Frame device for vertical exposure machine and vertical exposure machine

Abstract

The application discloses a frame device for vertical exposure machine, which is used for fixing and installing workpieces to be exposed. The frame device comprises a base, a first frame part, a second frame part and an air flow injection mechanism. The first frame part and the second frame part are vertically arranged on the base and used for fixing the position of the workpieces and vertically arranging the workpieces. The first frame part and the second frame part can be close to or away from each other, so that the workpieces between the first frame part and the second frame part are pressed when the first frame part and the second frame part are close to each other. The first frame part and the second frame part are both provided with through holes penetrating through the first frame part and the second frame part, and pressing parts are arranged in the through holes. The pressing parts have light transmission and are used for providing a path for exposure light. The air flow injection mechanism is arranged between the first frame part and the second frame part and is used for injecting air flow to support the workpieces and make the workpieces adhere to the surface of the pressing parts when compressed air is input. The application effectively improves the precision of vertical exposure operation and the double-side exposure capacity.

Description

Technical Field

[0001] This invention relates to the field of circuit board manufacturing equipment technology, and in particular to a frame device for a vertical exposure machine and a vertical exposure machine. Background Technology

[0002] Existing vertical exposure machines typically use a frame to hold the workpiece (the PCB to be exposed). The frame stands upright on a support base, keeping the workpiece in an upright position for exposure. During the process of loading the workpiece into the frame, it needs to be positioned and aligned on the frame to maintain an upright posture in contact with the flattening component before being secured. Currently, there are two main methods for positioning and aligning the workpiece within the frame: one is to use mechanical clamping or pressing devices, where the grippers or pressure blocks directly contact the workpiece to adjust its position. However, this method easily causes scratches or indentations on the workpiece surface, and for circuit boards already coated with ink, contact may damage the ink layer, affecting exposure quality; the other method relies on manual positioning, but manual operation suffers from poor consistency and low efficiency, making it difficult to meet the needs of automated production.

[0003] Furthermore, with the diversification of workpiece sizes and the increasing demand for double-sided exposure, the frame needs to minimize mechanical contact with the workpiece surface while ensuring the workpiece fits flat against the flattening component. How to straighten the workpiece and reliably fit it against the flattening component surface during the loading process into the vertical exposure machine frame is a pressing technical problem that needs to be solved in the design of the frame device. Summary of the Invention

[0004] The present invention aims to address the above-mentioned technical problems by providing a frame device for a vertical exposure machine and a vertical exposure machine.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A frame device for a vertical exposure machine is used to fix and install a workpiece to be exposed. The frame device includes: a base, a first frame portion, a second frame portion, and an airflow jetting mechanism. The first frame portion and the second frame portion are both erected on the base to fix the position of the workpiece and make the workpiece upright. The first frame portion and the second frame portion can move closer to each other or further away from each other so that the workpiece located between them is pressed together when they move closer to each other. The first frame portion and the second frame portion are each provided with a through hole, and a flattening component is installed in the through hole. The flattening component is light-transmitting and is used to provide a path for the exposure light to pass through. The airflow jetting mechanism is located between the first frame portion and the second frame portion and is used to spray airflow to straighten the workpiece and make it adhere to the surface of the flattening component when compressed air is introduced.

[0006] Thus, the workpiece is pressed between the first and second frames by the relative movement of the first and second frames. The light-transmitting flattening component supports and flattens the workpiece, ensuring its flatness in the upright state and providing a path for the exposure light on both sides of the frame. At the same time, the air jet mechanism uses airflow to straighten the workpiece and press it against the surface of the flattening component, avoiding scratches and contamination caused by mechanical contact. This ensures that the workpiece maintains the correct posture before the frames are closed and pressed, thereby meeting the requirements for double-sided exposure and light transmission while further improving exposure accuracy and yield.

[0007] According to embodiments of the present invention, the present invention can be further optimized, and the optimized technical solution is as follows: Optionally, the airflow injection mechanism is located at the bottom or side of the first or second frame. Thus, the airflow is injected upwards from the bottom, lifting the workpiece and pushing it towards the flattening component. Under the combined action of gravity and airflow, the workpiece naturally conforms to the surface of the flattening component, achieving rapid straightening.

