A large pumping speed all-metal sealed scroll vacuum pump system

Abstract

The application discloses a large-pumping-speed full-metal sealed scroll vacuum pump system, and belongs to the technical field of pumps and compressors. The system comprises a static scroll rotor and a dynamic scroll rotor which are mutually engaged. The dynamic scroll rotor is supported and moved by at least three vertical eccentric shaft systems, and moves in a non-rotating manner relative to the static scroll rotor. No organic material top seal is arranged between the dynamic scroll rotor and the static scroll rotor. A double-layer metal bellows with a sandwich monitoring cavity is arranged between the dynamic scroll rotor and a fixed base plate. A key static connection interface of a process gas primary containment boundary is provided with a static sealing assembly with two metal sealing interfaces and an intermediate monitoring cavity. Each monitoring cavity is in communication with a negative pressure monitoring pipe network. The system further comprises a forced circulation cooling and gravity lubrication circuit arranged outside the primary containment boundary. The application is suitable for large-pumping-speed sealed pumping of tritium with radioactivity and toxic and corrosive gases.

Description

Technical Field

[0001] This invention relates to the field of pump and compressor technology, and specifically to a high-speed, all-metal sealed scroll vacuum pump system. Background Technology

[0002] A vortex vacuum pump is a type of volumetric vacuum device that utilizes meshing static and dynamic vortex components to form multiple closed working chambers with periodically changing volumes. This allows gas to migrate and be compressed from the outer intake region to the central exhaust region. Vortex vacuum pumps feature continuous gas flow, minimal pressure pulsation, and no need for oil lubrication within the working chamber, making them suitable for pumping clean gases. In special applications such as fusion deuterium-tritium fuel cycling, radioactive media handling, and the transport of toxic or corrosive process gases, vacuum pumps not only need significant pumping capacity but also must maintain reliable isolation between the process medium and the external environment over extended periods. Tritium and other hydrogen isotopes are characterized by their small molecular size and susceptibility to leakage through minute gaps; tritium is also radioactive and can undergo isotope exchange with organic materials or cause material degradation. Toxic or corrosive gases also place high demands on the sealing materials, rotor materials, and interface materials for their resistance to the medium. Therefore, vortex vacuum pumps designed for the above operating conditions need to simultaneously meet requirements such as high-throughput pumping, media compatibility, leak containment, leak monitoring, and long-term operation.

[0003] Existing vortex vacuum pumps typically use organic polymer top seals on the tooth tips of the moving and stationary vortex components to compensate for axial assembly clearances and reduce interstage backflow. While these top seals improve compression performance under typical industrial gas conditions, they may swell, age, wear, shed particles, or release gas under conditions involving tritium, radiation, corrosion, or high temperatures. Their service life and media compatibility are insufficient to meet the requirements for long-term closed-loop pumping of hazardous process gases. Eliminating the organic material top seal necessitates maintaining stable and appropriate axial and radial clearances through rotor stiffness, assembly precision, and motion constraints; otherwise, increased interstage backflow or mechanical interference between the moving and stationary vortex components can easily occur. Furthermore, conventional small and medium-sized vortex pumps often employ a single main shaft coupled with an anti-rotation mechanism to constrain the moving vortex component. For large-diameter, high-quality moving vortex rotors subjected to significant alternating gas loads, single-point or few-point support can easily lead to load concentration. Traditional anti-rotation mechanisms such as cross-rings may also generate reciprocating friction, impact, and wear, making it difficult to simultaneously meet the support stiffness, motion synchronization, and long-cycle fatigue resistance required for high-pumping-speed conditions. Furthermore, existing pump bodies typically only have single-seal dynamic seals at the shaft end and detachable static connection interfaces such as flanges and end covers, and in common applications, only organic sealing rings are used. When a small leak occurs at the sealing interface, the aforementioned special leaking media may directly enter the external environment, causing pollution or posing a hazard to operators; moreover, such sealing settings rely solely on periodic offline leak detection, which makes it difficult to promptly identify the gradual degradation of sealing performance and provide real-time early warning monitoring. For the connection points between moving and static components with eccentric translational displacement, directly connecting the monitoring pipeline to the moving component will subject the monitoring pipeline to repeated alternating displacement and increase the risk of fatigue failure. Another prominent issue is that the high pumping speed design results in a large vortex rotor size, which leads to high compression heat during gas compression. At the same time, the high gas load will also cause the eccentric shaft system and its bearing assembly to generate high frictional heat when subjected to alternating loads. If heat dissipation is insufficient, the thermal deformation of the rotor may change the top-sealed working clearance and increase the risk of mechanical interference. If the cooling or lubrication circuit crosses the process gas containment boundary, new channels for media leakage or lubricant intrusion into the pump cavity may form at pipeline joints, oil seals, or aging parts.

[0004] Therefore, it is necessary to provide a high-speed, all-metal sealed vortex vacuum pump system that can stably achieve the non-rotational translational revolution of the moving vortex rotor without the need for an organic material top seal. At the same time, it can form a two-stage containment system for the moving connection parts and the detachable static connection interface, which can be actively pumped and monitored online. It can also complete rotor cooling and bearing lubrication without damaging the process gas containment boundary. Summary of the Invention

[0005] To address the problems of existing vortex vacuum pumps in high-flow pumping conditions involving tritium and other hydrogen isotopes as well as toxic or corrosive gases, such as insufficient media compatibility of the organic material top seal of the moving vortex rotor, inadequate support and anti-rotation capabilities, limited service life, lack of secondary containment and online monitoring after single-seal failure at the dynamic-static connection interface, and potential intrusion of the cooling and lubrication circuit into the process gas containment boundary, this invention provides a high-pumping-speed all-metal sealed vortex vacuum pump system.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-speed, all-metal sealed vortex vacuum pump system includes a pump housing, meshing stationary and moving vortex rotors, a base plate, a transfer oil box, a drive mechanism, an intake port, an exhaust port, and an integrated frame. The drive mechanism comprises at least three vertical eccentric shaft systems, one of which is a driving eccentric shaft system connected to a drive motor, and the others are driven eccentric shaft systems. The lower oil-separating sleeves of the driving and driven eccentric shaft systems are fixed to the base plate, and the upper parts are connected to the moving vortex rotor via bearing assemblies, cooperating to enable the moving vortex rotor to perform translational revolution without rotation. The system also includes a two-stage enclosed metal sealing system, comprising a dynamic sealing assembly, a static sealing assembly, and a negative pressure monitoring system. The system includes a monitoring network; a dynamic sealing assembly located between the moving vortex rotor and the base plate, comprising an inner metal bellows and an outer metal bellows, forming a first monitoring chamber; a static sealing assembly located at the detachable interface of the primary containment boundary of the pump chamber, comprising a first metal sealing interface and a second metal sealing interface arranged sequentially, forming a second monitoring chamber; both the first and second monitoring chambers are connected to a negative pressure monitoring network, which is connected to a negative pressure suction device and a leakage monitoring device; the pump chamber boundary and the primary containment boundary isolating the pump chamber from the drive mechanism are both made of corrosion-resistant and radiation-resistant metal materials, and there is no organic material top seal between the static and moving vortex rotors.

[0008] Furthermore, by employing at least three spaced-apart vertical eccentric shaft systems, multiple rigid supports can be formed at different circumferential positions of the moving vortex rotor. Power is input from one driving eccentric shaft system, while the remaining driven eccentric shaft systems jointly define the motion attitude. The eccentric motion of each eccentric shaft system is synchronized via the moving vortex rotor, ensuring that the circumferential attitude of the moving vortex rotor remains unchanged during its revolution. This simultaneously achieves eccentric drive and anti-rotation constraint, and disperses the gravity, gas load, and inertial load of the moving vortex rotor.

[0009] Furthermore, the dynamic sealing assembly is disposed between the dynamic vortex rotor and the substrate, and includes an inner metal bellows and an outer metal bellows located outside the inner metal bellows, forming a closed first monitoring chamber between the inner and outer metal bellows. The static sealing assembly is disposed at at least one detachable static connection interface that directly contacts the pumped process gas, and includes a first metal sealing interface and a second metal sealing interface sequentially arranged along the potential leakage direction from the pump chamber toward the outside of the primary containment boundary, forming a closed second monitoring chamber between the first metal sealing interface and the second metal sealing interface. Both the first and second monitoring chambers are connected to the negative pressure monitoring pipeline network, which is connected to the negative pressure suction device and the leakage monitoring device, respectively.

