A photodiode package assembly

Abstract

The application belongs to the technical field of semiconductor device manufacturing, and specifically relates to a photodiode packaging assembly, which comprises a workbench, the top of the workbench is provided with a multi-station turntable, the top of the multi-station turntable is provided with a movable cabin cover, the movable cabin cover is hinged to the surface of the workbench through a damping hinge, and the application further comprises: a plasma cleaning part arranged on the top of the workbench and used for effectively cleaning photodiodes placed in the multi-station turntable. The driving plate is synchronously rotated by a stepping motor, the rotating electromagnet generates a stable magnetic field after being continuously powered through a conductive slip ring, magnetic force coupling is formed between the rotating electromagnet and the magnetic disk at the bottom of the multi-station turntable, the multi-station turntable is driven to stably rotate in a non-contact mode, the vacuum isolation assembly and the sealing assembly are cooperatively used to construct a closed vacuum chamber, the radio frequency electrode piece excites plasma, and the photodiodes fixed by the diode positioning assembly are uniformly cleaned, so that the uniformity of workpiece cleaning and the process operation efficiency are significantly improved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor device manufacturing technology, specifically a photodiode packaging component. Background Technology

[0002] A photodiode, also known as a photodetector, is a photodetector that converts light into current or voltage signals depending on the application. The die often uses a PN junction with photosensitive characteristics, which is very sensitive to changes in light and has unidirectional conductivity. Moreover, the electrical characteristics change when the light intensity is different. In the packaging and manufacturing process of photodiodes, surface cleaning after die bonding and before wire bonding is the core process that determines the bonding reliability and device yield.

[0003] Existing plasma cleaning equipment for photodiodes mainly uses static stage cleaning. In equipment with a static stage structure, the workpiece is fixed in a vacuum chamber. The uniformity of plasma bombardment and chemical reaction on each surface is insufficient, and cleaning dead corners are easily formed at the edges and other positions, which directly leads to poor subsequent packaging effect and reduced photosensitivity. Summary of the Invention

[0004] To address the problems mentioned in the background art, the present invention provides a photodiode packaging assembly, including a worktable, a multi-station turntable disposed on the top of the worktable, a movable cover disposed on the top of the multi-station turntable, the movable cover being hinged to the surface of the worktable via a damping hinge, and further comprising: The plasma cleaning unit is located on the top of the worktable and is used to effectively clean the photodiodes placed inside the multi-station turntable. The plasma cleaning component includes a stepper motor fixedly installed inside the worktable. A conductive slip ring is fitted onto the output end of the stepper motor. A drive board is fixedly installed onto the output end of the stepper motor. A disk is fixedly installed at the bottom of the multi-station turntable. A rotating electromagnet is provided at the bottom of the disk. The bottom of the rotating electromagnet is fixedly installed on the top of the drive board. The conductive slip ring is electrically connected to the rotating electromagnet. A positioning slip ring is fixedly installed on the surface of the multi-station turntable. The positioning slip ring is slidably connected inside the worktable. A diode positioning assembly is installed inside the multi-station turntable. A vacuum isolation assembly is fixedly installed on the top of the worktable. A sealing assembly is installed on the surface of the multi-station turntable. The self-rotating full-cleaning component is located at the bottom of the multi-station turntable and is used to drive the photodiode to rotate, so that the photodiode can be cleaned thoroughly without dead angles.

[0005] In the above technical solution, the diode positioning assembly includes a positioning sleeve disposed inside a multi-station turntable. A limiting slip ring is fixedly installed on the surface of the positioning sleeve. A sliding groove is opened inside the multi-station turntable, and the limiting slip ring is slidably connected inside the sliding groove.

[0006] In the above technical solution, the self-rotating full cleaning component includes a drive shaft fixedly installed at the bottom of the positioning sleeve. The bottom of the drive shaft passes through the multi-station turntable and hangs below it. A gear is fixedly installed at its bottom end. A fixed gear ring is coaxially fixedly installed on the top surface of the worktable. The teeth of the gear mesh with the inner gear ring of the fixed gear ring. A magnetic positioning component is installed inside the positioning sleeve.

[0007] In the above technical solution, the magnetic positioning component includes a small magnetic block that slides inside the positioning sleeve. Each of the four corners of the top of the small magnetic block is fixedly mounted with a slanted vertical plate. The top of the slanted vertical plate extends through to the top of the positioning sleeve. A positioning plate is hinged to the surface of the slanted vertical plate via a sliding rod. Both the positioning plate and the slanted vertical plate are slidably connected inside the positioning sleeve. A reset spring is fixedly mounted at the bottom of the small magnetic block. The bottom of the reset spring is fixedly mounted at the bottom of the inner wall of the positioning sleeve. An adsorption electromagnet is provided at the bottom of the small magnetic block. The bottom of the adsorption electromagnet is fixedly mounted at the top of the drive plate. The adsorption electromagnet is electrically connected to a conductive slip ring.

