Air floating platform compatible with different size glass substrate transmission detection

Abstract

The application discloses a kind of compatible different size glass substrate transmission detection air floating platform, it is related to the technical field of semiconductor display panel product precision detection, including: rack, fixedly installed marble pedestal on rack top, partition air floating unit being set on marble pedestal upper surface, air floating roller transmission unit, detection unit and control unit.The application is by the partition air floating unit of multiple groups of independent air floating plate formed by matrix arrangement, cooperate with the independent electromagnetic control valve of each group of air floating plate corresponding setting, can be according to the actual size of glass substrate by control unit, independently control the opening and closing and gas supply pressure of corresponding area air floating plate, flexibly adjust air floating support area, without manual adjustment mechanical structure can realize the quick change of different size glass substrate, while can guarantee the uniformity of glass substrate whole area air film support, avoid the problem of drift, shaking caused by unstable edge air film of substrate.

Description

Technical Field

[0001] This invention relates to the field of precision testing technology for semiconductor display panel products, and specifically to an air-floating platform compatible with the transmission and testing of glass substrates of different sizes. Background Technology

[0002] In the mass production process of the semiconductor display industry, glass substrates are the core carriers of new display products such as mini LED and OLED, and air-floating platforms are the core equipment in the glass substrate transfer and inspection process. Through air-floating non-contact support, they avoid surface scratches and deformation of ultra-thin glass substrates during transfer. At the same time, they provide a stable positioning benchmark and transfer path for the dimensional measurement and appearance defect detection of glass substrates. They directly determine the processing yield of display products and the mass production efficiency of production lines. They are widely applicable to continuous production scenarios of various large-size and ultra-thin glass substrates.

[0003] In existing air-float platforms, the air-float support area is mostly a fixed structure in actual mass production applications, which can only accommodate glass substrates of a single specification. When changing production lines for glass substrates of different sizes, the air-float structure and transmission components need to be manually adjusted, which is cumbersome and prone to installation deviations. At the same time, the air-float area cannot be adjusted according to the substrate size, which can easily lead to uneven air film support at the substrate edge and substrate drifting and swaying, making it impossible to guarantee stable transmission of substrates of different sizes. In addition, existing air-float platforms do not integrate integrated full-dimensional inspection functions. The transmission of glass substrates and the inspection of edge dimensions and surface appearance must be completed step by step on different equipment. The glass substrates need to undergo multiple transfers and clamping and positioning, which not only significantly increases the production cycle time of the product, but also easily causes reference deviations due to multiple positioning, directly affecting the final inspection accuracy of the glass substrates, making it unsuitable for the high-speed and high-precision mass production requirements of the display industry. Summary of the Invention

[0004] This invention provides an air-floating platform compatible with the transmission and detection of glass substrates of different sizes, in order to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: An air-floating platform compatible with the transfer and inspection of glass substrates of different sizes includes: a frame, a marble base fixedly installed on the top of the frame, a partitioned air-floating unit, an air-floating roller transfer unit, a detection unit, and a control unit disposed on the upper surface of the marble base; the partitioned air-floating unit is used to provide adjustable air-floating support for the glass substrate to be inspected, the air-floating roller transfer unit is used to adsorb the glass substrate and drive it to reciprocate along the transfer direction, the detection unit is used to perform inspection operations on the edges and front and back surfaces of the glass substrate, and the control unit is electrically connected to the partitioned air-floating unit, the air-floating roller transfer unit, and the detection unit respectively to realize linkage control.

[0006] A further improvement of the technical solution of the present invention is that: the partitioned air flotation unit includes multiple groups of air flotation plates arranged in a matrix, each group of air flotation plates includes an air flotation plate body and a support member for supporting the air flotation plate body, and each group of air flotation plates is provided with an independent electromagnetic control valve, the electromagnetic control valve being electrically connected to the control unit and used to individually control the opening and closing and air supply pressure of the corresponding air flotation plate.

[0007] A further improvement of the technical solution of the present invention is that: the air flotation plate is made of alumina and its surface is precision ground; the support is a height-adjustable support structure; and the air flotation plate has a positive pressure air flotation channel connected to an external air supply system inside.

[0008] A further improvement of the technical solution of the present invention is that: the air-floating roller transmission unit includes multiple sets of air-floating rollers arranged corresponding to the partitioned air-floating units. Each set of air-floating rollers includes a mounting frame, a servo motor fixed on the mounting frame, an adsorption roller connected to the output end of the servo motor, and a vacuum generator connected to the air path of the adsorption roller. The servo motor and the vacuum generator are both electrically connected to the control unit.

[0009] A further improvement of the technical solution of the present invention is that: multiple sets of air-floating rollers are symmetrically arranged in two rows on the left and right sides of the marble base in the transmission direction; the servo motors of all air-floating rollers are synchronously linked and controlled by the control unit; and the surface of the adsorption roller is provided with an annular adsorption groove that communicates with the internal air passage, which is used to cooperate with the vacuum generator to achieve negative pressure adsorption on the side of the glass substrate.