[0010] Furthermore, the inner metal bellows adapts to the eccentric translation of the vortex rotor and forms a first-level dynamic isolation, while the outer metal bellows forms a second-level dynamic isolation on its outer side. The first monitoring chamber between the two is used to contain and exhaust leaked gas that has passed through either level of dynamic isolation. The multi-eccentric shaft system ensures that the vortex rotor maintains a basically unchanged circumferential attitude during its revolution, so the two metal bellows mainly bear periodic lateral deformation corresponding to the eccentricity, without having to endure continuous torsion with the vortex rotor. The first metal sealing interface forms a first-level static isolation with a detachable static connection interface, while the second metal sealing interface forms a second-level static isolation on its outer side. The second monitoring chamber between the two is used for leakage diversion and monitoring. The negative pressure monitoring network creates a controlled low-pressure monitoring space for each monitoring chamber, allowing the degradation of sealing performance to be identified before the leaking medium breaks through the outer containment boundary, and enabling the directional extraction of the medium entering the monitoring chamber.

[0011] Furthermore, the pump cavity boundary in contact with the pumping medium, the inner metal bellows isolating the pump cavity from the drive mechanism, the inner side of the substrate, the outer side of the transfer oil box, and the first metal sealing interface located inside the second monitoring cavity together constitute a primary containment boundary; the outer metal bellows and the second metal sealing interface located outside the second monitoring cavity constitute a secondary containment boundary located outside the primary containment boundary. The pump cavity boundary in contact with the pumping medium and the sealing structures constituting the primary and secondary containment boundaries are all made of corrosion-resistant and radiation-resistant metal materials, and no organic material top seal is provided between the stationary vortex rotor and the moving vortex rotor.

[0012] The term "all-metal seal" in this invention refers to a sealing structure formed of metal material in contact with the pumping medium or constituting the primary and secondary containment boundaries. It does not require that oil seals located outside the process gas containment boundary and used only to block lubricating coolant also be made of metal. This definition ensures that the sealing boundary in contact with the process medium does not rely on organic sealing materials, while also allowing for the installation of conventional seals suitable for oil sealing within the lubrication area isolated from the pump cavity.

[0013] Furthermore, the number of eccentric shaft systems is three, including one driving eccentric shaft system and two driven eccentric shaft systems. The axes of the three eccentric shaft systems are arranged in an equilateral triangle in a plane perpendicular to the central axis. The three eccentric shaft systems have the same nominal eccentricity and consistent eccentric phase. The drive motor is suspended and fixed below the pump housing that positions the base plate, and is connected to the driving eccentric shaft system via a coupling. The equilateral triangle arrangement can form a geometrically stable three-point support and distribute the load on the rotating vortex rotor to the three eccentric shaft systems.

[0014] Furthermore, each of the aforementioned eccentric shaft systems includes an eccentric shaft, an upper bearing assembly, a lower bearing assembly, an upper counterweight and a lower counterweight located on the eccentric shaft, and an oil sealing unit disposed at the lower end of the eccentric shaft; the upper bearing assembly and the lower bearing assembly each include angular contact ball bearings arranged back-to-back. The oil sealing unit includes an oil-separating sleeve, an oil seal seat that seals with the oil-separating sleeve, and a double-lip skeleton oil seal disposed within the oil seal seat. The back-to-back paired angular contact ball bearings can simultaneously withstand radial loads, bidirectional axial loads, and overturning moments; the upper and lower counterweights are used to compensate for the unbalanced inertial forces generated by eccentric motion; and the oil sealing unit is used to prevent lubricating coolant from migrating to the drive motor or the external environment.

[0015] Furthermore, the moving vortex rotor has multiple radial reinforcing ribs on its non-working side away from the stationary vortex rotor, with each radial reinforcing rib extending from the central region of the moving vortex rotor to the outer periphery. These radial reinforcing ribs improve the bending stiffness of the moving vortex rotor disk, which helps reduce disk deflection under axial gas loads and tangential aerodynamic forces, thereby maintaining the working clearance between the top-sealed rotors.

[0016] Furthermore, both the stationary and moving vortex rotators are integrally machined from a high-strength alloy that is corrosion-resistant and radiation-resistant. This integral machining structure reduces the connection interface between the vortex teeth and the disk body, and facilitates control over the accuracy of the vortex profile, the flatness of the end face, and the axial and radial assembly clearances.

[0017] Furthermore, the dynamic sealing assembly also includes a lower flange fixedly connected to the base plate and an upper connecting part fixedly connected to the dynamic vortex rotor. The lower ends of both the inner and outer metal bellows are welded to the lower flange, and their upper ends are welded to the upper connecting part. The lower flange is detachably and sealingly connected to the base plate via a spring-storage type all-metal sealing assembly. The upper connecting part is continuously welded circumferentially to the dynamic vortex rotor. The suction port of the first monitoring chamber is located on the lower flange. Placing the suction port on the stationary lower flange avoids repeated movement of the negative pressure monitoring branch pipe with the dynamic vortex rotor; continuous circumferential welding eliminates the detachable gap and potential leakage channels at the upper moving connection.

[0018] Furthermore, the static sealing assembly is a spring-energy-storing all-metal sealing assembly, comprising an annular metal sealing body and an annular energy-storing spring disposed within the annular metal sealing body. The annular metal sealing body has an inner metal sealing portion and an outer metal sealing portion spaced apart. Under the preload of the annular energy-storing spring, the inner and outer metal sealing portions respectively form the first metal sealing interface and the second metal sealing interface, defining a closed annular second monitoring cavity between them. The annular energy-storing spring can maintain the contact pressure between the two metal sealing portions under assembly preload and temperature change conditions.

[0019] Furthermore, the negative pressure monitoring network includes branch pipes communicating with the first monitoring chamber and each of the second monitoring chambers, a manifold communicating with each of the branch pipes, isolation valves installed on each of the branch pipes, and a helium mass spectrometer leak detector selectively communicating with the manifold. The leak monitoring device includes a pressure sensor, a gas composition detector, and an alarm controller; the alarm controller is configured to output a leak alarm signal when at least one of the pressure change rate of the negative pressure monitoring network, the target process gas concentration, or the helium mass spectrometer leak detection signal reaches a corresponding preset threshold. Each branch pipe can be isolated one by one using isolation valves, thereby allowing for location-based leak detection at specific sealing points.

[0020] Furthermore, the detachable static connection interfaces of the static sealing assembly include the connection interface between the exhaust port flange and the static vortex rotor, the bottom connection interface of the transfer oil box, the top connection interface of the transfer oil box, and the connection interface between the lower flange of the dynamic sealing assembly and the base plate. All of these interfaces are located along potential leakage paths of process gases. The bimetallic sealing interface and intermediate monitoring chamber allow each interface to be incorporated into a unified two-stage containment and monitoring system.

[0021] Furthermore, the vacuum pump system also includes a pump thermal management and bearing lubrication system. The pump thermal management and bearing lubrication system includes a circulating oil pump, a heat exchanger, a stationary oil chamber located on the back side of the stationary vortex rotor, a moving oil sump located on the back side of the moving vortex rotor, an oil injection pipe connecting the stationary oil chamber and the moving oil sump, an oil collection trough located at the bottom of the pump casing, and a return oil pipe connecting the oil collection trough to the circulating oil pump. The outlet of the circulating oil pump is connected to the stationary oil chamber via the heat exchanger and the intermediate oil box, so as to deliver the lubricating coolant cooled by the heat exchanger from bottom to top to the stationary oil chamber; the lubricating coolant overflows from the stationary oil chamber and is delivered to the moving oil sump via the oil injection pipe.

[0022] Furthermore, the stationary vortex rotor is located below the moving vortex rotor; the stationary disk oil cavity is sand-cast; the moving disk oil pool is an annular oil pool formed on the back side of the moving vortex rotor, and is configured to generate unsteady sloshing of the lubricating coolant within it by utilizing the translational and orbital motion of the moving vortex rotor. The stationary disk oil cavity cools the stationary vortex rotor using immersion heat transfer, and the unsteady sloshing within the moving disk oil pool weakens the liquid-side thermal boundary layer and enhances convective heat transfer between the moving vortex rotor and the lubricating coolant.

