Self-compensating phase shifter based on substrate integrated coaxial line

Abstract

The present application relates to the technical field of phase shifter, and discloses a self-compensation phase shifter based on substrate integrated coaxial line, which comprises a reference branch and a working branch with unequal length with the reference branch; a dielectric perturbation structure for realizing self-compensation of the working branch and forming the working branch after phase self-compensation is arranged on the working branch; signals enter from the input ports of the reference branch and the working branch after phase self-compensation, respectively pass through the reference branch and the working branch after phase self-compensation with different lengths, and reach the output ports of the reference branch and the working branch after phase self-compensation, so as to form a fixed required phase difference between the output end of the reference branch and the output port of the working branch after phase self-compensation. The present application can provide different phase signals without frequency dispersion compensation, so as to correct the channel phase of signal flow / power flow in a transceiver system, and solve the problems of low synthesis efficiency caused by uneven phase among channels and phase deviation caused by time delay among channels.

Description

Technical Field

[0001] This invention relates to the field of phase shifter technology, and more specifically, to a self-compensating phase shifter based on a substrate-integrated coaxial line. Background Technology

[0002] Phase shifters, as an indispensable core component in microwave control, enable precise phase control in various radio frequency systems. In multi-channel transceivers, phase shifters provide the hardware foundation for phase alignment, enabling key functions such as image suppression, interference cancellation, and channel equalization. Their most demanding applications occur in phased array antennas and beamforming networks—phase shifters not only need to accurately construct the inter-element phase gradient required for electronic beam scanning, but also directly affect the array's sidelobe level, beam pointing accuracy, and overall spatial filtering performance.

[0003] Currently, the main development direction of microwave and millimeter-wave circuits is the rapid development towards ultra-wideband and three-dimensional integration. Planar transmission lines (such as microstrip lines and coplanar waveguides) have become the preferred transmission structure for integrated circuit design due to their ease of planar integration; however, their inherent high conductor loss, dielectric loss, and radiation and crosstalk problems become particularly prominent in high-frequency and ultra-wideband applications. Although metallic waveguides can meet the requirements of low loss and high power capacity for high-frequency and ultra-wideband applications, their bulky size and difficulty in integration with planar circuits and packages make them unsuitable for miniaturization. Therefore, substrate-integrated coaxial line (SICL) has been proposed and has received widespread attention. Its typical structure is as follows: the central conductor is placed in the middle layer of the dielectric substrate, and the upper and lower ground metal layers are connected by a periodic array of metallized vias, forming an equivalent coaxial external conductor, thereby supporting TEM wave transmission and possessing self-shielding properties to suppress radiation and crosstalk. However, compared with various high-performance devices based on SICL, such as filters, couplers, power dividers, and antennas, research on SICL phase shifters is significantly lagging behind, and their performance has become a bottleneck restricting the overall performance of SICL broadband circuit systems. Especially in phased arrays or broadband communication links, the operating bandwidth of the system is often determined by the bandwidth of the phase shifters in the link. Under ultra-wideband conditions exceeding ten octaves, traditional narrowband phase compensation schemes are completely ineffective at this bandwidth; the physical size is fixed, and due to structural layout limitations, it is impossible to extend short channels by adding delay lines; phase slope matching requires not only aligning the absolute phase value at a single frequency point, but also ensuring that the slope of the phase-frequency curve is consistent throughout the entire frequency band.

[0004] The main methods for achieving phase self-compensation without frequency dispersion in ultra-wideband systems are the following four schemes: 1. Digital complex compensation can only compensate for the phase value of a single frequency point; when deviating from the center frequency, because... As the frequency accumulates linearly, it generates unacceptable residual phase errors in the ultra-wideband range; such as the US patent with publication number US9954626B2 entitled "Calibrating RF path delay and IQ Phaseimbalance for polar transmit system", the Chinese patent with publication number CN115622641A entitled "Multi-channel broadband transceiver channel amplitude and phase calibration method, system, terminal and medium", and the Chinese patent with publication number CN110289920A entitled "A phase calibration method for a multi-channel broadband transceiver system".

