Temperature control apparatus, method, and semiconductor processing equipment

Abstract

The application provides a temperature control device, a method and a semiconductor processing equipment. The temperature control device is used for temperature control of a first component and a second component, and comprises three temperature control sources and a plurality of valve structures. The first component and the second component are connected in series for temperature control through combination of the plurality of valve structures, the requirement of high and low temperature rapid switching of the two temperature controlled components is met based on the three temperature control sources, and the production efficiency and the yield of the semiconductor processing equipment are improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to a temperature control device, method, and semiconductor processing equipment. Background Technology

[0002] In semiconductor manufacturing, temperature control is required for temperature-controlled components in semiconductor processing equipment, such as electrostatic chucks and / or edge rings, to ensure wafer quality and production efficiency. For example, in dry etching equipment, which uses plasma to etch wafers, rapid switching between high and low temperatures is necessary at different process steps.

[0003] In existing semiconductor processing equipment, temperature is controlled by different temperature control sources. However, due to the limited number of temperature control sources and their slow response time, it is difficult to meet the requirements for rapid temperature response and rapid switching between high and low temperatures for more than two temperature-controlled components.

[0004] To meet the requirements of semiconductor processing, there is a need for a temperature control device that can simultaneously meet the rapid high and low temperature switching and / or temperature regulation needs of two temperature-controlled components, such as electrostatic chucks and edge rings, thereby improving the production efficiency and yield of semiconductor processing equipment. Summary of the Invention

[0005] The purpose of this invention is to provide a temperature control device, method, and semiconductor processing equipment that can meet the requirements of rapid high and low temperature switching and / or temperature regulation of two temperature-controlled components based on three temperature control sources.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solution:

[0007] A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, comprising:

[0008] The first temperature control source is a low-temperature source used to output fluid at the first temperature;

[0009] The second temperature control source is a high-temperature source used to output a fluid at a second temperature.

[0010] The third temperature control source is a low-temperature source used to output fluid at a third temperature.

[0011] The first valve assembly has its input end connected to the output port of the first temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the first temperature control source.

[0012] The second valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source.

[0013] The third valve assembly has its input end connected to the outlet of the first temperature control flow path and its first output end connected to the inlet of the second temperature control flow path.

[0014] The fourth valve assembly has its input end connected to the second output end of the third valve assembly, its first output end connected to the return port of the first temperature control source, and its second output end connected to the return port of the second temperature control source.

[0015] The fifth valve assembly has its input end connected to the output port of the third temperature control source, its first output end connected to the inlet of the second temperature control flow path, and its second output end connected to the return port of the third temperature control source.

[0016] The sixth valve assembly has its input end connected to the outlet of the second temperature control flow path, its first output end connected to the input end of the fourth valve assembly, and its second output end connected to the return port of the third temperature control source.

[0017] Optionally, the first to sixth valve assemblies are three-way valves; or

[0018] Each of the first to sixth valve assemblies includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

[0019] Optionally, each of the first, second, and fourth valve assemblies includes two one-way valves, with the first ends of the two one-way valves connected together as an input end, and the second ends of the two one-way valves serving as a first output end and a second output end, respectively.

[0020] Optionally, the first valve assembly includes a first one-way valve and a three-way valve, wherein the first end of the first one-way valve and the first input end of the three-way valve are connected as the input end of the first valve assembly, the second end of the first one-way valve serves as the second output end of the first valve assembly, and the output end of the three-way valve serves as the first output end of the first valve assembly.

[0021] The second valve assembly includes a second one-way valve and the three-way valve. The first end of the second one-way valve and the second input end of the three-way valve are connected to each other as the input end of the second valve assembly. The second end of the second one-way valve serves as the second output end of the second valve assembly, and the output end of the three-way valve serves as the first output end of the second valve assembly.

[0022] Optionally, the fourth valve assembly is a three-way valve.

[0023] Optionally, the first output terminal of the first valve assembly and the first output terminal of the second valve assembly are connected to the input terminal of a mixing device that promotes fluid mixing, and the output terminal of the mixing device is connected to the inlet of the first temperature-controlled flow path.

[0024] Optionally, the third valve assembly, the fifth valve assembly, and the sixth valve assembly are three-way valves; or

[0025] Each of the third valve assembly, the fifth valve assembly, and the sixth valve assembly includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

[0026] Optionally, temperature detectors are provided at the inlet and outlet of the first temperature-controlled flow path and at the inlet and outlet of the second temperature-controlled flow path.

[0027] Optionally, the first component and the second component are any combination of an electrostatic chuck and an edge ring, a gas spray head and an air inlet cover, and an upper grounding ring and a moving ring.

[0028] A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, comprising:

[0029] The first temperature control source is a low-temperature source used to output fluid at the first temperature;

[0030] The second temperature control source is a high-temperature source used to output a fluid at a second temperature.

[0031] The third temperature control source is a low-temperature source used to output fluid at a third temperature.

[0032] The first valve assembly has its input end connected to the output port of the first temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the first temperature control source.

[0033] The second valve assembly has its input end connected to the output port of the third temperature control source, its first output end connected to the inlet of the second temperature control flow path, and its second output end connected to the return port of the third temperature control source.

[0034] The third valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source.

[0035] The fourth valve assembly has its input end connected to the outlet of the first temperature control flow path, its first output end connected to the return port of the first temperature control source, and its second output end connected to the inlet of the second temperature control flow path.

[0036] The fifth valve assembly has its input end connected to the outlet of the second temperature control flow path, its first output end connected to the return port of the third temperature control source, and its second output end connected to the return port of the second temperature control source.

[0037] Optionally, the first to fifth valve assemblies are three-way valves; or

[0038] Each of the first to fifth valve assemblies includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

[0039] Optionally, temperature detectors are provided at the inlet and outlet of the first temperature-controlled flow path and at the inlet and outlet of the second temperature-controlled flow path.

[0040] Optionally, the first component and the second component are any combination of an electrostatic chuck and an edge ring, a gas spray head and an air inlet cover, and an upper grounding ring and a moving ring.

[0041] A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, comprising:

[0042] The first temperature control source is a low-temperature source used to output fluid at the first temperature;

[0043] The second temperature control source is a high-temperature source used to output a fluid at a second temperature.

[0044] The third temperature control source is a low-temperature source used to output fluid at a third temperature.

[0045] An output valve has its first input terminal connected to the output port of the first temperature control source and its second input terminal connected to the output port of the third temperature control source. The output port of the first temperature control source is also connected to the return port of the first temperature control source through a first bypass valve, and the output port of the third temperature control source is also connected to the return port of the third temperature control source through a second bypass valve.

[0046] A first valve assembly has its input end connected to the output end of the output valve, its first output end connected to the inlet of the first temperature-controlled flow path, and its outlet connected to the inlet of the second temperature-controlled flow path.

[0047] The second valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source.

[0048] The third valve assembly has its input end connected to the outlet of the second temperature control flow path and its second output end connected to the return port of the second temperature control source;

[0049] A reflux valve, the input of which is connected to the first output of the third valve assembly and the second output of the first valve assembly, the first output of which is connected to the reflux port of the first temperature control source, and the second output of which is connected to the reflux port of the third temperature control source.

