positioning device

Abstract

The present invention aims to provide a positioning device capable of detecting a positioning error of a positioning object caused by a change in a posture angle of a stage at an arbitrary target position. Specifically, the positioning device of the present invention includes a base, a stage supported by the base, a movement direction of the stage being arbitrarily determined as an X direction, a plane including the X direction and a Y direction perpendicular to the X direction being a mounting surface, the stage moving to an arbitrary position in the X direction, and an X direction target position detection unit measuring an X direction target position of the stage with respect to the base in the X direction, the positioning device positioning a positioning object mounted on the mounting surface of the stage to an arbitrary position in the X direction. The positioning device has at least one of a Z axis rotation detection unit detecting rotation around a Z axis, a Y axis rotation detection unit detecting rotation around a Y axis, and an X axis rotation detection unit detecting rotation around an X axis.

Description

Technical Field

[0001] This invention relates to a positioning device for positioning objects. Background Technology

[0002] Semiconductor manufacturing apparatuses, inkjet coating apparatuses, and other manufacturing apparatuses include a mounting stage for placing substrates, a bonding apparatus for attaching IC chips to the substrates, and a coating apparatus for applying ink, among other processing apparatuses. These manufacturing apparatuses are configured to move the mounting stage or processing apparatus to any position using a positioning device that positions the processing apparatus relative to the substrate on the mounting stage. The positioning device includes an actuator for moving the mounting stage or the processing apparatus, and a control device for controlling the actuator. Furthermore, the actuator includes a measuring device for measuring the position of the mounting stage or the processing apparatus. The positioning device moves the mounting stage or the processing apparatus to a target position based on a measurement signal from the measuring device.

[0003] Such positioning devices require high positioning accuracy down to a few μm. On the other hand, the positioning device is prone to misalignment of the tool point relative to the target position due to factors such as the control accuracy of the actuator and the offset between the positioning object (tool point) and the measuring device. Therefore, positioning devices for suppressing the offset between the target position and the tool point are known.

[0004] The stage device described in Patent Document 1 includes: a laser interferometer as a first position detection device, an absolute scale detector as a second position detection device, and a linear scale as a third position detection device. The stage device detects position using the linear scale and the laser interferometer. The linear scale is disposed below the stage. The laser interferometer is disposed on the upper surface of the stage. Furthermore, the stage device detects the position of the stage using the absolute scale detector within a range that allows the position of the stage to be detected by either the laser interferometer or the linear scale. This stage device corrects for errors between the detection values ​​of the linear scale and the laser interferometer using the absolute scale detection values.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2015-162396 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] The stage device described in Patent Document 1 corrects errors based on the detection values ​​of an absolute scale detector capable of position detection at a specified location. Therefore, the stage device generates the same error across the entire movable range of the stage using the detection values ​​of the absolute scale detector. However, in this stage device, sometimes within the moving range of the stage, due to the influence of the machining accuracy of components such as the base supporting the stage and the accuracy of the linear guide, changes in the attitude angle of the stage based on pitch, yaw, and roll occur. Therefore, in this stage device, when positioned at an arbitrary target location, sometimes an error arises between the position of the object being positioned and the target position due to changes in the attitude angle of the stage.

[0010] The purpose of this invention is to provide a positioning device that can detect the positioning error of the object being positioned caused by the change in the attitude angle of the platform at any target location.

[0011] Methods for solving problems

[0012] The inventors have studied the structure of a positioning device capable of detecting positioning errors of a positioning object caused by changes in the attitude angle of a platform at any target location. As a result of further research, the inventors conceived of the following structure.

[0013] A positioning device according to an embodiment of the present invention includes: a base; a mounting platform supported on the base, wherein an arbitrarily defined direction of movement is defined as the X direction, and a plane including the X direction and a Y direction perpendicular to the X direction is used as a mounting surface, the mounting platform being moved to an arbitrary position in the X direction; and an X-direction target position detection unit that measures the position of the mounting platform relative to the base in the X direction, i.e., the X-direction target position, the positioning device positioning an object mounted on the mounting surface of the mounting platform to an arbitrary position in the X direction. The positioning device has at least one of the following detection units: a Z-axis detection unit that detects rotation of the mounting platform about a Z-axis line extending along both the X and Y directions; a Y-axis detection unit that detects rotation of the mounting platform about a Y-axis line extending along the Y direction; and an X-axis detection unit that detects rotation of the mounting platform about an X-axis line extending along the X direction.

[0014] The Z-axis detection unit includes: a Z-axis scale supported on the base for measuring the position of the stage in the X and Y directions; a first Z-axis detection head supported on the stage for detecting the scale markings of the Z-axis scale indicating the position in the X and Y directions; and a second Z-axis detection head supported on the stage in a manner different from the first Z-axis detection head in at least one of the X and Y directions, for detecting the scale markings of the Z-axis scale indicating the position in the X and Y directions. The first Z-axis detection head outputs a first Z-axis X-direction position and a first Z-axis Y-direction position. The second Z-axis detection head outputs a second Z-axis X-direction position and a second Z-axis Y-direction position.

[0015] The Y-axis detection unit includes: a Y-axis scale supported on the base for measuring the position of the stage in the X and Z directions; a first Y-axis detection head supported on the stage for detecting the scale markings of the Y-axis scale indicating the position in the X and Z directions; and a second Y-axis detection head supported on the stage with a position in at least one of the X and Z directions different from that of the first Y-axis detection head for detecting the scale markings of the Y-axis scale indicating the position in the X and Z directions. The first Y-axis detection head outputs a first Y-axis X-direction position and a first Y-axis Z-direction position. The second Y-axis detection head outputs a second Y-axis X-direction position and a second Y-axis Z-direction position.

[0016] The X-axis detection unit comprises: a first X-axis scale supported on the base for measuring the X-direction and Z-direction positions of the stage; a first X-axis detection head supported on the stage for detecting the graduations of the first X-axis scale indicating the X-direction and Z-direction positions; a second X-axis scale supported on the base with a different Y-direction position than the first X-axis scale for measuring the X-direction and Z-direction positions of the stage; and a second Z-axis detection head supported on the stage for detecting the graduations of the second X-axis scale indicating the X-direction and Z-direction positions. The first X-axis detection head outputs the first X-axis position and the first X-axis position in the X-direction. The second X-axis detection head outputs the second X-axis position and the second X-axis position in the Z-direction.

[0017] In the above structure, the Z-axis detection unit includes: a first Z-axis detection head and a second Z-axis detection head, which are disposed at two separate locations within the stage; and a Z-axis scale disposed at the base. The Z-axis detection unit detects the X-direction or Y-direction positions of the two separate locations on the stage within its movable range. The rotation (deflection) of the stage around the Z-axis can be calculated from the X-direction or Y-direction positions at two locations with a predetermined interval within the stage, where the Z-axis extends along a Z-direction perpendicular to both the X and Y directions. Thus, the Z-axis detection unit outputs position information for calculating the change in the attitude angle of the stage around the Z-axis. Similarly, the Y-axis detection unit outputs position information for calculating the change in the attitude angle (pitch) of the stage around the Y-axis within its movable range, where the Y-axis extends along a Y-direction perpendicular to both the X and Z directions. Similarly, the X-axis detection unit is used to output positional information calculated within the movable range of the mounting stage, showing the change (tilt) of the attitude angle of the mounting stage about the X-axis, which extends along the X-direction perpendicular to both the Y and Z directions. Thus, it is possible to detect the positioning error of the object caused by the change in the attitude angle of the mounting stage at any target location.

[0018] According to other viewpoints, the positioning device of the present invention preferably includes the following structure. The positioning device also includes other positioning devices. The X direction, which is the movement direction of the other positioning device, is defined as the Y direction, and the Y direction of the other positioning device is defined as the X direction. The base of the other positioning device is mounted on the platform of the positioning device, and the Y direction, which is the movement direction of the other positioning device, is oriented towards the Y direction of the positioning device, and the X direction of the other positioning device is oriented towards the X direction of the positioning device.

[0019] In the above structure, the positioning device further includes another positioning device that directs the movement of the platform towards the Y direction. This other positioning device is mounted on the platform of the positioning device, which moves in the X direction. Therefore, the platform of the other positioning device is configured to move in both the X and Y directions. Furthermore, similar to the positioning device described above, the other positioning device outputs position information for calculating the change in the attitude angle of the platform about the Z-axis, position information for calculating the change in the attitude angle of the platform about the Y-axis, and position information for calculating the change in the attitude angle of the platform about the X-axis. Thus, the positioning error of the object being positioned caused by the change in the attitude angle of the platform of the other positioning device can be detected at any target location.

