A phase shifter and a manufacturing method thereof, a phase shifter circuit and related products

Abstract

The embodiment of the application provides a phase shifter and a manufacturing method thereof, a phase shifter circuit and related products, relates to the field of communication technology, and aims to improve the modulation capacity of the phase shifter. The phase shifter comprises a coupling line group, a first fixed electrode, a second fixed electrode, a first movable electrode and a second movable electrode. The coupling line group comprises a first coupling line and a second coupling line which are coupled by a wide side. The first fixed electrode is part of the first coupling line, the second fixed electrode is part of the second coupling line, and the first fixed electrode and the second fixed electrode are respectively located at two ends of the coupling line group. The first movable electrode is stacked with the first fixed electrode and has a spacing. The second movable electrode is stacked with the second fixed electrode and has a spacing. The embodiment of the application shares the fixed electrodes of the coupling line and the capacitive switch, reduces the length of the coupling line, reduces the parasitic capacitance of the MEMS switch in high-frequency application, and improves the modulation capacity of the phase shifter.

Description

Technical Field

[0001] This application relates to the field of communication technology, and in particular to a phase shifter and its manufacturing method, phase shifter circuit and related products. Background Technology

[0002] Phase shifters are widely used radio frequency (RF) microwave devices used to adjust the phase of RF signals and are widely applied in various communication systems. For example, commonly used phase shifters include reflective phase shifters, which shift the phase of a signal by reflecting it. In some phase shifters, the opening and closing of micro-electro-mechanical system (MEMS) switches can be used to change the phase shift state of the transmitted signal, thus achieving phase adjustment. The performance of MEMS switches affects many performance parameters of the phase shifter, such as the phase shift and insertion loss. Limited by factors such as materials and manufacturing processes, the performance of MEMS switches is difficult to further improve, hindering the enhancement of the modulation capability of phase shifters.

[0003] Therefore, improving the modulation capability of phase shifters is an urgent problem to be solved. Summary of the Invention

[0004] This application provides a phase shifter and its manufacturing method, a phase shifter circuit, and related products, with the main purpose of improving the modulation capability of the phase shifter.

[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:

[0006] In a first aspect, embodiments of this application provide a phase shifter, which includes a coupling line group, a first fixed electrode, a second fixed electrode, a first movable electrode, and a second movable electrode. The coupling line group includes a first coupling line and a second coupling line, which are broadside coupled. The first fixed electrode is part of the first coupling line and located at one end of the first coupling line, and the second fixed electrode is part of the second coupling line and located at one end of the second coupling line. The first fixed electrode and the second fixed electrode are respectively located at both ends of the coupling line group. The first movable electrode is stacked with the first fixed electrode and spaced apart, and the second movable electrode is stacked with the second fixed electrode and spaced apart.

[0007] The phase shifter provided in the above embodiments comprises a first fixed electrode and a first movable electrode stacked and spaced apart, and a second fixed electrode and a second movable electrode stacked and spaced apart, which can respectively realize capacitive switching. The capacitive switch is, for example, a MEMS switch. The first fixed electrode shares an end with the first coupling line; for example, this end can be the opposite end of the input / output terminal of the first coupling line. The second fixed electrode shares an end with the second coupling line; for example, this end can be the opposite end of the input / output terminal of the second coupling line. The fixed electrodes are located at opposite ends of the coupling line group, which not only facilitates a symmetrical design of the phase shifter but also allows the extended structure of the coupling line group to share the fixed electrodes (including the first and second fixed electrodes) of the MEMS switch. Therefore, by adjusting the opening and closing state of the MEMS switch, the capacitance value of the MEMS switch is changed, i.e., the capacitance of the rear end of the coupling bridge formed by the coupling line group is changed, thereby switching the phase shift state of the signal transmitted by the phase shifter. In this circuit, the rear end of the coupling bridge, opposite to the input and output ends of the coupling line, can refer to either the end shared by the first coupling line and the first fixed electrode, or the end shared by the second coupling line and the second fixed electrode. Therefore, there is no need to set up a separate MEMS switch at the rear end of the coupling line, effectively reducing the length of the coupling line and consequently reducing the parasitic capacitance in high-frequency applications of the MEMS switch, thereby improving the modulation capability of the phase shifter.

[0008] In one possible implementation, under the action of a first bias voltage, the shape of the first movable electrode changes, and / or the first movable electrode moves towards the first fixed electrode. The distance between the first movable electrode and the first fixed electrode decreases. Under the action of a second bias voltage, the shape of the second movable electrode changes, and / or the second movable electrode moves towards the second fixed electrode. The distance between the second movable electrode and the second fixed electrode decreases. In this implementation, under the action of the bias voltage, the distance between the movable electrode and the fixed electrode changes, thereby changing the capacitance of the MEMS switch formed by the movable electrode and the fixed electrode, thus enabling the phase shifter to have different phase shift states, achieving phase shift of the signal.

[0009] In one possible implementation, the first coupling line is disposed on the same plane. In this implementation, the phase shifter can adopt a stacked structure. The first fixed electrode and the remaining unreused parts of the first coupling line can be disposed on the same layer, which reduces the number of layers in the stacked structure, simplifies the structural complexity of the phase shifter, facilitates its integration, and promotes miniaturization. Furthermore, the stacked structure can be fabricated in layers, and the entire first coupling line is disposed on the same plane, which can also reduce the manufacturing cost of the phase shifter, improve its manufacturing efficiency, and facilitate mass production.

[0010] In one possible implementation, the second coupling line is disposed on the same plane. In this implementation, the second fixed electrode and the remaining unreused parts of the second coupling line can be disposed on the same layer, which helps to simplify the structural complexity of the phase shifter, facilitates the integration of the phase shifter, promotes the miniaturization of the phase shifter, and also facilitates the mass production of the phase shifter.

[0011] In one possible implementation, the first movable electrode and / or the second movable electrode are located between the plane containing the first coupling line and the plane containing the second coupling line. In this implementation, placing the first movable electrode and / or the second movable electrode between the plane containing the first coupling line and the plane containing the second coupling line minimizes the structural space occupied by the movable electrode on the outer layer of the coupling bridge, thereby improving the integration density of the phase shifter and facilitating its miniaturization.

[0012] In one possible implementation, the first movable electrode is located on the side of the plane containing the first coupling line away from the plane containing the second coupling line, and / or, the second movable electrode is located on the side of the plane containing the second coupling line away from the plane containing the first coupling line. In this implementation, setting the first movable electrode and / or the second movable electrode as the outer layer of the coupling bridge allows for a distributed arrangement of the phase shifter's structure. This not only reduces the manufacturing difficulty of the phase shifter and facilitates mass production, but also reduces electrical interference between circuit structures.

[0013] In one possible implementation, the phase shifter further includes a first stub and a second stub. The first stub is electrically connected to the other end of the first coupling line. The second stub is electrically connected to the other end of the second coupling line. The first and second stubs are located at opposite ends of the coupling line group. In this implementation, the first and second stubs can serve as matching stubs for the phase shifter. By being respectively located at the other ends of the first and second coupling lines, the matching stubs adjust the input and output impedances of the phase shifter, improving impedance matching, reducing insertion loss, and thus improving the signal transmission efficiency of the phase shifter.

[0014] In one possible implementation, the first stub includes an electrically connected first sub-stub and a second sub-stub, the first sub-stub being electrically connected to a first coupling line. The second stub includes electrically connected third and fourth sub-stubs, the third sub-stub being electrically connected to a second coupling line. Along a direction perpendicular to the distance from the first sub-stub to the second sub-stub, the size of the second sub-stub is larger than the size of the first sub-stub. Along a direction perpendicular to the distance from the third sub-stub to the fourth sub-stub, the size of the fourth sub-stub is larger than the size of the third sub-stub. In this implementation, the dimensions of the matching stubs (including the first and second stubs) of the phase shifter are designed such that the width of the matching stub gradually increases from the end connected to the coupling line group to the end of the matching stub. By changing the reactance characteristics of the matching stubs, the input and output impedances of the phase shifter are better matched to the transmission line or load, thereby further reducing the insertion loss of the phase shifter, improving the signal transmission efficiency of the phase shifter, and also helping to expand the signal bandwidth and improve the stability of the phase shifter.

[0015] In one possible implementation, the first branch is arranged on the same layer as the first coupling line. The second branch includes a third sub-branch and a fifth sub-branch that are electrically connected, with the fifth sub-branch electrically connected to the second coupling line. The third sub-branch is arranged on the same layer as the first coupling line, and the fifth sub-branch intersects the plane containing the first coupling line. In this implementation, arranging the third sub-branch of the second branch on the same layer as the first coupling line allows for placing more of the phase shifter's circuitry on the plane containing the first coupling line. This enables the phase shifter to be fabricated in layers, allowing most of the circuitry to be fabricated simultaneously on one layer, thus completing the patterning of most of the circuitry in a single fabrication process and improving the fabrication efficiency of the phase shifter.

[0016] In one possible implementation, the first branch is arranged on the same layer as the first coupling line, and the second branch is arranged on the same layer as the second coupling line. In this implementation, the first branch and the second branch are respectively arranged on the same layer as different coupling lines in the coupling line group, thereby reducing and increasing the integration density of the phase shifter, which is beneficial to the miniaturization of the phase shifter.

[0017] In one possible implementation, the phase shifter further includes a third branch and a fourth branch. The third branch is electrically connected to the first fixed electrode, and the fourth branch is electrically connected to the second fixed electrode. In this implementation, the third and fourth branches are set as phase-shifting branches of the phase shifter. The third and fourth branches can compensate for the phase of the phase shifter, or adjust the phase shift amount of the phase shifter, so that the phase shifter meets the required phase shift amount within a certain bandwidth near the center frequency of the transmission signal, thereby improving the phase shifting accuracy of the phase shifter and ensuring the performance of the phase shifter.

[0018] In one possible implementation, the phase shifter further includes a third fixed electrode, a fourth fixed electrode, a fifth fixed electrode, and a sixth fixed electrode. The third fixed electrode is electrically connected to the first movable electrode, and the third and fourth fixed electrodes are stacked and spaced apart. The fifth fixed electrode is electrically connected to the second movable electrode, and the fifth and sixth fixed electrodes are stacked and spaced apart. Since the first movable electrode and the first fixed electrode form a MEMS switch, and the second movable electrode and the second fixed electrode also form a MEMS switch, and the MEMS switch is a capacitive switch, in this implementation, by setting the stacked third and fourth fixed electrodes and the stacked fifth and sixth fixed electrodes, a capacitor is implemented in the phase shifter. This capacitor is matched with the capacitance of the MEMS switch, thereby reducing the peripheral matching and parasitic parameters of the phase shifter, and thus improving the performance of the phase shifter.

[0019] In one possible implementation, the third fixed electrode is disposed on the same layer as the first movable electrode. Alternatively, the fourth fixed electrode is disposed on the same layer as the first coupling line. Alternatively, the fifth fixed electrode is disposed on the same layer as the second movable electrode. Alternatively, the sixth fixed electrode is disposed on the same layer as the second coupling line. In this implementation, the fourth and sixth fixed electrodes can be circuits disposed on the same layer as the first and second coupling lines, respectively. The third and fourth fixed electrodes can also be disposed on the same layer as their respective movable electrodes. This allows the capacitor formed by the stacked third and fourth fixed electrodes, and the stacked fifth and sixth fixed electrodes, to be a conformal capacitor of the MEMS switch, further improving the matching between this capacitor and the capacitance of the MEMS switch, reducing the peripheral matching and parasitic parameters of the phase shifter, and improving the performance of the phase shifter.

[0020] In one possible implementation, the phase shifter further includes a first electrode line and a second electrode line. The first electrode line is located on one side of the plane containing the first movable electrode and is electrically connected to the first movable electrode. The second electrode line is located on one side of the plane containing the second movable electrode and is electrically connected to the second movable electrode. The first and second electrode lines are electrically connected to the reference ground voltage terminal of the phase shifter. In this implementation, by using the first and second electrode lines to electrically connect the first and second movable electrodes to the reference ground voltage terminal of the phase shifter, grounding of one electrode of the MEMS switch is achieved. Since the first and second electrode lines are located on one side of the plane containing the first and second movable electrodes, respectively, grounding of the MEMS switch can be achieved by drilling holes in the stacked structure of the phase shifter, which helps to reduce the size of the phase shifter and improve its integration.

[0021] In one possible implementation, the phase shifter further includes a first substrate, a second substrate, and a third substrate. A first coupling line and a first fixed electrode are embedded in the first substrate. The second substrate is disposed on the side of the first coupling line away from the first substrate, and a first movable electrode or a second movable electrode is disposed within the second substrate. The third substrate is disposed on the side of the second substrate away from the first substrate, and the second coupling line and the second fixed electrode are embedded in the third substrate. In this implementation, the phase shifter is configured as a stacked structure, and the coupling line group and other structures of the phase shifter are disposed in different substrates of the stack. This helps to improve the integration of the phase shifter, facilitates its miniaturization, and also facilitates its mass production.

[0022] In one possible implementation, the phase shifter further includes a fourth substrate. A first coupling line, a first fixed electrode, a first movable electrode, a second movable electrode, a second coupling line, and a second fixed electrode are disposed within the fourth substrate. The first coupling line and the first fixed electrode are on the same layer. The first movable electrode or the second movable electrode is disposed on one side of the plane containing the first coupling line. The second coupling line and the second fixed electrode are on the same layer, and the second fixed electrode is disposed on the side of the second movable electrode away from the plane containing the first coupling line. In this implementation, the coupling line, electrodes, and other functional structures are disposed on the same or different layers, and the functional structures are disposed within the same fused fourth substrate. This facilitates the layered fabrication of the phase shifter according to the positions of different functional structures, and also utilizes the fused fabrication characteristics of the substrate to improve the integrity and integration of the phase shifter structure.

[0023] In one possible implementation, the distance between the first movable electrode and the first fixed electrode differs in different states, and the ratio of the maximum to the minimum distance between the first movable electrode and the first fixed electrode is less than 20. And / or, the distance between the second movable electrode and the second fixed electrode differs in different states, and the ratio of the maximum to the minimum distance between the second movable electrode and the second fixed electrode is less than 20. In this implementation, since the first movable electrode and the first fixed electrode, and the second movable electrode and the second fixed electrode are respectively implemented as MEMS switches, by adjusting the opening and closing state of the MEMS switch, the capacitance at the rear end of the coupling bridge formed by the coupling line group can be directly changed, switching the phase shift state of the signal transmitted by the phase shifter, thus achieving phase shift modulation. There is no need to connect the MEMS switch in parallel with other capacitors to jointly adjust the phase shift state of the signal. Therefore, the MEMS switch can achieve phase shift modulation with a smaller capacitance ratio. The ratio of the maximum to the minimum distance between the two plates of the MEMS switch (e.g., the first movable electrode and the first fixed electrode) can also be set within a small range, thereby reducing the fabrication difficulty and size of the MEMS switch.