[0050] Optionally, one or two of the first input end, the second input end, and the output end of the output valve are provided with flow meters, and one or two of the input end, the first output end, and the second output end of the return valve are provided with flow meters, and the total number of flow meters is three.

[0051] Optionally, the first input terminal and the second input terminal of the output valve are equipped with pressure sensors.

[0052] Optionally, the output port of the first temperature control source and / or the output port of the third temperature control source and / or the output end of the output valve are provided with a buffer cavity.

[0053] Optionally, the first bypass valve and the second bypass valve are proportional valves.

[0054] Optionally, the first valve assembly, the second valve assembly, and the third valve assembly are three-way valves; or

[0055] Each of the first valve assembly, the second valve assembly, and the third valve assembly includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

[0056] Optionally, the first input end, the second input end, and the output end of the output valve are all equipped with temperature detectors, and the input end of the reflux valve is equipped with a temperature detector.

[0057] Optionally, the first component and the second component are any combination of an electrostatic chuck and an edge ring, a gas spray head and an air inlet cover, and an upper grounding ring and a moving ring.

[0058] A semiconductor processing apparatus includes: a reaction chamber and the temperature control device described above;

[0059] The temperature control device is located outside the reaction chamber and is used to control the temperature of the first and second components located inside the reaction chamber.

[0060] A temperature control method, implemented using the temperature control device described above, includes:

[0061] The first output terminal of the first valve assembly is closed, and the second output terminal is open.

[0062] The first output terminal of the second valve assembly is open, and the second output terminal is closed.

[0063] The first output terminal of the third valve assembly is open, and the second output terminal is closed.

[0064] The first output terminal of the fourth valve assembly is closed, and the second output terminal is open.

[0065] The first output terminal of the fifth valve assembly is closed, and the second output terminal is open.

[0066] The first output terminal of the sixth valve assembly is open, and the second output terminal is closed.

[0067] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

[0068] Optionally, the first and second output terminals of the first, second, and fourth valve assemblies are all opened.

[0069] The first output terminal of the third valve assembly is open, and the second output terminal is closed.

[0070] The first output terminal of the fifth valve assembly is closed, and the second output terminal is open.

[0071] The first output terminal of the sixth valve assembly is open, and the second output terminal is closed.

[0072] So that the mixture of the first temperature fluid and the second temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source and the second temperature control source, so as to heat the first component and the second component simultaneously.

[0073] Optionally, the first output terminal of the first valve assembly is open and the second output terminal is closed.

[0074] The first output terminal of the second valve assembly is closed, and the second output terminal is open.

[0075] The first output terminal of the third valve assembly is closed, and the second output terminal is open.

[0076] The first output terminal of the fourth valve assembly is open, and the second output terminal is closed.

[0077] The first output terminal of the fifth valve assembly is open, and the second output terminal is closed.

[0078] The first output terminal of the sixth valve assembly is closed, and the second output terminal is open.

[0079] So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source to cool the first component; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source to cool the second component.

[0080] A temperature control method, implemented using the temperature control device described above, the temperature control method comprising:

[0081] The first output terminal of the first valve assembly is open, and the second output terminal is closed.

[0082] The first output terminal of the second valve assembly is open, and the second output terminal is closed.

[0083] The first output terminal of the third valve assembly is closed, and the second output terminal is open.

[0084] The first output terminal of the fourth valve assembly is open, and the second output terminal is closed.

[0085] The first output terminal of the fifth valve assembly is open, and the second output terminal is closed.

[0086] So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source to cool the first component; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source to cool the second component;

[0087] The first output terminal of the first valve assembly is closed, and the second output terminal is open.

[0088] The first output terminal of the second valve assembly is closed, and the second output terminal is open.

[0089] The first output terminal of the third valve assembly is open, and the second output terminal is closed.

[0090] The first output terminal of the fourth valve assembly is closed, and the second output terminal is open.

[0091] The first output terminal of the fifth valve assembly is closed, and the second output terminal is open.

[0092] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

[0093] A temperature control method, implemented using the temperature control device described above, includes:

[0094] The first output terminal of the first valve assembly is open, and the second output terminal is closed.

[0095] The first output terminal of the second valve assembly is closed, and the second output terminal is open.

[0096] The first output terminal of the third valve assembly is open, and the second output terminal is closed.

[0097] The output valve is open, and the return valve is open.

[0098] The first bypass valve is closed.

[0099] The second bypass valve is closed.

[0100] So that: the mixture of the first temperature fluid and the third temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source and the third temperature control source, so as to cool the first component and the second component simultaneously;

[0101] The first output terminal of the first valve assembly is closed, and the second output terminal is open.

[0102] The first output terminal of the second valve assembly is open, and the second output terminal is closed.

[0103] The first output terminal of the third valve assembly is closed, and the second output terminal is open.

[0104] The output valve is closed, and the return valve is closed.

[0105] The first bypass valve opens.

[0106] The second bypass valve opens.

[0107] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

[0108] Compared with the prior art, the present invention has the following advantages:

[0109] The temperature control device provided by the present invention includes three temperature control sources and several valve structures. By combining several valve structures, the first component and the second component are connected in series for temperature control, so as to meet the requirements of rapid high and low temperature switching and / or temperature regulation of the two temperature-controlled components based on the three temperature control sources, thereby improving the production efficiency and yield of semiconductor processing equipment. Attached Figure Description

[0110] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the drawings described below are one embodiment of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0111] Figure 1 This is a schematic diagram of a temperature control device provided in the first embodiment of the present invention;

[0112] Figures 2-4 Three specific structural diagrams of the temperature control device provided in the first embodiment of the present invention;

[0113] Figure 5 A schematic diagram of a temperature control device provided in the second embodiment of the present invention;

[0114] Figure 6 A schematic diagram of a temperature control device provided in the third embodiment of the present invention;

[0115] Figure 7 This is a schematic diagram of a semiconductor processing device provided by the present invention. Detailed Implementation

[0116] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the solution proposed by the present invention. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the embodiments of the present invention. Please refer to the drawings to make the objectives, features, and advantages of the present invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the present invention, should still fall within the scope of the technical content disclosed in the present invention.

[0117] Semiconductor processing equipment uses three temperature control sources to provide three different temperature-controlled fluids. These three temperature control sources can be supplied by a chiller, which itself has the ability to regulate the temperature of the temperature-controlled fluids. This means the temperature control sources can change temperature within a certain range, but the temperature change is slow and cannot achieve rapid temperature switching. Based on this, the present invention provides a temperature control device that connects two temperature-controlled components in series, such as an electrostatic chuck and an edge ring. This allows for rapid switching between high and low temperatures for the two temperature-controlled components based on three temperature control sources, thereby improving the production efficiency and yield of the semiconductor processing equipment.

