Magnetic preloading decoupling structure, air floating slide table and high-precision motion platform

Abstract

The application belongs to the technical field of high-precision motion platforms, and discloses a magnetic preloading thermal decoupling structure, an air floating slide table and a high-precision motion platform. The magnetic preloading thermal decoupling structure comprises a main beam, a first preloading plate and a second preloading plate. The main beam is made of a first material; the first preloading plate is made of a second material, and the expansion coefficient of the first preloading plate is greater than that of the main beam; the second preloading plate is clamped between the main beam and the first preloading plate, and is connected to the first preloading plate by adhesive connection; the second preloading plate is provided with a first anchor point and a connecting area; the second preloading plate is rigidly connected to the main beam at the first anchor point; the connecting area is flexibly connected to the main beam through a flexible structure, and the flexible structure can be elastically deformed in a first direction; and the second preloading plate is made of the second material. The magnetic preloading thermal decoupling structure can avoid the problems of low motion precision and structural risk caused by the mismatch of thermal expansion of dissimilar materials.

Description

Technical Field

[0001] This invention relates to the field of high-precision motion platform technology, and in particular to a magnetic preload thermal decoupling structure, an air-bearing slide, and a high-precision motion platform. Background Technology

[0002] Typically, a high-precision motion platform consists of an X-axis slide and a Y-axis slide. The slide adopts a magnetic preload air-bearing structure to ensure the motion accuracy of the platform. In order to further improve the overall dynamic performance of the slide, lightweight and high-rigidity silicon carbide (SiC) material is usually selected to make the main crossbeam of the Y-axis slide, and a preload structure made of 2Cr13 stainless steel is selected to provide preload force for the main crossbeam.

[0003] However, silicon carbide and stainless steel have significantly different coefficients of thermal expansion. When the main beam of silicon carbide is used in conjunction with stainless steel preload structures, connectors or fasteners, temperature changes will cause the two materials to expand or contract differently, generating huge thermal stress at the connection interface. This causes the main beam of silicon carbide to deform, directly affecting the positional accuracy and repeatability of the motion platform. At the same time, repeated thermal stress on the brittle main beam of silicon carbide may cause microcracks or even breakage, resulting in serious safety hazards.

[0004] Therefore, it is urgent to propose a magnetic preload thermal decoupling structure, an air-floating slide, and a high-precision motion platform to solve the above problems. Summary of the Invention

[0005] The first objective of this invention is to provide a magnetic preloaded thermal decoupling structure that can avoid the problems of low motion accuracy and structural risks caused by thermal expansion mismatch of dissimilar materials.

[0006] To achieve this objective, the present invention adopts the following technical solution: The magnetic preloaded thermal decoupling structure includes: A main crossbeam, which extends along a first direction and is made of a first material; The first preload plate extends along the first direction, the first preload plate is made of a second material, and the expansion coefficient of the first preload plate is greater than the expansion coefficient of the main beam. The second preload plate extends along the first direction and is sandwiched between the main beam and the first preload plate. The second preload plate is glued to the first preload plate. The second preload plate is provided with a first anchor point and a connecting area. The first anchor point is located at the midpoint of the second preload plate along the first direction, and the connecting area is located on both sides of the anchor point along the first direction. The second preload plate is rigidly connected to the main beam at the first anchor point. The connecting area is flexibly connected to the main beam through a flexible structure, and the flexible structure can undergo elastic deformation in the first direction. The second preload plate is made of the second material.

[0007] As an alternative technical solution for the magnetic preloaded thermal decoupling structure, the first material is silicon carbide; the second material is stainless steel.

[0008] As an optional technical solution for the magnetic preload thermal decoupling structure, the flexible structure includes multiple decoupling slots, which are evenly spaced along the first direction in the two connection areas of the second preload plate; the second preload plate is also provided with multiple second anchor points, which correspond one-to-one with the decoupling slots, and the second anchor points are located at the center of the corresponding decoupling slots, and the second preload plate and the main beam are rigidly connected at the second anchor points.

[0009] As an optional technical solution for the magnetic preload thermal decoupling structure, the decoupling groove extends through the thickness direction of the second preload plate.

[0010] As an optional technical solution for the magnetic preload thermal decoupling structure, the decoupling groove is provided with an annular groove surrounding the second anchoring point. The annular groove has two symmetrical breaks on both sides along the second direction. At the breaks, there are two opposing hook-type buckle grooves integrally formed with the annular groove. The second direction is perpendicular to the first direction.

