Device for reducing surface carbon residue accumulation during MEMS probe forming and working method

Abstract

The application discloses a kind of reducing MEMS probe forming when surface carbon residue accumulation device and working method in the field of semiconductor probe, device includes laser cutting workstation, laser cutting workstation is equipped with substrate, substrate is used to carry the probe metal sheet to be cut, laser cutting workstation left and right sides are correspondingly provided with air blowing system and dust collection system, air blowing system includes moving mechanism one, moving mechanism one is provided with air blowing component, dust collection system includes moving mechanism two, moving mechanism two is provided with dust collection component;Working method includes the following steps: substrate pretreatment, initial positioning, femtosecond laser cutting, in-situ real-time monitoring, dynamic synergistic control.The application reduces heat accumulation, reduces probe surface carbon residue residue, improves MEMS probe processing yield.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor probes, and specifically relates to a device for reducing the accumulation of carbon residue on the surface of MEMS probes during the forming process. Background Technology

[0002] MEMS (Micro-Electro-Mechanical System) probes are high-precision test elements manufactured using microfabrication technology. They are fabricated using advanced semiconductor processes and microfabrication techniques, exhibiting high dimensional accuracy, good consistency, and stable mechanical properties. They can adapt to the high-density, fine-pitch array requirements of chip testing, while also meeting the testing needs of high-frequency signals. Due to their precise structure at the micrometer and even nanometer scale, MEMS probes place extremely high demands on material properties and fabrication precision.

[0003] To achieve such precision manufacturing standards, femtosecond laser processing technology has been introduced into the fabrication process of MEMS probes. Femtosecond laser pulses have extremely short durations, and with the help of multi-axis dynamic focusing systems and high-repetition-rate pulse output, sub-micron-level processing resolution can be achieved, with aperture deviations strictly controlled within ±1μm. This meets the stringent specifications for MEMS probe dimensions in advanced semiconductor manufacturing processes.

[0004] However, when femtosecond lasers cut the metal materials used in MEMS probes, the probe structure is extremely fine, and the energy in the processing area is highly concentrated, with instantaneous temperatures near the focal point reaching thousands of degrees Celsius. When the next pulse reaches the product surface, the thermal effect of the previous pulse has not yet dissipated, easily leading to a heat accumulation effect. This effect causes molten material or microparticles to not be discharged in time, re-adhering to the probe sidewalls or tips, forming slag. Such residues are firmly attached and difficult to remove through conventional cleaning processes, directly affecting the probe's surface quality, electrical and mechanical contact performance, resulting in products that fail to meet shipping standards and severely restricting production yield.

[0005] Femtosecond laser processing provides an effective way to achieve high-precision manufacturing of MEMS probes, but the dross problem that arises during the processing is still a key process challenge that restricts the improvement of production capacity and yield. Summary of the Invention

[0006] One of the objectives of this invention is to provide a device for reducing carbon slag buildup on the surface of MEMS probes during the forming process. By using a dual-sided, multi-degree-of-freedom adjustable air blowing system and dust collection system, the device actively suppresses molten slag adhesion during the laser processing stage, reduces heat accumulation, reduces carbon slag residue on the probe surface, and improves the yield of MEMS probe processing.

[0007] The objective of this invention is achieved as follows: a device for reducing surface carbon residue accumulation during MEMS probe molding, comprising a laser cutting stage, a substrate on which a metal sheet for the probe to be cut is provided, an air blowing system and a dust collection system respectively provided on the left and right sides of the laser cutting stage, the air blowing system comprising a first moving mechanism, an air blowing component on the first moving mechanism, a first CCD camera and a first infrared sensor on the first moving mechanism, the dust collection system comprising a second moving mechanism, a second moving mechanism, a second moving mechanism, a second CCD camera and a second infrared sensor on the second moving mechanism; and a control system, wherein the first CCD camera, the first infrared sensor, the second CCD camera, the second infrared sensor, the first moving mechanism and the second moving mechanism are all connected to the control system.

[0008] As a further improvement of the present invention, a horizontal fixed base is provided corresponding to the front and rear sides of the laser cutting worktable, the two fixed bases are parallel to each other, and two parallel upper guide rails are provided on each fixed base. The side of the two fixed bases that are close to each other is also provided with a side guide rail.

