Insulation coating defect detection and in-situ repair integrated device and method

Abstract

The present disclosure relates to the technical field of semiconductor component surface treatment, in particular to an integrated device and method for insulation coating defect detection and in-situ repair, which comprises a workpiece clamping assembly and a coaxial detection and repair probe controlled by a multi-axis motion mechanism in a vacuum cavity. The workpiece clamping assembly and the discharge electrode arranged in the probe constitute a Townsend discharge electrode. The vacuum cavity is filled with low-pressure inert atmosphere. The insulation coating through-hole defect is positioned by Townsend discharge. The probe is provided with a pulse laser part to perform two laser repairs in-situ. The first high-energy repair utilizes the self-melting and leveling of the coating base material to seal the through-hole. The second low-power repair eliminates the micro-cracks possibly derived from the first repair. After the repair, the probe performs discharge re-inspection in-situ. The present disclosure realizes the positioning of insulation coating through-hole by Townsend discharge and the real-time in-situ repair by laser through the coaxial detection and repair probe, inhibits the oxidation and micro-cracks in the repair area, and can realize the in-situ sealing of through-hole defects. The present disclosure is particularly suitable for the automatic repair of special coatings of semiconductor etching cavity components.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor component surface treatment technology, and in particular to an integrated device and method for detecting and in-situ repairing defects in insulating coatings. Background Technology

[0002] Semiconductor integrated circuit chip manufacturing relies on the patterning process of multilayer thin films on silicon wafers, with etching being a core process. The etching reaction chamber is mostly made of aluminum alloy substrate. Etching gas is introduced into the chamber and a high-frequency electric field is applied. The gas dissociates to form plasma containing highly active free radicals. At the same time, high-voltage bias accelerates ions, which not only continuously bombard the wafer but also the chamber and the components inside the chamber.

[0003] When the etching reaction chamber is subjected to corrosion by highly reactive free radicals and ion bombardment, loose compounds are generated that easily peel off from the surface, producing a large number of dust particles. Ions from the chamber substrate and various peeled impurities adhere to the wafer surface, easily causing device leakage and short circuits, reducing product reliability. As advanced process linewidths shrink to the nanometer level, the process tolerance for dust particles further decreases, placing higher demands on the chamber's protection capabilities.

[0004] Currently, the industry commonly uses yttrium-based ceramic protective coatings to spray the inner walls of etching chambers and the surfaces of components to isolate the silicon wafers from metal substrate contamination, while significantly extending equipment maintenance cycles. These special coatings are primarily prepared using atmospheric plasma spraying, a process that is simple to operate, highly adaptable to different workpieces, has high spraying efficiency, and produces excellent coating adhesion, leading to its widespread application. However, atmospheric plasma spraying coatings have a layered stacked structure, and the rapid solidification of molten particles easily forms non-equilibrium crystalline phases, inevitably resulting in defects such as through-holes. These defects form plasma corrosion channels, easily causing localized coating peeling, eroding the metal substrate, and continuously generating particulate contaminants, severely impacting chip production yield and long-term device reliability.

[0005] To address the defect detection needs of this type of special coating, the applicant's prior patent ZL202411718953.1 discloses a non-destructive method for locating defects in insulating coatings based on the Townsend discharge principle, which can accurately identify minute defects in the coating. However, this solution only has a detection function; after the workpiece is inspected, it needs to be transported off the production line for repair, which not only results in high rework costs but also suffers from poor secondary positioning accuracy and secondary contamination of the workpiece.