[0023] Furthermore, the rotating rotor is provided with oil guide grooves facing each of the eccentric shaft systems. After the lubricating coolant in the rotating disc oil sump reaches a predetermined overflow level, it is distributed to the corresponding eccentric shaft systems through the oil guide grooves and flows sequentially from top to bottom through the upper bearing assembly and the lower bearing assembly under gravity. The oil seal seat of the oil sealing unit is provided with a return oil guide groove communicating with the oil collection groove. Thus, the lubricating coolant used to cool the rotor continues to be used for bearing lubrication and heat dissipation, and is recovered under gravity.

[0024] Furthermore, the circulation pipelines, heat exchangers, circulating oil pumps, and their pipe joints of the pump thermal management and bearing lubrication system are all located outside the secondary containment boundary, and the lubricating coolant is isolated from the pump chamber. This arrangement prevents the cooling and lubrication pipelines and their joints from becoming part of the process gas containment boundary.

[0025] Furthermore, the base plate is detachably fixed to the pump housing and forms a common assembly reference for the stationary vortex rotor, the moving vortex rotor, and each of the eccentric shaft systems; the pump housing and the base plate are supported on an integrated frame. The stationary vortex rotor, the intermediate oil box, and the exhaust port are pre-assembled to form a stationary assembly, and the moving vortex rotor, the upper bearing assemblies of each of the eccentric shaft systems, are pre-assembled to form a moving assembly. The stationary assembly is fixed to the base plate, and the moving assembly is supported and positioned by each of the eccentric shaft systems. Using the base plate as a common assembly reference is beneficial for controlling the parallelism of the moving and stationary vortex rotors, the perpendicularity of the multiple eccentric shaft systems, and the coplanarity of each positioning end face.

[0026] Furthermore, the exhaust port is located in the central region of the stationary vortex rotor and communicates with the exhaust pipe, which is equipped with a one-way exhaust valve. The one-way exhaust valve allows compressed gas to be discharged and prevents the exhaust-side gas from flowing back into the pump chamber when the machine stops or the pressure reverses.

[0027] Furthermore, the stationary vortex rotor and the moving vortex rotor are integrally precision-machined from a lightweight, high-strength alloy that is corrosion-resistant and radiation-resistant; the inner and outer metal bellows are made of austenitic stainless steel or nickel-based alloys; the eccentric shafts of the driving and driven eccentric shaft systems are made of high-strength, high-temperature nickel-based alloys; the base plate, the pump housing, and the transfer oil box are each made of at least one of austenitic stainless steel, precipitation-hardening stainless steel, or nickel-based alloys. Different metal materials are matched according to requirements for load-bearing capacity, forming, welding, corrosion resistance, and radiation resistance.

[0028] Beneficial effects:

[0029] 1. At least three vertical eccentric shafts are spaced apart around the central axis of the vortex rotor, and together support, drive and constrain the vortex rotor with their eccentricity and eccentric phase. This forms rigid motion constraints at multiple circumferential positions and disperses gravity, gas load and centrifugal inertial load. This enables the large-size vortex rotor to perform stable translational revolution without rotation, reducing the risk of load concentration, friction and fatigue of single-axis support and independent anti-rotation mechanism.

[0030] 2. The moving and stationary vortex rotors adopt an integral precision-machined metal structure. The non-working side of the moving vortex rotor is equipped with radial reinforcing ribs, and there is no organic material top seal between the two rotors. The integral precision machining and reinforcing ribs together improve the profile accuracy and the bending stiffness of the disc to stably maintain the axial and radial clearances. This avoids process gas from contacting the polymer top seal and reduces the pollution and sealing performance degradation of organic materials caused by irradiation, corrosion, wear or venting.

[0031] 3. An inner metal bellows and an outer metal bellows are coaxially sleeved between the vortex rotor and the substrate, forming a first monitoring cavity. The circumferential attitude of the vortex rotor is maintained by a multi-eccentric shaft system. The two bellows form independent dynamic isolation layers while adapting to eccentric displacement, and there is no rotation to prevent the bellows from being subjected to continuous circumferential torsion with the vortex rotor. Therefore, when the inner metal bellows leaks, the outer metal bellows can still contain the leaking medium, and the first monitoring cavity provides a definite space for the outlet and detection of the leaking medium.

[0032] 4. The detachable static connection interface of the primary containment boundary is provided with two metal sealing interfaces, and a second monitoring cavity is formed between the two metal sealing interfaces; the first metal sealing interface undertakes the primary sealing, and the second metal sealing interface undertakes the outer containment; thereby preventing the process medium from directly entering the external environment after the failure of a single static seal, and being able to evaluate the service performance of the sealing component based on the state changes in the second monitoring cavity.

[0033] 5. Both the first and second monitoring chambers are connected to a negative pressure monitoring pipeline network equipped with isolation valves, negative pressure suction devices, and leak detection devices; negative pressure suction allows the gas entering the monitoring chamber to be collected in a specific direction, and the pressure, gas composition, or leak detection signal characterizes the leakage status of the corresponding sealing interface; thereby realizing the active capture, online alarm, and zone location of potential leaks, and enabling the sealing degradation to be identified before the outer containment boundary is breached.

[0034] 6. The upper connection of the dynamic sealing assembly is continuously welded to the circumferential of the moving vortex rotor, while the suction port of the first monitoring chamber is centrally located on the stationary lower flange. The continuous welding completely eliminates the micro gap formed by the traditional detachable connection at the moving end, and the stationary suction port prevents the monitoring branch pipe from making high-frequency eccentric movements with the moving vortex rotor. This reduces the leakage path at the moving end and the risk of alternating bending fatigue of the monitoring pipeline.

[0035] 7. The pump thermal management and bearing lubrication system first uses forced circulation to allow the cooled lubricating coolant to enter the stationary plate oil chamber. Then, overflow, moving plate swaying, and gravity are used to sequentially complete the cooling of the moving vortex rotor, bearing lubrication, and oil recovery. The stationary plate immersion heat exchange and the unsteady swaying of the moving plate enhance rotor heat dissipation, while gravity flow reduces the dependence of each bearing on independent oil supply pump components. This suppresses rotor thermal deformation and improves the lubrication and heat dissipation stability of the multi-eccentric shaft system under continuous operating conditions.

[0036] 8. Cooling and lubrication pipelines, heat exchangers, circulating oil pumps and their pipeline joints are located outside the secondary containment boundary, and the lubricating coolant is isolated from the pump chamber; the cooling and lubrication circuit does not constitute a process gas leakage boundary; thus avoiding the risk of lubricating coolant entering the pump chamber or process medium escaping along the oil circuit due to aging or damage of oil line joints.

[0037] 9. The substrate serves as a common assembly reference for the stationary vortex rotor, the moving vortex rotor, and the multi-eccentric shaft system, and is used in conjunction with the modular pre-assembly of the stationary and moving rotor assemblies. The common reference can reduce the cumulative error caused by multiple reference conversions, which is beneficial for controlling the perpendicularity of the multi-axis, the coplanarity of the positioning end faces, and the parallelism of the moving and stationary vortex rotors, and improving the consistency of the assembly without top seal micro-gap. Attached Figure Description

[0038] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below.

[0039] Figure 1 This is a schematic diagram of the overall structure of a high-speed, all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0040] Figure 2 This is a half-sectional schematic diagram of a high-speed, all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0041] Figure 3 This is a schematic diagram of the drive mechanism layout of a high-speed, all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0042] Figure 4 This is a schematic diagram of the spatial arrangement of the pump casing, base plate, stationary vortex rotor, moving vortex rotor, and three vertical eccentric shaft systems of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0043] Figure 5 This is an exploded structural diagram of the drive eccentric shaft system of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0044] Figure 6 This is an exploded structural diagram of the driven eccentric shaft system of a high-pumping-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0045] Figure 7 This is an exploded schematic diagram of the mover assembly of a high-speed, all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0046] Figure 8 This is a half-sectional schematic diagram of the stator assembly of a high-pumping-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0047] Figure 9 This is a half-sectional schematic diagram of the dynamic sealing component of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0048] Figure 10 This is a schematic diagram of the two-stage containment metal seal system of a high-pumping-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention;

[0049] Figure 11 yes Figure 10 A partial enlarged view of section I, used to show the key installation locations of the static sealing assembly;

[0050] Figure 12 yes Figure 10 A partially enlarged view of section II shows the installation position of the static sealing assembly between the lower flange of the dynamic sealing assembly and the base plate;

[0051] Figure 13This is a schematic diagram of the structure and installation of a static sealing component of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0052] Figure 14 This is a schematic diagram of the flow path of the pump thermal management and bearing lubrication system of a high-pumping-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention.

