Ozone water decomposing apparatus

Abstract

Disclosed is an ozone water decomposing apparatus of a light-decomposing type. The ozone water decomposing apparatus of the present invention includes: a body case; a decomposing unit assembly provided inside the body case and including a plurality of decomposing units that decompose ozone water by a light-decomposing type; an ozone water inflow guide pipe that provides a flow path that guides ozone water flowing in from the outside to the decomposing unit assembly; and a decomposed water discharge guide pipe that provides a flow path that guides decomposed water, in which ozone is decomposed by the decomposing unit assembly, to be discharged from the decomposing unit assembly to the outside. The decomposing unit includes: an ozone water flow path pipe that provides a flow path that allows ozone water to flow; an ultraviolet lamp provided inside the ozone water flow path pipe and that irradiates ozone water flowing in the ozone water flow path pipe with ultraviolet rays; and a lamp protection pipe provided inside the ozone water flow path pipe to house the ultraviolet lamp and formed of a material that transmits ultraviolet rays irradiated from the ultraviolet lamp.

Description

Technical Field

[0001] The present invention relates to an ozone water decomposition apparatus that decomposes ozone water that has been used and then discarded in semiconductor manufacturing or display manufacturing processes by photodecomposition, thereby eliminating the presence of environmentally harmful substances or allowing it to be discharged as ordinary water with a content below a reference value. Background Technology

[0002] Typically, large amounts of ozone water are used in semiconductor manufacturing processes or display manufacturing processes to clean semiconductor wafers or remove photoresist.

[0003] However, ozone water contains ozone, which is a harmful substance to the environment. Therefore, ozone water that has been used in semiconductor manufacturing or display manufacturing processes and is subsequently discarded cannot be discharged directly. According to relevant regulations, the ozone concentration must be decomposed and treated to a level that is harmless to the environment and human body (e.g., below 1 ppm) before it is discharged.

[0004] Ozone water decomposition devices are used to decompose ozone water that is discarded after semiconductor manufacturing or display manufacturing processes. These devices include those using gas-liquid separation, photocatalytic decomposition, and chemical methods. Among these, photocatalytic ozone water decomposition devices use ultraviolet light to irradiate ozone water, breaking it down into water (H2O) and oxygen (O2).

[0005] As relevant technical documents, they include Korean Patent Publication No. 10-2185110 (Original title: Ozone water decomposition device, Publication date: December 1, 2020) and Korean Patent Publication No. 10-1776024 (Original title: Ozone decomposition unit and substrate processing device and substrate processing method including the same, Publication date: September 7, 2017). Summary of the Invention

[0006] The object of the present invention is to provide an ozone water decomposition device that prevents the lamp protection tube containing the ultraviolet lamp from being etched by the hydrofluoric acid (HF) contained in the ozone water, and allows the ultraviolet light irradiated by the ultraviolet lamp to reach the ozone water flowing in the ozone water flow path pipe with minimal loss, so as to effectively decompose the ozone water.

[0007] The purpose of this invention is to provide an ozone water decomposition device that can improve ozone water decomposition capacity through a decomposition unit assembly including multiple decomposition units, and can minimize the space occupied by the decomposition unit assembly to achieve a compact structure.

[0008] The purpose of this invention is to provide an ozone water decomposition device in which the power consumption of multiple decomposition units can be effectively saved by controlling the operation of multiple decomposition units, thereby preventing the unnecessary operation of ultraviolet lamps.

[0009] The object of the present invention is to provide an ozone water decomposition device that can accurately measure the flow rate even when the flow rate of the incoming ozone water or the flow rate of the decomposed water is small.

[0010] The purpose is achieved by an ozone water decomposition device. According to an embodiment of the present invention, the invention is characterized by comprising: a main body housing; a decomposition unit assembly disposed inside the main body housing, comprising a plurality of decomposition units for decomposing ozone water by photodecomposition; an ozone water inflow guide pipe providing a flow path for guiding ozone water flowing in from the outside to the decomposition unit assembly; and a decomposition water discharge guide pipe providing a flow path for guiding the decomposition water that has decomposed ozone by the decomposition unit assembly to the outside, wherein the decomposition unit comprises: an ozone water flow path pipe providing a flow path for ozone water to flow; an ultraviolet lamp disposed inside the ozone water flow path pipe for irradiating the ozone water flowing in the ozone water flow path pipe with ultraviolet light; and a lamp protection tube disposed inside the ozone water flow path pipe to house the ultraviolet lamp, formed of a material that transmits ultraviolet light irradiated by the ultraviolet lamp.

[0011] Preferably, the decomposition unit may further include a fluorine-based ultraviolet-transmitting layer formed on the outer peripheral surface of the lamp protection tube in contact with ozone water to prevent the lamp protection tube from being etched by the hydrofluoric acid (HF) contained in the ozone water.

[0012] Preferably, the fluorinated ultraviolet-transmitting layer may be formed of fluorinated ethylene propylene (FEP).

[0013] Preferably, the distance between the outer peripheral surface of the ultraviolet lamp and the inner peripheral surface of the ozone water flow path pipe can be less than 10 mm, so that the ultraviolet rays irradiated by the ultraviolet lamp can effectively decompose the ozone water flowing in the ozone water flow path pipe.