[0008] In the above technical solution, the vacuum isolation assembly includes an isolation cover set on the top of the multi-station turntable. A connecting plate is fixedly installed on the rear side of the isolation cover. Electric push rods are fixedly installed on both sides of the bottom of the connecting plate. The bottom of the electric push rods is fixedly installed on the top of the worktable. Radio frequency electrode plates are fixedly installed on the top of the isolation cover. The bottom of the radio frequency electrode plates penetrates into the interior of the isolation cover. An air inlet pipe and an exhaust pipe are respectively connected to the rear sides of the top of the isolation cover. Solenoid valves are installed on the surface of the air inlet pipe and the exhaust pipe. The rear sides of the air inlet pipe and the exhaust pipe both penetrate into the interior of the worktable. A small vacuum pump is connected to the rear side of the top of the isolation cover.

[0009] In the above technical solution, the sealing assembly includes a sealing substrate fixedly installed on the top of the workbench, the sealing substrate being sleeved on the surface of the multi-station turntable, a sealing gasket being fixedly installed at the bottom of the isolation cover, a sealing sleeve being sleeved on the surface of the multi-station turntable, the bottom of the sealing sleeve being fixedly installed on the top of the workbench, and a secondary sealing ring being sleeved on the surface of the multi-station turntable, the secondary sealing ring being installed inside the workbench.

[0010] In the above technical solution, a stabilizing sealing tube is sleeved on the outer side of the drive shaft, the top end of the stabilizing sealing tube is fixedly connected to the bottom surface of the multi-station turntable, and the inner wall of the stabilizing sealing tube is rotatably engaged with the outer wall of the drive shaft.

[0011] In the above technical solution, a buffer ring is fixedly installed inside the drive plate, and the buffer ring is sleeved on the surface of the transmission shaft.

[0012] In the above technical solution, a soft pad is fixedly bonded to the clamping working surface of the positioning plate, and a manual pull plate is fixedly installed at the top of the inclined groove vertical plate, with the manual pull plate exposed on the top surface of the positioning sleeve.

[0013] In the above technical solution, guide brackets are slidably fitted on both sides of the front side of the connecting plate, and the bottom end of the guide bracket is fixedly installed on the top surface of the workbench to provide vertical guidance for the lifting and lowering movement of the isolation cover.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention uses a stepper motor to drive the drive board to rotate synchronously. The rotating electromagnet generates a stable magnetic field after being continuously powered by a conductive slip ring. This magnetic field forms a magnetic coupling with the disk at the bottom of the multi-station turntable, driving the multi-station turntable to rotate smoothly in a non-contact manner. The vacuum isolation component and the sealing component work together to construct a sealed vacuum chamber. The radio frequency electrode sheet excites plasma to uniformly clean the photodiodes that are precisely fixed by the diode positioning component, which significantly improves the uniformity of workpiece cleaning and the efficiency of process operation.

[0015] Furthermore, the multi-station turntable revolves with the drive plate, and the transmission shaft feeds synchronously with the multi-station turntable. The bottom gear meshes with the fixed gear ring fixed to the inner wall of the worktable. Since the fixed gear ring is stationary, the gear generates a rotational motion while revolving. The torque is transmitted upward through the transmission shaft, driving the top positioning sleeve and the internal photodiode to rotate synchronously, realizing a compound motion of revolution and rotation, and improving the uniformity of plasma bombardment and chemical reaction.

[0016] Furthermore, the electromagnet, powered by a conductive slip ring, generates an attractive magnetic force, which pulls a small magnetic block to slide downwards along the inner wall of the positioning sleeve. Simultaneously, it drives the inclined groove vertical plates at the four corners to move downwards. The inclined groove vertical plates are driven by a sliding rod hinge, which converts the vertical motion into the radial closing action of the positioning plate, realizing the automatic centering and clamping positioning of the photodiode. After the power is cut off, the magnetic force disappears, the reset spring pushes the small magnetic block upwards to reset, and the positioning plate simultaneously opens radially to release the workpiece. This achieves a clamping structure without blind spots caused by cleaning obstructions, which can avoid surface indentation damage to the workpiece. Attached Figure Description

[0017] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings; Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the structure of the vacuum isolation component of the present invention; Figure 3 This is a schematic diagram of the structure of the multi-station turntable of the present invention; Figure 4 This is a schematic diagram of the slide groove of the present invention; Figure 5 This is a schematic diagram of the structure of the stable sealing tube of the present invention; Figure 6 This is a schematic diagram of the structure of the driver board of the present invention; Figure 7 This is a schematic diagram of the structure of the fixing toothed ring of the present invention; Figure 8 This is a schematic diagram of the positioning sleeve of the present invention; Figure 9 This is a schematic diagram of the gear structure of the present invention; Figure 10 This is a schematic diagram of the magnetic positioning component of the present invention.

