Substrate storage container and sealing member

Abstract

The present application relates to a kind of substrate storage container (1), with annular or frame-shaped sealing member (30) being arranged between container body (10) and cover (20), sealing member (30) has: frame (31), is installed in the mounting groove (21) of the U-shaped section of being provided in cover (20);And sealing lip (32), from frame (31) extends to outside and forms sealing area;Frame (31) includes with the first fitting rib (311) of the container body (10) side fitting of mounting groove (21) and with the second fitting rib (312) of the cover (20) side fitting of mounting groove (21), sealing member (30) includes support rib (313) in the cover side of mounting groove (21), the section of support rib (313) is larger than the section of second fitting rib (312) C-shaped section, the end surface of support rib (313) in the inside of mounting groove (21) relative to the plane of the opening end of constituting mounting groove (21), in the range of the outside 3mm of this plane to the inside 1mm within.The sealing property to internal pressure can be improved by this.

Description

Technical Field

[0001] This invention relates to a substrate storage container and a sealing component capable of storing substrates. Background Technology

[0002] The substrate storage container includes: a container body capable of storing a substrate; a lid that closes the opening of the container body; and an annular sealing member (gasket, washer) disposed between the container body and the lid, wherein the substrate storage container is capable of storing the substrate in an airtight state.

[0003] As such sealing members, there are known sealing members that are formed such that the sealing lip forms an approximately acute angle between its extension line and the sealing surface, sealing members that are in contact with the sealing surface and bend outward toward the outside of the substrate receiving container, and sealing members that bend toward the outside of the opening front (for example, see Patent Document 1 and Patent Document 2).

[0004] When the inside of the substrate storage container is under negative pressure (in other words, when the external pressure is high), these sealing components exhibit good sealing performance because the sealing lip deforms in the direction of pressing against the sealing surface of the container body.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-092229

[0006] Patent Document 2: Japanese Patent Application Publication No. 2017-103418

[0007] However, when a purge gas such as an inactive gas is supplied to the inside of the substrate storage container, that is, when the inside of the substrate storage container is under positive pressure, the sealing lip will deform in the direction of peeling off from the sealing surface, and thus the sealing performance may sometimes be reduced.

[0008] Furthermore, in the cleanliness evaluation of substrate storage containers, pure water or acidic solutions are sometimes sealed inside the substrate storage container and stirred. At this time, because liquid pressure is applied to the sealing member from the inside of the substrate storage container to the outside, the sealing lip will deform in the direction of peeling off from the sealing surface, and the internal liquid may sometimes leak out. Summary of the Invention

[0009] Therefore, the present invention was made in view of the above-mentioned problems, and its object is to provide a substrate storage container and sealing member that improve the sealing performance against internal pressure.

[0010] (1) One embodiment of the present invention is a substrate storage container, comprising: a container body capable of storing a substrate; a cover body for closing the opening of the container body; and an annular sealing member disposed between the container body and the cover body; the sealing member having: a frame body installed in a U-shaped mounting groove provided in the cover body; and a sealing lip extending outward from the frame body to form a sealing area; the frame body comprising: a first fitting rib fitting into the container body side of the mounting groove provided in the cover body; a second fitting rib fitting into the cover side of the mounting groove; and a support rib fitting into the cover side of the mounting groove, and having a C-shaped cross-section larger than that of the second fitting rib; the end face of the support rib on the inner side of the mounting groove is located within a range of 3 mm outside to 1 mm inside the plane constituting the opening end of the mounting groove.

[0011] (2) In the above (1) state, the thickness of the frame outside the opening end of the mounting groove is less than 75% of the thickness of the frame inside the opening end of the mounting groove, and a space is formed between the frame and the cover.

[0012] (3) In the above (1) or (2) state, the sealing member may include at least one first fitting rib and at least two second fitting ribs in any cross section of the entire circumference; the support rib is formed in more than 80% of the entire circumference of the sealing member.