[0005] 2. Using an active phase shifter introduces additional insertion loss, nonlinear distortion, and increased power consumption. The phase-frequency response is nonlinear and cannot match the linear phase slope of the transmission line; see, for example, Chinese patent CN109307801A entitled "Phase Balancing Method Based on Dispersion Characteristics of Electrically Adjustable Phase Shifters".

[0006] 3. Using delay line / transmission line compensation, a delay line is added to the short channel. Although the center frequency is aligned, the phase slope still differs in the ultra-wideband range because the two media are exactly the same; and an undesirable common phase shift is introduced; such as the US patents with publication number US7948248B1 entitled "Cable length correction" and publication number US2023 / 0006709A1 entitled "Delay-line based transceiver calibration".

[0007] 4. Phase shifting is achieved by adjusting the dielectric constant, which can be divided into mechanical and electrical methods. Mechanical adjustment of the dielectric constant achieves phase adjustment by mechanically changing the dielectric insertion length, but it requires an additional mechanical adjustment device, has a slow response, limited accuracy, and is difficult to integrate into small transceivers. Examples include the US patent with publication number US60754249 entitled "Article comprising a phase shifter having a movable dielectric element," the international patent with publication number WO2015 / 150168 entitled "Adjustable constant impedance phase shifter," and the Chinese patent with publication number CN106921011A entitled "A phase shifter and antenna." Electrical control, which involves introducing materials with variable dielectric constants (such as liquid crystals), requires DC bias circuits and real-time control. It does not offer significant advantages in terms of system power consumption and complexity. Examples include Chinese patents with publication number CN110233315A entitled "Phase Shift Compensation Device, Phase Shift Compensation System and Method" and publication number CN111416191A entitled "Preparation Method of Broadband Phase-Adjustable Phase Shifter Based on Variable Dielectric Constant Substrate".

[0008] The Chinese patent with publication number CN101465455A and titled "Substrate Integrated Waveguide Compensated Broadband Phase Shifter" achieves phase self-compensation based on the TE10 mode of a substrate integrated waveguide, but the maximum relative bandwidth it achieves is only 50%. Summary of the Invention

[0009] The technical problem to be solved by this invention is to provide a self-compensating phase shifter based on a substrate-integrated coaxial line, which can provide frequency-free dispersion compensation for different phases to correct the channel phase of signal flow / power flow in a transceiver system, and solve the problems of low synthesis efficiency caused by inter-channel phase imbalance and phase deviation caused by inter-channel delay; The solution adopted by this invention to solve the technical problem is: This invention provides a self-compensating phase shifter based on a substrate-integrated coaxial line, including a reference branch and a working branch with a length unequal to that of the reference branch; a dielectric perturbation structure is provided on the working branch to realize phase self-compensation of the working branch and form a phase self-compensated working branch; The signal enters from the input ports of the reference branch and the phase-compensated working branch, passes through the reference branch and the phase-compensated working branch with different lengths, and arrives at the output ports of the reference branch and the phase-compensated working branch, forming a fixed required phase difference between the output of the reference branch and the output of the phase-compensated working branch.

[0010] In some possible implementations, the working branch has a stacked structure, including an upper surface metal layer, an upper substrate, an intermediate metal layer, a prepreg, a lower substrate, and a lower surface metal layer arranged sequentially from top to bottom; the dielectric perturbation structure is disposed on the upper substrate and / or the lower substrate.

[0011] In some possible implementations, the dielectric perturbation structure includes a cavity and air, dielectric blocks, or slurry filling the cavity.

[0012] In some possible implementations, the dielectric block is a dielectric ceramic block with a dielectric constant of 8 to 40 at an operating frequency of 0.5–9.5 GHz, and a dielectric loss tanδ of less than 0.0005 at a frequency of 10 GHz.

[0013] In some possible implementations, the dielectric constant of the slurry is 5 to 16 at an operating frequency of 0.5–9.5 GHz, and the dielectric loss tanδ is less than 0.003 at a frequency of 10 GHz.

[0014] In some possible implementations, the dielectric perturbation structure is one or more sets, and when there are multiple sets of dielectric perturbation structures, they are arranged in a periodic array.

