A shock absorbing compensator for a mobile selective diaphragm

Abstract

The application discloses a damping compensation device for a mobile selection type light barrier, which comprises a base fixed on a working cavity, a coupling block arranged on the base, a coupling interface arranged on the coupling block and coupled with a support rod of the mobile selection type light barrier, and at least one first pre-tightening force unit arranged on a side surface of the coupling block. When the support rod is coupled with the coupling interface, the first pre-tightening force unit is used for limiting the lateral displacement of the support rod. The damping compensation device for the mobile selection type light barrier can inhibit the cantilever vibration space of the support rod and improve the stability.

Description

Technical Field

[0001] This invention relates to the field of aperture technology, and in particular to a shock-absorbing compensation device for a movable selective aperture. Background Technology

[0002] Movable selective apertures are widely used in electron beam equipment, such as scanning electron microscopes (SEM), electron beam lithography (EBL), and transmission electron microscopes (TEM). These apertures move via a drive mechanism, selecting apertures of different diameters to enter the electron beam path, thereby controlling beam intensity and spot size to meet diverse process requirements. Existing movable selective apertures generally employ a cantilever structure, where the drive module directly drives a support rod to move along the X and Y axes. One end of the support rod is connected to the drive module, and the other end extends into the vacuum chamber, supporting the aperture. Once the aperture is selected, the drive module maintains a torque lock, leaving the aperture and support rod in a cantilevered state, which remains even during operation. Electron beam equipment operates in an environment with various vibration sources, such as circulating cooling water flow, vacuum pump operation, ambient sound waves, and ground micro-vibrations. These vibrations can easily induce resonance or forced vibration in the cantilever structure, causing periodic shifts in the aperture's position relative to the electron beam optical axis. The electron beam is extremely sensitive to the deviation of the aperture. Even a displacement of micrometers or submicrometers can cause beam spot distortion, reduced resolution, and unstable beam current, which seriously affects the imaging quality and processing accuracy of the equipment.

[0003] How to solve the above-mentioned technical problems has become an urgent technical challenge for the industry. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a shock-absorbing compensation device for a movable selective aperture, which suppresses the cantilever vibration space of the support rod and improves stability.

[0005] To achieve the above objectives, this application provides a shock absorption compensation device for a movable selective aperture, comprising: a base, the base being fixed to the working cavity; A coupling block is mounted on a base and has a coupling interface that couples with the support rod of the movable selector aperture. At least one first preload unit is disposed on the side of the coupling block; When the support rod is coupled to the coupling interface, the first preload unit is used to limit the lateral displacement of the support rod.

[0006] Preferably, when there are multiple first preload units, the first preload units are arranged symmetrically or asymmetrically on both sides of the coupling block.

[0007] Preferably, the first preload unit includes a spring, a spring connecting base, and a coupling block.

[0008] Preferably, the spring includes a tension spring, a compression spring, or a leaf spring.

[0009] Preferably, the coupling block is slidably disposed on the base; A second pre-tightening unit is also provided on the side of the coupling block facing away from the support rod. One end of the second pre-tightening unit is connected to the base, and the other end is connected to the coupling block. The second preload unit is used to limit the displacement of the coupling block in the forward direction of the support rod.

[0010] Preferably, the support rod has a coupling male connector on the side facing the coupling block, and the coupling male connector matches the coupling interface.

[0011] Preferably, the coupling interface is a tapered coupling female port; The coupling interface, in conjunction with the coupling male connector, is used to achieve the transmission of multi-directional forces and the centering between the support rod and the coupling block.

[0012] Preferably, the coupling male is located at the end of the support rod.

[0013] Preferably, the second preload unit includes a spring.

[0014] Preferably, the spring includes a tension spring, a compression spring, or a leaf spring.

[0015] The above technical solution, through the individual or mutual cooperation of the first pre-tensioning unit and the second pre-tensioning unit, suppresses the cantilever vibration space of the support rod, improves stability, and thus improves the imaging resolution of the electron beam equipment; the structure is simple and compact, without the participation of magnetic components, avoiding interference from magnetic components to the electron beam optical path, and is fully compatible with the strict requirements of the electron beam equipment for magnetic fields; the use of a simple mechanical mechanism and a passive elastic element, namely a spring, makes the reliability and lifespan better.