[0008] Optionally, the air jet mechanism is an air knife mechanism, used to eject airflow to straighten the workpiece so that it does not tip over.

[0009] Optionally, the air outlet includes a set of slits or a set of micropores.

[0010] Therefore, the air knife mechanism sprays a uniform planar air curtain through the air outlet, forming a uniform supporting force on the entire surface of the workpiece, avoiding uneven local force that could cause the workpiece to tilt.

[0011] Optionally, the width of the slit is 0.1 mm to 0.5 mm. This width range ensures that the air curtain has sufficient impact force while maintaining the uniformity and stability of the airflow. It avoids both excessively wide air outlets that lead to airflow dispersion and insufficient support, and excessively narrow air outlets that lead to excessively high airflow velocity and impact shaking of the workpiece.

[0012] Optionally, the diameter of the micropores is 0.1 mm to 0.5 mm.

[0013] Optionally, the air knife mechanism further includes a first housing, an air inlet connected to an external air supply device, and an airflow channel located inside the first housing; the air outlet is located on the upper surface of the first housing and communicates with the airflow channel. Thus, the airflow provided by the external air supply device flows into the airflow channel through the air inlet and is ejected from the air outlet, forming a uniform and stable air curtain that applies a continuous and stable supporting force to the workpiece.

[0014] Optionally, the air outlet is angled upwards and aligned with the flattening component, and multiple air outlets are provided along the length of the first housing. Thus, the air outlets extend along the length to form a linear airflow, ensuring uniform airflow distribution across the width of the flattening component, guaranteeing balanced force on all parts of the workpiece, and preventing localized poor adhesion; the angled upward alignment of the air outlets with the flattening component pushes the workpiece against the surface of the flattening component, achieving proper adhesion.

[0015] Optionally, the outer periphery of the flattening member (5) in the first frame portion (2) and / or the second frame portion (3) is provided with a plurality of air blowing holes; one end of the air blowing hole is connected to an external air source, and the other end of the air blowing hole is used to eject airflow to the frame portion on the other side.

[0016] Optionally, the plurality of air-blowing holes in the first frame (2) are used to assist the workpiece in separating from the flattening member (5) when the workpiece is removed.

[0017] Optionally, the plurality of air-blowing holes in the second frame (3) are used to straighten the workpiece so that it does not tip over when the first frame (2) and the second frame (3) are close to each other.

[0018] Optionally, the airflow ejection direction of each of the air-blowing through holes is perpendicular to the surface of the workpiece.

[0019] Optionally, the airflow injection mechanism further includes a second housing, an air outlet plate hinged to the upper surface of the second housing, and a telescopic push rod disposed inside the second housing; the output end of the telescopic push rod is hinged to the air outlet plate and is used to adjust the angle between the air outlet plate and the first housing to adjust the air outlet angle.

[0020] Optionally, the air outlet plate includes at least a first air outlet plate located in the middle and a second air outlet plate located on both sides of the first air outlet plate, which are separated from each other. The first air outlet plate and the second air outlet plate are respectively equipped with a telescopic push rod that can adjust their angle, so as to control the lifting angle of each air outlet plate according to the size and position of the workpiece.

[0021] Optionally, the frame device further includes a drive mechanism and a guide rail located on the base plate; the first frame portion is fixedly mounted on the base, and the second frame portion is movably mounted on the guide rail and driven by the first drive mechanism to move closer to or away from the first frame portion; or, the second frame portion is fixedly mounted on the base, and the first frame portion is movably mounted on the guide rail and driven by the first drive mechanism to move closer to or away from the second frame portion. Thus, the guide rail provides a precise motion trajectory for guidance, ensuring that the frame portion remains parallel and aligned with the other frame portion during reciprocating motion, resulting in uniform pressure on the workpiece; the structural layout is flexible, the drive method is simple, and automated control of clamping and releasing between the frame portions can be achieved.

[0022] Optionally, the frame device further includes a support device located at the bottom of the first or second frame portion and above the airflow jet mechanism, for supporting the bottom of the workpiece. Thus, while the airflow straightens the workpiece, the support device supports the workpiece from the bottom, preventing it from falling or shifting due to gravity during the straightening process, further improving the accuracy and stability of workpiece positioning.

