A semiconductor-grade quartz sand acid washing waste liquid recycling system

Abstract

The present application relates to waste liquid treatment and resource utilization technical field, disclose a kind of semiconductor grade quartz sand pickling waste liquid recycling system, including sequentially connected waste liquid grading collection unit, buffer homogenization unit, purification equipment, recovery acid liquid storage and state adjustment unit, recycle acid liquid temporary storage unit, recycle condition determination unit, recycle liquid supply unit and reprocessing reflux unit;The purification equipment is provided with multiple medium cavities of medium disc, filter and granular medium purification are sequentially carried out by intermittent rotation to each medium cavity, and loose reconstruction is carried out to granular medium after rotating off processing position.The system can reduce the influence of waste liquid fluctuation in different pickling stages on purification and recycling, reduce the uneven use of medium caused by long-term liquid in fixed area, improve the degree of acid liquid recycling and continuous purification stability.

Description

Technical Field

[0001] This invention relates to the field of waste liquid treatment and resource utilization technology, and in particular to a system for recycling and reusing semiconductor-grade quartz sand pickling waste liquid. Background Technology

[0002] Semiconductor-grade quartz sand typically requires acid washing during purification to remove metallic impurities and other components from the surface and interior of the quartz particles that can be affected by the acid. After acid washing, a certain amount of acidic waste liquid is generated, which may contain residual acid, as well as quartz micropowder, suspended particles, and dissolved impurities brought out by the acid washing process. To reduce acid consumption and waste liquid discharge, existing production processes usually collect the acid washing waste liquid and purify it through filtration, adsorption, or ion exchange before recycling it after it meets subsequent usage requirements.

[0003] In existing pickling wastewater recovery processes, wastewater generated at different pickling stages may vary in acid concentration, particulate impurity content, and dissolved impurity load. If these are directly collected and treated uniformly, the wastewater entering the purification stage is prone to fluctuations in state, increasing the load on subsequent treatments. Furthermore, the lack of further state adjustment, reuse condition determination, and reprocessing of substandard acid after treatment will also affect the stability of the reused acid state. On the other hand, existing purification equipment often uses relatively fixed filtration and particulate media treatment areas. During long-term continuous treatment, wastewater typically flows through relatively fixed areas, which can cause some filtration and particulate media areas to continuously bear a high treatment load, while other areas are underutilized. This is not conducive to the balanced utilization of filtration and particulate media treatment capabilities and will also affect the purification stability during continuous equipment operation. Summary of the Invention

[0004] The technical problem to be solved by this invention is that the existing semiconductor-grade quartz sand pickling waste liquid recycling process has problems such as large fluctuations in the state of the waste liquid, insufficient stability of the reuse treatment, and uneven load distribution during long-term operation of the fixed filtration and particulate media treatment areas. To address this, we propose a semiconductor-grade quartz sand pickling waste liquid recycling and reuse system.

[0005] To achieve the above objectives, this application adopts the following technical solution: a semiconductor-grade quartz sand pickling waste liquid recycling and reuse system, comprising a waste liquid classification collection unit, a buffer homogenization unit, a purification device, a recycled acid storage and state adjustment unit, a reuse acid temporary storage unit, a reuse condition determination unit and a reuse supply unit connected in sequence, as well as a reprocessing reflux unit connected between the reuse condition determination unit and the purification device.

[0006] The purification equipment includes a purification chamber and a rotary purification mechanism installed inside the purification chamber. The rotary purification mechanism includes a rotating sleeve and a media disk installed outside the sleeve. The media disk has media cavities evenly arranged around its circumference. A filter cover is installed at the end of the media cavity away from the sleeve, and a media constraint mesh is installed at the end closer to the sleeve. The space between the two is filled with particulate media. The end of the media cavity closer to the sleeve is connected to the sleeve through a release port.

[0007] The purification chamber is equipped with a water inlet, a drain outlet through the sleeve, and a rotary drive device for intermittently rotating the media disc. The drain outlet is equipped with a liquid receiving port corresponding to the release port, so that different media chambers rotate sequentially to the treatment position where their outer ends correspond to the water inlet and the release port and liquid receiving port are connected. The purification equipment is also equipped with a media reconstruction mechanism, which is used to increase the distance between the filter cover plate and the media constraint mesh plate after the media chamber rotates away from the treatment position, so that the particulate media can obtain loosening and rearrangement space.