[0010] A further improvement of the technical solution of the present invention is that: the detection unit includes a short side detection unit, a long side detection unit and a surface inspection unit. The short side detection units are respectively disposed at the front and rear ends of the marble base in the transmission direction, the long side detection units are respectively disposed on the left and right sides of the marble base in the transmission direction, and the surface inspection unit is disposed on the upper and lower sides of the marble base along the entire transmission direction.

[0011] A further improvement of the technical solution of the present invention is that: the short side detection unit includes an upper front short side detection unit, a lower front short side detection unit, a lower rear short side detection unit, an upper rear short side detection unit, and a linear motor module. The upper front short side detection unit and the lower front short side detection unit are vertically and vertically arranged at the front end of the marble base, and the upper rear short side detection unit and the lower rear short side detection unit are vertically and vertically arranged at the rear end of the marble base. Each short side detection unit is fixedly connected to the slide of the corresponding linear motor module, and the linear motor module is electrically connected to the control unit.

[0012] A further improvement of the technical solution of the present invention is that: the long side detection unit includes multiple sets of upper long side detection units and lower long side detection units arranged vertically and vertically, and each set of upper long side detection units and lower long side detection units is equipped with a lead screw drive module. The lead screw drive module is electrically connected to the control unit and is used to drive the corresponding long side detection unit to move in a direction perpendicular to the transmission direction.

[0013] A further improvement of the technical solution of the present invention is that: the surface inspection unit includes an upper surface inspection unit and a lower surface inspection unit, which are symmetrically arranged on the upper and lower sides of the transmission path of the marble base, and both the upper and lower surface inspection units are equipped with a manual fine-tuning slide with the adjustment direction perpendicular to the transmission direction.

[0014] A further improvement of the technical solution of the present invention is that: the control unit has a built-in product size adaptation module and a detection process control module; the control unit is externally connected to an industrial touch screen and a power supply; the partitioned air flotation unit is equipped with a positive and negative pressure coordinated air supply system; and the positive and negative pressure coordinated air supply system is electrically connected to the control unit.

[0015] Due to the adoption of the above technical solution, the technical progress achieved by this invention compared to the prior art is as follows: This invention provides an air-floating platform compatible with the transfer and inspection of glass substrates of different sizes. It utilizes a matrix arrangement of multiple independent air-floating plates forming a zoned air-floating unit. Each air-floating plate is equipped with an independent electromagnetic control valve. The control unit can individually control the opening and closing of the corresponding air-floating plate and the air supply pressure according to the actual size of the glass substrate, flexibly adjusting the air-floating support area. This allows for rapid changeover of glass substrates of different sizes without manual adjustment of the mechanical structure. Simultaneously, it ensures the uniformity of the air film support across the entire glass substrate, avoiding drifting and shaking problems caused by unstable air film at the substrate edges. This achieves contactless and highly stable transfer of ultra-thin glass substrates of different sizes. The platform integrates short-side detection units, long-side detection units, and surface inspection units mounted on a marble base. Combined with the linkage control of the control unit and the air-floating roller transfer unit, it can transfer glass substrates... During stable transmission, the system simultaneously performs full-dimensional inspection of the four edges and the entire surface of both sides of the substrate, eliminating the need to transfer the substrate to dedicated inspection equipment. This significantly shortens the production cycle and avoids positioning deviations caused by multiple clamping and transfer operations, effectively improving the inspection accuracy of the glass substrate and the mass production efficiency of the production line. Simultaneously, multiple sets of air-floating rollers, symmetrically arranged in two rows and controlled synchronously, along with a vacuum generator and annular adsorption grooves on the surface of the adsorption rollers, achieve stable negative pressure adsorption and uniform speed transmission of the glass substrate's sides, further ensuring the positional accuracy of the glass substrate during transmission and providing a stable benchmark for inspection operations. Through linear motor modules and lead screw drive modules that can automatically change shape according to the substrate size, the adaptive position adjustment of each inspection unit can be achieved, further improving the equipment's changeover efficiency and inspection adaptability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the main structure of the present invention; Figure 2 This is a schematic diagram of the surface structure of the partitioned air flotation unit of the present invention; Figure 3 This is a schematic diagram of the structure below the surface of the partitioned air flotation unit of the present invention; Figure 4 This is a front view of the present invention. Figure 5 This is a schematic diagram of the distribution structure of the detection unit of the present invention; Figure 6 This is a bottom view of the partitioned air flotation unit structure of the present invention; Figure 7 This is a schematic diagram of the air-floating roller structure of the present invention; Figure 8 This is an exploded view of the air-floating roller of the present invention; Figure 9 For the present invention Figure 3 Enlarged structural diagram at point A in the middle.