[0023] Optionally, the support device includes a plurality of positioning pins arranged along the length of the first frame. Thus, the positioning pins can provide multi-point positioning for the bottom edge of the workpiece, ensuring the consistency of the workpiece's position in the width direction while avoiding surface contact with the workpiece surface, reducing the contact area and the impact on the workpiece surface.

[0024] Optionally, an inflatable sealing strip is provided on the side of the first frame facing the second frame, and a vacuum hole is provided within the range of the inflatable sealing strip. Thus, when the two frames are pressed together, the inflatable sealing strip inflates to achieve a seal between the frames, and the vacuum hole extracts the gas from the cavity between the frames, allowing the workpiece to adhere more tightly to the surface of the flattened part under negative pressure, further improving the flatness of the workpiece; at the same time, the inflatable design of the sealing strip makes the sealing contact and detachment controllable, facilitating the handling of the workpiece.

[0025] Optionally, the gas needs to be dried by a drying device before entering the gas jet mechanism. This drying device removes moisture from the compressed air, preventing humid airflow from directly blowing onto the workpiece surface and affecting ink performance or causing workpiece deformation due to moisture, thus ensuring exposure quality and workpiece reliability.

[0026] Optionally, the gas needs to be filtered by a filter device before entering the airflow injection mechanism. This filter device removes impurities such as dust and oil mist from the compressed air, preventing these impurities from being blown onto the workpiece surface or flattened part surface by the airflow, thus avoiding contamination and affecting exposure clarity and product yield.

[0027] Optionally, the airflow injection mechanism further includes dynamic stabilization units disposed on the left and right sides of the flattening component; each dynamic stabilization unit includes a first track arranged along the height direction of the first frame, a third body that can move vertically along the first track, and a vision camera and an air outlet module integrated on the third integrated body, used to correct lateral tilt in real time according to the workpiece posture. Thus, the vision camera monitors the workpiece posture in real time, and forms a closed-loop control with the air outlet module to dynamically correct the lateral tilt of the workpiece, ensuring that the workpiece always remains in contact with the flattening component during the dynamic process.

[0028] Based on the same inventive concept, the present invention also provides a vertical exposure machine, including the frame device for a vertical exposure machine as described above.

[0029] Compared with the prior art, the beneficial effects of the present invention are: 1) The air jet mechanism of the present invention straightens and adheres the workpiece to the surface of the flattening part in a non-direct contact manner, avoiding scratches and contamination caused by mechanical contact to the workpiece. It is especially suitable for circuit boards with ink already coated on the surface, effectively protecting the integrity of the ink layer. At the same time, it ensures that the workpiece maintains the correct posture before the frame closes and presses, further improving the leveling effect, exposure uniformity and product yield.

[0030] 2) The airflow jet mechanism of the present invention can also prevent the workpiece from not coming into contact with dust, thus ensuring the cleanliness of the workpiece. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the frame device of the present invention; Figure 2 This is a schematic diagram of the structure of the first frame portion of the present invention; Figure 3 This is a schematic diagram of the internal structure of Embodiment 1 of the airflow injection mechanism of the present invention; Figure 4 yes Figure 3 A magnified view of a section at point M; Figure 5 This is a schematic diagram of the rear structure of Embodiment 1 of the airflow injection mechanism of the present invention; Figure 6 This is a schematic diagram of the structure of embodiment 2 of the airflow injection mechanism of the present invention; Figure 7 yes Figure 6 A magnified view of a portion of point N in the middle; Figure 8 This is a schematic diagram of the rear structure of Embodiment 2 of the airflow injection mechanism of the present invention; Figure 9 This is a schematic diagram of the air blowing through hole of the present invention.

[0032] Figure label: 1-Base; 2-First frame; 3-Second frame; 4-Through hole; 5-Flattening component; 6-First drive mechanism; 7-Guide rail; 8-Air jet mechanism; 811-First housing; 812-Air inlet; 813-Air outlet; 814-Airflow channel; 82-Dynamic stabilization unit; 821-First track; 822-Third body; 823-Vision camera; 824-Air outlet module; 83-Second housing; 831-Air outlet plate; 831a-First air outlet plate; 831b-Second air outlet plate; 832-Retractable push rod; 9-Support device; 91-Alignment pin; 10-Inflatable sealing strip. Detailed Implementation

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0034] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features.