[0118] Example 1

[0119] like Figure 1 As shown, this embodiment provides a temperature control device for controlling the temperature of a first component 10 and a second component 20. The first component 10 has a first temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the first component 10. The second component 20 has a second temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the second component 20. The temperature control device includes:

[0120] The first temperature control source CH1 is a low temperature source used to output a fluid at a first temperature (e.g., a temperature range of -60℃ to 30℃);

[0121] The second temperature control source CH2 is a high-temperature source used to output a second temperature fluid (e.g., a temperature range of 30°C to 80°C);

[0122] The third temperature control source CH3 is a low-temperature source used to output a third temperature fluid (e.g., a temperature range of -60℃ to 30℃);

[0123] The first valve assembly V1 has its input terminal in connected to the output port S of the first temperature control source CH1, its first output terminal out1 connected to the inlet of the first temperature control flow path, and its second output terminal out2 connected to the return port R of the first temperature control source CH1.

[0124] The second valve assembly V2 has its input terminal in connected to the output port S of the second temperature control source CH2, its first output terminal out1 connected to the inlet of the first temperature control flow path, and its second output terminal out1 connected to the return port R of the second temperature control source CH2.

[0125] The third valve assembly V3 has its input terminal in connected to the outlet of the first temperature control flow path and its first output terminal out1 connected to the inlet of the second temperature control flow path.

[0126] The fourth valve assembly V4 has its input terminal in connected to the second output terminal out2 of the third valve assembly V3, its first output terminal out1 connected to the return port R of the first temperature control source CH1, and its second output terminal connected to the return port R of the second temperature control source CH2.

[0127] The fifth valve assembly V5 has its input terminal in connected to the output port S of the third temperature control source CH3, its first output terminal out1 connected to the inlet of the second temperature control flow path, and its second output terminal out2 connected to the return port R of the third temperature control source CH3.

[0128] The sixth valve assembly V6 has its input terminal in connected to the outlet of the second temperature control flow path, its first output terminal out1 connected to the input terminal of the fourth valve assembly V4, and its second output terminal out2 connected to the return port R of the third temperature control source CH3.

[0129] In this embodiment, the first temperature control source CH1, the second temperature control source CH2, and the third temperature control source CH3 correspond to the temperature control sources of the three channels of the refrigerator, namely two low-temperature sources and one high-temperature source. By combining the first to sixth valve assemblies V1 to V6, the first component 10 and the second component 20 can be synchronously controlled in series based on the three temperature control sources, or isolated and independently controlled, thereby enabling rapid switching between high and low temperatures for these two temperature-controlled components.

[0130] Specifically, during low-temperature cooling, the first temperature control source CH1 and the third temperature control source CH3 can be connected to the first and second temperature control flow paths respectively, enabling precise cooling and temperature control of the first component 10 and the second component 20. At this time, the second temperature control source CH2 is disconnected from both the first and second temperature control flow paths, allowing it to self-circulate. The pump assembly of the second temperature control source CH2 can be kept operational, only its self-circulation disconnection is required. Conversely, when heating the first component 10 and the second component 20 is required, the second temperature control source CH2 is connected to both the first and second temperature control flow paths, while the first and third temperature control sources CH1 and CH3 are disconnected, allowing them to self-circulate. The pump assemblies of the first and third temperature control sources CH1 and CH3 can be kept operational, only their self-circulation disconnection is required. This configuration ensures that the temperature control response speed will not decrease due to the opening and closing delay of the pump components of each temperature control source when switching between high and low temperatures. By using self-circulation during idle periods, the pump components of each temperature control source are kept in a constantly open state, so that when they switch from an idle state to an active state, they can quickly respond to the load and avoid overload and delay.

[0131] Accordingly, the temperature control device in this embodiment can achieve synchronous high and low temperature switching of the first component 10 and the second component 20, and low temperature control by isolating the first component 10 and the second component 20 from each other, by setting the switching timing of the first to sixth valve components V1 to V6. The specific temperature control method is as follows:

[0132] The first output terminal out1 of the first valve assembly V1 is closed, and the second output terminal out2 is open.

[0133] The first output terminal out1 of the second valve assembly V2 is open, and the second output terminal out2 is closed.

[0134] The first output terminal out1 of the third valve assembly V3 is open, and the second output terminal out2 is closed.

[0135] The first output terminal out1 of the fourth valve assembly V4 is closed, and the second output terminal out2 is open.

[0136] The first output terminal out1 of the fifth valve assembly V5 is closed, and the second output terminal out2 is open.

[0137] The first output terminal out1 of the sixth valve assembly V6 is open, and the second output terminal out2 is closed.

[0138] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source CH2, so as to heat the first component 10 and the second component 20 simultaneously;

[0139] Alternatively, the first output terminal out1 and the second output terminal out2 of the first, second, and fourth valve assemblies V1, V2, and V4 are all open.

[0140] The first output terminal out1 of the third valve assembly V3 is open, and the second output terminal out2 is closed.

[0141] The first output terminal out1 of the fifth valve assembly V5 is closed, and the second output terminal out2 is open.

[0142] The first output terminal out1 of the sixth valve assembly V6 is open, and the second output terminal out2 is closed.

[0143] So that: the mixture of the first temperature fluid and the second temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source CH1 and the second temperature control source CH2, so as to heat the first component 10 and the second component 20 simultaneously;

[0144] The first output terminal out1 of the first valve assembly V1 is open, and the second output terminal out2 is closed.

[0145] The first output terminal out1 of the second valve assembly V2 is closed, and the second output terminal out2 is open.

[0146] The first output terminal out1 of the third valve assembly V3 is closed, and the second output terminal out2 is open.

[0147] The first output terminal out1 of the fourth valve assembly V4 is open, and the second output terminal out2 is closed.

[0148] The first output terminal out1 of the fifth valve assembly V5 is open, and the second output terminal out2 is closed.

[0149] The first output terminal out1 of the sixth valve assembly V6 is closed, and the second output terminal out2 is open.

[0150] So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source CH1 to cool the first component 10; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source CH3 to cool the second component 10.

[0151] It should be noted that in some semiconductor etching processes, the first component 10 and the second component 20 need to be cooled to low temperatures, such as below -30 degrees Celsius. Since the target cooling temperatures of the two components are different and require precise control, the two components need to be independently temperature controlled. In this embodiment, the low-temperature fluids of the first temperature control source CH1 and the third temperature control source CH3 flow directly into the temperature control flow paths of the first component 10 and the second component 20, respectively. By rapidly flowing the temperature control fluids in the temperature control flow paths of the two components into the low-temperature fluids, the temperature of the two components can be reduced to their target temperatures in a short period of time.

[0152] When using dry cleaning of the chamber during process intervals, the first component 10 and the second component 20 need to be at high temperatures, such as above 50 degrees Celsius, to perform the cleaning reaction. At this temperature, individual precise control of the two components is not required, but the temperature of both components needs to be rapidly increased to enable a rapid cleaning reaction. This embodiment achieves this by connecting the two components in series for heating. The high-temperature fluid from the second temperature control source CH2, or a mixture of the second temperature control source CH2 and the first temperature control source CH1, flows sequentially into the temperature control flow paths of the first component 10 and the second component 20. This causes the two low-temperature sources, namely the first temperature control source CH1 and the third temperature control source CH3, to self-circulate, rapidly switching the temperature control fluid in the temperature control flow paths of the two components to a high-temperature fluid. This allows for rapid temperature switching of the two components, enabling them to be set to a higher temperature in a shorter time.

