Vacuum chamber explosion-proof assembly

Abstract

A kind of vacuum cavity explosion-proof assembly, including vacuum cavity air exhaust pipe, its horizontal section is provided with vertical downward branch pipe, branch pipe lower side is provided with pressure relief valve, pressure relief valve lower side is provided with gas storage tank.Pressure relief valve includes upper and lower sealing cylindrical shell, first through-hole is arranged in upper top plate, exhaust hole is arranged in middle part of side wall;Adjusting plate and piston are arranged in shell, piston is connected with guide rod and spring, spring is abutted between piston and adjusting plate;Lower bottom plate of shell is provided with threaded hole and adjusting bolt, adjusting bolt top is abutted with adjusting plate, initial compression of spring can be adjusted to set pressure relief threshold value.Gas storage tank top is provided with circular opening, middle and lower part of pressure relief valve is inserted into it, and is connected with gas storage tank through annular mounting plate, gas storage tank is provided with negative pressure connector.When the pressure of vacuum cavity exceeds threshold value, gas pushes piston down through first through-hole, and is exposed exhaust hole and is relieved to gas storage tank;Spring makes piston reset after pressure release.The present application can prevent vacuum cavity from being damaged by overpressure, and the pressure relief threshold value is adjustable.

Description

Technical Field

[0001] This invention relates to a vacuum chamber explosion-proof component. Background Technology

[0002] Vacuum coating technology is a technique that uses physical or chemical methods to deposit coating materials onto the surface of a workpiece to form a thin film in a high vacuum environment within a vacuum chamber. It is widely used in many fields such as optics, electronics, machinery, and decoration.

[0003] When the vacuum coating process is completed or when the vacuum chamber is being maintained, it is necessary to break the vacuum. Generally, nitrogen is introduced to bring the entire chamber to a slightly positive pressure state. However, there is usually no pressure relief valve in the vacuum chamber. See Chinese Patent CN202520385609.9. When too much nitrogen is introduced, the internal pressure will be over-pressurized, which will damage the internal components of the chamber. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a vacuum chamber explosion-proof component, which is installed on the pumping pipe of an existing vacuum chamber. Since the pumping pipe is connected to the vacuum chamber body, the component can ensure that the gas pressure inside the vacuum chamber does not exceed a set threshold. When the pressure inside the vacuum chamber exceeds the threshold, it can quickly release the pressure and protect the internal components of the chamber from damage.

[0005] To solve the above-mentioned technical problems, the present invention provides a vacuum chamber explosion-proof component, including a vacuum chamber extraction pipe, a vertically downward extending branch pipe on the horizontal section of the vacuum chamber extraction pipe, and a pressure relief valve on the lower side of the branch pipe. The pressure relief valve includes a vertically arranged cylindrical outer shell with sealed top and bottom ends. A first through hole penetrating the upper top plate vertically is provided at the center of the upper top plate of the outer shell. Several radially penetrating exhaust holes are provided on the circumferential side wall of the outer shell at the center of its height direction. A horizontally arranged exhaust port, corresponding to the upper side of the lower bottom plate inside the outer shell, is provided and its shape is consistent with that of the outer shell. A matching adjusting plate is provided. Inside the outer casing, a piston is horizontally arranged and slides vertically against the circumferential sidewall of the inner cavity, corresponding to the lower side of the top plate. A guide rod extending vertically downward is provided at the piston's axis. A second through hole matching the guide rod is provided at the position of the adjusting plate corresponding to the guide rod. A third through hole matching the guide rod is provided at the position of the lower bottom plate of the outer casing corresponding to the guide rod. The lower end of the guide rod passes through the second and third through holes sequentially from top to bottom and exits the lower side of the outer casing. The guide rod is circumferentially fitted between the lower side of the piston and the upper side of the adjusting plate. There are vertically arranged springs. The upper side of the spring abuts against the lower side of the piston, and the lower side of the spring abuts against the upper side of the adjusting plate. The lower base plate of the outer casing also has several threaded holes that penetrate vertically through the lower base plate. Corresponding to each threaded hole, a vertical adjusting bolt is provided on the lower side of the lower base plate. The turning end of the adjusting bolt is located on the lower side of the adjusting bolt. The external thread of each adjusting bolt mates with the internal thread of the corresponding threaded hole, and the top of each adjusting bolt abuts against the lower side of the adjusting plate. The turning end of each adjusting bolt is located on the lower side of the adjusting plate. Below the bottom plate of the outer shell, below the branch pipe, there is a gas storage tank. Above the gas storage tank, there is a circular opening that runs vertically through the gas storage tank. The diameter of the pressure relief valve shell is smaller than the diameter of the circular opening. The lower part of the pressure relief valve extends into the gas storage tank from the opening. Near the upper end of the pressure relief valve, there is an annular mounting plate that extends horizontally outward along the radial direction of the outer shell. The diameter of the annular mounting plate is larger than the diameter of the circular opening. The lower side of the annular mounting plate is attached to the upper side of the gas storage tank and fixed by several connecting bolts. There is also a negative pressure connector connecting the inside and outside of the gas storage tank on the front side of the gas storage tank.

