particles at this location to produce fluorescence. The fluorescence signal is collected by the fluorescence detector 2h in the fluorescence collection mechanism 2 and converted into an electrical signal, which is then transmitted to controller 5 for processing and storage.

[0113] After signal acquisition at the first measurement position 7 is completed, the controller 5 controls the programmable linear drive mechanism 3 to move the fluorescence collection mechanism 2 and the microscope tube 1 to the second target position, repeating the excitation and acquisition process. This cycle continues until all preset measurement positions 7 are measured. The entire measurement process can be executed fully automatically by the controller 5 without manual intervention.

[0114] In summary, the present invention achieves continuous programmable displacement of the fluorescence collection mechanism 2 and the microscope tube 1 in the radial direction through the programmable linear drive mechanism 3, so that the measurement position 7 can be flexibly adjusted according to experimental requirements during system operation.

[0115] This invention achieves this by rigidly connecting the fluorescence collection mechanism 2 to the lens tube 1 as a whole and then translating the whole, ensuring that the measurement volume element formed by the focal point at the end of the excitation light path and the object-side field of view of the collection light path maintains its shape and volume during the migration. The fluorescence signal intensity measured at different radial positions is only related to the density of the neutral particles being measured and is independent of the optical path coupling efficiency.

[0116] This invention utilizes the second laser channel of the fluorescence collection mechanism 2 as a transmission channel for the laser beam. The laser beam passes through the internal channel of the fluorescence collection mechanism 2 before entering the lens barrel 1. Since the fluorescence collection mechanism 2 and the lens barrel 1 are fixedly connected as a single unit, there is no relative movement between them. The alignment relationship between the laser beam traveling through the fluorescence collection mechanism 2 and the subsequent optical path entering the lens barrel 1 does not change with radial displacement. This avoids the additional alignment requirements and potential misalignment risks associated with separately setting up a laser transmission optical path outside the fluorescence collection mechanism 2, achieving a compact and highly stable integrated optical path.

[0117] The overall translation of this invention eliminates the need for readjustment of any optical element in the focusing deflection lens 1b, confocal lens 1a, or fluorescence collection mechanism 2 when measuring at any radial position. This shortens the switching time between different measurement positions 7.

[0118] This invention achieves stepless operation of the stepper motor and low-noise signal acquisition of the fluorescence detector for 2 hours in a strong magnetic field environment through the special structural design of the permalloy shield.

[0119] In this invention, the laser 6 is fixed relative to the support platform 4, while only the fluorescence collection mechanism 2 and the lens tube 1 are translated as a whole. Since the laser beam is collimated as it passes through the fluorescence collection mechanism 2 and enters the lens tube 1, the translation of the fluorescence collection mechanism 2 does not change the direction and position of the beam incident on the lens tube 1, thus decoupling the fixed position of the laser 6 from the scanning of the measurement position 7. This allows the installation of the laser 6 to be flexible, without being limited by the range of motion of the programmable linear drive mechanism 3.

[0120] Example 6

[0121] This embodiment mainly provides two application cases to further illustrate how the measurement system works.

[0122] Case 1 (Scanning Mode): Based on the site conditions and neutral particle measurement requirements of a certain device, measurement position 7 needs to be scanned in the scraped layer area. To cover the entire scraped layer area, the programmable linear drive mechanism 3 needs to move between 200mm and 260mm. The controller 5 is set to start at 200mm and move forward 2mm every 100ms until it reaches 260mm. During one movement, the programmable linear drive mechanism 3 first drives the fluorescence collection mechanism 2 and the microscope tube 1 to move synchronously. After stopping, the laser 6 emits a laser, the fluorescence detector collects the fluorescence for 2 hours, and transmits the data to the controller 5. The controller 5 records the current time and position, thus completing one measurement. The above steps are repeated to complete the entire movement process. The controller 5 calculates the neutral particle density based on the fluorescence data and plots an image based on the recorded time and measurement position 7 to obtain neutral particle density measurements at different positions and times.

[0123] Case 2 (Tracking Mode): For example Figure 8 As shown, the real-time configuration parameters of the outermost closed magnetic surface are input to the controller 5 via the data interface. The controller 5 calculates the position of the outermost closed magnetic surface on the low-field side and controls the programmable linear drive mechanism 3 to maintain the measurement point 1 mm inside the outermost closed magnetic surface, completing a total of 2000 ms, 20 measurements, with each measurement interval of 100 ms. During one movement, the controller 5 first receives the position of the outermost closed magnetic surface, and then controls the programmable linear drive mechanism 3 to move the laser focusing position 1 mm inside the outermost closed magnetic surface position. After the programmable linear drive mechanism 3 stops, the laser 6 emits a laser, and the fluorescence detector collects the fluorescence for 2 hours, transmitting the data results to the controller 5. The controller 5 records the current time and absolute position, thus completing one measurement. The above steps are repeated to complete the entire movement process. The controller 5 calculates the neutral particle density based on the fluorescence data results, and plots an image based on the recorded time and measurement position 7 to obtain the absolute radial position 1 mm inside the outermost closed magnetic surface and the corresponding change in neutral particle density.