[0153] Specifically, when the structures of the temperature control channels of the first component 10 and the second component 20 are different, for example, the first component 10 is an electrostatic chuck and the second component 20 is an edge ring, the electrostatic chuck has a large overall structure and a long channel, generally extending in a spiral shape within the entire plane of the electrostatic chuck, while the edge ring is annular with a short channel, generally only one ring. The flow resistance of the edge ring channel is much smaller than that of the electrostatic chuck channel. If the flow channels of the edge ring and the electrostatic chuck are connected in parallel, it will lead to different flow distributions between the two channels. Due to the influence of flow resistance, the edge ring receives a larger flow and the electrostatic chuck receives a smaller flow, resulting in a lower heating rate for the electrostatic chuck than for the edge ring. In order to balance the heating rate and prioritize the heating rate of the electrostatic chuck to accelerate the cleaning reaction of the electrostatic chuck, this embodiment uses the flow channels of the electrostatic chuck and the edge ring in series. The temperature control fluid first passes through the electrostatic chuck to ensure that the electrostatic chuck can heat up quickly, and then passes through the edge ring, so as to balance the heating rate of the main device such as the electrostatic chuck and the edge ring.

[0154] In this embodiment or some other embodiments, although the first temperature control source CH1 and the third temperature control source CH3 are both low-temperature sources, their output temperatures are different. Preferably, the temperature, flow rate, and flow velocity of the first temperature fluid, the second temperature fluid, and the second temperature fluid can be set by a three-channel refrigerator, thereby enabling better temperature control of the first component 10 and the second component 20. Optionally, temperature detectors are provided at the inlet and outlet of the first temperature control flow path and at the inlet and outlet of the second temperature control flow path. Figure 1 The T / C shown in the figure allows for feedback regulation of the temperature of the first component 10 and the second component 20, ensuring that their temperatures reach the set target temperatures and improving the accuracy of temperature control. The first component 10 and the second component 20 can be any combination of an electrostatic chuck and edge ring, a gas spray head and an air inlet cover, or an upper grounding ring and a moving ring.

[0155] Figures 2-4 Three specific structures of the temperature control device provided in this embodiment are shown. For example... Figure 2 As shown, each of the first to sixth valve assemblies V1 to V6 includes two on / off switches. The first ends of the two on / off switches are connected as the input terminal in, and the second ends of the two on / off switches serve as the first output terminal out1 and the second output terminal out2, respectively. Figure 3As shown, the first to sixth valve assemblies V1 to V6 are three-way valves, wherein port C of the three-way valve is the input terminal in, and ports A and B are the two output terminals. Alternatively, one or more of the first to sixth valve assemblies V1 to V6 may employ a structure combining two on / off switches, while the remaining ones may employ a three-way valve structure. In other embodiments, the first to sixth valve assemblies V1 to V6 may also employ other multi-way valve combination structures capable of two-way switching.

[0156] exist Figure 2 , Figure 3 In the structure shown, the first component 10 has two inputs (i.e., the first temperature control source CH1 and the second temperature control source CH2), and the second component 20 also has two inputs (i.e., the third temperature control source CH3 and the temperature control fluid output from the first temperature control flow path of the first component 10). This allows for series synchronous temperature control of the first component 10 and the second component 20 based on the three temperature control sources, or isolated independent temperature control, thereby enabling rapid switching between high and low temperatures for these two temperature-controlled components.

[0157] like Figure 4 As shown, the first valve assembly V1 includes a first one-way valve a1 and a three-way valve b. The first end of the first one-way valve a1 and the first input end of the three-way valve b are connected as the input end in of the first valve assembly V1. The second end of the first one-way valve a1 serves as the second output end out2 of the first valve assembly, and the output end of the three-way valve b serves as the first output end out1 of the first valve assembly V1. The second valve assembly V2 includes a second one-way valve a2 and the three-way valve b. The first end of the second one-way valve a2 and the second input end of the three-way valve b are connected as the input end in of the second valve assembly V2. The second end of the second one-way valve a2 serves as the second output end out2 of the second valve assembly V2, and the output end of the three-way valve b serves as the first output end out1 of the second valve assembly V2. Thus, Figure 4The illustrated embodiment can mix the first temperature fluid output from the first temperature control source CH1 and the second temperature fluid output from the second temperature control source CH2 and input them into the first temperature control flow path to achieve continuous temperature regulation. By adjusting the opening of the first single-way valve a1, the three-way valve b, and the second single-way valve a2, the first temperature fluid and the second temperature fluid are mixed in proportion to form a fluid with the target temperature, which then flows into the first temperature control flow path, achieving continuous temperature regulation of the first component 10 between high and low temperatures. At the same time, the second component 20 is connected in series with the first component 10, also achieving continuous temperature regulation of the second component 20 between high and low temperatures. Correspondingly, the fourth valve assembly V4 is a three-way valve. After the fluid passes through the first and second temperature control flow paths (or only through the first temperature control flow path), it reaches the fourth valve assembly V4, and then flows back to the first temperature control source CH1 and the second temperature control source CH2 after being distributed in proportion by the fourth valve assembly V4, in order to maintain the liquid level balance of the first temperature control source CH1 and the second temperature control source CH2.

[0158] Furthermore, the first output terminal of the first valve assembly V1 and the first output terminal of the second valve assembly V2 (i.e., the output terminal of the three-way valve b) are connected to a mixing device that promotes fluid mixing. Figure 4 The input terminal of the MIX shown in the figure is connected to the inlet of the first temperature-controlled flow path. The mixing device fully mixes the first temperature-controlled fluid and the second temperature-controlled fluid to keep the output mixed fluid temperature stable.

[0159] exist Figure 4 In the above, the structures of the third valve assembly V3, the fifth valve assembly V5, and the sixth valve assembly V6 are similar to those of the others. Figure 2 Similar to the above, both include two on / off switches. The first ends of the two on / off switches are connected together as the input terminal in, and the second ends of the two on / off switches serve as the first output terminal out1 and the second output terminal out2, respectively. In some other embodiments, the third valve assembly V3, the fifth valve assembly V5, and the sixth valve assembly V6 may also adopt the following... Figure 3 The structure shown indicates that the third valve assembly V3, the fifth valve assembly V5, and the sixth valve assembly V6 are all three-way valves; alternatively, one or two of the third valve assembly V3, the fifth valve assembly V5, and the sixth valve assembly V6 may employ a combination of two on / off switches, while the remaining components may be three-way valves. In other embodiments, the third valve assembly V3, the fifth valve assembly V5, and the sixth valve assembly V6 may also employ other multi-way valve combinations capable of two-way switching.

[0160] In addition, the first, second, and fourth valve assemblies V1, V2, and V4, besides Figure 4In addition to the valve combination structure shown, other forms of combination structures can also be adopted. For example, each of the first, second, and fourth valve assemblies V1, V2, and V4 includes two single-way valves. The first ends of the two single-way valves are connected to each other as the input end in, and the second ends of the two single-way valves are respectively used as the first output end out1 and the second output end out2.