[0008] Preferably, the acid solution treated by the purification equipment enters the recycled acid solution storage and state adjustment unit for state adjustment, and is temporarily stored and tested by the reuse acid solution temporary storage unit. The reuse condition determination unit makes a determination based on the test results. Acid solution that meets the reuse requirements is returned to the quartz sand pickling process through the reuse supply unit, while acid solution that does not meet the reuse requirements is returned to the purification equipment through the reprocessing return unit.

[0009] Preferably, the media cavity gradually narrows from the end away from the sleeve to the end closer to the sleeve, so that the side closer to the filter cover forms a larger liquid inlet area and particulate media containing area, and the side closer to the media constraint mesh forms a relatively concentrated liquid outlet area.

[0010] Preferably, the media reconstruction mechanism includes a vibrating cylinder disposed on the media constraint mesh plate and a T-shaped inner rod that movably penetrates the vibrating cylinder. The end of the T-shaped inner rod away from the sleeve is connected to the filter cover plate, and the filter cover plate is movably disposed in the media cavity.

[0011] When the media cavity is above the sleeve, the filter cover can move closer to the sleeve; when the media cavity is below the sleeve, the filter cover can move away from the sleeve to increase the distance between the filter cover and the media constraint mesh.

[0012] Preferably, the side wall of the vibrating cylinder is provided with a loosening rod that extends into the particulate medium, the vibrating cylinder moves through the medium constraint mesh plate, and a first elastic element is provided between the vibrating cylinder and the medium constraint mesh plate;

[0013] An installation ring is installed inside the drain outlet at a position corresponding to the liquid inlet. A T-shaped lifting component is movably installed inside the installation ring. A second elastic component is installed between the T-shaped lifting component and the installation ring. A drive rod is axially movably installed inside the drain outlet. A linear drive device connected to the drive rod is installed on the purification box. One end of the drive rod is tapered and corresponds to the T-shaped lifting component, used to push the T-shaped lifting component downward, thereby driving the inner rod of the T-shape downward. Multiple vibrating protrusions are spaced along the length of the drive rod, used to intermittently push the T-shaped lifting component, thereby driving the inner rod of the T-shape, the vibrating cylinder, and the loosening rod to reciprocate.

[0014] Preferably, the end of the T-shaped inner rod near the sleeve does not extend into the inside of the sleeve; when the second elastic element is in the initial state, the lower end of the T-shaped lifting element does not protrude from the bottom of the drain outlet.

[0015] Preferably, the bottom of the mounting ring is provided with an elastic seal. When the T-shaped lifting member moves down, the elastic seal undergoes elastic deformation and the lifting action is transmitted to the inner rod of the T-shape through the elastic seal.

[0016] Preferably, a rolling element is provided at the end of the T-shaped lifting member near the drive rod, and the rolling element makes rolling contact with the drive rod.

[0017] Preferably, a flow regulating component is provided on the side of the drive rod near the liquid inlet. The flow regulating component is used to partially block the effective flow area of ​​the liquid inlet and moves back and forth with the drive rod.

[0018] Preferably, the manifold adjustment component is an arc-shaped plate structure and extends along the moving direction of the drive rod. When the manifold adjustment component moves back and forth with the drive rod, the blocking area of ​​its connecting liquid port migrates along the flow area of ​​the connecting liquid port.

[0019] The technical effects and advantages of this invention are as follows:

[0020] This invention establishes a continuous closed loop for the treatment, detection, and reuse of pickling wastewater by classifying, buffering, homogenizing, purifying, adjusting the acid state, determining reuse conditions, and reprocessing and recirculating unqualified acid. This reduces concentration and impurity load fluctuations caused by direct mixing of wastewater from different pickling stages and prevents acid that does not meet reuse requirements from being directly returned to the pickling process. While improving the degree of acid recycling and reducing the amount of new acid replenishment and wastewater discharge, this invention also helps maintain the stability of the reused acid state.

