Self-balancing comb drive for out-of-plane actuation

Abstract

A MEMS device is disclosed having comb drive and flexures that produce out-of-plane motion. The comb drive includes two sets of fixed comb rows that are anchored on one or more sides. These fixed comb rows cross with two other sets of movable comb fingers that are anchored in opposite directions on a back plate. The back plate is offset from an anchor that has co-linear flexures to allow the movable combs to rotate about the anchor. The fixed combs are vertically offset from the movable fingers and produce out-of-plane motion when a voltage is applied.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) manufacturing. More specifically, this invention relates to MEMS devices having a comb-tooth actuator for generating out-of-plane motion and a flexible element. Background Technology

[0002] MEMS (Micro-Electro-Mechanical Systems) micromirrors have a wide range of applications, such as displays, scanning, and lidar. In display applications, MEMS mirror-based systems are often referred to as laser beam deflection (LBS) systems, in which a laser beam is deflected by one or more micromirrors to produce patterned illumination or moving and still images. MEMS micromirrors are also widely used in fiber optic communications to fabricate optical filters or optical channel monitors (OCM) devices, in which MEMS micromirrors are used to deflect broadband light modulated by amplitude, frequency, or phase through a diffraction grating and separate the wavelengths in free space for use in an optical detector to monitor or manipulate the carried signal. In both of these common application examples, large mirrors with large scanning angles in a small footprint are often desired for various technical and commercial reasons. However, there are often many drawbacks in realizing these desired features in MEMS mirrors. For example, increasing the mirror size leads to an increase in overall mass, and it is necessary to strengthen the torsional flexibility to maintain the same scanning speed. Furthermore, increasing the stiffness of the flexible element increases structural stress because deformation occurs during device actuation, making the construction of high-speed mirrors with large scanning / tilt angles extremely challenging. On the other hand, there is also a strong desire to increase the surface area of ​​the comb fingers to generate greater capacitance, thereby producing greater electrostatic forces. Increasing the capacitance in the comb actuator is typically difficult without causing stability issues or increasing the die size to accommodate more fingers. The present invention addresses many of these challenges and enables quasi-static MEMS micromirrors with large reflectors to have a smaller overall footprint and lower actuation voltage.

[0003] Figure 1A prior art micromirror 20 is illustrated, specifically a predecessor to the micromirror disclosed herein. Micromirror 20 is a uniaxial tilting mirror that moves out of plane and tilts in both positive and negative directions. Two movable comb actuators 201 and 206 are present. Movable comb actuator 201 is on the left side of the mirror body 202, and movable comb actuator 206 is on the right side of the mirror body 202. Both are intersected and perpendicularly offset from fixed comb actuators 203 and 204, which are anchored from a base to a substrate. Movable fingers on movable comb actuator 201 are anchored to a backplate 207 and connected to the mirror body 202. Movable structures 201, 207, and 202 are suspended and anchored to the substrate via a flexible member 205. The flexible member 205 is uniquely designed to withstand the lateral force component locally generated by the comb actuators, while simultaneously generating rotational motion on the mirror.

[0004] This structure does not allow for large mirrors or large displacements. An improved micromirror is still needed. Summary of the Invention

[0005] According to one aspect, a construction of a self-balancing comb actuator for highly tilted micromirrors is disclosed. Electrostatic comb actuators are commonly deployed in MEMS devices to sense or generate planar motion of a detection mass, thereby fabricating devices such as accelerometers, gyroscopes, and resonators. Another common application of electrostatic comb actuators is in optical mirrors, where the micromirrors can be resonant or quasi-static. For resonant MEMS mirrors, an in-plane comb actuator can be used to generate torque on the mirror and cause it to scan at a constant angular velocity, exhibiting the benefits of mechanical amplification caused by device resonance. However, for quasi-static mirrors, the mirror is typically used in conjunction with a more complex vertically offset comb actuator, allowing the mirror to be statically controlled and its tilt position stability maintained via actuator control. Quasi-static mirrors also do not benefit from mechanical amplification, meaning that more powerful actuators are required to deflect a mirror with the same mass and stiffness as a resonant mirror. The disclosed invention provides a solution for fabricating a quasi-static mirror with a high-power comb actuator that is compatible with large angular displacements but allows the micromirror to work with a robust flexible system that can rotate more than 15 degrees without reaching the yield strength of silicon.

