Differential capacitor and electronic device

Abstract

The application discloses a differential capacitor and electronic equipment. The differential capacitor comprises a first electrode layer, a first movable part and a second movable part, the first movable part and the second movable part are connected through a first buffer part; a second electrode layer is located on one side of the first electrode layer along a thickness direction, a gap is formed between the second electrode layer and the first electrode layer, and a first limiting part is arranged on one side of the second electrode layer; the first electrode layer can rotate relative to the second electrode layer, and when the second movable part abuts against the first limiting part, the second movable part can rotate relative to the first movable part. The first buffer part is arranged between the first movable part and the second movable part, the first electrode layer can rotate relative to the second electrode layer, and when the second movable part abuts against the first limiting part, the second movable part can rotate relative to the first movable part through the first buffer part, so that a buffering effect is achieved, and electrostatic adsorption caused by the bending deformation of the first movable part and the contact between the first movable part and the second electrode layer is avoided.

Description

Technical Field

[0001] This invention relates to the field of electronic equipment technology, and more specifically, to a differential capacitor and an electronic device. Background Technology

[0002] In related technologies, differential capacitors are commonly used in electronic devices such as MEMS micromirrors, MEMS gyroscopes, or MEMS accelerometers. Differential capacitors typically include a seesaw structure, with the seesaw structure and its lower electrode forming the differential capacitor. Using a seesaw structure simplifies the design and reduces manufacturing complexity.

[0003] However, at the moment of impact, the seesaw's rotational angular velocity becomes zero or even reverses, generating a huge force on the seesaw's end, which can easily lead to structural damage or even malfunction. Furthermore, at the beginning of the impact overload phase, the seesaw structure rotates around the anchor point, with one end rotating upwards and the other downwards. Then, the downward-rotating end of the seesaw, subjected to a strong force from the seesaw's end, will use that end as a new axis of rotation, causing the clockwise rotation around the anchor point to change to counter-clockwise rotation around the new axis. This can cause the seesaw structure to bend and deform, and electrostatic attraction to the electrodes, resulting in malfunction.

[0004] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Summary of the Invention

[0005] One object of the present invention is to provide a new technical solution for differential capacitors.

[0006] According to a first aspect of the present invention, a differential capacitor is provided. The differential capacitor comprises: A first electrode layer, the first electrode layer includes a first movable part and a second movable part, the first movable part and the second movable part are connected by a first buffer part; The second electrode layer is located on one side of the first electrode layer along the thickness direction, and there is a gap between the second electrode layer and the first electrode layer. A first limiting part is provided on one side of the second electrode layer. The first electrode layer is rotatable relative to the second electrode layer, and when the second movable part abuts against the first limiting part, the second movable part is rotatable relative to the first movable part.

[0007] Optionally, the first buffer portion is provided with a first through hole along the thickness direction.

[0008] Optionally, the first through-hole is provided with multiple spacings.

[0009] Optionally, the first buffer portion includes a first torsion beam, and the first movable portion and the second movable portion are connected by the first torsion beam.

[0010] Optionally, there are two first torsion beams, which are symmetrically arranged on the first electrode layer.

[0011] Optionally, the second movable part has a first limiting protrusion at one end facing the first limiting part.

[0012] Optionally, the first limiting protrusion is provided with multiple intervals.

[0013] Optionally, the second electrode layer includes a first bottom electrode, which is spaced apart from the first limiting portion, and there is a gap between the first bottom electrode and the first movable portion.

[0014] Optionally, the first bottom electrode is provided with multiple spaced-apart portions, and the differential capacitor further includes an anchor point. The first movable part is rotatably connected to the anchor point, and the multiple first bottom electrodes are symmetrically distributed on opposite sides of the anchor point.

[0015] Optionally, the second electrode layer is further provided with a second limiting part on the other side opposite to the first limiting part, and the end of the first movable part away from the second movable part can rotate toward or away from the second limiting part.

