A multi-channel gas monitoring system, method, electronic device, medium, and product

Abstract

The application relates to the technical field of semiconductor detection, and discloses a multi-channel gas monitoring system, a method, an electronic device, a medium and a product. The system comprises a sample injection and ionization module, an ion pre-sorter, a vacuum assembly, at least two parallel analysis channels, a timing and synchronization controller, an electric control module and a signal reconstruction module. The application can synchronously and uninterruptedly collect transient states of at least two characteristic gas species, can physically accumulate and enhance ions of extremely low-concentration species, and can output parallel transient concentration curves of target species, so as to guide the setting of a precursor pulse length, the optimization of a purge timing and the adjustment of a reaction condition in an atomic layer deposition process, and provide real-time concentration data of the target species for closed-loop control.

Description

Technical Field

[0001] This invention relates to the field of semiconductor detection technology, specifically to a multi-channel gas monitoring system, method, electronic device, medium, and product. Background Technology

[0002] In the atomic layer deposition (ALD) process, the reaction between the precursor pulse and the functional groups on the substrate surface is completed within milliseconds to tens of milliseconds, accompanied by the rapid generation and desorption of various gaseous byproducts.

[0003] To accurately control film composition, thickness uniformity, and impurity content, process development and online production urgently require analytical systems capable of synchronous, continuous, and high-temporal-resolution transient monitoring of at least two key gaseous species. However, existing online gas monitoring methods have significant drawbacks: First, it is difficult to achieve truly synchronous, uninterrupted continuous monitoring of more than two target species. Time-sharing acquisition modes are prone to missing or distorting transient key information such as adsorption saturation points and byproduct release peaks, failing to provide complete real-time data for closed-loop control. Second, for some key intermediates or byproducts with extremely low concentrations in atomic layer deposition reactions, existing systems lack effective signal enhancement methods, resulting in only a few or even fewer effective ion counts per cycle, completely submerged in background noise. Finally, large instruments capable of parallel analysis of multiple species (such as time-of-flight mass spectrometers) are bulky, expensive, and have stringent operating environment requirements, making them difficult to integrate as compact online sensors into atomic layer deposition equipment. Summary of the Invention

[0004] This invention provides a multi-channel gas monitoring system, method, electronic device, medium, and product to address the problem that the prior art lacks online analysis methods that can achieve truly synchronous and uninterrupted continuous transient monitoring of at least two target gas species in a compact system architecture, and simultaneously effectively enhance the signal of low-concentration transient species, resulting in the easy omission of key transient information in the process and the difficulty in reliably detecting trace intermediates.

[0005] In a first aspect, the present invention provides a multi-channel gas monitoring system, comprising: A vacuum chamber is used to provide a sealed installation space for the system; Vacuum assembly, connected to a vacuum chamber, is used to evacuate the vacuum chamber to create and maintain a working vacuum environment; The sample introduction and ionization module, located in the vacuum chamber, is used to draw gas samples from the reaction chamber and continuously ionize the gas samples to generate a mixed ion beam containing multiple analyte species. An ion pre-sorter, located in a vacuum chamber, is connected to the ion outlet of the sample introduction and ionization module along the transmission direction of the mixed ion beam. It is used for mass selection and spatial sorting of the mixed ion beam. The ion pre-sorter has a Π-type or T-type topology, including a common entrance section surrounded by multiple circumferentially arranged electrode groups and at least two branch sections branching out from the end of the common entrance section. The electrodes in each branch section are divided into multiple independent segments along the transmission direction of the mixed ion beam. Each segment is electrically isolated from the others by insulating gaps. The last electrode at the end of each branch section is the exit gate electrode segment. The exit gate electrode segment controls the opening and closing of the ion exit channel by applying or removing a DC bias voltage. At least two parallel analysis channels are set in a vacuum chamber and connected to the outlet of each branch section of the ion presorter. Each analysis channel includes a mass analyzer and an ion detector that are fixedly tuned to the corresponding target mass-to-charge ratio. The timing and synchronization controller is located in the vacuum chamber and connected to the main unit of the reaction chamber. The timing and synchronization controller is used to receive external trigger signals and generate synchronization control commands. The electronic control module, located within the vacuum chamber, is connected to the timing and synchronization controller. The electronic control module receives control commands from the timing and synchronization controller and provides power and drive signals to the system; The signal reconstruction module is located in the vacuum chamber and is connected to the signal output terminals of each ion detector. The signal reconstruction module is used to synchronously acquire and process the output signals of each ion detector and output the parallel transient concentration curves of each target species.

[0006] This invention provides a multi-channel gas monitoring system that employs an ion pre-sorter with a Π-type or T-type topology. It utilizes a common entrance segment formed by multiple circumferentially arranged electrode groups and at least two branch segments branching off from the end of the common entrance segment to physically separate a mixed ion beam into different branch segments. Combined with at least two parallel analysis channels connected to the exit of each branch segment, each analysis channel is fixedly tuned to the corresponding target mass-to-charge ratio. This system enables truly synchronous and uninterrupted continuous transient monitoring of at least two target gas species, effectively eliminating the transient critical information blind spots caused by time-division multiplexing. Furthermore, by setting an exit gate electrode segment at the end of the branch segment, the opening and closing of the ion exit channel can be directly controlled by applying or removing a DC bias voltage on the exit gate electrode segment, eliminating the need for additional independent ion... The gate assembly simplifies the system structure, while the ion pre-sorter itself can perform mass selection and spatial sorting of ions during transmission, enabling each parallel analysis channel to continuously lock onto its target mass-to-charge ratio for detection. Ion utilization is higher than in scanning mode, significantly improving system integration and detection efficiency. The timing and synchronization controller is connected to the reaction chamber host and works with the electronic control module to provide unified power and drive signals, ensuring strict synchronization and linkage between the ion pre-sorter's sorting operation, the fixed tuning detection of each analysis channel, and the synchronous acquisition and processing of the signal reconstruction module. The signal reconstruction module synchronously acquires and processes signals from each detector, outputting parallel transient concentration curves for each target species. This provides complete real-time data support for process development and closed-loop control, resolving the lack of multi-species synchronous monitoring and the contradiction between system integration and performance.

[0007] In one alternative implementation, the electrodes of the common entry segment are not segmented and are driven as a whole. A radio frequency voltage is applied to the common entry segment to constrain and stably transport ions within a preset mass number range. Each branch segment is equipped with a branch deflection segment. By applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes of the branch deflection segment, ions with different mass-to-charge ratios are selectively deflected, allowing different target ions to enter different branch segments.

[0008] In the above technical solution, the electrodes of the common entrance section adopt an integral driving method without segmentation, and an radio frequency voltage is applied to them. This simplifies the structure and enables stable constraint and efficient transmission of ions within a preset mass number range, ensuring that the mixed ion beam has excellent transmission efficiency before entering the branch. The branch deflection sections set in each branch section apply differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes, which can selectively deflect different ions based on the mass-to-charge ratio difference. This allows different target ions to enter the corresponding branch sections as needed, realizing the integrated mass selection and spatial sorting without the need for additional deflection or gating components, resulting in a more compact structure.

[0009] In one alternative implementation, the exit gate electrode segment is subjected to a controllable DC bias superimposed on the radio frequency voltage via a bias circuit. In continuous monitoring mode, the DC bias is maintained at a low potential that matches the inlet of the mass analyzer, and the target ions continuously enter the analysis channel through the outlet. In the cumulative trapping mode, during the duration of a single reaction pulse, the exit gate electrode segment repeatedly switches the DC bias at a preset frequency. In each switching cycle, the exit gate electrode segment is applied a positive barrier voltage for the first duration to close the exit, allowing the target ions to accumulate in the branch segment. In the second duration, it is switched to a low potential to open the exit, allowing the accumulated ion pack to be released in the form of a narrow pulse. The first duration is longer than the second duration.

[0010] In the above technical solution, the outlet gate electrode section uses a bias circuit to superimpose a controllable DC bias onto the radio frequency voltage. The opening and closing control of the ion export channel can be achieved simply by adjusting the potential of this DC bias, eliminating the need for an additional independent ion gate component, simplifying the system structure and reducing ion loss. In continuous monitoring mode, a low potential matching the mass analyzer inlet is maintained to allow target ions to pass continuously, meeting the real-time monitoring requirements of conventional concentration species. In cumulative trapping mode, the DC bias is repeatedly switched at a preset frequency during the duration of a single reaction pulse. During each switching cycle, a positive barrier voltage is applied to close the outlet during the first duration, allowing target ions to accumulate in the branch section. Then, during the second duration, the voltage is switched to a low potential to release the accumulated ion pack in the form of a narrow pulse. The first duration is longer than the second duration, enabling flexible switching between two working modes of the same electrode structure. This ensures the continuity of conventional monitoring and significantly improves the detection sensitivity of trace species through signal accumulation and pulse release mechanisms, while avoiding ion loss during accumulation.

[0011] The first duration is the ion accumulation phase, during which a positive barrier voltage is applied to the gate electrode to close the exit. This phase aims to accumulate as many target ions as possible while ensuring effective ion trapping, thereby enhancing signal strength. The timescale for ion accumulation in radio frequency ion traps (such as quadrupole ion traps and linear ion traps) ranges from 0.5 ms to 5 ms.

[0012] The second duration is the ion release phase, during which the gate electrode switches to a low potential to open the exit. During this phase, the accumulated ions need to be released rapidly in narrow pulses to ensure time resolution and instantaneous signal strength; the timing is from 0.05 ms to 0.5 ms.

[0013] In one optional implementation, the sample introduction and ionization module includes a sampling interface and an ion source connected to the gas outlet end of the sampling interface along the gas flow direction. The sampling interface is used to draw gas samples from the reaction chamber and serves as a flow-limiting element for the system; The ion source is used to continuously ionize gas samples to generate a mixed ion beam containing multiple analyte species.

[0014] In the above technical solution, the sampling interface directly serves as the flow-limiting element of the system. It not only extracts gas from the reaction chamber but also limits the gas flow rate into the ion source through its own flow-limiting characteristics. This eliminates the need for additional flow-limiting structures, simplifies the sample introduction structure, and reduces system complexity. At the same time, the sampling interface is connected to the ion source along the gas flow direction. The ion source continuously ionizes the gas sample, generating a mixed ion beam containing multiple analytes for downstream processing. This avoids the loss of transient information caused by intermittent ionization and ensures the continuity and accuracy of subsequent quality analysis and transient concentration curve reconstruction.

[0015] In one optional implementation, a temperature-controlled heating jacket is fitted over the sampling interface to heat the sampling interface and prevent the gas sample from condensing or adsorbing during transmission; the power supply and temperature control of the heating jacket are managed by an electronic control module.

[0016] In the above technical solution, a temperature-controlled heating jacket is fitted around the sampling interface. Heating prevents condensation or adsorption of the gas sample during transmission, ensuring that the composition of the gas sample introduced into the ion source is consistent with the actual gas composition in the reaction chamber. This avoids concentration measurement deviations and memory effects caused by sample loss, and improves the response speed and data accuracy of transient monitoring. At the same time, the power supply and temperature control of the heating jacket are uniformly managed by the electronic control module, realizing precise control of the sampling interface temperature without the need for an additional independent temperature control device. This further improves the system integration and ensures the stability and repeatability of monitoring results during long-term operation.

[0017] In one alternative implementation, the vacuum assembly includes a turbomolecular pump and a backing pump; the sample introduction and ionization module and the ion pre-sorter are connected by a continuous channel, and a vacuum gradient is formed between the ion source region and the downstream region by relying on the flow conduction limitation of the sampling interface and the matching of the turbomolecular pump pumping speed; the downstream region includes a pre-sorting region and an analysis channel region.

[0018] In the above technical solution, the sample introduction and ionization module and the ion pre-sorter are connected by a continuous channel without additional flow-limiting baffles. Relying on the flow-limiting function of the sampling interface itself and the matching of the turbomolecular pump speed, the required vacuum gradient can be naturally formed between the ion source region and the downstream region. This ensures that the ion source region has a high working pressure to maintain ionization efficiency, while keeping the downstream pre-sorting region and analysis channel region at a lower vacuum level to meet the requirements of stable ion transport and quality analysis. This eliminates the need for additional vacuum baffles or differential pumping structures, simplifies the system structure, reduces ion loss in the transport path, and improves ion transport efficiency. At the same time, the combination of the turbomolecular pump and the backing pump provides a stable and reliable multi-stage vacuum environment for the entire system, ensuring the smooth flow of ions from generation, sorting to detection.

[0019] In one alternative embodiment, the ion source includes a filament, an ionization chamber, and an ion extraction lens assembly; The walls of the ionization chamber have electron injection holes, gas introduction holes, and ion extraction holes. The filament is used to emit electrons. The electrons enter the ionization chamber through the electron entrance hole and collide with the gas sample in the ionization chamber to ionize it. The ionization chamber is used to receive gas samples from the sampling interface. Electrons collide with the gas sample in the ionization chamber and ionize, producing ions. The ion extraction lens group is used to receive ions extracted through the ion extraction aperture and to accelerate, focus, and extract the ions.

[0020] In the above technical solution, the filament is located outside the ionization chamber. Electrons enter the ionization chamber through electron entrance holes on the ionization chamber wall and collide with the gas sample to ionize it. The filament is isolated from the reactant gas, thus extending its service life. The ionization chamber receives the gas sample from the sampling interface through a gas inlet hole and achieves closed-loop ionization, allowing the gas sample to fully collide with electrons in a sealed space. The ionization efficiency is higher than that of an open structure. The generated ions are led out through ion extraction holes on the ionization chamber wall and enter the ion extraction lens group. The ion extraction lens group accelerates, focuses, and extracts the ions, ensuring that the mixed ion beam enters the downstream ion pre-sorter with high transmission efficiency, providing a sufficient number of ions for subsequent quality selection and spatial sorting.