[0006] Existing technologies such as physical vapor deposition (PVD), aerosol deposition (AD), and atomic layer deposition (ALD) can also be used to prepare dense coatings. However, these processes involve high equipment investment and have significantly lower production efficiency than atmospheric plasma spraying, making large-scale replacement difficult. Therefore, the industry urgently needs an integrated device and method that can achieve online detection and in-situ repair of defects in special coatings. This device and method should accurately detect and eliminate micro-defects in special coatings while retaining the high efficiency and low cost advantages of atmospheric plasma spraying, thus meeting the requirements of semiconductor etching equipment in advanced processes. Summary of the Invention

[0007] To address the aforementioned technical problems in the existing technology, this disclosure proposes an integrated device and method for detecting and repairing defects in insulating coatings. This method enables coaxial integration of Townsend discharge detection and pulsed laser repair, allowing for real-time in-situ repair. It can seal through-holes while avoiding the repair of microcracks that may result from the repair, thus significantly improving coating density and service life.

[0008] On one hand, this disclosure proposes an integrated device for detecting and repairing defects in insulating coatings, including a vacuum chamber 1, a vacuum pump group 2, and a control unit 3. The vacuum pump group 2 is connected to the vacuum chamber 1. The vacuum chamber 1 includes a multi-axis motion mechanism 4, a coaxial detection and repair probe 5, and a workpiece clamping assembly 15, all electrically connected to the control unit 3. The coaxial detection and repair probe 5 is mounted on the execution end of the multi-axis motion mechanism 4, which drives the coaxial detection and repair probe 5 to achieve spatial orientation adjustment. The coaxial detection and repair probe 5 serves as the first electrode for Townsend discharge. The workpiece clamping assembly 15 makes conductive contact with the workpiece substrate side, serving as the first electrode for Townsend discharge. The second electrode is an electric electrode; the first electrode and the second electrode are arranged opposite each other to form a defect detection electric field; the coaxial detection and repair probe 5 is a cylindrical multi-layer coaxial structure, with a retractable pulsed laser part 51 and a discharge electrode 53 arranged from the inside to the outside. The base of the discharge electrode 53 is cylindrical, and its top is provided with a petal opening and closing part 531; under normal conditions, the petal opening and closing part 531 is closed inward to form a single point tip. When the pulsed laser part 51 extends outward, it can open the petal opening and closing part 531; the control part 3 controls the pulsed laser part 51 to extend axially according to the defect signal fed back by the Townsend discharge and performs at least two laser in-situ repairs on the same defect.

[0009] Preferably, the multi-axis motion mechanism 4 is located at the lower part of the vacuum chamber 1, and the sealing cover 12 at the upper part of the vacuum chamber 1 is fitted with a drive mechanism 13 through it. An insulating mounting base 14 is fixedly connected to the output shaft of the drive mechanism 13, and a workpiece clamping assembly 15 is fixedly installed at the bottom of the insulating mounting base 14. The insulating mounting base 14 can prevent high-voltage discharge signals from entering the drive mechanism 13.

[0010] Preferably, the coaxial detection and repair probe 5 is coaxially arranged from the inside out with a retractable pulsed laser part 51, a ceramic insulating sleeve 52, a discharge electrode 53 and a shielding shell 54; the ceramic insulating sleeve 52 has a wall thickness of 2-3 mm and completely wraps the inner pulsed laser part 51; the cylindrical structure at the base of the discharge electrode 53 wraps the ceramic insulating sleeve 52, and the shielding shell 54 is grounded.

[0011] Preferably, the pulsed laser unit 51 includes a pulsed laser fiber 511 and a lens group 512 composed of a collimating lens and a focusing lens; the laser process parameters of the pulsed laser unit 51 are as follows: defocusing amount 40-80mm, spot diameter 4-8mm, laser power 100-300W, duty cycle 30%-50%, pulse frequency 50-300Hz, and single-point irradiation duration 1-5s.

[0012] Preferably, the control unit 3 pre-stores two levels of laser process parameters. The first laser repair uses higher parameters within the range to seal the coating through holes, and the second laser repair uses lower process parameters than the first.

