Flexible metal foil laminate structure for human body and method for manufacturing the same

Abstract

According to one embodiment, a flexible metal thin film laminate structure for a human body includes: an insulating thin film including a liquid crystal polymer; and a metal thin film laminated on at least one surface of the insulating thin film, wherein the metal thin film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), and is in direct contact with the insulating thin film.

Description

Technical Field

[0001] One embodiment relates to a flexible metal film laminate structure, and more specifically, to a flexible metal film laminate structure for use in the human body and a method for manufacturing the same. Background Technology

[0002] Liquid crystal polymer films (LCP films) are generally widely used as films for circuit boards due to their excellent heat resistance, mechanical strength and electrical properties.

[0003] Furthermore, a flexible metal thin film laminate structure is provided, wherein a copper (Cu) layer is bonded to at least one surface of a liquid crystal polymer film, and the liquid crystal polymer film is bonded thereto. For example, a single-sided flexible metal thin film laminate structure in which a copper layer is bonded to one surface of a liquid crystal polymer film, or a double-sided flexible metal thin film laminate structure in which a copper layer is bonded to both surfaces of a liquid crystal polymer film, is commercially available.

[0004] However, it is difficult to use the aforementioned single-sided flexible metal thin film laminate structure and double-sided flexible metal thin film laminate structure to manufacture human body electrode structures.

[0005] In other words, a metal layer including copper is laminated into a typical flexible metal thin film laminate structure. In this case, the flexible metal thin film laminate structure including copper is difficult to meet the resistance value that a human body electrode structure should have.

[0006] Therefore, an additional metal layer including gold (Au) is formed on a flexible metal film laminate structure containing a copper metal layer. However, when forming an additional metal layer including gold on a copper metal layer, it is difficult to ensure the uniformity of the thickness of this additional metal layer. This leads to a deterioration in the electrical reliability of the electrode structure. For example, human body electrode structures include multiple thin electrode lines, and the miniaturization of these multiple electrode lines is limited when the aforementioned additional metal layer is formed. Furthermore, there is a problem of short circuits or open circuits between the multiple electrode lines.

[0007] Furthermore, according to conventional techniques, a metal layer including copper is removed from the flexible metal thin-film laminate structure to directly form a metal layer including gold on the liquid crystal polymer film. In this case, the process for manufacturing the human body electrode structure becomes complex, increasing process time and cost, and resulting in reduced product yield.

[0008] Therefore, a novel flexible metal thin film laminate structure suitable for manufacturing human body electrode structures is needed. Summary of the Invention

[0009] Technical issues

[0010] One embodiment provides a flexible metal thin film laminate structure suitable for manufacturing human body electrode structures and a method thereof.

[0011] The technical problems to be solved by the proposed implementation scheme are not limited to those mentioned above, and other technical problems not mentioned can be clearly understood by those skilled in the art to which the proposed implementation scheme pertains as described below.

[0012] Technical solution

[0013] According to one embodiment, a flexible metal film laminate structure for use in the human body comprises: an insulating film comprising a liquid crystal polymer; and a metal film laminated on at least one surface of the insulating film, wherein the metal film comprises at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film.

[0014] In addition, the metal film has a thickness of 3 μm to 20 μm.

[0015] In addition, the insulating film has a thickness of 50 μm to 100 μm.

[0016] Furthermore, the metal film includes a first metal film laminated on the upper surface of the insulating film and a second metal film laminated on the lower surface of the insulating film, and the first metal film and the second metal film comprise gold (Au).

[0017] Furthermore, the metal film has a resistance of 0.8 Ω to 1.2 Ω per unit area of ​​510 mm × 420 mm.

[0018] Furthermore, the metal film has a ten-point average roughness (Rz) of 0.1 μm or less.

[0019] Furthermore, based on a unit area of ​​510 mm × 420 mm, the insulating film and the metal film exhibit a strength of 0.6 kgf / cm² at room temperature (25°C). 2 Or higher peel strength.

