A coating cavity spray plate adjusting assembly

Abstract

The application discloses a kind of coating cavity spray plate adjusting assembly, including coating cavity body, upper cover and spray plate, four adjusting mechanisms are arranged in square on upper cover.Each adjusting mechanism includes shell, rotating shaft sleeve, adjusting nut, pull rod and shroud;Rotating shaft sleeve and adjusting nut are fixed in shell, the middle part of pull rod is matched with rotating shaft sleeve center hole, the upper part is matched with the center threaded hole of adjusting nut, the top is provided with screwing square head, and the lower end passes through upper cover and is connected with disc in the accommodating cavity of spray plate. Screw the screwing square head to make pull rod lift, to adjust the height and levelness of the corresponding position of spray plate. Star-shaped dynamic sealing ring and circular static sealing ring are arranged at each matching place, form multiple seals, prevent gas leakage. The application has simple structure, and is adjusted conveniently, can be leveled quickly spray plate and calibrate its height while maintaining the sealing performance of coating cavity, improve production efficiency and product yield.

Description

Technical Field

[0001] This invention relates to a coating chamber spray plate adjustment assembly. Background Technology

[0002] Atomic layer deposition (ALD) is a deposition technique that utilizes the chemical adsorption and desorption generated by the surface saturation reaction of precursors on a substrate surface to form a single atomic layer. This technique deposits materials layer by layer on the substrate surface in the form of single atomic layers, and the thickness can be simply and precisely controlled by controlling the number of reaction cycles. Its structure can be found in Chinese patent CN202411118665.

[0003] The problem with the existing technology is that the spray plate is fixed to the lower side of the coating chamber cover. After the spray plate is assembled, it is often not level enough and needs to be readjusted, or the distance from the substrate is incorrect and the overall height of the spray plate needs to be recalibrated. These problems require a lot of time and affect production efficiency. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a coating chamber spray plate adjustment assembly, which can conveniently adjust the level and height of the spray plate in the coating chamber, the adjustment process is simple to operate, and the sealing performance is maintained while adjusting the height, effectively improving production efficiency and product yield.

[0005] To solve the above technical problems, the present invention provides a coating chamber spray plate adjustment assembly, including a coating chamber body arranged horizontally, rectangular in shape and open on the upper side, an upper cover that matches the coating chamber body is hinged to the upper opening of the coating chamber body, and a horizontally arranged rectangular spray plate is provided below the upper cover.

[0006] The upper cover has four adjustment mechanisms arranged in a square on the upper side of the cover.

[0007] Each adjustment mechanism includes a vertically arranged, open-top cylindrical outer shell. Each outer shell has a first annular flange extending horizontally outward along the radial direction of its lower outer side. A first annular groove is located on the lower side of the first flange near the inner wall of the outer shell. A first sealing ring, with a circular cross-section, is located within the first annular groove. Several first countersunk holes, vertically penetrating the first flange, are evenly distributed on the circumference near the outer wall of the first flange. A first threaded hole, matching the first countersunk hole, is located on the upper cover corresponding to each first countersunk hole. A first bolt, matching both the first countersunk hole and the first threaded hole, is located within each first countersunk hole. The threaded end of each first bolt passes vertically downward through the first countersunk hole and is screwed into the corresponding first threaded hole for fixation. Each outer shell has a second annular flange extending horizontally inward along the radial direction of its upper inner side. A second annular groove is located on the upper side of the second flange near its inner wall. A second sealing ring, with a circular cross-section, is located within the second annular groove.

