High-precision radio frequency impedance calibration method, radio frequency impedance test device and test system
Patent Information
- Application Number
- CN202611045965.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-14
- Publication Date
- 2026-10-30
Smart Images
Figure CN123009768A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of measurement technology, specifically relating to methods for measuring impedance, and more particularly to a high-precision radio frequency impedance calibration method, radio frequency impedance testing equipment, and testing system. Background Technology
[0002] 4G / 5G / 6G communications, millimeter-wave communications, satellite communications, and automotive radar all require high-frequency components, such as high-frequency inductors, RF capacitors, resonators, antennas, RF chips, and optical modules. The quality of these high-frequency components directly determines the quality of the equipment. During batch quality inspection of high-frequency components on production lines, inconsistencies arise due to multiple production lines and RF impedance devices producing inconsistent test results, and different workstations yielding different judgments for the same product. This leads to inconsistent quality control, necessitating standardized calibration of the RF impedance devices.
[0003] However, the test cables from the device under test (DUT) to the testing equipment on the production line are inevitably quite long. These cables cause significant signal loss and phase errors, making it difficult to calibrate the RF impedance testing equipment. Furthermore, the equivalent model of the test head fixture is far more complex than that of the test cable, and different test head fixtures have different equivalent models, even those for different workstations. Currently, it is impossible to model and compensate for various test head fixtures.
[0004] Therefore, there is an urgent need to develop a new high-precision radio frequency impedance calibration method, radio frequency impedance testing equipment and testing system to solve the technical problem of the impact of errors generated by test cables and test head tooling on the test results.
[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Summary of the Invention
[0006] This disclosure provides at least one high-precision radio frequency impedance calibration method, radio frequency impedance testing equipment, and testing system.
[0007] In a first aspect, embodiments of this disclosure provide a high-precision radio frequency impedance calibration method, comprising: connecting a radio frequency impedance testing device to a test component, such that the radio frequency impedance testing device performs a frequency sweep test on the test component within a frequency setting range, thereby calculating the average frequency difference between adjacent impedance peaks; the radio frequency impedance testing device calculates a compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency; and the radio frequency impedance testing device performs OSL single-port calibration on the test component based on the calibration test value.
[0008] In one alternative implementation, the method for calculating the average frequency difference between adjacent impedance peaks includes: the radio frequency impedance testing equipment acquiring the frequency difference between adjacent impedance peaks; and the radio frequency impedance testing equipment calculating the average value of all frequency differences, i.e., acquiring the average frequency difference F1 between adjacent impedance peaks.
[0009] In one optional implementation, the method for the RF impedance testing equipment to calculate the compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency includes: the RF impedance testing equipment constructing a compensation model; the RF impedance testing equipment inputting the average frequency difference, each test frequency, and the original test value corresponding to each test frequency into the compensation model to calculate the compensated calibration test value.
[0010] In one alternative implementation, the compensation model includes: ; ; ; ; ; in, The original test value corresponding to the test frequency. To calibrate the test values.
[0011] In one optional implementation, the test assembly includes: a test cable and a test fixture; the test fixture, the test cable, and the RF impedance test equipment are electrically connected in sequence; the test cable is adapted to be connected to the device under test, that is, the RF impedance test measures the impedance of the device under test through the test cable and the test fixture.
[0012] In one alternative implementation, the frequency setting ranges from 1 MHz to 5 GHz.
[0013] Secondly, this disclosure also provides a radio frequency impedance testing device, which includes a memory, a processor, and a computer program stored in the memory, characterized in that the processor executes the computer program to implement the steps of the above-described high-precision radio frequency impedance calibration method.
[0014] Thirdly, embodiments of this disclosure also provide a test system, comprising: the radio frequency impedance test equipment and test components as described above; the radio frequency impedance test equipment is configured to perform a frequency sweep test on the test components within a frequency setting range, thereby calculating the average frequency difference between adjacent impedance peaks; the radio frequency impedance test equipment is configured to calculate a compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency; the radio frequency impedance test equipment is configured to perform OSL single-port calibration on the test components based on the calibration test value.
[0015] Fourthly, embodiments of this disclosure also provide a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described high-precision radio frequency impedance calibration method.
[0016] Fifthly, embodiments of this disclosure also provide a computer program product, including a computer program, characterized in that, when the computer program is executed by a processor, it implements the steps of the above-described high-precision radio frequency impedance calibration method.
