A liquid level position detection calibration method and a liquid level position detection device

Abstract

The application discloses a liquid level position detection calibration method and a liquid level position detection device, and belongs to the technical field of semiconductor preparation. The liquid level position detection calibration method comprises the following steps: acquiring a first target crucible placement position corresponding to a first reference detection piece in a first detection stage and a second target crucible placement position corresponding to a melt-short detection piece; determining a first position deviation according to the second target crucible placement position and the first target crucible placement position; acquiring a third target crucible placement position corresponding to a second reference detection piece in a second detection stage and a fourth target crucible placement position corresponding to a non-melt-short detection piece; determining a second position deviation according to the fourth target crucible placement position and the third target crucible placement position; and determining a position deviation change amount according to the second position deviation and the first position deviation. The application can obtain the relative change of the target crucible placement position before and after the detection piece is replaced, thereby providing a basis for liquid level position detection calibration.

Description

Technical Field

[0001] This application relates to the field of semiconductor fabrication technology, and in particular to a liquid level position detection and calibration method and a liquid level position detection device. Background Technology

[0002] In the preparation of silicon single crystals, the Czochralski method is commonly used. During the Czochralski crystal pulling process, molten silicon is placed in a crucible, and a flow guide is positioned above the crucible. The distance between the flow guide and the molten silicon surface affects the thermal field, the crystal growth interface, and the stability of the crystal pulling process. Therefore, during crystal pulling, it is usually necessary to monitor the position of the molten silicon surface and adjust the crucible position based on the monitoring results to maintain a suitable liquid surface distance between the flow guide and the molten silicon surface.

[0003] In related technologies, level detection devices such as liquid level pins can be installed on the guide tube to determine the crucible placement position at the target liquid level distance. However, during use, the end of the detection device furthest from the guide tube is easily worn or melted. When a melted detection device is replaced by an unmelted one, the effective length of the detection device changes. If the effective length of the unmelted detection device is directly used as the basis for liquid level position control, the calculated target crucible placement position may not match the historical crystal pulling parameters formed based on the melted detection device. This makes it difficult to connect the liquid level position detection benchmark before and after the replacement of the detection device, thus affecting the accuracy of liquid level distance control and the stability of the crystal pulling process. Summary of the Invention

[0004] This application provides a liquid level position detection and calibration method and a liquid level position detection device to solve the technical problem that it is difficult to connect the liquid level position detection benchmark before and after replacing the detection component.

[0005] To achieve the above objectives, according to a first aspect of this application, a liquid level detection and calibration method is provided, comprising: Obtain the first target crucible placement position D1 corresponding to the first reference test piece and the second target crucible placement position D2 corresponding to the melt-short test piece in the first detection stage; Based on the placement position D2 of the second target crucible and the placement position D1 of the first target crucible, the first position deviation E1 is determined; In the second detection stage, obtain the third target crucible placement position D3 corresponding to the second reference detection piece and the fourth target crucible placement position D4 corresponding to the unmelted short detection piece, wherein the unmelted short detection piece is used to replace the melted short detection piece; The second position deviation E2 is determined based on the placement position D4 of the fourth target crucible and the placement position D3 of the third target crucible; The change in position deviation ΔE is determined based on the second position deviation E2 and the first position deviation E1.

[0006] In some embodiments, obtaining the first target crucible placement position D1 corresponding to the first reference detection piece and the second target crucible placement position D2 corresponding to the melt-short detection piece in the first detection stage includes: Obtain the target liquid level distance P; Install the first reference detection piece, wherein the short-melting detection piece is a used detection piece that has experienced a short melt; With the initial position of the crucible as the zero position, move the crucible until the surface of the molten silicon contacts the end of the first reference detection element away from the guide tube, and record the first contact position G1; Move the crucible until the surface of the molten silicon contacts the end of the molten silicon detection element away from the guide tube, and record the second contact position G2; The first target crucible placement position D1 is determined based on the target liquid level distance P, the effective length L11 of the first reference detection element, and the first contact position G1. The second target crucible placement position D2 is determined based on the target liquid level distance P, the effective length L2 of the melt short detection element, and the second contact position G2.

[0007] In some embodiments, the placement position D1 of the first target crucible satisfies: D1=G1-(P-L11); The second target crucible is placed at position D2, which satisfies the following condition: D2 = G2 - (P - L2).

