A semiconductor detection device and a wireless transmission device for switching value signals thereof

Abstract

The application discloses a kind of semiconductor detection equipment and its wireless transmission device of switching quantity signal.The device, signal detection circuit includes AC excitation power supply and resonant circuit, resonant circuit includes receiving inductance and resonance capacitor, AC excitation power supply is connected with resonant circuit, resonant circuit is excited under the excitation of AC excitation power supply and resonates to generate varying magnetic field.Signal sending circuit includes sending inductance and on-off controller, sending inductance is arranged in the magnetic field generated by resonant circuit, on-off controller is connected on the line between the two ends of sending inductance, and on-off controller controls the short circuit and open circuit of sending inductance.Signal processing circuit is connected with resonant circuit, and the resonant electric signal of resonant circuit is analyzed and processed to obtain the switching quantity signal of on-off controller, realizes the wireless transmission of switching quantity signal, avoids the leakage and miscommunication caused by misplacement or shielding using simple circuit, improves transmission reliability on the basis of reducing design and production cost.

Description

Technical Field

[0001] This invention relates to the field of wireless transmission technology, and in particular to a semiconductor detection device and a wireless transmission device for its switching signals. Background Technology

[0002] In large-scale semiconductor testing technology, rotating, swinging, or reciprocating motion mechanisms are often used to drive the movement of the device under test, so as to perform rapid, large-scale, and efficient testing with fewer testing devices.

[0003] In rotating, swinging, or reciprocating motion devices, there is relative motion between two modules. If the two modules transmit signals through ordinary cables, the cables are prone to repeated bending, wear, and insulation damage, and may even break.

[0004] To address the issue of cable bending, existing technologies typically employ a light transmitter and a photoelectric sensor in two separate modules, using optical signals to transmit information. However, this approach requires precise alignment of the sensor and transmitter installation positions and the optical path. During detection, misalignment or obstruction can easily lead to signal transmission failure, resulting in high design costs and low reliability. Summary of the Invention

[0005] This invention provides a semiconductor testing device and a wireless transmission device for switching signals, which improves the transmission reliability of switching signals while reducing design and production costs.

[0006] According to one aspect of the present invention, a wireless transmission device for switch signals is provided, comprising: a signal detection circuit, a signal transmission circuit, and a signal processing circuit. The signal detection circuit includes an AC excitation power supply and a resonant circuit. The resonant circuit includes a receiving inductor and a resonant capacitor. The AC excitation power supply is connected to the resonant circuit. The resonant circuit is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply. The signal transmitting circuit includes a transmitting inductor and an on / off controller. The transmitting inductor is disposed within the magnetic field generated by the resonant circuit. The on / off controller is connected to the line between the two ends of the transmitting inductor and is configured to control the short circuit and open circuit of the transmitting inductor. The signal processing circuit is connected to the resonant circuit and is configured to analyze and process the resonant electrical signal of the resonant circuit to obtain the switching signal of the on / off controller.

[0007] Optionally, the resonant capacitor includes a first resonant capacitor and a second resonant capacitor. The first resonant capacitor is connected in parallel with the receiving inductor to form a first parallel component, and the second resonant capacitor is connected in series with the first parallel component between the AC excitation power supply and the ground terminal.

[0008] Optionally, the signal processing circuit includes a preprocessing circuit and a comparator. The preprocessing circuit is connected to the resonant circuit and is configured to preprocess the resonant electrical signal. The preprocessing includes unidirectional rectification, voltage division, filtering, and hold processing, among others. The comparator is connected to the preprocessing circuit and is configured to generate a corresponding switching signal based on the comparison result between the preprocessed resonant electrical signal and the preset electrical signal.

[0009] Optionally, the preprocessing circuit includes a diode, a first resistor, a second resistor, and a third capacitor; The first resistor is connected between the output terminal and the ground terminal of the resonant circuit; the second resistor and the third capacitor are connected in parallel to form a second parallel component; the diode and the second parallel component are connected in series between the output terminal and the ground terminal; the cathode of the diode is connected to the comparator.

[0010] Optionally, the preprocessing circuit includes a bridge rectifier circuit or a synchronous rectifier circuit.

[0011] Optionally, the transmitting inductor can move relative to the receiving inductor within a preset travel distance.

