A transmission-type white-beam position detector device

Abstract

The application discloses a transmission type white light beam position detector device, characterized in that the device comprises a clamping type diamond detector, a water-cooled base and a vacuum cavity; the vacuum cavity comprises a main cavity, an electrode feedthrough and a thermocouple feedthrough; the main cavity is provided with a beam outlet flange for being connected with a beam tube; the main cavity is provided with a plurality of flange interfaces for being connected with the water-cooled base, the electrode feedthrough and the thermocouple feedthrough respectively; one end of the water-cooled base is provided with the clamping type diamond detector and extends into the vacuum cavity; the water-cooled base is internally provided with a water-cooled flow channel for being connected with an external water-cooled pipeline to form water circulation; the clamping type diamond detector is used for detecting an electric signal generated by a synchronous radiation white light beam passing through the beam tube and entering the vacuum cavity, outputting the electric signal through the electrode feedthrough, collecting a temperature signal of a diamond sheet and outputting the temperature signal through the thermocouple feedthrough, and calculating beam position information through difference and ratio calculation of electric signals output by each quadrant. The application is suitable for installation requirements in a narrow space and has a lower cost.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation technology and relates to a transmission-type white beam current position detector (BPM) device, applied upstream of the beamline in a synchrotron radiation facility and used in an ultra-high vacuum environment. Utilizing the high thermal conductivity and photoelectric effect of a diamond detector, it achieves beam position detection and diagnosis under the high-energy, high-heat-load requirements of the HEPS fourth-generation light source. This provides feedback on whether the beam modulation of optical equipment such as white light apertures and white light mirrors meets experimental requirements, improving beam modulation efficiency and accuracy. Background Technology

[0002] my country is currently constructing its first fourth-generation High Energy Photon Source (HEPS), which has a storage ring energy of 6 GeV and a luminance of 1×10⁻⁶. 22 phs·s -1 ·mm -2 ·mrad -2 • (0.1%bw)⁻¹, emittance less than 60 pm·rad, high-performance beamline capacity of no less than 90, capable of providing X-rays with energies up to 300 ke V, and synchrotron radiation peak power density of 700~800 kW / mrad 2This power density is equivalent to that of electron beam welding, easily cutting through various uncooled metals. Synchrotron radiation facilities require modulation of synchrotron radiation to conduct various scientific experiments and meet experimental requirements. Since synchrotron radiation beam modulation involves various optical devices such as apertures, white light mirrors, deflectors, and monochromators, beam detection technology is essential for ensuring the beam reaches the experimental station smoothly and effectively, and is particularly significant for beam modulation. Beam modulation is a crucial step in the operation of a synchrotron radiation facility, directly affecting beam efficiency and beam quality, and consequently influencing the progress and results of experiments in physics, biology, and other fields. Commonly used beam detectors include beam position monitors (BPMs), wire scanning detectors, synchrotron radiation imaging detectors, and fluorescent targets. Imaging detectors are generally used in end-stage experimental stations. Fluorescent targets and wire scanning detectors have limited detection accuracy. Beam detectors (BPMs), however, utilize photoelectric conversion of functional materials to detect the intensity distribution of the beam cross-section, determine the beam axis, and monitor the dynamic changes of the beamline online. They measure the drift of the light source and beam propagation, achieving resolutions down to the μm or even sub-μm level, providing feedback information for correcting the electron orbit and the attitude of various beamline optical components. Commonly used BPMs include wedge-shaped blade BPMs and four-quadrant diamond thin-film transmission BPMs. Due to the high power of white light beams, blade-shaped BPMs are currently the most commonly used for white light. Currently, four sets of blades are symmetrically arranged, with a metal film coating on a portion of the blade surface. The narrow side is the incident surface. When the synchrotron radiation beam passes through the BPM, photoelectrons are excited from the blade surface. These photoelectrons are collected by a bias plate, thus forming photocurrent signals between the blades and the bias plate. With the spectral composition of the synchrotron radiation beam remaining constant, the intensity of the photocurrent is directly proportional to the light-receiving area of ​​the blade. Therefore, when the beam position shifts, the photocurrent of different blades will increase or decrease respectively due to the change in light-receiving area. Based on this relationship of photocurrent variation, information about the change in the beam position in the horizontal / vertical direction can be obtained. Its structure is as follows... Figure 1 and Figure 2 As shown.