[0013] On the other hand, this disclosure also proposes a method for detecting and repairing defects in insulating coatings, implemented using the integrated device described above, comprising the following steps: S1, workpiece clamping: the workpiece 6 coated with the insulating coating is fixed to the workpiece clamping assembly 15, the workpiece clamping assembly 15 contacts the workpiece substrate to form a second electrode, and the vacuum chamber 1 is closed; S2, chamber atmosphere building: the vacuum pump group 2 extracts air from the vacuum chamber 1 and introduces inert gas to maintain a low-pressure inert atmosphere in the vacuum chamber 1; S3, full-area scanning detection: the multi-axis motion mechanism 4 drives the coaxial detection and repair probe 5 to scan along the surface of the insulating coating, the discharge electrode 53 built into the coaxial detection and repair probe 5 serves as the first electrode, the first electrode, the second electrode, and the discharge electrode 53 are used as the first electrode. The electrode forms a detection electric field, and Townsend discharge signals are generated at the location of the through hole defect. The control unit 3 collects the discharge signals; S4, two-time laser repair and sealing: The control unit 3 controls the pulsed laser unit 51 to extend axially, and the pulsed laser unit 51 pushes open the petal opening and closing part 531. The control unit 3 retrieves the first set of laser parameters, and the coaxial laser irradiates the defect area in situ. The insulating coating self-melts and flows to seal the through hole defect. The second set of lower laser parameters is switched to perform the second repair. After the repair is completed, the pulsed laser unit 51 retracts to the initial position, and the petal opening and closing part 531 retracts inward to reset; S5, in-situ re-inspection: Townsend discharge detection is performed again at the same point. After passing the test, the probe is moved to the next defect point, and the full-area detection and repair are completed in a cycle.

[0014] Preferably, in step S2, argon gas is introduced and a low-pressure inert atmosphere of 0.1 to 10 Torr is maintained.

[0015] Preferably, the first laser repair uses the following parameters: defocusing distance of 60mm, spot diameter of 5mm, power of 200W, duty cycle of 40%, pulse frequency of 100Hz, and single-point irradiation for 3s; the second laser repair uses the following parameters: defocusing distance of 70mm, spot diameter of 7mm, power of 100W, duty cycle of 20%, pulse frequency of 80Hz, and single-point irradiation for 1s.

[0016] Preferably, the two laser repair processes are completed in situ within the same sealed vacuum chamber 1 without opening the chamber, removing the workpiece 6, or adding repair powder. If the re-inspection fails, the control unit 3 fine-tunes the laser parameters and repeats the two laser repair processes until the re-inspection passes.

[0017] Preferably, the multi-axis motion mechanism 4 adjusts the position of the coaxial detection and repair probe 5 in real time, always keeping the probe perpendicular to the coating surface of the workpiece 6 and maintaining a constant distance.

[0018] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain the preferred examples of this disclosure.

[0019] The above technical solutions have the following advantages or beneficial effects: 1. Coaxial confocal integration enables Townsend discharge detection and pulsed laser repair, allowing for immediate inspection and repair with zero offset, and a fully automated closed-loop "detection-positioning-repair-re-inspection" system with traceable quality; 2. Vacuum shared atmosphere inhibits oxidation and microcracks in the repair area during laser repair, resulting in high cleanliness. No powder feeding is required; the coating self-melts to seal the through-holes. Secondary laser repair seals the holes while preventing potential microcracks, addressing the industry pain point of easy cracking in laser repair; 3. It retains the high efficiency and low cost advantages of atmospheric plasma spraying and elevates the coating to an advanced process level. Of course, no single technical solution disclosed herein may simultaneously achieve all the advantages described above. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on the provided drawings without any creative effort.

[0021] Figure 1 This is a schematic diagram of the integrated device for detecting and repairing defects in insulation coatings according to an embodiment of the present disclosure; Figure 2 This is a schematic diagram of the vacuum chamber structure of an integrated device for detecting and repairing defects in insulation coatings according to an embodiment of the present disclosure; Figure 3 This is a schematic diagram of the structure of a coaxial detection and repair probe according to an embodiment of the present disclosure; The components include: vacuum chamber 1, observation window 11, sealing cover 12, drive mechanism 13, insulating mounting base 14, workpiece clamping assembly 15, vent 16, vacuum pump group 2, control unit 3, multi-axis motion mechanism 4, coaxial detection and repair probe 5, pulsed laser unit 51, pulsed laser fiber 511, lens group 512, ceramic insulating sleeve 52, discharge electrode 53, petal opening and closing part 531, shielding shell 54, adapter flange 55, and workpiece 6. Detailed Implementation

[0022] The technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of this disclosure and are intended to explain the inventive concept. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without inventive effort are within the scope of protection of this disclosure.