[0015] In some possible implementations, the intermediate metal layer includes two sets of side metal layers and a central conductor disposed between the two sets of side metal layers and serving as a transmission circuit section. The upper surface metal layer, the middle metal layer, and the lower surface metal layer are interconnected through metallized vias in two sets of side metal layers to form a shielding structure; the dielectric perturbation structure is located between the two sets of metallized vias in the side metal layers.

[0016] In some possible implementations, the width of the dielectric perturbation structure is smaller than the distance between the metallized via groups on one side and it does not contact the metallized via groups.

[0017] In some possible implementations, each group of metallized vias on the side metal layers includes multiple groups of metallized vias, and the multiple groups of metallized vias on the same side are equally spaced along the length of the central conductor to achieve electromagnetic shielding; a gap is formed between the central conductor and the two groups of side metal layers.

[0018] In some possible implementations, one end of the metallized via is interconnected with the upper surface metal layer and the other end is interconnected with the lower surface metallized layer, and the metallized via penetrates the intermediate metal layer.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention introduces substrate-integrated coaxial cable into the field of ultra-wideband multi-channel phase self-compensation. Utilizing its intrinsic advantages of TEM mode dispersion-free transmission and fully enclosed self-shielding, combined with a dielectric perturbation structure set on the working branch, it fundamentally solves the four dilemmas faced by traditional solutions in ultra-wideband scenarios: limited compensation bandwidth due to dispersion, insertion loss and power consumption introduced by additional devices, inability to planar integrate three-dimensional structures, and point-by-point calibration requirements due to inconsistent frequency response. It effectively achieves phase-frequency dispersion-free self-compensation in the ultra-wideband range beyond ten octaves, even with unequal physical dimensions of signal / power flow. In use, phase balancing without frequency dispersion can be achieved simply by changing the physical dimensions of the dielectric perturbation structure in the working branch. Compared with external cable compensation, external electrically adjustable phase shifters and digital correction compensation inside the transceiver, the phase compensation value of this invention is continuously adjustable and more adaptable. This invention features completely passive, purely structural compensation with zero additional power consumption, zero extra BOM, and zero risk of active device failure. The dielectric perturbation structure in this invention is integrated with the transmission line, requiring no additional assembly, mounting, or packaging, and is fully compatible with standard multilayer PCB processes. The design parameters in this invention depend only on the physical length difference and the dielectric constant of the board material, not on the absolute frequency value, and the design method has frequency band portability. The present invention forms a shielding structure through an upper surface metal layer, a lower surface ground metal layer, metallized through holes, and a central conductive strip, so that the compensation is not affected by external electromagnetic interference and coupling of adjacent circuits, thus ensuring the stability of the compensation state and the consistency of mass production. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the working branch after phase self-compensation in this invention; Figure 2 This is a cross-sectional view of the working branch after phase self-compensation in this invention; Figure 3 This is a schematic diagram of the reference branch, working branch, and working branch after phase self-compensation in Example 1; Figure 4 The frequency response results of SICL structures corresponding to the three different transmission line circuit topologies in Example 1 are shown in the figure. Figure 5 The diagram shows the phase difference results of the SICL structure corresponding to the three different transmission line circuit topologies in Example 1. Figure 6 The diagram shows the group delay results of the SICL structure corresponding to the three different transmission line circuit topologies in Example 1. in: 1. Baseline branch; 2. Working branch; 3. Working branch after phase self-compensation; 4. Dielectric perturbation structure; 5. Metallized through holes; 6. Central guide belt; 7. Upper surface metal layer; 8. Lower surface metal layer; 9. Side metal layer; 10. Upper substrate; 11. Prepreg; 12. Lower substrate; 13. Intermediate metal layer. Detailed Implementation

[0021] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, "a" or "one," etc., do not indicate a quantity limitation, but rather indicate the existence of at least one. In the implementation of this application, "and / or" describes the association relationship of related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more. For example, multiple positioning posts refer to two or more positioning posts. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0022] The present invention will now be described in detail.

[0023] In ultra-wideband multichannel transceiver systems, due to the unequal length constraints of the layout wiring in the signal / power flow, the physical length of the 50Ω characteristic impedance transmission line between channels often has inherent differences. Let the electrical length of the reference branch 1 be... Its physical length; The electrical length of working branch 2 is , Its physical length; Propagation constant ; When layout constraints lead to hour( Reference branch 1 is at the high end of the frequency range. The fixed phase introduced by the working branch 2 is ahead. .

