A honeycomb sandwich type permanent magnet eddy current damping magnetic suspension platform and system

Abstract

The application provides a honeycomb sandwich type permanent magnet eddy current damping magnetic suspension platform and system, and the platform comprises: a closed honeycomb sandwich carrier which is formed by an upper panel, an aluminum honeycomb core, a lower panel and side sealing plates; the upper panel is provided with a side edge mounting area and a central mounting area, the side edge mounting area is used for mounting a laser reflection plate, and the central mounting area is used for mounting a wafer platform and a laser interferometer mirror; an eddy current damping permanent magnet is arranged in the middle area of the lower panel; and at least three Halbach permanent magnet arrays are arranged in a circumferential direction at the bottom of the lower panel. Through the follow-up damping design, the magnetic field partition decoupling layout and the light and high-strength honeycomb sandwich structure, the platform motion mass and the rotational inertia are effectively reduced, the safety hidden danger of the strong magnetic source is eliminated, and the high-speed precision motion performance is significantly improved.

Description

Technical Field

[0001] This application relates to the field of magnetic levitation, specifically to a honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform and system. Background Technology

[0002] Magnetic levitation precision motion platforms achieve contactless actuation through the electromagnetic interaction between a moving permanent magnet and a fixed coil, avoiding friction, backlash, and wear inherent in mechanical guideways. However, once mechanical contact is eliminated, the system's inherent damping is relatively low, making it prone to continuous vibration and prolonged settling times during controller tuning, external disturbances, or short-term closed-loop instability. Therefore, a reliable contactless damping mechanism is necessary. Permanent magnet eddy current damping, requiring no external power supply and with damping force proportional to velocity, is a suitable contactless damping method.

[0003] In existing permanent magnet eddy current damping structures, a common approach is to fix the damping permanent magnet to the base and have the conductor plate move with the platform. This approach increases the moving mass of the conductor plate, which is detrimental to the platform's dynamic performance. Furthermore, the fixed strong magnetic source may come into abnormal proximity to the driving magnetic array when the platform goes out of control, posing a safety hazard. Therefore, it is possible to try changing the damping permanent magnet to move with the platform while the conductor plate is fixed to the base. However, after the damping permanent magnet moves with the platform, the moving platform needs to support the wafer, optical reflectors, driving magnetic array, etc., placing higher demands on the stiffness-to-mass ratio of the support structure. Existing support structures mostly use solid metal plates, which, although having high stiffness, have large mass and rotational inertia, which are not conducive to high-speed motion. Simply thinning them would reduce bending stiffness, torsional stiffness, and local connection stiffness. Simultaneously, the damping permanent magnet and the driving permanent magnet array need to coexist on the bottom surface of the platform, and their spatial arrangement also becomes a problem that needs to be solved. Summary of the Invention

[0004] In view of the deficiencies in the prior art, the purpose of this application is to provide a honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform and system.

[0005] A first aspect of this application provides a honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform, comprising: The closed-cell honeycomb sandwich support is formed by the upper panel, aluminum honeycomb core, lower panel and side sealing plate; The upper panel is provided with a side mounting area and a central mounting area. The side mounting area is used to mount the laser reflector, and the central mounting area is used to mount the wafer platform and the laser interferometer reflector. An eddy current damped permanent magnet is disposed in the middle region of the lower panel; At least three Hellbeck permanent magnet arrays are arranged circumferentially at intervals at the bottom of the lower panel.

[0006] Optionally, the upper panel and the aluminum honeycomb core, the lower panel and the aluminum honeycomb core, and the side sealing plate and the circumferential side of the aluminum honeycomb core are all connected by adhesive bonding.

[0007] Optionally, the periphery of the lower panel extends outward relative to the upper panel to form a supporting adhesive edge, and the lower end of the side sealing plate is disposed on the supporting adhesive edge; after assembly, the outer surface of the side sealing plate is flush with the outer surface of the periphery of the lower panel.

[0008] Optionally, the side mounting area is a side mounting boss, and the central mounting area is a central mounting boss.

