Vacuum pump and exhaust pipe temperature control method

Abstract

The application provides a vacuum pump and an exhaust pipe temperature control method, and relates to the technical field of vacuumizing. The vacuum pump comprises a pump body, an exhaust pipe, a cooling unit and a heating unit. The pump body is provided with an air outlet. The exhaust pipe is communicated with the air outlet and is used for discharging special gas treated by the pump body. On the basis, the cooling unit is arranged outside the exhaust pipe and is used for cooling the exhaust pipe. The heating unit is arranged outside the cooling unit and is used for heating the exhaust pipe. It can be understood that, by sequentially arranging the cooling unit and the heating unit on the exhaust pipe, a temperature control structure which can be independently started and stopped is formed, the temperature of the exhaust pipe can be actively adjusted to a suitable range according to the working condition, so that the special gas is effectively prevented from being liquefied or crystallized due to too low temperature, and the special gas is effectively prevented from being thermal decomposed or corroding the pipeline due to too high temperature, and the operation stability of the exhaust path is obviously improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum technology, and more specifically, to a vacuum pump and a method for controlling the temperature of the exhaust pipe. Background Technology

[0002] In semiconductor manufacturing, various electronic specialty gases are used extensively as process materials, widely applied in critical processes such as thin film deposition and etching. These specialty gases are extremely sensitive to the temperature of the delivery pipelines and pumps: when the temperature is too low, the gas is prone to liquefaction or crystallization of process byproducts, which can clog the pipelines; when the temperature is too high, it may cause gas decomposition, pipeline corrosion, or even damage to components such as heating elements, ultimately affecting production stability and product yield.

[0003] However, the inventors discovered that existing vacuum pump systems only have independent cooling and heating functions for the pump body itself, while the pipeline of the external exhaust part of the pump body is still a single structure and lacks effective temperature control methods. This results in large temperature fluctuations in this area, which can easily lead to local blockages and become a weak link that restricts the reliability of the process. Summary of the Invention

[0004] The present invention aims to provide a vacuum pump and an exhaust pipe temperature control method, which can effectively prevent special gases from liquefying or crystallizing due to excessively low temperatures, and from thermally decomposing or corroding pipelines due to excessively high temperatures, thereby significantly improving the operational stability of the exhaust path.

[0005] The embodiments of the present invention can be implemented as follows: In a first aspect, the present invention provides a vacuum pump, comprising: The pump body has an air outlet. Exhaust pipe, which connects to the air outlet; The cooling unit is located on the outside of the exhaust pipe and is used to cool the exhaust pipe. The heating unit, located outside the cooling unit, is used to heat the exhaust pipe.

[0006] In an optional embodiment, the cooling unit includes a cooling coil that is arranged around the outside of the exhaust pipe and has a cooling channel inside for introducing a cooling medium.

[0007] In an optional embodiment, the cooling unit further includes a solenoid valve located inside the cooling coil for opening and closing the cooling flow channel.

[0008] In an optional embodiment, the heating unit includes a heating layer and an insulation layer; and the heating layer covers the outside of the cooling unit, while the insulation layer covers the outside of the heating layer.

[0009] In an optional embodiment, a heating wire is provided within the heating layer, which is used for electrical connection with an external power supply circuit.

[0010] In an optional embodiment, the heating unit further includes an insulating layer that covers the outside of the insulation layer.

[0011] In an optional embodiment, the vacuum pump further includes a temperature control switch, which is connected in series in the power supply circuit of the heating unit to cut off the power supply circuit when the temperature of the exhaust pipe exceeds a preset danger threshold.

[0012] In an optional embodiment, the vacuum pump further includes a temperature detection module located on the exhaust pipe for real-time acquisition of the exhaust pipe temperature.

[0013] In an optional embodiment, the vacuum pump further includes a controller electrically connected to a temperature detection module, a cooling unit, and a heating unit, for controlling the cooling unit to turn on to cool the exhaust pipe or controlling the heating unit to turn on to heat the exhaust pipe based on the exhaust pipe temperature.

[0014] In a second aspect, the present invention provides an exhaust pipe temperature control method, applied to a vacuum pump according to any of the foregoing embodiments, the method comprising: Obtain the exhaust pipe temperature; Determine if the exhaust pipe temperature is greater than the first preset temperature threshold; if so, control the cooling unit to turn on to cool the exhaust pipe. Determine if the exhaust pipe temperature is lower than the second preset temperature threshold; if so, control the heating unit to turn on to heat the exhaust pipe. The first preset temperature threshold is higher than the second preset temperature threshold.

