A secondary radiation device and a radiation apparatus

Abstract

The application discloses a secondary radiation device and a radiation equipment, relates to the radiation field, and aims to solve the problem that the prior art cannot generate a pure secondary radiation source. The secondary radiation device comprises a light beam shaping module and a radiation generation module, and the light beam shaping module is coaxially arranged with the radiation generation module. The light beam shaping module is used for shaping an incident pump light beam to output a first hollow light beam. The radiation generation module is used for nonlinearly processing the first hollow light beam to generate a secondary radiation source. Through the above scheme, the pure secondary radiation source can be generated.

Description

Technical Field

[0001] This invention relates to the field of radiation, and more particularly to a secondary radiation device and radiation equipment. Background Technology

[0002] A secondary radiation source is a type of radiation source that generates secondary radiation after being excited by primary radiation. Secondary radiation sources are widely used in various fields, such as medical imaging (e.g., X-ray intensifiers), industrial non-destructive testing, security inspection (e.g., baggage scanning), scientific research (e.g., synchrotron radiation experiments), and nuclear technology.

[0003] However, current mainstream secondary radiation sources are typically generated by incident pump light (such as ultrafast lasers) onto nonlinear materials, such as... Figure 1 As shown, after the incident pump light is incident on the nonlinear material 110, the secondary radiation source generated is collinear with the propagation direction of the incident pump light. That is, the secondary radiation source and the incident pump light propagate along the same straight path. The incident pump light is mixed in the secondary radiation source, resulting in insufficient purity of the secondary radiation source.

[0004] Therefore, improving the purity of secondary radiation sources is an urgent problem to be solved when generating secondary radiation sources. Summary of the Invention

[0005] This invention provides a secondary radiation device and radiation equipment for generating a pure secondary radiation source.

[0006] In a first aspect, the present invention provides a secondary radiation device, comprising: a beam shaping module and a radiation generation module, wherein the beam shaping module and the radiation generation module are coaxially arranged; wherein the beam shaping module is used to shape an incident pump beam to output a first hollow beam; and the radiation generation module is used to perform nonlinear processing on the first hollow beam to generate a secondary radiation source.

[0007] The secondary radiation device provided by this invention has a simple structure and is easy to implement. It can efficiently achieve automatic filtering of the secondary radiation source and incident pump light without the need for filtering devices such as filters or gratings, generating a high-purity secondary radiation source without energy loss. Therefore, the secondary radiation device provided by this invention can generate a high-purity secondary radiation source with high filtering efficiency.

[0008] In one possible implementation, the radiation direction of the secondary radiation source is the same as the incident direction of the pump beam.

[0009] In one possible implementation, a focusing module is also included, which is disposed in the optical path between the beam shaping module and the radiation generating module; the focusing module is used to focus the first hollow beam output by the beam shaping module onto the radiation generating module.

[0010] Using the above method, the focusing module can focus the first hollow beam output by the beam shaping module onto the radiation generation module. For example, the first hollow beam can be focused into a small spot, and this spot can be focused onto the radiation generation module, so that the radiation generation module can perform nonlinear processing on the small spot with relatively high light intensity to obtain a secondary radiation beam with the same radiation direction as the incident pump light.

[0011] In one possible implementation, the focusing module includes at least one of the following: a focusing lens, a mirror, a metasurface lens, or a metamaterial lens. This allows the incident light beam to be converged, thereby focusing the beam onto a single point.

[0012] In one possible implementation, the beam shaping module includes a first conical lens and a second conical lens, the second conical lens being located between the first conical lens and the radiation generating module, and being coaxially arranged with the first conical lens.

[0013] Based on this structure, after the incident pump beam enters the beam shaping module, it first illuminates the first conical lens, then is transmitted to the other side of the axis, and then enters the second conical lens, finally forming a hollow beam, which is the first hollow beam.

[0014] In one possible implementation, both the first and second conical lenses are convex conical lenses with their convex surfaces facing each other.

[0015] In one possible implementation, the first conical lens is a concave conical lens, and the second conical lens is a convex conical lens, with the convex surface of the convex conical lens facing the concave surface of the concave conical lens.

[0016] In one possible implementation, the first conical lens and / or the second conical lens include at least one of the following: a transmissive conical lens, a metasurface conical lens, a metamaterial conical lens, and a phase plate having the phase of the conical lens.

