Steel ball sealing test tool

Abstract

The application discloses a kind of steel ball tightness test tool, including frame, first adjusting and compressing component movably inserted in one side of the frame, second adjusting and compressing component movably inserted in the other side of frame, gas pipe joint inserted in the other side of the frame, the valve body is detachably arranged in the frame, a plurality of plugs are arranged on the outside of the valve body, the first adjusting and compressing component and second adjusting and compressing component are used to compress corresponding plug, the valve body is provided with gas path, the steel ball is arranged in the gas path, and the gas pipe joint is communicated with the gas path.The tool of the application solves the technical problems that the existing semiconductor valve body internal steel ball sealing performance lacks special detection tool and the stability of test is poor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment testing technology, and more specifically to a steel ball sealing test fixture. Background Technology

[0002] In the semiconductor equipment assembly process, two steel balls are required inside the valve body to achieve air circuit sealing. The sealing performance of these steel balls directly determines the overall reliability of the valve body. Current technology lacks dedicated tooling for testing the sealing performance of the steel balls inside the valve body, making it difficult to quickly verify the sealing quality after valve body assembly. Conventional testing methods involve directly inserting plugs into each through-hole, but these plugs are not properly tightened, leading to air leakage during testing and poor test stability. Alternatively, different tools are used to tighten each plug, resulting in poor overall integrity and hindering rapid testing of the valve body's steel ball sealing performance. Therefore, a new technical solution is urgently needed to address at least one of these technical problems. Summary of the Invention

[0003] The purpose of this invention is to provide a steel ball sealing performance testing fixture, which solves the technical problems of the lack of a dedicated testing fixture for the sealing performance of steel balls inside existing semiconductor valve bodies and poor testing stability.

[0004] To achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the present invention is as follows: 1. A steel ball sealing performance testing fixture, characterized in that it includes a frame, a first adjusting and pressing component movably inserted into one side of the frame, a second adjusting and pressing component movably inserted into the other side of the frame, and an air pipe connector inserted into the other side of the frame. A valve body is detachably disposed within the frame, and multiple plugs are disposed on the outer side of the valve body. The first adjusting and pressing component and the second adjusting and pressing component are used to press the corresponding plugs. An air passage is disposed within the valve body, and the steel ball is disposed in the air passage. The air pipe connector is connected to the air passage.

[0005] As a preferred technical solution, the first adjusting and pressing assembly includes at least one first adjusting bolt and a first pressing washer disposed at one end of the first adjusting bolt, wherein the first adjusting bolt is inserted into the upper side of the frame.

[0006] As a preferred technical solution, the second adjusting and pressing assembly includes at least one second adjusting bolt and a second pressing washer disposed on a section of the second adjusting bolt, wherein the second adjusting bolt is inserted into the vertical side of the frame.

[0007] As a preferred technical solution, the valve body is provided with a first upper through hole, a second upper through hole, a third upper through hole and a fourth upper through hole. A first upper sealing plug, a second upper sealing plug, a third upper sealing plug and a fourth upper sealing plug are respectively inserted into the first upper through hole to the fourth upper through hole. The first adjusting and pressing component is used to press the first upper sealing plug to the fourth upper sealing plug.

[0008] As a preferred technical solution, the valve body is provided with a first side through hole and a second side through hole on both vertical sides, and a first side plug and a second side plug are respectively provided in the first side through hole and the second side through hole. The second adjusting and pressing component is used to press the first side plug, and the second side plug abuts against the inner side of the frame.

[0009] As a preferred technical solution, a bottom through hole is provided on the bottom side of the valve body, and a bottom sealing plug is provided in the bottom through hole.

[0010] As a preferred technical solution, a bottom gasket is provided between the bottom sealing plug and the bottom side of the frame, and the upper and lower sides of the bottom gasket abut against the bottom sealing plug and the bottom side of the frame, respectively.

[0011] As a preferred technical solution, the frame is provided with a first mounting hole through which an air supply pipe connector and one steel ball pass, and the air supply pipe connector is inserted into the first mounting hole.