[0020] Meanwhile, according to one embodiment, a method for manufacturing a flexible metal film laminate structure for the human body includes: arranging an insulating film and arranging a metal film on at least one surface of the insulating film; and providing heat and pressure to the insulating film and the metal film to manufacture a flexible metal film laminate structure in which the metal film is laminated on at least one surface of the insulating film, wherein the metal film comprises at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag) and is in direct contact with the insulating film, wherein the metal film has a thickness of 3 μm to 20 μm, and wherein the insulating film has a thickness of 50 μm to 100 μm.

[0021] Meanwhile, according to one embodiment, a method for manufacturing a human electrode structure includes: preparing a flexible metal thin film laminate structure; and forming an electrode pattern including multiple electrode lines by laser processing or wet etching of the metal thin film of the prepared flexible metal thin film laminate structure.

[0022] Beneficial effects

[0023] This embodiment provides a flexible metal film laminate structure comprising an insulating film and a metal film laminated on at least one surface of the insulating film. In this case, the metal film comprises a metal material suitable for the human body, and furthermore, may have a certain level of resistivity and peel strength, thereby making the metal film usable by the human body.

[0024] Therefore, this embodiment can use the flexible metal thin film laminate structure to manufacture the human body electrode structure, thereby simplifying the manufacturing process of the human body electrode structure, shortening the process time, and thus improving the product yield.

[0025] In particular, this embodiment can omit the process of removing the metal layer laminated on the liquid crystal polymer film according to conventional techniques, or the process of electroplating an additional metal layer on the metal layer laminated on the liquid crystal polymer film. Therefore, a novel flexible metal film laminated structure suitable for manufacturing human body electrode structures can be provided.

[0026] Furthermore, the metal film in the flexible metal film laminate structure of this embodiment can have a resistance value in the range of 0.8 Ω to 1.2 Ω. In this way, this embodiment can use a flexible metal film laminate structure to fabricate human electrode structures, thereby enabling more accurate detection of human signals within the human body.

[0027] Furthermore, the insulating film and metal film of the flexible metal film laminate structure can achieve a strength of 0.6 kgf / cm² at room temperature (25°C). 2Or higher adhesive strength (e.g., peel strength, peel test). Therefore, this embodiment can easily fabricate human electrode structures using flexible metal film laminate structures, thereby providing an electrode structure that can operate stably in the human body while further improving electrical and / or physical reliability. Attached Figure Description

[0028] Figure 1 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the first embodiment.

[0029] Figure 2 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the second embodiment.

[0030] Figure 3 and Figure 4 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the third embodiment.

[0031] Figure 5 This is a schematic diagram illustrating a flexible metal film laminate structure according to one embodiment.

[0032] Figure 6 This is a diagram illustrating an electrode structure manufactured using a flexible metal thin film laminate structure according to one embodiment.

[0033] Best practice

[0034] The embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. However, the spirit and scope of this disclosure are not limited to the partial embodiments described, and may be implemented in a variety of other forms. Furthermore, within the spirit and scope of this disclosure, one or more elements of the embodiments may be selectively combined and rearranged.

[0035] Furthermore, unless otherwise explicitly defined and described, the terms used in the embodiments of this disclosure (including technical and scientific terms) may be understood to have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains, and terms such as those defined in common dictionaries may be interpreted to have a meaning consistent with their meaning in the relevant technical context.

[0036] Furthermore, the terminology used in the embodiments of this disclosure is for the purpose of describing the embodiments and is not intended to limit the disclosure. In this specification, the singular form may also include the plural form unless expressly stated in the phrase, and when described in “at least one (or more) of A, B, and C”, it may include at least one of all combinations that can be combined among A, B, and C.

[0037] Furthermore, in describing elements of embodiments of this disclosure, terms such as first, second, A, B, (a), and (b) may be used. These terms are used only to distinguish the element from other elements and are not limited by the nature, order, or sequence of the elements.

[0038] Furthermore, when an element is described as being “connected,” “coupled,” or “in contact” with another element, it can include not only cases where the element is directly “connected,” “coupled,” or “in contact” with other elements, but also cases where the element is “connected,” “coupled,” or “in contact” with other elements through another element.

[0039] Furthermore, when described as being formed or arranged “above” or “below” each element, “above” or “below” can include not only cases where two elements are directly connected to each other, but also cases where one or more other elements are formed or arranged between two elements.