[0035] In the description of this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0036] like Figure 1 As shown, this embodiment provides a frame device for a vertical exposure machine, used to fix and install workpieces to be exposed. The frame device includes a base 1, a first frame portion 2, a second frame portion 3, and an airflow jet mechanism 8. The base 1 serves as the mounting foundation for the entire frame device, used to support and fix the first frame portion 2 and the second frame portion 3. Both the first frame portion 2 and the second frame portion 3 are erected on the base 1, used to fix the position of the workpiece and make the workpiece upright. The first frame portion 2 and the second frame portion 3 can move closer to each other or further away, so that when they are close together, the workpiece located between them is pressed together, and when they are far apart, the workpiece is released for loading and unloading.

[0037] Optionally, the frame device further includes a first drive mechanism 6 and a guide rail 7, with the second frame portion 3 disposed on the guide rail 7. The first drive mechanism 6 is used to drive the second frame portion 5 to move on the guide rail to move closer to or away from the first frame portion 2.

[0038] Both the first frame portion 2 and the second frame portion 3 are provided with through holes 4, and flattening members 5 are installed in the through holes 4. The flattening members 5 are light-transmitting and provide a path for the exposure light to pass through. When the workpiece is pressed between the first frame portion 2 and the second frame portion 3, the flattening members 5 support and flatten the workpiece, while the exposure light emitted by the exposure assembly can pass through the light-transmitting flattening members 5 to expose the workpiece. The flattening members 5 are preferably high-transmittance glass sheets. The through holes 4 penetrate the first surface and the second surface of the first frame portion 2 and / or the second frame portion 3, and the flattening members 5 are embedded in the through holes 4, so that the exposure assemblies on both sides of the frame can expose the workpiece without obstruction.

[0039] The frame device also includes an air jet mechanism 8, located at the bottom of the first frame 2, which is used to jet a directional airflow when compressed air is introduced, to straighten the upright workpiece and make it flat and adhere to the surface of the flattening part 5, so as to complete the pre-flattening of the workpiece in a non-direct contact manner and avoid mechanical contact scratching the ink surface of the workpiece.

[0040] Example 1, as Figures 1-5 As shown, in this embodiment, the main body of the airflow injection mechanism 8 adopts an air knife mechanism, which is arranged horizontally along the length of the frame and specifically includes a first housing 811, an air inlet 812, an airflow channel 814, and a slit-type air outlet 813. The first housing 811 is a long strip-shaped sealed housing, which is fixedly installed on the bottom inner side of the first frame 2; the air inlet 812 is opened on the side of the first housing 811 and is connected to an external air supply device through an air pipe. In this embodiment, there are two air inlets 812, which are opened on the side of the first housing 811 facing the first frame 2 and are connected to the air holes on the surface of the first frame 2. An air inlet pipe (not shown in the figure) is opened inside the first frame 2 and is connected to the external air supply device through the interface on the side of the first frame 2. The airflow channel 814 is located inside the first housing 811 and extends along the length of the housing to stabilize and equalize the incoming compressed air. The air outlet 813 is located on the upper surface of the first housing 811. Multiple independent air outlets 813 are provided on the first housing 811 along the length of the first housing 811, and the bottom of the air outlet 813 is connected to the airflow channel 814.

[0041] During operation, compressed air enters the airflow channel 814 through the air inlet 812 and is pressurized before being ejected at high speed from the air outlet 813, forming a uniform and continuous planar air curtain. This curtain acts upwards on the bottom area of ​​the workpiece, smoothly pushing it towards the flattening component 5, thus achieving workpiece alignment and fit. Preferably, the width of the air outlet 813 is set to 0.5 mm-2 mm. This range ensures sufficient airflow velocity and uniform coverage, stably supporting and aligning the workpiece without causing vibration due to excessive airflow.