[0009] As a further improvement of the present invention, the moving mechanism includes two movable seats installed at the left ends of two fixed bases corresponding to each other. Each movable seat has two rows of horizontally spaced sliders on its lower side corresponding to two upper guide rails. The sliders have a T-shaped cross-section. The movable seats are movably connected to the corresponding fixed bases via the two rows of sliders. A movable longitudinal beam is provided between the two movable seats corresponding to each other. Each movable seat has a mounting plate on its outer side, and a vertical drive motor is fixed on the mounting plate. Each fixed base has a horizontal rack on its outer side. The output end of the drive motor faces downward and is equipped with a gear that is connected to the rack. The inner side of the movable seat has a downwardly extending vertical side plate, on which two rows of vertically spaced sliders are installed. The two rows of sliders are movably connected to two side guide rails on the side of the fixed base.

[0010] As a further improvement of the present invention, two upper guide rails are longitudinally arranged on the upper side of the movable longitudinal beam, and side guide rails are longitudinally arranged on the side of the two movable longitudinal beams that are close to each other. A movable seat is movably connected to the movable longitudinal beam. Two rows of sliders matching the two upper guide rails are provided on the lower side of the movable seat. The sliders have a T-shaped cross section. The side guide rails are longitudinally arranged on the inner side of the movable longitudinal beam. The vertical side plate extending downward is provided on the inner side of the movable seat. At least one row of sliders matching the side guide rails is installed on the side plate. A rack is longitudinally arranged on the outer side of the movable longitudinal beam. A mounting plate is provided on the outer side of the movable seat. A vertical drive motor is fixed on the mounting plate. The output end of the drive motor faces downward and is provided with a gear connected to the rack.

[0011] As a further improvement of the present invention, a vertical column is installed on the movable seat 2. Two vertical guide rails 3 are arranged parallel to each other on the front side of the column. A lifting seat is movably connected to the two guide rails 3. Two rows of sliders 3 that match the two guide rails 3 are arranged vertically on the inner side of the lifting seat. The cross section of the sliders 3 is T-shaped. Two mounting seats with vertical spacing are installed on the column. A vertical lead screw is rotatably arranged between the two mounting seats. One end of the lead screw passes through the mounting seat and is connected to the three-phase drive motor. A lead screw nut is sleeved on the lead screw. The lead screw nut is connected to the lifting seat through the transmission seat.

[0012] As a further improvement of the present invention, the lifting seat is provided with a swing assembly, the swing assembly including a bearing base connected to the surface of the lifting seat, a main support arm installed on the bearing base, a swing arm rotatably connected to the front end of the main support arm, the main support arm including two left and right symmetrical mounting side plates, a plurality of connecting seats provided between the two mounting side plates, a pin shaft vertically provided between the front ends of the two mounting side plates, the swing arm rotatably connected to the pin shaft, the thickness of the swing arm corresponding to the distance between the two mounting side plates; a support one and a support two are respectively installed on the lower side of the main support arm and the swing arm, a drive cylinder is hinged on the support one, and the piston rod extension end of the drive cylinder is hinged to the support two.

[0013] As a further improvement of the present invention, the CCD camera and the infrared sensor are respectively located on the left side and the top of the front end of the swing arm, and the air blowing assembly includes an air blowing head installed on the right side of the front end of the swing arm, with an air inlet connected to an air inlet pipe at the rear end of the air blowing head.

[0014] As a further improvement of the present invention, the second moving mechanism has the same structure as the first moving mechanism. The two front and rear corresponding moving seats of the second moving mechanism are respectively installed on the right end of the two fixed bases. The lifting seat of the second moving mechanism is also provided with a swing assembly. The second CCD camera and the second infrared sensor are respectively located on the right side and top of the front end of the swing arm.

[0015] As a further improvement of the present invention, the dust collection assembly includes a U-shaped dust collection pipe disposed on the lower side of the front end of the swing arm of the second moving mechanism. The dust collection pipe includes a longitudinally arranged main dust collection pipe, and transverse side dust collection pipes are connected to both ends of the main dust collection pipe. The swing arm of the second moving mechanism is connected to the middle of the main dust collection pipe. Several dust collection tubes are arranged at intervals along the length direction on the side of the main dust collection pipe near the blowing head. Several dust collection tubes are also arranged at intervals along the length direction on the side of the two side dust collection pipes that are close to each other. The flow area of ​​the dust collection tubes decreases from the outer end to the inner end. The dust collection tubes are connected to the inside of the dust collection pipe. The ends of the side dust collection pipes are closed. A negative pressure suction pipe is connected to the middle of the rear side of the main dust collection pipe. The negative pressure suction pipe is connected to the inside of the main dust collection pipe.