[0017] In the diagram: 1. Glass substrate; 2. Marble base; 3. Frame; 4. Short side detection unit; 41. Upper front short side detection unit; 42. Lower front short side detection unit; 43. Lower rear short side detection unit; 44. Upper rear short side detection unit; 45. Linear motor module; 5. Control unit; 6. Long side detection unit; 61. Upper long side detection unit; 62. Lower long side detection unit; 7. Zoned air flotation unit; 71. Air flotation plate; 711. Air flotation plate body; 712. Support component; 72. Air flotation roller; 721. Mounting frame; 722. Servo motor; 723. Adsorption roller; 724. Vacuum generator; 8. Surface inspection unit; 81. Upper surface inspection unit; 82. Lower surface inspection unit. Detailed Implementation

[0018] The present invention will be further described in detail below with reference to embodiments: Example 1, as Figures 1-9 As shown, the present invention provides an air-floating platform compatible with the transmission and testing of glass substrates of different sizes, including: a frame 3, a marble base 2 fixedly installed on the top of the frame 3, a partitioned air-floating unit 7 disposed on the upper surface of the marble base 2, an air-floating roller transmission unit, a detection unit, and a control unit 5; the partitioned air-floating unit 7 is used to provide adjustable air-floating support for the glass substrate 1 to be tested, the air-floating roller transmission unit is used to adsorb the glass substrate 1 and drive it to move back and forth along the transmission direction, the detection unit is used to perform detection operations on the edge and front and back surfaces of the glass substrate 1, and the control unit 5 is electrically connected to the partitioned air-floating unit 7, the air-floating roller transmission unit, and the detection unit respectively to realize linkage control.

[0019] It should be noted that: the frame 3 provides installation support and structural benchmark for the entire equipment; the marble base 2 provides a high-precision installation plane for the entire equipment, ensuring the installation accuracy and operational stability of each functional unit; the partitioned air flotation unit 7 provides non-contact air flotation support for the glass substrate 1 to be tested, avoiding surface scratches during substrate transfer; the air flotation roller transfer unit provides transfer driving force for the glass substrate 1, driving the substrate to move at a uniform speed along a preset path; the detection unit is used to collect edge and surface image data of the glass substrate 1 to complete the detection of substrate size and appearance defects; the control unit 5 is the control core of the entire equipment, realizing the coordinated operation and logic control of each functional unit.

[0020] Wherein, the frame 3 is an integral steel structure frame formed by welding Q235B square tubes. The four corners of the bottom of the frame 3 are each provided with a thread-adjustable horizontal foot, which can adjust the overall levelness and installation height of the frame 3 by rotating the feet to adapt to the docking requirements of the production line; the interior of the frame 3 is provided with an electrical installation cavity and a gas circuit installation cavity, which are respectively used to accommodate the electrical components and gas circuit components of the equipment, realizing the separated arrangement of electricity and gas circuits and improving the safety of equipment operation; the marble base 2 is made of Jinan green natural marble with 00-grade precision, and is fixedly installed on the top end face of the frame 3 by hexagon socket head cap screws. The upper surface of the marble base 2 is processed by ultra-precision grinding, with a surface flatness of up to ±5μm and a surface roughness Ra ≤ 0.2μm, which can effectively offset the micro-deformation of the frame 3 and provide a stable high-precision installation reference for each functional unit; the control unit 5 adopts the Siemens S7-1500 series programmable logic controller as the main control core, and is equipped with an ET200SP distributed IO module for collecting signals of various sensors and outputting control instructions, so as to realize the linkage control of each functional unit.

[0021] In this embodiment, the support structure of the entire equipment is built through the frame, and the stable installation reference is provided in cooperation with the high-precision marble base. Through the cooperative cooperation of the partitioned air flotation unit, the air flotation roller transmission unit, the detection unit and the control unit, the basic functions of non-contact transmission and integrated detection of the glass substrate 1 are realized, which provides a complete hardware architecture basis for the compatible adaptation and high-precision detection of glass substrates 1 of different sizes.