[0015] The beneficial effects of the vacuum pump and exhaust pipe temperature control method provided in this embodiment of the invention include: This invention provides a vacuum pump and an exhaust pipe temperature control method. The vacuum pump includes a pump body, an exhaust pipe, a cooling unit, and a heating unit. The pump body has an outlet. The exhaust pipe is connected to the outlet and is used to discharge the special gas processed by the pump body. Based on this, the cooling unit is located outside the exhaust pipe to cool it. The heating unit is located outside the cooling unit to heat the exhaust pipe. It is understood that by sequentially arranging the cooling unit and heating unit on the exhaust pipe, an independently operable temperature control structure is formed, allowing the exhaust pipe temperature to be actively adjusted to a suitable range according to operating conditions. This effectively prevents the special gas from liquefying or crystallizing due to excessively low temperatures, and from thermally decomposing or corroding the pipeline due to excessively high temperatures, significantly improving the operational stability of the exhaust path. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the vacuum pump provided in this embodiment; Figure 2 for Figure 1 A structural schematic diagram of the central exhaust pipe and its related components; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 The exhaust pipe temperature control method provided in this embodiment.

[0018] Icons: 10-Vacuum pump; 100-Pump body; 200-Exhaust pipe; 300-Cooling unit; 310-Cooling coil; 400-Heating unit; 410-Heating layer; 430-Insulation layer; 450-Insulation layer; 510-Temperature control switch; 530-Temperature detection module; 610-Controller; 630-Solenoid valve actuator module; 700-Flexible pipeline. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0025] The following describes in detail the overall structure, working principle, and technical effects of the vacuum pump provided by the present invention, as well as the detailed steps, implementation principle, and technical effects of the matching exhaust pipe temperature control method, through embodiments and in conjunction with the accompanying drawings.

[0026] Please see Figures 1 to 3 This invention provides a vacuum pump 10, which includes a pump body 100, an exhaust pipe 200, a cooling unit 300, and a heating unit 400. The pump body 100 has an exhaust port. The exhaust pipe 200 is connected to the exhaust port and is used to discharge special gases (such as WF6, Cl2, SH4) processed by the pump body 100. In addition, the cooling unit 300 is located outside the exhaust pipe 200 to cool it. The heating unit 400 is located outside the cooling unit 300 to heat the exhaust pipe 200.

[0027] It is understandable that by sequentially setting a cooling unit 300 and a heating unit 400 on the exhaust pipe 200, an independently start-stop temperature control structure is formed, so that the temperature of the exhaust pipe 200 can be adjusted to a suitable range according to the working conditions. This effectively prevents special gases from liquefying or crystallizing due to excessively low temperatures, and from thermally decomposing or corroding the pipeline due to excessively high temperatures, thus significantly improving the operational stability of the exhaust path.

[0028] In practical applications, the pump body 100 is also provided with an air inlet, which is connected to the main unit via a flexible pipe 700. Correspondingly, the exhaust pipe 200 is connected to the gas processing equipment via another flexible pipe 700.

[0029] Please refer to it again. Figure 2In an optional embodiment, the cooling unit 300 includes a cooling coil 310. The cooling coil 310 is wound around the outside of the exhaust pipe 200 and has a cooling flow channel inside for the introduction of cooling medium. This wound cooling coil 310 can increase the contact area between the cooling medium and the outer wall of the exhaust pipe 200 and the length of the heat exchange path, thereby improving the cooling efficiency.

[0030] Furthermore, the cooling unit 300 also includes a solenoid valve, which is located inside the cooling coil 310 and is used to open and close the cooling flow channel, thereby realizing rapid start and stop control of the cooling medium flow.

[0031] Please refer to it again. Figure 3 The heating unit 400 includes a heating layer 410 and an insulation layer 430. The heating layer 410 covers the outside of the cooling unit 300 and provides controllable heat energy to the exhaust pipe 200. The insulation layer 430 covers the outside of the heating layer 410 and reduces heat loss to the environment, improves heat utilization efficiency, and ensures the safety of the external temperature of the equipment.

[0032] In an optional embodiment, a heating wire is provided within the heating layer 410. The heating wire is used for electrical connection to an external power supply circuit. After being powered on, the heating wire generates stable and controllable resistance heat based on the Joule effect. The heat is conducted through the heating layer 410 to the wall of the exhaust pipe 200, achieving precise and rapid adjustment of the temperature of the exhaust pipe 200.

