Microfluidic chip and method of manufacturing the same
Patent Information
- Application Number
- CN202510549837.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-28
- Publication Date
- 2026-10-30
AI Technical Summary
[0030]本申请实施例的微流控芯片对与反应腔室接触的金属层的部分区域进行图案化修饰，即在金属层的与反应腔室接触的部分区域修饰亲水性基团(例如，修饰聚多巴胺)，形成亲水区，阻止疏水的抗体蛋白等待检测物质与金属进行接触，而金属层的未被修饰的区域能够与大量疏水的抗体蛋白等待检测物质结合，可以使疏水的待检测物质的捕获和检测主要在与非亲水区接触的反应腔室进行，而不会分散到与非亲水区相隔离的通道中，提高了反应腔室中的捕获效率，可以提高芯片的表面修饰及反应效率，从而提高荧光检测信号的亮度，使荧光亮点更加集中，提高荧光检测的准确度和可靠性，促进SERS芯片在体外诊断等领域内的应用。
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Figure CN122999301A_ABST
Abstract
Description
Technical Field
[0001] The embodiments of this application relate to, but are not limited to, microfluidic technology, and particularly to a microfluidic chip and its manufacturing method. Background Technology
[0002] Raman spectroscopy is a type of molecular vibrational spectroscopy that reflects the structural characteristics of molecules. However, due to the weak Raman scattering effect, Raman spectroscopy studies of surface-adsorbed species almost always utilize their enhancement effect, namely surface-enhanced Raman spectroscopy (SERS). SERS can significantly enhance the Raman signal of certain target molecules on specific metal surfaces, thereby achieving highly sensitive molecular detection. Moreover, the signal intensity can vary with the applied electrode potential. SERS can be used to detect low-abundance biomolecules, such as proteins in body fluids and cancer biomarkers in blood. Furthermore, when combined with plasma sensing, it can be used for highly sensitive quantitative detection of biomolecular interactions.
[0003] Combining SERS with microfluidic chips is one of the development trends in SERS detection technology. Its main principle is to integrate the SERS metal substrate material into the microfluidic platform through physicochemical means to achieve high-sensitivity detection in microchannels or microreaction chambers. It can also take full advantage of the advantages of microfluidic platforms such as low sample consumption, short reaction time, and low equipment requirements, making it particularly suitable for portable detection in point of care test (POCT) application scenarios. Summary of the Invention
[0004] The following is an overview of the subject matter described in detail herein. This overview is not intended to limit the scope of protection of this application.
[0005] This application provides a microfluidic chip and its manufacturing method. The microfluidic chip can make the antibodies to be detected mainly bind in the reaction chamber instead of being dispersed in the channel, thereby improving the brightness of the fluorescence detection signal and improving the accuracy and reliability of fluorescence detection.
[0006] This application provides a microfluidic chip, the microfluidic chip comprising:
[0007] A metal layer is located on one side of a substrate; the metal layer includes a hydrophilic region and one or more non-hydrophilic regions spaced apart; the hydrophilic region has hydrophilic groups;
[0008] A channel layer is located on the side of the metal layer away from the substrate; the channel layer has at least one channel and one or more reaction chambers spaced apart, the reaction chambers communicating with the channel;
[0009] The reaction chamber is located on the side of the non-hydrophilic region away from the substrate, and the reaction chamber is in contact with the non-hydrophilic region; the channel is isolated from the non-hydrophilic region.
[0010] In some embodiments of this application, the channel is located on the side of the hydrophilic region away from the substrate.
[0011] In some embodiments of this application, the orthographic projection of the reaction chamber onto the substrate falls within the range of the orthographic projection of the non-hydrophilic region onto the substrate.
[0012] In some embodiments of this application, the hydrophilic region is covered by a polydopamine film layer, wherein the hydrophilic groups are derived from polydopamine.
[0013] In some embodiments of this application, the area ratio of the non-hydrophilic region to the hydrophilic region is 1:10 to 1:1000.
[0014] In some embodiments of this application, the average diameter of the reaction chamber is greater than the average diameter of the channel.
[0015] In some embodiments of this application, the average diameter of the reaction chamber is 2 mm to 6 mm, and the average diameter of the channel is 0.5 mm to 1.5 mm.