[0003] The aforementioned wedge-shaped four-blade white light BPM mainly includes a BPM blade assembly 1, a water-cooled weldment 2, a vacuum chamber assembly 3, an elevation adjustment screw assembly 4, and a mounting plate 5. The water-cooled weldment 2 is supported on the mounting plate 5 by four sets of elevation adjustment screw assemblies 4. The BPM's level and height can be adjusted by adjusting the position of the nuts on the four sets of elevation adjustment screw assemblies 4. The BPM blade assembly 1 is fixed to the water-cooled weldment 2 with screws. The vacuum chamber assembly 3 covers the BPM blade assembly 1 and is connected to the sealing flange of the water-cooled weldment 2. Vacuum sealing is achieved by pressing a metal sealing gasket with a mating blade flange. Before installing the vacuum chamber assembly 3, the vacuum wires and vacuum thermocouples must be connected to the corresponding positions on the BPM blade assembly 1 and led out to the corresponding flange positions on the vacuum chamber assembly 3.

[0004] like Figure 3 and Figure 4 As shown, the BPM blade assembly 1 mainly consists of a thermocouple mounting nut group 101, a blade holder 102, a bias insulating plate 103, a bias electrode 104, an electric field balancing block 105, a clamping plate 106, and a wedge-shaped blade assembly 107. The thermocouple mounting nut group 101 is used to install thermocouple wires, facilitating temperature measurement of the blade holder 102. The blade holder 102 is made of oxygen-free copper, with an integrally machined structure, and is the core mounting component. The bias electrode 104 is also made of oxygen-free copper, and its two ends, together with four ceramic bias insulating plates 103, form a sandwich insulation structure, installed within the elongated groove of the blade holder 102. One end has a bent narrow flange with a round hole for fixing the bias wire. The electric field balancing block 105 is installed on the blade holder 102, and its long planar structure is installed opposite to the bias insulating plate 103, improving photocurrent collection efficiency. The wedge-shaped blade assemblies 107 are installed in pairs within the grooves of the blade holder 102. Their installation and positioning require high precision and necessitate the use of tooling to adjust the blade clearance. The clamping plate 106 is installed flush against the wedge-shaped blade assemblies 107 to secure them.

[0005] like Figure 5 As shown, the water-cooled weldment 2 includes a water-cooling plate 201, a connecting column 202, a water-cooling pipe 203, a special-shaped flange seat 204, and a water-cooling pipe welding transition pipe 205. The water-cooling pipe welding transition pipe 205 is first fitted onto the corresponding position of the special-shaped flange seat 204 and then vacuum brazed. The water-cooling pipe 203 is first brazed to the water-cooling plate 201, then installed onto the special-shaped flange seat 204 via the connecting column 202. Finally, the atmospheric end of the water-cooling pipe 203 is fitted into the water-cooling pipe welding transition pipe 205 to complete the welding, and then bent. All of the above welding requires continuous welding on the inner side under vacuum to ensure a vacuum seal.

[0006] like Figure 6As shown, the vacuum chamber assembly 3 mainly consists of a blind flange 301, an electrode lead-out flange and BNC connector assembly 302, a main chamber 303, a thermocouple lead-out flange 304, and a chamber cover weldment 305, used to provide an ultra-high vacuum environment. The main chamber 303 includes a cylindrical cavity, upper and lower connecting flange interfaces, a beam inlet / outlet flange interface, a thermocouple connection flange interface, and an electrode lead-out flange interface. The lower connecting flange interface and the inlet flange interface are loose flanges to allow adjustment of the chamber position during equipment installation and connection. The electrode lead-out flange and BNC connector assembly 302 is used for bias voltage introduction and photocurrent extraction, and the thermocouple lead-out flange 304 is used for temperature detection.