[0008] In some embodiments, obtaining the placement position D3 of the third target crucible corresponding to the second reference detection piece and the placement position D4 of the fourth target crucible corresponding to the unmelted short detection piece in the second detection stage includes: Remove the fused short detection piece and install the unfused short detection piece; Install the second reference detection component; With the initial position of the crucible as the zero position, move the crucible until the surface of the molten silicon contacts the end of the second reference detection piece away from the guide tube, and record the third contact position G3; Move the crucible until the surface of the molten silicon contacts the end of the unmelted short detection piece away from the guide tube, and record the fourth contact position G4; The placement position D3 of the third target crucible is determined based on the target liquid level distance P, the effective length L12 of the second reference detection element, and the third contact position G3. The placement position D4 of the fourth target crucible is determined based on the target liquid level distance P, the effective length L3 of the unmelted short detection piece, and the fourth contact position G4.

[0009] In some embodiments, the placement position D3 of the third target crucible satisfies: D3 = G3 - (P - L12); The fourth target crucible placement position D4 satisfies: D4 = G4 - (P - L3).

[0010] In some embodiments, the first reference detection element and the second reference detection element are the same detection element; or the first reference detection element and the second reference detection element are different detection elements. The first detection stage corresponds to the stage where the short-melted detector is still in use, and the second detection stage corresponds to the stage after the first detection stage, and after the short-melted detector has been replaced by the non-short-melted detector.

[0011] In some embodiments, the effective length L11 of the first reference detection element, the effective length L12 of the second reference detection element, the effective length L3 of the unmelted short detection element, and the effective length L2 of the melted short detection element satisfy the following: L11 and L12 are both greater than L3, and L3 > L2.

[0012] In some embodiments, the first positional deviation E1 satisfies: E1 = D2 - D1; The second positional deviation E2 satisfies: E2 = D4 - D3; The change in positional deviation ΔE satisfies: ΔE = E2 - E1.

[0013] In some embodiments, after determining the position deviation change ΔE, the liquid level position detection and calibration method further includes: correcting the placement position D4 of the fourth target crucible based on the position deviation change ΔE to obtain the corrected crucible placement position D5.

[0014] In some embodiments, the modified crucible placement position D5 satisfies: D5 = D4 - ΔE.

[0015] According to a second aspect of this application, a liquid level detection device is provided, comprising: A flow guide tube, wherein the flow guide tube has a slot, and the side wall of the slot has a connecting hole, the connecting hole communicating with the slot; The testing component includes an interconnected plug and a rod, the plug being inserted into the slot, and at least a portion of the rod being located on the side of the flow guide tube closer to the crucible; A connector, which passes through the connection hole and is connected to the plug.

[0016] In some embodiments, the detection element includes a first detection element and a second detection element, the first detection element includes a first reference detection element and a second reference detection element, and the second detection element includes a short melt detection element and an unmelted short melt detection element; The slots are spaced two apart, and the first detection element and the second detection element are respectively disposed in the corresponding slots; Two connectors are provided, each connector passing through a corresponding connection hole and connecting to a corresponding plug.

[0017] In some embodiments, the plug has a mating hole corresponding to the connection hole, and both the connection hole and the mating hole are threaded holes; The connecting component is a bolt, which is threadedly connected to the connecting hole and the mating hole respectively.

[0018] In some embodiments, the slot is a square slot and the plug is a square plug.

[0019] In the liquid level position detection and calibration method of this application embodiment, before and after the molten short detector is replaced with an unmolten short detector, the target crucible placement position corresponding to the reference detector is used as a reference to determine the positional deviation of the molten short detector and the unmolten short detector relative to the reference detector, and the change in positional deviation is determined based on the change in positional deviation between the two tests. Thus, the relative change in the target crucible placement position before and after the detector replacement can be obtained, providing a basis for liquid level position detection and calibration. In some embodiments, correcting the target crucible placement position corresponding to the unmolten short detector by the change in positional deviation can ensure that the crucible placement position after the unmolten short detector is installed is consistent with the liquid level position detection reference before replacement, reducing the risk of mismatch between the detector replacement and existing crystal pulling parameters, thereby improving the accuracy of liquid level distance control and the stability of the crystal pulling process.