[0006] This invention relates to MEMS devices with comb-tooth actuators and flexible elements that generate out-of-plane motion. The comb-tooth actuator, as shown in the patent drawings, comprises two sets of comb fingers anchored to one or more sides for a fixed configuration, and these sets intersect with two other sets of comb fingers anchored in opposite directions to a backplate, which is anchored to the flexible element to make the comb finger sets movable. The fixed comb fingers are perpendicularly offset from the movable fingers and generate out-of-plane motion when a voltage is applied. The two opposing sets of movable comb fingers will structurally generate counteracting lateral forces to ensure that the force applied to the mirror remains as tangential as possible along the arc of rotation. This counteracting tension reduces the requirements for lateral resistance in the flexible element and makes it more susceptible to large torsional deformation without inducing high stress in the flexible element. The two sets of comb fingers anchored to the movable portion also increase the surface area of ​​the comb-tooth actuator by nearly 40%. The cancellation of lateral forces on the vertical comb actuator eliminates the need for complex flexible element designs to ensure lateral stability during actuation. The purely rotational motion of the structure also allows stress-sensing elements to be used on the mirror, enabling accurate and linear position sensing responses from the mirror. The two parts of the fixed comb actuator can be electrically decoupled, with one part serving as the mirror actuator and the other as an electrical damper to improve system stability, or as a position sensor to output the mirror's position based on changes in capacitance. Attached Figure Description

[0007] These and other features will become more apparent from the following description with reference to the accompanying drawings, which are for illustrative purposes only and are not intended to be limiting in any way, wherein: Figure 1 This is a top view of a prior art micromirror, which rotates in two directions along a rotation axis; Figure 2 It is a three-dimensional image of a micromirror using a self-balancing comb actuator; Figure 3 This is a partial three-dimensional cross-sectional view of the self-balancing comb drive; Figure 4A A fixed comb tooth driver is shown; Figure 4B The movable comb tooth driver is shown; Figure 4C A fixed comb drive and a movable comb drive are shown together; Figure 5 It is a self-balancing comb drive that has already been activated; Figure 6 This is modeling data showing the cancellation of the y-component forces when energized; Figure 7 A perspective view of a previously disclosed flexible component is shown; Figure 8A This is a top view of the first variation of the comb-tooth finger; Figure 8B This is a top view of the second variation of the comb-tooth finger; Figure 8C This is a top view of the third variation of the comb-tooth finger; Figure 8D This is a top view of the fourth variation of the comb-tooth finger; Figure 9A It is a three-dimensional view of a self-balancing comb actuator with additional support; Figure 9B This is a partial perspective view of a part of the comb drive, showing the anchors and reinforcing beams; Figure 10 This is a partial three-dimensional cross-sectional view of a variant of the self-balancing comb actuator; Figure 11 This is a partial three-dimensional cross-sectional view of a further variation of the self-balancing comb actuator; Figure 12 This is a top view of a self-balancing comb driver configured to provide sensing capabilities; Figure 13 This is a top view of a self-balancing comb drive configured to provide braking functionality; Figure 14 This is a top view of a self-balancing comb actuator, which includes comb actuators arranged in series; and Figure 15 This is a three-dimensional view of pairs of self-balancing comb actuators working together to generate piston motion on a MEMS device. Detailed Implementation

[0008] Electrostatic and quasi-static MEMS mirrors typically have limited tilt angles because the available overlap area of ​​the parallel plates is often constrained by manufacturing materials and techniques. This invention allows for a wide range of movement (e.g., about 15 degrees or more) in the tilt direction of a single-axis tilting mirror. Figure 2One embodiment of a MEMS mirror with a wide range of motion is shown. The micromirror 10 comprises at least one comb actuator. In the preferred embodiment shown in the figures, four comb actuators 2a, 2b, 2c, and 2d are used. Each comb actuator 2a to 2d has movable comb actuator portions 4a, 4b, 4c, and 4d, fixed comb actuator portions 6a, 6b, 6c, and 6d, and a reflector 8. Each movable comb actuator 4a to 4d is coupled to anchors 12a and 12b. Each anchor 12a and 12b has at least one flexure. In the preferred embodiment shown in the figures, each anchor 12a and 12b has two flexures 14a, 14b, 14c, and 14d. The flexures 14a to 14d facilitate rotation of the movable comb actuators 4a to 4d at positions offset relative to their respective anchors 12a and 12b.

