A DBD plasma device having a needle electrode structure

Abstract

The application relates to the field of DBD plasma, in particular to a DBD plasma device with a needle electrode structure, which comprises a normal box body, the inner wall of the normal box body is fixedly connected with a processing cabinet, the front side of the processing cabinet is rotationally connected with a shielding door, the top of the processing cabinet is buckle-connected with a dielectric barrier layer, the top of the normal box body is fixedly connected with a top sealing cover, and the bottom of the top sealing cover is slidingly connected with a blocking plate. The conductive needles are arranged in an array mode, gaps exist between the conductive needles, and the needle bodies are vertically downward. In the design, a high-frequency high-voltage power supply cooperates with a fixing disc to generate a strong electric field concentration effect at the conductive needles, so that the discharge starting voltage is significantly reduced, the DBD can form stable filamentous or glow discharge under a lower voltage, the discharge uniformity can be improved when the device is used, the device use effect is improved, the device coverage area is expanded, and the device use effect is enhanced.

Description

Technical Field

[0001] This invention relates to the field of DBD plasma technology, specifically to a DBD plasma device with a needle-shaped electrode structure. Background Technology

[0002] DBD plasma equipment is an industrial processing device that generates low-temperature plasma under normal pressure based on the principle of dielectric barrier discharge. The equipment isolates the electrodes with an insulating medium and applies high-frequency, high-voltage ionized gas to generate a large number of high-energy active particles. It can clean, activate, and etch material surfaces, as well as degrade pollutants in waste gas and disinfect microorganisms. The whole machine operates at low temperature, without electric arc, and is environmentally friendly with no secondary pollution. The structure is easy to expand and it is widely used in electronics, rubber and plastics, environmental protection, biomedicine and other fields. It is simple to operate and adaptable to continuous production lines.

[0003] Currently, existing DBD plasma equipment tends to have high starting voltages during discharge, and the limited number of needles in typical equipment makes it easy for the electric arc to concentrate, leading to uneven arc distribution. This increases energy consumption and can result in gaps in the arc, resulting in insufficient gas processing and affecting the normal operating efficiency of the equipment.

[0004] Therefore, this invention proposes a DBD plasma device with a needle-shaped electrode structure to address the shortcomings of the prior art. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a DBD plasma device with a needle-shaped electrode structure, which solves the problems of high starting voltage and uneven arc distribution in existing devices during discharge.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a DBD plasma device with a needle-shaped electrode structure, comprising a normal chamber, a processing cabinet fixedly connected to the inner wall of the normal chamber, a shielding door rotatably connected to the front side of the processing cabinet, a dielectric barrier layer snapped to the top of the processing cabinet, a top cover fixedly connected to the top of the normal chamber, and a baffle plate slidably connected to the bottom of the top cover.

[0007] Preferably, a worm gear is rotatably connected to the top of the cap, and two support rings are fixedly connected to the top of the cap. A worm is rotatably connected between the two support rings, and the worm meshes with the worm gear. A servo motor is fixedly connected to one side of one of the support rings, and the output shaft of the servo motor is fixedly connected to one side of the worm.

[0008] Preferably, a limit rod is fixedly connected to the top of the blocking plate, a high-frequency high-voltage power supply is fixedly connected to the top of the blocking plate, and a threaded rod is fixedly connected to the top of the blocking plate.

[0009] Preferably, the threaded rod is threaded inside the worm gear, and the limiting rod is slidably connected in the slot inside the capping cover.

[0010] Preferably, a fixed plate is fixedly connected to the bottom of the baffle plate, and conductive pins are arrayed on the bottom of the fixed plate. The fixed plate and conductive pins are connected to a high-frequency high-voltage power supply.

[0011] Preferably, a side sealing plate is fixedly connected to the left side wall of the normal housing, and a plurality of reserved holes are opened inside the side sealing plate, and a baffle rod is fixedly connected inside each of the reserved holes.

[0012] Preferably, a baffle rod is fixedly connected to the outer wall of the side sealing plate, a delivery pipe is fixedly connected to the bottom of the baffle rod, and a fixed base is fixedly connected to the bottom of the air pump.

[0013] Preferably, a control valve is fixedly connected to the right side wall of the normal housing, and the baffle plate is slidably connected to the bottom of the top cover through a limiting rod, a threaded rod, and a worm gear.