[0017] In one possible implementation, the radiation-generating module is made of a nonlinear material. This allows for a nonlinear effect on the incident beam, generating a secondary radiation source.

[0018] Secondly, the present invention provides a radiation device, including the secondary radiation device as described above.

[0019] In one possible implementation, the radiating device also includes a light source for emitting a pump beam to the secondary radiating device.

[0020] These or other implementations of the present invention will become more readily apparent in the following description of the embodiments. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 A schematic diagram illustrating the generation of a secondary radiation source in the prior art, provided as an embodiment of the present invention;

[0023] Figure 2 A schematic diagram illustrating a prior art method for improving the purity of a secondary radiation source, provided as an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of a secondary radiation device provided in an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of another secondary radiation device provided in an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of a hollow light beam provided in an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of a beam shaping module provided in an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of another beam shaping module provided in an embodiment of the present invention;

[0029] Figure 8 This is a schematic diagram of another beam shaping module provided in an embodiment of the present invention;

[0030] Figure 9 This is a schematic diagram of another beam shaping module provided in an embodiment of the present invention;

[0031] Figure 10 A schematic diagram of a focusing module provided in an embodiment of the present invention;

[0032] Figure 11 This is a schematic diagram of another focusing module provided in an embodiment of the present invention;

[0033] Figure 12 This is a schematic diagram of the structure of a radiation device provided in an embodiment of the present invention. Detailed Implementation

[0034] To make the objectives, technical solutions, and beneficial effects of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0035] The following explanations cover some of the terms used in this invention. It should be noted that these explanations are for the convenience of those skilled in the art and are not intended to limit the scope of protection claimed by this invention.

[0036] I. Secondary radiation sources.

[0037] A secondary radiation source is a new form of radiation produced when a beam of light emitted from a primary radiation source (such as a laser) shines onto a medium, due to the interaction between the medium and the beam. Secondary radiation sources have characteristics different from the beam emitted by the primary radiation source; these differences may include wavelength, frequency, energy level, or other unique features.

[0038] For example, the most common secondary radiation sources currently include the following:

[0039] 1) A high-harmonic radiation source is a radiation source generated by the interaction between a strong laser and matter. The beam emitted by this radiation source has a higher frequency than the original strong laser beam.

[0040] 2) A fluorescent radiation source is a radiation source generated by the excitation of matter. The direction and intensity of the light beam emitted by this radiation source change compared to the original laser beam.

[0041] 3) An X-ray radiation source is a radiation source produced by high-energy particles bombarding matter, and the beam emitted by the radiation source is X-rays.

[0042] Of course, there are other secondary sources of radiation, which will not be described in detail here.

[0043] II. Pump beam.

[0044] A pump beam is an incident light beam used in an optical system to excite or "pump" a medium. It is typically a high-energy beam. The characteristics of the pump beam, such as wavelength, power, and pulse duration, can be set according to specific application requirements to achieve optimal energy conversion efficiency.

[0045] III. Hollow Beam.

[0046] A hollow beam is a beam in which the light intensity in the middle region of a cross-section perpendicular to the direction of light propagation is zero or approximately zero, while the light intensity in the surrounding region is greater than zero.

[0047] The preceding text introduced some of the terms used in this invention. The following text introduces the possible application scenarios of this invention.

[0048] In one possible application scenario, the secondary radiation device proposed in this invention can be integrated into a radiation device, which can be a device used to generate a secondary radiation source.

[0049] Secondary radiation sources have wide and significant applications in scientific research and practical applications. For example, extreme ultraviolet (EUV) light is currently the most typical type of secondary radiation source. It is generated through high-order harmonic processes and is mainly used in the field of semiconductor lithography to manufacture smaller integrated circuits and improve chip integration. In some scenarios, it can also be used in materials characterization, biological imaging, and other detection fields to improve detection accuracy.

[0050] For example, terahertz waves are another typical secondary radiation source, possessing excellent penetrating power, especially through non-metallic materials. Currently, terahertz waves are used in various fields, such as high-speed wireless data transmission in communications, atmospheric monitoring and astronomical observation in remote sensing, and detecting items inside packages in security inspection. It is anticipated that they will have even more applications in the future.