[0018] In the diagram: 1. Workbench; 2. Multi-station turntable; 3. Movable chamber cover; 4. Plasma cleaning components; 41. Stepper motor; 42. Conductive slip ring; 43. Drive board; 44. Disk; 45. Rotary electromagnet; 46. Positioning slip ring; 47. Diode positioning assembly; 471. Positioning sleeve; 472. Limiting slip ring; 473. Slide groove; 48. Vacuum isolation assembly; 481. Isolation cover; 482. Connecting plate; 483. Electric push rod; 484. RF electrode plate; 485. Inlet pipe; 486. Exhaust pipe; 87. Solenoid valve; 488. Small vacuum pump; 49. Sealing assembly; 491. Sealing substrate; 492. Sealing gasket; 493. Sealing sleeve; 494. Secondary sealing ring; 5. Self-rotating full-cleaning component; 51. Drive shaft; 52. Gear; 53. Fixed gear ring; 6. Magnetic positioning component; 61. Small magnetic block; 62. Inclined groove vertical plate; 63. Positioning plate; 64. Reset spring; 65. Adsorption electromagnet; 7. Stabilizing sealing tube; 8. Buffer ring; 9. Soft pad; 10. Manual pull plate; 11. Guide bracket. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] like Figures 1 to 7 As shown, the present invention provides a photodiode packaging assembly, including a workbench 1, a multi-station turntable 2 disposed on the top of the workbench 1, a movable cover 3 disposed on the top of the multi-station turntable 2, the movable cover 3 being hinged to the surface of the workbench 1 by a damping hinge, and further comprising: Plasma cleaning component 4 is set on top of workbench 1 and is used to effectively clean the photodiodes placed inside the multi-station turntable 2. The plasma cleaning component 4 includes a stepper motor 41 fixedly installed inside the worktable 1. A conductive slip ring 42 is sleeved on the output end of the stepper motor 41. A drive board 43 is fixedly installed on the output end of the stepper motor 41. A disk 44 is fixedly installed on the bottom of the multi-station turntable 2. A rotating electromagnet 45 is provided on the bottom of the disk 44. The bottom of the rotating electromagnet 45 is fixedly installed on the top of the drive board 43. The conductive slip ring 42 is electrically connected to the rotating electromagnet 45. A positioning slip ring 46 is fixedly installed on the surface of the multi-station turntable 2. The positioning slip ring 46 is slidably connected inside the worktable 1.

[0021] Specifically, stepper motor 41 is a commercially available two-phase hybrid precision stepper motor, fixedly installed inside the worktable 1, serving as the power source for the entire rotary drive system. It can precisely control the output speed and indexing angle, adapting to the cleaning process rhythm of different specifications of photodiodes. Conductive slip ring 42 is a standard cap-type conductive slip ring, fitted onto the output end of stepper motor 41, used to stably supply electrical energy to the rotating electromagnet 45 on the rotating side during continuous rotation, preventing wire entanglement or breakage as the turntable rotates. Drive plate 43 is a rigid transmission connecting plate, fixedly connected to the output end of stepper motor 41, and also serves as the mounting carrier for rotating electromagnet 45, ensuring the coaxial installation accuracy of the stepper motor 41 output shaft and rotating electromagnet 45, guaranteeing the torque transmission efficiency and operational stability of the magnetic drive. Rotating electromagnet 45 is a commercially available... The retaining suction cup electromagnet is fixedly installed on the top of the drive plate 43. After being energized, it generates a stable and controllable magnetic field, which works with the disk 44 to achieve non-contact power transmission without mechanical wear. The disk 44 is a permanent magnet driven disk, fixedly installed at the bottom of the multi-station turntable 2. As the driven end of the magnetic transmission, it drives the multi-station turntable 2 to rotate synchronously under the magnetic field of the rotating electromagnet 45, with no physical contact or friction loss throughout the process. The positioning slip ring 46 is a commercially available rotary guide limit slip ring, fixed on the surface of the multi-station turntable 2, and slides in cooperation with the guide structure inside the worktable 1. It can limit the radial offset and axial movement of the multi-station turntable 2, ensuring the coaxiality and stability of the rotary motion. The movable cover 3 is a flip-type protective cover, which can play an auxiliary role in dust prevention and protection when closed, and together with the vacuum isolation structure, it can ensure the cleanliness of the cleaning chamber.