[0012] Optionally, the travel distance between the transmitting inductor and the receiving inductor, and the design parameters of the resonant circuit, are configured such that, in the initial state, the equivalent inductance of the receiving inductor is less than a first preset inductance and greater than a second preset inductance, while in the short-circuit state, the voltage gain of the resonant circuit monotonically increases and the equivalent inductance of the receiving inductor is close to but not less than the second preset inductance. The first preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its minimum value; the second preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its maximum value.

[0013] Optionally, the travel distance between the transmitting inductor and the receiving inductor and the design parameters of the resonant circuit are configured such that the equivalent inductance of the receiving inductor is less than a second preset inductance in the initial state, while the voltage gain of the resonant circuit monotonically decreases and the equivalent inductance of the receiving inductor monotonically decreases in the short-circuit state. The second preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its maximum value.

[0014] Optionally, the receiving inductor and the transmitting inductor include at least one of the following: a hollow coil, a magnetic core coil, a PCB coil, or a flexible circuit coil.

[0015] According to another aspect of the present invention, a semiconductor testing device is provided, the semiconductor testing device comprising: a wireless transmission device for switching signals as described in any of the first aspects.

[0016] The semiconductor testing device and its wireless transmission device for switching signals provided by this invention include a signal detection circuit, a signal transmission circuit, and a signal processing circuit. The signal detection circuit includes an AC excitation power supply and a resonant circuit. The resonant circuit includes a receiving inductor and a resonant capacitor. The AC excitation power supply is connected to the resonant circuit, which is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply. The signal transmission circuit includes a transmitting inductor and an on / off controller. The transmitting inductor is positioned within the magnetic field generated by the resonant circuit, and the on / off controller is connected to the line between the two ends of the transmitting inductor. The on / off controller is configured to control the short circuit and open circuit of the transmitting inductor. The signal processing circuit is connected to the resonant circuit and is configured to analyze and process the resonant electrical signal of the resonant circuit to obtain the switching signal from the on / off controller. This achieves wireless transmission of the switching signal, avoids missed or mistransmissions due to misalignment or obstruction using a simple circuit, and improves transmission reliability while reducing design and production costs.

[0017] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the composition of a wireless transmission device for switch signals according to an embodiment of the present invention; Figure 2 A schematic diagram showing the change of voltage gain of a resonant circuit as a function of the equivalent inductance of the receiving inductor, provided in an embodiment of the present invention. Figure 3 A circuit diagram of another wireless transmission device for switch signals provided in an embodiment of the present invention; Figure 4 This is a schematic diagram of the composition of a semiconductor testing device provided in an embodiment of the present invention. Detailed Implementation

[0020] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0021] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0022] To address the problems mentioned in the background art, this invention proposes a wireless transmission device for switch signals, which enables wireless signal transmission between two modules that do not require physical contact. Figure 1 This is a schematic diagram of the composition of a wireless transmission device for switch signals according to an embodiment of the present invention. Based on the foregoing embodiment, refer to... Figure 1 The wireless transmission device 100 for switching signals includes a signal detection circuit 101, a signal transmission circuit 102, and a signal processing circuit 103. The signal detection circuit 101 includes an AC excitation power supply 104 and a resonant circuit 105. The resonant circuit 105 includes a receiving inductor L1 and a resonant capacitor C. The AC excitation power supply 104 is connected to the resonant circuit 105, and the resonant circuit 105 is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply 104. The signal transmission circuit 102 includes a transmitting inductor L2 and an on / off controller 106. The transmitting inductor L2 is positioned within the magnetic field generated by the resonant circuit 105, and the on / off controller 106 is connected to the line between the two ends of the transmitting inductor L2. The on / off controller 106 is configured to control the short circuit and open circuit of the transmitting inductor L2. The signal processing circuit 103 is connected to the resonant circuit 105 and is configured to analyze and process the resonant electrical signal of the resonant circuit 105 to obtain the switching signal from the on / off controller 106.

