A laser emission window device for online monitoring of beam pointing and power
Patent Information
- Application Number
- CN202611510878.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-09-28
- Publication Date
- 2026-10-30
AI Technical Summary
传统的发射窗口一般只考虑窗口反射杂光不要对光源内部造成破坏，而忽视对此反射杂光的有效利用
本申请通过对发射窗口反射残光的监测，实现对主发射激光的间接在线监测，既不干扰主发射激光的正常工作，又减少了反射杂光对光源设备内部的干扰或破坏；通过监测分光镜对反射残光进行二次分光，实现了对主发射激光光束指向和功率的同步在线监测；在对窗口座通水冷却的同时，通过背部径向、轴向双重密封圈完成窗口镜与窗口座的连接，既实现了窗口镜与窗口座的可靠密封，又确保了窗口镜与窗口座的可靠接触，有效提高了窗口镜散热的效率；通过增减衰减片数量实现进入指向监测光管中激光能量的调节，便于适应发射激光功率的大范围调节；通过吸收池吸收窗口镜的反射残光，在无需监测激光指向及功能时有效消除激光污染，其中双U型的水道结构，可靠保证了吸收池的冷却效率；通过迷宫式防尘罩实现窗口镜与设备防尘盖板之间的防尘密封，大幅度降低了对二者安装接口准确性的要求。
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Figure CN123018540A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of laser technology, and more specifically to a laser emission window device for online monitoring of beam direction and power. Background Technology
[0002] In the field of high-energy laser transmission, to protect the cleanliness of the light source or beam transmission area, the method of increasing the emission window is usually adopted to isolate the emitted laser from the interior of the light source equipment. Traditional emission windows generally only consider preventing stray light reflected from the window from causing damage to the interior of the light source, while neglecting the effective utilization of this reflected stray light. Moreover, when the emitted laser energy is particularly high, even if the wedge angle of the emission window is increased to prevent reflected stray light from entering the core area of the light source equipment, the high-energy reflected stray light can still cause some damage to the structural components of the light source equipment. Summary of the Invention
[0003] To address the above problems, this application proposes a laser emission window device for online monitoring of beam direction and power. The specific solution is as follows: According to a specific embodiment of this application, this application provides a laser emission window device for online monitoring of beam direction and power, comprising: A window mount assembly includes a window mount and a window mount sealing ring, wherein the window mount is sealed to a laser via the window mount sealing ring; the window mount includes a Z-shaped light transmission path, wherein the Z-shaped light transmission path includes a window mirror, a monitoring light guide mirror, and a low-light window mirror; wherein, the main beam of the laser emitted by the laser that is greater than a first preset value is output through the window mirror, and the remaining low-light beam is reflected by the window mirror to the monitoring light guide mirror, and then reflected again to the low-light window mirror for output; A pointing monitoring component is disposed on the output optical path of the low-light window mirror, wherein a portion of the weak beam output from the low-light window mirror that is smaller than a second preset value enters the pointing monitoring component to monitor the pointing of the main beam; A power monitoring component is disposed on the output side of the weak light window mirror, wherein the remaining part of the weak light beam is reflected by the pointing monitoring component and enters the power monitoring component to monitor the power of the main light beam.
[0004] In some embodiments, the window mounting assembly further includes: an inner dust cover, an equipment dust cover, and an outer dust cover. One end of the inner dust cover is fixed to the periphery of the window mirror, the equipment dust cover is located on the light-emitting side of the window mirror, and the outer dust cover passes through the equipment dust cover and overlaps with the other end of the inner dust cover.
[0005] In some embodiments, the window seat assembly further includes: a window axial sealing ring, a window radial sealing ring, and a window mirror pressure ring, wherein the window mirror is fixed to a turning point of the Z-shaped light transmission path of the window seat by the window axial sealing ring, the window radial sealing ring, and the window mirror pressure ring.
[0006] In some embodiments, the window mount assembly further includes a monitoring light guide mirror retaining ring and a monitoring light guide mirror mount, wherein the monitoring light guide mirror is fixed to the monitoring light guide mirror mount by the monitoring light guide mirror retaining ring.
[0007] In some embodiments, the window mounting assembly further includes a low-light window dust cover, one end of which is fixedly connected to the periphery of the low-light window mirror.
[0008] In some embodiments, the window seat assembly further includes: a low-light window radial sealing ring, a low-light window axial sealing ring, and a low-light window mirror pressure ring, wherein the low-light window mirror is fixed to the end of the Z-shaped light transmission path of the window seat by the low-light window radial sealing ring, the low-light window axial sealing ring, and the low-light window mirror pressure ring.
