A z-axis displacement adjustment platform and method

Abstract

The application provides a Z-axis displacement adjusting platform and method, relates to the technical field of precise optical instruments, and the adjusting platform comprises a supporting unit, a screw rod, a sliding block and a clearance elimination unit, the screw rod is connected with the sliding block through a threaded part on the screw rod, an angle exists between the bottom surface of a lifting unit and the screw rod, and the bottom surface of the lifting unit is slidingly connected with the sliding block, so that the sliding block drives the lifting unit to be adjusted in the vertical direction, the structure is simple, the adjusting precision is high, and the vertical adjusting precision is less than or equal to 10 microns; in addition, the clearance elimination unit is arranged on the screw rod and is used for eliminating the clearance generated by the threaded part on the screw rod during transmission, and the coupling between the clearance elimination unit and the sliding block and the lifting unit can effectively control the return stroke clearance and the positioning error, so that the stability and the precision can be effectively ensured even after long-term work, and the technical problems of the prior art, such as large return stroke clearance, high positioning error, complex structure and poor long-term use stability, are solved.

Description

Technical Field

[0001] This invention relates to the field of precision optical instrument technology, specifically to a Z-axis displacement adjustment platform and method. Background Technology

[0002] As a core component of precision motion control equipment, the Z-axis adjustment platform mainly performs high-precision displacement adjustment in the vertical direction (Z-axis). It is widely used in many high-end fields such as optical measurement, semiconductor manufacturing, and precision machining. It is a key basic component supporting the upgrading of high-end equipment manufacturing industry towards precision and intelligence. Gradually, higher positioning requirements have been put forward for the Z-axis adjustment platform.

[0003] Z-axis adjustment platforms are mostly driven by lead screws and slide rails. During the machining process, lead screw threads inevitably have manufacturing deviations such as pitch error and tooth profile half angle error. These errors accumulate in the threaded transmission and are converted into vertical displacement deviations, which directly affect the adjustment accuracy, resulting in large return backlash and high positioning error. Moreover, due to the complex and large structure of existing adjustment platforms, they are not suitable for working in space-constrained conditions. Furthermore, their stability and accuracy decrease after long-term use. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art, thereby providing a Z-axis displacement adjustment platform and method.

[0005] A Z-axis displacement adjustment platform includes a sliding unit and a lifting unit. The sliding unit includes a support unit, a lead screw, and a sliding block. The lead screw includes a guide rod portion and a threaded portion. The guide rod portion is mounted on the support unit, and the threaded portion is connected to the sliding block. The lifting unit is slidably mounted on the support unit in a vertical direction, and there is an angle between the bottom surface of the lifting unit and the lead screw. The bottom surface of the lifting unit is slidably connected to the sliding block, and the lead screw is also equipped with a backlash elimination unit to eliminate the backlash generated by the threaded part of the lead screw during the transmission process.

[0006] Furthermore, the backlash elimination unit includes a spring sleeve and a backlash elimination spring. The spring sleeve is installed on the threaded portion of the lead screw, and the backlash elimination spring is installed between the spring sleeve and the sliding block.

[0007] Furthermore, the upper block on the sliding block is parallel to the bottom surface of the lifting unit, and the lower block on the sliding block is parallel to the horizontal plane.

[0008] Furthermore, the sliding block is provided with a first anti-rotation block, which is installed on the threaded part of the lead screw. The first anti-rotation block has an anti-rotation groove. The spring sleeve is provided with a second anti-rotation block, which is installed in conjunction with the anti-rotation groove.

[0009] Furthermore, the included angle between the bottom surface of the lifting unit and the lead screw... satisfy: .

[0010] Furthermore, the lifting unit includes an upper guide rail, an upper slider, and a lifting block. The upper slider is slidably mounted on the upper guide rail, the upper slider is connected to the upper block, and the upper guide rail is connected to the lifting block.

[0011] Furthermore, the sliding unit also includes a lower guide rail and a lower slider, the lower slider being slidably mounted on the lower guide rail and connected to the lower block.

[0012] Furthermore, the support unit includes a base plate, a baffle, a bearing, and a pressure ring. The base plate is located below the lead screw. Baffles are spliced ​​and installed around the lead screw and on its top. The base plate and the baffles are connected. The outer ring of the bearing is installed on the baffle. The inner ring of the bearing is fitted with the guide bar on the lead screw. The pressure ring is installed between the bearing and the baffle. The adjustment platform also includes a cross roller guide rail, which is installed between the lifting block and the baffle.