[0009] Movable comb-tooth actuators 4a to 4d extend from reflector 8. Reflector 8 can have any shape or size; however, in the preferred embodiment shown in the figures, reflector 8 is circular. Movable comb-tooth actuators 4a to 4d are connected to the fixed substrate via anchors 12a and 12b. Micromirror reflector 8 rotates about anchors 12a and 12b in two directions (as indicated by arrows).

[0010] To actuate the mirror, a potential difference generated by a voltage source is applied to the fixed comb tooth actuators 6a to 6d and the movable comb tooth actuators 4a to 4d. This induces an electric field and causes an attractive electrostatic force to be generated on the movable comb tooth actuators 4a to 4d. Defining the first rotation direction as a positive tilt (towards the upper right of the figure), voltage is simultaneously applied to the fixed comb tooth portions 6a and 6c. Since the movable mirror is grounded via anchors 12a and 12b, this attractive electrostatic force on the movable comb teeth 4a and 4c generates a downward pull, causing the mirror to rotate along the flexible members 14a to 14b and 14c to 14d, respectively. Conversely, when voltage is applied to the fixed comb tooth portions 6b and 6d, a negative tilt (towards the lower left of the figure) is initiated. This generates an attractive electrostatic force that attracts the movable comb tooth actuators 6b and 6d to the fixed comb tooth actuators 4b and 4d, respectively. This causes the mirror to rotate along the flexible members 14a to 14d in the negative tilt direction.

[0011] Figure 3A cross-section of a pair of self-balancing comb actuator structures is shown in more detail. The self-balancing comb actuators 2b and 2c (which can be made of monocrystalline silicon) can be actuated in both directions and consist of two fixed comb teeth 4c and 4d as positive electrodes and two movable comb teeth 6c and 6d. In this embodiment, 6c serves as a positive rotating comb tooth, and 6d serves as a negative rotating comb tooth. The movable comb teeth 6c and 6d are connected to the substrate via a common anchor 12b. The movable comb teeth 4a to 4d are grounded via anchors 12a and 12b. The movable comb teeth 4a to 4d also include support rods 16a, 16b, 16c, and 16d. These backplates or support rods 16a to 16d are generally parallel to and laterally offset from the anchor rods 12a and 12b. Since the anchors 12a and 12b are grounded, the movable comb teeth 4a to 4d serve as ground electrodes. This ground electrode is electrically isolated from the fixed comb teeth 6a to 6d. The remainder of the ground electrode is thus electrically neutral via connections to anchors 12a and 12b. The ground electrode is movable and pivots about flexible members 14a to 14d. While the preferred embodiment has two flexible members on each anchor, other arrangements of flexible members may be possible along the length of the anchor. The ground electrode allows bidirectional rotation via two movable comb teeth, as described above. The movable comb teeth 4a and 4c intersect each other with and are perpendicularly offset from the fixed comb teeth 6a and 6c, respectively. The two movable comb teeth 4a and 4c are anchored to the substrate via a support beneath anchor 12a, reaching the bottom layer where the fixed comb teeth 4c and 4d are located. Electrical isolation is formed via buried oxide beneath the fixed comb tooth layer. The backplate 16a may or may not enclose the movable comb teeth 30, depending on design requirements that necessitate additional structural reinforcement.

[0012] Figures 4a, 4b, and 4c illustrate the self-balancing comb teeth in detail. It can be understood that the self-balancing comb teeth 2a through 2d all have similar structures; therefore, 2a will be used as an example to describe the structure of the fixed comb teeth in Figure 4a. Figure 4a shows an example of one embodiment of a fixed comb tooth 6b. The fixed comb tooth 6b is a negative-rotating comb tooth. The negative-rotating comb tooth 6b consists of a first row of comb teeth 18 and a second row of comb teeth 20, wherein the first and second rows of comb teeth are configured in opposite arrangements. The first row 18 is anchored to the substrate from the bottom by a fixing anchor 22, while the second row 20 is anchored to the substrate from the bottom by a fixing anchor 24. In one embodiment, the comb teeth are self-supporting and directly connected to the substrate. In this embodiment, fixing anchors 22 and 24 are optional. In another embodiment, comb teeth 18 and 20 are suspended from fixing anchors 22 and 24. The opposite rows of comb teeth 18 and 20 are configured such that their free ends face inward toward each other. The two rows of comb teeth 18 and 20 are connected to the same potential. In one embodiment, they are electrically connected via a connecting beam 26, or they may be connected via wire bonding wires.