[0022] Second Embodiment, as shown in Figures 1-9As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, the partitioned air flotation unit 7 includes multiple sets of air flotation plates 71 arranged in a matrix. Each set of air flotation plates 71 includes an air flotation plate body 711 and a support member 712 for supporting the air flotation plate body 711. Each set of air flotation plates 71 is correspondingly provided with an independent electromagnetic control valve. The electromagnetic control valve is electrically connected to the control unit 5 and is used to individually control the opening and closing and air supply pressure of the corresponding air flotation plate 71. The air flotation plate body 711 is made of alumina and its surface is precision ground. The support member 712 is a height-adjustable support structure. The air flotation plate body 711 has a positive pressure air flotation channel connected to the external air supply system inside. The air flotation roller transmission unit includes multiple sets of air flotation plates 711 and the partitioned air flotation unit 711. Each set of air-floating rollers 72 includes a mounting frame 721, a servo motor 722 fixed on the mounting frame 721, an adsorption roller 723 connected to the output end of the servo motor 722, and a vacuum generator 724 connected to the air passage of the adsorption roller 723. The servo motor 722 and the vacuum generator 724 are electrically connected to the control unit 5. Multiple sets of air-floating rollers 72 are symmetrically arranged in two rows on the left and right sides of the marble base 2 in the transmission direction. The servo motors 722 of all air-floating rollers 72 are synchronously linked and controlled by the control unit 5. The surface of the adsorption roller 723 is provided with an annular adsorption groove that communicates with the internal air passage, which is used to cooperate with the vacuum generator 724 to achieve negative pressure adsorption on the side of the glass substrate 1.

[0023] It should be noted that: the air flotation plate 71 is the core actuator of the partitioned air flotation unit 7, used to generate a uniform air film to achieve contactless support of the substrate. It is made of aluminum alloy substrate and undergoes hard anodizing treatment. The surface of the air flotation plate 71 is prepared with an array of throttling micropores through precision machining and the surface is precision ground to ensure the flatness of the air flotation. The air flotation plate body 711 is the main structure of the air flotation plate 71, used to achieve uniform infiltration of compressed air, with an air film thickness (height of the air film area supported by the air flotation plate) of 200μm. The support member 712 is used to provide stable support for the air flotation plate body 711 and adjust the installation height of the air flotation plate body 711. The electromagnetic control valve is used to control the air passage opening and closing and air supply pressure of the corresponding air flotation plate 71. The positive pressure air flotation air passage is used to uniformly distribute external compressed air. The glass substrate 1 is conveyed to the surface of the air flotation plate 711. The air flotation roller 72 is the core component of the air flotation roller transmission unit, used to adsorb and drive the glass substrate 1 to move. The air flotation roller 72 is 200μm higher than the air flotation plate 71 to ensure the flatness of the product's movement in the air flotation area. The mounting bracket 721 is used to provide mounting support for the various components of the air flotation roller 72. The servo motor 722 is used to provide precise driving force for the rotation of the adsorption roller 723. The adsorption roller 723 is used to contact and adsorb the side of the glass substrate 1, converting the rotational power into the linear transmission power of the substrate. The vacuum generator 724 is used to generate a negative pressure vacuum to provide adsorption force for the adsorption roller 723. The annular adsorption groove is used to increase the contact adsorption area between the adsorption roller 723 and the glass substrate 1 to ensure the stability of adsorption.

[0024] Multiple sets of air flotation plates 71 are evenly arranged in a matrix on the upper surface of the marble base 2, forming independently operable air flotation zones. The support component 712 adopts a threaded lifting support structure, including a support screw and a locking nut. The top of the support screw is fixedly connected to the bottom of the air flotation plate 711, and the bottom of the support screw is threadedly connected to the marble base 2. The installation height of the air flotation plate 711 can be adjusted by rotating the support screw. After adjustment, it is locked and fixed by the locking nut to ensure that the upper surface of all air flotation plates 711 is on the same horizontal plane, and the flatness deviation does not exceed ±3μm. The positive pressure air flotation channel inside the air flotation plate 711 includes a main air inlet and a multi-component air flotation channel. The main air intake is connected to the external air supply system. Branch microchannels are evenly distributed inside the air flotation plate 711, with one end connected to the main air intake and the other extending to the upper surface of the air flotation plate 711. This allows compressed air to evenly permeate to the surface of the air flotation plate 711, forming a uniformly thick air film. The electromagnetic control valve uses an SMC brand SY5120 series two-position five-way solenoid valve with a working pressure range of 0.1-0.7MPa and a response time ≤15ms. Millisecond-level on / off control and pressure regulation can be achieved through the control unit 5. The servo motor 722 uses a Panasonic MSMF022L1U2M series low-inertia servo motor, and is equipped with... Equipped with a MINASA6 series servo drive and a 23-bit encoder resolution, it enables precise control of the rotation speed and angle of the adsorption roller 723. All servo motors 722 are connected to the control unit 5 via a Profinet bus, achieving synchronous linkage control of multiple air-bearing rollers 72 with a synchronization accuracy of ±0.1°. The adsorption roller 723 features a polyurethane roller body with an internal stainless steel ventilation shaft. The ventilation shaft has a central air passage; one end of the central air passage connects to the vacuum generator 724 via a rotary joint, and the other end connects to the annular adsorption groove on the surface of the adsorption roller 723. Three sets of adsorption tanks are evenly spaced along the axial direction of the adsorption roller 723. Each set of annular adsorption tanks has a depth of 2mm and a width of 3mm, which can form a uniform adsorption force under vacuum negative pressure, avoiding edge chipping caused by local stress concentration on the side of the glass substrate 1. The vacuum generator 724 adopts the SMC brand ZH07DS series vacuum generator, with a maximum vacuum degree of -90kPa and a response time of ≤10ms. It is equipped with a vacuum pressure sensor, which can collect the vacuum pressure value of the adsorption circuit in real time and transmit the data to the control unit 5. When the vacuum pressure is lower than the set threshold, the control unit 5 can issue an alarm signal in time to prevent the substrate from falling.