[0012] As a preferred technical solution, a second mounting hole for another steel ball to pass through is provided through the bottom side of the frame.

[0013] The beneficial effects of this invention are: 1) This tooling adopts an integrated frame structure, integrating the clamping and adjusting components and air pipe connectors onto the same frame body to form an integrated tooling unit. There is no need for on-site splicing of scattered parts. The valve body can be placed inside the frame to achieve plug clamping and sealing and air circuit interface docking. The assembly steps are few and the integrity is strong. The valve body can be placed separately inside the frame. The first and second adjusting and clamping components can respectively clamp and fix the plugs at the corresponding positions of the valve body to ensure reliable sealing at each through hole position. After the air pipe connector is connected to the air source, the sealing performance of the two steel balls in the air circuit inside the valve body can be tested. The tooling is easy to disassemble and assemble, and has good testing stability. 2) The first adjusting bolt, together with the first clamping washer, can apply pressure evenly to each upper sealing plug on the upper side of the valve body. The second adjusting bolt, together with the second clamping washer, clamps the lateral plugs. The clamping force is controllable, preventing the plugs from loosening and causing air leakage, thus ensuring the accuracy of the test. 3) The second side plug of the valve body directly abuts against the inner side of the frame and forms a bidirectional clamping with the second adjusting and pressing assembly, so that the valve body is securely positioned inside the frame; 4) The bottom gasket is placed between the bottom sealing plug and the bottom of the frame to buffer pressure and improve the bottom sealing effect; 5) The frame is equipped with a first mounting hole and a second mounting hole to facilitate the installation of two steel balls to be tested; 6) The overall tooling structure is simple, with good integrity, and the valve body is easy to pick up and put down, making it suitable for rapid batch testing of the steel ball sealing performance of semiconductor valve bodies. Attached Figure Description

[0014] Figure 1 This is a structural diagram of a tooling according to an embodiment of the present invention; Figure 2 yes Figure 1 A view from another direction; Figure 3 This is a working drawing of a tooling according to an embodiment of the present invention; Figure 4 This is a structural diagram of a valve body according to an embodiment of the present invention; exist Figures 1-4 In the middle, 1. Frame; 101. First mounting hole; 102. Second mounting hole; 2. First adjusting and pressing assembly; 201. First adjusting bolt; 202. First pressing gasket; 3. Second adjusting and pressing assembly; 301. Second adjusting bolt; 302. Second pressing gasket; 4. Air pipe connector; 5. Valve body; 501. First upper through hole; 502. Second upper through hole; 503. Third upper through hole; 504. Fourth upper through hole; 505. First side through hole; 506. Second side through hole; 507. Bottom through hole; 508. Air passage; 6. First upper sealing plug; 7. Second upper sealing plug; 8. Third upper sealing plug; 9. Fourth upper sealing plug; 10. First side plug; 11. Second side plug; 12. Bottom sealing plug; 13. Bottom gasket; 14. Steel ball. Detailed Implementation

[0015] The present invention will now be further described with reference to the accompanying drawings.