[0020] According to other viewpoints, the positioning device of the present invention preferably includes the following structure. The positioning device comprises: a control unit that controls the position of the stage in the X direction; and an output unit that outputs the position of the stage in the X direction. The control unit obtains the target position of the stage in the X direction from the target position detection unit in the X direction. When the Z-axis detection unit is included, the control unit obtains the first Z-axis X-axis position and the first Z-axis Y-axis position detected by the first Z-axis detection head, and the second Z-axis X-axis position and the second Z-axis Y-axis position detected by the second Z-axis detection head. Based on the distance from the stage to a reference point of the object being positioned, the first Z-axis X-axis position and the second Z-axis X-axis position, or the first Z-axis Y-axis position and the second Z-axis Y-axis position, the control unit calculates the X-direction correction, Y-direction correction, and Z-axis correction for the reference point at the target position in the X direction. The output unit outputs the calculated X-direction correction, Y-direction correction, and Z-axis correction.

[0021] When the Y-axis detection unit is present, the control unit acquires the first Y-axis X-direction position and the first Y-axis Z-direction position detected by the first Y-axis detection head, and the second Y-axis X-direction position and the second Y-axis Z-direction position detected by the second Y-axis detection head. Based on the distance from the platform to the reference point of the positioning object, the first Y-axis X-direction position and the second Y-axis X-direction position, or the first Y-axis Z-direction position and the second Y-axis Z-direction position, the control unit calculates the X-direction correction, Z-direction correction, and Y-axis correction for the reference point at the target position in the X-direction. The output unit outputs the calculated X-direction correction, Z-direction correction, and Y-axis correction.

[0022] When the X-axis detection unit is included, the control unit acquires the first X-axis X-direction position and the first X-axis Z-direction position detected by the first X-axis detection head, and the second X-axis X-direction position and the second X-axis Z-direction position detected by the second X-axis detection head. Based on the distance from the stage to the reference point of the positioning object, the first X-axis Z-direction position, and the second X-axis Z-direction position, the control unit calculates the Z-direction correction and the X-axis correction amount of the reference point at the target position in the X-direction. Based on the first X-axis X-direction position and the second X-axis X-direction position, the control unit calculates the X-direction correction and the Z-axis correction amount at the target position in the X-direction of the stage. The output unit outputs at least one of the calculated X-direction correction amount, the Z-direction correction amount, the Y-axis correction amount, and the Z-axis correction amount.

[0023] In the above structure, when the positioning device's control unit has a Z-axis detection unit, in addition to calculating the positioning errors in the X and Y directions of the reference point of the object being positioned at the target position in the X direction, it also calculates the X-direction correction amount, Y-direction correction amount, and Z-axis correction amount to correct for positioning errors caused by rotation around the Z-axis. Similarly, when the positioning device's control unit has a Y-axis detection unit, in addition to calculating the positioning errors in the X and Z directions of the reference point of the object being positioned at the target position in the X direction, it also calculates the X-direction correction amount, Z-direction correction amount, and Y-axis correction amount at the target position in the X direction to correct for positioning errors caused by rotation around the Y-axis. Similarly, when the positioning device's control unit has an X-axis detection unit, in addition to calculating the positioning errors in the Y and Z directions of the reference point of the object being positioned at the target position in the X direction, it also calculates the Y-direction correction amount, Z-direction correction amount, and X-axis correction amount at the target position in the X direction to correct for positioning errors caused by rotation around the X-axis. Therefore, it is possible to detect the positioning error of the object caused by the change in the attitude angle of the platform at any target location.

[0024] According to other viewpoints, the positioning device of the present invention preferably includes the following structure. The positioning device further includes a camera device mounted on the mounting surface of the platform. The control unit includes an image processing unit that processes images captured by the camera device. When the image is acquired, the control unit corrects the image using the image processing unit based on a correction amount calculated from the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the correction amount around the Z-axis, the correction amount around the Y-axis, and the correction amount around the X-axis.

[0025] In this structure, the image captured by the camera mounted on the stage of the positioning device is affected by positioning errors in the X, Y, and Z directions relative to the target position in the X direction, as well as at least one of the rotation amounts around the Z-axis, Y-axis, and X-axis. The image processing unit of the positioning device corrects the image based on a correction amount calculated by the control unit from among the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the Z-axis correction amount, the Y-axis correction amount, and the X-axis correction amount. Therefore, image correction based on these correction amounts avoids positioning errors caused by camera movement and errors caused by changes in attitude angles, compared to correcting the camera position by moving the camera. Thus, positioning errors of the object being positioned due to changes in the attitude angle of the stage can be detected at any target position, and the image can be corrected.

[0026] According to other viewpoints, the positioning device of the present invention preferably includes the following structure: The positioning device has a Z-axis rotary table supported on the mounting platform, which rotates about the Z-axis as the center of rotation. The control unit controls the Z-axis rotary table based on the calculated correction amount around the Z-axis.

[0027] In the above structure, the positioning device outputs position information from the Z-axis detection unit for calculating the change (deflection) of the attitude angle around the Z-axis. The control unit of the positioning device corrects the rotation of the Z-axis rotary table around the Z-axis based on X-direction correction amounts, Y-direction correction amounts, and Z-axis correction amounts that correct for positioning errors in the X and Y directions relative to the target position in the X direction caused by rotation around the Z-axis. Therefore, the positioning error of the object being positioned due to changes in the attitude angle of the stage can be detected at any target position.

[0028] The technical terms used in this specification are for defining specific implementations only and are not intended to limit the invention.

[0029] In this specification, the use of the words “including,” “comprising,” or “having,” and variations thereof, while confirming the presence of the described features, processes, operations, elements, components, and / or their equivalents, can include one or more steps, actions, elements, components, and / or groups thereof.

[0030] In this specification, the terms “installation,” “connection,” “combination,” and / or their equivalents are used in a broad sense to include both “direct” and “indirect” installation, connection, and combination. Furthermore, “connection” and “combination” are not limited to physical or mechanical connections or combinations, but may also include direct or indirect electrical connections or combinations.

[0031] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art to which this invention pertains.

[0032] [Locate the object]

[0033] In this specification, the positioning object refers to a component positioned by a moving part. Such positioning objects include, for example, a substrate, element, component, calibration substrate, camera, end effector, etc. Furthermore, the positioning object includes a moving part that moves a stage, other positioning devices, imaging devices such as calibration cameras, end effectors, etc.

[0034] [X-direction moving part]

[0035] In this specification, the term "X-direction moving part" refers to a moving device that includes an actuator that moves the positioning object part to position it at a target location. The X-direction moving part includes, for example, an XY-direction moving part that moves in both the X and Y directions, a Z-direction moving part that moves in the Z direction, and an θ-direction moving part that rotates about an arbitrary axis. The X-direction moving part includes electric actuators such as electric motors and linear motors, guide devices, scales, etc.

[0036] Invention Effects

[0037] According to one embodiment of the present invention, a positioning device is provided, comprising: a base; a mounting platform supported on the base, wherein an arbitrarily determined direction of movement is defined as the X direction, and a plane including the X direction and a Y direction perpendicular to the X direction is used as a mounting surface, the mounting platform being moved to an arbitrary position in the X direction; and an X-direction target position detection unit supported on the base, which measures the position of the mounting platform relative to the base in the X direction, i.e., the X-direction target position, the positioning device positioning an object mounted on the mounting surface of the mounting platform to an arbitrary position in the X direction, the positioning device being able to detect the positioning error of the object caused by the change in the attitude angle of the mounting platform at any target position. Attached Figure Description

[0038] Figure 1 This is a side view of the positioning device according to Embodiment 1 of the present invention, viewed along the X direction.

[0039] Figure 2 This is a top view of the positioning device according to Embodiment 1 of the present invention, viewed along the Z direction.

[0040] Figure 3 This is a block diagram illustrating the transmission of position control signals and position information in the calibration calculation and control of the positioning device according to Embodiment 1 of the present invention.

[0041] Figure 4 This is a top view of the platform in the positioning device according to Embodiment 1 of the present invention, showing the change in the attitude angle of the platform.

[0042] Figure 5 This is a top view of the positioning device in a modified embodiment of the positioning device of the present invention, showing the change of the attitude angle of the platform.

[0043] Figure 6 This is a side view of the positioning device according to Embodiment 2 of the present invention, viewed along the Y direction.

[0044] Figure 7 This is a block diagram illustrating the transmission of position control signals and position information in the calibration calculation and control of the positioning device according to Embodiment 2 of the present invention.

[0045] Figure 8 This is a Y-direction side view of the platform in the positioning device of Embodiment 2 of the present invention, showing the change of the attitude angle of the platform.

[0046] Figure 9 This is a side view of the positioning device according to Embodiment 3 of the present invention, viewed along the X direction.

[0047] Figure 10 This is a block diagram illustrating the transmission of position control signals and position information in the calibration calculation and control of the positioning device according to Embodiment 3 of the present invention.

[0048] Figure 11 This is a side view of the platform in the X direction, showing the change in the attitude angle of the platform in the positioning device of Embodiment 3 of the present invention.

[0049] Figure 12 This is a side view of the positioning device according to Embodiment 4 of the present invention, viewed along the X direction.

[0050] Figure 13 This is a block diagram illustrating the transmission of position control signals and position information in the image processing control of the positioning device according to Embodiment 5 of the present invention.