[0053] Figure 15 This is a schematic diagram of the pump thermal management and bearing lubrication system of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention, showing the oil flow in the pump casing.

[0054] Figure 16 This is a partial half-sectional schematic diagram of the oil flow in the drive mechanism of a high-speed all-metal sealed vortex vacuum pump system according to an embodiment of the present invention, showing the pump heat management and bearing lubrication system.

[0055] The reference numerals in the attached drawings are as follows: 1. Pump casing; 2. Stationary vortex rotor; 21. Stationary vortex disk body; 22. Stationary vortex teeth; 23. Stationary disk oil chamber; 3. Moving vortex rotor; 31. Moving vortex disk body; 32. Moving vortex teeth; 33. Radial reinforcing ribs; 34. Moving disk oil sump; 35. Oil guide groove; 4. Base plate; 5. Transfer oil box; 51. Bottom connection interface; 52. Top connection interface; 6. Drive mechanism; 61. Drive eccentric shaft system; 62. Driven eccentric shaft system; 63. Drive motor. 64. Coupling; 65. Eccentric shaft; 66. Upper bearing assembly; 67. Lower bearing assembly; 68. Upper counterweight; 69. Lower counterweight; 610. Oil seal unit; 611. Oil separator sleeve; 612. Oil seal seat; 613. Double-lip skeleton oil seal; 6121. Oil return guide groove; 7. Secondary enclosed metal seal system; 71. Dynamic seal assembly; 711. Inner metal bellows; 712. Outer metal bellows; 713. First monitoring chamber; 714. Lower flange; 715. 716. Upper connecting part; 72. Suction port; 73. Static sealing assembly; 74. First metal sealing interface; 75. Second metal sealing interface; 76. Second monitoring chamber; 77. Annular metal sealing body; 78. Annular energy storage spring; 79. Inner metal sealing part; 70. Outer metal sealing part; 71. Negative pressure monitoring pipeline; 72. Branch pipe; 73. Manifold; 74. Isolation valve; 75. Negative pressure suction device; 76. Leakage monitoring device; 77. 6. Helium mass spectrometer leak detector; 7351. Pressure sensor; 7352. Gas composition detector; 7353. Alarm controller; 8. Pump thermal management and bearing lubrication system; 81. Circulating oil pump; 82. Heat exchanger; 83. Oil injection pipe; 84. Oil collection tank; 85. Oil return pipe; 86. Hollow locking connector; 87. Oil level indicator; 88. Oil injection port; 9. Integrated frame; 10. Air intake port; 11. Air exhaust port; 111. Exhaust pipe; 112. One-way exhaust valve; 12. Pump chamber. Detailed Implementation

[0056] The present invention will be further described below with reference to the accompanying drawings and embodiments. It should be noted that the following embodiments are used to illustrate the technical concept of the present invention, and are not intended to limit the scope of protection of the present invention. The following embodiments and the technical features therein can be combined with each other without contradiction. Connections not specifically described can be made using welding, threaded connections, fastener connections, interference fits, or integral molding, etc., which are feasible connection methods in the art, depending on the requirements of load bearing, sealing, assembly, and maintenance.

[0057] In this invention, "vertical" refers to the overall axial orientation of the eccentric shaft system along the height of the pump body, and does not require that there be no deviation within the allowable range of manufacturing or installation relative to the absolute vertical direction; the directional terms such as "upper," "lower," "inner," "outer," "radial," "axial," and "circumferential" are used with reference to the vertical installation state and pump chamber 12 shown in the attached drawings, and are only used to describe the relative positional relationship between components, and do not constitute an absolute restriction on the equipment transportation state or other allowable installation posture.

[0058] In this invention, "translational revolution without rotation" refers to the eccentric trajectory of the central axis of the moving vortex rotor 3 around the central axis of the stationary vortex rotor 2, while the circumferential attitude of the moving vortex rotor 3 relative to the stationary vortex rotor 2 remains essentially unchanged; that is, the moving vortex rotor 3 does not continuously rotate around its own central axis. Minor angular displacements caused by machining errors, bearing clearance, and elastic deformation do not alter this motion characteristic.

[0059] In this invention, the "primary containment boundary" refers to the inner continuous boundary that directly prevents the pumped medium from migrating to the drive area, lubrication area, or external environment; the "secondary containment boundary" refers to the outer continuous boundary located outside the primary containment boundary, which continues to restrict the escape of the medium when there is a local leak at the primary containment boundary. The first monitoring chamber 713 and the second monitoring chamber 723 are located between the two containment boundaries and do not replace the metal isolation wall or metal sealing interface with themselves.

[0060] like Figures 1 to 2 As shown, this embodiment provides a high-speed all-metal sealed vortex vacuum pump system, including a pump housing 1, a stationary vortex rotor 2, a moving vortex rotor 3, a base plate 4, a transfer oil box 5, a drive mechanism 6, a two-stage enclosed metal sealing system 7, a pump thermal management and bearing lubrication system 8, an integrated frame 9, an intake port 10, an exhaust port 11, and a pump chamber 12.

[0061] Pump housing 1 is supported on integrated frame 9, and base plate 4 is horizontally positioned in the lower bearing position within pump housing 1, forming a common assembly reference for stationary vortex rotor 2, moving vortex rotor 3, and drive mechanism 6. Transfer oil box 5 is mounted on base plate 4 and locked to the back side of stationary vortex rotor 2 via hollow locking connector 86, used to distribute lubricating coolant from heat exchanger 82 to stationary oil chamber 23. The specific segmentation of pump housing 1 is not limited; in this embodiment, pump housing 1 includes a detachably connected base housing and upper end cap, facilitating the insertion of rotor assembly and shaft assembly from above.

[0062] The stationary vortex rotor 2 is located below the moving vortex rotor 3. The stationary vortex rotor 2 includes a stationary vortex disk body 21 and stationary vortex teeth 22 extending axially from the working side of the stationary vortex disk body 21; the moving vortex rotor 3 includes a moving vortex disk body 31 and moving vortex teeth 32 extending axially from the working side of the moving vortex disk body 31. The stationary vortex teeth 22 and the moving vortex teeth 32 mesh with each other and define a plurality of working chambers distributed along the vortex profile between them. The plurality of working chambers together constitute the compression channel of the pump chamber 12.

[0063] The intake port 10 is connected to the outer peripheral intake area of ​​the pump chamber 12, and the exhaust port 11 is located in the central area of ​​the stationary vortex rotor 2 and is connected to the central exhaust area of ​​the pump chamber 12. The exhaust port 11 is connected to the exhaust pipe 111, and a one-way exhaust valve 112 is installed on the exhaust pipe 111. When the moving vortex rotor 3 performs a translational revolution relative to the stationary vortex rotor 2 without rotation, the outer peripheral working chamber periodically opens and draws in gas, and then closes and migrates towards the center along the vortex path, its volume decreasing step by step, so that the gas is compressed and discharged through the central exhaust port 11. The one-way exhaust valve 112 opens when the exhaust pressure difference reaches the opening condition and closes when the machine stops or the exhaust side pressure is higher than the pump chamber 12 pressure, so as to prevent gas from entering the pump chamber 12 in the reverse direction.

[0064] No organic material is used as a top seal between the stationary vortex rotor 2 and the moving vortex rotor 3. Axial working clearances are maintained between the tooth tips of the stationary vortex tooth 22 and the opposite end faces of the moving vortex disk body 31, and between the tooth tips of the moving vortex tooth 32 and the opposite end faces of the stationary vortex disk body 21; radial working clearances are maintained between the opposite sidewalls of the stationary vortex tooth 22 and the moving vortex tooth 32. These working clearances are determined comprehensively based on the vortex profile dimensions, material thermal expansion, rotor deflection, bearing clearance, assembly errors, and expected pressure range, ensuring that the rotor avoids solid contact throughout its entire operating range while controlling interstage backflow within the design limits.

[0065] As a non-limiting size example, applicable to approximately 1000 m 3The structure with a theoretical pumping capacity of / h allows for setting the overall radial assembly clearance to 0.22–0.24 mm and the overall axial assembly clearance to 0.18–0.20 mm to effectively remove unburned light gases such as deuterium and tritium from the fusion reactor core. The above values ​​are only for illustrating one feasible configuration; for different rotor diameters, vortex tooth heights, material combinations, operating temperatures, and target pumping speeds, the working clearance can be re-determined through gas flow calculations, thermal deformation analysis, and assembly tolerance analysis.