[0009] Optionally, the number of eddy current damping permanent magnets is four, and the lower panel integrally forms four limiting bosses; the four limiting bosses restrict the planar position of the four eddy current damping permanent magnets from the front, back, left and right directions.

[0010] Optionally, the four eddy current damping permanent magnets are magnetized along the thickness direction. The four eddy current damping permanent magnets are arranged in a two-row, two-column matrix, with the downward-facing working surfaces arranged in the first row (N, S) and the second row (S, N), with adjacent opposite poles and diagonally opposite poles.

[0011] Optionally, the spacing between the eddy current damped permanent magnet and the Halebeck permanent magnet array is set such that the additional magnetic flux density generated by the eddy current damped permanent magnet in the driving working area of ​​the Halebeck permanent magnet array does not exceed a preset threshold.

[0012] Optionally, the lower panel is integrally formed with a support mounting boss, which is used to connect the support legs.

[0013] According to a second aspect of this application, a honeycomb sandwich permanent magnet eddy current damped magnetic levitation system is provided, comprising: The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform as described in the first aspect; A fixed base is located below the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform; A copper conductor plate is fixed on the fixed base, and a non-contact air gap is maintained between it and the eddy current damping permanent magnet. At least three drive coils are mounted on the fixed base and correspond one-to-one with at least three of the Heilbeck permanent magnet arrays to generate driving force to drive the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform to levitate and move.

[0014] Optionally, a capacitive sensor is also installed on the fixed base, which is used to detect the position information of the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform.

[0015] The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform provided in this application features an eddy current damped permanent magnet in the middle of the lower panel that moves with the platform without the need for an additional follower conductor plate, reducing the moving mass and avoiding the safety hazards of traditional fixed strong magnetic sources under runaway conditions. The partitioned layout in the middle and circumferential directions of the lower panel allows the eddy current damped permanent magnet to be naturally separated from the Heilbeck permanent magnet array in space, achieving decoupling of damping and driving magnetic field, which facilitates independent design, installation and control of magnetic field coupling. In addition, the closed honeycomb sandwich support body achieves high bending stiffness, torsional stiffness and natural frequency with a small mass. Under the condition of simultaneously supporting the wafer platform, laser reflector and laser interferometer reflector, it effectively reduces the overall mass and rotational inertia of the platform, which is beneficial for high-speed and precision motion.

[0016] Other technical effects resulting from the additional features will be further illustrated in the corresponding embodiments. Attached Figure Description

[0017] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the overall isometric structure of a magnetic levitation platform according to an exemplary embodiment; Figure 2 This is a schematic diagram of the layered explosion structure of a magnetic levitation platform according to an exemplary embodiment; Figure 3 This is a schematic diagram of the underside structure of a magnetic levitation platform according to an exemplary embodiment; Figure 4 This is a partial cross-sectional view of a magnetic levitation platform according to an exemplary embodiment; Figure 5 for Figure 4 Enlarged structural diagram at point A; Figure 6 for Figure 4 Enlarged structural diagram at point B; Figure 7 This is a schematic diagram illustrating the structure and force direction of an eddy current damped permanent magnet according to an exemplary embodiment. In the diagram: 1 is the laser reflector, 2 is the top panel, 3 is the aluminum honeycomb core, 4 is the bottom panel, 5 is the Heilbeck permanent magnet array, 6 is the support leg, 7 is the eddy current damping permanent magnet, 8 is the side sealing plate, 9 is the copper conductor plate, 21 is the side mounting boss, 22 is the central mounting boss, 41 is the support leg mounting boss, and 42 is the limiting boss. Detailed Implementation

[0018] The present application will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present application, but do not limit the present application in any way. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all fall within the protection scope of the present application. Parts not described in detail in the following embodiments can be implemented using existing technology.