[0161] exist Figure 4 In the structure shown, the first component 10 has two inputs (i.e., the first temperature control source CH1 and the second temperature control source CH2), and continuous temperature regulation can be achieved through the first and second valve assemblies V1 and V2. The second component 20 also has two inputs (i.e., the third temperature control source CH3 and the temperature control fluid output from the first temperature control flow path of the first component 10), which can realize continuous temperature regulation and temperature switching of the second component. Thus, it is possible to realize series synchronous temperature control of the first component 10 and the second component 20 based on three temperature control sources, or isolated independent temperature control, thereby realizing continuous high and low temperature regulation and rapid switching of these two temperature-controlled components.

[0162] Example 2

[0163] like Figure 5 As shown, this embodiment provides a temperature control device for controlling the temperature of a first component 10 and a second component 20. The first component 10 has a first temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the first component 10. The second component 20 has a second temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the second component 20. The temperature control device includes:

[0164] The first temperature control source CH1 is a low-temperature source used to output fluid at the first temperature;

[0165] The second temperature control source CH2 is a high-temperature source used to output the fluid at the second temperature.

[0166] The third temperature control source CH3 is a low-temperature source used to output fluid at the third temperature;

[0167] The first valve assembly V1 has its input terminal in connected to the output port S of the first temperature control source CH1, its first output terminal out1 connected to the inlet of the first temperature control flow path, and its second output terminal out2 connected to the return port R of the first temperature control source CH1.

[0168] The second valve assembly V2 has its input terminal in connected to the output port S of the third temperature control source CH3, its first output terminal out1 connected to the inlet of the second temperature control flow path, and its second output terminal out2 connected to the return port R of the third temperature control source CH3.

[0169] The third valve assembly V3 has its input terminal in connected to the output port S of the second temperature control source CH2, its first output terminal out1 connected to the inlet of the first temperature control flow path, and its second output terminal out2 connected to the return port R of the second temperature control source CH2.

[0170] The fourth valve assembly V4 has its input terminal in connected to the outlet of the first temperature control flow path, its first output terminal out1 connected to the return port R of the first temperature control source CH1, and its second output terminal out2 connected to the inlet of the second temperature control flow path.

[0171] The fifth valve assembly V5 has its input terminal in connected to the outlet of the second temperature control flow path, its first output terminal out1 connected to the return port R of the third temperature control source CH3, and its second output terminal out2 connected to the return port R of the second temperature control source CH2.

[0172] In this embodiment, the first temperature control source CH1, the second temperature control source CH2, and the third temperature control source CH3 correspond to the temperature control sources of the three channels of the refrigerator, namely two low-temperature sources and one high-temperature source. Unlike the six valve assemblies in Embodiment 1, this embodiment uses a combination of five valve assemblies (V1 to V5) to achieve series synchronous temperature control of the first component 10 and the second component 20 based on three temperature control sources, or isolated independent temperature control, thereby enabling rapid switching between high and low temperatures for these two temperature-controlled components.

[0173] Accordingly, the temperature control device in this embodiment can achieve synchronous high-temperature regulation of the first component 10 and the second component 20 in series, and low-temperature regulation of the first component 10 and the second component 20 in isolation, by setting the switching sequence of the first to fifth valve assemblies V1 to V5. The specific temperature control method is as follows:

[0174] The first output terminal out1 of the first valve assembly V1 is open, and the second output terminal out2 is closed.

[0175] The first output terminal out1 of the second valve assembly V2 is open, and the second output terminal out2 is closed.

[0176] The first output terminal out1 of the third valve assembly V3 is closed, and the second output terminal out2 is open.

[0177] The first output terminal out1 of the fourth valve assembly V4 is open, and the second output terminal out2 is closed.

[0178] The first output terminal out1 of the fifth valve assembly V5 is open, and the second output terminal out2 is closed.

[0179] So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source CH1 to cool the first component 10; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source CH3 to cool the second component 20;

[0180] The first output terminal out1 of the first valve assembly V1 is closed, and the second output terminal out2 is open.

[0181] The first output terminal out1 of the second valve assembly V2 is closed, and the second output terminal out2 is open.

[0182] The first output terminal out1 of the third valve assembly V3 is open, and the second output terminal out2 is closed.

[0183] The first output terminal out1 of the fourth valve assembly V4 is closed, and the second output terminal out2 is open.

[0184] The first output terminal out1 of the fifth valve assembly V5 is closed, and the second output terminal out2 is open.

[0185] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source CH2, so as to heat the first component 10 and the second component 20 simultaneously.

[0186] In this embodiment, the first component 10 has two inputs (i.e., the first temperature control source CH1 and the second temperature control source CH2), and the second component 20 also has two inputs (i.e., the third temperature control source CH3 and the second temperature control source CH2). The first temperature control source CH1 and the third temperature control source CH3 respectively control the first component 10 and the second component at low temperatures, while the second temperature control source CH2 controls the first component and the second component at high temperatures simultaneously. This enables the first component 10 and the second component 20 to be synchronously controlled in series or independently controlled based on three temperature control sources, thereby achieving rapid switching between high and low temperatures for these two temperature-controlled components.

[0187] In this embodiment or some other embodiments, the output temperatures of the first temperature control source CH1 and the third temperature control source CH3 are different. Preferably, the temperature, flow rate, and velocity of the first temperature fluid, the second temperature fluid, and the third temperature fluid can be set by a three-channel refrigerator, thereby enabling better temperature control of the first component 10 and the second component 20. Optionally, temperature detectors (T / C) are provided at the inlet and outlet of the first temperature control flow path and at the inlet and outlet of the second temperature control flow path, thereby enabling feedback adjustment of the temperature of the first component 10 and the second component 20 to reach the set target temperature, improving the accuracy of temperature control of the first component 10 and the second component 20. The first component 10 and the second component 20 can be any combination of an electrostatic chuck and edge ring, a gas spray head and an air inlet cover, and an upper grounding ring and a moving ring.

[0188] Compared with Example 1 Figure 2 Similar to the structure shown, each of the first to fifth valve assemblies V1 to V5 includes two on / off switches. The first ends of the two on / off switches are connected as the input terminal, and the second ends of the two on / off switches serve as the first output terminal and the second output terminal, respectively. Alternatively, as in Embodiment 1... Figure 3 The structures shown are similar, with the first to fifth valve assemblies V1 to V5 being three-way valves. Alternatively, one or more of the first to fifth valve assemblies V1 to V5 may employ a structure combining two on / off switches, while the remaining assemblies may employ a three-way valve structure. In other embodiments, the first to sixth valve assemblies V1 to V6 may also employ other multi-way valve combinations capable of two-way switching.

[0189] Example 3

[0190] like Figure 6 As shown, this embodiment provides a temperature control device for controlling the temperature of a first component 10 and a second component 20. The first component 10 has a first temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the first component 10. The second component 20 has a second temperature-controlled flow path, into which a temperature-controlled fluid flows to control the temperature of the second component 20. The temperature control device includes:

[0191] The first temperature control source CH1 is a low-temperature source used to output fluid at the first temperature;

[0192] The second temperature control source CH2 is a high-temperature source used to output the fluid at the second temperature.

[0193] The third temperature control source CH3 is a low-temperature source used to output fluid at the third temperature;

[0194] The output valve SV has its first input terminal in1 connected to the output port S of the first temperature control source CH1, and its second input terminal in2 connected to the output port S of the third temperature control source CH3. The output port S of the first temperature control source CH1 is also connected to the return port R of the first temperature control source CH1 through the first bypass valve BV1. The output port S of the third temperature control source CH3 is also connected to the return port R of the third temperature control source CH3 through the second bypass valve BV2.