[0025] In this embodiment, multiple independently controlled air flotation plates arranged in a matrix, combined with independent electromagnetic control valves, enable flexible adjustment of the air flotation area. This allows for air flotation support for glass substrates 1 of different sizes, and enables rapid model changeover without manual adjustment of the mechanical structure. Multiple air flotation rollers controlled in a synchronous linkage, combined with a vacuum generator and adsorption rollers with annular adsorption grooves, achieve stable negative pressure adsorption and precise uniform speed transmission on the side of the glass substrate 1. This effectively ensures the stability and positional accuracy of substrates of different sizes during transmission, solving the core problems of poor compatibility and insufficient transmission stability of existing air flotation platforms.

[0026] Example 3, as Figures 1-9 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, the detection unit includes a short side detection unit 4, a long side detection unit 6, and a surface inspection unit 8. The short side detection unit 4 is disposed at the front and rear ends of the marble base 2 in the transmission direction, the long side detection unit 6 is disposed on the left and right sides of the marble base 2 in the transmission direction, and the surface inspection unit 8 is disposed covering the upper and lower sides of the marble base 2 along the entire transmission direction. The short side detection unit 4 includes an upper front short side inspection unit 41, a lower front short side inspection unit 42, a lower rear short side inspection unit 43, an upper rear short side inspection unit 44, and a linear motor module 45. The upper front short side inspection unit 41 and the lower front short side inspection unit 42 are disposed vertically at the front end of the marble base 2, and the upper rear short side inspection unit 44 and the lower rear short side inspection unit 43 are disposed vertically at the rear end of the marble base 2. Each short side inspection unit is fixedly connected to the slide of the corresponding linear motor module 45, and the linear motor module 45 is connected to the control... The control unit 5 is electrically connected. The long side detection unit 6 includes multiple sets of upper long side detection units 61 and lower long side detection units 62 arranged vertically. Each set of upper long side detection units 61 and lower long side detection units 62 is equipped with a screw drive module. The screw drive module is electrically connected to the control unit 5 and is used to drive the corresponding long side detection unit to move and change shape in a direction perpendicular to the transmission direction. The surface inspection unit 8 includes an upper surface inspection unit 81 and a lower surface inspection unit 82. The upper surface inspection unit 81 and the lower surface inspection unit 82 are symmetrically arranged on the upper and lower sides of the transmission path of the marble base 2. The upper surface inspection unit 81 and the lower surface inspection unit 82 are equipped with a manual fine-tuning slide with an adjustment direction perpendicular to the transmission direction. The control unit 5 has a built-in product size adaptation module and a detection process control module. The control unit 5 is externally connected to an industrial touch screen and a power supply. The partitioned air flotation unit 7 is equipped with a positive and negative pressure coordinated air supply system. The positive and negative pressure coordinated air supply system is electrically connected to the control unit 5.

[0027] It should be noted that: the short-side detection unit 4 is used to detect dimensional and appearance defects on the front and rear short edges of the glass substrate 1; the long-side detection unit 6 is used to detect dimensional and appearance defects on the left and right long edges of the glass substrate 1; the surface inspection unit 8 is used to detect appearance defects on the entire front and back surfaces of the glass substrate 1; the upper front short-side inspection unit 41 is used to collect image data of the upper surface of the front short edge of the glass substrate 1; the lower front short-side inspection unit 42 is used to collect image data of the lower surface of the front short edge of the glass substrate 1; the lower rear short-side inspection unit 43 is used to collect image data of the lower surface of the rear short edge of the glass substrate 1; the upper rear short-side inspection unit 44 is used to collect image data of the upper surface of the rear short edge of the glass substrate 1; the linear motor module 45 is used to drive the corresponding short-side inspection unit to move in a direction perpendicular to the transmission direction, realizing automatic adjustment of the detection position; the upper long-side inspection unit 61 is used to collect image data of the upper surface of the long edge of the glass substrate 1; the lower long-side inspection unit 62 is used to collect image data of the lower surface of the long edge of the glass substrate 1. According to the specifications, the lead screw drive module is used to drive the corresponding long-side inspection unit to move along the direction perpendicular to the transmission, realizing automatic adjustment of the inspection position; the upper inspection unit 81 is used to collect full surface image data of the front side of the glass substrate 1; the lower inspection unit 82 is used to collect full surface image data of the back side of the glass substrate 1; the manual fine-tuning slide is used to manually finely adjust the installation position of the corresponding inspection unit in the up-down and left-right directions to ensure the inspection focusing accuracy; the product size adaptation module is used to automatically generate the air flotation unit opening and closing scheme and the inspection unit changing position parameters according to the input glass substrate 1 size parameters; the inspection process control module is used to automatically control the transmission speed and the inspection sequence of each inspection unit according to the inspection requirements; the industrial touch screen is used to realize human-machine interaction, complete parameter input, status monitoring and inspection result viewing; the power supply provides a stable working power for the electrical components of the whole set of equipment; the positive and negative pressure coordinated air supply system provides positive pressure compressed air for the zoned air flotation units and negative pressure vacuum for the air flotation rollers.

