A carrying device and a working method thereof, a processing device and a processing method thereof

Abstract

The application discloses a bearing device and a working method thereof, and a processing device and a processing method thereof. The bearing device comprises a first driving mechanism, which is used for driving the clamping assembly in the preset position to move in a first direction for retraction to one side of the sample edge close to the center of the chuck base, and the first direction is a direction from the clamping position of the clamping assembly to the center of the chuck base. A guide mechanism is used for guiding the clamping assembly in the preset position, so that the clamping assembly is driven by the second driving mechanism to move relative to the chuck base for third movement, so that the top of the clamping assembly in the preset position is located on one side of the bearing surface facing the chuck base. The application provides a bearing device, which can timely open and avoid the clamping jaw reaching the preset position during the processing process, so as to avoid the clamping jaw shielding the edge of the sample, and the detection of the whole edge can be completed in one processing process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and in particular to a carrier device and its working method, and a processing device and its processing method. Background Technology

[0002] In the semiconductor chip manufacturing process, the appearance quality of the wafer directly affects the yield and reliability of the final device. Therefore, comprehensive inspection of the wafer is necessary, especially of its edge areas. Since both the upper surface (circuit side) and the lower surface (back side) of the wafer are extremely sensitive, any contact can cause scratches or contamination. Therefore, direct contact between the upper and lower surfaces and any components is usually prohibited during the inspection process.

[0003] To meet the above requirements, existing technologies generally use edge-gripping fixtures to support and position the wafer, fixing it only by gripping the outer periphery of the wafer, thereby avoiding contact with the functional surface of the wafer. However, this type of gripping method has an inherent drawback: the edge of the wafer at the gripping location is obscured and cannot be observed by the inspection equipment, forming a blind spot for inspection.

[0004] To overcome this problem, existing technologies employ alternating arrangements of movable and fixed clamping components to hold the wafer edges, in conjunction with a supporting mechanism below. After one rotational inspection, the supporting mechanism lifts the wafer away from the clamping components, rotates it a certain angle, and then repositions it, exposing the previously obscured edge areas for a second rotational inspection. While this solution theoretically achieves complete inspection of the entire wafer edge, it requires two complete rotational inspection processes, significantly extending the inspection cycle of a single wafer. In advanced process lines with high throughput requirements, inspection throughput is a key performance indicator. The aforementioned "two-rotation" strategy inevitably leads to reduced inspection efficiency and decreased equipment utilization, thereby affecting the overall production rhythm and cost control. Summary of the Invention

[0005] This invention provides a support device to solve at least one of the aforementioned technical problems. The support device provided by this invention allows the clamping component at the detection position to open in a timely manner, preventing the clamping component from obstructing the edge of the sample.

[0006] A support device includes: a chuck base; a plurality of clamping components spaced apart around the periphery of the chuck base, wherein the clamping positions of the plurality of clamping components form a support surface for clamping sample edges, the clamping components being used to clamp sample edges; a first driving mechanism for driving the clamping components at preset positions to move in a first direction along a first direction, so that the clamping components at the preset positions retract to the side of the sample edge near the center of the chuck base, the first direction being the direction from the clamping position of the clamping component on the sample edge towards the interior of the chuck base; and a second driving mechanism including a driver for driving the chuck base to move the clamping components in a second direction, so that at least some of the clamping components sequentially pass through preset positions; and a guide mechanism for guiding the clamping components at the preset positions, so that the clamping components move a third direction relative to the chuck base under the drive of the second driving mechanism, so that the top of the clamping components at the preset positions is located on the side of the support surface facing the chuck base.

[0007] Compared with the prior art, the present invention has the following advantages: Multiple clamping components are spaced apart around the chuck seat, and the clamping positions of the multiple clamping components form a bearing surface for clamping the sample edge. A first driving mechanism drives the clamping component in a preset position to make a first movement, so that the clamping component in the preset position retracts to the side near the center of the chuck seat. The first and second driving mechanisms enable the clamping component to release the sample and retract to the bearing surface side when it moves to the preset position, thereby avoiding obstruction of the sample edge at the preset position; during the second movement of the chuck seat driven by the second driving mechanism, the sample clamping position can be processed at the preset position, solving the problem that the prior art requires two complete rotation detection processes, significantly extending the single-piece processing cycle. By ensuring that the top of the clamping component is on the side of the bearing surface facing the chuck seat when it passes the preset position, and by retracting the clamping component, the clamping position can be released and avoided when the clamping component is in the preset position, thereby exposing the clamping position at the preset position, and thus processing can be performed on the clamping position during the second movement.

[0008] Furthermore, it also includes: a steering mechanism, which is used to cause the clamping assembly to translate in the opposite direction of the first direction under the drive of the driver. The translation includes a fourth movement, which causes the clamping assembly that has passed the preset position to move in the opposite direction of the first direction. The guiding mechanism is also used to cause the clamping assembly that has passed the preset position to perform a reset movement. After the sample edge at the preset position is processed, the clamping assembly can re-clamp the sample edge through the steering mechanism and the guiding mechanism to prevent the sample from falling when the next clamping assembly that has passed the preset position is released.

[0009] Furthermore, it also includes a first guide groove, a second guide groove, and a locking component; the driving component has a protruding structure, and the first protrusion cooperates with the first guide groove, the second guide groove, and the locking component to accurately realize the first and third movements of the clamping component, allowing the clamping component to release the sample edge and retract to one side of the clamping position, thereby avoiding obstruction. During the movement, the clamping component at the detection position can be opened and moved in a timely manner to prevent the clamping component from obstructing the sample edge, thus enabling the detection of the entire edge in a single moving scan; its structure is simple, and multiple movement modes can be achieved through only two driving mechanisms, significantly improving processing efficiency.

[0010] Furthermore, the fourth moving and resetting motion can be achieved through the cooperation of the second protrusion, the third guide groove, and the slot, thereby enabling the clamping assembly to re-clamp the sample edge after passing through the preset position. Its structure is simple and can be implemented without the need for an additional drive mechanism. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a three-dimensional structural view of a support device according to the present invention; Figure 2 This is a perspective structural diagram of a clamping assembly of a bearing device according to the present invention; Figure 3 This is a top view of the clamping assembly of a bearing device according to the present invention; Figure 4 This is a bottom view of the clamping assembly of a bearing device according to the present invention; Figure 5 This is a second-view perspective three-dimensional structural diagram of a supporting device according to the present invention; Figure 6 This is a three-dimensional structural diagram of a bearing device of the present invention without the driving component installed; Figure 7 This is a partial three-dimensional structural diagram of a support device according to the present invention; Figure 8 This is a cross-sectional view of a support device according to the present invention; Figure 9 This is a schematic diagram of another embodiment of the bearing device of the present invention; Figure 10 This is a schematic diagram of another embodiment of the bearing device of the present invention; Figure 11 This is a schematic flowchart illustrating the working method of a bearing device according to the present invention; Figure 12 This is a schematic diagram of the structure of a processing device according to the present invention.

[0013] Figure label: 1. Mounting bracket; 2. Driver; 3. Chuck seat; 31. Baffle; 32. Guide hole; 33. Lifting hole; 34. Mounting part; 35. Chuck body; 4. Third drive mechanism; 41. Lifting frame; 411. Lifting frame body; 412. Lifting block; 413. Lifting part; 414. Connecting part; 42. Lifting drive device; 51. Connecting rod; 511. Contact surface; 52. Contact element; 531. Guide element; 5311. Slot; 5312. Third drive mechanism; 5313, 5314, 5315, 533, 533, 5331, 5332, 5333, 5333, 534, 535, 536, 537, 538, 539, 530, 531, 532, 5333, 5333, 534, 535, 54, 55, 56, 57, 58, 59, 50, 51, 52, 533, 63, 64, 65, 76, 77, 88, 89, 50, 51, 52, 533, 534, 54, 55, 56, 57, 58, 59, 50, 51, 52, 53, 53, 53, 54, 55, 56, 57, 58, 59, 51, 52, 53 ... Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0015] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0016] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0017] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product is in use. These are merely for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," etc., appearing in the description of this invention are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance.

[0018] Furthermore, the use of terms such as "horizontal" and "vertical" in the description of this invention does not imply that the components are required to be absolutely horizontal or suspended, but rather that they may be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it may be slightly tilted.

[0019] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0020] Figures 1 to 8 A schematic diagram of the structure of the first embodiment of the support device provided for the technical solution of this application.

