Direct drive motor device for semiconductor equipment

Abstract

The application discloses a direct drive motor device for a semiconductor device, comprising a shell assembly, a stator assembly and a rotor assembly, the rotor assembly comprising a hollow rotating shaft, a rotor member and a hollow rotating adapter disc coaxially arranged at the front end of the hollow rotating shaft and detachably connected with the hollow rotating shaft, a first rotating channel and a first ring table are arranged in the middle of a front cover plate, a first compression ring is detachably connected to the rear side of the front cover plate, a second ring table is concavely arranged on the outer circumferential side of the front end of the hollow rotating shaft, the hollow rotating adapter disc comprises a second compression ring rotatably arranged in the first rotating channel, the outer ring of a front bearing is fixedly connected with the first ring table and clamped between the first ring table and the first compression ring in the axial direction of the first ring table, and the inner ring of the front bearing is fixedly connected with the second ring table and clamped between the second ring table and the second compression ring in the axial direction of the second ring table. The direct drive motor device is convenient to disassemble and maintain in the later period, has a flat structure as a whole, is compact in structure arrangement, can be applied to small-volume semiconductor devices and is more widely applicable.

Description

Technical Field

[0001] This invention relates to the field of motor devices, and more particularly to a direct-drive motor device for semiconductor devices. Background Technology

[0002] Drive units for ultra-precision semiconductor equipment, such as lithography machines, wafer handling robots, and precision motion platforms for semiconductor inspection, are often designed with direct-drive motors due to space constraints. Existing direct-drive motors typically have a monolithic housing, with the load directly connected to the shaft. Disassembly and maintenance require disassembling the entire motor unit, which is cumbersome and prone to damaging internal precision components, significantly increasing maintenance costs and downtime. Furthermore, the front bearing of such direct-drive motors requires a separate bearing cap to restrict axial movement, resulting in a large overall axial height and making them unsuitable for use in small-volume semiconductor devices with limited space. Summary of the Invention

[0003] This invention addresses the shortcomings of existing technologies by providing a direct-drive motor device for semiconductor equipment. It is easy to disassemble and maintain, and features a flat overall structure with a compact layout, making it suitable for small-volume semiconductor equipment and thus having a wider range of applications.

[0004] The technical solution adopted in this invention is as follows: A direct-drive motor device for semiconductor equipment includes a housing assembly, a stator assembly, and a rotor assembly. The housing assembly includes a main body shell, a front cover plate detachably connected to the front side of the main body shell, and a rear cover plate detachably connected to the rear side of the main body shell. The stator assembly includes a stator core disposed between the front and rear cover plates and fixedly connected to the inner periphery of the main body shell. The rotor assembly includes a hollow shaft, a rotor component fixed to the outer periphery of the hollow shaft and disposed inside the stator core, and a hollow adapter plate coaxially disposed at the front end of the hollow shaft and detachably connected to the hollow shaft. The hollow adapter plate is used to connect an external load. The front part of the hollow shaft is connected to the front cover plate via a... The front bearing is rotatably connected, and the rear part is rotatably connected to the rear cover plate via the rear bearing; the front cover plate has a first rotating channel in the middle and a first annular platform recessed on the inner circumference of the rear end of the first rotating channel; a first pressure ring arranged on the rear side of the front cover plate is detachably connected; a second annular platform is recessed on the outer circumference of the front end of the hollow rotating shaft; the hollow adapter plate includes a second pressure ring rotatably arranged in the first rotating channel and arranged in front of the second annular platform; the outer ring of the front bearing is fixedly connected to the first annular platform and clamped between the first annular platform and the first pressure ring along its axial direction; the inner ring of the front bearing is fixedly connected to the second annular platform and clamped between the second annular platform and the second pressure ring along its axial direction.

[0005] Preferably, the hollow rotating shaft includes a rotating shaft body, a rotor mounting bracket coaxially arranged on the outer periphery of the rotating shaft body and located between the front cover plate and the rear cover plate, and a rotor connecting bracket connected between the front part of the rotor mounting bracket and the rotating shaft body. The second ring platform is recessed on the outer periphery of the front end of the rotating shaft body. The hollow adapter plate also includes a hollow adapter ring detachably connected to the front end of the hollow rotating shaft by fasteners arranged along its axial direction. The second pressure ring is connected to the outer periphery of the hollow adapter ring.