[0016] In some embodiments of this application, the material of the metal layer is selected from any one or more of gold, silver, copper, gold-silver alloys, gold-palladium alloys, and silver-platinum alloys.
[0017] This application embodiment also provides a method for manufacturing the microfluidic chip as described above, the manufacturing method comprising:
[0018] A metal layer is formed on one side of the substrate;
[0019] A portion of the metal layer is modified with hydrophilic groups to obtain the hydrophilic region; the region of the metal layer not modified with the hydrophilic groups is the non-hydrophilic region.
[0020] The channel layer is formed on the side of the metal layer away from the substrate.
[0021] In some embodiments of this application, modifying a portion of the metal layer with hydrophilic groups to obtain the hydrophilic region includes:
[0022] Polydopamine is formed in the hydrophilic region of the metal layer to be modified.
[0023] In some embodiments of this application, forming polydopamine in the hydrophilic region to be modified in the metal layer includes:
[0024] A salt solution of dopamine is added to the hydrophilic region of the metal layer to be modified, and a polymerization reaction of dopamine is carried out under alkaline conditions to form polydopamine in the hydrophilic region of the metal layer to be modified.
[0025] In some embodiments of this application, the pH of the alkaline conditions is in the range of 7.5 to 9.5.
[0026] In some embodiments of this application, the formation of polydopamine in the hydrophilic region to be modified in the metal layer further includes:
[0027] A photoresist is formed on the side of the metal layer away from the substrate; the photoresist includes an exposed area and a non-exposed area, the exposed area being located on the side of the hydrophilic region of the metal layer to be modified away from the substrate, and the non-exposed area being located on the side of the non-hydrophilic region of the metal layer to be formed away from the substrate;
[0028] Remove the photoresist located in the exposed area to expose the hydrophilic region of the metal layer to be modified, and retain the photoresist in the non-exposed area;
[0029] After polydopamine is formed, the photoresist in the non-exposed areas is removed.
[0030] The microfluidic chip of this application modifies a portion of the metal layer in contact with the reaction chamber by patterning hydrophilic groups (e.g., polydopamine) to form a hydrophilic region. This prevents hydrophobic antibody proteins and other detectable substances from contacting the metal. Meanwhile, the unmodified regions of the metal layer can bind to a large number of hydrophobic antibody proteins and other detectable substances. This allows the capture and detection of hydrophobic detectable substances to occur primarily in the reaction chamber in contact with the non-hydrophilic region, rather than being dispersed into channels isolated from the non-hydrophilic region. This improves the capture efficiency in the reaction chamber, enhances the surface modification and reaction efficiency of the chip, thereby increasing the brightness of the fluorescence detection signal, making the fluorescence spots more concentrated, improving the accuracy and reliability of fluorescence detection, and promoting the application of SERS chips in in vitro diagnostics and other fields.
[0031] Conversely, if the portion of the metal layer in contact with the reaction chamber is not patterned, hydrophobic antibody proteins and other substances awaiting detection can be captured and detected in both the reaction chamber and the channel. This results in a dispersed fluorescence detection signal, low fluorescence brightness, and insufficiently concentrated fluorescent bright spots, which are easily confused with background fluorescence noise and thus cannot be distinguished. Consequently, the accuracy and reliability of fluorescence detection are affected.
[0032] Other features and advantages of this application will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the application. Other advantages of this application can be realized and obtained by means of the embodiments described in the description and the accompanying drawings. Attached Figure Description
[0033] The accompanying drawings are used to provide an understanding of the technical solutions of this application and constitute a part of the specification. They are used together with the embodiments of this application to explain the technical solutions of this application and do not constitute a limitation on the technical solutions of this application.
[0034] Figure 1 A schematic diagram of the disassembled structure of a microfluidic chip as an exemplary embodiment of this application;
[0035] Figure 2 A process flow diagram of a method for manufacturing a microfluidic chip, which is an exemplary embodiment of this application;
[0036] Figure 3 This is a process flow diagram of patterning a metal layer in a method for manufacturing a microfluidic chip, which is an exemplary embodiment of this application.
