Grinding device

Abstract

Provided is a grinding device capable of improving the efficiency of adjustment work of a blade such as a blade adjustment. The grinding device includes a table (11) that holds a wafer, one or more blades (12a, 12b) that cut the wafer (1) by being rotated by a spindle drive, three or more adjustment sections (17a, 17b, 18a, 18b) that have regions for adjusting the blades, and a movement section that moves the adjustment sections (17a, 17b, 18a, 18b) and the blades (12a, 12b) relative to each other.

Description

Technical Field

[0001] This invention relates to a grinding apparatus for adjusting cutting blades. Background Technology

[0002] Wafers, which form various components such as semiconductor devices or electronic parts, are cut into individual chips by cutting along dicing lines. For example, Patent Document 1 describes a cutting device that performs flat grinding by rotating and moving a cutting blade in the radial direction of a stopped dresser board. The cutting device then moves from one end of the dresser board to the other. In this way, a cutting mark area extending from one end to the other is formed on the dresser board. The dresser board is then rotated to bring the tip of the cutting blade towards the non-cutting mark area. Then, the next flat grinding cycle is performed. Existing technical documents Patent documents

[0003] Patent Document 1: Japanese Patent Application Publication No. 2013-82021 Summary of the Invention The problem that the invention aims to solve

[0004] However, the current grinding of such cutting tools still hopes to improve the efficiency of cutting tool adjustment operations such as dressing and truning. Methods for solving problems

[0005] A grinding apparatus for solving the above-mentioned problems includes: a worktable for holding a wafer; one or more blades for cutting the wafer by being driven to rotate by a spindle; three or more adjustment sections having areas for adjusting the blades; and a moving section for moving the adjustment sections relative to the blades. Invention Effects

[0006] The present invention can improve the efficiency of blade adjustment operations in blade processing. Attached Figure Description

[0007] Figure 1 This is a perspective view of the grinding apparatus according to the first embodiment. Figure 2 This is a top view showing the operation of the grinding apparatus of the first embodiment during shaping. Figure 3 This is a perspective view of the grinding apparatus according to the second embodiment. Figure 4 This is a top view showing the operation of the grinding apparatus of the second embodiment during shaping. Figure 5This is a perspective view of the grinding apparatus according to the third embodiment. Figure 6 This is a perspective view of the grinding apparatus according to the fourth embodiment. Figure 7 This is a top view showing the operation of the grinding apparatus of the fourth embodiment during shaping. Figure 8 This is a perspective view of the grinding apparatus according to the fifth embodiment. Figure 9 This is a front view showing the action (first example) at the start point of shaping in the fourth and fifth embodiments. Figure 10 This is a top view showing the actions (first example) during shaping in the fourth and fifth embodiments. Figure 11 This is a cross-sectional view showing the actions (first example) during shaping in the fourth and fifth embodiments. Figure 12 This is a cross-sectional view showing the actions (first example) during shaping in the fourth and fifth embodiments. Figure 13 This is a cross-sectional view showing the actions (second example) during shaping in the fourth and fifth embodiments. Figure 14 yes Figure 13 An enlarged cross-sectional view. Figure 15 This is a perspective view showing the actions (second example) during shaping in the fourth and fifth embodiments. Figure 16 This is a perspective view showing the actions (second example) during shaping in the fourth and fifth embodiments. Figure 17 This is a schematic diagram showing an example of the configuration of the adjustment unit. Figure 18 This is a schematic diagram showing a modified example of the configuration of the adjustment section. Figure 19 This is a schematic diagram showing a modified example of the configuration of the adjustment section. Detailed Implementation

[0008] Reference Figures 1 to 19 The implementation methods of the grinding apparatus and shaping method are described. (First Implementation) Figure 1The grinding apparatus 10 shown is a grinding apparatus according to the first embodiment described later. The grinding apparatus 10 cuts the wafer 1 along a grid-like cutting line by moving the cutting blades 12a and 12b relative to the stage 11 holding the wafer 1. The wafer 1, being a difficult-to-machine material, is a silicon carbide wafer, for example, formed of silicon carbide (SiC). However, the wafer 1 is not limited to being formed of silicon carbide. For example, it can also be made of silicon, sapphire, gallium nitride (GaN), gallium oxide (Ga2O3), gallium arsenide (GaAs), etc.

[0009] This grinding apparatus 10 includes a worktable 11, a first cutting tool 12a and a second cutting tool 12b, an X-axis support 13 serving as an X-axis moving part, a first Y-axis moving part 14a and a second Y-axis moving part 14b, a first Z-axis moving part 15a and a second Z-axis moving part 15b, and a control unit 16. Furthermore, the grinding apparatus 10 includes a first sharpening part 17a and a second sharpening part 17b, a first shaping part 18a and a second shaping part 18b. The first sharpening part 17a and the first shaping part 18a are adjustment parts for adjusting the first cutting tool 12a. The second sharpening part 17b and the second shaping part 18b are adjustment parts for adjusting the second cutting tool 12b.

[0010] The stage 11 holds the wafer 1 on a horizontal surface. The stage 11 holds the wafer 1 by adsorbing it from the back side. The first blade 12a and the second blade 12b cut the wafer 1 held on the worktable 11. Blades 12a and 12b are both extremely thin, annular cutting stones. Blades 12a and 12b are detachably mounted on the first spindle 12c and the second spindle 12d, respectively. Spindles 12c and 12d are rotatably supported by their respective housings. Furthermore, spindles 12c and 12d are connected to blade drive sources housed in their respective housings. Blades 12a and 12b are rotated by the rotational force generated by their respective blade drive sources.

[0011] The X-carrier 13 is equipped with a worktable 11, sharpening sections 17a and 17b, and shaping sections 18a and 18b. The X-carrier 13 is driven by an X-axis drive unit equipped with a pulse motor or similar device and moves in the X-axis direction under the guidance of a guide mechanism. The X-carrier 13 includes a worktable rotation section that rotates the worktable 11. The worktable rotation section can adjust the relative angle between the worktable 11 and the cutting blades 12a and 12b.

[0012] The first Y-axis moving part 14a and the second Y-axis moving part 14b are respectively provided on the first Z-axis moving part 15a and the second Z-axis moving part 15b, which are separated from the X-carrier 13. The Y-axis moving parts 14a and 14b are connected to the spindles 12c and 12d, respectively. The Y-axis moving parts 14a and 14b respectively move the cutting tools 12a and 12b relative to the wafer 1 held on the worktable 11 in the Y-axis direction. The Y-axis moving parts 14a and 14b are driven by Y-axis drive units equipped with pulse motors, etc. The Y-axis moving parts 14a and 14b are guided by guide mechanisms to move the spindles 12c and 12d in the Y-axis direction.

[0013] The first Z-axis moving part 15a and the second Z-axis moving part 15b respectively move the blades 12a and 12b relative to the wafer 1 held on the worktable 11 in the Z-axis direction. Specifically, they move the blades 12a and 12b in a direction closer to the worktable 11 and in a direction farther away from the worktable 11, respectively. Specifically, the Z-axis moving parts 15a and 15b are driven by Z-axis drive units equipped with pulse motors or the like. The Z-axis moving parts 15a and 15b are guided by guide mechanisms, causing the Y-axis moving parts 14a and 14b to move integrally with the spindles 12c and 12d in the Z-axis direction.

[0014] The first sharpening section 17a and the second sharpening section 17b on the X-bracket 13 are arranged symmetrically about the X-center line 9, which passes through the rotation center O1 of the worktable 11 and extends in the X-axis direction. The sharpening sections 17a and 17b, serving as adjustment sections, are respectively the parts that sharpen each of the blades 12a and 12b. The sharpening sections 17a and 17b each have a sharpening stone for sharpening, namely a first sharpening plate 17c and a second sharpening plate 17d, and a first sharpening platform 17e and a second sharpening platform 17f, serving as adjustment tables. The sharpening platforms 17e and 17f respectively support the sharpening plates 17c and 17d. The sharpening sections 17a and 17b are respectively located in the area of ​​the X-bracket 13 where the worktable 11 is not located. The sharpening sections 17a and 17b are rectangular in shape. The sharpening sections 17a and 17b respectively cause the two sides of the blades 12a and 12b to move relative to each other in the X-axis direction while contacting the sharpening plates 17c and 17d, thereby sharpening. After sharpening, sharpening marks in the shape of straight grooves extending in the X-axis direction are formed on the sharpening plates 17c and 17d respectively.