[0006] Preferably, the inner circumferential side of the front end of the rotating shaft body is recessed with a mounting ring platform, the rear part of the hollow transition ring abuts against and is connected to the mounting ring platform, and the second pressure ring extends radially outward from the outer circumferential side of the front part of the hollow transition ring.

[0007] Preferably, the recess depth of the mounting ring platform relative to the front end face of the rotating shaft body is less than the recess depth of the second ring platform relative to the front end face of the rotating shaft body, so as to form a bearing support portion arranged on the inner circumference of the rear end of the second ring platform at the rear of the mounting ring platform.

[0008] Preferably, the hollow adapter plate further includes an extension connected to the outer periphery of the second pressure ring, wherein the rear side of the extension is arranged with a gap from the front bearing, and the outer periphery of the extension is arranged with a gap from the inner side of the first rotation channel.

[0009] Preferably, the rotor component is fixed to the outer periphery of the rotor mounting frame, and an installation space is formed between the inner periphery of the rotor mounting frame, the shaft body, and the rotor connecting frame. The rear cover plate includes a rear cover body, which includes a rear cover portion arranged on the rear side of the stator core and a rotation positioning portion connected to the rear cover portion and arranged with a gap in the installation space. The rotation positioning portion is coaxially arranged between the shaft body and the rotor mounting frame. The outer ring of the rear bearing is fixedly connected to the rotation positioning portion, and the inner ring of the rear bearing is fixedly connected to the shaft body.

[0010] Preferably, the rear cover body further includes a base portion connected to the rear cover portion or the rotation positioning portion and arranged on the rear side of the rear bearing. A circuit board and a magnetic encoder reading head disposed on the circuit board are mounted on the rear side of the base portion, and a magnetic ring corresponding to the magnetic encoder reading head is fixedly disposed on the outer periphery of the rotating shaft body.

[0011] Preferably, the rear cover includes a first ring and a second ring connected to the inner circumference of the first ring. The first ring is located on the rear side of the stator core, and the second ring is arranged in a stepped manner on the front of the first ring and the inner circumference of the stator core. The rotation positioning part extends forward from the second ring and the base extends inward from the second ring. The rear cover also includes a rear cover baffle located on the rear side of the magnetic encoder reading head and the magnetic ring, and detachably connected to the rear side of the second ring. The rear cover baffle has a second rotation channel in the middle, and the rear end of the rotating shaft body is rotatably arranged in the second rotation channel.

[0012] Preferably, a first cable fixing head is provided on the annular portion of the rear cover and connected to the stator winding provided on the stator core, and a second cable fixing head is provided on the rear cover baffle and fixedly connected to the circuit board.

[0013] Preferably, the front cover plate and the rear cover plate are provided with ventilation openings, and an air guide channel communicating with the ventilation openings is formed between the housing assembly, the stator assembly and the rotor assembly. The hollow rotating shaft is provided with a fan blade structure for fanning air along the air guide channel and blowing it out to the outside through the ventilation openings.

