Flow direction adjustable ion wind generating device and method

Abstract

The application discloses a kind of flow direction adjustable ion wind generating device and adjusting method, belong to gas flow control technical field, the device includes: closed pipeline;Two groups of electrode pairs, respectively symmetrically arranged on the upstream and downstream of pipeline, each group of electrode pairs contains high-voltage upstream electrode and lower electrode, for corona discharge to generate ion wind;Electric control driving unit, output adjustable voltage waveform;Flow detection unit, real-time acquisition gas flow signal.Electric control driving unit and flow detection unit constitute closed loop control loop, according to feedback signal real-time adjustment voltage waveform parameter, so that output gas flow is stably preset value.The application utilizes symmetric double electrode to actively offset air pressure disturbance, combined with closed loop control to realize the direct accurate regulation of mass flow, with fast response speed, high control precision, wide range of micro-regulation, no mechanical moving parts, long service life, low power consumption and other advantages, suitable for semiconductor manufacturing, atomic layer deposition and other high-end processes.

Description

Technical Field

[0001] This invention relates to the field of gas flow control technology, and in particular to an ion wind generator and method with adjustable flow direction and flow rate. Background Technology

[0002] Ion wind generators generate airflow based on the principle of corona discharge. Their operation involves the ionization of air molecules under a high-voltage electric field, producing charged ions. These ions migrate directionally under the drive of the electric field and exchange momentum with neutral gas molecules, thus forming an airflow output without mechanical moving parts. Benefiting from quiet operation, low energy consumption, and miniaturized structure, these devices have been applied in semiconductor manufacturing for wafer electrostatic elimination, heat dissipation management of electronic components, and dust removal from precision instrument surfaces. However, current mainstream ion wind devices generally employ an open-loop voltage control mechanism, where the electrode voltage amplitude is manually set or adjusted according to a fixed program to change the airflow speed. This method has a fundamental flaw: the system cannot sense the actual changes in the output airflow in real time. When encountering fluctuations in ambient temperature or air pressure, dust or oxide layers forming on the electrode surface due to long-term discharge, or shifts in the resistance characteristics of the airflow channel, the mass flow rate of the ion wind will drift significantly, while the driving voltage lacks automatic compensation capability. Some improvement schemes attempt to introduce rotor flowmeters or throttling valves for flow monitoring, but these volumetric flow measurement devices are highly sensitive to temperature and pressure changes, limiting their measurement accuracy. Furthermore, the adjustment process still requires manual intervention, failing to establish a complete feedback control chain. In addition, existing devices mostly employ a single electrode pair structure, which can only generate unidirectional ion wind thrust within the pipeline and cannot actively suppress pressure disturbances within the pipeline, making the flow output highly susceptible to upstream and downstream pressure fluctuations. The core problem lies in the fact that existing technologies fail to organically combine real-time gas flow detection with dynamic adjustment of the driving voltage, lacking a closed-loop feedback mechanism based on actual flow data. This makes it difficult for the device to maintain stable airflow output under environmental interference or electrode performance changes. Summary of the Invention

[0003] The purpose of this application is to provide an ion wind generator and method with adjustable flow direction, which can realize real-time stable control of gas flow, effectively suppress flow drift caused by environmental interference, and improve the accuracy and reliability of flow regulation.

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an ion wind generator with adjustable flow direction, comprising: A closed pipe, with an airflow channel formed inside; At least one set of electrode pairs is arranged in the closed pipe, each set of electrode pairs including an upstream electrode that can be subjected to high voltage and a grounded downstream electrode for generating ion wind through corona discharge; An electronically controlled drive unit, electrically connected to the upstream and downstream electrodes, is configured to output an adjustable voltage waveform to drive the electrode pair to discharge; and, A flow detection unit is installed on the airflow channel of the closed pipe to collect gas flow signals in real time. The electronically controlled drive unit and the flow detection unit form a closed-loop control circuit. The electronically controlled drive unit adjusts the voltage waveform parameters applied to the electrode pair in real time according to the flow signal fed back by the flow detection unit, so as to stabilize the gas flow rate output by the ion wind generator at a preset value.

[0005] By adopting the above technical solution, the flow-direction adjustable ion wind generator, through the introduction of a closed-loop control loop composed of a flow detection unit and an electronic control drive unit, realizes real-time monitoring and automatic adjustment of the ion wind gas flow rate. As a result, the device can effectively overcome the problem of unstable flow rate when the traditional open-loop control method is affected by environmental disturbances or changes in electrode state, ensuring that the gas flow rate is always maintained at the preset value. This improves the flow control accuracy and stability of the ion wind device in applications such as electrostatic elimination of semiconductor wafers, heat dissipation of electronic components, and dust removal of precision instruments.

[0006] The present invention is further configured such that the voltage waveform output by the electronically controlled drive unit is a pulse width modulation wave, and the gas flow rate is continuously adjusted by adjusting at least one parameter among the voltage amplitude, frequency and duty cycle of the pulse width modulation wave.

[0007] By adopting the above technical solution, the electronic control drive unit uses a pulse width modulation waveform as its output, and allows flexible adjustment of at least one parameter of the waveform, including voltage amplitude, frequency, and duty cycle. This enables precise control of the corona discharge process. This multi-parameter, continuously adjustable characteristic allows for precise and smooth adjustment of the ion wind generation intensity and flow rate. Compared to simple voltage switching or coarse voltage level adjustment, the flexible control of the pulse width modulation waveform and its parameters significantly improves the continuity and accuracy of gas flow regulation. This ensures that the device can maintain the gas flow rate at the preset value more stably and accurately under closed-loop control, and effectively cope with external disturbances, achieving rapid response and smooth transition.

[0008] The present invention is further configured such that: the electronically controlled drive unit is embedded with PID control logic or fuzzy PID control logic to tune the parameters according to the flow feedback signal.