[0051] Although secondary radiation sources have very good application prospects, the secondary radiation sources produced at this stage have the problem of insufficient purity. This is mainly caused by the collinear propagation problem between the secondary radiation source and the incident pump light that generates the secondary radiation source, as described in the background art description.

[0052] To improve the purity of secondary radiation sources, the industry has provided a solution, such as... Figure 2 As shown in the diagram, this scheme places a filter component 120 behind the nonlinear material 110. The filter component 120 can be a filter or a grating, etc. The filter component is mainly used to filter the secondary radiation source generated by the nonlinear material 110, filtering out the incident pump light to obtain a pure secondary radiation source.

[0053] However, while filtering out the incident pump light, the filter component 120 also filters out some of the secondary radiation source, resulting in some energy loss from the secondary radiation source. Moreover, with current manufacturing processes, the filtering accuracy of the filter component 120 is limited; it cannot completely filter out all the incident pump light from the secondary radiation source, thus limiting its effect on improving the purity of the secondary radiation source and failing to achieve the ideal level desired by the user.

[0054] In view of this, the present invention provides a secondary radiation device, which first uses a beam shaping module to shape the pump beam into a hollow beam, and then incident the hollow beam onto a nonlinear material. Compared with the method of directly incidenting the pump beam onto the nonlinear material, a purer secondary radiation source can be obtained.

[0055] The following is in conjunction with the appendix Figure 3 To be continued Figure 11 This paper provides a detailed description of the secondary radiation device and related solutions provided by the present invention.

[0056] It should be noted that the term "same" in the following text does not refer to absolute sameness, but rather to approximate sameness. As long as the difference between the two parameters is within the allowable deviation range of process error or manufacturing error, they can be considered to be the same.

[0057] Figure 3 This is a schematic diagram of a secondary radiation device provided in an embodiment of the present invention. The secondary radiation device 300 includes a beam shaping module 310 and a radiation generation module 320, which are coaxially arranged. The beam shaping module 310 is used to shape the incident pump beam to output a first hollow beam, and the radiation generation module 320 is used to perform nonlinear processing on the first hollow beam to generate a secondary radiation source.

[0058] Optionally, the radiation direction of the secondary radiation source is the same as the incident direction of the pump beam.

[0059] Optional, except Figure 1 In addition to the individual components shown, the secondary radiating device 300 may also include other components. For example, see [example provided]. Figure 4 The diagram shows a structural schematic of another secondary radiation device provided in an embodiment of the present invention. In this embodiment, the secondary radiation device 300 may further include a focusing module 330, which is located on the optical path between the beam shaping module 310 and the radiation generation module 320, for example, coaxially arranged with the beam shaping module 310 and the radiation generation module 320.

[0060] Based on this structure and positional relationship, the focusing module 330 can focus the first hollow beam output by the beam shaping module 310 onto the radiation generation module 320. For example, the first hollow beam can be focused into a small spot so that the radiation generation module 320 can perform nonlinear processing on the small spot with a relatively high light intensity to obtain a secondary radiation beam with the same radiation direction as the incident pump light direction.

[0061] Optional, please continue reading Figure 4After the radiation generation module 320 performs nonlinear processing on the first hollow beam, the remaining pump beam propagates in the same direction as the incident pump beam, and the size of the light plate on the cross section perpendicular to the light propagation direction tends to increase (i.e., the remaining pump beam propagates divergently).

[0062] In other words, after the incident pump beam is shaped into a first hollow beam by the beam shaping module 310, it is focused by the focusing module 330 onto the radiation generation module 320 and subjected to nonlinear processing. This yields a secondary radiation source with the same propagation direction as the incident direction of the pump beam, and a remaining pump beam that diverges in the form of a hollow beam with the same propagation direction as the incident direction of the pump beam. Thus, by automatically separating and outputting these two beams after passing through the radiation generation module 320, a secondary radiation source with high purity can be obtained. Therefore, the secondary radiation device in this invention has the function of automatically filtering the secondary radiation source.

[0063] The following is about Figure 4 The various functional components and structures involved are further described and explained to provide exemplary specific implementation schemes.

[0064] I. Beam Shaping Module.