[0014] The beneficial effects achieved by this invention are as follows: The direct-drive motor device for semiconductor equipment provided by this invention detachably connects the front and rear covers of the housing to the outer casing. This allows for flexible selection of either the front or rear cover to partially open the housing depending on the maintenance location, simplifying operation, saving time, and facilitating disassembly, assembly, and subsequent maintenance. This improves maintenance efficiency and significantly reduces equipment maintenance costs and downtime. A first pressure ring is detachably connected to the rear side of the front cover, and the hollow transfer plate includes a second pressure ring. The outer ring of the front bearing is fixedly connected to the first ring platform and clamped axially between the first ring platform and the first pressure ring. The inner ring of the front bearing is fixedly connected to the second ring platform and clamped axially between the second ring platform and the second pressure ring. This axially limits the front bearing between the front cover, the hollow shaft, the first pressure ring, and the hollow transfer plate, preventing the front bearing from wobbling in its radial and axial directions, thus improving the stability of the hollow transfer plate and the load connected to it during rotation. The rotor assembly includes... A hollow adapter plate is detachably connected to the front end of the hollow shaft, and the external load is connected to the hollow adapter plate. Multiple hollow adapter plates can be configured to adapt to external loads of different specifications, making the direct drive motor device compatible with various semiconductor devices of different specifications, thus broadening its application range. The hollow adapter plate is used to connect the external load and limit the forward movement of the inner ring of the front bearing, achieving a multi-purpose effect. It eliminates the independent bearing cover in the prior art, and the outer ring of the front bearing is arranged on the first ring platform on the inner circumference of the rear end of the first rotation channel in the middle of the front cover plate, while the inner ring of the front bearing is arranged on the second ring platform on the outer circumference of the front end of the hollow shaft. The first pressure ring is arranged on the rear side of the front cover plate, and the second pressure ring is arranged in the first rotation channel in the middle of the front cover plate. Compared with axially arranging it on the front and rear sides of the front cover plate, it greatly reduces the axial height space occupied by the direct drive motor device, making its overall structure flat and compact, suitable for small-volume semiconductor devices, and thus broadening its application range. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a direct drive motor device according to an embodiment of the present invention.

[0016] Figure 2 This is a cross-sectional view of a direct drive motor device according to an embodiment of the present invention.

[0017] Figure 3 This is a partial structural cross-sectional view of a direct drive motor device according to an embodiment of the present invention.

[0018] Figure 4 This is an exploded view of a direct-drive motor device according to an embodiment of the present invention.

[0019] Figure 5 This is a schematic diagram of the structure of a hollow rotating shaft according to an embodiment of the present invention. Figure 1 .

[0020] Figure 6 This is a schematic diagram of the structure of a hollow rotating shaft according to an embodiment of the present invention. Figure 2 .

[0021] Figure label: 1. Housing assembly; 11. Housing shell; 12. Front cover; 12. First rotating channel; 121. First ring platform; 122. Rear cover; 13. Rear cover body; 131. Rear cover part; 1311. First ring part of rear cover; 13111. Second ring part of rear cover; 13112. Rotation positioning part; 1312. Base part; 1313. Rear cover baffle; 132. Second rotating channel; 1321. First pressure ring; 14. Circuit board; 15. Magnetic encoder reading head; 16. First cable fixing head; 17. Second cable fixing head; 18. Ventilation port; 19. Stator assembly 2, stator core 21; Rotor assembly 3, hollow shaft 31, shaft body 311, second ring platform 3111, mounting ring platform 3112, bearing support 3113, rotor mounting bracket 312, rotor connecting bracket 313, fan blade structure 314, first fan blade assembly 3141, second fan blade assembly 3142, hollow transfer plate 32, hollow transfer ring 321, second pressure ring 322, extension 323, rotor component 33, magnetic ring 34; Front bearing 41, rear bearing 42; Air guide channel 5, first air guide gap 51, second air guide gap 52, third air guide gap 53, fourth air guide gap 54, fifth air guide gap 55, sixth air guide gap 56. Detailed Implementation