[0024] In this regard, such as Figures 1-6 As shown, the present invention provides a self-compensating phase shifter based on a substrate-integrated coaxial line, which achieves phase balancing without frequency dispersion between the working branch 2 and the reference branch 1, and has good amplitude balance at more than ten times the frequency. The self-compensating phase shifter has a planar circuit structure, including a reference branch 1 and working branches 2 of unequal lengths; A dielectric perturbation structure 4 is provided on the working branch 2 to realize phase self-compensation of the working branch 2 and form the working branch 3 after phase self-compensation; Both reference branch 1 and working branch 2 are SICL transmission lines and each has an input port and an output port. The input port of reference branch 1 is located on the side of the substrate integrated coaxial line one signal input, and the output port of reference branch 1 is located on the side of the substrate integrated coaxial line one signal output. The input port of working branch 2 is located on the side of the substrate integrated coaxial line two signal input, and the output port of working branch 2 is located on the side of the substrate integrated coaxial line two signal output. In this invention, the signal enters from the input ports of the reference branch 1 and the phase-compensated working branch 3, passes through the reference branch 1 and the phase-compensated working branch 3 with different lengths, and arrives at the output ports of the reference branch 1 and the phase-compensated working branch 3. A fixed required phase difference is formed between the output ports of the reference branch 1 and the phase-compensated working branch 3. That is, by setting the dielectric perturbation structure 4 in the working branch 2, the phase self-compensation of the working branch 2 is realized, forming the phase-compensated working branch 3. Without changing the physical size of the working branch 2, a fixed required phase difference is formed between the output port of the reference branch 1 and the output port of the phase-compensated working branch 3. In this invention, reference branch 1 is different from working branch 2. Reference branch 1 is a delay line type phase shifter, and the phase shift increases with the operating frequency. By using dielectric perturbation structure 4, the electrical length of working branch 2 is changed without altering its physical dimensions, resulting in the electrical length of working branch 3 after phase self-compensation being... The phase self-compensation achieved is exactly the opposite of the trend of the phase shift generated by the working branch 2 with frequency. Therefore, by appropriately setting the physical size of the dielectric perturbation structure 4, phase balancing without frequency dispersion can be achieved between the physical sizes of the working branch 2 and the reference branch 1 under unequal length conditions. The physical size of the dielectric perturbation structure 4 can be obtained through simulation analysis. This invention introduces substrate-integrated coaxial cable into the field of ultra-wideband multi-channel phase self-compensation. Utilizing its intrinsic advantages of TEM mode dispersion-free transmission and fully enclosed self-shielding, combined with dielectric perturbation structure 4, it fundamentally solves the four dilemmas faced by traditional solutions in ultra-wideband scenarios: limited compensation bandwidth due to dispersion, insertion loss and power consumption introduced by additional devices, inability to integrate three-dimensional structures in a planar manner, and point-by-point calibration requirements due to inconsistent frequency response.

[0025] In some possible implementations, the working branch 2 has a stacked structure, including an upper surface metal layer 7, an upper substrate 10, an intermediate metal layer 13, a prepreg 11, a lower substrate 12, and a lower surface metal layer 8 arranged sequentially from top to bottom; the dielectric perturbation structure 4 is disposed on the upper substrate 10 and / or the lower substrate 12.

[0026] In some possible implementations, the dielectric perturbation structure 4 includes a cavity and air, dielectric blocks, or slurry filling the cavity.

[0027] Furthermore, the dielectric block is a dielectric ceramic block, with a dielectric constant of 8~40 at an operating frequency of 0.5–9.5 GHz, and a dielectric loss of [missing value] at a frequency of 10 GHz. tanδ Less than 0.0005; Furthermore, the dielectric constant of the slurry is 5–16 at operating frequencies of 0.5–9.5 GHz, and the dielectric loss is [not specified] at 10 GHz. tanδ Less than 0.003; By adjusting the dielectric blocks and slurry settings, low-loss ultrawideband characteristics can be achieved within an operating frequency range of 0.5–9.5 GHz.