[0065] In this invention, the function of the beam shaping module 310 is to shape the incident pump beam into a first hollow beam, which is a beam with a ring-shaped spot on a plane perpendicular to the light transmission direction. For example... Figure 5 As shown. This is understandable; please continue to refer to it. Figure 4 For example, the first hollow beam can be a parallel-propagating hollow beam, and its propagation direction is the same as that of the incident pump beam. In another possible implementation, the first hollow beam may not be a parallel-propagating hollow beam.

[0066] Optionally, the annular cross-sectional area of ​​the first hollow beam is adjustable in the direction of light transmission; that is, the cross-sectional size of the non-light portion of the first hollow beam can be adjusted by adjusting the beam shaping module 310.

[0067] Optionally, the beam shaping module 310 can be any optical device or combination capable of shaping the incident pump beam into a first hollow beam, including but not limited to: diffractive optical devices, binary optical devices, or metasurface devices, etc., without limitation.

[0068] Optional, please refer to Figure 6 The diagram shows a specific structural schematic of a beam shaping module 310 provided by the present invention. The beam shaping module 310 may include a first conical lens 311 and a second conical lens 312. The second conical lens 312 is located between the first conical lens 311 and the radiation generating module, and is coaxially arranged with the first conical lens 311.

[0069] Optionally, the first conical lens and / or the second conical lens include at least one of the following: a transmissive conical lens, a metasurface conical lens, a metamaterial conical lens, and a phase plate having a conical lens phase.

[0070] For ease of understanding, three specific implementation structures of the beam shaping module 310 are given below. However, it should be understood that the beam shaping module 310 can also adopt other implementation structures, and the following three implementation structures do not constitute a limitation on the structure of the beam shaping module 310.

[0071] Implement Structure 1

[0072] Please continue reading. Figure 6 In this example, both the first conical lens 311 and the second conical lens 312 are convex conical lenses, and the convex surfaces of the first conical lens 311 and the second conical lens 312 are opposite each other. For example, in one implementation, the first conical lens 311 and the second conical lens 312 are placed parallel to each other along the axis L of the beam shaping module 310 with their vertices P1 and P2 facing each other.

[0073] Based on this structure, after the incident pump beam enters the beam shaping module 310, it first illuminates the first conical lens 311, is focused by the first conical lens 311 in the direction of axis L, and is transmitted to the other side of axis L. Then it enters the second conical lens 312, and after the divergence effect of the second conical lens 312, it forms a parallel propagating hollow beam, which is the first hollow beam.

[0074] Optionally, the first conical lens 311 and the second conical lens 312 can have completely identical structures, such as... Figure 6 As shown. Identical structures ensure that the beams have identical optical parameters when propagating in the two conical lenses, thus ensuring the symmetry between the outgoing and incoming beams.

[0075] However, it should be understood that in some scenarios, if it is not necessary to obtain a perfectly symmetrical hollow beam, or if there are some special requirements, it is also possible to design two conical lens structures with different structures, such as different tilt angles or different sizes, etc., without limitation.

[0076] Optionally, the vertex P1 of the first conical lens 311 and the vertex P2 of the second conical lens 312 can be spaced a certain distance apart, that is, the two vertices P1 and P2 do not touch, such as... Figure 6 As shown. Alternatively, in other examples, two vertices P1 and P2 can also be in contact, such as... Figure 7 As shown.

[0077] It should be noted that whether two vertices P1 and P2 are in contact or not, and the distance between two vertices P1 and P2 when they are not in contact, needs to be determined based on the actual scenario.

[0078] Optionally, the distance between the vertex P1 of the first conical lens 311 and the vertex P2 of the second conical lens 312 can be variable. By adjusting the distance between P1 and P2, the shape of the annular cross-sectional area of ​​the first hollow beam can be adjusted to meet the needs of specific scenarios.

[0079] For example, in one instance, the distance between two vertices P1 and P2 can be set based on the principle of making the width of the outgoing beam of the beam shaping module 310 the same as that of the incoming beam. If the pump beam is relatively wide, and / or the tilt angle of the conical lens is relatively small, then the incoming beam usually needs to travel a longer optical path to make the outgoing beam the same width as the incoming beam. In this case, a larger distance can be set between the two vertices P1 and P2. Conversely, if the pump beam is relatively narrow, and / or the tilt angle of the conical lens is relatively large, then the incoming beam needs to travel a shorter optical path to make the outgoing beam the same width as the incoming beam. In this case, a smaller distance or even contact between the two vertices P1 and P2 can be designed.