[0022] like Figures 1 to 2As shown, a vacuum isolation assembly 48 is fixedly installed on the top of the workbench 1. The vacuum isolation assembly 48 includes an isolation cover 481 set on the top of the multi-station turntable 2. A connecting plate 482 is fixedly installed on the rear side of the isolation cover 481. Electric push rods 483 are fixedly installed on both sides of the bottom of the connecting plate 482. The bottom of the electric push rods 483 is fixedly installed on the top of the workbench 1. An RF electrode plate 484 is fixedly installed on the top of the isolation cover 481. The bottom of the RF electrode plate 484 extends into the interior of the isolation cover 481. An air inlet pipe 485 and an exhaust pipe 486 are respectively connected to the rear sides of the top of the isolation cover 481. Solenoid valves 487 are installed on the surface of the air inlet pipe 485 and the exhaust pipe 486. The rear sides of the air inlet pipe 485 and the exhaust pipe 486 extend into the interior of the workbench 1. A small vacuum pump 488 is connected to the rear side of the top of the isolation cover 481.

[0023] Specifically, the electric actuator 483 is a commercially available straight-rod DC electric actuator. Its bottom end is fixedly mounted on the top of the worktable 1, and its output end is fixedly connected to the bottom of the connecting plate 482. As the power actuator for raising and lowering the isolation cover 481, it can synchronously output linear thrust to drive the isolation cover 481 to rise and fall smoothly. It has high stroke control precision, ensuring uniform force on the sealing surface when the isolation cover 481 is engaged. The isolation cover 481 is positioned above the multi-station turntable 2, serving as a sealed reaction space for plasma cleaning, creating a vacuum environment and facilitating plasma stimulation. The system provides a sealed base to isolate the cleaning process from external air and dust. The connecting plate 482 is a rigid connecting frame, fixedly connected to the isolation cover 481 at the rear, and its bottom ends are respectively connected to the output ends of the electric push rods 483 on both sides. This allows the power of the push rods on both sides to be evenly transmitted to the isolation cover 481, preventing skewness and jamming during lifting and ensuring coaxiality and stability of movement. The radio frequency electrode plate 484 is a commercially available flat radio frequency electrode, fixedly embedded in the top of the isolation cover 481, with its bottom end extending into the cavity to connect to the radio frequency circuit. After power is supplied, an alternating electric field can be established within the cavity to ionize the process gas into plasma with cleaning activity. This is the core functional component for initiating the plasma cleaning reaction. The inlet pipe 485 and the exhaust pipe 486 are vacuum-specific process pipelines, respectively connected to the top of the isolation shield 481 on both sides. The inlet pipe 485 is used to introduce cleaning process gases such as argon or oxygen into the cavity, while the exhaust pipe 486 is used to discharge reaction byproducts and excess gas, together maintaining the dynamic stability of gas composition and pressure within the cavity. The solenoid valve 487 is a standard vacuum solenoid valve available on the market, installed on the inlet pipe 485 and the exhaust pipe 486 respectively. It can precisely control the opening and closing of the pipeline and the gas flow cross-sectional area, and, together with the small vacuum pump 488, achieves precise control of the vacuum level and gas concentration within the isolation shield 481. The small vacuum pump 488 is a commercially available miniature dry vacuum pump, connected to the top of the isolation shield 481, used to extract air from the cavity to establish the low-pressure vacuum environment required for plasma cleaning, ensuring stable excitation and maintenance of the plasma. This is the core vacuum source component for constructing the cleaning process.

[0024] like Figures 4 to 9 As shown, a diode positioning assembly 47 is installed inside the multi-station turntable 2. The diode positioning assembly 47 includes a positioning sleeve 471 disposed inside the multi-station turntable 2. A limiting slip ring 472 is fixedly installed on the surface of the positioning sleeve 471. A sliding groove 473 is opened inside the multi-station turntable 2, and the limiting slip ring 472 is slidably connected inside the sliding groove 473.

[0025] Specifically, the positioning sleeve 471 serves as the direct carrier and positioning substrate for the photodiode, embedded in the internal station of the multi-station turntable 2. It houses the photodiode to be cleaned and integrates magnetic positioning components. Simultaneously, it receives the torque input from the rotation mechanism, driving the workpiece to complete its rotational motion synchronously. It is the core carrier connecting the workpiece and the rotation drive system. The limiting slip ring 472 is a commercially available rotary guide limiting slip ring, fixedly mounted on the outer surface of the positioning sleeve 471. It is fully embedded inside the slide groove 473 of the multi-station turntable 2, allowing it to rotate circumferentially along the slide groove 473 along with the positioning sleeve 471. Simultaneously, it relies on its own alignment with the slide groove 473... The mating surface restricts the radial offset and axial movement of the positioning sleeve 471, serving a dual function of sliding support and motion limit, ensuring the coaxiality and operational stability of the positioning sleeve 471 during its rotation. The slide groove 473 is an annular guide groove inside the multi-station turntable 2, which is precisely clearance-fitted with the limiting slip ring 472, providing a precise rotational reference for the rotational movement of the positioning sleeve 471. At the same time, the groove structure constrains the axial displacement of the limiting slip ring 472, preventing the positioning sleeve 471 from loosening or jumping up and down during the combined revolution and rotation, ensuring the consistency of the installation position of each station on the multi-station turntable 2 and its long-term operational reliability.

