Exhaust gas treatment control method and control system thereof

Abstract

The application discloses a kind of exhaust treatment control method and its control system.The control method includes: defining and managing the working state of exhaust treatment cabinet, the working state includes closed state, idle state and normal working state;Receive and process control signal, the control signal includes start signal, start signal, stop signal and shutdown signal;According to the control signal, complete switching operation between the closed state, idle state and normal working state is executed;According to the decision result of state switching, the corresponding control signal is output to the exhaust treatment cabinet.The application realizes the complete intelligent switching of exhaust treatment cabinet working state by designing complete four-state machine and four-signal control system, completely eliminates standby power consumption during non-production period, realizes significant energy saving;And reduce the working time of heating element, prolong the service life of equipment, reduce maintenance cost, can adapt to various production scheduling.

Description

Technical Field

[0001] This application relates to the semiconductor field, and in particular to a waste gas treatment control method and its control system. Background Technology

[0002] In precision industrial production processes such as semiconductor wafer manufacturing, various processes generate large amounts of waste gas containing harmful components. This waste gas must be treated to render it harmless before it can be discharged. As a crucial supporting equipment on the production line, the operation of the waste gas treatment cabinet directly affects production safety, environmental compliance, and operating costs. In practical applications, existing control systems only support bidirectional switching between idle and normal operating states, controlled by start and stop signals. This design has significant technical shortcomings.

[0003] First, there's the issue of energy waste. Even when the main production equipment isn't in operation for extended periods, the exhaust gas treatment cabinet must remain idle, continuously consuming electricity. Especially during nighttimes, weekends, or planned maintenance periods, this unnecessary energy consumption accumulates significantly, substantially increasing the factory's operating costs. Second, there's the issue of equipment wear and tear. Continuous low-power heating in idle mode accelerates the aging process of heating elements. Prolonged thermal fatigue significantly shortens their lifespan, increasing the risk of equipment failure. Simultaneously, the extended overall equipment operating time leads to shorter maintenance cycles, increasing the frequency and costs of preventative maintenance. Furthermore, existing technology has a coarse-grained control mechanism, unable to precisely match the production cycle of the main equipment. The exhaust gas treatment cabinet's operating status cannot be finely adjusted according to different operating stages of the main equipment, resulting in wasted equipment resources and limiting the flexibility of production management. Summary of the Invention

[0004] Based on this, it is necessary to propose a waste gas treatment control method and its control system to address the above-mentioned technical problems. By designing a complete four-state machine and a four-signal control system, the complete intelligent switching of the working state of the waste gas treatment cabinet can be realized.

[0005] In a first aspect, the present invention provides a method for controlling waste gas treatment, comprising the following steps:

[0006] Define and manage the working status of the exhaust gas treatment cabinet, including the off state, idle state, and normal working state;

[0007] Receive and process control signals, including power-on signals, start signals, stop signals, and power-off signals;

[0008] According to the control signal, perform a complete switching operation between the three states: off state, idle state and normal working state;

[0009] Based on the decision result of the state switching, the corresponding control signal is output to the exhaust gas treatment cabinet.

[0010] Furthermore, the receiving and processing of control signals includes:

[0011] When the main equipment enters the preheating stage, a power-on signal is sent to control the exhaust gas treatment cabinet to switch from the off state to the idle state.

[0012] When the main process starts running, a start signal is sent to control the exhaust gas treatment cabinet to switch from an idle state to a normal working state.

[0013] When the main process ends, a stop signal is sent to control the exhaust gas treatment cabinet to switch from normal working state back to idle state;

[0014] When the main equipment enters a fully standby state, it sends a shutdown signal to control the exhaust gas treatment cabinet to switch from an idle state to a shut-off state.

[0015] Furthermore, the shut-off state means that the exhaust gas treatment cabinet is completely stopped and no heating operation is performed; the idle state means that the minimum operating temperature is maintained to quickly respond to start-up requirements; and the normal operating state means that the combustion chamber is operated at high power to treat the exhaust gas generated in the process.

[0016] Furthermore, the response time for the exhaust gas treatment cabinet to switch from a closed state to an idle state is set to a preset time range to balance energy-saving effect and production response efficiency.

[0017] On the other hand, the present invention also provides a waste gas treatment control system, including: a state machine management module for defining and managing the working state of the waste gas treatment cabinet, wherein the working state includes a closed state, an idle state and a normal working state;

[0018] The signal receiving and processing module is used to receive and process control signals, including power-on signals, start signals, stop signals, and power-off signals.