[0016] Optionally, the first movable part is provided with a second limiting protrusion on the side facing the second limiting part, and the second limiting protrusion can abut against the second limiting part.

[0017] Optionally, the first electrode layer further includes a third movable part, which is connected to the first movable part through a second buffer part. The second electrode layer is also provided with a second limiting part. The third movable part can rotate toward the second limiting part. When the third movable part abuts against the second limiting part, the third movable part can rotate relative to the first movable part.

[0018] Optionally, the differential capacitor further includes an anchor point, the first movable part being rotatably connected to the anchor point, and the second movable part and the third movable part being located on opposite sides of the anchor point.

[0019] According to a second aspect of the present invention, an electronic device is provided, the electronic device comprising the differential capacitor described in any of the above embodiments.

[0020] One technical advantage of this application is that a first buffer portion is provided between the first movable portion and the second movable portion. The first electrode layer can rotate relative to the second electrode layer. When the second movable portion abuts against the first limiting portion, the first buffer portion enables the second movable portion to rotate relative to the first movable portion, thereby achieving a buffering effect, protecting the first electrode layer, and preventing the first movable portion from bending and deforming and coming into contact with the second electrode layer, resulting in electrostatic adsorption.

[0021] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0022] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the invention and, together with their description, serve to explain the principles of the invention.

[0023] Figure 1 This is a schematic diagram of the structure of a differential capacitor according to an embodiment of this application.

[0024] Figure 2 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0025] Figure 3 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0026] Figure 4 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0027] Figure 5 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0028] Figure 6 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0029] Figure 7 This is a schematic diagram of the structure of a differential capacitor according to another embodiment of this application.

[0030] Figure label: 1. First electrode layer; 11. First movable part; 111. Second limiting protrusion; 12. Second movable part; 121. First limiting protrusion; 13. First buffer part; 131. First through hole; 132. First torsion beam; 14. Third movable part; 141. Third limiting protrusion; 15. Second buffer part; 2. Second electrode layer; 21. First bottom electrode; 22. First limiting part; 23. Second limiting part; 3. Anchor point; 4. Second torsion beam. Detailed Implementation

[0031] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention.

[0032] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0033] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0034] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0036] According to one embodiment of this application, a differential capacitor is provided, which includes a first electrode layer 1 and a second electrode layer 2. The first electrode layer 1 includes a first movable portion 11 and a second movable portion 12, which are connected by a first buffer portion 13. The second electrode layer 2 is located on one side of the first electrode layer 1 along the thickness direction, and there is a gap between the second electrode layer 2 and the first electrode layer 1. A first limiting portion 22 is provided on one side of the second electrode layer 2. The first electrode layer 1 is rotatable relative to the second electrode layer 2, and when the second movable portion 12 abuts against the first limiting portion 22, the second movable portion 12 is rotatable relative to the first movable portion 11.

[0037] In this example, there is a movable gap between the first electrode layer 1 and the second electrode layer 2, forming a variable capacitor. The first electrode layer 1 can rotate relative to the second electrode layer 2, thereby changing the capacitance value. For example, a differential capacitor can be used in a MEMS differential capacitive sensor.

[0038] like Figure 1 and Figure 2As shown, in this example, a first limiting part 22 is provided on one side of the second electrode layer 2. The first electrode layer 1 rotates relative to the second electrode layer 2, and the second movable part 12 moves toward the first limiting part 22. For example, when the first electrode layer 1 rotates clockwise, the end of the second movable part 12 facing the first limiting part 22 can abut against the first limiting part 22, and the first limiting part 22 can limit the second movable part 12. If the first electrode layer 1 continues to rotate clockwise, the second movable part 12 continues to be subjected to force. Since the second movable part 12 and the first movable part 11 are connected by the first buffer part 13, the first movable part 11 can rotate relative to the second movable part 12, that is, the first movable part 11 bends relative to the second movable part 12. The first electrode layer 1 can be partially deformed, thereby playing a buffering role to prevent the first movable part 11 from bending and deforming. Furthermore, the first buffer part 13 can deform and absorb energy, thus protecting the first electrode layer 1.