[0011] As an optional technical solution for the magnetic preload thermal decoupling structure, the first anchor point and the second anchor point are respectively provided with connection holes, and the main beam and the second preload plate are detachably connected through the connection holes.

[0012] As an optional technical solution for the magnetic preload thermal decoupling structure, the second preload plate has a glue storage groove on the side surface facing the first preload plate.

[0013] As an optional technical solution for the magnetic preload thermal decoupling structure, adhesive storage grooves are provided between two adjacent flexible structures and between the flexible structure and the first anchor point.

[0014] The second objective of this invention is to provide an air-floating slide with high motion accuracy.

[0015] To achieve this objective, the present invention adopts the following technical solution: The air-floating slide includes a base and the aforementioned magnetic preload thermal decoupling structure, with the main crossbeam slidably connected to the base.

[0016] The third objective of this invention is to provide a high-precision motion platform with high motion accuracy.

[0017] To achieve this objective, the present invention adopts the following technical solution: A high-precision motion platform, characterized in that it includes the aforementioned air-bearing slide.

[0018] The beneficial effects of this invention are: The magnetic preload thermal decoupling structure provided by this invention includes a main beam, a first preload plate, and a second preload plate. The second preload plate is sandwiched between the main beam and the first preload plate. The first and second preload plates are made of the same material, forming a double-layer preload structure that provides preload force to the main beam. The second preload plate has a first anchor point and a connection area. The second preload plate is rigidly connected to the main beam at the first anchor point, which can constrain the reference position. The connection area is flexibly connected to the main beam through a flexible structure that can elastically deform in a first direction. When the environment changes, the elastic deformation of the flexible structure offsets the difference in thermal expansion coefficients between the main beam and the first and second preload plates (preload structure), thereby releasing the internal stress caused by deformation. This solves the problems of low motion accuracy and structural risk caused by the thermal expansion mismatch of dissimilar materials.

[0019] Secondly, the first anchor point of the second preload plate is rigidly connected to the main beam, and the connection area is flexibly connected to the main beam. The second preload plate plays a dual role in connecting the first preload plate to the main beam and eliminating the stress of the main beam, resulting in a high degree of structural integration.

[0020] Furthermore, the second preload plate is made of the same material as the first preload plate, and the adhesive layer is not subject to thermal shear stress, resulting in high reliability. Attached Figure Description

[0021] Figure 1 This is a first structural schematic diagram of the magnetic preload thermal decoupling structure provided in an embodiment of the present invention; Figure 2 This is an assembly diagram of the main crossbeam and the second preload plate provided in an embodiment of the present invention; Figure 3 yes Figure 2 A magnified view of the area at point C; Figure 4 This is a schematic diagram of the second structure of the magnetic preloaded thermal decoupling structure provided in an embodiment of the present invention; Figure 5 yes Figure 4 Sectional view at AA; Figure 6 yes Figure 5 A magnified view of the area at point D; Figure 7 yes Figure 4 Sectional view at BB; Figure 8 yes Figure 7 A magnified view of a section at point E.

[0022] In the picture: 100. Main beam; 200. First preload plate; 300. Second preload plate; 310. First anchor point; 320. Decoupling groove; 321. Annular groove; 322. Clip groove; 323. Break; 330. Glue storage groove; 340. Second anchor point. Detailed Implementation

[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0024] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0027] This embodiment provides a magnetic preloaded thermal decoupling structure, which can avoid the problems of low motion accuracy and structural risks caused by thermal expansion mismatch of dissimilar materials.

[0028] Specifically, such as Figures 1 to 3 As shown, the magnetic preload thermal decoupling structure includes a main beam 100, a first preload plate 200, and a second preload plate 300. The main beam 100 extends along a first direction and is made of a first material; the first preload plate 200 extends along the first direction and is made of a second material, and the expansion coefficient of the first preload plate 200 is greater than that of the main beam 100; the second preload plate 300 extends along the first direction and is sandwiched between the main beam 100 and the first preload plate 200, and is glued to the first preload plate 200; the second preload plate 300 is provided with a first anchor point 310 and a connecting area; the first anchor point 310 is located at the midpoint of the second preload plate 300 along the first direction, and the connecting area is located on both sides of the anchor point along the first direction; the second preload plate 300 is rigidly connected to the main beam 100 at the first anchor point 310, and the connecting area is flexibly connected to the main beam 100 through a flexible structure, and the flexible structure can undergo elastic deformation in the first direction; the second preload plate 300 is made of a second material.