[0021] refer to Figures 1 to 8 It should be noted that the present invention provides a carrying device, including: a chuck base 3; Multiple clamping components are spaced apart around the chuck base 3, and the clamping positions of the multiple clamping components form a bearing surface for clamping the sample edge. The clamping components are used to clamp the sample edge. A first driving mechanism is used to drive the clamping component in the preset position to move in the first direction X1, so that the clamping component in the preset position retracts to the side of the sample edge close to the center of the chuck seat 3. The first direction X1 is the direction from the clamping position of the clamping component on the sample edge to the inside of the chuck seat 3. And a second driving mechanism, including a driver 2, for driving the chuck base 3 to move the clamping assembly in a second movement, so that at least part of the clamping assembly passes through the preset position in sequence; A guiding mechanism is used to guide the clamping component in the preset position so that the clamping component moves a third time relative to the chuck seat 3 under the drive of the second driving mechanism, so that the top of the clamping component in the preset position is located on the side of the bearing surface facing the chuck seat 3.

[0022] It should be noted that, in this embodiment, the first direction X1 is the direction from the clamping position to the center of the chuck seat, that is, the first direction X1 is parallel to the radius direction of the chuck seat at the clamping position; in other embodiments of the present invention, the first direction X1 may have an acute angle with the radius direction of the chuck seat at the clamping position.

[0023] In this embodiment, the carrier device is used to fix the wafer in the semiconductor chip. Of course, the device can also be used to fix other products.

[0024] The number of clamping components is greater than or equal to 3. Specifically, in this embodiment, the number of clamping components is 6. Having more than 3 clamping components ensures that even when the clamping component at the preset position releases the sample, there are still 3 or more clamping components holding the sample edge, thereby preventing the sample from flying off.

[0025] In this embodiment, the clamping assembly includes a gripper 533 and a gripper link 534 connecting the gripper 533 and the guide mechanism.

[0026] The second movement is to cause the chuck seat 3 to drive the clamping assembly and the steering mechanism 63 to rotate relative to each other around a rotation axis perpendicular to the bearing surface.

[0027] Specifically, in this embodiment, the second movement drives the chuck base 3 to rotate around a rotation axis perpendicular to the bearing surface; the clamping assembly is symmetrically arranged circumferentially around the rotation axis. Specifically, in this embodiment, the sample is circular, the clamping assembly is used to clamp the sample edge, the clamping assembly is symmetrically arranged around the rotation axis, and the second movement causes the sample to sequentially pass through the preset positions during rotation around the rotation axis. When the clamping assembly reaches the preset position, it releases the sample edge so that the clamping position of the clamping assembly can be processed by a processing device located at the preset position.

[0028] In other embodiments, the second movement involves driving the chuck base 3 to translate along a third direction X3, with at least a portion of the clamping components arranged at least along the third direction X3, which is perpendicular to the first direction X1 or forms an acute angle with the first direction X1. Specifically, the sample is rectangular, and the clamping components are used to clamp the sample edges. The second driving mechanism causes at least a portion of the clamping components to sequentially pass through preset positions by translating the clamping components along the third direction X3. When the clamping components reach the preset positions, they release the sample edges, allowing the clamping position of the clamping components to be processed by a processing device at the preset positions.

[0029] In this embodiment, as Figure 1 and Figure 6 As shown, the second driving mechanism includes a driver, which is a rotary mechanism. The output end of the rotary mechanism is connected to the chuck seat 3 and is used to drive the chuck seat 3 to rotate about a rotation axis perpendicular to the bearing surface. In other embodiments, the driver can also be a translation mechanism. The output end of the translation mechanism is connected to the chuck seat 3 and is used to drive the chuck seat 3 to translate along a third direction X3, specifically, along the X-axis and / or Y-axis of the bearing surface. The specific structure of the translation mechanism is not limited, as long as it enables the movement of the chuck seat 3.

[0030] If the driver is a rotating mechanism, the chuck seat 3 rotates synchronously with the driver; the driver is a rotating shaft, and its specific structure is not limited, as long as it can drive the chuck seat 3 to rotate. It can be a DD motor, or a motor output end connected to a rotating shaft to rotate and drive the chuck seat 3 to rotate.

[0031] The second drive mechanism further includes a steering mechanism 63, which is used to cause the clamping assembly to translate in the opposite direction of the first direction X1 under the drive of the driver.

[0032] The steering mechanism 63 includes a drive member 6 and a contact member 52. The outer peripheral surface of the drive member 6 has a protruding structure that protrudes in the opposite direction to the first direction X1. The contact member 52 is used to abut against the protruding structure of the drive member 6 at a preset position. The drive member 6 causes the protruding structure and the contact member 52 to move relative to each other along a moving path, so that the protruding structure abuts against the contact member 52 to drive the clamping assembly to perform the translational movement. The moving path is perpendicular to the first direction X1 or has an acute angle.

[0033] The movement path is the trajectory of the protruding structure under the drive of the driver. In this embodiment, the driver is used to drive the protruding structure to rotate about a rotation axis, so the movement path is an arc centered on the rotation axis. In other embodiments, the driver is used to drive the protruding structure to translate along a third direction X3, and the movement path is a straight line along the third direction X3. The direction of the movement path is the movement direction of the protruding structure. The protruding structure includes a first protrusion 61, which is used to abut against the contact member 52 under the drive of the driver, so that the clamping assembly performs the fifth movement in the opposite direction of the first direction X1.

[0034] The driving member 6 and the driver are used for relative movement. Specifically, in this embodiment, the driving member 6 is a convex ring sleeved around the driver, and the driver is used to drive the chuck seat 3 to rotate the clamping assembly around the rotation axis. During the process of the driver driving the chuck seat 3 to rotate, the convex part approaches and contacts the contact member 52 and abuts against the contact member 52 in the opposite direction of the first direction X1, causing the contact member 52 to move in the opposite direction of the first direction X1. In other embodiments, the driver is used to drive the driving member 6 to translate.

[0035] The contact member 52 is movably connected to the clamping assembly. Specifically, the clamping assembly can perform the third movement relative to the contact member 52. In this embodiment, the positions of the clamping assembly and the contact member 52 are relatively fixed along the first direction X1, and the clamping assembly is rotatably connected relative to the contact member 52 about the first direction X1.

[0036] Specifically, the steering mechanism 63 further includes a connecting rod 51, and the contact element 52 is disposed on the connecting rod 51. The connecting rod 51 abuts against the guide mechanism, and the guide mechanism is fixedly connected to the clamping assembly.

[0037] The clamping assembly includes a jaw 533 and a jaw link 534, and the guide mechanism is fixedly connected to the jaw link 534.

[0038] The guiding mechanism, contact 52, and connecting rod 51 each correspond one-to-one with the clamping assembly. The number of the guiding mechanism, contact 52, and connecting rod 51 is the same as the number of the clamping assembly.

[0039] In this embodiment, the third movement causes the clamping assembly in the preset position to rotate relative to the chuck base 3 about a rotation axis parallel to the bearing surface or to translate in a direction perpendicular to the bearing surface; the first driving mechanism is used to provide the clamping assembly with a force along the first direction X1 toward the center of the chuck base 3, and the rotation axis is parallel to the first direction X1; The guiding mechanism includes a locking member 54 and a first guide groove 5312. The locking member 54 is fixedly connected to one of the chuck base 3 and the clamping assembly, and the first guide groove 5312 is fixedly connected to the other. The locking member 54 is slidably disposed in the first guide groove 5312, which is configured to guide the locking member 54 to slide under the drive of the second driving mechanism so that the top of the clamping assembly is located on the side of the bearing surface facing the chuck base 3.

[0040] In this embodiment, the locking member 54 is fixedly connected to the chuck seat 3, and the first guide groove 5312 is fixedly connected to the clamping assembly. Specifically, the guiding mechanism further includes a guide member 531, one end of which is movably connected to the connecting rod 51, the movable connection including abutment; the other end is connected to the clamping assembly.

[0041] The guiding mechanism further includes a guide member 531, one end of which is movably connected to the connecting rod 51, the movable connection including abutment; the other end is fixedly connected to the clamping assembly; wherein, the first guide groove 5312 is located in the guide member 531.

[0042] The translational motion further includes a fifth movement, which moves the clamping assembly in the opposite direction of the first direction X1 away from the sample edge. This fifth movement is synchronized with the third movement. The fifth movement drives the third movement and enables the gripper 533 to move away from the sample edge, thereby avoiding damage to the sample during the first movement.