[0028] Among them, the upper front short edge inspection unit 41, lower front short edge inspection unit 42, lower rear short edge inspection unit 43, upper rear short edge inspection unit 44, upper long edge inspection unit 61, and lower long edge inspection unit 62 all use Basler brand acA2040-180km series global shutter industrial cameras, equipped with Computar brand fixed-focus industrial lenses and ring shadowless light sources, which can achieve clear imaging of the edge of glass substrate 1 and effectively avoid imaging defects caused by reflection; the linear motor module 45 uses HIWIN brand LK series iron core linear motor module, with a repeatability accuracy of ±1μm and a maximum running speed of 1m / s. Both ends of the module are equipped with photoelectric limit switches and mechanical anti-collision blocks to limit the movement of the slide table. The travel distance ensures safe operation; the ball screw drive module adopts the THK brand BNK series ball screw drive module with a lead of 5mm and a repeatability of ±2μm. It is equipped with a stepper motor and encoder to achieve precise position adjustment of the long-side inspection unit; the upper and lower inspection units 81 and 82 adopt the Basler brand raL8192-80km series line scan industrial camera, equipped with a high-precision line scan lens and line light source. The camera's scanning resolution can reach 8192 pixels, covering the entire travel distance along the transmission direction. It can achieve continuous scanning imaging of the entire front and back surfaces during the transmission of the glass substrate 1, with no blind spots; the manual fine-tuning slide adopts the MISUMI brand X-axis precision fine-tuning slide, with an adjustment travel of ± With a 15mm adjustment range and an accuracy of up to 0.01mm, the horizontal position and focus distance of the inspection camera can be finely adjusted to ensure image clarity. The control unit 5 has a built-in product size adaptation module that automatically calculates the required air-float partitions based on the length and width parameters of the glass substrate 1 input by the operator. Simultaneously, it generates target position parameters for each inspection unit and sends them to the corresponding drive module for automatic type change. The inspection process control module automatically controls the transmission speed of the air-float rollers according to preset inspection items, enabling uniform speed passage or fixed-point stopping in the corresponding inspection area, while simultaneously triggering the corresponding inspection unit to complete image acquisition. The industrial touch display uses a 15.6-inch capacitive industrial touchscreen, communicating with the control unit 5 via Ethernet. The system features a communication connection, enabling real-time display of equipment operating status, detection images, defect identification results, and equipment alarm information. The power supply utilizes a Mean Well brand 24V DC regulated switching power supply, equipped with an EMC filter and surge protector to effectively filter grid interference and ensure stable power supply. The positive and negative pressure coordinated air supply system includes a 1.5MPa oil-free silent air compressor, precision pressure regulating valve, dryer, air tank, and vacuum generator. The positive pressure end is connected to the electromagnetic control valves of each air float via stainless steel air pipes, while the negative pressure end is connected to the vacuum generators of each air float roller via PU air pipes. The system is equipped with pressure sensors that can collect the pressure values ​​of the positive and negative pressure loops in real time and transmit the data to the control unit 5 for closed-loop regulation, ensuring the stability of the air supply pressure.

[0029] In this embodiment, through the integrated short-side detection unit, long-side detection unit, and surface inspection unit, full-dimensional detection of all four edges and the entire front and back surfaces can be completed simultaneously during the transport of the glass substrate 1, eliminating the need for transfer to dedicated testing equipment and significantly shortening the production cycle. Through the linear motor module and the lead screw drive module, the detection position of each detection unit can be automatically adjusted according to the size of the glass substrate 1, achieving fully automatic and rapid changeover. Through the adapter module and detection process control module built into the control unit, in conjunction with the positive and negative pressure coordinated air supply system, the fully automated operation of the equipment is achieved, effectively improving the equipment's detection accuracy, changeover efficiency, and mass production adaptability, and solving the problems of separation of transport and detection, low detection accuracy, and low production efficiency in existing air flotation platforms.

[0030] The working principle of this air-floating platform, which is compatible with the transmission and detection of glass substrates of different sizes, will be explained in detail below.