[0040] Furthermore, when referred to as "above" or "below", based on a single element, it can include not only the upward direction but also the downward direction.

[0041] The following description, in conjunction with the accompanying drawings, describes a flexible metal thin film laminate structure according to one embodiment and its manufacturing process.

[0042] Figure 1 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the first embodiment. Figure 2 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the second embodiment. Figure 3 and Figure 4 This is a schematic diagram illustrating the process of manufacturing a flexible metal thin film laminate structure according to the third embodiment. Figure 5 This is a schematic diagram illustrating a flexible metal thin film laminate structure according to one embodiment. Figure 6 This is a diagram illustrating an electrode structure manufactured using a flexible metal thin film laminate structure according to one embodiment.

[0043] refer to Figure 1 According to the first embodiment, the flexible metal film laminate structure 60 can be manufactured by using a hot pressing lamination method with rollers. In particular, the flexible metal film laminate structure 60 can be a single-sided flexible metal film laminate structure in which a metal film 50 is laminated on one surface of an insulating film 40.

[0044] In the first embodiment, a hot pressing process can be continuously performed on one surface of the insulating film 40 using a roller, and the flexible metal film laminate structure 60 can be manufactured by the hot pressing process.

[0045] The insulating film 40 comprises an insulating material suitable for the human body. Furthermore, the insulating film 40 is flexible to ensure peel strength from the metal film 50. Preferably, the insulating film 40 may comprise a liquid crystal polymer (LCP). For example, the liquid crystal polymer may comprise any of the following: a liquid crystal polymer comprising polyethylene terephthalate and p-hydroxybenzoic acid; a liquid crystal polymer comprising phenol, phthalic acid, and p-hydroxybenzoic acid; and a liquid crystal polymer comprising 6-hydroxy-2-naphthic acid and p-hydroxybenzoic acid.

[0046] The thickness of the insulating film 40 can be from 25 μm to 100 μm. Preferably, the thickness of the insulating film 40 can be from 35 μm to 100 μm. More preferably, the thickness of the insulating film 40 can be from 50 μm to 100 μm. If the thickness of the insulating film 40 is less than 25 μm, it may be difficult to stably laminate the metal film 50 onto the insulating film 40, and the processing performance in the lamination process of the metal film 50 may deteriorate. If the thickness of the insulating film 40 exceeds 100 μm, it may be difficult to use it to manufacture electrode structures suitable for the human body. For example, if the thickness of the insulating film 40 exceeds 100 μm, the thickness of the electrode structure for the human body manufactured using it will increase, which may cause discomfort or rejection to the user. Therefore, to solve the above problems, it is more preferable that the thickness of the insulating film 40 is from 50 μm to 100 μm.

[0047] The metal film 50 constitutes the metal layer of the flexible metal film laminate structure 60. The metal film 50 may include a metal material suitable for the human body. Preferably, the metal film 50 may include at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag). More preferably, the metal film 50 may include gold (Au).

[0048] The thickness of the metal thin film 50 can be from 1 μm to 20 μm. Preferably, the thickness of the metal thin film 50 can be from 2 μm to 20 μm. More preferably, the thickness of the metal thin film 50 can be from 3 μm to 20 μm. If the thickness of the metal thin film 50 is less than 1 μm, the processing performance in the process of manufacturing the electrode structure using the flexible metal thin film laminate structure 60 may deteriorate. For example, the electrode structure can be formed by etching the metal thin film 50 of the flexible metal thin film laminate structure 60. In this case, if the thickness of the metal thin film 50 is less than 1 μm, the processing performance in the etching process may deteriorate, and therefore, electrical reliability problems such as electrical open circuits of the electrode lines of the electrode structure may occur. Furthermore, if the thickness of the metal thin film 50 exceeds 20 μm, the processing performance in the process of forming the electrode lines of the electrode structure may deteriorate. For example, if the thickness of the metal thin film 50 exceeds 20 μm, electrical reliability problems such as electrical short circuits caused by electrical connections between the electrode lines of the electrode structure may occur. Therefore, to solve the above problems, it is more preferable that the thickness of the metal thin film 50 is from 3 μm to 20 μm.