[0008] Each housing contains a rotating sleeve, which is a vertically arranged cylinder with a central hole extending vertically through its core. The outer diameter of the rotating sleeve matches the inner diameter of the housing. The lower side of the rotating sleeve connects to the upper cover, and the height of the upper side of the rotating sleeve is lower than the height of the lower edge of the second flange. Near the central hole on the lower side of each rotating sleeve, there are a third annular groove and a fourth annular groove, coaxial with the central hole. The third and fourth annular grooves are arranged radially inward and outward at intervals. The inner circumferential side of the third annular groove communicates with the central hole. A third sealing ring, with a star-shaped cross-section, is provided within the third annular groove. A fourth sealing ring, matching the fourth annular groove, is provided within the fourth annular groove. The fourth sealing ring has a circular cross-sectional shape. Each rotating bushing has a fifth annular groove on its upper side near its central hole, which is coaxial with the central hole. The inner side of the fifth annular groove is connected to the central hole. A fifth sealing ring matching the fifth annular groove is provided in the fifth annular groove. The fifth sealing ring has a star-shaped cross-sectional shape. Several second countersunk holes are evenly distributed on the circumference near the outer wall of each rotating bushing. A second threaded hole matching the second countersunk hole is provided on the upper cover corresponding to each second countersunk hole. A second bolt matching the second countersunk hole and the second threaded hole is provided in each second countersunk hole. The threaded end of each second bolt passes vertically downward through the second countersunk hole and is screwed and fixed to the corresponding second threaded hole.

[0009] Each housing also contains an adjusting nut, which is a vertically arranged cylinder. The adjusting nut is located on the upper side of the rotating sleeve and is coaxial with the rotating sleeve. The upper side of the adjusting nut is lower than the upper side of the second flange. The upper part of the outer circumferential wall of the adjusting nut mates with the inner circumferential wall of the second flange. The adjusting nut has a central threaded hole that runs vertically through the adjusting nut. The diameter of the bottom circle of the central threaded hole matches the diameter of the central hole of the rotating sleeve. On the lower side of the adjusting nut, corresponding to the outer side of the fifth annular groove of the rotating sleeve, there is a sixth annular groove that is coaxial with the central threaded hole. The fifth annular groove and the sixth annular groove are located on the same side. The grooves are arranged radially and intermittently along the adjusting nut. The sixth annular groove is provided with a sixth sealing ring that matches the sixth annular groove. The sixth sealing ring has a circular cross-section. Several third countersunk holes that penetrate the adjusting nut vertically are evenly distributed around the outer wall of each adjusting nut. A third threaded hole that matches the third countersunk hole is provided on the side of the rotating bushing at each position. A third bolt that matches the third countersunk hole and the third threaded hole is provided in each third countersunk hole. The threaded end of each third bolt passes vertically downward through the third countersunk hole and is screwed and fixed to the corresponding third threaded hole.

[0010] Each adjustment mechanism also includes a vertically arranged cylindrical pull rod. The middle part of the pull rod in the height direction mates with the central hole of the rotating bushing. The upper part of the pull rod is located in the central threaded hole of the adjusting nut and has an external thread section in the circumference that matches the central threaded hole. The pull rod is threadedly engaged with the central threaded hole through the external thread section. The top of the pull rod extends beyond the central threaded hole and is provided with a turning square head. The lower end of the pull rod passes through the upper cover from top to bottom and continues to extend downward.

[0011] The upper side of the outer shell is provided with a protective cover. The protective cover is a cylindrical shape arranged vertically with the upper side closed and the lower side open. The lower side of the protective cover has a third flange extending horizontally outward along the radial direction of the protective cover. The central axis of the protective cover and the central axis of the outer shell are the same vertical line. The inner diameter of the protective cover matches the inner diameter of the second flange, and the outer diameter of the third flange matches the outer diameter of the outer shell. The lower side of the third flange is in close contact with the upper side of the second flange. The upper end of the pull rod and the screwing square head are located inside the protective cover. Near the outer wall of the third flange, there are several fourth countersunk holes that penetrate the third flange vertically. On the upper side of the second flange, there is a fourth threaded hole that matches the fourth countersunk hole. Each fourth countersunk hole has a fourth bolt that matches the fourth countersunk hole and the fourth threaded hole. The threaded end of each fourth bolt passes vertically downward through the fourth countersunk hole and is screwed and fixed to the corresponding fourth threaded hole.