[0023] The terms “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “axial,” “radial,” “circumferential,” “center,” “longitudinal,” “transverse,” “length direction,” “width direction,” and “thickness direction” used in the description indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are for the purpose of simplifying the description only and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation.

[0024] The terms "first," "second," etc., used in the description are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of that feature. The term "multiple" means two or more, unless otherwise explicitly specified.

[0025] Unless otherwise explicitly specified and limited, the terms "connected," "connected," etc., used in the description should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments according to the specific circumstances.

[0026] Unless otherwise explicitly specified and limited, the terms "above," "below," or "on top of" the second feature can mean that the first and second features are in direct contact or indirect contact through an intermediate medium. Furthermore, "above," "on top of," or "on top of" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," or "below" the second feature can mean that the first and second features are in direct contact or indirect contact through an intermediate medium. Moreover, "below," "below," or "below" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0027] The term "a specific embodiment" as used in the description means that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0028] refer to Figure 1 One specific embodiment of this disclosure proposes an integrated device for detecting and repairing defects in insulating coatings, including a vacuum chamber 1 connected to a vacuum pump assembly 2, and a control unit 3 electrically connected to both the vacuum chamber 1 and the vacuum pump assembly 2. An observation window 11 is provided on the side wall of the vacuum chamber 1 to facilitate real-time observation of the detection and repair process within the vacuum chamber. An openable and closable sealing cover 12 is provided on the top of the vacuum chamber 1, and the sealing cover 12 is sealed to the vacuum chamber 1 by fasteners to ensure the stability of the low-vacuum environment within the vacuum chamber.

[0029] refer to Figure 2 One specific embodiment of this disclosure proposes an integrated device for detecting and repairing defects in insulating coatings. A multi-axis motion mechanism 4 is fixedly arranged inside a vacuum chamber 1. The execution end of the multi-axis motion mechanism 4 is connected to a coaxial detection and repair probe 5, which serves as the first electrode for Townsend discharge. A workpiece clamping assembly 15 is also provided inside the vacuum chamber 1. The workpiece clamping assembly 15 makes conductive contact with the workpiece substrate side, serving as the second electrode for Townsend discharge. The first and second electrodes are arranged opposite each other to form a defect detection electric field. The multi-axis motion mechanism 4 can drive the coaxial detection and repair probe 5 to complete X / Y / Z three-dimensional translation and posture oscillation, adapting to planar, curved, and irregularly shaped workpiece structures, ensuring that the probe and coating surface maintain a constant distance and vertical posture, guaranteeing detection accuracy and repair consistency.

[0030] In one specific embodiment of this disclosure, a drive mechanism 13 is centrally disposed on the sealing cover 12 to provide power. An insulating mounting base 14 is fixedly connected to the output shaft of the drive mechanism 13, and a gripper-type workpiece clamping assembly 15 is fixedly mounted on the bottom of the insulating mounting base 14. The insulating mounting base 14 is made of a high-strength insulating material, such as alumina ceramic, which can achieve complete electrical isolation between the drive shaft of the drive mechanism 13 and the workpiece clamping assembly 15, preventing high voltage discharge from entering the drive mechanism 13 and preventing leakage, signal interference, and short circuit risks.

