A protocol adaptive conversion method for multi-model ATE test equipment

Abstract

The application relates to the technical field of semiconductor ATE equipment management, and particularly discloses a protocol adaptive conversion method of multi-model ATE test equipment, a protocol adaptive conversion engine is built, a multi-type special protocol adapter of an adaptive real-time bus, a special communication network and a standard interface link is configured, automatic equipment network access detection and dynamic adaptive loading are realized through a protocol automatic identification module, private protocols are uniformly converted into a platform standard interface format; meanwhile, a data format standardization module is constructed, test data is uniformly converted into a standard message structure; a full life cycle unified file is established for each ATE equipment, centralized monitoring, remote management and control and batch task arrangement are realized; and a test program feature library is built in, cross-category test program difference comparison and migration assistance are supported. The application solves the problems of protocol heterogeneity, data island and scattered management and control of multi-model heterogeneous ATE equipment, and realizes unified management.

Description

Technical Field

[0001] This invention relates to the field of semiconductor automated test equipment management technology, and specifically to a protocol adaptive conversion method for multiple types of ATE test equipment. Background Technology

[0002] In modern semiconductor manufacturing and integrated circuit testing, ATE (Automatic Test Equipment) equipment is used to perform functional verification and performance testing on various semiconductor chips. With the increasing variety of chips and the growing complexity of testing requirements, semiconductor test facilities and OSAT (Output System Test Equipment) vendors typically need to deploy ATE equipment from multiple models and heterogeneous architectures simultaneously to meet the testing needs of different chip types such as SoCs, memory, and power devices.

[0003] The management of existing heterogeneous ATE test equipment of various models has the following prominent deficiencies: First, the heterogeneous ATE devices of different models employ their own proprietary communication protocols, resulting in significant heterogeneity between devices and between devices and the management platform. Some external high-end ATE devices use dedicated high-speed communication network architectures, supporting high-speed data connections, embedded computing, and real-time inter-board communication; another type of external high-end multi-site ATE devices uses proprietary standard interfaces paired with dedicated link connection technologies, along with industry-compatible interface specifications; internal low-end ATE devices generally use self-developed real-time bus architectures for high-speed data interaction between boards. The architectures, message formats, and interaction logics of these proprietary protocols differ greatly, making interoperability between devices difficult and preventing centralized management.

[0004] Secondly, the test data generated by different models of heterogeneous ATE equipment also differs significantly in format. Chip testing includes wafer probe testing and final testing, involving numerous production batches and a large volume of test data. While STDF is the industry standard for test data format, different models of heterogeneous equipment have implemented differentiated proprietary extensions based on STDF; simultaneously, many existing devices still use their own custom binary or text data formats. Although the SEMI A4 TEMS standard has been released and aims to establish a vendor-neutral, message-based data acquisition method, its adoption is low, and existing management platforms lack the ability to automatically normalize and convert heterogeneous data.

[0005] Third, the existing management platform lacks the ability to uniformly access and centrally monitor multiple heterogeneous ATE devices of various models and types. The test plant deploys multiple types of ATE devices, including low-voltage digital, high-current power, RF, and analog mixed signal devices. Due to the heterogeneity of models and architectures, equipment files, maintenance records, and operational history data are scattered across multiple independent systems, making it impossible to achieve globally unified equipment management and resource coordination and scheduling.

[0006] Fourth, existing technologies have shortcomings in cross-platform portability of test programs. The data formats, signal characteristics, and timing rules of ATE devices with different architectures vary significantly, and test programs often need to be redeveloped and debugged for cross-device reuse. Existing program conversion technologies only focus on code-level conversion and do not provide complete support from the perspectives of protocol access, data normalization, and platform management, resulting in poor practicality.

[0007] Therefore, there is an urgent need for a technical solution that can enable unified access, centralized management and data integration of multiple heterogeneous ATE test equipment models, reduce the operation and maintenance costs and integration complexity of multiple heterogeneous ATE equipment models, and improve equipment management efficiency. Summary of the Invention

[0008] The purpose of this invention is to provide a protocol adaptive conversion method for multiple types of ATE testing equipment to solve the above-mentioned technical problems.