[0049] Furthermore, this embodiment includes a stretching portion 10, a hot-pressing portion 20, and a winding portion 30, and by using these, a flexible metal film laminate structure 60 in which an insulating film 40 and a metal film 50 are hot-pressed can be manufactured.

[0050] The stretching section 10 includes a first stretching roller 11 and a second stretching roller 12.

[0051] The first stretching roller 11 can store and supply the stored insulating film 40. For example, the insulating film 40 can be wound in a roll on the first stretching roller 11, and can be removed from the first stretching roller 11 and supplied to the hot pressing section 20 when the process of manufacturing the flexible metal film laminate structure 60 is carried out.

[0052] The second stretching roller 12 can store the metal film 50 and thereby supply the stored metal film 50. For example, the metal film 50 can be wound in a roll on the second stretching roller 12, and when the process of manufacturing the flexible metal film laminate structure 60 is carried out, it can be taken out from the second stretching roller 12 and supplied to the hot pressing section 20 together with the insulating film 40.

[0053] The hot pressing section 20 may include a plurality of hot pressing rollers. For example, the hot pressing section 20 may include a first hot pressing roller 21 and a second hot pressing roller 22.

[0054] The first hot-press roller 21 and the second hot-press roller 22 are spaced apart from each other, with an insulating film 40 and a metal film 50 stretched from the stretching section 10 sandwiched between them. The first hot-press roller 21 and the second hot-press roller 22 can respectively provide heat and pressure to the insulating film 40 and the metal film 50 stretched from the first stretching roller 11 and the second stretching roller 12. For example, the first hot-press roller 21 and the second hot-press roller 22 can hot-press the insulating film 40 and the metal film 50, thereby laminating the metal film 50 onto the insulating film 40.

[0055] The winding section 30 can recycle the flexible metal film laminate structure 60 that has been hot-pressed by the hot pressing section 20. For example, the winding section 30 includes a winding roller, so the flexible metal film laminate structure 60 that has been hot-pressed by the hot pressing section 20 can be wound into a roll.

[0056] In this way, according to the first embodiment, a flexible metal film laminate structure 60 in which a metal film 50 is laminated on one surface of an insulating film 40 can be manufactured using a stretching portion 10, a hot pressing portion 20, and a winding portion 30.

[0057] At the same time, according to Figure 2 In the second embodiment, the flexible metal film laminate structure 60 can be a double-sided flexible metal film laminate structure.

[0058] In addition, the metal film 50 can be disposed on each surface of the insulating film 40, with the insulating film 40 sandwiched between them.

[0059] For example, the stretching section 10 may include a first stretching roller 11, a second stretching roller 12, and a third stretching roller 13.

[0060] The insulating film 40 is wound on the first stretching roller 11, so that the first stretching roller 11 can pull out the insulating film 40 and supply the insulating film 40 to the hot pressing section 20.

[0061] The first metal film 50A is wound around the second stretching roller 12, so the second stretching roller 12 can supply the first metal film 50A to the hot pressing section 20.

[0062] The second metal film 50B is wound on the third stretching roller 13, so the third stretching roller 13 can supply the second metal film 50B to the hot pressing section 20.

[0063] Therefore, by means of the first stretching roller 11, the second stretching roller 12 and the third stretching roller 13, the insulating film 40, the first metal film 50A disposed on one side of the insulating film 40 and the second metal film 50B disposed on the other surface of the insulating film 40 can be continuously supplied to the hot pressing section 20.

[0064] Furthermore, the first hot-pressing roller 21 and the second hot-pressing roller 22 of the hot-pressing section 20 can be spaced apart from each other, with the insulating film 40, the first metal film 50A, and the second metal film 50B stretched from the stretching section 10 sandwiched between them. The first hot-pressing roller 21 and the second hot-pressing roller 22 can respectively provide heat and pressure to the insulating film 40, the first metal film 50A, and the second metal film 50B stretched from the first stretching roller 11, the second stretching roller 12, and the third stretching roller 13. For example, the first hot-pressing roller 21 and the second hot-pressing roller 22 can hot-press the insulating film 40, the first metal film 50A, and the second metal film 50B, thereby laminating the first metal film 50A and the second metal film 50B onto the two surfaces of the insulating film 40, respectively.