[0031] In one specific embodiment of this disclosure, the clamping end of the workpiece clamping assembly 15 is equipped with an elastic conductive adhesive element, such as a composite of a conductive silicone pad and a metal spring. The metal spring can be embedded inside the conductive silicone pad or evenly distributed in a ring between the conductive silicone pad and the main body of the workpiece clamping assembly 15. The elastic conductive adhesive element can adapt to the flat or curved surface of the back of the workpiece, thereby achieving a tight fit and low-impedance electrical contact with the uncoated side of the workpiece's metal substrate. The workpiece clamping assembly 15 and the elastic conductive adhesive element at its cooperating end together constitute the second electrode of the Townsend discharge, serving as the reference electrode of the discharge circuit.

[0032] In one specific embodiment of this disclosure, the side wall of the vacuum chamber 1 is further provided with a vent 16, which is connected to an inert gas source and a vacuum pump assembly 2. The vacuum pump assembly 2 includes a mechanical pump and a molecular pump. The mechanical pump can be directly connected to the vacuum chamber 1, or connected to the vacuum chamber 1 through a molecular pump. The vacuum pump assembly 2 can extract air from the vacuum chamber 1 in stages to maintain a stable low vacuum environment in the vacuum chamber 1. At the same time, it can be used in conjunction with the filling of inert protective gases such as argon and nitrogen to create an oxygen-free and clean internal atmosphere.

[0033] refer to Figure 3 One specific embodiment of this disclosure proposes an integrated device for detecting and repairing defects in insulating coatings. The coaxial detection and repair probe 5 is a cylindrical multi-layer coaxial structure, with a retractable pulsed laser part 51, a ceramic insulating sleeve 52, a discharge electrode 53 and a shielding shell 54 arranged coaxially from the inside to the outside to ensure that the optical path and electric field are not deviated.

[0034] In a specific embodiment of this disclosure, the pulsed laser unit 51 includes a pulsed laser fiber 511 and a lens group 512. The lens group 512 includes a collimating lens and a focusing lens. External pulsed laser light is introduced into the probe through the fiber, collimated into a parallel beam by the collimating lens, and then focused into a uniform circular spot by the focusing lens, achieving stable transmission and controllable focusing of the laser beam. The laser process parameters of the pulsed laser unit 51 are as follows: defocusing amount 40–80 mm, spot diameter 4–8 mm, laser power 100–300 W, duty cycle 30%–50%, pulse frequency 50–300 Hz, and single-point irradiation duration 1–5 s.

[0035] In a specific embodiment of this disclosure, the second layer is a ceramic insulating sleeve 52 with a wall thickness of 2-3 mm. The ceramic insulating sleeve 52 completely encloses the inner pulsed laser part 51. The ceramic insulating sleeve 52 can completely isolate the high-voltage discharge electric field from the pulsed laser part 51, eliminating high-voltage breakdown and electromagnetic interference optical path, and ensuring the stability of laser transmission.

[0036] In one specific embodiment of this disclosure, the third layer is a discharge electrode 53. The base of the discharge electrode 53 has a cylindrical structure and is wrapped around the outside of the ceramic insulating sleeve 52. It is preferably made of tungsten-copper alloy, which can withstand high voltage and discharge erosion. The top of the discharge electrode 53 is provided with a petal opening and closing member 531. Under normal conditions, the petal opening and closing member 531 closes inward and converges to form a single-point tip structure. The single-point tip of the petal opening and closing member 531 is strictly coaxial with the laser optical path of the pulse laser unit 51. The single-point tip formed by the convergence of the petal opening and closing member 531 is equivalent to a needle electrode, which serves as the first electrode for Townsend discharge detection. It can accurately identify defects such as micro-holes, while effectively reducing the discharge voltage.

[0037] In one specific embodiment of this disclosure, the petal opening and closing member 531 at the top of the discharge electrode 53 includes multiple highly elastic flexible metal petals, the petal material of which can be beryllium copper or phosphor bronze. Under normal conditions, the flexible metal petals close inward due to their own elasticity, converging to form a single-point tip structure; when the coating needs repair, the inner pulsed laser part 51 extends outward, which can directly push the flexible metal petals outward to undergo elastic deformation and naturally open, making way for the pulsed laser part 51.