[0016] The second objective of this invention is to provide a working method for a device that reduces carbon slag accumulation on the surface of MEMS probes during molding. By combining a high-temperature protective liquid pretreatment process with a process of high-temperature protective liquid coating, high-pressure blowing and dust collection assistance, and online temperature monitoring and dynamic control, the adhesion of molten slag during laser processing is suppressed, heat accumulation is reduced, and carbon slag residue on the probe surface is reduced.

[0017] The second objective of this invention is achieved as follows: The working steps of a device for reducing surface carbon residue accumulation during MEMS probe molding are as follows: S1. Substrate pretreatment: The metal sheet of the MEMS probe to be processed is flatly pasted and fixed on the surface of the substrate. A high-temperature protective liquid is uniformly coated on the surface of the metal sheet and allowed to stand and cure to form a dense water-soluble polymer protective film. S2. Initial positioning: The control system drives the movement of moving mechanism one and moving mechanism two, and uses CCD camera one and CCD camera two to collect images of the laser processing point, and completes the calibration of the air blowing head, U-shaped dust suction tube and laser focus. S3, Femtosecond Laser Cutting: Start the femtosecond laser and cut the metal sheet along the preset trajectory, while simultaneously introducing high-pressure inert auxiliary gas; S4. In-situ real-time monitoring: During the processing, CCD camera 1 and CCD camera 2 continuously acquire images of the processing area, while infrared sensor 1 and infrared sensor 2 acquire temperature data of the processing area in real time and transmit it to the control system. S5. Dynamic Coordinated Control: Drives the first and second moving mechanisms to follow the laser processing point in real time and adjusts the positions of the blowing head and the suction pipe; the control system judges that when the temperature of the laser processing point exceeds the standard, it automatically adjusts the blowing pressure and the suction negative pressure.

[0018] Compared with existing technologies, the advantages of this invention are as follows: the air blowing system and the dust suction system are each equipped with an independent moving mechanism, which has the ability to move in three-dimensional space and swing freely. They can follow the laser processing point throughout the process, ensuring that the airflow and negative pressure always cover the processing area; the air blowing system and the dust suction system are integrated with CCD vision and infrared temperature sensors to realize synchronous in-situ monitoring of the processing area image and temperature. Based on the real-time heat accumulation state, the air blowing and dust suction parameters are adaptively adjusted to actively suppress slag adhesion; the U-shaped dust suction pipe and the dust suction cylinder form a uniform and stable negative pressure field, which, together with directional air blowing, effectively captures splashed molten slag and avoids the molten slag from spreading to the surroundings and causing secondary adhesion; combined with the high-temperature protective liquid pretreatment to form a physical isolation film, combined with dynamic air blowing and dust suction during processing and multi-stage cleaning and polishing after processing, the anti-carbon slag ability is stronger; the degree of automation is high, which can be adapted to the processing of MEMS probe arrays of different sizes and different layout specifications, effectively improving the probe processing yield and surface cleanliness. Attached Figure Description

[0019] Figure 1 This is a top view of the device.

[0020] Figure 2 for Figure 1 A magnified view of a portion of the image.

[0021] Figure 3 for Figure 2 A magnified view of a portion of the image.

[0022] Figure 4 This is a sectional view of the movable seat 1.

[0023] Figure 5 This is a sectional view of the movable seat 2.

[0024] Figure 6 This is a front view of the upper column and base plate of the movable seat 2 of the present invention.

[0025] Figure 7 This is a side view of the vacuum cleaner hose.

[0026] Figure 8 This is a top view of the suction pipe on the swing arm.

[0027] Figure 9 This is a top view of the vacuum cleaner hose.

[0028] Figure 10 This is a schematic diagram of a structure in which a laser, through a lens, cuts a metal sheet probe on a substrate.

[0029] Figure 11 This is a flowchart illustrating the working method of the present invention.