[0065] The winding section 30 can recycle the flexible metal film laminate structure 60 that has been hot-pressed by the hot-pressing section 20. In this way, according to the second embodiment, the flexible metal film laminate structure 60 in which the first metal film 50A and the second metal film 50B are laminated on the two surfaces of the insulating film 40 can be manufactured using the stretching section 10, the hot-pressing section 20, and the winding section 30.

[0066] Meanwhile, flexible metal film laminates can be manufactured by applying hot pressing via a thin film cutting process, instead of using hot pressing methods with rollers and drums. Therefore, in the third embodiment, the flexible metal film laminate structure can be manufactured by performing a first process of thin film cutting, followed by a second process of hot pressing by applying heat and pressure while the cut films are stacked vertically.

[0067] refer to Figure 3 In order to manufacture flexible metal thin film laminates, a process of cutting the film according to set standards can be carried out.

[0068] For example, refer to Figure 3 (a) This embodiment allows for the process of cutting the metal film 110 according to a set standard. In this case, the standard can be determined based on the product manufactured using the flexible metal film laminate structure of this embodiment. Preferably, the flexible metal film laminate structure of this embodiment can be used to manufacture human electrode structures. Therefore, each of the width in the first direction and the width in the second direction of the metal film 50 can be between 500 mm and 530 mm.

[0069] In addition, refer to Figure 3(b) This embodiment allows for the process of cutting the insulating film 120 according to a set standard. In this case, the standard for the insulating film 120 can be determined based on the product manufactured using the flexible metal film laminate structure of this embodiment, corresponding to the standard for the metal film 110. Preferably, the flexible metal film laminate structure of this embodiment can be used to manufacture human body electrode structures; therefore, the width of the insulating film 120 in the first direction and the width in the second direction can each be between 500 mm and 530 mm.

[0070] In addition, refer to Figure 3 (c) This embodiment allows for the process of cutting the protective film 130. The protective film 130 can be used to manufacture multiple flexible metal film laminates in a single operation.

[0071] For example, this embodiment can perform a hot-pressing process with the insulating film 120 and the metal film 110 arranged alternately in a vertical direction to manufacture multiple flexible metal film laminates in one step. In this case, when the hot-pressing process is performed with the insulating film 120 and the metal film 110 arranged alternately, the protective film 130 can prevent the multiple flexible metal film laminates from adhering to each other. The size of the protective film 130 is not significantly limited in this case. However, in order to stably hot-press the insulating film 120 and the metal film 110, the size of the protective film 130 can be larger than the size of both the metal film 110 and the insulating film 120. In this case, the protective film 130 can include a material that does not adhere to the metal film 110 and the insulating film 120 during the hot-pressing process. For example, the protective film 130 can be Teflon (PTFE), but is not limited to this.

[0072] Subsequently, refer to Figure 4 This embodiment allows for hot pressing while the insulating film 120, the metal film 110, and the protective film 130 are laminated in the vertical direction.

[0073] For example, refer to Figure 4 (a) This embodiment can be manufactured by hot-pressing a protective film 130, an insulating film 120, and a metal film 110 alternately laminated in a vertical direction to produce a single-sided flexible metal film laminate structure. In this way, the insulating film 120 and the metal film 110 disposed between multiple protective films 130 can be hot-pressed, and a single-sided flexible metal film laminate structure can be manufactured. At this time, a protective film 130 is disposed between each of the multiple flexible metal film laminates laminated in the vertical direction, thereby preventing the multiple flexible metal film laminates from adhering to each other.

[0074] In addition, refer to Figure 4(b) This embodiment can manufacture a double-sided flexible metal film laminate structure by performing a hot-pressing process while multiple insulating films 120 and multiple metal films 110 are laminated between multiple protective films 130. That is, in the region between the multiple protective films 130, multiple flexible metal film laminate structures, each having a metal film 110 on each of the two surfaces of one insulating film 120, can be laminated in a vertical direction, thus allowing multiple flexible metal film laminate structures to be hot-pressed at once. In this case, with the flexible metal film laminate structure having metal films 110 laminated on the two surfaces of the insulating film 120, even with the hot-pressing process, the metal films 110 will not adhere to each other; therefore, protective films 130 do not need to be provided between the multiple flexible metal film laminate structures.