[0015] The first shaping section 18a and the second shaping section 18b are arranged symmetrically about the X-center line 9. Furthermore, the shaping sections 18a and 18b are located inside the sharpening sections 17a and 17b. The shaping sections 18a and 18b, which serve as adjustment sections, are rectangular in shape. The shaping sections 18a and 18b are respectively the parts that shape the blades 12a and 12b. The shaping sections 18a and 18b each have a shaping grinding stone serving as an adjustment plate, namely a first shaping plate 18c and a second shaping plate 18d, and a first shaping table 18e and a second shaping table 18f serving as adjustment tables. The shaping tables 18e and 18f respectively support the shaping plates 18c and 18d. The shaping sections 18a and 18b respectively move relative to the front end faces of the outer peripheral surfaces of the blades 12a and 12b in the Y-axis direction while contacting the shaping plates 18c and 18d, thereby performing shaping. After the shaping process, shaping marks in the shape of straight grooves extending in the Y-axis direction will be formed on the shaping plates 18c and 18d.

[0016] The control unit 16 controls the cutting, sharpening, and shaping actions according to the program. The sharpening action simultaneously sharpens the blades 12a and 12b. The shaping action simultaneously shapes the blades 12a and 12b.

[0017] (Operation of the first embodiment) During sharpening, the control unit 16 moves the first blade 12a to the sharpening starting point DS on the first sharpening plate 17c, and activates the X-axis bracket 13, the first Y-axis moving part 14a, and the first Z-axis moving part 15a. Simultaneously, the control unit 16 also moves the second blade 12b to the sharpening starting point DS on the second sharpening plate 17d, and activates the X-axis bracket 13, the second Y-axis moving part 14b, and the second Z-axis moving part 15b.

[0018] Furthermore, the control unit 16 rotates each blade 12a and 12b. Additionally, the control unit 16 moves the X-bracket 13 in a single direction while each blade 12a and 12b is in contact with the sharpening plates 17c and 17d. Then, the rotating blades 12a and 12b move from the sharpening start point DS to the sharpening end point DE. Sharpening marks 17g and 17h extending in the X-axis direction are formed on each sharpening plate 17c and 17d. For example, the sharpening start point DS is set on the edge of each sharpening plate 17c and 17d closest to the worktable 11. The sharpening end point DE is set on the edge of each sharpening plate 17c and 17d opposite to the edge where the sharpening start point DS is set. When performing the next sharpening, the position of the previous sharpening end point DE deviated in the Y-axis direction is set as the new sharpening start point DS, and the position of the previous sharpening start point DS deviated by the same distance in the Y-axis direction is set as the new sharpening end point DE.

[0019] During shaping, the control unit 16 moves the first blade 12a to the shaping starting point TS on the first shaping plate 18c, and activates the X-axis bracket 13, the first Y-axis moving part 14a, and the first Z-axis moving part 15a. Simultaneously, the control unit 16 also moves the second blade 12b to the shaping starting point TS on the second shaping plate 18d, and activates the X-axis bracket 13, the first Y-axis moving part 14a, and the first Z-axis moving part 15a.

[0020] The control unit 16 causes each blade 12a, 12b to rotate while contacting each shaping plate 18c, 18d. Furthermore, the control unit 16 controls each Y-axis moving part 14a, 14b to move the rotating blades 12a, 12b from the shaping start point TS to the shaping end point TE. Shaping marks 19a, 19b extending in the Y-axis direction are formed on each shaping plate 18c, 18d.

[0021] Here, Figure 2 This diagram illustrates the shaping process in detail. The shaping start point TS1 is set at the end edge of each shaping plate 18c and 18d on the side closest to the X-center line 9. Furthermore, the shaping end point TE1 is set at the end edge of each shaping plate 18c and 18d opposite to the end edge where the shaping start point TS1 is set. During the next shaping operation, the position offset from the previous shaping end point TE1 in the X-axis direction is set as the new shaping start point TS2, and the position offset by the same distance in the X-axis direction from the previous shaping start point TS1 is set as the new shaping end point TE2. The shaping action involves linear movement between the shaping start points TS1 and TS2 and the shaping end points TE1 and TE2.

[0022] (Effects of the first implementation method) (1-1) When there are two blades, the same number of sharpening sections 17a and 17b are also provided. Furthermore, shaping sections 18a and 18b are provided. Therefore, both blades 12a and 12b can be sharpened simultaneously. Furthermore, both blades 12a and 12b can be shaped simultaneously. Moreover, one blade 12a and 12b can be sharpened while the other is being shaped. Therefore, both blades 12a and 12b can be adjusted for sharpening and shaping simultaneously. Therefore, the efficiency of adjusting blades 12a and 12b can be improved.

[0023] (Second Implementation) like Figure 3As shown, the first embodiment differs from the grinding apparatus 10 described above, wherein the first shaping section 18a and the second shaping section 18b are rotatable in the R direction. Specifically, the first shaping section 18a includes a first shaping drive section 18g, which rotatably supports a first shaping stage 18e. Furthermore, the second shaping section 18b includes a second shaping drive section 18h, which rotatably supports a second shaping stage 18f. For example, each shaping plate 18c and 18d is annular. Furthermore, each shaping stage 18e and 18f is circular and capable of supporting each shaping plate 18c and 18d. The upper surface of each shaping plate 18c and 18d undergoing shaping is a flat surface.

[0024] Each shaping section 18a and 18b is configured such that the Y-center line 8, extending in the Y-axis direction through the rotation center of each blade 12a and 12b, passes over the rotation center O2 of each shaping section 18a and 18b. Each shaping section 18a and 18b is a shaping rotating section. During shaping, each blade 12a and 12b moves linearly along the radial direction in the Y-axis direction on the shaping plates 18c and 18d.

[0025] like Figure 4 As shown, each shaping drive unit 18g and 18h ​​has a rotary drive source that causes each shaping stage 18e and 18f to rotate on the X-bracket 13. Furthermore, in order to adjust the height of each blade 12a and 12b relative to each shaping plate 18c and 18d in the Z-axis direction, each shaping drive unit 18g and 18h ​​moves each shaping plate 18c and 18d in the Z-axis direction. Specifically, each shaping drive unit 18g and 18h ​​is a shaping rotary drive unit and also a shaping Z-axis moving unit.

[0026] During shaping, when the rotating blades 12a and 12b contact the rotating shaping plates 18c and 18d, each blade 12a and 12b gradually moves linearly in the Y-axis direction, specifically in the radial direction of each shaping plate 18c and 18d. For example, the shaping start point TS1 of each shaping plate 18c and 18d is set at the intersection of the straight line 7 extending in the Y-axis direction through the rotation center O2 and the outer peripheral end of each shaping plate 18c and 18d. The shaping end point TE1 is set at the intersection of the straight line 7 and the inner peripheral end of each shaping plate 18c and 18d. The next shaping start point TS2 is the same as the shaping end point TE1. Furthermore, the next shaping end point TE2 is the same as the shaping start point TS1. As the blades 12a and 12b gradually move from the outer peripheral end to the inner peripheral end of the shaping plates 18c and 18d, or from the inner peripheral end to the outer peripheral end, shaping marks are formed uniformly on the upper surface of each shaping plate 18c and 18d. Specifically, each shaping plate 18c and 18d exhibits a state where its upper surface has been thinly and uniformly removed. Then, the newly formed surface is used for the next shaping process.

[0027] (Effects of the second implementation method) (2-1) The grinding apparatus of the first embodiment (see reference) Figure 1 and Figure 2 It can also simultaneously sharpen or shape each of the blades 12a and 12b.