[0023] Specifically, the signal transmitting circuit 102 refers to a functional component that realizes the transmission of switching signals by controlling the closing and opening of the circuit where the transmitting inductor L2 is located. It includes the transmitting inductor L2 and the on / off controller 106. The on / off controller 106 is a device that controls the on / off of the circuit where the transmitting inductor L2 is located. It is set in the circuit of the transmitting inductor L2 and controls the on / off of the circuit of the transmitting inductor L2 according to the switching signal to be transmitted. For example, the on / off controller 106 may include an electronic switch, a mechanical switch or a controlled contact. When the circuit containing the transmitting inductor L2 is closed, the transmitting inductor L2 is short-circuited, forming a closed loop, and its corresponding switching signal can be "1"; when the circuit containing the transmitting inductor L2 is open, the transmitting inductor L2 is open-circuited and cannot form a closed loop, and its corresponding switching signal can be "0". Based on this, the on / off controller 106 can control the on / off state of the transmitting inductor L2 according to the switching signal to be transmitted, thereby realizing the transmission of the switching signal. Correspondingly, the signal detection circuit 101 receives the switching signal by detecting the on / off state of the transmitting inductor L2.

[0024] The AC excitation voltage is the AC voltage source for the signal detection circuit 101. The signal detection circuit 101 uses the AC excitation power supply 104 to power the resonant circuit 105, generating a changing magnetic field around the receiving inductor L1 in the resonant circuit 105. An inductor with a closed loop (e.g., the loop of the transmitting inductor L2) in the magnetic field will generate a current in that loop due to electromagnetic induction, which will then act on the receiving inductor L1, causing a corresponding change in the equivalent inductance of the receiving inductor L1. Consequently, the resonant electrical signal of the resonant circuit 105 will also change accordingly. By detecting the resonant electrical signal, the continuity of the loop in the magnetic field can be determined, thus enabling the reception of the switching signal emitted by the signal transmitting circuit 102. For example, the resonant electrical signal may include the resonant voltage in the resonant circuit 105, and the receiving inductor L1 and the transmitting inductor L2 may each be at least one of a hollow coil, a magnetic core coil, a PCB coil, or a flexible circuit coil.

[0025] The signal processing circuit 103 is a functional circuit that analyzes and processes the resonant electrical signal. It can analyze the changes in the resonant electrical signal to determine the switching signal emitted by the on / off controller 106. The processing of the resonant electrical signal by the signal processing circuit 103 can include unidirectional rectification, voltage division, filtering, and voltage holding, at least one of these. The analysis of the resonant electrical signal by the signal processing circuit 103 can be a comparative analysis to determine the relative relationship between the resonant electrical signal and a preset electrical signal. For example, the relative relationship between the resonant electrical signal and the preset electrical signal can be a voltage relationship. When the voltage of the resonant electrical signal is greater than the preset voltage, the signal processing circuit 103 can output a high level; otherwise, it outputs a low level, thus outputting a switching signal to receive and analyze the switching signal from the on / off controller 106.

[0026] The wireless transmission device for switch signals provided in this embodiment includes a signal detection circuit, a signal transmission circuit, and a signal processing circuit. The signal detection circuit includes an AC excitation power supply and a resonant circuit. The resonant circuit includes a receiving inductor and a resonant capacitor. The AC excitation power supply is connected to the resonant circuit, which is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply. The signal transmission circuit includes a transmitting inductor and an on / off controller. The transmitting inductor is positioned within the magnetic field generated by the resonant circuit, and the on / off controller is connected to the line between the two ends of the transmitting inductor. The on / off controller is configured to control the short circuit and open circuit of the transmitting inductor. The signal processing circuit is connected to the resonant circuit and is configured to analyze and process the resonant electrical signal of the resonant circuit to obtain the switch signal from the on / off controller. This achieves wireless transmission of the switch signal, avoids missed or mistransmissions due to misalignment or obstruction using a simple circuit, and improves transmission reliability while reducing design and production costs.

[0027] Optionally, based on the foregoing embodiments, refer to... Figure 1 The resonant capacitor includes a first resonant capacitor C1 and a second resonant capacitor C2. The first resonant capacitor C1 is connected in parallel with the receiving inductor L1 to form a first parallel component. The second resonant capacitor C2 is connected in series with the first parallel component between the AC excitation power supply and the ground terminal.