[0019] The state switching execution module is connected to the state machine management module and the signal receiving and processing module respectively, and is used to perform a complete switching operation between the three states of shutdown, idle and normal operation according to the control signal.

[0020] The signal output interface module is connected to the state switching execution module and is used to output the corresponding control signal to the exhaust gas treatment cabinet according to the decision result of the state switching.

[0021] Furthermore, in the signal receiving and processing module, the power-on signal is used to trigger the waste gas treatment cabinet to switch from a closed state to an idle state; the start signal is used to trigger the waste gas treatment cabinet to switch from an idle state to a normal working state; the stop signal is used to trigger the waste gas treatment cabinet to switch from a normal working state to an idle state; and the power-off signal is used to trigger the waste gas treatment cabinet to switch from an idle state to a closed state.

[0022] Furthermore, the state switching execution module can run a complete closed-loop state switching path, including: switching from the off state to the idle state, switching from the idle state to the normal working state, switching from the normal working state to the idle state, and switching from the idle state to the off state.

[0023] Furthermore, it also includes a hardware interlocking logic module, used to insert control statements into the hardware interlocking logic of the main device to realize the automatic triggering of the control signal.

[0024] Furthermore, the hardware interlocking logic module can automatically control the extended output interface to output corresponding control signals according to the triggering state of the process alarm signal, and control the exhaust gas treatment cabinet to enter the corresponding working state.

[0025] Furthermore, the signal output interface module configures a specified pin of the extended output interface as a dedicated control signal output terminal for the exhaust gas treatment cabinet through software configuration. The extended output interface outputs a DC voltage signal to control the switching of the working state of the exhaust gas treatment cabinet.

[0026] The above-mentioned waste gas treatment control method and its control system achieve the following beneficial effects: by designing a complete four-state machine and a four-signal control system, the complete intelligent switching of the working state of the waste gas treatment cabinet is realized, completely eliminating standby power consumption during non-production periods and achieving significant energy saving; reducing the working time of heating elements and extending the service life of equipment; reducing equipment running time and reducing maintenance costs; improving the flexibility of production management and adapting to various production schedules; reusing hardware resources and reducing implementation costs. Attached Figure Description

[0027] Figure 1 This is a schematic flowchart of a waste gas treatment control method in one embodiment;

[0028] Figure 2 This is a schematic diagram illustrating the workflow of the four working states of a complete state machine in one embodiment;

[0029] Figure 3 This is a schematic diagram of the exhaust gas treatment control system in another embodiment;

[0030] Figure 4This is a schematic diagram of the hardware expansion interface and logic control in another embodiment. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0032] Example 1

[0033] In one embodiment, such as Figure 1 As shown in the figure, this embodiment discloses a waste gas treatment and control method, and the specific sorting method steps are as follows:

[0034] S1: Define and manage the operating status of the exhaust gas treatment cabinet, including the off state, idle state, and normal operating state;

[0035] S2: Receive and process control signals, including power-on signals, start signals, stop signals, and power-off signals;

[0036] S3: Based on the control signal, perform a complete switching operation between the three states: off state, idle state, and normal working state;

[0037] S4: Based on the decision result of the state switching, output the corresponding control signal to the exhaust gas treatment cabinet.

[0038] Traditional exhaust gas treatment cabinet control systems lack an effective wake-up mechanism. If the cabinet is completely shut down, it takes a long time to reach operating temperature from a cold start when needed, which affects production schedules. Therefore, to ensure it is always ready for use, the exhaust gas treatment cabinet must remain idle even during non-production periods, resulting in significant energy waste.