[0017] The beneficial effects of this invention are that it can calibrate the original test values by constructing a compensation model based on the average frequency difference, each test frequency, and the original test values, thereby compensating for the errors generated by the test components and preventing peaks and troughs in impedance testing. Furthermore, by calibrating through a single-port OSL, it can be adapted to all test components, enabling the highest test frequency to reach 5GHz and the highest test accuracy to reach 0.3% on automated production lines of RF impedance testing equipment.
[0018] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.
[0019] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0020] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0021] Figure 1 A flowchart illustrating the workflow of a high-precision radio frequency impedance calibration method provided in this disclosure embodiment; Figure 2 A hardware structure diagram of a radio frequency impedance testing device and testing components provided in this disclosure embodiment; Figure 3 A waveform diagram of obtaining the original test value by performing a frequency sweep test within a frequency setting range, as provided in an embodiment of this disclosure; Figure 4 A waveform diagram showing the effect of testing a 50-ohm standard component before compensation and after OSL calibration, provided as an embodiment of this disclosure; Figure 5A waveform diagram of a compensation-based frequency sweep test performed within a frequency setting range to obtain calibration test values, provided in an embodiment of this disclosure; Figure 6 The waveform diagram shows the effect of testing a 50-ohm standard part after compensation and OSL calibration, as provided in an embodiment of this disclosure.
[0022] In the picture: 1. RF impedance testing equipment; 2. Test cable; 3. Test fixture head; 4. Test piece. Detailed Implementation
[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0024] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0025] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0026] Research has revealed that 4G / 5G / 6G communications, millimeter-wave communications, satellite communications, and automotive radar require high-frequency components, such as high-frequency inductors, RF capacitors, resonators, antennas, RF chips, and optical modules. The quality of these high-frequency components directly determines the quality of the equipment. During batch quality inspection of high-frequency components on production lines, inconsistent test results from multiple production lines and RF impedance devices, as well as inconsistent judgments at different workstations for the same product, lead to inconsistent quality control. This necessitates unified calibration of the RF impedance devices. However, the test cables from the device under test (DUT) to the testing equipment on the production line are inevitably long, and the losses and phase errors caused by these cables are significant, making calibration of the RF impedance testing equipment difficult. Furthermore, the equivalent model of the test head fixture is much more complex than that of the test cable, and different test head fixtures, even at different workstations, have different equivalent models. Currently, it is impossible to model and compensate for various test fixture heads.
[0027] Based on the above research, this disclosure provides a high-precision RF impedance calibration method, RF impedance testing equipment, and testing system. By constructing a compensation model using the average frequency difference, various test frequencies, and original test values, the original test values can be calibrated to compensate for the errors generated by the test components, ensuring that impedance testing does not produce peaks and troughs. Furthermore, calibration is performed using a single-port OSL, which can adapt to all test components. This enables the RF impedance testing equipment to achieve a maximum test frequency of 5GHz and a maximum test accuracy of 0.3% on automated production lines.
[0028] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure below should be considered as the inventor's contribution to this disclosure.
[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0030] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0031] like Figures 1 to 6As shown, at least one embodiment provides a high-precision radio frequency impedance calibration method, which includes: connecting a radio frequency impedance testing device to a test component, so that the radio frequency impedance testing device performs a frequency sweep test on the test component within a frequency setting range, and then calculates the average frequency difference between adjacent impedance peaks; the radio frequency impedance testing device calculates a compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency; and the radio frequency impedance testing device performs OSL single-port calibration on the test component based on the calibration test value.
[0032] In at least one embodiment, a compensation model is constructed by using the average frequency difference, each test frequency, and the original test value to calibrate the original test value, compensate for the error generated by the test components, and prevent peaks and troughs in the impedance test. Then, calibration is performed by a single-port OSL, which can adapt to all test components and achieve a maximum test frequency of 5GHz and a maximum test accuracy of 0.3% on the automated production line of the RF impedance test equipment.
[0033] Specifically, please refer to Figure 3 When the test frequency reaches mid-to-high frequencies (greater than 100MHz) and the test components are complex, the signal propagation time within the test components will exceed the signal period. Signal reflection and superposition with the original signal will cause peaks and troughs in the impedance measurement. These peaks and troughs are frequency-dependent on the test components and the test signal. Because the frequencies at which peaks and troughs occur are generally not the calibration frequencies, traditional OSL single-port calibration may not perform well at these peaks and troughs. Please refer to [link to relevant documentation]. Figure 4 The peaks and troughs of impedance exhibit an exponential function, which can affect the test results.
