Atomizing spray assembly and tail gas treatment spray device

Abstract

Atomizing spray assembly and exhaust gas treatment spray device belong to the field of atomizing spray exhaust gas treatment technology. The atomizing spray assembly includes a linkage adjustment controller, a fixed pipe, a rotating connecting pipe section, an atomizing nozzle assembly, and a mounting plate. The atomizing nozzle assembly includes a three-way pipe and an atomizing nozzle. Two ports of the three-way pipe are connected to the fixed pipe via the rotating connecting pipe section, and the atomizing nozzle is connected to the remaining port of the three-way pipe. The linkage adjustment controller is located at the inlet end of the spray liquid, and its outlet is connected to the fixed pipe. The exhaust gas treatment spray device includes a tank with a waste liquid outlet, an exhaust gas inlet, and an exhaust gas outlet. The tank contains multiple layers of atomizing spray assemblies, each layer containing at least six atomizing spray assemblies. Multiple atomizing spray assemblies in the same layer are arranged in a circular array around the axis of the tank. This invention requires no external power source and can realize the linkage swing of the nozzles, optimizing the exhaust gas treatment effect.

Description

Technical Field

[0001] This invention belongs to the field of atomized spray exhaust gas treatment technology, specifically relating to an atomized spray assembly and an exhaust gas treatment spray device. Background Technology

[0002] After the chemical vapor deposition (CVD) process completes the chamber thin film deposition, the unreacted precursor vapors, residual reactant gases, and process byproduct gases remaining inside the reaction chamber are extracted and discharged by a vacuum pump, forming complex industrial exhaust gases that are highly corrosive and toxic. These exhaust gases exhibit unique operating conditions and are extremely difficult to treat, characterized by three core features: multi-component mutual incompatibility, high temperature and dust content, and strong corrosivity.

[0003] Currently, the industry commonly uses fixed-spray tail gas treatment devices for CVD tail gas treatment. After installation, the nozzle positions and spray directions are fixed, which cannot adapt to the complex CVD tail gas treatment conditions and has many technical defects. The spray area of ​​fixed nozzles is mostly conical or fan-shaped, and the spray areas of adjacent nozzles are difficult to achieve sufficient overlap and coverage. In the operation of large-section spray towers, the corners of the tower and the junctions of nozzles are prone to forming spray blind zones, which prevent toxic and harmful components in the tail gas from fully contacting and reacting with the spray liquid, significantly reducing the tail gas purification efficiency. At the same time, the fixed spray mode causes uneven distribution of the spray liquid in the cavity, showing a distribution gradient of dense in the middle and sparse at the edges. The tail gas flowing around the tower wall cannot be adequately covered by the liquid phase, resulting in poor overall gas-liquid mass transfer uniformity and mass transfer efficiency of the equipment. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention provides an atomizing spray assembly and an exhaust gas treatment spray device composed therefrom. The present invention does not require an external power source and can realize the linkage swing of the nozzle, thereby optimizing the spray-type exhaust gas treatment effect.

[0005] The technical solution adopted by this invention to solve the problems existing in the prior art is: An atomizing spray assembly includes a linkage adjustment controller, a fixed pipe, a rotating connecting pipe section, an atomizing nozzle assembly, and a mounting plate.

[0006] The atomizing nozzle assembly includes a three-way pipe and an atomizing nozzle. The two axial ports of the three-way pipe are respectively connected to a fixed pipe via a rotating connecting pipe section. The atomizing nozzle is detachably connected to the remaining ports of the three-way pipe.

[0007] The linkage control controller is located at the inlet end of the spray liquid, and its outlet is connected to the fixed pipe.

[0008] Furthermore, the linkage control mechanism includes a hydraulic drive mechanism, a waist-shaped rack sleeve, a push-pull rod, and a plug rod.

[0009] The push-pull rod is fixedly connected to the waist-shaped rack sleeve, and is connected to the push-pull rod by a number of corresponding insert rods arranged one-to-one with the atomizing nozzle.

