A slide rail guiding mechanism for a scanning electron microscope

Abstract

The application discloses a slide rail guiding mechanism for a scanning electron microscope (SEM), and relates to the technical field of electron microscopes.The slide rail guiding mechanism comprises a base, base seats are arranged on the two sides of the outer wall of the base, side plates are arranged on the front and back sides of the base, mounting holes are formed in the outer wall of the base, one end of a connecting plate is inserted into the inner cavity of the mounting hole, the other end of the connecting plate extends out of the mounting hole and is provided with a slide rail.The device realizes the dual functions of bolt anti-loosening and slide rail limiting through the reversible limiting plate structure.After the limiting plate is turned over, the top block abuts against the bolt, so that loosening of the bolt due to vibration or contact is avoided, the clamping structure can guarantee the stability of the limiting plate itself, the limiting plate clamps the outer wall of the slide rail, reliable constraint of the slide rail is formed, and the slide rail is prevented from falling or bending, the overall stability is significantly improved, the probability of equipment failure and the maintenance cost are reduced, the device is simple and convenient to operate, flexible to use, and high in practicality, and the use requirements in the market are met.

Description

Technical Field

[0001] This invention relates to the field of electron microscopy, specifically to a slide rail guide mechanism for use in a scanning electron microscope (SEM). Background Technology

[0002] Scanning electron microscopes (SEMs) characterize microstructures by focusing a high-energy electron beam to scan samples. The motion guiding mechanism of the sample stage has a critical impact on the imaging accuracy, operational stability, and maintenance costs of the equipment. As the core component of the guiding mechanism, the slide rail directly determines the motion accuracy and reliability of the sample stage and is a key structure to ensure the long-term stable operation of the SEM.

[0003] Currently, the slide rails of SEM guiding mechanisms are mostly installed on the carrier by bolt clamping. Although the structure is simple and the assembly is convenient, in actual use, due to the mechanical vibration inside the chamber and the contact load during sample movement, the fixing bolts at both ends of the slide rail are prone to loosening. This causes the clamping gap between the slide rail and the carrier to widen, weakening the constraint effect. After the bolts loosen, the slide rail is prone to axial movement, falling off, or bending deformation. This can not only directly cause the sample stage to jam and lose motion accuracy, but may also cause more serious equipment failures due to the slide rail components falling off.

[0004] Therefore, there is an urgent need for an integrated guide mechanism that can simultaneously achieve bolt anti-loosening and slide rail limiting, in order to solve the problems of easy loosening, falling off and bending of slide rails in the existing technology, and ensure the long-term stable operation of the SEM guide mechanism. Summary of the Invention

[0005] The purpose of this invention is to provide a slide rail guide mechanism for a SEM (Scanning Electron Microscope) to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a slide rail guide mechanism for a SEM scanning electron microscope, comprising a base, base plates mounted on both sides of the outer wall of the base, side plates provided on both the front and rear sides of the base, mounting holes provided on the outer wall of the base, one end of a connecting plate inserted into the inner cavity of the mounting hole, the other end of the connecting plate extending out of the mounting hole and provided with a slide rail, one end of a bolt mounted on the outer wall of the side plate, the other end of the bolt passing through the side plate and the base in sequence, and extending into the inner cavity of the mounting hole and abutting against the outer wall of the connecting plate, a limiting plate rotatably connected to the outer wall of the side plate, one end of a top block provided on the outer wall of the limiting plate, and a rubber pad mounted on the other end of the top block.

[0007] Preferably, the outer wall of the base is provided with an insertion hole, the outer wall of the limiting plate is provided with an insertion block, the insertion block and the insertion hole are interlocked, the outer wall of the insertion block is provided with multiple locking holes, the inner cavity of the base is rotatably connected to a connecting rod, the end of the connecting rod is provided with a locking block, one end of the torsion spring is installed on the outer wall of the connecting rod, and the other end of the torsion spring is installed on the inner wall of the base.

[0008] Preferably, the card slot and the card block are matched and their positions correspond.

[0009] Preferably, the connecting rod is 2cm away from the inner wall of the base, and one end of the connecting rod is moved out of the inner cavity of the base.

[0010] Preferably, the torsion spring is located at the center of the outer wall of the connecting rod.

