A high-power deep-ultraviolet laser generating device

Abstract

The application discloses a high-power deep ultraviolet laser generating device, which comprises a shell, a laser source and a mounting base arranged in the shell, the mounting base comprises a mounting portion for fixing optical lenses and an adjusting portion capable of angle adjustment, the adjusting portion is fixedly mounted on the shell, the mounting portion is mounted on the adjusting portion, and the adjusting portion drives the position of the mounting portion to be unchanged; the high-power deep ultraviolet laser generating device is characterized in that the mounting portion is mounted on the adjusting portion; after the angle adjustment of the adjusting portion is completed, the adjusting portion no longer changes the angle greatly; when the staff removes the optical lenses, the staff only needs to remove the bad optical lenses from the mounting portion, and the whole mounting base and the adjusting portion do not need to be removed; when the staff installs the optical lenses, the staff only needs to install the optical lenses on the mounting portion, and the angle of the optical lenses does not need to be adjusted from the beginning; therefore, the adjustment time of the optical lenses is greatly reduced, and the work efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of laser technology, and specifically discloses a high-power deep ultraviolet laser generator. Background Technology

[0002] Deep ultraviolet (DUV) lasers typically refer to ultraviolet lasers with wavelengths in the 180nm–270nm range. With their unique optical properties, including high photon energy, fine focused spot size, excellent spatial resolution, and no thermal processing damage, they have become a core light source in contemporary high-end precision manufacturing, the semiconductor industry, cutting-edge scientific research, and environmental monitoring. In the semiconductor field, DUV lasers can be used for wafer surface micro-defect detection, photolithography, thin film material analysis, and precision etching, serving as a core light source component in advanced chip manufacturing equipment. In scientific research, they are widely used in fundamental research scenarios such as high-resolution photoelectron spectroscopy analysis, molecular spectroscopy detection, and vacuum ultraviolet spectroscopy testing. Simultaneously, they possess irreplaceable application value in civilian and industrial scenarios such as high-precision micro-nano fabrication, ultraviolet disinfection and purification, and precise pollutant detection.

[0003] For example, patent CN118712873B, published on February 21, 2025, discloses an ultraviolet laser, including a substrate, an optical cavity mounted on the substrate, a pump source, and an ultraviolet laser generating mechanism. The ultraviolet laser generating mechanism is disposed within the optical cavity, and a first cooling unit for cooling the optical cavity is provided on the substrate. The ultraviolet laser generating mechanism is also equipped with a Q-switching driver. The Q-switching driver and the pump source are both mounted on the substrate, located outside the optical cavity, and connected to the ultraviolet laser generating mechanism. A second cooling unit for cooling the Q-switching driver and the pump source is provided on the substrate. In this patent, the Q-switching driver and the pump source are located outside the optical cavity, which can achieve thermal isolation between the optical cavity and other heat sources, reduce the thermal impact of these heat sources on the optical cavity, effectively improve the working stability of the ultraviolet laser generating mechanism, and help to expand the application range of air-cooled ultraviolet lasers. The optical cavity, Q-switching driver, and pump source can be zoned for temperature control, which can save energy consumption.

[0004] Existing deep ultraviolet lasers possess core characteristics such as short wavelength, ultra-high single-photon energy, and high power energy density. Under long-term continuous high-power irradiation conditions, optical lenses are prone to lattice defects and photo-induced aging, requiring frequent replacement. When replacing existing optical lenses, the entire optical lens and the mounting bracket are usually replaced. After replacement, a significant amount of time is required to adjust the deflection angle of the optical lens, affecting work efficiency. Summary of the Invention

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A high-power deep ultraviolet laser generator includes a housing, within which a laser source and a mounting base are disposed;

[0007] The mounting base includes a mounting part for fixing optical lenses and an adjustment part for angle adjustment. The adjustment part is fixedly mounted on the housing, the mounting part is mounted on the adjustment part, and the adjustment part drives the mounting part to remain in a fixed position.

[0008] As described above, the adjustment unit includes an adjustment base mounted on the housing. A mounting cylinder for placing the mounting unit is fixed at the center of the adjustment base. The adjustment base can drive the mounting cylinder to rotate and adjust the placement angle of the mounting cylinder.

[0009] As described above, the opening of the mounting cylinder faces upward, and a limiting keyway is also provided at the opening of the mounting cylinder. The limiting keyway is used to restrict relative movement between the mounting part and the mounting cylinder.