[0009] By adopting the above technical solution, the electronically controlled drive unit can adjust the voltage waveform parameters applied to the electrode pair based on a more intelligent and robust control strategy. When there is a deviation between the real-time gas flow signal fed back by the flow detection unit and the preset flow value, the embedded PID control logic or fuzzy PID control logic can accurately calculate the required pulse width modulation wave parameter adjustment amount according to the magnitude, accumulation and trend of the error. This enables the electronically controlled drive unit to respond to flow changes more quickly and accurately, effectively suppress system overshoot, eliminate steady-state error, and improve the system's anti-interference capability. Therefore, compared with simple feedback regulation, the use of PID or fuzzy PID control logic can significantly improve the control accuracy and stability of the flow direction adjustable ion wind generator, ensuring that the gas flow can quickly and smoothly reach and maintain the preset value, thereby meeting the application scenarios with higher requirements for flow control accuracy.

[0010] The present invention is further configured such that: two sets of electrode pairs are provided, and the two sets of electrode pairs are arranged in a mirror symmetrical manner with the mid-section of the closed pipe as the plane of symmetry; the electronically controlled drive unit is configured to apply a coordinated drive voltage to the two sets of electrode pairs to actively counteract the gas pressure disturbance in the pipe.

[0011] By adopting the above technical solution, the mirror-symmetrical arrangement of the two sets of electrodes provides a structural balance basis for the generation of ion wind, enabling the generation of symmetrical or controllable asymmetrical ion wind fields on both sides of the cross-section in the pipe. The electronically controlled drive unit applies a coordinated driving voltage to the two sets of electrodes, which can actively and accurately adjust the intensity and direction of the ion wind according to the real-time detected gas pressure disturbance. This allows for the rapid generation of a counteracting force when a disturbance occurs, effectively suppressing the influence of gas pressure fluctuations in the pipe on the gas flow rate. This significantly improves the flow control accuracy and stability of the flow-direction adjustable ion wind generator under complex operating conditions, ensuring that the gas flow rate can be maintained more accurately at the preset value, and reducing flow fluctuations and control lag caused by external disturbances.

[0012] The present invention is further configured such that: the upstream electrode is a linear electrode or a needle electrode, and the downstream electrode is a mesh electrode.

[0013] By adopting the above technical solution, configuring the upstream electrode as a linear or needle-shaped electrode can utilize its significant tip discharge effect to efficiently and stably generate corona discharge at a lower driving voltage, thereby generating a high-density ion flow. This provides sufficient and controllable driving force for gas flow regulation. Simultaneously, configuring the downstream electrode as a mesh electrode, its porous structure effectively collects ions while minimizing mechanical obstruction to the airflow and helps to form a uniform electric field distribution within the airflow channel. This ensures that the ion wind can act uniformly on the entire airflow cross-section, avoiding the problem of excessively strong or weak local thrust. When the two sets of electrode pairs are arranged in a mirror-symmetrical manner and a cooperative driving voltage is applied by the electronically controlled drive unit, this optimized electrode structure ensures that the two sets of electrode pairs generate an efficient and uniform ion wind, thereby responding more accurately and quickly to the commands of the electronically controlled drive unit and actively counteracting gas pressure disturbances in the pipeline. Therefore, this device can achieve fine and continuous regulation of gas flow, effectively suppress external disturbances, and significantly improve the accuracy of flow control and the robustness of the system.

[0014] The present invention is further configured such that: the device is a fully electrically controlled structure without any mechanical moving parts, and there are no mechanical flow regulating components in the airflow channel.

[0015] By adopting the above technical solution, the device, with its all-solid-state electric drive structure and the absence of any mechanical flow regulation components in the airflow channel, completely avoids the problems of wear, noise, vibration, and response lag found in traditional mechanical flow regulation devices. This results in higher reliability and a longer service life, while enabling faster and more precise flow response and regulation. Furthermore, the absence of mechanical components effectively prevents airflow contamination and ensures the cleanliness of the airflow channel, which is particularly important for applications with extremely high cleanliness requirements, such as semiconductor manufacturing, medical devices, and precision instruments. The entire flow regulation process is achieved entirely through the action of an electric field, making the device structure more compact, reducing maintenance costs, and enabling it to adapt to harsher working environments.

[0016] The present invention is further configured such that: an insulating layer is provided on the inner surface of the pipe wall of the closed pipe, or a grounded conductor layer is provided in the circumferential area of ​​the inner surface of the pipe wall, so as to affect the charge distribution near the pipe wall and stabilize the ion wind flow field in the mainstream area of ​​the pipe center.

[0017] By adopting the above technical solutions, whether it is using an insulating layer to accumulate charge to form a repulsive electric field or using a grounded conductor layer to discharge charge and maintain a stable electric field, the core purpose is to effectively prevent the ion wind from diffusing to the pipe wall, thereby concentrating the ion wind in the central area of ​​the pipe to form a stable and efficient mainstream area. This spatial constraint helps to improve the transmission efficiency of the ion wind, reduce ion loss and energy loss, and ensure the accuracy and stability of flow regulation. Especially in devices that are all-solid-state electrically driven and have no mechanical flow regulation components, this technical solution can significantly improve the reliability and performance of the device, enabling the flow direction adjustable ion wind generator to output the preset gas flow more accurately and stably, effectively overcoming the flow field instability problems caused by ion wind diffusion and charge accumulation on the pipe wall.

[0018] The present invention is further configured such that: the flow detection unit is a mass flow sensor, and the closed-loop control loop realizes direct control of the gas mass flow rate.

[0019] By adopting the above technical solution, the flow detection unit is specifically defined as a mass flow sensor, and the closed-loop control loop enables direct control of the gas mass flow rate. This effectively solves the problem of insufficient accuracy of traditional volumetric flow control when gas density changes. Since the mass flow sensor can directly measure the mass flow rate of the fluid, it eliminates the influence of environmental factors such as temperature and pressure on gas density. Therefore, the electronic control drive unit can adjust based on a more accurate mass flow feedback signal. This allows the device to accurately stabilize the output gas mass flow rate at the preset value, greatly improving the control accuracy and stability of the flow-direction adjustable ion wind generator in applications requiring precise material delivery, such as in precision chemical reactions, medical gas delivery, or semiconductor processes. This ensures that the actual amount of delivered material always meets the requirements, thereby improving the reliability and performance of the entire system.