[0013] (4) In the above (3) state, the sealing member can also be a rectangular frame; the support ribs are missing at the four corners.

[0014] (5) Another aspect of the present invention is an annular sealing member disposed between the container body and the lid of a substrate storage container, the sealing member having: a frame body mounted in a U-shaped mounting groove provided in the lid body; and a sealing lip extending outward from the frame body to form a sealing area; the frame body includes a first fitting rib on one side, a second fitting rib on the other side, and a support rib on the other side, the support rib having a C-shaped cross-section larger than that of the second fitting rib; the support rib is formed such that its end face on the inner side of the mounting groove is located within a range of 3 mm outside to 1 mm inside the plane constituting the opening end of the mounting groove.

[0015] According to the present invention, a substrate storage container and a sealing member that improve the sealing performance against internal pressure can be provided. Attached Figure Description

[0016] Figure 1 This is an exploded perspective view of a substrate storage container according to an embodiment of the present invention.

[0017] Figure 2A This is a top view showing the sealing member according to an embodiment of the present invention.

[0018] Figure 2B This is a top view showing an enlarged view of the edge of the sealing member according to an embodiment of the present invention.

[0019] Figure 2C This is a cross-sectional view showing an enlarged view of the edge of the sealing member according to an embodiment of the present invention.

[0020] Figure 2D This is a side view showing an enlarged view of the corner of the sealing member according to an embodiment of the present invention.

[0021] Figure 2E This is a top view showing an enlarged view of the corner of the sealing member according to an embodiment of the present invention.

[0022] Figure 2F This is a perspective view showing an enlarged view of the corner of the sealing member according to an embodiment of the present invention.

[0023] Figure 3 This is an enlarged cross-sectional view showing the sealed state between the cover and the container body, on which the sealing member of the embodiment of the present invention is installed.

[0024] Figure 4 It is a magnified cross-sectional view showing the sealed state of the cover with conventional sealing components and the container body. Detailed Implementation

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, throughout the embodiments described herein, the same reference numerals are used to refer to the same components.

[0026] Figure 1 This is an exploded perspective view of the substrate storage container 1 according to an embodiment of the present invention.

[0027] like Figure 1 As shown, the substrate storage container 1 includes a container body 10 for storing substrates, a cover 20 for closing the opening 11 of the container body 10, and an annular sealing member 30 disposed between the container body 10 and the cover 20.

[0028] The container body 10 is a box-shaped body capable of inserting multiple substrates, and is a front-opening type with a frame-shaped opening 11 formed on the front side. The opening 11 is formed by a step and bends outward in a manner that expands outward, and the surface of the step is formed on the inner periphery of the front side of the opening 11 as a sealing surface 12 that contacts the sealing member 30. In addition, the container body 10 of the embodiment is a front-opening type, but it can also be a bottom-opening type with the opening 11 formed on the lower surface.

[0029] Support bodies 13 are arranged on the left and right sides inside the container body 10. The support bodies 13 have the function of supporting and positioning the substrate. Multiple grooves are formed in the support body 13 along the height direction to form so-called slots. Moreover, the substrate is placed on the left and right slots of the same height. The material of the support body 13 can be the same as the material of the container body 10, but different materials can be used to improve cleaning and sliding properties.

[0030] Furthermore, a rear retainer (not shown) is disposed inside the container body 10 at the rear (inner side). When the opening of the opening 11 of the container body 10 is closed by the cover 20, the rear retainer and the front retainer (described later) hold the substrate in pair. These supports 13 and the rear retainer are disposed in the container body 10 by means of insert molding, fitting, etc.

[0031] The substrate is supported by the support body 13 and housed in the container body 10. In addition, as an example of a substrate, silicon wafers with a diameter of 300 mm and 450 mm can be cited, but there is no particular limitation. For example, quartz wafers, gallium arsenide wafers, etc. can also be used.