[0010] The moving insert rod drives the atomizing nozzle assembly to rotate.

[0011] Furthermore, the hydraulic drive mechanism includes a housing, with an upper cover fixedly connected to the open end of the housing by bolts. An inlet pipe and an outlet pipe are respectively connected through the outer sides of the housing. The inlet pipe is connected to the supply pipeline of the spray liquid, and the outlet pipe is connected to the adjacent fixed pipe.

[0012] An impeller is rotatably mounted inside the housing. The upper end of the impeller's shaft passes through a through hole in the upper cover to the outside of the upper cover and is coaxially fixed with a sector gear. A sealed bearing is provided between the shaft and the through hole in the upper cover.

[0013] The exterior of the housing is detachably connected to the mounting plate via a connecting bracket.

[0014] Furthermore, the sector gear is inserted in the middle of the waist-shaped rack sleeve. As the sector gear rotates, it alternately contacts and meshes with two racks arranged opposite to each other on the waist-shaped rack sleeve, thereby realizing the reciprocating movement of the waist-shaped rack sleeve driven by the rotation of the sector gear.

[0015] The arc of the sector gear tooth surface is 80° to 100°.

[0016] Furthermore, a spiral groove is recessed on the outer wall of the three-way tube, and the spiral angle of the spiral groove is 80° to 100°. The end of the insertion rod is inserted into the spiral groove. When the push-pull rod moves the insertion rod, the end of the insertion rod slides inside the spiral groove, thereby driving the three-way tube and the atomizing nozzle to rotate and swing.

[0017] The spiral grooves on two adjacent T-tubes rotate in opposite directions. As the push-pull rod moves, the rotation directions of two adjacent atomizing nozzles are opposite, forming staggered spray zones.

[0018] Furthermore, the two ends of the fixed tube are first flange rings, and the first flange rings are provided with flange holes for connection. A diameter reduction area is connected to the outside of the first flange rings, and an insert tube is located outside the diameter reduction area. The inner diameter of the insert tube is smaller than the inner diameter of the fixed tube, and a first inclined surface area is provided on the outside of the end of the insert tube.

[0019] The fixed tube is externally fixed with a fixing frame, which is connected to the mounting plate.

[0020] Furthermore, the rotating connecting pipe section includes an outer sleeve, an inner sleeve, and a mechanical seal bearing.

[0021] The outer sleeve has a second flange ring on one side, which is detachably connected to the first flange ring by a bolt assembly. A sealing gasket is added between the two. The inner wall of the outer sleeve has a first abutment ring protruding from it. The outer sleeve is fitted onto the mechanical seal bearing by a heat fitting process, and the end of the mechanical seal bearing abuts against the first abutment ring.

[0022] The inner sleeve is provided with a third flange on the outer side of one end. The third flange is connected to the port of the tee pipe by a bolt assembly. The outer wall of the inner sleeve is provided with a second abutment ring. The inner sleeve is inserted into the inner side of the mechanical seal bearing by a cold fitting process. The end of the mechanical seal bearing abuts against the second abutment ring.

[0023] The inner sleeve has a second inclined area on the inner side of the port away from the third flange. After connection, the first inclined area and the second inclined area abut against each other.

[0024] An exhaust gas treatment spray device includes a tank and the aforementioned atomizing spray assembly.

[0025] The tank has a waste liquid outlet at the bottom and a tail gas inlet at the bottom of the side wall of the tank. The height of the tail gas inlet is higher than that of the waste liquid outlet, and the top surface of the tank has a tail gas outlet.

[0026] The tank body is equipped with a multi-layer atomizing spray assembly. Each layer contains at least 6 atomizing spray assemblies, and multiple atomizing spray assemblies in the same layer are arranged in a ring array around the axis of the tank body.