[0020] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0023] Figure 1 This is a schematic diagram of a liquid level detection and calibration method provided in some embodiments of this application; Figure 2 This is a schematic diagram of the structure of the liquid level detection device provided in some embodiments of this application; Figure 3 This is a schematic diagram showing the connection between the detection element and the guide tube provided in some embodiments of this application; Figure 4 This is a schematic diagram of the slot structure provided in some embodiments of this application; Figure 5 This is a schematic diagram of the structure of the detection device provided in some embodiments of this application.

[0024] Explanation of reference numerals in the attached figures: 10. Flow guide tube; 11. Slot; 12. Connecting hole; 20. Detection component; 20a. First detection component; 20b. Second detection component; 21. Plug; 22. Rod; 23. Mating hole; 30. Connector. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0026] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0027] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0028] In related technologies, level detection devices such as liquid level pins can be installed on the guide tube to determine the crucible placement position at the target liquid level distance. However, during use, the end of the detection device furthest from the guide tube is easily worn or melted. When a melted detection device is replaced by an unmelted one, the effective length of the detection device changes. If the effective length of the unmelted detection device is directly used as the basis for liquid level position control, the calculated target crucible placement position may not match the historical crystal pulling parameters formed based on the melted detection device. This makes it difficult to connect the liquid level position detection benchmark before and after the replacement of the detection device, thus affecting the accuracy of liquid level distance control and the stability of the crystal pulling process.

[0029] In addition, the detection element is usually inserted or hung on the flow guide tube. In high-temperature environments, during equipment vibration, or during crucible movement, the detection element may sway, tilt, or shift in position relative to the flow guide tube, resulting in instability in the actual detection position of the detection element end, further increasing the error in liquid level detection.

[0030] Firstly, embodiments of this application provide a liquid level detection and calibration method; please refer to [link to relevant documentation]. Figure 1 ,include: Obtain the first target crucible placement position D1 corresponding to the first reference test piece and the second target crucible placement position D2 corresponding to the melt-short test piece in the first detection stage; Based on the placement positions of the second target crucible D2 and the first target crucible D1, the first position deviation E1 is determined; In the second detection stage, obtain the third target crucible placement position D3 corresponding to the second reference detection piece and the fourth target crucible placement position D4 corresponding to the unmelted short detection piece. The unmelted short detection piece is used to replace the melted short detection piece. Based on the placement positions of the fourth target crucible D4 and the third target crucible D3, the second position deviation E2 is determined; The change in position deviation ΔE is determined based on the second position deviation E2 and the first position deviation E1.

[0031] It should be noted that the first inspection stage corresponds to the stage when the short-melted test piece is still in use, and the second inspection stage corresponds to the stage after the first inspection stage, and after the short-melted test piece has been replaced by the non-short-melted test piece.

[0032] In this embodiment, before and after the molten short detector is replaced by the unmolten short detector, the target crucible placement position corresponding to the reference detector is used as a reference to determine the deviation of the target crucible placement position corresponding to the detector relative to the target crucible placement position corresponding to the reference detector. The change in positional deviation is then determined based on the change between the two deviations. Therefore, the relative change in the target crucible placement position caused by replacing the molten short detector with the unmolten short detector provides a basis for subsequent calibration of the liquid level detection results.

[0033] Furthermore, by correcting the target crucible placement position corresponding to the unmelted short detection piece through the change in positional deviation, the crucible placement position after the unmelted short detection piece is installed can be kept consistent with the liquid surface position detection reference before replacement, reducing the risk of liquid surface position detection reference shift due to detection piece replacement. In this way, after replacing the new detection piece, it is still beneficial to use other process parameters in the existing crystal pulling process, reducing fluctuations in crystal pulling conditions caused by liquid surface position detection deviations, thereby improving the stability of crystal quality.

[0034] In some embodiments, obtaining the first target crucible placement position D1 corresponding to the first reference detection piece and the second target crucible placement position D2 corresponding to the melt-short detection piece in the first detection stage includes: Obtain the target liquid level distance P; Install the first reference test piece; the short-melt test piece is a test piece that has been used and has experienced a short-melt. With the initial position of the crucible as the zero position, move the crucible until the surface of the molten silicon contacts the end of the first reference detection piece away from the guide tube, and record the first contact position G1; Move the crucible until the surface of the molten silicon contacts the end of the short-circuit test piece away from the guide tube, and record the second contact position G2; The first target crucible placement position D1 is determined based on the target liquid level distance P, the effective length L11 of the first reference detection element, and the first contact position G1. The placement position D2 of the second target crucible is determined based on the target liquid level distance P, the effective length L2 of the melt short detection piece, and the second contact position G2.