[0037] The meanings of the symbols in the attached diagram are as follows:
[0038] 10-Substrate; 20-Metal layer; 21-Hydrophilic region; 22-Non-hydrophilic region; 23-Photoresist; 24-Polydopamine film layer; 30-Channel layer; 31-Channel; 32-Reaction chamber; 33-Reservoir. Detailed Implementation
[0039] This application describes several embodiments, but these descriptions are exemplary and not limiting, and it will be apparent to those skilled in the art that many more embodiments and implementations are possible within the scope of the embodiments described herein. Although many possible combinations of features are shown in the drawings and discussed in the detailed description, many other combinations of the disclosed features are also possible. Unless specifically limited, any feature or element of any embodiment may be used in combination with, or may replace, any feature or element of any other embodiment.
[0040] This application includes and contemplates combinations of features and elements known to those skilled in the art. The embodiments, features, and elements disclosed in this application can also be combined with any conventional features or elements to form unique inventive solutions. Any feature or element of any embodiment can also be combined with features or elements from other inventive solutions to form another unique inventive solution. Therefore, it should be understood that any feature shown and / or discussed in this application can be implemented individually or in any suitable combination. Therefore, the embodiments are not limited except by the limitations imposed by the appended claims and their equivalents. Furthermore, various modifications and changes can be made within the scope of the appended claims.
[0041] Furthermore, in describing representative embodiments, the specification may have presented methods and / or processes as a specific sequence of steps. However, the method or process should not be limited to the specific order of steps described herein, to the extent that it does not depend on such a specific order. As will be understood by those skilled in the art, other sequences of steps are also possible. Therefore, the specific order of steps set forth in the specification should not be construed as a limitation of the claims. Moreover, the claims concerning the method and / or process should not be limited to the steps performed in the written order, and those skilled in the art will readily understand that these orders can be varied and still remain within the spirit and scope of the embodiments of this application.
[0042] In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise expressly and specifically limited.
[0043] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0044] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0045] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0046] This application provides a microfluidic chip. Figure 1 This is a schematic diagram of the disassembled structure of a microfluidic chip, which is an exemplary embodiment of this application.
[0047] like Figure 1 As shown, the microfluidic chip includes: a metal layer 20 and a channel layer 30;
[0048] The metal layer 20 is located on one side of the substrate 10; the metal layer 20 includes a hydrophilic region 21 and one or more non-hydrophilic regions 22 distributed at intervals; the hydrophilic region 21 has hydrophilic groups;
[0049] The channel layer 30 is located on the side of the metal layer 20 away from the substrate 10; the channel layer 30 has at least one channel 31 and one or more reaction chambers 32 distributed at intervals, the reaction chambers 32 being in communication with the channel 31;
[0050] The reaction chamber 32 is located on the side of the non-hydrophilic region 22 away from the substrate 10, and the reaction chamber 32 is in contact with the non-hydrophilic region 22; the channel 31 is isolated from the non-hydrophilic region 22.
[0051] The microfluidic chip of this application modifies a portion of the metal layer in contact with the reaction chamber by patterning hydrophilic groups (e.g., polydopamine) to form a hydrophilic region. This prevents hydrophobic antibody proteins and other detectable substances from contacting the metal. Meanwhile, the unmodified regions of the metal layer can bind to a large number of hydrophobic antibody proteins and other detectable substances. This allows the capture and detection of hydrophobic detectable substances to occur primarily in the reaction chamber in contact with the non-hydrophilic region, rather than being dispersed into channels isolated from the non-hydrophilic region. This improves the capture efficiency in the reaction chamber, enhances the surface modification and reaction efficiency of the chip, thereby increasing the brightness of the fluorescence detection signal, making the fluorescence spots more concentrated, improving the accuracy and reliability of fluorescence detection, and promoting the application of SERS chips in in vitro diagnostics and other fields.
[0052] Conversely, if the portion of the metal layer in contact with the reaction chamber is not patterned, hydrophobic antibody proteins and other substances awaiting detection can be captured and detected in both the reaction chamber and the channel. This results in a dispersed fluorescence detection signal, low fluorescence brightness, and insufficiently concentrated fluorescent bright spots, which are easily confused with background fluorescence noise and thus cannot be distinguished. Consequently, the accuracy and reliability of fluorescence detection are affected.