[0021] In one alternative implementation, the mass analyzer is a quadrupole mass analyzer, pre-tuned to a corresponding target mass-to-charge ratio, for mass filtering of the introduced ions.

[0022] In the above technical solution, the mass analyzer adopts a quadrupole mass analyzer. Leveraging the compact structure, fast response speed, and high stability of the quadrupole mass analyzer, it is suitable for online monitoring applications. Each mass analyzer is pre-tuned to its corresponding target mass-to-charge ratio, maintaining this mass number throughout the monitoring process. This eliminates the need for scanning and switching between multiple mass numbers, thus avoiding ion waste during non-target mass number periods in the scanning mode and maximizing the utilization rate of target ions. Furthermore, in conjunction with the ion pre-sorter that introduces different target ions into different analysis channels, simultaneous and continuous detection of multiple target species can be achieved, further enhancing the system's temporal resolution and multi-species parallel monitoring capabilities, and avoiding the loss of transient information that may occur during scanning.

[0023] In one alternative implementation, the timing and synchronization controller includes: An external trigger input interface is connected to the host of the reaction chamber to receive cyclic trigger signals from the host of the reaction chamber. The timing generation unit is connected to the electronic control module and is used to generate various control commands and send them to the electronic control module. The RF parameter control output is connected to the electronic control module for real-time setting and adjustment of the RF parameters of the ion pre-sorter and the tuning parameters of each mass analyzer. The output terminal of the exit gate control is connected to the electronic control module, and is used to successively change the delay time of the starting phase of the gate pulse sequence of each exit gate electrode segment relative to the cyclic trigger signal in the cumulative trapping mode, so as to control the switching of the DC bias voltage of each exit gate electrode segment; and The acquisition synchronization output terminal is connected to the signal reconstruction module and is used to output the acquisition trigger signal and gating signal that are synchronized with the cyclic trigger signal.

[0024] In the above technical solution, the timing and synchronization controller is connected to the main unit of the reaction chamber through an external trigger input interface, receiving cyclic trigger signals from the main unit of the reaction chamber to ensure that the entire monitoring system is strictly synchronized with the process cycle of the reaction chamber, ensuring that each monitoring action accurately corresponds to the start and end times of the reaction pulse; the timing generation unit is connected to the electronic control module to generate various control commands and send them to the electronic control module, which then executes each power output in a unified manner, realizing the separation of control logic and power execution; the radio frequency parameter control output terminal can set and adjust the radio frequency parameters of the ion pre-sorter and the tuning parameters of each mass analyzer in real time, so that the quality selection conditions of the pre-sorter and the detection targets of the analysis channels switch synchronously with the reaction pulse or remain locked. This ensures that each channel always operates at the optimal detection state for the corresponding target species. In the cumulative trapping mode, the output of the exit gate control can successively change the delay time of the starting phase of the gate pulse sequence of each exit gate electrode segment relative to the cyclic trigger signal, thereby controlling the switching of the DC bias voltage of the exit gate electrode segment. This enables step-delay sampling across multiple time windows within a single reaction pulse cycle. The acquisition synchronization output terminal outputs acquisition trigger signals and gate signals synchronized with the cyclic trigger signal to the signal reconstruction module, ensuring that the acquisition time of the ion signals in each channel precisely corresponds to the reaction cycle. This facilitates subsequent folding, alignment, and cumulative averaging of the data according to the reaction cycle, improving the time accuracy and data reliability of transient concentration curve reconstruction.

[0025] In one alternative implementation, the electronic control module includes: The power management unit is connected to an external AC power source to provide a stable DC voltage for all components of the system. Vacuum control unit, connected to the vacuum assembly, is used to drive and control the vacuum assembly; The ion source power supply unit is connected to the ion source and is used to provide the ion source filament current, electron energy acceleration voltage and ion extraction lens group voltage. The detector power supply unit is connected to each ion detector and is used to provide power to each ion detector. The RF and DC power supply unit, including a multi-channel direct digital frequency synthesizer, multiple broadband RF power amplifiers, multiple DC blocking capacitors, and multiple bias circuits, is connected to the ion pre-sorter and each quality analyzer. It generates multiple RF signals with independently adjustable frequency, amplitude, and phase, superimposes independent DC bias voltages on the electrodes of each branch segment, and drives each quality analyzer; and The communication interface unit is used to exchange data with the host computer or the host computer in the reaction chamber.

[0026] In the above technical solution, the electronic control module draws power from an external AC power source through the power management unit and provides a stable DC voltage to each component of the system, realizing centralized management and unified distribution of the power supply for the entire machine. This eliminates the need for separate power supply devices for each component, simplifying the system's power supply architecture. The vacuum control unit is directly connected to the vacuum assembly, enabling centralized drive and control of the vacuum assembly without the need for an external independent controller. The ion source power supply unit is connected to the ion source, centrally providing filament current, electron energy accelerating voltage, and ion extraction lens group voltage, ensuring that each electrode of the ion source is at a precise operating potential. The detector power supply unit is connected to each ion detector, providing an independent power supply to each detector and ensuring independent and stable operation of each channel detector. The RF and DC power supply unit uses multi-channel direct digital... The frequency synthesizer, multiple broadband RF power amplifiers, multiple DC blocking capacitors, and multiple bias circuits are connected to the ion pre-sorter and each mass analyzer. This allows for the generation of multiple RF signals with independently adjustable frequency, amplitude, and phase, and the superposition of independent DC bias voltages on the electrodes of each branch segment. This enables independent and precise control of the RF parameters and DC bias of multiple electrode segments, while simultaneously driving each mass analyzer. This ensures that the RF parameters of each branch segment of the pre-sorter and the analysis channel can be independently adjusted as needed without interference. The communication interface unit enables data exchange with the host computer or the reaction chamber main unit, allowing the system to receive external parameter settings and provide feedback on operating status. This achieves integrated control of power execution, signal generation, and data interaction, improving the overall anti-interference capability and maintainability of the system.

[0027] In one alternative implementation, the signal reconstruction module includes: The multi-channel synchronous acquisition card contains multiple independent counting sampling channels and analog sampling channels, which are respectively connected to the signal output terminals of each ion detector. It is used to synchronously sample the ion signals of each channel under the control of the acquisition synchronization signal of the timing and synchronization controller, obtain the sampling data at each sampling time, and assign time stamps to the sampling data. A data buffer and storage unit, connected to a multi-channel synchronous acquisition card, is used to cache and store the acquired raw data; and The signal processing and reconstruction unit, connected to the data buffer and storage unit, is used to read the sampled data, fold and align the sampled data according to the reaction cycle, accumulate and average the count rate at the same time offset position in multiple reaction cycles, divide the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative cycle number to restore the single-cycle equivalent intensity, output the complete transient concentration curve of each target species in the reaction pulse cycle, and calculate the adsorption half-saturation time and adsorption rate constant.

[0028] In the above technical solution, the multi-channel synchronous acquisition card, comprising multiple independent counting and analog sampling channels, is connected to the signal output terminals of each ion detector. Under the control of the acquisition synchronization signal of the timing and synchronization controller, it synchronously samples the ion signals of each channel, obtains the sampling data at each sampling moment, and assigns time stamps to the sampling data, ensuring precise alignment of the acquisition moments of each channel and avoiding time deviations caused by asynchronous acquisition between channels. This provides a data foundation for the accurate reconstruction of the transient curves of each target species. The data buffer and storage unit is connected to the multi-channel synchronous acquisition card to cache and store the acquired raw data, preventing data loss caused by mismatch between acquisition and processing speeds. The signal processing and reconstruction unit is connected to the data buffer... The system uses a pulse and storage unit to read sampled data and then folds and aligns the data according to the reaction cycle. It accumulates and averages the count rates at the same time offset position across multiple reaction cycles, significantly suppressing random noise interference and effectively improving the signal-to-noise ratio. Simultaneously, it divides the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative cycle number to restore the equivalent intensity for a single cycle. This allows the signal intensity enhanced by ion accumulation to be output in single-cycle equivalent form, ensuring clear physical meaning and quantitative accuracy of the concentration values. Finally, it outputs complete transient concentration curves of each target species within the reaction pulse cycle and calculates the adsorption half-saturation time and adsorption rate constant, providing quantitative data support for the mechanism study and parameter optimization of atomic layer deposition technology.

[0029] In a second aspect, the present invention provides a multi-channel gas monitoring method, applied to a multi-channel gas monitoring system of the first aspect or any corresponding embodiment thereof, the method comprising: A gas sample is drawn from the reaction chamber and ionized to generate a mixed ion beam containing multiple analyte species. The mixed ion beam is introduced into the common entrance section of the ion pre-sorter and transmitted to the end of the common entrance section under the constraint of the radio frequency field. At the end of the common entrance segment, by applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch segment, ions with different mass-to-charge ratios enter different branch segments respectively; The target ions in each branch segment are exported to the corresponding analysis channel via the outlet gate electrode segment; The target ions are mass filtered by the mass analyzer in each analysis channel, and the ion intensity signal is recorded by the corresponding ion detector. The output signals of each ion detector are synchronously acquired and processed to output parallel transient concentration curves of each target species.

[0030] This invention provides a multi-channel gas monitoring method. A gas sample is drawn from a reaction chamber and ionized to generate a mixed ion beam. This mixed ion beam is then introduced into the common entrance section of an ion pre-sorter and transmitted under radio frequency field constraint. At the end of the common entrance section, differentiated radio frequency amplitudes and / or superimposed DC biases are applied to the electrodes in each branch section, allowing ions with different mass-to-charge ratios to enter different branch sections respectively. This achieves physical separation and parallel extraction of different target ions in the mixed ion beam. The ions then enter their corresponding analysis channels via the exit gate electrode section. A fixed-tuned mass analyzer performs mass filtering, and the signals are recorded by ion detectors. This achieves truly synchronous continuous transient monitoring of multiple target species, avoiding critical transient information blind spots caused by time-division acquisition. By synchronously acquiring and processing the output signals of each ion detector and outputting parallel transient concentration curves for each target species, the method can fully present the concentration changes of each target species throughout the entire reaction pulse cycle, providing comprehensive real-time data support for process research and closed-loop control, effectively solving the technical problem of missing synchronous monitoring of multiple species.

[0031] In one optional implementation, the target ions within each branch segment are exported to the corresponding analytical channel via the outlet-gated electrode segment, including: When the transient concentration of the target species is lower than a preset threshold, the exit gate electrode segment of the corresponding branch segment is configured to accumulate trapping mode. During the duration of a single reaction pulse, the DC bias of the exit gate electrode segment is repeatedly switched at a preset frequency: in each cycle, a positive barrier voltage is applied to close the exit during the first duration to allow the target ions to accumulate in the branch segment; during the second duration, the voltage is switched to a low potential to open the exit and release the accumulated ion pack in the form of a narrow pulse to obtain an enhanced ion pulse signal. The first duration is longer than the second duration.

[0032] In one optional implementation, the output signals of each ion detector are synchronously acquired and processed to output parallel transient concentration curves of each target species, including: For data acquired using the cumulative trapping mode, enhanced pulse data within the corresponding time window are acquired by successively changing the delay time of the starting phase of the gate pulse sequence of each exit gate electrode segment relative to the reaction trigger signal. The pulse data at each delay point are then spliced ​​and normalized to obtain a complete parallel transient concentration curve of the target species.

[0033] In one optional implementation, the output signals of each ion detector are synchronously acquired and processed to output parallel transient concentration curves of each target species, and the method further includes: The collected data is folded and aligned according to the reaction cycle. The count rate at the same time offset position is accumulated and averaged in multiple reaction cycles. The integral intensity of the release pulse collected in the cumulative trapping mode is divided by the cumulative number of cycles to restore the equivalent intensity of a single cycle. The complete parallel transient concentration curve of each target species in the reaction pulse cycle is output, and the adsorption half-saturation time and adsorption rate constant are calculated.

[0034] Thirdly, the present invention provides an electronic device, comprising: a memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes the computer instructions to perform the multi-channel gas monitoring method described in the second aspect or any corresponding embodiment thereof.

[0035] Fourthly, the present invention provides a computer-readable storage medium storing computer instructions for causing a computer to perform the multi-channel gas monitoring method described in the second aspect or any corresponding embodiment thereof.

[0036] Fifthly, the present invention provides a computer program product, including computer instructions for causing a computer to execute the multi-channel gas monitoring method described in the second aspect or any corresponding embodiment thereof.

[0037] To address the lack of existing technologies that can achieve truly synchronous, uninterrupted, and continuous transient monitoring of at least two target gas species within a compact system architecture, while simultaneously providing effective signal enhancement for low-concentration transient species, leading to the easy omission of critical transient information and the difficulty in reliably detecting trace intermediates, this invention provides a multi-channel gas monitoring system with the following advantages: This invention generates a mixed ion beam containing multiple analyte species by drawing a gas sample from a reaction chamber and continuously ionizing it with an ion source, providing a stable, continuous, and component-complete ion source for downstream detection.

[0038] By coordinating the turbomolecular pump and the backing pump in the vacuum assembly, and by utilizing the flow conductance limitation of the sampling interface itself and the matching of the turbomolecular pump pumping speed, a vacuum gradient is naturally formed between the ion source region and the downstream region. This maintains a high working pressure in the ion source region to ensure ionization efficiency, while keeping the downstream pre-sorting region and analysis channel region at a lower vacuum level to meet the requirements of stable ion transport and quality analysis.