[0032] A robotic flange 14 is detachably mounted on the top center of the container body 10. In a clean state, the substrate storage container 1, which holds the substrate, is held by the robotic flange 14 by a transfer robot in the factory and transported to the processing device for each step of the substrate processing.

[0033] Furthermore, manual handles 15 for operators to hold are detachably installed on the center of the outer surface of both sides of the container body 10.

[0034] Furthermore, a gas supply valve 18 and a gas exhaust valve 19 are provided on the bottom surface of the container body 10, which function as both gas filters and check valves. Regarding the gas supply valve 18 and the gas exhaust valve 19, inert gases such as nitrogen and dry air are supplied from the gas supply valve 18 to the interior of the sealed substrate storage container 1, which is closed by the cover 20, and discharged from the gas exhaust valve 19 as needed. This displaces the internal gas of the substrate storage container 1 or maintains an airtight state. The number and location of the gas supply valve 18 and the gas exhaust valve 19 are not limited to those shown in the figures.

[0035] The internal gas replacement is performed to disperse impurities on the stored substrates, reduce internal humidity, and maintain the cleanliness of the substrate storage container 1 during transport. Furthermore, when the internal gas is replaced and the cover 20 is installed on and closed to the container body 10, the interior of the substrate storage container 1 is under positive pressure. Conversely, when the cover 20 is removed from the container body 10, the interior of the substrate storage container 1 sometimes becomes under negative pressure.

[0036] Next, the lid 20 is a generally rectangular object mounted on the front of the opening 11 of the container body 10. The lid 20 has a locking mechanism (not shown) that is locked by locking claws engaging locking holes (not shown) formed in the container body 10. Furthermore, a front retainer (not shown) that keeps the front periphery of the substrate horizontal and is flexible is detachably mounted or integrally formed at the center of the lid 20.

[0037] Like the slots and substrate holding portion of the support 13, the front retainer is a part that directly contacts the substrate, therefore a material with good cleanability and sliding properties is used. The front retainer can also be installed on the cover 20 by means of insert molding or fitting.

[0038] Furthermore, a mounting groove 21 for mounting the sealing member 30 is formed on the surface of the lid 20 on the side of the container body 10 (see reference). Figure 1 More specifically, on the surface of the lid 20 on the side of the container body 10, a protrusion 22 with a smaller step than the opening 11 is formed in an annular manner, thereby forming a mounting groove 21 with a generally U-shaped cross-section in an annular manner (see reference). Figure 3 When the cover 20 is installed on the container body 10, the protrusion 22 enters into the interior through the step of the opening 11.

[0039] Materials used for the container body 10 and the lid 20 include, for example, thermoplastic resins such as polycarbonate, cyclic olefin polymers, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymers. These thermoplastic resins may be further appropriately supplemented with conductive agents composed of conductive carbon, conductive fibers, metal fibers, conductive polymers, etc., various antistatic agents, ultraviolet absorbers, etc.

[0040] Next, the sealing member 30 will be described.

[0041] Figures 2A to 2F The sealing member 30, representing an embodiment of the present invention, Figure 2A It is a top view. Figure 2B This is a top view of the 30L side section. Figure 2C This is a sectional view of the 30L side. Figure 2D This is a side view of corner 30C. Figure 2E This is a top view of corner 30C. Figure 2F This is a 3D view of the corner 30C. Figure 3 It is a cross-sectional view showing the sealed state between the cover 20, on which the sealing member 30 of the embodiment is installed, and the container body 10.

[0042] like Figure 1As shown, the sealing member 30 is disposed between the sealing surface 12 of the container body 10 and the cover 20. When the cover 20 is installed on the container body 10, the sealing member 30 is in close contact with the sealing surface 12 and the cover 20 to ensure the airtightness of the substrate storage container 1, reduce the intrusion of dust, moisture, etc. from the outside into the substrate storage container 1, and reduce the leakage of gas and liquid from the inside to the outside (see also...). Figure 3 Additionally, the sealing component 30 is sometimes referred to as a gasket in FOUP (Front Opening Unified Pod) applications and sometimes as a washer in FOSB (Front Opening Shipping Box) applications.