[0034] Specifically, Figure 3 , Figure 4 The blue line represents the impedance magnitude, and the red line represents the phase angle.
[0035] In at least one embodiment, the method for calculating the average frequency difference between adjacent impedance peaks includes: the radio frequency impedance testing device acquiring the frequency difference between adjacent impedance peaks; the radio frequency impedance testing device calculating the average value of all frequency differences, i.e., acquiring the average frequency difference F1 between adjacent impedance peaks.
[0036] Specifically, the RF impedance testing equipment is connected to the test assembly, keeping the test head fixture in the test assembly in an open-circuit state. The RF impedance testing equipment is used to sweep the frequency from 1MHz to 5GHz. The original test results without any compensation or calibration are shown in the figure below. Figure 3 Calculate the frequency difference between each impedance peak, average the multiple frequency differences to improve the test accuracy, and obtain the average frequency difference F1.
[0037] In at least one embodiment, the method for the RF impedance testing device to calculate the compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency includes: the RF impedance testing device constructing a compensation model; the RF impedance testing device inputting the average frequency difference, each test frequency, and the original test value corresponding to each test frequency into the compensation model to calculate the compensated calibration test value.
[0038] In at least one embodiment, the compensation model includes: ; ; ; ; ; in, The original test value corresponding to the test frequency. To calibrate the test values.
[0039] Specifically, a vector is constructed using the average frequency difference F1, i.e. Because RF impedance testing uses 50 ohms as the characteristic impedance, two vectors of 50 and 1 are constructed, i.e. , The original test values for each impedance test frequency. Perform calculations to obtain new test values. and , It is the final calibration test value after compensating the test components.
[0040] Specifically, the impedance test results from 1MHz to 5GHz after compensation by the test components are as follows: Figure 5 The peaks and troughs of the impedance, which are exponential functions, have been compensated for and replaced by a more gently changing sine function.
[0041] Specifically, Figure 5 The blue line represents the impedance magnitude, and the red line represents the phase angle.
[0042] Specifically, by performing single-port OSL calibration on the test component, a good calibration effect can be achieved, eliminating the errors introduced by the test component. Even at 5GHz, high testing accuracy can be achieved. The final result after implementation, testing a 50-ohm standard component, is shown in the image below. Figure 6 Compared to direct OSL calibration without compensation Figure 4 The testing accuracy has been greatly improved.
[0043] Specifically, Figure 6 The blue line represents the impedance magnitude, and the red line represents the phase angle.
[0044] In at least one embodiment, please refer to Figure 2The test components include: test cable and test fixture head; the test fixture head, test cable, and RF impedance test equipment are electrically connected in sequence; the test cable is suitable for connection to the device under test, that is, the RF impedance test measures the impedance of the device under test through the test cable and test fixture head.
[0045] In at least one embodiment, the frequency setting range is from 1MHz to 5GHz.
[0046] Based on the same technical concept, at least one embodiment also provides a radio frequency impedance testing device, which includes a memory, a processor and a computer program stored in the memory, characterized in that the processor executes the computer program to implement the steps of the above-described high-precision radio frequency impedance calibration method.
[0047] Based on the same technical concept, at least one embodiment also provides a test system, which includes: the radio frequency impedance test equipment and test components as described above; the radio frequency impedance test equipment is configured to perform a frequency sweep test on the test components within a frequency set range, and then calculate the average frequency difference between adjacent impedance peaks; the radio frequency impedance test equipment is configured to calculate a compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency; the radio frequency impedance test equipment is configured to perform OSL single-port calibration on the test components based on the calibration test value.
[0048] Based on the same technical concept, at least one embodiment also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described high-precision radio frequency impedance calibration method.
[0049] Based on the same technical concept, at least one embodiment also provides a computer program product, including a computer program, characterized in that the computer program, when executed by a processor, implements the steps of the above-described high-precision radio frequency impedance calibration method.
