High temperature resistant high power vacuum feedthrough connector and method of manufacture

Abstract

The application discloses a high-temperature-resistant high-power vacuum feedthrough connector and a manufacturing method thereof. The connector comprises a pin, a ceramic shell, a transition ring and a flange. The pin and the transition ring are connected by brazing sealing, and the transition ring and the ceramic shell are connected by brazing sealing, so as to form a brazing whole body composed of the pin, the transition ring and the ceramic shell. The brazing whole body and the flange are connected by argon arc welding, forming a whole sealing structure. The application has the advantages of high airtightness, high-temperature resistance and reliable high-power transmission, thereby facilitating actual use.

Description

Technical Field

[0001] This invention relates to the field of vacuum feedthrough connector technology, and more particularly to a high-temperature resistant, high-power vacuum feedthrough connector. Background Technology

[0002] High-current feedthrough connectors are key components for transmitting high-power electrical signals between high-vacuum and atmospheric environments, and are widely used in high-end equipment fields such as semiconductor manufacturing, new energy, and aerospace. These connectors must simultaneously meet multiple requirements, including high power carrying capacity, vacuum sealing, and environmental stability. However, under high-temperature and high-power transmission conditions, existing high-power vacuum feedthrough connectors are prone to significant thermal stress at the connection interface during direct welding or sealing due to the large difference in thermal expansion coefficients between the pins, ceramic insulator, and flange. This can lead to cracking of the ceramic shell or seal failure, making it difficult to maintain airtightness over long periods. Consequently, they cannot meet the requirements of ultra-high vacuum environments, and their connection reliability is insufficient, making it difficult to operate stably for extended periods in high-temperature environments. Summary of the Invention

[0003] The purpose of this invention is to address the shortcomings mentioned above by providing a high-temperature resistant, high-power vacuum feedthrough connector that achieves the advantages of high airtightness, high temperature resistance, and reliable high-power transmission.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a high-temperature resistant, high-power vacuum feedthrough connector, comprising: Pins, ceramic housing, transition ring, and flange; The pin and the transition ring, as well as the transition ring and the ceramic housing, are all connected by brazing to form a brazed whole consisting of the pin, the transition ring, and the ceramic housing. The brazed assembly is sealed to the flange by argon arc welding, forming an integral sealed structure.

[0005] Furthermore, the pin is made of oxygen-free copper material, and the surface of the pin on the side facing the atmospheric environment is provided with a silver plating layer.

[0006] Furthermore, the ceramic shell is made of ceramic material with an alumina content of 95% by mass, and the surface of the welded area of ​​the ceramic shell is provided with a metallization layer and a nickel plating layer.

[0007] Furthermore, the transition ring is made of expansion alloy 4J33, and the coefficient of thermal expansion of the transition ring matches the coefficient of thermal expansion of the ceramic shell.

[0008] Furthermore, the flange is made of 316L stainless steel.

[0009] A method for manufacturing a high-temperature resistant, high-power vacuum feedthrough connector includes the following steps: S1 offers oxygen-free copper pins, a 95% Al2O3 ceramic housing, a 4J33 expansion alloy transition ring, and a 316L stainless steel flange. S2. Metallize and nickel-plat the welding area of ​​the ceramic shell; S3. The pin is brazed to the transition ring using silver-copper solder, and the transition ring is brazed to the ceramic shell to form a brazed whole; S4. The brazing assembly is welded to the flange as a single unit using argon arc welding.

[0010] The beneficial effects of this invention are reflected in: In this invention, the pin and transition ring are brazed together, and the transition ring and ceramic shell are brazed together to form a single brazed unit. The transition ring, acting as an intermediate layer, ensures a continuous conductive path from the pin through the transition ring to the cavity interior, while also dispersing welding thermal stress to prevent the ceramic shell from cracking under direct stress. This brazed unit is then argon-arc welded to the flange to form an inseparable, sealed structure. In use, the flange is aligned with the vacuum cavity, with the pin's two ends positioned on the atmospheric and vacuum sides respectively, establishing an internal and external electrical connection. Based on this combination, the internal brazed interface and the external argon-arc welded interface form a composite seal, significantly improving airtightness and ensuring a product leakage rate of less than 5 × 10⁻⁶. -11 Pa·m 3 / s (He), and at the same time, the transition ring is brazed to the pin and the ceramic shell respectively, dispersing the thermal stress on the two welding interfaces, avoiding ceramic cracking and improving connection reliability; in addition, the overall sealing structure is compact in size, allowing each component to work for a long time in a working environment of 250℃, and maintaining stable mechanical and electrical performance under high power conditions, ensuring long-term reliable transmission. The use of threaded connection can guarantee the sealing performance, mechanical performance and electrical performance of the product under long-term high temperature and high power electrical signal transmission conditions. It has the characteristics of large working current, good airtightness, stable performance in vacuum and high temperature environment, and strong environmental adaptability. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a side view of the structure of the present invention.