[0019] While magnetic levitation platforms offer advantages such as contactless operation, low friction, and fast response, their inherent damping is relatively low, making them prone to vibration under external disturbances, controller adjustments, or unstable closed-loop conditions. Their dynamic performance is constrained by the moving mass, structural stiffness, and system damping. Traditional solid motion platforms struggle to simultaneously balance structural stiffness and moving mass. Using copper conductor plates as moving parts increases platform mass and rotational inertia. Furthermore, placing damping permanent magnets on a fixed base can lead to excessive proximity between the platform and the driving magnetic array during abnormal movement, resulting in magnetic field interference and the risk of magnet collisions. Existing lightweight load-bearing structures and damping devices are mostly distributed designs, and some solutions still suffer from difficulties in balancing stiffness and mass, large additional moving mass, and structural modes approaching the control frequency band. To address these issues, this application provides a honeycomb sandwich-type permanent magnet eddy current damped magnetic levitation platform to resolve these problems.

[0020] Reference Figures 1-3 The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform provided in one embodiment of this application includes a closed honeycomb sandwich support, eddy current damped permanent magnets 7, and Halbach permanent magnet arrays, etc., wherein: the closed honeycomb sandwich support is formed by an upper panel 2, an aluminum honeycomb core 3, a lower panel 4, and a side sealing plate 8; the upper panel 2 is provided with a side mounting area and a central mounting area, the side mounting area is used to install a laser reflector 1, and the central mounting area is used to install a wafer platform and a laser interferometer reflector; the eddy current damped permanent magnets 7 are located in the middle area of ​​the lower panel 4; at least three Halbach permanent magnet arrays 5 are arranged circumferentially at intervals at the bottom of the lower panel 4.

[0021] Specifically, the aluminum honeycomb core 3 is made of aluminum foil and has a regularly arranged hexagonal (or other shaped) porous structure inside. The upper panel 2, lower panel 4, and side sealing plate 8 surround the aluminum honeycomb core 3 to form a closed structure, which is used to bear the mounting load of the wafer platform, laser reflector 1, laser interferometer reflector, eddy current damped permanent magnet 7, and Hellbeck permanent magnet array 5. Compared with solid metal plates, the aluminum honeycomb sandwich structure can achieve a higher stiffness-to-mass ratio and natural frequency with a smaller mass, making it suitable as a carrier for high-speed precision motion platforms. The Hellbeck permanent magnet array 5 and eddy current damped permanent magnet 7, which serve as the driving source, are arranged together at the bottom of the lower panel 4, and cooperate with the copper conductor plate on the fixed base to form a non-contact eddy current damping pair.

[0022] In this embodiment, the closed-cell honeycomb sandwich support achieves high bending stiffness, torsional stiffness, and natural frequency with a relatively small mass. Even under heavy loads, with the upper plate 2 simultaneously supporting the wafer platform, laser reflector 1, and laser interferometer mirror, and the lower plate 4 integrating the Heilbeck permanent magnet array 5 and eddy current damped permanent magnet 7, the overall mass and moment of inertia of the platform are still effectively reduced, which is beneficial for the platform's high-speed, high-acceleration, and precision motion.

[0023] The eddy current damped permanent magnet 7 is located in the middle area of ​​the lower panel 4 and moves with the platform, so that there is no need to add a follower conductor plate to the moving parts, which significantly reduces the moving mass. At the same time, the main strong magnetic source (i.e., the Heilbeck permanent magnet array) and the damped permanent magnet are both integrated on the moving platform side, which avoids the hidden danger of abnormal magnetic attraction between the fixed side strong magnetic source and the moving parts under uncontrolled conditions (such as power failure and falling) in the traditional solution, and greatly improves the safety of the system.

[0024] The partitioned layout of the central and circumferential regions of the lower plate 4 naturally separates the eddy current damping permanent magnet 7 from the Hellbeck permanent magnet array 5 in space. This layout effectively achieves physical isolation and decoupling of the damping magnetic field and the driving magnetic field, facilitating independent design and installation of both, and helping to precisely control the magnetic field coupling (interference) problem between them.

[0025] In order to improve the overall structural strength and sealing performance of the honeycomb sandwich support and ensure the feasibility of the manufacturing process, in some specific embodiments of this application, the upper panel 2 and the aluminum honeycomb core 3, the lower panel 4 and the aluminum honeycomb core 3, and the side sealing plate 8 and the circumferential side of the aluminum honeycomb core 3 are all connected by adhesive bonding.