[0039] This embodiment solves the aforementioned problem by introducing a four-signal control system. Specifically, this embodiment achieves early wake-up of the exhaust gas treatment cabinet through a power-on signal. The power-on signal is sent during the main equipment preheating stage, allowing the exhaust gas treatment cabinet sufficient time to warm up from a closed state to an idle state. Thus, when the main process officially begins, the exhaust gas treatment cabinet is already in standby mode and can be put into immediate use. The ingenuity of this design lies in its full utilization of the main equipment's own preheating time. The main equipment itself needs to preheat before production, and this period is "free" warm-up time for the exhaust gas treatment cabinet. Waking up the exhaust gas treatment cabinet during this period will not affect the production schedule, while simultaneously allowing the exhaust gas treatment cabinet to be completely shut down during non-production periods, achieving maximum energy savings. Figure 2The publicly available complete state machine's four working states' workflow diagram is shown in... Figure 2 In this system, three states are intelligently switched: Off (closed state), Idle (idle state), and Normal (normal working state). The first Off state indicates the exhaust gas treatment cabinet is completely stopped, with no heating. The first Idle state maintains the minimum temperature to ensure rapid response. Normal state indicates high-power combustion to treat process exhaust gas. The second Idle state indicates treatment is complete, and the last Off state indicates the exhaust gas treatment cabinet is completely stopped. From the perspective of the state machine, this embodiment achieves a complete closed loop: Off → Idle → Normal → Idle → Off. From the perspective of control granularity, this embodiment achieves fine control at the "process stage" level. This embodiment refines the control granularity to the "process stage," controlling the exhaust gas treatment cabinet to enter the corresponding working state according to different stages such as preheating, production, completion, and standby. This fine-grained control can minimize unnecessary energy consumption.

[0040] The exhaust gas treatment cabinet in this embodiment realizes a multi-mode intelligent energy-saving control process. The following is a detailed explanation of steps S1 to S4, which mainly include four core steps to form a complete control cycle.

[0041] First, when the main equipment enters the preheating stage, a power-on signal is sent to control the exhaust gas treatment cabinet to switch from the off state to the idle state. In actual production, the main equipment usually needs to preheat for a period of time before the formal start of the production process. This preheating stage is the best time to wake up the exhaust gas treatment cabinet in advance. When the main equipment begins preheating, the control system automatically sends a power-on signal. After receiving the power-on signal, the exhaust gas treatment cabinet starts from the completely stopped off state and gradually heats up to the temperature level of the idle state. During this process, the response time for the exhaust gas treatment cabinet to switch from the off state to the idle state is set to a preset time range. The setting of this response time needs to comprehensively consider both energy-saving effect and production response efficiency. If the response time is set too short, although the working temperature can be reached faster, it will increase energy consumption; if the response time is set too long, although it is more energy-efficient, it may not be able to keep up with the production progress in time. By reasonably setting the response time, the best balance between energy saving and efficiency can be achieved.

[0042] Secondly, when the main process starts running, a start signal is sent to control the exhaust gas treatment cabinet to switch from an idle state to a normal operating state. When the main equipment completes preheating and officially begins the production process, the control system automatically sends a start signal. Upon receiving the start signal, the exhaust gas treatment cabinet quickly switches from a low-power idle state to a high-power normal operating state, and the combustion chamber rapidly heats up to the operating temperature to begin treating the exhaust gas generated by the main process. Because the exhaust gas treatment cabinet has already been idle in the first step, maintaining a certain base temperature, the time to switch from idle to normal operating state is very short, ensuring that it reaches the operating state before the main process generates exhaust gas, preventing any delays in exhaust gas treatment. This ensures production safety and avoids the exhaust gas treatment cabinet remaining in a high-power state for extended periods.

[0043] Secondly, when the main process finishes running, a stop signal is sent to control the exhaust gas treatment cabinet to switch from normal operating state to idle state. When the current batch of production processes is completed, the main equipment no longer generates exhaust gas, and the control system automatically sends a stop signal. Upon receiving the stop signal, the exhaust gas treatment cabinet switches from a high-power normal operating state to a low-power idle state, maintaining only the minimum operating temperature, awaiting the next production task. The significance of this step is that during production intervals, the exhaust gas treatment cabinet does not need to maintain a full-load operating state; it only needs to remain in a standby state, thus significantly reducing energy consumption. Compared to the prior art where the exhaust gas treatment cabinet is always kept in an idle state, although this invention also enters an idle state at this step, the difference is that the idle state of this invention can be further switched to a shut-off state, while the idle state of the prior art is a final state.