[0014] Preferably, the decomposition units are multiple, and the multiple decomposition units may include: a first decomposition unit connected to the ozone water inflow guide pipe; a second decomposition unit arranged horizontally alongside the first decomposition unit; a third decomposition unit arranged vertically alongside the second decomposition unit above it; and a fourth decomposition unit arranged horizontally alongside the third decomposition unit, arranged above the first decomposition unit, and connected to the decomposed water discharge guide pipe.

[0015] Preferably, the decomposition unit assembly may further include: a first flow path connecting pipe, providing a flow path connecting the first decomposition unit and the second decomposition unit; a second flow path connecting pipe, providing a flow path connecting the second decomposition unit and the third decomposition unit; and a third flow path connecting pipe, providing a path connecting the third decomposition unit and the fourth decomposition unit.

[0016] Preferably, the ozone water flowing into the decomposition unit assembly through the ozone water inflow guide pipe can sequentially pass through the first decomposition unit, the second decomposition unit, the third decomposition unit and the fourth decomposition unit, and decompose the ozone in the ozone water before being discharged to the outside through the decomposed water discharge guide pipe.

[0017] Preferably, the ozone water decomposition device may further include a decomposition unit support frame for supporting the decomposition unit assembly and fixing the position of the decomposition unit assembly inside the main body housing. The decomposition unit support frame includes: a first decomposition unit support plate that houses and supports the first decomposition unit within a predetermined range along its length; a second decomposition unit support plate that houses and supports the second decomposition unit within a predetermined range along its length; a third decomposition unit support plate that houses and supports the third decomposition unit within a predetermined range along its length; a fourth decomposition unit support plate that houses and supports the fourth decomposition unit within a predetermined range along its length; a first fixing plate that is coupled to and fixed to one end of a plurality of the first to fourth decomposition unit support plates in the main body housing; and a second fixing plate that is coupled to and fixed to the other end of a plurality of the first to fourth decomposition unit support plates in the main body housing.

[0018] Preferably, the ozone water decomposition device may further include: a flow meter disposed in the decomposed water discharge guide pipe or in a flow path connected to the decomposed water discharge guide pipe, to confirm the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe; and a controller to control the operation of the plurality of decomposition units based on the flow data measured by the flow meter.

[0019] Preferably, the controller can control the on / off operation of the ultraviolet lamps in the plurality of decomposition units based on the flow data measured by the flow meter.

[0020] Preferably, the present invention is characterized in that, when the flow rate measured by the flow meter increases, the controller increases the number of decomposition units in which the ultraviolet lamp is in the on state among the plurality of decomposition units; when the flow rate measured by the flow meter decreases, the controller decreases the number of decomposition units in which the ultraviolet lamp is in the on state among the plurality of decomposition units.

[0021] Preferably, the flow meter can be an ultrasonic flow meter that measures flow rate in a non-contact manner.

[0022] Preferably, the present invention may further include a flow measurement connecting pipe, providing a flow path connecting a first position and a second position of the decomposed water discharge guide pipe, wherein a portion of the decomposed water flowing from the decomposition unit assembly into the decomposed water discharge guide pipe branches at the first position and flows through the flow measurement connecting pipe, then merges with the decomposed water flowing in the decomposed water discharge guide pipe at the second position and is discharged to the outside, and the flow meter is disposed in the flow measurement connecting pipe for measuring the flow rate of the decomposed water flowing in the flow measurement connecting pipe.

[0023] Preferably, the inner diameter of the flow measurement connecting pipe can be smaller than the inner diameter of the decomposed water discharge guide pipe.

[0024] According to an embodiment of the present invention, the ozone water decomposition device can prevent the lamp protection tube containing the ultraviolet lamp from being etched by the hydrofluoric acid (HF) contained in the ozone water, and the ultraviolet rays irradiated by the ultraviolet lamp can reach the ozone water flowing in the ozone water flow path pipe with minimal loss to effectively decompose the ozone water.

[0025] According to an embodiment of the ozone water decomposition device of the present invention, the ozone water decomposition capacity can be improved by a decomposition unit assembly including multiple decomposition units, and the space occupied by the decomposition unit assembly can be minimized as much as possible to achieve a compact structure.

[0026] According to an embodiment of the ozone water decomposition apparatus of the present invention, the number of ultraviolet lamps used in multiple decomposition units can be adjusted according to the flow rate of the inflowing ozone water or the flow rate of the discharged decomposed water, thereby effectively saving the power consumption of multiple decomposition units by preventing the ultraviolet lamps from operating unnecessarily.

[0027] According to an embodiment of the ozone water decomposition device of the present invention, a flow meter is designed in the flow measurement connecting pipe with an inner diameter smaller than that of the decomposed water discharge guide pipe, so that the flow rate can be accurately measured even when the flow rate of the ozone water or the flow rate of the decomposed water is small. Attached Figure Description

[0028] Figure 1A perspective view showing the appearance of an ozone water decomposition device according to an embodiment of the present invention.

[0029] Figure 2 To show Figure 1 The right side view of the interior of the ozone water decomposition device.

[0030] Figure 3 To show the settings Figure 1 A three-dimensional diagram of the main structure of an ozone water decomposition device.

[0031] Figure 4 for Figure 1 A three-dimensional view of the decomposition unit components of an ozone water decomposition device.

[0032] Figure 5 for Figure 4 The front and rear views of the decomposed unit components are shown.

[0033] Figure 6 To briefly illustrate the components Figure 4 The structural diagram of the internal structure of the decomposition unit component.

[0034] Figure 7 for Figure 1 A three-dimensional view of the support frame for the decomposition unit in an ozone water decomposition device.