[0026] Specifically, a two-component polyurethane adhesive is used for bonding. The main component of the two-component polyurethane adhesive is a polyester polyol or polyether polyol containing hydroxyl groups (-OH), and the curing agent is a compound or prepolymer containing isocyanate groups (-NCO). The two-component polyurethane adhesive can be cured at room temperature or low temperature. The low process temperature will not cause thermal deformation of the aluminum honeycomb core. After curing, the adhesive layer has good shear strength and certain toughness, which can withstand the alternating load during the high-speed movement of the platform, and also has a certain vibration damping effect.

[0027] The side sealing plate needs to be reliably bonded to the circumferential side of the honeycomb core. However, the bonding area and strength of the end faces of the honeycomb cell walls in the aluminum honeycomb core are limited, necessitating additional support and positioning references for the side sealing plate. In some specific embodiments of this application, reference is made to... Figures 4-6The periphery of the lower panel 4 extends outward relative to the upper panel 2 to form a supporting adhesive edge, and the lower end of the side sealing plate 8 is set on the supporting adhesive edge; after assembly, the outer surface of the side sealing plate 8 is flush with the outer surface of the periphery of the lower panel 4. This structural design allows the lower panel 4 to extend outward relative to the aluminum honeycomb core 3 by a certain distance, and this distance is exactly the thickness of the side sealing plate 8, thereby increasing the fixing effect of the side sealing plate 8, facilitating actual installation, and reducing installation errors.

[0028] The side sealing plate 8 is provided with a horizontal support surface by supporting the bonding edge, which increases the bonding area of ​​the side sealing plate 8 and improves the connection strength and assembly positioning accuracy of the side sealing plate 8; the outer side of the side sealing plate 8 is flush with the side of the lower panel 4, and the exposed holes of the honeycomb core are closed, which ensures the overall appearance consistency of the platform and the uniformity of the external installation benchmark.

[0029] The upper panel 2 needs to support multiple functional components simultaneously. The installation positions, installation postures, and local stiffness requirements of each component are different. If it is installed directly on the flat plate, the local stiffness will be insufficient and the installation reference will be difficult to guarantee. In some specific embodiments of this application, the side mounting area is a side mounting boss 21, and the central mounting area is a central mounting boss 22.

[0030] Specifically, the upper panel 2 is integrally formed with three side mounting bosses 21 and one central mounting boss 22. The side mounting bosses 21 are used to mount the laser reflectors 1 in three directions, and the central mounting boss 22 is used to mount the wafer platform and the laser interferometer reflector.

[0031] It should be noted that, limited by the geometry of the sensing device and its magnetic levitation platform, this embodiment uses three laser reflectors. However, the actual sensing solution only requires two laser reflectors; the third laser reflector serves to balance the geometric center of gravity of the platform. In other embodiments, depending on the specific structure of the magnetic levitation system, other numbers of laser reflectors can be used. For example, if the magnetic levitation system does not use a laser rangefinder but instead uses other sensors such as a laser interferometer, then laser reflectors may not be necessary.

[0032] In this embodiment, a mounting boss structure is adopted, which provides a locally reinforced mounting base for each functional component without significantly increasing the overall mass, thus ensuring the installation rigidity and installation accuracy. Each boss is integrally formed with the upper panel 2, avoiding the cumulative error and loss of connection rigidity caused by additional connectors.

[0033] The eddy current damping permanent magnet 7 needs to be precisely positioned in the center of the lower plate, and it must not slip or deviate in the planar direction during the platform's high-speed movement and acceleration / deceleration, otherwise it will affect the symmetry and stability of the damping force. To solve this problem, in some specific embodiments of this application, the number of eddy current damping permanent magnets 7 is four, and the lower plate 4 integrally forms four limiting bosses 42; the four limiting bosses 42 restrict the planar position of the four eddy current damping permanent magnets 7 from the front, back, left and right directions.