[0012] In the picture: 1. Pin; 2. Ceramic housing; 3. Transition ring; 4. Flange. Detailed Implementation

[0013] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0014] Please see Figure 1-2 This invention discloses a high-temperature resistant, high-power vacuum feedthrough connector, comprising a pin 1, a ceramic housing 2, a transition ring 3, and a flange 4. The pin 1 and the transition ring 3, and the transition ring 3 and the ceramic housing 2 are connected by brazing to form a brazed whole consisting of the pin 1, the transition ring 3, and the ceramic housing 2. The brazed whole is connected to the flange 4 by argon arc welding to form an integral sealed structure.

[0015] Preferably, the maximum dimensions of the assembled pin 1, ceramic housing 2, transition ring 3, and flange 4 are 143mm × φ71mm.

[0016] In practice, the pin 1 is brazed to the transition ring 3, and the transition ring 3 is brazed to the ceramic shell 2, so that the three are integrated into a brazed whole. The transition ring 3 serves as an intermediate layer, which not only ensures the continuity of the conductive path from the pin 1 through the transition ring 3 to the inside of the cavity, but also disperses the welding thermal stress, preventing the ceramic shell from cracking due to direct stress. This brazed whole is then argon-arc welded to the flange 4 to form an inseparable integrated sealed structure. In use, the flange 4 is connected to the vacuum cavity, and the two ends of the pin 1 are respectively on the atmospheric side and the vacuum side, establishing an internal and external electrical connection.

[0017] Based on the above combination, the internal brazed interface and the external argon arc welded interface form a composite seal, thereby significantly improving airtightness and ensuring that the product leakage rate is less than 5×10. -11 Pa·m 3 Meanwhile, the transition ring 3 is brazed to the pin 1 and the ceramic housing 2 respectively, dispersing the thermal stress on the two welding interfaces, avoiding ceramic cracking and improving connection reliability. In addition, the overall sealing structure is compact in size, allowing each component to work for a long time in a working environment of 250℃, and maintaining stable mechanical and electrical performance under high power conditions, ensuring long-term reliable transmission. The use of threaded connection can guarantee the sealing performance, mechanical performance and electrical performance of the product under long-term high temperature and high power electrical signal transmission conditions. It has the characteristics of large working current, good airtightness, stable performance in vacuum and high temperature environment, and strong environmental adaptability.

[0018] Preferably, the corresponding structures can be connected and fixed by threaded connection to ensure the sealing performance, mechanical performance and electrical performance of the product under long-term high temperature and high power electrical signal transmission.

[0019] In one embodiment, the pin 1 is made of oxygen-free copper material, and the surface of the pin 1 on the side facing the atmospheric environment is provided with a silver plating layer.

[0020] In practice, the pin 1 can be made of oxygen-free copper rod and machined by a precision CNC lathe. This machining method can ensure the high precision of the pin's dimensions and surface finish, which is beneficial for the precise fit with the transition ring 3 and subsequent brazing and sealing. The oxygen-free copper material can meet the 70A high current carrying requirement. At the same time, the silver coating on the atmospheric side end face of the pin 1 can reduce contact resistance, reduce heat generation, and enhance corrosion resistance, ensuring long-term electrical connection stability.

[0021] In one embodiment, the ceramic housing 2 is made of ceramic material with an alumina mass percentage of 95%, and the surface of the welding area of ​​the ceramic housing 2 is provided with a metallization layer and a nickel plating layer.

[0022] In specific implementation, the ceramic shell 2 is made of ceramic material with an alumina mass percentage of 95%, which is formed into a dense insulator through blanking and high-temperature sintering. This method enables the ceramic shell 2 to have good voltage resistance performance, thus meeting the insulation requirements under a working voltage of 3.5kVDC. The surface of the welding area is successively provided with a metallization layer and a nickel plating layer to improve the wettability of the brazing solder, thereby ensuring a reliable connection with high strength and high airtightness at the brazing interface with the transition ring 3.

[0023] In one embodiment, the transition ring 3 is made of expansion alloy 4J33, and the coefficient of thermal expansion of the transition ring 3 matches the coefficient of thermal expansion of the ceramic shell 2.

