Configuration file generation method, configuration file generation system, device, and storage medium

Abstract

The embodiment of the application provides a configuration file generation method, a configuration file generation system, equipment and a storage medium, the configuration file generation method comprises the following steps: in response to a generation request of a configuration file of a target device, obtaining device configuration information of the target device, and performing a menu operation on the device configuration information to obtain menu result data; the device configuration information comprises device parameter information and hardware configuration information; according to the menu result data, a first configuration file generation module corresponding to the target device is determined; according to the menu result data, the first configuration file generation module is used to generate the configuration file; the service logic interface of the first configuration file generation module is used to define the method and the attribute required for generating the configuration file. Through the embodiment of the application, the problem that the configuration file generation system in the related art only supports the generation of the configuration file of one device type can be solved.

Description

Technical Field

[0001] This application relates to the field of computer technology, and in particular to a configuration file generation method, configuration file generation system, device, and storage medium. Background Technology

[0002] Configuration files are an essential part of software control systems during operation. They unify the management of system parameters and settings, facilitating system development and maintenance. In recent years, the increasing variety of semiconductor manufacturing equipment and the differences in hardware across various environments have presented significant challenges to maintaining configuration files for software control systems. To address the configuration file generation issue, existing methods involve developing separate configuration file generation systems for each type of semiconductor process equipment, one for the upper and one for the lower-level computers. However, given the large number of equipment types and even the diverse product models within the same type, meeting configuration file generation requirements necessitates developing a separate system for each type of semiconductor process equipment. Furthermore, each system requires maintenance and upgrades by operations personnel, hindering subsequent software iterations.

[0003] Therefore, there is an urgent need for a configuration file generation method and system that can support the generation of configuration files for semiconductor process equipment of different device types and product types. Summary of the Invention

[0004] The purpose of this application is to provide a configuration file generation method, configuration file generation system, device, and storage medium to solve the problem in related technologies that the configuration file generation system for semiconductor process equipment only supports the generation of configuration files for one type of device.

[0005] To solve the above-mentioned technical problems, the embodiments of this application are implemented as follows: In a first aspect, embodiments of this application provide a configuration file generation method, applied to a configuration file generation system for semiconductor process equipment. The configuration file generation system is configured with configuration file generation modules corresponding to various equipment types. Each configuration file generation module includes business processing logic and a business logic interface corresponding to the equipment type. The method includes: In response to a request to generate a configuration file for a target device, the device configuration information of the target device and the menu result data of performing a menu operation on the device configuration information are obtained; the device configuration information includes device parameter information and hardware configuration information. Based on the menu result data, a first configuration file generation module corresponding to the target device is determined; The configuration file is generated by the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file.

[0006] Secondly, embodiments of this application provide a configuration file generation system for semiconductor process equipment, the system comprising: The business logic unit includes a business logic unit and a display unit; the business logic unit includes configuration file generation modules corresponding to various device types, and each configuration file generation module includes business processing logic and business logic interface corresponding to the device type. The display unit is used to respond to a request to generate a configuration file for the target device, obtain the device configuration information of the target device, and the menu result data of performing a menu operation on the device configuration information; the device configuration information includes device parameter information and hardware configuration information; The business logic unit is configured to determine the first configuration file generation module corresponding to the target device based on the menu result data; and transmit the menu result data to the first configuration file generation module. The first configuration file generation module is used to generate the configuration file based on the menu result data; The business logic interface is used to define the methods and properties required to generate the configuration file.

[0007] Thirdly, embodiments of this application provide an electronic device, including a processor, a communication interface, a memory, and a communication bus; wherein the processor, the communication interface, and the memory communicate with each other via the bus; the memory is used to store computer programs; and the processor is used to execute the programs stored in the memory to implement the configuration file generation method steps described in the first aspect above.

[0008] Fourthly, embodiments of this application provide a computer-readable storage medium storing a program or instructions that, when executed by a processor, implement the steps of the configuration file generation method described in the first aspect above.

[0009] Fifthly, embodiments of this application provide a computer program product, the computer program product including a computer program stored on a non-transitory computer-readable storage medium, the computer program including program instructions, which, when executed by a computer, cause the computer to perform the steps of the configuration file generation method described in the first aspect above.