[0039] By introducing the mixed ion beam into the common entrance section of the ion presorter and transmitting it under the constraint of the radio frequency field, and applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch section, ions with different mass-to-charge ratios enter different branch sections respectively, thereby physically separating different target ions in the mixed ion beam according to their mass-to-charge ratio and outputting them in parallel.

[0040] By setting an exit gate electrode segment at the end of the branch segment and applying or removing a DC bias voltage to it to control the opening and closing of the ion export channel, a low potential is maintained in the continuous monitoring mode to allow target ions to continuously pass through into the analysis channel, achieving the effect of continuous real-time monitoring of species of conventional concentrations. In the cumulative trapping mode, the DC bias is repeatedly switched at a preset frequency, and a positive barrier voltage is applied for the first duration to allow target ions to accumulate in the branch segment. In the second duration, the potential is switched to low to release the accumulated ion pack in the form of a narrow pulse, which enhances the signal accumulation of low-concentration transient species and improves the detection sensitivity.

[0041] By introducing the separated target ions into their respective analysis channels and using a quadrupole mass analyzer pre-tuned to the corresponding target mass-to-charge ratio for mass filtering, and in conjunction with an ion detector to record the ion intensity signal, each channel synchronously and continuously locks onto its respective target species for detection, thus avoiding ion waste and time information loss in the scanning mode.

[0042] The timing and synchronization controller receives the cyclic trigger signal from the main unit of the reaction chamber and generates synchronization control commands. The electronic control module uniformly executes the radio frequency parameter adjustment, DC bias switching and power supply, so that the control logic and power execution are separated and the timing of each component is precisely synchronized.

[0043] The signal reconstruction module synchronously acquires the output signals of each ion detector, folds, aligns, and averages the sampled data according to the reaction cycle, and restores the single-cycle equivalent intensity by dividing the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative cycle number. This can suppress random noise, improve the signal-to-noise ratio, output complete transient concentration curves of each target species, calculate the adsorption half-saturation time and adsorption rate constant, and provide quantitative data support for the optimization of atomic layer deposition process parameters.

[0044] By integrating the mass sorting, spatial sorting, and ion gating functions of the ion pre-sorter with the ion gating electrode section at the outlet into a single component, a separate ion gating assembly is eliminated. The sampling interface also functions as a flow-limiting element, naturally forming a vacuum gradient with the vacuum assembly, eliminating the need for an additional vacuum partition. The overall structure is compact and suitable for integration into production-grade atomic layer deposition systems. Based on this structure, this invention can achieve truly synchronous, uninterrupted continuous transient monitoring of at least two target gas species, and enhance the signal through ion accumulation and pulsed release of low-concentration transient species. Attached Figure Description

[0045] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0046] Figure 1 This is a structural block diagram of a multi-channel gas monitoring system according to an embodiment of the present invention; Figure 2 This is a structural block diagram of the sample introduction and ionization module according to an embodiment of the present invention; Figure 3 This is a structural block diagram of the ion pre-sorter according to an embodiment of the present invention; Figure 4 This is a structural block diagram of the vacuum assembly according to an embodiment of the present invention; Figure 5 This is a structural block diagram of at least two parallel analysis channels according to an embodiment of the present invention; Figure 6 This is a structural block diagram of the timing and synchronization controller according to an embodiment of the present invention; Figure 7 This is a structural block diagram of the electronic control module according to an embodiment of the present invention; Figure 8 This is a structural block diagram of the signal reconstruction module according to an embodiment of the present invention; Figure 9 This is a schematic diagram of an embodiment of the present invention for monitoring the TMA (Trimethylaluminium) / H2O (water) atomic layer deposition process; Figure 10 This is a schematic diagram of the first process of the multi-channel gas monitoring method according to an embodiment of the present invention; Figure 11 This is a schematic diagram of the second process of the multi-channel gas monitoring method according to an embodiment of the present invention; Figure 12 This is a schematic diagram of the hardware structure of an electronic device according to an embodiment of the present invention. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0048] It is understood that before using the technical solutions disclosed in the various embodiments of the present invention, users should be informed of the types, scope of use, and usage scenarios of the personal information involved in the present invention and their authorization should be obtained in accordance with relevant laws and regulations through appropriate means.

[0049] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0050] To address the problem that related technologies cannot simultaneously achieve parallel continuous transient monitoring of multiple species and high-sensitivity trace detection within a compact system architecture, this invention provides a multi-channel gas monitoring system. This system should be able to perform synchronous, uninterrupted transient acquisition of at least two characteristic gas species and can perform physical ion accumulation enhancement for species with extremely low concentrations, thereby providing real-time concentration data of each target species for atomic layer deposition process research and real-time control.

[0051] This embodiment provides a multi-channel gas monitoring system, such as Figure 1 As shown, the system is a vacuum chamber structure, including: a sample introduction and ionization module 100, an ion pre-sorter 200, at least two parallel analysis channels 400, a timing and synchronization controller 500, an electrical control module 600, and a signal reconstruction module 700, as well as a vacuum assembly 300 connected to the vacuum chamber, wherein: A vacuum chamber is used to provide a sealed installation space for the system.

[0052] Specifically, the vacuum chamber is a sealed metal container made of stainless steel, possessing excellent mechanical strength and corrosion resistance. The interior of the vacuum chamber forms a closed containment space, within which the sample introduction and ionization module 100, the ion pre-sorter 200, and at least two analytical channels 400 are installed. An evacuation port is provided on the wall of the vacuum chamber, through which the vacuum assembly 300 communicates with the interior of the vacuum chamber to evacuate the interior and create and maintain a working vacuum environment. No additional flow-limiting baffles are placed between the ion source region and the pre-sorting region and analytical channel region within the vacuum chamber, forming a continuous ion transport channel. This ensures that the mixed ion beam is transported unimpeded from the ion source through the ion pre-sorter 200 to each analytical channel 400 under vacuum conditions. The vacuum chamber employs a metal-sealed structure, with seals ensuring the vacuum level within the chamber.

[0053] Vacuum assembly 300 is connected to a vacuum chamber and is used to evacuate the vacuum chamber to create and maintain a working vacuum environment.

[0054] Specifically, the vacuum assembly 300 is connected to the vacuum chamber and is used to evacuate the interior of the vacuum chamber to create and maintain the working vacuum environment required for the normal operation of the system. By continuously evacuating the vacuum chamber, the vacuum assembly 300 reduces the gas molecule density inside the chamber to a pressure range that meets the requirements for ion generation, transport, and mass analysis. Simultaneously, in conjunction with the flow conductance limitation of the sampling interface itself, a necessary vacuum gradient is naturally formed between the ion source region and the downstream region. The ion source region maintains a higher working pressure to ensure ionization efficiency, while the pre-sorting region and the analysis channel region maintain lower pressures to meet the requirements for stable ion transport and mass analysis. The evacuation function of the vacuum assembly 300 ensures that the sample introduction and ionization module, the ion pre-sorter, and each analysis channel can operate normally at their respective required vacuum levels, providing vacuum assurance for the entire process of mixed ion beam generation, sorting, and detection.

[0055] The sample introduction and ionization module 100 is located in a vacuum chamber and is used to draw gas samples from the reaction chamber and continuously ionize the gas samples to generate a mixed ion beam containing multiple analyte species.

[0056] Specifically, the sample introduction and ionization module 100 is located in the vacuum chamber and is used to draw gas samples from the reaction chamber and continuously ionize the drawn gas samples to generate a mixed ion beam containing multiple analyte species. The sample introduction end of the sample introduction and ionization module 100 is connected to the reaction chamber 800. Through its own flow conduction limitation, it introduces the gas sample from the reaction chamber into the vacuum chamber at an extremely low flow rate, while continuously ionizing the introduced gas sample, converting the neutral molecules in the gas sample into ions, forming a mixed ion beam containing multiple analyte species ions and fragment ions, which is then used by the downstream ion pre-sorter 200 for mass selection and spatial sorting. The continuous ionization method of the sample introduction and ionization module 100 ensures the temporal continuity of the mixed ion beam, enabling the system to respond in real time to changes in the gas composition in the reaction chamber, providing a stable and uninterrupted ion source for the synchronous and continuous detection of subsequent analysis channels 400. The reaction chamber 800 is an atomic layer deposition reaction chamber.

[0057] An ion pre-sorter 200, disposed in a vacuum chamber, is connected to the ion outlet of the sample introduction and ionization module along the transmission direction of the mixed ion beam. It is used for mass selection and spatial sorting of the mixed ion beam. The ion pre-sorter has a Π-type or T-type topology, including a common entrance section surrounded by multiple circumferentially arranged electrode groups and at least two branch sections branching out from the end of the common entrance section. The electrodes in each branch section are divided into multiple independent segments along the transmission direction of the mixed ion beam. Each segment is electrically isolated from the others by insulating gaps. The last electrode at the end of each branch section is the exit gate electrode segment. The exit gate electrode segment controls the opening and closing of the ion exit channel by applying or removing a DC bias voltage on the exit gate electrode segment.

[0058] Specifically, the ion pre-sorter 200 is disposed in the vacuum chamber and connected to the ion outlet end of the sample introduction and ionization module 100 along the transmission direction of the mixed ion beam. It is used to perform mass selection and spatial sorting of the mixed ion beam generated by the sample introduction and ionization module 100. The ion presorter 200 has a Π-shaped or T-shaped topology, including a common entrance section surrounded by multiple circumferentially arranged electrode groups and at least two branch sections branching out from the end of the common entrance section. The common entrance section is connected to the ion outlet of the sample introduction and ionization module 100 and is used to receive the mixed ion beam and stably transmit the mixed ion beam to the branch sections under the constraint of the radio frequency electric field. Each branch section is connected to the end of the common entrance section and is used to receive the corresponding target ions after quality selection. The electrodes in each branch section are divided into multiple independent segments along the transmission direction of the mixed ion beam. Each segment is electrically isolated by an insulating gap, so that different electrical parameters can be applied to different segments to achieve independent control of ion transmission. The last electrode at the end of each branch section is the outlet gate electrode segment. By applying or removing a DC bias voltage to the outlet gate electrode segment, the opening and closing of the ion exit channel of the branch segment is controlled, thereby achieving independent on / off control of the ion beam current exited by each branch segment. The ion pre-sorter 200 uses the above structure to guide target ions with different mass-to-charge ratios in the mixed ion beam to different branch segments, realizing the separation and parallel output of different target ions in physical space, and providing ion sources separated by mass-to-charge ratio for synchronous detection of each analysis channel 400.

[0059] It should be noted that the electrodes within each branch segment are also divided into multiple independent segments (N segments, N≥2) along the ion transport direction (axial direction of each branch), and the segments are electrically isolated by insulating gaps. The electrode of the common entrance segment 210A is preferably driven as a whole (without segmentation) to simplify the RF coupling structure and ensure the continuity of the entrance segment field shape. All electrodes are preferably made of 304 stainless steel with gold plating to reduce contact potential difference and adsorption. The last electrode segment at the end of each branch segment is the exit gate electrode segment, which has both ion export and gate functions: by controlling the DC bias voltage applied to this segment electrode, it can switch between continuous monitoring mode (normally open low potential) and cumulative trapping mode (applied positive barrier potential to close, low potential restored upon release), thus eliminating the need for an additional independent ion gate assembly.

[0060] At least two parallel analysis channels 400 are located in a vacuum chamber and are connected to the outlets of each branch section of the ion presorter. Each analysis channel includes a mass analyzer and an ion detector that are fixedly tuned to the corresponding target mass-to-charge ratio.

[0061] Specifically, at least two parallel analysis channels 400 are disposed in a vacuum chamber and connected to the outlets of each branch segment of the ion pre-sorter 200. Each analysis channel 400 includes a mass analyzer and an ion detector fixedly tuned to the corresponding target mass-to-charge ratio, used for parallel detection of target ions exported from each branch segment of the ion pre-sorter 200. The mass analyzer in each analysis channel 400 is pre-tuned to its corresponding target mass-to-charge ratio and remains locked at that target mass-to-charge ratio throughout the monitoring process without scanning. It is used to receive ions exported from the corresponding branch segment and perform mass filtering on the received ions, allowing only ions with the corresponding target mass-to-charge ratio to pass through. The ion detector in each analysis channel 400 is connected to the outlet of the corresponding mass analyzer and is used to receive the target ions filtered by the mass analyzer and convert the received target ions into a recordable ion intensity signal for output. At least two parallel analysis channels 400 are connected one-to-one with each branch segment of the ion pre-sorter 200. With the fixed tuning mode of each channel mass analyzer, based on the separation of different target ions by mass-to-charge ratio by the ion pre-sorter 200 and their introduction into different branch segments, each channel can perform synchronous and parallel continuous detection of its corresponding target ions in a continuous duty cycle manner. This avoids the waste of ions and loss of time information during non-target mass number time periods in the time-division scanning mode. With the synchronous acquisition and processing of the output signals of the ion detectors of each channel by the signal reconstruction module 700, parallel transient concentration curves of each target species are output.

[0062] The timing and synchronization controller 500 is located in the vacuum chamber and connected to the main unit of the reaction chamber 800. The timing and synchronization controller 500 is used to receive external trigger signals and generate synchronization control commands.