[0020] The present invention is further configured as: an ion airflow regulation method, comprising the following steps: The real-time gas flow signal in the pipeline is obtained through the flow detection unit. The electronically controlled drive unit compares the real-time gas flow signal with a preset flow value and generates a deviation value. Based on the deviation value, the electronically controlled drive unit adjusts the voltage waveform parameters output to the upstream electrode in the electrode pair according to the preset closed-loop control logic. The adjusted voltage waveform is applied to the upstream electrode to adjust the gas flow rate to the preset flow rate value.

[0021] By adopting the above technical solution, the device can automatically sense the flow deviation and adjust the driving voltage in real time, thereby maintaining a constant output of gas flow under environmental disturbance conditions, solving the problem of insufficient control accuracy caused by the lack of real-time feedback in traditional technology.

[0022] This invention, employing the above technical solutions, possesses significant technical advantages: The core of the device lies in its closed-loop control mechanism. The electronically controlled drive unit and the flow detection unit form a closed-loop control circuit. During equipment operation, the user sets a desired preset value for gas mass flow rate. The flow detection unit continuously feeds back the real-time collected gas mass flow rate signal to the electronically controlled drive unit. Upon receiving the flow signal, the electronically controlled drive unit compares it with the preset flow rate value and calculates the current flow deviation. For example, when the ambient temperature rises, causing a change in gas density, or when slight dust accumulation occurs on the electrode surface due to long-term operation, causing the ion air flow rate to deviate from the preset value, the flow detection unit immediately senses this change. The electronically controlled drive unit has embedded PID control logic. Based on this deviation value, it adjusts and tunes the voltage waveform parameters applied to the electrode pair in real time. For example, the voltage waveform output by the electronically controlled drive unit is a pulse width modulation (PWM) wave. By adjusting this pulse... At least one parameter of the voltage amplitude, frequency, and duty cycle of the width-modulated wave is used to continuously regulate the gas flow rate. In this way, even when the ambient temperature, pressure fluctuates, or the electrode state changes, the electronically controlled drive unit can automatically compensate and stabilize the gas flow rate at a preset value, avoiding the flow drift problem under traditional open-loop control. In addition, since the device uses two sets of electrode pairs arranged in a mirror symmetric manner, the electronically controlled drive unit is configured to apply a coordinated drive voltage to these two sets of electrode pairs. When external air pressure disturbances occur in the pipeline, such as pressure fluctuations upstream or downstream, the flow detection unit will capture the resulting flow rate change. The electronically controlled drive unit will not only adjust the overall flow rate, but also coordinately adjust the drive voltage of the two sets of electrode pairs according to the direction and magnitude of the disturbance to actively counteract the impact of these air pressure disturbances on the airflow stability. This has significant advantages over existing devices that only use a single set of electrode structures and lack the ability to actively suppress disturbances.

[0023] Compared to existing open-loop systems that rely on manual voltage adjustment or series rotor flowmeters for coarse indication, the device in this example achieves direct, real-time, and automatic control of gas mass flow rate through a closed-loop control circuit composed of a flow detection unit and an electronically controlled drive unit. This feedback mechanism can effectively cope with flow drift caused by environmental changes and electrode aging, ensuring the stability of the output airflow. In addition, the use of two symmetrically arranged electrode pairs and the application of a cooperative drive voltage enables the device to actively counteract gas pressure disturbances in the pipeline, further improving the robustness of the flow output, which is not available in existing single-electrode structure devices. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the ion wind generator; Figure 2 It is a mesh electrode; Figure 3 It is a linear electrode.

[0025] The parts referred to by the numbers in the above figures are as follows: 1. Enclosed pipe; 2. Upstream electrode; 3. Downstream electrode; 4. PIV laser monitor. Detailed Implementation

[0026] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0027] Example: Traditional ion wind generators generally employ an open-loop voltage control mechanism during airflow generation, which cannot detect changes in the actual state of the output airflow in real time. When encountering fluctuations in ambient temperature or air pressure, dust accumulation or oxidation on the electrode surface, or deviations in the resistance characteristics of the airflow channel, the mass flow rate of the ion wind will drift. Furthermore, the driving voltage lacks automatic compensation capability, and the accuracy of existing flow measurement equipment is limited and requires manual intervention for adjustment. The failure to construct a complete feedback control link makes it difficult for the device to maintain a constant airflow output.

[0028] This application proposes an ion wind generator with adjustable flow direction. It utilizes two symmetrically arranged electrode pairs within a closed pipe, and an electronically controlled drive unit and a flow detection unit to form a closed-loop control circuit. The electronically controlled drive unit dynamically adjusts the voltage waveform parameters applied to the electrode pairs based on the real-time gas flow signal fed back from the flow detection unit, thereby achieving constant control of the output gas flow rate. This overcomes the limitations of existing technologies, such as unstable flow and lack of automatic compensation. The device includes: A closed pipe, with an airflow channel formed inside; Two sets of electrode pairs are arranged symmetrically upstream and downstream of the closed pipe, respectively. Each set of electrode pairs includes an upstream electrode that can be applied with a higher voltage and a grounded downstream electrode, which are used to generate ion wind through corona discharge. An electronically controlled drive unit, electrically connected to the upstream and downstream electrodes, configured to output an adjustable voltage waveform to drive the electrode pair to discharge; and.

[0029] A flow detection unit is installed on the airflow channel of the closed pipe to collect gas flow signals in real time. The flow detection unit is a mass flow sensor, which includes a Fluke Molbox dynamic flow meter for real-time acquisition of outlet gas flow and a PIV particle image velocimetry system for visualizing the flow field and verifying the flow velocity distribution. The PIV particle image velocimetry system is a PIV laser monitor. This closed-loop control loop realizes direct control of gas mass flow. The electronically controlled drive unit and the flow detection unit form a closed-loop control circuit. The electronically controlled drive unit adjusts the voltage waveform parameters applied to the electrode pair in real time according to the flow signal fed back by the flow detection unit, so that the gas flow rate output by the device is constant at a preset value.