[0039] In this example, the differential capacitor can be used in an accelerometer. When subjected to an impact in the vertical direction, the first electrode layer 1 can be locally deformed to buffer and absorb the impact energy, thereby improving the overload resistance of the differential capacitor.

[0040] It should be noted that the first electrode layer 1 can be an electrode sheet.

[0041] In this example, a first buffer portion 13 is provided between the first movable part 11 and the second movable part 12. The first electrode layer 1 can rotate relative to the second electrode layer 2. When the second movable part 12 abuts against the first limiting part 22, the first buffer portion 13 allows the second movable part 12 to rotate relative to the first movable part 11, thereby providing a buffering effect and protecting the first electrode layer 1. It also prevents the first movable part 11 from bending and deforming, thus avoiding contact with the second electrode layer 2 and electrostatic adsorption. Furthermore, the structure of the first electrode layer is simple and reliable, and no process modification is required during production, without increasing cost or area.

[0042] In one example, such as Figure 3 As shown, the first buffer portion 13 has a first through hole 131 extending through it along the thickness direction. It should be noted that... Figure 3 This can be a top view of a differential capacitor. Figure 3 The dashed line in the figure represents the second electrode layer 2 located below the first electrode layer 1.

[0043] In this example, a first through hole 131 is provided between the first movable part 11 and the second movable part 12 in the first electrode layer 1. The solid connection structure between the first movable part 11 and the second movable part 12 forms a first buffer part 13 between the first movable part 11 and the second movable part 12. By providing the first through hole 131 between the first movable part 11 and the second movable part 12, an elastic connection can be achieved between the first movable part 11 and the second movable part 12. When the first electrode layer 1 is impacted, the first buffer part 13 can deform preferentially to allow the first movable part 11 to rotate relative to the second movable part 12.

[0044] In one example, such as Figure 3 As shown, multiple first through holes 131 are spaced apart. By spaced apart multiple first through holes 131, there is a solid connection structure between two adjacent first through holes 131, which can ensure the reliability of the connection between the first movable part 11 and the second movable part 12, and also allow the first buffer part 13 to deform.

[0045] It should be noted that the first movable part 11 and the second movable part 12 are distributed along the length direction of the first electrode layer 1, and the plurality of first through holes 131 can be arranged along the width direction of the first electrode layer 1. For example, two, three or four first through holes 131 can be arranged at intervals, etc., as can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0046] In one example, such as Figure 4 The first buffer section 13 includes a first torsion beam 132, and the first movable section 11 and the second movable section 12 are connected by the first torsion beam 132.

[0047] It should be noted that, Figure 4 This can be a top view of a differential capacitor. Figure 4 The dashed line in the figure represents the second electrode layer 2 located below the first electrode layer 1.

[0048] In this example, the first buffer section 13 includes a first torsion beam 132, that is, the first movable section 11 and the second movable section 12 are connected by the first torsion beam 132. When the first electrode layer 1 is impacted, the first torsion beam 132 can be twisted and deformed so that the first movable section 11 can rotate relative to the second movable section 12.

[0049] In one example, such as Figure 4 As shown, there are two first torsion beams 132, which are symmetrically arranged on the first electrode layer 1.

[0050] In this example, the first movable part 11 and the second movable part 12 are arranged along the length direction of the first electrode layer 1, and the two second torsion beams 4 are spaced apart along the width direction of the first electrode layer 1. The two first torsion beams 132 are symmetrically arranged, which can make the first buffer part 13 deform uniformly when the first electrode layer 1 is impacted. The first torsion beams 132 can be integrally formed with the first electrode layer 1.