[0051] Figure 14 This is a schematic diagram illustrating the state of image processing in the image processing control of Embodiment 5 of the present invention. Detailed Implementation

[0052] The positioning device of the present invention will now be described with reference to the accompanying drawings. In each drawing, the same reference numerals are used for the same parts, and descriptions of these same parts will not be repeated. The dimensions of the constituent parts in the drawings do not faithfully represent the actual dimensions of the constituent parts or the dimensional ratios of each constituent part. Furthermore, in the following description of embodiments of the present invention, the X and Y directions are directions in the horizontal plane. The Y direction is a direction perpendicular to the X direction. The Z direction is a direction perpendicular to both the X and Y directions. In this embodiment, the Z direction is defined as the vertical direction. However, this definition is not intended to limit the orientation of the positioning device in each embodiment during use.

[0053] [Implementation Method 1]

[0054] <Structure of Positioning Device 1>

[0055] use Figures 1 to 3 The following describes Embodiment 1 of the positioning device of the present invention, namely Positioning Device 1. Figure 1 This is a side view of the positioning device 1 according to Embodiment 1 of the present invention, viewed along the X direction. Figure 2 This is a top view of the positioning device 1 viewed along the Z direction. Figure 3 This is a block diagram illustrating the transmission of position control signals and position information in the correction calculation control S1 of the positioning device 1. In the following embodiment, the ambient temperature, i.e., the temperature around the positioning device during operation, is kept constant.

[0056] like Figure 1 and Figure 2 As shown, the positioning device 1 positions the reference point Gp of the object G. The positioning device 1 is installed in a manufacturing apparatus such as a semiconductor manufacturing apparatus (not shown). The positioning device 1 includes a base 2, an X-direction moving part 3, a stage 4, an X-direction target position detection part 5, a Z-axis detection part 6, and a control part 11 (see reference). Figure 3 The positioning object G is mounted on the platform 4. The reference point Gp is ​​positioned at a distance Lg from the center of the platform 4.

[0057] The base 2 supports the X-direction moving part 3. The base 2 is, for example, a plate-shaped steel material. The base 2 is provided in a manufacturing device or the like, not shown.

[0058] The X-direction moving part 3 is a device that guides a positioning object to any position in the X direction. The X-direction moving part 3 is a linear motor that moves linearly in one direction. The X-direction moving part consists of a fixed part 3a including a stator, coils, and a guide member, and a moving part 3b having magnets, etc. The moving part 3b is supported by a linear guide member (not shown) on the fixed part 3a. The fixed part 3a is fixed to the base 2 such that the extension direction of the linear guide member faces the X direction. Therefore, the moving part 3b can move to any position in the X direction. The moving part 3b is moved to any position in the X direction by a driver (not shown).

[0059] The mounting platform 4 carries the positioning object. The mounting platform 4 moves in the X direction via the X-direction moving part 3. The mounting platform 4 is a flat plate with sufficient rigidity. The mounting platform 4 is fixed to the moving part 3b. Therefore, the mounting platform 4 is configured to move to any position in the X direction. The positioning object G is mounted on the mounting platform 4.

[0060] The X-direction target position detection unit 5 detects the X-direction position of the stage 4. The X-direction target position detection unit 5 is, for example, an optical linear scale. The X-direction target position detection unit 5 has an X-direction reference scale 5a with graduations and an X-direction reference head 5b that detects the graduations of the X-direction reference scale 5a. The X-direction reference scale 5a is fixed to the base 2 with graduations in the X-direction. The X-direction reference head 5b is fixed to the stage 4 in a state where it can detect the graduations of the X-direction reference scale 5a. The X-direction reference head 5b detects the X-direction position of the stage 4 with the origin as a reference. The X-direction target position detection unit 5 detects whether the stage 4 is located at the X-direction target position Ptx.

[0061] The Z-axis detection unit 6 detects the X-direction and Y-direction positions at two locations on the stage 4. The Z-axis detection unit 6 is, for example, an optical linear scale. The Z-axis detection unit 6 includes a first Z-axis scale 7, a second Z-axis scale 8, a first Z-axis detection head 9, and a second Z-axis detection head 10.

[0062] The first Z-axis scale 7 and the second Z-axis scale 8 have a main scale indicating the position in the main measurement direction and a secondary scale indicating the position in a secondary measurement direction perpendicular to the main measurement direction. The first Z-axis scale 7 and the second Z-axis scale 8 are fixed to the plane of the base 2 with the main measurement direction facing the X direction. That is, the first Z-axis scale 7 and the second Z-axis scale 8 indicate the position in the X direction through the main scale and the position in the Y direction through the secondary scale. The first Z-axis scale 7 and the second Z-axis scale 8 are arranged at a predetermined interval L1 in the Y direction. Furthermore, the first Z-axis scale 7 and the second Z-axis scale 8 are arranged at positions different from the X-direction reference scale 5a in the Y and Z directions.

[0063] The first Z-axis detection head 9 detects the main and secondary scales of the first Z-axis scale 7. Specifically, the first Z-axis detection head 9 detects the main scale representing the X-direction position and the secondary scale representing the Y-direction position on the first Z-axis scale 7. The first Z-axis detection head 9 is fixed to the stage 4 in a state capable of detecting both the main and secondary scales of the first Z-axis scale 7. Using the origin on the first Z-axis scale 7 as a reference, the first Z-axis detection head 9 outputs the first Z-axis X-direction position Pzx1 when it detects the main scale of the first Z-axis scale 7, and outputs the first Z-axis Y-direction position Pzy1 when it detects the secondary scale.

[0064] The second Z-axis detection head 10 detects the main and secondary scales of the second Z-axis scale 8. Specifically, the second Z-axis detection head 10 detects the main scale representing the X-direction position and the secondary scale representing the Y-direction position of the second Z-axis scale 8. The second Z-axis detection head 10 is fixed to the stage 4 in a state capable of detecting both the main and secondary scales of the second Z-axis scale 8. Using the origin of the second Z-axis scale 8 as a reference, the second Z-axis detection head 10 outputs the second Z-axis X-direction position Pzx2 when it detects the main scale of the second Z-axis scale 8, and outputs the second Z-axis Y-direction position Pzy2 when it detects the secondary scale.

[0065] like Figure 3As shown, the control unit 11 controls the X-direction movement unit 3. Furthermore, the control unit 11 calculates a correction amount based on the position information obtained from the Z-axis detection unit 6. The control unit 11 is essentially connected via a bus to a processor such as a CPU and components such as ROM, RAM, and HDD. Alternatively, the control unit 11 may be a structure composed of a single-chip LSI or similar device. The control unit 11 stores various programs and data for controlling the operation of the X-direction movement unit 3, the X-direction target position detection unit 5, and the Z-axis detection unit 6.

[0066] The control unit 11 is configured to send a position control signal S to the X-direction moving unit 3 for positioning the stage 4 at the target position Ptx in the X direction. The position control signal S includes an X-direction position control signal Sx relative to the target position Ptx in the X direction and a Y-direction position control signal Sy relative to the target position Pty in the Y direction (in this embodiment, the target position Pty in the Y direction is zero).

[0067] The control unit 11 and the drive unit constitute the linear motor of the X-direction movement unit 3 (see reference). Figure 1 The driver of the X-direction movement unit 3 and the X-direction reference head 5b of the X-direction target position detection unit 5 are electrically connected. The control unit 11 can send an X-direction position control signal Sx to the driver of the X-direction movement unit 3. The control unit 11 can obtain the X-direction position of the stage 4 from the X-direction target position detection unit 5. The control unit 11 moves the stage 4 in the X-direction until the X-direction target position detection unit 5 detects the X-direction target position Ptx.

[0068] The control unit 11 is electrically connected to the first Z-axis detection head 9 and the second Z-axis detection head 10 of the Z-axis detection unit 6. The control unit 11 can obtain the first Z-axis X-direction position Pzx1 and the first Z-axis Y-direction position Pzy1 from the first Z-axis detection head 9. In addition, the control unit 11 can obtain the second Z-axis X-direction position Pzx2 and the second Z-axis Y-direction position Pzy2 from the second Z-axis detection head 10.

[0069] The control unit 11 can calculate the X-direction correction Azx, Y-direction correction Azy, and Z-axis correction Azθ of the reference point Gp based on the obtained first X-direction position Pzx1 and second X-direction position Pzx2 around the Z-axis, or first Y-direction position Pzy1 and second Y-direction position Pzy2 around the Z-axis. The X-direction correction Azx and Y-direction correction Azy are correction amounts used to position the target object at the target X-direction position Ptx and target Y-direction position Pty, respectively. The Z-axis correction Azθ is a correction amount used to eliminate changes in the attitude angle of the reference point Gp around the Z-axis.

[0070] The output unit 12 outputs the calculated values ​​from the control unit 11 to external control devices, etc. The output unit 12 outputs electrical signals obtained by converting the calculated values ​​into image data, text data, data in a specified format, etc. The output unit 12 can obtain the X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis correction amount Azθ of the stage 4 calculated by the control unit 11, and output them to external control devices, etc.