[0007] like Figure 7 As shown, the wedge blade assembly 107 comprises a wedge blade 10701, a blade insulating plate 10702, a blade pad 10703, and a current extraction electrode 10704. The wedge blade 10701 is made of diamond, and the blade pad 10703 is made of oxygen-free copper. A portion of the surface of the wedge blade 10701 is coated to achieve conductivity with the current extraction electrode 10704 and insulation of the blade pad 10703. The blade insulating plate 10702 is made of ceramic and is used to position the wedge blade 10701 and insulate it from the blade holder 102. The current extraction electrode 10704 is made of oxygen-free copper, bent on one side, and has screw mounting holes for mounting vacuum wires to extract photocurrent.

[0008] Although the aforementioned wedge-shaped four-blade white light BPM is suitable for detecting white beam streams with high thermal loads, it is large in size and expensive. In particular, the fourth-generation light source has low emissivity, and this type of BPM cannot be used for small-sized beam streams after passing through the front-end region and the upstream white light adjustable aperture. Summary of the Invention

[0009] To address the problems existing in the prior art, the present invention aims to provide a transmission-type white beam stream position detector device for position detection of white / powder beam streams in the upstream beamline segment of synchrotron radiation. The invention comprises a single-crystal / microwave method high-purity polycrystalline diamond, a circuit board, an oxygen-free copper base, and a metal clamping mechanism. The beam stream is incident directly onto the diamond plane, suitable for millimeter-level spot detection. It can withstand high thermal load white beam streams while maintaining high resolution and low dark current characteristics. Its integrated design offers higher integration, adapts to installation requirements in confined spaces, and lowers cost.

[0010] The technical solution of this invention is as follows: A transmissive white beam stream position detector device, characterized in that it includes a clamping diamond detector, a water-cooled base, and a vacuum chamber; The vacuum cavity includes a main cavity, an electrode feed passage, and a thermocouple feed passage; the main cavity is provided with a beam inlet / outlet flange for connecting to the beam tube; the main cavity is provided with multiple flange interfaces for connecting the water-cooled base, the electrode feed passage, and the thermocouple feed passage, respectively. The clamping diamond detector is installed at one end of the water-cooled base and extends into the vacuum cavity; the water-cooled base is provided with a water-cooling channel inside, which is used to connect with the external water-cooling pipeline to form a water circulation, and to remove the heat generated by the clamping diamond detector after absorbing the beam energy. The clamp-type diamond detector is used to detect the electrical signal generated by the synchrotron radiation white beam stream incident into the vacuum cavity through the beam tube and output through the electrode feedthrough, and to collect the temperature signal of the diamond sheet and output through the thermocouple feedthrough; the beam position information is obtained by calculating the difference and ratio of the electrical signals output from each quadrant.

[0011] Preferably, the clamping diamond detector includes a bias circuit board, a bias electrode plate, a diamond sheet, a mounting base, a diamond positioning block, a clamping plate, a current lead plate, and a current lead circuit board; wherein, the upper surface of the mounting base is provided with a boss for cooperating with the diamond positioning block to position the mounted diamond sheet; the diamond sheet is clamped between the mounting base and the clamping plate, with the bias electrode plate and the current lead plate respectively attached to its upper and lower surfaces; the bias circuit board is connected to the back electrode bias coating area of ​​the diamond sheet through the bias electrode plate to realize electrical signal transmission; the current lead circuit board is connected to the four-quadrant coating area of ​​the diamond sheet through the current lead plate to realize electrical signal transmission.

[0012] Preferably, the four-quadrant coating area and the back electrode bias coating area of ​​the diamond sheet are prepared as electrodes by magnetron sputtering for collecting photogenerated carriers.

[0013] Preferably, the bias electrode and the current lead are both made of oxygen-free copper; the main body of the mounting base is made of oxygen-free copper, chromium zirconium copper, or dispersed copper; the bias circuit board and the current lead circuit board are both made of high-frequency ceramic substrate; the diamond positioning block is made of polytetrafluoroethylene or alumina ceramic, used to limit the horizontal displacement of the diamond sheet and to assist in the positioning of the bias circuit board and the current lead circuit board.