[0033] Optionally, the heating wire is a nickel-chromium alloy heating wire, which is spirally or annularly distributed in the substrate of the heating layer 410 along the axial direction of the exhaust pipe 200.

[0034] To enhance safety, the vacuum pump 10 also includes a temperature control switch 510. The temperature control switch 510 is connected in series with the power supply circuit of the heating unit 400 to cut off the power supply circuit when the temperature of the exhaust pipe 200 exceeds a preset danger threshold (e.g., 180°C). This ensures timely termination of heating in case of abnormal conditions such as a short circuit in the heating wire, preventing safety hazards caused by overheating of the exhaust pipe 200.

[0035] Under this over-temperature condition, the controller 610 can also simultaneously open the solenoid valve to open the cooling channel, allowing the cooling medium to flow through the cooling coil 310 and actively cool the exhaust pipe 200.

[0036] Furthermore, to prevent electric shock or fire risks caused by leakage of the heating wire, the heating unit 400 also includes an insulating layer 450, which covers the outside of the insulation layer 430. Optionally, the insulation layer 430 is made of silicone material.

[0037] In an optional embodiment, the vacuum pump 10 further includes a temperature detection module 530, which is disposed on the exhaust pipe 200 and used to acquire the temperature of the exhaust pipe 200 in real time. This provides accurate and timely temperature feedback for the coordinated control of the cooling unit 300 and the heating unit 400.

[0038] Optionally, the temperature detection module 530 is a temperature sensor.

[0039] Furthermore, the vacuum pump 10 also includes a controller 610, which is electrically connected to the temperature detection module 530, the cooling unit 300, and the heating unit 400. The controller 610 is used to control the cooling unit 300 to turn on to cool the exhaust pipe 200, or to control the heating unit 400 to turn on to heat the exhaust pipe 200, based on the temperature of the exhaust pipe 200. This forms a closed-loop temperature control logic, ensuring that the temperature of the exhaust pipe 200 is stably maintained within the set range required for the special gas.

[0040] Optionally, the vacuum pump 10 also includes a solenoid valve actuator module 630; the controller 610 is electrically connected to the actuator module and drives the solenoid valve to open through it. Under normal operating conditions, the solenoid valve is normally closed by default, and is only controlled by the solenoid valve actuator module 630 to open or close when the controller 610 issues a start / stop command.

[0041] In summary, this invention provides a vacuum pump 10, comprising a pump body 100, an exhaust pipe 200, a cooling unit 300, and a heating unit 400. The pump body 100 has an outlet. The exhaust pipe 200 is connected to the outlet and is used to discharge the special gas processed by the pump body 100. Based on the above, the cooling unit 300 is located outside the exhaust pipe 200 to cool it. The heating unit 400 is located outside the cooling unit 300 to heat the exhaust pipe 200. It is understood that by sequentially arranging the cooling unit 300 and the heating unit 400 on the exhaust pipe 200, an independently operable temperature control structure is formed, allowing the temperature of the exhaust pipe 200 to be actively adjusted to a suitable range according to operating conditions. This effectively prevents the special gas from liquefying or crystallizing due to excessively low temperatures, and from thermally decomposing or corroding the pipeline due to excessively high temperatures, significantly improving the operational stability of the exhaust path.

[0042] In addition, please refer to this Figure 4 The present invention provides an exhaust pipe temperature control method based on the vacuum pump 10 provided in any of the foregoing embodiments, specifically including the following steps: step S1, step S2 and step S3.

[0043] Step S1: Obtain the temperature of the exhaust pipe at 200°C.

[0044] In step S1, the temperature data of the exhaust pipe 200 can be collected in real time by the temperature detection module 530 and the temperature signal can be transmitted to the controller 610.

[0045] Step S2: Determine whether the temperature of the exhaust pipe 200 is greater than the first preset temperature threshold; if so, control the cooling unit 300 to turn on to cool the exhaust pipe 200.

[0046] In step S2, if the temperature of the exhaust pipe 200 exceeds the first preset temperature threshold, it indicates that the exhaust pipe 200 is at risk of overheating. Therefore, the controller 610 activates the cooling unit 300, opens the solenoid valve to open the cooling channel, and the cooling medium flows through the cooling coil 310. This actively cools the exhaust pipe 200 by exchanging heat with the outer wall, effectively preventing thermal decomposition of the special gas or pipeline corrosion caused by high temperatures, and significantly improving the operational stability of the exhaust path.