[0024] In specific implementation, the transition ring 3 is made of expansion alloy 4J33, whose coefficient of thermal expansion matches the 95% alumina ceramic material of the ceramic shell 2. This effectively reduces the internal stress caused by the difference in thermal expansion during the brazing process, avoids cracking of the ceramic shell, and significantly improves the welding reliability. In addition, as an intermediate connecting part between the pin 1 and the ceramic shell 2, the transition ring simultaneously realizes the continuity of the conductive path and the buffering of thermal stress, ensuring the long-term stability of the overall sealing structure under high temperature and high power conditions.

[0025] In one embodiment, flange 4 is made of 316L stainless steel.

[0026] In practice, flange 4 is made of 316L stainless steel. Its installation dimensions are consistent with the standard CF40 flange interface, which can be directly installed with the CF40 flange of the vacuum chamber to ensure the airtightness of the connection. This material has good mechanical strength and corrosion resistance, and can withstand the installation stress in the high vacuum environment and the environmental erosion during long-term use, providing a stable installation foundation for the overall sealing structure.

[0027] In one embodiment, a method for manufacturing a high-temperature resistant, high-power vacuum feedthrough connector is also included, with the following specific steps: S1. Provides oxygen-free copper pin 1, 95% Al2O3 ceramic housing 2, 4J33 expansion alloy transition ring 3, and 316L stainless steel flange 4. S2. Metallize and nickel-plat the welding area of ​​the ceramic shell 2; S3. Use silver-copper solder to braze the pin 1 to the transition ring 3, and braze the transition ring 3 to the ceramic housing 2 to form a brazed whole; S4. Argon arc welding is used to weld the brazed whole to the flange 4 as one piece.

[0028] In practice, the connector can be effectively manufactured through the above method. The connector obtained by the above steps has a composite seal formed by the internal brazing interface and the external argon arc welding interface, which effectively improves the airtightness. The thermal expansion coefficients of the transition ring 3 and the ceramic shell 2 are matched, and the welding thermal stress is effectively dispersed to avoid cracking of the ceramic shell 2. The overall structure of the connector is compact, which can meet the requirements of high-power signal transmission and can work stably for a long time in high-temperature environments, significantly improving the connection reliability.

[0029] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0030] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0031] Additionally, "multiple" refers to two or more.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-temperature resistant, high-power vacuum feedthrough connector, characterized in that, include: Pin (1), ceramic housing (2), transition ring (3), and flange (4); The pin (1) and the transition ring (3), and the transition ring (3) and the ceramic housing (2) are all connected by brazing to form a brazed whole consisting of the pin (1), the transition ring (3) and the ceramic housing (2); The brazed assembly is sealed to the flange (4) by argon arc welding to form an integral sealed structure.

2. The high-temperature resistant, high-power vacuum feedthrough connector according to claim 1, characterized in that: The pin (1) is made of oxygen-free copper material, and the surface of the pin (1) on the side facing the atmospheric environment is provided with a silver plating layer.

3. The high-temperature resistant, high-power vacuum feedthrough connector according to claim 1, characterized in that: The ceramic shell (2) is made of ceramic material with an alumina mass percentage of 95%, and the surface of the welding area of ​​the ceramic shell (2) is provided with a metallization layer and a nickel plating layer.

4. The high-temperature resistant, high-power vacuum feedthrough connector according to claim 1, characterized in that: The transition ring (3) is made of expansion alloy 4J33, and the coefficient of thermal expansion of the transition ring (3) matches the coefficient of thermal expansion of the ceramic shell (2).

5. The high-temperature resistant, high-power vacuum feedthrough connector according to claim 1, characterized in that: The flange (4) is made of 316L stainless steel.

6. A method for manufacturing a high-temperature resistant, high-power vacuum feedthrough connector, comprising the high-temperature resistant, high-power vacuum feedthrough connector as described in any one of claims 1-5, characterized in that, Includes the following steps: S1. Provides oxygen-free copper pins (1), 95% Al2O3 ceramic housing (2), 4J33 expansion alloy transition ring (3) and 316L stainless steel flange (4). S2. Metallize and nickel-plat the welding area of ​​the ceramic shell (2); S3. The pin (1) is brazed to the transition ring (3) using silver-copper solder, and the transition ring (3) is brazed to the ceramic shell (2) to form a brazed whole; S4. Argon arc welding is used to weld the brazed whole to the flange (4) into one piece.

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