[0053] In the description of this application, "the channel is isolated from the non-hydrophilic region" means that the channel will not directly contact the non-hydrophilic region, but the channel can be connected to the non-hydrophilic region through the reaction chamber.
[0054] In some embodiments of this application, the channel can be positioned on the side of the hydrophilic region away from the substrate, thereby avoiding direct contact between the channel and the non-hydrophilic region. In other embodiments, physical isolation can also be used to avoid direct contact between the channel and the non-hydrophilic region. For example, the channel can be positioned on the side of the non-hydrophilic region away from the substrate, but an isolation layer is provided between the channel and the non-hydrophilic region. For example, a film layer formed from a material such as polydimethylsiloxane (PDMS), which is the same material as the channel layer, can be used as the isolation layer. However, compared with physical isolation, the solution of positioning the channel on the side of the hydrophilic region away from the substrate in the embodiments of this application is easier to implement. For example, the processing technology of the channel layer is simpler, and the encapsulation technology of the channel layer and the substrate is simpler.
[0055] In some embodiments of this application, the orthographic projection of the reaction chamber onto the substrate falls within the range of the orthographic projection of the non-hydrophilic region onto the substrate.
[0056] For example, the area of the orthographic projection of the reaction chamber onto the substrate can be equal to or smaller than the area of the orthographic projection of the non-hydrophilic region onto the substrate. In this case, a larger contact area between the reaction chamber and the non-hydrophilic region can be obtained, which is beneficial for capturing more hydrophobic antibody proteins and other substances to be detected in the reaction chamber.
[0057] In some embodiments of this application, such as Figure 1 As shown, the hydrophilic region 21 is covered by a polydopamine film layer 24, wherein the hydrophilic groups are derived from polydopamine.
[0058] The strong negative charge and numerous hydrophilic groups of polydopamine can significantly reduce the non-specific adsorption of antibody proteins. While there are reports of using polydopamine for specific adsorption of biomolecules or cells, this specific adsorption relies on polydopamine's ability to graft or couple with biomolecules or cells, which is a chemical reaction process requiring specific reaction conditions. This application, however, utilizes the hydrophilicity of polydopamine, which is a physical process requiring no pretreatment of the polydopamine and no specific reaction conditions.
[0059] Polydopamine not only provides hydrophilic groups, but also has an anti-fouling effect because its surface groups are mostly negatively charged, which can reduce the adsorption of ordinary proteins on the surface.
[0060] In some embodiments of this application, the area ratio of the non-hydrophilic region to the hydrophilic region is from 1:10 to 1:1000. For example, the area ratio of the non-hydrophilic region to the hydrophilic region can be 1:10, 1:50, 1:100, 1:200, 1:300, 1:400, 1:500, 1:600, 1:700, 1:800, 1:900, or 1:1000.
[0061] When the area ratio of the non-hydrophilic region to the hydrophilic region is in the range of 1:10 to 1:1000, on the one hand, the contact area between the hydrophobic antibody protein and the metal layer is appropriate, allowing for sufficient contact reaction, which is beneficial to improving the accuracy and reliability of detection; on the other hand, the fluorescence detection signal will not be dispersed, the fluorescence brightness is high, and the fluorescence bright spots are concentrated, which is beneficial to improving the accuracy and stability of detection.
[0062] In some embodiments of this application, such as Figure 1 As shown, the average diameter of the reaction chamber 32 is greater than the average diameter of the channel 31.
[0063] In some embodiments of this application, the average diameter of the reaction chamber can be 3 mm, and the average diameter of the channel can be 1 mm.
[0064] The average diameter of the reaction chamber can be from 2 mm to 6 mm, for example, the average diameter of the reaction chamber can be 2 mm, 3 mm, 4 mm, 5 mm or 6 mm;
[0065] The average diameter of the channel can be from 0.5 mm to 1.5 mm, for example, the average diameter of the channel can be 0.5 mm, 0.8 mm, 1 mm, 1.25 mm or 1.5 mm.
[0066] In the description of this application, if the reaction chamber is not spherical, or the channel is not tubular, then the “average diameter” of the reaction chamber or the channel refers to their maximum projected length in a direction other than the extension direction.