[0030] The components include: 1. Laser cutting worktable; 2. Substrate; 3. CCD camera one; 4. Infrared sensor one; 5. CCD camera two; 6. Infrared sensor two; 7. Fixed base one; 8. Upper guide rail one; 9. Side guide rail one; 10. Moving seat one; 10a. Mounting plate one; 10b. Side plate one; 11. Slider one; 12. Moving longitudinal beam; 13. Drive motor one; 14. Rack one; 15. Gear one; 16. Upper guide rail two; 17. Side guide rail two; 18. Moving seat two; 18a. Side plate two; 18b. Mounting plate two; 19. Slider two; 20. Negative pressure suction pipe; 21. Rack two; 22. Drive motor two. 23 Gear II, 24 Column, 25 Guide Rail III, 26 Lifting Seat, 27 Slider III, 28 Mounting Seat, 29 Lead Screw, 30 Drive Motor III, 31 Lead Screw Nut, 32 Transmission Seat, 33 Base, 34 Main Support Arm, 34a Mounting Side Plate, 34b Connecting Seat, 34c Pin, 35 Swing Arm, 36 Support I, 37 Support II, 38 Drive Cylinder, 39 Air Blower, 40 Air Inlet Pipe, 41 Suction Pipe, 41a Main Suction Pipe, 41b Side Suction Pipe, 42 Suction Canister. Detailed Implementation Example 1

[0031] like Figures 1-10As shown, the device for reducing surface carbon residue accumulation during MEMS probe molding according to the present invention includes a laser cutting stage 1, on which a substrate 2 is provided for supporting the metal sheet to be cut. An air blowing system and a dust suction system are respectively arranged on the left and right sides of the laser cutting stage 1. The air blowing system includes a first moving mechanism, on which an air blowing component is provided, and a CCD camera 3 and an infrared sensor 4 are also provided. The dust suction system includes a second moving mechanism, on which a dust suction component is provided, and a CCD camera 5 and an infrared sensor 6 are also provided. The device also includes a control system, and the CCD camera 3, CCD camera 5, infrared sensor 4, infrared sensor 6, moving mechanism 1, and moving mechanism 2 are all connected to the control system. The control system detects the position signal of the metal sheet to be cut using the CCD camera and infrared sensor, and controls the movement of the moving mechanism to perform air blowing and suction.

[0032] A horizontal fixed base 7 is provided on each of the front and rear sides of the laser cutting worktable 1, respectively. The two fixed bases 7 are parallel to each other, and each fixed base 7 has two parallel upper guide rails 8 arranged horizontally. The side of the two fixed bases 7 that are close to each other also has a side guide rail 9 arranged horizontally. The two fixed bases 7 serve as the moving bases of the moving mechanism 1 and the moving mechanism 2, and their horizontal positions can be adjusted.

[0033] The moving mechanism includes two movable seats 10, which are installed at the left ends of two fixed bases 7, one in front and one behind. Each movable seat 10 has two rows of horizontally spaced sliders 11 on its lower side, corresponding to two upper guide rails 8. The sliders 11 have a T-shaped cross-section. The movable seat 10 is slidably connected to the corresponding fixed base 7 via the two rows of sliders 11. A moving longitudinal beam 12 is provided between the two corresponding movable seats 10. Each movable seat 10 has a mounting plate 1 on its outer side. A vertical drive motor 13 is fixed on the mounting plate 10a. Each fixed base 7 has a transverse rack 14 on its outer side. The output end of the drive motor 13 faces downwards and is equipped with a gear 15 that is connected to the rack 14. The inner side of the movable base 10 has a downwardly extending vertical side plate 10b. Two rows of vertically spaced sliders 11 are mounted on the side plate 10b, and these two rows of sliders 11 are slidably connected to two side guide rails 9 on the side of the fixed base 7. The drive motor 13 drives the gear 15 to move along the rack 14, causing the movable base 10 to move along the transverse guide rails, adjusting the transverse position of the movable base 10. The transverse position of the moving longitudinal beam 12 is adjusted by using two movable bases 10. The movable base with the side plate structure moves more smoothly.

[0034] Two upper guide rails 16 are longitudinally arranged on the upper side of the movable longitudinal beam 12. Side guide rails 17 are longitudinally arranged on the side of the two movable longitudinal beams 12 that are close to each other. A movable seat 18 is slidably connected to the movable longitudinal beam 12. Two rows of sliders 19 that match the two upper guide rails 16 are provided on the lower side of the movable seat 18. The sliders 19 have a T-shaped cross section. The side guide rails 17 are longitudinally arranged on the inner side of the movable longitudinal beam 12. The movable seat 18 has a vertically extending side plate 18a on the inner side. At least one row of sliders 19 that match the side guide rails 17 are installed on the side plate 18a. A rack 21 is longitudinally arranged on the outer side of the movable longitudinal beam 12. A mounting plate 18b is provided on the outer side of the movable seat 18. A vertical drive motor 22 is fixed on the mounting plate 18b. The output end of the drive motor 22 faces downward and is provided with a gear 23 that is connected to the rack 21 for transmission. The drive motor 22 drives the gear 23 to move along the rack 21, which in turn moves the movable seat 18 along the longitudinal guide rail 2, thus adjusting the longitudinal position of the movable seat 18.