[0014] Preferably, the clamp-type diamond detector is provided with a radiation shielding cover on its outer side for radiation protection.

[0015] The advantages of this invention are mainly as follows: First, the diamond detector in this invention has a mechanical clamping structure and no traditional wire bonding circuit structure. Under high heat load white light / powder beam flow conditions, the equipment has higher reliability and higher detection accuracy. Second: Diamond sheets can be locally thinned in the light-emitting area through hydrogen-oxygen plasma etching process to improve the reliability of high-heat-load beam detection; Third: The overall structure is simple and compact, easy to install and maintain, and low in cost. Attached Figure Description

[0016] Figure 1 This is a diagram of the internal structure of the beam detector.

[0017] Figure 2 This is a diagram of the overall structure of the beam detector.

[0018] Figure 3 A structural diagram of the BPM blade assembly.

[0019] Figure 4 Internal structure diagram of BPM blade assembly.

[0020] Figure 5 This is a structural diagram of a water-cooled weldment.

[0021] Figure 6 This is a structural diagram of a vacuum chamber assembly.

[0022] Figure 7 This is a structural diagram of the wedge blade assembly.

[0023] Figure 8 This is a structural diagram of a transmission-type white beam flow detector device according to an example of the present invention.

[0024] Figure 9 This is a structural diagram of the water-cooled base welding component.

[0025] Figure 10 This is a structural diagram of a clamp-type diamond detector.

[0026] Figure 11 This is a front view of a clamp-type diamond detector.

[0027] Figure 12 This is a rear view of a clamp-on diamond detector. Detailed Implementation

[0028] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0029] An optional embodiment of the present invention provides a transmissive white beam stream position detector device, characterized in that it includes a clamping diamond detector, a water-cooled base, and a vacuum chamber; The vacuum cavity includes a main cavity, an electrode feed passage, and a thermocouple feed passage; the main cavity is provided with a beam inlet / outlet flange for connecting to the beam tube; the main cavity is provided with multiple flange interfaces for connecting the water-cooled base, the electrode feed passage, and the thermocouple feed passage, respectively. The clamping diamond detector is installed at one end of the water-cooled base and extends into the vacuum cavity; the water-cooled base is provided with a water-cooling channel inside, which is used to connect with the external water-cooling pipeline to form a water circulation, and to remove the heat generated by the clamping diamond detector after absorbing the beam energy. The clamp-type diamond detector is used to detect the electrical signal generated by the synchrotron radiation white beam stream incident into the vacuum cavity through the beam tube, which is then fed through the electrodes and output. It also collects the temperature signal of the diamond sheet, which is fed through the thermocouple and output. The beam position information is calculated by the difference and ratio of the electrical signals output from each quadrant.

[0030] The main detection component of this invention is a clamping diamond detector. By depositing a metal film layer on a specific area of ​​the diamond, and designing a clamping and current and bias voltage introduction and exit structure, the circuit conduction and insulation are achieved.

[0031] In one embodiment, the clamp-type diamond detector includes a base, a diamond sheet, a bias circuit board, a current circuit board, a positioning block, a clamping plate, a bias electrode, and a current lead-out electrode. The base is primarily made of a metal with excellent thermal properties, such as oxygen-free copper, chromium-zirconium copper, or dispersed copper. The diamond sheet is made of single-crystal diamond or high-purity polycrystalline diamond prepared by microwave plasma chemical vapor deposition (MPCVD), possessing extremely high thermal conductivity (>1800 W / (m·K)) and good photoelectric conversion performance. A metal film (such as gold or titanium / gold multilayer film) is deposited on its surface in specific areas according to detection requirements. This film serves as an electrode for collecting photogenerated carriers and achieving electrical connection with external circuitry. Both the bias circuit board and the current circuit board use high-frequency ceramic substrates (such as Al2O3 or AlN) to ensure good insulation and heat dissipation performance, and the circuit is designed according to insulation and conduction requirements. The positioning blocks, made of insulating materials such as PTFE or alumina ceramic, are used to limit the horizontal displacement of the diamond sheet and to assist in positioning the bias circuit board and current circuit board. The clamping plates, made of beryllium copper or phosphor bronze, are metals with a certain degree of elasticity and are fixed to the base at both ends with screws. Both the bias electrode and the current lead-out electrode are made of oxygen-free copper. The upper positioning blocks and clamping plates ensure that the diamond back electrode and the front collector electrode coating lead-out area are connected to the bias circuit board and current circuit board circuitry.