[0034] Specifically, the limiting protrusion 42 is L-shaped, which is a right-angle structure composed of two mutually perpendicular sides. The four limiting protrusions 42 can be regarded as two groups, located diagonally opposite the permanent magnet mounting position, such as the L-shaped protrusion in the upper left corner and the L-shaped protrusion in the lower right corner. Their right-angled sides cooperate with each other to firmly restrict the permanent magnet in the designated area from the front, back, left and right directions.

[0035] In this embodiment, the integrated limiting boss 42 forms a planar constraint on the eddy current damped permanent magnet 7 from four directions, maintaining the position of the damped magnet. Reliable positioning can be achieved without additional fasteners or pressure plates, simplifying the assembly process. At the same time, the limiting boss 42 is integrally formed with the lower panel 4, without introducing additional connection gaps, ensuring positioning accuracy.

[0036] When the eddy current damped permanent magnet moves above the copper conductor plate, it needs to generate sufficient eddy current damping force. Simultaneously, since the platform moves in both the X and Y directions, the directional characteristics of the damping force should be uniform to avoid asymmetry in damping characteristics across different motion directions. In some specific embodiments of this application, four eddy current damped permanent magnets 7 are magnetized along the thickness direction. The four eddy current damped permanent magnets 7 are arranged in a two-row, two-column matrix, with the downward-facing working surfaces arranged in the first row (N, S) and the second row (S, N). Adjacent poles are opposite, diagonally opposite poles are the same, and they exhibit 90-degree rotational symmetry.

[0037] Specifically, the copper conductor plate is fixed to the base, maintaining a non-contact air gap with the four damping permanent magnets. For example... Figure 7As shown, X and Y represent two directions of motion in the horizontal plane, while F and v represent assumed directions. v represents the actual direction of motion of the magnetic levitation platform, and F is the damping effect exerted by the eddy current damper on the moving platform, resulting in a damping force. The markings F and v are to demonstrate that in the horizontal plane, i.e., the XY plane, the direction of the damping force is opposite to the actual direction of motion (i.e., the velocity direction). When the platform moves along the X-axis or Y-axis, the moving magnetic field induces closed eddy currents within the copper conductor plate 9. The reaction magnetic field formed by the eddy currents, according to Lenz's law, opposes relative motion, thus generating a damping force opposite to the platform's velocity direction. The symmetrical arrangement of magnetic poles ensures approximately consistent damping in the X and Y directions. The symmetrical structure of the four eddy current damping permanent magnets ensures that the platform can provide equal damping force and damping coefficient when moving in these two directions, achieving the same damping effect in all directions within the horizontal plane.

[0038] It should be noted that the number of eddy current damped permanent magnets and the number of Heilbeck permanent magnet arrays mentioned above were determined through simulation tests to ensure that they meet the safe distance and do not affect each other's magnetic fields.

[0039] In order to avoid the leakage magnetic field generated by the eddy current damped permanent magnet from interfering with the driving magnetic field and to ensure precise control of the driving force, in some specific embodiments of this application, the distance between the eddy current damped permanent magnet 7 and the Halebec permanent magnet array 5 is set such that the additional magnetic flux density generated by the eddy current damped permanent magnet 7 in the driving working area of ​​the Halebec permanent magnet array 5 does not exceed a preset threshold.

[0040] Specifically, both types of magnets use the same lower panel as the mounting reference, and their working surfaces facing the fixed part are located on the same magnet mounting plane. The safe distance between them is verified through three-dimensional static magnetic field simulation to ensure that the influence of the damping magnet on the magnetic flux density of the driving working area is within the allowable range. During the simulation, a three-dimensional static magnetic model of the Hellbeck permanent magnet array, eddy current damped permanent magnet, lower panel, and driving coil working area is established according to actual dimensions, and the material parameters and magnetization direction of the permanent magnets are set. The lower panel is treated as a non-magnetic material, the driving coil is not energized, and its effective conductor area is used as the magnetic field evaluation area; simultaneously, an outer air domain is set, and the mesh is refined at the magnet edges, air gap, and evaluation area. First, the reference magnetic flux density is calculated when only the Hellbeck permanent magnet array is used, and then the eddy current damped permanent magnet is added, and the minimum edge distance between the two types of magnets is parameter-scanned. When the change in magnetic flux density does not exceed the allowable limit, the magnetic field decoupling safety distance is determined in conjunction with manufacturing and assembly allowances. The Hellbeck permanent magnet array 5 concentrates the main magnetic flux on the side facing the fixed driving coil and weakens the back magnetic field and lateral leakage flux.