[0050] In summary, this invention constructs a compensation model using the average frequency difference, various test frequencies, and original test values to calibrate the original test values, compensate for the errors generated by the test components, and prevent peaks and troughs in impedance testing. Furthermore, calibration is performed using a single-port OSL, enabling it to adapt to all test components and achieve a maximum test frequency of 5GHz and a maximum test accuracy of 0.3% on automated production lines of RF impedance testing equipment.
[0051] The disclosures and other solutions, examples, embodiments, modules, and functional operations described in this document can be implemented in digital electronic circuits, or computer software, firmware, or hardware, including the structures disclosed in this document and their structural equivalents, or combinations thereof. The disclosures and other embodiments can be implemented as one or more computer program products, i.e., one or more modules of computer program instructions encoded on a tangible and non-volatile computer-readable medium for execution by a data processing apparatus or for controlling the operation of the data processing apparatus. The computer-readable medium can be a machine-readable storage device, a machine-readable storage substrate, a storage device, a material composition that influences machine-readable propagated signals, or one or more of these. The terms "data processing unit" or "data processing apparatus" include all means, devices, and machines for processing data, including, for example, programmable processors, computers, or multiprocessors or computer groups. In addition to hardware, the apparatus may also include code that creates an execution environment for a computer program, such as code constituting processor firmware, a protocol stack, a database management system, an operating system, or combinations thereof. The propagated signals are artificially generated signals, such as machine-generated electrical, optical, or electromagnetic signals, which are generated to encode information for transmission to a suitable receiver device.
[0052] Computer programs (also known as programs, software, software applications, scripts, or code) can be written in any programming language (including compiled or interpreted languages) and can be deployed in any form, including as standalone programs or as modules, components, subroutines, or other units suitable for use in a computing environment. A computer program does not necessarily correspond to a file in a file system. A program can be stored in a portion of a file that holds other programs or data (e.g., one or more scripts stored in a markup language document), in a single file dedicated to that program, or in multiple coordinating files (e.g., a file storing one or more modules, subroutines, or portions of code). Computer programs can be deployed and executed on one or more computers located at a single site or distributed across multiple sites interconnected by a communication network.
[0053] The processing and logic flows described in this document can be executed by one or more programmable processors that execute one or more computer programs to perform functions by manipulating input data and generating outputs. The processing and logic flows can also be executed by special-purpose logic circuitry, and the devices can be implemented as special-purpose logic circuitry, such as FPGAs (Field-Programmable Gate Arrays) or ASICs (Application-Specific Integrated Circuits).
[0054] For example, processors suitable for executing computer programs include general-purpose and special-purpose microprocessors, as well as any one or more of any type of digital computer. Typically, the processor receives instructions and data from read-only memory or random access memory, or both. The basic components of a computer are a processor that executes instructions and one or more storage devices that store the instructions and data. Typically, a computer will also include one or more mass storage devices for storing data, such as magnetic disks, magneto-optical disks, or optical disks, or operatively coupled to receive data from or transfer data to mass storage devices, or both. However, a computer does not necessarily have such devices. Computer-readable media suitable for storing computer program instructions and data include all forms of non-volatile memory, media, and memory devices, including, for example, semiconductor memory devices such as erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), and flash memory devices; magnetic disks, such as internal hard disks or removable disks; magneto-optical disks; and optical disc read-only memory (CD ROM) and digital versatile optical disc read-only memory (DVD-ROM). The processor and memory may be supplemented by dedicated logic circuitry or incorporated into dedicated logic circuitry.
[0055] While this patent document contains numerous details, it should not be construed as limiting the scope of any invention or claim, but rather as a description of features of specific embodiments of a particular invention. Certain features described in the context of individual embodiments may also be implemented in combination in a single embodiment. Conversely, various functions described in the context of a single embodiment may also be implemented individually in multiple embodiments, or in any suitable sub-combination. Furthermore, although the foregoing features may be described as functioning in certain combinations, or even initially claimed to be so, in certain circumstances, one or more features from a combination of claims may be removed from the combination, and a combination of claims may refer to a sub-combination or a variation of a sub-combination.
[0056] Similarly, although the operations are described in a specific order in the accompanying drawings, this should not be construed as requiring the specific order or sequence shown to perform such operations, or all the described operations, in order to obtain the desired result. Furthermore, the separation of various system components in the embodiments of this patent document should not be construed as requiring such separation in all embodiments.
[0057] Only some implementations and examples are described; other implementations, enhancements, and variations can be made based on the content described and illustrated in this patent document.