[0063] Specifically, the timing and synchronization controller 500 is located in the vacuum chamber and connected to the main unit of the reaction chamber 800. It receives the cyclic trigger signal from the main unit of the reaction chamber and generates synchronization control commands accordingly. The timing and synchronization controller 500 obtains the cyclic trigger signal from the main unit of the reaction chamber through an external trigger input interface. This signal accurately marks the start time of each reaction pulse in the reaction chamber 800, ensuring that the timing of all operations of the entire monitoring system is strictly synchronized with the process cycle of the reaction chamber 800. The timing and synchronization controller 500 is implemented internally based on programmable logic devices. It generates multiple synchronization control commands based on the received cyclic trigger signals and sends them to the electronic control module 600 to control the switching of radio frequency parameters of each branch electrode of the ion presorter 200, the switching of DC bias of each exit gate electrode segment, the maintenance of the fixed tuning state of each mass analyzer, and the activation of the acquisition action of the signal reconstruction module 700. This ensures that the transmission, mass selection, spatial sorting, exit gate switching, and signal acquisition of the mixed ion beam are precisely synchronized with the cyclic trigger signals of the reaction chamber 800, enabling the system to continuously capture and record the changes in target species concentration during each reaction pulse in the reaction chamber 800 with millisecond-level time resolution.

[0064] The electronic control module 600 is located in the vacuum chamber and is connected to the timing and synchronization controller 500. The electronic control module 600 is used to receive control commands from the timing and synchronization controller and provide power and drive signals to the system.

[0065] Specifically, the electronic control module 600 is located in the vacuum chamber and connected to the timing and synchronization controller 500. It receives control commands from the timing and synchronization controller 500 and provides power and drive signals to the system. As the power execution layer of the system, the electronic control module 600 integrates multiple independent power generation and signal driving units, which are respectively connected to the sample introduction and ionization module 100, the ion pre-sorter 200, the mass analyzers and ion detectors of each analysis channel 400, and the vacuum assembly 300. The electronic control module 600 receives control commands from the timing and synchronization controller 500 and converts these commands into analog voltage, current, or radio frequency power outputs required by the corresponding components. It provides the sample introduction and ionization module 100 with filament current, electron energy acceleration voltage, and ion extraction lens group voltage to maintain its continuous ionization operation. It provides the ion pre-sorter 200 with multiple independently adjustable radio frequency signals in terms of frequency, amplitude, and phase, as well as the DC bias voltage required by the electrodes in each branch segment to achieve mass selection and spatial sorting. It provides the mass analyzers of each analysis channel 400 with radio frequency drive voltage and DC bias voltage corresponding to the target mass-to-charge ratio to maintain their fixed tuning state. It provides a stable high-voltage power supply to each ion detector to ensure its response sensitivity to target ions and provides a drive signal to the vacuum assembly 300 to maintain the stability of the system vacuum environment. The electrical control module 600 enables the physical execution of each control command of the timing and synchronization controller 500 through the independent output and precise control of the aforementioned multiple power supplies and drive signals. This ensures that each component of the system always operates under its required electrical parameters, providing reliable power assurance for the long-term stable operation of the entire monitoring system.

[0066] The signal reconstruction module 700 is located in the vacuum chamber and is connected to the signal output terminals of each ion detector. The signal reconstruction module 700 is used to synchronously acquire and process the output signals of each ion detector and output the parallel transient concentration curves of each target species.

[0067] Specifically, during the synchronous detection process of each analysis channel 400, the signal reconstruction module 700 maintains synchronous linkage with the timing and synchronization controller 500. Under the control of the acquisition synchronization signal, it synchronously acquires the output signals of each ion detector, converting the ion intensity signals of each channel into digital sampling data. This ensures that the acquisition time of each channel's data is precisely aligned, avoiding time deviations caused by asynchronous acquisition between channels. The signal reconstruction module 700 folds and aligns the sampling data acquired from each channel according to the reaction cycle period, and accumulates and averages the count rates at the same time offset position within multiple reaction cycles to suppress random noise interference. For data acquired in the accumulation trapping mode, the integral intensity of the release pulse is divided by the cumulative cycle number to restore the single-cycle equivalent intensity, so that the signal intensity after ion accumulation enhancement can be output in the form of a single-cycle equivalent, ensuring the clear physical meaning and quantitative accuracy of the concentration value. The signal reconstruction module 700 synchronously acquires the sampling data from each channel and performs the aforementioned signal processing, ultimately outputting complete transient concentration curves of at least two target species within the precursor pulse cycle. It can further calculate kinetic parameters such as adsorption half-saturation time and adsorption rate constant, providing quantitative real-time data support for process research and closed-loop control within the reaction chamber 800.

[0068] This embodiment of a multi-channel gas monitoring system employs an ion pre-sorter with a Π-type or T-type topology. It utilizes a common inlet segment formed by multiple circumferentially arranged electrode groups and at least two branch segments branching off from the end of the common inlet segment to physically separate the mixed ion beam into different branch segments. Combined with at least two parallel analysis channels connected to the outlet of each branch segment, each analysis channel is fixedly tuned to the corresponding target mass-to-charge ratio. This enables truly synchronous and uninterrupted continuous transient monitoring of at least two target gas species, effectively eliminating the transient critical information blind spots caused by time-division multiplexing. By setting an outlet-gated electrode segment at the end of the branch segment, the opening and closing of the ion exit channel can be directly controlled by applying or removing a DC bias voltage on the outlet-gated electrode segment, eliminating the need for an additional independent ion gate assembly. This simplifies the system structure, and the ion pre-sorter itself can perform mass selection and spatial sorting of ions during transmission, enabling each parallel analysis channel to continuously lock onto its target mass-to-charge ratio for detection. The ion utilization rate is higher than that of the scanning mode, significantly improving system integration and detection efficiency. The timing and synchronization controller is connected to the reaction chamber host and works with the electronic control module to provide unified power and drive signals, ensuring strict synchronization and linkage between the ion pre-sorter's sorting operation, the fixed tuning detection of each analysis channel, and the synchronous acquisition and processing of the signal reconstruction module. The signal reconstruction module synchronously acquires and processes signals from each detector, outputting parallel transient concentration curves for each target species. This provides complete real-time data support for process development and closed-loop control, resolving the lack of multi-species synchronous monitoring and the contradiction between system integration and performance in existing technologies.

[0069] In one optional embodiment, the sample introduction and ionization module 100 includes a sampling interface 110 and an ion source 120 connected to the gas outlet end of the sampling interface along the gas flow direction; the sampling interface 110 is used to draw gas samples from the reaction chamber and serves as a flow conduction limiting element of the system; the ion source 120 is used to continuously ionize the gas sample to generate a mixed ion beam containing multiple analyte species.

[0070] Specifically, such as Figure 2 As shown, sampling interface 110 is used to connect to the gas path of the reaction chamber to collect the gas sample in real time. Sampling interface 110 can be in the form of a bypass capillary, microporous flange, or direct-connection sampling tube, with its inlet extending into the exhaust area or near the reaction area of ​​the reaction chamber 800. This sampling interface 110 is the most important flow-limiting element in the system, restricting the gas flow rate entering the ion source to an extremely low level (e.g., 10) under molecular flow conditions. -5 Up to 10 -3 Pa·m 3 / s), in conjunction with the downstream vacuum component 300, naturally forms the required vacuum gradient between the ion source region and the downstream region (including the pre-sorting region and the analysis channel region), thereby ensuring the smooth ion transport path and high transport efficiency.

[0071] In one optional implementation, a temperature-controlled heating jacket is fitted over the sampling interface to heat the sampling interface and prevent the gas sample from condensing or adsorbing during transmission; the power supply and temperature control of the heating jacket are managed by an electronic control module.

[0072] Specifically, a temperature-controlled heating jacket 111 is fitted over the sampling interface to maintain the wall temperature of the bypass capillary at a level higher than the condensation temperature of the precursor and reaction byproducts (typically 100 to 180°C). This prevents condensation or adsorption of the gas sample during transport, reduces memory effect, and improves transient response speed. The power supply and temperature control of the heating jacket 111 are uniformly managed by the electronic control module 600.

[0073] In one optional embodiment, the ion source 120 includes a filament 121, an ionization chamber 122, and an ion extraction lens group 123. The ionization chamber 122 has an electron entrance hole, a gas inlet hole, and an ion extraction hole on its wall. The filament 121 emits electrons, which enter the ionization chamber 122 through the electron entrance hole and collide with the gas sample inside the ionization chamber, causing ionization. The ionization chamber 122 receives the gas sample from the sampling interface, and electrons collide with the gas sample inside the ionization chamber, generating ions. The ion extraction lens group 123 receives the ions extracted through the ion extraction hole and accelerates, focuses, and extracts the ions.

[0074] Specifically, the ion source 120 is located downstream of the sampling interface 110 (i.e., connected to the gas outlet end of the sampling interface along the gas flow direction) to continuously ionize the captured gas sample, generating a mixed ion beam containing multiple analyte species. The ion source 120 is preferably a closed electron collision ionization source, including a filament 121, an ionization chamber 122, and an ion extraction lens group 123. The ionization chamber 122 has an electron entrance hole, a gas inlet hole, and an ion extraction hole on its wall. For example, the gas sample can be directly introduced into the ionization chamber through a bypass capillary. Electrons emitted by the filament 121 enter the ionization chamber through the electron entrance hole and collide with gas molecules within the closed chamber, causing ionization. The generated ions are accelerated, focused, and extracted through the extraction hole and the ion extraction lens group 123, forming a mixed ion beam traveling along the transmission axis. The closed structure maintains a relatively high pressure (approximately 10 ppm) inside the ionization chamber. -2 (Pa level), with ionization efficiency significantly higher than open structure, and the filament is isolated from the reactant gas, resulting in stronger corrosion resistance and longer service life; the outlet hole of the ionization chamber itself also constitutes a flow conduction restriction, further reducing the leakage of neutral gas downstream.

[0075] In one alternative implementation, such as Figure 3 As shown, the ion pre-sorter 200 includes: Multi-electrode assembly 210: Consists of multiple circumferentially arranged planar electrodes, forming an ion transport channel with a Π-type or T-type topology. It is connected to the ion outlet of the sample introduction and ionization module along the transport direction of the mixed ion beam. Common entrance section 210A: One end is connected to the outlet of ion source 120 to receive the mixed ion beam, and the other end is connected to each branch section. The common entrance section is also surrounded by multi-electrode electrodes, and the number of electrodes can be 4, 6, 8, 10, 12 or more, to form a radio frequency quadrupole, hexapole, octapole or higher-order multi-electrode confinement field for preliminary focusing and stable transmission of ions.

[0076] The first branch segment 210B and the second branch segment 210C branch out from the end of the common entrance segment 210A in a Π-shaped or T-shaped manner. Each branch segment is surrounded by multiple circumferentially arranged plate-shaped electrodes, forming an independent ion transport channel. When it is a Π-shaped structure, the two branch segments can be arranged symmetrically; when it is a T-shaped structure, one branch segment can be coaxially connected to the common entrance segment, while the other branch segment branches at a certain angle (such as 90 degrees).

[0077] In one optional implementation, the electrodes of the common entrance segment are not segmented and are driven as a whole. An radio frequency voltage is applied to the common entrance segment to constrain and stably transmit ions within a preset mass number range. Each branch segment is provided with a branch deflection segment. By applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes of the branch deflection segment, ions with different mass-to-charge ratios are selectively deflected, allowing different target ions to enter different branch segments respectively.

[0078] In one alternative implementation, the outlet gate electrode segment has a controllable DC bias superimposed on the radio frequency voltage via a bias circuit. In continuous monitoring mode, the DC bias is maintained at a low potential matching the inlet of the mass analyzer, and target ions continuously enter the analysis channel through the outlet. In cumulative trapping mode, during the duration of a single reaction pulse, the outlet gate electrode segment repeatedly switches the DC bias at a preset frequency. In each switching cycle, the outlet gate electrode segment is applied a positive barrier voltage for a first duration to close the outlet, allowing target ions to accumulate within the branch segment. In a second duration, it is switched to a low potential to open the outlet, allowing the accumulated ion pack to be released in the form of a narrow pulse. The first duration is longer than the second duration.

[0079] The mass selection and spatial sorting operation mode of the ion pre-sorter 200 is as follows: In the common entrance section 210A, a preset radio frequency (RF) voltage is applied to each electrode to form a stable transmission field for ions with a wide mass range, confining the mixed ion beam to the central region of the channel for efficient transmission to the branch point. At the branch point and within the branch section, selective deflection of ions with different mass-to-charge ratios is achieved through differentiated RF amplitudes and / or superimposed DC biases. For example, in a T-shaped structure, RF voltages with different amplitudes can be applied to some electrodes at the entrances of the two branch sections, or positive / negative DC biases can be superimposed, causing lighter ions to preferentially enter the first branch section 210B and heavier ions to preferentially enter the second branch section 210C. Non-target ions are filtered out during transmission due to unstable motion. Thus, the mixed ion beam is physically separated according to its mass-to-charge ratio and guided to different branch exits.

[0080] The outlet gated electrode section enables ion-gated operation: Each branch segment's exit gate electrode section has a controllable DC bias superimposed on the RF voltage via a bias circuit (such as a bias Tee circuit). In continuous monitoring mode, this DC bias is maintained at a low potential (such as 0V or a slightly negative exit potential) matched to the downstream mass analyzer inlet, allowing target ions to continuously enter the analysis channel through the outlet. In cumulative trapping mode, the control module 600, according to the instructions of the timing and synchronization controller 500, applies a positive barrier voltage (e.g., +30V to +80V) higher than the ion kinetic energy to the exit gate electrode section, forming a barrier reflection of the ions, trapping the target ions within the branch segment for accumulation; when release is required, the DC bias is instantaneously switched back to a low potential, and the accumulated ion packet is released in the form of a narrow pulse. The potential switching of the exit gate electrode section is achieved by a high-speed high-voltage switch (Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) or a solid-state switch), with switching times as short as microseconds.

