Cleaning machine liquid level monitoring method and monitoring device

Abstract

The present application relates to a kind of cleaning machine platform liquid level monitoring method and monitoring device.The cleaning machine platform liquid level monitoring device includes: first physical signal collector, for obtaining the actual physical action signal of liquid supplement valve;Second physical signal collector, for obtaining the actual physical action signal of liquid discharge valve;First pipeline flow meter, for obtaining liquid supplement liquid flow signal;Second pipeline flow meter, for obtaining liquid discharge liquid flow signal;Memory, with liquid supplement preset control parameter and liquid discharge preset control parameter;Comparator, for judging whether the actual physical action signal of liquid supplement and the actual physical action signal of liquid discharge are same with liquid supplement preset control parameter and liquid discharge preset control parameter;Controller, for judging whether liquid supplement liquid flow signal and the actual physical action signal of liquid supplement and / or liquid discharge liquid flow signal and the actual physical action signal of liquid discharge match.The present application realizes the early warning before the actual liquid level in cleaning tank appears over standard.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a method and device for monitoring the liquid level of a cleaning machine. Background Technology

[0002] In the semiconductor device manufacturing process, wafer cleaning and device structure cleaning are critical steps to ensure process cleanliness, directly affecting the performance and manufacturing yield of semiconductor devices. Cleaning machines are used to clean wafers and device structures. These machines typically contain multiple chemical cleaning tanks, each filled with a chemical cleaning solution. To ensure cleaning effectiveness and smooth process execution, precise control of the liquid level in each chemical cleaning tank is necessary. Currently, this is mainly achieved by directly monitoring the liquid level in each chemical cleaning tank using level sensors. When the level sensor detects that the liquid level in a chemical cleaning tank exceeds a set range, the system will issue an alarm.

[0003] However, the current method of relying solely on level sensors to monitor the liquid level in chemical cleaning tanks has at least the following drawbacks: Firstly, the level sensor can only send an alarm message to the system after the liquid level in the chemical cleaning tank becomes abnormal, and cannot provide early warning. Once an abnormality occurs, the cleaning process needs to be interrupted, affecting the production capacity of the cleaning machine. Secondly, the level sensor can only monitor whether the liquid level in the chemical cleaning tank is abnormal, but cannot investigate the cause of the abnormality. Once an abnormality occurs, it requires manual investigation by engineers, which is inefficient and results in long downtime for the cleaning machine.

[0004] Therefore, how to provide early warning of abnormal liquid levels in the cleaning tank of the cleaning machine, reduce the downtime of the cleaning machine, improve the efficiency of troubleshooting abnormal liquid levels, and ensure the production capacity of the cleaning machine are urgent technical problems that need to be solved. Summary of the Invention

[0005] This invention provides a method and device for monitoring the liquid level of a cleaning machine, which is used to provide early warning of abnormal liquid levels in the cleaning tank of the cleaning machine, reduce the downtime of the cleaning machine, improve the efficiency of troubleshooting abnormal liquid levels, and ensure the production capacity of the cleaning machine.

[0006] According to some embodiments, the present invention provides a liquid level monitoring device for a cleaning machine, wherein the cleaning tank is connected to a plurality of replenishment pipes and a drain pipe, the replenishment pipes are equipped with replenishment valves, and the drain pipes are equipped with drain valves. The liquid level monitoring device for the cleaning machine includes: Several first physical signal acquisition devices are connected to the replenishment valve to acquire the actual physical action signals of the replenishment of the several replenishment valves respectively; Several second physical signal acquisition devices are connected to the drain valves to acquire the actual physical action signals of the drain valves. A plurality of first pipeline flow meters are respectively installed in a plurality of the replenishment pipelines to acquire the replenishment liquid flow signal in the replenishment pipelines; A plurality of second pipeline flow meters are respectively installed in a plurality of the drainage pipelines to acquire the flow signal of the drainage liquid in the drainage pipelines; The memory stores preset control parameters for replenishment of the replenishment valve and preset control parameters for drainage of the drainage valve. A comparator, connected to the first physical signal acquisition unit, the second physical signal acquisition unit, and the memory, is used to determine whether the actual physical action signal for replenishing liquid is the same as the preset control parameter for replenishing liquid and whether the actual physical action signal for draining liquid is the same as the preset control parameter for draining liquid. If not, a liquid level warning signal for the cleaning tank is issued. The controller is connected to the first physical signal acquisition device, the second physical signal acquisition device, the first pipeline flow meter, and the second pipeline flow meter. The controller is used to determine whether the replenishment liquid flow signal matches the replenishment actual physical action signal and / or the drainage liquid flow signal matches the drainage actual physical action signal. If not, the controller issues a liquid level warning signal for the cleaning tank.

[0007] According to other embodiments, the present invention also provides a method for monitoring the liquid level of a cleaning machine, comprising the following steps: Provide the liquid level monitoring device for the cleaning machine as described above; Acquire the actual physical action signals of fluid infusion, fluid drainage, fluid infusion flow, and fluid drainage flow; Obtain the preset control parameters for fluid replenishment and the preset control parameters for fluid drainage; Determine whether the actual physical action signal for replenishing the liquid is the same as the preset control parameter for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameter for draining the liquid. If not, issue a liquid level warning signal for the cleaning tank. Determine whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment. If not, issue a liquid level warning signal for the cleaning tank. Determine whether the discharge liquid flow signal matches the actual physical action signal of the discharge. If not, issue a liquid level warning signal for the cleaning tank.

[0008] In some embodiments, the actual physical action signal for fluid replenishment includes a fluid replenishment action parameter signal and a fluid replenishment time parameter signal. The fluid replenishment action parameter signal includes one or more combinations of vibration signal, displacement signal and air pressure signal. The fluid replenishment time parameter signal includes the actual system time when the fluid replenishment valve actuates.