[0075] In this way, the implementation scheme can manufacture flexible metal thin film laminate structures.

[0076] At the same time, refer to Figures 1 to 4 The manufactured flexible metal thin film laminate structure can be like Figure 5 As shown.

[0077] Figure 5 (a) is a perspective view of a flexible metal thin film laminate structure cut to a specific standard, while Figure 5 (b) can be along Figure 5 (a) Cross-sectional view of the flexible metal thin film laminate structure cut along line A-A'.

[0078] refer to Figure 5 (a) and 5(b), metal films 220 and 230 can be laminated on both surfaces of the insulating film 210. For example, the flexible metal film laminate structure may include the insulating film 210, a first metal film 220 laminated on the upper surface of the insulating film 210, and a second metal film 230 laminated on the lower surface of the insulating film 210. However, this embodiment is not limited to this, and the flexible metal film laminate structure may be a single-sided flexible metal film laminate structure, so the metal film may be laminated only on one of the upper and lower surfaces of the insulating film 210.

[0079] At this point, the flexible metal film laminate structure can have specific standards. The flexible metal film laminate structure can have a width W1 of 500 mm to 530 mm in a first direction and a width W2 of 500 mm to 530 mm in a second direction.

[0080] Furthermore, as described above, the insulating film 210 may include a liquid crystal polymer (LCP) and may preferably have a thickness of 50 μm to 100 μm.

[0081] Furthermore, the metal films 220 and 230 may include at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), and preferably may include gold (Au), and may have a thickness of 3 μm to 20 μm.

[0082] At this point, given the aforementioned widths W1 and W2 and thickness, the flexible metal film laminate structure can possess specific characteristic values ​​suitable for manufacturing human electrode structures. For example, the flexible metal film laminate structure can have a resistance value and peel strength suitable for the human body.

[0083] Preferably, the flexible metal thin film laminate structure can have a resistance value of 0.8 Ω to 1.2 Ω per unit area. That is, the metal films 220 and 230 of the flexible metal thin film laminate structure can have a resistance value in the range of 0.8 Ω to 1.2 Ω per unit area. In this case, the unit area can be 510 mm × 420 mm. In other words, the resistance value of the metal films 220 and 230 of the flexible metal thin film laminate structure within a unit area of ​​510 mm × 420 mm can be 0.8 Ω to 1.2 Ω.

[0084] In this way, the embodiment enables the flexible metal film laminate structure to be used to manufacture human body electrode structures by using metal films 220 and 230 laminated on at least one surface of the insulating film 210.

[0085] In other words, after insertion into the human body, the human electrode structure should be able to apply signals to specific areas of the body to detect accurate human signals. Specifically, after insertion into the shoulder or chest, the human electrode structure detects brainwave signals by applying signals to specific areas of the brain. To this end, the length of the electrode wires in the electrode structure can be further increased to detect stable human signals. Therefore, the metal films 220 and 230 used in the flexible metal film laminate structure of the human electrode structure require resistance values ​​of 400 Ω or lower, 350 Ω or lower, 300 Ω or lower, 200 Ω or lower, or 100 Ω or lower at specific lengths.

[0086] Therefore, the metal films 220 and 230 of the flexible metal film laminate structure in this embodiment can have a resistance value in the range of 0.8 Ω to 1.2 Ω for use in fabricating human electrode structures. In this way, this embodiment can use a flexible metal film laminate structure to fabricate human electrode structures, thereby enabling more accurate detection of human signals in the human body.

[0087] Furthermore, this flexible metal film laminate structure can possess a certain level or higher peel strength. Here, peel strength can refer to the peel strength between the insulating film 210 and the metal films 220 and 230 of the flexible metal film laminate structure. Preferably, based on a specific unit area, the insulating film 210 and the metal films 220 and 230 can have a peel strength of 0.6 kgf / cm² at room temperature of 25°C. 2 Or higher peel strength (e.g., peel strength test). Here, the unit area can be 510mm × 420mm. That is, a flexible metal film laminate structure within a unit area of ​​510mm × 420mm can have 0.6 kgf / cm² at room temperature of 25°C. 2 Or higher peel strength (e.g., peel strength, peel test).