[0006] For the sake of simplicity, the vacuum cavity explosion-proof component described in this invention will be referred to as "this component" in the following text.

[0007] The working principle and advantages of this component: When the vacuum coating process is completed or when the vacuum chamber needs to be maintained, the vacuum needs to be broken. Generally, nitrogen is introduced to bring the entire chamber to a slightly positive pressure state. The pressure relief valve is located on the vacuum chamber's suction pipe. Since the suction pipe is connected to the vacuum chamber, the introduced nitrogen will enter the branch pipe through the suction pipe. As the gas pressure increases, the introduced nitrogen enters the pressure relief valve through the first through hole and pushes the piston down against the spring force. When the piston height continues to decrease below the exhaust hole (i.e., the preset pressure relief threshold is reached), the high-pressure nitrogen will flow rapidly from the exhaust hole into the gas storage tank under the action of the pressure difference to complete the pressure relief. After the pressure is released, the piston returns to its original position under the action of the spring force. When the piston height is higher than the exhaust hole, the nitrogen inside the vacuum chamber will no longer flow out from the exhaust hole. The negative pressure connector is connected to the air pump, and the nitrogen that enters the gas storage tank is finally extracted from the negative pressure connector. This component ensures that the pressure inside the vacuum chamber does not exceed a set threshold. When the pressure exceeds the threshold, it quickly releases pressure, protecting the internal components from damage. Furthermore, the adjustment plate can be raised or lowered by turning the adjusting bolt. Since the piston's initial position is constant, the height of the adjusting plate determines the initial compression of the spring. Adjusting the initial compression of the spring changes the pressure required for the piston to reach the exhaust port; this is the preset pressure relief threshold of the pressure relief valve. This allows for setting an appropriate pressure relief threshold based on the pressure tolerance of the equipment. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the structure of this component.

[0009] Figure 2 This is a cross-sectional view of the pressure relief valve in this component. Detailed Implementation

[0010] See Figure 1 , Figure 2A vacuum chamber explosion-proof component includes a vacuum chamber extraction pipe 1. A vertically downward extending branch pipe 11 is provided on the horizontal section of the vacuum chamber extraction pipe 1. A pressure relief valve is provided on the lower side of the branch pipe 11. The pressure relief valve includes a vertically arranged cylindrical outer shell 2 with sealed top and bottom ends. A first through hole 21 penetrating the upper top plate is provided at the center of the upper top plate of the outer shell 2. Several radially penetrating exhaust holes 22 are provided on the circumferential side walls of the outer shell 2 corresponding to the center of its height direction. A horizontally arranged adjusting plate 3, matching the shape of the outer shell 2, is provided on the upper side of the lower bottom plate inside the outer shell 2. An adjusting plate 3 is provided on the lower side of the upper top plate inside the outer shell 2. A piston 4 is horizontally arranged and slides vertically along the circumferential sidewall of the inner cavity of the outer shell 2. A guide rod 5 extending vertically downward is provided at the axis of the piston 4. A second through hole 31 matching the guide rod 5 is provided at the position of the adjusting plate 3 corresponding to the guide rod 5. A third through hole 23 matching the guide rod 5 is provided at the position of the bottom plate of the outer shell 2 corresponding to the guide rod 5. The lower end of the guide rod 5 passes through the second through hole 31 and the third through hole 23 from top to bottom and exits the lower side of the outer shell 2. A vertically arranged spring 6 is circumferentially sleeved at the position of the guide rod 5 corresponding to the lower side of the piston 4 and the upper side of the adjusting plate 3. The upper side of the spring 6 and the lower side of the piston 4 are circumferentially sleeved. The lower side of the spring 6 abuts against the upper side of the adjusting plate 3. The lower base plate of the outer casing 2 is also provided with several threaded holes 24 extending vertically through the lower base plate of the outer casing 2. A vertical adjusting bolt 241, matching the threaded hole 24, is provided at the lower side of the lower base plate of the outer casing 2 for each threaded hole 24. The turning end of the adjusting bolt 241 is located on the lower side of the adjusting bolt 241. The external thread of each adjusting bolt 241 mates with the internal thread of the corresponding threaded hole 24, and the top of each adjusting bolt 241 abuts against the lower side of the adjusting plate 3. The turning end of each adjusting bolt 241 is located on the lower base plate of the outer casing 2. Below the branch pipe 11, there is a gas storage tank 7. Above the gas storage tank 7, there is a circular opening 71 that runs vertically through the gas storage tank 7. The diameter of the pressure relief valve housing 2 is smaller than the diameter of the circular opening 71. The lower part of the pressure relief valve extends into the gas storage tank 7 from the opening 71. Near the upper end of the pressure relief valve, there is an annular mounting plate 12 that extends horizontally outward along the radial direction of the housing 2. The diameter of the annular mounting plate 12 is larger than the diameter of the circular opening 71. The lower side of the annular mounting plate 12 is attached to the upper side of the gas storage tank 7 and fixed by several first connecting bolts 121. A negative pressure connector 72 connecting the inside and outside of the gas storage tank 7 is also provided on the front side of the gas storage tank 7. In this embodiment, the lower bottom plate of the housing 2 is designed to be detachable and is connected to the circumferential side wall of the housing 2 by second connecting bolts 25.