[0027] Furthermore, the tank body is provided with several layers of support platforms, the support platforms have polygonal holes in the middle, and the edges of the polygonal holes are provided with connecting plates. The mounting plate of the atomizing spray assembly is detachably connected to the connecting plates by bolts.

[0028] The bottom of the support platform is provided with an inclined guide plate. The lower point of the guide plate abuts against the inner wall of the tank, and the higher point abuts against the edge of the polygonal through hole in the middle of the support platform.

[0029] Furthermore, the liquid inlet pipe of the atomizing spray assembly is externally connected to a liquid supply branch pipe, all the liquid supply branch pipes inside the tank are connected to the main liquid supply pipe, and the main liquid supply pipe is connected to the external spray liquid supply system.

[0030] Compared with the prior art, the present invention has the following beneficial effects: (1) The linkage control controller uses the flow pressure of the spray liquid itself as the driving force. The rotation of the impeller in the hydraulic drive mechanism drives the sector gear to rotate, which in turn drives the waist-shaped rack sleeve to move back and forth. This design cleverly utilizes the existing fluid energy in the spray system, eliminating the need for additional external drive devices such as motors or cylinders. It also eliminates the reliability risks of electrical components operating in corrosive and humid environments, while reducing equipment manufacturing costs and operating energy consumption.

[0031] (2) By alternating meshing of the sector gear and the two sets of symmetrical racks on the waist-shaped rack sleeve, the unidirectional rotational motion of the impeller is converted into the reciprocating linear motion of the waist-shaped rack sleeve, and then transmitted to the spiral groove of the three-way pipe through the push-pull rod and the insert rod, finally realizing the reciprocating oscillation of the atomizing nozzle. The nozzle continuously oscillates between the vertical and horizontal directions, which greatly expands the spatial coverage of the spray liquid, effectively reduces or even eliminates the inherent spray dead angle in the fixed spray method, and significantly improves the gas-liquid contact area and mass transfer efficiency.

[0032] (3) By setting the spiral grooves on two adjacent three-way pipes to opposite directions, the rotation directions of the two adjacent atomizing nozzles are opposite during the same movement of the push-pull rod. This staggered arrangement makes the spray liquid sprayed by the adjacent nozzles complement and overlap in space, further eliminating the spray blind zone between the nozzles and realizing full coverage dynamic spraying of the spray chamber cross section.

[0033] (4) The atomizing spray assembly is detachably connected to the inner wall of the tank by bolts through the mounting plate. The fixed pipe and the rotating connecting pipe section, as well as the rotating connecting pipe section and the tee pipe, are connected by flange bolt assemblies. The atomizing nozzle is detachably connected to the tee pipe. This modular connection method allows each component to be disassembled and replaced independently, which greatly shortens the downtime for equipment maintenance and component replacement.

[0034] (5) Multiple atomizing spray assemblies on the same layer are arranged in a ring array around the axis of the tank, with each layer containing at least 6 atomizing spray assemblies. This ring arrangement allows the spray liquid to converge and spray from the periphery of the tank cross-section towards the center. Combined with the reciprocating oscillation of each atomizing nozzle driven by the linkage adjustment controller, the spray liquid coverage area forms a full overlap and complement on the entire cross-section of the tank, eliminating the inherent central spray blind zone in the traditional single-sided or linear arrangement.

[0035] The tank is equipped with a multi-layer atomizing spray assembly. As the exhaust gas flows upward, it passes through each spray zone sequentially, repeatedly contacting and reacting with the spray liquid droplets. Each layer of spray liquid absorbs and washes away harmful components in the exhaust gas step by step, ensuring that the exhaust gas is fully purified before reaching the exhaust outlet. The multi-layer arrangement significantly increases the gas-liquid contact time and area, greatly improving mass transfer efficiency.