[0022] like Figures 1-6As shown in the figure, as an embodiment of the present invention, a direct-drive motor device for semiconductor equipment is provided. This device can be used in semiconductor equipment such as lithography machines, wafer handling robots, and precision motion platforms for semiconductor inspection to drive the movement of their robots, moving platforms, and other loads to perform operations. The direct-drive motor device includes a housing assembly 1, a stator assembly 2, and a rotor assembly 3. The housing assembly 1 includes a body shell 11, a front cover plate 12 detachably connected to the front side of the body shell 11, and a rear cover plate 13 detachably connected to the rear side of the body shell 11. The stator assembly 2 includes a stator core 21 disposed between the front cover plate 12 and the rear cover plate 13 and fixedly connected to the inner periphery of the body shell 11. The rotor assembly 3 includes a hollow shaft 31, a rotor component 33 fixed to the outer periphery of the hollow shaft 31 and arranged inside the stator core 21, and a hollow transfer plate 32 coaxially arranged at the front end of the hollow shaft 31 and detachably connected to the hollow shaft 31. A stator winding is fixedly mounted on the stator core 21. A gap is formed between the rotor component 33, the stator core 21, and the stator winding. When the stator winding is energized, a magnetic field is generated between it and the rotor component 33, driving the rotor assembly 3 to rotate as a whole. The hollow transfer plate 32 is used to connect an external load, causing the external load to rotate synchronously with the rotor assembly 3 for operation. The front part of the hollow shaft 31 is rotatably connected to the front cover plate 12 via a front bearing 41, and the rear part is rotatably connected to the rear cover plate 13 via a rear bearing 42, ensuring stable rotation of the rotor assembly 3 relative to the stator assembly 2 and the housing assembly 1. The hollow through-structure of the hollow rotating shaft 31 and the hollow adapter plate 32 is suitable for scenarios such as wafer routing and vacuum environment operation. The front cover plate 12 has a first rotating channel 121 in the middle and a first annular platform 122 recessed on the inner circumference of the rear end of the first rotating channel 121. A first pressure ring 14 arranged on the rear side of the first annular platform 122 is detachably connected to the rear side of the front cover plate 12. A second annular platform 3111 is recessed on the outer circumference of the front end of the hollow rotating shaft 31. The hollow adapter plate 32 includes a second pressure ring 322 rotatably arranged within the first rotating channel 121 and positioned in front of the second annular platform 3111. The outer ring of the front bearing 41 is fixedly connected to the first annular platform 122 and clamped axially between the first annular platform 122 and the first pressure ring 14. The inner ring of the front bearing 41 is fixedly connected to the second annular platform 3111 and clamped axially between the second annular platform 3111 and the second pressure ring 322.In this embodiment, the direct-drive motor device detachably connects the front cover 12 and rear cover 13 of the housing assembly 1 to the outer casing 11. Therefore, depending on the maintenance location, it allows for flexible selection of either the front cover 12 or the rear cover 13 to partially open the housing assembly 1, simplifying operation, saving time, and facilitating disassembly, assembly, and subsequent maintenance. This improves maintenance efficiency and significantly reduces equipment maintenance costs and downtime. A first pressure ring 14 is detachably connected to the rear side of the front cover 12, and the hollow adapter plate 32 includes a second pressure ring 322. The front bearing 41... The outer ring is fixedly connected to the first ring platform 122 and clamped axially between the first ring platform 122 and the first pressure ring 14. The inner ring of the front bearing 41 is fixedly connected to the second ring platform 3111 and clamped axially between the second ring platform 3111 and the second pressure ring 322, thereby axially limiting the front bearing 41 between the front cover plate 12, the hollow shaft 31, the first pressure ring 14, and the hollow transfer plate 32, preventing the front bearing 41 from shaking in its radial and axial directions, and improving the stability of the hollow transfer plate 32 and the load connected to it during rotation; rotor assembly Component 3 includes a hollow adapter plate 32 detachably connected to the front end of the hollow shaft 31, and the external load is connected to the hollow adapter plate 32. Multiple hollow adapter plates 32 can be configured to adapt to external loads of different specifications, making the direct drive motor device compatible with various semiconductor devices of different specifications, thus broadening its application range. The hollow adapter plate 32 is used to connect the external load and limit the forward movement of the inner ring of the front bearing 41, achieving a multi-purpose effect. It eliminates the need for the independent bearing cover in the prior art, and the outer ring of the front bearing 41 is arranged in the middle of the front cover plate 12. The first ring platform 122 on the inner circumference of the rear end of the rotating channel 121, the inner ring of the front bearing 41 is arranged on the second ring platform 3111 on the outer circumference of the front end of the hollow rotating shaft 31, the first pressure ring 14 is arranged on the rear side of the front cover plate 12, and the second pressure ring 322 is arranged in the first rotating channel 121 in the middle of the front cover plate 12. Compared with axially arranging it on the front and rear sides of the front cover plate 12, the axial height space occupied by the direct drive motor device is greatly reduced, making it a flat structure with a compact structure, which can be applied to small-volume semiconductor devices and has a wider range of applications.