[0014] Working principle: When using the device, the user first starts the servo motor 19, which, in conjunction with the output shaft, drives the worm gear 18 to rotate. The rotation of the worm gear 18 then drives the meshing worm wheel 16 to rotate. The rotation of the worm wheel 16 pushes the threaded rod 23 downward. Then, in conjunction with the top cover 15 limiting the limit rod 22, the limit rod 22 and the threaded rod 23 are pushed downward, causing the baffle plate 2 to gradually descend and adjust the distance between the baffle plate 2 and the medium barrier layer 13. This changes the size of the internal space of the device, allowing for easy adjustment of the internal cavity size during use. This adapts the device to different gases and improves the flexibility of its use. The user starts the air pump 34, which, together with the delivery pipe 33, delivers gas. The gas then passes through the pre-drilled hole 31 into the normal chamber 1. As the gas passes through the pre-drilled hole 31, it is blocked by the baffle rod 32, thus disrupting the airflow and allowing the gas to fill the normal chamber 1 more quickly. Then, the high-frequency high-voltage power supply 21 is started. The high-frequency high-voltage power supply 21, together with the fixed plate 24, directs the power to the conductive needles 25. Because the conductive needles 25 are arranged in an array, a strong electric field concentration effect will be generated when the conductive needles 25 are energized, thereby significantly reducing the discharge initiation voltage. This allows the DBD to form a stable filamentary or glow discharge at a lower voltage, improving the discharge uniformity of the device during use. After the user completes the gas processing in the device, connect the conduit to one side of the control valve 14, and then rotate the handle on the side of the control valve 14 to connect the inside of the control valve 14, so that the gas inside the device can pass through the control valve 14 and enter the conduit, thereby facilitating the rapid discharge of the gas inside the device. This allows the processed material inside the device to be easily discharged during use, thereby improving the device's performance.

[0015] This invention provides a DBD plasma device with a needle-shaped electrode structure. It has the following advantages: 1. This invention uses an array of conductive needles with gaps between each needle and the needles pointing vertically downwards. With this design, a high-frequency high-voltage power supply, together with a fixed disk, generates a strong electric field concentration effect at the conductive needles, thereby significantly reducing the discharge initiation voltage. This allows the DBD to form a stable filamentary or glow discharge at a lower voltage, improving the discharge uniformity of the device during use and thus enhancing the device's performance.

[0016] 2. A servo motor, in conjunction with an output shaft, drives a worm gear to rotate. The rotating worm gear, in turn, drives a meshing worm wheel to rotate, which in turn engages with the threads on the threaded rod surface. This, in turn, pushes a baffle plate to adjust its height, allowing for easy adjustment of the internal space of the device according to different gases, thereby improving the flexibility of the device in use.

[0017] 3. The gas is transported by the air pump and the delivery pipe, and then discharged into the normal chamber through the reserved hole. When the gas passes through the reserved hole, it will be blocked by the baffle rod, thereby disrupting the airflow distribution and improving the gas filling efficiency. Attached Figure Description

[0018] Figure 1 This is a three-dimensional front view of a DBD plasma device with a needle-shaped electrode structure proposed in this invention. Figure 2 This is a schematic diagram of the normal enclosure of a DBD plasma device with a needle-shaped electrode structure proposed in this invention; Figure 3 This is a schematic diagram of the top cover of a DBD plasma device with a needle-shaped electrode structure proposed in this invention; Figure 4 This is a schematic diagram of a barrier plate for a DBD plasma device with a needle-shaped electrode structure proposed in this invention. Figure 5 This is a schematic diagram of a limiting rod for a DBD plasma device with a needle-shaped electrode structure proposed in this invention; Figure 6 This is a schematic diagram of the side sealing plate of a DBD plasma device with a needle-shaped electrode structure proposed in this invention.

[0019] Legend: 1. Normal enclosure; 11. Processing cabinet; 12. Shelter door; 13. Medium barrier layer; 14. Control valve; 15. Top cover; 16. Worm gear; 17. Support ring; 18. Worm; 19. Servo motor; 2. Baffle plate; 21. High-frequency high-voltage power supply; 22. Limiting rod; 23. Threaded rod; 24. Fixed plate; 25. Conductive needle; 3. Side sealing plate; 31. Reserved hole; 32. Baffle rod; 33. Delivery pipe; 34. Air pump; 35. Fixed base. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example: like Figure 1-6 As shown, this embodiment of the invention provides a DBD plasma device with a needle-shaped electrode structure, including a normal housing 1. A processing cabinet 11 is fixedly connected to the inner wall of the normal housing 1. A shielding door 12 is rotatably connected to the front side of the processing cabinet 11. A dielectric barrier layer 13 is snap-fitted to the top of the processing cabinet 11. A top cover 15 is fixedly connected to the top of the normal housing 1. A baffle plate 2 is slidably connected to the bottom of the top cover 15. A worm gear 16 is rotatably connected to the top of the top cover 15. Two support rings 17 are fixedly connected to the top of the top cover 15. A worm gear 18 is rotatably connected between the two support rings 17. The worm gear 18 and the worm wheel 16 mesh with each other. A servo motor 19 is fixedly connected to one side of one of the support rings 17. The output shaft of the servo motor 19 is fixedly connected to one side of the worm gear 18. A control valve 14 is fixedly connected to the right side wall of the normal housing 1. The servo motor 19, in conjunction with the output shaft, drives the worm gear 18 to rotate. The rotating worm gear 18 drives the worm wheel 16, which meshes with it, to rotate. This, in turn, engages with the threaded rod 23, thereby pushing the baffle plate 2 to adjust its height. This allows for easy adjustment of the internal space of the device according to different gases, thus improving the flexibility of the device.