[0010] As can be seen from the technical solutions provided in the embodiments of this application above, in this embodiment, firstly, the semiconductor process equipment configuration file generation system responds to the request to generate a configuration file for the target device by obtaining the device configuration information of the target device and the menu result data of the menu operation performed on the device configuration information; the device configuration information includes device parameter information and hardware configuration information; the configuration file generation system is configured with configuration file generation modules corresponding to various device types, and each configuration file generation module includes business processing logic and business logic interface corresponding to the device type. Then, based on the menu result data, a first configuration file generation module corresponding to the target device is determined. Next, the configuration file is generated through the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file. It can be seen that the configuration file generation system no longer only supports the generation of configuration files for one type of device, but supports the generation of configuration files for multiple types of devices. Thus, there is no need to develop independent configuration file generation tools for each device type, and administrators or technicians do not need to manually write or modify configuration files for different devices, reducing human error and repetitive work. Furthermore, the automated generation of device configuration files can significantly improve the efficiency and accuracy of configuration deployment. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 The software architecture diagram of the configuration file generation system provided in the embodiments of this application; Figure 2 This application provides schematic diagrams illustrating the maintenance and upgrade processes of configuration file generation systems for different device types in related technologies. Figure 3 A schematic diagram illustrating the generation process of configuration files for different device types in the related technologies provided in the embodiments of this application; Figure 4 This is a schematic diagram of device service relationships provided for an embodiment of this application; Figure 5 A schematic diagram illustrating the data definition for different device types in the related technologies provided in the embodiments of this application; Figure 6 A flowchart illustrating a configuration file generation method provided in an embodiment of this application; Figure 7This is a schematic diagram illustrating the configuration file generation process provided in an embodiment of this application. Figure 8 A schematic diagram of the module composition of a configuration file generation system for semiconductor process equipment provided in this application embodiment; Figure 9 This is a schematic diagram of the software architecture of the configuration file generation system provided in the embodiments of this application; Figure 10 This is a schematic diagram illustrating the working process of the configuration file generation system provided in this application embodiment; Figure 11 This is a schematic diagram of the configuration module composition provided in the embodiments of this application; Figure 12 A schematic diagram of the component-based design interface of the configuration file generation system provided in this application embodiment; Figure 13 A schematic diagram of the cascading design interface of the configuration file generation system provided in this application embodiment; Figure 14a A schematic diagram of the device configuration information maintenance interface of the configuration file generation system provided in this application embodiment; Figure 14b This is a schematic diagram of the menu interface of the configuration file generation system provided in the embodiments of this application; Figure 15 A schematic diagram of the user authentication interface of the configuration file generation system provided in this application embodiment; Figure 16 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0013] This application provides a configuration file generation method, configuration file generation system, device, and storage medium.

[0014] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this application.

[0015] Before introducing the configuration file generation method, configuration file generation system, device, and storage medium provided in the embodiments of this application, the application scenarios provided in the embodiments of this application will be described first. The configuration file generation method, configuration file generation system, device, and storage medium provided in the embodiments of this application can be applied to configuration file generation scenarios for various types of semiconductor process equipment.

[0016] In addition, it is necessary to explain the configuration file generation methods in the relevant technologies. Figure 1 The software architecture diagram of the configuration file generation system provided in the embodiments of this application is as follows: Figure 1 As shown, the software architecture includes a menu layer, a resource layer, and a processing layer. In the menu layer, users can perform menu operations on semiconductor process equipment, integrating the menu result data. Then, the menu result data is transmitted to the resource layer, which contains base files for the product chamber (PM) of each semiconductor process equipment, base files for each transport platform (TM), and template information for various types of information. The menu information output from the menu layer is processed and controlled by the resource layer before being transmitted to the processing layer. Based on the template information and base files, the processing layer performs logical processing to complete the final output of the configuration file.

[0017] Most configuration file generation solutions in related technologies are designed based on the above architecture. Since the framework design only supports data generation from menus, users modify the menu file according to existing hardware and device parameters to generate the menu result data. Based on templates and base files, logical processing is used to complete the final output of the configuration file. This approach has some problems, such as data coupling issues, lack of modularity, process control problems, and inability to upgrade data.

[0018] The above problems are unavoidable in related technologies, mainly for the following reasons: (1) The configuration file generation system for different equipment types is maintained independently, which has resulted in personnel losses and difficulties in upgrading and maintenance. Figure 2 This application provides schematic diagrams illustrating the maintenance and upgrade processes of configuration file generation systems for different device types in related technologies, as shown in the embodiments of this application. Figure 2 As shown, each device type's configuration file generation system is maintained by separate development and maintenance personnel. Since the business logic of each device type's configuration file generation system is different, the iterative upgrades of each device type's configuration file generation system also need to be carried out separately, which causes personnel losses and difficulties in upgrading and maintenance.

[0019] (2) The process of generating configuration files for different types of devices is different. Figure 3 This application provides schematic diagrams illustrating the generation process of configuration files for different device types in related technologies, as shown in the embodiments of this application. Figure 3As shown, the configuration file generation process for device type 1 includes the following steps: ABCDE. The configuration file generation process for device type 2 includes the following steps: BADCE. The configuration file generation process for device type 3 includes the following steps: ACDE. Wherein, A, B, C, D, and E represent different steps in the configuration file generation process.

[0020] (3) The business relationships of different equipment types were not divided into granular categories, and the differentiated processes were not modeled and designed in a unified manner. Figure 4 This is a schematic diagram of device service relationships provided in the embodiments of this application, such as... Figure 4 As shown in the example, Business 1, Business 2, Business 3, and Business 4 represent businesses corresponding to different device types. These businesses are interconnected or interactive across different device types. Failure to clearly define the business relationships between different device types, and the lack of a unified standard or framework for these differentiated business processes, can lead to inconsistencies and complexity in process management. This may increase operating costs, reduce efficiency, and hinder collaborative work between devices.