[0035] Figure 8 For brevity Figure 1 A block diagram of the control structure of an ozone water decomposition device.

[0036] Explanation of reference numerals in the attached figures

[0037] 10: Ozone water decomposition device

[0038] 100: Body shell

[0039] 200: Decomposition Unit Component

[0040] 210: First decomposition unit

[0041] 220: Second decomposition unit

[0042] 230: Third decomposition unit

[0043] 240: Fourth decomposition unit

[0044] 211: Ozone water flow path pipe

[0045] 212: Ultraviolet lamp

[0046] 213: Lamp protection tube

[0047] 214: Fluorine-based ultraviolet-transmitting layer

[0048] 300: Decomposition Unit Support Frame

[0049] 410: Ozone water flows into the guide pipe

[0050] 420: Ozone water discharge pipe

[0051] 430: Decomposed water discharge guide pipe

[0052] 440: Connecting pipe for flow measurement

[0053] 500: Flow meter

[0054] 600: Controller Detailed Implementation

[0055] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, in the process of describing the present invention, descriptions of known structures or functions have been omitted in order to clarify the main points of the present invention.

[0056] The terminology used in this specification is for describing particular embodiments and is not intended to limit the invention. Furthermore, in this specification, the singular form may include the plural form unless the context clearly indicates otherwise.

[0057] The accompanying drawings are provided to aid in understanding the concept of the invention, but the scope of the invention is not limited to the drawings. Furthermore, relative thicknesses, lengths, or dimensions in the drawings may be enlarged for ease of explanation and clarity.

[0058] Figure 1 A perspective view showing the appearance of an ozone water decomposition device according to an embodiment of the present invention is provided. Figure 2 To show Figure 1 The right-hand view of the interior of an ozone water decomposition device. Figure 3 To show the settings Figure 1 A three-dimensional diagram of the main structure of an ozone water decomposition device.

[0059] Reference Figures 1 to 3 An embodiment of the ozone water decomposition device 10 of the present invention includes a main body housing 100, a decomposition unit assembly 200, a decomposition unit support frame 300, an ozone water inflow guide pipe 410, a decomposed water discharge guide pipe 430, a flow measurement connecting pipe 440, a flow meter 500, and a controller 600 (see reference). Figure 8 ).

[0060] The main body housing 100 forms the exterior of the ozone water decomposition device 10, and includes an upper housing 110 and a lower housing 120. For example... Figure 2As shown, the lower housing 120 contains a decomposition unit assembly 200, a decomposition unit support frame 300, an ozone water inflow guide pipe 410, a decomposed water discharge guide pipe 430, a flow measurement connecting pipe 440, and a flow meter 500. Furthermore, although... Figure 1 and Figure 2 Although not shown in the diagram, various electrical components are installed inside the upper housing 110, including a controller 600 for controlling the overall operation of the ozone water decomposition device 10, a power supply that receives power from an external power source and converts it into power suitable for the ozone water decomposition device 10 and provides it stably, and an inverter for operating the multiple ultraviolet lamps of the decomposition unit assembly 200.

[0061] On the other hand, such as Figure 1 As shown, a touchscreen display 131 is provided on the front side of the upper housing 110 to display information related to the operation of the ozone water decomposition device 10 and to provide or receive settings required for the operation of the ozone water decomposition device 10 from the operator. Furthermore, as... Figure 1 As shown, the upper housing 110 has a working indicator light 133 for displaying the working status of the ozone water decomposition device 10 and an emergency button 135 for stopping the operation of the ozone water decomposition device 10 in case of an emergency.

[0062] Figure 4 for Figure 1 A three-dimensional view of the decomposition unit components of an ozone water decomposition device. Figure 5 Part (a) and Figure 5 Part (b) is Figure 4 The front and rear views of the decomposed unit components.

[0063] Reference Figures 2 to 5 The decomposition unit assembly 200 is disposed inside the main body housing 100. It irradiates ozone water with ultraviolet light (UV) and decomposes the ozone water into water (H2O) and oxygen (O2) through photodecomposition. Preferably, the decomposition unit assembly 200 includes decomposition units 210, 220, 230, and 240 that decompose ozone water by irradiating it with ultraviolet light. To improve the ozone water decomposition capacity, multiple decomposition units 210, 220, 230, and 240 are formed. In this embodiment, as... Figure 3 and Figure 4 As shown, the decomposition unit assembly 200 includes four decomposition units 210, 220, 230, and 240. In contrast, in this invention, depending on the size or processing capacity of the ozone water decomposition device, the decomposition units can be formed in three or fewer (one, two, or three) or more than five.

[0064] like Figures 3 to 5As shown, the decomposition unit assembly 200 includes a first decomposition unit 210, a second decomposition unit 220, a third decomposition unit 230, a fourth decomposition unit 240, a first flow path connecting pipe 251, a second flow path connecting pipe 252, and a third flow path connecting pipe 253. The first decomposition unit 210, the second decomposition unit 220, the third decomposition unit 230, and the fourth decomposition unit 240 are not simply arranged in a single column along a horizontal direction (front-back or left-right) or a vertical direction (up-down), but rather in a 2×2 matrix structure. This minimizes the space occupied by the four decomposition units 210, 220, 230, and 240 within the main body housing 100, achieving a compact ozone water decomposition device 10.