[0081] In one alternative implementation, such as Figure 4 As shown, the vacuum assembly 300 includes a turbomolecular pump 310 and a backing pump 320; the sample introduction and ionization module and the ion pre-sorter are connected by a continuous channel, and a vacuum gradient is formed between the ion source region and the downstream region by relying on the flow conduction limitation of the sampling interface and the matching of the turbomolecular pump pumping speed; the downstream region includes a pre-sorting region and an analysis channel region.

[0082] Specifically, the vacuum assembly 300 is connected to the overall vacuum chamber of the system and includes a turbomolecular pump (pumping speed not less than 70 L / s) and a backing pump. The turbomolecular pump is connected near the downstream analytical channel areas of the vacuum chamber. No additional flow-limiting baffle is installed inside the vacuum chamber between the ion source and the ion pre-sorter. Instead, the required vacuum gradient is naturally formed between the ion source region and the pre-sorting / analysis region by matching the flow-limiting properties of the bypass capillary (and the ionization chamber outlet orifice) of the sampling interface 110 with the pumping speed of the molecular pump. Specifically, the internal pressure of the closed ionization chamber of the ion source is approximately 10 L / s. -2 The pressure in the ion source cavity is on the order of Pa, approximately 1 × 10⁻⁶. -4 Pa, the pressure in the pre-sorting zone and analysis channel zone is approximately 5 × 10⁻⁶ Pa. -5 Pa. The start-up, shutdown, pressure monitoring, and interlock protection of the vacuum assembly 300 are centrally controlled by the electronic control module 600.

[0083] In one alternative implementation, such as Figure 5 As shown, the mass analyzers of at least two parallel analysis channels 400 are quadrupole mass analyzers, which are pre-tuned to the corresponding target mass-to-charge ratio for mass filtration of the introduced ions.

[0084] Specifically, the at least two parallel analysis channels 400 include at least two parallel, independently operating analysis channels, each connected after the corresponding branch segment outlet in the ion pre-sorter. Specifically, this includes: First analysis channel 410: Arranged along the axis of the first branch segment 210B, including: First mass analyzer 411: preferably a quadrupole mass analyzer, which is pre-tuned to the first target mass-to-charge ratio and locks the mass number throughout the monitoring process without scanning or peak skipping. First analyzer power supply unit 413: connected to the first mass analyzer 411, used to provide the radio frequency voltage and DC bias voltage required for its operation; its control input terminal is connected to the timing and synchronization controller 500 so that the tuning state of the first mass analyzer 411 is synchronized with the sorting timing of the ion pre-sorter 200. First ion detector 412: preferably an electron multiplier or a Faraday cup, receives ions from first mass analyzer 411 and outputs an intensity signal.

[0085] Second analysis channel 420: Arranged along the axis of the second branch segment 210C, including: Second mass analyzer 421: fixedly tuned to the second target mass-to-charge ratio; Second analyzer power supply unit 423: connected to the second quality analyzer 421, and the control input terminal is also connected to the timing and synchronization controller 500; Second ion detector 422.

[0086] Optionally, the third and subsequent analysis channels have the same structure as described above, and are respectively fixedly tuned to the corresponding target mass-to-charge ratio.

[0087] The radio frequency and DC tuning voltages required for each mass analyzer, and the high-voltage power supplies required for each ion detector, are all provided by the electronic control module 600. The set values ​​of the tuning parameters are sent from the timing and synchronization controller 500 to the electronic control module 600 for execution via a digital interface (i.e., a digital parameter distribution channel based on a communication protocol).

[0088] In one alternative implementation, such as Figure 6 As shown, the timing and synchronization controller 500 is the time reference and control center of the entire system, including: an external trigger input interface 510, connected to the host of the reaction chamber, for receiving the cyclic trigger signal from the host of the reaction chamber; a timing generation unit 520, connected to the electronic control module, for generating various control commands and sending them to the electronic control module; a radio frequency parameter control output terminal 530, connected to the electronic control module 600, for setting and adjusting the radio frequency parameters of the ion pre-sorter and the tuning parameters of each mass analyzer in real time; an outlet gate control output terminal 540, connected to the electronic control module 600, for successively changing the delay time of the starting phase of the gate pulse sequence of each outlet gate electrode segment relative to the cyclic trigger signal in the cumulative trapping mode, so as to control the switching of the DC bias voltage of each outlet gate electrode segment; and an acquisition synchronization output terminal 550, connected to the signal reconstruction module 700, for outputting the acquisition trigger signal and gate signal synchronized with the cyclic trigger signal.

[0089] Specifically, the external trigger input interface 510 receives a cyclic trigger signal from the control system of the atomic layer deposition machine host, which accurately marks the start time of each specific precursor pulse.

[0090] Timing generation unit 520: Implemented based on field-programmable gate array or microcontroller, it contains a programmable delay generator and a pulse sequence generator to generate various control signals.

[0091] RF parameter control output terminal 530: This is a digital communication interface (such as a serial peripheral interface or low voltage differential signal) connected to the RF and DC power supply unit 660 of the electronic control module 600. It is used to set and adjust the RF frequency, amplitude and phase of the electrodes in each branch segment of the ion pre-sorter 200 in real time, as well as the tuning parameters (mass number, resolution, etc.) of each mass analyzer, to ensure that the sorting sequence of the ion pre-sorter and the tuning state of the mass analyzer are strictly synchronized.

[0092] Output terminal 540 of the exit gate control: outputs digital control signals to the corresponding DC bias control circuit in the electronic control module 600, which is used to precisely control the switching of DC bias voltage of each branch segment exit gate electrode segment, and realize gate control functions such as normally open, closed (barrier) and pulse release.

[0093] Acquisition Synchronization Output Terminal 550: Outputs trigger and gating signals that are precisely synchronized with the atomic layer deposition cycle and pre-sorting timing to the signal reconstruction module 700, which are used to start synchronous acquisition and mark timestamps.

[0094] In one alternative implementation, such as Figure 7 As shown, the electronic control module 600 includes: a power management unit 610, connected to an external AC power supply, for providing stable DC voltage to various components of the system; a vacuum control unit 620, connected to the vacuum assembly, for driving and controlling the vacuum assembly; an ion source power supply unit 640, connected to the ion source 120, for providing ion source filament current, electron energy accelerating voltage, and ion extraction lens group voltage; a detector power supply unit 650, connected to each ion detector, for providing power to each ion detector; an RF and DC power supply unit 660, including a multi-channel direct digital frequency synthesizer, multiple broadband RF power amplifiers, multiple DC blocking capacitors, and multiple bias circuits, connected to the ion pre-sorter and each mass analyzer, for generating multiple RF signals with independently adjustable frequency, amplitude, and phase, and superimposing independent DC bias voltages on the electrodes of each branch segment, as well as driving each mass analyzer; and a communication interface unit 680, for exchanging data with a host computer or the host computer of the reaction chamber.

[0095] The electronic control module 600 also includes: The pneumatic control unit 630 is used to control the pneumatic valves or mass flow controllers that can be selected upstream and downstream of the sampling interface.

[0096] Acquisition Card Power Supply Unit 670: Provides operating power for the multi-channel synchronous acquisition card of the signal reconstruction module 700.

[0097] Specifically, it provides all power supply, analog and RF power output for the entire device, and is the system's power execution layer. It includes the following sub-modules: Power Management Unit 610: Receives external AC mains power, performs AC-DC conversion, and distributes and provides stable DC voltage required by various components of the system.

[0098] Vacuum control unit 620: drives and controls the start-up, shutdown, and speed of the turbomolecular pump and backing pump in the vacuum assembly 300, reads the vacuum gauge signal, and performs interlock protection.

[0099] Ion source power supply unit 640: provides constant current power supply for ion source filament 121, electron energy acceleration voltage, and high voltage power supply required for ion extraction lens group 123.

[0100] Detector power supply unit 650: Provides the high voltage power required by each ion detector (electron multiplier), with an adjustable voltage range typically from -500V to -3000V.

[0101] RF and DC power supply unit 660: This is the core unit of the electronic control module 600, including: A multi-channel direct digital synthesizer (DDS) can generate multiple radio frequency signals with the same (or different) frequency and independently adjustable amplitude and phase. Multiple broadband RF power amplifiers amplify the output signal of the multi-channel direct digital frequency synthesizer. Multiple DC blocking capacitors are used to couple the amplified radio frequency signal to each electrode segment of the pre-sorter; Multiple bias Tee circuits are used to superimpose independent DC bias voltages on the RF signals of specific electrode segments of the presorter (especially the branch deflection segment and the exit gate electrode segment); The RF power supply for the quality analyzer is used to drive each quadrupole quality analyzer and set its mass number.

[0102] Each RF output channel is isolated from the others through electromagnetic shielding and independent grounding design to avoid RF crosstalk when multiple channels are operating in parallel. In addition, a significant frequency interval (e.g., ≥1MHz) is maintained between the preselector RF frequency and the operating frequency of each quadrupole quality analyzer. This frequency difference, combined with the electromagnetic shielding design, effectively avoids beat frequency interference and cross-modulation between RF signals.

[0103] Acquisition Card Power Supply Unit 670: Provides operating power for the multi-channel synchronous acquisition card of the signal reconstruction module 700.

[0104] Communication interface unit 680: responsible for exchanging data with the host computer or the host of the atomic layer deposition machine, receiving system parameter setting instructions and feeding back the equipment status.

[0105] The electronic control module 600 receives digital control signals from the timing and synchronization controller 500 and converts them into corresponding analog voltage, current or radio frequency power outputs to achieve coordinated control of the system.

[0106] In one optional implementation, the signal reconstruction module 700 includes: a multi-channel synchronous acquisition card 710, comprising multiple independent counting sampling channels and analog sampling channels, respectively connected to the signal output terminals of each ion detector, used to synchronously sample the ion signals of each channel under the control of the acquisition synchronization signal of the timing and synchronization controller, obtain sampling data at each sampling time, and assign time stamps to the sampling data; a data buffer and storage unit 720, connected to the multi-channel synchronous acquisition card 710, used to buffer and store the acquired raw data; and a signal processing and reconstruction unit 730, connected to the data buffer and storage unit, used to read the sampling data, fold and align the sampling data according to the reaction cycle, accumulate and average the count rate at the same time offset position in multiple reaction cycles, divide the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative cycle number to restore the single-cycle equivalent intensity, output the complete transient concentration curve of each target species in the reaction pulse cycle, and calculate the adsorption half-saturation time and adsorption rate constant.

[0107] Specifically, such as Figure 8 As shown, the signal reconstruction module 700 is used to synchronously acquire, process, and reconstruct the transient concentration curves of the output signals from each ion detector, including: Multi-channel synchronous acquisition card 710: Contains multiple independent high-speed counting / analog sampling channels, which are respectively connected to the first ion detector 412, the second ion detector 422, etc. Under the synchronous control command of the timing and synchronization controller 500, the ion pulse counts of each analysis channel are synchronously sampled at a preset time resolution (e.g., 10 microseconds), and each data point is assigned a precise time stamp.

[0108] Data buffer and storage unit 720: caches and persistently stores the collected raw data (e.g., solid-state drive).

[0109] Signal processing and reconstruction unit 730: Performs the following algorithm processing: a. Fold and align the acquired data according to the atomic layer deposition cycle; b. Accumulate and average the count rates at the same time offset position (relative to the cycle trigger signal) within multiple atomic layer deposition cycles to suppress random noise; c. For data acquired using the cumulative trapping mode, the integral intensity of the release pulse is divided by the cumulative cycle number N to restore the equivalent intensity of a single cycle; d. Finally, at least two independent complete parallel transient concentration curves of the target species within the precursor pulse cycle are output synchronously, and kinetic parameters such as adsorption half-saturation time and adsorption rate constant can be calculated.

[0110] The overall collaborative workflow of a multi-channel gas monitoring system provided by this invention is as follows: The sample introduction and ionization module 100 continuously draws gas from the reaction chamber through the sampling interface 110, and ionizes it into a mixed ion beam. The sampling interface 110 itself acts as a flow-limiting element of the system, and works with the vacuum assembly 300 to form a vacuum gradient between the ion source region and the downstream region.

[0111] The timing and synchronization controller 500 receives the cyclic trigger signal from the reaction chamber and synchronously generates two sets of digital commands, which are sent to the electronic control module 600: the first set sets the radio frequency parameters of the electrodes in each branch segment of the ion presorter 200 and the DC bias of the outlet gate electrode segment, so that the mixed ion beam is stably transmitted in the common entrance segment 210A, and different target ions are introduced into each branch segment according to the mass-to-charge ratio at the end of the common entrance segment; the second set sets the tuning parameters of the mass analyzer of each analysis channel, so that each mass analyzer is strictly matched with the target mass-to-charge ratio of the corresponding branch segment outlet.

[0112] For the target species channel with a concentration below a preset threshold, the electronic control module 600 repeatedly switches the DC bias of the outlet gate electrode segment at a preset frequency during the duration of a single reaction pulse: within each cycle, a positive barrier voltage is applied for a first duration to close the outlet, allowing target ions to accumulate within the branch segment; during a second duration, the voltage is switched to a low potential to open the outlet, releasing the accumulated ion pack in a narrow pulse. Multiple enhanced ion pulses can be obtained within a single reaction pulse. This high-frequency accumulation-release process is repeated multiple times within a single reaction pulse to obtain a series of enhanced ion pulse signals. Subsequently, the enhanced ion pulse signals are accumulated and averaged over multiple reaction cycles to improve the signal-to-noise ratio.