[0066] The moving vortex disk 31 has multiple radial reinforcing ribs 33 on its non-working side away from the stationary vortex rotor 2. Each radial reinforcing rib 33 extends continuously or segmentally from the central region of the moving vortex disk 31 to the outer peripheral region and can be evenly distributed circumferentially. The radial reinforcing ribs 33 are integrally formed with the moving vortex disk 31. The radial reinforcing ribs 33 improve the bending stiffness of the disk cross section, thereby reducing the deflection of the large-area moving vortex disk 31 under the action of axial gas pressure difference and reducing the probability of contact between the moving and stationary vortex teeth.

[0067] like Figures 3 to 5 As shown, the drive mechanism 6 includes a drive eccentric shaft system 61, two driven eccentric shaft systems 62, a drive motor 63, and a coupling 64. The drive eccentric shaft system 61 and the two driven eccentric shaft systems 62 are all vertically arranged and spaced apart around the central axis of the rotating vortex 3. In a horizontal projection plane perpendicular to the central axis, the axes of the three eccentric shaft systems are located at the three vertices of the same equilateral triangle.

[0068] The three eccentric shaft systems have the same nominal eccentricity and consistent eccentric phase. Consistent eccentric phase here means that the offset direction of each eccentric shaft segment relative to the corresponding main shaft segment remains the same after assembly, ensuring that the upper ends of the three eccentric shaft systems synchronously generate eccentric displacements of the same direction and amplitude during rotation. The drive motor 63 is suspended below the pump casing 1, and its output shaft is coaxially connected to the eccentric shaft 65 of the drive eccentric shaft system 61 via a coupling 64. The drive eccentric shaft system 61 transmits synchronous motion to the two driven eccentric shaft systems 62 through the moving vortex rotor 3. The two driven eccentric shaft systems 62 rotate accordingly and jointly restrict the circumferential attitude of the moving vortex rotor 3.

[0069] like Figure 6 , Figure 7As shown, each eccentric shaft system includes an eccentric shaft 65, an upper bearing assembly 66, a lower bearing assembly 67, an upper counterweight 68, a lower counterweight 69, and an oil seal unit 610. The eccentric shaft 65 has a lower main shaft section and an upper eccentric shaft section offset relative to the lower main shaft section. The distance between the axis of the upper eccentric shaft section and the axis of the lower main shaft section constitutes the eccentricity. The upper bearing assembly 66 is disposed between the upper eccentric shaft section of the eccentric shaft 65 and the rotating vortex 3; the lower bearing assembly 67 is disposed between the lower main shaft section of the eccentric shaft 65 and the shaft mounting portion of the base plate 4. Thus, the upper bearing assembly 66 undergoes eccentric displacement with the rotating vortex 3, and the lower bearing assembly 67 is used to position the eccentric shaft 65 on the base plate 4 and allow it to rotate about its own main axis.

[0070] Both the upper bearing assembly 66 and the lower bearing assembly 67 can employ angular contact ball bearings arranged back-to-back. Back-to-back pairing causes the pressure lines of the two bearings to spread outwards, thereby improving the bearing assembly's ability to withstand overturning moments and bidirectional axial loads. Each bearing assembly can be axially positioned via shaft shoulders, spacers, lock nuts, and counterweights, and a preload can be applied according to the bearing specifications and operating temperature. Upper counterweight 68 and lower counterweight 69 are respectively positioned above and below the eccentric shaft 65, with their centers of mass aligned relative to the eccentric direction, to at least partially counteract the rotational imbalance forces and moments generated by the rotating vortex rotor 3 and the eccentric shaft segment.

[0071] The lower bearing assemblies 67 of the three eccentric shaft systems are fixedly mounted relative to the base plate 4, so that the main shaft axes of the three eccentric shafts 65 form three non-collinear fixed support positions on the base plate 4. The three upper bearing assemblies 66 are respectively connected to the moving vortex rotor 3, and form three upper support points distributed in a triangle on the moving vortex rotor 3. The three upper support points specifically include the first support point formed by the upper bearing assembly 66 of the driving eccentric shaft system and the moving vortex rotor 3, and the second and third support points formed by the upper bearing assemblies 66 of the two driven eccentric shaft systems and the moving vortex rotor 3, respectively. The gravity, axial load generated by the compressed gas, tangential aerodynamic force, and inertial load generated by the eccentric motion borne by the moving vortex rotor 3 are shared by the above three upper support points and transmitted to the base plate 4 in sequence through the corresponding upper bearing assembly 66, eccentric shaft 65, lower bearing assembly 67, and oil seal unit 610. The three eccentric shafts 65 are parallel to each other and have the same eccentricity and consistent eccentric phase, causing the three upper support points to produce eccentric displacements of the same magnitude and direction relative to their respective fixed main shaft axes at any given moment of motion. Since the three upper support points are not collinear and their displacement vectors are consistent, the planar position and circumferential attitude of the moving vortex rotor 3 are jointly constrained, thus only performing non-rotating circular translation. These three geometric constraints constitute the anti-rotation mechanism of the moving vortex rotor 3, thus eliminating the need for a separate cross-ring type anti-rotation component and avoiding high-frequency reciprocating friction and wear caused by such anti-rotation sliding pairs under high loads and high-speed operation.

[0072] An oil sealing unit 610 is disposed at the lower end of each eccentric shaft 65, and includes an oil-separating sleeve 611, an oil seal seat 612, and a double-lip skeleton oil seal 613. The oil-separating sleeve 611 is fixed to the shaft mounting part of the base plate 4. The oil seal seat 612 is sealed to the oil-separating sleeve 611. The double-lip skeleton oil seal 613 is embedded in the oil seal seat 612 and slides and seals with the corresponding journal of the eccentric shaft 65. The upper part of the oil seal seat 612 is also provided with an oil return guide groove 6121, which communicates with the oil collection groove 84 at the bottom of the pump housing 1. The oil sealing unit 610 is only used to restrict the flow of lubricating coolant located outside the secondary containment boundary to the drive motor 63 or the outside of the pump housing 1, and does not constitute the primary or secondary containment boundary of the pumped medium.

[0073] like Figure 8 and Figure 9 As shown, the dynamic sealing assembly 71 is disposed between the vortex rotor 3 and the base plate 4, and is arranged around the three eccentric shafts and the motion opening below the vortex rotor 3 that needs to be isolated from the pump chamber 12. The dynamic sealing assembly 71 includes an inner metal bellows 711, an outer metal bellows 712 coaxially sleeved on the outside of the inner metal bellows 711, a lower flange 714, and an upper connecting part 715.

[0074] Both the inner metal bellows 711 and the outer metal bellows 712 are either annular welded metal bellows or integrally formed metal bellows. The corrugation parameters, effective length, and radial spacing of the two metal bellows are configured to withstand the high-frequency eccentric displacement of the vortex rotor 3, the pressure difference between the pump chamber 12 and the outer space, and a predetermined number of fatigue cycles. A circumferential gap is maintained between the inner metal bellows 711 and the outer metal bellows 712, and the two bellows, the lower flange 714, and the upper connecting part 715 together form a closed annular first monitoring cavity 713.

[0075] The lower ends of the inner metal bellows 711 and the outer metal bellows 712 are continuously welded circumferentially to the lower flange 714. The lower flange 714 is detachably sealed to the base plate 4 via a spring-storage type all-metal sealing assembly. The upper ends of the inner metal bellows 711 and the outer metal bellows 712 are continuously welded circumferentially to the upper connecting part 715, which is further continuously welded circumferentially to the vortex rotor 3 to form a moving-end metal isolation connection independent of the detachable seal.

[0076] Preferably, the upper connecting part 715 and the moving vortex rotor 3 are connected by electron beam welding, laser welding, or other welding processes capable of forming a full-penetration continuous weld. Welding can be performed symmetrically in circumferential segments with controlled heat input to reduce the impact of the heat-affected zone and welding deformation on the flatness and working clearance of the moving vortex rotor 3. After welding, the continuous weld can be subjected to vacuum leak testing and necessary non-destructive testing.