[0009] In some embodiments, the actual physical action signal for drainage includes a drainage action parameter signal and a drainage time parameter signal. The drainage action parameter signal includes one or more of vibration signals, displacement signals, and air pressure signals. The drainage time parameter signal includes the system time when the drainage valve actuates.

[0010] In some embodiments, after acquiring the actual physical action signal of fluid replenishment, the actual physical action signal of fluid drainage, the fluid replenishment flow signal, and the fluid drainage flow signal, the following steps are further included: The actual physical action signals of fluid replenishment, fluid drainage, fluid replenishment, and fluid drainage are amplified.

[0011] In some embodiments, the specific steps for determining whether the actual physical action signal for replenishing the liquid is the same as the preset control parameter for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameter for draining the liquid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for fluid replenishment include preset fluid replenishment interval, preset duration of a single fluid replenishment, and preset number of fluid replenishments within a preset time period. The actual physical action signal of the fluid rehydration within the preset time period is obtained, and the actual fluid rehydration interval, the actual duration of a single fluid rehydration, and the actual number of fluid rehydration cycles within the preset time period are calculated. Determine whether the difference between the preset replenishment interval and the actual replenishment interval and / or the preset single replenishment duration and the actual single replenishment duration and / or the preset number of replenishments within the preset time period and the actual number of replenishments within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

[0012] In some embodiments, the specific steps for determining whether the actual physical action signal for replenishing the liquid is the same as the preset control parameter for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameter for draining the liquid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for drainage include preset drainage interval, preset single drainage duration, and preset number of drainages within a preset time period. The actual physical action signal of the drainage within the preset time period is obtained, and the actual drainage interval, the actual duration of a single drainage, and the actual number of drainages within the preset time period are calculated. Determine whether the difference between the preset drainage interval and the actual drainage interval and / or the preset single drainage duration and the actual single drainage duration and / or the preset number of drainages within the preset time period and the actual number of drainages within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

[0013] In some embodiments, it also includes: The preset replenishment interval, the preset single replenishment duration, and the preset replenishment number within the preset time period are calculated based on the loss rate of the cleaning fluid in the cleaning tank and the preset threshold of the cleaning fluid in the cleaning tank. The loss rate of the cleaning fluid in the cleaning tank includes the evaporation rate of the cleaning fluid and the rate at which the cleaning fluid is carried away by the wafer during the cleaning process.

[0014] In some embodiments, the specific steps for determining whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the replenishment, it is determined whether the replenishment liquid flow signal is detected when the replenishment valve is in the closed state. If so, it is confirmed that the replenishment valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

[0015] In some embodiments, the specific steps for determining whether the drained liquid flow signal matches the actual physical action signal of the drain, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the drain, it is determined whether the drain liquid flow signal is detected when the drain valve is in the closed state. If so, it is confirmed that the drain valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

[0016] The cleaning machine liquid level monitoring method and device provided by this invention address the issue that abnormal valve operation of the replenishment valve and drain valve often precedes abnormal liquid level, and abnormal operation of either valve is a major cause of abnormal liquid level in the cleaning tank. Therefore, by acquiring the actual physical action signals of the replenishment valve, the actual physical action signals of the drain valve, the preset control parameters for replenishment and drain, and comparing these signals, a liquid level warning signal is issued for the cleaning tank when a difference exists between the two. This provides early warning before the actual liquid level in the cleaning tank exceeds the limit, allowing staff to take timely measures and intervene in advance, thereby reducing downtime and increasing the cleaning machine's production capacity. Furthermore, this invention acquires the actual physical action signals of the replenishment valve, the actual physical action signals of the drainage valve, the preset control parameters for replenishment and drainage of the replenishment valve, and the preset control parameters for drainage of the drainage valve. Thus, after the liquid level warning signal appears, data traceability can be performed based on the acquired actual physical action signals of replenishment and drainage, the preset control parameters for replenishment and drainage, and the preset control parameters for drainage. This facilitates subsequent analysis and predictive maintenance, thereby improving the efficiency of troubleshooting abnormal liquid levels.

[0017] Furthermore, this invention also acquires the flow signals of the replenishing liquid in the replenishment pipe and the draining liquid in the draining pipe. By determining whether the flow signals of the replenishing liquid match the actual physical action signals of the replenishment, it determines whether there is an internal leakage problem in the replenishing valve. Similarly, by determining whether the flow signals of the draining liquid match the actual physical action signals of the draining, it confirms whether there is an internal leakage problem in the draining valve. Simultaneously, through the synchronous acquisition of the actual physical action signals of replenishment, draining, replenishment, and draining, multi-dimensional data cross-validation can be achieved. This not only enables early warning of the cleaning tank liquid level but also shortens the troubleshooting time, thereby further helping to reduce the downtime of the cleaning machine and ensure its production capacity.

[0018] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a structural block diagram of the cleaning machine liquid level monitoring device in a specific embodiment of the present invention; Figure 2 This is a flowchart of the method for monitoring the liquid level of a cleaning machine in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of the signal acquisition and transmission link when monitoring the liquid level of the cleaning machine in a specific embodiment of the present invention.