[0024] In one possible implementation, the width of the first or second fixed electrode is in the range of 0.1 mm to 0.3 mm. And / or, the thickness of the first or second fixed electrode is in the range of 5 μm to 15 μm. And / or, the length of the first or second fixed electrode is in the range of 0.3 mm to 0.6 mm. The length of the first or second fixed electrode is the dimension along the trace direction. In this implementation, by setting the length, width, and thickness of the first or second fixed electrode within appropriate ranges, it is beneficial to achieve the corresponding equivalent capacitance, thereby ensuring the signal transmission efficiency of the phase shifter.

[0025] Secondly, embodiments of this application provide a phase shifter circuit, which includes a first capacitor, a second capacitor, a third capacitor, a fourth capacitor, a first inductor, a second inductor, a third inductor, a fourth inductor, a first input / output terminal, a second input / output terminal, and a reference ground voltage terminal. The first input / output terminal is electrically connected to one end of the first inductor and one end of the fourth inductor. The second input / output terminal is electrically connected to one end of the second inductor and the other end of the fourth inductor. One end of the first capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other end of the first inductor and one end of the third inductor. One end of the second capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other ends of the second inductor and the other end of the third inductor. One end of the third capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the first input / output terminal, one end of the first inductor, and one end of the fourth inductor. One end of the fourth capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the second input / output terminal, one end of the second inductor, and the other end of the fourth inductor.

[0026] The phase shifter circuit provided in the above embodiment utilizes a first inductor, a second inductor, a third inductor, a fourth inductor, a third capacitor, and a fourth capacitor as a coupling bridge. The signal is input from the first input / output terminal and the second input / output terminal. After phase-shifting modulation, the signal is output from the first input / output terminal and the second input / output terminal, thus achieving signal modulation and transmission. The first and second capacitors act as capacitive switches. The opening and closing of these capacitive switches changes the capacitance at the rear end of the coupling bridge formed by the coupling line group, determining whether the signal is connected to the reference ground voltage terminal, thereby changing the phase of the phase shifter and achieving signal modulation.

[0027] In one possible implementation, the phase shifter circuit further includes a first transmission line, a second transmission line, a seventh capacitor, and an eighth capacitor. The other end of the first capacitor is electrically connected to one end of the first transmission line, the other end of the first transmission line is electrically connected to one end of the seventh capacitor, and the other end of the seventh capacitor is electrically connected to a reference ground voltage terminal. The other end of the second capacitor is electrically connected to one end of the second transmission line, the other end of the second transmission line is electrically connected to one end of the eighth capacitor, and the other end of the eighth capacitor is electrically connected to a reference ground voltage terminal. In this implementation, by using the first and second transmission lines connected to the rear end of the coupling bridge, the phase difference of different phase shift states of the signal transmitted by the phase shifter circuit can be adjusted, thereby adjusting the phase shift amount of the signal transmitted by the phase shifter circuit. The seventh and eighth capacitors can serve as conformal capacitors for the MEMS switch, matching the MEMS switch and reducing peripheral matching and parasitic parameters.

[0028] Thirdly, embodiments of this application provide a radio frequency front-end module, which includes the phase shifter or the phase shifter circuit in any of the above embodiments.

[0029] Fourthly, embodiments of this application provide a communication device, which includes the radio frequency front-end module in any of the above embodiments.

[0030] Fifthly, embodiments of this application provide a method for manufacturing a phase shifter. The method includes: forming a first coupling line and a first fixed electrode. The first fixed electrode is connected to one end of the first coupling line. A first movable electrode and a second movable electrode are formed, the first movable electrode and the first fixed electrode being stacked and spaced apart. A second coupling line and a second fixed electrode are formed, the second fixed electrode being connected to one end of the second coupling line. The first coupling line and the second coupling line are coupled along their wide sides to form a coupling line group. The first fixed electrode and the second fixed electrode are respectively located at both ends of the coupling line group. The second movable electrode and the second fixed electrode are stacked and spaced apart. Therefore, by manufacturing the phase shifter in stages, the manufacturing efficiency of the phase shifter can be improved.

[0031] In one possible implementation, the method for fabricating the phase shifter further includes: providing a first substrate before forming the first coupling line and the first fixed electrode, the surface of the first substrate having a first groove. The step of forming the first coupling line and the first fixed electrode includes forming the first coupling line and the first fixed electrode within the first groove. Before forming the first movable electrode and the second movable electrode, a second substrate is provided. The step of forming the first movable electrode and the second movable electrode includes forming the first movable electrode and the second movable electrode within the second substrate. Before forming the second coupling line and the second fixed electrode, a third substrate is provided, the surface of the third substrate having a second groove. The step of forming the second coupling line and the second fixed electrode includes forming the second coupling line and the second fixed electrode within the second groove. The first substrate and the second substrate are then bonded, and the second substrate and the third substrate are also bonded. Thus, by fabricating the layered structure of the phase shifter and assembling it through bonding, the fabrication efficiency of the phase shifter can be further improved.

[0032] Unless otherwise specified, the technical effects of any of the design methods in aspects two through five can be found in the technical effects of different design methods in aspect one, and will not be repeated here. Attached Figure Description

[0033] Figure 1 A structural block diagram of a communication device provided in an embodiment of this application;

[0034] Figure 2 A structural block diagram of a radio frequency front-end module provided in an embodiment of this application;

[0035] Figure 3 A topology diagram of a phase shifter circuit provided in an embodiment of this application;

[0036] Figure 4 A topology diagram of another phase shifter circuit provided in an embodiment of this application;

[0037] Figure 5 A topology diagram of another phase shifter circuit provided in an embodiment of this application;

[0038] Figure 6 A topology diagram of another phase shifter circuit provided in an embodiment of this application;

[0039] Figure 7 A structural diagram of a phase shifter provided in an embodiment of this application;

[0040] Figure 8 for Figure 7 A cross-sectional view of the phase shifter along the AA' direction in the illustrated embodiment;

[0041] Figure 9 for Figure 7An exploded view of the phase shifter in the illustrated embodiment;

[0042] Figure 10 for Figure 7 A cross-sectional view of the phase shifter along the BB' direction in the illustrated embodiment;

[0043] Figure 11 for Figure 7 A cross-sectional view of the phase shifter in the illustrated embodiment along the CC' direction;

[0044] Figure 12 A structural diagram of another phase shifter provided in an embodiment of this application;

[0045] Figure 13 for Figure 12 An exploded view of the phase shifter in the illustrated embodiment;

[0046] Figure 14 for Figure 12 A cross-sectional view of the phase shifter along the DD' direction in the illustrated embodiment;

[0047] Figure 15 for Figure 12 A cross-sectional view of the phase shifter in the illustrated embodiment along the EE' direction;

[0048] Figure 16 for Figure 12 A cross-sectional view of the phase shifter in the illustrated embodiment along the FF' direction;

[0049] Figure 17 for Figure 12 Another cross-sectional view of the phase shifter in the illustrated embodiment along the EE' direction;

[0050] Figure 18 for Figure 12 Another cross-sectional view of the phase shifter in the illustrated embodiment along the FF' direction;

[0051] Figure 19 for Figure 12 Top view of the phase shifter in the illustrated embodiment;

[0052] Figure 20 for Figure 19 A cross-sectional view of the phase shifter in the illustrated embodiment along the GG' direction;

[0053] Figure 21 for Figure 19 Another cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the GG' direction;

[0054] Figure 22 for Figure 19 A cross-sectional view of the phase shifter in the illustrated embodiment along the HH' direction;

[0055] Figure 23 for Figure 19 Electrode structure diagram of the phase shifter in the illustrated embodiment;

[0056] Figure 24 A flowchart illustrating the steps of a method for manufacturing a phase shifter provided in this application embodiment;

[0057] Figures 25A-25E A process structure diagram illustrating the manufacturing method of the phase shifter provided in this application embodiment;

[0058] Figure 26 A planar structural diagram of a phase shifter provided in an embodiment of this application;

[0059] Figure 27 Another planar structural diagram of the phase shifter provided in the embodiments of this application;

[0060] Figure 28 This is another planar structural diagram of the phase shifter provided in the embodiments of this application.

[0061] Explanation of reference numerals in the attached figures:

[0062] C1, First capacitor; C2, Second capacitor; C3, Third capacitor; C4, Fourth capacitor; C5, Fifth capacitor; C6, Sixth capacitor; C7, Seventh capacitor; C8, Eighth capacitor; L1, First inductor; L2, Second inductor; L3, Third inductor; L4, Fourth inductor; I / O1, First input / output terminal; I / O2, Second input / output terminal; GND1, First reference ground voltage terminal; GND3, Second reference ground voltage terminal; GND3, Third reference ground voltage terminal; GND4, Fourth reference ground voltage terminal; GND5, Fifth reference ground voltage terminal; G ND6, Sixth Reference Ground Voltage Terminal; GND7, Seventh Reference Ground Voltage Terminal; GND8, Eighth Reference Ground Voltage Terminal; TL1, First Transmission Line; TL1-1, First Sub-Transmission Line; TL1-2, Second Sub-Transmission Line; TL2, Second Transmission Line; TL2-1, Third Sub-Transmission Line; TL2-2, Fourth Sub-Transmission Line; 101, RF Front-End Module; 102, Memory; 103, Processor; 104, Sensor Assembly; 105, Multimedia Assembly; 106, Power Supply Assembly; 107, Input / Output Interface; 1010, Phase Shifter; 100 1. First substrate; 200. Second substrate; 300. Third substrate; 400. Metal pad; 500. Fourth substrate; 1. First coupling line; 2. Second coupling line; 3. First input / output structure; 4. Second input / output structure; 11. First fixed electrode; 12. Second fixed electrode; 13. Third fixed electrode; 14. Fourth fixed electrode; 15. Fifth fixed electrode; 16. Sixth fixed electrode; 21. First movable electrode; 22. Second movable electrode; 211. Cantilever; 212. Fixing part; 23. First dielectric layer; 24. Second dielectric layer; 25. Third dielectric layer; 26. Fourth dielectric layer; 27. First external electrode line; 28. Second external electrode line; 31. First branch; 32. Second branch; 33. Third branch; 34. Fourth branch; 311. First sub-branch; 312. Second sub-branch; 321. Third sub-branch; 322. Fourth sub-branch; 323. Fifth sub-branch; 41. First electrode line; 42. Second electrode line; 43. Third electrode line; 44. Fourth electrode line; 45. Fifth electrode line; 46. Sixth electrode line; 301. First opening; 302. Second opening. Detailed Implementation

[0063] The technical solutions in the embodiments of this application will now be described with reference to the accompanying drawings.

[0064] In the description of the embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0065] Furthermore, to facilitate a clear description of the technical solutions in the embodiments of this application, the terms "first" and "second" are used in the embodiments of this application to distinguish identical or similar items with substantially the same function and effect. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and that "first" and "second" are not necessarily different. Meanwhile, in the embodiments of this application, words such as "exemplarily" or "for example" are used to indicate that something is being used as an example, illustration, or explanation. Any embodiment or design scheme described as "exemplarily" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design schemes. Specifically, the use of words such as "exemplarily" or "for example" is intended to present related concepts in a concrete manner for ease of understanding.

[0066] In describing some embodiments, the term "connection" and its derivative expressions are used. The term "connection" should be interpreted broadly; for example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0067] As used herein, “parallel,” “perpendicular,” and “equal” include the described situation and situations that are similar to the described situation, within an acceptable range of deviation, which is determined by those skilled in the art taking into account the measurement under discussion and the error associated with the measurement of a particular quantity (i.e., the limitations of the measurement system). For example, “parallel” includes absolute parallelism and approximate parallelism, where an acceptable range of deviation for approximate parallelism may be, for example, within 5°; “perpendicular” includes absolute perpendicularity and approximate perpendicularity, where an acceptable range of deviation for approximate perpendicularity may also be, for example, within 5°; “equal” includes absolute equality and approximate equality, where an acceptable range of deviation for approximate equality may be, for example, a difference between the two equals being less than or equal to 5% of either one.

[0068] In this embodiment of the application, "and / or" describes the relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following associated objects have an "or" relationship.

[0069] Unless otherwise specified, the value range "M~N" includes both the values ​​of M and N.

[0070] In the embodiments of this application, "upper", "lower", "left" and "right" are not limited to the orientation of the components in the accompanying drawings. It should be understood that these directional terms can be relative concepts, used for relative description and clarification, and can change accordingly depending on the orientation of the components in the accompanying drawings.

[0071] In the accompanying drawings, the thickness of some layers or regions has been selectively exaggerated for clarity, and the dimensional proportions between the portions shown do not reflect actual dimensional proportions. Therefore, variations in shape relative to the drawings are conceivable due to factors such as manufacturing techniques and / or tolerances. Consequently, exemplary embodiments should not be construed as being limited to the shapes of the regions shown in this application, but rather include shape deviations caused, for example, by manufacturing processes. For instance, etched areas shown as rectangular would typically have curved features. Therefore, the regions shown in the drawings are schematic in nature, and their shapes are not intended to show the actual shapes of the areas of the device, nor are they intended to limit the scope of the exemplary embodiments.

[0072] This application provides a communication device, which includes a radio frequency (RF) front-end module.

[0073] This communication equipment can be deployed on land, including indoors or outdoors, handheld or vehicle-mounted. It can also be deployed on water (such as on ships) or in the air (e.g., on airplanes, balloons, and satellites). For example, the communication device can be a terminal or a base station. For example, the terminal includes, but is not limited to: mobile phones, tablets, laptops, PDAs, mobile internet devices (MIDs), wearable devices (such as smartwatches, smart bracelets, pedometers, etc.), in-vehicle devices (such as cars, bicycles, electric vehicles, airplanes, ships, trains, high-speed trains, etc.), virtual reality (VR) devices, augmented reality (AR) devices, wireless terminals in industrial control, smart home devices (such as refrigerators, televisions, air conditioners, electricity meters, etc.), smart robots, workshop equipment, wireless terminals in self-driving, wireless terminals in remote medical surgery, wireless terminals in smart grids, wireless terminals in transportation safety, wireless terminals in smart cities, or wireless terminals in smart homes, flying equipment (such as smart robots, hot air balloons, drones, airplanes), radio frequency front-end modules, etc.

[0074] Figure 1 This is a structural block diagram of a communication device provided in an embodiment of this application.

[0075] In this embodiment of the application, the communication device is described using a mobile phone as an example. The communication device includes: a radio frequency front-end module 101, a memory 102, a processor 103, a sensor component 104, a multimedia component 105, a power supply component 106, and an input / output interface 107.

[0076] The following is combined Figure 1 A detailed introduction to each component of this mobile phone:

[0077] The radio frequency front-end module 101 can be used to receive and send signals during information transmission or calls. In particular, it receives downlink information from the communication device, processes it with the processor 103, and sends uplink data to the communication device.

[0078] The memory 102 can be used to store data, software programs, and modules. The mobile phone may include high-speed random access memory and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other volatile solid-state storage device.

[0079] The processor 103 is the control center of the mobile phone. It connects to various parts of the device through various interfaces and lines. By running or executing software programs and / or modules stored in the memory 102, and by calling data stored in the memory 102, it performs various functions and processes data of the mobile phone, thereby controlling the mobile phone as a whole. The processor 103 may include, for example, an application processor and a baseband processor.