[0051] It should be noted that the space between the two first torsion beams 132 can be either a hollow structure or a solid connection structure. Those skilled in the art can decide based on the actual situation, and no specific limitation is made here.

[0052] In this example, the first through-hole 131 can also be replaced by a groove structure, that is, a groove is provided between the first movable part 11 and the second movable part 12 of the first electrode layer 1 to form the first buffer part 13. Alternatively, the first buffer part 13 can also be an elastic arm structure. Of course, the specific structure of the first buffer part 13 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0053] In one example, such as Figure 1 and Figure 2 As shown, the second movable part 12 has a first limiting protrusion 121 at one end facing the first limiting part 22.

[0054] like Figure 2 As shown, in this example, the surface of the second movable part 12 facing the first limiting part 22 is provided with a first limiting protrusion 121. When the first electrode layer 1 rotates clockwise, the first limiting protrusion 121 can abut against the first limiting part 22, and the first limiting protrusion 121 can play a timely stopping role in case of overload. When the first electrode layer 1 is subjected to impact overload, the first buffer part 13 can deform, which can absorb the impact energy, reduce the force on the first limiting protrusion 121, and also protect the first limiting protrusion 121.

[0055] like Figure 1 and Figure 2 As shown, in this example, multiple first limiting protrusions 121 are spaced apart. By providing multiple first limiting protrusions 121, the stopping effect can be improved. For example, multiple first limiting protrusions 121 are provided along the width direction of the first electrode layer 1, and multiple first limiting protrusions 121 are also provided along the length direction of the first electrode layer 1. Of course, those skilled in the art can determine the number and arrangement of the first limiting protrusions 121 according to the actual situation, and no specific limitation is made here.

[0056] It should be noted that the first limiting protrusion 121 can be integrally formed with the first electrode layer 1.

[0057] In one example, such as Figures 1 to 4 As shown, the second electrode layer 2 includes a first bottom electrode 21, which is spaced apart from the first limiting part 22, and there is a gap between the first bottom electrode 21 and the first movable part 11.

[0058] like Figure 2 As shown, in this example, there is a gap between the first bottom electrode 21 and the first movable part 11, the first movable part 11 can rotate counterclockwise or clockwise, the first movable part 11 can rotate closer to or further away from the first bottom electrode 21, and a variable capacitor is formed between the first movable part 11 and the first bottom electrode 21.

[0059] In this example, the second movable part 12 can abut against the first limiting part 22, and the first bottom electrode 21 is spaced apart from the first limiting part 22 to prevent the first limiting part 22 from affecting the first bottom electrode 21. The first limiting part 22 can be a second bottom electrode, and the potential of the second bottom electrode is the same as the potential of the first electrode layer 1 to avoid signal crosstalk after the first electrode layer 1 comes into contact with the second bottom electrode. Alternatively, the first limiting part 22 can be a limiting plate structure; those skilled in the art can determine this according to the actual situation, and no specific limitation is made here.

[0060] It should be noted that the length of the first limiting part 22 can be greater than the length of the second movable part 12, so that the first limiting part 22 can support and limit the entire second movable part 12.

[0061] In one example, such as Figures 1 to 4 As shown, the first bottom electrode 21 is provided with multiple electrodes spaced apart. The differential capacitor also includes an anchor point 3. The first movable part 11 is rotatably connected to the anchor point 3. The multiple first bottom electrodes 21 are symmetrically distributed on opposite sides of the anchor point 3.

[0062] In this example, one end of the first movable part 11 along the thickness direction is connected to the anchor point 3. The first electrode layer 1 can rotate about the position connected to the anchor point 3, so that the first electrode layer 1 can form a seesaw structure. Multiple first bottom electrodes 21 are provided, and the multiple first bottom electrodes 21 are symmetrically distributed on opposite sides of the anchor point 3, which is beneficial to improving the accuracy of the differential capacitor. For example, when the differential capacitor is used in a MEMS differential capacitance sensor, it can improve the detection accuracy of the MEMS differential capacitance sensor.