[0067] In some embodiments of this application, the reaction chamber can be spherical with a diameter of 3 mm; the channel can be tubular with a diameter of 1 mm; and the height of the reaction chamber can be the same as the height of the channel, for example, 1 mm.
[0068] In some embodiments of this application, the material of the metal layer is selected from any one or more of gold, silver, copper, gold-silver alloys, gold-palladium alloys, and silver-platinum alloys.
[0069] In some embodiments of this application, such as Figure 1 As shown, the channel layer 30 may also include a liquid storage tank 33, which may be located at one or both ends of the channel 31.
[0070] In some embodiments of this application, the substrate can be a common glass substrate with dimensions of length × width × height = 75mm × 25mm × 0.5mm.
[0071] In some embodiments of this application, the dimensions of the metal layer can be length × width × height = 50mm × 20mm × 30nm.
[0072] In some embodiments of this application, the material of the channel layer can be PDMS, etc., and its size can be length × width × height = 75mm × 25mm × 2mm.
[0073] In some embodiments of this application, the channel layer may have multiple parallel channels.
[0074] This application also provides a method for manufacturing a microfluidic chip as described above. Figure 2 A process flow diagram of a method for manufacturing a microfluidic chip, which is an exemplary embodiment of this application.
[0075] like Figure 2 As shown, the manufacturing method includes:
[0076] A metal layer is formed on one side of the substrate;
[0077] A portion of the metal layer is modified with hydrophilic groups to obtain the hydrophilic region; the region of the metal layer not modified with the hydrophilic groups is the non-hydrophilic region.
[0078] The channel layer is formed on the side of the metal layer away from the substrate.
[0079] In some embodiments of this application, modifying a portion of the metal layer with hydrophilic groups to obtain the hydrophilic region includes:
[0080] Polydopamine is formed in the hydrophilic region of the metal layer to be modified.
[0081] In some embodiments of this application, forming polydopamine in the hydrophilic region to be modified in the metal layer includes:
[0082] A salt solution of dopamine is added to the hydrophilic region of the metal layer to be modified, and a polymerization reaction of dopamine is carried out under alkaline conditions to form polydopamine in the hydrophilic region of the metal layer to be modified.
[0083] In some embodiments of this application, the pH of the alkaline conditions is in the range of 7.5 to 9.5. The polymerization of dopamine is carried out under mild conditions and can be performed under weakly alkaline conditions.
[0084] In some embodiments of this application, the formation of polydopamine in the hydrophilic region to be modified in the metal layer further includes:
[0085] A photoresist is formed on the side of the metal layer away from the substrate; the photoresist includes an exposed area and a non-exposed area, the exposed area being located on the side of the hydrophilic region of the metal layer to be modified away from the substrate, and the non-exposed area being located on the side of the non-hydrophilic region of the metal layer to be formed away from the substrate;
[0086] Remove the photoresist located in the exposed area to expose the hydrophilic region of the metal layer to be modified, and retain the photoresist in the non-exposed area;
[0087] After polydopamine is formed, the photoresist in the non-exposed areas is removed.
[0088] In some embodiments of this application, such as Figure 3 As shown, the manufacturing method includes:
[0089] S10: A metal layer 20 is formed on one side of the substrate 10;
[0090] S20: Photoresist 23 is coated on the side of metal layer 20 away from substrate 10; photoresist 23 includes an exposed area and a non-exposed area, the exposed area is located on the side of the hydrophilic area to be modified of metal layer 20 away from substrate 10, and the non-exposed area is located on the side of the non-hydrophilic area to be formed of metal layer 20 away from substrate 10.
[0091] S30: Remove the photoresist 23 located in the exposed area using a patterned mask to expose the hydrophilic area of the metal layer 20 to be modified, while retaining the photoresist 23 in the non-exposed area;
[0092] S40: A dopamine hydrochloride solution with a concentration of 2 g / L is dropped and spread on the surface of the substrate 10 obtained in step S30, and then a Tris buffer solution with a concentration of 10 mM and a pH of 8.0 is added to allow dopamine to polymerize under alkaline conditions until the reaction is complete, forming a polydopamine film layer 24 covering the hydrophilic region to be modified in the metal layer 20 and the photoresist 23 in the non-exposed region.