[0012] At the location of each tie rod, there is a receiving cavity directly opposite the tie rod. Each receiving cavity contains a horizontally arranged disc. The discs with opposite positions are coaxial with the tie rod and the diameter of the disc is larger than the diameter of the tie rod. The lower end of the tie rod passes through the upper side of the spray plate into the receiving cavity and is coaxially connected to the upper side of the corresponding disc. Each disc also has an annular gasket on its upper side that surrounds the tie rod and covers the entire disc. Each disc is in close contact with the upper side wall of the receiving cavity through the gasket to support the spray plate.

[0013] For the sake of simplicity, the coating chamber spray plate adjustment assembly described in this invention will be referred to as "this assembly" in the following text.

[0014] How to use this component: When the spray plate needs to be readjusted due to insufficient levelness after assembly, or when the distance between the spray plate and the substrate is incorrect and the overall height of the spray plate needs to be recalibrated, first remove the fourth bolt of the four adjustment mechanisms, then remove the protective cover, and adjust according to the previously calculated deviation. Specifically, use a special tool to screw on the corresponding adjustment mechanism's screw head. Since the pull rod and the adjusting nut are threaded together, the height of the pull rod changes synchronously as it rotates, thereby synchronously driving the height adjustment of the corresponding position of the spray plate through the disc connected to the lower side of the pull rod.

[0015] The advantages of this component are: it allows for easy adjustment of the level and height of the spray plate within the coating chamber, simplifying the adjustment process and effectively improving production efficiency and product yield. Furthermore, this component employs two types of sealing rings: dynamic sealing rings with a star-shaped cross-section, such as the third and fifth sealing rings; and static sealing rings with a circular cross-section. The third and fifth sealing rings are in direct contact with the pull rod. The third sealing ring serves as the primary seal, the fifth as the secondary seal, and the fourth sealing ring supplements the third, preventing air leakage between the rotating bushing and the top cover in case of leakage from the third. Similarly, the sixth sealing ring supplements the fifth, preventing air leakage between the rotating bushing and the adjusting nut in case of leakage from the fifth. The first and second sealing rings form the final seal; the first seal prevents leakage between the outer shell and the top cover, and the second seal prevents leakage between the outer shell and the protective cover. This design allows for easy height adjustment while maintaining excellent sealing performance. Attached Figure Description

[0016] Figure 1 This is a 3D view of this component.

[0017] Figure 2 This is the main view of this component (partial cross-section of the left side).

[0018] Figure 3 yes Figure 2 A magnified view of part A in the middle.

[0019] Figure 4 yes Figure 2 A magnified view of part B in the middle. Detailed Implementation

[0020] See Figures 1-4 A coating chamber spray plate 13 adjustment assembly includes a coating chamber body 1 that is horizontally arranged, rectangular in shape and open on the upper side. A top cover 12 that matches the coating chamber body 1 is hinged to the upper opening of the coating chamber body 1. A horizontally arranged rectangular spray plate 13 is provided below the top cover 12.

[0021] Four adjustment mechanisms 2 are provided on the upper side of the upper cover 12, and the four adjustment mechanisms 2 are arranged in a square on the upper side of the upper cover 12;