[0077] The suction port 716 of the first monitoring chamber 713 is located on the stationary lower flange 714 and is connected to the negative pressure monitoring pipeline 73 via a branch pipe 731. Since the suction port 716 is not located on the upper connecting part 715 or the rotating vortex 3, the branch pipe 731 connected to the suction port 716 does not move eccentrically with the rotating vortex 3 during operation, thereby avoiding the branch pipe 731 from being subjected to high-frequency alternating bending.

[0078] The inner metal bellows 711 is connected to or faces the potential gas passage of the pump chamber 12, thus forming a primary dynamic containment structure. The outer metal bellows 712 is located outside the first monitoring chamber 713, forming a secondary dynamic containment structure. When a penetration defect occurs in the inner metal bellows 711, the leaking medium first enters the first monitoring chamber 713, is directionally drawn away by the negative pressure monitoring network 73, and is identified by the leak monitoring device 735. The outer metal bellows 712 continues to restrict the migration of the leaking medium to the drive area or the external environment.

[0079] like Figure 9 and Figure 12As shown, the static sealing assembly 72 is disposed within a detachable static connection interface in the primary containment boundary. Each static sealing assembly 72 includes an annular metal sealing body 724 and an annular energy storage spring 725 disposed inside the annular metal sealing body 724. The annular metal sealing body 724 has an inner metal sealing portion 726 and an outer metal sealing portion 727 arranged radially spaced apart. The assembly fastening force causes the annular metal sealing body 724 to undergo recoverable elastic deformation, and the annular energy storage spring 725 simultaneously provides continuous preload to the inner metal sealing portion 726 and the outer metal sealing portion 727, causing them to respectively conform to the opposing flange sealing surfaces and form a first metal sealing interface 721 and a second metal sealing interface 722.

[0080] The first metal sealing interface 721 is adjacent to the pump chamber 12 or located upstream in the potential leakage direction, and the second metal sealing interface 722 is located outside the first metal sealing interface 721. An annular separation area is provided between the inner metal sealing part 726 and the outer metal sealing part 727, which, together with the annular groove on the opposite flange surface, defines a closed second monitoring chamber 723. The flange is provided with a monitoring through hole communicating with the second monitoring chamber 723, and the monitoring through hole is connected to a corresponding branch pipe 731 of the negative pressure monitoring pipeline network 73.

[0081] In this embodiment, the detachable static connection interfaces of the static sealing assembly 72 include at least: the connection interface between the flange of the exhaust port 11 and the static vortex rotor 2, the bottom connection interface 51 of the transfer oil box 5, the top connection interface 52 of the transfer oil box 5, and the connection interface between the lower flange 714 of the dynamic sealing assembly 71 and the base plate 4. Depending on the actual segmentation of the pump housing 1, other detachable end caps or flange interfaces located on the primary containment boundary in the pump housing 1 can also use the same static sealing assembly 72.

[0082] like Figure 10 , Figure 11As shown, the negative pressure monitoring network 73 includes multiple branch pipes 731, a manifold 732, multiple isolation valves 733, a negative pressure suction device 734, and a leak monitoring device 735. Each first monitoring chamber 713 and each second monitoring chamber 723 are connected to the manifold 732 via an independent branch pipe 731, and each branch pipe 731 is equipped with an isolation valve 733. The manifold 732 is connected to the negative pressure suction device 734, which is used to establish a controlled negative pressure in each monitoring chamber and transport the gas therein to the safe processing unit. The safe processing unit can be configured as a gas storage container, an adsorption device, an isotope recovery device, or a tail gas purification device depending on the pumping medium. The leak monitoring device 735 includes a helium mass spectrometer leak detector 736, a pressure sensor 7351, a gas composition detector 7352, and an alarm controller 7353. The helium mass spectrometer leak detector 736 can be selectively connected to the manifold 732 during assembly acceptance or shutdown maintenance, and helium leak detection can be performed at each sealed location by sequentially closing or opening the isolation valves 733. The pressure sensor 7351 is used to detect and monitor the pipeline pressure or its rate of change over time. The gas composition detector 7352 is selected according to the pumping medium; in tritium-related conditions, a tritium monitoring unit suitable for the controlled system can be used, while in other conditions, a detection unit responsive to target toxic gases, corrosive gases, or tracer gases can be used.

[0083] The alarm controller 7353 is connected to at least one of the following: pressure sensor 7351, gas composition detector 7352, and helium mass spectrometer leak detector 736. When the monitored pressure, pressure change rate, target process gas concentration, or helium mass spectrometer leak detection signal reaches the corresponding preset threshold, the alarm controller 7353 outputs a leak alarm signal and can simultaneously perform branch pipe isolation, pump shutdown, standby suction activation, or safety handling unit switching. Each preset threshold is determined based on the monitoring chamber volume, negative pressure suction capacity, allowable leakage rate, detector response time, and the hazard level of the pumped medium.

[0084] Under normal operating conditions, the negative pressure suction device 734 continuously or intermittently suctions the first monitoring chamber 713 and the second monitoring chamber 723. If a leak occurs in the inner metal bellows 711 or the first metal sealing interface 721, process gas enters the corresponding monitoring chamber and is identified by the gas composition detector 7352; if an external leak occurs in the outer metal bellows 712 or the second metal sealing interface 722, the pressure and gas composition of the monitoring chamber will also change accordingly. By combining the pressure signal and the gas composition signal, the possible states of internal leakage and external leakage can be distinguished, and the abnormal branch can be located through the isolation valve 733.

[0085] like Figure 14 and Figure 15As shown, the pump thermal management and bearing lubrication system 8 includes a circulating oil pump 81, a heat exchanger 82, a stationary plate oil chamber 23, a moving plate oil sump 34, an oil injection pipe 83, an oil collection trough 84, a return oil pipe 85, a return oil guide groove 6121, a hollow locking connector 86, an oil level indicator 87, and an oil filling port 88. The lubricating coolant can be selected from appropriate lubricating oils or other recirculating heat exchange liquids based on temperature range, material compatibility, viscosity, vapor pressure, and irradiation environment.

[0086] An oil collection tank 84 is located at the bottom of the pump casing 1 and is connected to the inlet of the circulating oil pump 81 via a return oil pipe 85. The outlet of the circulating oil pump 81 is connected to the hot fluid inlet of the heat exchanger 82, and the hot fluid outlet of the heat exchanger 82 is connected to the intermediate oil box 5 via an oil injection pipe 83. The intermediate oil box 5 is connected to the stationary oil chamber 23 via hollow locking connectors 86 distributed circumferentially or an independent oil supply channel. The circulating oil pump 81 transports the high-temperature return oil from the oil collection tank 84 to the heat exchanger 82 for cooling. The cooled lubricating coolant enters the intermediate oil box 5 from bottom to top and is evenly distributed to the stationary oil chamber 23 via the hollow locking connectors 86.

[0087] The stationary oil chamber 23 is formed on the side of the stationary vortex rotor 2 away from the pump chamber 12, and has a heat exchange contact wall with the stationary vortex rotor body 21. After the lubricating coolant is filled into the stationary oil chamber 23, it submerges the heat exchange contact wall, thereby absorbing the heat generated by the stationary vortex rotor 2 during gas compression. Under the action of continuous oil supply pressure and liquid level, the lubricating coolant flows out from the stationary oil chamber 23 through the oil injection pipe 83 and is transported or sprayed to the moving oil sump 34 on the back side of the moving vortex rotor 3.

[0088] The moving disk oil sump 34 is an annular oil sump surrounding the central region of the moving vortex rotor 3, and is defined by the back of the moving vortex disk body 31, the annular oil baffle wall, and the radial reinforcing ribs 33. When the moving vortex rotor 3 performs translational revolution, the lubricating coolant in the moving disk oil sump 34 generates unsteady sloshing under the action of periodic inertial force. The sloshing continuously disturbs the liquid thermal boundary layer on the surface of the moving vortex disk body 31, increasing the intensity of convective heat transfer between the lubricating coolant and the moving vortex disk body 31, thereby carrying away the compression heat and bearing conduction heat absorbed by the moving vortex rotor 3.

[0089] Three oil guide grooves 35 are provided on the rotating vortex rotor 3, respectively facing the driving eccentric shaft system 61 and the two driven eccentric shaft systems 62. After the lubricating coolant in the oil sump 34 reaches the predetermined overflow level, it enters each oil guide groove 35 from the overflow position of the annular oil baffle wall and is distributed to the upper bearing assembly 66 of the corresponding eccentric shaft system. Under the action of gravity, the lubricating coolant flows from top to bottom through the upper bearing assembly 66, the guide area of ​​the eccentric shaft 65, and the lower bearing assembly 67 to lubricate and dissipate heat in the bearing contact area. The lubricating coolant reaching the oil seal unit 610 is blocked by the double-lip skeleton oil seal 613 and flows into the oil collection tank 84 through the oil return guide groove 6121 in the oil seal seat 612, and then enters the next cycle through the oil return pipe 85.