[0009] In some embodiments, the window seat assembly further includes an absorption pool seat, one end of which is fixed to the device dust cover, and the other end is alternately sandwiched with the low-light window dust cover.
[0010] In some embodiments, it further includes an absorption pool, which is detachably disposed on the absorption pool seat.
[0011] In some embodiments, the absorption tank includes a double-layered interconnected U-shaped cooling water channel and an absorption tank inlet and an absorption tank outlet connected to both ends of the U-shaped cooling water channel.
[0012] In some embodiments, the pointing monitoring component includes: a monitoring beam splitter mount, a monitoring beam splitter spacer, a pointing monitoring light tube, an attenuator retaining ring, an attenuator, and a monitoring beam splitter; the monitoring beam splitter is fixed in the monitoring beam splitter mount by the monitoring beam splitter spacer, the attenuator, and the attenuator retaining ring, and the monitoring beam splitter mount is fixedly connected to the front end of the pointing monitoring light tube.
[0013] Compared with the prior art, the above-described solutions of this application have at least the following beneficial effects: This application achieves indirect online monitoring of the main emitted laser by monitoring the reflected residual light from the emission window. This avoids interfering with the normal operation of the main emitted laser and reduces the interference or damage of reflected stray light to the internal components of the light source equipment. A secondary beam splitter is used to monitor the reflected residual light, enabling synchronous online monitoring of the main emitted laser beam direction and power. While the window seat is cooled by water, a double-seal ring (radial and axial) on the back connects the window mirror to the window seat, ensuring reliable sealing and contact, effectively improving the heat dissipation efficiency of the window mirror. The laser energy entering the direction monitoring light tube can be adjusted by increasing or decreasing the number of attenuators, facilitating a wide range of laser power adjustments. An absorption cell absorbs the reflected residual light from the window mirror, effectively eliminating laser contamination when laser direction and function monitoring is not required. The double-U-shaped water channel structure reliably ensures the cooling efficiency of the absorption cell. A labyrinth-style dust cover achieves a dustproof seal between the window mirror and the equipment's dust cover, significantly reducing the requirements for the accuracy of their installation interfaces. Attached Figure Description
[0014] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings: Figure 1 This is a structural diagram of the laser emission window in the case of absorbing stray light according to an embodiment of the present invention; Figure 2 This is a cross-sectional view along line AA of the laser emission window when the laser is in a stray light absorption state according to an embodiment of the present invention. Figure 3 This is a structural diagram of the laser emission window during online monitoring of laser pointing and power status according to an embodiment of the present invention; Figure 4 This is a structural diagram of the absorption cell in an embodiment of the present invention.
[0015] Explanation of reference numerals in the attached diagram: 1-Window seat, 2-Window seat inlet nozzle, 3-Window seat outlet nozzle, 4-Window axial sealing ring, 5-Window radial sealing ring, 6-Window mirror, 7-Window mirror pressure ring, 8-Inner dust cover of the window, 9-Equipment dust cover plate, 10-Outer dust cover of the window, 11-Absorption tank seat, 12-Absorption tank, 121-U-shaped cooling water channel, 13-Absorption tank inlet nozzle, 14-Low-light window mirror, 15-Low-light window dust cover. 16-Radial sealing ring for low-light window, 17-Axial sealing ring for low-light window, 18-Mirror pressure ring for low-light window, 19-Pressure ring for monitoring light guide mirror, 20-Monitoring light guide mirror, 21-Window seat sealing ring, 22-Monitoring light guide mirror seat, 23-Water outlet for absorption cell, 24-Monitoring beam splitter seat, 25-Monitoring beam splitter spacer, 26-Pointing monitoring light tube, 27-Attenuator pressure ring, 28-Attenuator, 29-Monitoring beam splitter, 30-Power meter. Detailed Implementation
[0016] To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0017] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or device. Without further limitation, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the product or device that includes that element.
[0018] The embodiments of this application are described in detail below with reference to the accompanying drawings.