[0013] Figure 4b illustrates a portion of the movable comb teeth or ground electrode. Similar to Figure 4a above, Figure 4b uses movable comb teeth 4b, which rotates negatively and is composed of anchors 12a, flexible elements 14a and 14b, short comb tooth rows 28, long comb tooth rows 30, and a backplate or support rod 16b. Although the preferred embodiment shown in the figures has short comb tooth rows 28 and long comb tooth rows 30, it is understood that the comb teeth on either side of the support rod 14b can have equal or different lengths. Alternatively, comb tooth rows 28 can be longer than comb tooth rows 30. Furthermore, the preferred embodiment includes two flexible elements 14a and 14b collinear with anchors 12a to form the axis of rotation of the movable comb teeth 4b; however, it is understood that more flexible elements can be included along the length of anchors 12a to provide greater flexibility. The short comb tooth rows 28 are positioned and anchored to the far side of the backplate or support rod 16b relative to anchors 12a. The short comb teeth 28 intersect and are perpendicularly offset from the fixed comb tooth actuator 22, with their distal sides freestanding from the support rod 16b to provide clearance when the movable comb tooth actuator 4b rotates into the fixed comb tooth 6b. The long comb teeth 30 are positioned and anchored to the back plate or the inside of the support rod 16b relative to the anchor 16b. The long comb teeth 30 intersect and are perpendicularly offset from the fixed comb tooth actuator 24, with the proximal sides of the teeth free and unclosed to provide clearance when the comb tooth actuator rotates into the fixed comb tooth 24. The negatively rotating comb tooth 4b may have a reinforcing beam 32 connecting the short teeth 28 and the long teeth 30 to the anchor 12a. The reinforcing beam 32 is coupled to the anchor at its first end and to the support rod 16b at its second end. This allows the outer end of the movable comb tooth actuator 4b to be supported and prevented from lateral movement. At the opposite end of support rod 16b, the support rod is connected to anchor 12a via reflector 8. This arrangement allows for greater support for larger and / or heavier reflectors. Figure 4c shows fingers 18, 20, 28, and 30 assembled together, intersecting and perpendicularly offset. Figure 5 As shown, the movable comb teeth rotate into the fixed comb teeth, causing the structure to pivot about the flexible elements 14a and 14b. Notably, in the embodiment including the connecting beam 26 in the fixed comb tooth actuator 6b, the connecting beam 26 can be spaced apart from the comb tooth furthest from the reflector 8. This space allows the reinforcing rod 32 on the movable comb tooth actuator 4b to rotate into the space between the connecting beam 26 and the furthest fixed comb tooth.

[0014] Figure 6Finite element analysis (FEA) data for the self-balancing comb actuators 2a to 2d are revealed, showing how unwanted lateral force components are canceled out during actuation. The self-balancing comb actuator 10 has two conductors, _1 and _3, representing portions 22 and 24 respectively, and conversely, conductors _0 and _2 represent corresponding portions on the right side of the mirror 8. As shown, the y-direction force components applied to the pivoting mirror 8 and the flexible elements 14a to 14d are canceled out and reach zero, while the z-direction force components remain the same. As a result, the design of the flexible elements 14a to 14d can be simplified and can better accommodate high deformation and achieve high tilt angles without inducing high stress in the flexible elements, thereby improving the reliability and fabrication capability of the MEMS device.

[0015] The flexible elements 14a to 14d from the disclosed micromirror 10, or the flexible element 205 from its predecessor 20, can be arranged in various designs and remain compatible with the self-balancing comb actuators 2a to 2d. Figure 7 Various proposed flexible designs have been disclosed to overcome the flexibility stability problem when large electrostatic forces are generated on the comb teeth, causing the flexible element to be laterally pulled. The illustrative figure shows a flexible element anchored to anchor 44 and supporting a suspended mass block 40. The disclosed invention—a self-balancing comb actuator—avoids flexible elements with these unique designs, which may have low yield strength when encountering large angular displacements. The simplified straight beam flexible element 902, as shown in Figure 9, can withstand higher torsional stresses while maintaining similar torsional stiffness. The straight beam flexible element 902, working in conjunction with the self-balancing comb actuator, generates a highly linear stress variation in the beam, making it ideal for piezoresistive sensing elements.