[0080] Sensor assembly 104 includes one or more sensors for providing various aspects of the mobile phone's status assessment. Sensor assembly 104 may include light sensors, accelerometers, gyroscopes, magnetometers, pressure sensors, or temperature sensors, etc., and can detect the phone's acceleration / deceleration, orientation, on / off state, relative positioning of components, or temperature changes, etc. Furthermore, sensor assembly 104 may also include light sensors, such as complementary metal oxide semiconductor (CMOS) or charge-coupled device (CCD) image sensors, for use in imaging applications.

[0081] The multimedia component 105 provides a screen that serves as an output interface between the mobile phone and the user. This screen can be a touch panel, and when it is a touch panel, it can be implemented as a touchscreen to receive input signals from the user. Furthermore, the multimedia component 105 also includes at least one camera; for example, it includes a front-facing camera and / or a rear-facing camera.

[0082] The power supply component 106 is used to provide power to the various components of the mobile phone. The power supply component 106 may include a power management system, one or more power supplies, and other components associated with the generation, management and distribution of power by the mobile phone.

[0083] Input / output interface 107 provides an interface between processor 103 and peripheral interface modules, such as keyboards and mice.

[0084] Although not shown, the mobile phone may also include audio components and communication modules, such as audio components including a microphone and a speaker, and communication modules including one or more of the following: wireless fidelity (WiFi) module, Bluetooth module, near field communication (NFC) module, global navigation satellite system (GNSS) module, or frequency modulation (FM) module. Further details are omitted here. Those skilled in the art will understand that… Figure 1 The mobile phone structure shown does not constitute a limitation on the mobile phone and may include more or fewer components than shown, or combine certain components, or have different component arrangements.

[0085] Figure 2 This is a structural block diagram of a radio frequency front-end module provided in an embodiment of this application.

[0086] This application provides an embodiment of a radio frequency front-end module, such as... Figure 2 As shown, the RF front-end module includes a phase shifter 1010.

[0087] This application also provides an RF front-end module, which may further include a phase shifter circuit.

[0088] Typically, the RF front-end module 101 includes, but is not limited to, phase shifters or phase shifter circuits, RF switches, duplexers, filters, power amplifier circuits (PA), low noise amplifier circuits (LNA), etc. For example, Figure 2 As shown, the RF front-end module 101 may include: a phase shifter 1010 or a phase shifter circuit, an RF switch, a duplexer, a filter, a power amplifier circuit PA, and a low-noise amplifier LNA. For example, the RF front-end module 101 includes a substrate, and one or more of the phase shifter 1010 or the phase shifter circuit, the power amplifier circuit PA, the low-noise amplifier LNA, the RF switch, the duplexer, and the filter are disposed on the substrate.

[0089] The main function of the phase shifter 1010 or phase shifter circuit is to change the phase of the radio frequency (RF) signal, thereby controlling the beam direction or adjusting the timing of the RF signal waveform. For example, it can adjust the impedance characteristics of a capacitor or inductor, or utilize the nonlinear characteristics of electronic components to achieve phase shifting.

[0090] The RF front-end module 101 may include a transmit channel and a receive channel. The transmit channel includes a power amplifier circuit PA and a transmit channel filter. The RF output terminal of the power amplifier circuit PA is coupled to the input terminal of the transmit channel filter. The power amplifier circuit PA is used to amplify the RF signal of the transmit channel, and the transmit channel filter is used to filter the signal of the transmit channel. For example, the RF output terminal of the power amplifier circuit PA is coupled to the input terminal of the transmit channel filter.

[0091] The receiving channel includes a low-noise amplifier (LNA) and a receiving channel filter. The output of the receiving channel filter is coupled to the RF input of the LNA. The LNA amplifies the RF signal from the receiving channel, and the receiving channel filter filters the signal. For example, the RF input of the LNA is coupled to the output of the receiving channel filter.

[0092] A duplexer is used for duplex switching in a frequency division duplex system and for filtering the radio frequency signals of the receive / transmit channel. An RF switch is used for switching between the receive and transmit channels.

[0093] The baseband signal is transmitted to the transmit channel via the transceiver. The transmit channel amplifies the received RF signal and outputs it to the antenna, which then transmits it. The power amplifier circuit PA is responsible for amplifying the RF signal from the transmit channel, and the transmit channel filter is responsible for filtering the RF signal from the transmit channel.

[0094] It should be clarified that when an electronic device includes multiple antennas, one antenna may correspond to one power amplifier circuit PA, one antenna may correspond to multiple power amplifier circuits PA, or multiple antennas may share one power amplifier circuit PA. The application scenarios in the related technologies are all applicable to the embodiments of this application.

[0095] The receiving channel receives radio frequency (RF) signals from the antenna. These RF signals are amplified by the receiving channel and then output, before being transmitted to the baseband via a transceiver. A low-noise amplifier (LNA) amplifies the RF signals from the receiving channel, and a receiving channel filter filters the RF signals from the receiving channel. Furthermore, the antenna frequencies applicable to this embodiment may include frequency bands with relatively high bandwidth requirements, such as the n77 band. Of course, other frequency bands, such as Wi-Fi bands (e.g., 2.4GHz, 5GHz), can also be applied.

[0096] Figure 3 This is a topology diagram of a phase shifter circuit provided in an embodiment of this application.

[0097] like Figure 3As shown, the coupling line of the phase shifter circuit has a fifth capacitor C5 and a sixth capacitor C6 at its rear end. This increases the coupling length of the coupling line, increases the parasitic capacitance of the MEMS switch in high-frequency applications, and adversely affects the modulation capability of the phase shifter circuit. Since the first capacitor C1 and the second capacitor C2 are used as MEMS switches, and are connected in parallel with the fifth capacitor C5 and the sixth capacitor C6 respectively, the first capacitor C1 and the second capacitor C2 need to have a high capacitance ratio to meet the modulation requirements of the phase shifter 1010. For example, the reference ground voltage terminal can also include a fifth reference ground voltage terminal GND5 and a sixth reference ground voltage terminal GND6, with the fifth capacitor C5 electrically connected to the fifth reference ground voltage terminal GND5 and the sixth capacitor C6 electrically connected to the sixth reference ground voltage terminal GND6.

[0098] For example, in this embodiment, the reuse of the rear end of the coupling line and the fixed electrode may not be involved. The fifth capacitor C5 or the sixth capacitor C6 coupled to the coupling line may have a capacitance value of 2pF, for example. The fifth capacitor C5 and the sixth capacitor C6 are connected in parallel with the first capacitor C1 and the second capacitor, which serve as MEMS switches, respectively. In order to meet the signal modulation requirements of the phase shifter 1010, the MEMS switch needs to have a high capacitance ratio. For example, the capacitance of the MEMS switch in the closed and open circuit states is 0.1pF and 10pF, respectively, with a capacitance ratio of 100:1.

[0099] With the development of mobile communication technology, communication equipment places increasingly higher demands on the control accuracy and modulation capability of phase shifters 1010. Taking a phase shifter 1010 using MEMS switches as an example, the capacitance ratio of the MEMS switches affects many performance parameters of the phase shift and insertion loss of the transmitted signal. For this type of phase shifter 1010, the higher the capacitance ratio of the MEMS switches, the higher the performance and efficiency of the phase shifter 1010. However, MEMS switches with high capacitance ratios have large areas and spacing between the two capacitor plates, which not only increases the overall size of the MEMS switch and hinders the improvement of the integration of the phase shifter 1010, but also often requires a dedicated boost circuit. Furthermore, MEMS switches with high capacitance ratios are difficult and costly to manufacture, and the spacing between the plates also reduces the reliability of the phase shifter 1010. Therefore, these factors hinder the improvement of the modulation capability of the phase shifter 1010.

[0100] Figure 4 This is a topology diagram of another phase shifter circuit provided in an embodiment of this application.

[0101] In view of this, embodiments of this application provide a phase shifter circuit, such as... Figure 4As shown, the phase shifter circuit includes a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a first inductor L1, a second inductor L2, a third inductor L3, a fourth inductor L4, a first input / output terminal I / O1, a second input / output terminal I / O2, and a reference ground voltage terminal.

[0102] In this embodiment, the first input / output terminal I / O1 is electrically connected to one end of the first inductor L1 and one end of the fourth inductor L4. The second input / output terminal I / O2 is electrically connected to one end of the second inductor L2 and the other end of the fourth inductor L4.

[0103] In some optional implementations, the reference ground voltage terminal may include a first reference ground voltage terminal GND1, a second reference ground voltage terminal GND3, a third reference ground voltage terminal GND3, and a fourth reference ground voltage terminal GND4.

[0104] In this embodiment, one end of the first capacitor C1 is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other end of the first inductor L1 and one end of the third inductor L3. For example, one end of the first capacitor C1 can be connected to the first reference ground voltage terminal GND1.

[0105] In this embodiment, one end of the second capacitor C2 is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other end of the second inductor L2 and the other end of the third inductor L3. For example, one end of the second capacitor C2 can be connected to the second reference ground voltage terminal GND3.

[0106] In this embodiment, one end of the third capacitor C3 is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the first input / output terminal I / O1, one end of the first inductor L1, and one end of the fourth inductor L4. For example, one end of the third capacitor C3 can be connected to the third reference ground voltage terminal GND3.

[0107] In this embodiment, one end of the fourth capacitor C4 is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the second input / output terminal I / O2, one end of the second inductor L2, and the other end of the fourth inductor L4. For example, one end of the fourth capacitor C4 can be connected to the fourth reference ground voltage terminal GND4.

[0108] In the above embodiments, the first inductor L1, the second inductor L2, the third inductor L3, the fourth inductor L4, the third capacitor C3, and the fourth capacitor C4 are used as a coupling bridge. The signal is input from the first input / output terminal I / O1 and the second input / output terminal I / O2. After phase-shifting modulation, the signal is output from the first input / output terminal I / O1 and the second input / output terminal I / O2, thus achieving signal modulation and transmission. The first capacitor C1 and the second capacitor C2 are used as capacitive switches. The opening and closing of these capacitive switches changes the capacitance at the rear end of the coupling bridge formed by the coupling line group, determining whether the signal is connected to the reference ground voltage terminal, thus changing the phase of the phase shifter 1010 and achieving signal modulation.

[0109] Figure 5 This is a topology diagram of another phase shifter circuit provided in an embodiment of this application.

[0110] In some alternative embodiments, such as Figure 5 As shown, the phase shifter circuit also includes a first transmission line TL1 and a second transmission line TL2.

[0111] In this embodiment, the other end of the first capacitor C1 is connected to one end of the first transmission line TL1, and the other end of the second capacitor C2 is connected to one end of the second transmission line TL2.

[0112] Through the above embodiments, by using the first transmission line TL1 and the second transmission line TL2 connected to the rear end of the coupling bridge, the phase difference of the different phase shift states of the signal transmitted by the phase shifter circuit can be adjusted, thereby adjusting the phase shift amount of the signal transmitted by the phase shifter circuit.

[0113] In some alternative embodiments, such as Figure 5 As shown, the phase shifter circuit also includes a seventh capacitor C7 and an eighth capacitor C8.

[0114] In this embodiment, the other end of the first transmission line is electrically connected to one end of the seventh capacitor, and the other end of the seventh capacitor is electrically connected to the reference ground voltage terminal. The other end of the second transmission line is electrically connected to one end of the eighth capacitor, and the other end of the eighth capacitor is electrically connected to the reference ground voltage terminal.

[0115] For example, one end of the seventh capacitor C7 can be connected to the seventh reference ground voltage terminal GND7. One end of the eighth capacitor C8 can be connected to the eighth reference ground voltage terminal GND8.

[0116] Through the above embodiments, the seventh capacitor C7 and the eighth capacitor C8 can be used as conformal capacitors for MEMS switches to match the MEMS switches, thereby reducing peripheral matching and parasitic parameters.

[0117] Figure 6This is a topology diagram of another phase shifter circuit provided in an embodiment of this application.

[0118] In some alternative embodiments, such as Figure 6 As shown, one end of the seventh capacitor C7 can also be connected to, for example... Figure 5 The middle of the first transmission line TL1 is connected, and the other end of the seventh capacitor C7 is electrically connected to the reference ground voltage terminal GND7. One end of the eighth capacitor C8 can also be connected to... Figure 5 The middle connection of the second transmission line TL2 shown is connected to the other end of the eighth capacitor C8, which is electrically connected to the reference ground voltage terminal GND8.

[0119] For example, such as Figure 6 As shown, the phase shifter circuit may include a first sub-transmission line TL1-1 and a second sub-transmission line TL1-2 that are electrically connected to each other, and a third sub-transmission line TL2-1 and a fourth sub-transmission line TL2-2 that are electrically connected to each other.

[0120] For example, one end of the seventh capacitor C7 is electrically connected to the end of the first sub-transmission line TL1-1 and the second sub-transmission line TL1-2 respectively, and one end of the eighth capacitor C8 is electrically connected to the end of the third sub-transmission line TL2-1 and the fourth sub-transmission line TL2-2 respectively.

[0121] Through the above embodiments, the seventh capacitor C7 and the eighth capacitor C8 can also be used as conformal capacitors for MEMS switches to match the MEMS switches, thereby reducing peripheral matching and parasitic parameters.

[0122] In some alternative embodiments, such as Figure 6 As shown, the phase shifter circuit may include the first capacitor C1, second capacitor C2, third capacitor C3, fourth capacitor C4, seventh capacitor C7, eighth capacitor C8, first inductor L1, second inductor L2, third inductor L3, fourth inductor L4, first input / output terminal I / O1, second input / output terminal I / O2, reference ground voltage terminal, first transmission line TL1, and second transmission line TL2. Therefore, through this embodiment, not only do the first capacitor C1 and second capacitor C2 act as capacitive switches, directly controlling the first inductor L1, second inductor L2, third inductor L3, fourth inductor L4, third capacitor C3, and fourth capacitor C4 as a coupling bridge for phase-shift modulation of the signal, but the first transmission line TL1 and second transmission line TL2 are also used as phase-shifting branches to adjust the phase difference between different phase-shifting states of the signal. Furthermore, a conformal capacitor is used as the conformal capacitor for the MEMS switch to match the MEMS switch, reducing peripheral matching and parasitic parameters. Through the cooperation of the above circuit components, the signal modulation capability of the phase shifter circuit is improved.

[0123] By eliminating the fifth capacitor C5 and the sixth capacitor C6 in the above embodiments, the MEMS switch directly modulates the signal, significantly reducing the capacitance ratio requirement of the MEMS switch. For example, the capacitance of the MEMS switch in the closed and open states is 2.1pF and 12pF respectively, achieving similar performance to the phase shifter 1010 in the aforementioned related technologies. Therefore, the capacitance ratio of the MEMS switch can be reduced to approximately 6:1. This improves the manufacturability of the MEMS switch. Using a MEMS switch with a small capacitance ratio not only helps reduce the size of the capacitor structure and the overall structure, but also eliminates the need for an additional boost circuit, improving the reliability of the phase shifter circuit and enhancing its signal modulation capability.

[0124] Figure 7 This is a structural diagram of a phase shifter 1010 provided in an embodiment of this application.