[0028] (2-2) After the entire surface is removed by each shaping plate, each shaping plate 18c and 18d will use the next surface to be shaped. Therefore, since each shaping plate 18c and 18d adopts the method of sequentially removing the entire surface from the top layer, it can be used until it becomes too thin to be used, thus reducing the replacement frequency.

[0029] (2-3) By rotating each shaping plate 18c and 18d while simultaneously rotating each blade 12a and 12b, the wear rate of each shaping plate 18c and 18d can be reduced. The wear rate of each shaping plate 18c and 18d can be adjusted by changing the rotation speed of the shaping plates 18c and 18d. During each shaping process, the rotation speed of each shaping plate 18c and 18d can be set to be lower than the rotation speed of each blade 12a and 12b.

[0030] (Third implementation method) The third embodiment is a variation of the second embodiment. For example... Figure 5 As shown, the sharpening parts 17a and 17b can also be arranged on the X-bracket 13, while the shaping parts 18a and 18b are not mounted on the X-bracket 13. The shaping parts 18a and 18b are arranged on the outer side of the X-bracket 13 in the Y-axis direction, and are also on the outer side of the sharpening parts 17a and 17b.

[0031] Each shaping part 18a, 18b is positioned in the Y-axis direction, retracting from the X-bracket 13. Specifically, each shaping part 18a, 18b is configured such that the Y-center line 8 passes over its rotation center O2. When each shaping part 18a, 18b rotates, each blade 12a, 12b moves only linearly along the radial direction on each shaping plate 18c, 18d.

[0032] (Effects of the third implementation method) (3-1) The grinding apparatus of the first embodiment (see reference) Figure 1 and Figure 2 It can also simultaneously sharpen or shape each of the blades 12a and 12b.

[0033] (3-2) Since the X bracket 13 does not carry the shaping parts 18a and 18b, the structure can be simplified. (3-3) Since each shaping plate 18c and 18d is made by sequentially removing the entire surface from the top layer, it can be used until it becomes too thin to be usable, thus reducing the replacement frequency. In addition, since each shaping plate 18c and 18d is rotated while each blade 12a and 12b is rotated, the wear rate of each shaping plate 18c and 18d can be slowed down.

[0034] (Fourth Implementation) like Figure 6 As shown, even with multiple blades, the shaping unit mounted on the X-carrier 13 can be a single unit. Specifically, the individual shaping unit 21 is rotatable, with its rotation center O3 located on the X-center line 9 passing through the rotation center O1 of the worktable 11. Furthermore, the shaping unit 21 is configured such that the Y-center line 8 passing through the rotation centers of each blade 12a, 12b passes over the rotation center O3 of the shaping unit 21.

[0035] The shaping section 21 includes an annular shaping plate 21a and a shaping stage 21b supporting the shaping plate 21a. Furthermore, the shaping section 21 includes a shaping drive section 21c, which rotates the shaping stage 21b and moves it in the Z-axis direction. Specifically, the shaping drive section 21c is a shaping rotation drive section and also a shaping Z-axis movement section.

[0036] The diameter of the shaping plate 21a is larger than the diameter of the annular shaping plates 18c and 18d in the second or third embodiment. The upper surface of the shaping plate 21a is flat. Each blade 12a and 12b adjusts its height in the Z-axis direction via the Z-axis moving parts 15a and 15b, thereby achieving contact with the flat upper surface. The first region 22a from the X-center line 9 toward the first blade 12a is a region close to the first blade 12a, which allows the first blade 12a to move in the Y-axis direction. Furthermore, the first region 22a from the X-center line 9 toward the first blade 12a is the range within which the rotating first blade 12a makes contact while moving in the Y-axis direction. The second region 22b from the X-center line 9 toward the second blade 12b is a region close to the second blade 12b, which allows the second blade 12b to move in the Y-axis direction. The second region 22b from the X-center line 9 toward the second blade 12b is the range within which the rotating second blade 12b makes contact while moving in the Y-axis direction.

[0037] During shaping, the shaping drive unit 21c rotates the individual shaping plate 21a. Then, each blade 12a and 12b moves linearly along the Y-axis in the direction of approaching each other and in the direction of separation. Specifically, each blade 12a and 12b moves linearly in the radial direction of the shaping plate 21a.

[0038] Specifically, such as Figure 7As shown, when the rotating first blade 12a contacts the first region 22a, the first blade 12a gradually moves linearly in the Y-axis direction, specifically in the radial direction of the shaping plates 18c and 18d. The shaping start point TS1 of the shaping plate 21a is set at the intersection of the straight line 7 extending in the Y-axis direction through the rotation center O3 and the outer peripheral end of the first region 22a. The shaping end point TE1 is set at the intersection of the straight line 7 and the inner peripheral end of the first region 22a. This shaping end point TE1 will become the shaping start point TS1 for the next shaping. Then, the previous shaping start point TS1 will become the shaping end point TE1.

[0039] Furthermore, when the rotating second blade 12b contacts the second region 22b, the second blade 12b gradually moves linearly in the Y-axis direction, specifically in the radial direction of the shaping plates 18c and 18d. The shaping start point TS2 of the shaping plate 21a is set at the intersection of the straight line 7 extending in the Y-axis direction through the rotation center O3 and the outer peripheral end of the second region 22b. The shaping end point TE2 is set at the intersection of the straight line 7 and the inner peripheral end of the second region 22b. This shaping end point TE2 will become the shaping start point TS2 for the next shaping. Then, the previous shaping start point TS2 will become the shaping end point TE2.

[0040] In this way, shaping marks are formed uniformly on the upper surface of the shaping plate 21a. Specifically, the upper surface of the shaping plate 21a is thinly and evenly shaved away. Then, the newly formed surface is used for the next shaping.

[0041] (Effects of the fourth implementation method) (4-1) The grinding apparatus of the first embodiment (see reference) Figure 1 and Figure 2 It can also simultaneously sharpen or shape each of the blades 12a and 12b.

[0042] (4-2) The shaping unit 21 can shape the first blade 12a and the second blade 12b simultaneously using a single shaping plate 21a. Therefore, since there is only one shaping unit, it is possible to achieve miniaturization of the entire device.

[0043] (4-3) Since each shaping plate 21a is made by sequentially removing the entire surface from the top layer, it can be used until it becomes too thin to be used, thus reducing the replacement frequency. In addition, since each blade 12a and 12b is rotated while the shaping plate 21a is rotated, the wear rate of the shaping plate 21a can be slowed down.

[0044] (Fifth Implementation) The fifth embodiment is a variation of the fourth embodiment. For example... Figure 8As shown, the individual trimming parts 17a and 17b can also be arranged on the X-bracket 13, but the individual shaping part 21 is not mounted on the X-bracket 13. The shaping part 21 is arranged on the outer side of one side of the X-bracket 13 in the Y-axis direction, which is also the outer side of the trimming part 17a.

[0045] The shaping section 21 is positioned separately from the X-bracket 13 in the Y-axis direction and is located below the first blade 12a. Here, the shaping section 21 further includes an X-axis moving section 23. The X-axis moving section 23 moves the shaping section 21 so that the Y-center line 8 overlaps with the rotation center O3 of the shaping section 21.

[0046] The shaping process begins by driving the Y-axis moving parts 14a and 14b, causing each blade 12a and 12b to move onto the shaping part 21. At this time, the X-axis moving part 23 is driven to move the shaping part 21 in the X direction, aligning the Y-center line 8 with the rotation center O3 of the shaping part 21. Then, when the rotating first blade 12a contacts the first region 22a and the rotating second blade 12b contacts the second region 22b, each blade 12a and 12b moves linearly along the Y-axis in both directions of approach and separation. Specifically, each blade 12a and 12b moves linearly in the radial direction of the shaping plate 21a. For example, the first blade 12a moves from the outer periphery to the inner periphery of the first region 22a, or from the inner periphery to the outer periphery. The second blade 12b moves from the outer periphery to the inner periphery of the second region 22b, or from the inner periphery to the outer periphery.