[0013] Furthermore, a cutting plane is provided on the guide rod portion of the lead screw, a baffle is provided on the cutting plane, and a hand button is also installed on the lead screw. The hand button has a slot, and the baffle and guide rod portion are fitted together and installed in the slot.

[0014] This invention also includes a Z-axis displacement adjustment method, which is based on a Z-axis displacement adjustment platform as described in any of the above claims. The method involves rotating a lead screw, with the threaded portion engaging with a sliding block to cause the sliding block to slide along the lead screw. This is because there is an angle between the bottom surface of the lifting unit and the lead screw. The sliding block drives the lifting unit to adjust its vertical displacement.

[0015] The technical solution of this invention has the following advantages: In the technical solution provided by this invention, the threaded part on the lead screw is connected to the sliding block. There is an angle between the bottom surface of the lifting unit and the lead screw, and the bottom surface of the lifting unit is slidably connected to the sliding block. This allows the sliding block to drive the lifting unit to adjust its vertical displacement. The structure is simple and the adjustment accuracy is high, with a vertical adjustment accuracy of less than or equal to 10 micrometers. In addition, the lead screw is also equipped with a backlash elimination unit to eliminate the backlash generated by the threaded part on the lead screw during the transmission process. The coupling between the backlash elimination unit, the sliding block, and the lifting unit can effectively control the return backlash and positioning error, and can effectively ensure stability and accuracy even after long-term operation. Attached Figure Description

[0016] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic cross-sectional view of the overall structure of the present invention; Figure 3 This is a schematic diagram showing the installation position of the crossed roller guide of the present invention; Figure 4 This is a schematic diagram of the cross roller guide of the present invention; Figure 5 This is a schematic diagram of the upper and lower guide rails of the present invention; Figure 6 This is a schematic diagram of the structure of the hand button of the present invention; Figure 7 This is a schematic diagram of the sliding block of the present invention; Figure 8 This is a schematic diagram of the structure of the spring sleeve of the present invention; Figure 9 This is a front view schematic diagram of the installation of the roller of the present invention; Figure 10 This is a schematic diagram showing the installation position of the crossed roller guide of the present invention.

[0018] 1-Base plate; 2-Baffle; 3-Hand button; 301-Slot; 4-Sliding block; 401-Upper block; 402-Lower block; 403-First anti-rotation block; 5-Spring sleeve; 501-Second anti-rotation block; 6-Backlash-eliminating spring; 7-Lifting block; 8-Upper guide rail; 9-Bearing; 10-Pressure ring; 11-Baffle plate; 12-Connecting bolt; 13-Screw rod; 14-Lower guide rail; 15-Cross roller guide rail; 1501-Guide guide rail; 1502-Roller; 16-Upper slider; 17-Lower slider. Detailed Implementation

[0019] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0023] like Figure 2 and Figure 5 The Z-axis displacement adjustment platform shown includes a sliding unit and a lifting unit. The sliding unit includes a support unit, a lead screw 13, and a sliding block 4. The lead screw 13 includes a guide rod portion and a threaded portion. The guide rod portion is mounted on the support unit, and the threaded portion is connected to the sliding block 4. The lifting unit is slidably mounted on the support unit in the vertical direction, and there is an angle between the bottom surface of the lifting unit and the lead screw 13. The bottom surface of the lifting unit is slidably connected to the sliding block 4, and the lead screw 13 is also equipped with a backlash elimination unit to eliminate the backlash generated by the threaded part of the lead screw 13 during the transmission process.

[0024] The aforementioned Z-axis displacement adjustment platform is connected to the sliding block 4 via the threaded portion of the lead screw 13. There is an angle between the bottom surface of the lifting unit and the lead screw 13, and the bottom surface of the lifting unit is slidably connected to the sliding block 4. This allows the sliding block 4 to drive the lifting unit to perform vertical displacement adjustment. The structure is simple, and the adjustment accuracy is high, with a vertical adjustment accuracy of less than or equal to 10 micrometers. In addition, the lead screw 13 is also equipped with a backlash elimination unit to eliminate the backlash generated by the threaded portion of the lead screw 13 during the transmission process. The coupling between the backlash elimination unit, the sliding block 4, and the lifting unit can effectively control the return backlash and positioning error, and can effectively ensure stability and accuracy even after long-term operation.