[0011] The working principle and advantages of this component: When the vacuum coating process ends or when the vacuum chamber needs to be maintained, the vacuum needs to be broken. Generally, nitrogen is introduced to bring the entire chamber to a slightly positive pressure state. The pressure relief valve is located on the vacuum chamber's suction pipe 1. Since the suction pipe 1 is connected to the vacuum chamber, the introduced nitrogen will enter the branch pipe 11 through the suction pipe 1. As the gas pressure increases, the introduced nitrogen enters the pressure relief valve through the first through hole 21 and pushes the piston 4 downward against the elastic force of the spring 6. When the height of the piston 4 continues to decrease to below the exhaust hole 22 (i.e., reaching the preset pressure relief threshold), the high-pressure nitrogen will flow rapidly from the exhaust hole 22 into the gas storage tank 7 under the action of the pressure difference to complete the pressure relief. After the pressure is released, the piston 4 returns to its original position under the action of the spring 6. When the height of the piston 4 is higher than the exhaust hole 22, the nitrogen inside the vacuum chamber will no longer flow out from the exhaust hole 22. The negative pressure connector 72 is connected to the air pump (not shown in the air pump diagram). The nitrogen that enters the gas storage tank 7 is finally extracted from the negative pressure connector 72. This component ensures that the pressure inside the vacuum chamber does not exceed a set threshold. When the pressure exceeds the threshold, it can quickly release pressure, protecting the internal components from damage. Furthermore, the adjustment plate 3 can be raised or lowered by turning the adjusting bolt 241. Since the initial position of the piston 4 is constant, the height of the adjusting plate 3 determines the initial compression of the spring 6. Adjusting the initial compression of the spring 6 changes the pressure required for the piston 4 to reach the exhaust port 22; this is the preset pressure relief threshold of the pressure relief valve. This allows for setting an appropriate pressure relief threshold based on the different pressure tolerances of the equipment.

Claims

1. A vacuum chamber explosion-proof component, characterized in that: The system includes a vacuum chamber extraction pipe, with a vertically downward-extending branch pipe on the horizontal section of the extraction pipe. A pressure relief valve is located on the lower side of the branch pipe. The pressure relief valve comprises a vertically arranged cylindrical outer shell with sealed top and bottom ends. A first through-hole penetrating the top plate vertically is located at the center of the top plate of the outer shell. Several radially penetrating exhaust holes are located on the circumferential side walls of the outer shell, corresponding to the center of its height direction. A horizontally arranged adjusting plate, matching the shape of the outer shell, is located on the upper side of the lower bottom plate inside the outer shell. An adjusting plate, corresponding to the upper top plate, is located inside the outer shell. A piston is horizontally arranged on the lower side and slides vertically against the circumferential sidewall of the outer shell. A guide rod extends vertically downward from the piston axis. A second through hole matching the guide rod is provided at the position of the adjusting plate, and a third through hole matching the guide rod is provided at the position of the guide rod on the lower bottom plate of the outer shell. The lower end of the guide rod passes through the second and third through holes from top to bottom and exits the lower side of the outer shell. A vertically arranged spring is circumferentially fitted at the position of the guide rod, corresponding to the lower side of the piston and the upper side of the adjusting plate. The lower side of the piston abuts against the lower side of the spring, and the lower side of the spring abuts against the upper side of the adjusting plate. The lower base plate of the outer casing also has several threaded holes extending vertically through it. A vertical adjusting bolt, matching the threaded hole, is located on the lower side of the lower base plate. The turning end of the adjusting bolt's thread is located on the lower side of the adjusting bolt. The external thread of each adjusting bolt mates with the internal thread of the corresponding threaded hole, and the top of each adjusting bolt abuts against the lower side of the adjusting plate. The turning end of each adjusting bolt is located on the lower base plate of the outer casing. Below the branch pipe, there is a gas storage tank. Above the gas storage tank, there is a circular opening that runs vertically through the gas storage tank. The diameter of the pressure relief valve shell is smaller than the diameter of the circular opening. The lower part of the pressure relief valve extends into the gas storage tank from the opening. Near the upper end of the outer wall of the pressure relief valve, there is an annular mounting plate that extends horizontally outward along the radial direction of the shell. The diameter of the annular mounting plate is larger than the diameter of the circular opening. The lower side of the annular mounting plate is attached to the upper side of the gas storage tank and fixed by several connecting bolts. There is also a negative pressure connector connecting the inside and outside of the gas storage tank on the front side of the gas storage tank.

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