[0030] The device includes a closed duct that forms an airflow channel inside. The closed duct can be made of various materials and structures, for example, it can be a duct with a circular or rectangular cross-section, and its material can be glass or transparent acrylic. The inner surface of the duct can be polished to reduce airflow resistance. In one implementation, the duct can be made of a transparent material to facilitate observation of the internal flow field. In another implementation, the duct can be made of an opaque material, but an observation window can be provided inside it.

[0031] The device has two sets of electrode pairs, arranged upstream and downstream of the closed pipe respectively. Each set of electrode pairs includes an upstream electrode that can be applied with a higher voltage and a grounded downstream electrode. These electrode pairs are arranged symmetrically to generate an ion wind through corona discharge. The upstream electrode can be composed of a single wire or multiple wires, or multiple needle tip arrays. The downstream electrode can be a metal plate or metal mesh. For example, the upstream electrode can be a thin metal wire, and the downstream electrode can be a metal plate parallel to the inner wall of the pipe. The arrangement of the electrode pairs ensures that corona discharge can be effectively generated in the airflow channel when voltage is applied, thereby driving gas flow.

[0032] The device includes an electronically controlled drive unit electrically connected to the upstream and downstream electrodes. The electronically controlled drive unit is configured to output an adjustable voltage waveform to drive the electrode pair to discharge. The voltage waveform can be a higher DC voltage or a higher AC voltage. For example, the electronically controlled drive unit can be a higher DC power supply whose output voltage is adjusted by a variable resistor, or the unit can be a higher AC power supply whose output frequency is adjusted by an oscillator. By adjusting these voltage waveform parameters, the intensity of the corona discharge can be changed, thereby affecting the thrust of the ion wind.

[0033] The device also includes a flow detection unit located in the airflow channel of a closed pipeline for real-time acquisition of gas flow signals. This flow detection unit is specifically a mass flow sensor, which can directly measure the mass flow rate of the gas. The mass flow sensor may include a Fluke Molbox dynamic flow meter for real-time acquisition of outlet gas flow, which provides transient flow data. In addition, to visualize and verify the flow field, the mass flow sensor may also include a PIV particle image velocimetry system, which is specifically a PIV laser monitor. The PIV laser monitor injects tracer particles into the airflow and illuminates it with a laser sheet light source, then captures particle images with a high-speed camera to analyze the velocity distribution. This closed-loop control loop achieves direct control of the gas mass flow rate through these components.

[0034] The electronically controlled drive unit and the flow detection unit form a closed-loop control circuit. In this circuit, the electronically controlled drive unit adjusts the voltage waveform parameters applied to the electrode pair in real time according to the flow signal fed back by the flow detection unit, so that the gas flow rate output by the device is constant at a preset value. For example, when the flow detection unit detects that the actual flow rate is lower than the preset value, the electronically controlled drive unit can increase the voltage amplitude applied to the electrode pair to enhance the ion wind thrust, thereby increasing the gas flow rate. Conversely, when the actual flow rate is higher than the preset value, the electronically controlled drive unit can decrease the voltage amplitude. This real-time feedback adjustment mechanism ensures that the device can maintain a constant gas flow output under various operating conditions.

[0035] The flow-direction adjustable ion wind generator of this embodiment achieves real-time control of gas mass flow rate by constructing a closed-loop control circuit composed of an electronically controlled drive unit and a mass flow sensor. This device can overcome the flow drift problem caused by fluctuations in ambient temperature, air pressure, or changes in electrode performance under the traditional open-loop control mechanism. By dynamically adjusting the voltage waveform parameters of the electrode pair, the device can automatically compensate for external disturbances and maintain a constant airflow output, thereby providing a controllable airflow environment in applications such as semiconductor manufacturing, electronic heat dissipation, and precision dust removal.

[0036] In some of the above embodiments, the flow rate and direction adjustable ion wind generator achieves gas flow rate stability through a closed-loop control circuit. That is, the electronic control drive unit adjusts the voltage waveform parameters applied to the electrode pair in real time according to the flow signal fed back by the flow detection unit. However, in practical applications, how to achieve fine and continuous adjustment of gas flow rate and effectively respond to dynamic changes in the system to ensure rapid flow rate stability is a problem that needs to be further solved.

[0037] In this regard, this application further proposes that the voltage waveform output by the electronically controlled drive unit is a pulse width modulation wave. By adjusting at least one parameter among the voltage amplitude, frequency and duty cycle of the pulse width modulation wave, the gas flow rate can be continuously adjusted. The electronically controlled drive unit has embedded PID control logic or fuzzy PID control logic to tune the parameters according to the flow feedback signal.

[0038] Specifically, the voltage waveform output by the electronically controlled drive unit is designed as a pulse width modulation (PWM) waveform. PWM is a technique that controls the average power output by periodically switching the power supply. By changing the pulse width, the average output voltage or current can be effectively changed, thereby achieving precise control over the corona discharge intensity. This waveform is usually generated by a microcontroller, digital signal processor, or dedicated PWM generator, providing an efficient and flexible energy transfer method that facilitates precise adjustment of the ion wind generation.

[0039] To achieve continuous regulation of gas flow, the electronically controlled drive unit can adjust at least one of the following parameters of the pulse width modulation wave: voltage amplitude, frequency, and duty cycle. Voltage amplitude refers to the peak voltage of the pulse, which directly affects the energy of corona discharge and ion generation efficiency. Frequency refers to the number of pulse repetitions per second, which can affect the response speed and stability of the ion wind. Duty cycle refers to the ratio of the high-level duration to the total cycle time within one cycle. By changing the duty cycle, the average voltage applied to the electrode pair can be changed linearly, thereby smoothly controlling the intensity of corona discharge and the amount of ion wind generated. The electronically controlled drive unit adjusts these parameters in real time through internal control algorithms to adapt to different flow requirements and response characteristics, thus providing multi-dimensional adjustment means to make the control of ion wind flow more precise and continuous.