[0021] 30. Controller 31. First physical signal acquisition device 32. Memory 33. Comparator 34. Signal Amplification Circuit 35. Second physical signal acquisition device 36. First pipeline flow meter 37. Second pipeline flow meter Detailed Implementation The technical solutions in the embodiments of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] This specific embodiment also provides a liquid level monitoring device for a cleaning machine. Figure 1 This is a structural block diagram of the liquid level monitoring device for the cleaning machine in a specific embodiment of the present invention. Figure 1 As shown, the cleaning tank is connected to several replenishment pipes and drainage pipes. The replenishment pipes are equipped with replenishment valves, and the drainage pipes are equipped with drainage valves. The liquid level monitoring device for the cleaning machine includes: Several first physical signal acquisition units 31 are connected to the replenishment valve and are used to acquire the actual physical action signals of the replenishment of the several replenishment valves respectively; Several second physical signal acquisition units 35 are connected to the drain valve and are used to acquire the actual physical action signals of the drain valve respectively. A plurality of first pipeline flow meters 36 are installed in a plurality of the replenishment pipelines for acquiring replenishment liquid flow signals within the replenishment pipelines; A plurality of second pipeline flow meters 37 are installed in a plurality of the drainage pipelines for acquiring the flow signal of the drained liquid in the drainage pipelines; The memory 32 stores the preset control parameters for replenishing the replenishing valve and the preset control parameters for draining the draining valve. Comparator 33, connected to the first physical signal acquisition unit 31, the second physical signal acquisition unit 35 and the memory 32, is used to determine whether the actual physical action signal of replenishment is the same as the preset control parameter of replenishment and whether the actual physical action signal of drainage is the same as the preset control parameter of drainage. If not, a liquid level warning signal for the cleaning tank is issued. The controller 30 is connected to the first physical signal acquisition device 31, the second physical signal acquisition device 35, the first pipeline flow meter 36, and the second pipeline flow meter 37. The controller 30 is used to determine whether the replenishment liquid flow signal matches the replenishment actual physical action signal and / or the drainage liquid flow signal matches the drainage actual physical action signal. If not, the controller 30 issues a liquid level warning signal for the cleaning tank.

[0023] Specifically, the cleaning machine liquid level monitoring device includes a controller 30 and a first physical signal acquisition unit 31, a second physical signal acquisition unit 35, a first pipeline flow meter 36, a second pipeline flow meter 37, a memory 32, a comparator 33, and a signal amplification circuit 34, all connected to the controller 30. When monitoring the liquid level in the cleaning tank of the cleaning machine, the device acquires the actual physical action signal of the replenishment valve via the first physical signal acquisition unit 31, the actual physical action signal of the discharge valve via the second physical signal acquisition unit 35, the flow signal of the replenishment liquid in the replenishment pipeline via the first pipeline flow meter 36, and the flow signal of the discharge liquid in the discharge pipeline via the second pipeline flow meter 37. The signal amplification circuit 34 amplifies the actual physical action signal of the replenishment, the actual physical action signal of the discharge, the flow signal of the replenishment liquid, and the flow signal of the discharge liquid. The comparator 33 compares the amplified signal with the preset control parameters for replenishment and drainage stored in the memory 32. When there is a difference between the two, a liquid level warning signal for the cleaning tank is issued to provide a warning about the liquid level in the cleaning tank.

[0024] This specific embodiment provides a method for monitoring the liquid level of a cleaning machine. Figure 2 This is a flowchart of the liquid level monitoring method for the cleaning machine in a specific embodiment of the present invention. Figure 3This is a schematic diagram of the signal acquisition and transmission link during liquid level monitoring of the cleaning machine in a specific embodiment of the present invention. For example... Figure 2 and Figure 3 As shown, the liquid level monitoring method for the cleaning machine includes the following steps: Step S11, provide the cleaning machine liquid level monitoring device as described above, such as... Figure 1 As shown; Step S12: Acquire the actual physical action signal of fluid replenishment, the actual physical action signal of fluid drainage, the fluid replenishment flow signal, and the fluid drainage flow signal; Step S13: Obtain the preset control parameters for fluid replenishment and the preset control parameters for fluid drainage; Step S14: Determine whether the actual physical action signal for replenishing liquid is the same as the preset control parameter for replenishing liquid and whether the actual physical action signal for draining liquid is the same as the preset control parameter for draining liquid. If not, issue a liquid level warning signal for the cleaning tank. Step S15: Determine whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment. If not, issue a liquid level warning signal for the cleaning tank. Step S16: Determine whether the discharge liquid flow signal matches the actual physical action signal of the discharge. If not, issue a liquid level warning signal for the cleaning tank.

[0025] In some embodiments, the specific steps for acquiring the actual physical action signal of the replenishing valve, the actual physical action signal of the drain valve, the replenishing liquid flow signal of the replenishing pipeline, and the draining liquid flow signal of the drain pipeline include: The actual physical action signal of the replenishment valve corresponding to each of the first physical signal acquisition devices is acquired, the actual physical action signal of the discharge valve corresponding to each of the second physical signal acquisition devices is acquired, the liquid flow signal of the replenishment pipe corresponding to each of the first pipe flow meters is acquired, and the liquid flow signal of the discharge pipe corresponding to each of the second pipe flow meters is acquired.