[0125] This application provides a phase shifter 1010, the structure of which can correspond to the topology of the phase shifter circuit in the above embodiments.

[0126] In the embodiments of this application, such as Figure 7 As shown, the phase shifter 1010 includes a coupling line group, a first fixed electrode 11, a second fixed electrode 12, a first movable electrode 21, and a second movable electrode 22.

[0127] Figure 8 for Figure 7 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the AA' direction.

[0128] In the embodiments of this application, such as Figure 8 As shown, the coupling line group includes a first coupling line 1 and a second coupling line 2, with the first coupling line 1 and the second coupling line 2 being coupled along their wide sides.

[0129] Specifically, wide-edge coupling refers to the electromagnetic coupling between two signal layers or structures along the wide edge direction, or perpendicular to the signal propagation direction, in a multilayer circuit board or microwave device. The main characteristic of wide-edge coupling is that the wide edges of the two signal lines are aligned with each other.

[0130] In contrast to wide-side coupling, narrow-side coupling refers to signal coupling along a narrow side, or parallel to the signal propagation direction, through a small hole, gap, or narrow region. Compared to wide-side coupling, narrow-side coupling has a longer coupling line and lower bandwidth. When narrow-side coupling is applied to phase shifter 1010, the insertion loss rate of phase shifter 1010 is relatively high.

[0131] In some optional embodiments, the first coupling line 1 and the second coupling line 2 can be perpendicular parallel lines to each other. For example, the first coupling line 1 and the second coupling line 2 can be striplines or microstrip lines, and the first coupling line 1 and the second coupling line 2 are stacked and spaced apart.

[0132] In some examples, such as Figure 8 As shown, the coupling distance D1, or interval, between the first coupling line 1 and the second coupling line 2 can range from 20 μm to 30 μm. For example, the coupling distance D1, or interval, between the first coupling line 1 and the second coupling line 2 can be, but is not limited to, one of 20 μm, 22 μm, 25 μm, 28 μm, or 30 μm.

[0133] Figure 9 for Figure 7 An exploded view of the phase shifter 1010 in the illustrated embodiment.

[0134] In some examples, such as Figure 9 As shown, the routing of the first coupling line 1 or the second coupling line 2 is not a straight line. For example, the routing of the first coupling line 1 or the second coupling line 2 is a curve or a broken line; for instance, the routing of the first coupling line 1 or the second coupling line 2 is S-shaped or serpentine. This reduces the size occupied by the coupling line group and ensures the phase shifting performance of the phase shifter 1010.

[0135] In some optional implementations, such as Figure 9 As shown, the first coupling line 1 and the second coupling line 2 can achieve electromagnetic coupling. Figure 4 The capacitors are: C3 (third capacitor), C4 (fourth capacitor), L1 (first inductor), L2 (second inductor), L3 (third inductor), and L4 (fourth inductor).

[0136] In some optional embodiments, the phase shifter 1010 further includes a first input / output structure 3 and a second input / output structure 4, wherein the first input / output structure 3 is electrically connected to the other end of the first coupling line 1, and the second input / output structure 4 is electrically connected to the other end of the first coupling line 1. For example, the first input / output structure 3 can be implemented as follows: Figure 4 The first input / output terminal I / O1 and the second input / output structure 4 can achieve Figure 4 The second input / output terminal I / O2 in the system.

[0137] In the embodiments of this application, the coupling line group formed by the first coupling line 1 and the second coupling line 2 can also be used as a coupling bridge. Specifically, a coupling bridge is a bridge circuit that can distribute, synthesize, or detect signals through the principles of electromagnetic coupling or resistive voltage division.

[0138] In the embodiments of this application, such as Figure 9As shown, the first fixed electrode 11 is part of the first coupling line 1 and is located at the end of the first coupling line 1. The second fixed electrode 12 is part of the second coupling line 2 and is located at the end of the second coupling line 2. The first fixed electrode 11 and the second fixed electrode 12 are respectively located at both ends of the coupling line group.

[0139] like Figure 9 As shown, or in other words, the first fixed electrode 11 is electrically connected to one end of the first coupling line 1. The second fixed electrode 12 is electrically connected to one end of the second coupling line 2.

[0140] Figure 10 for Figure 7 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the BB' direction.

[0141] In the embodiments of this application, such as Figure 10 As shown, the first movable electrode 21 and the first fixed electrode 11 are stacked and spaced apart.

[0142] Figure 11 for Figure 7 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the CC' direction.

[0143] like Figure 11 As shown, the second movable electrode 22 and the second fixed electrode 12 are stacked and spaced apart. Thus, the first movable electrode 21 and the first fixed electrode 11 can be implemented as a MEMS switch, and the second movable electrode 22 and the second fixed electrode 12 can be implemented as a MEMS switch, which is a capacitive switch.

[0144] In some alternative embodiments, the first movable electrode 21 can be coupled with... Figure 4 The first reference ground voltage terminal GND1 is electrically connected, and the first movable electrode 21 and the first fixed electrode 11 can be used to realize the following: Figure 4 The first capacitor C1 in the circuit can be a MEMS capacitive switch.

[0145] In some optional embodiments, the phase shifter 1010 also includes Figure 10 The first dielectric layer 23 shown and Figure 11 The second dielectric layer 24 is shown.

[0146] In some examples, the first dielectric layer 23 is located between the first movable electrode 21 and the first fixed electrode 11, and the second dielectric layer 24 is located between the second movable electrode 22 and the second fixed electrode 12.

[0147] For example, the first dielectric layer 23 or the second dielectric layer 24 may be an insulating material.

[0148] In some optional embodiments, the first movable electrode 21 is directly opposite the first fixed electrode 11, and the second movable electrode 22 is directly opposite the second fixed electrode 12.

[0149] For example, the length and width of the first movable electrode 21, the first dielectric layer 23 and the first fixed electrode 11 are equal, and the length and width of the second movable electrode 22, the second dielectric layer 24 and the second fixed electrode 12 are equal.

[0150] In some examples, such as Figure 10 As shown, the first movable electrode 21 includes a cantilever 211 and a fixing part 212 surrounding the outer periphery of the cantilever 211. The included angle between the fixing part 212 and the cantilever 211 can be between 120° and 150°. Alternatively, the corner angle R1 between the fixing part 212 and the cantilever 211 can be between 30° and 60°.

[0151] For example, the angle R1 between the fixing part 212 and the cantilever 211 includes, but is not limited to, one of 30°, 40°, 45°, 50°, and 60°.

[0152] In some examples, the first movable electrode 21 and the second movable electrode 22 are the same size. In still other examples, the first movable electrode 21 and the second movable electrode 22 are different sizes.

[0153] In the above embodiment, by setting a bias voltage between the first movable electrode 21 and the first fixed electrode 11, the on / off state of the switch corresponding to the first capacitor C1 can be controlled, thereby controlling whether the radio frequency signal is grounded and changing the phase shift state of the signal transmitted by the phase shifter 1010.

[0154] Taking a MEMS switch implemented with a first movable electrode 21 and a first fixed electrode 11 as an example, under the action of a first bias voltage, the shape of the first movable electrode 21 changes, and / or the first movable electrode 21 moves toward the first fixed electrode 11. As a result, the distance between the first movable electrode 21 and the first fixed electrode 11 decreases, and the capacitance of the MEMS switch formed by the first movable electrode 21 and the first fixed electrode 11 also decreases accordingly.

[0155] For example, the first movable electrode 21 is in contact with the first dielectric layer 23, the MEMS switch can be regarded as closed, the signal transmitted by the phase shifter 1010 is grounded, the resistance of the rear end of the first coupling line 1 is 0, the signal is input from the first input / output terminal I / O1 of the first coupling line 1 and then returns from the rear end to the first input / output terminal I / O1, and the signal is in the phase-shifted state S1.

[0156] Under the action of the third bias voltage, the shape of the first movable electrode 21 changes, and / or the first movable electrode 21 moves away from the first fixed electrode 11. As a result, the distance between the first movable electrode 21 and the first dielectric layer 23 increases, the MEMS switch is in the open state, the signal transmitted by the phase shifter 1010 is not grounded, the resistance connected to the rear end of the first coupling line 1 increases, the phase delay increases, and the phase of the signal changes accordingly. After the signal is input from the first input / output terminal I / O1 of the first coupling line 1, it returns from the rear end to the first input / output terminal I / O1, and the signal is in the phase-shifted state S2.

[0157] In this embodiment of the application, there is a phase difference between phase-shifted state S1 and phase-shifted state S2, which realizes the phase shifting effect of phase shifter 1010 on signal, and the phase shift amount of the phase difference can also be adjusted by setting phase shift stubs.

[0158] Under the action of the second bias voltage, the shape of the second movable electrode 22 changes, and / or the second movable electrode 22 moves towards the second fixed electrode. As a result, the distance between the second movable electrode 22 and the second fixed electrode 12 decreases, and the capacitance of the MEMS switch formed by the second movable electrode 22 and the second fixed electrode 12 also decreases. Under the action of the fourth bias voltage, the shape of the second movable electrode 22 changes, and / or the second movable electrode 22 moves away from the second fixed electrode 12. As a result, the distance between the second movable electrode 22 and the second fixed electrode 12 decreases, and the capacitance of the MEMS switch formed by the second movable electrode 22 and the second fixed electrode 12 also decreases.

[0159] The dimensions, circuit structure, and working principle of the MEMS switch implemented by the second movable electrode 22 and the second fixed electrode 12 can be referenced from the MEMS switch implemented by the first movable electrode 21 and the first fixed electrode 11. For example, the first bias voltage and the second bias voltage can be equal, and the third bias voltage and the fourth bias voltage can be equal.

[0160] In some alternative embodiments, the second movable electrode 22 can be coupled with... Figure 4 The second reference ground voltage terminal GND3 is electrically connected as shown, and the second movable electrode 22 and the second fixed electrode 12 can be implemented as follows: Figure 4 The second capacitor C2 in the circuit can be a MEMS capacitive switch.

[0161] In some optional implementations, the phase shifter 1010 can adopt a centrally symmetrical design. The size, circuit structure position, and working principle of the second capacitor C2 can be referenced from the first capacitor C1, and will not be repeated here.

[0162] like Figure 3In the phase shifter circuit shown, the first fixed electrode 11 is not shared with the first coupling line 1, and the fifth capacitor C5 exists independently of the first capacitor C1. The second fixed electrode 12 is not shared with the second coupling line 2, and the sixth capacitor C6 exists independently of the second capacitor C2. The fifth capacitor C5 and the sixth capacitor C6 will cause the length of the coupling line to increase, thus increasing the parasitic capacitance of the MEMS switch in high-frequency applications.

[0163] Through the above embodiments, such as Figure 8 As shown, a first fixed electrode 11 and a first movable electrode 21 are stacked and spaced apart, and a second fixed electrode 12 and a second movable electrode 22 are stacked and spaced apart, which can respectively realize MEMS switching, corresponding to Figure 4 The first capacitor C1 and the second capacitor C2 are shown. The first fixed electrode 11 is electrically connected to the first coupling line 1, and the second fixed electrode 12 is electrically connected to the second coupling line 2. The connection positions are at opposite ends of the coupling line group, which not only facilitates the symmetrical design of the phase shifter 1010, but also allows the extension structure of the coupling line group to share the fixed electrodes (including the first fixed electrode 11 and the second fixed electrode 12) of the MEMS switch. Therefore, by adjusting the opening and closing state of the MEMS switch, the capacitance value of the MEMS switch is changed, that is, the capacitance of the rear end of the coupling bridge formed by the coupling line group is changed, thereby switching the phase shift state of the signal transmitted by the phase shifter 1010. Thus, it is not necessary to set a separate MEMS switch at the rear end of the coupling line, which can effectively reduce the length of the coupling line, thereby reducing the parasitic capacitance of the MEMS switch in high-frequency applications, thereby improving the modulation capability of the phase shifter 1010.

[0164] In some alternative embodiments, such as Figure 9 As shown, the first coupling line 1 is disposed on the same plane, or in other words, the first fixed electrode 11 is disposed on the same layer as the first coupling line 1.

[0165] In the embodiments of this application, "same-layer arrangement" can refer to the same layer in a stacked structure. For example, if component H1 and component H2 are layered structures, "same-layer arrangement" can mean that component H1 and component H2 are located on the same layer, or that component H1 and component H2 are laid along the same plane.

[0166] For example, the first fixed electrode 11 and the first coupling line 1 can both be made of metal, the materials of the first fixed electrode 11 and the first coupling line 1 can be the same, and the first fixed electrode 11 and the first coupling line 1 can also be manufactured simultaneously.

[0167] Alternatively, the first fixed electrode 11 and the first coupling line 1 share a common metal surface. It can also be said that a part of the first fixed electrode 11 is shared with the first coupling line 1. The first fixed electrode 11 can not only be used as an electrode of a capacitive switch, but also belong to a part of the first coupling line 1. This part can be located at the rear end of the first coupling line 1.

[0168] Therefore, the capacitor coupled to the rear end of the first coupling line 1 can be completely merged with the capacitor implemented by the first fixed electrode 11 and the first movable electrode 21 into a single capacitor, which greatly reduces the capacitance ratio requirement of the phase shifter 1010 for the MEMS switch implemented by the first fixed electrode 11 and the first movable electrode 21.

[0169] In the above embodiments, the fixed electrode and the coupling line are coplanar, and the fixed electrode and the rear end of the coupling line are completely shared, thereby achieving... Figure 4 The topology circuit shown reduces the line length at the rear end of the coupling line, which helps to reduce the parasitic capacitance generated by the MEMS switch, especially the parasitic capacitance of the MEMS switch in high-frequency applications, thereby improving the control accuracy of the phase shifter 1010 and the linearity of the output signal.

[0170] Furthermore, through the above embodiments, the phase shifter 1010 can adopt a stacked structure, with the first fixed electrode 11 and the first coupling line 1 on the same layer. This reduces the number of layers in the stacked structure, simplifies the structural complexity of the phase shifter 1010, facilitates improved integration, and promotes miniaturization. Moreover, the stacked structure can be fabricated in layers, with the first fixed electrode 11 and the first coupling line 1 on the same layer, which also reduces the manufacturing cost of the phase shifter 1010, improves its manufacturing efficiency, and facilitates mass production.

[0171] In some alternative embodiments, such as Figure 9 As shown, the second coupling line 2 is set on the same plane, or in other words, the second fixed electrode 12 and the second coupling line 2 are set on the same layer.

[0172] In the above embodiments, the second fixed electrode 12 and the second coupling line 2 are on the same layer, and the effect is the same as that of the first fixed electrode 11 and the first coupling line 1 being on the same layer, which will not be repeated here.

[0173] In some alternative embodiments, such as Figure 7 As shown, the first movable electrode 21 is located between the plane where the first coupling line 1 is located and the plane where the second coupling line 2 is located.

[0174] In some alternative embodiments, such as Figure 7 As shown, the second movable electrode 22 is located between the plane where the first coupling line 1 is located and the plane where the second coupling line 2 is located.