[0019] According to the specific implementation of this application, such as Figures 1-4 As shown, this application provides a laser emission window device for online monitoring of beam direction and power, comprising: The window seat assembly includes a window seat 1 and a window seat sealing ring 21. The window seat 1 is sealed to the laser via the window seat sealing ring 21, thereby achieving reliable airtightness of the internal optical path of the laser. The window seat 1 includes a Z-shaped light transmission path, which includes a window mirror 6, a monitoring light guide mirror 20, and a low-light window mirror 14. The main beam of the laser emitted by the laser that is greater than a first preset value (e.g., greater than 99.9%) is output through the window mirror 6, and the remaining weak beam is reflected by the window mirror 6 to the monitoring light guide mirror 20 and then reflected again to the low-light window mirror 14 for output. A pointing monitoring component is disposed on the output optical path of the weak light window mirror 14, wherein a portion of the weak light beam output from the weak light window mirror 14 that is less than a second preset value (e.g., less than 0.1%) enters the pointing monitoring component to indirectly monitor the pointing of the main light beam. A power monitoring component is disposed on the output side of the weak light window mirror 14, wherein the remaining part of the weak light beam is reflected by the pointing monitoring component and enters the power monitoring component to indirectly monitor the power of the main light beam.
[0020] In some embodiments, a U-shaped cooling water channel is arranged inside the window seat 1. The inlet and outlet of the U-shaped cooling water channel are connected to the water inlet 2 and the water outlet 3 of the window seat 1, respectively, to achieve water cooling of the window seat 1.
[0021] In some embodiments, the window mounting assembly further includes: an inner dust cover 8, an equipment dust cover 9, and an outer dust cover 10. One end of the inner dust cover 8 is fixed to the periphery of the window mirror 6. The equipment dust cover 9 is located on the light-emitting side of the window mirror 6. The outer dust cover 10 passes through the equipment dust cover 9 and overlaps with the other end of the inner dust cover 8, which facilitates installation and achieves dustproof sealing of the area outside the window mirror 6 and inside the laser equipment. The equipment dust cover 9 is located directly in front of the window mirror 6, isolating the laser equipment from the outside world to protect the laser equipment from pollution.
[0022] In some embodiments, the window seat assembly further includes: a window axial sealing ring 4, a window radial sealing ring 5, and a window mirror pressing ring 7, wherein the window mirror 6 is fixed to a turning point of the Z-shaped light transmission path of the window seat 1 by the window axial sealing ring 4, the window radial sealing ring 5, and the window mirror pressing ring 7.
[0023] In some embodiments, the window mount assembly further includes a monitoring light guide mirror retaining ring 19 and a monitoring light guide mirror mount 22, wherein the monitoring light guide mirror 20 is fixed to the monitoring light guide mirror mount 22 by the monitoring light guide mirror retaining ring 19.
[0024] The window mirror 6 is fixed to one turning point of the "Z" shape of the window seat 1 by the window axial sealing ring 4, the window radial sealing ring 5, and the window mirror pressure ring 7. The monitoring light guide mirror 20 is fixed in the monitoring light guide mirror seat 22 by the monitoring light guide mirror pressure ring 19, forming a light guide mirror assembly, and is fixed to the other turning point of the "Z" shape of the window seat 1.
[0025] In some embodiments, the window mounting assembly further includes a low-light window dust cover 15, one end of which is fixed to the periphery of the low-light window mirror 14.
[0026] In some embodiments, the window seat assembly further includes: a low-light window radial sealing ring 16, a low-light window axial sealing ring 17, and a low-light window mirror pressure ring 18. The low-light window mirror 14 is fixed to the tail end of the Z-shaped light transmission path of the window seat 1 through the low-light window radial sealing ring 16, the low-light window axial sealing ring 17, and the low-light window mirror pressure ring 18, and is on the same side as the window mirror 6.
[0027] In some embodiments, the window seat assembly further includes an absorption pool seat 11, one end of which is fixed to the dust cover plate 9 of the equipment, and the other end is interleaved with the dust cover 15 of the low light window, which is convenient for installation and can achieve dustproof sealing of the external space of the low light window mirror 14 and the local space inside the laser equipment.
[0028] In some embodiments, the system further includes an absorption pool 12, which is detachably disposed on the absorption pool seat 11.
[0029] In some embodiments, such as Figure 4 As shown, the absorption tank 12 includes a double-layer interconnected U-shaped cooling water channel 121 and an absorption tank inlet 13 and an absorption tank outlet 23 connected to both ends of the U-shaped cooling water channel 121.