[0022] Each adjustment mechanism 2 includes a vertically arranged, open-top cylindrical outer shell 21. Each outer shell 21 has an annular first flange 211 extending horizontally outward along the radial direction of its lower outer side. A first annular groove 31 is provided circumferentially near the inner wall of the outer shell 21 on the lower side of the first flange 211. A first sealing ring 41, matching the first annular groove 31, is provided within the first annular groove 31. The first sealing ring 41 has a circular cross-sectional shape. Several first countersunk holes 51, extending vertically through the first flange 211, are evenly distributed circumferentially near its outer wall. The upper cover 12 has a corresponding first countersunk hole 51 at each of these holes. A first threaded hole 61 is matched with the first countersunk hole 51. Each first countersunk hole 51 is provided with a first bolt 71 that matches the first countersunk hole 51 and the first threaded hole 61. The threaded end of each first bolt 71 passes vertically downward through the first countersunk hole 51 and is screwed and fixed to the corresponding first threaded hole 61. Each outer shell 21 is provided with an annular second flange 212 extending horizontally inward along the radial direction of the outer shell 21 on the upper circumferential inner side. A second annular groove 32 is provided circumferentially near its inner wall on the upper side of the second flange 212. A second sealing ring 42 that matches the second annular groove 32 is provided in the second annular groove 32. The cross-sectional shape of the second sealing ring 42 is circular.

[0023] Each outer casing 21 contains a rotating sleeve 22, which is a vertically arranged cylinder with a central hole 221 extending vertically through its core. The outer diameter of the rotating sleeve 22 matches the inner diameter of the outer casing 21. The lower side of the rotating sleeve 22 is connected to the upper cover 12, and the upper side of the rotating sleeve 22 is lower than the height of the lower edge of the second flange 212. Near the central hole 221 on the lower side of each rotating sleeve 22, there are a third annular groove 33 and a fourth annular groove 34 coaxial with the central hole 221. The third annular groove 33 and the fourth annular groove 34 are arranged radially inward and outward at intervals along the rotating sleeve 22. The inner circumferential side of the third annular groove 33 is connected to the central hole 221. A third sealing ring 43, matching the third annular groove 33, is provided within the third annular groove 33. The cross-sectional shape of the third sealing ring 43 is star-shaped. A fourth sealing ring 44, matching the fourth annular groove 34, is provided within the fourth annular groove 34. The fourth sealing ring 44 has a circular cross-sectional shape. Each rotating bushing 22 has a fifth annular groove 35 coaxial with the central hole 221 near its central hole 221 on the upper side. The fifth annular groove 35 is connected to the central hole 221 on the inner side of the circumference. The fifth sealing ring 45 is matched with the fifth annular groove 35 and has a star-shaped cross-sectional shape. Several second countersunk holes 52 are evenly distributed on the circumference near the outer wall of each rotating bushing 22. The upper cover 12 has a second threaded hole 62 that matches the second countersunk hole 52 at each position corresponding to the second countersunk hole 52. Each second countersunk hole 52 has a second bolt 72 that matches the second countersunk hole 52 and the second threaded hole 62. The threaded end of each second bolt 72 passes vertically downward through the second countersunk hole 52 and is screwed and fixed to the corresponding second threaded hole 62.

[0024] Each outer casing 21 is also provided with an adjusting nut 23. The adjusting nut 23 is a vertically arranged cylinder. The adjusting nut 23 is set on the upper side of the rotating bushing 22 and is arranged coaxially with the rotating bushing 22. The upper side of the adjusting nut 23 is lower than the upper side of the second flange 212. The upper part of the circumferential outer wall of the adjusting nut 23 fits with the circumferential inner wall of the second flange 212. The core of the adjusting nut 23 has a central threaded hole 231 that penetrates the adjusting nut 23 vertically. The diameter of the tooth root circle of the central threaded hole 231 matches the diameter of the central hole 221 of the rotating bushing 22. On the lower side of the adjusting nut 23, corresponding to the outer side of the fifth annular groove 35 of the rotating bushing 22, there is a sixth annular groove 36 that is coaxial with the central threaded hole 231. The sixth annular groove 36 and the sixth annular groove 36 are arranged radially and intermittently along the adjusting nut 23. The sixth annular groove 36 is provided with a sixth sealing ring 46 that matches the sixth annular groove 36. The sixth sealing ring 46 has a circular cross-section. Several third countersunk holes 53 that penetrate the adjusting nut 23 vertically are evenly distributed around the outer wall of each adjusting nut 23. The upper side of the rotating bushing 22 is provided with a third threaded hole 63 that matches the third countersunk hole 53. Each third countersunk hole 53 is provided with a third bolt 73 that matches the third countersunk hole 53 and the third threaded hole 63. The threaded end of each third bolt 73 passes vertically downward through the third countersunk hole 53 and is screwed and fixed to the corresponding third threaded hole 63.