[0175] Through the above embodiments, the first movable electrode 21 and / or the second movable electrode 22 are disposed between the plane where the first coupling line 1 is located and the plane where the second coupling line 2 is located, so that the movable electrode does not occupy the structure of the outer layer of the coupling bridge as much as possible, which can improve the integration of the phase shifter 1010 and facilitate the miniaturization of the phase shifter 1010.

[0176] In some alternative embodiments, the first movable electrode 21 is located on the side of the plane containing the first coupling line 1 that is away from the plane containing the second coupling line 2.

[0177] In some alternative embodiments, the second movable electrode 22 is located on the side of the plane containing the second coupling line 2 that is away from the plane containing the first coupling line 1 (see [reference]). Figure 12 ).

[0178] Through the above embodiments, by setting the first movable electrode 21 and / or the second movable electrode 22 as the outer layer of the coupling bridge, the structure of the phase shifter 1010 can be distributed, which not only reduces the manufacturing difficulty of the phase shifter 1010 and facilitates the mass production of the phase shifter 1010, but also reduces electrical interference between circuit structures.

[0179] Figure 12 This is a structural diagram of another phase shifter 1010 provided in an embodiment of this application.

[0180] In some alternative embodiments, such as Figure 12 As shown, the phase shifter 1010 also includes a first branch 31 and a second branch 32.

[0181] In this embodiment, the first branch 31 is electrically connected to the other end of the first coupling line 1, and the second branch 32 is electrically connected to the other end of the second coupling line 2. The first branch 31 and the second branch 32 are located at opposite ends of the coupling line group. Thus, the first coupling line 1, the second coupling line 2, the first branch 31, and the second branch 32 can realize an irregularly shaped coupling bridge.

[0182] Specifically, the irregularly shaped coupled bridge is based on the coupled line group, with matching stubs set at the input and output ends of the coupled lines. The matching stubs are used to match impedance. The input and output ends of the first coupled line 1 and the second coupled line 2 can be located at the two ends of the coupled line group, and the two input and output structures of the coupled bridge signal can be centrally symmetrical.

[0183] In some examples, such as Figure 12 As shown, the overall extension direction of the first branch 31 can be parallel to the overall extension direction of the first coupling line 1.

[0184] Through the above embodiments, the first stub 31 and the second stub 32 can serve as matching stubs for the phase shifter 1010. By setting them at the other ends of the first coupling line 1 and the second coupling line 2 respectively, the matching stubs can be used to adjust the input and output impedances of the phase shifter 1010, improve impedance matching, reduce insertion loss of the phase shifter 1010, and thus improve the signal transmission efficiency of the phase shifter 1010.

[0185] Figure 13 for Figure 12 An exploded view of the phase shifter 1010 in the illustrated embodiment.

[0186] In some alternative embodiments, such as Figure 13 As shown, the first branch 31 includes a first sub-branch 311 and a second sub-branch 312 that are electrically connected, and the first sub-branch 311 is electrically connected to the first coupling line 1. The second branch 32 includes a third sub-branch 321 and a fourth sub-branch 322 that are electrically connected, and the third sub-branch 321 is electrically connected to the second coupling line 2.

[0187] In some alternative embodiments, along a direction perpendicular to the path from the first sub-branch 311 to the second sub-branch 312, the size of the second sub-branch 312 is larger than the size of the first sub-branch 311. Along a direction perpendicular to the path from the third sub-branch 321 to the fourth sub-branch 322, the size of the fourth sub-branch 322 is larger than the size of the third sub-branch 321.

[0188] For example, the direction perpendicular to the direction from the first sub-branch 311 to the second sub-branch 312 is perpendicular to both the direction from the first sub-branch 311 to the second sub-branch 312 and the direction in which the first coupling line 1 and the second coupling line 2 overlap (or the thickness direction of the first branch 31). The dimension of the first branch 31 along the direction perpendicular to the direction from the first sub-branch 311 to the second sub-branch 312 can be considered as the width of the first branch 31. The direction perpendicular to the direction from the third sub-branch 321 to the fourth sub-branch 322 is perpendicular to both the direction from the third sub-branch 321 to the fourth sub-branch 322 and the direction in which the first coupling line 1 and the second coupling line 2 overlap (or the thickness direction of the second branch 32). The dimension of the second branch 32 along the direction perpendicular to the direction from the third sub-branch 321 to the fourth sub-branch 322 can be considered as the width of the second branch 32.

[0189] In some examples, the width of the first sub-branch 311 can be equal to the width of the third sub-branch 321, and the width of the second sub-branch 312 can be equal to the width of the fourth sub-branch 322.

[0190] Through the above embodiments, the dimensions of the matching stubs (including the first stub 31 and the second stub 32) of the phase shifter 1010 are designed. From the end of the matching stub connected to the coupling line group to the end of the matching stub, the width of the matching stub is first small and then large. By changing the reactance characteristics of the matching stub, the input and output impedances of the phase shifter 1010 are better matched with the transmission line or load, thereby further reducing the insertion loss of the phase shifter 1010, improving the signal transmission efficiency of the phase shifter 1010, and also helping to expand the signal bandwidth and improve the stability of the phase shifter 1010.

[0191] In some alternative embodiments, the first branch 31 is disposed on the same layer as the first coupling line 1.

[0192] Figure 14 for Figure 12 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the DD' direction.

[0193] In some optional implementations, such as Figure 14 As shown, the second branch 32 includes a third sub-branch 321 and a fifth sub-branch 323 that are electrically connected. The fifth sub-branch 323 is electrically connected to the second coupling line 2. The third sub-branch 321 is disposed on the same layer as the first coupling line 1, and the fifth sub-branch 323 intersects the plane where the first coupling line 1 is located.

[0194] For example, the fifth sub-branch 323 may include a metal pillar or strip metal wire extending along the stacking direction of the first coupling line 1 and the second coupling line 2.

[0195] By setting the third sub-branch 321 in the second branch 32 on the same layer as the first coupling line 1 through the above embodiments, it is beneficial to set more circuit structures of the phase shifter 1010 on the plane where the first coupling line 1 is located. This allows most of the circuit structures to be fabricated on one layer simultaneously when the phase shifter 1010 is fabricated in a layered structure, thereby completing the patterning of most of the circuits in one manufacturing process and improving the manufacturing efficiency of the phase shifter 1010.

[0196] In some alternative embodiments, the first branch 31 is disposed on the same layer as the first coupling line 1, and the second branch 32 is disposed on the same layer as the second coupling line 2. Through the above embodiments, the first branch 31 and the second branch 32 are respectively disposed on the same layer as different coupling lines in the coupling line group, thereby improving the integration of the phase shifter 1010 and facilitating the miniaturization of the phase shifter 1010.

[0197] In some alternative embodiments, such as Figure 13 As shown, the phase shifter 1010 also includes a third branch 33 and a fourth branch 34. The third branch 33 is electrically connected to the first fixed electrode 11, and the fourth branch 34 is electrically connected to the second fixed electrode 12.

[0198] For example, the third stub 33 can serve as a phase-shifting stub at the rear end of the first coupling line 1, capable of adjusting the phase shift of the signal in different states of the MEMS switch, thereby adjusting the phase difference between the signal transmitted by the first coupling line 1 in phase-shifting state S1 and phase-shifting state S2. The fourth stub 34 has a similar function.

[0199] Alternatively, the third stub 33 can serve as a phase-shifting stub at the rear end of the first coupling line 1, which can change the signal transmission length of the coupling bridge, thereby changing the phase of the output signal.

[0200] In some examples, the routing of the third branch 33 or the fourth branch 34 is not a straight line. For instance, the routing of the third branch 33 or the fourth branch 34 is curved or broken, such as an S-shape or a serpentine shape. This reduces the size occupied by the coupling line group and ensures the phase shifting performance of the phase shifter 1010.

[0201] For example, the width of the third branch 33 and the width of the fourth branch 34 may be less than the width of the first coupling line 1 and the width of the second coupling line 2.

[0202] For example, the third branch 33 and the fourth branch 34 can be implemented respectively. Figure 5 The first transmission line TL1 and the second transmission line TL2 in the process.

[0203] Through the above embodiments, the third branch 33 and the fourth branch 34 are set as phase shifting branches of the phase shifter 1010. The third branch 33 and the fourth branch 34 can compensate for the phase of the phase shifter 1010, or adjust the phase shift amount of the phase shifter 1010, so that the phase shifter 1010 meets the required phase shift amount within a certain bandwidth near the center frequency of the transmission signal, thereby improving the phase shift accuracy of the phase shifter 1010 and ensuring the performance of the phase shifter 1010.

[0204] Figure 15 for Figure 12 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the EE' direction.

[0205] In some alternative embodiments, such as Figure 15 As shown, the phase shifter 1010 also includes a third fixed electrode 13 and a fourth fixed electrode 14.

[0206] Figure 16 for Figure 12 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the FF' direction.

[0207] In some alternative embodiments, such as Figure 16 As shown, the phase shifter 1010 also includes a fifth fixed electrode 15 and a sixth fixed electrode 16.

[0208] In some optional implementations, such as Figure 15 As shown, the third fixed electrode 13 can be on the same layer as the first movable electrode 21, and the fourth fixed electrode 14 can be on the same layer as the first coupling line 1. Figure 16 As shown, the fifth fixed electrode 15 can be on the same layer as the second movable electrode 22, and the sixth fixed electrode 16 can be on the same layer as the second coupling line 2.

[0209] In this embodiment, the third fixed electrode 13 is electrically connected to the first movable electrode 21, and the third fixed electrode 13 and the fourth fixed electrode 14 are stacked and spaced apart. The fifth fixed electrode 15 is electrically connected to the second movable electrode 22, and the fifth fixed electrode 15 and the sixth fixed electrode 16 are stacked and spaced apart.

[0210] In some examples, phase shifter 1010 also includes Figure 15 The third dielectric layer 25 shown and Figure 16 The fourth dielectric layer 26 is shown.

[0211] For example, the third dielectric layer 25 is located between the third fixed electrode 13 and the fourth fixed electrode 14, and the fourth dielectric layer 26 is located between the fifth fixed electrode 15 and the sixth fixed electrode 16.

[0212] In some optional embodiments, the third fixed electrode 13 and the fourth fixed electrode 14 can be implemented Figure 5 The seventh capacitor C7, the fifth fixed electrode 15, and the sixth fixed electrode 16 shown can achieve Figure 5 The eighth capacitor, C8, is shown.

[0213] Through the above embodiments, by setting the stacked third fixed electrode 13 and fourth fixed electrode 14, and the stacked fifth fixed electrode 15 and sixth fixed electrode 16, a capacitor is implemented in the phase shifter 1010. This capacitor is matched with the capacitor of the MEMS switch, thereby reducing the peripheral matching and parasitic parameters of the phase shifter 1010, and thus improving the performance of the phase shifter 1010.

[0214] In some optional embodiments, the third fixed electrode 13 is disposed on the same layer as the first movable electrode 21. Alternatively, the fourth fixed electrode 14 is disposed on the same layer as the first coupling line 1. Alternatively, the fifth fixed electrode 15 is disposed on the same layer as the second movable electrode 22. Alternatively, the sixth fixed electrode 16 is disposed on the same layer as the second coupling line 2. The first coupling line 1 can be disposed on the same layer as the first fixed electrode 11, and the second coupling line 2 can be disposed on the same layer as the second fixed electrode 12. Thus, by having the fourth fixed electrode 15 and the first coupling line 1 coplanar, and the sixth fixed electrode 16 and the second coupling line 2 coplanar, the capacitance achieved by the third fixed electrode 13 and the fourth fixed electrode 14, and the capacitance achieved by the fifth fixed electrode 15 and the sixth fixed electrode 16, are conformal capacitances of the MEMS switch.

[0215] For example, the capacitance achieved by the third fixed electrode 13 and the fourth fixed electrode 14 can be Figure 5 The capacitance achieved by the third capacitor C3, the fifth fixed electrode 15, and the sixth fixed electrode 16 can be... Figure 5 The fourth capacitor, C4.

[0216] In some examples, the fourth fixed electrode 14 or the sixth fixed electrode 16 can also be electrically connected to the reference ground voltage terminal via a metal pillar or strip metal wire extending along the stacking direction of the first coupling line 1 and the second coupling line 2, thereby grounding the conformal capacitance.

[0217] In some examples, the third fixed electrode 13 or the fifth fixed electrode 15 can also be electrically connected to the feed terminal via a metal pillar or strip metal wire extending along the stacking direction of the first coupling line 1 and the second coupling line 2, so that the feed terminal provides bias voltages to the first movable electrode 21 and the second movable electrode 22 respectively through the third fixed electrode 13 and the fifth fixed electrode 15, thereby controlling the opening and closing state of the MEMS switch.

[0218] Through the above embodiments, the fourth fixed electrode 14 and the sixth fixed electrode 16 can be circuits on the same layer as the first coupling line 1 and the second coupling line 2, respectively. The third fixed electrode 13 and the fourth fixed electrode 14 can also be arranged on the same layer as the corresponding movable electrode, so that the capacitance realized by the stacked third fixed electrode 13 and the fourth fixed electrode 14, and the stacked fifth fixed electrode 15 and the sixth fixed electrode 16 is the conformal capacitance of the MEMS switch, further improving the matching between the capacitance and the capacitance of the MEMS switch, reducing the peripheral matching and parasitic parameters of the phase shifter 1010, and improving the performance of the phase shifter 1010.

[0219] In some optional embodiments, the phase shifter 1010 includes a first stub 31, a second stub 32, a third fixed electrode 13, a fourth fixed electrode 14, a fifth fixed electrode 15, and a sixth fixed electrode 16. Thus, a non-conformal coupling bridge is formed by the matching stub and the coupling line group. The matching stub in the non-conformal coupling bridge and the conformal capacitor together realize the matching relationship, which can better match the MEMS switch with a small capacitance ratio realized by the first movable electrode 21 and the first fixed electrode 11, and the second movable electrode 22 and the second fixed electrode 12, thereby changing the phase of the signal transmitted by the phase shifter 1010.

[0220] In some optional embodiments, the phase shifter 1010 may include the first coupling line 1, the second coupling line 2, the first fixed electrode 11, the second fixed electrode 12, the third fixed electrode 13, the fourth fixed electrode 14, the fifth fixed electrode 15, the sixth fixed electrode 16, the first movable electrode 21, the second movable electrode 22, the first stub 31, the second stub 32, the third stub 33, and the fourth stub 34 as described in the above embodiments. Thus, by utilizing the multiplexing of the MEMS switch's plates and coupling lines, the phase adjustment of the phase shift stubs, and the conformal capacitance, matching stubs, and impedance matching with the MEMS switch, the modulation capability and reliability of the phase shifter are comprehensively improved.

[0221] Figure 17 for Figure 12 Another cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the EE' direction.

[0222] In yet another alternative embodiment, such as Figure 17 As shown, the phase shifter 1010 may include a first external electrode line 27.

[0223] Figure 18 for Figure 12 Another cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the FF' direction.

[0224] In one alternative implementation, such as Figure 18 As shown, the phase shifter 1010 may include a second external electrode line 28.

[0225] In this embodiment, the first external electrode line 27 is electrically connected to the first movable electrode 21, and the second external electrode line 28 is electrically connected to the second movable electrode 22.