[0043] During the fifth and third movements, the driver drives the chuck seat 3 to move the clamping assembly relative to the driving member 6, so that the first protrusion 61 abuts against the contact member 52. The contact member 52 drives the connecting rod 51 to move in the opposite direction of the first direction X1. The connecting rod 51 abuts against the guide member 531 in the opposite direction of the first direction X1. Since the clamping member 54 is fixed relative to the chuck seat 3, the fifth movement causes the clamping member 54 to slide along the first guide groove, which in turn causes the guide member 531 to drive the clamping assembly to perform the third movement.

[0044] In this embodiment, the first guide groove 5312 is spiral-shaped, and the third movement is to rotate the clamping assembly around the rotation axis.

[0045] It also includes a second guide groove 5313, which is configured to guide the card 54 to slide along the second guide groove 5313 under the drive of the first drive mechanism, so that the clamping assembly retracts to the side of the sample edge near the center of the chuck seat 3; the second guide groove 5313 and the first guide groove 5312 are connected at the first connection position.

[0046] Specifically, in this embodiment, the first guide groove 5312 and the second guide groove 5313 are fixed relative to the clamping assembly, and both the first guide groove 5312 and the second guide groove 5313 extend from the first connection position in the first direction X1. In other embodiments, the card 54 is fixed relative to the clamping assembly, and both the first guide groove 5312 and the second guide groove 5313 extend from the first connection position in the opposite direction to the first direction X1.

[0047] In the second movement, the first driving mechanism is used to drive the clamping assembly to move along the first direction X1, and the card 54 slides along the second guide groove 5313 along the first direction X1.

[0048] The locking member 54 has a preload between itself and the first guide groove 5312 and the second guide groove 5313; at the first connection position, the depth of the first guide groove 5312 is less than the depth of the second guide groove 5313. This ensures that under the drive of the first drive mechanism, the locking member 54 moves along the deeper second guide groove 5313 without moving towards the first guide groove 5312.

[0049] In this embodiment, the first driving mechanism includes an elastic element 55, one end of which is connected to the clamping assembly and the other end to the chuck seat 3, for providing a preload force to the clamping assembly. In other embodiments, the driver may be a cylinder or a motor.

[0050] The elastic element 55 is sleeved on the gripper connecting rod 534. One end of the elastic element 55 is connected to the clamping assembly, and the other end is connected to the baffle 31 on the chuck seat 3, for providing a clamping pre-tightening force toward the sample edge to the clamping assembly. More specifically, one end of the elastic element 55 is connected to the end face of the guide 531. The elastic element 55, guide 531, and baffle 31 can all be connected by abutment, relative fixation, etc., and the specific connection method is not limited, as long as it can provide a clamping force toward the edge to the clamping assembly. Specifically, during the rotation of the clamping assembly, the elastic element 55 will not provide an elastic force opposite to its rotation direction.

[0051] In this embodiment, the first direction X1 is the radial direction with the center of the chuck seat 3 as the center.

[0052] When the clamping assembly is in the clamping position, that is, when the gripper 533 is in contact with the sample, the elastic element 55 is in a compressed state, providing a stable and controllable preload force. As the gripper 533 moves in the fifth direction opposite to the first direction X1, the elastic element 55 is further compressed. Since the elastic element 55 is in a compressed state when the clamping assembly is in the clamping position, when the clamping assembly passes the preset position, the contact element 52 passes the top of the first protrusion 61, and the driving element 6 no longer provides a resisting force to the contact element 52 in the opposite direction of the first direction X1. Then, under the restoring force of the elastic element 55, the clamping assembly moves in the first direction X1 until the clamping element 54 slides to the other end opposite to the second guide groove 5313 and the first connection position, and the clamping assembly retracts to the side of the sample edge near the center of the chuck seat 3.

[0053] Because the clamping assembly moves to a position where its top is below the bearing surface before the first movement, the clamping assembly will not touch the chuck seat 3 during the second movement of the clamping assembly.

[0054] During the second movement, the elastic member 55 drives the guide member 531 to move along the first direction X1, and the guide member 531 drives the clamping assembly and the contact member 52 to move along the first direction X1. The locking member 54 slides along the second guide groove 5313.

[0055] The steering mechanism 63 further includes a holding portion 64, which is located between the first protrusion 61 and the second protrusion 62. The first protrusion 61, the holding portion 64, and the second protrusion 62 are arranged along the direction of the moving path. It should be noted that the locking member 54 stops the first movement under the constraint of the second guide groove 5313. Specifically, when the locking member 54 slides to the other end of the second guide groove 5313 opposite to the first connection position, the movement of the locking member 54 is restricted, causing the connecting rod 51 to stop moving, thereby stopping the clamping assembly from moving the first movement. When the locking member 54 slides to the other end of the second guide groove 5313 opposite to the first connection position, the contact member 52 contacts or does not contact the holding portion 64 of the driving member 6. Alternatively, the contact member 52 stops moving in the opposite direction of the first direction X1 due to the constraint of the holding portion 64.

[0056] The translational movement includes a fourth movement, which causes the clamping assembly, having passed a preset position, to move in the opposite direction of the first direction X1. The protrusion structure includes a first protrusion 61 and a second protrusion 62. The second protrusion 62 is used to abut against the contact member 52 under the drive of the driver, so that the clamping assembly performs the fourth movement in the opposite direction of the first direction X1. The first protrusion 61 is used to abut against the contact member 52 under the drive of the driver, so that the clamping assembly performs the fifth movement in the opposite direction of the first direction X1.

[0057] In this embodiment, the translational motion further includes a fourth movement.

[0058] The protrusion structure further includes a second protrusion 62 for abutting against the contact member 52 under the drive of the driver, so that the clamping assembly makes the fourth movement in the opposite direction of the first direction X1; the fourth movement causes the clamping assembly that has passed the preset position to move in the opposite direction of the first direction X1; the guide mechanism is also used to make the clamping assembly that has passed the preset position perform a reset movement, the reset movement causing the top of the clamping assembly to be located on the side of the bearing surface away from the chuck seat 3.

[0059] In this embodiment, the reset movement is performed under the drive of the fourth movement. In other embodiments, the reset movement may be performed separately from the fourth movement.

[0060] The first protrusion 61 and the second protrusion 62 are arranged in the positive direction of the moving path. The maintaining part 64 is located between the first protrusion 61 and the second protrusion 62.

[0061] The guiding mechanism further includes a third guide groove 5314, which is connected to the second guide groove 5313 at a second connection position. The first guide groove 5312 and the third guide groove 5314 are respectively connected to both ends of the second guide groove 5313.

[0062] In this embodiment, the third guide groove 5314 is spiral-shaped. In other embodiments, the third guide groove 5314 is a straight line with an acute angle to the second guide groove 5313.

[0063] In this embodiment, the card 54 is fixedly connected to the chuck seat 3, and the third guide groove 5314 extends from the second connection position to the first direction X1. In other embodiments, if the card 54 is fixedly connected to the clamping assembly, for example, the guide 531 is sleeved on the outside of the card 54; the third guide groove 5314 extends from the second connection position to the opposite direction of the first direction X1.

[0064] In this embodiment, at the second connection position, the depth of the third guide groove 5314 is greater than the depth of the second guide groove 5313; the locking member 54 has a pre-tightening force with the first guide groove 5312 and the second guide groove 5313; and at the second connection position, the depth of the third guide groove 5314 is greater than the depth of the second guide groove 5313. This ensures that under the drive of the first driving mechanism, the locking member 54 moves along the deeper third guide groove 5314 without moving towards the second guide groove 5313. In other embodiments, the depth of the third guide groove 5314 is equal to the depth of the second guide groove 5313.

[0065] During the fourth movement and the reset movement, the driver drives the chuck seat 3 to move the clamping assembly relative to the driving member 6, so that the second protrusion 62 abuts against the contact member 52. The contact member 52 drives the connecting rod 51 to move in the opposite direction of the first direction X1. The connecting rod 51 abuts against the guide member 531 in the opposite direction of the first direction X1. Since the clamping member 54 is fixed relative to the chuck seat 3, the fourth movement causes the clamping member 54 to slide along the third guide groove 5314, which in turn causes the guide member 531 to drive the clamping assembly to perform a reset movement.

[0066] In this embodiment, the first guide groove 5312 is spiral-shaped, and the reset motion is to rotate the clamping assembly around the rotation axis.