[0044] Finally, when the main equipment enters a fully standby state, a shutdown signal is sent to control the exhaust gas treatment cabinet to switch from an idle state to a shut-off state. When the main equipment completes all production tasks, enters a fully standby state, and there are no new production tasks for a foreseeable period of time, the control system will automatically send a shutdown signal. Upon receiving the shutdown signal, the exhaust gas treatment cabinet completely stops operating from a low-power idle state and enters a zero-power shut-off state. This step completely solves the energy waste problem of exhaust gas treatment cabinets having to remain idle during non-production periods in existing technologies. During nighttime, weekends, or long holidays, the exhaust gas treatment cabinet can be completely shut down, consuming no electrical energy, thus achieving significant energy savings. At the same time, in the shut-off state, the heating elements completely stop working, avoiding aging problems caused by long-term thermal fatigue and significantly extending the service life of the heating elements.

[0045] Example 2

[0046] like Figure 3As shown, this embodiment also discloses an exhaust gas treatment control system, which includes: a state machine management module 201, used to define and manage the working states of the exhaust gas treatment cabinet, including a closed state, an idle state, and a normal working state; a signal receiving and processing module 202, used to receive and process control signals, including a power-on signal, a start signal, a stop signal, and a power-off signal; a state switching execution module 203, connected to the state machine management module and the signal receiving and processing module respectively, used to perform a complete switching operation between the closed state, the idle state, and the normal working state according to the control signals; and a signal output interface module 204, connected to the state switching execution module, used to output corresponding control signals to the exhaust gas treatment cabinet according to the decision result of the state switching. Through the cooperation of the above modules, intelligent control of the working state of the exhaust gas treatment cabinet is completed.

[0047] Specifically, the state machine management module is the core of the entire control system, used to define and manage the three operating states of the exhaust gas treatment cabinet. These three operating states are: off state, idle state, and normal operating state. Each state has a clear definition and energy consumption level to adapt to different production scenario requirements.

[0048] In this embodiment, the "shutdown state" refers to a state where the exhaust gas treatment cabinet is completely stopped and no heating operation is performed. In this state, all heating elements of the exhaust gas treatment cabinet stop working, and the entire system is in a zero-power state. This state is suitable for scenarios where the main production equipment is not running for extended periods, such as at night, on weekends, or during planned maintenance. Compared to existing technologies where the exhaust gas treatment cabinet remains idle even when the main equipment is shut down, this embodiment, by introducing a truly usable shutdown state, can completely eliminate standby power consumption during non-production periods.

[0049] In this embodiment, the idle state refers to the state in which the exhaust gas treatment cabinet maintains the lowest possible operating temperature to ensure a rapid response to startup requirements. In this state, the exhaust gas treatment cabinet operates at low power, maintaining only the baseline temperature of the combustion chamber without performing actual exhaust gas treatment operations. The energy consumption level in this state is low, far lower than the energy consumption level of the normal operating state. The main function of the idle state is to serve as a transition between the shutdown state and the normal operating state, ensuring that the exhaust gas treatment cabinet can quickly enter the working state when needed, avoiding disruption to production schedules due to starting from a completely cold state.

[0050] In this embodiment, the normal operating state refers to the state where the exhaust gas treatment cabinet operates at high power in the combustion chamber to treat the exhaust gas generated during the manufacturing process. In this state, the exhaust gas treatment cabinet operates at full load, the combustion chamber reaches its operating temperature, and the process exhaust gas generated by the main production equipment is fully combusted. This state has a high energy consumption level and is only required during the actual operation of the main process.

[0051] In this embodiment, the signal receiving and processing module is used to receive and process four types of control signals: power-on signal, start signal, stop signal, and power-off signal. Each signal has its specific function and triggering timing, which together constitute a complete four-signal control system.

[0052] The power-on signal triggers the switch of the exhaust gas treatment cabinet from the off state to the idle state. This signal is typically sent when the main equipment enters the preheating stage, indicating that production is about to begin and the exhaust gas treatment cabinet needs to be woken up from the completely off state to the standby state in advance. By sending the power-on signal during the main equipment preheating stage, it can be ensured that the exhaust gas treatment cabinet completes the temperature rise process and reaches the ready state before the main process officially begins. The start signal triggers the switch of the exhaust gas treatment cabinet from the idle state to the normal operating state. This signal is sent when the main process starts running, indicating that the actual production process has started and the exhaust gas treatment cabinet needs to immediately enter the full-load working state to begin treating the generated exhaust gas. The stop signal triggers the switch of the exhaust gas treatment cabinet from the normal operating state to the idle state. This signal is sent when the main process ends, indicating that the production of the current batch has been completed and no more exhaust gas is generated. The exhaust gas treatment cabinet can then switch from the high-power normal operating state to the low-power idle state. The power-off signal triggers the switch of the exhaust gas treatment cabinet from the idle state to the off state. This signal is sent when the main equipment enters a fully standby state, indicating that there will be no production tasks for a foreseeable period of time, and the exhaust gas treatment cabinet can completely stop operating and enter a zero-power shutdown state.