[0010] As described above, the mounting part includes a connecting post adapted to the opening of the mounting cylinder, and a mounting frame is fixedly mounted on the connecting post. One side of the mounting frame is open, and the open mounting frame is used to mount optical lenses.

[0011] As described above, a limiting groove is provided on the inner side of the mounting frame, and flexible pressure plates are fixedly installed on the opposite side walls of the limiting groove. When the optical lens is inserted into the limiting groove, the two flexible pressure plates clamp the optical lens.

[0012] As described above, the mounting frame has a hollow cavity inside, and the cavity contains a heat dissipation unit. When the optical lens is installed in the mounting frame, the heat dissipation unit dissipates heat from the optical lens.

[0013] The aforementioned heat dissipation unit includes a heat dissipation bladder installed in the cavity. The heat dissipation bladder is connected to an inlet pipe and an outlet pipe. The inlet pipe and the outlet pipe are connected to an external water source through a pipeline. The external water source delivers cooling water to the heat dissipation bladder through the inlet pipe. The outlet pipe has a built-in solenoid valve.

[0014] As described above, the mounting frame has a connection notch on the side near the optical lens. The connection notch is located in the limiting groove. Multiple connection notches are connected to the cavity. A heat sink is provided in the connection notch. When the optical lens is working, one end of the heat sink abuts against the heat sink body, and the other end of the heat sink abuts against the side wall of the optical lens.

[0015] As described above, the heat sink includes a heat-conducting base and a contact heat-conducting sheet. The heat-conducting base is fixedly installed in the connection notch. An adjustment groove is provided on the side of the heat-conducting base near the optical lens. The contact heat-conducting sheet is installed at the opening of the adjustment groove. An inflatable expansion bladder is provided in the adjustment groove. Based on the expansion of the expansion bladder, the contact heat-conducting sheet is tightly attached to the side wall of the optical lens.

[0016] As described above, the heat-conducting base has a wrapping arc groove on the side near the heat dissipation bladder, and the wrapping arc groove wraps around the heat dissipation bladder.

[0017] In the above technical solution, the high-power deep ultraviolet laser generator provided by the present invention, by mounting the mounting part on the adjustment part, after the angle of the adjustment part is adjusted, the adjustment part will no longer make large angle changes. When the operator disassembles the optical lens, he / she only needs to remove the broken optical lens from the mounting part, without having to remove the entire mounting part and adjustment part. When the optical lens is installed later, the optical lens only needs to be installed on the mounting part, without having to adjust the angle of the optical lens from scratch, which greatly reduces the adjustment time of the optical lens and improves work efficiency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of a high-power deep ultraviolet laser generator provided in an embodiment of the present invention;

[0020] Figure 2 This is a top view of the high-power deep ultraviolet laser generator provided in an embodiment of the present invention.

[0021] Figure 3 A schematic diagram showing the arrangement of the laser source inside the housing according to an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the mounting part provided in an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the mounting part provided in an embodiment of the present invention;

[0024] Figure 6 This is a schematic diagram of the arrangement of the heat dissipation part within the mounting frame provided in an embodiment of the present invention;

[0025] Figure 7 This is a schematic diagram showing the state of a heat sink being installed within a mounting frame according to an embodiment of the present invention;

[0026] Figure 8 A schematic diagram of a preferred heat sink provided in an embodiment of the present invention.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Housing; 2. Laser source; 3. Mounting base; 4. Optical lens; 5. Mounting part; 51. Connecting column; 52. Mounting frame; 53. Limiting groove; 54. Flexible pressure plate; 55. Cavity; 56. Connecting notch; 6. Adjustment part; 61. Adjustment base; 62. Mounting cylinder; 63. Limiting keyway; 7. Heat dissipation part; 71. Heat dissipation bladder; 72. Water inlet pipe; 73. Water outlet pipe; 74. Solenoid valve; 8. Heat sink; 81. Thermal conductive base; 82. Contact thermal conductive sheet; 83. Adjustment groove; 84. Expansion bladder; 85. Enveloping arc groove. Detailed Implementation