[0035] Wherein, the first contact position G1 represents the position of the crucible relative to the zero position when the molten silicon surface contacts the end of the first reference detection element away from the guide tube; the second contact position G2 represents the position of the crucible relative to the zero position when the molten silicon surface contacts the end of the molten silicon detection element away from the guide tube. The first target crucible placement position D1 and the second target crucible placement position D2 are crucible placement positions calculated based on the corresponding contact positions and the distance P from the target liquid surface.

[0036] A preset position when the crucible is in its initial position is used as the zero point. For example, the upper edge of the crucible in its initial position can be used as the zero point. The initial position is the position after the crucible is filled with material, but before the crucible position is adjusted based on the liquid level detection result. The first contact position G1, the second contact position G2, the first target crucible placement position D1, and the second target crucible placement position D2 are used to represent the distance of the corresponding positions relative to the zero point.

[0037] Furthermore, the positive and negative directions of the crucible's vertical movement can be predetermined based on the equipment coordinate system. The first contact position G1, the second contact position G2, the first target crucible placement position D1, and the second target crucible placement position D2 are represented using the same coordinate direction. When the crucible moves relative to the zero position along the preset positive direction, the corresponding position distance is taken as a positive value; when the crucible moves relative to the zero position in the opposite direction to the preset positive direction, the corresponding position distance is taken as a negative value. This avoids the impact of inconsistent coordinate directions on subsequent deviation calculations due to different position data.

[0038] In some embodiments, the first target crucible placement position D1 satisfies: D1 = G1 - (P - L11); the second target crucible placement position D2 satisfies: D2 = G2 - (P - L2). Where P - L11 represents the crucible movement distance required to adjust from the contact position of the first reference detection element's end to the corresponding position at the target liquid surface. Thus, in the first detection stage, the target crucible placement positions corresponding to the first reference detection element and the melt-short detection element at the same target liquid surface distance P can be obtained respectively, providing a basis for subsequently determining the positional deviation of the melt-short detection element relative to the first reference detection element.

[0039] In some embodiments, obtaining the placement position D3 of the third target crucible corresponding to the second reference detection piece and the placement position D4 of the fourth target crucible corresponding to the unmelted short detection piece in the second detection stage includes: Remove the fused short test piece and install the unfused short test piece; Install the second reference test piece; With the initial position of the crucible as the zero point, move the crucible until the surface of the molten silicon contacts the end of the second reference detection piece away from the guide tube, and record the third contact position G3; Move the crucible until the surface of the molten silicon contacts the end of the unmelted short test piece away from the guide tube, and record the fourth contact position G4; The placement position D3 of the third target crucible is determined based on the target liquid surface distance P, the effective length L12 of the second reference detection element, and the third contact position G3. Based on the target liquid level distance P, the effective length L3 of the unmelted short detection piece, and the fourth contact position G4, the placement position D4 of the fourth target crucible is determined.

[0040] Wherein, the third contact position G3 represents the position of the crucible relative to the zero position when the molten silicon surface contacts the end of the second reference detection piece furthest from the guide tube; the fourth contact position G4 represents the position of the crucible relative to the zero position when the molten silicon surface contacts the end of the unmelted short detection piece furthest from the guide tube. The third target crucible placement position D3 and the fourth target crucible placement position D4 are crucible placement positions calculated based on the corresponding contact positions and the distance P from the target liquid surface.

[0041] In some embodiments, the placement position D3 of the third target crucible satisfies: D3 = G3 - (P - L12); the placement position D4 of the fourth target crucible satisfies: D4 = G4 - (P - L3). Therefore, in the second detection stage, the target crucible placement positions corresponding to the second reference detection piece and the unmelted short detection piece at the same target liquid level distance P can be obtained respectively. Subsequently, the positional deviation of the unmelted short detection piece relative to the second reference detection piece can be determined based on the placement positions D3 and D4 of the third and fourth target crucibles, and further combined with the positional deviation determined in the first detection stage, the change in positional deviation before and after the detection piece replacement can be obtained.

[0042] In some embodiments, the first reference detection element and the second reference detection element are the same detection element. That is, in the first detection stage and the second detection stage, the same reference detection element can be used to determine the placement position D1 of the first target crucible and the placement position D3 of the third target crucible, respectively. In this way, there is no need to replace the reference detection element in the second detection stage, which helps to reduce the installation position error caused by reinstalling the reference detection element and keeps the reference benchmark consistent in the first detection stage and the second detection stage.