[0053] This embodiment achieves refined control of the exhaust gas treatment cabinet's operating status by adding power-on and power-off signals. This four-signal control system allows the exhaust gas treatment cabinet's operating status to precisely match the main equipment's operating phase, avoiding unnecessary energy consumption. The state switching execution module is connected to both the state machine management module and the signal receiving and processing module, and is used to perform a complete switching operation between the off state, idle state, and normal operating state based on the four control signals. This module can realize a complete closed-loop state switching path, including: switching from the off state to the idle state, switching from the idle state to the normal operating state, switching from the normal operating state to the idle state, and switching from the idle state to the off state.

[0054] During actual operation, the state switching execution module determines the switching operation to be performed based on the type of received control signal, ensuring the correct sequence of state switching. For example, it can only transition from the off state to the idle state after receiving a power-on signal; it can only enter the normal operation state after receiving a start signal while in the idle state; it can only return to the idle state after receiving a stop signal while in the normal operation state; and it can only enter the off state after receiving a power-off signal while in the idle state. This strict state switching logic ensures the stability and reliability of the system operation. The signal output interface module is connected to the state switching execution module and is used to output corresponding control signals to the exhaust gas treatment cabinet based on the state switching decision. An important feature of this embodiment is that the signal output interface module reuses the existing extended output interface of the main equipment, configuring designated pins of the extended output interface as dedicated control signal output terminals for the exhaust gas treatment cabinet through software configuration.

[0055] This hardware resource reuse design has significant advantages. First, it eliminates the need for additional hardware, greatly reducing implementation costs, and users can achieve the functionality of this invention without complex hardware modifications. Second, the software configuration using existing interfaces is simple to implement and facilitates widespread application. Third, this design maintains the integrity of the original main equipment system and will not negatively impact its normal operation. The extended output interface outputs a DC voltage signal to control the switching of the exhaust gas treatment cabinet's operating state. By outputting different voltage signals or switching the voltage signal on and off, different control commands can be transmitted to the exhaust gas treatment cabinet to achieve state switching. The exhaust gas treatment control system also includes a hardware interlocking logic module, which inserts control statements into the main equipment's hardware interlocking logic to achieve automated triggering of control signals. This module can automatically control the extended output interface to output corresponding control signals based on the triggering state of the process alarm signal, thereby controlling the exhaust gas treatment cabinet to enter the corresponding operating state.

[0056] Specifically, such as Figure 4The publicly disclosed hardware expansion interface and logic control diagram allows for the setting of corresponding judgment conditions within the main equipment's hardware interlock logic. When a specific process alarm signal is triggered, indicating that the main process is running, the hardware interlock logic module automatically controls the expansion output interface to output the corresponding control signal, bringing the exhaust gas treatment cabinet into normal operating mode. When the process alarm signal is cleared, indicating that the main process has ended, the hardware interlock logic module automatically controls the expansion output interface to stop outputting control signals, returning the exhaust gas treatment cabinet to an idle state. This automated control method based on hardware interlock logic requires no manual intervention, enabling automatic switching of the exhaust gas treatment cabinet's operating state, improving the level of production automation, and reducing the workload of operators. Simultaneously, this method also avoids problems such as untimely exhaust gas treatment or energy waste caused by human error.

[0057] In other embodiments, various alternatives can be used for the control method. For example, programmable logic controllers, microcontrollers, and sensor detection can be used for control. However, regardless of the control hardware used, as long as a four-signal control system and complete state switching logic are employed, they fall within the scope of protection of this invention. Regarding hardware implementation, various alternatives can be used. For example, relays, wireless modules, and independent sensors can be used to output control signals. However, regardless of the hardware implementation method, as long as control signal output and state switching are achieved, their essence is the same as this invention. Regarding signal triggering, various alternatives can be used. For example, the operating status of the main equipment can be determined by detecting parameters such as the power and current of the main equipment, thereby triggering the corresponding control signal. However, regardless of the triggering method used, as long as the function of controlling the state of the exhaust gas treatment cabinet according to the operating stage of the main equipment is achieved, it falls within the scope of protection of this invention.