[0029] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0030] In the description of this invention, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," and "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0031] like Figure 1 - Figure 8As shown in the figure, an embodiment of the present invention provides a high-power deep ultraviolet laser generator, including a housing 1. The housing 1 is rectangular in shape, and its sidewalls are detachable for easy replacement of accessories and adjustment of positions. A laser source 2 and a mounting base 3 are disposed inside the housing 1. The laser source 2 is used to emit laser light, and the mounting base 3 is used to mount a lens assembly. It should be noted that the number of mounting bases 3 is not unique and is adjusted according to the number of optical lenses 4 used. Obviously, when deep ultraviolet laser generation is required, other accessories are also needed, such as a laser power amplification system, a multi-stage nonlinear frequency doubling system, a temperature control system, and a servo and frequency stabilization control system. All components are installed inside the housing 1 (wherein, the device capable of emitting high-power deep ultraviolet laser is existing technology, and its principle will not be described in detail, nor will it be shown in subsequent figures). The mounting base 3 includes a mounting part 5 for fixing the optical lens 4 and an adjustment part 6 for angle adjustment. The adjustment part 6 is fixedly mounted on the housing 1, and the mounting part 5 is detachably mounted on the adjustment part 6. The mounting part 5 and the adjustment part 6 can be connected by plugging, snapping, bolting, or threaded connection (the connection relationship between the mounting part 5 and the adjustment part 6 is not limited). The adjustment part 6 drives the mounting part 5 to remain in a fixed position, and the optical lens 4 is mounted on the mounting part 5.

[0032] Specifically, in the initial state, the staff has already adjusted the placement angle of the adjustment unit 6, and the optical lens 4 located on the mounting unit 5 can guide the light path normally and correctly, ensuring the normal generation of high-power deep ultraviolet laser. When it is necessary to replace the optical lens 4, the staff can simply remove the optical lens 4 to be replaced from the mounting unit 5 without disassembling the entire mounting unit 5 and the adjustment unit 6. When installing the optical lens 4 later, it is only necessary to install the replaced optical lens 4 onto the mounting unit 5 without having to readjust the angle between the optical lens 4 and the laser beam emitted by the laser source 2 from scratch, thereby greatly reducing the adjustment time of the optical lens 4 and improving work efficiency.

[0033] Preferably, the adjusting part 6 includes an adjusting base 61 mounted on the housing 1. A mounting cylinder 62 for placing the mounting part 5 is fixed at the center of the adjusting base 61. The adjusting base 61 can drive the mounting cylinder 62 to rotate, adjusting the placement angle of the mounting cylinder 62. After the adjusting base 61 has completed the angle adjustment of the mounting cylinder 62, the operator can use bolts, pins, or magnetic attraction to restrict the continued rotation of the adjusting base 61, ensuring that the position of the mounting cylinder 62 on the adjusting base 61 is fixed. The opening of the mounting cylinder 62 faces upwards, and a limiting keyway 63 is also provided at the opening of the mounting cylinder 62. The limiting keyway 63 is used to restrict relative movement between the mounting part 5 and the mounting cylinder 62. The mounting part 5 includes components adapted to the opening of the mounting cylinder 62. A connecting post 51 has a protruding key on its side wall that mates with the limiting keyway 63. When the connecting post 51 is inserted into the mounting cylinder 62, the protruding key on the side wall of the connecting post 51 is also inserted into the limiting keyway 63. A mounting frame 52 is fixedly installed on the connecting post 51. The mounting frame 52 is U-shaped, with one side open. The open mounting frame 52 is used to install the optical lens 4. A limiting groove 53 is provided on the inner side of the mounting frame 52. Flexible pressure plates 54 are fixedly installed on the opposite side walls of the limiting groove 53. The distance between the two flexible pressure plates 54 is less than the thickness of the optical lens 4. When the optical lens 4 is inserted into the limiting groove 53, the two flexible pressure plates 54 clamp the optical lens 4, completing the installation of the optical lens 4.

[0034] Obviously, when the optical lens 4 is irradiated by laser for a long time, it will generate heat. The heat will accumulate on the optical lens 4 for a long time, which will easily cause micro-deformation of the optical lens 4, thereby changing the optical path and affecting the normal generation of high-power deep ultraviolet laser.

[0035] Preferably, to solve the above problems, the mounting frame 52 is hollow to form a cavity 55, and the cavity 55 is equipped with a heat dissipation part 7. When the optical lens 4 is installed in the mounting frame 52, the heat dissipation part 7 dissipates heat from the optical lens 4. The heat dissipation part 7 includes a heat dissipation bladder 71 installed in the cavity 55. The heat dissipation bladder 71 is connected to an inlet pipe 72 and an outlet pipe 73. The inlet pipe 72 and the outlet pipe 73 are connected to an external water source through pipes. The external water source delivers cooling water to the heat dissipation bladder 71 through the inlet pipe 72. The outlet pipe 73 is equipped with a solenoid valve 74.