[0021] (4) Because the configuration file generation system is maintained separately for each type of equipment, different R&D personnel have different data definitions and no unified definition of data interface and data transfer is made. Figure 5 This is a schematic diagram illustrating the data definition corresponding to different device types in the related technologies provided in the embodiments of this application, such as... Figure 5 As shown, for equipment type 1, the R&D personnel defined its data composition as A.1.1, A.2.1, A.3.1, etc., while for equipment type 2, the R&D personnel defined its data composition as B.1.1, B.2.1, etc.

[0022] Because there are many types of semiconductor process equipment, and each type of equipment has significant business differences, the software architecture in the relevant technologies is difficult to support the same set of code when generating configuration files for multiple different types of equipment. In addition, different types of equipment maintenance correspond to different business logics, resulting in high business coupling. If we want to unify the business process, we need to model the original architecture in a unified way.

[0023] The following description, in conjunction with specific application scenarios and the accompanying drawings in the embodiments of this application, clearly and completely describes the configuration file generation method, configuration file generation system, device, and storage medium provided in the embodiments of this application.

[0024] Figure 6This is a flowchart illustrating a configuration file generation method provided in an embodiment of this application. The method is applied to a configuration file generation system for semiconductor process equipment. The system is configured with configuration file generation modules corresponding to various equipment types. Each configuration file generation module includes business processing logic and a business logic interface corresponding to the equipment type. Figure 6 As shown, the configuration file generation method may specifically include the following steps: S602: In response to a request to generate a configuration file for the target device, obtain the device configuration information of the target device, as well as the menu result data of the menu operation performed on the device configuration information; the device configuration information includes device parameter information and hardware configuration information.

[0025] In this embodiment of the application, in response to a request to generate a configuration file for the target device, the device parameter information and hardware configuration information of the target device are obtained, as well as the menu result data of the user performing a menu operation on the device parameter information and hardware configuration information of the target device.

[0026] In one implementation, the target equipment can be any type of semiconductor process equipment. Multiple types of semiconductor process equipment include etching (ETCH), chemical vapor deposition (CVD), physical vapor deposition (PVD), and other types. The equipment configuration information of the target equipment can be equipment parameter information and hardware configuration information corresponding to the equipment category. For example, the equipment parameter information includes all brands and models of this type of semiconductor process equipment, and the hardware configuration information includes information on the equipment chambers and transfer platforms of all brands and models related to this type of semiconductor process equipment, as well as information on all other hardware components of all brands and models.

[0027] After obtaining the device parameter information and hardware configuration information of the target device, the menu result data of the user's menu operation on the target device's device parameter information and hardware configuration information can be obtained.

[0028] In one implementation, a user's selection of equipment parameters and hardware configuration information for semiconductor process equipment can involve choosing the corresponding equipment model, brand, power supply model and brand, and other hardware configuration information from the equipment parameter and hardware configuration information corresponding to the equipment category of the semiconductor process equipment. The information selected by the user constitutes the selection result data.

[0029] In one embodiment, in response to a request to generate a configuration file for the target device, device configuration information of the target device is obtained, including: In response to a request to generate a configuration file for the target device, an information entry point is displayed; the information entry point is used to respond to actions that input device configuration information. Obtain device configuration information through the information entry portal.

[0030] In this embodiment of the application, in response to a request to generate a configuration file for the target device, an information entry point can be displayed. The information entry point is used to respond to the action of entering device configuration information; then, the device configuration information of the target device is obtained through the information entry point.

[0031] In one embodiment, the configuration file generation system includes multiple configuration modules; Before obtaining the device configuration information of the target device and the menu result data of performing menu operations on the device configuration information, the method also includes: Determine the target configuration module corresponding to the device configuration information; the target configuration module includes at least one of the following: device identification module, device configuration module, transmission platform configuration module, and chamber configuration module; The target configuration module receives menu operations for device configuration information and obtains menu result data.

[0032] In this embodiment, before obtaining the device configuration information of the target device and the menu result data of the menu operation performed on the device configuration information, a target configuration module corresponding to the device configuration information can be determined from multiple configuration modules. The target configuration module can be one or more of a device identification module, a device configuration module, a transmission platform configuration module, and a chamber configuration module. Then, through the determined target configuration module, the menu operation on the device configuration information is received, and the menu result data is obtained.

[0033] In one implementation, the configuration modules in the configuration file generation system can be a device identification module, a device configuration module, a transmission platform configuration module, a chamber configuration module, and other configuration modules. Specifically, the selection of the entire semiconductor process equipment model can correspond to the device identification module; the overall configuration of the semiconductor process equipment can correspond to the device configuration module; the configuration of the transmission platform of the semiconductor process equipment can correspond to the transmission platform configuration module; the configuration of the chambers of the semiconductor process equipment can correspond to the chamber configuration module; and the configuration of other hardware components of the semiconductor process equipment can correspond to other configuration modules.