[0025] like Figure 2 and Figure 5 As shown, in this embodiment, the backlash elimination unit includes a spring sleeve 5 and a backlash elimination spring 6. The spring sleeve 5 is installed on the threaded portion of the lead screw 13, and the backlash elimination spring 6 is installed between the spring sleeve 5 and the sliding block 4. In optical precision machining, accuracy is the most important indicator. During the machining process, the threads of the lead screw 13 inevitably have manufacturing deviations such as pitch error and tooth profile half-angle error. These errors accumulate and are converted into vertical displacement deviations during threaded transmission, directly affecting the adjustment accuracy. Consequently, when the lead screw 13 is connected to the spring sleeve 5 and the sliding block 4 through threaded connection, there will inevitably be a certain clearance. When the entire internal mechanism is working, the threaded connection will generate a period of idle travel, i.e., return clearance, which will cause inaccurate Z-axis positioning adjustment. This backlash is particularly prominent in precision machining processes that require frequent reciprocating adjustments, especially after long-term use when the components wear out, seriously affecting the positioning accuracy. Regarding accuracy and reliability, while existing technologies have attempted to compensate for gaps using methods such as double-nut preload and adjusting shims, these solutions are either inconvenient to adjust or cannot achieve real-time dynamic automatic compensation of gaps during wear. This leads to a continuous decrease in the accuracy of the mechanism over time. In contrast, the backlash-eliminating spring 6 automatically extends or releases tension, continuously pressing against the mating surface to ensure continuous zero gap. This results in good accuracy retention throughout the lifespan of the entire adjustment platform. Furthermore, the backlash-eliminating spring 6 applies axial spring force, which can simultaneously apply preload to both the spring sleeve 5 and the sliding block 4 in two directions, ensuring zero gap during both forward and reverse rotation, resulting in extremely high reliability. At the same time, the coupling between the spring 6 and the sliding block 4 and the lifting unit can further effectively control the return gap and positioning error. Even after long-term operation, it can effectively ensure the stability of the lifting unit and the Z-axis displacement adjustment accuracy, thereby improving the overall stability and service life of the adjustment platform.

[0026] like Figure 2 , Figure 3 , Figure 5 and Figure 7 As shown, in this embodiment, the upper block 401 on the sliding block 4 is parallel to the bottom surface of the lifting unit, and the lower block 402 on the sliding block 4 is parallel to the horizontal plane; the lifting unit includes an upper guide rail 8, an upper slider 16, and a lifting block 7. The upper slider 16 is slidably mounted on the upper guide rail 8 and is fixedly connected to the upper block 401. The upper guide rail 8 and the lifting block 7 are fixedly connected by screws; the sliding unit also includes a lower guide rail 14 and a lower slider 17. The lower slider 17 is slidably mounted on the lower guide rail 14 and the lower slider... 17 is fixedly connected to the lower block 402; the thrust of the lead screw 13 acts in the middle of the height direction of the sliding block 4, the bottom is the horizontal thrust of the lower guide rail 14, and the top is the inclined surface counter-thrust in the direction of the upper guide rail 8. The thrust is directly applied to the center of gravity of the sliding block 4. When the sliding block 4 slides horizontally, there is no forward or backward torque, the sliding resistance is very small and extremely linear, and the entire sliding block 4 is evenly stressed. While ensuring the adjustment accuracy, it also ensures that the adjustment is more labor-saving and the structure is stable.

[0027] like Figure 2 , Figure 5 , Figure 7 and Figure 8 As shown, in this embodiment, a first anti-rotation block 403 is provided on the sliding block 4. The first anti-rotation block 403 is installed on the threaded part of the lead screw 13. An anti-rotation groove is opened on the first anti-rotation block 403. A second anti-rotation block 501 is provided on the spring sleeve 5. The second anti-rotation block 501 is installed in conjunction with the anti-rotation groove. The first anti-rotation block 403 and the sliding block 4 are an integral structure. The first anti-rotation block 403 and the second anti-rotation block 501 are both arranged in pairs and cross-connected. By installing the second anti-rotation block 501 in conjunction with the anti-rotation groove, even during the rotation of the lead screw 13, there will be no relative rotation between the sliding block 4 and the spring sleeve 5. The two remain stationary, thereby ensuring that the backlash-eliminating spring 6 will not be displaced. This ensures that the backlash-eliminating spring 6 can always maintain real-time dynamic automatic compensation for the gap, avoiding failure of the gap elimination function.