[0065] The first decomposition unit 210 is elongated along the front-to-back direction, and the ozone water inflow guide pipe 410 is connected along the vertical direction (up-down direction). The first decomposition unit 210 has an inflow connection port 215 on its front side, which is connected to the outlet end of the ozone water inflow guide pipe 410.

[0066] The second decomposition unit 220 and the first decomposition unit 210 are arranged side by side in the horizontal direction (left-right direction). That is, the second decomposition unit 220 and the first decomposition unit 210 are arranged at the same height as the first decomposition unit 210 with a predetermined interval in the horizontal direction. In this case, the second decomposition unit 220 is connected to the first decomposition unit 210 through a first flow path connecting pipe 251 arranged horizontally on the rear side. The first flow path connecting pipe 251 provides a flow path connecting the first decomposition unit 210 and the second decomposition unit 220, so that ozone water flows from the first decomposition unit 210 into the second decomposition unit 220.

[0067] The third decomposition unit 230 is arranged side-by-side with the second decomposition unit 220 in a vertical direction (up-down direction), above the second decomposition unit 220. That is, the third decomposition unit 230 and the second decomposition unit 220 are arranged at a predetermined interval in the vertical direction at a position higher than the second decomposition unit 220. In this case, the third decomposition unit 230 is connected to the second decomposition unit 220 via a second flow path connecting pipe 252 arranged vertically on its front side. The second flow path connecting pipe 252 provides a flow path connecting the second decomposition unit 220 and the third decomposition unit 230, allowing ozone water to flow from the second decomposition unit 220 into the third decomposition unit 230.

[0068] The fourth decomposition unit 240 is arranged side-by-side with the third decomposition unit 230 in the horizontal direction (left-right direction), and is arranged side-by-side with the first decomposition unit 210 in the vertical direction (up-down direction) above the first decomposition unit 210. That is, the fourth decomposition unit 240 and the third decomposition unit 230 are arranged at the same height as the third decomposition unit 230 in the horizontal direction with a predetermined interval, and are arranged at a higher position than the first decomposition unit 220 in the vertical direction (up-down direction) with a predetermined interval. In this case, the fourth decomposition unit 240 is connected to the third decomposition unit 230 through a third flow path connecting pipe 253 arranged horizontally on the rear side. The third flow path connecting pipe 253 provides a flow path connecting the third decomposition unit 230 and the fourth decomposition unit 240, so that ozone water flows from the third decomposition unit 230 to the fourth decomposition unit 240. Furthermore, the fourth decomposition unit 240 forms a discharge connection port 245 at the front, which is connected to the inlet side end of the decomposed water discharge guide pipe 430, so that the decomposed water discharge guide pipe 430 is connected in the vertical direction (up and down direction).

[0069] Therefore, the ozone water flowing into the decomposition unit assembly 200 through the ozone water inlet guide pipe 410 passes sequentially through the first decomposition unit 210, the first flow path connecting pipe 251, the second decomposition unit 220, the second flow path connecting pipe 252, the third decomposition unit 230, the third flow path connecting pipe 253, and the fourth decomposition unit 240, and the decomposed ozone water is discharged to the outside of the ozone water decomposition device 10 through the decomposed water outlet guide pipe 430.

[0070] And, as Figures 3 to 5 As shown, the decomposition unit component 200 also includes a first support connecting pipe 261, a second support connecting pipe 262, a third support connecting pipe 263, a fourth support connecting pipe 264, and a fifth support connecting pipe 265.

[0071] The first support connecting pipe 261 connects the first decomposition unit 210 and the second decomposition unit 220 horizontally at the front side. The second support connecting pipe 262 connects the third decomposition unit 230 and the fourth decomposition unit 240 horizontally at the front side. The third support connecting pipe 263 connects the fourth decomposition unit 240 and the first decomposition unit 210 vertically at the front side. Furthermore, the fourth support connecting pipe 264 connects the second decomposition unit 220 and the third decomposition unit 230 vertically at the rear side. The fifth support connecting pipe 265 connects the fourth decomposition unit 240 and the first decomposition unit 210 vertically at the rear side.

[0072] The first support connecting pipe 261, the second support connecting pipe 262, the third support connecting pipe 263, the fourth support connecting pipe 264, and the fifth support connecting pipe 265 are substantially the same in appearance as the first flow path connecting pipe 251, the second flow path connecting pipe 252, and the third flow path connecting pipe 253, but they do not provide flow paths for ozone water to flow; rather, they improve the structural stability of the decomposition unit component 200. That is, the first support connecting pipe 261, the second support connecting pipe 262, and the third support connecting pipe 263 are stably configured in a vertically and horizontally symmetrical structure together with the second flow path connecting pipe 252 on the front side of the decomposition unit assembly 200. The fourth support connecting pipe 264 and the fifth support connecting pipe 265 are stably configured in a vertically and horizontally symmetrical structure together with the first flow path connecting pipe 251 and the third flow path connecting pipe 253 on the rear side of the decomposition unit assembly 200. Thus, the first support connecting pipe 261, the second support connecting pipe 262, the third support connecting pipe 263, the fourth support connecting pipe 264, and the fifth support connecting pipe 265 can improve the structural stability of the decomposition unit assembly 200.

[0073] On the other hand, such as Figures 3 to 5 As shown, the two ends of the first disassembly unit 210, the second disassembly unit 220, the third disassembly unit 230, and the fourth disassembly unit 240 are respectively connected to the front covers 216, 226, 236, and 246 and the rear covers 217, 227, 237, and 247. Although not shown, electrical connectors for applying power to the ultraviolet lamps are connected to the front covers 216, 226, 236, and 246.