[0071] <Correction Calculation and Control>

[0072] Next, use Figure 3 and Figure 4 The calculation and control of the correction amount S1 are explained. Figure 4 This is a top view of the platform, showing the change in the attitude angle of the platform within the positioning device 1. For example... Figure 3 and Figure 4 As shown, the control unit 11 implements a correction amount calculation control S1, in which the correction amount of the reference point Gp of the positioning object G relative to the target position Ptx in the X direction is calculated based on the position information obtained from the Z-axis detection unit 6. Furthermore, when the X-axis reference head 5b detects the origin, the first Z-axis detection head 9 and the second Z-axis detection head 10 also detect the origin.

[0073] In the correction amount calculation control S1, the control unit 11 outputs an X-direction position control signal Sx to the X-direction movement unit 3 based on the value detected by the X-direction target position detection unit 5, so as to move the platform 4 (refer to the reference) Figure 1 The position of the platform 4 is located at the target position Ptx in the X direction. Based on the X direction position control signal Sx, the X-direction moving unit 3 moves the platform 4 toward the target position Ptx in the X direction. At this time, the platform 4 experiences a change in attitude angle (deflection) about the Z-axis extending along the Z direction due to errors in the X and Y directions of the linear guide member that guides the X-direction moving unit 3b. In other words, the reference point Gp is ​​not located at the target position Ptx in the X direction or the target position Pty in the Y direction due to the change in attitude angle.

[0074] The control unit 11 acquires the first Z-axis X-direction position Pzx1 and the first Z-axis Y-direction position Pzy1 detected by the first Z-axis detection head 9. Furthermore, the control unit 11 acquires the second Z-axis X-direction position Pzx2 and the second Z-axis Y-direction position Pzy2 detected by the second Z-axis detection head 10.

[0075] The control unit 11 calculates the Z-axis correction amount Azθ of the reference point Gp using equation (1) based on the first Z-axis X-direction position Pzx1, the second Z-axis X-direction position Pzx2, and the interval L1 between the first Z-axis detection head 9 and the second Z-axis detection head 10.

[0076] Azθ=arctan((Pzx1-Pzx2) / L1)…(1)

[0077] The control unit 11 calculates the X-direction correction Azx of the reference point Gp using equation (2) based on the first X-direction position Pzx1 around the Z-axis, the second X-direction position Pzx2 around the Z-axis, and the target X-direction position Ptx. That is, the control unit 11 calculates the average of the offsets of the first X-direction position Pzx1 and the second X-direction position Pzx2 around the Z-axis relative to the target X-direction position Ptx as the X-direction correction Azx.

[0078] Azx=((Pzx1-Ptx)+(Pzx2-Ptx)) / 2…(2)

[0079] The control unit 11 calculates the Y-direction correction Azy of the reference point Gp using equation (3) based on the first Y-direction position Pzy1 around the Z-axis, the second X-direction position Pzy2 around the Z-axis, and the target Y-direction position Pty (not shown). That is, the control unit 11 calculates the average of the offsets of the first Y-direction position Pzy1 and the second Y-direction position Pzy2 around the Z-axis relative to the target Y-direction position Pty (set to Pty=0) as the Y-direction correction Azy.

[0080] Azy=((Pzy1-Pty)+(Pzy2-Pty)) / 2…(3)

[0081] The control unit 11 sends the calculated X-direction correction Azx, Y-direction correction Azy, and Z-axis correction Azθ to the output unit. The output unit 12 outputs the X-direction correction Azx, Y-direction correction Azy, and Z-axis correction Azθ of the reference point Gp calculated by the control unit to external control devices, etc. The control unit 11 then completes the correction calculation control S1.

[0082] [Modification of Implementation Method 1]

[0083] The following uses Figure 3 and Figure 5 The positioning device 1A, a modified example of Embodiment 1 of the positioning device of the present invention, will be described. Figure 5 This is a top view of the platform in the positioning device 1A, showing the change in the attitude angle of the platform.

[0084] like Figure 3 and Figure 5 As shown, the Z-axis detection unit 6A detects the X-direction and Y-direction positions of two mutually separated locations on the stage 4. The Z-axis detection unit 6 is, for example, an optical linear scale. The Z-axis detection unit 6 has a first Z-axis scale 7, a first Z-axis detection head 9, and a second Z-axis detection head 10.

[0085] The first Z-axis scale 7 has a main scale indicating the position in the main measurement direction and a secondary scale indicating the position in the secondary measurement direction perpendicular to the main measurement direction. The first Z-axis scale 7 is fixed to the plane of the base 2 with the main measurement direction facing the X direction. The first Z-axis scale 7 is positioned in the Y and Z directions at positions different from the X-direction reference scale 5a.

[0086] The first Z-axis detection head 9 detects the main and secondary scales of the first Z-axis scale 7. The first Z-axis detection head 9 is fixed to the stage 4 in a state capable of detecting both the main and secondary scales of the first Z-axis scale 7. Using the origin on the first Z-axis scale 7 as a reference, the first Z-axis detection head outputs the first Z-axis X-direction position Pzx1 when it detects the main scale of the first Z-axis scale 7, and outputs the first Z-axis Y-direction position Pzy1 when it detects the secondary scale.

[0087] The second Z-axis detection head 10 detects the main and secondary scales of the first Z-axis scale 7. The second Z-axis detection head 10 is fixed to the stage 4 in a state capable of detecting both the main and secondary scales of the first Z-axis scale 7. Furthermore, the second Z-axis detection head 10 is configured with a distance L2 in the X direction relative to the first Z-axis detection head 9. The second Z-axis detection head 10 uses the origin of the first Z-axis scale 7 as a reference. When it detects a main scale of the first Z-axis scale 7, it outputs a second Z-axis X-direction position Pzx2; when it detects a secondary scale, it outputs a second Z-axis Y-direction position Pzy2.

[0088] <Correction Calculation and Control>

[0089] like Figure 3 and Figure 5 As shown, the control unit 11 implements a correction amount calculation control S1, in which the correction amount of the reference point Gp relative to the target position Ptx in the X direction is calculated based on the position information obtained from the Z-axis detection unit 6A. Furthermore, when the X-axis reference head 5b detects the origin, the first Z-axis detection head 9 and the second Z-axis detection head 10 also detect the origin.

[0090] Based on the first Z-axis Y-direction position Pzy1, the second Z-axis Y-direction position Pzy2, and the interval L2 between the first Z-axis detection head 9 and the second Z-axis detection head 10, the control unit 11 calculates the Z-axis correction amount Azθ of the reference point Gp using equation (4).

[0091] Azθ=arctan((Pzy1-Pzy2) / L2)…(4)

[0092] Thus, within the movable range of the mounting stage 4, the Z-axis detection units 6 and 6A detect the first Z-axis X-direction position Pzx1 and the first Z-axis Y-direction position Pzy1, as well as the second Z-axis X-direction position Pzx and the second Z-axis Y-direction position Pzy2, which are separately arranged on the mounting stage 4 by the first Z-axis detection head 9 and the second Z-axis detection head 10. Based on the interval between the first Z-axis detection head 9 and the second Z-axis detection head 10, and the position information obtained from the Z-axis detection units 6 and 6A, the control unit 11 calculates the X-direction correction Azx, the Y-direction correction Azy, and the Z-axis correction Azθ of the reference point Gp. The X-direction correction Azx, the Y-direction correction Azy, and the Z-axis correction Azθ of the reference point Gp take into account not only the positioning errors in the X and Y directions relative to the target X-direction position Ptx, but also the change in attitude angle caused by rotation around the Z-axis. Therefore, it is possible to detect the positioning error caused by the change in the attitude angle of the reference point Gp at any target position Ptx in the X direction.

[0093] [Implementation Method 2]

[0094] The following uses Figure 6 and Figure 7 The following describes Embodiment 2 of the positioning device of the present invention, namely positioning device 1B. Figure 6 This is a side view of the positioning device 1B viewed along the Y direction. Figure 7 This is a block diagram illustrating the transmission of position control signals and position information in the correction calculation and control S2 of the positioning device 1B. The positioning device 1B includes a base 2, an X-direction moving part 3, a platform 4, and an X-direction target position detection part 5 (see reference). Figure 7 ), Y-axis detection unit 13 and control unit 11.

[0095] like Figure 6 As shown, the Y-axis detection unit 13 detects the X-direction and Z-direction positions of two mutually separated locations on the stage 4. The Y-axis detection unit 13 is, for example, an optical linear scale. The Y-axis detection unit 13 has a first Y-axis scale 14, a first Y-axis detection head 15, and a second Y-axis detection head 16.

[0096] The first Y-axis scale 14 has a main scale indicating the position in the main measurement direction and a secondary scale indicating the position in a secondary measurement direction perpendicular to the main measurement direction. The first Y-axis scale 14 is fixed to the side of the base 2 with the main measurement direction facing the X direction and the secondary measurement direction facing the Z direction. That is, the first Y-axis scale 14 indicates the position in the X direction through the main scale and the position in the Z direction through the secondary scale. The first Y-axis scale 14 is positioned in the Y and Z directions relative to the X-direction reference scale 5a (see reference). Figure 2 Different locations.