[0026] like Figures 7 to 9 As shown, the self-rotating comprehensive cleaning component 5 is set at the bottom of the multi-station turntable 2 and is used to drive the photodiode to rotate, so that the photodiode can be thoroughly cleaned without dead angles. The self-rotating comprehensive cleaning component 5 includes a drive shaft 51 fixedly installed at the bottom of the positioning sleeve 471. The bottom of the drive shaft 51 only passes through the multi-station turntable 2 and hangs below the multi-station turntable 2, and a gear 52 is fixedly installed at its bottom end. A fixed gear ring 53 is coaxially fixedly installed on the top surface of the worktable 1 (i.e., the space below the multi-station turntable). The teeth of the gear 52 mesh with the inner gear ring of the fixed gear ring 53.

[0027] Specifically, the drive shaft 51 is the core component for transmitting rotational power. Its upper and lower ends are fixedly connected to the positioning sleeve 471 and the gear 52, respectively. The entire shaft runs through the multi-station turntable 2 and the drive plate 43, accurately transmitting the rotational angular velocity of the bottom gear 52 to the top, ensuring smooth and uninterrupted rotation of the workpiece. The gear 52 is a commonly used precision spur planetary gear, rigidly installed at the bottom of the drive shaft 51. It rotates around the fixed gear ring 53 with the drive shaft 51, converting the revolution into rotational motion through tooth meshing. It features high transmission accuracy and small backlash. The fixed gear ring 53 is a standard precision internal gear ring, rigidly fixed to the bottom of the inner wall of the worktable 1. As the fixed gear ring of the planetary gear system, it provides a reaction torque for the rotation of the gear 52. The positioning sleeve 471 is the carrier and positioning base for the photodiode. It rotates synchronously with the drive shaft 51 and provides installation space for the magnetic positioning component 6, ensuring that the workpiece and the rotation mechanism operate synchronously.

[0028] like Figures 8 to 10 As shown, a magnetic positioning component 6 is installed inside the positioning sleeve 471. The magnetic positioning component 6 includes a small magnetic block 61 that slides inside the positioning sleeve 471. A slanted vertical plate 62 is fixedly installed at each of the four corners of the top of the small magnetic block 61. The top of the slanted vertical plate 62 extends through to the top of the positioning sleeve 471. A positioning plate 63 is hinged to the surface of the slanted vertical plate 62 via a sliding rod. To achieve precise radial sliding, a cross-shaped radial guide rail is provided circumferentially on the inner bottom wall of the positioning sleeve 471. The bottom of the positioning plate 63 is fitted and slidably connected inside the radial guide rail. Furthermore, in order to… To eliminate the magnetic derailment caused by the rotation of the small magnetic block 61, the attracting electromagnet 65 is a ring-shaped magnetic field generating array composed of multiple sub-electromagnets, so that the downward attraction force on the small magnetic block 61 remains constant at any rotation angle. A reset spring 64 is fixedly installed at the bottom of the small magnetic block 61, and the bottom of the reset spring 64 is fixedly installed at the bottom of the inner wall of the positioning sleeve 471. An attracting electromagnet 65 is provided at the bottom of the small magnetic block 61, and the bottom of the attracting electromagnet 65 is fixedly installed at the top of the drive plate 43. The attracting electromagnet 65 is electrically connected to the conductive slip ring 42.

[0029] Specifically, the adsorption electromagnet 65 is a commercially available miniature DC chuck electromagnet, fixedly installed on the top of the drive plate 43 and electrically connected to the conductive slip ring 42. When energized, it generates a controllable axial adsorption force, providing power input for the entire magnetic positioning component 6. When de-energized, the magnetic force quickly dissipates to support the mechanism's reset. The small magnetic block 61 is a driven magnetic actuation component, slidably assembled in the internal cavity of the positioning sleeve 471. It can perform vertical reciprocating motion under the magnetic force of the adsorption electromagnet 65, converting the electromagnetic attraction force into its own mechanical displacement, providing power input for subsequent clamping actions. Four sets of inclined groove vertical plates 62 are fixedly installed at the four corners of the top of the small magnetic block 61, moving up and down synchronously with the small magnetic block 61. Relying on its own inclined groove 473 and sliding rod, it converts the vertical linear motion into the horizontal radial motion of the positioning plate 63, completing the power transfer. The conversion and transmission of motion; the slide bar is a hinged transmission connector, which passes between the inclined slide groove 473 of the inclined groove vertical plate 62 and the corresponding hole of the positioning plate 63. It serves as an intermediate hub for motion transmission, ensuring smooth and unobstructed transmission, while limiting the movement trajectory of the positioning plate 63; the positioning plate 63 is the direct actuator for workpiece clamping. There are four plates evenly distributed in a ring inside the positioning sleeve 471. Driven by the inclined groove vertical plate 62, they synchronously retract or open radially to achieve centering, clamping and releasing of the photodiode, ensuring that the workpiece and the positioning sleeve 471 rotate coaxially; the reset spring 64 is an elastic reset component. Its upper and lower ends are fixed to the bottom of the small magnetic block 61 and the bottom of the inner wall of the positioning sleeve 471, respectively. After the electromagnet 65 is de-energized, it relies on its own elastic deformation to push the small magnetic block 61 upward to reset, thereby driving the positioning plate 63 to open automatically, without the need for additional reset drive components.