[0063] like Figure 1 and Figure 2 As shown, in this example, two first bottom electrodes 21 can be provided, and the two first bottom electrodes 21 are symmetrically distributed on opposite sides of the anchor point 3. The two first bottom electrodes 21 are arranged along the length direction of the first electrode layer 1.

[0064] like Figure 3 and Figure 4 As shown, in this example, the connecting end of anchor point 3 can be connected to the first electrode layer 1 via a second torsion beam 4, and the first electrode layer 1 can rotate about the second torsion beam 4 as a pivot. The first electrode layer 1 is provided with a clearance hole, and the connecting end of anchor point 3 is embedded in the clearance hole. One end of the second torsion beam 4 is connected to the inner wall of the clearance hole, and the other end is connected to the side wall of anchor point 3. The second torsion beam 4 can undergo torsional deformation to allow the first electrode layer 1 to rotate.

[0065] It should be noted that two second torsion beams 4 can be provided, with the two second torsion beams 4 positioned on opposite sides of the anchor point 3, and arranged along the width direction of the first electrode layer 1. Alternatively, the anchor point 3 and the first electrode layer 1 can also be connected by an elastic arm.

[0066] The second torsion beam 4, the anchor point 3, and the first electrode layer 1 can be integrally formed. The anchor point 3 can be prismatic. Of course, the specific structure of the anchor point 3 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0067] In this example, the stiffness of the second torsion beam 4 remains unchanged, and the mechanical restoring force remains unchanged. By setting the first buffer part 13 in the first electrode layer 1, under the same acceleration, after the second movable part 12 abuts against the first limiting part 22, the first movable part 11 can rotate relative to it. That is, the structure of the first electrode layer 1 that participates in the movement or deformation becomes smaller and the mass becomes smaller, so a greater acceleration than the original structure is required to deform the second torsion beam 4 at the anchor point 3.

[0068] It should be noted that, along the length of the first electrode layer 1, the mass of the first electrode layer 1 on one side of the anchor point 3 is smaller than that on the other side, that is, as shown... Figure 3 As shown, the mass of the first electrode layer 1 located to the left of anchor point 3 is less than the mass of the first electrode layer 1 located to the right of anchor point 3. In other words, along the length of the first electrode layer 1, anchor point 3 is not at the center of the first electrode layer 1.

[0069] It should also be noted that the differential capacitor further includes a substrate, with one end of the anchor point 3 connected to the first electrode layer 1 and the other end connected to the substrate. The first bottom electrode 21 and the first limiting part 22 may also be disposed on the substrate.

[0070] In one example, such as Figure 1 and Figure 2 As shown, the second electrode layer 2 is further provided with a second limiting part 23 on the other side opposite to the first limiting part 22, and the end of the first movable part 11 away from the second movable part 12 can rotate toward or away from the second limiting part 23.

[0071] In this example, the first electrode layer 1 has a seesaw structure, allowing it to rotate clockwise or counterclockwise. For example, as... Figure 1 and Figure 2 As shown, when the first electrode layer 1 rotates clockwise, the second movable part 12 can abut against the first limiting part 22; when the first electrode layer 1 rotates counterclockwise, the end of the first movable part 11 away from the second movable part 12 can abut against the second limiting part 23. The second limiting part 23 can limit and stop the first electrode layer 1.

[0072] In this example, the second limiting portion 23 can be disposed on the substrate. The first bottom electrode 21 and the second limiting portion 23 are spaced apart to prevent the second limiting portion 23 from affecting the first bottom electrode 21. The second limiting portion 23 can be a third bottom electrode, and the potential of the third bottom electrode is the same as the potential of the first electrode layer 1 to avoid signal crosstalk after the first electrode layer 1 comes into contact with the third bottom electrode. Alternatively, the second limiting portion 23 can be a limiting plate structure, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0073] In one example, such as Figure 1 and Figure 2 As shown, the first movable part 11 is provided with a second limiting protrusion 111 on the side facing the second limiting part 23, and the second limiting protrusion 111 can abut against the second limiting part 23.