[0034] Each configuration module includes at least one configuration item, and each configuration item includes at least one parameter. Specifically, the device identification module includes a main node configuration item called Basic Configuration (ConfigBase). This ConfigBase configuration item includes multiple node items, corresponding to the following parameters: Platform, ItemNo, MachineType, and PMMaxCount. Platform is the software platform name; here, the name of the semiconductor process equipment can be entered to distinguish users of different types of equipment. ItemNo is the item number, used to identify the item corresponding to this record. MachineType is the type of transmission platform. PMMaxCount is the maximum number of PMs. The ConfigBase configuration item, converted to JSON format, is as follows: { "Platform": "", "ItemNo": "", "MachineType":””, "PMMaxCount": "" } The device configuration module includes a main node configuration item called MachineConfig. This MachineConfig configuration item comprises multiple node items, corresponding to the following parameters: ConfigName, ConfigValue, and Description. ConfigName is the configuration item name, ConfigValue is the configuration item value, and Description is the configuration item description. In one example, this MachineConfig configuration item, converted to JSON format, is as follows: { "MachineConfig": [ { "ConfigName": "AlgorithmMode", "ConfigValue": "1", Description: 0: Calculate in one go, 1: Recalculate }, { "ConfigName": "ProductName", "ConfigValue": "LX", "Description": "Product Name" } ] } The transmission platform configuration module includes a main node configuration item called Transmission Platform Configuration (TMConfig). This TMConfig configuration item comprises multiple layers of data. The first layer includes the classification of TM data types. The second layer includes descriptions of multiple nodes under the first layer, with each node corresponding to the following parameters: Key, ConfigValue, ModuleType, Capacity, ModuleNumber, and Select. Here, Key is the primary key, ConfigValue is the configuration item value, ModuleType is the module type, Capacity is the module capacity, ModuleNumber is the module model, and Select indicates whether it is selected. In one example, this TMConfig configuration item, converted to JSON format, is as follows: { "VersionCode": null, "TMTopology": [ { Key: "LP1", "ModuleType": "CassetteModule", "Capacity": "25", "ModuleNumber": "Gona", "Select": "true" }, { Key: "LP2", "ModuleType": "CassetteModule", "Capacity": "25", "ModuleNumber": "Gona", "Select": "true" } ... } ], "TMHardWare": [ { Key: "LP1", "ModuleType": "CassetteModule", "Capacity": "25", "ModuleNumber": "Gona", "Select": "true"}, { "Key": "LP2", "ModuleType": "CassetteModule", "Capacity": "25", "ModuleNumber": "Gona", "Select": "true" } ... ] } The chamber configuration module includes a main node configuration item called PMConfig. This PMConfig configuration item comprises multiple layers of data. The first layer includes the classification of PM data types. The second layer includes descriptions of multiple nodes under the first layer, with each node corresponding to the following parameters: Key, PMType, PMAliasName, Capacity, ModuleNumber, and Select. Specifically, Key is the primary key, PMType is the PM type, PMAliasName is the PM name, Capacity is the module capacity, ModuleNumber is the module model, and Select indicates whether it is selected.

[0035] The Other Configuration module includes a main node item called "OtherConfig," which comprises multiple sub-nodes corresponding to the following parameters: GroupName, ConfigName, ConfigValue, and Description. Here, GroupName is the group name, ConfigName is the configuration item name, ConfigValue is the configuration item value, and Description is the configuration item description.

[0036] In one implementation, a target configuration module can be determined based on the equipment configuration information of the semiconductor process equipment. Then, the menu result data of the menu operation performed on the equipment configuration information can be received through the determined target configuration module.

[0037] In another implementation, the device configuration information to be configured for the semiconductor process equipment can be determined. Based on the device configuration information to be configured, the configuration module corresponding to the device configuration information to be configured is selected from multiple configuration modules, and the device configuration information of the semiconductor process equipment is received through the selected configuration module.

[0038] Through the embodiments of this application, the above-mentioned multiple configuration modules can be used to realize the input of device configuration information for different device types and the selection of device configuration information.

[0039] S604: Based on the menu result data, determine the first configuration file generation module corresponding to the target device.

[0040] In this embodiment of the application, based on the menu result data of the menu operation performed on the device configuration information, the first configuration file generation module corresponding to the target device is determined from the configuration file generation modules corresponding to various device types.

[0041] In one embodiment, before determining the first configuration file generation module corresponding to the target device based on the menu result data, the method further includes: Convert the data type of the menu result data to the target data type to obtain the menu result data of the target data type.

[0042] In this embodiment of the application, before determining the first configuration file generation module corresponding to the target device based on the menu result data, the data type of the menu result data can be converted into the target data type to obtain the menu result data of the target data type.

[0043] In one implementation, the target data type can be JSON. This allows the data type of the menu result data to be converted to JSON format.

[0044] In another implementation, the target data type can also include CSV and XML, etc.

[0045] S606, through the first configuration file generation module, generates a configuration file based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and properties required to generate the configuration file.

[0046] In one embodiment, the configuration file is generated by a first configuration file generation module based on the menu result data, including: The first configuration file generation module generates a configuration file based on the menu result data of the target data type.