[0028] Specifically, the first resonant capacitor C1, the second resonant capacitor C2, and the receiving inductor L1 form an LCC resonant circuit. The connection point between the receiving inductor L1 and the second resonant capacitor C2 in the LCC resonant circuit serves as the detection signal output point k of the signal detection circuit 101. Figure 2 This is a schematic diagram illustrating the voltage gain of a resonant circuit as a function of the equivalent inductance of the receiving inductor, provided in an embodiment of the present invention. Figure 1 and Figure 2 In the LCC resonant circuit, the voltage gain at the detection signal output point k (also called the voltage gain of the resonant circuit 105) varies with the equivalent inductance of the receiving inductor L1, and includes two resonant data points: a maximum point A and a minimum point B. The voltage gain is equal to the ratio between the voltage amplitude at the detection signal output point k and the voltage amplitude provided by the AC excitation power supply 104. On the curve of the voltage gain of the resonant circuit varying with the equivalent inductance of the receiving inductor, the maximum point is the data point where the voltage gain of the command resonant circuit is at its maximum, and conversely, the minimum point is the data point where the voltage gain of the command resonant circuit is at its minimum.

[0029] Continue to combine Figure 1 and Figure 2Since the AC power supply provided by the AC excitation power supply 104 is a sinusoidal wave with a fixed frequency, the voltage at the detection signal output point k is also a sinusoidal wave of the same frequency. Its variation is mainly manifested in the voltage amplitude at the detection signal output point k changing with the equivalent inductance of the receiving inductor L1. By adjusting the design parameters of the receiving inductor L1, the first resonant capacitor C1, the second resonant capacitor C2, and the frequency of the sinusoidal voltage provided by the AC excitation power supply 104, a reasonable initial state can be set for the receiving inductor L1.

[0030] The transmitting inductor L2 can move relative to the receiving inductor L1 within a preset travel distance. This preset travel distance can be set according to the functional requirements of the device to which the wireless transmission device 100 for switching signals is applied, and can be a preset curved travel distance, an arc travel distance, or a straight travel distance. For example, if the on / off controller 106 closes, short-circuiting the two ends of the transmitting inductor L2, and the receiving inductor L1 moves closer to the transmitting inductor L2 (sufficiently affecting the equivalent inductance of the receiving inductor L1), the state on the transmitting inductor L2 side will be reflected to the receiving inductor L1 side through electromagnetic induction, causing a decrease in the equivalent inductance of the receiving inductor L1. The closer the transmitting inductor L2 is to the receiving inductor L1, the smaller the equivalent inductance of the receiving inductor L1; the farther the distance between the transmitting inductor L2 and the receiving inductor L1, the weaker the coupling effect of the transmitting inductor L2 on the receiving inductor L1, and the equivalent inductance of the receiving inductor L1 will gradually increase and approach the inductance of the receiving inductor itself.

[0031] In some embodiments, by setting the travel distance between the transmitting inductor L2 and the receiving inductor L1 and the design parameters of the resonant circuit 105, the equivalent inductance of the receiving inductor L1 in the initial state can be made less than a first preset inductance and greater than a second preset inductance (that is, the data point corresponding to the equivalent inductance of the receiving inductor L1 and the voltage gain in the initial state is near the left side of the minimum point B on the change curve). Then, in the short-circuit state, the voltage gain of the resonant circuit 105 will monotonically increase in the opposite direction, and the equivalent inductance of the receiving inductor L1 will be close to the second preset inductance. The inductance is set to be no less than the second preset inductance. In the initial state, the circuit between the two ends of the transmitting inductor L2 remains open and the distance between the receiving inductor L1 and the transmitting inductor L2 remains unchanged. In the open-circuit state, the two ends of the transmitting inductor L2 are disconnected and the transmitting inductor L2 moves closer to the receiving inductor L1 according to a preset stroke. The first preset inductance is the equivalent inductance of the receiving inductor L1 when the voltage gain of the resonant circuit 105 reaches the minimum value. The second preset inductance is the equivalent inductance of the receiving inductor L1 when the voltage gain of the resonant circuit 105 reaches the maximum value.

[0032] In other embodiments, the travel distance between the transmitting inductor L2 and the receiving inductor L1 and the design parameters of the resonant circuit 105 are set such that the equivalent inductance of the receiving inductor L1 in the initial state is less than the second preset inductance (that is, the data point corresponding to the equivalent inductance of the receiving inductor L1 and the voltage gain in the initial state is near the left of the maximum value point A). Then, in the short-circuit state, the voltage gain of the resonant circuit 105 decreases monotonically in the opposite direction and the equivalent inductance of the receiving inductor L1 decreases monotonically. The second preset inductance is the equivalent inductance of the receiving inductor L1 when the voltage gain of the resonant circuit 105 reaches the maximum value.