[0067] The distance between the top and bottom of the first protrusion 61 is greater than or equal to the length of the first guide groove 5312 along the first direction X1; the distance between the top and bottom of the second protrusion 62 is greater than or equal to the length of the third guide groove 5314 along the first direction X1; the length of the third guide groove 5314 along the first direction X1 is greater than or equal to the distance between the second connection position and the clamping position along the first direction X1.

[0068] If the length of the third guide groove 5314 along the first direction X1 is greater than or equal to the distance between the retracted position of the clamping component and the clamping position along the first direction X1, then the fourth movement can move the clamping component to a position away from the sample edge along the opposite direction of the first direction X1, thereby avoiding damage to the sample by the clamping component during the reset movement.

[0069] In this embodiment, the first guide groove 5312 and the third guide groove 5314 are spiral-shaped, and the rotation angles at the two ends of the first guide groove 5312 and the third guide groove 5314 are equal; then the reset motion can restore the clamping assembly to the state of clamping the sample.

[0070] In other embodiments, the first guide groove 5312 and the third guide groove 5314 are straight grooves, and the lengths of the first guide groove 5312 and the third guide groove 5314 along the second direction X2 are equal, and the second direction X2 is perpendicular to the bearing surface.

[0071] The fourth movement is used to move the gripper 533 away from the sample in the opposite direction to the first direction X1. The first drive mechanism is also used to move the clamping assembly in the first direction X1 to clamp the sample edge. The translational movement also includes a sixth movement, which is used to move the clamping assembly from the clamping position in the opposite direction to the first direction X1 before the fifth movement to release the sample edge.

[0072] The guiding mechanism further includes a slot 5311, which is connected to the first guide groove 5312 at a third connection position and to the third guide groove 5314 at a fourth connection position. The slot 5311 is a straight groove. The slot 5311 is used to guide the clamping assembly to move along the first direction X1 to clamp the sample under the drive of the second driving mechanism. The slot 5311 is also used to guide the clamping assembly to move in the opposite direction of the first direction X1 during the sixth movement to release the clamping position of the sample. In this embodiment, the card member 54 is fixedly connected to the card holder 3, and the card slot 5311 extends from the third connection position in the opposite direction of the first direction X1. In other embodiments, the card member 54 is fixedly connected to the clamping assembly, and the card slot 5311 extends from the third connection position in the first direction X1.

[0073] In this embodiment, the first guide groove 5312, the second guide groove 5313, the third guide groove 5314, and the slot 5311 are all located on the guide member 531. In other embodiments, the slot 54 is fixedly connected to the guide member 531, the guide member 531 is sleeved on the outside of the slot 54, the first guide groove 5312, the second guide groove 5313, the third guide groove 5314, and the slot 5311 are disposed on the inner wall of the guide member 531, and the guide member 531 is fixed relative to the chuck seat 3.

[0074] In this embodiment, the gripper 533 includes a gripping plate 5331 and a gripper connecting rod 534. The gripper 533 is connected to the guide member 531 through the gripper connecting rod 534. The first driving mechanism includes an elastic member 55, which is sleeved on the gripper connecting rod 534. It also includes a baffle 31 fixedly connected to the chuck seat 3. One end of the elastic member 55 is connected to the baffle 31.

[0075] One end of the clamping plate 5331 is provided with a tapered portion 5332, and one side of the clamping plate 5331 is provided with an abutting portion 5333. The tapered portion 5332 is used to abut one end face of the sample, and the abutting portion 5333 is used to abut the outer peripheral surface of the sample. Both the tapered portion 5332 and the abutting portion 5333 are covered with elastic material.

[0076] In this embodiment, a third driving mechanism 4 is also included. The third driving mechanism 4 is used to drive the clamping assembly to move along a direction parallel to the bearing surface or to rotate about the hinge axis of each of the grippers 533, so that each of the grippers 533 releases the sample edge. In this embodiment, the third driving mechanism 4 is used to drive the clamping assembly to translate along a direction parallel to the bearing surface. Specifically, the direction of translation is parallel to the first direction X1.

[0077] Specifically, such as Figure 8 As shown, the lifting block 412 of the third drive mechanism 4 abuts against the connecting rod 51, driving the clamping assembly to move in a direction parallel to the bearing surface, causing each of the grippers 533 to move away from the sample edge and release the gripping of the sample. In other embodiments, the grippers 533 are hinged to the gripper connecting rod 534 via a hinge shaft, and the lifting block 412 of the third drive mechanism 4 abuts against one end of the gripper 533, causing the gripper 533 to rotate around the hinge shaft and release the gripping of the sample edge.

[0078] In some implementations, such as Figure 5 As shown, the third drive mechanism 4 includes a lifting frame 41 and a lifting drive device 42. The lifting frame 41 is sleeved on the outer periphery of the second drive mechanism and is located on one side of the chuck seat 3, more specifically, below the drive member 6. The output end of the lifting drive device 42 is connected to the lifting frame 41 and is used to drive the lifting frame 41 to reciprocate in a direction perpendicular to the bearing surface. The lifting drive device 42 is a power source, and its specific structure is not limited, as long as it drives the lifting frame 41 to lift and lower. It can be a lifting cylinder, a motor, an electric push rod, etc., and its number is also not limited; it can be one or multiple. Specifically, the lifting drive device 42 is equipped with a distance sensor to facilitate the monitoring of the lifting height of the lifting frame 41.

[0079] The lifting block 412 has a lifting portion 413, which is an inclined surface. The third driving mechanism 4 also includes a contact surface 511 fixedly connected to the clamping assembly, which is a spherical surface. The lifting portion 413 is configured to slide against the contact surface 511 as the lifting frame 41 approaches the clamping assembly in a direction perpendicular to the bearing surface, thereby driving the clamping assembly to move in a direction parallel to the bearing surface.

[0080] In this embodiment, the steering mechanism 63 includes a connecting rod 51, and the contact surface 511 is disposed on the connecting rod 51.

[0081] Specifically, the lifting frame 41 includes a lifting frame body 411 and a plurality of lifting blocks 412. The lifting blocks 412 are disposed on the lifting frame body 411, and the lifting blocks 412 are disposed one-to-one with the grippers 533. The lifting drive device 42 drives the lifting frame 41 to reciprocate along a direction perpendicular to the bearing surface, so that each lifting block 412 abuts against the connecting rod 51 of the corresponding clamping assembly, thereby driving the clamping assembly to move along a direction parallel to the bearing surface, so that the grippers 533 move to a side away from the edge of the sample and release the clamping of the sample.

[0082] In some embodiments, the lifting frame body 411 is provided with at least two connecting parts 414, which are arranged at intervals along the outer periphery of the lifting frame 41, and each connecting part 414 is connected to the output end of the lifting drive device 42.

[0083] Specifically, the lifting frame body 411 is an annular ring that is fitted around the outer periphery of the driver. Connecting portions 414 are spaced apart around the outer periphery of the lifting frame body 411. Specifically, at least two connecting portions 414 are provided, and each connecting portion 414 is connected to the output end of the lifting drive device 42. The arrangement of multiple lifting drive devices 42 facilitates the synchronous and parallel upward lifting of the lifting frame body 411, preventing the lifting frame body 411 from tilting, thereby ensuring that multiple grippers 533 can release their grip on the sample simultaneously.

[0084] The lifting block 412 is provided with a lifting part 413, and the connecting rod 51 is provided with a contact surface 511. The lifting part 413 abuts against the contact surface 511. Specifically, in this embodiment, the lifting part 413 is a ramp surface, and the contact surface 511 is a spherical surface. The ramp surface and the spherical surface abut tangentially, thereby pushing the connecting rod 51 to move in a direction parallel to the bearing surface, so that the gripper 533 releases its grip on the sample. When the lifting frame 41 descends, the lifting part 413 and the contact surface 511 slowly release their abutment force, and the elastic potential energy of the elastic element 55 pushes the connecting rod 51 to move in a direction parallel to the bearing surface, so that the gripper 533 clamps the sample.

[0085] In this embodiment, the chuck seat 3 is provided with a guide hole 32 and a lifting hole 33. The contact member 52 passes through the guide hole 32, and the lifting block 412 passes through the lifting hole 33 and abuts against the lifting part 413. By having the contact member 52 pass through the guide hole 32, the rotation of the connecting rod 51 within the chuck seat 3 is restricted, ensuring that the connecting rod 51 can only reciprocate along the radial direction of the chuck seat 3.