[0047] In this embodiment of the application, the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file. After obtaining the menu result data of the target data type, the first configuration file generation module corresponding to the determined target device can generate the configuration file of the target device based on the menu result data.

[0048] In one implementation, the configuration file generation system also includes TM processing logic, PM processing logic, and overall system processing logic. These logics are used to perform logical processing on the menu result data. In practical applications, configuration files can be generated based on menu result data of the target data type using the TM, PM, and overall system processing logic, along with the first configuration file generation module. Furthermore, the business logic interface of the first configuration file generation module can inherit from the configuration file generation interface. This interface defines the methods and properties required to generate configuration files. Thus, it is unnecessary to define separate business logic interfaces in each configuration file generation module; simply inheriting the configuration file generation interface is sufficient to generate configuration files.

[0049] In one implementation, semiconductor process equipment can be divided into host computer and slave computer. Correspondingly, the configuration file of the semiconductor process equipment can include host computer configuration file and slave computer configuration file.

[0050] In this embodiment of the application, the business logic of each device is processed in an independent configuration file generation module. The business logic interface in the configuration file generation module can inherit the underlying configuration file generation interface to develop custom configuration file logic, thus enabling the configuration file generation business of different types of devices to be developed and output in the same process.

[0051] In one embodiment, the configuration module includes multiple configuration parameters; the method further includes: In response to a cascading setting request for configuration parameters, obtain the target configuration parameters to be cascaded, as well as the cascading trigger conditions and cascading trigger items for the target configuration parameters; When the cascading trigger condition is met, the cascading operation corresponding to the target configuration parameter is executed based on the cascading trigger item.

[0052] In one implementation, setting cascading operations for configuration parameters to be cascaded can involve, after determining the target configuration parameter to be cascaded, obtaining pre-set cascading trigger conditions and trigger items (multiple trigger items are possible). After setting the cascading trigger conditions and trigger items, the cascading operation corresponding to the target configuration parameter is executed when the trigger condition is met. Besides setting cascading trigger conditions and trigger items, a cascading type can also be set. In one example, the cascading trigger condition could be a change in the value of the target configuration parameter, and the trigger item could be a module related to that target configuration parameter.

[0053] As can be seen from the technical solutions provided in the embodiments of this application above, in this embodiment, firstly, the semiconductor process equipment configuration file generation system responds to the request to generate a configuration file for the target device by obtaining the device configuration information of the target device and the menu result data of the menu operation performed on the device configuration information; the device configuration information includes device parameter information and hardware configuration information; the configuration file generation system is configured with configuration file generation modules corresponding to various device types, and each configuration file generation module includes business processing logic and business logic interface corresponding to the device type. Then, based on the menu result data, a first configuration file generation module corresponding to the target device is determined. Next, the configuration file is generated through the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file. It can be seen that the configuration file generation system no longer only supports the generation of configuration files for one type of device, but supports the generation of configuration files for multiple types of devices. Thus, there is no need to develop independent configuration file generation tools for each device type, and administrators or technicians do not need to manually write or modify configuration files for different devices, reducing human error and repetitive work. Furthermore, the automated generation of device configuration files can significantly improve the efficiency and accuracy of configuration deployment.

[0054] Figure 7 This is a schematic diagram of the configuration file generation process provided in an embodiment of this application, such as... Figure 7 As shown, the configuration file generation process includes the following steps: S701: Input the equipment configuration information of semiconductor process equipment into the configuration file generation system; S702: Perform a menu operation on the device configuration information to obtain the menu result data; S703: Convert the data type of the menu result data to JSON data type; S704: Based on the menu result data, determine the configuration file generation module corresponding to the semiconductor process equipment; S705: Generate the configuration file for the semiconductor process equipment based on the menu result data by using the configuration file generation module corresponding to the determined semiconductor process equipment.

[0055] Corresponding to the configuration file generation method provided in the above embodiments, based on the same technical concept, this application also provides a configuration file generation system for semiconductor process equipment. Figure 8 This is a schematic diagram of the module composition of a configuration file generation system for semiconductor process equipment provided in an embodiment of this application. The configuration file generation system is used to execute... Figure 6 The described configuration file generation method, such as Figure 8As shown, the configuration file generation system 800 includes: a display unit 801 and a business logic unit 802; the business logic unit 802 includes configuration file generation modules corresponding to various device types, and each configuration file generation module includes business processing logic and business logic interface corresponding to the device type. The display unit 801 is used to respond to a request to generate a configuration file for a target device, obtain the device configuration information of the target device, and the menu result data of performing a menu operation on the device configuration information; the device configuration information includes device parameter information and hardware configuration information; The business logic unit 802 is used to determine the first configuration file generation module corresponding to the target device based on the menu result data; and to transmit the menu result data to the first configuration file generation module. The first configuration file generation module is used to generate the configuration file based on the menu result data; The business logic interface is used to define the methods and properties required to generate the configuration file.