[0021] The purification equipment of this invention employs a media disc with multiple media chambers arranged circumferentially. Intermittent rotation allows different media chambers to sequentially enter the processing position. During a single processing cycle, the media chambers remain relatively stationary, allowing the pickling waste liquid to pass sequentially through the filter cover and particulate media for particulate impurity interception and further purification. After staged treatment, media chamber rotation prevents waste liquid from concentrating in the same media area for extended periods, thus balancing the processing load of each media chamber and the utilization rate of the particulate media. Furthermore, after the media chambers leave the processing position, the release of media constraints and the loosening action promote the rearrangement of the particulate media, while simultaneously altering the local confluence position of the working media chamber. This reduces the problems of localized preferential flow and uneven media utilization caused by the long-term continuity of a fixed bed state and fixed liquid flow path, improving the processing stability of the purification equipment during continuous operation. Attached Figure Description

[0022] The disclosure of this invention is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this invention. In the drawings, the same reference numerals are used to refer to the same parts:

[0023] Figure 1 This is a schematic diagram of the system flow of the present invention;

[0024] Figure 2 This is a schematic diagram of the overall structure of the purification equipment of the present invention;

[0025] Figure 3 For the present invention Figure 2 A structural diagram from another perspective based on the above;

[0026] Figure 4 This is a schematic diagram of the internal structure of the purification chamber of the present invention;

[0027] Figure 5 This is a schematic diagram of the overall structure of the medium tray and drain outlet of the present invention;

[0028] Figure 6 This is a frontal cross-sectional view of the media disk of the present invention;

[0029] Figure 7 This is a side cross-sectional view of the media disk of the present invention;

[0030] Figure 8 This is a schematic diagram of the overall structure of the filter cover and media constraint mesh plate of the present invention in the disassembled state of the media cavity;

[0031] Figure 9 This is a schematic diagram of the overall structure of the filter cover and the media constraint mesh of the present invention;

[0032] Figure 10 This is a structural schematic diagram of the drive rod, mounting ring, manifold adjustment component, and drain outlet of the present invention in a disassembled state.

[0033] Figure 11 This is a structural diagram of the mounting ring and T-shaped lifting component of the present invention in a disassembled state.

[0034] Legend: 1. Purification chamber; 2. Inlet; 3. Outlet; 4. Linear drive device; 5. Sleeve; 6. Media tray; 7. Media chamber; 8. Drive rod; 9. Particulate media; 10. Filter cover; 11. Media constraint mesh plate; 12. Vibration protrusion; 13. Liquid inlet; 14. Mounting ring; 15. T-shaped lifting component; 16. T-shaped inner rod; 17. Release port; 18. Vibrating cylinder; 19. First elastic element; 20. Loosening rod; 21. Merging adjustment component; 22. Second elastic element; 23. Elastic sealing element; 24. Rotary drive device. Detailed Implementation

[0035] It is readily understood that, based on the technical solution of this invention, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of the invention. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this invention and should not be considered as the entirety of the invention or as limitations or restrictions on the technical solution of this invention.

[0036] Reference Figure 1 As shown, the present invention provides a technical solution: a semiconductor-grade quartz sand pickling waste liquid recycling and reuse system, including a quartz sand pickling process, a waste liquid classification and collection unit, a buffer homogenization unit, a purification equipment, a recycled acid liquid storage and state adjustment unit, a reuse acid liquid temporary storage unit, a reuse condition determination unit, a reuse liquid supply unit, and a reprocessing reflux unit; each unit is connected in sequence according to the treatment and reuse direction of the pickling waste liquid, and the reprocessing reflux unit is connected between the reuse condition determination unit and the purification equipment.

[0037] The pickling waste liquid generated in the quartz sand pickling process enters the waste liquid classification and collection unit. The waste liquid classification and collection unit can use multiple acid-resistant storage containers or storage containers with multiple collection chambers to collect the waste liquid separately according to the pickling stage. After classification and collection, the waste liquid enters the buffer homogenization unit, where the flow rate, concentration and temperature of the waste liquid entering the purification equipment are kept relatively stable through temporary storage, mixing and flow rate adjustment.