[0016] Other features and advantages of this application will be set forth in the following description and will be apparent in part from the description or may be learned by practicing the application. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the present application and form part of the specification. Together with the embodiments of the present application, they serve to explain the present application but do not constitute a limitation thereof. In the drawings: Figure 1 A schematic diagram of the existing three-dimensional structure of a movable selective aperture; Figure 2 This is a three-dimensional structural diagram of the shock absorption compensation device for a movable selective aperture according to an embodiment of this application when it is used in conjunction with the movable selective aperture; Figure 3 This is a side view of the shock-absorbing compensation device for a movable selective aperture according to an embodiment of this application, when it is used in conjunction with the movable selective aperture.

[0018] Figure label: 1-Aperture; 2-Support rod; 3-Vacuum isolation component; 4-Support frame; 5-Y-direction drive module; 6-X-direction drive module; 7-Coupled block; 8-First preload unit; 81-Spring; 82-Spring plunger; 9-Second preload unit; 10-Base. Detailed Implementation

[0019] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0020] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.

[0021] The term "comprising" and its variations as used herein are open-ended inclusions, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the description below.

[0022] It should be noted that the terms "first" and "second" may be used in this application only to distinguish different devices, components or parts, and are not used to define the order of the functions performed by these devices, components or parts or their interdependence.

[0023] It should be noted that the terms "one" and "more" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless explicitly stated otherwise in the context, they should be understood as "one or more". "More" should be understood as two or more.

[0024] The vibration damping compensation device for a movable selective aperture of this application includes: Base 10, which is fixed to the working cavity; The coupling block 7 is disposed on the base 10, and the coupling block 7 is provided with a coupling interface that is coupled to the support rod 2 of the movable selection aperture; At least one first preload unit 8 is disposed on the side of the coupling block 7; When the support rod 2 is coupled to the coupling interface, the first preload unit 8 is used to limit the lateral displacement of the support rod 2.

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0026] Example 1 Figure 1 This is a schematic diagram of the existing three-dimensional structure of a movable selective aperture. Figure 2 This is a three-dimensional structural diagram of the shock absorption compensation device for a movable selective aperture according to an embodiment of this application, when it is used in conjunction with the movable selective aperture. Figure 3 This is a side view of the shock absorption compensation device for the movable selective aperture according to an embodiment of this application when it is engaged with the movable selective aperture. The following will be combined with... Figure 1-3 The present application provides a detailed description of the shock absorption compensation device for a movable selective aperture according to embodiments of the present application.

[0027] The existing movable selectable aperture includes a support rod 2. An aperture placement position is provided at one end of the support rod 2 for placing the aperture 1. The other end of the support rod 2 is connected to a Y-direction drive module 5 and an X-direction drive module 6. The Y-direction drive module 5 and the X-direction drive module 6 are used to drive the support rod 2 to move in the Y-direction and X-direction, respectively.

[0028] For ease of explanation, in this application, the X direction (Z-axis direction) is the left-right direction, and the Y direction (Y-axis direction) is the front-back direction. Similarly, the Z direction (Z-axis direction) is the up-down direction. The X-axis, Y-axis, and Z-axis directions are as follows: Figure 2 As shown.

[0029] As needed, existing movable selection apertures also include a vacuum isolator 3 and a support frame 4 between the support rod 2 and the Y-direction drive module 5 and X-direction drive module 6 that drive the support rod 2, such as... Figure 1 As shown.

[0030] In an exemplary embodiment, the shock absorption compensation device for a movable selective aperture of this application includes: a base 10, which is fixed to the working cavity; for example, the base 10 is fixed to the inner wall of the working cavity of the electron beam device, located at the end of the advance path of the aperture 1.

[0031] In an exemplary embodiment, the shock absorption compensation device for the movable selective aperture of this application further includes: a coupling block 7, which is disposed on the base 10 and has a coupling interface that couples with the support rod 2 of the movable selective aperture.