[0025] Each adjustment mechanism 2 also includes a vertically arranged cylindrical pull rod 24. The middle part of the pull rod 24 in the height direction mates with the central hole 221 of the rotating bushing 22. The upper part of the pull rod 24 is located in the central threaded hole 231 of the adjusting nut 23, and is provided with an external thread section in the circumferential direction that matches the central threaded hole 231. The pull rod 24 is threadedly engaged with the central threaded hole 231 through its external thread section. The top of the pull rod 24 extends beyond the central threaded hole 231 and is provided with a turning square head 241. The lower end of the pull rod 24 passes through the upper cover 12 from top to bottom and continues to extend downward.

[0026] The outer casing 21 has a protective cover 25 on its upper side. The protective cover 25 is a cylindrical shape arranged vertically with a closed upper side and an open lower side. The lower side of the protective cover 25 has a third flange 251 extending horizontally outward along the radial direction of the protective cover 25. The central axis of the protective cover 25 and the central axis of the outer casing 21 are on the same vertical line. The inner diameter of the protective cover 25 matches the inner diameter of the second flange 212, and the outer diameter of the third flange 251 matches the outer diameter of the outer casing 21. The lower side of the third flange 251 is in close contact with the upper side of the second flange 212. The upper end of the pull rod 24 and the turning square head 241 are also included. Located inside the protective cover 25, near the outer wall of the third flange 251, there are several fourth countersunk holes 54 that penetrate vertically through the third flange 251. On the upper side of the second flange 212, there is a fourth threaded hole 64 that matches the fourth countersunk hole 54. Each fourth countersunk hole 54 is provided with a fourth bolt 74 that matches the fourth countersunk hole 54 and the fourth threaded hole 64. The threaded end of each fourth bolt 74 passes vertically downward through the fourth countersunk hole 54 and is screwed and fixed to the corresponding fourth threaded hole 64.

[0027] At the position of the spray plate 13, there is a receiving cavity 131 corresponding to each pull rod 24, which is directly opposite to the pull rod 24 (in this embodiment, the receiving cavity has an opening on the lower side, and a corresponding sealing plate 9 is provided at the opening). Each receiving cavity 131 is provided with a horizontally arranged disc 242. The discs 242 with opposite positions are coaxial with the pull rod 24 and the diameter of the disc 242 is larger than the diameter of the pull rod 24. The lower end of the pull rod 24 passes through the upper side of the spray plate 13 into the receiving cavity 131 and is coaxially connected to the upper side of the corresponding disc 242. Each disc 242 is also provided with an annular gasket 8 that surrounds the pull rod 24 circumferentially and covers the entire disc 242. Each disc 242 is in close contact with the upper side wall of the receiving cavity 131 through the gasket 8 to support the spray plate 13.

[0028] How to use this component: When the spray plate 13 is assembled and needs to be readjusted due to insufficient levelness, or when the distance between the spray plate 13 and the substrate is incorrect and the overall height of the spray plate 13 needs to be recalibrated, first remove the fourth bolt 74 of the four adjustment mechanisms 2, then remove the cover 25, and adjust according to the previously calculated deviation. Specifically, use a special tool to screw the corresponding square head 241 of the adjustment mechanism 2. Since the pull rod 24 is threaded with the adjusting nut 23, the height of the pull rod 24 changes synchronously as it rotates, thereby synchronously driving the height adjustment of the corresponding position of the spray plate 13 through the disc 242 connected to the lower side of the pull rod 24.