[0016] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "head", "tail", "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0017] Please refer to Figures 1-4. One embodiment of the present invention provides a steel ball 14 sealing performance testing fixture, including a frame 1, a first adjusting and pressing component 2 movably inserted into one side of the frame 1, a second adjusting and pressing component 3 movably inserted into the other side of the frame 1, and an air pipe connector 4 inserted into another side of the frame 1. A valve body 5 is detachably disposed inside the frame 1. Multiple plugs are disposed on the outer side of the valve body 5. The first adjusting and pressing component 2 and the second adjusting and pressing component 3 are used to press the corresponding plugs. An air passage 508 is disposed inside the valve body 5. The steel ball 14 is disposed in the air passage 508. The air pipe connector 4 is connected to the air passage 508. The valve body 5 is placed inside the frame 1, and the plugs are assembled at the various through-hole positions of the valve body 5. The plugs are pressed by the first adjusting and pressing component 2 and the second adjusting and pressing component 3 to complete the sealing of the valve body 5. This tooling adopts an integral frame 1 structure, integrating the pressing and adjusting components and the air pipe connector 4 on the same frame 1 body to form an integrated tooling unit. There is no need for on-site splicing of scattered parts. The valve body 5 can be placed inside the frame 1 to achieve plug pressing and sealing and air circuit 508 interface docking. The assembly steps are few and the integrity is strong. The valve body 5 can be placed separately inside the frame 1. The first adjusting and pressing component 2 and the second adjusting and pressing component 3 can respectively press and fix the plugs at the corresponding positions of the valve body 5 to ensure reliable sealing at each through-hole position. After the air pipe connector 4 is connected to the air source, the sealing performance of the two steel balls 14 in the air circuit 508 inside the valve body 5 can be tested. The tooling is easy to disassemble and assemble, has good testing stability, and is suitable for rapid batch testing of the sealing performance of the steel balls 14 in the valve body 5 in semiconductor equipment.

[0018] Furthermore, frame 1 is a rectangular frame, which provides structural stability.

[0019] like Figures 1-4 As shown, the first adjusting and clamping assembly 2 includes at least one first adjusting bolt 201 and a first clamping washer 202 disposed at one end of the first adjusting bolt 201. The first adjusting bolt 201 is inserted into the upper side of the frame 1. Rotating the first adjusting bolt 201 pushes the first clamping washer 202 downward, clamping the corresponding plug on the upper side of the valve body 5. The first clamping washer 202 can distribute the pressure and avoid damaging the surface of the plug. Specifically, the first clamping washer 202 is square and can clamp multiple plugs simultaneously.

[0020] like Figures 1-4 As shown, the second adjusting and clamping assembly 3 includes at least one second adjusting bolt 301 and a second clamping washer 302 disposed at one end of the second adjusting bolt 301. The second adjusting bolt 301 is inserted into the vertical side of the frame 1. Rotating the second adjusting bolt 301 causes the second clamping washer 302 to move laterally, clamping the lateral plug of the valve body 5, thereby achieving the clamping and positioning of the lateral plug.

[0021] like Figures 1-4 As shown, the valve body 5 has a first upper through hole 501, a second upper through hole 502, a third upper through hole 503, and a fourth upper through hole 504 on its upper side. A first upper sealing plug 6, a second upper sealing plug 7, a third upper sealing plug 8, and a fourth upper sealing plug 9 are respectively inserted into the first upper through hole 501 to the fourth upper through hole 504. The first adjusting and pressing assembly 2 is used to press the first upper sealing plug 6 to the fourth upper sealing plug 9. The first adjusting and pressing assembly 2 applies downward pressure to press the four upper sealing plugs into the corresponding through holes, ensuring that all parts of the upper side of the valve body 5 are sealed and preventing leakage during the air passage test.

[0022] like Figures 1-4 As shown, the valve body 5 has a first side through hole 505 and a second side through hole 506 on its vertical sides, respectively. A first side plug 10 and a second side plug 11 are respectively installed in the first side through hole 505 and the second side through hole 506. The second adjusting and pressing assembly 3 is used to press the first side plug 10, and the second side plug 11 abuts against the inner side of the frame 1. The second adjusting and pressing assembly 3 presses the first side plug 10 from one side, and after the valve body 5 is subjected to force, the second side plug 11 on the other side is tightly attached to the inner wall of the frame 1. The valve body 5 is bidirectionally clamped and positioned, and the valve body 5 will not shift during the test.

[0023] like Figures 1-4 As shown, a bottom through hole 507 is provided on the bottom side of the valve body 5, and a bottom sealing plug 12 is provided in the bottom through hole 507 to achieve the sealing of the bottom through hole 507 of the valve body 5.