[0226] For example, the first external electrode line 27 can be arranged in the same layer as the first movable electrode 21, and the second external electrode line 28 can be arranged in the same layer as the second movable electrode 22.

[0227] In this embodiment, the first external electrode line 27 or the second external electrode line 28 can be electrically connected to an external capacitor via a metal pillar or strip metal wire extending along the stacking direction of the first coupling line 1 and the second coupling line 2. This external capacitor can play a similar role to the conformal capacitor in the above embodiment, reducing the peripheral matching and parasitic parameters of the phase shifter 1010, thereby flexibly configuring the phase shifter 1010 with the required capacitance value, so that the capacitor can be matched with the capacitance of the MEMS switch, thus eliminating the need for a built-in conformal capacitor and reducing the size and manufacturing difficulty of the phase shifter 1010.

[0228] In some alternative embodiments, one plate of the conformal capacitor may also be electrically connected to the middle of a phase-shifting stub (third stub 33 or fourth stub 34), thereby enabling the conformal capacitor to achieve... Figure 6 The seventh capacitor C7 and the eighth capacitor C8 shown can achieve phase shifting stubs. Figure 6 The first sub-transmission line TL1-1, the second sub-transmission line TL1-2, the third sub-transmission line TL2-1, and the fourth sub-transmission line TL2-2 are shown.

[0229] In some optional embodiments, the first external electrode line 27 and the second external electrode line 28 can also be electrically connected to the feed end through metal pillars or strip metal lines extending along the stacking direction of the first coupling line 1 and the second coupling line 2, so that the feed end provides bias voltages to the first movable electrode 21 and the second movable electrode 22 respectively through the first external electrode line 27 and the second external electrode line 28, thereby controlling the opening and closing state of the MEMS switch.

[0230] In some optional embodiments, the phase shifter 1010 further includes a first electrode line 41 and a second electrode line 42. The first electrode line 41 is located on one side of the plane containing the first movable electrode 21 and is electrically connected to the first movable electrode 21. The second electrode line 42 is located on one side of the plane containing the second movable electrode 22 and is electrically connected to the second movable electrode 22.

[0231] For example, the first electrode line 41 or the second electrode line 42 may be a metal pillar or a strip metal line extending along the stacking direction of the first coupling line 1 and the second coupling line 2.

[0232] In some examples, the first electrode line 41 and the second electrode line 42 may be electrically connected to the reference ground voltage terminal of the phase shifter 1010.

[0233] In some other examples, the first electrode line 41 and the second electrode line 42 may also be connected to a feed terminal to provide a bias voltage to the MEMS switch.

[0234] Specifically, the reference ground voltage terminal is the zero-potential reference point in the circuit structure of the phase shifter 1010, and is the common terminal constituting the circuit signal loop. The reference ground voltage terminal can be electrically connected to the ground metal pad.

[0235] Through the above embodiments, by using the first electrode line 41 and the second electrode line 42, the first movable electrode 21 and the second movable electrode 22 are electrically connected to the reference ground voltage terminal of the phase shifter 1010, thereby grounding one side of the MEMS switch electrode. Since the first electrode line 41 and the second electrode line 42 are located on one side of the plane where the first movable electrode 21 is located and the plane where the second movable electrode 22 is located, respectively, the grounding of the MEMS switch can be achieved by drilling holes in the stacked structure of the phase shifter 1010, which helps to reduce the size of the phase shifter 1010 and improve the integration of the phase shifter 1010.

[0236] In some alternative embodiments, such as Figure 13 As shown, the phase shifter 1010 also includes a third electrode line 43 and a fourth electrode line 44. The third electrode line 43 is located on one side of the plane where the third branch 33 is located and is electrically connected to the third branch 33, and the fourth electrode line 44 is located on one side of the plane where the fourth branch 34 is located and is electrically connected to the fourth branch 34.

[0237] In some examples, the third electrode line 43 and the fourth electrode line 44 are electrically connected to the reference ground voltage terminal of the phase shifter 1010, so that the phase shifting stubs implemented by the third stub 33 and the fourth stub 34 can adjust the phase shift of the signal modulation of the phase shifter 1010 in different open and closed states of the MEMS.

[0238] For example, the third electrode line 43 and the fourth electrode line 44 can be metal pillars or strip metal lines extending along the stacking direction of the first coupling line 1 and the second coupling line 2.

[0239] In some alternative embodiments, such as Figure 13 As shown, the phase shifter 1010 also includes a fifth electrode line 45 and a sixth electrode line 46. The fifth electrode line 45 is located on one side of the plane where the first input / output structure 3 is located and is electrically connected to the first input / output structure 3, and the sixth electrode line 46 is located on one side of the plane where the second input / output structure 4 is located and is electrically connected to the second input / output structure 4.

[0240] In some examples, the fifth electrode line 45 and the sixth electrode line 46 are electrically connected to the signal input and output terminals of the phase shifter 1010, so that the input and output structure of the phase shifter 1010 receives the signal to be modulated and transmits the modulated signal.

[0241] For example, the fifth electrode line 45 and the sixth electrode line 46 can be metal pillars or strip metal lines extending along the stacking direction of the first coupling line 1 and the second coupling line 2.

[0242] Figure 19 for Figure 12 Top view of the phase shifter 1010 in the illustrated embodiment. Figure 20 for Figure 19 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the GG' direction.

[0243] In some alternative embodiments, Figure 20 It can be from Figure 19 A cross-sectional view of the phase shifter 1010 in the thickness direction is shown. For example... Figure 20 As shown, the phase shifter 1010 also includes a first substrate 100, a second substrate 200 and a third substrate 300.

[0244] In some examples, the material of the second substrate 200 or the third substrate 300 may be the same as or different from that of the first substrate 100. For example, the material of the first substrate 100 may be glass or other insulating material.

[0245] In some examples, such as Figure 20 As shown, the phase shifter 1010 may also include metal pads 400.

[0246] The metal pad 400 can be located on the side of the first substrate 100 away from the second substrate 200. The metal pad 400 can be located at the end of a metal pillar or strip metal line extending along the thickness direction of the first substrate 100. The end is exposed on the first substrate 100 and is used for electrical connection with other components in the RF front-end module 101. It can also be used for electrical connection with components outside the RF front-end module 101.

[0247] In the embodiments of this application, such as Figure 20 As shown, the first coupling line 1 and the first fixed electrode 11 are embedded in the first substrate 100, the second substrate 200 is disposed on the side of the first coupling line 1 away from the first substrate 100, the first movable electrode 21 or the second movable electrode 22 is disposed in the second substrate 200, the third substrate 300 is disposed on the side of the second substrate 200 away from the first substrate 100, and the second coupling line 2 and the second fixed electrode 12 are embedded in the third substrate 300.

[0248] In some examples, the surfaces of the first substrate 100 and the third substrate 300 may be provided with grooves, and the first coupling line 1 and the second coupling line 2 are respectively disposed in the grooves of the first substrate 100 and the third substrate 300. For example, the surface of the first coupling line 1 may be on the same plane as the surface of the first substrate 100, and the surface of the second coupling line 2 may be on the same plane as the surface of the third substrate 300.

[0249] In some optional implementations, such as Figure 20As shown, the first coupling line 1 and the second coupling line 2 are located on opposite sides of the second substrate 200, and the first coupling line 1 and the second coupling line 2 can be symmetrical to each other.

[0250] In some examples, such as Figure 20 As shown, the first coupling line 1 can be disposed in the groove on the surface of the first substrate 100 at the same layer as the third branch 33.

[0251] In some other examples, the first coupling line 1 may also be disposed in the same layer as the first fixed electrode 11, the first branch 31, and the third branch 33 in a groove on the surface of the first substrate 100.

[0252] In some examples, such as Figure 20 As shown, the second coupling line 2 is disposed in the same layer as the second branch 32 and the fourth branch 34 in the groove on the surface of the third substrate 300.

[0253] In some other examples, the second coupling line 2 may also be disposed in the same layer as the second fixed electrode 12 in a groove on the surface of the third substrate 300.

[0254] In some other examples, the fourth branch 34 may also be disposed on the surface of the first substrate 100 in the same layer as the first coupling line 1, and electrically connected to the second fixed electrode 12 by a metal pillar or strip metal wire extending along the thickness direction of the first substrate 100.

[0255] Figure 21 for Figure 19 Another cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the GG' direction.

[0256] like Figure 20 As shown, in some alternative embodiments, the phase shifter 1010 further includes a fourth substrate 500. A first coupling line 1, a first fixed electrode 11, a first movable electrode 21, a second movable electrode 22, a second coupling line 2, and a second fixed electrode 12 are disposed within the fourth substrate 500.

[0257] The first coupling line 1 and the first fixed electrode 11 are on the same layer. The first movable electrode 21 or the second movable electrode 22 is disposed on one side of the plane where the first coupling line 1 is located. The second coupling line 2 and the second fixed electrode 12 are on the same layer, and the second fixed electrode 12 is disposed on the side of the plane where the second movable electrode 22 is away from the plane where the first coupling line 1 is located.

[0258] Through the above embodiments, functional structures such as coupling lines and electrodes are arranged in the same or different layers, and the functional structures are arranged in the same fourth substrate 500 that is fused together. Therefore, it is not only convenient to fabricate the phase shifter 1010 in layers according to the positions of different functional structures, but also to improve the integrity and integration of the phase shifter 1010 structure by taking advantage of the characteristics of the substrate being fused together.

[0259] For example, the fourth substrate 500 may be formed by melting the first substrate 100, the second substrate 200 and the third substrate 300 under high temperature and pressure.

[0260] Figure 22 for Figure 19 A cross-sectional view of the phase shifter 1010 in the illustrated embodiment along the HH' direction.

[0261] In some optional implementations, such as Figure 22 As shown, the first movable electrode 21 is disposed on the surface of the third substrate 300.

[0262] In some examples, the first dielectric layer 23 or the second dielectric layer 24 may be located within the second substrate 200. For example... Figure 22 As shown, the first dielectric layer 23 and the first movable electrode 21 are spaced apart so that the shape of the first movable electrode 21 changes and moves along the stacking direction.

[0263] For example, the first movable electrode 21 can be disposed in the same layer as the second coupling line 2, and the third fixed electrode 13 can be disposed in the same layer as the first movable electrode 21.

[0264] In this embodiment, the second movable electrode 22 can be disposed on the surface of the first substrate 100, and the second movable electrode 22 can be in the same layer as the first coupling line 1.

[0265] In some alternative embodiments, the first movable electrode 21 may be disposed within the second substrate 200, and the fourth fixed electrode 14 may be disposed on the surface of the first substrate 100 in the same layer as the first coupling line 1.

[0266] In this embodiment, the fifth fixed electrode 15 can be disposed in the same layer as the second movable electrode 22 within the second substrate 200, and the sixth fixed electrode 16 can be disposed in the same layer as the second coupling line 2 on the surface of the third substrate 300.

[0267] In some examples, the first dielectric layer 23 and the first movable electrode 21 are located within the second substrate 200, or the second dielectric layer 24 and the second movable electrode 22 are located within the second substrate 200.

[0268] In some examples, the thickness of the first substrate 100 can range from 100 mm to 800 mm. For example, the thickness of the first substrate 100 can be, but is not limited to, one of 100 mm, 300 mm, 450 mm, 600 mm, and 800 mm.

[0269] In some examples, the thickness of the second substrate 200 may be greater than or equal to the coupling distance between the first coupling line 1 and the second coupling line 2. For example, the thickness of the second substrate 200 may range from 30 μm to 50 μm. Specifically, the thickness of the second substrate 200 may include, but is not limited to, 30 μm, 35 μm, 40 μm, 45 μm, and 50 μm.

[0270] In some examples, the thickness of the third substrate 300 may be the same as or different from that of the first substrate 100.

[0271] Through the above embodiments, the phase shifter 1010 is configured as a stacked structure, and the coupling line group and other structures of the phase shifter 1010 are arranged in different substrates of the stack. This helps to improve the integration of the phase shifter 1010, facilitates the miniaturization of the phase shifter 1010, and also facilitates the mass production of the phase shifter 1010.

[0272] In some optional embodiments, the distance between the first movable electrode 21 and the first fixed electrode 11 is different in different states, and the ratio of the maximum distance to the minimum distance between the first movable electrode 21 and the first fixed electrode 11 is less than 20. Exemplarily, the ratio of the maximum distance to the minimum distance between the first movable electrode 21 and the first fixed electrode 11 includes, but is not limited to, any one of 3, 7, 10, 14, and 19.

[0273] In some examples, the ratio of the maximum distance to the minimum distance between the first movable electrode 21 and the first fixed electrode 11 can also be less than 10.

[0274] Correspondingly, the distance between the first movable electrode 21 and the first fixed electrode 11 is different in different states, and the capacitance value of the MEMS switch implemented by the first movable electrode 21 and the first fixed electrode 11 is also different. The ratio of the maximum capacitance to the minimum capacitance of the first movable electrode 21 and the first fixed electrode 11 is the same as the ratio of the maximum distance to the minimum distance.

[0275] In some optional embodiments, the distance between the second movable electrode 22 and the second fixed electrode 12 is different in different states, and the ratio of the maximum distance to the minimum distance between the second movable electrode 22 and the second fixed electrode 12 is less than 20. Exemplarily, the ratio of the maximum distance to the minimum distance between the second movable electrode 22 and the second fixed electrode 12 includes, but is not limited to, any one of 3, 7, 10, 14, and 19.

[0276] In some examples, the ratio of the maximum to the minimum distance between the second movable electrode 22 and the second fixed electrode 12 can be less than 10.

[0277] For example, the ratio of the maximum distance to the minimum distance between the second movable electrode 22 and the second fixed electrode 12 can be the same as the ratio of the maximum distance to the minimum distance between the first movable electrode 21 and the first fixed electrode 11.

[0278] Specifically, the capacitance ratio refers to the ratio between the capacitance value of a MEMS switch in the closed state and the capacitance value in the open state.

[0279] In the above embodiments, the end of the coupling line is reused with the fixed electrode, which is equivalent to merging the capacitance at the rear end of the coupling line with the capacitance of the MEMS switch. Since the first movable electrode 21 and the first fixed electrode 11, and the second movable electrode 22 and the second fixed electrode 12 are respectively implemented as MEMS switches, the capacitance at the rear end of the coupling bridge formed by the coupling line group can be directly changed by adjusting the opening and closing state of the MEMS switch, thereby switching the phase shift state of the signal transmitted by the phase shifter 1010 and realizing phase shift modulation. There is no need to connect the MEMS switch in parallel with other capacitors to jointly adjust the phase shift state of the signal. In this way, the MEMS switch can achieve phase shift modulation with a smaller capacitance ratio. The ratio of the maximum and minimum spacing between the two plates of the MEMS switch (e.g., the first movable electrode 21 and the first fixed electrode 11) can also be set in a small range, thereby reducing the manufacturing difficulty of the MEMS switch and reducing the size of the MEMS switch.

[0280] In some alternative embodiments, the first fixed electrode 11 and the second fixed electrode 12 are the same size.