[0042] Furthermore, the air outlet 813 is set obliquely upward, and the air outlet direction is precisely aligned with the middle area of ​​the flattening part 5, so that the ejected airflow obliquely impacts the surface of the workpiece, generating a bonding force component pointing towards the flattening part 5, which significantly improves the flattening and bonding effect of the workpiece.

[0043] Alternatively, the air outlet 813 can be replaced by a set of micropores with a diameter of 0.1 mm to 0.5 mm.

[0044] Example 2, as Figures 6-8 As shown, unlike Embodiment 1, to achieve adjustable air outlet angle, the air knife mechanism further includes an air outlet plate 831 and a telescopic push rod 832. The air outlet plate 831 is movably mounted on the top of the second housing 83 via a hinge shaft, located at the upper edge of the air outlet 813; the telescopic push rod 832 is internally installed inside the second housing 83, with its telescopic output end abutting against the inner surface of the air outlet plate 831. Through the telescopic movement of the telescopic push rod 832, the air outlet plate 831 can be pushed to swing around the hinge shaft, changing the angle between the air outlet plate and the top surface of the second housing 83, thereby adjusting the air outlet angle of the air outlet 813 to adapt to the leveling requirements of workpieces of different sizes, thicknesses, and materials. In this embodiment, the telescopic push rod 832 is a miniature electric push rod, which has high control precision and is easy to connect to the equipment control system for automated adjustment.

[0045] Furthermore, the air outlet plate 831 adopts a segmented independent structure, including at least a first air outlet plate 831a and two second air outlet plates 831b that are separated from each other; wherein the first air outlet plate 831a is located in the middle, and the two second air outlet plates 831b are symmetrically arranged on the left and right sides of the first air outlet plate 831a. Each segment of the air outlet plate is equipped with an independent telescopic push rod 832, which can control the lifting angle of each segment of the air outlet plate individually. In actual production, the air outlet plates in different areas can be opened and the angles adjusted according to the size of the workpiece and its placement position in the frame, so as to achieve precise airflow control in different areas, avoid wasting airflow in ineffective areas, and improve the leveling stability of small-sized workpieces.

[0046] In addition, a drying device and a filtering device are also provided, which are connected in series between the external air supply device and the air knife mechanism. The filtering device is used to perform multi-stage dust removal and oil removal filtration on the incoming compressed air to prevent impurities in the airflow from contaminating the workpiece plate surface and the flattened part surface; the drying device is used to dehumidify and dry the airflow to prevent moisture from condensing on the workpiece or flattened part surface, ensuring the cleanliness and yield of the exposure process.

[0047] The frame device, which is common to both embodiments, also includes a support device 9, which is disposed on the bottom inner side of the first frame 2 and located above the airflow jet mechanism 8. It is used to support the bottom edge of the workpiece, limit the vertical position of the workpiece, prevent the workpiece from shifting upward under the action of airflow, and ensure the vertical alignment accuracy of the workpiece.

[0048] Specifically, the support device 9 includes a plurality of positioning pins 91, which are pins perpendicular to the surface of the first frame portion 2. The multiple positioning pins 91 are arranged at equal intervals along the length of the first frame portion 2. After the workpiece is placed, its bottom edge abuts against the positioning pins 91, achieving vertical reference positioning. The tips of the positioning pins are made of a wear-resistant, flexible material to avoid scratching the bottom edge of the workpiece and the plating.

[0049] On the side of the first frame portion 2 facing the second frame portion 3, a ring of inflatable sealing strip 10 is provided around the exposure through hole 4; the airflow jet mechanism 8 and the support device 9 are both located within the closed area enclosed by the inflatable sealing strip 10.

[0050] After the two frames are closed and the workpiece is clamped, compressed air is introduced into the inflatable sealing strip 10 to expand it and fill the assembly gap between the two frames, forming a sealed chamber around the workpiece; at the same time, the sealing structure can effectively prevent external dust from entering the exposure area and ensure the cleanliness of the exposure environment.

[0051] The airflow injection mechanism 8 also includes two sets of dynamic stabilization units 82, which are respectively located on the left and right sides of the flattening component 5. These units are used in conjunction with the bottom air knife mechanism to correct the lateral posture of the workpiece in real time, prevent the workpiece from tilting or shifting to the left or right, and further improve the workpiece alignment accuracy.