[0031] like Figures 1-9As shown, before starting the equipment, the level of the entire machine is adjusted by the adjustable level feet at the bottom of the frame 3. The flatness of the upper surface of the marble base 2 is checked with a level to ensure that the flatness meets the requirements of the equipment operation. Then, the control unit 5 is connected to the external power supply, and the positive and negative pressure coordinated air supply system is connected to the external air source to complete the power-on initialization and self-test of the equipment. The control unit 5 automatically detects the operating status of each electrical component, air circuit component, detection unit and drive module. After there are no abnormalities, the equipment enters the standby state. The operator inputs the length and width dimensions of the glass substrate 1 to be tested and the testing requirements through the industrial touch screen. The product size adaptation module built into the control unit 5 automatically generates the opening and closing scheme of the corresponding air flotation plate 71, the changeover position parameters of each testing unit, and the testing process sequence based on the input parameters. The control unit 5 sends control commands to the corresponding solenoid control valve to open the air flotation plate 71 in the area matching the size of the glass substrate 1. At the same time, it sends commands to the linear motor module 45 and the lead screw drive module to drive the corresponding short side testing unit 4 and long side testing unit 6 to move to the testing position that matches the size of the glass substrate 1, thus completing the automatic changeover adjustment of the equipment. The glass substrate 1 to be tested is transferred to the loading end of the air flotation platform after the previous process. When the front end of the glass substrate 1 reaches the loading area of ​​the air flotation plate 71, the control unit 5 controls the positive and negative pressure coordinated air supply system to introduce compressed air at a set pressure into the opened air flotation plate 71. The compressed air seeps out evenly through the positive pressure air flotation channel inside the air flotation plate 711 and forms a uniformly thick air film on the upper surface of the air flotation plate 711, lifting the glass substrate 1 upward so that the glass substrate 1 and the upper surface of the air flotation plate 711 form a non-contact state, avoiding scratches on the substrate surface. Subsequently, the control unit 5 controls the vacuum generator 724 corresponding to each air-floating roller 72 to start, forming a negative pressure vacuum at the annular adsorption groove of the adsorption roller 723, so that the adsorption roller 723 tightly adsorbs the left and right edges of the glass substrate 1. The control unit 5 sends control commands to the servo drivers of all servo motors 722, controlling the servo motors 722 to rotate synchronously at the set speed, driving the adsorption rollers 723 to rotate synchronously, thereby driving the glass substrate 1 to move at a uniform speed along the transmission direction. The control unit 5 collects the transmission position of the glass substrate 1 in real time through the absolute encoder of the servo motor 722, realizing precise closed-loop control of the transmission position.During the transmission of the glass substrate 1, the control unit 5 controls the glass substrate 1 to complete uniform transmission or fixed-point stopping in the corresponding detection area according to the preset detection process. When the front short side of the glass substrate 1 reaches the short side detection area, the control unit 5 controls the servo motor 722 to stop rotating, causing the glass substrate 1 to stop at a fixed point, triggering the upper front short side detection unit 41 and the lower front short side detection unit 42 to synchronously acquire image data of the upper and lower surfaces of the front short side of the glass substrate 1. When the rear short side of the glass substrate 1 reaches the short side detection area, the control unit 5 controls the glass substrate 1 to stop at a fixed point, triggering the upper rear short side detection unit 44 and the lower rear short side detection unit 43 to synchronously acquire images of the upper and lower surfaces of the rear short side of the glass substrate 1. Data: As the glass substrate 1 passes through the long-side detection area at a constant speed, the control unit 5 triggers the upper long-side detection unit 61 and the lower long-side detection unit 62 to simultaneously acquire image data of the upper and lower surfaces of the left and right long sides of the glass substrate 1. During the entire transmission journey of the glass substrate 1, the upper and lower surface detection units 81 and 82 simultaneously perform continuous linear array scanning on the front and back surfaces of the glass substrate 1 to acquire image data of the entire surface. All acquired image data are transmitted to the control unit 5 in real time, and image analysis and processing are completed through the built-in defect recognition algorithm to automatically identify defects such as dimensional deviations, edge chipping, and surface scratches of the glass substrate 1, and the detection results are displayed on the industrial touch screen in real time. When it is necessary to replace the glass substrate 1 with a different size, the operator only needs to input the new substrate size parameters and testing requirements on the industrial touch screen. The control unit 5 can automatically complete the adjustment of the air flotation area and the replacement of the testing unit. No manual adjustment of the mechanical structure is required to complete the rapid replacement of the production line. During the operation of the equipment, the control unit 5 collects data such as air pressure, vacuum pressure, motor running status, and testing unit status in real time. When an abnormal state occurs, the control unit 5 immediately stops the operation of the equipment and issues an audible and visual alarm signal to ensure the safety of the equipment and products.