[0016] Figure 8 illustrates various comb finger designs applicable to the present invention. Figure 8a is a top view of a typical comb finger design having a rectangular shape 803 with a short side 801 and a long side 802. The rectangular comb 803 has a fixed short end anchored to the structure and an open short end 801 to allow movable comb teeth to move through. Figure 8d shows an example of how two sets of comb fingers with a set of movable comb fingers 810 and a set of fixed comb fingers 811 can cross each other and be anchored on opposite ends, the two sets of comb fingers being either perpendicular to each other or not offset. Figure 8b illustrates a variation 806 of the finger design 801, which consists of a long side 805 for maximizing the surface area of ​​the comb tooth actuator, a wider anchoring side 812, and a short open side 805 to enhance rigidity when large electrostatic forces are generated due to high voltage. Figure 8c reveals a modification 809 of 806, which consists of a long side 808 for maximizing the surface area of ​​the comb driver, a wider anchoring side 813, and a shorter circular side 807 to improve the orientation of the electric field lines to reduce unwanted lateral pull at the tips of the comb fingers.

[0017] Figure 9 shows a structural reinforcing bar 32 designed to support the comb drive for high power and high scanning speed; however, this reinforcing bar may deform and cause instability during actuation. The combination of the reinforcing beam 32 and the support bar 16 encloses the finger 30. However, the finger 30 needs to intersect and be perpendicularly offset from the fixed finger 20. In one embodiment, this is achieved by thinning a portion of the anchor 12a to create a protrusion 901 extending outward from the anchor 12a. This provides a thinner first support for the flexible element 902. The corner 904 and the connecting beam 32 preferably have the same thickness as the protrusion 901. Since the corner 904 and the connecting beam 32 will move and rotate during the use of the comb drive, this thinning ensures that there is a gap to allow movement without interfering with the connecting beam 32 on the fixed comb drive 6. However, in embodiments where the connecting beam 32 is omitted, feature 901 can be avoided. Such an embodiment is when the first fixed comb row and the second fixed comb row are electrically coupled through the base, as Figure 10 As shown. The MEMS mirror disclosed in this paper is suitable for various applications, such as those requiring mirror position feedback. Figure 11 In the illustrated embodiment, the first fixed comb bar 18 and the second fixed comb bar 20 are electrically decoupled. While several methods exist for achieving this decoupling, in a preferred embodiment, the fixed comb bars 18 and 20 are electrically decoupled via DRIE etching, as they are etched down into the buried oxide 21 located between the driver and the substrate. The flexible element 14 is anchored to a central support anchor 12, which is anchored to the substrate via the fixed comb driver layer, but is also electrically decoupled via DRIE.

[0018] In embodiments where the comb driver or comb row is decoupled, the MEMS mirror 10 may have a tilt angle sensing function. Figure 12An embodiment of a sensing comb driver 1000 is shown, comprising a movable comb driver 1002, a fixed comb row 1001 connected to a bonding pad 1005, and a second fixed comb row 1003 connected to a bonding pad 1004. A drive signal can be sent to the bonding pads 1005 or 1004 to actuate the movable comb driver 1000. The overlap area of ​​the comb fingers between the fixed and movable combs varies according to the electrostatic force generated by the drive signal. A capacitance readout circuit 1006 can be connected to the fixed comb driver not used for driving, detects changes in capacitance, and reports the mirror position to the system for feedback control. If an additional tilt angle is required, the sensing comb driver can be electrically switched to the drive signal and generate an additional force to statically rotate the mirror. The decoupled comb driver can also be used as an electrical damper or brake to improve MEMS stability and reduce overshoot during power-up or when vibration is applied to the MEMS device. This embodiment... Figure 13 As shown in the image.