[0009] The objective of this invention can be achieved through the following technical solutions: A protocol adaptive conversion method for multiple ATE test equipment models includes the following steps: S1. Construct a protocol adaptive conversion engine, which has a built-in pluggable vendor protocol adapter cluster and an automatic protocol identification module; S2. Configure independent protocol adapters for the proprietary communication protocols of different models of heterogeneous ATE test equipment; S3. When a device is connected, the protocol auto-identification module automatically detects the device type, hardware model and communication protocol type, dynamically loads the matching protocol adapter, and completes private protocol message parsing, instruction encapsulation and bidirectional communication interaction. S4, the protocol adaptive conversion engine, maps the device operating status, board parameters, test task information and control commands obtained by each adapter into a unified and standardized message format within the platform. S5. Build a data format standardization module to identify and parse the raw test data output by heterogeneous ATE models, and convert the parsed data into a standardized message structure. S6. Establish a unique, full-lifecycle device file for each connected ATE testing device on a unified management platform to achieve centralized filing of multiple types of ATE devices.

[0010] As a further aspect of the present invention: in step S2, configuring the independent protocol adapter specifically includes: The first type of protocol adapter adapts to the private real-time bus protocol of internal ATE devices; the second type of protocol adapter adapts to the dedicated communication network protocol of external SoC ATE devices; and the third type of protocol adapter adapts to the standard interface and dedicated link specifications of external multi-site parallel ATE devices.

[0011] As a further aspect of the present invention: S4 includes a standard RESTful API and a standard HTTP JSON message format.

[0012] As a further aspect of the present invention: the raw test data in S5 includes the STDF standard format, the heterogeneous STDF extended format for each model, and the model-specific custom binary / text test data format; The standardized message structure is a message structure that conforms to the SEMI A4 TEMS specification.

[0013] As a further aspect of the present invention: In S6, the full lifecycle device file mainly includes: basic information of the archive storage device, hardware configuration parameters, board list, firmware / driver version, calibration and maintenance records, fault alarm logs and historical operating performance data.

[0014] As a further aspect of the present invention: the ATE test equipment includes a SoC test system, a memory test system, and a power device test system, which are suitable for semiconductor chip wafer probe testing and finished product testing scenarios.

[0015] As a further aspect of the present invention, it also includes a test program cross-platform migration step: Pre-build a feature library of multi-category ATE test programs and read the configuration file of the test program to be migrated; By comparing the differences in channel mapping, timing parameters, power sequence, and vector format between different devices, a difference comparison table and migration adaptation guidelines are automatically generated to complete the cross-device debugging and reuse of test programs.

[0016] As a further aspect of the present invention: when a new model / type of ATE device is connected, a corresponding protocol adapter needs to be added to the adapter cluster.

[0017] The beneficial effects of this invention are: 1. Achieve normalized adaptive access for multiple types of ATE private protocols: For three mainstream private protocols—internal real-time bus, external dedicated communication network, and external standard interface link—a pluggable adapter architecture is built, supporting automatic device detection and dynamic adapter loading without manual intervention, achieving lossless mapping of heterogeneous protocols to platform standard interfaces.

[0018] 2. Forward-looking compatibility with SEMI international standards: Automatically converts heterogeneous test data from multiple models into the SEMI A4 TEMS specification message structure, supports JSON / Protobuf dual format output, and can seamlessly connect to factory MES, EAP, and yield analysis platforms, solving the problem of data interoperability across devices and systems.

[0019] 3. Build a unified archive system for the entire lifecycle of multi-model heterogeneous devices: break down data silos among multi-model heterogeneous devices, centrally archive hardware, firmware, maintenance, and operation information, support global visual monitoring, remote management and control, and batch task orchestration, and significantly reduce cluster operation and maintenance and integration costs.

[0020] 4. Support cross-platform test program migration assistance: By building a multi-category ATE feature library, it automatically identifies differences in device timing, signal, and vector format, outputs migration adaptation suggestions, reduces the cost of redeveloping and debugging test programs, and improves the reusability of test assets.

[0021] 5. The modular and scalable architecture allows for quick integration of new ATE devices of different models or types, requiring only the addition of corresponding protocol adapters, resulting in strong versatility and practical engineering feasibility. Attached Figure Description

[0022] The invention will now be further described with reference to the accompanying drawings.

[0023] Figure 1 This is a flowchart illustrating a protocol adaptive conversion method for multi-model ATE testing equipment according to the present invention. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] The ATE testing equipment includes, but is not limited to, SoC testing systems, memory testing systems, power device testing systems, etc., and can be used for wafer testing and finished product testing of various types of semiconductor chips.

[0026] This invention aims to provide a protocol adaptive conversion method for multiple models of ATE test equipment, solving the problems of heterogeneous communication protocols, inconsistent data formats, decentralized management and control, and high program porting costs of existing technologies for different models of heterogeneous ATE equipment. It enables centralized monitoring, unified scheduling, data integration, and cross-platform assisted migration of test programs for multiple types of ATE test equipment, thereby reducing equipment management costs and integration complexity.