[0023] In this embodiment, the front bearing 41 is a crossed roller bearing, which can simultaneously withstand radial and axial forces, stably support the rotor assembly 3 and the load connected to it in radial and axial movement, reduce vibration, and has high positioning accuracy. Furthermore, the first ring platform 122, the second ring platform 3111, the first pressure ring 14, and the second pressure ring 322 can jointly share the axial load transmitted by the front bearing 41, so that the axial stress is evenly distributed, the bearing capacity is strong, and the structure is simple and reliable with good operational stability.

[0024] like Figure 2As shown, in this embodiment, the hollow rotating shaft 31 includes a rotating shaft body 311, a rotor mounting bracket 312 coaxially arranged on the outer periphery of the rotating shaft body 311 and located between the front cover plate 12 and the rear cover plate 13, and a rotor connecting bracket 313 connected between the front part of the rotor mounting bracket 312 and the rotating shaft body 311. The rotor component 33 is fixed to the outer periphery of the rotor mounting bracket 312. An installation space is formed between the inner periphery of the rotor mounting bracket 312, the shaft body 311, and the rotor connecting bracket 313. The rear cover plate 13 includes a rear cover body 131, which includes a rear cover portion 1311 arranged on the rear side of the stator core 21 and a rotation positioning portion 1312 connected to the rear cover portion 1311 and arranged with a gap in the installation space. The rotation positioning portion 1312 is coaxially arranged between the shaft body 311 and the rotor mounting bracket 312. The outer ring of the rear bearing 42 is fixedly connected to the rotation positioning portion 1312, and the inner ring of the rear bearing 42 is fixedly connected to the shaft body 311. In this embodiment, the rear bearing 42, the first pressure ring 14, and the front bearing 41 are mounted on the inner circumference of the stator core 21. Compared with axially arranging them on the front or rear side of the stator core 21, this further reduces the axial height space occupied by the direct drive motor device, making it a flatter structure that is more suitable for ultra-precision equipment such as lithography machines, wafer handling robots, and semiconductor inspection precision motion platforms.

[0025] In this embodiment, the second annular platform 3111 is recessed on the outer periphery of the front end of the rotating shaft body 311. The hollow adapter plate 32 also includes a hollow adapter ring 321 detachably connected to the front end of the hollow rotating shaft 31 by fasteners such as screws arranged along its axial direction. The second pressure ring 322 is connected to the outer periphery of the hollow adapter ring 321, so that the inner ring of the front bearing 41 is axially limited between the second annular platform 3111 and the second pressure ring 322. The second pressure ring 322 can be connected or disconnected relative to the rotating shaft body 311 along with the hollow adapter ring 321, which facilitates the installation and removal of the front bearing 41. The fasteners such as screws are arranged axially, which facilitates the adjustment of the axial preload of the second pressure ring 322 on the inner ring of the front bearing 41.

[0026] like Figure 2 , Figure 5 As shown, in this embodiment, a mounting ring platform 3112 is recessed on the inner circumference of the front end of the rotating shaft body 311. The rear part of the hollow transition ring 321 abuts against and connects to the mounting ring platform 3112. The second pressure ring 322 extends radially outward from the outer circumference of the front part of the hollow transition ring 321. The structure is compact and can stably support and limit the hollow transition ring 321 through the mounting ring platform 3112, thereby improving the installation stability of the hollow transition plate 32. In addition, compared with not setting the mounting ring platform 3112, the axial height space occupied by the direct drive motor device is further reduced, making its overall structure flatter.

[0027] like Figure 2As shown, in this embodiment, the recess depth of the mounting ring platform 3112 relative to the front end face of the rotating shaft body 311 is less than the recess depth of the second ring platform 3111 relative to the front end face of the rotating shaft body 311, so that a bearing support portion 3113 arranged on the inner circumference of the rear end of the second ring platform 3111 is formed at the rear of the mounting ring platform 3112, so that the bearing support portion 3113 can share the radial load transmitted by the front bearing 41, so that the radial stress is evenly distributed, the structure is more stable and reliable, and vibration can be further reduced.