[0030] In some embodiments, the pointing monitoring component includes: a monitoring beam splitter mount 24, a monitoring beam splitter spacer 25, a pointing monitoring light tube 26, an attenuator retaining ring 27, an attenuator 28, and a monitoring beam splitter 29; the monitoring beam splitter 29 is fixed in the monitoring beam splitter mount 24 by the monitoring beam splitter spacer 25, the attenuator 28, and the attenuator retaining ring 27, and the monitoring beam splitter mount 24 is fixedly connected to the front end of the pointing monitoring light tube 26.
[0031] The working surface of window mirror 6 is coated with an anti-reflection film. When the main laser beam from the laser device is emitted to window mirror 6, more than 99.9% of the energy passes through window mirror 6 and is emitted, effectively ensuring the utilization rate of the main laser beam. The remaining weak beam, with less than 0.1% of the energy, follows the "Z"-shaped light path in window holder 1 and is first reflected by window mirror 6 to monitoring light guide mirror 20. The working surface of monitoring light guide mirror 20 is coated with a high-reflection film, and more than 99.9% of the weak light energy reflected by the window mirror is reflected again by monitoring light guide mirror 20 to weak light window mirror 14. The less than 0.1% of the weak light energy reflected by the window mirror passes through monitoring light guide mirror 20 and is directly absorbed by monitoring light guide mirror holder 22. To ensure the absorption effect of monitoring light guide mirror holder 22 on stray light, monitoring light guide mirror holder 22 is specially blackened. The film system of weak light window mirror 14 is the same as that of window mirror 6 to reduce coating costs. Therefore, of the light beam reflected by the monitoring light guide mirror 20 to the low-light window mirror 14, more than 99.9% of the energy is transmitted through the low-light window mirror 14 to the monitoring beam splitter 29 or the absorption cell 12; less than 0.1% of the energy is reflected by the low-light window mirror 14 to the inner wall of the window seat 1. On the one hand, the surface of the window seat 1 is blackened to ensure its absorption effect on reflected stray light; on the other hand, by setting the orientation of the low-light window mirror 14, such as ensuring that the incident angle of the monitoring beam on the low-light window mirror 14 is greater than 10°, it is ensured that the monitoring beam will not be reflected back to the main optical path and damage the laser equipment.
[0032] The absorption tank 12 has a double-layered, interconnected U-shaped cooling water channel 121 inside. The two ends of the channel are connected to the absorption tank inlet 13 and the absorption tank outlet 23, respectively. When the absorption tank 12 is placed in the absorption tank seat 11 for light absorption, as needed... Figure 2As shown, cooling water circulates rapidly in the water channel, carrying away the energy absorbed by the absorption cell 12 and ensuring its long-term reliable operation. The directional monitoring light tube 26 is located directly in front of the weak light window mirror 14, indirectly monitoring the direction of the main beam by monitoring the direction of the weak light. The monitoring beam splitter 29 is fixed within the monitoring beam splitter mount 24 via a spacer 25, an attenuator 28, and an attenuator retaining ring 27. The monitoring beam splitter mount 24 is fixed to the front end of the directional monitoring light tube 26. The monitoring beam splitter 29 has the same film system as the monitoring light guide mirror 20; therefore, less than 0.1% of the energy of the beam emitted to the monitoring beam splitter 29 is attenuated again by the attenuator 28 before entering the directional monitoring light tube 26. The attenuator retaining ring 27 is threadedly connected to the monitoring beam splitter mount 24, which not only secures the monitoring beam splitter 29 and the attenuator 28 but also allows adjustment of the energy entering the directional monitoring light tube 26 by increasing or decreasing the number of attenuators 28 according to the energy level of the monitored beam. On the one hand, it protects the camera in the pointing monitoring beam 26 from damage by the strong laser; on the other hand, it ensures the pointing accuracy of the beam. More than 99.9% of the energy of the beam emitted onto the monitoring beam splitter 29 is reflected back to the power meter 30 in front of the monitoring beam splitter 29, such as... Figure 3 As shown, the power of the main emitted laser can be indirectly monitored by online monitoring of the weak light energy.
[0033] like Figure 2 As shown, when online monitoring of the laser device's direction and power is not required, the absorption cell 12 can be placed directly in the absorption cell base 11, and the cooling water circulation in the absorption cell channel 121 can be started to reliably absorb reflected stray light. When online monitoring of the laser device's direction and power is required, the absorption cell 12 can be removed directly from the absorption cell base 11, and the direction and power of the emitted main laser can be indirectly monitored online through the direction monitoring optical tube 26 and the power meter 30. To improve the monitoring accuracy of the main laser, the direction monitoring optical tube 26 and the power meter 30 need to be calibrated to determine the conversion relationship between the monitored weak light and the main emitted laser, ultimately achieving indirect online monitoring of the main emitted laser.