[0028] like Figure 2 , Figure 3 and Figure 5 As shown in the figure, in this embodiment, the angle between the bottom surface of the lifting unit and the lead screw 13 is... satisfy: Setting the angle between the bottom surface of the lifting unit and the lead screw 13 according to the above angle ensures the compactness of the structure. If the angle is too small, the horizontal path required for the lifting process will be longer, resulting in a larger space occupied by the structure. At the same time, if the angle is too large, the rotational force when rotating the lead screw 13 will be greater, which means it is not convenient to adjust the horizontal movement of the lead screw 13. Within the above range, it is easier to adjust the Z-axis displacement height by rotating the lead screw 13. Moreover, if the angle is too large, the vertical component of the lifting block 7 pressing on the upper guide rail 8 and the upper slider 16 will decrease, while the horizontal lateral pushing component will increase. This will aggravate the eccentric load moment borne by the upper guide rail 8 and the upper slider 16, affecting the service life and stability of the structure.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 9 and Figure 10As shown, in this embodiment, the support unit includes a base plate 1, a baffle 2, a bearing 9, and a pressure ring 10. The base plate 1 is located below the lead screw 13. Baffles 2 are spliced ​​and installed around and on the top of the lead screw 13. The base plate 1 and the baffle 2 are connected. The outer ring of the bearing 9 is installed on the baffle 2, and the inner ring of the bearing 9 is fitted with the guide bar on the lead screw 13. The pressure ring 10 is installed between the bearing 9 and the baffle 2. The adjustment platform also includes a cross roller guide rail 15, which is installed between the lifting block 7 and the baffle 2. The base plate 1 and the baffle 2 form a box structure for the adjustment platform, which also ensures the smooth lifting and lowering of the lifting block 7 to achieve displacement adjustment and protects other moving parts. The lower guide rail 14 is fixedly installed on the base plate 1 with screws. From a top view, the cross section of the lifting block 7 is approximately cross-shaped. Corresponding reserved positions are provided at the four corners between the lifting block 7 and the baffle 2. A cross roller guide 15 is installed therein. The cross roller guide 15 consists of two guide rails 1501 and a roller 1502 installed in the middle. The two guide rails 1501 can move relative to each other by rolling the roller 1502. During installation, one guide rail 1501 is fixed to the baffle 2 with bolts, while the other guide rail 1501 is installed on the lifting block 7. During the lifting process, the cross roller guides 15 at the four corners of the lifting block 7 can provide guidance, increase the stability of the lifting process, and effectively improve the adjustment accuracy. In addition, a set screw is provided on the baffle 2 on the side. The accuracy can also be adjusted by adjusting the set screw to tighten the cross roller guide 15. The bearing 9 is used to support the rotation of the lead screw 13, while the pressure ring 10 is used to ensure that the lead screw 13 rotates smoothly without jamming, and at the same time ensures that the axial movement of the lead screw 13 is less than or equal to 0.002 mm.

[0030] like Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, in this embodiment, a cutting plane is provided on the guide bar portion of the lead screw 13, and a baffle 11 is provided on the cutting plane. A hand button 3 is also installed on the lead screw 13. The hand button 3 is fixedly installed on the lead screw 13 by a connecting bolt 12. A slot 301 is provided on the hand button 3, and the baffle 11 and the guide bar portion are fitted into the slot 301. By fitting the baffle 11 and the guide bar portion into the slot 301, the lead screw 13 can be rotated and adjusted by using the hand button 3 during Z-axis adjustment, saving time and effort.

[0031] like Figure 1 , Figure 2 , Figure 3 , Figure 5 , Figure 6 and Figure 7As shown, the present invention also includes a Z-axis displacement adjustment method, which is implemented based on a Z-axis displacement adjustment platform described in any of the above claims. Rotating the lead screw 13 causes the threaded portion to engage with the sliding block 4, driving the sliding block 4 to slide along the lead screw 13. Since there is an angle between the bottom surface of the lifting unit and the lead screw 13... The sliding block 4 drives the lifting unit to adjust its vertical displacement. Specifically, turning the knob 3 causes the lead screw 13 to rotate and adjust, and the sliding block 4 moves linearly simultaneously. Its bottom slides along the lower guide rail 14, and the top block 401 drives the upper slider 16 to slide along the upper guide rail 8. Because there is an angle between the bottom surface of the lifting block 7 and the lead screw 13, the lifting block 7 can adjust its Z-axis height. Actual verification shows that the adjustment accuracy is less than or equal to 10 micrometers. The operation is smooth and effortless, and the accuracy and stability are guaranteed even after long-term use. Table 1 below shows the angle between the bottom surface of the lifting unit and the lead screw 13. A height displacement adjustment test was conducted using 20° as an example. The results show the number of rotations of the knob 3, the theoretical lifting value, the actual lifting value, and the actual lowering value of the lifting block 7, all in millimeters. Table 1. Height Displacement Adjustment Test Data

[0032] The above test data can be divided into two groups. The first group rotates 10 times, and the actual lifting accuracy is less than 10 micrometers, which is equivalent to the repeatability accuracy. The second group rotates 20 times, and the data before and after are also less than 10 micrometers apart. The two groups of data are then compared to prove that the adjustment accuracy of the scheme is high.