[0113] Under the drive of the locked RF power supply provided by the electronic control module 600, the mass analyzer of each analysis channel is always fixedly tuned to its corresponding target mass-to-charge ratio, and the ion detector of each analysis channel records the ion intensity signal.

[0114] Under the synchronous control of the timing and synchronization controller 500, the signal reconstruction module 700 synchronously acquires and digitally processes the ion intensity signals output by each ion detector. After folding alignment, cumulative averaging and normalization, it outputs the parallel transient concentration curves of each target species.

[0115] The workflow of the multi-channel gas monitoring system provided by the present invention will be further described in detail through several embodiments, as follows: Example 1: Continuous parallel monitoring of the TMA (Trimethylaluminium) / H2O (water) process using a dual-channel Π-type ion pre-sorter: (1) Overall system connection and vacuum configuration: like Figure 9 As shown, the multi-channel gas monitoring system in this embodiment is integrated as a bypass online sensor into the exhaust duct of a hot-wall atomic layer deposition (ALD) stage. The sampling interface 110 is a fused silica capillary with an inner diameter of 0.25 mm and a length of 150 mm. One end extends into the exhaust duct of the reaction chamber, with the sampling point located approximately 20 mm downstream of the substrate tray. The other end is directly connected to the gas inlet port of the ionization chamber 122 of the closed ion source 120. This capillary is the most important flow-limiting element in the entire system.

[0116] A heating sleeve 111 with an electric heating wire is tightly installed on the outside of the capillary. The electronic control module 600 performs proportional-integral-derivative isotropic control according to the set temperature (e.g., 120℃) to ensure that no precursor condensation or residual adsorption occurs on the inner wall of the capillary during the alternating pulses of trimethylaluminum and H2O, thereby eliminating the memory effect during sample transport. The heating sleeve is covered with an insulation layer to reduce heat loss.

[0117] Vacuum assembly 300 includes a turbomolecular pump with a pumping speed of 70 L / s and a backing pump. The molecular pump is connected to the cavity interface near the analysis channel region. Through capillary conduction limitation and matching with the molecular pump pumping speed, the ion source closed ionization chamber 122 maintains approximately 10 L / s. -2 A relatively high pressure on the order of Pa is required to facilitate efficient ionization; the ion source chamber region (outer periphery of the ionization chamber) is maintained at approximately 1 × 10⁻⁶. -4 Pa; the pre-sorting region and the analysis channel region are maintained at approximately 5 × 10⁻⁶. -5 Pa. No additional partition is installed between the ion source and the ion pre-sorter to ensure unobstructed ion transport path.

[0118] (2) Closed-loop ion source 120: The ion source 120 is a closed-loop electron collision ionization source. The ionization chamber 122 is a small cavity made of stainless steel with three small holes on its wall: an electron entrance hole (approximately 0.5 mm in diameter), a gas inlet hole (connected to the end of the capillary), and an ion extraction hole (approximately 0.3 mm in diameter). The filament 121 is a double iridium filament located outside the ionization chamber near the electron entrance hole, with an emission current of 200 μA and an electron energy of 70 eV. The gas sample enters the ionization chamber directly through the capillary and is ionized by electron bombardment within the closed space. The generated ions are extracted with a kinetic energy of approximately 70 eV through the extraction hole and the ion extraction lens group 123. The closed structure isolates the filament from the reactant gas, significantly extending the filament life, while also resulting in significantly higher ionization efficiency than an open structure.

[0119] (3) Specific structure of the Π-type segmented radio frequency multipole ion presorter 200: The ion pre-sorter 200 adopts a Π-type topology. The multi-electrode group 210 has a symmetrical structure: the common entrance section 210A extends along a straight line for about 40mm, and its end branches into the first branch section 210B (bending to the left) and the second branch section 210C (bending to the right). The angle between the two branch sections and the common entrance section is 30 degrees, and the length of each is 40mm. The entire channel cross-section is an octet structure with an inscribed circle diameter of 6mm, consisting of eight electrodes arranged circumferentially.

[0120] In the common entry segment 210A, the electrodes are not segmented and are driven as a whole. The electronic control module 600 applies a +10V DC bias to the four auxiliary electrodes. The upper and lower, left and right main electrodes are each applied with a radio frequency voltage (frequency 1.0MHz, peak-to-peak 180V) with a 180° phase difference, forming a rotating radio frequency quadrupole field for stable ion transport in the m / z range of 15-17.

[0121] At the entrances of the first branch segment 210B and the second branch segment 210C, a 15 mm long branch deflection segment is provided in each segment, with its electrodes divided into three independently driven segments along the axial direction. In the first branch deflection segment, an asymmetric radio frequency is applied to the main electrode pair in the horizontal direction: the left main electrode has a radio frequency amplitude of 200 Vpp and is superimposed with a +15 V DC bias; the right main electrode has a radio frequency amplitude of 160 Vpp and is superimposed with a -15 V DC bias, generating a leftward deflection force, which makes it easier for m / z=15 ions to enter the left branch. The second branch deflection segment applies a mirror-symmetric bias, which makes m / z=17 ions enter the right branch. This deflection mechanism is based on the synergistic effect of the nonlinear effect of the high-order multipole field (octet field) and the DC bias: the stable region boundaries of ions with different mass-to-charge ratios in the asymmetric radio frequency field are different. After the DC bias is superimposed, the stability of ions in a certain m / z range in a certain direction is disrupted, thus being selectively guided to the corresponding branch.

[0122] The last 10mm electrode at the end of each branch segment is the exit gate electrode segment. In the continuous monitoring mode of this embodiment, its DC bias is kept at 0V, and ions pass through continuously.

[0123] (4) Analysis channels, power supply units and monitoring settings: The first analysis channel 410 is arranged along the axis of the first branch segment. The first mass analyzer 411 is a quadrupole mass analyzer (bar length 100mm, bar diameter 6.35mm, operating frequency 2.5MHz). The power supply for the first mass analyzer is provided by the electronic control module 600, and its frequency and amplitude are set by the timing and synchronization controller 500 through the second set of output terminals of the radio frequency parameter control output terminal 530, so that the first mass analyzer 411 is always locked at a mass-to-charge ratio m / z=15. The first ion detector 412 is a channel-type electron multiplier, which is subjected to a high voltage of -1200 V.

[0124] The second analysis channel 420 is arranged along the axis of the second branch segment. The second mass analyzer 421 (same specifications) is powered by the electronic control module 600 and the timing and synchronization controller 500, locking it at a mass-to-charge ratio m / z = 17. The second ion detector 422 is the same model as the first ion detector 412.

[0125] The operating frequency of the first quality analyzer 411 (2.5MHz) differs from the RF frequency of the common entrance section of the ion presorter 200 (1.0MHz) by a factor of 2.5. The two frequencies belong to different harmonic orders and are RF isolated through electromagnetic shielding and independent grounding design. Therefore, there is no beat frequency interference or frequency pulling effect, ensuring that each channel operates independently and stably.

[0126] (5) Time-series linkage and monitoring process: The timing and synchronization controller 500 receives the TMA precursor pulse valve opening trigger signal (pulse width originally set to 200ms) from the atomic layer deposition host via the external trigger input interface 510. The timing generation unit 520 synchronizes the control module 600 to complete the loading of RF parameters for the ion pre-sorter and the tuning of the quality analyzer. The multi-channel synchronous acquisition card 710 of the signal reconstruction module 700 synchronously samples the pulse counts of the two detectors at a resolution of 10 microseconds. The signal processing and reconstruction unit 730 folds and aligns the data according to the atomic layer deposition cycle (cycle approximately 8 seconds), accumulates and averages it after 100 cycles, and outputs the methyl cation CH3. + (Mass charge ratio m / z=15) and hydroxy cation OH + Transient concentration curve (mass charge ratio m / z=17).

[0127] Example 2: Detection of trace intermediates using cumulative trapping enhancement mode: Based on the Π-type ion pre-sorter in Example 1, a straight-through third branch exit gate electrode section is added at the bifurcation center to monitor AlCH3, a key trace chemical reaction intermediate in the TMA / H2O atomic layer deposition process. + (Mass-to-charge ratio m / z = 42). This species is a characteristic fragment ion of EI resulting from the reaction of TMA with surface hydroxyl groups. Its concentration is extremely low, and the signal-to-noise ratio is insufficient for conventional continuous monitoring.

[0128] The exit gated electrode segment of the third branch is configured in a high-frequency accumulation trapping mode. The timing and synchronization controller 500 receives a TMA precursor pulse trigger (pulse width 200ms). During the duration of this pulse, the electronic control module 600 causes the electrode segment to repeatedly switch the DC bias at a frequency of 1kHz: the +60V barrier is turned off for 0.9ms, allowing the trace chemical reaction intermediate AlCH3 to... +Ions are confined and accumulated within the exit gate electrode segment by a radio frequency field; a 0V opening for 0.1ms releases the accumulated ion packets in the form of narrow pulses. A single TMA pulse (200ms) can generate 200 enhanced release pulses (determined by the 1kHz gate frequency), with each pulse intensity representing the accumulated amount within 0.9ms, which is much higher than the instantaneous signal in continuous mode.

[0129] To reconstruct the complete trace chemical reaction intermediate AlCH3 + Transient concentration curves were obtained using a stepped delay scanning strategy: with a step size of 1 ms, the delay time of the starting phase of the gated pulse sequence relative to the rising edge of the TMA trigger was changed successively in 200 consecutive atomic layer deposition cycles (approximately 8 seconds per cycle), and enhanced pulse data within the corresponding time window were acquired. After the above 200 cycles of scanning, the signal processing and reconstruction unit 730 stitched together and normalized the data from all delay points, ultimately obtaining trace chemical reaction intermediate AlCH3 covering the entire TMA pulse cycle. + Transient concentration curve.

[0130] Example 3, Other pole number variations of the ion pre-sorter: The number of electrodes in the ion pre-sorter 200 is not limited to eight. Four-electrode, six-electrode, twelve-electrode, and other structures can be used as needed to adjust the stability region and transmission characteristics. All variations that have a Π-type or T-type topology, segmented electrodes, and an outlet gate electrode segment fall within the scope of protection of this invention.

[0131] Through the above embodiments, this invention combines a Π-type or T-type segmented radio frequency multipolar ion pre-sorter with an output electrode-integrated gating technology, and employs an integrated vacuum design combining a closed ion source and sampling capillary flow confinement. This provides an extremely compact and high-performance multi-channel gas monitoring system for periodic fast-reaction processes such as atomic layer deposition. Any modifications, equivalent substitutions, and improvements made under the above concept should be included within the scope of protection of this invention.

[0132] The multi-channel gas monitoring system of this invention employs an ion pre-sorter 200 with a Π-type or T-type topology to physically separate the ion flow into different branch segments. Combined with multiple analysis channels 400 that are always locked to a fixed mass number, it can perform truly synchronous and uninterrupted continuous transient monitoring of at least two target gas species, eliminating the information blind spots of time-division acquisition and realizing parallel continuous transient monitoring of multiple species.

[0133] A pre-confinement accumulation cell was constructed by utilizing the synergy of the exit-gated electrode segment and the branch segment's radio frequency field. Rapid physical accumulation and pulse release of ions are achieved within a single reaction pulse through high-frequency gating. The resulting enhanced pulse signal can be further accumulated and averaged across multiple reaction cycles, resulting in a significant improvement in the overall signal-to-noise ratio and achieving physical accumulation and enhancement of trace signals.

[0134] The ion-gating function is integrated into the pre-sorter outlet electrode, eliminating the need for a separate ion-gating assembly. The vacuum gradient is created using the inherent flow conductance limitation of the sampling interface 110, eliminating the need for an additional partition between the ion source 120 and the ion pre-sorter 200. These designs greatly simplify the system structure, reduce ion loss, and improve transmission efficiency and sensitivity, resulting in a compact structure and high transmission efficiency.

[0135] The system's effective time resolution is determined by the potential switching speed of the RF pre-sorting and the exit gate electrode. The gate switching can reach the microsecond level, and with the high-speed sampling of the multi-channel synchronous acquisition card, the overall effective time resolution can reach the millisecond level. Each analysis channel 400 operates continuously with a high duty cycle, resulting in a significantly higher ion utilization rate than traditional scanning modes, achieving both high time resolution and high ion utilization.

[0136] The 600 electronic control module provides and precisely controls all RF, DC and high-voltage outputs. Each RF channel is isolated through electromagnetic shielding and independent grounding design to avoid RF crosstalk when multiple channels work in parallel. The timing and synchronization controller 500 is only responsible for digital logic, realizing the separation of control and power. The system has high integration, strong anti-interference ability, and is easy to maintain and upgrade. The entire system has centralized power management and precise control.

[0137] The enclosed ion source 120 effectively protects the filament from direct corrosion by corrosive gases; the pre-sorting process filters out most non-target and potentially corrosive ions, greatly reducing contamination of the subsequent mass analyzer and ion detector, significantly extending the maintenance cycle, and achieving the goals of anti-contamination and long lifespan.

[0138] This embodiment also provides a multi-channel gas monitoring method, which can be used in the above-mentioned multi-channel gas monitoring system. Figure 10 This is a flowchart of a multi-channel gas monitoring method according to an embodiment of the present invention, such as... Figure 10 As shown, the process includes the following steps: Step S1001: A gas sample is drawn from the reaction chamber and ionized to generate a mixed ion containing multiple analyte species.