[0040] Furthermore, the electronically controlled drive unit embeds PID control logic or fuzzy PID control logic to tune parameters based on the flow feedback signal. PID control logic is a widely used feedback control algorithm that adjusts the output by calculating the proportional, integral, and derivative terms to make the system output as close as possible to the target value. It has the advantages of eliminating steady-state errors, improving response speed, and strong anti-interference ability. Fuzzy PID control logic introduces fuzzy logic on the basis of traditional PID, enabling it to handle uncertainties and nonlinearities in the system, thereby improving the robustness and adaptability of control. These control logics are usually embedded in the microcontroller or DSP of the electronically controlled drive unit in the form of software algorithms. The controller receives the real-time flow signal fed back by the flow detection unit, compares it with the preset flow value, calculates the deviation, and then calculates the pulse width modulation wave parameters that need to be adjusted, such as amplitude, frequency, and duty cycle, according to the PID or fuzzy PID algorithm, and outputs them to the PWM generator, thereby ensuring the accuracy and stability of closed-loop control.

[0041] By employing the aforementioned technical solution, the voltage waveform output by the electronically controlled drive unit is designed as a pulse width modulation (PWM) wave, allowing adjustment of at least one parameter among its voltage amplitude, frequency, and duty cycle. This application provides the ion wind generator with multi-dimensional and refined flow regulation capabilities. When the real-time flow signal fed back by the flow detection unit deviates from the preset value, the PID control logic or fuzzy PID control logic embedded in the electronically controlled drive unit can intelligently tune the corresponding parameters of the PWM wave according to the deviation. For example, by adjusting the duty cycle, the average voltage applied to the electrode pair can be continuously changed, thereby smoothly controlling the corona discharge intensity and the amount of ion wind generated. By adjusting the frequency, the dynamic response characteristics of the ion wind can be optimized. This refined parameter adjustment based on PWM wave, combined with advanced PID or fuzzy PID control algorithms, enables the device to achieve continuous, precise, and rapid regulation of gas flow, effectively overcoming the limitations of traditional fixed voltage or simple switching control in terms of flow dynamic response and stability. This ensures that the gas flow can remain stable at the preset value under various operating conditions, thereby improving the control accuracy and adaptability of the device.

[0042] The two sets of electrode pairs are arranged in a mirror symmetrical manner with the mid-section of the closed pipe as the plane of symmetry; the electronically controlled drive unit is configured to apply a coordinated drive voltage to the two sets of electrode pairs to actively counteract the gas pressure disturbance in the pipe. The upstream electrode is a linear electrode or a needle electrode, and the downstream electrode is a mesh electrode.

[0043] Specifically, the two sets of electrodes are arranged in a mirror-symmetric manner with the mid-section of the closed pipe as the plane of symmetry. This means that the positions of the two sets of electrodes in the closed pipe are symmetrical about a cross-section of the pipe center. This symmetry ensures that the device can form a balanced electric field and flow field when generating ion wind, providing a physical basis for actively canceling gas pressure disturbances by coordinating the driving voltage. For example, if the upstream electrode pair is located at a distance L upstream of the mid-section, the downstream electrode pair will be located at a distance L downstream of the mid-section, and the structure and orientation of the two are also mirror-symmetric.

[0044] The electronically controlled drive unit is configured to apply a coordinated drive voltage to the two sets of electrode pairs to actively counteract air pressure disturbances in the pipeline. This means that the electronically controlled drive unit no longer simply provides independent drive voltages to the two sets of electrode pairs, but intelligently coordinates the voltage output of the two sets of electrode pairs based on the flow signal fed back by the flow detection unit and the information on possible internal disturbances. This coordinated drive can include, but is not limited to, applying voltage waveforms with phase differences, voltage waveforms with different amplitudes, or voltage waveforms with different duty cycles to the two sets of electrode pairs. In this way, the device can generate an additional ion wind that is opposite to the direction of the disturbance or counteracts the effect of the disturbance, thereby actively eliminating or reducing air pressure fluctuations inside the pipeline and maintaining a stable state in the airflow channel.

[0045] The upstream electrode is either a wire electrode or a needle electrode. Wire electrodes are usually composed of one or more thin metal wires, such as tungsten wires or stainless steel wires, which generate a large number of ions by ionizing air molecules under high voltage. Needle electrodes are composed of one or more sharp metal needles, which generate ions through the tip discharge effect. Both types of electrodes are highly efficient ion sources commonly used in ion wind generators because of the high electric field strength at their tips or thin wires, which can efficiently induce corona discharge and thus generate sufficient ions at relatively low voltage.

[0046] The downstream electrode is a mesh electrode, which is usually made of conductive material and grounded. Its function is to collect ions generated by the upstream electrode, form an ion current, and allow the ion wind to pass through. The mesh structure can minimize the obstruction to the airflow, while effectively completing the collection of charge and the closure of the circuit, ensuring the smooth flow of the ion wind. The density of the mesh and the choice of materials will affect the ion collection efficiency and fluid resistance.

[0047] By arranging two sets of electrodes in a mirror-symmetrical manner with the mid-section of the closed pipe as the plane of symmetry, and applying a coordinated driving voltage to them by the electronic control drive unit, the device can actively sense and counteract the air pressure disturbance inside the pipe. This coordinated driving mechanism enables the device to not only stably output the preset flow rate, but also effectively suppress air pressure fluctuations caused by uneven internal airflow or changes in the external environment, thereby significantly improving the accuracy and response speed of flow control. In addition, by using linear or needle-shaped electrodes as upstream electrodes and mesh electrodes as downstream electrodes, the efficiency of corona discharge and the generation of ion wind are optimized, ensuring that the device maintains good energy conversion efficiency and structural compactness while achieving high-precision flow regulation.