[0038] Of course, there are many alternative solutions for the petal opening and closing component 531. For example, the petal opening and closing component 531 includes multiple magnetic metal petals. Under normal conditions, the petals close inward under the action of magnetic attraction, converging to form a single-point tip structure. When the coating needs to be repaired, the inner pulse laser part 51 extends forward, and the mechanical thrust overcomes the magnetic attraction to push the magnetic metal petals outward. After the pulse laser part 51 retracts, the magnetic metal petals automatically reset and close under the action of magnetic attraction.

[0039] In one specific embodiment of this disclosure, the outermost layer is a stainless steel shielding shell 54, which is reliably grounded. This shields external electromagnetic signals, preventing signal distortion; it also regulates the electrode electric field, reduces stray discharge, and improves the accuracy of detecting minute defects, while providing physical protection for the internal structure. An insulated adapter flange 55 is provided at the tail of the coaxial detection and repair probe 5. The adapter flange 55 is fixed to the end of the multi-axis motion mechanism 4. The adapter flange 55 has independently partitioned wiring inside, physically separating the high-voltage electrode cable from the laser fiber line to avoid signal crosstalk.

[0040] The integrated device disclosed herein operates as follows: A workpiece 6 with a special coating on its surface is fixed by a workpiece clamping assembly 15, and the workpiece substrate is stably electrically contacted by an end elastic conductive adhesive piece; the sealing cover 12 is closed to form a sealed cavity 1. Air is extracted from the cavity by a vacuum pump assembly 2 and inert gas is introduced to maintain a low-pressure inert atmosphere inside the vacuum cavity 1. This atmosphere can simultaneously meet the conditions for establishing the electric field of Townsend discharge and the anti-oxidation conditions for laser in-situ repair, inhibiting coating oxidation during the repair process. After the cavity environment is established, the drive mechanism 13 drives the workpiece clamping assembly 15 and the workpiece 6 to rotate synchronously and uniformly through the insulating mounting base 14; at the same time, the multi-axis motion mechanism 4 drives the coaxial detection and repair probe 5 to scan the entire surface of the workpiece coating. When the probe scans to the location where there is a through-hole defect in the gradient coating, the defect in the insulating coating will conduct the electric field formed between the first electrode and the second electrode, triggering a specific Townsend discharge signal. After receiving the specific Townsend discharge signal, the control unit 3 first drives the pulsed laser unit 51 to extend forward axially. The pulsed laser unit 51 pushes the petal opening and closing member 531 to deform and open outward. Subsequently, the pulsed laser unit 51 is triggered to output pulsed laser and perform two in-situ laser repairs. The two in-situ laser repairs are as follows: The first laser repair uses preset parameters to irradiate the defect area, causing the yttrium-based ceramic material in the coating to micro-melt, flow, and self-level due to surface tension, sealing the through-pore defects inside the coating and blocking corrosion channels. The second laser repair, after the first laser repair is completed, keeps the coaxial probe in place and then performs a second, gentle laser repair. Using lower power and a shorter irradiation time, the area repaired by the first laser is repaired again, filling the microcracks that may have been generated by the first laser repair, cutting the crack propagation path, and improving the coating density and structural stability. Both laser repairs are completed in-situ within the same vacuum chamber 1, without opening the cover or requiring additional powder feeding. After laser repair is completed, the pulsed laser unit 51 retracts to its initial position, and the petal opening and closing component 531 automatically retracts inward to return to the closed state due to its own elasticity or magnetic attraction. The coaxial detection and repair probe 5 remains in place and performs Townsend discharge detection again to re-inspect and verify whether the defect has been completely eliminated. After the full-area scanning, repair, and re-inspection are completed, the fully automated closed-loop detection and repair process is finished.