[0047] In this way, shaping marks are formed uniformly on the upper surface of the shaping plate 21a. Specifically, the upper surface of the shaping plate 21a is thinly and evenly shaved away. Then, the newly formed surface is used for the next shaping.

[0048] (Effects of the fifth implementation method) (5-1) The grinding apparatus of the first embodiment (see reference) Figure 1 and Figure 2 It can also simultaneously sharpen or shape each of the blades 12a and 12b.

[0049] (5-2) Since the X-bracket 13 does not have the shaping part 21 mounted on it, the structure can be simplified. (5-3) Since the shaping plate 21a is made by sequentially removing the entire surface from the top layer, it can be used until it becomes too thin to be used, thus reducing the replacement frequency. In addition, since the shaping plate 21a is rotated while the blades 12a and 12b are rotated, the wear rate of the shaping plate 21a can be slowed down.

[0050] (Specific actions 1 (shaping) of the fourth and fifth embodiments) In the fourth and fifth embodiments, the upper surface of the shaping plate 21a is a flat surface. When shaping begins, each blade 12a and 12b adjusts its height in the Z-axis direction via each Z-axis moving part 15a and 15b, thereby achieving a state of contact with the flat upper surface.

[0051] In addition, such as Figure 9 As shown, the first blade 12a is located at the shaping starting point TS1, which is the intersection of the straight line 7 extending in the Y-axis direction through the rotation center O3 and the outer periphery of the first region 22a. The second blade 12b is located at the shaping starting point TS2, which is the intersection of the straight line 7 and the outer periphery of the second region 22b.

[0052] Next, blades 12a and 12b rotate at a first speed. Here, the first blade 12a and the second blade 12b rotate in the same direction. Simultaneously, the shaping plate 21a rotates at a second speed. Here, the first speed is greater than the second speed. Specifically, each blade 12a and 12b rotates faster than the shaping plate 21a. Furthermore, the control unit 16 causes each blade 12a and 12b to move linearly towards each other via the Y-axis moving units 14a and 14b. For every distance the thickness of each blade 12a and 12b moves, the shaping plate 21a rotates half a turn. In this way, the first blade 12a forms a half-circumference first shaping mark 24a on the shaping plate 21a, and the second blade 12b also forms a half-circumference second shaping mark 24b without overlapping the first shaping mark 24a. The formation of each shaping mark 24a and 24b gradually widens as it advances from the shaping starting points TS1 and TS2.

[0053] Figure 10 and Figure 11 This indicates that each blade 12a, 12b has moved to the middle of its trajectory from the outer peripheral end to the inner peripheral end of each region 22a, 22b. Furthermore, as... Figure 12 As shown, each blade 12a and 12b moves to the intersection of the straight line 7 extending in the Y-axis direction through the rotation center O3 and the inner periphery of regions 22a and 22b, which are the shaping endpoints TE1 and TE2. In this way, the entire surface of the upper surface of the shaping plate 21a becomes a new flat surface that has been shaped away.

[0054] The next shaping will be performed using this new flat surface. In the next shaping, the shaping endpoints TE1 and TE2 of the previous shaping will become the new shaping starting points TS1 and TS2. Then, each blade 12a and 12b will move linearly from the inner periphery to the outer periphery of regions 22a and 22b. Each blade 12a and 12b moves linearly in the direction of separation from each other, and for every thickness of each blade 12a and 12b moved, the shaping plate 21a rotates half a turn. Then, the shaping starting points TS1 and TS2 of the previous shaping will become the shaping endpoints TE1 and TE2.

[0055] With this configuration, the first blade 12a and the second blade 12b can be shaped simultaneously using the same height upper surface of a separate shaping plate 21a. The upper surface of the shaping plate 21a can be worn evenly. Therefore, the shaping plate 21a can be used for repeated shaping, thus reducing the frequency of replacement.

[0056] (Specific actions 2 (shaping) of the fourth and fifth embodiments) like Figure 13 , Figure 14 and Figure 15 As shown, the shaping plate 21a here has a top surface 25, a first annular region 26a, and a second annular region 26b on its upper surface for shaping. The first annular region 26a is used to shape the first blade 12a. The second annular region 26b is used to shape the second blade 12b. The first annular region 26a and the second annular region 26b are concentric circles. The first annular region 26a is one level lower than the top surface 25, and the second annular region 26b is one level lower than the first annular region 26a. The first annular region 26a is located on the inner periphery side of the second annular region 26b.

[0057] During shaping, the first blade 12a contacts the outer periphery of the first annular region 26a. This position is the shaping starting point TS1 of the first blade 12a. Furthermore, the second blade 12b contacts the outer periphery of the second annular region 26b. Additionally, blades 12a and 12b rotate in the same direction at a first speed. Simultaneously, the shaping plate 21a rotates at a second speed, slower than that of the blades 12a and 12b. Then, as... Figure 16 As shown, the first blade 12a gradually moves from the shaping starting point TS1 of the first annular region 26a towards the inner circumferential end of the shaping ending point TE1. Similarly, the second blade 12b gradually moves from the shaping starting point TS2 of the second annular region 26b towards the inner circumferential end of the shaping ending point TE2.

[0058] According to this configuration, the first blade 12a is shaped by the first annular region 26a, and the second blade 12b is shaped by the second annular region 26b, thereby enabling the simultaneous shaping of the first blade 12a and the second blade 12b.

[0059] (Modified example) This embodiment can also be modified as follows. This embodiment and the following modifications can be combined and implemented within the scope of technical inconsistency.

[0060] In the first, second, and third embodiments, the first trimming portion 17a and the second trimming portion 17b on the X-bracket 13 may also be arranged symmetrically from left to right without using the X-center line 9 as the axis of symmetry. Furthermore, the first shaping portion 18a and the second shaping portion 18b may also be arranged symmetrically from left to right without using the X-center line 9 as the axis of symmetry.

[0061] In the fourth and fifth embodiments, the first trimmed portion 17a and the second trimmed portion 17b on the X-bracket 13 may also be configured symmetrically from left to right without using the X-center line 9 as the axis of symmetry.

[0062] Figure 3 The second embodiment shown and Figure 5 The grinding apparatus of the third embodiment shown can also be a device with only one blade. In this case, there can be at least one sharpening section and at least one shaping section. As long as the shaping plate is ground by rotating the shaping plate while moving the rotating blade in the Y-axis direction, this configuration can still ensure that the upper surface of the shaping plate is worn evenly. In addition, the frequency of shaping plate replacement can be reduced. Furthermore, since the blade is rotated while the shaping plate is rotated, the wear rate of the shaping plate can be slowed down.

[0063] Figure 6 The fourth embodiment shown and Figure 8 The grinding apparatus of the fifth embodiment shown can also be a device with only one blade. In this case, the shaping section can be reduced compared to the case with two blades. Furthermore, there can be at least one sharpening section. The same effect can still be obtained with this configuration.

[0064] Figure 3 The second embodiment shown and Figure 5 In the third embodiment shown, the shaping can also be performed by stopping each blade 12a, 12b midway through its movement from the outer peripheral end to the inner peripheral end or from the inner peripheral end to the outer peripheral end on the upper surface of each shaping plate 18c, 18d. In this case, the next shaping will start from the previously stopped position.

[0065] Figure 6 The fourth embodiment shown and Figure 8 In the fifth embodiment shown, the shaping can also be performed by stopping each blade 12a, 12b midway through its movement from the outer peripheral end to the inner peripheral end or from the inner peripheral end to the outer peripheral end on the upper surface of each shaping plate 21a. In this case, the next shaping will start from the previously stopped position.