[0043] The sealing member 30 is an annular member that corresponds to the front shape of the cover 20 (and the shape of the opening 11 of the container body 10). In this embodiment, it is a roughly rectangular frame-shaped member composed of four sides (straight sections) 30L and four corner sections 30C (see reference). Figure 2A However, the annular sealing member 30, before being installed onto the cover 20, can also be approximately annular, approximately elliptical (a member with four curved sides 30L), or approximately oblong (a member with two curved opposing sides 30L).

[0044] Furthermore, if the sealing member 30 becomes loose during installation by embedding it into the mounting groove 21, the sealing area of ​​the sealing lip 32 will deviate. Therefore, the inner circumferential side of the frame 31 of the sealing member 30 should be formed to be slightly smaller (approximately 1% to 5%) than the annular circumferential surface of the inner side of the mounting groove 21. Moreover, when the sealing member 30 is installed in the mounting groove 21, the sealing member 30 is embedded into the mounting groove 21 of the cover 20 in a state that is elongated beyond the protrusion 22.

[0045] The sealing member 30 is molded using a thermoplastic elastomer composed of polyester elastomers, polyolefin elastomers, fluoropolymer elastomers, urethane elastomers, etc.; or an elastic material such as fluororubber, ethylene propylene rubber, or silicone rubber. From the viewpoint of improving adhesion, fillers composed of carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., or resins such as polyethylene, polyamide, polyacetal, fluoropolymers, and silicone resins can be selectively added to these materials in specified amounts. Furthermore, from the viewpoint of imparting conductivity and antistatic properties, carbon fiber, metal fiber, metal oxides, and various antistatic agents can be appropriately added. Additionally, the hardness of the sealing member 30, measured on a Shore A hardness scale, is preferably 40 to 90 degrees, more preferably 60 to 90 degrees.

[0046] Here, the sealing member 30 has a frame 31 embedded and fixed in the mounting groove 21 and a sealing lip 32 extending outward from the frame 31 (see reference). Figure 2C ).

[0047] The frame 31 is formed in the same annular shape as the mounting groove 21 of the cover 20, and its cross-section is formed in a similar shape to the cross-sectional shape of the mounting groove 21, which is approximately rectangular or approximately trapezoidal. The frame 31 has a stepped portion 34 as an extension base on the cover 20 side of the side where the sealing lip 32 extends, and is configured to press the sealing member 30 into the bottom side of the mounting groove 21.

[0048] Furthermore, the frame 31 includes a first fitting rib 311 located on the surface of the container body 10 and inside the mounting groove 21 (inside the opening), and a second fitting rib 312 located on the surface of the lid 20 and inside the mounting groove 21. These first fitting ribs 311 and second fitting ribs 312 are respectively formed into sharp wedge shapes, and elastically deform within the mounting groove 21 (after being flattened) to form a tight seal (see reference). Figure 3 In addition, the height of the first fitting rib 311 and the second fitting rib 312 may be 0.1 mm or more and 0.5 mm or less.

[0049] Furthermore, in any cross-section of the sealing member 30 throughout its circumference, it includes at least one first fitting rib 311 on one side of the frame 31 and at least two second fitting ribs 312 on the other side. Moreover, as... Figure 2B As shown, the sealing member 30 also has a recessed portion corresponding to the gate portion of the injection molding mold at an appropriate location on the inner side of the frame 31.

[0050] Furthermore, the "fitting" of the first fitting rib 311 and the second fitting rib 312 with the mounting groove 21 does not refer to the mechanical fixation of the first fitting rib 311 and the second fitting rib 312 relative to the forming surface of the mounting groove 21, but rather to the fixation achieved through frictional contact and compression relative to the forming surface of the mounting groove 21. In other words, "fitting" does not refer to the state in which the first fitting rib 311 and the second fitting rib 312 are fitted with the mounting groove 21, but rather to the state in which the sealing member 30 is fitted into the mounting groove 21.