[0027] Please see Figure 1 As shown, this invention provides a protocol adaptive conversion method for multiple ATE test equipment models, comprising the following steps: S1. Construct a protocol adaptive conversion engine, which has a built-in pluggable vendor protocol adapter cluster and an automatic protocol identification module; S2. For the proprietary communication protocols of different models of heterogeneous ATE devices, configure independent protocol adapters respectively, including: a first type of protocol adapter that adapts to the private real-time bus protocol of internal ATE devices, a second type of protocol adapter that adapts to the proprietary communication network protocol of external SoC ATE devices, and a third type of protocol adapter that adapts to the standard interface and proprietary link specifications of external multi-site parallel ATE devices. S3. When a device is connected, the protocol auto-identification module automatically detects the device type, hardware model and communication protocol type, dynamically loads the matching protocol adapter, and completes private protocol message parsing, instruction encapsulation and bidirectional communication interaction. S4, the protocol adaptive conversion engine, maps the device operating status, board parameters, test task information and control commands issued by each adapter into a unified and standardized RESTful API or HTTP JSON standard message format within the platform. S5. Build a data format standardization module to identify and parse the raw test data output by heterogeneous ATE models, including the STDF standard format, the STDF extended format of each model, and the model's custom binary / text test data format. Convert the parsed data into a standardized message structure that conforms to the SEMI A4 TEMS specification. S6. Establish a unique, full-lifecycle device file for each connected ATE test device on the unified management platform. Archive and store basic device information, hardware configuration parameters, board list, firmware / driver version, calibration and maintenance records, fault alarm logs and historical operating performance data to achieve centralized filing and unified management of multiple types of ATE devices.

[0028] Specifically, this includes: Unified access between internal low-end SoC testing system and memory testing system: Multiple internal low-end SoC test systems and memory test systems have been deployed. The internal low-end SoC test system supports multi-channel I / O configuration and high-speed test rates, and is compatible with digital, analog, and mixed-signal testing; the internal low-end memory test system has large-scale digital channels and high-parallel DUT mass production capabilities, and is compatible with full-parameter testing of the entire range of memory chips. Although the two types of equipment are from the same manufacturer, their hardware architecture, real-time bus protocol data formats, and control interfaces differ.

[0029] After platform deployment, the protocol auto-identification module automatically identifies the device category, dynamically loads the first type of protocol adapter, parses the self-developed real-time bus protocol, and collects data such as board temperature, voltage, channel load, and test task conditions, converting them into a unified standard JSON message format. Test data, after multi-format parsing, is converted to the SEMI A4 standard structure and included in a unified file management system. Maintenance personnel can centrally monitor the operating status of both types of devices through a single web interface.

[0030] Multi-category hybrid deployment scenarios – unified management of internal low-end ATEs, external high-end SoC ATEs, and external multi-site parallel ATEs: Simultaneously deploying internal low-end ATEs, external high-end SoC test ATEs, and external multi-site parallel SoC ATEs to serve the testing needs of chips at different levels.

[0031] The platform loads three types of protocol adapters respectively: The second type of adapter analyzes the external high-end ATE dedicated communication network protocol and extracts the power supply, temperature, and link synchronization status of the test headboard. The third type of adapter is compatible with external multi-site ATE standard interfaces and dedicated link specifications, and can parse device version, test interface board configuration, site operating status and system health. The first type of adapter parses the internal low-end ATE real-time bus protocol and collects board parameters, channel load, and task status.

[0032] All equipment data is unified and standardized in SEMI A4 format, enabling centralized monitoring and unified resource scheduling of multiple ATE products across the entire plant with a single view.

[0033] Unified access management of the internal low-end power device testing system: An internal low-end power device testing system is deployed for testing power modules such as IGBTs and MOSFETs. Power testing features high sampling frequency and a large amount of waveform characteristic data.

[0034] After the device is connected, the power extension adaptation logic of the first type of protocol adapter is loaded to parse characteristic fields such as voltage spikes, power waveforms, and temperature rise gradients in the real-time bus protocol; the data standardization module fully retains the power test-specific data through the SEMI A4 standard extended fields; the device file records the power level, channel configuration and calibration cycle, and supports batch data analysis associated with abnormal alarms.

[0035] Test program for cross-platform compatibility: When test programs that have been developed on external high-end ATE need to be migrated to internal low-end SoC ATE for mass production, the test program compatibility management module reads the program configuration file, relies on the pre-built multi-category ATE feature library, compares the differences in channel mapping, timing parameters, power sequence, and vector format, and automatically generates a difference comparison table and migration guide. Engineers can quickly complete the adaptation and debugging based on the guide, and after debugging, the program can be deployed for execution and monitoring through the platform's standard interface.