[0036] Specifically, after the installation of the optical lens 4 is completed, the solenoid valve 74 is remotely controlled to close (remote control of the solenoid valve 74 is existing technology, and its principle will not be elaborated). Then, the external water source enters the heat dissipation bladder 71 through the inlet pipe 72. The heat dissipation bladder 71 expands when filled with water, and the expanded heat dissipation bladder 71 fills the entire cavity 55. As the optical lens 4 is exposed to laser for a long time and heat is accumulated, the heat is conducted to the heat dissipation bladder 71 through the mounting frame 52. In order to improve the heat dissipation efficiency, the solenoid valve 74 can be remotely controlled to open at this time. The cooling water in the heat dissipation bladder 71 returns to the external water source through the outlet pipe 73, so that the cooling water in the heat dissipation bladder 71 forms a circulating water, thereby improving the heat dissipation efficiency and preventing the optical lens 4 from thermally deforming due to continuous high temperature, which would cause the optical path of the high-power deep ultraviolet laser to deviate and affect the normal emission of the high-power deep ultraviolet laser.

[0037] Preferably, the mounting frame 52 has a connection notch 56 on the side near the optical lens 4. The connection notch 56 is located in the limiting groove 53. Multiple connection notches 56 are connected to the cavity 55. A heat sink 8 is provided in the connection notch 56. The heat sink 8 is made of thin copper plate. When the optical lens 4 is working, one end of the heat sink 8 abuts against the heat dissipation bag 71, and the other end of the heat sink 8 abuts against the side wall of the optical lens 4.

[0038] Specifically, preferably, in this embodiment, the heat sink 8 is arc-shaped and matches the outer contour of the optical lens 4. When the optical lens 4 is inserted into the mounting frame 52, the optical lens 4 wraps around the side wall of the optical lens 4 from the outside, and the other end of the heat sink 8 rests against the heat dissipation bag 71. The heat sink 8 can effectively conduct heat from the optical lens 4 to the heat dissipation bag 71, thereby achieving the purpose of heat dissipation of the optical lens 4.

[0039] Obviously, after the optical lens 4 is heated by deep ultraviolet high-power laser irradiation, it will undergo thermal micro-deformation and thermal expansion. A slight displacement will occur on the sidewall of the optical lens 4, resulting in a gap between the heat sink 8 and the optical lens 4. During operation, air will enter this gap. Air is a poor conductor of heat; if a gap exists, it will create thermal resistance, preventing heat from being effectively dissipated. This can easily lead to heat accumulation in the optical lens 4, further exacerbating thermal deformation. To solve this problem, the heat sink 8 includes a thermally conductive base 81 and a contact thermally conductive plate 82. The thermally conductive base 81 is fixedly installed on the connecting... Within the notch 56, an adjustment groove 83 is provided on the side of the heat-conducting base 81 near the optical lens 4. The contact heat-conducting sheet 82 is installed at the opening of the adjustment groove 83. An inflatable expansion bladder 84 is provided in the adjustment groove 83 (the expansion bladder 84 can be connected to a small air pump through a pipe and inflated by the small air pump). Based on the expansion of the expansion bladder 84, the contact heat-conducting sheet 82 is tightly attached to the side wall of the optical lens 4. An enclosing arc groove 85 is provided on the side of the heat dissipation bladder 71 near the heat dissipation bladder 71. The enclosing arc groove 85 encloses the heat dissipation bladder 71.

[0040] Specifically, after the optical lens 4 is installed into the mounting frame 52, the expansion bladder 84 inflates. The inflated expansion bladder 84 pushes the heat-conducting contact plate 82 towards the optical lens 4, causing the heat-conducting contact plate 82 to abut against the sidewall of the optical lens 4, thus achieving heat conduction and dissipation. When thermal deformation occurs at the edge of the optical lens 4, causing a gap between the edge of the optical lens 4 and the heat-conducting contact plate 82 that affects heat dissipation, the expansion bladder 84 continues to inflate, squeezing the heat-conducting contact plate 82 closer to the sidewall of the optical lens 4. This allows the contact heat-conducting sheet 82 to abut against the side wall of the optical lens 4, eliminating the gap between the optical lens 4 and the contact heat-conducting sheet 82, ensuring normal heat dissipation of the optical lens 4. Furthermore, the heat-conducting base 81 has a wrapping arc groove 85 on the side near the heat dissipation bag 71 for wrapping the heat dissipation bag 71. When heat on the optical lens 4 is conducted to the contact heat-conducting sheet 82 and the heat-conducting base 81, the heat dissipation bag 71 can quickly conduct away the heat on the heat-conducting base 81 and the contact heat-conducting sheet 82, improving the heat dissipation efficiency of the optical lens 4.