[0056] In one possible implementation, the display unit 801 includes an information input module 8011 and a menu management module 8012; The information entry module 8011 is used to display an information entry entry in response to a request to generate a configuration file for the target device; the information entry entry is used to respond to the action of entering the device configuration information; and the device configuration information is obtained through the information entry entry. The menu management module 8012 is used to receive menu result data from the menu operation performed on the device configuration information, and transmit the menu result data to the database for storage.

[0057] In one possible implementation, the system further includes a database 803; The database 803 is used to store the device configuration information of the target device, as well as the menu result data of the menu operation performed on the device configuration information; The business logic unit 802 is also used to obtain the device configuration information and the menu result data from the database 803.

[0058] In one possible implementation, the system further includes a data interface unit 804, which includes a data interface for defining the target data type; The display unit 801 is also used to transmit the menu result data to the data interface unit 804; The data interface unit 804 is used to convert the menu result data to a target data type to obtain menu result data of the target data type; and to transmit the menu result data of the target data type to the business logic unit 802.

[0059] It should be noted that the configuration file generation system for semiconductor process equipment provided in this application embodiment and the configuration file generation method provided in this application embodiment are based on the same inventive concept. Therefore, the specific implementation of this embodiment can refer to the implementation of the aforementioned configuration file generation method, and the repeated parts will not be described again.

[0060] Figure 9 This is a schematic diagram of the software architecture of the configuration file generation system provided in the embodiments of this application, such as... Figure 9 As shown, the software architecture of the configuration file generation system for this semiconductor process equipment includes a presentation layer, a data interface layer, and a business logic layer.

[0061] The presentation layer is the layer most closely interacting with the user, including an information input module for device configuration information and a menu management module. The information input module includes an information input entry point and multiple configuration modules, such as a device identification module, a device configuration module, a transmission platform configuration module, a chamber configuration module, and other configuration modules. Each configuration module includes at least one configuration item, and each configuration item includes at least one configuration parameter. A description of each configuration module can be found in the above embodiment. In the presentation layer, users can input the device configuration information of the semiconductor process equipment required for menu operations into the configuration file generation system through multiple configuration modules. The user-input data can be stored in an SQLite database. When a configuration file needs to be generated, users can also perform menu operations through multiple configuration modules. The menu result data from the user's menu operations on the device configuration information, such as product model and hardware configuration information, can be transmitted to the data interface layer. Furthermore, the menu result data can also be stored in an SQLite database. The data interface layer serves as the result parameter of the presentation layer and also as the entry parameter of the business logic layer. The data interface layer provides interfaces for various data types. JSON is used for machine recognition processing, and CSV is used to check the correctness of menu result data. It also reserves and is compatible with other data types, such as XML. The business logic layer receives menu result data in JSON format from the data interface layer. Based on the menu result data, it determines the configuration file generation module corresponding to the semiconductor process equipment. Then, through TM processing logic, PM processing logic, and overall machine processing logic, as well as the configuration file generation module corresponding to the semiconductor process equipment, it analyzes, processes, and logically processes the menu result data, outputting the final configuration file. The business logic layer contains multiple configuration file generation modules. Each configuration file generation module includes business processing logic and a business logic interface corresponding to the equipment type. The business logic interface in the configuration file generation module corresponding to the semiconductor process equipment can inherit from the underlying business interface, which defines the methods and attributes required to generate the configuration file.

[0062] Figure 10 This is a schematic diagram illustrating the working process of the configuration file generation system provided in the embodiments of this application, such as... Figure 10 As shown, in one implementation, the working process of the configuration file generation system for this semiconductor process equipment specifically includes the following steps: S1001: Load the device information of the target device from the database using the device information loading tool; S1002: The user interface displays relevant device options based on the loaded device information; S1003: Load the relevant device configurable information using the device configurable information loading tool; S1004: The user interface displays the device configuration information selected by the user based on the loaded device configurable information; S1005: Write the device configuration information selected by the user into an intermediate data file; the intermediate data file includes the menu result data of the user's menu operation on the device configuration information. S1006: Location of the intermediate data file of the notification data interface; S1007: Data interface loads intermediate data file; S1008: The data interface transmits intermediate data files to the corresponding configuration file generation module; S1009: The configuration file generation module generates the host computer configuration file and slave computer configuration file of the device based on the intermediate data file.

[0063] Figure 11 This is a schematic diagram illustrating the configuration module composition provided in an embodiment of this application. Figure 11 As shown, the device identification module, device configuration module, transmission platform configuration module, chamber configuration module, and other configuration modules are... Figure 9 The software architecture shown includes configuration modules, where the device identification module is used for selecting the overall model of the semiconductor process equipment, the device configuration module is used for configuring the overall semiconductor process equipment, the transmission platform (TM) configuration module is used for configuring the transmission platform of the semiconductor process equipment, and the chamber (PM) configuration module is used for configuring the chambers of the semiconductor process equipment. Other configuration modules are used for configuring other hardware accessories. Since the configuration files for semiconductor process equipment are strongly related to the business operations of the semiconductor process equipment, and different types of semiconductor process equipment, or different products of the same type of equipment, have varying degrees of differences, a unified approach to generating and managing configuration files requires not only considering the overall software architecture but also data modeling of the overall business processes. This application integrates the business operation processes of the upper and lower level machines of different types of semiconductor process equipment to derive a general menu process and a general configuration module. Each of the above configuration modules includes at least one configuration item, and each configuration item includes at least one configuration parameter. Users can follow... Figure 11 The configuration module shown allows for the input of device configuration information and the processing of menus to obtain menu result data.