[0097] The first Y-axis detection head 16 detects the main scale indicating the position in the X direction and the secondary scale indicating the position in the Z direction on the first Y-axis scale 14. The first Y-axis detection head 15 is fixed on the stage 4 in a state capable of detecting both the main scale and the secondary scale of the first Y-axis scale 14. The first Y-axis detection head 15 uses the origin on the first Y-axis scale 14 as a reference. When it detects the main scale of the first Y-axis scale 14, it outputs the position Pyx1 in the X direction of the first Y-axis, and when it detects the secondary scale, it outputs the position Pyz1 in the Z direction of the first Y-axis.

[0098] The second Y-axis detection head 16 detects the main scale indicating the position in the X direction and the secondary scale indicating the position in the Z direction of the first Y-axis scale 14. The second Y-axis detection head 16 is fixed on the stage 4 in a state capable of detecting the main scale and secondary scale of the first Y-axis scale 14. The second Y-axis detection head 16 uses the origin of the first Y-axis scale 14 as a reference. When it detects the main scale of the first Y-axis scale 14, it outputs the second Y-axis X-direction position Pyx2, and when it detects the secondary scale, it outputs the second Y-axis Z-direction position Pyz2.

[0099] like Figure 7 As shown, the control unit 11 calculates the correction amount based on the position information obtained from the Y-axis detection unit 13. The control unit 11 stores various programs and data for controlling the operation of the Y-axis detection unit 13.

[0100] The control unit 11 is electrically connected to the first Y-axis detection head 15 and the second Y-axis detection head 16 of the Y-axis detection unit 13. The control unit 11 can obtain the first Y-axis X-direction position Pyx1 and the first Y-axis Z-direction position Pyz1 from the first Y-axis detection head 16. In addition, the control unit 11 can obtain the second Y-axis X-direction position Pyx2 and the second Y-axis Z-direction position Pyz2 from the second Y-axis detection head 16.

[0101] The control unit 11 can calculate the X-direction correction Ayx, Z-direction correction Ayz, and Y-axis correction Ayθ of the platform 4 based on the obtained first Y-axis X-direction position Pyx1 and second Y-axis X-direction position Pyx2, or first Y-axis Z-direction position Pyz1 and second Y-axis Z-direction position Pyz2. The X-direction correction Ayx and Z-direction correction Ayz are correction amounts used to position the reference point Gp at the target X-direction position Ptx and the target Z-direction position Ptz (in this embodiment, the target Z-direction position Ptz is zero). The Y-axis correction Ayθ is a correction amount used to eliminate changes in the attitude angle of the reference point Gp around the Y-axis.

[0102] The output unit 12 can obtain the X-direction correction amount Ayx, Z-direction correction amount Ayz, and Y-axis correction amount Ayθ of the mounting stage 4 calculated by the control unit 11, and output them to external control devices, etc.

[0103] <Correction Calculation and Control>

[0104] use Figure 7 and Figure 8 The calibration calculation control S2 in the positioning device 1B is explained. Figure 8 This is a Y-direction side view of the platform, showing the change in the attitude angle of the platform in the positioning device 1B. The control unit 11 performs a correction amount calculation control S2, which calculates the correction amount of the reference point Gp relative to the target position Ptx in the X direction based on the position information obtained from the Y-axis detection unit 13. Furthermore, when the X-direction reference head 5b detects the origin, the first Y-axis detection head 15 and the second Y-axis detection head 16 also detect the origin.

[0105] like Figure 7 and Figure 8 As shown, in the correction calculation control S2, the control unit 11 outputs an X-direction position control signal Sx to the X-direction movement unit 3 based on the value detected by the X-direction target position detection unit 5, so that the position of the reference point Gp is ​​consistent with the X-direction target position Ptx. At this time, the stage 4 experiences a change in attitude angle (pitch) about the Y-axis extending along the Y-direction due to the X-direction and Z-direction errors of the linear guide member of the movement unit 3b that guides the X-direction movement unit 3. That is, the reference point Gp is ​​not located at the X-direction target position Ptx due to the influence of the attitude angle change.

[0106] The control unit 11 acquires the first Y-axis X-direction position Pyx1 and the first Y-axis Z-direction position Pyz1 detected by the first Y-axis detection head 15. Additionally, the control unit 11 acquires the second Y-axis X-direction position Pyx2 and the second Y-axis Z-direction position Pyz2 detected by the second Y-axis detection head 16.

[0107] The control unit 11 calculates the Y-axis correction amount Ayθ of the mounting stage 4 using equation (5) based on the first Y-axis Z-direction position Pyz1, the second Y-axis Z-direction position Pyz2, and the interval L3 between the first Y-axis detection head 15 and the second Y-axis detection head 16.

[0108] Ayθ=arctan((Pyz1-Pyz2) / L3)…(5)

[0109] The control unit 11 calculates the X-direction correction Ayx of the reference point Gp, which is located at a distance Lg from the center of the platform 4, based on the Y-axis correction Ayθ, the first X-direction position Pyx1 around the Y-axis, the second X-direction position Pyx2 around the Y-axis, and the target position Ptx in the X-direction, using equation (6). That is, the control unit 11 calculates the average of the offsets of the first X-direction position Pyx1 and the second X-direction position Pyx2 around the Y-axis relative to the target position Ptx in the X-direction, and the offset caused by rotation around the Y-axis as the X-direction correction Ayx.

[0110] Ayx=((Pyx1-Ptx)+(Pyx2-Ptx)) / 2+Lg×SinAyθ…(6)

[0111] The control unit 11 calculates the Z-direction correction Ayz of the reference point Gp using equation (7) based on the first Z-direction position Pyz1 around the Y-axis and the second Z-direction position Pyz2 around the Y-axis. That is, the control unit 11 calculates the average value of the first Z-direction position Pyz1 around the Y-axis and the second Z-direction position Pyz2 around the Y-axis as the Z-direction correction Ayz.

[0112] Ayz=(Pyz1+Pyz2) / 2…(7)

[0113] The control unit 11 sends the calculated X-direction correction Ayx, Z-direction correction Ayz, and Y-axis correction Ayθ to the output unit. The output unit 12 outputs the X-direction correction Ayx, Z-direction correction Ayz, and Y-axis correction Ayθ of the reference point Gp calculated by the control unit 11 to external control devices, etc. The control unit 11 then completes the correction calculation control S2.

[0114] Alternatively, the Y-axis detection unit 13 may be a structure in which the first Y-axis detection head 15 and the second Y-axis detection head 16 are arranged in the Z direction.

[0115] The control unit 11 calculates the X-direction correction Ayx and the Y-axis correction Ayθ based on the interval L3 between the first Y-axis detection head 15 and the second Y-axis detection head 16, the first Y-axis X-direction position Pyx1 obtained from the first Y-axis detection head 15, and the second Y-axis X-direction position Pyx2 obtained from the second Y-axis detection head 16. Additionally, the control unit 11 calculates the Z-direction correction Ayz based on the first Y-axis Z-direction position Pyz1 obtained from the first Y-axis detection head 15 and the second Y-axis Z-direction position Pyz2 obtained from the second Y-axis detection head 16.

[0116] Thus, the control unit 11 calculates the X-direction correction Ayx, Z-direction correction Ayz, and Y-axis correction Ayθ of the reference point Gp based on the interval L3 between the first Y-axis detection head 15 and the second Y-axis detection head 16, the distance Lg from the center of the stage 4 to the reference point Gp, and the position information obtained from the Y-axis detection unit 13. These corrections take into account not only the positioning errors in the X and Y directions relative to the target position Ptx in the X direction, but also the changes in attitude angle caused by rotation around the Y-axis. Therefore, the positioning error of the reference point Gp caused by changes in the attitude angle of the stage 4 can be detected at any target position Ptx in the X direction.

[0117] [Implementation Method 3]

[0118] The following uses Figure 9 and Figure 10 The third embodiment of the positioning device of the present invention, namely the positioning device 1C, will be described. Figure 9 This is a side view of the positioning device 1C viewed along the X direction. Figure 10 This is a block diagram illustrating the transmission of position control signals and position information in the calibration calculation and control of the positioning device 1C. The positioning device 1C includes a base 2, an X-direction moving part 3, a platform 4, an X-direction target position detection part 5, an X-axis detection part 17, and a control part 11.

[0119] like Figure 9 As shown, the X-axis detection unit 17 detects the X-direction and Z-direction positions of two separate locations on the stage 4. The X-axis detection unit 17 is, for example, an optical linear scale. The X-axis detection unit 17 has a first X-axis scale 18, a second X-axis scale 19, a first X-axis detection head 20, and a second X-axis detection head 21.

[0120] The first X-axis scale 18 is fixed to the side of the base 2 on the Y-direction side with the main measuring direction facing the X direction and the secondary measuring direction facing the Z direction. That is, the first X-axis scale 18 indicates the position in the X direction through the main scale and the position in the Z direction through the secondary scale.