[0035] A vertical column 24 is mounted on the movable base 218. Two vertical guide rails 25 are parallel to each other on the front side of the column 24. A lifting seat 26 is slidably connected to the two guide rails 25. Two rows of sliders 27, matching the two guide rails 25, are vertically arranged on the inner side of the lifting seat 26. The sliders 27 have a T-shaped cross-section. Two mounting seats 28 are mounted on the column 24 with vertical spacing. A vertical lead screw 29 is rotatably arranged between the two mounting seats 28. One end of the lead screw 29 passes through the mounting seat 28 and is connected to the drive motor 30. A lead screw nut 31 is sleeved on the lead screw 29. The lead screw nut 31 is connected to the lifting seat 26 via a transmission seat 32. The lifting seat 26 is equipped with a swing assembly; the swing assembly... The assembly includes a support base 33 connected to the surface of the lifting seat 26, on which a main support arm 34 is mounted; a swing arm 35 is rotatably connected to the front end of the main support arm 34; the main support arm 34 includes two symmetrical mounting side plates 34a, with several connecting seats 34b between the two mounting side plates 34a; a pin 34c is vertically arranged between the front ends of the two mounting side plates 34a; the swing arm 35 is rotatably connected to the pin 34c; the thickness of the swing arm 35 corresponds to the distance between the two mounting side plates 34a; a support 1 36 and a support 2 37 are respectively mounted on the lower side of the main support arm 34 and the swing arm 35; a drive cylinder 38 is hinged to the support 1 36; the piston rod extension end of the drive cylinder 38 is hinged to the support 2 37. The drive motor 30 drives the lead screw to rotate, and the lead screw nut 31 drives the lifting seat 26 to move up and down along the vertical guide rail 25 via the transmission seat 32 to adjust the height position; the piston rod of the drive cylinder 38 drives the swing arm 35 to rotate around the pin shaft 34c to adjust the swing position of the swing arm 35; an electric cylinder or linear motor can also be used to drive the swing arm 35 to swing; in order to increase the adjustment freedom of the swing assembly, the main support arm 34 can be rotatably connected to the bearing base 33 via a rotating shaft, and a rotary motor connected to the rotating shaft is installed on the outside of the main support arm 34; the blowing assembly or dust suction assembly at the end of the swing arm 35 can move in three-dimensional space and swing to adjust the blowing and dust suction angles. The CCD camera 3 and the infrared sensor 4 are respectively set on the left side and top of the front end of the swing arm 35. The blowing assembly includes a blowing head 39 installed on the right side of the front end of the swing arm 35, and the rear air inlet of the blowing head 39 is connected to an air inlet pipe 40. The CCD camera 3 and infrared sensor 4 observe the focal point of the laser beam on the metal sheet for cutting and the heat temperature at the focal point. Air is blown onto the metal sheet through the air blower 39 to cool it down and blow away the carbon slag.

[0036] The second moving mechanism has the same structure as the first moving mechanism. The two corresponding moving seats 10 of the second moving mechanism are respectively installed on the right ends of the two fixed bases 7. The lifting seat 26 of the second moving mechanism is also equipped with a swing assembly. The second CCD camera 5 and the second infrared sensor 6 are respectively located on the right side and top of the front end of the swing arm 35. The second CCD camera 5 and the second infrared sensor 6 are also electrically connected to the control system, working in conjunction with the first camera and the first sensor to detect and confirm the focal position and heat temperature; the dust collection assembly removes the carbon residue.