[0026] Specifically, the cleaning machine has multiple cleaning tanks, such as an HF cleaning tank (cleaning solution is HF), an SCI cleaning tank (cleaning solution is a mixed solution of deionized water, ammonium hydroxide, and hydrogen peroxide), an SCII cleaning tank (cleaning solution is a mixed solution of deionized water, hydrochloric acid, and hydrogen peroxide), a pure water cleaning tank (cleaning solution is pure water), and an ozone water cleaning tank (cleaning solution is ozone water). The cleaning machine also includes multiple replenishment pipes connected to each of the cleaning tanks, multiple replenishment valves installed in each of the replenishment pipes, multiple drainage pipes connected to each of the cleaning tanks, and multiple drainage valves installed in each of the drainage pipes. Each replenishment pipe is used to transfer the corresponding cleaning solution to its corresponding cleaning tank, and each replenishment valve is used to control the connection and disconnection of its corresponding replenishment pipe and cleaning tank. Each drain pipe is used to discharge the cleaning fluid from its corresponding cleaning tank, and each drain valve is used to control the connection and disconnection of its corresponding drain pipe and cleaning tank. The cleaning fluid in the cleaning tank may decrease due to various reasons (e.g., overflow, discharge, evaporation, or being carried away by the wafer), causing the cleaning fluid level in the cleaning tank to drop. To ensure the smooth progress and stability of the cleaning process, the cleaning fluid needs to be added to the cleaning tank in a timely manner, i.e., timely replenishment of the cleaning tank is required. By opening the replenishment valve, the replenishment pipe and its corresponding cleaning tank are connected, thereby transferring the cleaning fluid from the replenishment pipe to the cleaning tank, achieving replenishment of the cleaning tank; by closing the replenishment valve, the replenishment pipe and its corresponding cleaning tank are disconnected, stopping the replenishment of the cleaning tank. Parameters such as the replenishment time and replenishment interval both affect the cleaning fluid level in the cleaning tank. Because the cleaning solution in the cleaning tank gradually becomes ineffective during repeated use (e.g., concentration decreases or contamination accumulates), to prevent the cleaning solution from overflowing or to adjust the proportion deviation of the components in the cleaning solution, it is necessary to discharge part or all of the cleaning solution through the drain pipe to ensure cleaning yield. By opening the drain valve, the drain pipe and the corresponding cleaning tank are connected, thereby draining the cleaning solution from the cleaning tank through the drain pipe; by closing the drain valve, the drain pipe and the corresponding cleaning tank are shut off, stopping the drainage from the cleaning tank. In this specific embodiment, "multiple" refers to two or more.

[0027] Multiple first physical signal acquisition devices 31 are installed one-to-one on multiple replenishing valves. Each first physical signal acquisition device 31 is used to acquire the actual physical action signal of replenishing liquid with its corresponding replenishing valve. Multiple second physical signal acquisition devices 35 are installed one-to-one on multiple draining valves. Each second physical signal acquisition device 35 is used to acquire the actual physical action signal of draining liquid with its corresponding draining valve. Thus, the actions of multiple replenishing valves can be monitored simultaneously by multiple first physical signal acquisition devices 31, and the actions of multiple draining valves can be monitored simultaneously by multiple second physical signal acquisition devices 35. By synchronously monitoring the replenishing valves and draining valves of each cleaning tank, it is possible to simultaneously provide early warning reminders of the liquid level in multiple cleaning tanks, thereby improving the monitoring efficiency of the cleaning machine. Furthermore, since the liquid level of the cleaning fluid in the cleaning tank is mainly determined by the replenishment volume and the discharge volume, by combining the actual physical action signal of the replenishment valve and the actual physical action signal of the discharge valve, dynamic closed-loop monitoring of the liquid level status of the cleaning fluid in the cleaning tank can be achieved through signal fusion and cross-verification, thereby greatly improving the accuracy of the liquid level warning for the cleaning tank.

[0028] Multiple first-level flow meters 36 are installed one-to-one on the outer walls of the multiple replenishment pipes, and multiple second-level flow meters 37 are installed one-to-one on the outer walls of the multiple drainage pipes. The first-level flow meters 36 are used to non-contactly detect the fluid flow signal (i.e., the replenishment liquid flow signal) within the replenishment pipes, and the second-level flow meters 37 are used to non-contactly detect the fluid flow signal (i.e., the drainage liquid flow signal) within the drainage pipes. This non-contact detection method does not require damage to the original pipe structure and is compatible with corrosive cleaning solutions. When a first-level flow meter 36 detects the replenishment liquid flow signal, it confirms that there is liquid flow (i.e., cleaning liquid flow) within the replenishment pipe. When a second-level flow meter 37 detects the drainage liquid flow signal, it confirms that there is liquid flow (i.e., cleaning liquid flow) within the drainage pipe.

[0029] In some embodiments, the actual physical action signal for fluid replenishment includes a fluid replenishment action parameter signal and a fluid replenishment time parameter signal. The fluid replenishment action parameter signal includes one or more of vibration signals, displacement signals, and air pressure signals. The fluid replenishment time parameter signal includes the actual system time when the fluid replenishment valve actuates.

[0030] In some embodiments, the actual physical action signal of the drainage includes a drainage action parameter signal and a drainage time parameter signal. The drainage action parameter signal includes one or more combinations of vibration signal, displacement signal and air pressure signal. The drainage time parameter signal includes the system time when the drainage valve actuates.