[0036] A protocol adaptive conversion system for multiple ATE test equipment models includes: Protocol Adaptive Conversion Engine: The protocol adaptive conversion engine includes multiple types of heterogeneous dedicated protocol adapters and an automatic protocol identification module; the protocol adapters include a first type of protocol adapter, a second type of protocol adapter, and a third type of protocol adapter; the automatic protocol identification module automatically detects the device type and communication protocol type when the device is connected, and dynamically loads the corresponding protocol adapter; the protocol adaptive conversion engine uniformly maps the device status data and control commands parsed by each protocol adapter into the internal standard RESTful API or HTTP JSON message format.

[0037] Data format standardization module: The data format standardization module includes a multi-format parsing unit and a SEMI A4 standard conversion unit. The multi-format parsing unit identifies and parses test data generated by different models of heterogeneous ATE devices, including STDF and various models of heterogeneous extended formats, as well as various models of heterogeneous custom test data formats. The SEMI A4 standard conversion unit converts the parsed test data into a unified message structure that conforms to the SEMI A4 TEMS specification.

[0038] Equipment file management module: It is used to establish a full lifecycle profile for each connected ATE test device, recording complete information such as basic device information, hardware configuration, firmware version, maintenance and calibration records, and historical operation data, and provides device query, statistical analysis, remote monitoring, remote control and batch task orchestration functions.

[0039] Test program compatibility management module: It is used to analyze the configuration files, timing rules and signal characteristics of existing test programs, and supports the migration of test programs between different product categories by utilizing a pre-built ATE test program feature library.

[0040] Unified management of the front end: It is a web-based graphical dashboard that displays the real-time operating status, load, health score, and alarm information of each ATE test device, and provides device search, status filtering, alarm configuration, data export, and remote operation interface.

[0041] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the present invention should still fall within the scope of the present invention.

Claims

1. A protocol adaptive conversion method for multiple types of ATE testing equipment, characterized in that, Includes the following steps: S1. Construct a protocol adaptive conversion engine, which has a built-in pluggable vendor protocol adapter cluster and an automatic protocol identification module; S2. Configure independent protocol adapters for the proprietary communication protocols of different models of heterogeneous ATE test equipment; S3. When a device is connected, the protocol auto-identification module automatically detects the device type, hardware model and communication protocol type, dynamically loads the matching protocol adapter, and completes private protocol message parsing, instruction encapsulation and bidirectional communication interaction. S4, the protocol adaptive conversion engine, maps the device operating status, board parameters, test task information and control commands obtained by each adapter into a unified and standardized message format within the platform. S5. Build a data format standardization module to identify and parse the raw test data output by heterogeneous ATE models, and convert the parsed data into a standardized message structure. S6. Establish a unique, full-lifecycle device file for each connected ATE testing device on a unified management platform to achieve centralized filing of multiple types of ATE devices.

2. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, In step S2, configuring the independent protocol adapter specifically includes: The first type of protocol adapter adapts to the private real-time bus protocol of internal ATE devices; the second type of protocol adapter adapts to the dedicated communication network protocol of external SoC ATE devices; and the third type of protocol adapter adapts to the standard interface and dedicated link specifications of external multi-site parallel ATE devices.

3. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, The S4 includes standard RESTful APIs and standard HTTP JSON message formats.

4. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, The raw test data in S5 includes the STDF standard format, the STDF extended format for each model, and the model-specific custom binary / text test data format. The standardized message structure is a message structure that conforms to the SEMI A4 TEMS specification.

5. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, In S6, the full lifecycle device file mainly includes: basic information of the archive storage device, hardware configuration parameters, board list, firmware / driver version, calibration and maintenance records, fault alarm logs and historical operating performance data.

6. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, The ATE testing equipment includes a SoC testing system, a memory testing system, and a power device testing system, and is suitable for semiconductor chip wafer probe testing and finished product testing scenarios.

7. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, It also includes the steps for cross-platform migration of test programs: Pre-build a feature library of multi-category ATE test programs and read the configuration file of the test program to be migrated; By comparing the differences in channel mapping, timing parameters, power sequence, and vector format between different devices, a difference comparison table and migration adaptation guidelines are automatically generated to complete the cross-device debugging and reuse of test programs.

8. The protocol adaptive conversion method for multi-model ATE testing equipment according to claim 1, characterized in that, When a new model / type of ATE device is added to the network, a corresponding protocol adapter needs to be added to the adapter cluster.

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