[0041] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-power deep ultraviolet laser generator, characterized in that, Includes a housing (1), inside which a laser source (2) and a mounting base (3) are disposed; The mounting base (3) includes a mounting part (5) for fixing an optical lens (4) and an adjustment part (6) for angle adjustment. The adjustment part (6) is fixedly mounted on the housing (1), and the mounting part (5) is mounted on the adjustment part (6). The adjustment part (6) drives the mounting part (5) to remain in a fixed position.

2. The high-power deep ultraviolet laser generator according to claim 1, characterized in that, The adjustment unit (6) includes an adjustment base (61) mounted on the housing (1). The center of the adjustment base (61) is fixed with a mounting cylinder (62) for placing the mounting unit (5). The adjustment base (61) can drive the mounting cylinder (62) to rotate and adjust the placement angle of the mounting cylinder (62).

3. A high-power deep ultraviolet laser generator according to claim 2, characterized in that, The opening of the mounting cylinder (62) faces upward, and a limiting keyway (63) is also provided at the opening of the mounting cylinder (62). The limiting keyway (63) is used to limit the relative movement between the mounting part (5) and the mounting cylinder (62).

4. A high-power deep ultraviolet laser generator according to claim 3, characterized in that, The mounting part (5) includes a connecting post (51) adapted to the opening of the mounting cylinder (62). A mounting frame (52) is fixedly mounted on the connecting post (51). One side of the mounting frame (52) is open. The open mounting frame (52) is used to mount optical lenses (4).

5. A high-power deep ultraviolet laser generator according to claim 4, characterized in that, The mounting frame (52) has a limiting groove (53) on its inner side. Flexible pressure plates (54) are fixedly installed on the opposite side walls of the limiting groove (53). When the optical lens (4) is inserted into the limiting groove (53), the two flexible pressure plates (54) clamp the optical lens (4).

6. A high-power deep ultraviolet laser generator according to claim 5, characterized in that, The mounting frame (52) has a hollow cavity (55) inside, and a heat dissipation part (7) is built into the cavity (55). When the optical lens (4) is installed in the mounting frame (52), the heat dissipation part (7) dissipates heat from the optical lens (4).

7. A high-power deep ultraviolet laser generator according to claim 6, characterized in that, The heat dissipation unit (7) includes a heat dissipation bladder (71) installed in the cavity (55). The heat dissipation bladder (71) is connected to an inlet pipe (72) and an outlet pipe (73). The inlet pipe (72) and the outlet pipe (73) are connected to an external water source through pipes. The external water source delivers cooling water to the heat dissipation bladder (71) through the inlet pipe (72). The outlet pipe (73) has a built-in solenoid valve (74).

8. A high-power deep ultraviolet laser generator according to claim 7, characterized in that, The mounting frame (52) has a connection notch (56) on the side near the optical lens (4). The connection notch (56) is located in the limiting groove (53). Multiple connection notches (56) are connected to the cavity (55). A heat sink (8) is provided in the connection notch (56). When the optical lens (4) is working, one end of the heat sink (8) abuts against the heat sink body (71), and the other end of the heat sink (8) abuts against the side wall of the optical lens (4).

9. A high-power deep ultraviolet laser generator according to claim 8, characterized in that, The heat sink (8) includes a heat-conducting base (81) and a contact heat-conducting sheet (82). The heat-conducting base (81) is fixedly installed in the connection notch (56). An adjustment groove (83) is provided on the side of the heat-conducting base (81) near the optical lens (4). The contact heat-conducting sheet (82) is installed at the opening of the adjustment groove (83). An inflatable expansion bladder (84) is provided in the adjustment groove (83). Based on the expansion of the expansion bladder (84), the contact heat-conducting sheet (82) is tightly attached to the side wall of the optical lens (4).

10. A high-power deep ultraviolet laser generator according to claim 9, characterized in that, The heat-conducting base (81) has a wrapping arc groove (85) on the side near the heat dissipation bladder (71), and the wrapping arc groove (85) wraps the heat dissipation bladder (71).

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