[0032] In one embodiment, the water-cooled base is the core component for supporting and dissipating heat from the detector device. Its main body is integrally machined from oxygen-free copper material, and it features an internal U-shaped water-cooling channel. The inlet and outlet of the water-cooling channel are connected to external water-cooling pipes by welding. Cooling water circulates within the channel, quickly carrying away the heat generated after the diamond sheet absorbs the beam energy, ensuring the detector's long-term stable operation under high heat load conditions.

[0033] In one embodiment, the vacuum chamber is welded from 304 or 316L stainless steel and includes a main chamber, electrode feedthroughs, and thermocouple feedthroughs. At least one of the front and rear flanges of the main chamber is a loose flange, serving as the beam inlet / outlet flange. Its inner diameter is required to be larger than the maximum size of the detector for installation. Flange interfaces are provided on both sides and the top to mate with the feedthrough flanges and the water-cooled base. Reference base mounting posts are welded to the shoulder rings of the flanges on both sides of the chamber. The tops of the reference base mounting posts are welded to the reference base for collimation installation.

[0034] During operation, a synchrotron radiation white beam enters from the entrance flange of the vacuum cavity and is incident directly onto the diamond sheet surface of the clamp-on diamond detector. When high-energy X-ray photons interact with the diamond material, electron-hole pairs are generated through the photoelectric effect, Compton effect, and electron-hole pair effect. Under the influence of an external bias electric field applied by the bias circuit board, electrons and holes move towards different metal-coated electrodes (anode and cathode) on the diamond sheet surface, thereby forming a measurable photocurrent signal on the current circuit board. The magnitude of this photocurrent signal is related to the intensity of the incident beam and its position on the diamond sheet. By acquiring and processing the photocurrent signal generated by the four-quadrant diamond detector, the horizontal and vertical position information of the beam can be calculated, thus providing feedback for the adjustment of the beam modulation optics.

[0035] This invention utilizes a mechanically clamped diamond detector to achieve beam position detection and diagnosis under the high-energy and high-heat-load requirements of the HEPS fourth-generation light source. It is used to provide feedback on whether the beam modulation of optical equipment such as white light apertures and white light mirrors meets the test requirements, improve beam modulation efficiency and accuracy, and support real-time online monitoring.

[0036] like Figure 8 The image shows a transmission-type white beam stream detector device according to an example of the present invention, mainly including a water-cooled base weldment a1, a clamping diamond detector a2, a radiation shielding cover a3, a main cavity a4, an electrode feedthrough a5, and a thermocouple feedthrough a6. For example... Figure 9As shown, the main cavity a4 includes a water-cooled flange interface a401, a cavity body welded component a402, a beam inlet flange a403, a cavity base a404, an electrode feedthrough flange interface a405, a thermocouple feedthrough flange interface a406, a beam outlet flange a407, and a reference base a408. The cavity body welded component a402 is integrally welded from 304 or 316L stainless steel, with its inner surface electrolytically polished. All flanges are knife-edge flanges to ensure ultra-high vacuum compatibility and low gas release rate. The water-cooled flange interface a401 and the beam inlet flange a403 are loose-fitting flanges, facilitating alignment adjustments when connecting the water-cooled base welded component a1 to upstream equipment. The water-cooled base weldment a1 and the water-cooled flange interface a401 are connected by bolts and a metal sealing gasket is squeezed to achieve a vacuum seal. The electrode feedthrough a5 and the electrode feedthrough connecting flange interface a405 are connected by bolts and a metal sealing gasket is squeezed to achieve a vacuum seal. The thermocouple feedthrough a6 and the thermocouple feedthrough connecting flange interface a406 are connected by bolts and a metal sealing gasket to achieve a vacuum seal. The electrode feedthrough a5 contains at least five sets of BNC electrical connectors. One set of BNC electrical connectors is connected to the electrical connector of the bias circuit board a201 through an ultra-high vacuum wire to apply pressure to the back electrode of the diamond sheet 203. The other four sets of BNC electrical connectors are connected to the connector on the current lead-out circuit board a208 through ultra-high vacuum wires to collect the current signal formed by photoelectrons generated on the diamond sheet 203. Note that the ultra-high vacuum wire / thermocouple wire needs to be connected to the corresponding connector at the clamp-type diamond detector a2 first, and then the other end of the wire is connected to the corresponding feedthrough and locked. The clamp-type diamond detector a2 is mounted on the beam inlet side surface of the water-cooled base weldment a1 and fixed with screws. The radiation shielding cover a3 covers the surface of the clamp-type diamond detector a2 to provide radiation protection. The beam outlet flange a407 is a fixed flange, welded to the cavity main body weldment a402 according to ultra-high vacuum welding standards. The reference base a408 is precision machined to provide a unified assembly reference for the whole machine. It is spot-welded to the two sets of reference base welding columns of the cavity main body weldment a402, requiring a firm and aesthetically pleasing finish.