[0028] In this embodiment, the hollow adapter plate 32 further includes an extension 323 connected to the outer periphery of the second pressure ring 322. The rear side of the extension 323 is spaced apart from the front bearing 41 to avoid affecting the rotational transmission of the front bearing 41. The outer periphery of the extension 323 is spaced apart from the inner side of the first rotation channel 121 to ensure that the hollow adapter plate 32 can rotate relative to the front cover plate 12. At the same time, the small gap can prevent most dust and other impurities from falling into the motor, resulting in better sealing and superior cleanliness.

[0029] like Figure 4 As shown, in this embodiment, the rear cover body 131 also includes a base portion 1313 connected to the rear cover portion 1311 and arranged on the rear side of the rear bearing 42. A circuit board 15 and a magnetic encoder reading head 16 disposed on the circuit board 15 are mounted on the rear side of the base portion 1313. A magnetic ring 34 corresponding to the magnetic encoder reading head 16 is fixedly disposed on the outer periphery of the rotating shaft body 311. The magnetic ring 34 rotates synchronously with the rotating shaft body 311. The magnetic encoder reading head 16 collects the magnetic pole position signal of the magnetic ring 34 in real time, converts it into a high-precision angle feedback signal and transmits it to the circuit board 15 to monitor the rotational speed of the rotor assembly 3 in real time. In some other embodiments, the base portion 1313 can also be configured to be connected to the rotation positioning portion 1312, which also has the same effect.

[0030] In this embodiment, the rear cover portion 1311 includes a rear cover first ring portion 13111 and a rear cover second ring portion 13112 connected to the inner circumferential side of the rear cover first ring portion 13111. The rear cover first ring portion 13111 is arranged on the rear side of the stator core 21, and the rear cover second ring portion 13112 is arranged in a stepped manner on the front part of the rear cover first ring portion 13111 and the inner circumferential side of the stator core 21. The rotation positioning portion 1312 extends from the rear cover second ring portion 13112 to its front side, and the base portion 1313 extends from the rear cover second ring portion 13112 to its inner circumferential side, so that the rear cover second ring portion 13112 and the base portion 1313 are arranged on the inner circumferential side of the stator core 21. Compared with axially arranging them on the rear side of the stator core 21, the axial height space occupied by the direct drive motor device is further reduced, making its overall structure flatter.

[0031] like Figure 2As shown, in this embodiment, the rear cover plate 13 further includes a rear cover baffle 132, which is arranged behind the magnetic encoder reading head 16 and the magnetic ring 34 and detachably connected to the rear side of the second ring portion 13112 of the rear cover. This baffle prevents external dust and other impurities from falling into the magnetic ring 34, the magnetic encoder reading head 16, or the circuit board 15, thus affecting the speed monitoring effect. A second rotation channel 1321 is provided in the middle of the rear cover baffle 132. The rear end of the rotating shaft body 311 is rotatably arranged within the second rotation channel 1321, ensuring that the rotating shaft body 311 can rotate relative to the rear cover baffle 132. The rear cover baffle 132 and the rotating shaft body 311 are arranged with a gap, which can prevent most dust and other impurities from falling into the motor, further improving the motor's sealing and cleanliness.

[0032] like Figure 4 As shown, in this embodiment, a first cable fixing head 17 is provided on the rear cover ring portion 13111, which is connected to the stator winding provided on the stator core 21, to facilitate energizing the stator winding. A second cable fixing head 18 is provided on the rear cover baffle 132, which is fixedly connected to the circuit board 15, to facilitate energizing the circuit board 15.

[0033] In this embodiment, ventilation openings 19 are provided on the front cover plate 12 and the rear cover plate 13. An air guide channel 5 communicating with the ventilation opening 19 is formed between the housing assembly 1, the stator assembly 2 and the rotor assembly 3. A fan blade structure 314 is provided on the hollow rotating shaft 31 for fanning air along the air guide channel 5 and blowing it out to the outside through the ventilation opening 19. This can promptly conduct the heat inside the motor to the outside of the motor and extend the service life of the direct drive motor device.