[0090] Oil level indicator 87 is connected to oil collection tank 84 and is used to indicate the basic liquid level of the system; oil inlet 88 is used for initial filling or to replenish lubricating coolant when the oil level is lower than the specified value. The flow rate of circulating oil pump 81 and the heat exchange capacity of heat exchanger 82 are determined based on gas compression heat, bearing friction heat, ambient temperature, and allowable rotor temperature rise. If necessary, temperature sensors, flow sensors, and oil pressure sensors can be installed, and the control system adjusts the speed of circulating oil pump 81 and the flow rate of cooling medium in heat exchanger 82 according to the temperature of static oil chamber 23 or return oil.

[0091] The circulating oil pump 81, heat exchanger 82, return oil pipe 85, and all external pipeline joints are located outside the secondary containment boundary. The stationary plate oil chamber 23, the moving plate oil sump 34, all bearing assemblies, and the oil collection tank 84 are all isolated from the pump chamber 12 by metal isolation walls, ensuring that the lubricating coolant does not come into contact with the pumped medium. Even if leakage occurs at the external oil line joints, the leaked lubricating coolant will not directly enter the pump chamber 12, and the pumped medium will not form an escape channel along the external oil lines that bypasses the secondary containment metal sealing system 7.

[0092] In this embodiment, the stationary vortex rotor 2 and the moving vortex rotor 3 can be integrally machined from lightweight, high-strength aluminum alloy blanks to reduce the moving mass and eccentric inertial load of the large-sized moving vortex rotor 3. For more corrosive or higher-temperature operating conditions, the stationary vortex rotor 2 and the moving vortex rotor 3 can also be integrally machined from austenitic stainless steel, precipitation-hardening stainless steel, titanium alloy, or nickel-based alloy, or a metal or inorganic protective layer compatible with the pumping medium can be provided on the medium contact surface of the metal substrate.

[0093] The inner metal bellows 711 and the outer metal bellows 712 can be made of austenitic stainless steel or nickel-based alloy to balance thin-walled corrugation formability, weldability, corrosion resistance, and cyclic fatigue performance. The eccentric shaft 65 can be made of precipitation-hardening stainless steel or nickel-based alloy. The base plate 4, pump housing 1, and transfer oil box 5 can be selected from austenitic stainless steel, precipitation-hardening stainless steel, or nickel-based alloy according to rigidity, weldability, and media compatibility requirements.

[0094] All surfaces in direct contact with the pumped medium are degreased, cleaned, dried, and vacuum-compatible before assembly. The profile errors, tooth tip flatness, disc flatness, and surface roughness of the stationary vortex rotor 2 and the moving vortex rotor 3 are determined based on the working clearance without a top seal. Appropriate non-destructive testing and helium mass spectrometry leak detection are performed on the metal bellows weld, the primary containment boundary weld, and the sealing interface of the static sealing assembly 72 after assembly.

[0095] like Figures 1 to 16 As shown, this embodiment can be assembled in the following order:

[0096] First, the integrated platform 9 is leveled and fixed, and the base housing of the pump housing 1 is installed on the integrated platform 9. Then, the substrate 4 is hoisted into the positioning position inside the pump housing 1, and the substrate 4 is fixed to the pump housing 1 by the positioning structure and fasteners. The flatness and levelness of the assembly reference surface of the substrate 4 are measured.

[0097] Secondly, static sealing components 72 are pre-installed on the bottom connection interface 51 and top connection interface 52 of the transfer oil box 5. The static sealing components 72 at the exhaust pipe 111, one-way exhaust valve 112, and exhaust port 11 are pre-installed on the stationary vortex rotor 2. The stationary vortex rotor 2 and the transfer oil box 5 are connected by hollow locking connectors 86 distributed circumferentially to form the stator assembly. The stator assembly is hoisted onto the base plate 4 and positioned and tightened so that the axis and working end face of the stationary vortex rotor 2 reach the specified position relative to the common assembly datum of the base plate 4.

[0098] Next, using base plate 4 as a unified reference, install one drive eccentric shaft system 61 and two driven eccentric shaft systems 62. The three eccentric shaft systems are arranged in an equilateral triangle in the horizontal projection plane, and the corresponding lower bearing assembly 67, eccentric shaft 65, lower counterweight 69, and oil seal unit 610 are installed respectively. After installation, measure the perpendicularity of the axis, eccentricity, eccentric phase, and coplanarity of the upper positioning surface used to support the rotating vortex 3 of each eccentric shaft 65. If necessary, select mating shims, adjust bearing positioning components, or repair the reference surface to ensure that the measurement results meet the design tolerances.

[0099] Then, the dynamic sealing assembly 71, consisting of the prefabricated inner metal bellows 711, outer metal bellows 712, lower flange 714 and upper connecting part 715, is fitted onto the base plate 4, and the lower flange 714 is sealed and fastened to the base plate 4 by the static sealing assembly 72.

[0100] At the pre-assembly station, the moving vortex rotor 3 is connected to three upper bearing assemblies 66 to form a rotor assembly. Using a lifting tool, the entire rotor assembly is vertically mounted onto the upper eccentric shaft sections of the three eccentric shafts 65, and counterweights 68 and axial locking components are installed. The eccentric shaft system 61 is rotated to test the synchronicity of the three eccentric shaft systems during a complete revolution, the circumferential angular displacement of the moving vortex rotor 3, and the axial and radial clearances between the moving and stationary vortex rotors. Next, the upper connecting part 715 of the dynamic seal assembly 71 is continuously welded circumferentially to the moving vortex rotor 3. After welding, the dynamic seal assembly 71 is tested for sealing.

[0101] Finally, connect each branch pipe 731 of the negative pressure monitoring pipeline network 73 to the external pump thermal management and bearing lubrication system 8, install the upper end cap of the pump casing 1, and complete the static sealing of the pump casing 1, the suction port 10, and the exhaust port 11. After the entire machine is assembled, perform vacuum leak testing of the primary and secondary containment boundaries, no-load synchronous operation test of the multi-eccentric shaft system, lubricating coolant circulation test, and pumping performance test under design conditions.

[0102] The working process of this invention is as follows:

[0103] Before startup, the circulating oil pump 81 operates first, allowing the lubricating coolant to enter the stationary plate oil chamber 23 via the heat exchanger 82, the intermediate oil box 5, and the hollow locking connector 86, and then flow sequentially to the moving plate oil sump 34, the three eccentric shaft systems, and the oil collection groove 84 to establish a stable cooling and lubrication cycle. The negative pressure suction device 734 then operates, bringing the first monitoring chamber 713 and each of the second monitoring chambers 723 to the set monitoring pressure; the leakage monitoring device 735 establishes a baseline for the initial pressure and gas composition.

[0104] After the drive motor 63 starts, it drives the drive eccentric shaft system 61 to rotate via the coupling 64. The drive eccentric shaft system 61 drives the moving vortex rotor 3 to generate eccentric displacement, and the moving vortex rotor 3 further drives the two driven eccentric shaft systems 62 to rotate synchronously. Under the common constraint of the same eccentricity and consistent eccentric phase of the three eccentric shaft systems, the moving vortex rotor 3 performs a translational revolution relative to the stationary vortex rotor 2 without rotation. The pumping medium enters the outer periphery of the pump chamber 12 through the suction port 10, and migrates and is compressed towards the center in the progressively narrowing working chamber, and is finally discharged through the exhaust port 11, exhaust pipe 111 and one-way exhaust valve 112.

[0105] During operation, the stationary disc oil chamber 23 and the moving disc oil sump 34 cool the stationary vortex rotor 2 and the moving vortex rotor 3, respectively, while the overflow fluid from the moving disc oil sump 34 further lubricates the upper bearing assemblies 66 and the lower bearing assemblies 67. The negative pressure monitoring pipeline 73 continuously or periodically pumps the first monitoring chamber 713 and the second monitoring chamber 723. The alarm controller 7353 determines the state of the containment boundary based on the monitoring signals; in case of an abnormality, the system can execute alarm, branch isolation, shutdown, and media recovery according to the safety control strategy.