[0088] In other words, this flexible metal film laminate structure is used to manufacture human electrode structures to be inserted into the human body. Therefore, in order to operate stably within the human body, it must possess a certain level or higher peel strength. Thus, this embodiment enables the insulating film 210 and metal films 220 and 230 of the flexible metal film laminate structure to achieve a peel strength of 0.6 kgf / cm² at room temperature (25°C). 2 Or higher peel strength (e.g., peel strength, peel test), thus enabling its use in the manufacture of human electrode structures and enabling stable operation within the human body.

[0089] Furthermore, the metal films 220 and 230 of the flexible metal film laminate structure can have a ten-point average roughness (Rz) of 0.1 μm or less. If the metal films 220 and 230 of the flexible metal film laminate structure have a ten-point average roughness (Rz) exceeding 0.1 μm, signal loss may increase and the electrical reliability of the electrode structure may be degraded when the flexible metal film laminate structure is used as an electrode structure in the human body.

[0090] Meanwhile, the flexible metal thin film laminate structure manufactured as described above can be used to manufacture human body electrode structures.

[0091] For example, this embodiment can form the electrode pattern of the human body electrode structure by etching away the metal films 220 and 230 of the flexible metal film laminate. In this case, the metal films 220 and 230 can be disposed on only one surface of the insulating film 210, or they can be disposed on both surfaces of the insulating film 210. The following describes a human body electrode structure manufactured using a single-sided flexible metal film laminate in which the metal films 220 and 230 are disposed on only one surface of the insulating film 210.

[0092] refer to Figure 6 It can be used inFigures 1 to 5 The flexible metal thin film laminate structure described herein is used to fabricate a human body electrode structure according to one embodiment. For example, the flexible metal thin film laminate structure includes an insulating film and a metal thin film disposed on one surface of the insulating film. Furthermore, this embodiment can use the metal thin film disposed on one surface of the insulating film to form the electrode pattern of the electrode structure.

[0093] In other words, the electrode structure includes an insulating film 310 and an electrode pattern EL disposed on the insulating film 310. The electrode pattern EL can be fabricated using a metal film laminated on the insulating film 310. For example, the electrode pattern EL can be formed using at least one of the following methods: LDP (laser direct patterning) or wet etching using dry film resist and photoresist.

[0094] An electrode pattern EL can include multiple electrode lines. For example, an electrode pattern EL can detect human signals through multiple channels. In this case, the electrode pattern EL can be set to 4 channels, but is not limited to this.

[0095] The electrode pattern EL may include first to fourth electrode patterns 320, 330, 340 and 350. The first to fourth electrode patterns 320, 330, 340 and 350 may be configured to be spaced apart from each other on the insulating film 310.

[0096] The first electrode pattern 320 includes a detection area 321 for detecting human body signals and a signal transmission area 322 extending from the detection area 321 and transmitting the detected signals. In this case, the area of ​​the detection area 321 can be larger than the area of ​​the signal transmission area 322, and therefore, a more stable and accurate signal can be detected through the first electrode pattern 320.

[0097] Furthermore, each of the second to fourth electrode patterns 330, 340 and 350 may include a detection area and a signal transmission area corresponding to the first electrode pattern 320.

[0098] This embodiment provides a flexible metal film laminate structure comprising an insulating film and a metal film laminated on at least one surface of the insulating film. In this case, the metal film comprises a metal material suitable for the human body, and furthermore, may have a certain level of resistivity and peel strength, thereby making the metal film usable by the human body.

[0099] Therefore, this embodiment can use the flexible metal thin film laminate structure to manufacture human body electrode structures, thereby simplifying the process for manufacturing the human body electrode structures, shortening the process time, and thus improving the product yield.