[0047] Step S3: Determine whether the temperature of the exhaust pipe 200 is less than the second preset temperature threshold; if so, control the heating unit 400 to turn on to heat the exhaust pipe 200.

[0048] In step S3, if the temperature of the exhaust pipe 200 is lower than the second preset temperature threshold, it indicates that the temperature of the exhaust pipe 200 is too low. Therefore, the controller 610 activates the heating unit 400, closes the power supply circuit, and energizes the heating wire to generate Joule heating. The heat is conducted through the heating layer 410 to the wall of the exhaust pipe 200, achieving precise temperature rise. This effectively prevents liquefaction or crystallization blockage caused by low temperature, ensuring unobstructed exhaust path and operational stability.

[0049] Understandably, the first preset temperature threshold is higher than the second preset temperature threshold. Only when the temperature of the exhaust pipe 200 is between the second preset temperature threshold and the first preset temperature threshold (i.e., within the set temperature control range), neither the cooling unit 300 nor the heating unit 400 will be activated; at this time, the vacuum pump 10 relies on the insulation layer 430 to reduce heat loss and maintain the temperature of the exhaust pipe 200 stable.

[0050] For example, the first preset temperature threshold is 160°C and the second preset temperature threshold is 150°C; when the temperature of the exhaust pipe 200 is in the range of 150°C to 160°C, the solenoid valve in the cooling unit 300 and the heating layer 410 of the heating unit 400 are both kept closed, and only the heat insulation layer 430 provides passive heat maintenance.

[0051] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A vacuum pump, characterized in that, include: Pump body (100), wherein the pump body (100) is provided with an air outlet; An exhaust pipe (200) is connected to the air outlet; A cooling unit (300) is provided on the outside of the exhaust pipe (200) for cooling the exhaust pipe (200); A heating unit (400) is located outside the cooling unit (300) and is used to heat the exhaust pipe (200).

2. The vacuum pump according to claim 1, characterized in that, The cooling unit (300) includes a cooling coil (310) which is arranged around the outside of the exhaust pipe (200) and has a cooling channel inside for introducing the cooling medium.

3. The vacuum pump according to claim 2, characterized in that, The cooling unit (300) also includes a solenoid valve, which is located inside the cooling coil (310) and is used to open or close the cooling channel.

4. The vacuum pump according to claim 1, characterized in that, The heating unit (400) includes a heating layer (410) and a heat insulation layer (430); and the heating layer (410) covers the outside of the cooling unit (300), and the heat insulation layer (430) covers the outside of the heating layer (410).

5. The vacuum pump according to claim 4, characterized in that, The heating layer (410) is provided with a heating wire, which is used to electrically connect to an external power supply circuit.

6. The vacuum pump according to claim 4, characterized in that, The heating unit (400) also includes an insulating layer (450) which covers the outside of the insulation layer (430).

7. The vacuum pump according to claim 1, characterized in that, The vacuum pump (10) also includes a temperature control switch (510), which is connected in series to the power supply circuit of the heating unit (400) to cut off the power supply circuit when the temperature of the exhaust pipe (200) is higher than a preset danger threshold.

8. The vacuum pump according to claim 1, characterized in that, The vacuum pump (10) also includes a temperature detection module (530), which is located on the exhaust pipe (200) and is used to obtain the temperature of the exhaust pipe (200) in real time.

9. The vacuum pump according to claim 8, characterized in that, The vacuum pump (10) also includes a controller (610), which is electrically connected to the temperature detection module (530), the cooling unit (300) and the heating unit (400), and is used to control the cooling unit (300) to turn on to cool the exhaust pipe (200) according to the temperature of the exhaust pipe (200); or to control the heating unit (400) to turn on to heat the exhaust pipe (200).

10. A method for controlling the temperature of an exhaust pipe, characterized in that, The method, applied to the vacuum pump according to any one of claims 1 to 9, comprises: Obtain the temperature of the exhaust pipe (200); Determine whether the temperature of the exhaust pipe (200) is greater than a first preset temperature threshold; if so, control the cooling unit (300) to turn on to cool the exhaust pipe (200); Determine whether the temperature of the exhaust pipe (200) is less than a second preset temperature threshold; if so, control the heating unit (400) to turn on to heat the exhaust pipe (200); Wherein, the first preset temperature threshold is higher than the second preset temperature threshold.

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