[0036] (6) The bottom of the support platform is provided with an inclined guide plate. The lower point of the guide plate abuts against the inner wall of the tank, and the higher point abuts against the edge of the polygonal through hole in the middle of the support platform. This inclined surface structure guides the rising airflow to smoothly transition along the inclined surface of the guide plate over the area at the bottom of the support platform, avoiding eddies and stagnant areas caused by the horizontal bottom surface, eliminating dead airflow angles at the bottom of the support platform, and enabling the exhaust gas to flow evenly across the entire tank cross section and fully contact the spray liquid. Attached Figure Description

[0037] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0038] Figure 1 This is a schematic diagram of the atomizing spray assembly structure of the present invention. Figure 2 This is a schematic diagram of the linkage adjustment controller structure in the atomizing spray assembly of the present invention. Figure 3 for Figure 2 Enlarged view of a portion of point A in the middle. Figure 4 This is a cross-sectional view of the linkage control controller. Figure 5 This is a partial enlarged view of the atomizing nozzle in the atomizing spray assembly of the present invention. Figure 6 for Figure 5 sectional view, Figure 7 for Figure 6 Enlarged view of a section at point B in the middle. Figure 8 This is a cross-sectional view of the fixed pipe in the atomizing spray assembly of the present invention. Figure 9 This is a cross-sectional view of the rotating connecting pipe section in the atomizing spray assembly of the present invention. Figure 10 This is a schematic diagram of the exhaust gas treatment spray device of the present invention. Figure 11 This is a cross-sectional view of the exhaust gas treatment spray device of the present invention. Figure 12 This is a schematic diagram of the internal spray zone structure of the exhaust gas treatment spray device of the present invention. Figure 13 This is a schematic diagram of the connection structure of the internal atomizing spray assembly of the exhaust gas treatment spray device of the present invention. Figure 14 This is a cross-sectional view of the internal support platform of the exhaust gas treatment spray device of the present invention.

[0039] In the diagram: 1-Hydraulic drive mechanism, 101-Housing shell, 102-Top cover, 103-Inlet pipe, 104-Drain pipe, 105-Impeller, 106-Shaft, 107-Sector gear, 2-Oval rack sleeve, 3-Push-pull rod, 4-Fixed pipe, 401-First flange ring, 402-Reduction zone, 403-Insertion tube, 404-First inclined zone, 405-Fixed bracket, 5-Outer sleeve, 501-Second flange ring, 502-First abutment ring, 6-Inner sleeve 601-Third flange, 602-Second abutment ring, 603-Second inclined area, 7-Mechanical seal bearing, 8-Tee pipe, 801-Spiral groove, 9-Atomizing nozzle, 10-Plug, 11-Mounting plate, 12-Limit sleeve, 13-Liquid supply branch pipe, 14-Liquid supply main pipe, 15-Support platform, 1501-Connecting plate, 1502-Guide plate, 16-Tank body, 1601-Tail gas inlet, 1602-Tail gas outlet, 1603-Observation window. Detailed Implementation

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which embodiments of this application belong. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the embodiments of this application.

[0041] Furthermore, the specification and claims of this invention use terms indicating direction, such as "front," "rear," "upper," "lower," "left," "right," "side," "top," and "bottom," to describe various exemplary structural parts and elements of the invention. However, these terms are used herein merely for illustrative purposes and are determined based on the exemplary orientations shown in the accompanying drawings. Therefore, these terms indicating direction are for illustrative purposes only and should not be considered as limitations. For example, "upper" and "lower" are not necessarily limited to directions opposite to or consistent with the direction of gravity.

[0042] The following description, in conjunction with the accompanying drawings, provides a more detailed account of the atomizing spray assembly and the exhaust gas treatment spray device comprised thereof.