[0038] After being collected in stages, the pickling waste liquid enters the buffer homogenization unit. The buffer homogenization unit is used to temporarily store and mix the waste liquid. It can also work with the circulation pipeline, stirring structure and flow regulation structure to regulate the subsequent liquid supply flow rate. At the same time, the concentration and temperature of the waste liquid are monitored to keep the waste liquid treatment conditions entering the purification equipment relatively stable.

[0039] The purification equipment is used to filter and deeply purify the pickling waste liquid after buffering and homogenization. First, it removes solid impurities such as quartz powder and suspended particles carried in the waste liquid. Then, it further removes impurities that affect the reuse of acid liquid and collects and discharges the treated acid liquid, providing a relatively stable purified acid liquid for subsequent acid liquid storage, state adjustment and reuse.

[0040] After being treated by the purification equipment, the acid solution enters the recycled acid solution storage and state adjustment unit, where acid, water or concentration is added or adjusted according to the reuse requirements. Then it enters the reuse acid solution temporary storage unit for online monitoring. The reuse condition judgment unit judges the condition according to preset indicators. Qualified acid solution is metered and transported by the reuse supply unit and returned to the quartz sand pickling process. Unqualified acid solution is returned to the purification equipment by the reprocessing return unit, thus forming a closed-loop reuse process.

[0041] This system forms a continuous closed loop between different treatment stages by classifying, buffering, homogenizing, purifying, adjusting the state of pickling waste liquid, online judging, and reusing the liquid. This reduces the treatment fluctuations caused by direct mixing of waste liquids at different stages. Furthermore, it improves the quality stability of the reused liquid by reprocessing unqualified acid liquid. Thus, while ensuring the requirements for subsequent quartz sand pickling, it increases the degree of acid reuse and reduces the amount of new acid replenishment and waste liquid discharge.

[0042] All units except the purification equipment can be implemented using conventional acid-resistant tanks, pumps, pipelines, valves and detection elements in the art. This invention does not impose too many limitations on their specific structures.

[0043] Reference Figures 2-11 As shown, in a preferred embodiment of the present invention, the purification device includes a hollow purification box 1, with a water inlet 2 at the top of the purification box 1. A rotating purification mechanism is provided in the purification box 1, which includes a sleeve 5 that is laterally rotated on the purification box 1. A medium disk 6 is installed on the outside of the sleeve 5. A medium cavity 7 is uniformly arranged around the circumference of the medium disk 6. The end of the medium cavity 7 that is close to and away from the axis of the sleeve 5 is open, and the medium cavity 7 has a certain taper, specifically: it gradually narrows from the end away from the axis of the sleeve 5 to the end that is close to the axis of the sleeve 5.

[0044] Furthermore, a filter cover plate 10 is provided at the end of the media cavity 7 away from the sleeve 5, and a media constraint mesh plate 11 is provided at the end closer to the sleeve 5, with particulate media 9 filling the space between the two. The filter cover plate 10 can be an acid-resistant porous mesh plate or grid plate, used to trap particulate impurities such as quartz powder. The mesh size of the media constraint mesh plate 11 is smaller than the particle size of the particulate media 9, used to restrict the escape of the particulate media 9. The particulate media 9 can be an acid-resistant chelating ion exchange resin compatible with acid liquid or other acid-resistant particulate media with the ability to adsorb target impurities, and its specific type is selected according to the composition of the acid liquid and the impurities to be removed.

[0045] The media chamber 7 gradually narrows from the outside to the inside, giving it a larger inlet area and media holding space on the outside, while forming a relatively concentrated outlet area on the inside. Waste liquid enters from the wide end and gradually flows towards the narrow end, so that the front section with a higher impurity load corresponds to a larger media volume and treatment area. As the waste liquid is purified along the way and the remaining impurity load gradually decreases, the media volume corresponding to the rear section also decreases accordingly. This makes the media configuration match the treatment load along the way, reducing underutilization and unnecessary waste caused by excessive media configuration in low-load areas, improving the overall utilization rate of particulate media 9, and facilitating the collection and discharge of purified liquid towards the sleeve 5 side.