[0048] The device features a fully solid-state electrically driven structure with no mechanical flow regulation components within the airflow channel. An insulating layer is installed on the inner surface of the enclosed pipe wall, or a grounded conductive layer is placed in the circumferential area of ​​the inner surface to influence the charge distribution near the pipe wall and stabilize the ion wind flow field in the central mainstream area of ​​the pipe. The fully solid-state electrically driven structure means that its drive and control components are entirely composed of electronic components, containing no mechanical moving parts. The generation, regulation, and control of the ion wind are all achieved through the action of the electric field, avoiding the wear, noise, inertia, and response lag problems that may exist in traditional mechanical drive systems. This structure typically features high reliability and long service life. With its long lifespan, low power consumption, and fast response, it is suitable for applications requiring precise, stable, and undisturbed flow control. Furthermore, there are no mechanical flow regulating components within the airflow channel; that is, no mechanical devices such as valves, baffles, or fan blades are installed in the gas flow path to change the airflow state through physical movement. The generation and regulation of ion wind rely entirely on the effect of the electric field on gas molecules, thus achieving non-contact flow control. This design eliminates the obstruction and disturbance of airflow by mechanical components, reduces fluid resistance, improves energy conversion efficiency, and avoids mechanical wear and maintenance requirements, resulting in a more compact structure and smoother operation.

[0049] To further optimize the flow field distribution of the ion wind, an insulating layer is installed on the inner surface of the closed pipe wall. This insulating layer aims to prevent the charges in the ion wind from directly contacting the pipe wall and causing unnecessary charge discharge or short circuits. The insulating layer effectively isolates the charges, allowing them to be transported within the pipe according to a preset electric field distribution, thereby maintaining the stability and directionality of the ion wind. The selection of insulating materials typically considers their dielectric strength, corrosion resistance, temperature resistance, and compatibility with the gas medium, such as polytetrafluoroethylene, ceramic coatings, or glass. Alternatively, a grounded conductive layer can be installed in the circumferential area of ​​the inner surface of the pipe wall. This aims to control the charge distribution on the pipe wall by providing a clear charge discharge path. When charges in the ion wind approach the conductive layer, the conductive layer can effectively guide the charges to ground, preventing disordered charge accumulation on the wall surface and thus avoiding local electric field distortion that could affect the uniformity and stability of the ion wind flow field. This grounding conductor layer can be composed of a thin metal film, a conductive coating, or a metal mesh. Its arrangement and grounding effect are crucial to the confinement of the ion wind. By setting an insulating layer or a grounded conductor layer on the inner surface of the pipe wall, the charge behavior near the pipe wall can be precisely controlled. This allows for spatial confinement of the mainstream ion wind in the center of the pipe by accumulating or discharging charges. When an insulating layer is set, charges will accumulate locally on the wall, forming an electric field that interacts with the mainstream ion wind in the center. This will squeeze or guide the mainstream ion wind, concentrating it in the center of the pipe. When a grounded conductor layer is set, charges can be effectively discharged, preventing the accumulation of charges on the wall from interfering with the mainstream ion wind. At the same time, the electric field boundary formed by the conductor layer itself can also confine the ion wind. Both methods aim to optimize the flow field distribution of the ion wind, making it more concentrated and stable along the center of the pipe, thereby improving flow transmission efficiency and control accuracy.

[0050] The ion wind generator proposed in this application achieves all-solid-state electric drive, eliminating all mechanical flow regulation components in the airflow channel. This significantly improves the reliability, response speed, and service life of the device, reduces operating noise and maintenance requirements, and makes the flow regulation process more stable and undisturbed. At the same time, by setting an insulating layer or a grounded conductor layer on the inner surface of the closed pipe wall, the charge behavior near the pipe wall can be effectively controlled. The insulating layer can promote the accumulation of charge in the internal space of the pipe, forming a squeezing effect on the ion wind in the central mainstream area, making it flow more concentrated along the center of the pipe. The grounded conductor layer can effectively discharge the wall charge, avoiding the interference of disordered accumulation on the flow field, and constrain the ion wind through its electric field boundary. This precise control of charge accumulation or discharge allows the ion wind to be effectively constrained in the mainstream area in the center of the pipe, thereby improving the transmission efficiency and flow field stability of the ion wind. This ensures that the gas flow rate can reach the preset value more accurately and stably under the closed-loop control loop, further optimizing the overall performance and flow control accuracy of the device.

[0051] This application further proposes the response mechanism and regulation strategy of EHD ion wind, specifically including: First, multiphysics coupling theory modeling and transient response analysis are performed. This includes constructing a three-dimensional unsteady coupled model that incorporates electric field, charge transport, and hydrodynamics. In this model, in addition to the electric field equation and charge transport equation, a Coulomb force source is introduced into the Navier-Stokes equation. This is the core coupling term for the electric field to generate momentum injection into the flow field, used to accurately describe the generation mechanism of ion wind. For the geometry of the closed pipe, wall insulation or grounding boundary conditions are set to simulate the accumulation effect of charge on the pipe wall and its squeezing and modulation effect on the mainstream ion wind in the center of the pipe. By applying voltage excitation, the millisecond-level characteristic response time of ion wind from induction, acceleration to stable development is calculated, thus providing a theoretical time constant for subsequent ultra-fast regulation.

[0052] Secondly, microscopic visualization verification of the confined flow field in the pipeline was conducted. This was achieved by constructing an EHD test pipeline and a PIV observation platform. A transparent acrylic experimental pipeline was used, employing a wire and mesh electrode scheme. Two sets of discharge electrodes were symmetrically configured upstream and downstream for combined flow velocity control and pressure disturbance elimination. During the experiment, non-chargeable nanoscale tracer particles were released, irradiated with a sheet light source, and a high-speed camera captured the flow field evolution sequence at the moment of discharge. Subsequently, the flow velocity distribution along the central axis, the near-wall flow velocity gradient, and the evolution characteristics of the microvortex structure were extracted and cross-compared with the flow velocity field and momentum source term calculated by theoretical modeling to correct the fluid calculation boundary parameters and ensure the accuracy of the theoretical model. Then, EHD testing and control algorithm development were carried out. This included constructing an EHD flow characteristic test platform and installing a Fluke device downstream. The Molbox dynamic flow meter utilizes a high-bandwidth oscilloscope and a microammeter to simultaneously acquire the transient volt-ampere characteristics, pulse discharge current, and flow signal of corona discharge. Based on this, it measures the macroscopic gas flow rate generated by EHD corona discharge under pulse width modulation excitation with different voltage amplitudes, duty cycles, and frequencies. Finally, combining theoretical and experimental data, a multivariate mapping matrix of electrical signal-momentum source-output flow is established, and a low-energy-consumption, disturbance-resistant multi-electrode collaborative control algorithm is developed.