[0019] The structure of the comb driver is particularly advantageous in implementations with large reflectors, for example... Figure 14 As shown in the diagram. In this embodiment, the reflector 2000 is supported by a plurality of comb-tooth actuators 2002, 2004, 2006, and 2008. Comb-tooth actuators 2002 and 2004 are connected in series, while comb-tooth actuators 2006 and 2008 are connected in series on a second side of the reflector 2000. This arrangement allows for the creation of more torque and provides increased support for the reflector 2000.

[0020] As a result, the self-balancing comb driver can be configured to have fixed comb drivers 18 and 20 working together to generate greater torque, or it can be reconfigured to connect fixed comb driver 18 to capacitive sensing electronics 1006 and generate mirror position feedback, while comb driver 20 is connected to high-voltage power supply 1007 and generates drive torque to rotate the mirror, such as... Figure 10 As shown in b. Alternatively, one of the fixed comb drivers 304 or 305 can be individually controlled by two power supplies 1007 and 1008, as shown in Figure b. Figure 10 As shown in c, an agile scanning mirror with active electrical dampers is implemented to improve the transient response of the device.

[0021] While this disclosure focuses on a preferred embodiment comprising four comb-tooth actuators organized in two pairs (2a and 2b as the first pair, and 2c and 2d as the second pair), it will be understood that this design is applicable to any number of actuators. For example, a single comb-tooth actuator (e.g., only 2a) can be used to support a lever-type reflector. The fixed comb-tooth rows can be coupled to create rotation in a single direction or decoupled to allow bidirectional rotation, sensing, or braking rotation.

[0022] In another embodiment, two comb drivers (e.g., 2a and 2c) are used, and they are configured on opposite sides of the reflector 8. Similar to the single comb driver described above, the individual fixed comb driver rows of each comb driver can be coupled to create rotation in a single direction, or decoupled to allow bidirectional rotation, sensing, or braking rotation.

[0023] It is also understood that a single comb driver pair (e.g., 2a and 2b) can be used. In this embodiment, the reflector will be supported in a lever-like manner by the two comb drivers in the pair. In this embodiment, one of the drivers can be used to generate tilt in a first direction, while the second driver generates tilt in a second direction. Alternatively, the two comb drivers can be used for sensing applications, or one driver can be used to drive the movement of the reflector while the other driver is used to brake that movement.

[0024] In another embodiment, the self-balancing comb actuator 1 can also be used to generate piston motion via a lever design 1100. The piston movement device 1100 can consist of one or more pairs of self-balancing comb actuators 1101 and 1102 placed in a face-to-face direction. Each pair of self-balancing comb actuators is anchored to a substrate and generates out-of-plane motion on a lever 1104 connected to a platform 1103 (or a reflective surface or a proof weight). All actuators 1101 and 1102 will be synchronously driven by a drive signal to generate vertical displacement at each connection node 1105 of the platform 1103, causing it to move vertically in a direction perpendicular to the front surface of the substrate. Actuators 1101 and 1102 can also be driven by separate drive signals and generate vertical displacement in opposite directions at the connection nodes 1105 of the platform 1103, resulting in tilting motion. The connection nodes 1105 will be flexible and accept deformation and can be anchored to different positions on the platform according to the design.

[0025] Although the invention has been described with reference to certain specific embodiments, various modifications will be apparent to those skilled in the art. The invention should not be limited to the examples described in the specification, but should be given the broadest interpretation consistent with the entire specification.

Claims

1. A micromirror, said micromirror comprising: Substrate; Reflector; At least one comb drive, the at least one comb drive having a movable comb tooth component and a fixed comb tooth component; and The reflector is connected to the movable comb component; The movable comb tooth component is pivotally connected to the base plate via an anchor rod, the anchor rod is connected to and supports a support rod, and the support rod is offset to a first side of the anchor rod; The movable comb component has comb teeth extending from a first side of the support rod and a second side of the support rod; The fixed comb tooth component has a first row of comb teeth and a second row of comb teeth, each row of comb teeth has a fixed anchor, the fixed anchor connects the first row of comb teeth and the second row of comb teeth to the base plate; wherein, the comb teeth extend from one side of the fixed anchor. The first row of comb teeth and the second row of comb teeth are spaced apart from each other, and the comb teeth extend inward between the first row and the second row; wherein the movable comb tooth component is positioned between the first row of comb teeth and the second row of comb teeth, and facilitates engagement with the first row of comb teeth and the second row of comb teeth.