[0034] like Figures 3-6 As shown, in this embodiment, the fan blade structure 314 includes a plurality of first fan blade assemblies 3141 arranged along the front surface of the rotor connecting frame 313, and the air guide channel 5 includes a first air guide gap 51 arranged between the rear side and inner circumference side of the first pressure ring 14 and the rotor connecting frame 313, a second air guide gap 52 arranged between the outer circumference side of the first pressure ring 14 and the stator core 21, and a third air guide gap 53 arranged between the front cover plate 12 and the front side of the stator core 21. The second air guide gap 52 connects the first air guide gap 51 and the third air guide gap 53. The third air guide gap 53 connects to the vent 19 on the front cover plate 12. When the rotor assembly 3 rotates, the first fan blade assembly 3141 rotates synchronously to fan the air. The fanned air can sequentially guide the heat from the rear end face of the front bearing 41, the stator core 21 and the inner and front sides of the stator winding along the air guide path of the first air guide gap 51, the second air guide gap 52, the third air guide gap 53 and the vent 19 on the front cover plate 12 to the outside, thereby avoiding problems such as failure of the lubricating grease of the front bearing 41 and burnout of the stator winding due to local high temperature.

[0035] In this embodiment, the fan blade structure 314 further includes a plurality of second fan blade assemblies 3142 arranged along the rear end surface of the rotor mounting frame 312, and the air guide channel 5 further includes a fourth air guide gap 54 arranged between the front side of the second ring portion 13112 of the rear cover and the second fan blade assembly 3142, a fifth air guide gap 55 arranged between the outer periphery of the second ring portion 13112 of the rear cover and the stator core 21, and a sixth air guide gap 56 arranged between the first ring portion 13111 of the rear cover and the rear side of the stator core 21. The fifth air guide gap 55 connects the fourth air guide gap 54 and the sixth air guide gap 56. The sixth air guide gap 56 connects to the ventilation opening 19 on the rear cover plate 13. When the rotor assembly 3 rotates, the second fan blade assembly 3142 rotates synchronously to fan the air. The fanned air can sequentially guide the heat of the stator core 21 and the inner and rear sides of the stator winding along the air guide path of the fourth air guide gap 54, the fifth air guide gap 55, the sixth air guide gap 56, and the ventilation opening 19 on the rear cover plate 13, thereby dissipating the heat to the outside. This further avoids problems such as local high temperature causing the stator winding to burn out.

[0036] In this embodiment, the stator core 21 is configured as a slotless core structure, and the stator winding is potted and fixed on the stator core 21, which can eliminate the fluctuation of the cogging torque, make the output torque more uniform, improve the positioning accuracy, reduce vibration and noise, and is more suitable for high-precision low-speed semiconductor equipment.

[0037] In summary, the above description is only a preferred embodiment of the present invention. All equivalent changes and modifications made within the scope of the claims of the present invention should be covered by the present invention.

Claims

1. A direct-drive motor device for semiconductor equipment, characterized in that, include: The housing assembly includes a housing, a front cover detachably connected to the front side of the housing, and a rear cover detachably connected to the rear side of the housing; The stator assembly includes a stator core disposed between the front cover plate and the rear cover plate and fixedly connected to the inner periphery of the fuselage housing; The rotor assembly includes a hollow shaft, a rotor component fixed to the outer periphery of the hollow shaft and arranged inside the stator core, and a hollow transfer plate coaxially arranged at the front end of the hollow shaft and detachably connected to the hollow shaft, the hollow transfer plate being used to connect an external load; the front part of the hollow shaft is rotatably connected to the front cover plate via a front bearing, and the rear part is rotatably connected to the rear cover plate via a rear bearing; The front cover plate has a first rotating channel in the middle and a first annular platform recessed on the inner circumference of the rear end of the first rotating channel. A first pressure ring arranged on the rear side of the front cover plate is detachably connected. A second annular platform is recessed on the outer circumference of the front end of the hollow rotating shaft. The hollow adapter plate includes a second pressure ring rotatably arranged in the first rotating channel and arranged in front of the second annular platform. The outer ring of the front bearing is fixedly connected to the first annular platform and clamped between the first annular platform and the first pressure ring along its axial direction. The inner ring of the front bearing is fixedly connected to the second annular platform and clamped between the second annular platform and the second pressure ring along its axial direction.