[0043] Depend on Figure 1 As shown, the atomizing spray assembly includes a linkage adjustment controller, a fixed pipe 4, a rotating connecting pipe section, an atomizing nozzle assembly, and a mounting plate 11. The atomizing nozzle assembly includes a T-shaped pipe 8 and an atomizing nozzle 9. The T-shaped pipe 8 has two axial ports connected to the fixed pipe 4 via the rotating connecting pipe section, allowing the T-shaped pipe 8 to rotate relative to the fixed pipe 4 around its axial centerline. The atomizing nozzle 9 is detachably connected to the remaining ports of the T-shaped pipe 8, preferably via a threaded connection or a flange connection, facilitating quick replacement of the atomizing nozzle 9 when it is worn or clogged.

[0044] The linkage control controller is located at the inlet end of the spray liquid, and its outlet is connected to the fixed pipe 4. After the spray liquid enters from the linkage control controller, it is transported along the fixed pipe 4 to each atomizing nozzle 9 for spraying operations. On the other hand, it drives the impeller 105 inside the linkage control controller to rotate, providing power for the oscillation of the atomizing nozzle 9. The function of transporting the spray liquid and the function of driving the nozzle oscillation are integrated into the same pipeline system, eliminating the need for an additional independent power unit.

[0045] The entire atomizing spray assembly is fixed to the inner wall of the support platform 15 by the mounting plate 11. The mounting plate 11 is a metal plate, and the fixing pipe 4 is externally fixed with a fixing bracket 405. The fixing bracket 405 is connected to the mounting plate 11 by bolts or welding to achieve a stable installation of the entire assembly.

[0046] Depend on Figures 2 to 4 As shown, the linkage control controller includes a hydraulic drive mechanism 1, a waist-shaped rack sleeve 2, a push-pull rod 3, and a plug rod 10.

[0047] The hydraulic drive mechanism 1 uses the fluid pressure generated when the spray liquid flows in the pipeline to drive the impeller 105 to rotate, converting the kinetic energy of the fluid into mechanical rotational motion.

[0048] The hydraulic drive mechanism 1 includes a housing 101, which is made of a corrosion-resistant material, such as polypropylene (PP), polyvinylidene fluoride (PVDF), or stainless steel lined with fluoroplastics, to withstand the corrosive environment of the spray liquid and exhaust gas. A top cover 102 is provided over the open upper end of the housing 101, and the top cover 102 is fixedly connected to the housing 101 by bolts. A sealing gasket is provided between the two to achieve end-face sealing. The top cover 102 facilitates the inspection and replacement of internal parts of the housing 101.

[0049] An inlet pipe 103 and an outlet pipe 104 are respectively connected to the outer sides of the housing 101. The inlet pipe 103 is connected to the supply pipeline of the spray liquid, and the outlet pipe 104 is connected to the adjacent fixed pipe 4. After the spray liquid enters the housing 101 through the inlet pipe 103, it impacts the impeller 105 to make it rotate, and then is discharged through the outlet pipe 104 and enters the fixed pipe 4 to continue to be delivered to the atomizing nozzle 9. The outlet direction of the inlet pipe 103 is designed to be tangential or approximately tangential to the blade direction of the impeller 105 to maximize the impact torque of the fluid on the impeller 105 and improve the driving efficiency.

[0050] An impeller 105 is rotatably mounted inside the housing 101. The impeller 105 is made of corrosion-resistant engineering plastic or alloy material, and preferably has 6 to 12 blades. The blade shape can be radial straight blades or backward-curved blades to reduce fluid resistance while ensuring driving torque. The upper end of the shaft 106 of the impeller 105 passes through a through hole in the upper cover 102 to the outside of the upper cover 102, and a sector gear 107 is coaxially fixed thereon. A sealed bearing is provided between the shaft 106 and the through hole in the upper cover 102. The sealed bearing is preferably a mechanical seal bearing, which allows the shaft 106 to rotate freely while preventing the spray liquid inside the housing 101 from leaking upwards along the gap of the shaft 106. The installation of the sealed bearing is crucial for ensuring the long-term reliable operation of the hydraulic drive mechanism 1, because the spray liquid is usually corrosive, and once it leaks into the gear transmission area, it will cause tooth surface corrosion and transmission jamming.