[0031] Specifically, both the replenishing valve and the draining valve can be solenoid valves, pneumatic valves, or high-precision proportional valves. The actual physical action signal for replenishing includes the replenishing action parameter signal and the replenishing time parameter signal. The replenishing action parameter signal is the valve signal when the replenishing valve actuates, and the replenishing time parameter signal includes the actual system time when the replenishing valve actuates. The actual physical action signal for draining includes the draining action parameter signal and the draining time parameter signal. The draining action parameter signal is the valve signal when the draining valve actuates, and the draining time parameter signal includes the actual system time when the draining valve actuates. Both the replenishing action parameter signal and the draining action parameter signal can include one or more combinations of vibration signals (both the first and second physical signal acquisition devices include vibration sensors), displacement signals (both the first and second physical signal acquisition devices include displacement sensors), and air pressure signals (both the first and second physical signal acquisition devices include air pressure sensors). The vibration signal refers to the mechanical vibration signal at the moment the replenishing valve or drain valve opens and closes; the displacement signal refers to the change in the position of the valve core (i.e., linear displacement) in the replenishing valve or drain valve; and the air pressure signal refers to the pressure fluctuation signal inside the pneumatic valve drive air circuit. By collecting the replenishing action parameter signal of the replenishing valve, it can be determined whether the replenishing valve is open and closed, and thus whether the cleaning tank corresponding to the replenishing valve needs to be replenished. By collecting the actual system time when the replenishing valve operates and combining it with the replenishing action parameter signal, the actual opening time and actual closing time of the replenishing valve can be obtained. This allows for obtaining parameters such as the duration of a single replenishment of the cleaning tank, the time interval between two adjacent replenishments, and the number of replenishments within a preset time period (e.g., the replenishment cycle), enabling more precise monitoring of the replenishment status of the cleaning tank and further improving the reliability and accuracy of the liquid level warning in the cleaning tank. By collecting the drainage action parameter signals of the drainage valve, it can be determined whether the drainage valve is open and closed, and thus whether to drain the cleaning tank corresponding to the drainage valve. By collecting the actual system time when the drainage valve actuates, and combining it with the drainage action parameter signals, the actual opening time and actual closing time of the drainage valve can be obtained. This allows for the acquisition of parameters such as the duration of a single drainage from the cleaning tank, the time interval between two adjacent drainages, and the number of drainages within a preset time period (e.g., the drainage cycle).

[0032] In some embodiments, after acquiring the actual physical action signal of fluid replenishment, the actual physical action signal of fluid drainage, the fluid replenishment flow signal, and the fluid drainage flow signal, the following steps are further included: The actual physical action signals of fluid replenishment, fluid drainage, fluid replenishment flow, and fluid drainage flow are amplified.

[0033] Specifically, since the liquid replenishment action parameter signal acquired by the first physical signal acquisition device, the liquid drainage action parameter signal acquired by the second physical signal acquisition device, the liquid replenishment flow signal acquired by the first pipeline flow meter, and the liquid drainage flow signal acquired by the second pipeline flow meter are all relatively weak, in order to avoid missed detection, it is necessary to amplify the acquired signals and store the liquid replenishment time parameter signal, the liquid drainage time parameter signal, and the amplified signal for subsequent comparison and tracing.

[0034] In one example, the preset control parameters for each replenishment valve include multiple replenishment times, each replenishment time including a preset opening time for the replenishment valve and a preset closing time for the replenishment valve corresponding to the preset opening time. For example... Figure 2 As shown, after amplifying the fluid replenishment action parameter signal, the actual physical action signal of each fluid replenishment valve can be compared with the preset fluid replenishment control parameters in a single channel (i.e., a one-to-one comparison), and the single-channel comparison result can be output. The preset drainage control parameters for each drainage valve include multiple drainage times, and each drainage time includes a preset opening time for the drainage valve and a preset closing time corresponding to the preset opening time. For example... Figure 2 As shown, after amplifying the drainage action parameter signal, the actual physical action signal of each drainage valve can be compared with the preset drainage control parameter in a single channel (i.e., a one-to-one comparison), and the single-channel comparison result is output. When the actual physical action signal of the replenishment valve does not match the preset replenishment control parameter (e.g., the actual opening time of the replenishment valve is different from the preset opening time of the replenishment valve or the actual closing time of the replenishment valve is different from the preset closing time of the replenishment valve), or when the actual physical action signal of the drainage valve does not match the preset drainage control parameter (e.g., the actual opening time of the drainage valve is different from the preset opening time of the drainage valve or the actual closing time of the drainage valve is different from the preset closing time of the drainage valve), it is confirmed that the cleaning tank has a replenishment abnormality or a drainage abnormality, and a liquid level warning signal (i.e., a warning output prompt) is issued.

[0035] In some embodiments, the specific steps for determining whether the actual physical action signal for replenishing the liquid is the same as the preset control parameter for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameter for draining the liquid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for fluid replenishment include preset fluid replenishment interval, preset duration of a single fluid replenishment, and preset number of fluid replenishments within a preset time period. The actual physical action signal of the fluid rehydration within the preset time period is obtained, and the actual fluid rehydration interval, the actual duration of a single fluid rehydration, and the actual number of fluid rehydration cycles within the preset time period are calculated. Determine whether the difference between the preset replenishment interval and the actual replenishment interval and / or the preset single replenishment duration and the actual single replenishment duration and / or the preset number of replenishments within the preset time period and the actual number of replenishments within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

[0036] In some embodiments, the specific steps for determining whether the actual physical action signal for replenishing fluid is the same as the preset control parameter for replenishing fluid and whether the actual physical action signal for draining fluid is the same as the preset control parameter for draining fluid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for drainage include preset drainage interval, preset single drainage duration, and preset number of drainages within a preset time period. The actual physical action signal of the drainage within the preset time period is obtained, and the actual drainage interval, the actual duration of a single drainage, and the actual number of drainages within the preset time period are calculated. Determine whether the difference between the preset drainage interval and the actual drainage interval and / or the preset single drainage duration and the actual single drainage duration and / or the preset number of drainages within the preset time period and the actual number of drainages within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

[0037] In some embodiments, it also includes: The preset replenishment interval, the preset single replenishment duration, and the preset replenishment number within the preset time period are calculated based on the loss rate of the cleaning fluid in the cleaning tank and the preset threshold of the cleaning fluid in the cleaning tank. The loss rate of the cleaning fluid in the cleaning tank includes the evaporation rate of the cleaning fluid and the rate at which the cleaning fluid is carried away by the wafer during the cleaning process.