[0066] (A modified example of the adjustment unit configuration) ( Figure 17 (Example) The grinding apparatus of the first embodiment includes a first sharpening section 17a, a second sharpening section 17b, a first shaping section 18a, and a second shaping section 18b as adjustment sections for adjusting the cutting tools 12a and 12b. Specifically, the grinding apparatus of the first embodiment includes four adjustment sections 31-34 for adjusting the cutting tools 12a and 12b. Both the first sharpening section 17a and the second sharpening section 17b include sharpening plates 17c and 17d and sharpening stages 17e and 17f, and these configurations are identical. The first shaping section 18a and the second shaping section 18b also include shaping plates 18c and 18d and shaping stages 18e and 18f, and these configurations are identical. Furthermore, the sharpening sections 17a and 17b and the shaping sections 18a and 18b also have identical configurations.

[0067] Hereinafter, the sharpening parts 17a, 17b and the shaping parts 18a, 18b will be referred to as the adjustment parts 31 to 34, the sharpening plates 17c, 17d and the shaping plates 18c, 18d will be referred to as the adjustment plates, and the sharpening tables 17e, 17f and the shaping tables 18e, 18f will be referred to as the adjustment tables.

[0068] In detail, such as Figure 17 As shown, the sharpening parts 17a and 17b and the shaping parts 18a and 18b are four adjustment parts 31, 32, 33, and 34. Each adjustment part 31 to 34 includes adjustment plates 31a to 34a and adjustment tables 31b to 34b that support the adjustment plates 31a to 34a. The adjustment plates 31a to 34a are, for example, grinding stone plates. When the adjustment parts 31 to 34 are used as sharpening parts, a grinding stone suitable for the desired coarseness of sharpening can be selected; more specifically, a grinding stone suitable for the desired fineness of sharpening can be selected. When the adjustment parts 31 to 34 are used as shaping parts, a grinding stone suitable for the desired coarseness of shaping can be selected; more specifically, a grinding stone suitable for the desired fineness of shaping can be selected. Specifically, all adjustment plates 31a to 34a may be sharpening parts, or all adjustment plates 31a to 34a may be shaping parts. Alternatively, a portion of the adjustment plates 31a to 34a can be a sharpening section, and the remainder a shaping section.

[0069] The adjustment plates 31a to 34a used in the adjustment sections 31 to 34 have the same size or shape even if their roughness is different. The surface of the adjustment plates 31a to 34a can be set to, for example, the same height as the processing surface of the wafer 1 set on the worktable 11.

[0070] The adjustment parts on the X-bracket 13 are arranged from right to left in the figure as follows: first adjustment part 31, third adjustment part 33, fourth adjustment part 34, and second adjustment part 32. The first adjustment part 31 and the second adjustment part 32 are positioned at the same location in the X-axis direction, and are arranged along the Y-axis at positions that overlap with the worktable 11 in the X-axis direction. The first adjustment part 31 is located on one side relative to the X-center line 9 (right side in the figure). The second adjustment part 32 is located on the other side (left side in the figure).

[0071] The third adjustment part 33 and the fourth adjustment part 34 are positioned differently from the first adjustment part 31 and the second adjustment part 32 in the X-axis direction, and are arranged along the Y-axis direction at a position that does not overlap with the worktable 11 in the X-axis direction. The third adjustment part 33 and the fourth adjustment part 34 are located on the inner side of the worktable 11 and the first adjustment part 31 and the second adjustment part 32, closer to the Y-axis direction. The third adjustment part 33 is arranged on one side (right side in the figure) relative to the X-center line 9, and the fourth adjustment part 34 is arranged on the other side (left side in the figure). In detail, the first adjustment part 31 and the third adjustment part 33 on the X-bracket 13 are arranged symmetrically with the X-center line 9 as the axis of symmetry.

[0072] In addition, the first adjustment part 31 and the third adjustment part 33 on the X bracket 13 can also be arranged symmetrically with the X center line 9 as the axis of symmetry.

[0073] Each adjustment part 31 to 34 has a rectangular shape, for example, they are all the same shape and size. For example, each adjustment platform 31b to 34b supporting each adjustment plate 31a to 34a is a similar shape, one size larger than each adjustment plate 31a to 34a. The angles 31c to 34c of each adjustment plate 31a to 34a closest to the worktable 11 are located on an imaginary circle 36 centered on the rotation center O1 of the worktable 11. Furthermore, the angles 31d to 34d of each adjustment platform 31b to 34b closest to the worktable 11 are located on an imaginary circle 35 with a smaller diameter than the imaginary circle 36 centered on the rotation center O1 of the worktable 11. Here, considering the miniaturization of the X-bracket 13 which includes the worktable 11 and the adjustment parts 31 to 34, the imaginary circles 35 and 36 are circles used to define the positions of the adjustment parts 31 to 34 on the worktable 11. Imaginary circles 35 and 36 are circles with a larger diameter than the worktable 11 centered on the rotation center O1. The size of imaginary circles 35 and 36 can be set considering, for example, whether they are less likely to be affected by cutting water.

[0074] Furthermore, considering that sometimes components such as cutting frames with a larger diameter than the worktable 11 may be located on the worktable 11, the sizes of the imaginary circles 35 and 36 can be set so that the components will not interfere with the adjustment parts 31 to 34 when the worktable is rotated.

[0075] Furthermore, among the adjustment plates 31a to 34a, the nearest angles 31c to 34c may not be located on the imaginary circle 36, and among the adjustment platforms 31b to 34b, the nearest angles 31d to 34d may not be located on the imaginary circle 35. Additionally, for example, the angles 31c to 34c of each adjustment plate 31a to 34a may not be located on the imaginary circle 36 outside the imaginary circle 35.

[0076] These adjustment sections 31-34 are arranged on one end side 38, bounded by the Y-center line 6 extending in the Y-axis direction through the rotation center O1 of the worktable 11, where the blades 12a and 12b are located. On the opposite side of one end side 38 in the worktable 11 is the supply side 37 for supplying cutting water to the wafer. Cutting water is ejected from nozzles arranged on the supply side 37 and flows towards one end side 38. The adjustment sections 31-34 are positioned where they are less likely to be affected by the cutting water used to cut the wafer.

[0077] The first adjustment part 31 and the third adjustment part 33 on the right side of the figure are used to adjust the first blade 12a, and the second adjustment part 32 and the fourth adjustment part 34 on the left side of the figure are used to adjust the second blade 12b.

[0078] Here, as long as the adjusting plates 31a and 32a in the first adjusting part 31 and the second adjusting part 32 use a first-coarse whetstone for sharpening, and the adjusting plates 33a and 34a in the third adjusting part 33 and the fourth adjusting part 34 use a second-coarse whetstone for shaping, it will be the same as in the first embodiment. In the first embodiment, the adjusting plates 31a and 32a are provided with a whetstone of the same coarseness suitable for sharpening, and the adjusting plates 33a and 34a are provided with a whetstone of the same coarseness suitable for shaping.

[0079] In addition, in the first adjustment section 31 and the second adjustment section 32, the adjustment plates 31a and 32a can also use a shaping whetstone, and in the third adjustment section 33 and the fourth adjustment section 34, the adjustment plates 33a and 34a can also use a sharpening whetstone.

[0080] When the first adjustment unit 31 adjusts the first blade 12a and the second adjustment unit 32 adjusts the second blade 12b, the control unit 16 moves the blades 12a and 12b to the adjustment starting point on the adjustment plates 31a and 32a, and activates the X-axis bracket 13, the Y-axis moving parts 14a and 14b, and the Z-axis moving parts 15a and 15b. Then, the control unit 16 can rotate each blade 12a and 12b and move the X-axis bracket 13 in a single direction while each blade 12a and 12b is in contact with the adjustment plates 31a and 32a, thereby sharpening. Alternatively, the blades 12a and 12b can move in directions of approach and separation, i.e., in the Y-axis direction, thereby shaping. Therefore, the efficiency of adjusting the blades 12a and 12b can be improved.