[0030] like Figures 1 to 4 As shown, a sealing assembly 49 is installed on the surface of the multi-station turntable 2. The sealing assembly 49 includes a sealing substrate 491 fixedly installed on the top of the workbench 1. The sealing substrate 491 is sleeved on the surface of the multi-station turntable 2. A sealing gasket 492 is fixedly installed at the bottom of the isolation cover 481. A sealing sleeve 493 is sleeved on the surface of the multi-station turntable 2. The bottom of the sealing sleeve 493 is fixedly installed on the top of the workbench 1. A secondary sealing ring 494 is sleeved on the surface of the multi-station turntable 2. The secondary sealing ring 494 is installed inside the workbench 1.

[0031] Specifically, the sealing substrate 491 is a planar sealing substrate commonly used in vacuum equipment. It is rigidly fixed to the top of the worktable 1 and sleeved on the outside of the multi-station turntable 2. It serves as the end-face sealing and mating reference surface when the isolation cover 481 is fastened, providing a high-precision flat mating surface to ensure that the sealing gasket 492 is subjected to uniform force after being pressed, without any local leakage gaps. The sealing gasket 492 is a commercially available vacuum-specific end-face sealing gasket, which is fixedly installed on the bottom end face of the isolation cover 481. It moves up and down synchronously with the isolation cover 481. After being fastened in place, it fits tightly against the surface of the sealing substrate 491, forming the first end-face main seal of the vacuum chamber. It is the core sealing element that isolates the exchange of gases inside and outside the chamber. The sealing sleeve 493 is a commercially available radial dustproof sleeve for rotary mechanisms. The sealing sleeve is fitted onto the outer surface of the multi-station turntable 2 and fixedly connected to the top surface of the worktable 1 at the bottom, forming the first radial sealing structure. It can prevent large-flow air from seeping in through the assembly gap between the multi-station turntable 2 and the worktable 1, and also has a dustproof protection function, slowing down the contamination and aging rate of the internal seals. The secondary sealing ring 494 is a commercially available precision rotary sealing ring for vacuum applications. It is embedded in the internal groove of the worktable 1 and fitted onto the outer surface of the multi-station turntable 2, serving as the second radial redundant sealing structure. Based on the sealing sleeve 493, it further blocks trace amounts of air leakage, significantly improving the vacuum pressure holding performance of the chamber. It can meet the dynamic sealing requirements of the multi-station turntable 2 under low-speed rotation conditions and has excellent long-term sealing stability.

[0032] like Figures 5 to 6 As shown, a stabilizing sealing tube 7 is sleeved on the outer side of the drive shaft 51. The top end of the stabilizing sealing tube 7 is fixedly connected to the bottom surface of the multi-station turntable 2. The inner wall of the stabilizing sealing tube 7 is rotatably engaged with the outer wall of the drive shaft 51. A buffer ring 8 is fixedly installed inside the drive plate 43 and is sleeved on the surface of the drive shaft 51.

[0033] Specifically, the stabilizing sealing tube 7 is a commercially available precision shaft guide protective sleeve. Its top end is rigidly fixed to the bottom surface of the multi-station turntable 2, and it is coaxially sleeved on the outside of the transmission shaft 51. The inner wall and the outer wall of the transmission shaft 51 are precisely clearance-fitted, which can form radial limit and rotational guidance for the upper end of the transmission shaft 51, correct the radial runout generated during the rotation of the transmission shaft 51, ensure the coaxiality of the top positioning sleeve 471 and the workpiece, and at the same time prevent plasma reaction byproducts from falling into the fit gap between the transmission shaft 51 and the multi-station turntable 2, thus playing a dustproof sealing and protection role and avoiding problems such as jamming and abnormal wear of the rotating pair. The buffer ring 8 is a commercially available standard shaft elastic buffer bushing, which is embedded and fixed in the internal mounting hole of the drive plate 43 and coaxially sleeved on the outer surface of the transmission shaft 51 to prevent the drive plate 43 from hitting the transmission shaft 51 hard and causing damage.