[0038] Specifically, the cleaning fluid in the cleaning tank is lost due to natural evaporation and being carried away by the wafers being cleaned. By statistically analyzing historical data, the evaporation rate of the cleaning fluid and the rate at which the cleaning fluid is carried away by the wafers during the cleaning process can be determined, thereby obtaining the loss rate of the cleaning fluid in the cleaning tank. Based on the loss rate of the cleaning fluid in the cleaning tank and a preset threshold for the cleaning fluid in the cleaning tank, the preset replenishment interval, the preset single replenishment duration, and the preset number of replenishments within the preset time period are calculated as the preset replenishment control parameters and stored in the second database. For example, the preset replenishment interval for the SCI cleaning tank is 10 minutes, the standard single replenishment volume is 100 ml, and the flow rate of the replenishment valve can be used to calculate the preset single replenishment duration. As another example, the preset replenishment interval for the pure water cleaning tank is 18 minutes, the standard single replenishment volume is 1.5 L, and the flow rate of the replenishment valve can be used to calculate the preset single replenishment duration.

[0039] In one example, the preset drainage interval, the preset single drainage duration, and the number of drainages within the preset time period can be preset according to the cleaning needs of the cleaning tank or by statistical analysis of historical data.

[0040] A first database is formed by acquiring the actual physical action signals of the replenishment valve and the actual physical action signals of the drainage valve for each replenishment valve within a preset time period (e.g., one day, one week, or one month). The first database includes the replenishment action parameter signal, replenishment time parameter signal, actual replenishment frequency, actual replenishment interval, and actual single replenishment duration for each replenishment valve within the preset time period. Similarly, the first database also includes the drainage action parameter signal, drainage time parameter signal, actual drainage frequency, actual drainage interval, and actual single drainage duration for each drainage valve within the preset time period. The actual replenishment frequency, actual replenishment interval, and actual single replenishment duration are calculated based on the replenishment action parameter signal and the replenishment time parameter signal. The actual drainage frequency, actual drainage interval, and actual single drainage duration are also calculated based on the drainage action parameter signal and the drainage time parameter signal. In one example, the first database is stored in the local memory of the cleaning machine. Simultaneously, the preset control parameters for fluid replenishment, including a preset replenishment interval, a preset single replenishment duration, and a preset number of replenishments within the preset time period, are acquired, and the preset control parameters for draining, including a preset draining interval, a preset single draining duration, and a preset number of drains within the preset time period, are acquired to form the second database. The preset control parameters for the replenishment valve include multiple replenishment times within the preset time period. Each replenishment time includes a preset valve opening time and a preset valve closing time corresponding to the preset valve opening time. The preset replenishment interval is calculated based on two adjacent replenishment times. The preset single replenishment duration is calculated based on the preset valve opening time and preset valve closing time in each replenishment time. The number of replenishments within the preset time period is calculated based on the multiple replenishment times within the preset time period. The preset control parameters for the drain valve include multiple drain times within the preset time period. Each drain time includes a preset opening time for the drain valve and a preset closing time for the drain valve corresponding to the preset opening time. The preset drain interval is calculated based on two adjacent drain times. The preset single drain duration is calculated based on the preset opening time and preset closing time of the drain valve in each drain time. The number of drains within the preset time period is calculated based on the multiple drain times within the preset time period.

[0041] After acquiring the first database and the second database, a comparison is performed between the data in the first database and the data in the second database. If the data in the first database does not match the corresponding data in the second database, a liquid level warning signal is issued (i.e., a warning output prompt). For example, if the actual single replenishment duration within the preset time period in the first database is greater than or less than the preset single replenishment duration within the preset time period in the second database, it is confirmed that the data in the first database does not match the data in the second database, and a liquid level warning signal is issued; or, if the actual single drainage duration within the preset time period in the first database is greater than or less than the preset single drainage duration within the preset time period in the second database, it is confirmed that the data in the first database does not match the data in the second database, and a liquid level warning signal is issued. As another example, if the actual replenishment frequency within the preset time period in the first database is greater than or less than the preset replenishment frequency, it is confirmed that the data in the first database does not match the data in the second database, and a liquid level warning signal is issued; or, if the actual drainage frequency within the preset time period in the first database is greater than or less than the preset drainage frequency, it is confirmed that the data in the first database does not match the data in the second database, and a liquid level warning signal is issued.

[0042] In one example, the threshold range includes threshold ranges for the number of fluid replenishments (e.g., ±5 times), the duration of a single fluid replenishment, the interval between replenishments, the time between replenishments, the number of drainages, the duration of a single drainage, the interval between drainages, and the time between drainages, thereby specifically eliminating noise for each parameter. When the difference between the data in the first database and the data in the second database exceeds the threshold range for the corresponding category, a comparison result (i.e., a secondary comparison output) is output, and a liquid level warning signal is issued.

[0043] This specific embodiment collects the actual physical action signals of the replenishment valve and the drainage valve in real time, and constructs a first database. A second database is constructed using pre-set replenishment and drainage control parameters. By comparing and analyzing the data in the first and second databases, it is determined whether the liquid level in the cleaning tank corresponding to the replenishment and drainage valves is at risk of exceeding a preset range. Since abnormal operation of the replenishment and drainage valves often precedes abnormal liquid level in the cleaning tank, this specific embodiment can provide early warning of the liquid level in the cleaning tank, i.e., warning before the actual liquid level exceeds the limit. This allows staff to take timely measures and intervene in advance, thereby reducing downtime of the cleaning machine and increasing its production capacity. For example, when the actual single replenishment duration of the replenishment valve in the first database is greater than the preset single replenishment duration within the preset time period in the second database, there is a risk that the liquid level in the cleaning tank is too high. By outputting the liquid level warning signal, the staff can take intervention measures before the actual liquid level in the cleaning tank becomes abnormal.