[0086] Specifically, in this embodiment, the chuck holder 3 includes a chuck body 35 and a mounting portion 34 located around the periphery of the chuck body; the connecting rod 51 and the guide mechanism 531 are located in the mounting portion 34; the guide hole is located at the bottom of the mounting portion and penetrates through the bottom of the mounting portion, and the contact member 52 passes through the guide hole to contact the protruding structure. The clamping member is fixed to the mounting portion. Specifically, the mounting portion is a cavity structure, and the connecting rod 51 and the guide mechanism 531 are located in the cavity of the mounting portion. In other embodiments of this application, the clamping member is fixedly connected to the clamping assembly, and the first guide groove, the second guide groove, the third guide groove, and the clamping slot are located inside the mounting portion.

[0087] In this embodiment, the chuck base 3 is provided with a plurality of clamping component mounting portions 34, and the clamping components are installed one-to-one in the clamping component mounting portions 34. Specifically, there are 4 to 10 clamping components, which ensures that a certain distance is maintained between each clamping component and that the sample is securely clamped.

[0088] In this embodiment, the drive component 6 is fixedly mounted on the mounting frame 1 by multiple fixing rods 7. The multiple fixing rods 7 are spaced apart on the outer periphery of the drive component, and the drive component is fixedly mounted on the mounting frame 1. The multiple fixing rods 7 ensure that the drive component 6 is stably positioned, allowing it to abut against the clamping assembly sequentially when the chuck seat 3 rotates.

[0089] Specifically, the contact member 52 abuts against the outer peripheral surface of the driving member 6, so that when the chuck seat 3 rotates with the driver, each of the clamping components, guided by the outer peripheral surface of the driving member 6, rotates synchronously around a rotation axis parallel to the bearing surface and reciprocates along a movement direction parallel to the bearing surface, thereby releasing and clamping the sample edge one by one; at any time, at least some of the clamping components maintain the clamping state of the sample to maintain the positioning of the sample during rotation.

[0090] Specifically, as the third driving mechanism 4 approaches the clamping assembly in a direction perpendicular to the bearing surface, it drives the clamping assembly to move in a direction parallel to the bearing surface, causing the clamping assembly to release its grip on the sample. This facilitates the removal of the sample from the bearing device or the placement of the sample on the bearing mechanism. Guided by the outer peripheral surface of the driving member 6, the clamping assembly moves in a direction parallel to the bearing surface while rotating around a rotation axis parallel to the bearing surface, causing the jaws 533 to retract to the side near the center of the chuck seat 3. This ensures that the jaws 533 do not obstruct the edge of the sample, allowing the detection device to process the clamping position of the clamping assembly.

[0091] Specifically, the clamping assembly rotates 180° around a rotation axis parallel to the bearing surface, but it can also rotate by any degree, as long as the clamping assembly does not obstruct the edge of the sample after rotation. The rotated jaws 533 can retract to the side closest to the center of the chuck base 3. After detection, the clamping assembly continues to move along the direction of movement parallel to the bearing surface while rotating around a rotation axis parallel to the bearing surface, thus re-clamping the edge of the sample. It is worth noting that the sum of the angles of the two rotations of the clamping assembly is 360 degrees, or the angle of the first rotation is equal to the angle of the second rotation, and the two rotations are in opposite directions. Thus, during the rotation of the chuck base 3, multiple clamping assemblies sequentially complete the actions of releasing the clamp, detecting, and then re-clamping. When the chuck base 3 rotates 360°, a 360° detection of the sample edge can be completed, achieving the detection of the entire edge in a single rotational scan. Throughout the entire rotation process, only one clamping component releases its grip on the sample, while the other clamping components remain in a clamping state, ensuring the sample's stable positioning during rotation.

[0092] Figure 9 This is a schematic diagram of another embodiment of the carrier device of this application.

[0093] refer to Figure 9The similarities between this embodiment and the previous embodiment are not limited here. The differences include: the third movement causes the clamping component in the preset position to translate in a direction perpendicular to the bearing surface; the first driving mechanism is used to provide the clamping component with a force along the first direction X1 toward the center of the chuck seat 3.

[0094] In this embodiment, the locking member 54 is fixed relative to the clamping assembly. Specifically, the locking member 54 is disposed on the gripper 533. The guide member 531 is located on one side of the center surface of the gripper 533, and the center surface is perpendicular to the bearing surface and parallel to the first direction X1. The first guide groove 5312, the second guide groove 5313, and the slot 5311 are fixedly connected to the chuck seat, and the first guide groove 5312, the second guide groove 5313, and the slot 5311 are located on the guide member 531.

[0095] In this embodiment, the third movement is used to translate the clamping component in the preset position relative to the chuck seat 3 along the second direction X2, the second direction X2 being perpendicular to the bearing surface, the first guide groove 5312 being straight, and the first guide groove 5312 having an acute angle with the second direction X2.

[0096] In this embodiment, the card and the clamping assembly are fixed relative to each other, and the first guide groove and the chuck seat are fixed relative to each other. The second direction X2 extends from the bearing surface towards the chuck seat 3, and the first guide groove 5312 extends along the opposite direction of the first direction X1 towards the second direction X2. In other embodiments, the first guide groove and the clamping assembly are fixed relative to each other, and the card and the chuck seat are fixed relative to each other. The second direction X2 extends from the bearing surface towards the chuck seat 3, and the first guide groove 5312 extends along the first direction X1 towards the second direction X2.

[0097] In this embodiment, the gripper connecting rod 534 abuts against the connecting rod 51; or, the bearing device further includes an adapter rod, which abuts against the gripper connecting rod 534; one end of the elastic member 55 is fixedly connected to the chuck seat 3, and the other end is connected to the adapter rod, and the elastic member 55 is sleeved on the gripper connecting rod 534.

[0098] The second guide groove 5313 is straight, and the extension direction of the second guide groove 5313 is parallel to the first direction X1.

[0099] In this embodiment, the card 54 is fixedly connected to the clamping assembly, and both the first guide groove 5312 and the second guide groove 5313 extend from the first connection position in the opposite direction of the first direction X1. In other embodiments of this application, both the first guide groove 5312 and the second guide groove 5313 are straight lines, and the card 54 is fixedly connected to the chuck seat 3; both the first guide groove 5312 and the second guide groove 5313 extend from the first connection position in the first direction X1.

[0100] In this embodiment, a third guide groove 5314 is also included. The card 54 is fixedly connected to the clamping assembly, and the guide 531 is sleeved on the outside of the card 54. The third guide groove 5314 extends from the second connection position in the opposite direction of the first direction X1.

[0101] The first guide groove 5312 and the third guide groove 5314 are straight grooves. The lengths of the first guide groove 5312 and the third guide groove 5314 along the second direction X2 are equal, and the second direction X2 is perpendicular to the bearing surface.

[0102] In this embodiment, the card 54 is fixedly connected to the clamping assembly, and the card slot 5311 extends from the third connection position in the first direction X1.

[0103] The guide member 531 is a flat plate fixedly connected to the chuck base 3, and the clamping member 54 is fixedly connected to the clamping assembly. The clamping member 54 is fixedly connected to the gripper 533.

[0104] Figure 10 This is a structural schematic diagram of the third embodiment of the carrier device of this application.

[0105] refer to Figure 10 This embodiment and Figures 1 to 8 The similarities between the embodiments shown will not be repeated here, while the differences include: The second movement is to cause the chuck seat 3 and the second drive mechanism to translate along a third direction X3, at least some of the clamping components are arranged at least along the third direction X3, the third direction X3 is perpendicular to the first direction X1 or has an acute angle with the first direction X1.

[0106] In this embodiment, the sample can be a glass substrate; the sample is rectangular.

[0107] The driving element 6 includes an edge extending along the third direction X3. The number of edges extending along the third direction X3 is greater than or equal to the number of sample edges extending along the third direction X3 that require comprehensive inspection.

[0108] Specifically, in this embodiment, the steering mechanism 63 is a rectangle or a rectangular ring.

[0109] The number of the protrusions is greater than or equal to the number of sample edges extending along the third direction X3 that require full inspection. The number of the processing devices is the same as the number of the protrusions.

[0110] In this embodiment, two edges of the sample along the third direction X3 need to be processed, so the number of convex structures is two. In other embodiments, one edge of the sample along the third direction X3 needs to be processed, so the number of convex structures is one.

[0111] In other embodiments of this application, the carrying device further includes a clamping assembly for clamping the edge of the sample extending in the fourth direction, and can also process the edge of the sample extending in the fourth direction. Then, the carrying device has multiple actuators. The actuator is also used to drive the chuck seat 3 to move in the fourth direction. The driving member 6 also includes the protrusion structure located on the edge extending in the fourth direction.