[0058] When no intermediate component exists other than a line, trace, or other medium between the first and second components, the first component is directly coupled to the second component. When an intermediate component other than a line, trace, or other medium exists between the first and second components, the first component is indirectly coupled to the second component. The term "coupling" and its variations include direct coupling and indirect coupling. Unless otherwise stated, the term "about" is used to mean a range including upper and lower 10% of the value.
[0059] While several embodiments are provided in this disclosure, it should be understood that the disclosed systems and methods may be embodied in many other specific forms without departing from the spirit or scope of this disclosure. The present examples are intended to be illustrative rather than restrictive and are not limited to the details given. For example, various elements or components may be combined or integrated into another system, or certain features may be omitted or not implemented.
[0060] In the several embodiments provided herein, it should be understood that the disclosed apparatus and methods can also be implemented in other ways. The apparatus embodiments described above are merely illustrative; for example, the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of apparatus, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in a block diagram and / or flowchart, and combinations of blocks in block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.
[0061] Furthermore, without departing from the scope of this disclosure, the discrete or individual technologies, systems, subsystems, and methods described and illustrated in the various embodiments may be combined or integrated with other systems, modules, technologies, or methods. Other items shown or discussed as coupled may be directly connected or indirectly coupled or communicated via some interface, device, or intermediate component in an electrical, mechanical, or other manner. Those skilled in the art can identify other examples of changes, substitutions, and modifications without departing from the spirit and scope of this disclosure.
Claims
1. A high-precision radio frequency impedance calibration method, characterized in that, include: Connect the RF impedance test equipment to the test component so that the RF impedance test equipment can perform frequency sweep test on the test component within the frequency set range, and then calculate the average frequency difference between adjacent impedance peaks. The RF impedance testing equipment calculates the compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency. The RF impedance test equipment performs OSL single-port calibration on the test components based on the calibration test values.
2. The high-precision radio frequency impedance calibration method as described in claim 1, characterized in that, Methods for calculating the average frequency difference between adjacent impedance peaks include: Radio frequency impedance testing equipment obtains the frequency difference between adjacent impedance peaks; The RF impedance testing equipment calculates the average value of all frequency differences, that is, obtains the average frequency difference F1 between adjacent impedance peaks.
3. The high-precision radio frequency impedance calibration method as described in claim 2, characterized in that, Methods for calculating compensated calibration test values using RF impedance testing equipment based on the average frequency difference, each test frequency, and the original test values corresponding to each test frequency include: Constructing a compensation model for RF impedance testing equipment; The RF impedance testing equipment inputs the average frequency difference, each test frequency, and the original test value corresponding to each test frequency into the compensation model to calculate the compensated calibration test value.
4. The high-precision radio frequency impedance calibration method as described in claim 3, characterized in that, The compensation model includes: ； ； ； ； ； in, The original test value corresponding to the test frequency. To calibrate the test values.
5. The high-precision radio frequency impedance calibration method as described in claim 1, characterized in that, The test components include: test cables and test fixtures; The test fixture head, test cable, and RF impedance test equipment are electrically connected in sequence. The test cable is suitable for connection to the device under test (DUT), that is, the impedance of the DUT is measured by the test cable and the test fixture head through the RF impedance test.
6. The high-precision radio frequency impedance calibration method as described in claim 1, characterized in that, The frequency setting range is from 1MHz to 5GHz.
7. A radio frequency impedance testing device, characterized in that, The device includes a memory, a processor, and a computer program stored in the memory, characterized in that the processor executes the computer program to implement the steps of the high-precision radio frequency impedance calibration method according to any one of claims 1-6.
8. A testing system, characterized in that, include: The RF impedance testing equipment and testing components as described in claim 7; The radio frequency impedance testing equipment is configured to perform frequency sweep testing on the test component within a set frequency range, and then calculate the average frequency difference between adjacent impedance peaks. The radio frequency impedance testing equipment is configured to calculate the compensated calibration test value based on the average frequency difference, each test frequency, and the original test value corresponding to each test frequency. The radio frequency impedance test equipment is configured to perform OSL single-port calibration on the test components based on calibration test values.
9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the high-precision radio frequency impedance calibration method according to any one of claims 1-6.
10. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the steps of the high-precision radio frequency impedance calibration method according to any one of claims 1-6.