[0064] In one implementation, to improve the user experience, reduce the possibility of redundant data entry and erroneous data, and enhance the overall framework's scalability and robustness, the configuration modules can be further refined into a highly modular, pluggable design. This pluggable design involves managing each module independently; if the module is needed, it is installed; otherwise, it is uninstalled.

[0065] Figure 12This is a schematic diagram of the component-based design interface of the configuration file generation system provided in the embodiments of this application, such as... Figure 12 As shown, within the same module, parameters, components, services, etc., can also be granularized. If a specific granular element is involved, it is installed; otherwise, it is uninstalled.

[0066] Furthermore, component-based design can lead to cascading designs between configuration parameters. By setting cascading configuration parameters, the relationships between configuration modules can be cascaded to enhance the logical support performance and robustness of the software.

[0067] Figure 13 A schematic diagram of the cascading design interface of the configuration file generation system provided in this application embodiment is shown below. Figure 13 As shown, cascading can be applied to the Function menu on the PM Configuration page of the configuration file generation system, allowing for cascading settings for Parameter and Function modules. To cascade a configuration parameter, select the row containing the parameter, set the Event Source for the cascading trigger, and then click the "Set Cascade" button. In the pop-up cascading settings menu, add trigger items by selecting the cascading module, cascading type, and other conditions. Multiple trigger items can be added. Note that keys in the list cannot be duplicated. After the cascading settings are complete, the associated cascading trigger items are triggered when the trigger conditions are met.

[0068] Because configuration file generation systems in related technologies require users to maintain and modify data in a given file before generating a configuration file, this method necessitates users understanding the format and parameter meanings of the configuration file for further data maintenance. Furthermore, if incorrect information or illegal characters are entered during the operation, secondary data verification is impossible, increasing the difficulty of data maintenance. Therefore, the configuration file generation system provided in this application adds a visual interface. Figure 14a This is a schematic diagram of the device configuration information maintenance interface of the configuration file generation system provided in this application embodiment. Figure 14b This is a schematic diagram of the menu interface of the configuration file generation system provided in this application embodiment. For example... Figure 14a and Figure 14b As shown, by adding a visual interface, even first-time users of the system can complete the entry of device configuration information and menu operations by following the interface navigation, greatly reducing the probability of errors and difficulty in the user process.

[0069] Furthermore, existing configuration file generation systems lack a dedicated logging module, relying solely on log files for rough recording. The configuration file generation system in this application adds a logging module, enabling it to track the entire configuration file generation process and troubleshoot any issues that arise. In addition, the system creates folders for each generated configuration file based on timestamps and retains the menu result data.

[0070] Due to limitations in their technical design, existing configuration file generation systems lack a user authentication step, making it impossible to verify the identity of the user. The configuration file generation system in this application adds a user authentication step. Figure 15 This is a schematic diagram of the user authentication interface of the configuration file generation system provided in this application embodiment, such as... Figure 15 As shown, users need to enter a username and password before using the configuration file generation system for semiconductor process equipment for security management.

[0071] Corresponding to the configuration file generation method provided in the above embodiments, based on the same technical concept, this application also provides an electronic device for executing the above configuration file generation method. Figure 16 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application, such as... Figure 16 As shown, electronic devices can vary considerably due to differences in configuration or performance. They may include one or more processors 1601 and memories 1602, with the memory 1602 storing one or more application programs or data. The memory 1602 can be temporary or persistent storage. The application programs stored in the memory 1602 may include one or more modules (not shown), each module including a series of computer-executable instructions for the electronic device. Furthermore, the processor 1601 may be configured to communicate with the memory 1602, executing the series of computer-executable instructions stored in the memory 1602 on the electronic device. The electronic device may also include one or more power supplies 1603, one or more wired or wireless network interfaces 1604, one or more input / output interfaces 1605, and one or more keyboards 1606.

[0072] Specifically, in this embodiment, the electronic device includes a processor, a communication interface, a memory, and a communication bus; wherein, the processor, the communication interface, and the memory communicate with each other via the bus; the memory is used to store computer programs; the processor is used to execute the programs stored in the memory to implement the following method steps: In response to a request to generate a configuration file for a target device, the device configuration information of the target device and the menu result data of performing a menu operation on the device configuration information are obtained; the device configuration information includes device parameter information and hardware configuration information. Based on the menu result data, a first configuration file generation module corresponding to the target device is determined; The configuration file is generated by the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file.