[0074] Figure 6 For the purpose of explaining the composition Figure 4 A simplified diagram of the internal structure of the decomposition unit component. The following details this process. Figure 6 The internal structure of the first decomposition unit 210 is shown. On the other hand, the internal structures of the second decomposition unit 220, the third decomposition unit 230 and the fourth decomposition unit 240 are substantially the same as the internal structure of the first decomposition unit 210, therefore, the description of them will follow the first decomposition unit 210.

[0075] Reference Figure 6 The first decomposition unit 210 includes an ozone water flow path pipe 211, an ultraviolet lamp 212, a lamp protection tube 213, and a fluorine-based ultraviolet transmission layer 214.

[0076] like Figure 6As shown, the ozone water flow path pipe 211 forms the exterior of the first decomposition unit 210, and forms a flow path inside it for the ozone water to flow. In this case, preferably, the ozone water flow path pipe 211 is made of polyvinylidene fluoride (PVDF), a material with excellent acid or chemical resistance to hydrofluoric acid (HF) and the like contained in the ozone water. That is, preferably, the ozone water flow path pipe 211 is formed of a polyvinylidene fluoride pipe.

[0077] like Figure 6 As shown, an ultraviolet lamp 212 is disposed inside the ozone water flow path pipe 211, irradiating the ozone water flowing in the ozone water flow path pipe 211 with ultraviolet light and decomposing the ozone water into water (H2O) and oxygen (O2). In this case, the ultraviolet lamp 212 irradiates UVC ultraviolet light with a wavelength in the 200-300 nm range (e.g., 245 nm) that has a high ozone water decomposition effect. Moreover, preferably, the distance d between the outer peripheral surface of the ultraviolet lamp 212 and the inner peripheral surface of the ozone water flow path pipe 211 is 10 mm or less, so that the ultraviolet light irradiated by the ultraviolet lamp 212 effectively decomposes the ozone water flowing in the ozone water flow path pipe 211. That is, preferably, the ultraviolet lamp 212 and the ozone water flow path pipe 211 are configured such that the ozone water flowing in the ozone water flow path pipe 211 is separated from the ultraviolet lamp 212 by a distance of 10 mm or less. On the other hand, the ultraviolet lamp 212 is detachably installed in the ozone water flow path pipe 211 so that it can be replaced when it reaches the end of its service life or when it fails.

[0078] like Figure 6 As shown, the lamp protection tube 213 is configured to house the ultraviolet lamp 212 inside the ozone water flow path pipe 211. The lamp protection tube 213 protects the ultraviolet lamp 212 by preventing direct contact between the ultraviolet lamp 212 housed inside the ozone water flow path pipe 211 and the ozone water flowing through the ozone water flow path pipe 211. Preferably, the lamp protection tube 213 is made of a material that transmits ultraviolet light, allowing ultraviolet light irradiated from the ultraviolet lamp 212 housed within it to reach the ozone water flowing through the ozone water flow path pipe 211 outside the lamp protection tube 213. This material is made of quartz, a material with excellent ultraviolet penetration and low cost. That is, preferably, the lamp protection tube 213 is formed of a quartz tube. Furthermore, since the lamp protection tube 213 is housed inside the ozone water flow path pipe 211, its outer diameter is smaller than the inner diameter of the ozone water flow path pipe 211.

[0079] The fluorine-based ultraviolet-transmitting layer 214 is designed to prevent the lamp protection tube 213 from being etched by the hydrofluoric acid (HF) contained in the ozone water flowing through the ozone water flow path pipe 211. Figure 6As shown, the lamp protection tube 213, which comes into contact with ozone water, is formed on its outer peripheral surface. Specifically, the fluorinated ultraviolet-transmitting layer 214 is formed as a thin tube that contacts and adheres to the outer peripheral surface of the lamp protection tube 213 and surrounds the entire periphery of the lamp protection tube 213. In this case, preferably, the fluorinated ultraviolet-transmitting layer 214 is formed of fluorinated ethylene propylene (FEP) material with an ultraviolet transmittance of more than 90%, so as to have excellent acid resistance or chemical resistance to hydrofluoric acid (HF), and to reach the ozone water flowing in the ozone water flow path tube 211 with minimal loss of ultraviolet light irradiated from the ultraviolet lamp 212.

[0080] For reference, hydrofluoric acid (HF) is a chemical substance that must be used in semiconductor manufacturing processes or display manufacturing processes (especially etching and cleaning processes) in a diluted state (DHF). Therefore, ozone water that is used and then discarded in semiconductor manufacturing processes or display manufacturing processes may contain hydrofluoric acid (HF).

[0081] Figure 7 for Figure 1 A three-dimensional view of the support frame for the decomposition unit in an ozone water decomposition device.

[0082] Reference Figure 2 , Figure 3 and Figure 7 The decomposition unit support frame 300 supports the decomposition unit assembly 200 to fix the position of the decomposition unit assembly 200 inside the main body housing 100. It includes four decomposition unit support plates 310, 320, 330, 340, a first fixing plate 350 and a second fixing plate 360.