[0037] like Figure 10As shown, in one embodiment, the water-cooled base weldment a1 consists of a water-cooling pipe a101, a welding flange a102, an oxygen-free copper cooling body a103, and a water channel welding plug a104. The water-cooling pipe a101 and the water channel welding plug a104 are welded to the corresponding positions of the oxygen-free copper cooling body a103 using electron beam welding. The welding flange a102 and the oxygen-free copper cooling body a103 are welded using vacuum brazing. Note that the relative positions of each component need to be ensured using appropriate tooling. The internal flow channels of the oxygen-free copper cooling body a103 are arranged in a U-shape to ensure that the cooling water fully covers the back of the diamond sheet. The mounting surface has irregular grooves and multi-specification threaded holes for positioning and mounting the clamp-type diamond detector a2. Indium sheets or graphite sheets can be sandwiched between the oxygen-free copper cooling body a103 and the mounting surface of the clamp-type diamond detector a2 to improve contact thermal conductivity.

[0038] like Figure 11 and Figure 12As shown, in one embodiment, the clamping diamond detector a2 comprises a bias circuit board a201, a bias electrode a202, a diamond sheet a203, a mounting base a204, a diamond positioning block a205, a clamping plate a206, a current lead-out plate a207, and a current lead-out circuit board a208. The mounting base a204 has a highly flat boss machined on its upper surface, and the diamond positioning block a205 has a C-shaped notch structure. Its thickness is equal to the thickness of the boss on the mounting base a204 and the thickness of the diamond sheet a203. The sum of 3, with a negative thickness tolerance, ensures that the upper surface of the diamond sheet a203 is higher than the upper surface of the diamond positioning block a205. The installation sequence is as follows: first, attach the vertical and lower sides of the C-shaped opening of the diamond positioning block a205 to the left and lower sides of the boss of the mounting base a204; then, tightly attach the left and lower sides of the diamond sheet a203 to the part of the C-shaped opening of the diamond positioning block a205 that is higher than the vertical and lower sides of the boss of the mounting base a204, thereby achieving micron-level repeatable positioning installation of the diamond sheet a203. The diamond sheet a203 is precisely clamped between the mounting base a204 and the clamping plate a206. The upper and lower surfaces are respectively attached to the bias electrode a202 and the current lead a207 to ensure uniform and stable electrode contact. The bias circuit board a201 integrates bias input pads and connection lines, and the current lead circuit board a208 integrates current lead pads and signal transmission lines. The bias circuit board a201 is connected to the back electrode bias coating area of ​​the diamond sheet a203 through the bias electrode a202 to realize electrical signal transmission. The current lead circuit board a208 is connected to the four-quadrant coating area of ​​the diamond sheet a203 through the current lead a207 to realize electrical signal transmission. Both the bias circuit board a201 and the current lead-out circuit board a208 use low-noise, high-insulation substrates, with gold-nickel plating to enhance conductivity reliability and radiation resistance. The four-quadrant coating area and the back electrode bias coating area of ​​the diamond sheet a203 are prepared by plasma-enhanced sputtering, with a thickness uniformity better than ±2 nm. For white beam streams with high heat loads, hydrogen-oxygen plasma etching can be used to locally thin the light-receiving area of ​​the diamond sheet a203 before electrode coating. In addition, a flexible ultra-high vacuum thermocouple probe is introduced through thermocouple feedthrough a6. Its temperature measuring point is pressed tightly against the mounting hole near the upper left corner of the mounting base a204 by a vacuum screw, and is used to detect the temperature of the heat generated by the diamond sheet a203 after absorbing the beam and conducted to the mounting base a204.