[0052] Each set of dynamic stabilization units 82 includes a first track 821, a third body 822, a vision camera 823, and an air outlet module 824. The first track 821 is vertically fixed to the side of the flattening member 5 along the height direction of the first frame 2; the third body 822 is mounted on the first track 821 via a slider and can move vertically up and down along the first track 821; the vision camera 823 and the air outlet module 824 are both integrated and mounted on the third body 822. The vision camera 823 faces the workpiece surface and is used to collect the posture image of the workpiece edge in real time to identify the lateral tilt degree of the workpiece; the air outlet of the air outlet module 824 faces the side of the workpiece and is used to output corrective airflow.

[0053] During operation, the vision camera 823 detects the side position and tilt state of the workpiece in real time and feeds the image signal back to the equipment control system. The control system drives the third body 822 to move to the corresponding height according to the deviation signal and controls the air outlet module 824 to output the airflow of the corresponding intensity to apply thrust to the tilted side of the workpiece, correct the lateral tilt of the workpiece in real time, and ensure that the workpiece is always in the upright exposure position.

[0054] Optionally, please refer to Figure 9 In addition to the air jet mechanism 8, the first frame 2 and the second frame 3 are also provided with air blowing holes 11. One end of the air blowing hole 11 is connected to an external air source, and the other end of the air blowing hole 11 is used to eject airflow to the frame on the other side.

[0055] Optionally, the airflow direction of each blow hole 11 is perpendicular to the surface of the workpiece.

[0056] During the process of the second frame 3 moving closer to the first frame 2 to flatten the workpiece, the upward airflow emitted by the air jet mechanism 8 will be gradually blocked by the second frame 3, so the uprighting force on the workpiece will become weaker and weaker, and eventually a slight tilt will occur, resulting in a collision.

[0057] Therefore, optionally, the second frame 3 is provided with a blower hole 11. After the workpiece is fixed on the first frame 2, the air jet mechanism 8 is turned on and the blower hole 11 on the second frame 3 is turned off (turning off means not ejecting airflow, because the second frame 3 and the first frame 2 are separated at this time, and the airflow force will be weakened if the distance between them is too far). Before the second frame 3 blocks the airflow ejected by the air jet mechanism 8, the blower hole 11 on the second frame 3 is turned on and the air jet mechanism 8 is turned off. Thus, the workpiece is uprighted so that it does not tip over when the first frame 2 and the second frame 3 are close to each other through the multiple blower holes 11 in the second frame 3.

[0058] Because the first frame portion 2 and the second frame portion 3 need to be close to each other to flatten the workpiece, the workpiece will adhere to the flattening part 5 in the first frame portion 2 after being flattened, which will make it difficult to remove the workpiece when it needs to be removed.

[0059] Therefore, optionally, the first frame 2 is provided with a blower hole 11. When it is necessary to remove the workpiece, the blower hole 11 blows air to separate the workpiece from the flattening part 5, thereby facilitating the removal of the workpiece.

[0060] Optionally, Figure 9 The illustration only shows that the bottom of the second frame 3 is provided with a blower hole 11, but this application is not limited to this. Blower holes 11 can be provided on all sides of the second frame 3, such as the top, left and right sides. The same applies to the first frame 2, which will not be described in detail here.

[0061] This embodiment also discloses a vertical exposure machine, which includes a machine base, exposure components, and a frame device for the vertical exposure machine as described above. The frame device is installed on the scanning drive station of the machine base, and the exposure components are respectively located on the left and right sides of the frame device, allowing for double-sided digital exposure of the workpiece within the frame through the flattening components on both sides. Using the aforementioned frame device, the vertical exposure machine can achieve high-precision leveling and clamping of the workpiece in an upright state, effectively improving exposure alignment accuracy and product yield.

[0062] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0063] The above embodiments should be understood as being used only to illustrate the present invention more clearly, and not to limit the scope of the present invention. After reading the present invention, any modifications of the present invention in various equivalent forms by those skilled in the art fall within the scope defined by the appended claims.