[0037] The vacuuming assembly includes a U-shaped vacuum pipe 41 located on the lower side of the front end of the swing arm 35 of the second moving mechanism. The vacuum pipe 41 includes a longitudinally arranged main vacuum pipe 41a, and transverse side vacuum pipes 41b connected to both ends of the main vacuum pipe 41a. The swing arm 35 of the second moving mechanism is connected to the middle of the main vacuum pipe 41a. Several vacuum tubes 42 are spaced along the length of the main vacuum pipe 41a near the blower head 39. Several vacuum tubes 42 are spaced along the length of the two side vacuum pipes 41b near each other. The flow area of ​​the vacuum tubes 42 decreases from the outer end to the inner end. The vacuum tubes 42 are connected to the inside of the vacuum pipe. The ends of the side vacuum pipes 41b are closed. A negative pressure suction pipe 20 is connected to the middle of the rear side of the main vacuum pipe 41a. The negative pressure suction pipe 20 is connected to the inside of the main vacuum pipe 41a. The second moving mechanism moves the U-shaped suction pipe to the laser focus. The U-shaped suction pipe surrounds the laser focus, allowing the blown-away carbon slag to be sucked into the suction pipe, preventing the carbon slag from accumulating.

[0038] The air blowing system of this device includes a moving mechanism 1, which is equipped with two sets of moving seats 10. The moving seats 10 slide with the upper guide rail 8 via a T-shaped slider 11. A drive motor 13 drives a gear 15 to mesh with a transverse rack 14, driving the moving seats 10 to translate laterally. A moving longitudinal beam 12 is connected between the two sets of moving seats 10. The moving longitudinal beam 12 is equipped with a longitudinal guide rail 2 and a rack 21. A drive motor 22 drives the moving seat 2 18 to achieve longitudinal displacement. A vertical column 24 is installed above the moving seat 2 18. A drive motor 30 drives a lead screw to vertically raise and lower the lifting seat 26. The lifting seat 26 is equipped with a swing assembly. A drive cylinder 38 extends and retracts, causing the swing arm 35 to swing up and down, realizing the air blowing head 39 and CCD camera 3. The position of infrared sensor 4 is adjustable at multiple angles; the dust collection system adopts a moving mechanism 2 with the same structure as the blowing system, which is arranged on the right side of the workbench. The dust collection components include a U-shaped dust collection pipe, a main dust collection pipe 41a with two side horizontal dust collection pipes 41b, and multiple dust collection cylinders 42 are evenly arranged; the flow area inside the dust collection cylinder 42 decreases from the outside to the inside to ensure balanced negative pressure at each position; the middle of the main dust collection pipe 41a is connected to the negative pressure suction pipe 20, which is connected to the external dust collection equipment; CCD camera 25 and infrared sensor 26 are installed at the front end of the dust collection system swing arm 35; the control system drives the moving mechanism 1 and the moving mechanism 2 to move, and uses CCD camera 3 and CCD camera 25 to collect images of the laser processing point to complete the calibration of the blowing head 39, the U-shaped dust collection pipe and the laser focus. Example 2

[0039] like Figure 11 The method for reducing surface carbon residue buildup during MEMS probe molding using the apparatus of Example 1 in this embodiment includes the following steps: S1. Substrate pretreatment: The metal sheet of the MEMS probe to be processed is flatly pasted and fixed on the surface of the substrate 2. A protective liquid is uniformly coated on the surface of the metal sheet and allowed to stand and cure to form a dense water-soluble polymer protective film. The components of the protective liquid are: 5% to 12% polyvinyl alcohol by mass, 0.5% to 2% fatty alcohol polyoxyethylene ether by mass, and the balance is deionized water. S2. Initial Positioning: The control system drives the movement of moving mechanism one and moving mechanism two, and uses CCD camera one 3 and CCD camera two 5 to acquire images of the laser processing point, and completes the calibration of the air blowing head 39, the U-shaped suction tube and the laser focus; the tilt angle between the air blowing head 39 and the surface of the substrate 2 is equal to the tilt angle between the U-shaped suction tube suction cylinder 42 and the surface of the substrate 2; the tilt angle between the air blowing head 39 and the surface of the substrate 2 is 30°-45°. S3, Femtosecond Laser Cutting: The femtosecond laser is activated to cut the metal sheet along the preset trajectory. Simultaneously, 0.5MPa high-pressure nitrogen gas is introduced and continuously sprayed into the processing area through the air blowing head 39 to disperse molten particles and dust. The dust collection negative pressure of the negative pressure suction pipe 20 is 0.5MPa. S4. In-situ real-time monitoring: During the processing, CCD camera 13 and CCD camera 25 continuously acquire images of the processing area, while infrared sensor 14 and infrared sensor 26 acquire temperature data of the processing area in real time and transmit it to the control system. S5. Dynamic Coordinated Control: Drive the first and second moving mechanisms to follow the laser processing point in real time and adjust the positions of the air blowing head 39 and the dust suction pipe; the control system determines that when the temperature of the laser processing point exceeds 800℃ or the temperature rise rate exceeds 80℃ / s, the blowing pressure will be increased by 20% and the dust collection negative pressure will be increased by 15%; the temperature of the laser processing point is obtained by averaging the sum of the temperatures measured by infrared sensor 1 4 and infrared sensor 2 6.