[0011] Preferably, the top block is trapezoidal in shape, and the rubber pad at its end fits tightly against the bolt.

[0012] Preferably, the limiting plate is L-shaped and is pressed against the outer wall of the slide rail.

[0013] This invention proposes a slide rail guiding mechanism for SEM (Scanning Electron Microscope), which offers the following advantages: Bolts can secure the connecting plate, facilitating slide rail assembly and disassembly. The cooperation between the limiting plate, top block, and rubber pad not only limits and fixes the slide rail but also clamps the bolts, ensuring greater stability of the bolts and slide rail during equipment operation. The cooperation between the insertion hole, insertion block, locking hole, connecting rod, locking block, and torsion spring securely fixes the limiting plate. This device, through its flip-out limiting plate structure, achieves the dual functions of bolt anti-loosening and slide rail limiting. After the limiting plate is flipped, the top block presses against the bolts, preventing loosening due to vibration or impact. The clamping structure ensures the stability of the limiting plate itself. Simultaneously, the limiting plate clamps the outer wall of the slide rail, providing reliable constraint and preventing it from falling or bending. Overall stability is significantly improved, reducing equipment failure probability and maintenance costs. It is simple and convenient to operate, flexible in use, and highly practical, meeting the needs of the current market. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the base structure of the present invention; Figure 3 For the present invention Figure 2 Enlarged structural diagram at point A in the middle; Figure 4 This is a top view of the top block of the present invention; Figure 5This is a top view of the mounting holes of the present invention; Figure 6 For the present invention Figure 5 Enlarged structural diagram at point B; Figure 7 This is a side view of the insert block of the present invention.

[0015] In the diagram: 1. Base, 2. Base plate, 3. Side plate, 4. Mounting hole, 5. Connecting plate, 6. Slide rail, 7. Bolt, 8. Limiting plate, 9. Top block, 10. Rubber pad, 11. Insertion hole, 12. Insertion block, 13. Locking hole, 14. Connecting rod, 15. Locking block, 16. Torsion spring. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Please see Figure 1-7 This invention provides a technical solution: a slide rail guide mechanism for a SEM (Scanning Electron Microscope), comprising a base 1, base 2 mounted on both sides of the outer wall of the base 1, side plates 3 provided on the front and rear sides of the base 2, mounting holes 4 opened on the outer wall of the base 2, one end of a connecting plate 5 inserted into the inner cavity of the mounting hole 4, the other end of the connecting plate 5 extending out of the mounting hole 4 and provided with a slide rail 6, one end of a bolt 7 mounted on the outer wall of the side plate 3, the other end of the bolt 7 passing through the side plate 3 and the base 2 in sequence, and extending into the inner cavity of the mounting hole 4 and abutting against the outer wall of the connecting plate 5, a limiting plate 8 rotatably connected to the outer wall of the side plate 3, one end of a top block 9 provided on the outer wall of the limiting plate 8, and a rubber pad 10 mounted on the other end of the top block 9, the rubber pad 10 can improve the friction between the top block 9 and the bolt 7, so that the bolt 7 can be better abutted and fixed.

[0018] As a preferred embodiment, the base 2 has an insertion hole 11 on its outer wall and an insertion block 12 on its outer wall. The insertion block 12 and the insertion hole 11 are interlocked. The outer wall of the insertion block 12 has multiple locking holes 13. The inner cavity of the base 2 is rotatably connected to a connecting rod 14. The end of the connecting rod 14 is provided with a locking block 15. One end of a torsion spring 16 is installed on the outer wall of the connecting rod 14, and the other end of the torsion spring 16 is installed on the inner wall of the base 2.

[0019] As a preferred option, the card slot 13 and the card block 15 are matched and their positions correspond.

[0020] As a preferred option, the connecting rod 14 is further positioned 2cm away from the inner wall of the base 2, and one end of the connecting rod 14 is moved out of the inner cavity of the base 2, so that the operator can easily flip and turn the connecting rod 14.

[0021] As a preferred option, the torsion spring 16 is further positioned at the center of the outer wall of the connecting rod 14.

[0022] As a preferred option, the top block 9 is trapezoidal in shape, and the rubber pad 10 at its end fits tightly against the bolt 7.

[0023] As a preferred option, the limiting plate 8 is further configured in an "L" shape and is pressed against the outer wall of the slide rail 6.