[0034] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems or apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and relevant parts can be referred to the method section.
[0035] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.
Claims
1. A laser emission window device for online monitoring of beam direction and power, characterized in that, include: A window seat assembly includes a window seat (1) and a window seat sealing ring (21). The window seat (1) is sealed to the laser via the window seat sealing ring (21). The window seat (1) includes a Z-shaped light transmission path, which includes a window mirror (6), a monitoring light guide mirror (20), and a weak light window mirror (14). The main beam of the laser emitted by the laser that is greater than a first preset value is output through the window mirror (6), and the remaining weak beam is reflected by the window mirror (6) to the monitoring light guide mirror (20) and then reflected to the weak light window mirror (14) for output. A pointing monitoring component is disposed on the output optical path of the weak light window mirror (14), wherein a portion of the weak light beam output from the weak light window mirror (14) that is smaller than a second preset value enters the pointing monitoring component to monitor the pointing of the main light beam; A power monitoring component is disposed on the output side of the weak light window mirror (14), wherein the remaining part of the weak light beam is reflected by the pointing monitoring component and enters the power monitoring component to monitor the power of the main light beam.
2. The laser emission window device for online monitoring of beam direction and power according to claim 1, characterized in that, The window mounting assembly further includes: an inner dust cover (8), an equipment dust cover (9), and an outer dust cover (10). One end of the inner dust cover (8) is fixed to the periphery of the window mirror (6). The equipment dust cover (9) is located on the light-emitting side of the window mirror (6). The outer dust cover (10) passes through the equipment dust cover (9) and overlaps with the other end of the inner dust cover (8).
3. The laser emission window device for online monitoring of beam direction and power according to claim 1, characterized in that, The window seat assembly further includes: a window axial sealing ring (4), a window radial sealing ring (5), and a window mirror pressure ring (7). The window mirror (6) is fixed to a turning point of the Z-shaped light transmission path of the window seat (1) by the window axial sealing ring (4), the window radial sealing ring (5), and the window mirror pressure ring (7).
4. The laser emission window device for online monitoring of beam direction and power according to claim 1, characterized in that, The window mount assembly further includes a monitoring light guide mirror retaining ring (19) and a monitoring light guide mirror mount (22), wherein the monitoring light guide mirror (20) is fixed to the monitoring light guide mirror mount (22) by the monitoring light guide mirror retaining ring (19).
5. A laser emission window device for online monitoring of beam direction and power according to claim 2, characterized in that, The window mounting assembly further includes a low-light window dust cover (15), one end of which is fixed to the periphery of the low-light window mirror (14).
6. The laser emission window device for online monitoring of beam direction and power according to claim 1, characterized in that, The window seat assembly further includes: a low-light window radial sealing ring (16), a low-light window axial sealing ring (17), and a low-light window mirror pressure ring (18). The low-light window mirror (14) is fixed to the end of the Z-shaped light transmission path of the window seat (1) by the low-light window radial sealing ring (16), the low-light window axial sealing ring (17), and the low-light window mirror pressure ring (18).
7. A laser emission window device for online monitoring of beam direction and power according to claim 5, characterized in that, The window seat assembly further includes an absorption pool seat (11), one end of which is fixed to the dust cover plate (9) of the equipment, and the other end is interleaved with the dust cover (15) of the low light window.
8. A laser emission window device for online monitoring of beam direction and power according to claim 7, characterized in that, Also includes: An absorption cell (12) is detachably mounted on the absorption cell base (11).
9. A laser emission window device for online monitoring of beam direction and power according to claim 8, characterized in that, The absorption tank (12) includes a double-layer interconnected U-shaped cooling water channel (121) and an absorption tank inlet (13) and an absorption tank outlet (23) connected to both ends of the U-shaped cooling water channel (121).
10. A laser emission window device for online monitoring of beam direction and power according to claim 8, characterized in that, The pointing monitoring component includes: a monitoring beam splitter mount (24), a monitoring beam splitter spacer (25), a pointing monitoring light tube (26), an attenuator retaining ring (27), an attenuator (28), and a monitoring beam splitter (29); the monitoring beam splitter (29) is fixed in the monitoring beam splitter mount (24) by the monitoring beam splitter spacer (25), the attenuator (28), and the attenuator retaining ring (27), and the monitoring beam splitter mount (24) is fixed to the front end of the pointing monitoring light tube (26).