[0046] Furthermore, the circumferential sidewalls of the corresponding areas of the sleeve 5 and the medium disk 6 are uniformly provided with release ports 17 that correspond one-to-one with and communicate with the medium chambers 7; when the end of the medium chamber 7 away from the sleeve 5 is facing upward, it corresponds to the bottom end of the inlet 2; elastic sealing rings can be provided on the outer edge of the medium chamber 7 and the bottom of the inlet 2, and when the two match, the sealing rings can achieve the sealing between the medium chamber 7 and the inlet 2. Alternatively, the lower end of the inlet 2 can be set to be smaller than the opening size of the end of the medium chamber 7 away from the sleeve 5, so as to ensure that the water to be purified can enter the medium chamber 7. The release port 17 serves as the liquid outlet channel of the corresponding medium chamber 7 near the end of the sleeve 5.

[0047] Furthermore, a drain outlet 3 is installed on the purification chamber 1 through the sleeve 5. The drain outlet 3 is coaxially arranged with the sleeve 5, and a liquid receiving port 13 corresponding to the release port 17 is provided on the top of the drain outlet 3. When the medium chamber 7 is located directly above the drain outlet 3, the release port 17 at its bottom matches the liquid receiving port 13.

[0048] In order to achieve intermittent rotation of the sleeve 5 and the medium disk 6 as a whole, a rotary drive device 24 is provided on the purification chamber 1. The rotary drive device 24 can be in the form of a motor and a gear ring. Specifically, a gear ring can be set on the outer side of the end of the sleeve 5, and a gear that meshes with the gear ring can be set at the output end of the motor to drive the sleeve 5 and the medium disk 6 to rotate. Alternatively, a conventional structure that can achieve rotary drive, such as a motor, belt and pulley, can be used.

[0049] During operation, the rotary drive device 24 drives the media disk 6 to rotate in increments, so that the outer end of one media chamber 7 corresponds to the water inlet 2, and its release port 17 is connected to the liquid receiving port 13. The pickling waste liquid passes through the filter cover plate 10, the particulate media 9 and the media constraint mesh plate 11 in sequence, and then enters the drain port 3 through the release port 17 and the liquid receiving port 13. After completing the predetermined treatment time or treatment volume, the media disk 6 rotates through the angle corresponding to one media chamber 7, so that the next media chamber 7 enters the treatment position, thereby realizing the continuous rotation of pre-filtration, media purification and central liquid collection.

[0050] It should be noted that, in order to ensure the sealing between the release port 17 and the liquid receiving port 13, a sealing ring can be provided on the corresponding mating outer edge of the two. When the release port 17 and the liquid receiving port 13 are in contact, the sealing ring will prevent sideflow. The sealing ring can be a polytetrafluoroethylene-coated sealing ring, a perfluoroether rubber sealing ring, or other acid-resistant and wear-resistant sealing materials that are compatible with the acid being treated.

[0051] The rotating drive device 24 drives the media disk 6 to rotate intermittently, which allows different media chambers 7 to rotate sequentially to the treatment position between the inlet 2 and the outlet 3. This allows multiple media chambers 7 to take turns bearing the waste liquid purification load, avoiding the waste liquid from being concentrated in the same media area for a long time, which would cause local particulate media 9 to fail too quickly or be used unevenly. After completing the stage treatment, the media is rotated, so that the working media area is connected with the subsequent loosening and reconstruction of the non-working media area. This is conducive to maintaining the treatment stability during the continuous operation of the purification equipment and improving the overall utilization of particulate media 9.

[0052] In one embodiment of the present invention, a media reconstruction mechanism is further provided in the purification chamber 1, which includes a vibrating cylinder 18 disposed on the media constraint mesh plate 11. A T-shaped inner rod 16 is movably disposed through the vibrating cylinder 18. The end of the T-shaped inner rod 16 away from the sleeve 5 is connected to the filter cover plate 10. The filter cover plate 10 is movably and sealed in the media cavity 7. The filter cover plate 10 can move relative to the media cavity 7. When the media cavity 7 is above the sleeve 5, the filter cover plate 10 and the T-shaped inner rod 16 will move towards the sleeve 5 under their own weight and the impact of water flow, and the particulate media 9 will sink. When the media cavity 7 is below the sleeve 5, the filter cover plate 10 and the T-shaped inner rod 16 as a whole will move away from the sleeve 5 under their own weight or external force, thereby increasing the distance between the filter cover plate 10 and the media constraint mesh plate 11. The particulate media 9 can loosen and collapse, and when it reaches the top of the sleeve 5 again, it can gradually fall back to achieve reconstruction.