[0029] In this embodiment, the first material is silicon carbide (SiC); the second material is 2Cr13 stainless steel. Silicon carbide and stainless steel are commonly used materials for the main beam 100 and the preload structure, respectively.

[0030] Based on the above design, the second preload plate 300 is sandwiched between the main beam 100 and the first preload plate 200. Both the first and second preload plates 200 are made of the same material, forming a double-layered preload structure that provides preload force to the main beam 100. The second preload plate 300 has a first anchoring point 310 and a connecting area. The second preload plate 300 is rigidly connected to the main beam 100 at the first anchoring point 310, which constrains the reference position. The connecting area is flexibly connected to the main beam 100 through a flexible structure, which can elastically deform in the first direction. When the environment changes, the elastic deformation of the flexible structure offsets the difference in thermal expansion coefficients between the main beam 100 and the first and second preload plates 200 (preload structures), thereby releasing internal stress caused by deformation. This solves the problems of low motion accuracy and structural risk caused by the mismatch in thermal expansion of dissimilar materials. Secondly, the first anchoring point 310 of the second preload plate 300 is rigidly connected to the main crossbeam 100, while the connection area is flexibly connected to the main crossbeam 100. The second preload plate 300 serves the dual purpose of connecting the first preload plate 200 to the main crossbeam 100 and relieving stress on the main crossbeam 100, resulting in high structural integration. Furthermore, the second preload plate 300 and the first preload plate 200 are made of the same material, and the adhesive layer is not subjected to thermal shear stress, ensuring high reliability.

[0031] It should be noted that the first direction is the length direction of the main beam 100, the first preload plate 200, and the second preload plate 300.

[0032] In this embodiment, the preload structure formed by the first preload plate 200 and the second preload plate 300 is embedded in the main crossbeam 100. That is, the main crossbeam 100 is provided with a groove, and the preload structure formed by the first preload plate 200 and the second preload plate 300 is located in the groove.

[0033] Optionally, the flexible structure includes multiple decoupling slots 320, which are evenly spaced along the first direction in the two connection areas of the second preload plate 300. The second preload plate 300 also has multiple second anchor points 340, each corresponding to a decoupling slot 320. Each anchor point 340 is located at the center of its corresponding decoupling slot 320, and the second preload plate 300 and the main beam 100 are rigidly connected at the second anchor points 340. The second anchor points 340 constrain and fix the second preload plate 300 and the main beam 100. The decoupling slots 320 decouple the second preload plate 300 and the main beam 100 in terms of stiffness along the first direction. Simultaneously, the slotted decoupling achieves a flexible connection between the main beam 100 and the second preload plate 300, resulting in a simple structure.

[0034] To ensure uniform decoupling on the second preload plate 300, the decoupling groove 320 extends through the thickness direction of the second preload plate 300.

[0035] In this embodiment, the decoupling groove 320 is provided with an annular groove 321 surrounding the second anchoring point 340. The annular groove 321 has two symmetrical cuts 323 on both sides along the second direction. At the cuts 323, there are two opposing hook-type snap-fit ​​grooves 322 integrally formed with the annular groove 321. The second direction is perpendicular to the first direction and is the width direction of the second preload plate 300 and the first preload plate 200. That is to say, the main body of the decoupling groove 320 is two opposing semi-circular arc grooves, symmetrical about the second anchoring point 340, decoupling from the second anchoring point 340 along both sides of the first direction.

[0036] Optionally, such as Figures 4 to 8 As shown, the first anchoring point 310 and the second anchoring point 340 are respectively provided with connecting holes, and the main crossbeam 100 and the second preload plate 300 are detachably connected through the connecting holes. Specifically, the connecting holes are threaded holes, which are convenient to connect and have high connection strength.

[0037] Optionally, the second preload plate 300 has an adhesive storage groove 330 on the side surface facing the first preload plate 200. The adhesive storage groove 330 is used to hold adhesive to prevent excessive adhesive overflow and to increase the connection strength between the second preload plate 300 and the first preload plate 200.

[0038] To ensure the uniformity of the connection between the second preload and the first preload plate 200, glue storage grooves 330 are provided between two adjacent flexible structures and between the flexible structure and the anchor point. In other words, multiple glue storage grooves 330 are evenly spaced along the first direction on the second preload plate 300.

[0039] This embodiment also provides an air-floating slide table with high motion accuracy.