[0033] The wireless transmission device for switch signals provided in this embodiment includes a first resonant capacitor and a second resonant capacitor. The first resonant capacitor is connected in parallel with the receiving inductor to form a first parallel component. The second resonant capacitor is connected in series with the first parallel component between the AC excitation power supply and the ground terminal. The two resonant capacitors and the receiving inductor form a resonant circuit with two resonant points. The travel distance between the transmitting inductor and the receiving inductor and the design parameters of the resonant circuit enable the voltage gain of the resonant circuit to change monotonically under short-circuit conditions. This facilitates the subsequent signal processing circuit in determining the real-time distance between the receiving inductor and the transmitting inductor based on the resonant electrical signal. This adds the measurement of relative distance to the wireless transmission of switch signals, further broadening the application range of the device.

[0034] Optionally, Figure 3 A circuit diagram of another wireless transmission device for switching signals provided in an embodiment of the present invention, based on the foregoing embodiments, with reference to... Figure 3 The signal processing circuit 103 includes a preprocessing circuit 401 and a comparator 402. The preprocessing circuit 401 is connected to the resonant circuit 105 and is configured to preprocess the resonant electrical signal. The preprocessing includes unidirectional rectification, voltage division, filtering, and hold processing, at least one of these. The comparator 402 is connected to the preprocessing circuit 401 and is configured to generate a corresponding switching signal based on the comparison result between the preprocessed resonant electrical signal and a preset electrical signal.

[0035] Specifically, the preprocessing circuit 401 includes a diode D, a first resistor R1, a second resistor R2, and a third capacitor C3. The first resistor R1 is connected between the output terminal of the resonant circuit 105 and the ground terminal; the second resistor R2 and the third capacitor C3 are connected in parallel to form a second parallel component, and the diode D and the second parallel component are connected in series between the signal output terminal k and the ground terminal. The cathode of the diode D is connected to the comparator 402. The diode D utilizes its unidirectional conductivity to unidirectionally rectify the AC voltage at the detection signal output point k of the resonant circuit 105. In other embodiments, the preprocessing circuit 401 can also use a bridge rectifier circuit or a synchronous rectifier circuit to replace the diode D in rectifying the AC voltage at the detection signal output point k. The first resistor R1, the second resistor R2, and the third capacitor C3 can divide, filter, and hold the AC voltage signal, ultimately forming a detection voltage provided to the subsequent comparator 402.

[0036] For example, because the on / off state of the circuit containing the transmitting inductor L2 causes a change in the equivalent inductance of the receiving inductor L1, and significantly changes the voltage gain at the detection signal output point k of the resonant circuit 105, the voltage amplitude at the detection signal output point k changes drastically with the on / off state of the circuit containing the transmitting inductor L2. After rectification, voltage division, filtering, and holding by diode D, first resistor R1, second resistor R2, and third capacitor C3, the resulting detection voltage exhibits a significant voltage difference between the short-circuited and open-circuited states of the transmitting inductor L2. Comparator 402 compares the detection voltage with a fixed threshold. When the detection voltage crosses the threshold, the voltage output by comparator 402 rapidly switches between high and low levels, forming a stable digital signal. Thus, the significant voltage difference between the short-circuited and open-circuited states of the transmitting inductor L2 is converted into two stable digital signals, thereby transmitting a switching signal to the signal detection circuit 101 via wireless transmission. The wireless transmission device 100 for this switch signal requires only a few components such as inductors, switches, capacitors, resistors, diodes D, and comparator 402. The circuit structure is simple, easy to debug, and has stable performance.

[0037] The present invention also provides a semiconductor testing device. Figure 4 This is a schematic diagram of the composition of a semiconductor detection device provided in an embodiment of the present invention, combined with... Figure 1 and Figure 4 The semiconductor testing equipment 500 includes a wireless transmission device 100 for switching signals in any of the foregoing embodiments.