[0040] After laser cutting and forming, the workpiece is removed and the following processes are performed in sequence: (1) Degreasing: Ultrasonic cleaning with alkaline degreasing solution to remove the protective film residue; (2) Multi-stage ultrasonic cleaning: First stage pure water rough cleaning, second stage deionized water fine cleaning, and third stage rinsing; (3) Electrochemical polishing: Using the probe as the anode, deburring and reducing surface roughness in alkaline electrolyte; (4) Drying treatment to finally obtain a MEMS probe product with no carbon residue accumulation on the surface.

[0041] This invention systematically solves the problem of carbon slag accumulation generated during femtosecond laser processing of MEMS probes by using a device with multi-degree-of-freedom adjustment, visual temperature monitoring, dynamic coordination of blowing and dust suction, and high-temperature protective liquid pretreatment.

[0042] This invention is not limited to the above embodiments. Based on the technical solutions disclosed in this invention, those skilled in the art can make some substitutions and modifications to some of the technical features without creative effort, and all such substitutions and modifications are within the protection scope of this invention.

Claims

1. An apparatus for reducing surface carbon residue buildup during MEMS probe molding, comprising a laser cutting stage, wherein a substrate is disposed on the laser cutting stage, the substrate being used to support a metal sheet of probe to be cut, characterized in that, The laser cutting worktable is equipped with an air blowing system and a dust extraction system on its left and right sides, respectively. The air blowing system includes a first moving mechanism, on which an air blowing component is mounted. The first moving mechanism also has a first CCD camera and a first infrared sensor. The dust extraction system includes a second moving mechanism, on which a dust extraction component is mounted. The second moving mechanism also has a second CCD camera and a second infrared sensor. The system also includes a control system, and the first CCD camera, the first infrared sensor, the second CCD camera, the second infrared sensor, the first moving mechanism, and the second moving mechanism are all connected to the control system.

2. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 1, characterized in that, A horizontal fixed base is provided corresponding to the front and rear sides of the laser cutting worktable. The two fixed bases are parallel to each other. Each fixed base has two parallel upper guide rails. The two fixed bases are also provided with side guide rails on the side that is close to each other.

3. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 2, characterized in that, The moving mechanism includes two movable seats installed at the left ends of two fixed bases, one in front and one behind. Each movable seat has two rows of horizontally spaced sliders on its lower side, corresponding to two upper guide rails. The sliders have a T-shaped cross-section. The movable seats are movably connected to the corresponding fixed bases via the two rows of sliders. A moving longitudinal beam is provided between the two movable seats. Each movable seat has a mounting plate on its outer side, and a vertical drive motor is fixed on the mounting plate. Each fixed base has a horizontal rack on its outer side, and the output end of the drive motor faces downward and is equipped with a gear that is connected to the rack. The inner side of the movable seat has a vertically extending side plate, on which two rows of vertically spaced sliders are installed. The two rows of sliders are movably connected to two side guide rails on the side of the fixed base.

4. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 3, characterized in that, The movable longitudinal beam has two upper guide rails 2 arranged longitudinally on its upper side. The two movable longitudinal beams are also longitudinally arranged with side guide rails 2 on their sides that are close to each other. A movable seat 2 is movably connected to the movable longitudinal beam. Two rows of sliders 2, matching the two upper guide rails 2, are provided on the lower side of the movable seat 2. The sliders 2 have a T-shaped cross-section. Side guide rails 2 are longitudinally arranged on the inner side of the movable longitudinal beam. A vertically extending side plate 2 is provided on the inner side of the movable seat 2. At least one row of sliders 2, matching the side guide rails 2, is installed on the side plate 2. A rack 2 is longitudinally arranged on the outer side of the movable longitudinal beam. A mounting plate 2 is provided on the outer side of the movable seat 2. A vertical drive motor 2 is fixed on the mounting plate 2. The output end of the drive motor 2 faces downwards and is equipped with gears 2 that are connected to the rack 2 for transmission.

5. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 4, characterized in that, A vertical column is installed on the movable base 2. Two vertical guide rails 3 are arranged parallel to each other on the front side of the column. A lifting seat is movably connected to the two guide rails 3. Two rows of sliders 3 are arranged vertically on the inner side of the lifting seat, which match the two guide rails 3. The sliders 3 have a T-shaped cross section. Two mounting seats with vertical spacing are installed on the column. A vertical lead screw is rotatably arranged between the two mounting seats. One end of the lead screw passes through the mounting seat and is connected to the three-phase drive motor. A lead screw nut is sleeved on the lead screw, and the lead screw nut is connected to the lifting seat through the transmission seat.

6. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 5, characterized in that, The lifting platform is equipped with a swing assembly; the swing assembly includes a bearing base connected to the surface of the lifting platform, a main support arm is mounted on the bearing base, a swing arm is rotatably connected to the front end of the main support arm, the main support arm includes two symmetrical mounting side plates, a plurality of connecting seats are provided between the two mounting side plates, a pin is vertically provided between the front ends of the two mounting side plates, the swing arm is rotatably connected to the pin, and the thickness of the swing arm corresponds to the distance between the two mounting side plates; a support one and a support two are respectively mounted on the lower side of the main support arm and the swing arm, a drive cylinder is hinged on the support one, and the piston rod extension end of the drive cylinder is hinged to the support two.

7. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 6, characterized in that, The CCD camera and infrared sensor are respectively located on the left and top of the front end of the swing arm. The air blowing assembly includes an air blowing head installed on the right side of the front end of the swing arm, and the air inlet at the rear end of the air blowing head is connected to an air inlet pipe.

8. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 6, characterized in that, The second moving mechanism has the same structure as the first moving mechanism. The two front and rear corresponding moving seats of the second moving mechanism are respectively installed on the right end of the two fixed bases. The lifting seat of the second moving mechanism is also provided with a swing assembly. The second CCD camera and the second infrared sensor are respectively located on the right side and top of the front end of the swing arm.

9. The device for reducing surface carbon residue accumulation during MEMS probe molding according to claim 8, characterized in that, The vacuuming assembly includes a U-shaped vacuuming pipe located on the lower side of the front end of the swing arm of the second moving mechanism. The vacuuming pipe includes a longitudinally arranged main vacuuming pipe, with transverse side vacuuming pipes connected to both ends of the main vacuuming pipe. The swing arm of the second moving mechanism is connected to the middle of the main vacuuming pipe. Several vacuuming cylinders are spaced apart along the length of the main vacuuming pipe near the blowing head. Several vacuuming cylinders are also spaced apart along the length of the two side vacuuming pipes on their adjacent sides. The flow area of ​​the vacuuming cylinders decreases from the outer end to the inner end. The vacuuming cylinders are connected to the inside of the vacuuming pipe. The ends of the side vacuuming pipes are closed. A negative pressure suction pipe is connected to the middle of the rear side of the main vacuuming pipe. The negative pressure suction pipe is connected to the inside of the main vacuuming pipe.

10. A method for reducing surface carbon residue buildup during MEMS probe molding using the device according to any one of claims 1-9, characterized in that, Includes the following steps: S1. Substrate pretreatment: The metal sheet of the MEMS probe to be processed is flatly pasted and fixed on the surface of the substrate. A high-temperature protective liquid is uniformly coated on the surface of the metal sheet and allowed to stand and cure to form a dense water-soluble polymer protective film. S2. Initial positioning: The control system drives the movement of moving mechanism one and moving mechanism two, and uses CCD camera one and CCD camera two to collect images of the laser processing point, and completes the calibration of the air blowing head, U-shaped dust suction tube and laser focus. S3, Femtosecond Laser Cutting: Start the femtosecond laser and cut the metal sheet along the preset trajectory, while simultaneously introducing high-pressure inert auxiliary gas; S4. In-situ real-time monitoring: During the processing, CCD camera 1 and CCD camera 2 continuously acquire images of the processing area, while infrared sensor 1 and infrared sensor 2 acquire temperature data of the processing area in real time and transmit it to the control system. S5. Dynamic Coordinated Control: Drives the first and second moving mechanisms to follow the laser processing point in real time and adjusts the positions of the blowing head and the suction pipe; the control system judges that when the temperature of the laser processing point exceeds the standard, it automatically adjusts the blowing pressure and the suction negative pressure.

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