[0080] In another example, the user may need outgoing and incoming beams of unequal width. In this case, the spacing between the two vertices P1 and P2 can be designed based on the user's actual needs. This invention does not impose any specific limitations on this.

[0081] Implementation Structure 2

[0082] Please see Figure 8 This diagram illustrates the specific structure of another beam shaping module 310 provided by the present invention. In this example, the first conical lens is a concave conical lens 313, and the second conical lens is a convex conical lens 314. The convex surface of the convex conical lens 314 faces the concave surface of the concave conical lens 313. The convex conical lens 314 is located between the concave conical lens 313 and the focusing module 330, and the convex conical lens 314, the concave conical lens 313, and the focusing module 330 are coaxially arranged.

[0083] It should be noted that the spacing between lenses can be set according to actual application requirements. Figure 8 The example given is that the width of the outgoing beam is smaller than the width of the incoming beam. However, in practical applications, the width of the outgoing beam can also be equal to or greater than the width of the incoming beam. This invention does not impose any specific limitations on this.

[0084] Furthermore, the lens can be modified to become other types of lenses or lens combinations, as long as the function of beam shaping can be achieved. This invention does not impose any specific limitations on this.

[0085] Implement Structure 3:

[0086] Please see Figure 9 This diagram illustrates the specific structure of another beam shaping module 310 provided by the present invention. In this example, the first conical lens is a concave conical lens 315, and the second conical lens is a convex conical lens 316. The convex surface of the convex conical lens 316 faces away from the concave conical lens 315, and the concave surface of the concave conical lens 315 faces away from the convex conical lens 316. The convex conical lens 316 is located between the concave conical lens 315 and the focusing module 330, and the convex conical lens 316, the concave conical lens 315, and the focusing module 330 are coaxially arranged.

[0087] It should be noted that the spacing between lenses can be set according to actual application requirements. Figure 9 The example given is that the width of the outgoing beam is greater than the width of the incoming beam. However, in practical applications, the width of the outgoing beam can also be equal to or less than the width of the incoming beam. This invention does not impose any specific limitations on this.

[0088] Furthermore, the lens can be modified to become other types of lenses or lens combinations, as long as the function of beam shaping can be achieved. This invention does not impose any specific limitations on this.

[0089] It should be noted that the above three implementation structures are all described using the example of a relatively large hollow region of the first hollow beam. However, this invention does not limit the size of the central control region of the first hollow beam; for example, it can be a large hollow area in the middle or a very small hollow area in the middle.

[0090] In some scenarios, when the hollow portion is so small as to be negligible, the first hollow beam is approximately equal to the solid beam.

[0091] II. Focus Module.

[0092] In this invention, the focusing module 130 is used to focus the first hollow beam. For example, it focuses the first hollow beam onto the axis of the radiation generating module and a very small area nearby, such as within 0.5 mm, so that the beam appears as a small spot.

[0093] Optionally, the focusing module 330 can be any optical device with focusing function, including but not limited to: lenses, diffractive optical devices, binary optical devices, or metasurface devices. When the focusing module 330 is a lens, it can include at least one of the following: focusing lens, mirror, metasurface lens, metamaterial lens.

[0094] For example, please refer to a specific example. Figure 10The diagram shows a possible structure of a focusing module provided by the present invention. In this example, the focusing module 330 can be a focusing lens, such as a convex lens, which can converge the incident light beam and thus focus the light beam to a point.

[0095] For another specific example, please refer to [link to example]. Figure 11 The diagram illustrates another possible structure of a focusing module provided by the present invention. In this example, the focusing module 130 may include a reflector. There may be one or more reflectors; when there are multiple reflectors, they combine to achieve beam converging.

[0096] For example, in another specific example, the focusing module 130 may include a spherical mirror. There may be one or more spherical mirrors. When there are multiple spherical mirrors, they are combined to achieve the beam converging effect.

[0097] Understandably, the focusing module 330 can also be other lenses or lens groups, and there are no restrictions here.