[0121] The second X-axis scale 19 is fixed to the side of the base 2 on the opposite side in the Y direction, with the main measuring direction facing the X direction and the secondary measuring direction facing the Z direction. That is, the second X-axis scale 19 indicates the position in the X direction through the main scale and the position in the Z direction through the secondary scale. The first X-axis scale 18 and the second X-axis scale 19 are positioned in the Z direction at a different location than the X-direction reference scale 5a.

[0122] The first X-axis detection head 20 detects the main scale indicating the position in the X direction and the secondary scale indicating the position in the Z direction on the first X-axis scale 18. The first X-axis detection head 20 is fixed on the mounting stage 4 in a state capable of detecting both the main scale and the secondary scale of the first X-axis scale 18. The first X-axis detection head 20 uses the origin on the first X-axis scale 18 as a reference. When it detects the main scale of the first X-axis scale 18, it outputs the position Pxx1 in the X direction of the first X-axis; when it detects the secondary scale, it outputs the position Pxz1 in the Z direction of the first X-axis.

[0123] The second X-axis detection head 21 detects the main scale indicating the position in the X direction and the secondary scale indicating the position in the Z direction on the second X-axis scale 19. The second X-axis detection head 21 is fixed on the stage 4 in a state that enables it to detect both the main scale and the secondary scale of the second X-axis scale 19. The second X-axis detection head 21 uses the origin of the second X-axis scale 19 as a reference. When it detects the main scale of the second X-axis scale 19, it outputs the position Pxx2 in the X direction of the second X-axis; when it detects the secondary scale, it outputs the position Pxz2 in the Z direction of the second X-axis.

[0124] like Figure 10 As shown, the control unit 11 calculates the correction amount based on the position information obtained from the X-axis detection unit 17. Various programs and data are stored in the control unit 11 for controlling the operation of the X-axis detection unit 17.

[0125] The control unit 11 is electrically connected to the first X-axis detection head 20 and the second X-axis detection head 21. The control unit 11 can obtain the first X-axis X-direction position Pxx1 and the first X-axis Z-direction position Pxz1 from the first X-axis detection head 20. In addition, the control unit 11 can obtain the second X-axis X-direction position Pxx2 and the second X-axis Z-direction position Pxz2 from the second X-axis detection head 21.

[0126] The control unit 11 can calculate the X-direction correction Axx, Z-direction correction Axz, and X-axis correction Axθ of the reference point Gp based on the obtained first X-axis X-direction position Pxx1 and second X-axis X-direction position Pxx2, or first X-axis Z-direction position Pxz1 and second X-axis Z-direction position Pxz2. The X-direction correction Axx and Z-direction correction Axz are correction amounts used to position the reference point Gp at the target X-direction position Ptx and the target Z-direction position Ptz (in this embodiment, the target Z-direction position Ptz is zero). The X-axis correction Axθ is a correction amount used to eliminate changes in the attitude angle of the reference point Gp around the X-axis.

[0127] The output unit 12 can obtain the X-direction correction Axx, Z-direction correction Axz, and Y-axis correction Axθ of the reference point Gp calculated by the control unit 11, and output them to external control devices, etc.

[0128] <Correction Calculation and Control>

[0129] use Figure 10 and Figure 11 The calibration calculation control S3 in the positioning device 1C is explained. Figure 11 This is an X-direction side view of the platform, showing the change in the attitude angle of the platform in the positioning device 1C. The control unit 11 performs a correction amount calculation control S3, which calculates the correction amount of the reference point Gp relative to the target position Ptx in the X direction based on the position information obtained from the Y-axis detection unit 13. Furthermore, when the X-direction reference head 5b detects the origin, the first Y-axis detection head 20 and the second Y-axis detection head 21 also detect the origin.

[0130] like Figure 10 and Figure 11 As shown, in the correction calculation control S3, the control unit 11 outputs an X-direction position control signal Sx to the X-direction movement unit 3 based on the value detected by the X-direction target position detection unit 5, so that the position of the reference point Gp is ​​consistent with the X-direction target position Ptx. At this time, the stage 4 experiences a change in attitude angle (tilt) about the X-axis extending along the X-direction due to the X-direction and Z-direction errors of the linear guide of the movement unit 3b that guides the X-direction movement unit 3. That is, the reference point Gp is ​​not located at the X-direction target position Ptx and the Y-direction target position Pty due to the influence of the attitude angle change.

[0131] The control unit 11 acquires the first X-axis X-direction position Pxx1 and the first X-axis Z-direction position Pxz1 detected by the first X-axis detection head 20. Additionally, the control unit 11 acquires the second X-axis X-direction position Pxx2 and the second X-axis Z-direction position Pxz2 detected by the second X-axis detection head 21.

[0132] The control unit 11 calculates the X-axis correction amount Axθ of the stage 4 using equation (8) based on the first X-axis Z-direction position Pxz1, the second X-axis Z-direction position Pxz2, and the interval L4 between the first X-axis detection head 20 and the second X-axis detection head 21.

[0133] Axθ=arctan((Pxz1-Pxz2) / L4)…(8)

[0134] The control unit 11 calculates the X-direction correction Axx of the platform 4 using equation (9) based on the first X-axis X-direction position Pxx1, the second X-axis X-direction position Pxx2, and the target X-direction position Ptx. That is, the control unit 11 calculates the average of the offsets of the first X-axis X-direction position Pxx1 and the second X-axis X-direction position Pxx2 relative to the target X-direction position Ptx as the X-direction correction Axx.

[0135] Axx=((Pxx1-Ptx)+(Pxx2-Ptx)) / 2…(9)

[0136] The control unit 11 calculates the Y-direction correction Axy of the reference point Gp using equation (10) based on the X-axis correction Axθ and the distance Lg from the center of the stage 4 to the reference point Gp. That is, the control unit 11 calculates the offset caused by the rotation around the X-axis as the Y-direction correction Axy.

[0137] Axy=Lg×Sin(Axθ)…(10)

[0138] The control unit 11 calculates the Z-direction correction Axz of the stage 4 using equation (11) based on the first Z-direction position Pxz1 around the X-axis and the second Z-direction position Pxz2 around the X-axis. That is, the control unit 11 calculates the average value of the first Z-direction position Pxz1 around the X-axis and the second Z-direction position Pxz2 around the X-axis as the Z-direction correction Axz.

[0139] Axz=(Pxz1+Pxz2) / 2…(11)

[0140] Based on the first X-axis X-direction position Pxx1, the second X-axis X-direction position Pxx2, and the interval L4 between the first X-axis detection head 20 and the second X-axis detection head 21, the control unit 11 calculates the Z-axis correction amount Azθ of the reference point Gp using equation (12).

[0141] Azθ=arctan((Pxx1-Pxx2) / L4)…(12)

[0142] The control unit 11 sends the calculated X-direction correction Axx, Y-direction correction Axy, Z-direction correction Axz, Z-axis correction Azθ, and X-axis correction Axθ to the output unit. The output unit 12 outputs the acquired X-direction correction Axx, Y-direction correction Axy, Z-direction correction Axz, Z-axis correction Azθ, and X-axis correction Axθ to external control devices, etc. The control unit 11 then completes the correction calculation control S3.

[0143] Thus, the control unit 11 calculates the X-direction correction Axx, Y-direction correction Axy, Z-direction correction Axz, Z-axis correction Azθ, and X-axis correction Axθ based on the interval L4 between the first X-axis detection head 20 and the second X-axis detection head 21 and the position information obtained from the X-axis detection unit 17. These corrections, Axx, Axy, Axz, Azθ, and Axθ, consider not only the positioning errors in the X and Y directions relative to the target positions Ptx and Pty in the X and Y directions, but also the changes in attitude angles caused by rotation around the Y-axis and rotation around the Z-axis. Therefore, the positioning device 1C can detect positioning errors caused by changes in the attitude angles of the stage 4 at any target position Ptx in the X direction and target position Pty in the Y direction.

[0144] [Implementation Method 4]

[0145] The following uses Figure 12 The fourth embodiment of the positioning device of the present invention, namely the positioning device 1D, will be described. Figure 12 This is a side view of the positioning device 1D viewed along the X direction.

[0146] The positioning device 1D includes a first positioning device 1α, which is a positioning device 1, and a second positioning device 1β, which is another positioning device 1. In the positioning device 1D, the second positioning device 1β is mounted on the platform 4 of the first positioning device 1α. The positioning target G is mounted on the platform 4 of the second positioning device 1β. In this embodiment, the positioning target is a camera device 22.

[0147] The base 2 of the first positioning device 1α is disposed on a manufacturing apparatus (not shown). The base 2 is fixed to the upper end of the manufacturing apparatus (not shown) with its largest surface, i.e., the mounting surface, facing downward in the Z direction. That is, the mounting platform 4 of the first positioning device 1α is arranged with its mounting surface facing downward in the Z direction.