[0058] It should be understood that although the steps in the above embodiments are described sequentially, these steps are not necessarily executed in that order. Unless otherwise expressly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some of the steps described above may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but may be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but may be performed alternately or in turn with other steps or at least a portion of the sub-steps or stages of other steps.

[0059] Those skilled in the art will understand that the structure of this application is merely a block diagram of a portion of the structure related to the solution of this application, and does not constitute a limitation on the device to which the solution of this application is applied. The specific device may include more or fewer components than shown in the figure, or combine certain components, or have different component arrangements.

[0060] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A method for controlling waste gas treatment, characterized in that, Includes the following steps: Define and manage the working status of the exhaust gas treatment cabinet, including the off state, idle state, and normal working state; Receive and process control signals, including power-on signals, start signals, stop signals, and power-off signals; According to the control signal, perform a complete switching operation between the three states: off state, idle state and normal working state; Based on the decision result of the state switching, the corresponding control signal is output to the exhaust gas treatment cabinet.

2. The waste gas treatment and control method according to claim 1, characterized in that, The receiving and processing of control signals includes: When the main equipment enters the preheating stage, a power-on signal is sent to control the exhaust gas treatment cabinet to switch from the off state to the idle state. When the main process starts running, a start signal is sent to control the exhaust gas treatment cabinet to switch from an idle state to a normal working state. When the main process ends, a stop signal is sent to control the exhaust gas treatment cabinet to switch from normal working state back to idle state; When the main equipment enters a fully standby state, it sends a shutdown signal to control the exhaust gas treatment cabinet to switch from an idle state to a shut-off state.

3. The waste gas treatment and control method according to claim 1, characterized in that, The "shutdown" state means the exhaust gas treatment cabinet is completely stopped and no heating operation is performed; the "idle" state means maintaining the minimum operating temperature to quickly respond to startup requirements; the "normal operation" state means operating the combustion chamber at high power to treat the exhaust gas generated during the process.

4. The waste gas treatment and control method according to claim 1, characterized in that, The response time for the exhaust gas treatment cabinet to switch from the closed state to the idle state is set to a preset time range to balance energy saving effect and production response efficiency.

5. A waste gas treatment control system, characterized in that, include: The state machine management module is used to define and manage the working state of the exhaust gas treatment cabinet, which includes the closed state, the idle state, and the normal working state. The signal receiving and processing module is used to receive and process control signals, including power-on signals, start signals, stop signals, and power-off signals. The state switching execution module is connected to the state machine management module and the signal receiving and processing module respectively, and is used to perform a complete switching operation between the three states of shutdown, idle and normal operation according to the control signal. The signal output interface module is connected to the state switching execution module and is used to output the corresponding control signal to the exhaust gas treatment cabinet according to the decision result of the state switching.

6. The waste gas treatment control system according to claim 5, characterized in that, In the signal receiving and processing module, the power-on signal is used to trigger the waste gas treatment cabinet to switch from a closed state to an idle state; the start signal is used to trigger the waste gas treatment cabinet to switch from an idle state to a normal working state; the stop signal is used to trigger the waste gas treatment cabinet to switch from a normal working state to an idle state; and the power-off signal is used to trigger the waste gas treatment cabinet to switch from an idle state to a closed state.

7. The waste gas treatment control system according to claim 5, characterized in that, The state switching execution module can run a complete closed-loop state switching path, including: switching from the off state to the idle state, switching from the idle state to the normal working state, switching from the normal working state to the idle state, and switching from the idle state to the off state.

8. The waste gas treatment control system according to claim 5, characterized in that, It also includes a hardware interlocking logic module, which is used to insert control statements into the hardware interlocking logic of the main device to realize the automatic triggering of the control signal.

9. The waste gas treatment control system according to claim 8, characterized in that, The hardware interlocking logic module can automatically control the extended output interface to output corresponding control signals according to the triggering state of the process alarm signal, and control the exhaust gas treatment cabinet to enter the corresponding working state.

10. The waste gas treatment control system according to claim 5, characterized in that, The signal output interface module configures a specified pin of the extended output interface as a dedicated control signal output terminal for the exhaust gas treatment cabinet through software configuration. The extended output interface outputs a DC voltage signal to control the switching of the working state of the exhaust gas treatment cabinet.

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