[0074] In this example, the surface of the first electrode layer 1 facing the second limiting part 23 is provided with a second limiting protrusion 111. When the first electrode layer 1 rotates counterclockwise, the second limiting protrusion 111 can abut against the second limiting part 23, and the second limiting protrusion 111 can play a timely stopping role when overloaded.

[0075] It should be noted that multiple second limiting protrusions 111 can be provided at intervals. By providing multiple second limiting protrusions 111, the stopping effect can be improved. For example, multiple second limiting protrusions 111 can be provided along the width direction of the first electrode layer 1, and / or multiple second limiting protrusions 111 can be provided along the length direction of the first electrode layer 1. Of course, the number and arrangement of the second limiting protrusions 111 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0076] It should be noted that the second limiting protrusion 111 can be integrally formed with the first electrode layer 1.

[0077] In one example, such as Figures 5 to 7As shown, the first electrode layer 1 further includes a third movable part 14, which is connected to the first movable part 11 via a second buffer part 15. The second electrode layer 2 also has a second limiting part 23. The third movable part 14 can rotate toward the second limiting part 23. When the third movable part 14 abuts against the second limiting part 23, the third movable part 14 can rotate relative to the first movable part 11. The second buffer part 15 may have the same structure as the first buffer part 13, and will not be described in detail here.

[0078] In this example, the second buffer portion 15 has the same function as the first buffer portion 13. The third movable portion 14 is connected to the first movable portion 11 via the second buffer portion 15, and the second movable portion 12 is connected to the first movable portion 11 via the first buffer portion 13. This ensures that the first electrode layer 1 can be protected when rotating in different directions. For example, the third movable portion 14 and the second movable portion 12 are located on opposite sides of the first movable portion 11. When the first electrode layer 1 rotates clockwise, the first buffer portion 13 deforms and absorbs energy to protect the first electrode layer 1. When the first electrode layer 1 rotates counterclockwise, the second buffer portion 15 deforms and absorbs energy to protect the first electrode layer 1.

[0079] like Figure 5 and Figure 6 As shown, in this example, when one end of the first movable part 11 is connected to the third movable part 14, the third movable part 14 can replace the end of the first movable part 11 and abut against the second limiting part 23.

[0080] The third movable part 14 has a third limiting protrusion 141 at one end facing the second limiting part 23. In this case, the first movable part 11 will not contact the second electrode layer 2, and the first movable part 11 does not need to have the second limiting protrusion 111. Multiple third limiting protrusions 141 can be spaced apart. By providing multiple third limiting protrusions 141, the stopping effect can be improved. For example, multiple third limiting protrusions 141 can be provided along the width direction of the first electrode layer 1, and multiple third limiting protrusions 141 can also be provided along the length direction of the first electrode layer 1. Of course, the number and arrangement of the third limiting protrusions 141 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0081] It should be noted that the third limiting protrusion 141 can be integrally formed with the first electrode layer 1.

[0082] In one example, such as Figures 5 to 7 As shown, the differential capacitor also includes an anchor point 3, the first movable part 11 is rotatably connected to the anchor point 3, and the second movable part 12 and the third movable part 14 are located on opposite sides of the anchor point 3.

[0083] In this example, anchor point 3 is connected to the first movable part 11, and the first electrode layer 1 can rotate clockwise or counterclockwise around anchor point 3. The second movable part 12 and the third movable part 14 are located on opposite sides of the first movable part 11 along its length. Anchor point 3 can be located in the middle of the first movable part 11. The second movable part 12 and the third movable part 14 have the same length and width, and anchor point 3 can be located in the middle of the first electrode layer 1.