[0083] Four decomposition unit support plates 310, 320, 330, and 340 are stably formed into four decomposition units 210, 220, 230, and 240 at positions corresponding to the four decomposition units 210, 220, 230, and 240. Specifically, the first decomposition unit support plate 310 houses and supports the first decomposition unit 210 within a predetermined range along its length; the second decomposition unit support plate 320 houses and supports the second decomposition unit 220 within a predetermined range along its length; the third decomposition unit support plate 330 houses and supports the third decomposition unit 230 within a predetermined range along its length; and the fourth decomposition unit support plate 340 houses and supports the fourth decomposition unit 240 within a predetermined range along its length.

[0084] On the other hand, such as Figure 2 , Figure 3 and Figure 7As shown, the first decomposition unit support plate 310, the second decomposition unit support plate 320, the third decomposition unit support plate 330, and the fourth decomposition unit support plate 340 respectively include upper semicircular tubes 311, 321, 331, and 341 covering the upper side of the first decomposition unit 210, the second decomposition unit 220, the third decomposition unit 230, and the fourth decomposition unit 240, and lower semicircular plates 312, 322, 332, and 342 covering the lower side of the first decomposition unit 210, the second decomposition unit 220, the third decomposition unit 230, and the fourth decomposition unit 240. Moreover, the upper semicircular plates 311, 321, 331, and 341 and the lower semicircular plates 312, 322, 332, and 342 are in a state of separation from each other, and then they are joined together during the assembly of the decomposition unit support frame 300 into the decomposition unit assembly 200.

[0085] like Figure 2 , Figure 3 and Figure 7 As shown, the first fixing plate 350 and the second fixing plate 360 ​​are disposed on the front and rear sides, respectively, with the first disassembly unit support plate 310, the second disassembly unit support plate 320, the third disassembly unit support plate 330, and the fourth disassembly unit support plate 340 as a buffer. The first fixing plate 350 is joined to one end of the first disassembly unit support plate 310, the second disassembly unit support plate 320, the third disassembly unit support plate 330, and the fourth disassembly unit support plate 340 on the front side, and is fixed to the lower plate 121 of the main body housing 100 by a first fastening flange 351 formed at its lower end. Furthermore, the second fixing plate 360 ​​is joined to the other end of the first disassembly unit support plate 310, the second disassembly unit support plate 320, the third disassembly unit support plate 330, and the fourth disassembly unit support plate 340 on the rear side, and is fixed to the lower plate 121 of the main body housing 100 by a second fastening flange 361 formed at its lower end. In this case, as... Figure 7 As shown, the first fixing plate 350 and the second fixing plate 360 ​​include upper portions 350A and 360A that are combined with the upper semicircular plates 311, 321, 331, and 341, and lower portions 350B and 360B that are combined with the lower semicircular plates 312, 322, 332, and 342. The disassembly unit support frame 300 fastens these upper portions 350B and 360B to each other and assembles them in the disassembly unit assembly 200.

[0086] On the other hand, such as Figure 3 and Figure 7 As shown, the first fixing plate 350 and the second fixing plate 360, in terms of effective space utilization inside the main body housing 100, respectively form a first inlet space 352 and a second inlet space 362 on one side of their lower ends, through which ozone water flows into the guide pipe 410.

[0087] Reference Figure 2 and Figure 3 The ozone water inflow guide pipe 410 provides a flow path for ozone water flowing in from outside the ozone water decomposition device 10 to the decomposition unit assembly 200. For this purpose, one end (outlet side end) of the ozone water inflow guide pipe 410 is connected to the decomposition unit assembly 200, and the other end (inlet side end) of the ozone water inflow guide pipe 410 is exposed to the outside of the main housing 100 and connected to an ozone water discharge line for ozone water used in semiconductor manufacturing processes or display manufacturing processes, such as an ozone water discharge line for an external device like a semiconductor process cleaning device. In this case, preferably, the ozone water inflow guide pipe 410 is formed of a perfluoroalkoxy (PFA) material that has excellent acid resistance, chemical resistance, and ensures a certain degree of flexibility. That is, preferably, the ozone water inflow guide pipe 410 is a perfluoroalkoxy pipe.

[0088] On the other hand, such as Figure 2 and Figure 3 As shown, the ozone water decomposition device 10 also includes an ozone water discharge pipe 420 branching off from the ozone water inflow guide pipe 410 at one location. The ozone water discharge pipe 420 provides a conduit for discharging any residue remaining inside the decomposition unit assembly 200 or similar components of the ozone water decomposition device 10 to the outside for inspection or maintenance. One end of the ozone water discharge pipe 420 is connected to the ozone water inflow guide pipe 410 via a T-joint 421, and the other end of the ozone water discharge pipe 420 protrudes to the outside of the main housing 100. Furthermore, a valve 423 for opening and closing the flow path of the ozone water discharge pipe 420 is provided at one location on the ozone water discharge pipe 420.

[0089] Reference Figure 2 and Figure 3 The decomposed water discharge guide pipe 430 provides a flow path for leading the decomposed water from the ozone decomposition unit assembly 200 to the outside of the ozone water decomposition device 10. For this purpose, the inlet end (inlet-side end) of the decomposed water discharge guide pipe 430 is connected to the decomposition unit assembly 200, and the other end (outlet-side end) of the decomposed water discharge guide pipe 430 protrudes to the outside of the main housing 100 and is connected to the wastewater treatment pipeline. In this case, the decomposed water discharge guide pipe 430, like the ozone water inflow guide pipe 410, is formed of a perfluoroalkoxy material.

[0090] Figure 8 For brevity Figure 1 A block diagram of the control structure of an ozone water decomposition device.