[0029] Advantages of this component: It allows for easy adjustment of the level and height of the spray plate 13 inside the coating chamber body 1. The adjustment process is simple, effectively improving production efficiency and product yield. Furthermore, this component employs two types of sealing rings: one is a star-shaped dynamic sealing ring, such as the third sealing ring 43 and the fifth sealing ring 45; the rest are circular static sealing rings. The third sealing ring 43 and the fifth sealing ring 45 are in direct contact with the pull rod 24. The third sealing ring 43 is the first seal, the fifth sealing ring 45 is the second seal, and the fourth sealing ring 44 serves as the third sealing ring 4. In addition to the third sealing ring 43, the fourth sealing ring 44 prevents airflow from leaking between the rotating bushing 22 and the upper cover 12 when the third sealing ring 43 leaks. The sixth sealing ring 46, as a supplement to the fifth sealing ring 45, prevents airflow from leaking between the rotating bushing 22 and the adjusting nut 23 when the fifth sealing ring 45 leaks. The first sealing ring 41 and the second sealing ring 42 form the final seal. The first sealing ring 41 prevents airflow between the outer shell 21 and the upper cover 12, and the second sealing ring 42 prevents airflow between the outer shell 21 and the protective cover 25. In this way, this assembly can maintain sealing performance while facilitating height adjustment.

[0030] To simply illustrate the structural features, in this embodiment, located at Figure 3 The first bolt 71, the second bolt 72, the third bolt 73, and the fourth bolt 74 on the right side are not shown.