[0041] One specific embodiment of this disclosure proposes an integrated device for detecting and repairing defects in yttrium-based coatings of semiconductor components. It is preferably applied to composite coatings that transition from yttrium oxide to yttrium fluoride on semiconductor etching cavity components. After the workpiece is placed in a vacuum chamber 1, the pressure is maintained at 0.1–10 Torr, and argon gas is introduced for protection. A coaxial detection and repair probe 5 is driven by a multi-axis motion mechanism 4, scanning along the surface of the workpiece 6 and performing Townsend discharge detection via a discharge electrode 53. When a through-hole defect is detected, a specific Townsend discharge signal is triggered. After receiving the specific Townsend discharge signal, the control unit 3 first drives the pulsed laser unit 51 to extend axially forward, and then triggers the pulsed laser unit 51 to output a pulsed laser. The laser repair conditions are as follows: defocusing distance 60 mm, spot size 5 mm, power 200 W, duty cycle 40%, frequency 100 Hz, and irradiation time 3 seconds. After the first laser repair is completed, the pulsed laser unit 51 performs a second laser repair in situ. The conditions for the second laser repair are as follows: defocusing distance 70mm, spot size 7mm, power 100W, duty cycle 20%, frequency 80Hz, and irradiation time 1s. After the laser repair is completed, the pulsed laser unit 51 retracts to its initial position, and the petal opening and closing part 531 automatically retracts inward to reset to the closed state. Townsend discharge detection is then performed again in situ to confirm that the defect has been eliminated, thus achieving a fully automated closed loop of detection, two repairs, and re-inspection.

[0042] The integrated device disclosed herein is specifically adapted to the insulating coating of semiconductor etching cavity components. While retaining the advantages of high efficiency and low cost of atmospheric plasma spraying, it achieves non-destructive positioning of micro-hole defects in the coating, oxygen-free in-situ self-melting and sealing repair, and repair of micro-cracks that may be generated through secondary laser repair. It can significantly reduce particle contamination in the etching process and improve the service life of components.

[0043] Although embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present disclosure. Various changes and modifications may be made to the present disclosure without departing from the spirit and scope thereof, and all such changes and modifications fall within the scope of the claimed disclosure.

Claims

1. An integrated device for detecting and repairing defects in insulating coatings, comprising a vacuum chamber (1), a vacuum pump assembly (2), and a control unit (3), wherein the vacuum pump assembly (2) is connected to the vacuum chamber (1), characterized in that, The vacuum chamber (1) includes a multi-axis motion mechanism (4) electrically connected to the control unit (3), a coaxial detection and repair probe (5), and a workpiece clamping assembly (15); the coaxial detection and repair probe (5) is installed at the execution end of the multi-axis motion mechanism (4), and the multi-axis motion mechanism (4) drives the coaxial detection and repair probe (5) to achieve spatial pose adjustment; the coaxial detection and repair probe (5) serves as the first electrode of Townsend discharge; the workpiece clamping assembly (15) makes conductive contact with the workpiece substrate side and serves as the second electrode of Townsend discharge; the first electrode and the second electrode are arranged opposite to each other to form a defect detection electric field; The coaxial detection and repair probe (5) is a cylindrical multi-layer coaxial structure. It is provided with a retractable pulsed laser part (51) and a discharge electrode (53) from the inside to the outside. The base of the discharge electrode (53) is cylindrical, and its top is provided with a petal opening and closing part (531). Under normal conditions, the petal opening and closing part (531) is closed inward to form a single point tip. When the pulsed laser part (51) extends outward, it can open the petal opening and closing part (531). The control part (3) controls the pulsed laser part (51) to extend axially according to the defect signal fed back by the Townsend discharge and performs at least two laser in-situ repairs on the same defect.

2. The integrated device according to claim 1, characterized in that, The multi-axis motion mechanism (4) is located at the lower part of the vacuum chamber (1). The sealing cover (12) at the upper part of the vacuum chamber (1) is fitted with a drive mechanism (13). An insulating mounting base (14) is fixedly connected to the output shaft of the drive mechanism (13). A workpiece clamping assembly (15) is fixedly installed at the bottom of the insulating mounting base (14).