Claims

1. A frame device for a vertical exposure machine, used for fixing and mounting the workpiece to be exposed, characterized in that: The frame device includes: a base (1), a first frame (2), a second frame (3), and an airflow injection mechanism (8); The first frame (2) and the second frame (3) are both erected on the base (1) to fix the position of the workpiece and make the workpiece stand upright; the first frame (2) and the second frame (3) can move closer to each other or further away from each other so as to press the workpiece located between them when they move closer to each other. Both the first frame portion (2) and the second frame portion (3) are provided with through holes (4) that penetrate through themselves. A flattening component (5) is installed in each of the through holes (4). The flattening component (5) is light-transmitting and is used to provide a path for the exposure light to pass through. The air jet mechanism (8) is located between the first frame (2) and the second frame (3) and is used to spray air to straighten the workpiece so that it does not tip over when compressed air is introduced.

2. The frame device for a vertical exposure machine according to claim 1, characterized in that: The airflow injection mechanism (8) is located at the bottom or side of the first frame (2) or the second frame.

3. The frame device for a vertical exposure machine according to claim 1 or 2, characterized in that: The air jet mechanism (8) is an air knife mechanism used to eject air to straighten the workpiece so that it does not tip over. The air jet mechanism (8) includes an air outlet (813).

4. The frame device for a vertical exposure machine according to claim 3, characterized in that: The vent (813) includes a set of slits or a set of micropores.

5. The frame device for a vertical exposure machine according to claim 4, characterized in that: The slit width is 0.1 mm to 0.5 mm.

6. The frame device for a vertical exposure machine according to claim 4, characterized in that: The diameter of the micropores is 0.1 mm to 0.5 mm.

7. The frame device for a vertical exposure machine according to claim 3, characterized in that: The air knife mechanism also includes a first housing (811), an air inlet (812) connected to an external air supply device, and an airflow channel (814) located inside the first housing; the air outlet (813) is located on the upper surface of the first housing (811) and communicates with the airflow channel (814).

8. The frame device for a vertical exposure machine according to claim 7, characterized in that: The air outlet (813) is oriented obliquely upward towards the flattening member (5), and a plurality of air outlets (813) are provided along the length of the first housing (811).

9. The frame device for a vertical exposure machine according to claim 1, characterized in that, The outer periphery of the flattening member (5) in the first frame portion (2) and / or the second frame portion (3) is provided with a plurality of air blowing holes; one end of the air blowing hole is connected to an external air source, and the other end of the air blowing hole is used to eject airflow to the frame portion on the other side.

10. The frame device for a vertical exposure machine according to claim 9, characterized in that, The plurality of air-blowing holes in the first frame (2) are used to assist the workpiece in separating from the flattening member (5) when the workpiece is removed.

11. The frame device for a vertical exposure machine according to claim 9, characterized in that, The plurality of air-blowing holes in the second frame (3) are used to straighten the workpiece so that it does not tip over when the first frame (2) and the second frame (3) are close to each other.

12. The frame device for a vertical exposure machine according to claim 9, characterized in that, The airflow direction of each of the air-blowing holes is perpendicular to the surface of the workpiece.

13. The frame device for a vertical exposure machine according to claim 2, characterized in that: The frame device also includes a drive mechanism and a guide rail (7) located on the base plate. The first frame (2) is fixedly installed on the base (1), and the second frame (3) is movably installed on the guide rail and driven by the first drive mechanism (6) to move closer to or away from the first frame (2); or, the second frame (3) is fixedly installed on the base (1), and the first frame (2) is movably installed on the guide rail and driven by the first drive mechanism (6) to move closer to or away from the second frame (3).

14. The frame device for a vertical exposure machine according to claim 1, characterized in that: The frame device also includes a support device (9) located at the bottom of the first frame portion (2) or the second frame portion (3) and above the airflow jet mechanism, for supporting the bottom of the workpiece.

15. The frame device for a vertical exposure machine according to claim 14, characterized in that: The support device (9) includes a plurality of abutment pins (91) arranged along the length of the first frame (2).

16. The frame device for a vertical exposure machine according to claim 1, characterized in that: The first frame (2) is provided with an inflatable sealing strip (10) on the side facing the second frame (3).

17. A vertical exposure machine, characterized in that, Includes the frame device for a vertical exposure machine as described in any one of claims 1 to 16.

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