[0053] The periphery of the filter cover plate 10 can form a sliding seal with the inner wall of the media chamber 7. When the media chamber 7 is in the upper processing position, the filter cover plate 10 moves towards the side closer to the sleeve 5, so that the particulate media 9 re-settles to form a processing bed.

[0054] To improve the loosening effect of the particulate medium 9, a loosening rod 20 extending into the particulate medium 9 is provided on the side wall of the vibrating cylinder 18. The vibrating cylinder 18 moves through the medium constraint mesh plate 11, and a first elastic element 19 is provided between the two. The first elastic element 19 can be a compression spring sleeved on the outside of the vibrating cylinder 18, which allows the vibrating cylinder 18 and the loosening rod 20 to move slightly relative to the medium constraint mesh plate 11 and elastically reset. The T-shaped inner rod 16 moves through the vibrating cylinder 18, and its range of movement is limited by the structure to avoid interference caused by entering the inner side of the sleeve 5.

[0055] An installation ring 14 is embedded in the lower inner side of the drain outlet 3 at the corresponding position of the liquid inlet 13. A T-shaped lifting member 15 is vertically and movably arranged inside the installation ring 14. A second elastic member 22 is arranged between the T-shaped lifting member 15 and the installation ring 14. A drive rod 8 is also movably arranged inside the drain outlet 3 along the axial direction of the liquid inlet 13. The tapered end of the drive rod 8 corresponds to the T-shaped lifting member 15.

[0056] When the media chamber 7 is located directly below the sleeve 5, the T-shaped inner rod 16 corresponds to the T-shaped lifting member 15; the tapered end of the drive rod 8 first pushes the T-shaped lifting member 15 downward, so that the end of the T-shaped lifting member 15 enters the release port 17 or even the media chamber 7, thereby causing the T-shaped inner rod 16 and the filter cover plate 10 to move away from the sleeve 5, so as to ensure that the media bed obtains release space; when the drive rod 8 continues to move, the vibration protrusions 12 arranged at intervals at its bottom act on the T-shaped lifting member 15 in sequence, so that the T-shaped inner rod 16, the vibration cylinder 18 and the loosening rod 20 produce small reciprocating lifting and lowering, and are rebounded by the first elastic member 19, thereby causing the particulate media 9 to loosen; the filter cover plate 10 vibrates accordingly, which can also help the particulate impurities on its outer surface to fall off.

[0057] To reduce friction, a rolling element, preferably a roller, is provided at the upper end of the T-shaped lifting member 15, so that relative displacement occurs between the roller and the drive rod 8.

[0058] To improve the sealing effect between the T-shaped lifting member 15 and the mounting ring 14, an elastic seal 23 is provided at the bottom of the mounting ring 14. The elastic seal 23 can be an acid-resistant elastic diaphragm or a sheet-like sealing structure. When the T-shaped lifting member 15 moves down, the elastic seal 23 undergoes elastic deformation and acts downward on the T-shaped inner rod 16 through the elastic seal 23, thereby reducing the leakage of liquid in the drain outlet 3 along the moving gap of the T-shaped lifting member 15 while transmitting the lifting action.

[0059] In order to achieve the axial displacement of the drive rod 8, a linear drive device 4 is installed at one end of the drain outlet 3. The linear drive device 4 can preferably be a device with linear drive function such as a cylinder or hydraulic cylinder, and its output shaft extends to the inside of the drain outlet 3 and is connected to the part of the drive rod 8 away from the tapered end.

[0060] When the aforementioned media reconstruction mechanism is in operation, the filter cover plate 10 located in the lower non-working position first moves away from the sleeve 5, increasing the accommodating space of the particulate media 9; then the reciprocating motion of the drive rod 8 drives the loosening rod 20 to perform a small elastic reciprocating motion, breaking the local bridging, interlocking and dense stacking state, causing the particulate media 9 to loosen and re-settle. When the media cavity 7 is subsequently moved to the upper part, it reforms the treatment bed, thereby reducing the possibility of the original fixed stacking state being continuously inherited in different treatment cycles.