[0281] In some optional embodiments, the first movable electrode 21 has the same length and width as the first fixed electrode 11, and the second movable electrode 22 has the same length and width as the second fixed electrode 12.

[0282] Figure 23 for Figure 19 Electrode structure diagram of phase shifter 1010 in the illustrated embodiment.

[0283] In some optional implementations, such as Figure 23 As shown, the width D2 of the first fixed electrode 11 or the second fixed electrode 12 is in the range of 0.1 mm to 0.3 mm. For example, the width of the first fixed electrode 11 includes, but is not limited to, any one of 0.1 mm, 0.15 mm, 0.2 mm, 0.25 mm, and 0.3 mm.

[0284] In some optional implementations, such as Figure 23As shown, the length D3 of the first fixed electrode 11 or the second fixed electrode 12 is in the range of 0.3 mm to 0.6 mm. For example, the thickness of the first fixed electrode 11 includes, but is not limited to, any one of 0.3 mm, 0.4 mm, 0.45 mm, 0.5 mm, and 0.6 mm.

[0285] In some optional embodiments, the thickness of the first fixed electrode 11 or the second fixed electrode 12 is in the range of 5 μm to 15 μm. For example, the thickness of the first fixed electrode 11 includes, but is not limited to, any one of 5 μm, 8 μm, 10 μm, 13 μm, and 15 μm.

[0286] In this embodiment, the length of the first fixed electrode 11 or the second fixed electrode 12 is the dimension along the routing direction. Taking the first fixed electrode 11 as an example, the routing direction of the first fixed electrode 11 can be the direction in which the first coupling line 1 extends towards the first fixed electrode 11.

[0287] In some examples, the first fixed electrode 11 and the second fixed electrode 12 are the same size. In still other examples, the first fixed electrode 11 and the second fixed electrode 12 are different sizes.

[0288] Through the above embodiments, by setting the length, width, and thickness of the first fixed electrode 11 or the second fixed electrode 12 within a corresponding range, it is beneficial to achieve the corresponding equivalent capacitance, thereby ensuring the signal transmission efficiency of the phase shifter 1010.

[0289] In some alternative embodiments, the length and width of the first movable electrode 21 are different from those of the first fixed electrode 11, and the length and width of the second movable electrode 22 are different from those of the second fixed electrode 12.

[0290] In some examples, such as Figure 23 As shown, the width D4 or D7 of the electrode line between the first movable electrode 21 and the third fixed electrode 13 can range from 0.05 to 0.15 mm. For example, D4 ​​or D7 can be, but is not limited to, 0.05 mm, 0.08 mm, 0.1 mm, 0.12 mm, or 0.15 mm.

[0291] In some examples, such as Figure 23As shown, the electrode line can be L-shaped. The L-shaped electrode line extends from the first movable electrode 21 toward the edge of the first substrate 100, and then extends along the edge. The distance D16 between the electrode line extending along the edge and the edge can be 0.12mm to 0.3mm, and the distance D11 between the electrode line extending along the edge and the first movable electrode 21 can be 0.15mm to 0.35mm. For example, D16 can include, but is not limited to, 0.12mm, 0.16mm, 0.19mm, 0.25mm, and 0.3mm, and D11 can include, but is not limited to, 0.15mm, 0.2mm, 0.26mm, 0.3mm, and 0.35mm.

[0292] In some examples, such as Figure 23 As shown, the length D5 of the electrode line extending along the edge of the first substrate 100 can range from 0.3 mm to 0.7 mm. For example, D5 can be, but is not limited to, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, and 0.7 mm.

[0293] In some examples, such as Figure 23 As shown, the length D6 of the third fixed electrode 13 can range from 0.5 mm to 0.9 mm. For example, D6 can be, but is not limited to, 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, and 0.9 mm.

[0294] In some examples, such as Figure 23 As shown, the width D10 of the third fixed electrode 13 can range from 0.15mm to 0.35mm. For example, D10 can be, but is not limited to, 0.15mm, 0.2mm, 0.25mm, 0.3mm, and 0.35mm.

[0295] In some examples, such as Figure 23 As shown, along the length direction or trace direction of the third fixed electrode 13, the distance D8 between the third fixed electrode 13 and the edge of the first substrate 100 can range from 0.15 mm to 0.4 mm. For example, D8 can be including but not limited to 0.15 mm, 0.2 mm, 0.25 mm, 0.3 mm, and 0.35 mm.

[0296] In some examples, such as Figure 23 As shown, along the width direction of the third fixed electrode 13, the distance D9 between the third fixed electrode 13 and the edge of the first substrate 100 can range from 0.02 mm to 0.08 mm. For example, D8 can include, but is not limited to, 0.02 mm, 0.03 mm, 0.04 mm, 0.06 mm, and 0.08 mm.

[0297] In some examples, such as Figure 23As shown, along the width direction of the third fixed electrode 13, the distance D11 between the third fixed electrode 13 and the first movable electrode 21 can range from 0.18 mm to 0.35 mm. For example, D11 can include, but is not limited to, 0.18 mm, 0.22 mm, 0.26 mm, 0.3 mm, and 0.35 mm.

[0298] In some examples, such as Figure 23 As shown, the first substrate 100 is located at the edge of the third fixed electrode 13 on the side away from the first movable electrode 21, and the distance D12 between it and the first movable electrode 21 can range from 0.4 mm to 0.7 mm. For example, D12 can include, but is not limited to, 0.4 mm, 0.5 mm, 0.55 mm, 0.6 mm, and 0.7 mm.

[0299] In some examples, such as Figure 23 As shown, the phase shifter 1010 includes a plurality of fifth electrode lines 45, and the interval D13 between the axes of two adjacent fifth electrode lines 45 can range from 0.1 mm to 0.2 mm. For example, D13 can include, but is not limited to, 0.1 mm, 0.14 mm, 0.16 mm, 0.18 mm, and 0.2 mm.

[0300] In some examples, such as Figure 23 As shown, along the width direction of the first movable electrode 21, the distance D14 between the axis of the fifth electrode line 45 and the nearest edge of the first substrate 100 can range from 0.2 mm to 0.45 mm. For example, D14 can include, but is not limited to, 0.2 mm, 0.26 mm, 0.32 mm, 0.4 mm, and 0.45 mm.

[0301] In some examples, such as Figure 23 As shown, along the length direction of the first movable electrode 21, the distance D15 between the axis of the fifth electrode line 45 and the nearest edge of the first substrate 100 can range from 1.2 mm to 2 mm. For example, D15 can include, but is not limited to, 1.2 mm, 1.4 mm, 1.64 mm, 1.8 mm, and 2 mm.

[0302] In some examples, such as Figure 23 As shown, the first substrate 100 can be square, and the side length D17 of the first substrate 100 can range from 3mm to 4.5mm. For example, D17 can be, but is not limited to, 3mm, 3.2mm, 3.5mm, 4mm, and 4.5mm.

[0303] Figure 24 A flowchart illustrating the steps of a method for manufacturing a phase shifter 1010 according to an embodiment of this application.

[0304] This application provides a method for manufacturing a phase shifter 1010, such as... Figure 24 As shown, the method includes:

[0305] Step S61: A first coupling line 1 and a first fixed electrode 11 are formed. The first fixed electrode 11 is connected to one end of the first coupling line 1.

[0306] Step S62: A first movable electrode 21 and a second movable electrode 22 are formed. The first movable electrode 21 and the first fixed electrode 11 are stacked and spaced apart.

[0307] In step S63, a second coupling line 2 and a second fixed electrode 12 are formed, with the second fixed electrode 12 connected to one end of the second coupling line 2. The first coupling line 1 and the second coupling line 2 are coupled along their wide sides to form a coupling line group. The first fixed electrode 11 and the second fixed electrode 12 are located at opposite ends of the coupling line group. The second movable electrode 22 is stacked on top of the second fixed electrode 12 and spaced apart. Therefore, by manufacturing the phase shifter 1010 in stages, the manufacturing efficiency of the phase shifter 1010 can be improved.

[0308] In some optional embodiments, prior to step S61, the method for manufacturing the phase shifter 1010 further includes: step S601, providing a first substrate 100, the surface of which is provided with a first groove.

[0309] Step S61 includes: Step S611, forming a first coupling line 1 and a first fixed electrode 11 within the first groove. In some examples, the surfaces of the first coupling line 1 and the first fixed electrode 11 are on the same plane as the surface of the first substrate 100. Exemplarily, the flatness between the surfaces of the first coupling line 1 and the first fixed electrode 11 and the surface of the first substrate 100 can be less than 100 nm to facilitate bonding between the substrates.

[0310] Before step S62, the method for manufacturing the phase shifter 1010 further includes step S602, providing a second substrate 200.

[0311] Step S62 includes: Step S621, forming a first movable electrode 21 and a second movable electrode 22 in the second substrate 200.

[0312] Before step S63, the method for manufacturing the phase shifter 1010 further includes step S603, providing a third substrate 300, the surface of which is provided with a second groove.

[0313] Step S63 includes: Step S631, forming a second coupling line 2 and a second fixed electrode 12 within the second groove. Exemplarily, the flatness between the surfaces of the second coupling line 2 and the second fixed electrode 12 and the surface of the third substrate 300 can be less than 100 nm to facilitate bonding between the substrates.

[0314] The manufacturing method of phase shifter 1010 further includes: step S64, bonding the first substrate 100 and the second substrate 200, and bonding the second substrate 200 and the third substrate 300.

[0315] For example, the first substrate 100 and the second substrate 200 can be bonded first, and the surface of the second substrate 200 away from the first substrate 100 can be thinned and polished so that the thickness of the second substrate 200 meets the requirements and facilitates the bonding of the second substrate 200 to the third substrate 300.

[0316] In some examples, the surface of the first substrate 100 with the first coupling line 1 is bonded to one side surface of the second substrate 200, and the surface of the third substrate 300 with the second coupling line 2 is bonded to the opposite side surface of the second substrate 200.

[0317] Therefore, by fabricating the layered structure of the phase shifter 1010 in layers and assembling it by bonding, the manufacturing efficiency of the phase shifter 1010 can be further improved.

[0318] In the above embodiments, taking into account the shared characteristics of the irregularly shaped coupling bridge and the MEMS switch, the first coupling line 1 and the second coupling line 2 of the coupling bridge are respectively formed in the grooves of the first substrate 100 and the third substrate 300, which helps to reduce the manufacturing difficulty of the phase shifter 1010 and improve the manufacturing efficiency of the phase shifter 1010.

[0319] Figures 25A-25E This is a process structure diagram of the manufacturing method of the phase shifter 1010 provided in the embodiments of this application.

[0320] In some optional embodiments, this application also provides a method for manufacturing a phase shifter 1010, including:

[0321] Step S71, as follows Figure 25A As shown, a first substrate 100, a first coupling line 1, and a first fixed electrode 11 are provided. The surface of the first substrate 100 has a groove, and the first coupling line 1 and the first fixed electrode 11 are located in the groove of the first substrate 100.

[0322] Figure 26 This is a planar structural diagram of the phase shifter 1010 provided in an embodiment of this application.

[0323] In some examples, such as Figure 26As shown, the first coupling line 1, the first fixed electrode 11, the first branch 31, the third branch 33, the fourth branch 34, and the first input / output structure 3 can be located on the surface of the first substrate 100. For example, the first coupling line 1, the first fixed electrode 11, the first branch 31, the third branch 33, the fourth branch 34, and the first input / output structure 3 can be located in a groove on the surface of the first substrate 100.

[0324] In some examples, such as Figure 26 As shown, the third fixed electrode 13 and the fifth fixed electrode 15 can be located on the surface of the first substrate 100. For example, the third fixed electrode 13 and the fifth fixed electrode 15 can be located in a groove on the surface of the first substrate 100.

[0325] In some examples, metal pillars or strips extending along the stacking direction of the first coupling line 1 and the second coupling line 2 may extend to the surface of the first substrate 100.

[0326] For example, such as Figure 26 As shown, the metal pillar extending along the stacking direction of the first coupling line 1 and the second coupling line 2, such as the first electrode line 41, can be a regular square prism, and the radial side length D18 of the regular square prism can range from 3 mm to 4.5 mm. For example, D18 can be, but is not limited to, 0.06 mm, 0.08 mm, 0.1 mm, 0.12 mm, and 0.15 mm.

[0327] For example, such as Figure 26 As shown, the distance D28 between the orthographic projection of the first electrode line 41 on the first substrate 100 and the third fixed electrode 13 can range from 0.1 mm to 0.3 mm. For example, D18 can include, but is not limited to, 0.1 mm, 0.15 mm, 0.2 mm, 0.25 mm, and 0.3 mm.

[0328] For example, such as Figure 26 As shown, the first coupling line 1 is serpentine. Along the overall extension direction of the first coupling line 1, the spacing D19 between two adjacent serpentine segments of the first coupling line 1 can range from 0.15mm to 0.3mm. For example, D19 can be, but is not limited to, 0.15mm, 0.18mm, 0.22mm, 0.25mm, and 0.3mm.

[0329] For example, such as Figure 26 As shown, the first coupling line 1 includes multiple straight line segments, the extension direction of which intersects the overall extension direction of the first coupling line 1. The length D20 of each straight line segment can range from 0.3mm to 0.55mm. For example, D20 can be, but is not limited to, 0.3mm, 0.35mm, 0.42mm, 0.48mm, and 0.55mm.

[0330] For example, such as Figure 26 As shown, the width D21 of the first coupling line 1 can range from 0.1mm to 0.2mm. For example, D21 can be, but is not limited to, 0.1mm, 0.12mm, 0.14mm, 0.17mm, and 0.2mm.

[0331] For example, such as Figure 26 As shown, the fourth branch 34 is serpentine. Along the overall extension direction of the fourth branch 34, the spacing D22 between two adjacent serpentine lines of the fourth branch 34 can range from 0.08mm to 0.2mm. For example, D22 can be including but not limited to 0.08mm, 0.1mm, 0.12mm, 0.16mm, and 0.2mm.

[0332] For example, such as Figure 26 As shown, the fourth branch 34 includes multiple straight line segments, the extension direction of which intersects the overall extension direction of the fourth branch 34. The length D23 of each straight line segment can range from 0.3mm to 0.7mm. For example, D23 can be, but is not limited to, 0.3mm, 0.4mm, 0.5mm, 0.6mm, and 0.7mm.

[0333] For example, such as Figure 26 As shown, the width D24 of the fourth branch 34 can range from 0.1mm to 0.2mm. For example, D24 can be, but is not limited to, 0.1mm, 0.12mm, 0.15mm, 0.18mm, and 0.2mm.

[0334] For example, such as Figure 26 As shown, the width D24 of the fourth branch 34 can range from 0.1mm to 0.2mm. For example, D24 can be, but is not limited to, 0.1mm, 0.12mm, 0.15mm, 0.18mm, and 0.2mm.

[0335] For example, such as Figure 26 As shown, along the direction perpendicular to the first sub-branch 311 to the second sub-branch 312, the value of the dimension D26 of the first sub-branch 311 is in the range of 0.05mm to 0.25mm, and the value of the dimension D27 of the second sub-branch 312 is in the range of 0.5mm to 2mm.