[0040] Specifically, the air-bearing slide includes a base (not shown in the figure) and the aforementioned magnetic preload thermal decoupling structure, with the main crossbeam 100 slidably connected to the base. When the environment changes, the air-bearing slide can utilize the elastic deformation of the flexible structure to offset the difference in thermal expansion coefficients between the main crossbeam 100 and the first preload plate 200 and the second preload plate 300 (preload structure), thereby releasing internal stress caused by deformation and solving the problems of low motion accuracy and structural risks caused by the thermal expansion mismatch of dissimilar materials. Secondly, the first anchor point 310 of the second preload plate 300 is rigidly connected to the main crossbeam 100, while the connection area is flexibly connected to the main crossbeam 100. The second preload plate 300 serves the dual purpose of connecting the first preload plate 200 to the main crossbeam 100 and eliminating stress on the main crossbeam 100, resulting in high structural integration. Furthermore, the second preload plate 300 and the first preload plate 200 are made of the same material, and the adhesive layer is not subjected to thermal shear force, ensuring high reliability.

[0041] Other structures of the main beam 100, the preloading details of the preloading structure on the main beam 100, and the movement of the main beam 100 are all relatively mature existing technologies in this field, and will not be described in detail here.

[0042] This embodiment also provides a high-precision motion platform with high motion accuracy.

[0043] Specifically, the high-precision motion platform includes the aforementioned air-bearing slide, which has high motion accuracy. Therefore, the high-precision motion platform including the air-bearing slide has high motion accuracy.

[0044] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A magnetically preloaded thermal decoupling structure, characterized in that, include: A main beam (100) extends along a first direction and is made of a first material; The first preload plate (200) extends along the first direction, the first preload plate (200) is made of a second material, and the expansion coefficient of the first preload plate (200) is greater than the expansion coefficient of the main beam (100). The second preload plate (300) extends along the first direction and is sandwiched between the main beam (100) and the first preload plate (200). The second preload plate (300) is glued to the first preload plate (200). The second preload plate (300) is provided with a first anchor point (310) and a connecting area. The first anchor point (310) is located at the midpoint of the second preload plate (300) along the first direction. The connecting area is located on both sides of the anchor point along the first direction. The second preload plate (300) and the main beam (100) are rigidly connected at the first anchor point (310). The connecting area is flexibly connected to the main beam (100) through a flexible structure. The flexible structure can undergo elastic deformation in the first direction. The second preload plate (300) is made of the second material.

2. The magnetic preloaded thermal decoupling structure according to claim 1, characterized in that, The first material is silicon carbide; the second material is stainless steel.

3. The magnetic preloaded thermal decoupling structure according to claim 1, characterized in that, The flexible structure includes a plurality of decoupling grooves (320), which are evenly spaced along the first direction in the two connection areas of the second preload plate (300); the second preload plate (300) is also provided with a plurality of second anchor points (340), which correspond one-to-one with the decoupling grooves (320), and the second anchor point (340) is located at the center of the corresponding decoupling groove (320), and the second preload plate (300) and the main beam (100) are rigidly connected at the second anchor points (340).

4. The magnetic preloaded thermal decoupling structure according to claim 3, characterized in that, The decoupling groove (320) extends along the thickness direction of the second preload plate (300).

5. The magnetic preloaded thermal decoupling structure according to claim 4, characterized in that, The decoupling groove (320) is provided with an annular groove (321) surrounding the second anchor point (340). The annular groove (321) has two symmetrical breaks (323) on both sides along the second direction. The breaks (323) are provided with two opposing hook-type buckle grooves (322) integrally formed with the annular groove (321). The second direction is perpendicular to the first direction.

6. The magnetic preloaded thermal decoupling structure according to claim 3, characterized in that, The first anchor point (310) and the second anchor point (340) are respectively provided with connecting holes, and the main crossbeam (100) and the second preload plate (300) are detachably connected through the connecting holes.

7. The magnetic preloaded thermal decoupling structure according to claim 1, characterized in that, The second preload plate (300) has a glue storage groove (330) on the side surface facing the first preload plate (200).

8. The magnetic preloaded thermal decoupling structure according to claim 7, characterized in that, The adhesive storage groove (330) is provided between two adjacent flexible structures and between the flexible structure and the first anchor point (310).

9. An air-floating slide, characterized in that, The system includes a base and a magnetic preload thermal decoupling structure as described in any one of claims 1-8, wherein the main crossbeam (100) is slidably connected to the base.

10. A high-precision motion platform, characterized in that, Includes the air-floating slide as described in claim 9.

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