[0061] The media reconstruction mechanism increases the movable space of the particulate media 9 by rotating the media chamber 7 to the lower non-working position and using the displacement of the filter cover plate 10. The vibrating protrusion 12 on the drive rod 8 intermittently acts on the T-shaped lifting member 15, thereby driving the T-shaped inner rod 16, the vibrating cylinder 18 and the loosening rod 20 to produce small-amplitude elastic reciprocating motion. This causes the particulate media 9 to further loosen, collapse and relatively displace after the original constraints are released, destroying the local compaction, bridging and fixed accumulation state formed by long-term liquid flow. When the media chamber 7 rotates back to the upper processing position with the media plate 6, the particulate media 9 settles back into a bed, thereby updating the pore distribution and liquid flow conditions inside the media, reducing the repeated formation of local preferential flow paths and the accumulation of excessive load on some media, and improving the utilization uniformity and continuous purification stability of the particulate media 9. At the same time, the filter cover plate 10 vibrates slightly during the vibration process, which can also cause the particulate impurities attached to its surface to loosen and fall off.

[0062] In addition, a flow regulating component 21 is installed on the side of the drive rod 8 near the liquid inlet 13. The flow regulating component 21 is an arc-shaped plate structure used to partially block the effective flow area of ​​the liquid inlet 13. When the drive rod 8 moves back and forth, the flow regulating component 21 synchronously changes the actual liquid collection position, so that the main flow area of ​​the upper working medium cavity 7 near the sleeve 5 periodically migrates. Since the flow of liquid in the particulate medium 9 will preferentially converge towards the liquid collection position with relatively low resistance, by continuously changing the liquid collection position, the medium in different areas can alternately bear a higher liquid load, reducing the situation where the liquid is concentrated along the same local path for a long time and forms a fixed preferential channel, and promoting the more balanced participation and utilization of the particulate medium 9 in different areas of the medium cavity 7, thereby improving the overall effective utilization of the medium and the stability of the purification process.

[0063] In terms of system connection, the inlet 2 is connected to the outlet of the buffer homogenization unit through an acid-resistant conveying pipeline, and can be powered by a conventional acid-resistant conveying pump; the outlet 3, the end away from the linear drive device 4, is connected to the recycled acid storage and status adjustment unit through an acid-resistant conveying pipeline.

[0064] For ease of maintenance, the filter cover plate 10 and the T-shaped inner rod 16 can be detachably connected. The side wall of the purification chamber 1 can be provided with an openable and closable maintenance window. When the corresponding media chamber 7 is rotated to the maintenance window position, the filter cover plate 10 and the particulate media 9 can be inspected, disassembled or replaced.

[0065] In this invention, the media disk 6 sequentially brings different media cavities 7 into the upper processing position and the lower media reconstruction position; the linear drive device 4, through the same drive rod 8, drives the flow regulating component 21 at the upper part to change the main flow position of the working media cavity 7, and at the same time drives the loosening rod 20 in the non-working media cavity 7 to vibrate through the vibration protrusion 12 at the lower part, so that the particulate media 9 is loosened, collapsed and rearranged in the release space; thus, the local flow state is changed during the working stage, and the fixed bed state formed in the previous cycle is destroyed during the non-working stage; after the reconstructed media cavity 7 is turned to the upper part again to form a bed, the possibility of repeated superposition of fixed liquid flow path and fixed particle accumulation relationship can be reduced.