2. The direct-drive motor device according to claim 1, characterized in that: The hollow rotating shaft includes a rotating shaft body, a rotor mounting bracket coaxially arranged on the outer periphery of the rotating shaft body and located between the front cover plate and the rear cover plate, and a rotor connecting bracket connected between the front part of the rotor mounting bracket and the rotating shaft body. The second ring platform is recessed on the outer periphery of the front end of the rotating shaft body. The hollow adapter plate also includes a hollow adapter ring detachably connected to the front end of the hollow rotating shaft by fasteners arranged along its axial direction. The second pressure ring is connected to the outer periphery of the hollow adapter ring.

3. The direct-drive motor device according to claim 2, characterized in that: The inner circumference of the front end of the rotating shaft body is recessed with a mounting ring platform, the rear part of the hollow transition ring abuts against and is connected to the mounting ring platform, and the second pressure ring extends radially outward from the outer circumference of the front part of the hollow transition ring.

4. The direct-drive motor device according to claim 3, characterized in that: The recess depth of the mounting ring platform relative to the front end face of the rotating shaft body is less than the recess depth of the second ring platform relative to the front end face of the rotating shaft body, so as to form a bearing support portion arranged on the inner circumference side of the rear end of the second ring platform at the rear of the mounting ring platform.

5. The direct-drive motor device according to claim 4, characterized in that: The hollow adapter plate also includes an extension connected to the outer periphery of the second pressure ring. The rear side of the extension is arranged with a gap from the front bearing, and the outer periphery of the extension is arranged with a gap from the inner side of the first rotation channel.

6. The direct-drive motor device according to claim 2, characterized in that: The rotor component is fixed to the outer periphery of the rotor mounting frame. An installation space is formed between the inner periphery of the rotor mounting frame, the shaft body, and the rotor connecting frame. The rear cover plate includes a rear cover body, which includes a rear cover portion arranged on the rear side of the stator core and a rotation positioning portion connected to the rear cover portion and arranged with a gap in the installation space. The rotation positioning portion is coaxially arranged between the shaft body and the rotor mounting frame. The outer ring of the rear bearing is fixedly connected to the rotation positioning portion, and the inner ring of the rear bearing is fixedly connected to the shaft body.

7. The direct-drive motor device according to claim 6, characterized in that: The rear cover body also includes a base portion connected to the rear cover portion or the rotation positioning portion and arranged on the rear side of the rear bearing. A circuit board and a magnetic encoder reading head disposed on the circuit board are mounted on the rear side of the base portion. A magnetic ring corresponding to the magnetic encoder reading head is fixedly disposed on the outer periphery of the rotating shaft body.

8. The direct-drive motor device according to claim 7, characterized in that: The rear cover includes a first ring and a second ring connected to the inner circumference of the first ring. The first ring is located on the rear side of the stator core, and the second ring is arranged in a stepped manner on the front of the first ring and the inner circumference of the stator core. The rotation positioning part extends forward from the second ring and the base part extends inward from the second ring. The rear cover also includes a rear cover baffle located on the rear side of the magnetic encoder reading head and the magnetic ring, and detachably connected to the rear side of the second ring. The rear cover baffle has a second rotation channel in the middle, and the rear end of the rotating shaft body is rotatably arranged in the second rotation channel.

9. The direct-drive motor device according to claim 8, characterized in that: The rear cover has a first cable fixing head on one ring that connects to the stator winding on the stator core, and the rear cover baffle has a second cable fixing head that is fixedly connected to the circuit board.

10. The direct-drive motor device according to claim 9, characterized in that: Ventilation openings are provided on the front and rear cover plates. An air guide channel communicating with the ventilation openings is formed between the housing assembly, stator assembly and rotor assembly. A fan blade structure is provided on the hollow rotating shaft for fanning air along the air guide channel and blowing it out to the outside through the ventilation openings.

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