[0032] Preferably, the coupling block 7 is movably disposed on the base 10, for example, the coupling block 7 is slidably or rollingly disposed on the base 10.

[0033] In one exemplary embodiment, the coupling interface is, for example, a tapered coupling female port.

[0034] In one exemplary embodiment, the shock absorption compensation device for a movable selective aperture of this application further includes: a first preload unit 8, namely, a preload unit in the X-axis direction, such as... Figure 2 As shown.

[0035] In one exemplary embodiment, at least one first preload unit 8 is provided.

[0036] In one exemplary embodiment, at least one first preload unit 8 is disposed on the side of the coupling block 7, for example, on the left and / or right side of the coupling block 7.

[0037] In one exemplary embodiment, when there are multiple first preload units 8, the first preload units 8 are arranged symmetrically or asymmetrically on both sides of the coupling block 7.

[0038] In an exemplary embodiment, when an even number of first pre-tightening units 8 are symmetrically arranged on both sides of the coupling block 7, they can jointly form a bidirectional tension in the X-axis direction on the coupling block 7, which restricts the displacement of the support rod 2 in the X-axis direction, that is, suppresses the lateral movement of the support rod 2 in the horizontal direction.

[0039] In an exemplary embodiment, when the first pre-tightening force unit 8 is arranged on both sides of the coupling block 7, that is, on the left and right sides, and the contact surface between the coupling block 7 and the base 10 is slightly inclined towards the far end of the support rod 2, the first pre-tightening force unit 8 arranged on both sides of the coupling block 7, whether symmetrical or asymmetrical, will apply a downward force to the coupling block 7. At this time, the displacement of the support rod (2) in the X-axis direction and the Z-axis direction can be restricted at the same time.

[0040] In an exemplary embodiment, when there are multiple first preload units (8), the multiple first preload units (8) can be arranged symmetrically or asymmetrically on both sides of the coupling block (7). When the multiple first preload units (8) are arranged asymmetrically, for example, the first preload unit (8) on the left side of the coupling block (7) is installed at a higher height than the first preload unit (8) on the right side, that is, there is a height difference between the action points of the two first preload units (8) in the Z-axis direction. Due to the different heights of the action points on both sides, the preload on the left and right sides generates a downward torque and a downward component force on the coupling block (7), so that the coupling block (7) is tightly pressed against the upper surface of the base (10). Therefore, while the first preload unit (8) provides clamping force in the X-axis direction to the coupling block (7), it also applies a pressing force in the Z-axis direction to the coupling block (7), thereby simultaneously restricting the displacement of the support rod (2) in both the X-axis and Z-axis directions. The first preload unit (8) restricts the displacement of the support rod (2) in the Z-axis direction by the coupling block (7). Taking the first preload unit (8) on the left side of the coupling block (7) as an example, it can be understood that the connection point between the first preload unit (8) and the coupling block (7) on the Z-axis is higher than the connection point between the first preload unit (8) and the base 10. In other words, the first preload unit (8) applies a downward force to the coupling block (7).

[0041] In one exemplary embodiment, the first preload unit 8 includes a spring 81, which connects the base 10 and the coupling block 7. The connection between the spring 81 and the base 10 is achieved, for example, by providing a spring plunger 82 on the base 10. The spring 81 is connected to the base 10 via the spring plunger 82; that is, the spring plunger 82 is fixed to the base 10, and one end of the spring 81 is hung on the spring plunger 82 to achieve the connection with the base 10. Figure 2 As shown.

[0042] In one exemplary embodiment, the spring 81 in the first preload unit 8 may be a tension spring, a compression spring, or a leaf spring.

[0043] In one exemplary embodiment, when the support rod 2 is coupled to the coupling interface, the first preload unit 8 is used to limit the lateral displacement of the support rod 2, for example... Figure 2 The first preload unit 8 shown restricts the displacement of the support rod 2 in the X-axis direction.

[0044] In one exemplary embodiment, while the first preload unit 8 applies a force in the X-axis direction to the coupling block 7, it also generates a clamping force in the Y-axis direction and / or the Z-axis direction on the coupling block 7.

[0045] In one exemplary embodiment, the contact surface between the coupling block 7 and the base 10 may be a horizontal plane or slightly inclined downwards towards the distal end of the support rod 2, as needed.