[0039] This device can also be made into a wedge-shaped four-blade white light BPM, which can detect the position information of the white beam stream. However, due to its structural limitations, it cannot detect the position of beams with dimensions of 1-2 mm, and its position detection accuracy is only about 10 μm, which is relatively low. In addition, the overall size is large and the cost is high. For the upstream section of the beamline after exiting the sawtooth wall, the transmission-type white beam stream position detector of this invention is more suitable. It can monitor the position information of small-sized white light / powder beam streams passing through optical elements such as white light apertures and white light mirrors. The position detection accuracy can be improved to within 1 μm. It is small in size, compact in structure, and low in cost.

[0040] The above are preferred embodiments of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A transmissive white beam stream position detector device, characterized in that, Includes a clamp-on diamond detector, a water-cooled base, and a vacuum chamber; The vacuum cavity includes a main cavity, an electrode feed passage, and a thermocouple feed passage; the main cavity is provided with a beam inlet / outlet flange for connecting to the beam tube; the main cavity is provided with multiple flange interfaces for connecting the water-cooled base, the electrode feed passage, and the thermocouple feed passage, respectively. The clamping diamond detector is installed at one end of the water-cooled base and extends into the vacuum cavity; the water-cooled base is provided with a water-cooling channel inside, which is used to connect with the external water-cooling pipeline to form a water circulation, and to remove the heat generated by the clamping diamond detector after absorbing the beam energy. The clamping diamond detector is used to detect the electrical signal generated by the synchrotron radiation white beam stream incident into the vacuum cavity through the beam tube and output through the electrode. The beam position information is obtained by calculating the difference and ratio of the electrical signals output by each quadrant of the clamping diamond detector. The temperature signal of the diamond sheet is collected and output through the thermocouple feedthrough.

2. The transmissive white beam stream position detector device according to claim 1, characterized in that, The clamping diamond detector includes a bias circuit board, a bias electrode plate, a diamond sheet, a mounting base, a diamond positioning block, a clamping plate, a current lead plate, and a current lead circuit board. The mounting base has a boss on its upper surface for engaging with the diamond positioning block to position the diamond sheet. The diamond sheet is clamped between the mounting base and the clamping plate, with the bias electrode plate and current lead plate respectively attached to its upper and lower surfaces. The bias circuit board transmits electrical signals through the bias electrode plate and the back electrode bias coating area of ​​the diamond sheet. The current lead circuit board transmits electrical signals through the current lead plate and the four-quadrant coating area of ​​the diamond sheet.

3. The transmissive white beam stream position detector device according to claim 2, characterized in that, The four-quadrant coating area and the back electrode bias coating area of ​​the diamond sheet are used to prepare electrodes by magnetron sputtering for collecting photogenerated carriers.

4. The transmissive white beam stream position detector device according to claim 2, characterized in that, The bias electrode and current lead are both made of oxygen-free copper; the main body of the mounting base is made of oxygen-free copper, chromium zirconium copper, or dispersed copper; the bias circuit board and the current lead circuit board are both made of high-frequency ceramic substrate; the diamond positioning block is made of polytetrafluoroethylene or alumina ceramic, used to limit the horizontal displacement of the diamond sheet and to assist in the positioning of the bias circuit board and the current lead circuit board.

5. The transmissive white beam stream position detector device according to claim 1, 2, or 3, characterized in that, The clamp-type diamond detector is provided with a radiation shielding cover on its outer side for radiation protection.

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