[0081] (Examples of variations of the initial and intermediate sharpening sections) In other variations, the first adjustment section 31 and the second adjustment section 32 can be used as either the initial sharpening section or the intermediate sharpening section, and the third adjustment section 33 and the fourth adjustment section 34 can be used as the other. Here, the first adjustment section 31 and the second adjustment section 32 are the initial sharpening sections, and the third adjustment section 33 and the fourth adjustment section 34 are the intermediate sharpening sections. The adjustment plate used in the initial sharpening section is, for example, a first-coarseness grinding stone, and the adjustment plate used in the intermediate sharpening section is, for example, a second-coarseness grinding stone. The second-coarseness grinding stone is a finer grinding stone than the first-coarseness grinding stone. Of course, the first adjustment section 31 and the second adjustment section 32 can also be the intermediate sharpening section, and the third adjustment section 33 and the fourth adjustment section 34 can also be the initial sharpening section. In addition, the adjustment section that performs the function of the initial sharpening section can also use a pre-cut wafer as the adjustment plate.

[0082] The initial sharpening section is an adjustment section used to adjust the outer peripheral surface when using a new blade. It is also used to adjust the outer peripheral surface to suppress surface deflection caused by blade eccentricity. The intermediate sharpening section is an adjustment section used for sharpening during use. Therefore, the adjustment plate used in the initial sharpening section is a coarser grinding stone than the adjustment plate used in the intermediate sharpening section. According to this variation, both blades 12a and 12b can be initially sharpened simultaneously, and both blades 12a and 12b can be intermediately sharpened simultaneously. This improves the adjustment efficiency of blades 12a and 12b.

[0083] Furthermore, the two adjusting plates used in the intermediate sharpening section can be finer and of different grit than those used in the initial sharpening section. In this case, when sharpening with the intermediate sharpening section depending on the condition of each blade 12a and 12b, a suitable adjusting plate can be selected from the two, and sharpening is performed using the selected adjusting plate. In this example, the two adjusting plates functioning as the intermediate sharpening section sometimes sharpen the first blade 12a, and sometimes sharpen the second blade 12b. According to this example, a more suitable adjusting plate can be used to sharpen each blade 12a and 12b.

[0084] (All variations of the sharp point) In a further variation, all of the adjustment parts 31 to 34 can be made into sharpening parts. In this case, the adjustment plates 31a to 34a can use all grinding stones of the same coarseness or all grinding stones of different coarseness.

[0085] (The case where all the adjustment plates have the same thickness) When the roughness of the adjusting plates 31a to 34a in adjusting sections 31 to 34 is all the same, the first blade 12a is first sharpened by the adjusting plate 31a of the first adjusting section 31, and at the same time, the second blade 12b is first sharpened by the adjusting plate 32a of the second adjusting section 32. Then, when the adjusting plates 31a and 32a reach their replacement time, the first blade 12a is then sharpened by the adjusting plate 33a of the third adjusting section 33, and at the same time, the second blade 12b is then sharpened by the adjusting plate 34a of the fourth adjusting section 34. During this period, the adjusting plates 31a of the first adjusting section 31 and 32a of the second adjusting section 32 can be replaced with new ones.

[0086] Alternatively, the process can be reversed: the first blade 12a is first sharpened by the adjusting plate 33a of the third adjusting section 33, while simultaneously, the second blade 12b is first sharpened by the adjusting plate 34a of the fourth adjusting section 34. Then, when the adjusting plates 33a and 34a reach their replacement time, the first blade 12a is sharpened again by the adjusting plate 31a of the first adjusting section 31, while simultaneously, the second blade 12b is sharpened again by the adjusting plate 32a of the second adjusting section 32. During this period, the adjusting plates 33a of the third adjusting section 33 and 34a of the fourth adjusting section 34 can be replaced with new ones.

[0087] (The case where the thickness of all the adjustment plates is different) When the thicknesses of the adjustment plates 31a to 34a in the adjustment sections 31 to 34 are all different, the following actions will be performed.

[0088] In the X-bracket 13, the first adjustment part 31 and the second adjustment part 32 are positioned differently from the third adjustment part 33 and the fourth adjustment part 34 in the X-axis direction. Therefore, unless it is a combination of the first adjustment part 31 and the second adjustment part 32 or a combination of the third adjustment part 33 and the fourth adjustment part 34, it is impossible to simultaneously sharpen the first blade 12a and the second blade 12b. In other words, combinations of the first adjustment part 31 and the third adjustment part 33, combinations of the second adjustment part 32 and the fourth adjustment part 34, combinations of the first adjustment part 31 and the fourth adjustment part 34, and combinations of the second adjustment part 32 and the third adjustment part 33 all prevent the simultaneous sharpening of the first blade 12a and the second blade 12b.

[0089] For example, the adjustment part suitable for adjusting a blade with its outer peripheral side in a first state is assumed to be a first adjustment part 31, and the adjustment part suitable for adjusting a blade with its outer peripheral side in a second state is assumed to be a second adjustment part 32. Furthermore, the adjustment part suitable for adjusting a blade with its outer peripheral side in a third state is assumed to be a third adjustment part 33, and the adjustment part suitable for adjusting a blade with its outer peripheral side in a fourth state is assumed to be a fourth adjustment part 34.

[0090] In this situation, if the outer peripheral side of the first blade 12a is in the first state, the first blade 12a is sharpened by the first adjustment part 31. At this time, if the outer peripheral side of the second blade 12b is in the second state, the second blade 12b and the first blade 12a can be sharpened simultaneously.

[0091] When the outer peripheral surface of the second blade 12b is in a state other than the second state (any of the first, third, or fourth states), it is preferable not to sharpen it simultaneously. The reason is that it is impossible to select an adjustment section that best suits the state of the outer peripheral surface of the second blade 12b. Sharpening with an adjustment plate that is not best suited will lead to premature wear and deterioration of the adjustment plate. When both the second blade 12b and the first blade 12a are in the first state, the second blade 12b can be sharpened using the first adjustment section 31 after the first blade 12a has been sharpened. Furthermore, when the second blade 12b is in the third or fourth state, it can be sharpened using the third adjustment section 33 or the fourth adjustment section 34 after the first blade 12a has been sharpened. Therefore, by sharpening with an adjustment section that best suits the blade's state, wear and deterioration of the adjustment plate can be suppressed, reducing the frequency of adjustment plate replacement.

[0092] Of course, even if it is not possible to select the adjustment section that is most suitable for sharpening the second blade 12b, the adjustment efficiency of the blades can be improved as long as the first blade 12a and the second blade 12b are sharpened simultaneously. For example, although the sharpening of the second adjustment section 32 is not the most suitable for the second blade 12b, the second adjustment section 32 can still sharpen the second blade 12b in order to prioritize improving the adjustment efficiency.

[0093] ( Figure 18 Examples ( Figure 17 (variant example) Figure 18 In this example, the first adjustment part 31 and the second adjustment part 32 are located near the Y-center line 6. The third adjustment part 33 and the fourth adjustment part 34 are located closer to one end 38 than the first adjustment part 31 and the second adjustment part 32, specifically, they are located inside the first adjustment part 31 and the second adjustment part 32 in the Y-axis direction (the position of the third adjustment part 33 and the fourth adjustment part 34 relative to...). Figure 17 (The positions shown have not changed). The first adjustment section 31 and the third adjustment section 33 on the X-bracket 13 are arranged symmetrically with the second adjustment section 32 and the fourth adjustment section 34, with the X-center line 9 as the axis of symmetry. Among them, Figure 17 and Figure 18 In the X-bracket 13, the first adjustment part 31 and the third adjustment part 33, the second adjustment part 32 and the fourth adjustment part 34 may also be arranged symmetrically on the left and right sides without taking the X-center line 9 as the axis of symmetry.

[0094] Each adjustment part 31 to 34 has a rectangular shape, for example, they are all the same shape and size. For example, each adjustment platform 31b to 34b supporting each adjustment plate 31a to 34a is a similar shape, one size larger than each adjustment plate 31a to 34a. The angles 31c to 34c of each adjustment plate 31a to 34a closest to the worktable 11 are located on the imaginary circle 36. In addition, the angles 31d to 34d of each adjustment platform 31b to 34b closest to the worktable 11 are located on the imaginary circle 35, which is smaller than the diameter of the imaginary circle 36 centered on the rotation center O1 of the worktable 11. The edges 31e and 32e of the adjustment platforms 31b and 32b in the first adjustment part 31 and the second adjustment part 32 that are close to the Y-center line 6 are located on the Y-center line 6. The edges 31f and 32f of the adjustment plates 31a and 31b that are close to the Y-center line 6 may also be located on the Y-center line 6.