[0106] It is understood that, without departing from the core concept of this invention, the number of eccentric shafts can be three, four, or more; the static sealing assembly 72 can be an integrated double-seal structure or a combination of two independent metal sealing rings; the negative pressure suction device 734 can operate continuously or intermittently according to the pressure signal; the drive motor 63 can be directly driven via the coupling 64, or it can be driven by a gear mechanism or synchronous transmission mechanism located outside the secondary containment boundary. All the above equivalent substitutions should be based on the premise of achieving multi-axis coordinated translational revolution without rotation, all-metal two-stage containment, and negative pressure monitoring of the monitoring chamber.

Claims

1. A high-speed, all-metal sealed vortex vacuum pump system, comprising a pump casing, meshing stationary and moving vortex rotors, a base plate, a transfer oil box, a drive mechanism, an intake port, an exhaust port, and an integrated frame; characterized in that, The drive mechanism includes at least three vertical eccentric shaft systems, one of which is a drive eccentric shaft system connected to the drive motor, and the rest are driven eccentric shaft systems. The lower oil-separating sleeves of the drive eccentric shaft system and the driven eccentric shaft system are fixed to the base plate, and the upper part is connected to the moving vortex rotor through a bearing assembly, which cooperates to make the moving vortex rotor perform translational revolution without rotation. It also includes a two-stage containment metal sealing system, including a dynamic sealing component, a static sealing component, and a negative pressure monitoring pipeline. The dynamic sealing component is located between the moving vortex rotor and the base plate, including an inner metal bellows and an outer metal bellows, which form a first monitoring cavity. The static sealing component is located at the detachable interface of the first-stage containment boundary of the pump cavity, including a first metal sealing interface and a second metal sealing interface arranged in sequence, which form a second monitoring cavity. The first monitoring cavity and the second monitoring cavity are both connected to the negative pressure monitoring pipeline, which is connected to a negative pressure suction device and a leakage monitoring device. The pump cavity boundary and the first-stage containment boundary separating the pump cavity from the drive mechanism are both made of corrosion-resistant and radiation-resistant metal materials. There is no organic material top seal between the static vortex rotor and the moving vortex rotor.

2. The high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The axes of the three vertical eccentric shafts are arranged in an equilateral triangle in a plane perpendicular to the central axis of the rotating vortex; the three vertical eccentric shafts have the same eccentricity and consistent eccentric phase, and the drive motor is suspended below the pump casing and connected to the drive eccentric shafts through a coupling.

3. The high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, Each vertical eccentric shaft system includes an eccentric shaft, an upper bearing assembly, a lower bearing assembly, an upper counterweight and a lower counterweight located on the eccentric shaft, and an oil sealing unit located at the lower end of the eccentric shaft; the upper bearing assembly and the lower bearing assembly each include angular contact ball bearings arranged back-to-back; the oil sealing unit includes an oil-separating sleeve, an oil seal seat that seals with the oil-separating sleeve, and a double-lip skeleton oil seal located in the oil seal seat.

4. The high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The moving vortex rotor has multiple radial reinforcing ribs on the non-working side away from the stationary vortex rotor. Each radial reinforcing rib extends from the central region of the moving vortex rotor to the outer periphery to improve the bending stiffness of the disk of the moving vortex rotor.

5. A high-speed, all-metal sealed scroll vacuum pump system according to claim 4, characterized in that, Both the stationary vortex rotor and the moving vortex rotor are top-sealed rotors integrally precision-machined from a lightweight, high-strength alloy that is corrosion-resistant and radiation-resistant.

6. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The dynamic sealing assembly also includes a lower flange fixedly connected to the base plate and an upper connecting part fixedly connected to the vortex rotor; the lower ends of the inner metal bellows and the outer metal bellows are both welded to the lower flange, and the upper ends of the inner metal bellows and the outer metal bellows are both welded to the upper connecting part; the lower flange is detachably sealed to the base plate through a spring-storage type all-metal sealing assembly, the upper connecting part is continuously welded to the vortex rotor in the circumferential direction, and the suction port of the first monitoring chamber is located on the lower flange.

7. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The static sealing assembly is a spring-energy-storing all-metal sealing assembly, and includes an annular energy-storing spring and an inner metal sealing part and an outer metal sealing part formed under the pre-tightening action of the annular energy-storing spring, forming a first metal sealing interface and a second metal sealing interface respectively. A closed annular second monitoring cavity is defined between the inner metal sealing part and the outer metal sealing part.

8. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The negative pressure monitoring pipeline network includes branch pipes connected to the first monitoring chamber and each of the second monitoring chambers, manifolds connected to each branch pipe, isolation valves installed on each branch pipe, and a helium mass spectrometer leak detector selectively connected to the manifold; the leak monitoring device includes a pressure sensor, a gas composition detector, and an alarm controller, which is configured to output a leak alarm signal when at least one of the pressure change rate or the target process gas concentration signal of the negative pressure monitoring pipeline network reaches a corresponding preset threshold.

9. A high-speed, all-metal sealed scroll vacuum pump system according to claim 7, characterized in that, The detachable static connection interface equipped with static sealing components includes the connection interface between the exhaust port flange and the static vortex rotor, the bottom connection interface of the transfer oil box, the top connection interface of the transfer oil box, and the connection interface between the dynamic sealing component and the base plate.

10. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, It also includes a pump thermal management and bearing lubrication system, which includes a circulating oil pump, a heat exchanger, a stationary disc oil chamber located on the back side of the stationary vortex rotor, a moving disc oil sump located on the back side of the moving vortex rotor, an oil injection pipe connecting the stationary disc oil chamber and the moving disc oil sump, an oil collection trough located at the bottom of the pump casing, and a return oil pipe connecting the oil collection trough and the circulating oil pump. The circulating oil pump is configured to deliver the lubricating coolant cooled by the heat exchanger from bottom to top to the stationary disc oil chamber, and the lubricating coolant overflows from the stationary disc oil chamber and is delivered to the moving disc oil sump via the oil injection pipe.

11. A high-speed, all-metal sealed scroll vacuum pump system according to claim 10, characterized in that, The stationary vortex rotor is located below the moving vortex rotor; the stationary disk oil cavity is integrally formed by sand casting process; the moving disk oil pool is an annular oil pool formed on the back side of the moving vortex rotor, and is configured to use the translational revolution of the moving vortex rotor to cause the lubricating coolant in it to generate unsteady sloshing.

12. A high-speed, all-metal sealed scroll vacuum pump system according to claim 3, characterized in that, The rotating vortex is provided with oil guide grooves facing each vertical eccentric shaft system respectively; after the lubricating coolant in the oil sump of the moving disc reaches the predetermined level, it is distributed to the corresponding vertical eccentric shaft system through each oil guide groove, and flows from top to bottom through the upper bearing assembly and the lower bearing assembly under the action of gravity; the oil seal seat of the oil seal unit is provided with a return oil guide groove that communicates with the oil collection groove.

13. A high-speed, all-metal sealed scroll vacuum pump system according to claim 10, characterized in that, The circulation pipelines, heat exchangers, circulating oil pumps and their pipeline joints of the pump thermal management and bearing lubrication system are all located outside the secondary containment boundary, and the lubricating coolant is isolated from the pump chamber.

14. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The base plate is detachably fixed to the pump housing and forms a common assembly reference for the stationary vortex rotor, the moving vortex rotor, and each vertical eccentric shaft system. The stationary vortex rotor, the intermediate oil box, and the exhaust port are pre-assembled to form a stationary assembly. The moving vortex rotor and the upper bearing assemblies of each vertical eccentric shaft system are pre-assembled to form a moving assembly. The stationary assembly is fixed to the base plate, and the moving assembly is supported and positioned by each vertical eccentric shaft system.

15. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The exhaust port is located in the central region of the stationary vortex rotor and is connected to the exhaust pipe, which is equipped with a one-way exhaust valve.

16. A high-speed, all-metal sealed scroll vacuum pump system according to claim 1, characterized in that, The inner and outer metal bellows are made of austenitic stainless steel or nickel-based alloy; the eccentric shafts of the driving and driven eccentric shaft systems are made of high-strength, high-temperature nickel-based alloy; the base plate, pump housing, and transfer oil box are made of at least one of austenitic stainless steel, precipitation-hardening stainless steel, or nickel-based alloy.

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