[0051] On the other hand, the sealing lip 32 extends from the frame 31 and is curved in a convex manner toward the container body 10 in the closing direction of the cap 20. This sealing lip 32 contacts the sealing surface 12 of the container body 10 to form a sealing area (see reference). Figure 3 Additionally, the thickness T2 of the sealing lip 32 can be 0.2 mm or more and 0.5 mm or less (see reference). Figure 2C ).

[0052] Furthermore, the sealing member 30, in addition to having a first fitting rib 311 and a second fitting rib 312, also has a support rib 313. On the same surface side as the second fitting rib 312, the support rib 313 is formed such that its cross-section is larger than that of the second fitting rib 312. Specifically, the support rib 313 has a generally quadrilateral, generally trapezoidal, or semi-circular cross-section that is approximately C (or U) shaped, with a width of 0.5 mm or more and 3.0 mm or less, and a height of 0.1 mm or more and 0.5 mm or less.

[0053] Although the support rib 313 can be formed continuously along the entire circumference of the sealing member 30, in this embodiment, it is formed discontinuously within a range of more than 80% to less than 100% of the entire circumference. That is, the support rib 313 is missing as a missing part 33 at a certain location along the entire circumference (see reference). Figures 2D to 2F Additionally, the four corners 30C of the rectangular frame 31 are preferably the locations where the support ribs 313 are missing.

[0054] Furthermore, the support rib 313 is formed in the following manner: the end face of the support rib 313 on the inner side of the mounting groove 21 is located within a range of 3 mm outside to 1 mm inside the plane constituting the opening end of the mounting groove 21 (see reference). Figure 3 Therefore, when the support rib 313 makes surface contact with the cover 20 side of the mounting groove 21 more than 1 mm inward relative to the plane of the opening end constituting the mounting groove 21, the sealing member 30 is excessively pressed into the mounting groove 21, and the step portion 34 deforms even in the non-sealed state, or the sealing lip 32 of the edge 30L becomes undulating.

[0055] Conversely, when the support rib 313 extends 3mm beyond the outer side of the plane constituting the opening end of the mounting groove 21 and forms a surface contact with the cover 20 side, the sealing member 30 is not sufficiently pressed into the mounting groove 21, resulting in the frame 31 not being sufficiently fixed to the mounting groove 21. Therefore, the sealing area between the sealing lip 32 and the sealing surface 12 is unstable, and the sealing performance is reduced. Furthermore, Figure 3 The fitting state of the sealing member 30 is exaggerated. In reality, the first fitting rib 311, the second fitting rib 312, and the support rib 313 are almost flattened, with insufficient gaps.

[0056] Furthermore, the sealing member 30 has a stepped portion 34 at the extended base of the frame 31 extending from the sealing lip 32, and a space G is formed between the stepped portion 34 and the cover 20. Due to this stepped portion 34, the thickness T4 of the stepped portion 34 located outside the opening end of the mounting groove 21 is more than 25% and less than 75% of the thickness T1 of the inner side of the opening end of the mounting groove 21. However, the thickness T4 of the stepped portion 34 is not thinner than the thickness T2 of the sealing lip 32.

[0057] Therefore, the step portion 34 flexes integrally with the sealing lip 32 that contacts the sealing surface 12. Moreover, when the sealing member 30 is installed into the cover body 20, the sealing member 30 can be easily pressed into the appropriate position into the mounting groove 21 by squeezing the step portion 34.

[0058] like Figure 3 As shown, this sealing member 30 seals by deflecting approximately 1 mm in the closing direction after the sealing lip 32 contacts the sealing surface 12. Furthermore, the support rib 313 is located near the opening of the mounting groove 21, and the frame 31 is fitted and fixed in a predetermined position within the mounting groove 21, ensuring a constant height for the sealing lip 32.