[0195] The first valve assembly V1 has its input terminal in connected to the output terminal out of the output valve SV, its first output terminal out1 connected to the inlet of the first temperature control flow path, and the outlet of the first temperature control flow path connected to the inlet of the second temperature control flow path.

[0196] The second valve assembly V2 has its input terminal in connected to the output port S of the second temperature control source CH2, its first output terminal out1 connected to the inlet of the first temperature control flow path, and its second output terminal out2 connected to the return port R of the second temperature control source CH2.

[0197] The third valve assembly V3 has its input terminal in connected to the outlet of the second temperature control flow path, and its second output terminal out2 connected to the return port R of the second temperature control source CH2.

[0198] The reflux valve RV has its input terminal in connected to the first output terminal out1 of the third valve assembly V3 and the second output terminal out2 of the first valve assembly V1. Its first output terminal out1 is connected to the reflux port R of the first temperature control source CH1, and its second output terminal out2 is connected to the reflux port R of the third temperature control source CH3.

[0199] In this embodiment, the first temperature control source CH1, the second temperature control source CH2, and the third temperature control source CH3 correspond to the temperature control sources of the three channels of the refrigerator, namely two low-temperature sources and one high-temperature source. Through the combined arrangement of the output valve SV, the reflux valve RV, the first bypass valve BV1, the second bypass valve BV2, and the first to third valve assemblies V1 to V3, the first component 10 and the second component 20 are synchronously controlled in series based on the three temperature control sources. The low-temperature fluid output from the two low-temperature sources is used to control the low temperature of the first component 10 and the second component 20, while the high-temperature fluid output from the high-temperature source is used to control the high temperature of the first component 10 and the second component 20, thereby achieving rapid switching between high and low temperatures for these two temperature-controlled components.

[0200] Accordingly, the temperature control device in this embodiment can achieve synchronous high and low temperature switching of the first component 10 and the second component 20 by setting the switching sequence of the output valve SV, the return valve RV, the first bypass valve BV1, the second bypass valve BV2, and the first to third valve assemblies V1 to V3. The specific temperature control method is as follows:

[0201] The first output terminal out1 of the first valve assembly V1 is open, and the second output terminal out2 is closed.

[0202] The first output terminal out1 of the second valve assembly V2 is closed, and the second output terminal out2 is open.

[0203] The first output terminal out1 of the third valve assembly V3 is open, and the second output terminal out2 is closed.

[0204] The output valve SV is open, and the return valve RV is open.

[0205] The first bypass valve BV1 is closed.

[0206] The second bypass valve BV2 is closed.

[0207] So that: the mixture of the first temperature fluid and the third temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source CH1 and the third temperature control source CH3, so as to cool the first component 10 and the second component 20 simultaneously;

[0208] The first output terminal out1 of the first valve assembly V1 is closed, and the second output terminal out2 is open.

[0209] The first output terminal out1 of the second valve assembly V2 is open, and the second output terminal out2 is closed.

[0210] The first output terminal out1 of the third valve assembly V3 is closed, and the second output terminal out2 is open.

[0211] The output valve SV is closed, and the return valve RV is closed.

[0212] The first bypass valve BV1 opens.

[0213] The second bypass valve BV2 opens.

[0214] So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source CH2, so as to heat the first component 10 and the second component 20 simultaneously.

[0215] It should be noted that, in Figure 4In the illustrated embodiment, the low-temperature fluid from the first temperature control source CH1 and the high-temperature fluid from the second temperature control source CH2 are mixed to obtain a fluid with continuously variable temperature within a high and low temperature range. However, the temperature difference between the first temperature control source CH1 and the second temperature control source CH2 is usually large, and the mixed liquid is in an intermediate temperature. This temperature has a large temperature difference with both the first and second temperature control sources CH1 and CH2. The first temperature control source CH1 needs a large cooling power to quickly cool the fluid returning to the first temperature control source CH1 to the set low temperature of the first temperature control source CH1. Similarly, the second temperature control source CH2 needs a large heating power to quickly heat the fluid returning to the second temperature control source CH2 to the set high temperature of the second temperature control source CH2. This places very high cooling and heating power requirements on the refrigerator, and the corresponding footprint and overall energy consumption are significantly increased. In particular, for the first temperature control source CH1, the high power low-temperature requirement will multiply the compressor size and overall cost.

[0216] In this embodiment, the cryogenic fluid from the first temperature control source CH1 and the cryogenic fluid from the third temperature control source CH3 are mixed to obtain a continuously adjustable cryogenic fluid. Since semiconductor etching equipment typically requires a low-temperature operating range (<0°C) during the process and a preset high temperature during dry cleaning, frequent temperature adjustments are necessary. This includes continuous adjustment within a certain low-temperature range during the process and rapid switching to a fixed high temperature during dry cleaning. This embodiment, by mixing the two cryogenic temperature control sources, achieves efficient continuous adjustment within a low-temperature range, meeting the low-temperature operating range requirements of semiconductor etching equipment, and significantly reducing the cooling and heating power requirements of the chiller compared to... Figure 4 The embodiment describes a scheme for continuous temperature regulation through high and low temperature liquid mixing, which reduces power loss and improves energy utilization efficiency.

[0217] In this embodiment or some other embodiments, the output temperatures of the first temperature control source CH1 and the third temperature control source CH3 are different to achieve continuous temperature regulation within a low-temperature range. Preferably, the temperature, flow rate, and velocity of the first temperature fluid, the second temperature fluid, and the second temperature fluid can be set using a three-channel refrigerator, thereby enabling better temperature control of the first component 10 and the second component 20. Optionally, temperature detectors (not shown in the figure) can be installed at the inlet of the first temperature control flow path and the inlet of the second temperature control flow path, thereby enabling feedback regulation of the temperature of the first component 10 and the second component 20 to reach the set target temperature, improving the accuracy of temperature control of the first component 10 and the second component 20. The first component 10 and the second component 20 can be any combination of an electrostatic chuck and edge ring, a gas spray head and an air inlet cover, and an upper grounding ring and a moving ring.

[0218] In this embodiment, the first bypass valve BV1 and the second bypass valve BV2 are proportional valves used to maintain stable outlet pressures of the first temperature control source CH1 and the third temperature control source CH3, providing their respective overflow channels. By adjusting the opening degrees of the output valve SV, the first bypass valve BV1, and the second bypass valve BV2, the first temperature fluid and the second temperature fluid are mixed in proportion to form a fluid with the target temperature, thereby achieving continuous temperature regulation of the first component 10 and the second component 20.

[0219] like Figure 6 As shown, each of the first valve assembly V1, the second valve assembly V2, and the third valve assembly V3 includes two on / off switches. The first ends of the two on / off switches are connected together as the input terminal in, and the second ends of the two on / off switches serve as the first output terminal out1 and the second output terminal out2, respectively. In other embodiments, the first valve assembly V1, the second valve assembly V2, and the third valve assembly V3 may also be three-way valves (see reference). Figure 3 (The three-way valve structure shown). Alternatively, one or two of the first valve assembly V1, the second valve assembly V2, and the third valve assembly V3 may employ a structure with two on / off switches, while the remaining components may employ a three-way valve structure. In other embodiments, the first valve assembly V1, the second valve assembly V2, and the third valve assembly V3 may also employ other multi-way valve combination structures capable of two-way switching.