[0066] The technical scope of this invention is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. A system for recycling and reusing waste liquid from the pickling of semiconductor-grade quartz sand, characterized in that, It includes a waste liquid classification and collection unit, a buffer homogenization unit, a purification equipment, a recycled acid storage and state adjustment unit, a reuse acid temporary storage unit, a reuse condition determination unit and a reuse supply unit, and a reprocessing reflux unit connected between the reuse condition determination unit and the purification equipment. The purification equipment includes a purification chamber and a rotating purification mechanism disposed inside the purification chamber. The rotating purification mechanism includes a rotatable sleeve and a media disk disposed outside the sleeve. The media disk is uniformly provided with media cavities in its circumference. A filter cover is provided at the end of the media cavity away from the sleeve, and a media constraint mesh is provided at the end closer to the sleeve. The space between the two is filled with particulate media. The end of the media cavity closer to the sleeve is connected to the sleeve through a release port. The purification chamber is equipped with a water inlet, a drain outlet through the sleeve, and a rotary drive device for intermittently rotating the media disc. The drain outlet is equipped with a liquid receiving port corresponding to the release port, so that different media chambers rotate sequentially to the treatment position where their outer ends correspond to the water inlet and the release port and liquid receiving port are connected. The purification equipment is also equipped with a media reconstruction mechanism, which is used to increase the distance between the filter cover plate and the media constraint mesh plate after the media chamber rotates away from the treatment position, so that the particulate media can obtain loosening and rearrangement space. The media reconstruction mechanism includes a vibrating cylinder disposed on the media constraint mesh plate and a T-shaped inner rod that movably penetrates the vibrating cylinder. The end of the T-shaped inner rod away from the sleeve is connected to the filter cover plate, and the filter cover plate is movably disposed inside the media cavity. When the media cavity is above the sleeve, the filter cover can move closer to the sleeve; when the media cavity is below the sleeve, the filter cover can move away from the sleeve to increase the distance between the filter cover and the media constraint mesh.

2. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 1, characterized in that: After being treated by the purification equipment, the acid solution enters the recycled acid solution storage and state adjustment unit for state adjustment, and is then temporarily stored and tested by the reuse acid solution temporary storage unit. The reuse condition determination unit makes a determination based on the test results. Acid solution that meets the reuse requirements is returned to the quartz sand pickling process through the reuse supply unit, while acid solution that does not meet the reuse requirements is returned to the purification equipment through the reprocessing return unit.

3. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 1, characterized in that: The media cavity gradually narrows from the end away from the sleeve to the end closer to the sleeve, so that the side closer to the filter cover forms a larger liquid inlet area and particulate media containing area, and the side closer to the media constraint mesh forms a relatively concentrated liquid outlet area.

4. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 1, characterized in that: The vibrating cylinder is provided with a loosening rod extending into the particulate medium on its side wall. The vibrating cylinder moves through the medium constraint mesh plate. A first elastic element is provided between the vibrating cylinder and the medium constraint mesh plate. An installation ring is installed inside the drain outlet at a position corresponding to the liquid inlet. A T-shaped lifting component is movably installed inside the installation ring. A second elastic component is installed between the T-shaped lifting component and the installation ring. A drive rod is axially movably installed inside the drain outlet. A linear drive device connected to the drive rod is installed on the purification box. One end of the drive rod is tapered and corresponds to the T-shaped lifting component, used to push the T-shaped lifting component downward, thereby driving the inner rod of the T-shape downward. Multiple vibrating protrusions are spaced along the length of the drive rod, used to intermittently push the T-shaped lifting component, thereby driving the inner rod of the T-shape, the vibrating cylinder, and the loosening rod to reciprocate.

5. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 4, characterized in that: The end of the T-shaped inner rod near the sleeve does not extend into the inside of the sleeve; when the second elastic element is in its initial state, the lower end of the T-shaped lifting element does not protrude from the bottom of the drain outlet.

6. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 4, characterized in that: The bottom of the mounting ring is provided with an elastic seal. When the T-shaped lifting member moves down, the elastic seal undergoes elastic deformation, and the lifting action is transmitted to the inner rod of the T-shape through the elastic seal.

7. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 4, characterized in that: The T-shaped lifting member has a rolling element at one end near the drive rod, and the rolling element makes rolling contact with the drive rod.

8. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 4, characterized in that: A flow regulating component is provided on the side of the drive rod near the liquid inlet. The flow regulating component is used to partially block the effective flow area of ​​the liquid inlet and moves back and forth with the drive rod.

9. The semiconductor-grade quartz sand pickling waste liquid recycling system according to claim 8, characterized in that: The manifold adjustment component is an arc-shaped plate structure that extends along the moving direction of the drive rod. When the manifold adjustment component moves back and forth with the drive rod, the blocking area of ​​its connection port migrates along the flow area of ​​the connection port.

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