[0046] In one exemplary embodiment, the first preload unit 8 applies a force to the coupling block 7 in a direction that is not parallel to at least two of the X, Y, and Z axes, as needed.

[0047] In an exemplary embodiment, a second pre-tensioning unit 9 is provided on the side of the coupling block 7 facing away from the support rod 2. One end of the second pre-tensioning unit 9 is connected to the base 10, and the other end is connected to the coupling block 7. The second pre-tensioning unit 9 is used to limit the displacement of the coupling block 7 in the forward direction of the support rod 2, that is, the second pre-tensioning unit 9 limits the displacement of the support rod 2 in the Y-axis direction.

[0048] In one exemplary embodiment, the support rod 2 has a coupling male connector on the side facing the coupling block 7, and the coupling male connector matches the coupling interface; it can be understood that the support rod 2 achieves the purpose of the coupling block 7 restricting the displacement of the support rod 2 by inserting the coupling male connector into the coupling interface of the coupling block 7.

[0049] In one exemplary embodiment, the coupling interface is a tapered female coupling port, which, in conjunction with the male coupling connector, is used to transmit multi-directional forces and center the support rod 2 and the coupling block 7.

[0050] In one exemplary embodiment, the coupling male is disposed at the end of the support rod 2.

[0051] In one exemplary embodiment, the second preload unit 9 includes a spring, which may be a tension spring, a compression spring, or a leaf spring.

[0052] In one exemplary embodiment, the second preload unit 9 applies a continuous tensile or thrust force in the Y direction to the coupling block 7.

[0053] In one exemplary embodiment, the first preload unit 8 applies a continuous tensile force in the X direction to the coupling block 7.

[0054] In one exemplary embodiment, since both the first preload and the second preload apply force to the coupling block 7, and the coupling block 7 is coupled to the coupling male connector, these forces are transmitted to the support rod 2, thereby restricting the displacement of the support rod 2.

[0055] It will be understood by those skilled in the art that the above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vibration damping compensation device for a movable selective aperture, characterized in that, include: The base is fixed to the working cavity; A coupling block is disposed on the base, and the coupling block is provided with a coupling interface that couples with the support rod of the movable selectable aperture; At least one first preload unit is disposed on the side of the coupling block; When the support rod is coupled to the coupling interface, the first preload unit is used to limit the lateral displacement of the support rod.

2. The vibration damping compensation device for a movable selective aperture according to claim 1, characterized in that, When there are multiple first preload units, the first preload units are arranged symmetrically or asymmetrically on both sides of the coupling block.

3. The vibration damping compensation device for a movable selective aperture according to claim 1, characterized in that, The first preload unit includes a spring, which connects the base and the coupling block.

4. The vibration damping compensation device for a movable selective aperture according to claim 3, characterized in that, The spring includes a tension spring, a compression spring, or a leaf spring.

5. The vibration damping compensation device for a movable selective aperture according to claim 1, characterized in that, The coupling block is slidably disposed on the base; A second pre-tightening unit is also provided on the side of the coupling block facing away from the support rod. One end of the second pre-tightening unit is connected to the base, and the other end is connected to the coupling block. The second preload unit is used to limit the displacement of the coupling block in the forward direction of the support rod.

6. The vibration damping compensation device for a movable selective aperture according to claim 1, characterized in that, The support rod has a coupling male connector on the side facing the coupling block, and the coupling male connector matches the coupling interface.

7. The vibration damping compensation device for a movable selective aperture according to claim 6, characterized in that, The coupling interface is a tapered coupling female port; The coupling interface, in conjunction with the coupling male connector, is used to transmit multi-directional forces and to center the support rod and the coupling block.

8. The vibration damping compensation device for a movable selective aperture according to claim 6, characterized in that, The coupling male connector is located at the end of the support rod.

9. The vibration damping compensation device for a movable selective aperture according to claim 5, characterized in that, The second preload unit includes a spring.

10. The vibration damping compensation device for a movable selective aperture according to claim 9, characterized in that, The spring includes a tension spring, a compression spring, or a leaf spring.

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