[0124] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A programmable radial neutral particle measurement system, characterized in that, include: Support platform (4); A programmable linear drive mechanism (3) is connected to the support platform (4); A fluorescence collection mechanism (2) is connected to the programmable linear drive mechanism (3); The microscope tube (1) is connected to the programmable linear drive mechanism (3) and the fluorescence collection mechanism (2); A laser (6) is arranged opposite to the fluorescence collection mechanism (2) to emit laser light toward the fluorescence collection mechanism (2); The controller (5), the programmable linear drive mechanism (3) and the fluorescence collection mechanism (2) are electrically connected to the controller (5) to controllably change their working states.

2. The programmable radial neutral particle measurement system according to claim 1, characterized in that, The programmable linear drive mechanism (3) includes: The first slide rail (3a) is connected to the support platform (4); The second slide rail (3c) is connected to the support platform (4), and the length direction of the second slide rail (3c) is parallel to or coincides with the length direction of the first slide rail (3a). A support frame (3d) is provided, which engages with the second slide rail (3c) and is connected to the fluorescence collection mechanism (2). The guide slide rod (3b) is rotatably connected to the support platform (4) and is in transmission cooperation with the support frame (3d) so that the support frame (3d) moves along the length direction of the guide slide rod (3b) when the guide slide rod (3b) moves. A drive source is connected to the guide slide (3b) to drive the guide slide (3b) to move.

3. The programmable radial neutral particle measurement system according to claim 2, characterized in that, The guide slide (3b) is equipped with an adjusting handwheel (3e) so that the guide slide (3b) is actuated when the adjusting handwheel (3e) is driven by an external force.

4. The programmable radial neutral particle measurement system according to claim 2, characterized in that, The drive source is configured as a stepper motor.

5. The programmable radial neutral particle measurement system according to claim 1, characterized in that, The lens tube (1) includes: The housing (1c) has a continuous first laser channel inside, and the housing (1c) has an assembly window that connects the inside and outside of the housing (1c). A confocal lens (1a) is connected to the housing (1c) and located at one end of the first laser channel; A focusing deflection lens (1b) is connected to the housing (1c) and located at the other end of the first laser channel; A cover (1d) is detachably connected to the housing (1c) and located in the assembly window to close the assembly window.

6. The programmable radial neutral particle measurement system according to claim 1, characterized in that, It also includes an internal track (8), at least part of which is located in the lens barrel (1), and a focusing lens that can move along the length of the internal track (8) is connected to the internal track (8).

7. The programmable radial neutral particle measurement system according to claim 1, characterized in that, The fluorescence collection mechanism (2) is configured to be assembled by multiple plates surrounding the fluorescence detector (2h).

8. The programmable radial neutral particle measurement system according to claim 7, characterized in that, The fluorescence collection mechanism (2) includes: The base plate is connected to the programmable linear drive mechanism (3); First side baffle (2b), the first side baffle is connected to the bottom plate; The second side baffle (2c) is connected to the bottom plate and is arranged parallel to and spaced apart from the first side baffle (2b); The upper cover plate (2d), the first side baffle (2b) and the second side baffle (2c) are respectively connected to the upper cover plate (2d) to form a second laser channel together with the first side baffle (2b), the second side baffle (2c) and the bottom plate; End plate (2e), the bottom plate, the first side baffle (2b), the second side baffle (2c) and the top cover plate (2d) are respectively connected to the end plate (2e), the end plate (2e) is located at one end of the second laser channel, the lens barrel (1) is located at the other end of the second laser channel, and the bottom plate, the first side baffle (2b), the second side baffle (2c) and the top cover plate (2d) are respectively connected to the lens barrel (1).

9. The programmable radial neutral particle measurement system according to claim 8, characterized in that, The base plate is configured as a breadboard.

10. The programmable radial neutral particle measurement system according to claim 8, characterized in that, The fluorescence collection mechanism (2) is also connected to a reinforcing plate (2a), wherein the reinforcing plate (2a) surrounds the base plate, the first side baffle (2b) and the second side baffle (2c), and the reinforcing plate (2a) is located on the side of the fluorescence collection mechanism (2) close to the lens tube (1).

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