[0091] Reference Figure 2 , Figure 3 and Figure 8A flow measurement connecting pipe 440 provides a flow path for installing the flow meter 500 and connects to a first position and a second position of the decomposed water discharge guide pipe 430. One end of the flow measurement connecting pipe 440 is connected to the inlet side of the decomposed water discharge guide pipe 430 at the first position via a T-joint 441, and the other end of the flow measurement connecting pipe 440 is connected to the outlet side of the decomposed water discharge guide pipe 430 at the second position via a T-joint 442. In this configuration, a portion of the decomposed water flowing from the decomposition unit assembly 200 into the decomposed water discharge guide pipe 430 branches off from the first position and flows into the flow measurement connecting pipe 440, then merges with the decomposed water flowing in the decomposed water discharge guide pipe 430 at the second position and is discharged to the outside of the ozone water decomposition device 10. The inner diameter of the flow measurement connecting pipe 440 is smaller than the inner diameter of the decomposed water discharge guide pipe 430; preferably, it is less than 1 / 3 of the inner diameter of the decomposed water discharge guide pipe 430, and more preferably, less than 1 / 4 of the inner diameter. Furthermore, the flow measurement connecting pipe 440 is made of the same perfluoroalkoxy material as the decomposed water discharge guide pipe 430.

[0092] Reference Figure 2 , Figure 3 and Figure 8 The flow meter 500 is provided in a flow measurement connecting pipe 440 that provides a flow path connected to the decomposed water discharge guide pipe 430 in order to confirm the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430. However, unlike this embodiment, the flow meter 500 may be provided in the decomposed water discharge guide pipe 430, in which case the structure of the flow measurement connecting pipe 440 will be omitted. The flow meter 500 is an ultrasonic flow meter that measures flow rate in a non-contact manner, and is installed in the flow measurement connecting pipe 440 by clamping.

[0093] In this embodiment, the flow meter 500 is not installed in the decomposed water discharge guide pipe 430 to directly measure the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430. Instead, the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430 is confirmed by installing it in the flow measurement connecting pipe 440. This addresses the problem that when the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430 is low, the non-contact flow meter 500 installed in the decomposed water discharge guide pipe 430 cannot accurately measure the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430. That is, by installing the flow meter 500 in the flow measurement connecting pipe 440, which has an inner diameter smaller than that of the flow meter 500, the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430 can be accurately confirmed even when the decomposed water flows through the decomposed water discharge guide pipe 430 at a relatively low flow rate, thereby enabling accurate measurement of the flow rate of the decomposed water flowing in the flow measurement connecting pipe 440.

[0094] For reference, the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430 and the flow rate of the decomposed water flowing in the flow measurement connecting pipe 440 are proportional to each other. Therefore, even if the flow rate of the decomposed water flowing in the flow measurement connecting pipe 440 is measured, the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe 430 can be confirmed.

[0095] Reference Figure 2 , Figure 3 and Figure 8 The controller 600 controls the operation of the electronic components of the ozone water decomposition device 10 and processes measurement data received from various sensors of the ozone water decomposition device 10. Specifically, the controller 600 controls the operation of multiple decomposition units 210, 220, 230, and 240 based on flow rate data measured by the flow meter 500, i.e., according to changes in flow rate measured by the flow meter 500. In this case, the controller 600 controls the ON / OFF operation of the ultraviolet lamps in the multiple decomposition units 210, 220, 230, and 240.

[0096] Specifically, the controller 600 controls the operation of all or part of the entire decomposition units 210, 220, 230, 240 or multiple decomposition units 210, 220, 230, 240 based on the flow data measured by the flow meter 500. The controller 600 controls the operation of the multiple decomposition units 210, 220, 230, 240 in the following manner: if the flow measured by the flow meter 500 increases, the number of decomposition units 210, 220, 230, 240 with ultraviolet lamps in the on state increases; if the flow measured by the flow meter 500 decreases, the number of decomposition units 210, 220, 230, 240 with ultraviolet lamps in the on state decreases.

[0097] More specifically, if the flow rate measured by the flow meter 500 is less than the first set flow rate value, the controller 600 activates one of the four decomposition units: the first decomposition unit 210, the second decomposition unit 220, the third decomposition unit 230, and the fourth decomposition unit 240. For example, the ultraviolet lamp in the first decomposition unit 210 is activated, and the ultraviolet lamps in the remaining three decomposition units are deactivated. If the flow rate measured by the flow meter 500 is greater than the first set flow rate value but less than the second set flow rate value, the controller 600 activates two of the four decomposition units: the first decomposition unit 210, the second decomposition unit 220, the third decomposition unit 230, and the fourth decomposition unit 240. For example, the ultraviolet lamps in the first decomposition unit 210 and the second decomposition unit 220 are activated, and the ultraviolet lamps in the remaining two decomposition units are deactivated. If the flow rate measured by flow meter 500 is greater than or equal to the second set flow rate value but less than the third set flow rate value, then controller 600 activates three decomposition units (first decomposition unit 210, second decomposition unit 220, third decomposition unit 230, and fourth decomposition unit 240), for example, first decomposition unit 210, second decomposition unit 220, and third decomposition unit 230, and deactivates the ultraviolet lamp in the remaining decomposition unit. Furthermore, if the flow rate measured by flow meter 500 is greater than or equal to the third set flow rate value, then controller 600 activates the ultraviolet lamps in all four decomposition units (first decomposition unit 210, second decomposition unit 220, third decomposition unit 230, and fourth decomposition unit 240). In this case, the third set flow rate value is greater than the second set flow rate value, and the second set flow rate value is greater than the first set flow rate value.