[0148] The base 2 of the second positioning device 1β is fixed to the mounting platform 4 of the first positioning device 1α. Therefore, the mounting platform 4 of the second positioning device 1β is arranged with its mounting surface facing downwards in the Z direction. Furthermore, the second positioning device 1β is arranged such that the moving direction of the mounting platform 4, i.e., the X direction, is perpendicular to the moving direction of the mounting platform 4 of the first positioning device 1α. That is, the mounting platform 4 of the second positioning device 1β is arranged to move in the Y direction of the first positioning device 1α. In this configuration of the positioning device 1D, the X direction of the second positioning device 1β is defined as the Y direction, and the Y direction of the second positioning device 1β is defined as the X direction, thereby aligning the direction of the second positioning device 1β with the direction of the first positioning device 1α.

[0149] The control unit 11 of the first positioning device 1α (refer to) Figure 3 The control unit 11 of the first positioning device 1α and the second positioning device 1β is configured to be the same control unit 11. Therefore, the positioning device 1D is configured to control the first positioning device 1α and the second positioning device 1β through the control unit 11.

[0150] In the above structure, the positioning device 1D includes a first positioning device 1α for positioning the object G in the X direction and a second positioning device 1β for positioning the object G in the Y direction. The second positioning device 1β is mounted on the platform 4 of the first positioning device 1α, which moves in the X direction. Therefore, the object G mounted on the platform 4 of the second positioning device 1β can be positioned at any position in the X and Y directions. In addition, the first positioning device 1α and the second positioning device 1β output position information for calculating the errors in the X and Y directions of each platform 4, and position information for calculating the change in attitude angle around the Z-axis. Thus, the positioning device 1D can detect the positioning error of the object at any target position Ptx in the X direction and target position Pty (not shown) in the Y direction.

[0151] [Implementation Method 5]

[0152] The following uses Figure 13 and Figure 14 The fifth embodiment of the positioning device of the present invention, namely the positioning device 1E, will be described. Figure 13 This is a block diagram representing the transmission of position control signals and position information in the image processing control of the positioning device 1E. Figure 14 This is a schematic diagram showing the state of image processing in image processing control S4.

[0153] like Figure 13 and Figure 14 As shown, the camera device 22 is, for example, a calibration camera. The camera device 22 is mounted on the platform 4 (see reference 1E) of the positioning device 1E (positioning device 1). Figure 1 , Figure 2 The camera device 22 captures images of calibration marks, wiring patterns, etc., on the substrate. The camera device 22 then transmits the captured image V to the control unit 11.

[0154] The control unit 11 controls the camera device 22. The control unit 11 is electrically connected to the camera device 22. The control unit 11 has data programs for controlling the camera device 22, etc. The control unit 11 is configured to send control signals to the camera device 22. The control unit 11 is configured to acquire the captured image V from the camera device 22. The control unit 11 includes an image processing unit 23.

[0155] The image processing unit 23 corrects the position, angle, distortion, tone, brightness, etc. of the image V. The image processing unit 23 is configured to acquire the image V. The image processing unit 23 has programs, data, etc., for processing the image V. The image processing unit 23 is configured to send the corrected image V to the output unit 12.

[0156] Image Processing Control

[0157] When the control unit 11 acquires an image V from the camera device 22, it starts image processing control S4. In addition, the positioning device 1E performs correction amount calculation control S1, in which the control unit 11 calculates the X-direction correction amount Azx, the Y-direction correction amount Azy, and the Z-axis correction amount Azθ based on the position information obtained from the Z-axis detection unit 6.

[0158] The control unit 11 sends the calculated X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis correction amount Azθ, along with the acquired image V, to the image processing unit 23. The image processing unit 23 acquires the image V (refer to...). Figure 14 (See upper figure). The image processing unit 23 rotates the image V based on the Z-axis correction amount Azθ (see figure). Figure 14 (Middle section image). Furthermore, the image processing unit 23 moves the rotated image V based on the X-direction correction amount Azx and the Y-direction correction amount Azy (see reference). Figure 14 (See the image below).

[0159] The image V captured by the camera device 22 mounted on the stage 4 of the positioning device 1E is affected by the positioning errors in the X and Y directions of the stage 4 relative to the target position Ptx in the X direction, as well as the rotation around the Z-axis. The image processing unit 23 of the positioning device 1E corrects the image V based on the X-direction correction amount Azx, the Y-direction correction amount Azy, and the Z-axis correction amount Azθ calculated by the control unit 11. Therefore, the correction of the image V based on the correction amounts does not produce positioning errors caused by the movement accuracy of the moving device or errors caused by changes in the attitude angle, compared to the case where the camera position and attitude are corrected by moving the camera device 22 using a moving device. Thus, it is possible to detect the positioning error of the camera device 22 caused by changes in the attitude angle of the stage 4 at any target position, and obtain an image equivalent to the image captured at the target position by correcting the image V.

[0160] [Other Implementation Methods]

[0161] Furthermore, in the above embodiments, positioning devices 1, 1A, 1B, 1C, 1D, and 1E detect the movement position of the stage 4 using an X-direction target position detection unit 5, which functions as an optical linear scale. However, the X-direction target position detection unit can be any device capable of measuring the position of the stage.

[0162] Furthermore, in Embodiment 1 described above, positioning devices 1, 1A, and 1E detect the position information of the stage 4 using Z-axis detection units 6 and 6A. In Embodiment 2, positioning device 1B detects the position information of the stage 4 using Y-axis detection unit 13. In Embodiment 3, positioning device 1C detects the position information of the stage 4 using X-axis detection unit 17. In Embodiment 4, positioning device 1D detects the position information of the stage 4 using two Z-axis detection units 6. However, a positioning device only needs to have at least one of the Z-axis detection unit, Y-axis detection unit, and X-axis detection unit 17. Alternatively, the positioning device can be configured to calculate a correction amount for the stage based on the position information detected by each detection unit, even when multiple detection units are present.

[0163] Furthermore, in the above embodiments, positioning devices 1, 1A, 1B, 1C, 1D, and 1E position the camera device 22 as the positioning object. However, the positioning object positioned by the positioning device can also be a processing device such as a bonding head.

[0164] Furthermore, in embodiments 1, 2, 3, and 4, positioning devices 1, 1A, 1B, 1C, and 1D are configured to perform positioning in the X direction or in both the X and Y directions. However, the positioning device may also include a Z-axis rotary table that rotates around the Z-axis. The Z-axis rotary table is configured to perform positioning around the Z-axis. The Z-axis rotary table is provided in the positioning device having a Z-axis detection unit.

[0165] The Z-axis rotary table is mounted on the mounting surface of the positioning device's platform. Furthermore, a positioning object is mounted on the Z-axis rotary table. The Z-axis rotary table rotates and moves the positioning object around the Z-axis based on a Z-axis correction amount Azθ calculated by the control unit.

[0166] In the above structure, the positioning device outputs position information from the Z-axis detection unit for calculating the change (deflection) of the attitude angle around the Z-axis. The control unit corrects the rotation of the Z-axis rotary table around the Z-axis based on X-direction correction amounts, Y-direction correction amounts, and Z-axis correction amounts that correct for positioning errors in the X and Y directions relative to the target position in the X direction caused by rotation around the Z-axis. Therefore, the positioning error of the object being positioned due to changes in the attitude angle of the platform can be detected at any target position.

[0167] Furthermore, in embodiment 4, the positioning device 1D is configured to move the positioning object G in the X and Y directions via the first positioning device 1α and the second positioning device 1β. However, the positioning device may also have a positioning device that moves the platform in the Z-axis direction.

[0168] Furthermore, in the embodiments described above, the Z-axis detection unit 6, the Y-axis detection unit 13, and the X-axis detection unit 17 have an optical linear scale consisting of a detection head capable of detecting both X-direction and Y-direction positions, or both X-direction and Z-direction positions, and a scale. However, the Z-axis detection unit, the Y-axis detection unit, and the X-axis detection unit may also be structures composed of linear scales that can only detect the position in one direction.

[0169] Furthermore, in the embodiments described above, the X-direction moving unit 3 generates driving force via a linear motor. However, the X-direction moving device only needs to have an actuator capable of position control.

[0170] Furthermore, in all the embodiments described above, positioning devices 1, 1A, 1B, 1C, 1D, and 1E perform positioning under a constant ambient temperature. However, the positioning devices may also have correction formulas or correction tables corresponding to various ambient temperatures at which the object being positioned moves. The positioning devices can then update the reference correction values ​​with higher accuracy, taking into account the influence of ambient temperature.

[0171] Furthermore, in all the embodiments described above, the X-direction moving part 3 of the positioning devices 1, 1A, 1B, 1C, 1D, and 1E moves the positioning object by means of a linear motor that acts as an electric actuator. However, the X-direction moving device and the Y-direction moving device may also be composed of a servo motor or the like that acting as an electric actuator, or a linear motion device such as a ball screw.

[0172] Furthermore, in all the embodiments described above, the Z-axis detection unit 6, the Y-axis detection unit 13, and the X-axis detection unit 17 are optical linear scales. However, the Z-axis detection unit, the Y-axis detection unit, and the X-axis detection unit can also be magnetic linear scales, optical or magnetic rotary encoders, as long as they can measure the position of the movable part.