[0028] In some possible implementations, the dielectric perturbation structure 4 is one or more groups. When there are multiple groups of dielectric perturbation structures 4, they are arranged in a periodic array. Specifically, each group of dielectric perturbation structures 4 has the same shape and size, and the spacing between adjacent groups of dielectric perturbation structures 4 is equal.

[0029] In some possible implementations, the intermediate metal layer 13 includes two sets of side metal layers 9 and a central conductor 6 disposed between the two sets of side metal layers 9 and serving as a transmission circuit section. The upper surface metal layer 7, the middle metal layer 13, and the lower surface metal layer 8 are interconnected by metallized via groups provided in the two sets of side metal layers 9 and form a shielding structure; the dielectric perturbation structure 4 is located between the two sets of metallized via groups in the two sets of side metal layers 9.

[0030] In some possible implementations, the width of the dielectric perturbation structure 4 is smaller than the distance between the metallized via groups on one side, and it does not contact the metallized via groups.

[0031] In some possible implementations, each group of metallized vias on the side metal layer 9 includes multiple groups of metallized vias 5. The multiple groups of metallized vias 5 on the same side are equally spaced along the length of the central guide strip 6 to achieve electromagnetic shielding; a gap is formed between the central guide strip 6 and the two groups of side metal layers 9.

[0032] In some possible implementations, one end of the metallized via 5 is interconnected with the upper surface metal layer 7 and the other end is interconnected with the lower surface metallized layer, and the metallized via 5 penetrates the intermediate metal layer.

[0033] This invention uses a stacked process design, which can be extended to MCM, Flip-Chip and glass substrate process designs. The process implementation should have a three-layer metal layer process, or more metal layers using the top and bottom metal layers and any intermediate layer.

[0034] This invention uses a stacked process design, and can also be extended to LTCC, MEMS, incremental manufacturing and CMOS semiconductor process design. Such a process should have a three-layer metal layer process, or more metal layers using the top and bottom metal layers and any intermediate layer.

[0035] Example 1: This embodiment is a self-compensating phase shifter based on a substrate-integrated coaxial line, with a center frequency of 5GHz, achieving 141° phase shift self-compensation and a relative bandwidth of 19 octaves (0.5GHz-9.5GHz).

[0036] The upper substrate 10 and the lower substrate 12 are Panasonic R5785, which has a dielectric constant of 3.35 and a loss tangent of 0.02. The prepreg 11 is made of Panasonic R5680 prepreg, with a dielectric constant of 3.11 and a loss tangent of 0.02. The metallized vias 5 have a diameter of 0.25 mm and a spacing of 0.75 mm. The dielectric perturbation structure 4 is disposed in the upper substrate 10 and consists of two sets of air cavities; the two sets of air cavities are symmetrically placed in the upper substrate 10; the width of the air cavities is... W c The length of the air cavity is L3, and the height of the air cavity is... h c The chamfer of the air cavity is R c ; The materials used in base branch 1 and working branch 2 are identical; the width of base branch 1 is... W、 Length is L 1. Working branch 2 has a width tail W、 Length is L2; An air cavity is provided on working branch 2 to form phase-self-compensated working branch 3. The physical dimensions of phase-self-compensated working branch 3 are the same as those of working branch 2, that is, the width is... W， Length is L 2; The width of the center guide band 6 is w s The width of the gap between the central conductive strip 6 and the side metal layer 9 is g .

[0037] Specific parameters are shown in Table 1:

[0038] Table 1 Based on the above parameters, a simulation was performed, and the simulation results are as follows. Figures 4-6 As shown; Specifically, Figure 4 The frequency response results of the SICL structure corresponding to the three different transmission line circuits (reference branch 1, working branch 2, and working branch 3 after phase self-compensation) topologies in the embodiment are shown in the figure. It can be seen that the return loss of the present invention is not less than 18.19dB and the insertion loss is not greater than 0.44dB in the working bandwidth range of 0.5-9.5GHz. Figure 5 The diagram shows the phase difference results of the SICL structures corresponding to the three different transmission line circuit topologies (reference branch 1, working branch 2, and phase-compensated working branch 3) in the embodiment. It can be seen that the phase difference between the reference branch 1 and the working branch 2 changes with a positive slope of 14.85° / GHz; while the phase difference between the working branch 2 and the phase-compensated working branch 3 changes with a negative slope of -14.62° / GHz. By setting the dielectric perturbation structure 4 on the working branch 2 to form the phase-compensated working branch 3, effective phase self-compensation will be achieved. In this invention, with the reference branch 1 as a reference, the phase-compensated working branch 3 can achieve broadband phase balancing under unequal length structure conditions, effectively suppressing frequency dispersion, with a phase deviation of less than 2.2°. Figure 6 The diagram shows the group delay results of the SICL structures corresponding to the three different transmission line circuit topologies (reference branch 1, working branch 2, and working branch 3 after phase self-compensation) in the embodiment. It can be seen that within the working bandwidth range of 0.5-9.5GHz, the group delay of reference branch 1 is... τ g (S 21 ) After phase self-compensation, the working branch 3 τ g(S 65 ) The results show a high degree of agreement, and the group delay characterizes the rate of phase change with frequency. Figure 5 The phase difference characteristics corroborate each other, proving that the present invention can effectively suppress frequency dispersion and verifying the effectiveness of the present invention.

[0039] This invention is not limited to the specific embodiments described above. The invention extends to any new feature or combination disclosed in this specification, as well as any new method or process step or combination disclosed herein.

Claims

1. A self-compensating phase shifter based on a substrate-integrated coaxial line, characterized in that, It includes a reference branch and a working branch with a length unequal to that of the reference branch; a dielectric perturbation structure is provided on the working branch to realize phase self-compensation of the working branch and form a phase self-compensated working branch; The signal enters from the input ports of the reference branch and the phase-compensated working branch, passes through the reference branch and the phase-compensated working branch with different lengths, and arrives at the output ports of the reference branch and the phase-compensated working branch, forming a fixed required phase difference between the output of the reference branch and the output of the phase-compensated working branch.

2. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 1, characterized in that, The working branch has a stacked structure, including an upper surface metal layer, an upper substrate, an intermediate metal layer, a prepreg, a lower substrate, and a lower surface metal layer arranged sequentially from top to bottom; the dielectric perturbation structure is disposed on the upper substrate and / or the lower substrate.

3. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 1, characterized in that, The dielectric perturbation structure includes a cavity and air, dielectric blocks, or slurry filling the cavity.

4. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 3, characterized in that, The dielectric block is a dielectric ceramic block. At an operating frequency of 0.5–9.5 GHz, the dielectric constant of the dielectric ceramic block is 8 to 40, and at a frequency of 10 GHz, the dielectric loss tanδ is less than 0.0005.

5. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 3, characterized in that, The dielectric constant of the slurry is 5 to 16 at an operating frequency of 0.5–9.5 GHz, and the dielectric loss tanδ is less than 0.003 at a frequency of 10 GHz.

6. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 1, characterized in that, The dielectric perturbation structure is one or more sets, and when there are multiple sets of dielectric perturbation structures, they are arranged in a periodic array.

7. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 2, characterized in that, The intermediate metal layer includes two sets of side metal layers and a central conductor strip disposed between the two sets of side metal layers and serving as a transmission circuit section. The upper surface metal layer, the middle metal layer, and the lower surface metal layer are interconnected through metallized vias in two sets of side metal layers to form a shielding structure; the dielectric perturbation structure is located between the two sets of metallized vias in the side metal layers.

8. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 7, characterized in that, The width of the dielectric perturbation structure is smaller than the distance between the metallized via groups on one side, and it does not contact the metallized via groups.

9. The self-compensating phase shifter based on substrate-integrated coaxial line according to claim 7, characterized in that, Each group of metallized vias on the side metal layer includes multiple groups of metallized vias. The multiple groups of metallized vias on the same side are equally spaced along the length of the central conductor to achieve electromagnetic shielding; a gap is formed between the central conductor and the two groups of side metal layers.

10. The self-compensating phase shifter based on a substrate-integrated coaxial line according to claim 9, characterized in that, One end of the metallized via is connected to the upper surface metal layer and the other end is connected to the lower surface metallized layer, and the metallized via penetrates the intermediate metal layer.

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