[0112] Figure 11 This is a structural schematic diagram of the working method of a bearing device according to this application.

[0113] refer to Figure 11 The present invention also provides a method for operating a support device, wherein the method for supporting a sample using the support device in the above embodiments includes the following steps: The sample is placed on the bearing surface of multiple clamping components so that each clamping component clamps the sample. The second drive mechanism drives the chuck seat 3 through the driver to move the clamping components in a second way, so that at least part of the clamping components pass through the preset position in sequence. The guiding mechanism guides the clamping component in a preset position so that the clamping component moves a third time relative to the chuck seat 3 under the drive of the second driving mechanism, so that the top of the clamping component in the preset position is located on the side of the bearing surface facing the chuck seat 3. After the third movement, the first driving mechanism causes the clamping assembly in the preset position to move in a first direction X1 parallel to the bearing surface, so that the clamping assembly in the preset position retracts to the side of the sample edge near the center of the chuck seat 3.

[0114] The first driving mechanism drives the clamping component, which is in a preset position, to make a first movement, so that the clamping component retracts to the side near the center of the chuck base 3. The first and second driving mechanisms enable the clamping component to release the sample and retract to the bearing surface side when it moves to the preset position, thereby avoiding obstruction of the sample edge at the preset position. Thus, during the second movement of the chuck base 3 driven by the second driving mechanism, the sample clamping position can be processed at the preset position. This solves the problem in the prior art that two complete rotation detection processes must be performed, significantly extending the single-piece processing cycle. Through the precise cooperation of the first driving mechanism and the guiding mechanism, the opening and rotation time and angle of the clamping component can be precisely controlled, ensuring that the bearing device can completely process the sample edge.

[0115] The second drive mechanism further includes a steering mechanism 63; the method further includes: the steering mechanism 63 causes the clamping assembly to translate in the opposite direction of the first direction X1 under the drive of the driver, the translational movement including one or a combination of a fourth movement, a fifth movement and a sixth movement.

[0116] Specifically, in this embodiment, the translational motion includes: a fourth movement, a fifth movement, and a sixth movement.

[0117] The following combination Figure 11 The working method of the support device provided in this application is described in detail. The working method includes: SP0 involves placing a sample on the bearing surface of a plurality of clamping components so that each clamping component clamps the sample.

[0118] In this embodiment, the bearing device further includes a third driving mechanism 4, which drives the clamping assembly to move in a direction parallel to the bearing surface, so that each of the grippers 533 moves away from the clamping position, or rotates about the hinge axis of each of the grippers 533. The third driving mechanism 4 includes a lifting frame 41 and a lifting driving device 42.

[0119] Placing the sample on the bearing surface of multiple clamping components and clamping the sample by each clamping component includes: driving the clamping components to move in a direction parallel to the bearing surface by the third driving mechanism 4, so that each of the grippers 533 moves away from the clamping position; and placing the sample on the bearing surface.

[0120] The lifting block 412 has a lifting part 413, which is an inclined surface. The third driving mechanism 4 also includes a contact surface 511 fixedly connected to the clamping assembly, which is a spherical surface.

[0121] Moving each of the grippers 533 away from the clamping position includes: moving the gripper 533 away from the clamping position in the opposite direction of the first direction X1, or rotating the gripper 533 away from the clamping position about a rotation axis parallel to the bearing surface.

[0122] Specifically, in this embodiment, moving the gripper 533 away from the clamping position in the opposite direction of the first direction X1 includes: driving the lifting frame 41 to move toward the bearing surface in a direction perpendicular to the bearing surface through the third driving mechanism 4, so that each of the lifting blocks 412 abuts against the contact surface 511, and the contact surface 511 moves in the opposite direction of the first direction X1 under the abutment of the inclined surface of the lifting block 412.

[0123] In this embodiment, each clamping component corresponds to a lifting portion 413, thereby causing multiple clamping components to move away from the clamping position under the drive of the third driving mechanism 4. In other embodiments, the number of lifting portions 413 may be less than the number of clamping components, thereby causing only some clamping components to move away from the clamping position.

[0124] After placing the sample on the bearing surface, the method further includes: driving the lifting frame 41 to move away from the bearing surface in a direction perpendicular to the bearing surface through the third driving mechanism 4, so as to remove the lifting block 412 from the contact surface 511; after removing the lifting block 412 from the contact surface 511, the clamping assembly moves along the first direction X1 under the drive of the first driving mechanism to clamp the sample.

[0125] It should be noted that in this embodiment, the sample is placed on the bearing surface and supported by a robotic arm until the clamping assembly holds the sample. Alternatively, after the robotic arm places the sample on the conical portion 5332 and moves away, the sample is clamped by the clamping plate 5331.

[0126] The second drive mechanism drives the chuck seat 3 through the driver to move the clamping components in a second way, so that at least part of the clamping components pass through the preset positions in sequence.

[0127] The clamping assembly, having passed the preset position, will perform a switching operation under the action of the second driving mechanism and the guiding mechanism; the switching operation is used to release the sample from the clamping assembly upon reaching the preset position, and to clamp the sample again after the clamping assembly leaves the preset position. The switching operation includes: SP1, the steering mechanism 63 performs the sixth movement to move the clamping assembly from the clamping position in the opposite direction of the first direction X1 to release the sample edge.

[0128] The sixth movement includes: driving the drive member 6 to rotate by the driver, causing the first protrusion 61 to abut against the contact member 52, causing the contact member 52 to move in the opposite direction of the first direction X1 to release the sample, and during the sixth movement, the card member 54 slides in the card slot 5311.

[0129] The steering mechanism 63 includes: a driving member 6 and a contact member 52. The outer peripheral surface of the driving member 6 has a protruding structure that protrudes in the opposite direction to the first direction X1. The protruding structure includes a first protrusion 61 and a second protrusion 62. The guiding mechanism includes: a locking member 54, a first guide groove 5312, a second guide groove 5313, a third guide groove 5314, and a locking slot 5311.

[0130] The sixth movement specifically includes: driving the drive member 6 to rotate by the driver, causing the first protrusion 61 to abut against the contact member 52, causing the contact member 52 to move in the opposite direction of the first direction X1 to release the sample, and during the sixth movement, the card member 54 slides in the card slot 5311.

[0131] SP2 and SP3, after the sixth movement, the steering mechanism 63 performs the fifth movement to move the clamping assembly away from the clamping position in the opposite direction of the first direction X1 away from the sample edge; during the fifth movement, the third movement positions the top of the clamping assembly on the side of the bearing surface facing the chuck seat 3.

[0132] The fifth movement includes: the driver drives the drive member 6 to rotate, so that the first protrusion 61 abuts against the contact member 52, and the contact member 52 drives the clamping assembly in the preset position to move in the opposite direction of the first direction X1.

[0133] Driven by the fifth movement, the clamp 54 slides along the extension direction of the first guide groove 5312, so that the clamping assembly makes the third movement until the top of the clamping assembly is located on the side of the bearing surface facing the chuck seat 3.

[0134] The fifth movement specifically includes: the driver drives the drive member 6 to rotate, causing the first protrusion 61 to abut against the contact member 52, causing the contact member 52 to drive the clamping assembly in the preset position to move in the opposite direction of the first direction X1; under the drive of the fifth movement, the clamping member 54 slides along the extension direction of the first guide groove 5312, so that the clamping assembly performs the third movement until the top of the clamping assembly is located on the side of the bearing surface facing the chuck seat 3.

[0135] SP4, after the third movement, the first drive mechanism causes the clamping assembly in the preset position to move in the first direction X1 parallel to the bearing surface, so that the clamping assembly in the preset position retracts to the side of the sample edge near the center of the chuck seat 3.

[0136] The first movement includes: after the top of the first protrusion 61 passes the contact member 52, the first driving mechanism drives the clamping assembly to move along the first direction X1, and the card member 54 slides along the second guide groove 5313, so that the clamping assembly in the preset position retracts to the side of the sample edge near the center of the chuck seat 3.

[0137] SP5 and SP6, after the clamping assembly retracts to the side of the sample edge near the center of the chuck seat 3, the steering mechanism 63 causes the clamping assembly to move a fourth time in the opposite direction of the first direction X1 under the drive of the driver; during the fourth movement, the guide mechanism also causes the clamping assembly, which has passed the preset position, to perform a reset movement, which causes the top of the clamping assembly to be located on the side of the bearing surface away from the chuck seat 3; the reset movement is performed under the drive of the fourth movement.