[0044] In some embodiments, the specific steps for determining whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the replenishment, it is determined whether the replenishment liquid flow signal is detected when the replenishment valve is in the closed state. If so, it is confirmed that the replenishment valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

[0045] In some embodiments, the specific steps for determining whether the drained liquid flow signal matches the actual physical action signal of the drain, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the drain, it is determined whether the drain liquid flow signal is detected when the drain valve is in the closed state. If so, it is confirmed that the drain valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

[0046] Specifically, by monitoring the flow signal of the replenishing liquid in the replenishing pipe using the first pipe flow meter, it can be determined whether there is liquid flow in the replenishing pipe when the replenishing valve is closed. If so (i.e., the replenishing liquid flow signal is detected when the replenishing valve is closed), it is confirmed that the replenishing valve is leaking, and a liquid level warning signal for the cleaning tank is issued. Similarly, by monitoring the flow signal of the draining liquid in the draining pipe using the second pipe flow meter, it can be determined whether there is liquid flow in the draining pipe when the draining valve is closed. If so (i.e., the draining liquid flow signal is detected when the draining valve is closed), it is confirmed that the draining valve is leaking, and a liquid level warning signal for the cleaning tank is issued. In one example, both the first and second pipe flow meters are equipped with a shielding time of 1 to 3 seconds to shield the delayed signal of the fluid after the valves (i.e., the replenishing valve and the draining valve) are activated, thereby improving the accuracy and reliability of the detection.

[0047] This specific embodiment collects the actual physical action signals of the replenishment valve, the actual physical action signals of the drain valve, the flow signals of the replenishment liquid in the replenishment pipe, and the flow signals of the drain liquid in the drain pipe. The actual physical action signals of the replenishment and drain reflect whether there should be liquid flow in the replenishment and drain pipes theoretically, while the flow signals of the replenishment and drain reflect whether there is actually liquid flow in the replenishment and drain pipes. Through the synergistic effect of the actual physical action signals of the replenishment and drain, the liquid flow signals of the replenishment and drain can not only provide early warning of the liquid level in the cleaning tank, but also significantly shorten the troubleshooting time.

[0048] The cleaning machine liquid level monitoring method and device provided in this specific embodiment address the issue that abnormal valve operation of the replenishment valve and drain valve often precedes abnormal liquid level, and abnormal operation of either the replenishment valve or the drain valve is the main cause of abnormal liquid level in the cleaning tank. Therefore, by acquiring the actual physical action signals of the replenishment valve, the actual physical action signals of the drain valve, the preset control parameters for the replenishment valve, and the preset control parameters for the drain valve, and comparing the acquired actual physical action signals of the replenishment valve with the preset control parameters, and comparing the actual physical action signals of the drain valve with the preset control parameters for the drain, a liquid level warning signal for the cleaning tank is issued when there is a difference between the physical action signals of the replenishment valve and the preset control parameters for the replenishment valve, or between the physical action signals of the drain valve and the preset control parameters for the drain. This achieves early warning, providing an alert before the actual liquid level in the cleaning tank exceeds the standard, facilitating timely intervention by staff, thereby reducing downtime of the cleaning machine and increasing its production capacity. Furthermore, this specific embodiment acquires the actual physical action signal of the replenishment valve, the actual physical action signal of the drainage valve, the preset control parameters of the replenishment valve, and the preset control parameters of the drainage valve. Thus, after the liquid level warning signal appears, data traceability can be performed based on the acquired actual physical action signal of the replenishment valve, the actual physical action signal of the drainage valve, the preset control parameters of the replenishment valve, and the preset control parameters of the drainage valve. This facilitates subsequent analysis and predictive maintenance, thereby improving the efficiency of troubleshooting abnormal liquid levels.

[0049] Furthermore, this specific embodiment also acquires the flow signals of the replenishing liquid in the replenishment pipe and the drainage liquid in the drainage pipe. By determining whether the flow signals of the replenishing liquid match the actual physical action signals of the replenishment, it is determined whether there is an internal leakage problem in the replenishment valve. Similarly, by determining whether the flow signals of the drainage liquid match the actual physical action signals of the drainage, it is confirmed whether there is an internal leakage problem in the drainage valve. Simultaneously, through the synchronous acquisition of the actual physical action signals of replenishment, drainage, replenishment, and drainage, multi-dimensional data cross-validation can be achieved. This not only enables early warning of the cleaning tank liquid level but also shortens the troubleshooting time, thereby further helping to reduce the downtime of the cleaning machine and ensure its production capacity.

[0050] It should be noted that references to "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but each embodiment may not necessarily include that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure, or characteristic is described in connection with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.

[0051] It should be noted that the terms "comprising" and "having," and their variations, used in this invention document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context. It should be understood that such data used interchangeably where appropriate. Furthermore, embodiments and features within embodiments of this invention can be combined with each other unless otherwise specified. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this invention. In the various embodiments described above, each embodiment focuses on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0052] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A liquid level monitoring device for a cleaning machine, characterized in that, The cleaning tank is connected to several replenishment pipes and drainage pipes. The replenishment pipes are equipped with replenishment valves, and the drainage pipes are equipped with drainage valves. The liquid level monitoring device for the cleaning machine includes: Several first physical signal acquisition devices are connected to the replenishment valve to acquire the actual physical action signals of the replenishment of the several replenishment valves respectively; Several second physical signal acquisition devices are connected to the drain valves to acquire the actual physical action signals of the drain valves. A plurality of first pipeline flow meters are respectively installed in a plurality of the replenishment pipelines to acquire the replenishment liquid flow signal in the replenishment pipelines; A plurality of second pipeline flow meters are respectively installed in a plurality of the drainage pipelines to acquire the flow signal of the drainage liquid in the drainage pipelines; The memory stores preset control parameters for replenishment of the replenishment valve and preset control parameters for drainage of the drainage valve. A comparator, connected to the first physical signal acquisition unit, the second physical signal acquisition unit, and the memory, is used to determine whether the actual physical action signal for replenishing liquid is the same as the preset control parameter for replenishing liquid and whether the actual physical action signal for draining liquid is the same as the preset control parameter for draining liquid. If not, a liquid level warning signal for the cleaning tank is issued. The controller is connected to the first physical signal acquisition device, the second physical signal acquisition device, the first pipeline flow meter, and the second pipeline flow meter. The controller is used to determine whether the replenishment liquid flow signal matches the replenishment actual physical action signal and / or the drainage liquid flow signal matches the drainage actual physical action signal. If not, the controller issues a liquid level warning signal for the cleaning tank.