[0100] In particular, this embodiment can omit the process of removing the metal layer laminated on the liquid crystal polymer film according to conventional techniques, or the process of electroplating an additional metal layer on the metal layer laminated on the liquid crystal polymer film. Therefore, a novel flexible metal film laminated structure suitable for manufacturing human body electrode structures can be provided.

[0101] Furthermore, the metal film in the flexible metal film laminate structure of this embodiment can have a resistance value in the range of 0.8 Ω to 1.2 Ω. In this way, this embodiment can use a flexible metal film laminate structure to fabricate human electrode structures, thereby enabling more accurate detection of human signals within the human body.

[0102] Furthermore, the insulating film and metal film of the flexible metal film laminate structure can achieve a strength of 0.6 kgf / cm² at room temperature (25°C). 2 Or higher adhesive strength (e.g., peel strength, peel test). Therefore, this embodiment can easily fabricate human electrode structures using flexible metal film laminate structures, thereby providing an electrode structure that can operate stably in the human body while further improving electrical and / or physical reliability.

[0103] The features, structures, and effects described in the above embodiments are included in at least one embodiment, but are not limited to one embodiment. Furthermore, the features, structures, effects, etc., described in the various embodiments can be combined or modified by those skilled in the art for other embodiments. Therefore, content related to such combinations and modifications should be interpreted as being included within the scope of the embodiments.

[0104] The description has focused on this embodiment, but it is merely illustrative and does not limit the scope of the embodiment. Those skilled in the art will understand that various modifications and applications, not shown above, can be made without departing from the essential characteristics of the embodiment. For example, each component specifically presented in this embodiment can be modified and implemented. Furthermore, differences associated with such changes and applications should be interpreted as being included within the scope of the embodiments defined in the appended claims.

Claims

1. A flexible metal thin film laminate structure for use in the human body, comprising: Insulating films, including liquid crystal polymers; and A metal thin film is laminated on at least one surface of the insulating film. The metal thin film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), and is in direct contact with the insulating film.

2. The flexible metal film laminate structure for human body according to claim 1, wherein the metal film has a thickness of 3 μm to 20 μm.

3. The flexible metal film laminate structure for the human body according to claim 1, wherein the insulating film has a thickness of 50 μm to 100 μm.

4. The flexible metal film laminate structure for the human body according to claim 1, wherein the metal film comprises a first metal film laminated on the upper surface of the insulating film and a second metal film laminated on the lower surface of the insulating film, and The first metal film and the second metal film comprise gold (Au).

5. The flexible metal film laminate structure for the human body according to any one of claims 1 to 4, wherein the metal film has a resistance of 0.8 Ω to 1.2 Ω per unit area of ​​510 mm × 420 mm.

6. The flexible metal film laminate structure for the human body according to any one of claims 1 to 4, wherein the metal film has a ten-point average roughness (Rz) of 0.1 μm or less.

7. The flexible metal film laminate structure according to any one of claims 1 to 4, wherein, based on a unit area of ​​510 mm × 420 mm, the insulating film and the metal film have a strength of 0.6 kgf / cm² at room temperature of 25°C. 2 Or higher peel strength.

8. A method for manufacturing a flexible metal thin film laminate structure for use in the human body, comprising: An insulating film is disposed thereon, and a metal film is disposed on at least one surface of the insulating film; as well as Heat and pressure are applied to the insulating film and the metal film to manufacture a flexible metal film laminate structure in which the metal film is laminated on at least one surface of the insulating film. The metal thin film includes at least one of gold (Au), platinum (Pt), iridium (Ir), titanium (Ti), and silver (Ag), and is in direct contact with the insulating film. The metal thin film has a thickness of 3 μm to 20 μm, and The insulating film has a thickness of 50 μm to 100 μm.

9. The method of manufacturing a flexible metal film laminate structure for human use according to claim 8, wherein the metal film has a resistance of 0.8 Ω to 1.2 Ω per unit area of ​​510 mm × 420 mm.

10. The method for manufacturing a flexible metal film laminate structure for human use according to claim 8, wherein the insulating film and the metal film have a density of 0.6 kgf / cm² based on a unit area of ​​510 mm × 420 mm at room temperature of 25°C. 2 Or higher peel strength.

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