[0093] S50: Remove the photoresist 23 and the polydopamine film 24 on the surface of the non-exposed area, and remove unreacted dopamine.
[0094] In some embodiments of this application, the metal layer can be deposited on the substrate surface by means of vapor deposition, metal sputtering, or other methods.
[0095] In some embodiments of this application, the channel layer and the metal layer can be encapsulated and bonded together by oxygen plasma treatment or UV-curing adhesive.
[0096] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.
Claims
1. A microfluidic chip, characterized in that, include: A metal layer is located on one side of the substrate; the metal layer includes a hydrophilic region and one or more non-hydrophilic regions spaced apart. The hydrophilic region contains hydrophilic groups; A channel layer is located on the side of the metal layer away from the substrate; the channel layer has at least one channel and one or more reaction chambers spaced apart, the reaction chambers communicating with the channel; The reaction chamber is located on the side of the non-hydrophilic region away from the substrate, and the reaction chamber is in contact with the non-hydrophilic region; the channel is isolated from the non-hydrophilic region.
2. The microfluidic chip according to claim 1, characterized in that, The channel is located on the side of the hydrophilic area away from the substrate.
3. The microfluidic chip according to claim 2, characterized in that, The orthographic projection of the reaction chamber onto the substrate falls within the range of the orthographic projection of the non-hydrophilic region onto the substrate.
4. The microfluidic chip according to claim 3, characterized in that, The hydrophilic region is covered by a polydopamine film layer, and the hydrophilic groups are derived from polydopamine.
5. The microfluidic chip according to claim 3, characterized in that, The area ratio of the non-hydrophilic area to the hydrophilic area is 1:10 to 1:1000.
6. The microfluidic chip according to any one of claims 1 to 5, characterized in that, The average diameter of the reaction chamber is greater than the average diameter of the channel.
7. The microfluidic chip according to claim 6, characterized in that, The average diameter of the reaction chamber is 2 mm to 6 mm, and the average diameter of the channel is 0.5 mm to 1.5 mm.
8. The microfluidic chip according to any one of claims 1 to 5, characterized in that, The material of the metal layer is selected from any one or more of gold, silver, copper, gold-silver alloys, gold-palladium alloys, and silver-platinum alloys.
9. A method for manufacturing a microfluidic chip according to any one of claims 1 to 8, characterized in that, include: A metal layer is formed on one side of the substrate; Hydrophilic groups are modified in a portion of the metal layer to obtain the hydrophilic region; The region of the metal layer that is not modified by the hydrophilic group is the non-hydrophilic region; The channel layer is formed on the side of the metal layer away from the substrate.
10. The method for manufacturing a microfluidic chip according to claim 9, characterized in that, The modification of a portion of the metal layer with hydrophilic groups to obtain the hydrophilic region includes: Polydopamine is formed in the hydrophilic region of the metal layer to be modified.
11. The method for manufacturing a microfluidic chip according to claim 10, characterized in that, The formation of polydopamine in the hydrophilic region to be modified in the metal layer includes: A salt solution of dopamine is added to the hydrophilic region of the metal layer to be modified, and a polymerization reaction of dopamine is carried out under alkaline conditions to form polydopamine in the hydrophilic region of the metal layer to be modified.
12. The method for manufacturing a microfluidic chip according to claim 11, characterized in that, The pH of the alkaline conditions is in the range of 7.5 to 9.
5.
13. The method for manufacturing a microfluidic chip according to any one of claims 10 to 12, characterized in that, The formation of polydopamine in the hydrophilic region to be modified in the metal layer further includes: A photoresist is formed on the side of the metal layer away from the substrate; the photoresist includes an exposed area and a non-exposed area, the exposed area being located on the side of the hydrophilic region of the metal layer to be modified away from the substrate, and the non-exposed area being located on the side of the non-hydrophilic region of the metal layer to be formed away from the substrate; Remove the photoresist located in the exposed area to expose the hydrophilic region of the metal layer to be modified, and retain the photoresist in the non-exposed area; After polydopamine is formed, the photoresist in the non-exposed areas is removed.