2. The micromirror according to claim 1, wherein, The at least one comb driver includes two comb drivers located on opposite sides of the micromirror, namely a first comb driver and a second comb driver.

3. The micromirror according to claim 1, wherein, The at least one comb driver includes two comb drivers constituting a first comb driver pair, namely a first comb driver and a second comb driver; The first comb driver and the second comb driver are positioned adjacent to each other; The movable part of the second comb drive is connected to the second side of the anchor rod opposite to the first side of the anchor rod.

4. The micromirror according to claim 3, wherein, The at least one comb driver further includes a second comb driver pair having a third comb driver and a fourth comb driver, the third comb driver and the fourth comb driver being positioned adjacent to each other and located on the side of the reflector opposite to the first comb driver pair. The movable part of the fourth comb drive is connected to the second side of the anchor rod opposite to the first side of the anchor rod.

5. The micromirror according to any one of claims 1 to 4, wherein, The anchor rod includes a first hinge and a second hinge to facilitate the rotation of the movable comb component.

6. The micromirror according to claim 5, wherein, The anchor rod has a length, and the first hinge and the second hinge are positioned near opposite ends of the length of the anchor rod.

7. The micromirror according to any one of claims 1 to 6, wherein, The first comb tooth row and the second comb tooth row are electrically coupled.

8. The micromirror according to any one of claims 1 to 6, wherein, The first comb tooth row and the second comb tooth row are electrically coupled via a first connecting beam.

9. The micromirror according to any one of claims 1 to 6, wherein, The first row is configured to receive a first electrical input, and the second row is configured to receive a second electrical input; wherein the first electrical input to the first row is used to drive a first set of comb teeth on the first side of the support rod of the movable component, and the second electrical input to the second row is used to engage with a second set of comb teeth on the second side of the support rod to provide braking force to the movable component.

10. The micromirror according to any one of claims 1 to 6, wherein the micromirror is configured to function as a sensor; in, The movable component is grounded; The first row is configured to receive a first electrical input, and the second row is connected to a capacitance reading device to measure the capacitance between a grounded movable part and the second row.

11. The micromirror according to any one of claims 1 to 10, wherein, Additional comb drivers are coupled to the comb drivers and positioned collinear with the comb drivers and extend outward along the length of the comb drivers to form a series of comb drivers.

12. A micromirror, said micromirror comprising: Substrate; Reflector; At least one comb tooth driver pair, the at least one comb tooth driver pair including a first comb tooth driver having a first movable comb tooth component and a first fixed comb tooth component; as well as A second comb tooth actuator, adjacent to the first comb tooth actuator, has a second movable comb tooth component and a second fixed comb tooth component; wherein... The reflector is connected to the first movable component on its first side and to the second movable comb component on its second side; The first movable comb tooth component has comb teeth extending from a first side of the first support rod and a second side of the first support rod; The second movable comb tooth component has comb teeth extending from a first side of the second support rod and a second side of the second support rod, and the second support rod is positioned between the first fixed comb tooth component and the second fixed comb tooth component; The first support rod and the second support rod are each suspended and supported by a central support rod; the central support rod is pivotally connected to the base plate. The first fixed comb tooth component has a first row of comb teeth and a second row of comb teeth, and the second fixed comb tooth component has a third row of comb teeth and a fourth row of comb teeth; Each row of comb teeth has a fixing anchor and comb teeth extending from one side of the fixing anchor. The first row of comb teeth and the second row of comb teeth are spaced apart from each other, and the comb teeth extend inward between the first row and the second row; The third row of comb teeth and the fourth row of comb teeth are spaced apart from each other, and the comb teeth extend inward between the third row of comb teeth and the fourth row of comb teeth; The first movable comb tooth component is positioned between the first row of comb teeth and the second row of comb teeth and engages with the first row of comb teeth and the second row of comb teeth, and is configured to engage with the first row of comb teeth and the second row of comb teeth, and the second movable comb tooth component is positioned between the third row of comb teeth and the fourth row of comb teeth.

13. The micromirror according to claim 12, wherein, The at least one pair of comb actuators includes two pairs of comb actuators located on opposite sides of the micromirror.

14. The micromirror according to claim 12 or 13, wherein, The central support rod includes two hinges to allow rotation of the first movable comb member and the second movable comb member relative to the base plate.

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