[0038] The semiconductor testing device and its wireless transmission device for switching signals provided by this invention include a signal detection circuit, a signal transmission circuit, and a signal processing circuit. The signal detection circuit includes an AC excitation power supply and a resonant circuit. The resonant circuit includes a receiving inductor and a resonant capacitor. The AC excitation power supply is connected to the resonant circuit, which is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply. The signal transmission circuit includes a transmitting inductor and an on / off controller. The transmitting inductor is positioned within the magnetic field generated by the resonant circuit, and the on / off controller is connected to the line between the two ends of the transmitting inductor. The on / off controller is configured to control the short circuit and open circuit of the transmitting inductor. The signal processing circuit is connected to the resonant circuit and is configured to analyze and process the resonant electrical signal of the resonant circuit to obtain the switching signal from the on / off controller. This achieves wireless transmission of the switching signal, avoids missed or mistransmissions due to misalignment or obstruction using a simple circuit, and improves transmission reliability while reducing design and production costs.

[0039] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0040] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A wireless transmission device for switch signals, characterized in that, include: Signal detection circuit, signal transmission circuit, and signal processing circuit; The signal detection circuit includes an AC excitation power supply and a resonant circuit. The resonant circuit includes a receiving inductor and a resonant capacitor. The AC excitation power supply is connected to the resonant circuit. The resonant circuit is configured to resonate and generate a changing magnetic field under the excitation of the AC excitation power supply. The signal transmitting circuit includes a transmitting inductor and an on / off controller. The transmitting inductor is disposed within the magnetic field generated by the resonant circuit. The on / off controller is connected to the line between the two ends of the transmitting inductor and is configured to control the short circuit and open circuit of the transmitting inductor. The signal processing circuit is connected to the resonant circuit and is configured to analyze and process the resonant electrical signal of the resonant circuit to obtain the switching signal of the on / off controller.

2. The wireless transmission device for switch signals according to claim 1, characterized in that, The resonant capacitor includes a first resonant capacitor and a second resonant capacitor. The first resonant capacitor is connected in parallel with the receiving inductor to form a first parallel component. The second resonant capacitor is connected in series with the first parallel component between the AC excitation power supply and the ground terminal.

3. The wireless transmission device for switch signals according to claim 1, characterized in that, The signal processing circuit includes a preprocessing circuit and a comparator. The preprocessing circuit is connected to the resonant circuit and is configured to preprocess the resonant electrical signal. The preprocessing includes unidirectional rectification, voltage division, filtering, and hold processing, among others. The comparator is connected to the preprocessing circuit and is configured to generate a corresponding switching signal based on the comparison result between the preprocessed resonant electrical signal and the preset electrical signal.

4. The wireless transmission device for switch signals according to claim 3, characterized in that, The preprocessing circuit includes a diode, a first resistor, a second resistor, and a third capacitor; The first resistor is connected between the output terminal and the ground terminal of the resonant circuit; the second resistor and the third capacitor are connected in parallel to form a second parallel component; the diode and the second parallel component are connected in series between the output terminal and the ground terminal; the cathode of the diode is connected to the comparator.

5. The wireless transmission device for switch signals according to claim 3, characterized in that, The preprocessing circuit includes a bridge rectifier circuit or a synchronous rectifier circuit.

6. The wireless transmission device for switch signals according to any one of claims 1-5, characterized in that, The transmitting inductor is capable of moving relative to the receiving inductor within a preset travel distance.

7. The wireless transmission device for switch signals according to claim 6, characterized in that, The travel distance between the transmitting inductor and the receiving inductor, along with the design parameters of the resonant circuit, ensures that, in the initial state, the equivalent inductance of the receiving inductor is less than a first preset inductance and greater than a second preset inductance. In the short-circuit state, the voltage gain of the resonant circuit monotonically increases, and the equivalent inductance of the receiving inductor is close to but not less than the second preset inductance. The first preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its minimum value; the second preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its maximum value.

8. The wireless transmission device for switch signals according to claim 6, characterized in that, The travel distance between the transmitting inductor and the receiving inductor, and the design parameters of the resonant circuit, ensure that the equivalent inductance of the receiving inductor is less than the second preset inductance in the initial state, while in the short-circuit state, the voltage gain of the resonant circuit decreases monotonically and the equivalent inductance of the receiving inductor decreases monotonically. The second preset inductance is the equivalent inductance of the receiving inductor when the voltage gain of the resonant circuit reaches its maximum value.

9. The wireless transmission device for switch signals according to claims 1-5, characterized in that, The receiving inductor and the transmitting inductor include at least one of the following: hollow coil, magnetic core coil, PCB coil, or flexible circuit coil.

10. A semiconductor testing device, characterized in that, include: The wireless transmission device for switching signals according to any one of claims 1-9.

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