[0034] like Figures 2 to 10As shown, a soft pad 9 is fixedly bonded to the clamping working surface of the positioning plate 63, and a manual pull plate 10 is fixedly installed at the top of the inclined groove vertical plate 62. The manual pull plate 10 is exposed on the top surface of the positioning sleeve 471. Guide brackets 11 are slidably fitted on both sides of the front side of the connecting plate 482. The bottom end of the guide bracket 11 is fixedly installed on the top surface of the workbench 1 to provide vertical guidance for the lifting and lowering movement of the isolation cover 481.

[0035] Specifically, the soft pad 9 is a commercially available flexible anti-slip pad, fixedly bonded to the clamping working surface of the positioning plate 63, directly contacting the outer surface of the photodiode, buffering the clamping force, preventing the rigid positioning plate 63 from damaging the component body, pins, and photosensitive area, while increasing the friction of the contact surface to prevent slippage and displacement when the workpiece rotates; the manual pull plate 10 is an exposed handle component, fixedly installed at the top of the inclined groove vertical plate 62 and protruding from the top surface of the positioning sleeve 471, facilitating manual upward lifting of the inclined groove vertical plate 62. The clamping mechanism can be manually opened when not powered on, which facilitates product changeover, maintenance, and manual unloading in case of malfunction. The guide bracket 11 is a commercially available vertical linear sliding guide bracket, which is fixedly installed on the top surface of the workbench 1 at the bottom. It forms a vertical sliding pair with the front sides of the connecting plate 482, which constrains the connecting plate 482 and the isolation cover 481 to reciprocate only in the vertical direction, eliminating lateral offset and skew, and ensuring that the isolation cover 481 can accurately align with the sealing surface every time it falls, avoiding vacuum leakage and local wear of the sealing components caused by skew.

[0036] The working principle and usage process of this invention are as follows: First, the movable chamber cover 3 is opened by the damping hinge, and the photodiode to be cleaned is placed in the positioning sleeve 471 inside the multi-station turntable 2. After the movable chamber cover 3 is closed, the electric push rod 483 drives the isolation cover 481 to descend smoothly through the connecting plate 482. Together with the sealing substrate 491, sealing gasket 492, sealing sleeve 493 and secondary sealing ring 494 of the sealing assembly 49, a sealed vacuum chamber is formed. Then, the small vacuum pump 488 extracts the air in the chamber, and the solenoid valve 487 on the air inlet pipe 485 is opened to introduce process gas. After the vacuum degree and gas concentration in the isolation cover 481 reach the standard, the radio frequency electrode plate 484 is powered on to excite plasma, and at the same time, the stepper motor 41 drives the drive plate. 43. The rotating electromagnet 45, which is continuously powered by the conductive slip ring 42, forms a magnetic coupling with the disk 44, driving the multi-station turntable 2 to revolve in a non-contact manner. The positioning slip ring 46 limits the rotation of the multi-station turntable 2. During the revolution, the gear 52 and the fixed gear ring 53 continuously mesh, driving the transmission shaft 51 and the top positioning sleeve 471 to rotate. The adsorption electromagnet 65 is synchronously powered to drive the magnetic positioning component 6 to center and clamp the workpiece, so that the photodiode receives all-round uniform plasma cleaning under the combined motion of revolution and rotation. After cleaning, the RF power supply and turntable operation are stopped in sequence. After the vacuum inside the isolation cover 481 is broken, the isolation cover 481 rises and resets. The photodiode with the completed surface treatment can be taken out by opening the movable cover 3.

[0037] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A photodiode packaging assembly, comprising a worktable (1), wherein a multi-station turntable (2) is disposed on the top of the worktable (1), and a movable cover (3) is disposed on the top of the multi-station turntable (2), the movable cover (3) being hinged to the surface of the worktable (1) by a damping hinge, characterized in that, Also includes: The plasma cleaning component (4) is set on top of the workbench (1) and is used to effectively clean the photodiodes placed inside the multi-station turntable (2). The plasma cleaning component (4) includes a stepper motor (41) fixedly installed inside the workbench (1). A conductive slip ring (42) is sleeved on the output end of the stepper motor (41). A drive plate (43) is fixedly installed on the output end of the stepper motor (41). A disk (44) is fixedly installed on the bottom of the multi-station turntable (2). A rotating electromagnet (45) is provided on the bottom of the disk (44). The bottom of the rotating electromagnet (45) is fixedly installed on the top of the drive plate (43). The conductive slip ring (42) is electrically connected to the rotating electromagnet (45). A positioning slip ring (46) is fixedly installed on the surface of the multi-station turntable (2). The positioning slip ring (46) is slidably connected inside the workbench (1). A diode positioning assembly (47) is installed inside the multi-station turntable (2). A vacuum isolation assembly (48) is fixedly installed on the top of the workbench (1). A sealing assembly (49) is installed on the surface of the multi-station turntable (2). The self-rotating full cleaning component (5) is set at the bottom of the multi-station turntable (2) to drive the photodiode to rotate, so that the photodiode can be cleaned in a comprehensive and thorough manner.