[0084] In one example, a plurality of first buffer portions 13 are spaced apart between the first movable portion 11 and the second movable portion 12, thereby enabling multi-level buffering to improve the protection effect. That is, the plurality of first buffer portions 13 can be arranged along the length direction of the first electrode layer 1. For example, two or three first buffer portions 13 can be spaced apart, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0085] According to another embodiment of this application, an electronic device is provided, which includes the differential capacitor described in the above embodiments.

[0086] It should be noted that the electronic device can be a MEMS micromirror, MEMS gyroscope, or accelerometer, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0087] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0088] While specific embodiments of the invention have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of the invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims

1. A differential capacitor, characterized in that, include: The first electrode layer (1) includes a first movable part (11) and a second movable part (12), and the first movable part (11) and the second movable part (12) are connected by a first buffer part (13); The second electrode layer (2) is located on one side of the first electrode layer (1) along the thickness direction. There is a gap between the second electrode layer (2) and the first electrode layer (1). A first limiting part (22) is provided on one side of the second electrode layer (2). The first electrode layer (1) is rotatable relative to the second electrode layer (2), and when the second movable part (12) abuts against the first limiting part (22), the second movable part (12) is rotatable relative to the first movable part (11).

2. The differential capacitor according to claim 1, characterized in that, The first buffer part (13) has a first through hole (131) extending through it along the thickness direction.

3. The differential capacitor according to claim 2, characterized in that, The first through hole (131) is provided in multiple intervals.

4. The differential capacitor according to claim 1, characterized in that, The first buffer section (13) includes a first torsion beam (132), and the first movable section (11) and the second movable section (12) are connected by the first torsion beam (132).

5. The differential capacitor according to claim 4, characterized in that, Two first torsion beams (132) are provided, and the two first torsion beams (132) are symmetrically arranged on the first electrode layer (1).

6. The differential capacitor according to claim 1, characterized in that, The second movable part (12) has a first limiting protrusion (121) at one end facing the first limiting part (22).

7. The differential capacitor according to claim 6, characterized in that, The first limiting protrusion (121) is provided in multiple intervals.

8. The differential capacitor according to claim 1, characterized in that, The second electrode layer (2) includes a first bottom electrode (21), which is spaced apart from the first limiting part (22), and there is a gap between the first bottom electrode (21) and the first movable part (11).

9. The differential capacitor according to claim 8, characterized in that, The first bottom electrode (21) is provided with multiple spacings, and the differential capacitor also includes an anchor point (3). The first movable part (11) is rotatably connected to the anchor point (3), and the multiple first bottom electrodes (21) are symmetrically distributed on opposite sides of the anchor point (3).

10. The differential capacitor according to claim 1, characterized in that, The second electrode layer (2) is further provided with a second limiting part (23) on the other side opposite to the first limiting part (22), and the end of the first movable part (11) away from the second movable part (12) can rotate toward or away from the second limiting part (23).

11. The differential capacitor according to claim 10, characterized in that, The first movable part (11) is provided with a second limiting protrusion (111) on the side facing the second limiting part (23), and the second limiting protrusion (111) can abut against the second limiting part (23).

12. The differential capacitor according to claim 1, characterized in that, The first electrode layer (1) further includes a third movable part (14), which is connected to the first movable part (11) through a second buffer part (15). The second electrode layer (2) is also provided with a second limiting part (23). The third movable part (14) can rotate toward the second limiting part (23). When the third movable part (14) abuts against the second limiting part (22), the third movable part (14) can rotate relative to the first movable part (11).

13. The differential capacitor according to claim 12, characterized in that, The differential capacitor also includes an anchor point (3), the first movable part (11) is rotatably connected to the anchor point (3), and the second movable part (12) and the third movable part (14) are located on opposite sides of the anchor point (3).

14. An electronic device, characterized in that, Includes the differential capacitor as described in any one of claims 1 to 13.

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