[0336] For example, the value of D26 can be, but is not limited to, 0.3mm, 0.5mm, 1mm, 1.3mm, and 2mm.

[0337] For example, the value of D27 can be, but is not limited to, 0.05mm, 0.1mm, 0.15mm, 0.2mm, and 0.25mm.

[0338] For example, such as Figure 26 As shown, the length D25 of the second sub-branch 312 can range from 0.5mm to 1mm. For example, D25 can be, but is not limited to, 0.5mm, 0.6mm, 0.7mm, 0.8mm, and 1mm.

[0339] Step S72, as follows Figure 25B As shown, a second substrate 200 is provided, and the surface of the first substrate 100 having a groove is bonded to the second substrate 200.

[0340] Figure 27 Another planar structural diagram of the phase shifter 1010 provided in the embodiments of this application.

[0341] In some examples, such as Figure 27 As shown, the first dielectric layer 23, the second dielectric layer 24, the third dielectric layer 25, and the fourth dielectric layer 26 are located on the second substrate 200. For example, the thickness of the first dielectric layer 23 and the thickness of the second dielectric layer 24 are less than the thickness of the third dielectric layer 25 and the fourth dielectric layer 26. The thickness of the third dielectric layer 25 and the thickness of the fourth dielectric layer 26 can be equal to the thickness of the second substrate 200.

[0342] For example, the length and width of the first dielectric layer 23 can be the same as the length and width of the first movable electrode 21 or the first fixed electrode 11, and the length and width of the second dielectric layer 24 can be the same as the length and width of the second movable electrode 22 or the second fixed electrode 12.

[0343] Step S73, as follows Figure 25C As shown, the surface of the second substrate 200 away from the first substrate 100 is thinned and polished.

[0344] Step S74, as follows Figure 25D As shown, a third substrate 300, a second coupling line 2, and a second fixed electrode 12 are provided. The surface of the second substrate 300 has a groove, and the second coupling line 2 and the second fixed electrode 12 are located in the groove of the third substrate 300.

[0345] Figure 28 This is another planar structural diagram of the phase shifter 1010 provided in the embodiments of this application.

[0346] In some examples, such as Figure 28 As shown, the third substrate 300 has a first opening 301 and a second opening 302. Exemplarily, the first opening 301 can be used to provide a first movable electrode 21, and the second opening 302 can be used to provide a second movable electrode 22. For example, the first opening 301 and the second opening 302 can be blind holes.

[0347] For example, such as Figure 28 As shown, one end of the first opening 301 is along Figure 26 The width dimension D29 of the first fixed electrode 11 shown can range from 0.4 mm to 1 mm. For example, D29 can be, but is not limited to, 0.4 mm, 0.5 mm, 0.6 mm, 0.8 mm, and 1 mm.

[0348] For example, such as Figure 28 As shown, the other end of the first opening 301 is along Figure 26 The width dimension D31 of the first fixed electrode 11 shown can range from 0.2 mm to 0.3 mm. For example, D31 can include, but is not limited to, 0.2 mm, 0.22 mm, 0.24 mm, 0.28 mm, and 0.3 mm.

[0349] For example, such as Figure 28 As shown, the first opening 301 is along Figure 26 The portion of the first fixed electrode 11 shown, with a width dimension of D31, is along... Figure 26 The length dimension D32 of the first fixed electrode 11 shown can range from 0.04 mm to 0.1 mm. For example, D32 can be, but is not limited to, 0.04 mm, 0.05 mm, 0.06 mm, 0.08 mm, and 0.1 mm.

[0350] For example, such as Figure 28 As shown, the first opening 301 is along Figure 26 The length dimension D30 of the first fixed electrode 11 shown can range from 0.4 mm to 0.8 mm. For example, D30 can be, but is not limited to, 0.4 mm, 0.45 mm, 0.54 mm, 0.65 mm, and 0.8 mm.

[0351] For example, such as Figure 28 As shown, along Figure 26 In the width direction of the first fixed electrode 11 shown, the distance D33 between the first opening 301 and the edge of the third substrate 300 can range from 0.1 mm to 0.25 mm. For example, D33 can include, but is not limited to, 0.1 mm, 0.15 mm, 0.17 mm, 0.19 mm, and 0.25 mm.

[0352] For example, such as Figure 28 As shown, along Figure 26 In the longitudinal direction of the first fixed electrode 11 shown, the distance D34 between the first opening 301 and the edge of the third substrate 300 can range from 1 mm to 1.3 mm. For example, D34 can include, but is not limited to, 1 mm, 1.07 mm, 1.13 mm, 1.2 mm, and 1.3 mm.

[0353] Step S75, as follows Figure 25EAs shown, the surface of the third substrate 300 with grooves is bonded to the second substrate 200.

[0354] In some examples, the first movable electrode 21 may be located inside the second substrate 200 or on the surface of the third substrate 300, and the first movable electrode 21 may be fabricated synchronously with the second coupling line 2 in the second substrate 200 or the third substrate 300.

[0355] In some examples, the second movable electrode 22 may be located inside the second substrate 200 or on the surface of the first substrate 100, and the second movable electrode 22 may be fabricated synchronously with the first coupling line 1 in the second substrate 200 or the first substrate 100.

[0356] This application provides a radio frequency front-end module 101, which includes the phase shifter 1010 in any of the above embodiments, or includes the phase shifter circuit in any of the above embodiments, or includes the phase shifter 1010 fabricated using the fabrication method of the phase shifter 1010 in any of the above embodiments.

[0357] This application provides a communication device, which includes the radio frequency front-end module 101 in any of the above embodiments. Exemplarily, the radio frequency front-end module 101 may be packaged using a glass substrate for its circuit structure.

[0358] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Furthermore, with the evolution of architectures and the emergence of new scenarios, the technical solutions provided in the embodiments of this application are also applicable to similar technical problems.

Claims

1. A phase shifter, characterized in that, The phase shifter includes: A coupling line group, the coupling line group including a first coupling line and a second coupling line, wherein the first coupling line and the second coupling line are coupled along their wide sides; A first fixed electrode, which is part of the first coupling line and located at the end of the first coupling line; The second fixed electrode is part of the second coupling line and is located at the end of the second coupling line; the first fixed electrode and the second fixed electrode are respectively located at both ends of the coupling line group; A first movable electrode is stacked on top of the first fixed electrode and spaced apart. The second movable electrode is stacked on top of the second fixed electrode and spaced apart.

2. The phase shifter according to claim 1, characterized in that, Under the action of the first bias voltage, the shape of the first movable electrode changes, and / or the first movable electrode moves toward the first fixed electrode; the distance between the first movable electrode and the first fixed electrode decreases. Under the action of the second bias voltage, the shape of the second movable electrode changes, and / or the second movable electrode moves toward the second fixed electrode; the distance between the second movable electrode and the second fixed electrode decreases.

3. The phase shifter according to claim 1 or 2, characterized in that, The first coupling line is disposed in the same plane, and / or the second coupling line is disposed in the same plane.

4. The phase shifter according to any one of claims 1-3, characterized in that, The first movable electrode and / or the second movable electrode are located between the plane containing the first coupling line and the plane containing the second coupling line.

5. The phase shifter according to any one of claims 1-3, characterized in that, The first movable electrode is located on the side of the plane containing the first coupling line away from the plane containing the second coupling line, and / or the second movable electrode is located on the side of the plane containing the second coupling line away from the plane containing the first coupling line.

6. The phase shifter according to any one of claims 1-5, characterized in that, The phase shifter further includes: The first branch is electrically connected to the other end of the first coupling line; The second branch is electrically connected to the other end of the second coupling line; the first branch and the second branch are located at opposite ends of the coupling line group.

7. The phase shifter according to claim 6, characterized in that, The first branch includes a first sub-branch and a second sub-branch that are electrically connected, and the first sub-branch is electrically connected to the first coupling line; The second branch includes an electrically connected third sub-branch and a fourth sub-branch, wherein the third sub-branch is electrically connected to the second coupling line; Along a direction perpendicular to the path from the first sub-node to the second sub-node, the size of the second sub-node is larger than the size of the first sub-node; along a direction perpendicular to the path from the third sub-node to the fourth sub-node, the size of the fourth sub-node is larger than the size of the third sub-node.

8. The phase shifter according to claim 6 or 7, characterized in that, The first branch is disposed on the same layer as the first coupling line; the second branch includes a third sub-branch and a fifth sub-branch that are electrically connected, and the fifth sub-branch is electrically connected to the second coupling line. The third sub-branch is disposed on the same layer as the first coupling line, and the fifth sub-branch intersects the plane where the first coupling line is located.

9. The phase shifter according to claim 6 or 7, characterized in that, The first branch is arranged in the same layer as the first coupling line, and the second branch is arranged in the same layer as the second coupling line.

10. The phase shifter according to any one of claims 1-9, characterized in that, The phase shifter further includes: The third branch is electrically connected to the first fixed electrode; The fourth branch is electrically connected to the second fixed electrode.

11. The phase shifter according to any one of claims 1-10, characterized in that, The phase shifter further includes a third fixed electrode, a fourth fixed electrode, a fifth fixed electrode, and a sixth fixed electrode; The third fixed electrode is electrically connected to the first movable electrode, and the third fixed electrode and the fourth fixed electrode are stacked and spaced apart; The fifth fixed electrode is electrically connected to the second movable electrode, and the fifth fixed electrode and the sixth fixed electrode are stacked and spaced apart.

12. The phase shifter according to claim 11, characterized in that, The third fixed electrode is disposed in the same layer as the first movable electrode; or... The fourth fixed electrode is disposed in the same layer as the first coupling line; or... The fifth fixed electrode is disposed in the same layer as the second movable electrode; or... The sixth fixed electrode is disposed in the same layer as the second coupling line.

13. The phase shifter according to any one of claims 1-12, characterized in that, The phase shifter further includes: The first electrode line is located on one side of the plane where the first movable electrode is located and is electrically connected to the first movable electrode. The second electrode line is located on one side of the plane where the second movable electrode is located and is electrically connected to the second movable electrode; The first electrode line and the second electrode line are electrically connected to the reference ground voltage terminal of the phase shifter.

14. The phase shifter according to any one of claims 1-13, characterized in that, The phase shifter further includes: The first substrate, the first coupling line and the first fixed electrode are embedded in the first substrate; The second substrate is disposed on the side of the first coupling line away from the first substrate, and the first movable electrode or the second movable electrode is disposed within the second substrate; The third substrate is disposed on the side of the second substrate away from the first substrate, and the second coupling line and the second fixed electrode are embedded in the third substrate.

15. The phase shifter according to any one of claims 1-13, characterized in that, The phase shifter also includes a fourth substrate; The first coupling line, the first fixed electrode, the first movable electrode, the second movable electrode, the second coupling line, and the second fixed electrode are disposed within the fourth substrate; The first coupling line and the first fixed electrode are in the same layer; The first movable electrode or the second movable electrode is disposed on one side of the plane where the first coupling line is located; the second coupling line and the second fixed electrode are on the same layer, and the second fixed electrode is disposed on the side of the second movable electrode away from the plane where the first coupling line is located.

16. The phase shifter according to any one of claims 1-15, characterized in that, The distance between the first movable electrode and the first fixed electrode varies under different conditions, and the ratio of the maximum distance to the minimum distance between the first movable electrode and the first fixed electrode is less than 20. And / or, The distance between the second movable electrode and the second fixed electrode varies under different conditions, and the ratio of the maximum distance to the minimum distance between the second movable electrode and the second fixed electrode is less than 20.

17. The phase shifter according to any one of claims 1 to 15, characterized in that, The width of the first fixed electrode or the second fixed electrode is in the range of 0.1 mm to 0.3 mm; and / or the thickness of the first fixed electrode or the second fixed electrode is in the range of 5 μm to 15 μm; and / or the length of the first fixed electrode or the second fixed electrode is in the range of 0.3 mm to 0.6 mm. Wherein, the length of the first fixed electrode or the second fixed electrode is the dimension along the trace direction.

18. A phase shifter circuit, characterized in that, The phase shifter circuit includes a first capacitor, a second capacitor, a third capacitor, a fourth capacitor, a first inductor, a second inductor, a third inductor, a fourth inductor, a first input / output terminal, a second input / output terminal, and a reference ground voltage terminal; The first input / output terminal is electrically connected to one end of the first inductor and one end of the fourth inductor; The second input / output terminal is electrically connected to one end of the second inductor and the other end of the fourth inductor; One end of the first capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other end of the first inductor and one end of the third inductor; One end of the second capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the other end of the second inductor and the other end of the third inductor; One end of the third capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the first input / output terminal, one end of the first inductor, and one end of the fourth inductor. One end of the fourth capacitor is electrically connected to the reference ground voltage terminal, and the other end is electrically connected to the second input / output terminal, one end of the second inductor, and the other end of the fourth inductor.

19. The phase shifter circuit according to claim 17, characterized in that, The phase shifter circuit also includes a first transmission line, a second transmission line, a seventh capacitor, and an eighth capacitor; The other end of the first capacitor is electrically connected to one end of the first transmission line, the other end of the first transmission line is electrically connected to one end of the seventh capacitor, and the other end of the seventh capacitor is electrically connected to the reference ground voltage terminal. The other end of the second capacitor is electrically connected to one end of the second transmission line, the other end of the second transmission line is electrically connected to one end of the eighth capacitor, and the other end of the eighth capacitor is electrically connected to the reference ground voltage terminal.

20. A radio frequency front-end module, characterized in that, The radio frequency front-end module includes a phase shifter as described in any one of claims 1 to 17, or includes a phase shifter circuit as described in claim 18 or 19.

21. A communication device, characterized in that, The communication device includes the radio frequency front-end module as described in claim 20.

22. A method for manufacturing a phase shifter, characterized in that, The method includes: A first coupling line and a first fixed electrode are formed; the first fixed electrode is connected to one end of the first coupling line. A first movable electrode and a second movable electrode are formed, wherein the first movable electrode and the first fixed electrode are stacked and spaced apart; A second coupling line and a second fixed electrode are formed, and the second fixed electrode is connected to one end of the second coupling line; the first coupling line and the second coupling line are coupled along their wide sides to form a coupling line group; the first fixed electrode and the second fixed electrode are respectively located at both ends of the coupling line group; the second movable electrode and the second fixed electrode are stacked and spaced apart.

23. The method for manufacturing a phase shifter according to claim 20, characterized in that, The method further includes: Before the step of forming the first coupling line and the first fixed electrode, a first substrate is provided, and a first groove is provided on the surface of the first substrate; the step of forming the first coupling line and the first fixed electrode includes: forming the first coupling line and the first fixed electrode in the first groove; Before the step of forming the first movable electrode and the second movable electrode, a second substrate is provided; the step of forming the first movable electrode and the second movable electrode includes: forming the first movable electrode and the second movable electrode in the second substrate; Before the step of forming the second coupling line and the second fixed electrode, a third substrate is provided, the surface of which is provided with a second groove; the step of forming the second coupling line and the second fixed electrode includes: forming the second coupling line and the second fixed electrode in the second groove; The first substrate and the second substrate are bonded together, and the second substrate and the third substrate are bonded together.

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