2. The photodiode packaging assembly according to claim 1, characterized in that: The diode positioning assembly (47) includes a positioning sleeve (471) disposed inside the multi-station turntable (2). A limiting slip ring (472) is fixedly installed on the surface of the positioning sleeve (471). A sliding groove (473) is opened inside the multi-station turntable (2). The limiting slip ring (472) is slidably connected inside the sliding groove (473).

3. The photodiode packaging assembly according to claim 2, characterized in that: The self-rotating full cleaning component (5) includes a drive shaft (51) fixedly installed at the bottom of the positioning sleeve (471). The bottom of the drive shaft (51) passes through the multi-station turntable (2) and hangs below the multi-station turntable (2). A gear (52) is fixedly installed at its bottom end. A fixed gear ring (53) is coaxially fixedly installed on the top surface of the worktable (1). The teeth of the gear (52) mesh with the inner gear ring of the fixed gear ring (53). A magnetic positioning component (6) is installed inside the positioning sleeve (471).

4. The photodiode packaging assembly according to claim 3, characterized in that: The magnetic positioning component (6) includes a small magnetic block (61) that slides inside the positioning sleeve (471). Each of the four corners of the top of the small magnetic block (61) is fixedly mounted with a slanted vertical plate (62). The top of the slanted vertical plate (62) extends through to the top of the positioning sleeve (471). A positioning plate (63) is hinged to the surface of the slanted vertical plate (62) via a sliding rod. The positioning plate (63) and the slanted vertical plate (62) are slidably connected inside the positioning sleeve (471). A reset spring (64) is fixedly mounted at the bottom of the small magnetic block (61). The bottom of the reset spring (64) is fixedly mounted at the bottom of the inner wall of the positioning sleeve (471). An adsorption electromagnet (65) is provided at the bottom of the small magnetic block (61). The bottom of the adsorption electromagnet (65) is fixedly mounted at the top of the drive plate (43). The adsorption electromagnet (65) is electrically connected to the conductive slip ring (42).

5. A photodiode packaging assembly according to claim 1, characterized in that: The vacuum isolation assembly (48) includes an isolation cover (481) disposed on the top of the multi-station turntable (2). A connecting plate (482) is fixedly installed on the rear side of the isolation cover (481). Electric push rods (483) are fixedly installed on both sides of the bottom of the connecting plate (482). The bottom of the electric push rods (483) is fixedly installed on the top of the worktable (1). An RF electrode plate (484) is fixedly installed on the top of the isolation cover (481). The bottom of 484 extends into the interior of the isolation cover (481). The two sides of the rear top of the isolation cover (481) are respectively connected to an air inlet pipe (485) and an exhaust pipe (486). Solenoid valves (487) are installed on the surfaces of the air inlet pipe (485) and the exhaust pipe (486). The rear sides of the air inlet pipe (485) and the exhaust pipe (486) extend into the interior of the workbench (1). A small vacuum pump (488) is connected to the rear top of the isolation cover (481).

6. A photodiode packaging assembly according to claim 5, characterized in that: The sealing assembly (49) includes a sealing substrate (491) fixedly installed on the top of the workbench (1), the sealing substrate (491) being fitted onto the surface of the multi-station turntable (2), a sealing gasket (492) being fixedly installed at the bottom of the isolation cover (481), a sealing sleeve (493) being fitted onto the surface of the multi-station turntable (2), the bottom of the sealing sleeve (493) being fixedly installed on the top of the workbench (1), and a secondary sealing ring (494) being fitted onto the surface of the multi-station turntable (2), the secondary sealing ring (494) being installed inside the workbench (1).

7. A photodiode packaging assembly according to claim 3, characterized in that: The outer side of the drive shaft (51) is fitted with a stabilizing sealing tube (7). The top end of the stabilizing sealing tube (7) is fixedly connected to the bottom surface of the multi-station turntable (2). The inner wall of the stabilizing sealing tube (7) is rotatably engaged with the outer wall of the drive shaft (51).

8. A photodiode packaging assembly according to claim 3, characterized in that: A buffer ring (8) is fixedly installed inside the drive plate (43), and the buffer ring (8) is sleeved on the surface of the drive shaft (51).

9. A photodiode packaging assembly according to claim 4, characterized in that: The clamping working surface of the positioning plate (63) is fixedly bonded with a soft pad (9), and the top of the inclined groove vertical plate (62) is fixedly installed with a manual pull plate (10), which is exposed on the top surface of the positioning sleeve (471).

10. A photodiode packaging assembly according to claim 5, characterized in that: The front sides of the connecting plate (482) are slidably fitted with guide brackets (11), the bottom end of which is fixedly installed on the top surface of the workbench (1) to provide vertical guidance for the lifting and lowering movement of the isolation cover (481).

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