[0033] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A Z-axis displacement adjustment platform, comprising: The sliding unit and the lifting unit are characterized in that the sliding unit includes a support unit, a lead screw (13) and a sliding block (4), the lead screw (13) includes a guide rod part and a threaded part, the guide rod part is mounted on the support unit, the threaded part is connected to the sliding block (4), the lifting unit is slidably mounted on the support unit in the vertical direction, and there is an angle between the bottom surface of the lifting unit and the lead screw (13). The bottom surface of the lifting unit is slidably connected to the sliding block (4), and the screw (13) is also equipped with a backlash elimination unit to eliminate the backlash generated by the threaded part of the screw (13) during the transmission process.

2. The Z-axis displacement adjustment platform according to claim 1, characterized in that, The backlash elimination unit includes a spring sleeve (5) and a backlash elimination spring (6). The spring sleeve (5) is installed on the threaded part of the lead screw (13), and the backlash elimination spring (6) is installed between the spring sleeve (5) and the sliding block (4).

3. The Z-axis displacement adjustment platform according to claim 1, characterized in that, The upper block (401) on the sliding block (4) is parallel to the bottom surface of the lifting unit, and the lower block (402) on the sliding block (4) is parallel to the horizontal plane.

4. The Z-axis displacement adjustment platform according to claim 2, characterized in that, The sliding block (4) is provided with a first anti-rotation block (403), which is installed on the threaded part of the lead screw (13). The first anti-rotation block (403) has an anti-rotation groove. The spring sleeve (5) is provided with a second anti-rotation block (501), which is installed in conjunction with the anti-rotation groove.

5. The Z-axis displacement adjustment platform according to claim 1, characterized in that, The angle between the bottom surface of the lifting unit and the lead screw (13) satisfy: .

6. A Z-axis displacement adjustment platform according to claim 3, characterized in that, The lifting unit includes an upper guide rail (8), an upper slider (16) and a lifting block (7). The upper slider (16) is slidably mounted on the upper guide rail (8). The upper slider (16) is connected to the upper block (401). The upper guide rail (8) is connected to the lifting block (7).

7. A Z-axis displacement adjustment platform according to claim 3, characterized in that, The sliding unit also includes a lower guide rail (14) and a lower slider (17). The lower slider (17) is slidably mounted on the lower guide rail (14) and is connected to the lower block (402).

8. A Z-axis displacement adjustment platform according to claim 6, characterized in that, The support unit includes a base plate (1), a baffle (2), a bearing (9), and a pressure ring (10). The base plate (1) is located below the lead screw (13). Baffles (2) are spliced ​​and installed around the lead screw (13) and on the top. The base plate (1) and the baffle (2) are connected. The outer ring of the bearing (9) is installed on the baffle (2). The inner ring of the bearing (9) is installed in conjunction with the guide bar on the lead screw (13). The pressure ring (10) is installed between the bearing (9) and the baffle (2). The adjustment platform also includes a cross roller guide rail (15). The cross roller guide rail (15) is installed between the lifting block (7) and the baffle (2).

9. A Z-axis displacement adjustment platform according to claim 1, characterized in that, The lead screw (13) has a cutting plane on the guide bar section, and a baffle (11) is provided on the cutting plane. A hand button (3) is also installed on the lead screw (13), and a slot (301) is provided on the hand button (3). The baffle (11) and the guide bar section are installed in the slot (301).

10. A Z-axis displacement adjustment method, wherein the method is implemented based on a Z-axis displacement adjustment platform as described in any one of claims 1 to 9, characterized in that, Rotating the lead screw (13) causes the threaded part to engage with the sliding block (4), which in turn drives the sliding block (4) to slide along the lead screw (13). This is because there is an angle between the bottom surface of the lifting unit and the lead screw (13). The sliding block (4) drives the lifting unit to adjust the vertical displacement.

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