[0095] Furthermore, among the adjustment plates 31a to 34a, the nearest angles 31c to 34c may not be located on the imaginary circle 35, and among the adjustment platforms 31b to 34b, the nearest angles 31d to 34d may not be located on the imaginary circle 36. Additionally, for example, the angles 31c to 34c of each adjustment plate 31a to 34a may not be located on the imaginary circle 36 outside the imaginary circle 35.

[0096] The above configuration can still be used as in the first embodiment, with the first adjustment part 31 and the second adjustment part 32 serving as sharpening parts, and the third adjustment part 33 and the fourth adjustment part 34 serving as shaping parts. Alternatively, the configuration can be reversed, with the first adjustment part 31 and the second adjustment part 32 serving as shaping parts, and the third adjustment part 33 and the fourth adjustment part 34 serving as sharpening parts. This approach can be adopted in conjunction with... Figure 17 The same action in the same situation.

[0097] Alternatively, the first adjusting part 31 and the second adjusting part 32 can be used as initial sharpening parts, and the third adjusting part 33 and the fourth adjusting part 34 can be used as intermediate sharpening parts. It is also possible to reverse this, using the first adjusting part 31 and the second adjusting part 32 as intermediate sharpening parts, and the third adjusting part 33 and the fourth adjusting part 34 as initial sharpening parts. This configuration can be used in conjunction with... Figure 17 The same action in the same situation.

[0098] Furthermore, it is possible to set the roughness of all adjustment plates 31a to 34a to be the same, or it is possible to set the roughness of all adjustment plates 31a to 34a to be different. This can be achieved using... Figure 17 The same action in the same situation.

[0099] ( Figure 19 (Example) Figure 19In this example, adjustment parts 31 to 34 are arranged in a row along the Y-axis. Specifically, adjustment parts 31 to 34 are positioned on one end side 38, more specifically, at a position in the X-axis direction that does not overlap with the worktable 11. Adjustment parts 31 to 34 are arranged side-by-side in a straight line along the Y-axis centerline 5 extending in the Y-axis direction. The third adjustment part 33 and the fourth adjustment part 34 are located inside the first adjustment part 31 and the second adjustment part 32 in the Y-axis direction. The first adjustment part 31 and the third adjustment part 33 on the X-bracket 13 are arranged symmetrically with the second adjustment part 32 and the fourth adjustment part 34 about the X-centerline 9 as the axis of symmetry.

[0100] Each adjustment part 31 to 34 has a rectangular shape, for example, they are all the same shape and size. For example, each adjustment platform 31b to 34b supporting each adjustment plate 31a to 34a is a similar shape, one size larger than each adjustment plate 31a to 34a. For example, the angles 33c and 34c of the third adjustment plate 33a and the fourth adjustment plate 34a that are closest to the worktable 11 can also be located on the imaginary circle 36. In addition, the angles 33d and 34d of the adjustment platforms 33b and 34b that are closest to the worktable 11 can also be located on the imaginary circle 35.

[0101] Furthermore, considering that sometimes components such as cutting frames with a larger diameter than the worktable 11 may be located on the worktable 11, the sizes of the imaginary circles 35 and 36 can be set so that the components will not interfere with the adjustment parts 31 to 34 when the worktable is rotated.

[0102] The above configuration can still be used as in the first embodiment, where the first adjustment part 31 and the second adjustment part 32 are used as sharpening parts, and the third adjustment part 33 and the fourth adjustment part 34 are used as shaping parts. Alternatively, the configuration can be reversed, with the first adjustment part 31 and the second adjustment part 32 used as shaping parts, and the third adjustment part 33 and the fourth adjustment part 34 used as sharpening parts.

[0103] Furthermore, since the adjustment parts 31 to 34 are arranged in a row along the Y-axis, the first adjustment part 31 and the third adjustment part 33 can be used as sharpening parts, and the second adjustment part 32 and the fourth adjustment part 34 can be used as shaping parts. Alternatively, the first adjustment part 31 and the third adjustment part 33 can also be used as shaping parts, and the second adjustment part 32 and the fourth adjustment part 34 can be used as sharpening parts. Furthermore, the first blade 12a and the second blade 12b can be sharpened or shaped simultaneously. In this way, the efficiency of adjusting the blades 12a and 12b can be improved.

[0104] Alternatively, the first adjustment part 31 and the second adjustment part 32 can be used as initial sharpening parts, and the third adjustment part 33 and the fourth adjustment part 34 can be used as intermediate sharpening parts. It is also possible to reverse this, using the first adjustment part 31 and the second adjustment part 32 as intermediate sharpening parts, and the third adjustment part 33 and the fourth adjustment part 34 as initial sharpening parts.

[0105] Furthermore, since the adjustment parts 31 to 34 are arranged in a row along the Y-axis, the first adjustment part 31 and the third adjustment part 33 can be used as initial sharpening parts, and the second adjustment part 32 and the fourth adjustment part 34 can be used as intermediate sharpening parts. Alternatively, the order can be reversed, with the first adjustment part 31 and the third adjustment part 33 used as intermediate sharpening parts, and the second adjustment part 32 and the fourth adjustment part 34 used as initial sharpening parts. Furthermore, initial sharpening or intermediate sharpening can be performed simultaneously on the first blade 12a and the second blade 12b. In this way, the efficiency of adjusting the blades 12a and 12b can be improved.

[0106] In addition, it is possible to set the thickness of all adjustment plates 31a to 34a to be the same, or to set the thickness of all adjustment plates 31a to 34a to be different. When the adjustment plates 31a to 34a in adjustment sections 31 to 34 all have the same roughness, the first blade 12a can be sharpened by any one of the adjustment sections 31 to 34. Simultaneously, the second blade 12b can be sharpened by any of the adjustment sections 31 to 34 other than the one used for the first blade 12a. Therefore, since the adjustment sections 31 to 34 are arranged in a row in the Y-axis direction, blades 12a and 12b can be sharpened simultaneously. Furthermore, when the adjustment plate is due for replacement, other adjustment sections can be used to sharpen both the first blade 12a and the second blade 12b.

[0107] When the thickness of adjustment plates 31a to 34a is set to be all different, the following actions will be performed. In the X-bracket 13, the adjustment parts 31 to 34 are arranged in a row along the Y-axis. Therefore, the first blade 12a and the second blade 12b can be sharpened simultaneously using different adjustment parts. When the first blade 12a and the second blade 12b are in the same state, the blade on one side can be sharpened by the most suitable adjustment part. At this time, since the most suitable adjustment part is in use, the blade on the other side does not need to be sharpened, or it can be sharpened by the second most suitable adjustment part.

[0108] For example, let's assume the state of the outer peripheral surfaces of the first blade 12a and the second blade 12b is a first state, and let's assume the adjustment part most suitable for the first state is a first adjustment part 31. In this case, the first blade 12a is sharpened by the first adjustment part 31. At this time, if the second blade 12b is in the first state, it is not sharpened because the first adjustment part 31 is in use. Alternatively, a second suitable adjustment part can be selected, and the selected adjustment part can be used for sharpening. Furthermore, if the first blade 12a is in the first state and the second blade 12b is in the second state, the first blade 12a can be sharpened by the first adjustment part 31 while the second blade 12b is sharpened by the second adjustment part 32.

[0109] Therefore, by sharpening the blade at the adjustment section that best suits its condition, wear on the adjustment plate can be suppressed. Furthermore, by sharpening the first blade 12a and the second blade 12b simultaneously, the blade adjustment efficiency can be improved.