[0139] Ionization refers to the process by which atoms or molecules gain or lose electrons to form charged particles (ions). In this embodiment, after the gas sample enters the ion source through the sampling interface, it is bombarded by electrons emitted by the filament in the closed ionization chamber. When neutral gas molecules collide with high-energy electrons, the outer electrons of the molecules are ejected, and the molecules themselves become positively charged, becoming positive ions. These positive ions are drawn out under the action of an electric field, forming a mixed ion beam that can be used for mass selection and spatial sorting by the subsequent pre-sorter.

[0140] Specifically, the gas sample drawn from the reaction chamber enters the system vacuum chamber through the sampling interface 110. The sampling interface 110, as a flow-limiting element, works with the vacuum assembly 300 to form a vacuum gradient between the ion source region and the downstream region. The gas sample is continuously ionized in the ion source 120 to generate a mixed ion beam containing multiple analyte species.

[0141] Step S1002: The mixed ion beam is introduced into the common entrance section of the ion pre-sorter and transmitted to the end of the common entrance section under the constraint of the radio frequency field.

[0142] Specifically, after the mixed ion beam leaves the ion outlet of the sample introduction and ionization module 100, it enters the common entrance section 210A of the ion pre-sorter 200 along the transmission direction of the mixed ion beam. The common entrance section 210A is surrounded by multiple circumferentially arranged electrode groups, and radio frequency voltage is applied to each electrode to form a radio frequency confinement field. Under the action of the radio frequency field, the mixed ion beam is focused and confined to the central region of the channel, thereby enabling the mixed ion beam to be stably transmitted along the common entrance section 210A to the end bifurcation point of the common entrance section 210A without additional physical partitions, providing a spatially accurate and highly efficient ion source for subsequent mass selection and spatial sorting in each branch segment.

[0143] In step S1003, at the end of the common entrance segment, by applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch segment, ions with different mass-to-charge ratios enter different branch segments respectively.

[0144] Specifically, when the mixed ion beam is transmitted to the bifurcation at the end of the common entrance segment 210A, the ion pre-sorter 200 generates an electric field at the bifurcation that selectively deflects ions with different mass-to-charge ratios by applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch segment. This causes ions with different mass-to-charge ratios to enter different branch segments according to their respective stable region boundaries, while non-target ions are filtered out due to their unstable trajectories. This achieves the physical separation and parallel output of different target ions in the mixed ion beam.

[0145] Step S1004: The target ions in each branch segment are exported to the corresponding analysis channel through the outlet gate electrode segment.

[0146] Specifically, after mass selection and spatial sorting, the target ions in each branch segment are transported to the exit gate electrode segment at the end of the branch segment. The exit gate electrode segment controls the opening and closing of the ion export channel according to the working mode: in continuous monitoring mode, the exit gate electrode segment maintains a low potential to allow the target ions to pass through continuously and enter the corresponding analysis channel; in cumulative trapping mode, the exit gate electrode segment applies a positive barrier voltage at a preset frequency for a first duration to allow the target ions to accumulate in the branch segment, and switches to a low potential for a second duration to release the accumulated ion pack in the form of a narrow pulse, exporting it to the corresponding analysis channel.

[0147] Step S1004 above includes: Step a: When the transient concentration of the target species is lower than a preset threshold, the exit gate electrode segment of the corresponding branch segment is configured to accumulate trapping mode. During the duration of a single reaction pulse, the DC bias of the exit gate electrode segment is repeatedly switched at a preset frequency: In each cycle, a positive barrier voltage is applied to close the exit during the first duration, allowing the target ions to accumulate in the branch segment; during the second duration, the voltage is switched to a low potential to open the exit, releasing the accumulated ion pack in the form of a narrow pulse, thereby obtaining an enhanced ion pulse signal. The first duration is longer than the second duration.

[0148] Specifically, when the transient concentration of the target species is lower than the preset threshold that the ion detector can effectively detect in continuous monitoring mode, the timing and synchronization controller 500 configures the exit gate electrode segment of the corresponding branch segment into an accumulating trapping mode through the electronic control module 600. During the duration of the precursor pulse corresponding to the target species, the DC bias voltage of the exit gate electrode segment is repeatedly switched at a preset frequency (e.g., 1 kHz). In each switching cycle, a positive barrier voltage higher than the kinetic energy of the target ion is applied for a first duration (e.g., 0.9 ms) to close the ion export channel, so that the target ion entering the branch segment is trapped in the branch segment continuously under the combined action of the radial constraint of the radio frequency field and the axial barrier at the exit end. Accumulation; then, during the second duration (e.g., 0.1ms), the DC bias voltage is rapidly switched to a low potential to open the ion extraction channel, so that the accumulated target ions are released in a narrow pulse form under the action of the radio frequency field and the downstream electric field, forming an enhanced ion pulse signal with an instantaneous intensity much higher than that of the continuous monitoring mode. The first duration is longer than the second duration, so that the ion accumulation time is much longer than the release time, thereby obtaining multiple enhanced ion pulse signals during a single reaction pulse. This provides sufficient data for the subsequent signal reconstruction module 700 to accumulate and average the enhanced ion pulse signals in multiple reaction cycles, and finally recovers the complete transient concentration curve of the target species with a concentration lower than the preset threshold.

[0149] Step S1005: The imported target ions are mass filtered by the mass analyzers of each analysis channel, and the ion intensity signals are recorded by the corresponding ion detectors.

[0150] Specifically, the mass analyzers of each analysis channel 400 are pre-tuned to their respective target mass-to-charge ratios and remain locked at the target mass-to-charge ratio throughout the monitoring process. The target ions introduced into the corresponding branch segment are mass filtered, allowing only ions with the target mass-to-charge ratio to pass through while filtering out non-target ions. The filtered target ions enter the corresponding ion detector, which converts the received target ions into a recordable ion intensity signal and outputs it.

[0151] Step S1006: The output signals of each ion detector are synchronously acquired and processed to output the parallel transient concentration curves of each target species.

[0152] Specifically, under the control of the acquisition synchronization signal of the timing and synchronization controller 500, the signal reconstruction module 700 synchronously acquires the ion intensity signals output by each ion detector and assigns precise time stamps to the sampled data acquired by each channel. Then, it folds and aligns the sampled data according to the reaction cycle period, accumulates and averages the count rates at the same time offset position in multiple reaction cycles to suppress random noise, and divides the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative number of cycles to restore the equivalent intensity of a single cycle. Finally, it synchronously outputs the parallel transient concentration curves of each target species in the reaction pulse cycle.

[0153] The above step S1006 includes: Step b1: For data acquired using the cumulative trapping mode, the enhanced pulse data within the corresponding time window is acquired by successively changing the delay time of the starting phase of the gate pulse sequence of each exit gate electrode segment relative to the reaction trigger signal. The pulse data at each delay point are then spliced ​​and normalized to obtain the complete parallel transient concentration curve of the target species.

[0154] Specifically, for data acquired using the cumulative trapping mode, since only a single enhanced ion pulse signal within a specific time window can be acquired in each reaction cycle, the timing and synchronization controller 500 successively changes the delay time of the starting phase of the gated pulse sequence of each exit gated electrode segment relative to the reaction trigger signal through the exit gated control output terminal. That is, within a reaction pulse cycle, the starting phase of the gated pulse is increased by a preset time step (e.g., 1ms). Enhanced pulse data within the time window corresponding to each delay time point are acquired in multiple consecutive reaction cycles. Data for one time window is acquired in each reaction cycle, and the delay times of each time window are interconnected and cover the entire reaction pulse cycle, so that the signal reconstruction module 700 obtains complete time series data covering the entire reaction pulse cycle. The signal reconstruction module 700 splices the enhanced pulse data acquired at each delay time point according to their respective time window positions to form a complete transient counting sequence. Then, it normalizes the spliced ​​counting sequence according to the sampling time width of each delay point to make the count rate of each time point comparable, thereby recovering the complete transient concentration curve of the target species in the entire reaction pulse cycle.

[0155] Step b2: Fold and align the collected data according to the reaction cycle, accumulate and average the count rate at the same time offset position in multiple reaction cycles, divide the integral intensity of the release pulse collected in the cumulative trapping mode by the cumulative cycle number to restore the single-cycle equivalent intensity, output the complete parallel transient concentration curve of each target species in the reaction pulse cycle, and calculate the adsorption half-saturation time and adsorption rate constant.

[0156] Specifically, the signal reconstruction module 700 folds and aligns the acquired data according to the reaction cycle. Taking the rising or falling edge of each reaction trigger signal as the time zero point, it extracts and superimposes the count rate data at the same time offset position within multiple consecutive reaction cycles to form a multi-cycle count data set at the same time offset position. Then, it accumulates and averages this set, so that random noise cancels out and is suppressed in each cycle, while the true transient signal of the target species is preserved and enhanced because it has a strict time correlation with the reaction trigger signal. For data acquired in the cumulative trapping mode, the signal reconstruction module 700 folds and aligns the acquired data according to the reaction cycle. The integral intensity of each release pulse (i.e., the total ion count carried by the pulse) is divided by the cumulative cycle number to restore the equivalent intensity within a single reaction cycle. This normalizes the signal intensity after multiple cycles of accumulation and averaging to the single-cycle equivalent level, ensuring the physical meaning of the concentration value is clear and the quantitative accuracy is precise. After the above folding alignment, accumulation averaging and normalization processing, the signal reconstruction module 700 outputs the complete parallel transient concentration curves of each target species within the reaction pulse cycle, and calculates kinetic parameters such as adsorption half-saturation time and adsorption rate constant based on these curves, providing quantitative data support for atomic layer deposition process research and parameter optimization.

[0157] Application examples of the multi-channel gas monitoring method of the present invention Figure 11 As shown, the process includes the following: S1101: The sampling interface (such as a capillary tube) draws a gas sample from the reaction chamber. The gas sample enters the ion source through the sampling interface as a flow-limiting element. The closed ion source continuously ionizes the gas sample to generate a mixed ion beam containing multiple analyte species.

[0158] S1102: The mixed ion beam enters the ion pre-sorter with a T-type or Π-type topology. By applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch segment, ions with different mass-to-charge ratios are selectively deflected, so that ions with different mass-to-charge ratios enter different branch segments respectively, thereby realizing the physical separation and parallel output of different target ions in the mixed ion beam.

[0159] S1103: Determine the working mode of each channel based on the concentration of the target species to be measured in each channel: For the main species channel, the outlet gate electrode section maintains a low potential that matches the inlet of the mass analyzer, so that the target ions continuously enter the analysis channel through the outlet, and each channel achieves continuous monitoring. For trace species channels, the exit gate electrode segment of the corresponding branch segment is configured as an accumulation trapping mode. During the duration of a single reaction pulse, the DC bias is repeatedly switched at a preset frequency. A positive barrier voltage is applied during the first duration to allow target ions to accumulate in the branch segment. During the second duration, the voltage is switched to a low potential to release the accumulated ion pack in the form of a narrow pulse, thereby obtaining an enhanced ion pulse signal. The first duration is longer than the second duration.

[0160] S1104: The target ions exported from each branch segment enter the corresponding analysis channel. The mass analyzer in each analysis channel, which is pre-tuned to the corresponding target mass-to-charge ratio, performs mass filtering on the imported ions, allowing only ions with the target mass-to-charge ratio to pass through. The corresponding ion detector converts the received ions into ion intensity signals, thus obtaining multi-channel synchronous ion intensity signals.

[0161] S1105: The signal reconstruction module synchronously acquires the ion intensity signals output by each ion detector under the synchronous control of the timing and synchronization controller. It folds and aligns the sampled data according to the reaction cycle. It accumulates and averages the count rates at the same time offset position in multiple atomic layer deposition cycles to suppress random noise. It divides the integral intensity of the release pulse acquired in the cumulative trapping mode by the cumulative cycle number to restore the equivalent intensity of a single cycle. Finally, it synchronously outputs multiple parallel transient concentration curves of target species according to the time axis, such as the concentration curve of species A, the concentration curve of species B, etc.

[0162] The multi-channel gas monitoring method provided in this embodiment draws a gas sample from the reaction chamber and ionizes it to generate a mixed ion beam. This mixed ion beam is then introduced into the common entrance section of an ion pre-sorter and transmitted under radio frequency field constraint. At the end of the common entrance section, differentiated radio frequency amplitudes and / or superimposed DC biases are applied to the electrodes in each branch section, allowing ions with different mass-to-charge ratios to enter different branch sections respectively. This achieves physical separation and parallel extraction of different target ions in the mixed ion beam. The ions then enter their corresponding analysis channels via the exit gate electrode section, where a fixed-tuned mass analyzer performs mass filtering and the ion detector records the signals. This achieves truly synchronous continuous transient monitoring of multiple target species, avoiding critical transient information blind spots caused by time-division acquisition. By synchronously acquiring and processing the output signals of each ion detector and outputting parallel transient concentration curves for each target species, the method can fully present the concentration changes of each target species throughout the entire reaction pulse cycle, providing comprehensive real-time data support for process research and closed-loop control, effectively solving the problem of missing synchronous monitoring of multiple species.

[0163] Figure 12 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present invention.

[0164] The electronic device may include one or more processors 1201, memory 1202, and interfaces for connecting the components, including high-speed interfaces and low-speed interfaces. The components communicate with each other using different buses and may be mounted on a common motherboard or otherwise as required. The processor can process instructions that execute within the computer device, including instructions stored in or on memory to display graphical information of a graphical user interface on an external input / output device (such as a display device coupled to the interface). In some alternative implementations, multiple processors and / or multiple buses may be used with multiple memories and multiple memory modules, if desired. Similarly, multiple computer devices may be connected, each providing some of the necessary operations (e.g., as a server array, a group of blade servers, or a multiprocessor system). Figure 12 Take a processor 1201 as an example.