[0059] This also suppresses the undulation of the sealing lip 32. Moreover, by reducing the undulation of the sealing lip 32, the contact pressure of the sealing lip 32 on the sealing surface 12 becomes uniform throughout the circumference, which improves the sealing performance.

[0060] On the other hand, such as Figure 4 As shown, conventional sealing components lack the support rib 313, resulting in unstable positioning relative to the mounting groove and an inability to fit and fix evenly. Furthermore, since conventional sealing components lack the stepped portion 34, stress tends to concentrate at the root (base) of the sealing lip.

[0061] As described above, the substrate storage container 1 of the embodiments of the present invention is a substrate storage container 1, comprising: a container body 10 capable of storing a substrate, a cover 20 for closing the opening of the container body 10, and an annular or frame-shaped sealing member 30 disposed between the container body 10 and the cover 20; the sealing member 30 has: a frame 31 mounted on a U-shaped mounting groove 21 provided in the cover 20, and a sealing lip 32 extending outward from the frame 31 to form a sealing area; the frame 31 1 includes: a first fitting rib 311 that fits into the container body 10 side of the mounting groove 21, a second fitting rib 312 that fits into the cover 20 side of the mounting groove 21, and a support rib 313 that fits into the cover side of the mounting groove 21 and has a C-shaped cross section that is larger than the cross section of the second fitting rib 312; the inner end face of the support rib 313 in the mounting groove 21 is located within 3 mm outside to 1 mm inside the plane that forms the opening end of the mounting groove 21.

[0062] Furthermore, the sealing member 30 in the embodiment of the present invention is an annular sealing member 30 disposed between the container body 10 and the cover 20 of the substrate storage container 1. The sealing member 30 has a frame 31 installed in the U-shaped mounting groove 21 provided in the cover 20 and a sealing lip 32 extending outward from the frame 31 to form a sealing area. The frame 31 includes a first fitting rib 311 on one side, a second fitting rib 312 on the other side and a support rib 313 on the other side. The cross section of the support rib 313 is a C-shaped cross section that is larger than the cross section of the second fitting rib 312. The support rib 313 is formed such that the end face of the inner side of the mounting groove 21 is located within 3 mm outside to 1 mm inside the plane constituting the opening end of the mounting groove 21.

[0063] Therefore, since the support rib 313 of the sealing member 30 is located near the opening of the mounting groove 21 of the cover 20, excessive inward pressing can be prevented when the sealing member 30 is fitted into the mounting groove 21. Furthermore, by engaging with the first engagement rib 311 and the second engagement rib 312 at three or more points, in addition to the support rib 313, the engagement force between the frame 31 and the mounting groove 21 can be increased, ensuring a constant engagement posture of the frame 31 and preventing deformation of the sealing lip 32. Consequently, even with long-term storage, the sealing performance of the sealing lip 32 will not decrease.

[0064] Even with this sealing member 30, it can withstand the pressure from inside the substrate storage container 1, thus preventing leakage of gas and liquid from the inside and entry of dust from the outside. Therefore, it can also ensure safety when evaluating the cleanliness of the substrate storage container 1.

[0065] Regarding the frame 31 in the embodiment, the thickness T4 of the frame 31 on the outer side of the opening end of the mounting groove 21 is less than 75% of the thickness T1 on the inner side of the opening end of the mounting groove 21, and a space G is formed between the frame 31 and the cover 20. Therefore, when the opening of the container body 10 is closed with the cover 20, the stress applied to the sealing lip 32 can be distributed to the step portion 34 of the frame 31, which is thinner than the inner end of the mounting groove 21, thus allowing not only the sealing lip 32 but also the step portion 34 of the frame 31 to flex.

[0066] Therefore, stress will not be concentrated at the root (base) of the sealing lip as in previous technologies, and the stress at the root of the sealing lip 32 is mitigated, thus preventing permanent deformation of the sealing lip 32 even after long-term use.