[0053] A deep understanding of the physical mechanism and dynamic characteristics of EHD ion wind provides a more refined and efficient control strategy for flow-direction adjustable ion wind generators. Multiphysics coupling theory modeling and transient response analysis provide a theoretical basis for the rapid response of ion wind, enabling the device to achieve millisecond-level flow regulation. Microscopic visualization verification of the confined flow field in the pipeline calibrates and optimizes the theoretical model through experimental methods, ensuring the model's accurate prediction of actual flow field behavior. Based on this, the development of EHD testing and control algorithms, combining theoretical and experimental data, establishes a precise mapping relationship and designs a low-energy, disturbance-resistant multi-electrode collaborative control algorithm. This enables the device to not only stabilize gas flow in the closed-loop control loop but also achieve extremely fast, precise, stable, and efficient control of gas flow, effectively responding to external disturbances and significantly improving the overall performance and application range of the device.

[0054] In response, this application further proposes a method for adjusting the flow rate and direction of an adjustable ion wind, applied to the aforementioned adjustable flow rate and direction ion wind generator. The method includes the following steps: S1: The real-time gas flow signal in the pipeline is acquired through a flow detection unit. The flow detection unit is installed on the airflow channel of the closed pipeline to collect gas flow signals in real time. Specifically, the flow detection unit is a mass flow sensor, which includes a Fluke Molbox dynamic flow meter for real-time acquisition of outlet gas flow and a PIV particle image velocimetry system for visualizing the flow field and verifying the velocity distribution. The PIV laser monitor configured in the PIV particle image velocimetry system can provide high-precision gas mass flow data through the Fluke Molbox dynamic flow meter, while the PIV particle image velocimetry system is used to visualize the flow field and verify the velocity distribution, thereby providing more comprehensive flow information. Through these sensors, the system can obtain the precise state of the current gas flow in the pipeline, providing accurate input data for subsequent flow regulation.

[0055] S2: The electronically controlled drive unit compares the real-time gas flow signal with the preset flow value and generates a deviation value. After receiving the real-time gas flow signal from the flow detection unit, the electronically controlled drive unit compares it with the target flow value preset by the system. This preset flow value is the stable flow rate that the user or system expects to achieve. The comparison result will generate a deviation value, which reflects the difference between the current actual flow rate and the target flow rate. For example, if the real-time flow rate is higher than the preset value, the deviation value is positive; if it is lower than the preset value, the deviation value is negative. This deviation value is the basis for the closed-loop control system to make adjustments.

[0056] S3: Based on the deviation value and according to the preset closed-loop control logic, the electronically controlled drive unit adjusts the voltage waveform parameters output to the upstream electrode in the electrode pair. According to the deviation value generated in the previous step and combined with its internal preset closed-loop control logic, the electronically controlled drive unit calculates the amount of adjustment required for the driving voltage waveform parameters of the electrode pair. The electronically controlled drive unit has embedded PID control logic or fuzzy PID control logic to tune the parameters according to the flow feedback signal. These voltage waveform parameters may include at least one of voltage amplitude, frequency, and duty cycle. For example, if the real-time flow is lower than the preset value, the control logic may instruct to increase the voltage amplitude or duty cycle to enhance the ion wind effect, thereby increasing the flow. Conversely, it will decrease these parameters. This step is the core of realizing dynamic flow regulation.

[0057] S4: The adjusted voltage waveform is applied to the upstream electrode to adjust the gas flow rate to the preset flow rate value. The electronic control drive unit will apply the adjusted voltage waveform according to the calculation results to the upstream electrode in the electrode pair. After the high voltage is applied, the upstream electrode will generate corona discharge, which will generate ion wind. By precisely adjusting the applied voltage waveform parameters, the intensity and direction of the ion wind can be controlled, thereby changing the gas flow rate in the closed pipe. This process is continuous. The system will continuously acquire the flow signal, calculate the deviation, and adjust the voltage until the gas flow rate stabilizes at the preset target value.

[0058] This application enables precise, dynamic, and stable control of the output gas flow rate of an ion wind generator. First, the real-time acquisition of precise flow signals provides a reliable basis for control. Second, by comparing the real-time flow rate with a preset value and generating a deviation, the system can accurately identify the gap between the current flow rate and the target flow rate. More importantly, based on preset closed-loop control logic such as PID or fuzzy PID, the electronic control drive unit can intelligently adjust the voltage waveform parameters applied to the upstream electrode, thereby achieving fine control of the momentum generated by the ion wind. This active, real-time feedback adjustment mechanism allows the device to respond quickly to flow changes, effectively suppress external disturbances, and ensure that the gas flow rate can quickly converge and stabilize at the preset value, significantly improving the accuracy and stability of flow control. It avoids the lag and wear problems caused by traditional mechanical flow adjustment components, achieving all-solid-state, high-response flow regulation.

[0059] This device provides a solution comprising a closed duct with an internal airflow channel. To ensure the stable generation and transmission of ion wind, an insulating layer is provided on the inner surface of the duct wall. This helps to create spatial constraint on the mainstream ion wind in the center of the duct by accumulating or dissipating charge.

[0060] Inside the closed pipe, two sets of electrode pairs are symmetrically arranged, located upstream and downstream respectively. Each set of electrode pairs consists of an upstream electrode that can apply high voltage and a grounded downstream electrode. Specifically, the upstream electrode is a linear electrode, while the downstream electrode is a mesh electrode. These two sets of electrode pairs are arranged in a mirror-symmetric manner with the mid-section of the closed pipe as the plane of symmetry. This not only generates ion wind through corona discharge, but more importantly, it allows the electronically controlled drive unit to apply a coordinated drive voltage to the two sets of electrode pairs, thereby actively canceling the gas pressure disturbance in the pipe and ensuring the stability of the airflow output. Compared with devices that use only a single electrode pair, this significantly improves the anti-interference capability.