[0165] Processor 1201 may be a central processing unit, a network processor, or a combination thereof. Processor 1201 may further include a hardware chip. The hardware chip may be an application-specific integrated circuit (ASIC), a programmable logic device (PLD), or a combination thereof. The programmable logic device may be a complex programmable logic device (CAMP), a field-programmable gate array (FPGA), a general-purpose array logic (GDA), or any combination thereof.

[0166] The memory 1202 stores instructions executable by at least one processor 1201 to cause the at least one processor 1201 to perform the method shown in the above embodiments.

[0167] The memory 1202 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created based on the use of the computer device. Furthermore, the memory 1202 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some alternative embodiments, the memory 1202 may optionally include memory remotely located relative to the processor 1201, and these remote memories can be connected to the computer device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0168] The memory 1202 may include volatile memory, such as random access memory; the memory may also include non-volatile memory, such as flash memory, hard disk or solid-state drive; the memory 1202 may also include a combination of the above types of memory.

[0169] The electronic device also includes a communication interface 1203 for the computer device to communicate with other devices or communication networks.

[0170] Figure 12 The electronic device shown is merely an example and should not be construed as limiting the functionality and scope of the embodiments of the present invention.

[0171] This invention also provides a computer-readable storage medium. The methods described above according to embodiments of the invention can be implemented in hardware or firmware, or implemented as computer code that can be recorded on a storage medium, or implemented as computer code downloaded via a network and originally stored on a remote storage medium or a non-transitory machine-readable storage medium and then stored on a local storage medium. Thus, the methods described herein can be processed by software stored on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. The storage medium can be a magnetic disk, optical disk, read-only memory, random access memory, flash memory, hard disk, or solid-state drive, etc.; further, the storage medium can also include combinations of the above types of memory. It is understood that computers, processors, microprocessor controllers, or programmable hardware include storage components capable of storing or receiving software or computer code. When the software or computer code is accessed and executed by the computer, processor, or hardware, the multi-channel gas monitoring method shown in the above embodiments is implemented.

[0172] A portion of this invention can be applied as a computer program product, such as computer program instructions, which, when executed by a computer, can invoke or provide the methods and / or technical solutions according to the invention through the operation of the computer. Those skilled in the art will understand that the forms in which computer program instructions exist in a computer-readable medium include, but are not limited to, source files, executable files, installation package files, etc. Correspondingly, the ways in which computer program instructions are executed by a computer include, but are not limited to: the computer directly executing the instructions, or the computer compiling the instructions and then executing the corresponding compiled program, or the computer reading and executing the instructions, or the computer reading and installing the instructions and then executing the corresponding installed program. Here, the computer-readable medium can be any available computer-readable storage medium or communication medium accessible to a computer.

[0173] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A multi-channel gas monitoring system, characterized in that, include: A vacuum chamber is used to provide a sealed installation space for the system; A vacuum assembly, connected to the vacuum chamber, is used to evacuate the vacuum chamber to create and maintain a working vacuum environment; The sample introduction and ionization module is located in the vacuum chamber and is used to draw gas samples from the reaction chamber and continuously ionize the gas samples to generate a mixed ion beam containing multiple analyte species. An ion pre-sorter, disposed within the vacuum chamber, is connected to the ion outlet of the sample introduction and ionization module along the transmission direction of the mixed ion beam. It is used for mass selection and spatial sorting of the mixed ion beam. The ion pre-sorter has a Π-type or T-type topology, including a common entrance section formed by multiple circumferentially arranged electrode groups and at least two branch sections branching from the end of the common entrance section. The electrodes within each branch section are divided into multiple independent segments along the transmission direction of the mixed ion beam, and each segment is electrically isolated by an insulating gap. The last electrode segment at the end of each branch section is an exit gate electrode segment. The exit gate electrode segment controls the opening and closing of the ion extraction channel by applying or removing a DC bias voltage. At least two parallel analysis channels are disposed in the vacuum chamber and are respectively connected to the outlet of each branch section of the ion pre-sorter. Each analysis channel includes a mass analyzer and an ion detector that are fixedly tuned to the corresponding target mass-to-charge ratio. A timing and synchronization controller is installed in the vacuum chamber and connected to the main unit of the reaction chamber. The timing and synchronization controller is used to receive external trigger signals and generate synchronization control commands. An electronic control module, disposed within the vacuum chamber and connected to the timing and synchronization controller, is used to receive control commands from the timing and synchronization controller and to provide power and drive signals to the system; and A signal reconstruction module is disposed in the vacuum cavity and is connected to the signal output terminals of each of the ion detectors. The signal reconstruction module is used to synchronously acquire and process the output signals of each of the ion detectors and output the parallel transient concentration curves of each target species.

2. The system according to claim 1, characterized in that, The electrodes of the common entrance section are not segmented and are driven as a whole. Radio frequency voltage is applied to the common entrance section to constrain and stably transmit ions within a preset mass number range. Each of the branch segments is provided with a branch deflection segment. By applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes of the branch deflection segments, ions with different mass-to-charge ratios are selectively deflected, allowing different target ions to enter different branch segments respectively.

3. The system according to claim 1, characterized in that, The output gated electrode segment has a controllable DC bias superimposed on the radio frequency voltage through a bias circuit; In continuous monitoring mode, the DC bias is maintained at a low potential that matches the inlet of the mass analyzer, and the target ions continuously enter the analysis channel through the outlet; In the cumulative trapping mode, during the duration of a single reaction pulse, the exit gate electrode segment repeatedly switches the DC bias at a preset frequency. In each switching cycle, the exit gate electrode segment is applied a positive barrier voltage for a first duration to close the exit, allowing target ions to accumulate in the branch segment. In a second duration, it is switched to a low potential to open the exit, allowing the accumulated ion pack to be released in the form of a narrow pulse. The first duration is longer than the second duration.

4. The system according to claim 1, characterized in that, The sample introduction and ionization module includes a sampling interface and an ion source connected to the gas outlet end of the sampling interface along the gas flow direction; The sampling interface is used to draw gas samples from the reaction chamber and serves as a flow-limiting element of the system. The ion source is used to continuously ionize the gas sample to generate a mixed ion beam containing multiple analyte species.

5. The system according to claim 4, characterized in that, The sampling interface is fitted with a temperature-controlled heating sleeve to heat the sampling interface and prevent the gas sample from condensing or adsorbing during transmission; the power supply and temperature control of the heating sleeve are managed by the electronic control module.

6. The system according to claim 4, characterized in that, The vacuum assembly includes a turbomolecular pump and a backing pump; the sample introduction and ionization module and the ion pre-sorter are connected by a continuous channel, and a vacuum gradient is formed between the ion source region and the downstream region by relying on the flow conduction limitation of the sampling interface and the matching of the pumping speed of the turbomolecular pump; the downstream region includes a pre-sorting region and an analysis channel region.

7. The system according to claim 4, characterized in that, The ion source includes a filament, an ionization chamber, and an ion extraction lens assembly; The ionization chamber has an electron injection hole, a gas introduction hole, and an ion extraction hole on its wall surface. The filament is used to emit electrons, which enter the ionization chamber through the electron entrance hole and collide with the gas sample in the ionization chamber to ionize it. The ionization chamber is used to receive gas samples from the sampling interface, and the electrons collide with the gas samples in the ionization chamber to ionize and generate ions; The ion extraction lens group is used to receive ions extracted through the ion extraction aperture and to accelerate, focus, and extract the ions.

8. The system according to claim 1, characterized in that, The mass analyzer is a quadrupole mass analyzer, which is pre-tuned to the corresponding target mass-to-charge ratio for mass filtration of introduced ions.

9. The system according to claim 1, characterized in that, The timing and synchronization controller includes: An external trigger input interface is connected to the host of the reaction chamber and is used to receive cyclic trigger signals from the host of the reaction chamber. A timing generation unit, connected to the electronic control module, is used to generate various control commands and send them to the electronic control module; The radio frequency parameter control output terminal is connected to the electronic control module and is used to set and adjust the radio frequency parameters of the ion pre-sorter and the tuning parameters of each mass analyzer in real time. The output terminal of the exit gate control is connected to the electronic control module and is used to successively change the delay time of the starting phase of the gate pulse sequence of each exit gate electrode segment relative to the cyclic trigger signal in the cumulative trapping mode, so as to control the switching of the DC bias voltage of each exit gate electrode segment; and The acquisition synchronization output terminal is connected to the signal reconstruction module and is used to output the acquisition trigger signal and gating signal that are synchronized with the cyclic trigger signal.

10. The system according to claim 7, characterized in that, The electronic control module includes: The power management unit is connected to an external AC power source to provide a stable DC voltage for all components of the system. A vacuum control unit, connected to the vacuum assembly, is used to drive and control the vacuum assembly; An ion source power supply unit, connected to the ion source, is used to provide the ion source filament current, electron energy acceleration voltage, and ion extraction lens group voltage. A detector power supply unit is connected to each of the ion detectors and is used to provide power to each ion detector. The radio frequency (RF) and DC power supply unit includes a multi-channel direct digital frequency synthesizer, multiple broadband RF power amplifiers, multiple DC blocking capacitors, and multiple bias circuits, connected to the ion pre-sorter and each of the quality analyzers, for generating multiple RF signals with independently adjustable frequency, amplitude, and phase, superimposing independent DC bias voltages on the electrodes of each branch segment, and driving each of the quality analyzers; and The communication interface unit is used to exchange data with the host computer or the host computer in the reaction chamber.

11. The system according to claim 4, characterized in that, The signal reconstruction module includes: A multi-channel synchronous acquisition card includes multiple independent counting sampling channels and analog sampling channels, which are respectively connected to the signal output terminals of each ion detector. It is used to synchronously sample the ion signals of each channel under the control of the acquisition synchronization signal of the timing and synchronization controller, obtain the sampling data at each sampling time, and assign a time stamp to the sampling data. A data buffer and storage unit, connected to the multi-channel synchronous acquisition card, is used to buffer and store the acquired raw data; and The signal processing and reconstruction unit, connected to the data buffer and storage unit, is used to read the sampled data, fold and align the sampled data according to the reaction cycle, accumulate and average the count rate at the same time offset position in multiple reaction cycles, divide the integral intensity of the release pulse collected in the cumulative trapping mode by the cumulative cycle number to restore the single-cycle equivalent intensity, output the complete transient concentration curve of each target species in the reaction pulse cycle, and calculate the adsorption half-saturation time and adsorption rate constant.

12. A multi-channel gas monitoring method, characterized in that, The method, applied to the multi-channel gas monitoring system according to any one of claims 1 to 11, comprises: A gas sample is drawn from the reaction chamber and ionized to generate a mixed ion beam containing multiple analyte species. The mixed ion beam is introduced into the common entrance section of the ion pre-sorter and transmitted to the end of the common entrance section under the constraint of a radio frequency field. At the end of the common entrance section, by applying differentiated radio frequency amplitudes and / or superimposed DC biases to the electrodes in each branch section, ions with different mass-to-charge ratios enter different branch sections respectively; The target ions in each of the aforementioned branch segments are exported to the corresponding analytical channels via the outlet gated electrode segment; The target ions introduced are mass filtered by the mass analyzer of each of the analysis channels, and the ion intensity signal is recorded by the corresponding ion detector. The output signals of each ion detector are synchronously acquired and processed to output parallel transient concentration curves of each target species.

13. The method according to claim 12, characterized in that, The step of exporting the target ions within each of the branch segments to the corresponding analysis channel via the outlet gate electrode segment includes: When the transient concentration of the target species is lower than a preset threshold, the exit gate electrode segment of the corresponding branch segment is configured to an accumulation trapping mode. During the duration of a single reaction pulse, the DC bias of the exit gate electrode segment is repeatedly switched at a preset frequency: in each cycle, a positive barrier voltage is applied to close the exit during the first duration to allow the target ions to accumulate in the branch segment; during the second duration, the voltage is switched to a low potential to open the exit and release the accumulated ion pack in the form of a narrow pulse to obtain an enhanced ion pulse signal. The first duration is greater than the second duration.

14. The method according to claim 13, characterized in that, The synchronous acquisition and processing of the output signals from each of the ion detectors, and the output of parallel transient concentration curves for each target species, includes: For data acquired using the cumulative trapping mode, enhanced pulse data within the corresponding time window is acquired by successively changing the delay time of the starting phase of the gate pulse sequence of each of the outlet gate electrode segments relative to the reaction trigger signal. The pulse data at each delay point are then spliced ​​and normalized to obtain a complete parallel transient concentration curve of the target species.

15. The method according to claim 14, characterized in that, The method of synchronously acquiring and processing the output signals of each of the ion detectors to output parallel transient concentration curves of each target species also includes: The collected data is folded and aligned according to the reaction cycle. The count rate at the same time offset position is accumulated and averaged in multiple reaction cycles. The integral intensity of the release pulse collected in the cumulative trapping mode is divided by the cumulative number of cycles to restore the equivalent intensity of a single cycle. The complete parallel transient concentration curve of each target species in the reaction pulse cycle is output, and the adsorption half-saturation time and adsorption rate constant are calculated.

16. An electronic device, characterized in that, include: A memory and a processor are communicatively connected, the memory storing computer instructions, and the processor executing the computer instructions to perform the multi-channel gas monitoring method according to any one of claims 12 to 15.

17. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions for causing the computer to perform the multi-channel gas monitoring method according to any one of claims 12 to 15.

18. A computer program product, characterized in that, Includes computer instructions for causing a computer to perform the multi-channel gas monitoring method according to any one of claims 12 to 15.

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