[0138] In this embodiment, the steering mechanism 63 is used to cause the clamping component to translate in the opposite direction of the first direction X1 under the drive of the driver. The translation includes a fourth movement, which causes the clamping component that has passed the preset position to move in the opposite direction of the first direction X1. The guide mechanism is also used to reset the clamping component that has passed the preset position. After the sample edge at the preset position is processed, the steering mechanism 63 and the guide mechanism can enable the clamping component to re-clamp the sample edge to prevent the sample from falling when the next clamping component that has passed the preset position is released.

[0139] The fourth movement specifically includes: the driver driving the drive member 6 to rotate, causing the second protrusion 62 to abut against the contact member 52, causing the contact member 52 to move in the opposite direction of the first direction X1; during the fourth movement, the clamping member 54 slides in the third guide groove 5314, so that the clamping assembly that has passed the preset position performs a reset movement, so that the top of the clamping assembly is located on the side of the bearing surface away from the chuck seat 3.

[0140] The fourth movement moves the clamping assembly away from the clamping position.

[0141] The fourth movement moves the clamping assembly away from the clamping position, and the method further includes: SP7, moving the clamping assembly along the first direction X1 to clamp the sample edge.

[0142] During the process of moving the clamping assembly along the first direction X1 to clamp the edge of the sample, the clamping member 54 slides along the slot 5311.

[0143] The technical solution of this application provides a processing device; Figure 12 This is a schematic diagram of an embodiment of the processing device provided in this application.

[0144] The processing device includes: a carrying device; and a processing module 8 for processing the sample edge position where the clamping assembly, which has retracted to the side of the sample edge near the center of the chuck seat 3, has been released.

[0145] The bearing device described herein is the same as the first to third embodiments of the bearing device, and the relevant content of the first to third embodiments of the bearing device can be referenced here.

[0146] In this embodiment, the processing module 8 can be one or a combination of multiple of the following: detection module, measurement module, cleaning module, or etching module.

[0147] The detection module includes a bright-field defect detection module and / or a dark-field defect detection module; the measurement module includes a thickness measurement module.

[0148] Specifically, in this embodiment, the arrangement direction of the contact member 52 and the clamping assembly is along the processing axis of the processing module, and the processing axis of the processing module 8 passes through the holding part 64. The processing axis is the line between the processing position of the processing module and the processing module; specifically, the processing axis is the optical axis of the objective lens of the detection module or the water outlet direction of the cleaning module.

[0149] The technical solution of this application also provides an embodiment of a processing method for a processing device.

[0150] The processing method includes: executing Figure 11 The operating method of the bearing device is as follows: after the first movement, the processing module 8 processes the sample edge position where the clamping component is released from the side of the sample edge near the center of the chuck seat 3.

[0151] After the processing operation, the working method further includes: the steering mechanism 63 causes the clamping component to move in the opposite direction of the first direction X1 under the drive of the driver; during the fourth movement, the guide mechanism also causes the clamping component that has passed the preset position to perform a reset movement; after the processing operation, the fourth movement and the reset movement are executed.

[0152] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention should fall within the protection scope of the present invention.

Claims

1. A supporting device, characterized in that, include: chuck socket; Multiple clamping components are spaced apart around the chuck base, and the clamping positions of the multiple clamping components form a bearing surface for clamping the sample edge; the clamping components are used to clamp the sample edge. A first driving mechanism is used to drive the clamping component in a preset position to move in a first direction, so that the clamping component in the preset position retracts to the side of the sample edge near the center of the chuck seat, wherein the first direction is the direction from the clamping position of the clamping component on the sample edge to the inside of the chuck seat. And a second driving mechanism, including a driver, for driving the chuck seat to move the clamping assembly in a second movement, so that at least a portion of the clamping assembly passes through a preset position in sequence; A guiding mechanism is used to guide the clamping assembly in the preset position so that the clamping assembly moves a third time relative to the chuck seat under the drive of the second driving mechanism, so that the top of the clamping assembly in the preset position is located on the side of the bearing surface facing the chuck seat.

2. The bearing device according to claim 1, characterized in that, The second driving mechanism further includes a steering mechanism, which is used to cause the clamping assembly to translate in the opposite direction of the first direction under the drive of the driver. The translation includes a fourth movement, which causes the clamping assembly, after passing a preset position, to move in the opposite direction of the first direction. The guiding mechanism is also used to cause the clamping assembly, after passing the preset position, to perform a reset movement, which causes the top of the clamping assembly to be located on the side of the bearing surface away from the chuck seat. The reset movement is performed under the drive of the fourth movement. The translation includes a fifth movement, which is used to cause the clamping assembly to move in the opposite direction of the first direction away from the sample edge. The fifth movement is synchronized with the third movement. The fourth movement causes the clamping assembly to move away from the clamping position in the opposite direction to the first direction, and the first drive mechanism is also used to move the clamping assembly in the first direction to clamp the sample edge.

3. The bearing device according to claim 2, characterized in that, The third movement causes the clamping assembly in the preset position to rotate relative to the chuck seat about a rotation axis parallel to the bearing surface, or causes the clamping assembly in the preset position to translate in a direction perpendicular to the bearing surface. The first drive mechanism is used to provide a force to the clamping assembly along the first direction toward the center of the chuck seat; The guiding mechanism includes: a locking member and a first guide groove, wherein one of the chuck base and the clamping assembly is fixedly connected to the locking member, and the other is fixedly connected to the first guide groove; the locking member is slidably disposed within the first guide groove, and the first guide groove is configured to guide the locking member to slide under the drive of a second driving mechanism so that the top of the clamping assembly is located on the side of the bearing surface facing the chuck base; it also includes a second guide groove, which is configured to guide the locking member to slide along the second guide groove under the drive of the first driving mechanism so that the clamping assembly retracts to the side of the sample edge near the center of the chuck base; the second guide groove and the first guide groove are connected at a first connection position; there is a preload between the locking member and the first and second guide grooves, and at the first connection position, the depth of the first guide groove is less than the depth of the second guide groove; Wherein, if the card is fixedly connected to the card holder, the first guide groove and the second guide groove both extend from the first connection position toward the first direction; if the card is fixedly connected to the clamping assembly, the first guide groove and the second guide groove both extend from the first connection position toward the opposite direction of the first direction.

4. The bearing device according to claim 3, characterized in that, The first driving mechanism includes an elastic element, one end of which is connected to the clamping assembly and the other end of which is connected to the chuck seat, for providing a preload force to the clamping assembly; The third movement causes the clamping assembly in the preset position to rotate relative to the chuck seat about a rotation axis parallel to the bearing surface, the rotation axis coinciding with the first direction, and the first guide groove including a spiral groove extending along the first direction; or, the third movement is used to cause the clamping assembly in the preset position to translate relative to the chuck seat along a second direction, the second direction being perpendicular to the bearing surface, the first guide groove being straight, the first guide groove having an acute angle with the second direction, and the second direction extending from the bearing surface toward the chuck seat.

5. The bearing device according to any one of claims 2 to 4, characterized in that, The steering mechanism includes a drive member and a contact member. The outer peripheral surface of the drive member has a protrusion structure that protrudes in the opposite direction to the first direction. The contact member is used to abut against the protrusion structure of the drive member at a preset position. The drive member causes the protrusion structure and the contact member to move relative to each other along a moving path, so that the protrusion structure abuts against the contact member to drive the clamping assembly to perform the translational movement. The moving path is perpendicular to the first direction or has an acute angle.

6. The bearing device according to claim 5, characterized in that, The protrusion structure includes one or a combination of a first protrusion and a second protrusion, wherein the second protrusion is used to abut against the contact member under the drive of the driver, so that the clamping assembly performs the fourth movement in the opposite direction of the first direction; the first protrusion is used to abut against the contact member under the drive of the driver, so that the clamping assembly performs the fifth movement in the opposite direction of the first direction; the first protrusion and the second protrusion are arranged in the positive direction of the movement path.

7. The bearing device according to claim 3, characterized in that, The guiding mechanism further includes: a third guide groove, which is connected to the second guide groove at a second connection position; the first guide groove and the third guide groove are respectively connected to both ends of the second guide groove; the third guide groove is spiral or straight with an acute angle to the second guide groove; at the second connection position, the depth of the third guide groove is greater than the depth of the second guide groove. If the card is fixedly connected to the chuck seat, the third guide groove extends from the second connection position toward the first direction; or, if the card is fixedly connected to the clamping assembly, the third guide groove extends from the second connection position toward the opposite direction of the first direction.