[0110] in addition, Figure 19 In the example, the three adjusting sections 31 to 34 can also be configured to use adjusting plates of the same roughness. This configuration can also allow for the use of the most suitable adjusting section for only one blade, while other blades are not sharpened if no most suitable adjusting section is available. Alternatively, any adjusting section can be selected from the three adjusting sections of the same roughness, and then sharpened using the selected adjusting section.

[0111] Figure 19 In the X-bracket 13, the first adjustment part 31 and the third adjustment part 33, the second adjustment part 32 and the fourth adjustment part 34 may also be arranged symmetrically on the left and right sides without taking the X-center line 9 as the axis of symmetry.

[0112] Furthermore, the scope of the present invention is not limited to these embodiments; the inventions described in the claims and their equivalents are all within the scope of the present invention. (appendix) The following describes other technical ideas that can be understood from the above embodiments and modifications.

[0113] The grinding plate in Patent Document 1 forms radial cutting marks when subjected to repeated flat grinding. As the cutting mark area increases and the non-cutting mark area decreases, making flat grinding difficult, the grinding plate must be replaced. Even after replacement, a portion of the non-cutting mark area remains suitable for flat grinding. Therefore, there is a current expectation for more efficient use of the grinding plate. The invention described in the following appendix effectively utilizes a shaping plate.

[0114] (Appendix 1) A grinding apparatus comprising a worktable, cutting blades, an annular shaping plate, a shaping rotary unit, a Y-axis moving unit, and a control unit. The aforementioned worktable holds the wafer. The aforementioned blade cuts the aforementioned wafer by being driven to rotate by a spindle. The aforementioned annular shaping plate grinds the outer circumferential surface of the aforementioned cutting tool and is rotatably positioned at a different location from the aforementioned worktable. The aforementioned shaping rotating part rotates the aforementioned shaping plate. The aforementioned Y-axis moving part causes the aforementioned blade to move in the radial direction of the aforementioned shaping plate. The aforementioned control unit controls the aforementioned shaping rotation unit and the aforementioned Y-axis movement unit. During the shaping process, the control unit rotates the shaping plate and the blade simultaneously, while also moving the blade in the radial direction of the shaping plate.

[0115] (Appendix 2) The grinding apparatus as described in Appendix 1, wherein... The aforementioned blade is the first blade. The aforementioned spindle is the first spindle. The aforementioned shaping plate is the first shaping plate. The aforementioned shaping rotating part is the first shaping rotating part. The aforementioned Y-axis moving part is the first Y-axis moving part. The aforementioned grinding apparatus further includes a second cutting blade, an annular second shaping plate, a second shaping rotating part, and a second Y-axis moving part. The second blade cuts the wafer by rotating as driven by the second spindle. The aforementioned annular second shaping plate grinds the outer peripheral surface of the aforementioned second cutting tool and is rotatably positioned at a different location from the aforementioned worktable. The second shaping rotating part rotates the second blade. The aforementioned second Y-axis moving part causes the aforementioned second main shaft to move in the radial direction of the aforementioned second shaping plate. During the shaping of the first blade, the control unit rotates the second blade while rotating the second shaping plate, and simultaneously moves the second blade in the radial direction of the second shaping plate.

[0116] (Appendix 3) The grinding apparatus as described in Appendix 1, wherein... The aforementioned blade is the first blade. The aforementioned spindle is the first spindle. The aforementioned Y-axis moving part is the first Y-axis moving part. The aforementioned grinding apparatus further includes a second cutting tool and a second Y-axis moving part. The second blade cuts the wafer by rotating as driven by the second spindle. The aforementioned second Y-axis moving part causes the aforementioned second blade to move in the radial direction of the aforementioned shaping plate. The aforementioned shaping plate is a plate disposed between the first blade and the second blade. During the shaping of the first blade, the control unit rotates the shaping plate and the second blade simultaneously, causing the first blade and the second blade to move toward each other and toward separation along the radial direction of the shaping plate.

[0117] (Appendix 4) The grinding apparatus as described in Appendix 3, wherein... The first blade and the second blade contact the upper surface formed by the flat surface of the shaping plate. The control unit causes the shaping plate to rotate half a turn for every distance the thickness of the first and second blades moves.

[0118] (Appendix 5) The grinding apparatus as described in Appendix 3, wherein... The upper surface of the aforementioned shaping plate has a first annular region and a second annular region of different heights. The first blade is in contact with the first annular region, and the second blade is in contact with the second annular region.

[0119] (Appendix 6) A plastic surgery method, While rotating the annular shaping plate on the outer periphery of the grinding blade, the blade for cutting the wafer is rotated, and the blade is moved in the radial direction of the shaping plate. Explanation of reference numerals in the attached figures

[0120] 11…Worktable, 12a, 12b…Insert blades, 12c, 12d…Spindle, 13…X-axis bracket, 14a, 14b…Y-axis moving part, 15a, 15b…Z-axis moving part, 17a, 17b…Sharpening part, 17c, 17d…Sharpening plate, 17e, 17f…Sharpening table, 17g, 17h…Sharpening marks, 18a, 18b…Shaping part, 18c, 18d…Shaping plate, 18e, 18f…Shaping table, 18g, 18h…Shaping drive part, 19a, 19b…Shaping marks, 21…Shaping part 21a…Shaping plate, 21b…Shaping table, 21c…Shaping drive unit, 22a, 22b…Areas, 23…X-axis moving part, 24a, 24b…Shaping marks, 25…Top surface, 26a…First annular area, 26b…Second annular area, 31~34…Adjustment part, 31a~34a…Adjustment plate, 31a~34a…Adjustment table, 31b~34b…Adjustment table, 31c~34c…Angle, 31d~34d…Angle, 35…Imaginary circle, 36…Imaginary circle, 37…Supply side, 38…One end side

Claims

1. A grinding apparatus, comprising: Workbench, holding the wafer; One or more blades cut the aforementioned wafer by being driven to rotate by a spindle; Three or more adjustment sections, each having an area for adjusting the aforementioned blades; and The moving part causes the adjusting part to move relative to the blade.

2. The grinding apparatus according to claim 1, wherein, The aforementioned moving part includes an X-axis moving part and a Y-axis moving part. The aforementioned X-axis moving part is equipped with the aforementioned worktable and the aforementioned adjustment part, and the aforementioned X-axis moving part is capable of moving in the X-axis direction. The aforementioned Y-axis moving part enables the aforementioned blade to move in the Y-axis direction.

3. The grinding apparatus according to claim 2, wherein, The aforementioned three or more adjustment parts include a first adjustment part, a second adjustment part, and a pair of third and fourth adjustment parts. The first adjustment part and the second adjustment part are arranged in the Y-axis direction. The aforementioned pair of third and fourth adjustment parts are arranged along the Y-axis at positions different from those of the first and second adjustment parts in the X-axis direction, and are located on the inner side closer to the Y-axis direction than the first and second adjustment parts.

4. The grinding apparatus according to claim 2, wherein, The three or more adjustment parts mentioned above are arranged in a row along the Y-axis.

5. The grinding apparatus according to claim 4, wherein, The aforementioned three or more adjustment sections are positioned on one end side closer to the center of the worktable. The aforementioned end side is the opposite side to the side that supplies cutting water to the aforementioned wafer.

6. The grinding apparatus according to any one of claims 1 to 5, wherein, The aforementioned adjustment section is a sharpening section used to sharpen the aforementioned blade. The aforementioned sharpening section includes a first sharpening section and a second sharpening section. The aforementioned first trimmed portion has a region with a first thickness. The aforementioned second trimmed portion has a region with a second thickness that is smaller than the aforementioned first thickness.

7. The grinding apparatus according to any one of claims 1 to 5, wherein, All three or more of the aforementioned adjustment parts are sharpening parts used to sharpen the aforementioned blades. The aforementioned trimmed parts are either all of the same thickness or all of different thicknesses.

8. The grinding apparatus according to any one of claims 1 to 5, wherein, The aforementioned adjustment section includes a sharpening section and a shaping section. The aforementioned sharpening section sharpens the aforementioned blade. The aforementioned shaping section shapes the aforementioned blade.

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