2. A method for monitoring the liquid level of a cleaning machine, characterized in that, Includes the following steps: Provide the liquid level monitoring device for the cleaning machine as described in claim 1; Acquire the actual physical action signals of fluid infusion, fluid drainage, fluid infusion flow, and fluid drainage flow; Obtain the preset control parameters for fluid replenishment and the preset control parameters for fluid drainage; Determine whether the actual physical action signal for replenishing the liquid is the same as the preset control parameter for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameter for draining the liquid. If not, issue a liquid level warning signal for the cleaning tank. Determine whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment. If not, issue a liquid level warning signal for the cleaning tank. Determine whether the discharge liquid flow signal matches the actual physical action signal of the discharge. If not, issue a liquid level warning signal for the cleaning tank.

3. The method for monitoring the liquid level of a cleaning machine according to claim 2, characterized in that, The actual physical action signal for fluid replenishment includes fluid replenishment action parameter signal and fluid replenishment time parameter signal. The fluid replenishment action parameter signal includes one or more combinations of vibration signal, displacement signal and air pressure signal. The fluid replenishment time parameter signal includes the actual system time when the fluid replenishment valve is activated.

4. The method for monitoring the liquid level of a cleaning machine according to claim 2, characterized in that, The actual physical action signal for drainage includes drainage action parameter signal and drainage time parameter signal. The drainage action parameter signal includes one or more of vibration signal, displacement signal and air pressure signal. The drainage time parameter signal includes the system time when the drainage valve is activated.

5. The method for monitoring the liquid level of a cleaning machine according to claim 2, characterized in that, After acquiring the actual physical action signals of fluid resuscitation, fluid drainage, fluid resuscitation flow, and fluid drainage flow, the following steps are also included: The actual physical action signals of fluid replenishment, fluid drainage, fluid replenishment flow, and fluid drainage flow are amplified.

6. The method for monitoring the liquid level of a cleaning machine according to claim 3, characterized in that, The specific steps for determining whether the actual physical action signal for replenishing the liquid is the same as the preset control parameters for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameters for draining the liquid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for fluid replenishment include preset fluid replenishment interval, preset duration of a single fluid replenishment, and preset number of fluid replenishments within a preset time period. The actual physical action signal of the fluid rehydration within the preset time period is obtained, and the actual fluid rehydration interval, the actual duration of a single fluid rehydration, and the actual number of fluid rehydration cycles within the preset time period are calculated. Determine whether the difference between the preset replenishment interval and the actual replenishment interval and / or the preset single replenishment duration and the actual single replenishment duration and / or the preset number of replenishments within the preset time period and the actual number of replenishments within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

7. The method for monitoring the liquid level of a cleaning machine according to claim 3, characterized in that, The specific steps for determining whether the actual physical action signal for replenishing the liquid is the same as the preset control parameters for replenishing the liquid and whether the actual physical action signal for draining the liquid is the same as the preset control parameters for draining the liquid, and if not, issuing a liquid level warning signal for the cleaning tank, include: The preset control parameters for drainage include preset drainage interval, preset single drainage duration, and preset number of drainages within a preset time period. The actual physical action signal of the drainage within the preset time period is obtained, and the actual drainage interval, the actual duration of a single drainage, and the actual number of drainages within the preset time period are calculated. Determine whether the difference between the preset drainage interval and the actual drainage interval and / or the preset single drainage duration and the actual single drainage duration and / or the preset number of drainages within the preset time period and the actual number of drainages within the preset time period is within a threshold range. If not, issue a liquid level warning signal for the cleaning tank.

8. The method for monitoring the liquid level of a cleaning machine according to claim 6, characterized in that, Also includes: The preset replenishment interval, the preset single replenishment duration, and the preset replenishment number within the preset time period are calculated based on the loss rate of the cleaning fluid in the cleaning tank and the preset threshold of the cleaning fluid in the cleaning tank. The loss rate of the cleaning fluid in the cleaning tank includes the evaporation rate of the cleaning fluid and the rate at which the cleaning fluid is carried away by the wafer during the cleaning process.

9. The method for monitoring the liquid level of a cleaning machine according to claim 2, characterized in that, The specific steps for determining whether the replenishment liquid flow signal matches the actual physical action signal of the replenishment, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the replenishment, it is determined whether the replenishment liquid flow signal is detected when the replenishment valve is in the closed state. If so, it is confirmed that the replenishment valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

10. The method for monitoring the liquid level of a cleaning machine according to claim 2, characterized in that, The specific steps for determining whether the drained liquid flow signal matches the actual physical action signal of the draining process, and if not, issuing a liquid level warning signal for the cleaning tank, include: Based on the actual physical action signal of the drain, it is determined whether the drain liquid flow signal is detected when the drain valve is in the closed state. If so, it is confirmed that the drain valve is leaking internally, and a liquid level warning signal for the cleaning tank is issued.

Images