[0041] The relative position and safe distance between the driving magnetic array and the damping permanent magnet are determined by using the same bottom panel, thereby reducing the mutual influence between the two types of magnetic fields.

[0042] In order to facilitate the stable placement and leveling of the platform during assembly, maintenance or power outage, in some specific embodiments of this application, the lower panel 4 is integrally formed with a support mounting boss 41, which is used to connect the support legs 6.

[0043] Specifically, the lower panel 4 is integrally formed with three support mounting bosses 41. All of the above mounting bosses are provided with precision-machined mounting surfaces and threaded holes.

[0044] In this embodiment, the support mounting boss 41 provides a locally reinforced connection base for the support leg 6, ensuring connection rigidity and load-bearing capacity; the arrangement of the three support mounting bosses 41 forms a stable three-point support, avoiding over-constraint and facilitating the stable placement and leveling of the platform on the base.

[0045] It should be noted that in other embodiments, other numbers of support mounting bosses may be provided, and this application embodiment does not specifically limit this.

[0046] The above embodiments of this application provide a magnetic levitation motion platform that combines lightweight, high stiffness, and passive damping capabilities. The platform adopts a closed aluminum honeycomb sandwich structure to improve the stiffness-to-mass ratio and is beneficial to improving the low-order natural frequency. The Heilbeck permanent magnet array 5 and the damping permanent magnet are fixed on the bottom of the lower panel 4 and move with the platform. The damping permanent magnet and the fixed copper conductor plate on the base form a non-contact eddy current damping pair. The moving mass is reduced by the structure of the damping permanent magnet following and the copper conductor plate being fixed, and the platform vibration is suppressed by the permanent magnet eddy current effect, thereby improving the platform's dynamic response capability, operational stability, and structural safety.

[0047] Based on the same technical concept, another embodiment of this application provides a honeycomb sandwich permanent magnet eddy current damping magnetic levitation system, including the honeycomb sandwich permanent magnet eddy current damping magnetic levitation platform in any of the above embodiments, and further including a fixed base, a copper conductor plate 9, and at least three drive coils, wherein: the fixed base is disposed below the honeycomb sandwich permanent magnet eddy current damping magnetic levitation platform; the copper conductor plate 9 is fixed on the fixed base, facing the eddy current damping permanent magnet 7, and maintaining a non-contact air gap between it and the eddy current damping permanent magnet 7; the fixed base is also used to install drive coils. In this embodiment, the number of drive coils is at least three sets, the same as the number of Heilbeck permanent magnet arrays 5. The drive coils are respectively positioned opposite to and correspond one-to-one with at least three Heilbeck permanent magnet arrays 5, and are used to generate driving force to drive the honeycomb sandwich permanent magnet eddy current damping magnetic levitation platform to levitate and move.

[0048] It should be noted that in the above-mentioned magnetic levitation system, the laser measuring device faces the laser reflector 1. Based on the above-mentioned motion platform bearing structure, the fixed and dynamic distribution of the damping pair and the integrated relationship of the two types of moving magnets, the original drive, measurement and control system can also be applied.

[0049] In order to achieve real-time and high-precision detection of the platform position and form a closed-loop control, in some specific embodiments of this application, a capacitive sensor is also installed on the fixed base. The capacitive sensor faces the measured surface of the lower panel 4 and is used to detect the position information of the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform.

[0050] It should be noted that other components may also be installed on the fixed base, but this application embodiment does not limit this.