[0043] It should be noted that when the first reference detection piece and the second reference detection piece are the same detection piece, if the effective length of the detection piece does not change between the first detection stage and the second detection stage, then L11 = L12. If the effective length of the detection piece changes, then the current effective length of the detection piece in the first detection stage and the second detection stage can be obtained respectively, and used as L11 and L12 in the calculation.

[0044] In some embodiments, the first and second reference detection elements are different detection elements. The first reference detection element can be disassembled and the second reference detection element installed during the second detection stage. In this case, the first reference detection element is used to determine the placement position D1 of the first target crucible during the first detection stage; during the second detection stage, the first reference detection element can be disassembled and the second reference detection element installed, and the second reference detection element is used to determine the placement position D3 of the third target crucible. The effective length L11 of the first reference detection element and the effective length L12 of the second reference detection element can be equal, i.e., L11 = L12. Thus, even if the reference detection element is replaced during the second detection stage, the second reference detection element can still have the same effective length reference as the first reference detection element.

[0045] In some embodiments, the effective length L11 of the first reference detection element and the effective length L12 of the second reference detection element are both greater than the effective length L3 of the unmelted short detection element, and the effective length L3 of the unmelted short detection element is greater than the effective length L2 of the melted short detection element. The first and second reference detection elements may have the same effective length, and the effective length of the reference detection element is greater than the effective length of the unmelted short detection element, which in turn is greater than the effective length of the melted short detection element. The unmelted short detection element is a new, unused detection element, and its effective length L3 is the initial effective length after the detection element is replaced; the melted short detection element is a used detection element that has melted short, and its effective length L2 is less than the effective length L3 of the unmelted short detection element.

[0046] Therefore, the first and second detection stages can establish a reference benchmark using reference test pieces of the same effective length, which helps to reduce the impact of differences in the reference test pieces on the position deviation calculation results. By making L3 > L2, the change in the effective length of the test piece from a new unused state to a used, fused-shortened state can be reflected.

[0047] In some embodiments, the first position deviation E1 satisfies: E1 = D2 - D1. Here, the first position deviation E1 represents the deviation of the second target crucible placement position D2 corresponding to the short-melting detection piece from the first target crucible placement position D1 corresponding to the first reference detection piece.

[0048] In some embodiments, the second position deviation E2 satisfies: E2 = D4 - D3. The second position deviation E2 represents the deviation of the fourth target crucible placement position D4 corresponding to the unmelted short detection piece from the third target crucible placement position D3 corresponding to the second reference detection piece.

[0049] In some embodiments, the change in positional deviation ΔE satisfies: ΔE = E2 - E1. The change in positional deviation ΔE characterizes the change in the target crucible placement position relative to the reference test piece before and after the test piece changes from a fused-short state to an unfused-short state. This provides a basis for subsequent correction of the target crucible placement position corresponding to the unfused-short test piece.

[0050] In some embodiments, after determining the change in position deviation ΔE, the liquid level position detection calibration method further includes: correcting the placement position D4 of the fourth target crucible based on the change in position deviation ΔE to obtain the corrected placement position D5 of the crucible.

[0051] The corrected crucible placement position D5 satisfies: D5 = D4 - ΔE. When the equipment uses different coordinate orientations, the correction relationship can be adjusted according to the corresponding coordinate orientation, as long as the correction direction of the position deviation change ΔE for the fourth target crucible placement position D4 is consistent with the actual deviation compensation direction.

[0052] By subtracting the position deviation change ΔE from the fourth target crucible placement position D4, the position deviation change caused by the insertion of the unmelted short detector can be compensated, ensuring that the corrected crucible placement position D5 remains consistent with the liquid level position detection reference before the replacement of the unmelted short detector. Therefore, after replacing the unmelted short detector, crucible control can be performed based on the corrected crucible placement position D5, which helps reduce crucible placement position deviation caused by detector replacement, reduces the impact of liquid level distance changes on existing crystal pulling parameters, and thus improves the stability of the crystal pulling process and crystal quality.