[0098] III. Radiation Generation Module.

[0099] In this invention, the radiation generation module 320 performs nonlinear processing on the incident beam to generate a secondary radiation source. For example, the incident first hollow beam is focused onto the radiation generation module 320, and a secondary radiation source is generated through nonlinear interaction.

[0100] Optionally, the radiation generating module 320 can be made of any material with nonlinear processing capabilities. These materials can be gases, transparent solid materials, liquid materials, etc., that have optical nonlinear properties to the incident beam. These materials can exert nonlinear effects on the incident beam to generate secondary radiation sources. For details, please refer to the prior art, which will not be elaborated here.

[0101] The above content provides a detailed description of the structure of the secondary radiation device provided by this invention. Based on the structure of this secondary radiation device, a secondary radiation source with high purity can be generated. The secondary radiation source can be a radiation source of any waveguide, such as a high-order harmonic wave containing extreme ultraviolet light, or a terahertz wave, or a proton beam, etc., without limitation.

[0102] To facilitate understanding, the following example uses a secondary radiation source containing extreme ultraviolet light and high-order harmonics as an example to illustrate how to use the secondary radiation device provided by this invention to generate such high-order harmonics.

[0103] In this example, it is assumed that the incident pump beam is an ultrafast laser from a multi-pass Ti:sapphire amplifier, with a pulse width of 30 fs and a repetition rate of 1 kHz. It is also assumed that the beam shaping module 310 is... Figure 6 The structure shown has a focusing module 330 using a spherical mirror and a radiation generating module 320 filled with neon gas.

[0104] Based on these assumptions, the application of a secondary radiation device includes the following steps:

[0105] The first step is to incident the ultrafast laser onto the beam shaping module 310, which is composed of two conical lenses 311 and 312, to generate a hollow femtosecond laser beam.

[0106] In the second step, the hollow femtosecond laser beam is focused by the focusing module 330, whose focusing surface is a spherical mirror, and then enters the radiation generating module 320 filled with neon gas.

[0107] The third step involves a nonlinear interaction between the focused femtosecond laser beam and the neon gas, generating high-order harmonics containing extreme ultraviolet light.

[0108] In the fourth step, the generated high-order harmonics are emitted along the direction of the incident laser, while the original incident laser is emitted in a hollow and divergent manner. Therefore, at the output end of the radiation generation module 320 filled with neon gas, high-purity and high-efficiency high-order harmonics that are automatically separated from the pump incident laser in space can be obtained.

[0109] Based on the above examples, it can be seen that by using the secondary radiation device provided by the present invention, the secondary radiation source propagates along the incident direction, while the pump laser is a hollow beam after the focal point and diverges. In this way, the incident pump laser and the secondary radiation beam are automatically separated in space, which is equivalent to achieving automatic filtering in space.

[0110] The secondary radiation device provided by this invention has a simple structure and is easy to implement. It can efficiently achieve automatic filtering of the secondary radiation source and incident pump light without the need for filtering devices such as filters or gratings, generating a high-purity secondary radiation source without energy loss. Therefore, the secondary radiation device provided by this invention can generate a high-purity secondary radiation source with high filtering efficiency.

[0111] It is understood that the above examples are merely illustrative of the specific application of the secondary radiation device provided by this invention, using the generation of higher harmonics as an example. However, all secondary radiation sources that can be generated through collinear nonlinear processes can be generated using the method or device of this invention, and this invention does not limit them.

[0112] Based on the secondary radiation device described above, the present invention can also provide a radiation device, such as... Figure 12As shown. The radiation device 1000 includes the secondary radiation device 300 provided in any of the above embodiments, such as... Figures 3 to 11 The secondary radiation device 300 shown in any of the attached figures. Figure 11 China is to include Figure 6 The secondary radiation device 100 shown is an example.

[0113] Optional, such as Figure 11 As shown, the radiation device 1000 also includes a light source 1110, which is used to emit a pump beam to the secondary radiation device 300.

[0114] Optionally, the light source 1110 can be a point light source, a line light source, or a surface light source, etc., and can be selected according to the application requirements to obtain the best performance.

[0115] Optionally, the pump beam emitted by the light source 1110 is a parallel beam. A parallel beam is easier to generate a small spot through the beam shaping module and focusing module, which facilitates the automatic separation of the secondary radiation source and the incident pump light.