3. The integrated device according to claim 1, characterized in that, The coaxial detection and repair probe (5) is coaxially arranged from the inside to the outside with a retractable pulsed laser part (51), a ceramic insulating sleeve (52), a discharge electrode (53) and a shielding shell (54); the ceramic insulating sleeve (52) has a wall thickness of 2-3 mm and completely wraps the inner pulsed laser part (51); the cylindrical structure at the base of the discharge electrode (53) wraps the ceramic insulating sleeve (52), and the shielding shell (54) is grounded.

4. The integrated device according to claim 1, characterized in that, The pulsed laser unit (51) includes a pulsed laser fiber (511) and a lens group (512) consisting of a collimating lens and a focusing lens; the laser process parameters of the pulsed laser unit (51) are as follows: defocusing amount 40-80mm, spot diameter 4-8mm, laser power 100-300W, duty cycle 30%-50%, pulse frequency 50-300Hz, and single-point irradiation duration 1-5s.

5. The integrated device according to claim 4, characterized in that, The control unit (3) pre-stores two levels of laser process parameters. The first laser repair uses higher parameters within the range to seal the coating through holes, and the second laser repair uses lower process parameters than the first.

6. A method for detecting and in-situ repairing defects in insulating coatings, characterized in that, The integrated device described in any one of claims 1 to 5 is used to implement the following steps: S1. Workpiece clamping: Fix the workpiece (6) coated with insulating coating to the workpiece clamping assembly (15). The workpiece clamping assembly (15) contacts the workpiece substrate to form a second electrode and closes the vacuum chamber (1). S2, cavity atmosphere building: the vacuum pump group (2) extracts air from the vacuum chamber (1) and introduces inert gas to maintain a low-pressure inert atmosphere in the vacuum chamber (1); S3, Full-area scanning detection: The multi-axis motion mechanism (4) drives the coaxial detection and repair probe (5) to scan along the surface of the insulating coating. The discharge electrode (53) built into the coaxial detection and repair probe (5) serves as the first electrode. The first electrode and the second electrode form a detection electric field. The Thomson discharge signal is generated at the location of the through hole defect. The control unit (3) collects the discharge signal. S4. Two-time laser repair of the hole sealing: The control unit (3) controls the pulse laser unit (51) to extend axially, the pulse laser unit (51) pushes open the petal opening and closing part (531), the control unit (3) retrieves the first set of laser parameters, the coaxial laser irradiates the defect area in situ, the insulating coating self-melts and flows to seal the through hole defect, the second set of lower laser parameters is switched to implement the second repair, after the repair is completed, the pulse laser unit (51) retracts to the initial position, and the petal opening and closing part (531) retracts inward to reset; S5. In-situ re-inspection: Perform Townsend discharge detection again at the same point. If it passes the test, move the probe to the next defect point and repeat the process to complete the full-area inspection and repair.

7. The repair method according to claim 6, characterized in that, In step S2, argon gas is introduced and a low-pressure inert atmosphere of 0.1 to 10 Torr is maintained.

8. The repair method according to claim 6, characterized in that, The first laser repair used the following parameters: defocusing distance 60mm, spot diameter 5mm, power 200W, duty cycle 40%, pulse frequency 100Hz, and single-point irradiation for 3s; the second laser repair used the following parameters: defocusing distance 70mm, spot diameter 7mm, power 100W, duty cycle 20%, pulse frequency 80Hz, and single-point irradiation for 1s.

9. The repair method according to claim 6, characterized in that, The two laser repair processes are completed in situ within the same sealed vacuum chamber (1). If the re-inspection fails, the control unit (3) fine-tunes the laser parameters and repeats the two laser repair processes until the re-inspection is passed.

10. The repair method according to claim 6, characterized in that, The multi-axis motion mechanism (4) adjusts the position of the coaxial detection and repair probe (5) in real time, and always keeps the probe perpendicular to the coating surface of the workpiece (6) and the distance between them constant.

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