[0053] It should be noted that D5 is mainly used to compensate for the change in the detection benchmark introduced by the replacement of the detection component, so that the liquid level control results after the unmelted short detection component is connected with the historical crystal pulling parameters. Since D5 is a compensation position based on the change in position deviation ΔE, the actual liquid level distance obtained based on D5 may deviate slightly from the preset target liquid level distance P, but this deviation is usually within the allowable fluctuation range of the crystal pulling process. Compared with directly using the fourth target crucible placement position D4 for control, correction through D5 is more beneficial in reducing the impact of the sudden change in the detection benchmark before and after the detection component replacement on the stability of the crystal pulling process.

[0054] In one specific embodiment, the target liquid surface distance P is 40 mm, the effective length L11 of the first reference detection element is 24 mm, and the effective length L2 of the melt-short detection element is 20 mm. Taking the upper edge of the crucible in its initial position as the zero point, the crucible is moved until the molten silicon surface contacts the end of the first reference detection element away from the guide tube, and the first contact position G1 is recorded as -31 mm; the crucible is moved until the molten silicon surface contacts the end of the melt-short detection element away from the guide tube, and the second contact position G2 is recorded as -25.9 mm.

[0055] According to D1=G1-(P-L11), the placement position of the first target crucible is D1=-31-(40-24)=-47mm. According to D2=G2-(P-L2), the placement position of the second target crucible is D2=-25.9-(40-20)=-45.9mm. Therefore, the first position deviation is E1=D2-D1=-45.9-(-47)=1.1mm.

[0056] In the second testing stage, the molten short test piece is disassembled and the unmolten short test piece is installed. The effective length L12 of the second reference test piece is 24 mm, and the effective length L3 of the unmolten short test piece is 21 mm. The crucible is moved until the surface of the molten silicon contacts the end of the second reference test piece away from the guide tube, and the third contact position G3 is recorded as -32.5 mm; the crucible is then moved until the surface of the molten silicon contacts the end of the unmolten short test piece away from the guide tube, and the fourth contact position G4 is recorded as -29.4 mm.

[0057] According to D3=G3-(P-L12), the placement position of the third target crucible is D3=-32.5-(40-24)=-48.5mm. According to D4=G4-(P-L3), the placement position of the fourth target crucible is D4=-29.4-(40-21)=-48.4mm. Therefore, the second position deviation E2=D4-D3=-48.4-(-48.5)=0.1mm.

[0058] According to ΔE=E2-E1, the change in position deviation ΔE=0.1-1.1=-1mm. According to D5=D4-ΔE, the corrected crucible placement position D5=-48.4-(-1)=-47.4mm. The corrected crucible placement position D5 can be used as the basis for controlling the crucible placement position after the unmelted short detection piece is connected.

[0059] In this embodiment, if the fourth target crucible placement position D4, calculated directly using the effective length L3 of the unmelted short detection piece, is used as the control basis, the corresponding position is -48.4mm, which may not match the historical crystal pulling parameters formed before the detection piece was replaced. After correcting D4 by the position deviation change ΔE, D5 = -47.4mm is obtained, which enables the crucible placement position after the unmelted short detection piece is connected to the liquid level position detection reference before replacement, reducing the impact of the detection piece replacement on the liquid level distance control and the stability of the crystal pulling process.

[0060] Secondly, embodiments of this application provide a liquid level detection device. Please refer to... Figure 2 and Figure 3The liquid level detection device includes a guide tube 10, a detection element 20, and a connector 30. The guide tube 10 has a slot 11, and a connection hole 12 is formed on the side wall of the slot 11, communicating with the slot 11. The detection element 20 includes a plug 21 and a rod 22 connected to each other. The plug 21 is inserted into the slot 11, and at least a portion of the rod 22 is located on the side of the guide tube 10 near the crucible. The connector 30 passes through the connection hole 12 and connects to the plug 21 to fix the detection element 20 to the guide tube 10.

[0061] In this embodiment, the plug 21 of the detection element 20 is inserted into the slot 11 of the guide tube 10, and the connector 30 passes through the connection hole 12 and connects to the plug 21, so that the detection element 20 can be positioned and fixed on the guide tube 10. In this way, the risk of the detection element 20 shaking, deviating or shifting relative to the guide tube 10 can be reduced, which is beneficial to improving the positional stability of the detection element 20 and the accuracy of liquid level detection.

[0062] The liquid level detection device provided in this embodiment can be used to implement the liquid level detection and calibration method provided in the first aspect of this application, and therefore has at least the beneficial effects corresponding to the liquid level detection and calibration method, which will not be elaborated here.