[0061] The electronically controlled drive unit is electrically connected to the upstream and downstream electrodes. Its core function is to output an adjustable voltage waveform to drive the electrode pair to discharge. The voltage waveform output by the electronically controlled drive unit is a pulse width modulation wave. By adjusting at least one parameter of the voltage amplitude, frequency, and duty cycle of the pulse width modulation wave, the gas flow rate can be continuously adjusted. The electronically controlled drive unit has embedded PID control logic to tune the parameters according to the flow feedback signal, which provides a foundation for achieving precise flow control.

[0062] To sense and adjust gas flow rate in real time, a flow detection unit is installed in the airflow channel. This flow detection unit is a mass flow sensor, which includes a Fluke Molbox dynamic flow meter for real-time acquisition of outlet gas flow rate and a PIV particle image velocimetry system for visualizing the flow field and verifying the velocity distribution. The PIV particle image velocimetry system is equipped with a PIV laser monitor. The Fluke Molbox dynamic flow meter can provide high-precision gas mass flow rate data, which contrasts with the shortcomings of traditional volumetric flow meters that are sensitive to temperature and pressure, ensuring measurement accuracy under environmental changes.

[0063] The electronically controlled drive unit and the flow detection unit together form a closed-loop control circuit. When the user sets a target flow rate value, the flow detection unit will collect the gas flow rate signal in the pipeline in real time and feed it back to the electronically controlled drive unit. The electronically controlled drive unit compares the real-time flow rate signal with the preset target value and generates a deviation value. Based on this deviation value, the electronically controlled drive unit adjusts the voltage amplitude, frequency, or duty cycle of the pulse width modulation wave applied to the electrode pair in real time according to its embedded PID control logic. For example, if the actual flow rate is detected to be lower than the target value, the electronically controlled drive unit will increase the voltage amplitude or duty cycle accordingly to enhance the corona discharge intensity, thereby increasing the momentum injection of the ion wind until the gas flow rate stabilizes at the preset value, and vice versa.

[0064] The entire device is an all-solid-state electrically driven structure with no mechanical flow regulation components in the airflow channel. This means that the device operates without noise or wear and does not introduce additional particulate matter. This is crucial for environments with extremely high cleanliness requirements, such as semiconductor manufacturing. Through this closed-loop control circuit, the device can automatically compensate for flow drift caused by fluctuations in ambient temperature, air pressure, or changes in electrode performance, and always maintain a stable gas mass flow output. This solves the fundamental problem that existing open-loop control systems cannot sense and automatically compensate for flow changes in real time.

Claims

1. An ion wind generator with adjustable flow rate and direction, characterized in that, include: A closed pipe, with an airflow channel formed inside; At least one set of electrode pairs is arranged in the closed pipe, each set of electrode pairs including an upstream electrode that can be subjected to high voltage and a grounded downstream electrode for generating ion wind through corona discharge; An electronically controlled drive unit, electrically connected to the upstream and downstream electrodes, is configured to output an adjustable voltage waveform to drive the electrode pair to discharge; and, A flow detection unit is installed on the airflow channel of the closed pipe to collect gas flow signals in real time. The electronically controlled drive unit and the flow detection unit form a closed-loop control circuit. The electronically controlled drive unit adjusts the voltage waveform parameters applied to the electrode pair in real time according to the flow signal fed back by the flow detection unit, so as to stabilize the gas flow rate output by the ion wind generator at a preset value.

2. The ion wind generator with adjustable flow rate and direction according to claim 1, characterized in that, The voltage waveform output by the electronically controlled drive unit is a pulse width modulation wave. By adjusting at least one parameter among the voltage amplitude, frequency, and duty cycle of the pulse width modulation wave, the gas flow rate can be continuously adjusted.

3. The ion wind generator with adjustable flow rate and direction according to claim 2, characterized in that, The electronically controlled drive unit is embedded with PID control logic or fuzzy PID control logic to tune the parameters based on the flow feedback signal.

4. The ion wind generator with adjustable flow rate and direction according to claim 1, characterized in that, The electrode pairs are provided in two sets, and the two sets of electrode pairs are arranged in a mirror symmetrical manner with the mid-section of the closed pipe as the plane of symmetry; the electronically controlled drive unit is configured to apply a coordinated drive voltage to the two sets of electrode pairs to actively counteract the air pressure disturbance in the pipe.

5. The ion wind generator with adjustable flow rate and direction according to claim 4, characterized in that, The upstream electrode is a linear electrode or a needle electrode, and the downstream electrode is a mesh electrode.

6. The ion wind generator with adjustable flow rate and direction according to claim 1, characterized in that, The device is a fully electrically controlled structure with no mechanical moving parts, and there are no mechanical flow regulating components in the airflow channel.

7. The ion wind generator with adjustable flow rate and direction according to claim 6, characterized in that, The inner surface of the closed pipe wall is provided with an insulating layer, or a grounded conductor layer is provided in the circumferential area of ​​the inner surface of the pipe wall, so as to affect the charge distribution near the pipe wall and stabilize the ion wind flow field in the mainstream area of ​​the pipe center.

8. The ion wind generator with adjustable flow rate and direction according to claim 1, characterized in that, The flow detection unit is a mass flow sensor, and the closed-loop control loop enables direct control of the gas mass flow rate.

9. An ion wind regulation method, applied to the flow rate and direction adjustable ion wind generator according to any one of claims 1 to 8, characterized in that, Includes the following steps: The real-time gas flow signal in the pipeline is obtained through the flow detection unit. The electronically controlled drive unit compares the real-time gas flow signal with a preset flow value and generates a deviation value. Based on the deviation value, the electronically controlled drive unit adjusts the voltage waveform parameters output to the upstream electrode in the electrode pair according to the preset closed-loop control logic. The adjusted voltage waveform is applied to the upstream electrode to adjust the gas flow rate to the preset flow rate value.

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