[0024] like Figures 1-4 As shown, a bottom gasket 13 is provided between the bottom sealing plug 12 and the inner bottom side of the frame 1. The upper and lower sides of the bottom gasket 13 abut against the bottom sealing plug 12 and the inner bottom side of the frame 1, respectively. The bottom gasket 13 acts as a buffer, dispersing the downward pressure of the valve body 5, improving the sealing effect at the bottom position, and avoiding sealing failure caused by hard contact. Specifically, the bottom gasket 13 is circular.

[0025] like Figures 1-4 As shown, a first mounting hole 101 is provided through the other vertical side of the frame 1, through which an air supply pipe connector 4 and one of the steel balls 14 pass. The air supply pipe connector 4 is inserted into the first mounting hole 101. The first mounting hole 101 can be used to install the air supply pipe connector 4 to connect the air passage 508, and can also be used to install one of the steel balls 14 to be tested, which facilitates the assembly and replacement of the steel ball 14.

[0026] like Figures 1-4 As shown, a second mounting hole 102 is provided through the bottom side of the frame 1 for another steel ball 14 to pass through. The second steel ball 14 to be tested can be inserted into the air passage 508 of the valve body 5 through the second mounting hole 102.

[0027] The above embodiments are merely descriptions for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and any obvious variations or modifications derived therefrom are still within the protection scope of the present invention.

Claims

1. A steel ball sealing performance testing fixture, characterized in that, The device includes a frame, a first adjusting and pressing assembly movably inserted into one side of the frame, a second adjusting and pressing assembly movably inserted into the other side of the frame, and an air pipe connector inserted into another side of the frame. A valve body is detachably disposed within the frame, and multiple plugs are disposed on the outer side of the valve body. The first and second adjusting and pressing assemblies are used to press the corresponding plugs. An air passage is disposed within the valve body, and a steel ball is disposed in the air passage. The air pipe connector is connected to the air passage.

2. The steel ball sealing performance testing fixture according to claim 1, characterized in that, The first adjusting and clamping assembly includes at least one first adjusting bolt and a first clamping washer disposed at one end of the first adjusting bolt. The first adjusting bolt is inserted into the upper side of the frame.

3. The steel ball sealing performance testing fixture according to claim 2, characterized in that, The second adjusting and clamping assembly includes at least one second adjusting bolt and a second clamping washer disposed on one section of the second adjusting bolt. The second adjusting bolt is inserted into the vertical side of the frame.

4. The steel ball sealing performance testing fixture according to claim 1, characterized in that, The valve body has a first upper through hole, a second upper through hole, a third upper through hole and a fourth upper through hole. A first upper sealing plug, a second upper sealing plug, a third upper sealing plug and a fourth upper sealing plug are respectively inserted into the first upper through hole to the fourth upper through hole. The first adjusting and pressing assembly is used to press the first upper sealing plug to the fourth upper sealing plug.

5. The steel ball sealing performance testing fixture according to claim 1, characterized in that, The valve body has a first side through hole and a second side through hole on its vertical sides, and a first side plug and a second side plug are respectively installed in the first side through hole and the second side through hole. The second adjusting and pressing component is used to press the first side plug, and the second side plug abuts against the inner side of the frame.

6. The steel ball sealing performance testing fixture according to claim 1, characterized in that, The valve body has a bottom through hole on its bottom side, and a bottom sealing plug is installed in the bottom through hole.

7. The steel ball sealing performance testing fixture according to claim 6, characterized in that, A bottom gasket is provided between the bottom sealing plug and the bottom side of the frame, and the upper and lower sides of the bottom gasket abut against the bottom sealing plug and the bottom side of the frame, respectively.

8. The steel ball sealing performance testing fixture according to claim 3, characterized in that, The frame has a first mounting hole through which an air supply pipe connector and one steel ball pass, and the air supply pipe connector is inserted into the first mounting hole.

9. The steel ball sealing performance testing fixture according to claim 8, characterized in that, A second mounting hole is provided through the bottom side of the frame to allow another steel ball to pass through.

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