[0073] This application embodiment also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the following method steps: In response to a request to generate a configuration file for a target device, the device configuration information of the target device and the menu result data of performing a menu operation on the device configuration information are obtained; the device configuration information includes device parameter information and hardware configuration information. Based on the menu result data, a first configuration file generation module corresponding to the target device is determined; The configuration file is generated by the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file.

[0074] This application also provides a computer program product. When the computer program is executed by a processor, it implements the various processes of the above-described configuration file generation method embodiment and can achieve the same technical effect. To avoid repetition, it will not be described again here.

[0075] Those skilled in the art will understand that embodiments of this application can be provided as methods, apparatus, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0076] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0077] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0078] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0079] In a typical configuration, an electronic device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0080] Memory may include non-persistent storage in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0081] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0082] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0083] Those skilled in the art will understand that embodiments of this application can be provided as methods, apparatus, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0084] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A method for generating a configuration file, characterized in that, A configuration file generation system for semiconductor process equipment, the system comprising configuration file generation modules corresponding to various equipment types, each configuration file generation module including business processing logic and a business logic interface corresponding to the equipment type; the method includes: In response to a request to generate a configuration file for a target device, the device configuration information of the target device and the menu result data of performing a menu operation on the device configuration information are obtained; the device configuration information includes device parameter information and hardware configuration information. Based on the menu result data, a first configuration file generation module corresponding to the target device is determined; The configuration file is generated by the first configuration file generation module based on the menu result data; the business logic interface of the first configuration file generation module is used to define the methods and attributes required to generate the configuration file.

2. The method according to claim 1, characterized in that, The configuration file generation system includes multiple configuration modules; Before obtaining the device configuration information of the target device and the menu result data of performing a menu operation on the device configuration information, the method further includes: Determine the target configuration module corresponding to the device configuration information; The target configuration module includes at least one of the following: a device identification module, a device configuration module, a transmission platform configuration module, and a chamber configuration module; The target configuration module receives a menu operation on the device configuration information and obtains the menu result data.

3. The method according to claim 1, characterized in that, Before determining the first configuration file generation module corresponding to the target device based on the menu result data, the method further includes: Convert the data type of the menu result data to the target data type to obtain the menu result data of the target data type.

4. The method according to claim 3, characterized in that, The step of generating the configuration file through the first configuration file generation module based on the menu result data includes: The configuration file is generated by the first configuration file generation module based on the menu result data of the target data type.

5. The method according to claim 2, characterized in that, The configuration module includes multiple configuration parameters; the method further includes: In response to a cascading setting request for configuration parameters, the target configuration parameters to be cascaded are obtained, as well as the cascading trigger conditions and cascading trigger items set for the target configuration parameters; When the cascading trigger condition is met, the cascading operation corresponding to the target configuration parameter is executed based on the cascading trigger item.

6. The method according to claim 1, characterized in that, The step of obtaining the device configuration information of the target device in response to a request to generate a configuration file for the target device includes: In response to a request to generate a configuration file for the target device, an information entry point is displayed; the information entry point is used to respond to the action of entering configuration information for the device. The device configuration information is obtained through the information entry point.

7. A configuration file generation system for semiconductor process equipment, characterized in that, The system includes a display unit and a business logic unit; the business logic unit includes configuration file generation modules corresponding to various device types, and each configuration file generation module includes business processing logic and business logic interface corresponding to the device type. The display unit is used to respond to a request to generate a configuration file for the target device, obtain the device configuration information of the target device, and the menu result data of performing a menu operation on the device configuration information; the device configuration information includes device parameter information and hardware configuration information; The business logic unit is used to determine the first configuration file generation module corresponding to the target device based on the menu result data. The menu result data is transmitted to the first configuration file generation module; The first configuration file generation module is used to generate the configuration file based on the menu result data; The business logic interface is used to define the methods and properties required to generate the configuration file.

8. The system according to claim 7, characterized in that, The display unit includes an information input module and a menu management module; The information entry module is used to display the information entry entry in response to a request to generate a configuration file for the target device; the information entry entry is used to respond to the action of entering the device configuration information. The device configuration information is obtained through the information input portal; The menu management module is used to receive menu result data from the menu operation performed on the device configuration information, and to transmit the menu result data to the database for storage.

9. The system according to claim 7, characterized in that, The system also includes a database; The database is used to store the device configuration information of the target device, as well as the menu result data of the menu operation performed on the device configuration information; The business logic unit is also used to obtain the device configuration information and the menu result data from the database.

10. The system according to claim 8, characterized in that, The system also includes a data interface unit, which includes a data interface for defining target data types; The display unit is also used to transmit the menu result data to the data interface unit; The data interface unit is used to convert the menu result data to a target data type to obtain menu result data of the target data type; and to transmit the menu result data of the target data type to the business logic unit.

11. An electronic device, characterized in that, The system includes a processor, a communication interface, a memory, and a communication bus; wherein the processor, the communication interface, and the memory communicate with each other via the bus; the memory is used to store computer programs; and the processor is used to execute the programs stored in the memory to implement the configuration file generation method steps as described in any one of claims 1-6.

12. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the configuration file generation method steps as described in any one of claims 1-6.

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