[0098] Therefore, the ozone water decomposition device 10 adjusts the number of ultraviolet lamps used in the multiple decomposition units 210, 220, 230, and 240 according to the flow rate of the discharged decomposed water, that is, according to the flow rate of the ozone water flowing in, to prevent the ultraviolet lamps from operating unnecessarily, thereby effectively saving the power consumption of the multiple decomposition units 210, 220, 230, and 240.

[0099] The present invention has been described in detail above through preferred embodiments. However, the present invention is not limited to these preferred embodiments, and various modifications and variations thereof will be apparent to those skilled in the art without departing from the spirit and scope of the invention. Therefore, such modifications or variations should fall within the protection scope of the present invention.

Claims

1. An ozone water decomposition device, characterized in that, include: Body shell; The decomposition unit assembly is disposed inside the main body housing and includes multiple decomposition units that decompose ozone water by photodecomposition. Ozone-rich water flows into a guide pipe, providing a flow path for the ozone-rich water flowing in from the outside to the decomposition unit assembly; and A decomposed water discharge guide pipe provides a guiding flow path, allowing the decomposed water from the ozone decomposition unit assembly to be discharged to the outside. The decomposition unit includes: Ozone water flow path pipe, providing a flow path for ozone water to flow; An ultraviolet lamp is installed inside the ozone water flow path pipe to irradiate the ozone water flowing through the pipe with ultraviolet light; and A lamp protection tube is provided inside the ozone water flow path to house the ultraviolet lamp, and is made of a material that transmits ultraviolet rays irradiated from the ultraviolet lamp.

2. The ozone water decomposition device according to claim 1, characterized in that, The decomposition unit also includes a fluorine-based ultraviolet-transmitting layer formed on the outer peripheral surface of the lamp protection tube in contact with ozone water, to prevent the lamp protection tube from being etched by the hydrofluoric acid contained in the ozone water.

3. The ozone water decomposition device according to claim 2, characterized in that, The fluorine-based ultraviolet-transmitting layer is formed of fluorinated ethylene propylene.

4. The ozone water decomposition device according to claim 1, characterized in that, The plurality of decomposition units include: The first decomposition unit is connected to the ozone water inflow guide pipe; The second decomposition unit is arranged side by side with the first decomposition unit along the horizontal direction; The third decomposition unit is disposed above the second decomposition unit, which is arranged perpendicularly to it; and The fourth decomposition unit is arranged horizontally alongside the third decomposition unit, above the first decomposition unit, and connected to the decomposed water discharge guide pipe. The ozone water flowing into the decomposition unit assembly through the ozone water inlet guide pipe passes sequentially through the first decomposition unit, the second decomposition unit, the third decomposition unit, and the fourth decomposition unit, decomposing the ozone in the ozone water. After that, it is discharged to the outside through the decomposed water outlet guide pipe.

5. The ozone water decomposition device according to claim 4, characterized in that, It also includes a disassembly unit support frame for supporting the disassembly unit assembly and fixing the position of the disassembly unit assembly inside the body housing. The decomposition unit support framework includes: The first decomposition unit support plate accommodates and supports the first decomposition unit within a predetermined range along its length. The second decomposition unit support plate accommodates and supports the second decomposition unit within a predetermined range along its length. The third decomposition unit support plate accommodates and supports the third decomposition unit within a predetermined range along its length. The fourth decomposition unit support plate houses and supports the fourth decomposition unit within a predetermined range along its length. A first fixing plate is combined with and fixed to one end of a plurality of parts of the first to fourth disassembly unit support plates in the main body housing; and The second fixing plate is combined with and fixed to the other ends of the first to fourth disassembly unit support plates and the main body housing.

6. The ozone water decomposition device according to claim 1, characterized in that, Also includes: A flow meter is installed in the decomposed water discharge guide pipe or in a flow path connected to the decomposed water discharge guide pipe to determine the flow rate of the decomposed water flowing in the decomposed water discharge guide pipe. as well as The controller controls the operation of the plurality of decomposition units based on the flow data measured by the flow meter.

7. The ozone water decomposition device according to claim 6, characterized in that, The controller controls the opening and closing of the ultraviolet lamps in the plurality of decomposition units based on the flow data measured by the flow meter.

8. The ozone water decomposition device according to claim 7, characterized in that, When the flow rate measured by the flow meter increases, the controller increases the number of decomposition units in which the ultraviolet lamp is turned on among the plurality of decomposition units; when the flow rate measured by the flow meter decreases, the controller decreases the number of decomposition units in which the ultraviolet lamp is turned on among the plurality of decomposition units.

9. The ozone water decomposition device according to claim 6, characterized in that, It also includes a flow measurement connecting pipe, providing a flow path connecting the first position and the second position of the decomposed water discharge guide pipe. A portion of the decomposed water flowing from the decomposition unit assembly into the decomposed water discharge guide pipe branches at the first position and flows through the flow measurement connecting pipe, then merges with the decomposed water flowing in the decomposed water discharge guide pipe at the second position and is discharged to the outside. The flow meter is installed in the flow measurement connecting pipe and is used to measure the flow rate of the decomposed water flowing in the flow measurement connecting pipe.

10. The ozone water decomposition device according to claim 9, characterized in that, The inner diameter of the connecting pipe for flow measurement is smaller than the inner diameter of the decomposed water discharge guide pipe.

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