[0063] In some embodiments, the detection element 20 includes a first detection element 20a and a second detection element 20b. Two slots 11 are spaced apart, and the first detection element 20a and the second detection element 20b are respectively disposed in corresponding slots 11; two connectors 30 are provided, which pass through corresponding connection holes 12 and are connected to corresponding plugs 21 to fix the first detection element 20a and the second detection element 20b to the guide tube 10 respectively. Thus, two detection elements 20 can be simultaneously disposed on the guide tube 10, so that the two detection elements 20 are used to provide different liquid level position detection references.

[0064] In some embodiments, the first detection element 20a may include a first reference detection element and a second reference detection element. The second detection element 20b may include a melted short detection element and an unmelted short detection element. Specifically, in the first detection stage, the first detection element 20a serves as the first reference detection element, and the second detection element 20b serves as the melted short detection element; in the second detection stage, the first detection element 20a serves as the second reference detection element, and the second detection element 20b is replaced by the unmelted short detection element. Since the first detection element 20a and the second detection element 20b are respectively disposed in different slots 11 on the guide tube 10, different types of detection elements can be installed in different detection stages based on the same detection device structure to obtain the target crucible placement position of the corresponding detection element, thereby providing a structural basis for position deviation calculation and crucible placement position correction.

[0065] In some embodiments, both the first detection element 20a and the second detection element 20b can be made of high-temperature resistant materials, so that the first detection element 20a and the second detection element 20b are not prone to significant melting, deformation or breakage when in short-term contact with the molten silicon surface, which helps to improve the reliability of liquid level detection. For example, both the first detection element 20a and the second detection element 20b can be quartz liquid level pins.

[0066] It should be noted that although the test piece has good high temperature resistance, under repeated testing or prolonged contact with molten silicon, the end of the test piece away from the guide tube may still be melted to some extent.

[0067] In some embodiments, the plug 21 has a mating hole 23 corresponding to the connecting hole 12, and both the connecting hole 12 and the mating hole 23 are threaded holes; the connector 30 is a bolt, which is threadedly connected to the connecting hole 12 and the mating hole 23 respectively. Thus, the plug 21 of the detection element 20 can be locked in the slot 11 through the threaded connection, reducing the risk of the detection element 20 loosening, shaking, or tilting relative to the guide tube 10 during use, and improving the installation stability of the detection element 20.

[0068] In some embodiments, please refer to Figure 4 Slot 11 is a square slot. See also... Figure 5 The plug 21 is a square plug. By matching the square slot with the square plug, the rotation of the detection element 20 relative to the guide tube 10 can be restricted, so that the detection element 20 maintains a more stable posture after installation, reducing the risk of inaccurate liquid level detection due to the deflection or tilt of the detection element 20.

[0069] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0070] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0071] The above description is merely an illustration of the embodiments of this application. Equivalent changes and modifications made by those skilled in the art based on the technical solutions of this application shall fall within the protection scope of this application.

Claims

1. A method for detecting and calibrating liquid level, characterized in that, include: Obtain the first target crucible placement position D1 corresponding to the first reference test piece and the second target crucible placement position D2 corresponding to the melt-short test piece in the first detection stage; Based on the placement position D2 of the second target crucible and the placement position D1 of the first target crucible, the first position deviation E1 is determined; In the second detection stage, obtain the third target crucible placement position D3 corresponding to the second reference detection piece and the fourth target crucible placement position D4 corresponding to the unmelted short detection piece, wherein the unmelted short detection piece is used to replace the melted short detection piece; The second position deviation E2 is determined based on the placement position D4 of the fourth target crucible and the placement position D3 of the third target crucible; The change in position deviation ΔE is determined based on the second position deviation E2 and the first position deviation E1.

2. The liquid level detection and calibration method according to claim 1, characterized in that, The step of obtaining the first target crucible placement position D1 corresponding to the first reference detection piece and the second target crucible placement position D2 corresponding to the melt-short detection piece in the first detection stage includes: Obtain the target liquid level distance P; Install the first reference detection piece, wherein the short-melting detection piece is a used detection piece that has experienced a short melt; With the initial position of the crucible as the zero position, move the crucible until the surface of the molten silicon contacts the end of the first reference detection element away from the guide tube, and record the first contact position G1; Move the crucible until the surface of the molten silicon contacts the end of the molten silicon detection element away from the guide tube, and record the second contact position G2; The first target crucible placement position D1 is determined based on the target liquid level distance P, the effective length L11 of the first reference detection element, and the first contact position G1. The second target crucible placement position D2 is determined based on the target liquid level distance P, the effective length L2 of the melt short detection element, and the second contact position G2.