[0220] The output valve SV is equipped with a flow meter at one or both of its first input terminal in1, second input terminal in2, and output terminal out; the return valve RV is equipped with a flow meter at one or both of its input terminal in, first output terminal out1, and second output terminal out2. Figure 6 (as shown in the diagram). There are a total of three flow meters, which are used to precisely control the mixed flow rate and return flow rate of the first temperature control source CH1 and the second temperature control source CH2, thereby precisely controlling the temperature of the mixed fluid output by the output valve SV, and maintaining the liquid level balance of the first temperature control source CH1 and the second temperature control source CH2, reducing power loss and improving system stability.

[0221] Pressure sensors can also be installed at the first input terminal in1 and the second input terminal in2 of the output valve SV. Figure 6 (Not shown in the image) is used to precisely control the two input pressures of the output valve SV. Temperature detectors are installed at the first input terminal in1, the second input terminal in2, the output terminal out of the output valve SV, and the input terminal in of the return valve RV. Figure 6The RTD shown in the figure can adjust the opening of the output valve SV, the return valve RV, the first bypass valve BV1 and the second bypass valve BV2 according to the temperature values ​​measured by these temperature detectors, so that the output temperature is accurate and stable.

[0222] A buffer chamber can also be provided at the output port S of the first temperature control source CH1 and / or the output port S of the third temperature control source CH3 and / or the output end out of the output valve SV. Providing a buffer chamber at the output end out of the output valve SV can reduce temperature fluctuations at the mixed liquid output of the output valve SV, reduce signal fluctuations of the temperature detector at the output end out of the output valve SV, and improve the system's response time and settling time. Providing a buffer chamber at the output port S of the first temperature control source CH1 and / or the output port S of the third temperature control source CH3 can reduce the interference of the three-channel refrigerator's output temperature fluctuations on the output valve SV, improving the overall system stability.

[0223] Example 4

[0224] The present invention also provides a semiconductor processing apparatus, such as... Figure 7 As shown, it includes: a reaction chamber 100, and a temperature control device 200 as described above. The temperature control device 200 is disposed outside the reaction chamber and is used to control the temperature of the first component 10 and the second component 20 located inside the reaction chamber 100.

[0225] For example, if the first component 10 is an electrostatic chuck, and the first temperature control flow path is the cooling channel of the electrostatic chuck, and the second component 20 is an edge ring, then the second temperature control flow path is the cooling channel of the edge ring. By combining the above-mentioned temperature control device with series temperature control of the electrostatic chuck and the edge ring, and using a three-channel refrigerator to adjust the temperature of the electrostatic chuck and the edge ring, the requirement for rapid switching between high and low temperatures of the two components can be achieved.

[0226] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0227] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, characterized in that, include: The first temperature control source is a low-temperature source used to output fluid at the first temperature; The second temperature control source is a high-temperature source used to output a fluid at a second temperature. The third temperature control source is a low-temperature source used to output fluid at a third temperature. The first valve assembly has its input end connected to the output port of the first temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the first temperature control source. The second valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source. The third valve assembly has its input end connected to the outlet of the first temperature control flow path and its first output end connected to the inlet of the second temperature control flow path. The fourth valve assembly has its input end connected to the second output end of the third valve assembly, its first output end connected to the return port of the first temperature control source, and its second output end connected to the return port of the second temperature control source. The fifth valve assembly has its input end connected to the output port of the third temperature control source, its first output end connected to the inlet of the second temperature control flow path, and its second output end connected to the return port of the third temperature control source. The sixth valve assembly has its input end connected to the outlet of the second temperature control flow path, its first output end connected to the input end of the fourth valve assembly, and its second output end connected to the return port of the third temperature control source.

2. The temperature control device as described in claim 1, characterized in that, The first to sixth valve assemblies are three-way valves; or Each of the first to sixth valve assemblies includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

3. The temperature control device as described in claim 1, characterized in that, Each of the first, second, and fourth valve assemblies includes two one-way valves, with the first ends of the two one-way valves connected together as an input end, and the second ends of the two one-way valves serving as a first output end and a second output end, respectively.

4. The temperature control device as described in claim 1, characterized in that, The first valve assembly includes a first one-way valve and a three-way valve. The first end of the first one-way valve and the first input end of the three-way valve are connected to each other as the input end of the first valve assembly. The second end of the first one-way valve serves as the second output end of the first valve assembly, and the output end of the three-way valve serves as the first output end of the first valve assembly. The second valve assembly includes a second one-way valve and the three-way valve. The first end of the second one-way valve and the second input end of the three-way valve are connected to each other as the input end of the second valve assembly. The second end of the second one-way valve serves as the second output end of the second valve assembly, and the output end of the three-way valve serves as the first output end of the second valve assembly.

5. The temperature control device as described in claim 4, characterized in that, The fourth valve assembly is a three-way valve.

6. The temperature control device as described in claim 3 or 4, characterized in that, The first output terminal of the first valve assembly and the first output terminal of the second valve assembly are connected to the input terminal of a mixing device that promotes fluid mixing, and the output terminal of the mixing device is connected to the inlet of the first temperature-controlled flow path.

7. The temperature control device as described in claim 3 or 4, characterized in that, The third valve assembly, the fifth valve assembly, and the sixth valve assembly are three-way valves; or Each of the third valve assembly, the fifth valve assembly, and the sixth valve assembly includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

8. The temperature control device as described in claim 1, characterized in that, Temperature detectors are provided at the inlet and outlet of the first temperature-controlled flow path and at the inlet and outlet of the second temperature-controlled flow path.

9. The temperature control device as described in claim 1, characterized in that, The first component and the second component are any combination of the following: electrostatic chuck and edge ring, gas spray head and air inlet cover, upper grounding ring and moving ring.

10. A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, characterized in that... include: The first temperature control source is a low-temperature source used to output fluid at the first temperature; The second temperature control source is a high-temperature source used to output a fluid at a second temperature. The third temperature control source is a low-temperature source used to output fluid at a third temperature. The first valve assembly has its input end connected to the output port of the first temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the first temperature control source. The second valve assembly has its input end connected to the output port of the third temperature control source, its first output end connected to the inlet of the second temperature control flow path, and its second output end connected to the return port of the third temperature control source. The third valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source. The fourth valve assembly has its input end connected to the outlet of the first temperature control flow path, its first output end connected to the return port of the first temperature control source, and its second output end connected to the inlet of the second temperature control flow path. The fifth valve assembly has its input end connected to the outlet of the second temperature control flow path, its first output end connected to the return port of the third temperature control source, and its second output end connected to the return port of the second temperature control source.

11. The temperature control device as claimed in claim 10, characterized in that, The first to fifth valve assemblies are three-way valves; or Each of the first to fifth valve assemblies includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

12. The temperature control device as described in claim 10, characterized in that, Temperature detectors are provided at the inlet and outlet of the first temperature-controlled flow path and at the inlet and outlet of the second temperature-controlled flow path.