8. The bearing device according to claim 7, characterized in that, The fourth movement is used to move the clamping assembly away from the sample in the opposite direction to the first direction, and the first drive mechanism is also used to move the clamping assembly in the first direction to clamp the sample edge; the translational movement also includes a sixth movement, which is used to move the clamping assembly from the clamping position in the opposite direction to the first direction before the fifth movement to release the sample edge. The guiding mechanism further includes: a slot, which is connected to the first guide groove at a third connection position and to the third guide groove at a fourth connection position. The slot is a straight slot and is used to guide the clamping assembly to move along a first direction to clamp the sample under the drive of the second driving mechanism. The slot is also used to guide the clamping assembly to move in the opposite direction of the first direction during the sixth movement. If the card is fixedly connected to the card holder, the card slot extends from the third connection position in the opposite direction to the first direction; or, if the card is fixedly connected to the clamping assembly, the card slot extends from the third connection position in the first direction.

9. The bearing device according to claim 7, characterized in that, The steering mechanism includes a drive member and a contact member. The outer peripheral surface of the drive member has a protruding structure that protrudes in the opposite direction to the first direction. The protruding structure includes a first protrusion and a second protrusion. The distance between the top and bottom of the first protrusion is greater than or equal to the length of the first guide groove along the first direction. The distance between the top and bottom of the first protrusion is greater than or equal to the length of the second guide groove along the first direction. The distance between the top and bottom of the second protrusion is greater than or equal to the length of the third guide groove along the first direction. The length of the third guide groove along the first direction is greater than or equal to the distance between the retracted position of the clamping assembly and the clamping position along the first direction. If the first guide groove and the third guide groove are spiral, the rotation angles at the two ends of the first guide groove and the third guide groove are equal; if the first guide groove and the third guide groove are straight grooves, the lengths of the first guide groove and the third guide groove along the second direction are equal, and the second direction is perpendicular to the bearing surface.

10. The bearing device according to claim 5, characterized in that, The guiding mechanism includes: a locking element, a first guide groove, and a second guide groove; The steering mechanism further includes a connecting rod, and the contact element is disposed on the connecting rod; The guiding mechanism further includes a guide member, one end of which is movably connected to a connecting rod, the movable connection including abutment; the other end is connected to the clamping assembly. Wherein, the first guide groove and the second guide groove are located on the guide member, or the clip is fixedly connected to the guide member.

11. The bearing device according to any one of claims 1 to 4, characterized in that, It also includes a third driving mechanism for driving the clamping components to move in a direction parallel to the bearing surface, so that each clamping component moves away from the edge of the sample, or rotates about the hinge axis of each clamping component.

12. The bearing device according to claim 11, characterized in that, The third driving mechanism includes a lifting frame and a lifting driving device. The lifting frame is sleeved on the outer periphery of the second driving mechanism. Multiple lifting blocks are provided on the lifting frame, each corresponding to a clamping assembly. The lifting driving device drives the lifting frame to reciprocate along a direction perpendicular to the bearing surface, so that each lifting block drives its corresponding clamping assembly. Each lifting block has a lifting portion, which is an inclined surface. The third driving mechanism also includes a contact surface fixedly connected to the clamping assembly, which is a spherical surface. The lifting portion is configured to slide against the contact surface as the lifting frame approaches the clamping assembly along a direction perpendicular to the bearing surface, driving the clamping assembly to displace along a direction parallel to the bearing surface. The second drive mechanism further includes a connecting rod connected to the clamping assembly, and the contact surface is disposed on the connecting rod.

13. The bearing device according to claim 1, characterized in that, The second movement is to drive the chuck seat to rotate about a rotation axis perpendicular to the bearing surface; the clamping components are symmetrically arranged around the rotation axis; or, the second movement is to drive the chuck seat to translate along a third direction, at least some of the clamping components are arranged at least along the third direction, the third direction being perpendicular to the first direction or having an acute angle with the first direction.

14. A processing apparatus, characterized in that, include: The bearing device according to any one of claims 1 to 13; The processing module is used to process the sample edge position where the clamping assembly, which has retracted to the side of the sample edge near the center of the chuck seat, has loosened.

15. A method for operating the bearing device according to any one of claims 1 to 13, characterized in that, Includes the following steps: The sample is placed on the bearing surface of multiple clamping components so that each clamping component clamps the sample. The second drive mechanism drives the chuck seat through the driver to move the clamping components in a second way, so that at least part of the clamping components pass through the preset position in sequence. The guiding mechanism guides the clamping assembly in a preset position so that the clamping assembly moves a third time relative to the chuck seat under the drive of the second driving mechanism, so that the top of the clamping assembly in the preset position is located on the side of the bearing surface facing the chuck seat. After the third movement, the first drive mechanism causes the clamping assembly in the preset position to move in a first direction parallel to the bearing surface, so that the clamping assembly in the preset position retracts to the side of the sample edge near the center of the chuck seat.

16. The method of operating the bearing device according to claim 15, characterized in that, The second drive mechanism also includes a steering mechanism; The method further includes: the steering mechanism causes the clamping assembly to translate in the opposite direction of the first direction under the drive of the driver, the translational movement including one or more of the fourth movement, the fifth movement and the sixth movement; The steering mechanism performs the sixth movement to move the clamping assembly from the clamping position in the opposite direction of the first direction to release the sample edge; After the sixth movement, the steering mechanism performs the fifth movement to move the clamping assembly away from the clamping position in the opposite direction of the first direction to move away from the sample edge. During the fifth movement, the third movement causes the top of the clamping assembly to be located on the side of the bearing surface facing the chuck seat. After the clamping assembly retracts to the side of the sample edge near the center of the chuck seat, the steering mechanism causes the clamping assembly to move a fourth direction in the opposite direction of the first direction under the drive of the driver. During the fourth movement, the guide mechanism also causes the clamping assembly, which has passed through a preset position, to perform a reset movement, which causes the top of the clamping assembly to be located on the side of the bearing surface away from the chuck seat. The fourth movement moves the clamping assembly away from the clamping position, and the method further includes: the first driving mechanism moves the clamping assembly along a first direction to clamp the sample edge.

17. The method of operating the bearing device according to claim 16, characterized in that, The steering mechanism includes: a driving member and a contact member. The outer peripheral surface of the driving member has a protruding structure that protrudes in the opposite direction to the first direction. The protruding structure includes a first protrusion and a second protrusion. The guiding mechanism includes: a locking member and a first guide groove, a second guide groove, a third guide groove, and a locking groove. The sixth movement includes: driving the driving member to rotate by the driver, causing the first protrusion to abut against the contact member, causing the contact member to move in the opposite direction of the first direction to release the sample; during the sixth movement, the card slides in the card slot. The fifth movement includes: the driver drives the drive member to rotate, causing the first protrusion to abut against the contact member, causing the contact member to drive the clamping assembly in a preset position to move in the opposite direction of the first direction; under the drive of the fifth movement, the clamping member slides along the extension direction of the first guide groove, so that the clamping assembly performs the third movement until the top of the clamping assembly is located on the side of the bearing surface facing the chuck seat. The first movement includes: after the top of the first protrusion passes the contact member, the first driving mechanism drives the clamping assembly to move along the first direction, and the card slides along the second guide groove, so that the clamping assembly in the preset position retracts to the side of the sample edge near the center of the chuck seat; The fourth movement includes: the driver driving the drive member to rotate, causing the second protrusion to abut against the contact member, causing the contact member to move in the opposite direction of the first direction; during the fourth movement, the card slides in the third guide groove, so that the clamping assembly that has passed the preset position performs a reset movement, so that the top of the clamping assembly is located on the side of the bearing surface away from the chuck seat. The first drive mechanism is also used to move the clamping assembly along a first direction to clamp the edge of the sample, during which the clamping member slides along the slot.

18. A processing method based on the processing apparatus of claim 14, characterized in that, include: The method of operating the carrier device according to any one of claims 15 to 17 is performed, and after the first movement, the processing module processes the sample edge position where the clamping assembly is released from the side of the sample edge near the center of the chuck seat.

19. The processing method according to claim 18, characterized in that, If the working method further includes: causing the clamping component to move in the opposite direction of the first direction under the drive of the driver; during the fourth movement, the guide mechanism also causes the clamping component that has passed the preset position to perform a reset movement; After the processing operation, the fourth movement and the reset movement are performed.

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