[0022] A limiting rod 22 is fixedly connected to the top of the baffle plate 2. A high-frequency high-voltage power supply 21 is also fixedly connected to the top of the baffle plate 2. A threaded rod 23 is fixedly connected to the top of the baffle plate 2, and the threaded rod 23 is threaded into the worm gear 16. The limiting rod 22 is slidably connected to the slot inside the top cover 15. A fixed disk 24 is fixedly connected to the bottom of the baffle plate 2. Conductive needles 25 are arrayed on the bottom of the fixed disk 24. The fixed disk 24, the conductive needles 25 and the high-frequency high-voltage power supply 21 are connected. The baffle plate 2 is slidably connected to the bottom of the top cover 15 through the limiting rod 22, the threaded rod 23 and the worm gear 16. The conductive needles 25 are arranged in an array, with gaps between each conductive needle and the needle body is vertically downward. Under this design, the high-frequency high-voltage power supply 21 and the fixed disk 24 generate a strong electric field concentration effect at the conductive needles 25, thereby significantly reducing the discharge initiation voltage. This allows the DBD to form a stable filamentary or glow discharge at a lower voltage, thereby improving the discharge uniformity of the device during use and improving the device's performance.

[0023] A side sealing plate 3 is fixedly connected to the left side wall of the normal chamber 1. Multiple reserved holes 31 are opened inside the side sealing plate 3. A baffle rod 32 is fixedly connected inside each reserved hole 31. A baffle rod 32 is fixedly connected to the outer wall of the side sealing plate 3. A delivery pipe 33 is fixedly connected to the bottom of the baffle rod 32. A fixed base 35 is fixedly connected to the bottom of the air pump 34. When the air pump 34 is started, it works with the delivery pipe 33 to deliver gas. Then, the gas passes through the reserved hole 31 and is discharged into the cavity of the normal chamber 1. When the gas passes through the reserved hole 31, the gas is blocked by the baffle rod 32, thereby disrupting the airflow distribution and improving the gas filling efficiency.

[0024] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A DBD plasma device with a needle-shaped electrode structure, comprising a normal housing (1), characterized in that, The inner wall of the normal box (1) is fixedly connected to a processing cabinet (11), the front side of the processing cabinet (11) is rotatably connected to a shielding door (12), the top of the processing cabinet (11) is snapped to a medium blocking layer (13), the top of the normal box (1) is fixedly connected to a top cover (15), and the bottom of the top cover (15) is slidably connected to a baffle plate (2).

2. The DBD plasma device with a needle-shaped electrode structure according to claim 1, characterized in that, The top of the cap (15) is rotatably connected to a worm gear (16), and the top of the cap (15) is fixedly connected to two support rings (17). A worm (18) is rotatably connected between the two support rings (17). The worm (18) meshes with the worm gear (16). A servo motor (19) is fixedly connected to one side of one of the support rings (17). The output shaft of one side of the servo motor (19) is fixedly connected to one side of the worm (18).

3. A DBD plasma device with a needle-shaped electrode structure according to claim 2, characterized in that, The top of the baffle plate (2) is fixedly connected to a limit rod (22), the top of the baffle plate (2) is fixedly connected to a high-frequency high-voltage power supply (21), and the top of the baffle plate (2) is fixedly connected to a threaded rod (23).

4. A DBD plasma device with a needle-shaped electrode structure according to claim 3, characterized in that, The threaded rod (23) is threaded inside the worm gear (16), and the limiting rod (22) is slidably connected in the slot inside the cap (15).

5. A DBD plasma device with a needle-shaped electrode structure according to claim 4, characterized in that, The bottom of the baffle plate (2) is fixedly connected to a fixed plate (24), and conductive needles (25) are installed in an array at the bottom of the fixed plate (24). The fixed plate (24) and conductive needles (25) are connected to a high-frequency high-voltage power supply (21).

6. A DBD plasma device with a needle-shaped electrode structure according to claim 5, characterized in that, The left side wall of the normal housing (1) is fixedly connected to a side sealing plate (3), and the side sealing plate (3) has multiple reserved holes (31) inside, and each reserved hole (31) is fixedly connected to a baffle rod (32).

7. A DBD plasma device with a needle-shaped electrode structure according to claim 1, characterized in that, A turbulence rod (32) is fixedly connected to the outer wall of the side sealing plate (3), a delivery pipe (33) is fixedly connected to the bottom of the turbulence rod (32), and a fixed base (35) is fixedly connected to the bottom of the air pump (34).

8. A DBD plasma device with a needle-shaped electrode structure according to claim 4, characterized in that, A control valve (14) is fixedly connected to the right side wall of the normal housing (1), and the baffle plate (2) is slidably connected to the bottom of the top cover (15) through the cooperation of the limiting rod (22), the threaded rod (23) and the worm gear (16).

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