[0067] The sealing member 30 of the embodiment includes at least one first fitting rib 311 and at least two second fitting ribs 312 in any cross section of the entire circumference, and the support rib 313 is formed over more than 80% of the entire circumference of the sealing member 30. This improves the overall shape stability of the edge 30L containing the sealing member 30 and increases the fitting force when fitted into the mounting groove 21.

[0068] The sealing member 30 in this embodiment is rectangular, with support ribs 313 missing at the four corners 30C. Since each corner 30C is a corner formed by two sides 30L, its shape stability is inherently high. Even with the support ribs 313 missing, the sealing lip 32 is not easily deformed, and the sealing performance is not reduced. Furthermore, even if cleaning fluid enters the mounting groove 21 when cleaning the substrate storage container 1, it can be drained, for example, from the missing portions 33 where the support ribs 313 are missing, such as at the corners 30C, preventing cleaning fluid residue.

[0069] The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the above embodiments. Various modifications and alterations can be made within the scope of the spirit of the present invention as described in the claims.

[0070] Explanation of reference numerals in the attached figures

[0071] 1: Substrate storage container

[0072] 10: Container body

[0073] 11: Opening

[0074] 12: Sealing surface

[0075] 13: Support

[0076] 14: Robotic flange

[0077] 15: Manual Handle

[0078] 18: Gas supply valve

[0079] 19: Exhaust valve

[0080] 20: Cover

[0081] 21: Mounting slot

[0082] 22: convex part

[0083] 30: Sealing components

[0084] 30C: Corner

[0085] 30L: Side

[0086] 31: Frame

[0087] 311: First mating rib

[0088] 312: Second mating rib

[0089] 313: Supporting rib

[0090] 32: Sealing lip

[0091] 33: Missing part

[0092] 34: Step Difference Part

[0093] T: Thickness

[0094] G: Space

Claims

1. A substrate storage container, comprising: The container itself can hold the substrate; A lid that closes the opening of the container body; and An annular sealing member is disposed between the container body and the lid; The sealing member has: a frame body, which is installed in a U-shaped mounting groove provided on the cover body; and a sealing lip, which extends outward from the frame body to form a sealing area; The frame includes: a first fitting rib that fits into the container body side of the mounting groove provided on the cover; a second fitting rib that fits into the cover side of the mounting groove; and a support rib that fits into the cover side of the mounting groove, and has a C-shaped cross-section that is larger than the cross-section of the second fitting rib. The end face of the support rib on the inner side of the mounting groove is located within a range of 3 mm outside to 1 mm inside the plane that forms the opening end of the mounting groove.

2. The substrate storage container according to claim 1, wherein, The thickness of the frame on the outside of the opening end of the mounting groove is less than 75% of the thickness of the frame on the inside of the opening end of the mounting groove, and a space is formed between the frame and the cover.

3. The substrate storage container according to claim 1 or 2, wherein, The sealing member includes at least one first fitting rib and at least two second fitting ribs in any cross section of the entire circumference; The support ribs are formed over 80% of the circumference of the sealing member.

4. The substrate storage container according to claim 3, wherein, The sealing component is rectangular frame-shaped; The support ribs are missing at the four corners.

5. A sealing member for a substrate storage container, which is an annular sealing member disposed between the container body and the lid of the substrate storage container; The sealing member for the substrate storage container has: a frame, which is installed in a U-shaped mounting groove provided on the cover; and a sealing lip, which extends outward from the frame to form a sealing area. The frame includes a first fitting rib on one side, a second fitting rib on the other side, and a support rib on the other side. The cross-section of the support rib is a C-shaped cross-section that is larger than that of the second fitting rib. The end face of the support rib on the inner side of the mounting groove is located within a range of 3 mm outside to 1 mm inside the plane that forms the opening end of the mounting groove.

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