[0051] The core advantage of the magnetic levitation platform and system in the above embodiments of this application lies in the following: the Heilbeck permanent magnet array 5 and the damping permanent magnet are fixed on the same plane to the lower panel 4 and move with the platform, keeping the distance between them constant and reducing magnetic field interference. The damping permanent magnet and the fixed copper conductor plate form a "moving magnet, fixed copper" type damping pair, which can reduce the following mass and rotational inertia, generate non-contact damping force, suppress resonance and residual vibration, and improve the safety of the platform in the event of loss of control. The closed aluminum honeycomb sandwich layer bears in-plane tension and compression through the panel and transmits interlayer shear through the honeycomb core, achieving high bending and torsional stiffness with low mass, increasing the platform's low-order natural frequencies, keeping the structural modes away from the control operating frequency band, reducing the risk of resonance, and leaving a margin for increasing the achievable control bandwidth.

[0052] The preferred features in the above embodiments can be used individually in any embodiment, or in any combination thereof, provided they do not conflict with each other. Furthermore, parts not described in detail in the embodiments can be implemented using existing technologies.

[0053] In the description of the embodiments of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature.

[0055] In the description of the embodiments in this application, "multiple" means two or more, unless otherwise explicitly specified. In this application, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0056] The terms "comprising" and "having," and any variations thereof, in the embodiments of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such processes, methods, products, or devices.

[0057] The foregoing has described some specific embodiments of this application. It should be understood that this application is not limited to the specific embodiments described above, and those skilled in the art can make various modifications or variations within the scope of the claims, which do not affect the substantive content of this application. The above-described preferred features can be used in any combination without conflict.

Claims

1. A honeycomb sandwich-type permanent magnet eddy current damped magnetic levitation platform, characterized in that, include: The closed-cell honeycomb sandwich support is formed by the upper panel, aluminum honeycomb core, lower panel and side sealing plate; The upper panel is provided with a side mounting area and a central mounting area. The side mounting area is used to mount the laser reflector, and the central mounting area is used to mount the wafer platform and the laser interferometer reflector. An eddy current damped permanent magnet is disposed in the middle region of the lower panel; At least three Hellbeck permanent magnet arrays are arranged circumferentially at intervals at the bottom of the lower panel.

2. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The upper panel and the aluminum honeycomb core, the lower panel and the aluminum honeycomb core, and the side sealing plate and the circumferential side of the aluminum honeycomb core are all connected by adhesive bonding.

3. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The periphery of the lower panel extends outward relative to the upper panel to form a supporting adhesive edge, and the lower end of the side sealing plate is disposed on the supporting adhesive edge; after assembly, the outer surface of the side sealing plate is flush with the outer surface of the periphery of the lower panel.

4. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The side mounting area is a side mounting boss, and the central mounting area is a central mounting boss.

5. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The number of eddy current damping permanent magnets is 4, and the lower panel is integrally formed with four limiting bosses; the four limiting bosses restrict the planar position of the four eddy current damping permanent magnets from the front, back, left and right directions.

6. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 5, characterized in that, The four eddy current damping permanent magnets are magnetized along the thickness direction. The four eddy current damping permanent magnets are arranged in a two-row, two-column matrix. The downward working surfaces are arranged in the first row as N and S, and the second row as S and N. Adjacent opposite poles are opposite poles, and diagonally opposite poles are the same pole.

7. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The spacing between the eddy current damped permanent magnet and the Halebeck permanent magnet array is set such that the additional magnetic flux density generated by the eddy current damped permanent magnet in the driving working area of ​​the Halebeck permanent magnet array does not exceed a preset threshold.

8. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform according to claim 1, characterized in that, The lower panel is integrally formed with a support mounting boss, which is used to connect the support legs.

9. A honeycomb sandwich permanent magnet eddy current damped magnetic levitation system, characterized in that, include: Honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform as described in any one of claims 1 to 8; A fixed base is located below the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform; A copper conductor plate is fixed on the fixed base, and a non-contact air gap is maintained between it and the eddy current damping permanent magnet. At least three drive coils are mounted on the fixed base and correspond one-to-one with at least three of the Heilbeck permanent magnet arrays to generate driving force to drive the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform to levitate and move.

10. The honeycomb sandwich permanent magnet eddy current damped magnetic levitation system according to claim 9, characterized in that, A capacitive sensor is also installed on the fixed base, which is used to detect the position information of the honeycomb sandwich permanent magnet eddy current damped magnetic levitation platform.

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