[0032] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. An air-floating platform compatible with the transmission and detection of glass substrates of different sizes, characterized in that: include: The frame (3), the marble base (2) fixedly installed on the top of the frame (3), the partitioned air flotation unit (7), the air flotation roller transmission unit, the detection unit and the control unit (5) set on the upper surface of the marble base (2); the partitioned air flotation unit (7) is used to provide adjustable air flotation support for the glass substrate (1) to be tested, the air flotation roller transmission unit is used to adsorb the glass substrate (1) and drive it to move back and forth along the transmission direction, the detection unit is used to perform detection operations on the edge and front and back surfaces of the glass substrate (1), and the control unit (5) is electrically connected to the partitioned air flotation unit (7), the air flotation roller transmission unit and the detection unit respectively to realize linkage control.

2. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 1, characterized in that: The partitioned air flotation unit (7) includes multiple sets of air flotation plates (71) arranged in a matrix. Each set of air flotation plates (71) includes an air flotation plate body (711) and a support member (712) for supporting the air flotation plate body (711). Each set of air flotation plates (71) is equipped with an independent electromagnetic control valve. The electromagnetic control valve is electrically connected to the control unit (5) and is used to individually control the opening and closing and air supply pressure of the corresponding air flotation plate (71).

3. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 2, characterized in that: The air flotation plate (711) is made of alumina and its surface is precision ground. The support (712) is a height-adjustable support structure. The air flotation plate (711) has a positive pressure air flotation channel that is connected to the external air supply system.

4. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 1, characterized in that: The air-floating roller transmission unit includes multiple sets of air-floating rollers (72) arranged corresponding to the partitioned air-floating unit (7). Each set of air-floating rollers (72) includes a mounting frame (721), a servo motor (722) fixed on the mounting frame (721), an adsorption roller (723) connected to the output end of the servo motor (722), and a vacuum generator (724) connected to the air path of the adsorption roller (723). The servo motor (722) and the vacuum generator (724) are both electrically connected to the control unit (5).

5. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 4, characterized in that: Multiple sets of air-floating rollers (72) are symmetrically arranged in two rows on the left and right sides of the marble base (2) in the transmission direction. The servo motors (722) of all air-floating rollers (72) are synchronously linked and controlled by the control unit (5). The surface of the adsorption roller (723) is provided with an annular adsorption groove that communicates with the internal air passage, which is used to cooperate with the vacuum generator (724) to achieve negative pressure adsorption on the side of the glass substrate (1).

6. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 1, characterized in that: The detection unit includes a short side detection unit (4), a long side detection unit (6), and a surface inspection unit (8). The short side detection unit (4) is located at the front and rear ends of the marble base (2) in the transmission direction. The long side detection unit (6) is located on the left and right sides of the marble base (2) in the transmission direction. The surface inspection unit (8) is located on the upper and lower sides of the marble base (2) along the entire transmission direction.

7. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 6, characterized in that: The short side detection unit (4) includes an upper front short side detection unit (41), a lower front short side detection unit (42), a lower rear short side detection unit (43), an upper rear short side detection unit (44), and a linear motor module (45). The upper front short side detection unit (41) and the lower front short side detection unit (42) are respectively arranged at the front end of the marble base (2), and the upper rear short side detection unit (44) and the lower rear short side detection unit (43) are respectively arranged at the rear end of the marble base (2). Each short side detection unit is fixedly connected to the slide of the corresponding linear motor module (45). The linear motor module (45) is electrically connected to the control unit (5) and is used to drive the corresponding short side detection unit to move in a direction perpendicular to the transmission direction.

8. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 6, characterized in that: The long side detection unit (6) includes multiple sets of upper long side detection units (61) and lower long side detection units (62) arranged vertically. Each set of upper long side detection units (61) and lower long side detection units (62) is equipped with a lead screw drive module. The lead screw drive module is electrically connected to the control unit (5) and is used to drive the corresponding long side detection unit to move in a direction perpendicular to the transmission direction.

9. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 6, characterized in that: The surface inspection unit (8) includes an upper surface inspection unit (81) and a lower surface inspection unit (82). The upper surface inspection unit (81) and the lower surface inspection unit (82) are symmetrically arranged on the upper and lower sides of the transmission path of the marble base (2). The upper surface inspection unit (81) and the lower surface inspection unit (82) are each equipped with a manual fine-tuning slide with the adjustment direction perpendicular to the transmission direction.

10. The air-floating platform compatible with the transmission and detection of glass substrates of different sizes according to claim 1, characterized in that: The control unit (5) has a built-in product size adaptation module and a detection process control module. The control unit (5) is externally connected to an industrial touch screen and a power supply. The partitioned air flotation unit (7) is equipped with a positive and negative pressure coordinated air supply system. The positive and negative pressure coordinated air supply system is electrically connected to the control unit (5).

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