13. The temperature control device as described in claim 10, characterized in that, The first component and the second component are any combination of the following: electrostatic chuck and edge ring, gas spray head and air inlet cover, upper grounding ring and moving ring.

14. A temperature control device for controlling the temperature of a first component and a second component, wherein the first component has a first temperature-controlled flow path and the second component has a second temperature-controlled flow path, characterized in that... include: The first temperature control source is a low-temperature source used to output fluid at the first temperature; The second temperature control source is a high-temperature source used to output a fluid at a second temperature. The third temperature control source is a low-temperature source used to output fluid at a third temperature. An output valve has its first input terminal connected to the output port of the first temperature control source and its second input terminal connected to the output port of the third temperature control source. The output port of the first temperature control source is also connected to the return port of the first temperature control source through a first bypass valve, and the output port of the third temperature control source is also connected to the return port of the third temperature control source through a second bypass valve. A first valve assembly has its input end connected to the output end of the output valve, its first output end connected to the inlet of the first temperature-controlled flow path, and its outlet connected to the inlet of the second temperature-controlled flow path. The second valve assembly has its input end connected to the output port of the second temperature control source, its first output end connected to the inlet of the first temperature control flow path, and its second output end connected to the return port of the second temperature control source. The third valve assembly has its input end connected to the outlet of the second temperature control flow path and its second output end connected to the return port of the second temperature control source; A reflux valve, the input of which is connected to the first output of the third valve assembly and the second output of the first valve assembly, the first output of which is connected to the reflux port of the first temperature control source, and the second output of which is connected to the reflux port of the third temperature control source.

15. The temperature control device as described in claim 14, characterized in that, The output valve is equipped with a flow meter at one or both of its first input end, second input end, and output end; the return valve is equipped with a flow meter at one or both of its input end, first output end, and second output end; and the total number of flow meters is three.

16. The temperature control device as described in claim 14, characterized in that, Pressure sensors are provided at the first and second input ends of the output valve.

17. The temperature control device as described in claim 14, characterized in that, The output port of the first temperature control source and / or the output port of the third temperature control source and / or the output end of the output valve are provided with a buffer cavity.

18. The temperature control device as described in claim 14, characterized in that, The first bypass valve and the second bypass valve are proportional valves.

19. The temperature control device as described in claim 14, characterized in that, The first valve assembly, the second valve assembly, and the third valve assembly are three-way valves; or Each of the first valve assembly, the second valve assembly, and the third valve assembly includes two on / off switches, with the first ends of the two on / off switches connected together as the input terminal, and the second ends of the two on / off switches serving as the first output terminal and the second output terminal, respectively.

20. The temperature control device as described in claim 14, characterized in that, Temperature detectors are provided at the first input end, the second input end, and the output end of the output valve, and a temperature detector is provided at the input end of the reflux valve.

21. The temperature control device as described in claim 14, characterized in that, The first component and the second component are any combination of the following: electrostatic chuck and edge ring, gas spray head and air inlet cover, upper grounding ring and moving ring.

22. A semiconductor processing apparatus, characterized in that, include: The reaction chamber, and the temperature control device as described in any one of claims 1 to 21; The temperature control device is located outside the reaction chamber and is used to control the temperature of the first and second components located inside the reaction chamber.

23. A temperature control method, characterized in that, The temperature control method is implemented using the temperature control device as described in any one of claims 1 to 9, and includes: The first output terminal of the first valve assembly is closed, and the second output terminal is open. The first output terminal of the second valve assembly is open, and the second output terminal is closed. The first output terminal of the third valve assembly is open, and the second output terminal is closed. The first output terminal of the fourth valve assembly is closed, and the second output terminal is open. The first output terminal of the fifth valve assembly is closed, and the second output terminal is open. The first output terminal of the sixth valve assembly is open, and the second output terminal is closed. So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

24. A temperature control method, characterized in that, The temperature control method is implemented using the temperature control device as described in any one of claims 1 to 9, and includes: The first and second output terminals of the first, second, and fourth valve assemblies are all open. The first output terminal of the third valve assembly is open, and the second output terminal is closed. The first output terminal of the fifth valve assembly is closed, and the second output terminal is open. The first output terminal of the sixth valve assembly is open, and the second output terminal is closed. So that the mixture of the first temperature fluid and the second temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source and the second temperature control source, so as to heat the first component and the second component simultaneously.

25. A temperature control method, characterized in that, The temperature control method is implemented using the temperature control device as described in any one of claims 1 to 9, and includes: The first output terminal of the first valve assembly is open, and the second output terminal is closed. The first output terminal of the second valve assembly is closed, and the second output terminal is open. The first output terminal of the third valve assembly is closed, and the second output terminal is open. The first output terminal of the fourth valve assembly is open, and the second output terminal is closed. The first output terminal of the fifth valve assembly is open, and the second output terminal is closed. The first output terminal of the sixth valve assembly is closed, and the second output terminal is open. So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source to cool the first component; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source to cool the second component.

26. A temperature control method, characterized in that, The temperature control method is implemented using the temperature control device as described in any one of claims 10 to 13, and includes: The first output terminal of the first valve assembly is open, and the second output terminal is closed. The first output terminal of the second valve assembly is open, and the second output terminal is closed. The first output terminal of the third valve assembly is closed, and the second output terminal is open. The first output terminal of the fourth valve assembly is open, and the second output terminal is closed. The first output terminal of the fifth valve assembly is open, and the second output terminal is closed. So that: the first temperature fluid is input to the first temperature control flow path and then returns to the first temperature control source to cool the first component; the third temperature fluid is input to the second temperature control flow path and then returns to the third temperature control source to cool the second component; The first output terminal of the first valve assembly is closed, and the second output terminal is open. The first output terminal of the second valve assembly is closed, and the second output terminal is open. The first output terminal of the third valve assembly is open, and the second output terminal is closed. The first output terminal of the fourth valve assembly is closed, and the second output terminal is open. The first output terminal of the fifth valve assembly is closed, and the second output terminal is open. So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

27. A temperature control method, characterized in that, The temperature control method is implemented using the temperature control device as described in any one of claims 14 to 21, and includes: The first output terminal of the first valve assembly is open, and the second output terminal is closed. The first output terminal of the second valve assembly is closed, and the second output terminal is open. The first output terminal of the third valve assembly is open, and the second output terminal is closed. The output valve is open, and the return valve is open. The first bypass valve is closed. The second bypass valve is closed. So that: the mixture of the first temperature fluid and the third temperature fluid is first input into the first temperature control flow path, then into the second temperature control flow path, and finally returned to the first temperature control source and the third temperature control source, so as to cool the first component and the second component simultaneously; The first output terminal of the first valve assembly is closed, and the second output terminal is open. The first output terminal of the second valve assembly is open, and the second output terminal is closed. The first output terminal of the third valve assembly is closed, and the second output terminal is open. The output valve is closed, and the return valve is closed. The first bypass valve opens. The second bypass valve opens. So that: the second temperature fluid is first input to the first temperature control flow path, then input to the second temperature control flow path, and finally returns to the second temperature control source, so as to heat the first component and the second component simultaneously.

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