[0173] Furthermore, in the above embodiment, the control unit 11 uses the position information detected by the Z-axis detection unit 6, the Y-axis detection unit 13, and the X-axis detection unit 17 to calculate the correction amount in each direction based on equations (1) to (12). However, the calculation of the correction amount in each direction may not be based on equations (1) to (12). Equations and methods other than equations (1) to (12) can be used for calculation.

[0174] The embodiments of the present invention have been described above, but these embodiments are merely illustrative examples for implementing the present invention. Therefore, the invention is not limited to the above embodiments, and appropriate modifications can be made to the above embodiments without departing from their spirit.

[0175] Label Explanation

[0176] 1, 1A, 1B, 1C, 1D, 1E: Positioning devices; 1α: First positioning device; 1β: Second positioning device; 2: Base; 3: X-direction moving part; 4: Platform; 5: X-direction target position detection unit; 5a: X-direction reference scale; 5b: X-direction reference head; 6: Z-axis detection unit; 7: First Z-axis scale; 8: Second Z-axis scale; 9: First detection head around the Z-axis; 10: Second Z-axis detection head; 11: Control Department; 12: Output section; 13: Y-axis detection unit; 14: First Y-axis scale; 15: First Y-axis detection head; 16: Second Y-axis detection head; 17: X-axis detection unit; 18: First X-axis scale; 19: Second X-axis scale; 20: First X-axis detection head; 21: Second X-axis detection head; 22: Camera device; 23: Image Processing Department; Pzx1: First position around the Z-axis in the X direction; Pzy1: First position around the Z-axis in the Y direction; Pzx2: Second position around the Z-axis in the X direction; Pzy2: Second position around the Z-axis in the Y direction; Pyx1: First position around the Y-axis in the X direction; Pyz1: First position around the Y-axis in the Z direction; Pyx2: The second position around the Y-axis in the X direction; Pyz2: The second position around the Y-axis in the Z direction; Pxx1: First position around the X-axis in the X direction; Pxz1: First position around the X-axis in the Z direction; Pxx2: Second position around the X-axis in the X direction; Pxz2: Second position around the X-axis in the Z direction; Sx: X-direction position control signal; Ptx: Target position in the X direction; Pty: Target position in the Y direction; Ptz: Target position in the Z direction; V: Image; G: Locating the object; Gp: reference point; Azx, Ayx, Axx: X-direction correction amount; Azy, Axz: Correction values ​​in the Y direction; Axz, Ayz: Z direction correction amount; Azθ: Correction amount around the Z-axis; Ayθ: Correction amount around the Y-axis; Axθ: Correction amount around the X-axis; S1, S2, S3: Correction amount calculation control; S4: Image processing control.

Claims

1. A positioning device comprising: Base; A mounting platform, supported on the base, is provided with an arbitrarily defined direction of movement as the X direction. A plane including the X direction and the Y direction perpendicular to the X direction is used as the mounting surface. The mounting platform can move to any position in the X direction. as well as The X-direction target position detection unit measures the position of the platform relative to the base in the X-direction, i.e., the target position in the X-direction. The positioning device positions the object mounted on the mounting surface of the platform to any position in the X direction. The positioning device has at least one of the following detection units: The Z-axis detection unit detects the rotation of the stage about the Z-axis, which extends along the Z-direction perpendicular to both the X-direction and the Y-direction. A Y-axis detection unit is used to detect the rotation of the stage about a Y-axis extending along the Y direction; and The X-axis detection unit detects the rotation of the stage about an X-axis extending along the X direction. The Z-axis detection unit has: A Z-axis scale, supported on the base, is used to measure the position of the platform in the X and Y directions. A first Z-axis detection head, supported on the platform, detects the scale of the Z-axis scale indicating the position in the X direction and the scale indicating the position in the Y direction. as well as A second Z-axis detection head, supported on the platform in a manner different from that of the first Z-axis detection head in at least one of the X and Y directions, detects the graduations of the Z-axis scale indicating the position in the X and Y directions. The first Z-axis detection head outputs the first Z-axis X-direction position and the first Z-axis Y-direction position, and the second Z-axis detection head outputs the second Z-axis X-direction position and the second Z-axis Y-direction position. The Y-axis detection unit includes: A Y-axis scale, supported on the base, is used to measure the position of the platform in the X and Z directions. A first Y-axis detection head, supported on the platform, detects the scale of the Y-axis scale indicating the position in the X direction and the scale indicating the position in the Z direction. as well as A second Y-axis detection head, supported on the platform in a manner different from that of the first Y-axis detection head in at least one of the X and Z directions, detects the graduations of the Y-axis scale indicating the position in the X direction and the graduations indicating the position in the Z direction. The first Y-axis detection head outputs the first Y-axis X-direction position and the first Y-axis Z-direction position, and the second Y-axis detection head outputs the second Y-axis X-direction position and the second Y-axis Z-direction position. The X-axis detection unit includes: A first X-axis scale, supported on the base, is used to measure the position of the stage in the X and Z directions. A first X-axis detection head, supported on the platform, detects the scale of the first X-axis scale indicating the position in the X direction and the scale indicating the position in the Z direction. A second X-axis scale, supported on the base in a manner different from that of the first X-axis scale in the Y direction, is used to measure the X-direction and Z-direction positions of the stage; and A second Z-axis detection head, supported on the platform, detects the scale markings of the second X-axis scale indicating the position in the X direction and the scale marking the position in the Z direction. The first X-axis detection head outputs the first X-axis X-direction position and the first X-axis Z-direction position, and the second X-axis detection head outputs the second X-axis X-direction position and the second X-axis Z-direction position.

2. The positioning device according to claim 1, wherein, The positioning device may also include other positioning devices. The X direction, which serves as the movement direction of the other positioning devices, is defined as the Y direction, and the Y direction of the other positioning devices is defined as the X direction. The base of the other positioning device is mounted on the platform of the positioning device, and the Y direction, which is the moving direction of the other positioning device, is oriented toward the Y direction of the positioning device, and the X direction of the other positioning device is oriented toward the X direction of the positioning device.

3. The positioning device according to claim 1 or 2, wherein, The positioning device includes: The control unit controls the position of the stage in the X direction; and The output unit outputs the position of the stage in the X direction. The control unit obtains the X-direction target position of the platform from the X-direction target position detection unit. In the case of having the Z-axis detection unit described above The control unit obtains the first Z-axis X-direction position and the first Z-axis Y-direction position detected by the first Z-axis detection head, and the second Z-axis X-direction position and the second Z-axis Y-direction position detected by the second Z-axis detection head. The control unit calculates the X-direction correction, Y-direction correction, and Z-axis correction of the platform at the reference point at the target position in the X-direction based on the distance from the platform to the reference point of the object being positioned, the first position around the Z-axis in the X direction, and the second position around the Z-axis in the X direction, or the first position around the Z-axis in the Y direction and the second position around the Z-axis in the Y direction. The output unit outputs the calculated X-direction correction amount, Y-direction correction amount, and Z-axis correction amount. In the case of having the Y-axis detection unit described above The control unit obtains the first Y-axis X-direction position and the first Y-axis Z-direction position detected by the first Y-axis detection head, and the second Y-axis X-direction position and the second Y-axis Z-direction position detected by the second Y-axis detection head. The control unit calculates the X-direction correction, Z-direction correction, and Y-axis correction for the reference point at the target position in the X-direction based on the distance from the platform to the reference point of the positioning object, the first position in the X-direction around the Y-axis and the second position in the X-direction around the Y-axis, or the first position in the Z-direction around the Y-axis and the second position in the Z-direction around the Y-axis. The output unit outputs the calculated X-direction correction, Z-direction correction, and Y-axis correction. In the case of having the X-axis detection unit described above The control unit obtains the first X-axis X-direction position and the first X-axis Z-direction position detected by the first X-axis detection head, and the second X-axis X-direction position and the second X-axis Z-direction position detected by the second X-axis detection head. The control unit calculates the Y-direction correction, Z-direction correction, and X-axis correction of the reference point at the target position in the X-direction based on the distance from the platform to the reference point of the positioning object, the first position around the X-axis in the Z-direction, and the second position around the X-axis in the Z-direction. The control unit calculates the X-direction correction and the Z-axis correction of the reference point at the target position in the X-direction based on the distance from the platform to the reference point of the positioning object, the first position around the X-axis, and the second position around the X-axis. The output unit outputs at least one of the calculated X-direction correction amount, Z-direction correction amount, Y-axis correction amount, and Z-axis correction amount.

4. The positioning device according to claim 3, wherein, The positioning device also includes a camera mounted on the mounting surface of the platform. The control unit includes an image processing unit that processes the images captured by the camera device. When the control unit acquires the image, it corrects the image through the image processing unit based on the correction amount calculated from the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the correction amount around the Z-axis, the correction amount around the Y-axis, and the correction amount around the X-axis.

5. The positioning device according to claim 3, wherein, The positioning device has a Z-axis rotary table, which is supported on the mounting platform and rotates about the Z-axis as the center of rotation. The control unit controls the Z-axis rotary table based on the calculated Z-axis correction amount.

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