3. The liquid level detection and calibration method according to claim 2, characterized in that, The first target crucible placement position D1 satisfies: D1=G1-(P-L11); The second target crucible is placed at position D2, which satisfies the following condition: D2 = G2 - (P - L2).

4. The liquid level detection and calibration method according to claim 2, characterized in that, The step of obtaining the placement position D3 of the third target crucible corresponding to the second reference test piece and the placement position D4 of the fourth target crucible corresponding to the unmelted short test piece in the second detection stage includes: Remove the fused short detection piece and install the unfused short detection piece; Install the second reference detection component; With the initial position of the crucible as the zero position, move the crucible until the surface of the molten silicon contacts the end of the second reference detection piece away from the guide tube, and record the third contact position G3; Move the crucible until the surface of the molten silicon contacts the end of the unmelted short detection piece away from the guide tube, and record the fourth contact position G4; The placement position D3 of the third target crucible is determined based on the target liquid level distance P, the effective length L12 of the second reference detection element, and the third contact position G3. The placement position D4 of the fourth target crucible is determined based on the target liquid level distance P, the effective length L3 of the unmelted short detection piece, and the fourth contact position G4.

5. The liquid level position detection and calibration method according to claim 4, characterized in that, The placement position D3 of the third target crucible satisfies: D3 = G3 - (P - L12); The fourth target crucible placement position D4 satisfies: D4 = G4 - (P - L3).

6. The liquid level detection and calibration method according to claim 4, characterized in that, The first reference testing element and the second reference testing element are the same testing element; or the first reference testing element and the second reference testing element are different testing elements. The first detection stage corresponds to the stage where the short-melted detector is still in use, and the second detection stage corresponds to the stage after the first detection stage, and after the short-melted detector has been replaced by the non-short-melted detector.

7. The liquid level detection and calibration method according to claim 4, characterized in that, The effective lengths L11 of the first reference detection piece, L12 of the second reference detection piece, L3 of the unmelted short detection piece, and L2 of the melted short detection piece satisfy the following: L11 and L12 are both greater than L3, and L3 > L2.

8. The liquid level detection and calibration method according to claim 1, characterized in that, The first position deviation E1 satisfies: E1 = D2 - D1; The second positional deviation E2 satisfies: E2 = D4 - D3; The change in positional deviation ΔE satisfies: ΔE = E2 - E1.

9. The liquid level detection and calibration method according to claim 1, characterized in that, After determining the position deviation change ΔE, the liquid level position detection and calibration method further includes: correcting the placement position D4 of the fourth target crucible based on the position deviation change ΔE to obtain the corrected crucible placement position D5.

10. The liquid level position detection and calibration method according to claim 9, characterized in that, The corrected crucible placement position D5 satisfies: D5 = D4 - ΔE.

11. A liquid level detection device, characterized in that, The liquid level detection device includes: A flow guide tube (10) is provided with a slot (11), and a connecting hole (12) is provided on the side wall of the slot (11), and the connecting hole (12) communicates with the slot (11); The detection element (20) includes a plug (21) and a rod (22) connected to each other. The plug (21) is inserted into the slot (11), and at least a portion of the rod (22) is located on the side of the guide tube (10) near the crucible. A connector (30) is inserted through the connection hole (12) and connected to the plug (21).

12. The liquid level detection device according to claim 11, characterized in that, The detection element (20) includes a first detection element (20a) and a second detection element (20b). The first detection element (20a) includes a first reference detection element and a second reference detection element. The second detection element (20b) includes a short melt detection element and an unmelted short melt detection element. Two slots (11) are spaced apart, and the first detection element (20a) and the second detection element (20b) are respectively disposed in the corresponding slots (11). Two connectors (30) are provided. The connectors (30) pass through the corresponding connection holes (12) and are connected to the corresponding plugs (21).

13. The liquid level detection device according to claim 11, characterized in that, The plug (21) has a mating hole (23) corresponding to the connecting hole (12), and both the connecting hole (12) and the mating hole (23) are threaded holes; The connector (30) is a bolt, which is threadedly connected to the connecting hole (12) and the mating hole (23) respectively.

14. The liquid level detection device according to claim 11, characterized in that, The slot (11) is a square slot, and the plug (21) is a square plug.

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