Claims

1. A coating chamber spray plate adjustment assembly, comprising a horizontally arranged, rectangular coating chamber body with an open upper side, a top cover matching the coating chamber body hinged to the open upper side of the coating chamber body, and a horizontally arranged rectangular spray plate below the top cover, characterized in that: The upper cover has four adjustment mechanisms arranged in a square on the upper side of the cover. Each adjustment mechanism includes a vertically arranged, open-top cylindrical outer shell. Each outer shell has a first annular flange extending horizontally outward along the radial direction of its lower outer side. A first annular groove is located on the lower side of the first flange near the inner wall of the outer shell. A first sealing ring, with a circular cross-section, is located within the first annular groove. Several first countersunk holes, vertically penetrating the first flange, are evenly distributed on the circumference near the outer wall of the first flange. A first threaded hole, matching the first countersunk hole, is located on the upper cover corresponding to each first countersunk hole. A first bolt, matching both the first countersunk hole and the first threaded hole, is located within each first countersunk hole. The threaded end of each first bolt passes vertically downward through the first countersunk hole and is screwed into the corresponding first threaded hole for fixation. Each outer shell has a second annular flange extending horizontally inward along the radial direction of its upper inner side. A second annular groove is located on the upper side of the second flange near its inner wall. A second sealing ring, with a circular cross-section, is located within the second annular groove. Each housing contains a rotating sleeve, which is a vertically arranged cylinder with a central hole extending vertically through its core. The outer diameter of the rotating sleeve matches the inner diameter of the housing. The lower side of the rotating sleeve connects to the upper cover, and the height of the upper side of the rotating sleeve is lower than the height of the lower edge of the second flange. Near the central hole on the lower side of each rotating sleeve, there are a third annular groove and a fourth annular groove, coaxial with the central hole. The third and fourth annular grooves are arranged radially inward and outward at intervals. The inner circumferential side of the third annular groove communicates with the central hole. A third sealing ring, with a star-shaped cross-section, is provided within the third annular groove. A fourth sealing ring, matching the fourth annular groove, is provided within the fourth annular groove. The fourth sealing ring has a circular cross-sectional shape. Each rotating bushing has a fifth annular groove on its upper side near its central hole, which is coaxial with the central hole. The inner side of the fifth annular groove is connected to the central hole. A fifth sealing ring matching the fifth annular groove is provided in the fifth annular groove. The fifth sealing ring has a star-shaped cross-sectional shape. Several second countersunk holes are evenly distributed on the circumference near the outer wall of each rotating bushing. A second threaded hole matching the second countersunk hole is provided on the upper cover corresponding to each second countersunk hole. A second bolt matching the second countersunk hole and the second threaded hole is provided in each second countersunk hole. The threaded end of each second bolt passes vertically downward through the second countersunk hole and is screwed and fixed to the corresponding second threaded hole. Each housing also contains an adjusting nut, which is a vertically arranged cylinder. The adjusting nut is located on the upper side of the rotating sleeve and is coaxial with the rotating sleeve. The upper side of the adjusting nut is lower than the upper side of the second flange. The upper part of the outer circumferential wall of the adjusting nut mates with the inner circumferential wall of the second flange. The adjusting nut has a central threaded hole that runs vertically through the adjusting nut. The diameter of the bottom circle of the central threaded hole matches the diameter of the central hole of the rotating sleeve. On the lower side of the adjusting nut, corresponding to the outer side of the fifth annular groove of the rotating sleeve, there is a sixth annular groove that is coaxial with the central threaded hole. The fifth annular groove and the sixth annular groove are located on the same side. The grooves are arranged radially and intermittently along the adjusting nut. The sixth annular groove is provided with a sixth sealing ring that matches the sixth annular groove. The sixth sealing ring has a circular cross-section. Several third countersunk holes that penetrate the adjusting nut vertically are evenly distributed around the outer wall of each adjusting nut. A third threaded hole that matches the third countersunk hole is provided on the side of the rotating bushing at each position. A third bolt that matches the third countersunk hole and the third threaded hole is provided in each third countersunk hole. The threaded end of each third bolt passes vertically downward through the third countersunk hole and is screwed and fixed to the corresponding third threaded hole. Each adjustment mechanism also includes a vertically arranged cylindrical pull rod. The middle part of the pull rod in the height direction mates with the central hole of the rotating bushing. The upper part of the pull rod is located in the central threaded hole of the adjusting nut and has an external thread section in the circumference that matches the central threaded hole. The pull rod is threadedly engaged with the central threaded hole through the external thread section. The top of the pull rod extends beyond the central threaded hole and is provided with a turning square head. The lower end of the pull rod passes through the upper cover from top to bottom and continues to extend downward. The upper side of the outer shell is provided with a protective cover. The protective cover is a cylindrical shape with a vertical arrangement and a closed upper side and an open lower side. The lower side of the protective cover is provided with a third flange extending horizontally outward along the radial direction of the protective cover. The central axis of the protective cover and the central axis of the outer shell are the same vertical line. The inner diameter of the protective cover matches the inner diameter of the second flange, and the outer diameter of the third flange matches the outer diameter of the outer shell. The lower side of the third flange is in close contact with the upper side of the second flange. The upper end of the pull rod and the screwing square head are located inside the protective cover. Near the outer wall of the third flange, there are several fourth countersunk holes that penetrate the third flange vertically. On the upper side of the second flange, there is a fourth threaded hole that matches the fourth countersunk hole at each fourth countersunk hole. Each fourth countersunk hole is provided with a fourth bolt that matches the fourth countersunk hole and the fourth threaded hole. The threaded end of each fourth bolt passes vertically downward through the fourth countersunk hole and is screwed and fixed to the fourth threaded hole at the corresponding position. At the location of each tie rod, there is a receiving cavity directly opposite the tie rod. Each receiving cavity contains a horizontally arranged disc. The discs with opposite positions are coaxial with the tie rod and the diameter of the disc is larger than the diameter of the tie rod. The lower end of the tie rod passes through the upper side of the spray plate into the receiving cavity and is coaxially connected to the upper side of the corresponding disc. Each disc also has an annular gasket on its upper side that surrounds the tie rod and covers the entire disc. Each disc is in close contact with the upper side wall of the receiving cavity through the gasket to support the spray plate.

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