[0024] Its detailed connection method is a well-known technology in this field. The following mainly introduces the working principle and process, and the specific work is as follows.

[0025] In use, the limiting plate 8 is flipped inward. As the limiting plate 8 flips and gradually approaches 90 degrees, the top block 9 is inserted into the inner cavity of the base 2, and the insert block 12 is also inserted into the inner cavity of the insertion hole 11. During this process, the insert block 12 will move the locking block 15, causing it to rotate the connecting rod 14 and apply pressure to the torsion spring 16 at intervals. When the limiting plate 8 abuts against the outer wall of the slide rail 6, the rubber pad 10 on the top block 9 will also abut against the outer wall of the bolt 7. When the bolt 7 and the slide rail 6 are fixed in place, the external force on the limiting plate 8 is removed. The elasticity of the torsion spring 16 can drive the connecting rod 14 to rotate and reset, causing the locking block 15 to insert into the inner cavity of the corresponding locking hole 13. The mutual clamping between 5 and the locking hole 13 ensures the fixed position of the limiting plate 8, and the positions of the bolt 7 and the slide rail 6 are also fixed accordingly. This device achieves the dual function of preventing the bolt 7 from loosening and limiting the slide rail 6 through the flip-out limiting plate 8 structure. After the limiting plate 8 is flipped, the top block 9 presses against the bolt 7 to prevent it from loosening due to vibration or contact. The clamping structure can ensure the stability of the limiting plate 8 itself. At the same time, the limiting plate 8 clamps the outer wall of the slide rail 6, forming a reliable constraint on the slide rail 6 to prevent it from falling or bending. The overall stability is not only significantly improved, but also the probability of equipment failure and maintenance costs are reduced. It is simple and convenient to operate, flexible to use, and highly practical, making it suitable for promotion.

[0026] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A slide rail guide mechanism for a SEM (Scanning Electron Microscope), comprising a base (1), characterized in that: The base (1) has a base (2) installed on both sides of its outer wall. The base (2) has a side plate (3) on both the front and rear sides. The base (2) has an installation hole (4) on its outer wall. The inner cavity of the installation hole (4) is connected to one end of a connecting plate (5). The other end of the connecting plate (5) extends out of the installation hole (4) and is provided with a slide rail (6). The outer wall of the side plate (3) is fitted with one end of a bolt (7). The other end of the bolt (7) passes through the side plate (3) and the base (2) in sequence, and extends into the inner cavity of the installation hole (4) and abuts against the outer wall of the connecting plate (5). The outer wall of the side plate (3) is rotatably connected to a limiting plate (8). The outer wall of the limiting plate (8) is provided with one end of a top block (9), and the other end of the top block (9) is fitted with a rubber pad (10).

2. The slide rail guide mechanism for a SEM scanning electron microscope according to claim 1, characterized in that: The base (2) has an insertion hole (11) on its outer wall and a plug (12) on its outer wall. The plug (12) and the insertion hole (11) are connected to each other. The plug (12) has multiple locking holes (13) on its outer wall. The inner cavity of the base (2) is rotatably connected to a connecting rod (14). The end of the connecting rod (14) is provided with a locking block (15). One end of a torsion spring (16) is installed on the outer wall of the connecting rod (14), and the other end of the torsion spring (16) is installed on the inner wall of the base (2).

3. The slide rail guide mechanism for a SEM scanning electron microscope according to claim 2, characterized in that: The card slot (13) and the card block (15) are matched and their positions correspond.

4. A slide rail guide mechanism for a SEM scanning electron microscope according to claim 2, characterized in that: The connecting rod (14) is 2cm away from the inner wall of the base (2), and one end of the connecting rod (14) is moved out of the inner cavity of the base (2).

5. A slide rail guide mechanism for a SEM scanning electron microscope according to claim 2, characterized in that: The torsion spring (16) is located at the center of the outer wall of the connecting rod (14).

6. A slide rail guide mechanism for a SEM scanning electron microscope according to claim 2, characterized in that: The top block (9) is trapezoidal in shape, and the rubber pad (10) at its end is tightly fitted with the bolt (7).

7. A slide rail guide mechanism for a SEM scanning electron microscope according to claim 2, characterized in that: The limiting plate (8) is L-shaped and is pressed against the outer wall of the slide rail (6).

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