[0116] Optionally, the pump beam can be a femtosecond laser or a picosecond laser.

[0117] The aforementioned radiation device 1000 can be an instrument or device in various optical systems, laser systems, or spectral analysis systems, including but not limited to: optical microscopes, optical interferometers, optical imaging systems, femtosecond lasers, solid-state lasers, fiber lasers, spectrometers, spectrophotometers, Raman spectrometers, synchrotron radiation sources, plasma diagnostic systems, laser surgery systems, optical coherence tomography scanners, etc.

[0118] Furthermore, the aforementioned radiation device 1000 can be applied to multiple fields. For example, in the scientific research field, the radiation device 1000 can be used for pump detection experiments (to improve the signal-to-noise ratio), spectral analysis, and materials characterization. In the industrial field, the radiation device 1000 can be applied to optical precision manufacturing, semiconductor manufacturing, and micro-nano fabrication. In the medical field, the radiation device 1000 can be used for medical imaging and radiotherapy; in the environmental monitoring field, it can be used for atmospheric monitoring and pollutant detection. These are just a few examples.

[0119] Based on the exemplary embodiments described in this invention, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of the appended claims. Furthermore, although the disclosures in this invention are presented by way of one or more exemplary examples, it should be understood that each aspect of these disclosures can also constitute a complete implementation on its own.

[0120] It should be noted that the brief descriptions of terminology in this invention are merely for the convenience of understanding the embodiments described below, and are not intended to limit the embodiments of this invention. Unless otherwise stated, these terms should be understood in their ordinary and common meaning.

[0121] In this invention, the terms "first," "second," etc., used in the specification, claims, and accompanying drawings are used to distinguish similar or related objects or entities, and do not necessarily imply a specific order or sequence, unless otherwise specified. It should be understood that such terms can be used interchangeably where appropriate, for example, in situations where the invention can be implemented in an order other than those given in the illustrations or description of embodiments.

[0122] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover but not exclusively include, for example, a product or device that includes a series of components is not necessarily limited to those that are explicitly listed, but may include other components that are not explicitly listed or that are inherent to such product or device.

[0123] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A secondary radiation device, characterized in that, include: A beam shaping module and a radiation generating module, wherein the beam shaping module and the radiation generating module are coaxially arranged; The beam shaping module is used to shape the incident pump beam and output a first hollow beam. The radiation generation module is used to perform nonlinear processing on the first hollow beam to generate a secondary radiation source.

2. The apparatus as claimed in claim 1, characterized in that, The radiation direction of the secondary radiation source is the same as the incident direction of the pump beam.

3. The apparatus as described in claim 1, characterized in that, It also includes a focusing module, which is disposed in the optical path between the beam shaping module and the radiation generating module; The focusing module is used to focus the first hollow beam output by the beam shaping module onto the radiation generating module.

4. The apparatus as described in claim 3, characterized in that, The focusing module includes at least one of the following: Focusing lenses, reflecting mirrors, metasurface lenses, metamaterial lenses.

5. The apparatus according to any one of claims 1 to 4, characterized in that, The beam shaping module includes a first conical lens and a second conical lens. The second conical lens is located between the first conical lens and the radiation generating module, and is coaxially arranged with the first conical lens.

6. The apparatus as claimed in claim 5, characterized in that, Both the first conical lens and the second conical lens are convex conical lenses, with their convex surfaces facing each other.

7. The apparatus as claimed in claim 5, characterized in that, The first conical lens is a concave conical lens, and the second conical lens is a convex conical lens, with the convex surface of the convex conical lens facing the concave surface of the concave conical lens.

8. The apparatus as claimed in claim 5, characterized in that, The first conical lens and / or the second conical lens include at least one of the following: Transmissive conical lenses, metasurface conical lenses, metamaterial conical lenses, phase plates with conical lens phases.

9. The apparatus as claimed in any one of claims 1 to 4, characterized in that, The radiation generating module is made of a nonlinear material.

10. A radiation device, characterized in that, Includes a secondary radiation device as described in any one of claims 1-9.

11. The device as claimed in claim 10, characterized in that, It also includes the light source; The light source is used to emit the pump beam to the secondary radiation device.

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