[0051] The sector gear 107 is a partial gear ring structure, meaning that teeth are only present within a segment of an arc around the entire circumference, while the remaining portion is a smooth, toothless arc surface. The arc of the sector gear 107's tooth surface ranges from 80° to 100°. This arc range is set based on the following considerations: if the arc is too small, the single stroke of the waist-shaped rack sleeve 2 will be insufficient, the oscillation amplitude of the atomizing nozzle 9 will be limited, and the improvement in spray coverage will not be significant; if the arc is too large, the meshing transition area between the sector gear 107 and the rack will increase during reciprocating reversal, easily leading to tooth surface interference or meshing impact. The arc range of 80° to 100° ensures sufficient oscillation amplitude while guaranteeing smooth gear meshing.

[0052] A sector gear 107 is inserted in the middle of a waist-shaped rack sleeve 2. The waist-shaped rack sleeve 2 is a hollow rectangular or waist-shaped sleeve-shaped component, with racks on opposite sides of its inner wall, and the two sets of racks are arranged in parallel and symmetrically. As the sector gear 107 rotates, its teeth alternately contact and mesh with the two racks arranged opposite each other on the waist-shaped rack sleeve 2.

[0053] Specifically, when the sector gear 107 rotates clockwise until its toothed arc segment meshes with the upper rack of the waist-shaped rack sleeve 2, the waist-shaped rack sleeve 2 is pushed to one side. As the sector gear 107 continues to rotate, after the toothed arc segment disengages from the upper rack, the toothless smooth segment of the sector gear 107 idles between the two racks, and then the toothed arc segment enters the meshing position of the lower rack. At this time, the waist-shaped rack sleeve 2 is pushed to the other side. This cycle repeats, and the continuous unidirectional rotation of the sector gear 107 is converted into the reciprocating linear motion of the waist-shaped rack sleeve 2. This "unidirectional input, reciprocating output" motion conversion mechanism has a simple structure, reliable operation, and does not require reversing control logic, realizing purely mechanical automatic reciprocating motion.

[0054] The material of the waist-shaped rack sleeve 2 should have self-lubricating and wear-resistant properties, preferably engineering plastics such as polyoxymethylene or polyetheretherketone, to reduce friction and wear when meshing with the sector gear 107 and extend its service life. The tooth profile parameters of the inner wall rack of the waist-shaped rack sleeve 2 and the sector gear 107 must be matched in design, and parameters such as module and pressure angle should be consistent to ensure the accuracy and smoothness of meshing transmission.

[0055] The push-pull rod 3 is fixedly connected to the waist-shaped rack sleeve 2. When the waist-shaped rack sleeve 2 moves back and forth, the push-pull rod 3 moves back and forth in a linear motion. The push-pull rod 3 is a slender rod-shaped component, which can be made of stainless steel tube or solid round rod. Its length is determined according to the span of the atomizing spray assembly and the number of atomizing nozzle assemblies to be connected.

[0056] The same number of insert rods 10 as the atomizing nozzles 9 are arranged in a one-to-one correspondence with the push-pull rod 3. That is, each atomizing nozzle 9 is equipped with one insert rod 10, the number of insert rods 10 is equal to the number of atomizing nozzles 9, and they are distributed along the length of the push-pull rod 3. The insert rods 10 extend vertically or nearly vertically from the push-pull rod 3, and their ends are inserted into the spiral grooves 801 on the outer wall of the corresponding tee pipe 8.

[0057] During its reciprocating motion, the push-pull rod 3 drives each insert rod 10 to move synchronously, with the end of each insert rod 10 sliding within its corresponding spiral groove 801. Since the spiral groove 801 is a guide groove extending spirally around the axial direction of the three-way pipe 8, the linear sliding of the insert rod 10 along the spiral groove 801 is converted into the rotational motion of the three-way pipe 8 around its axial direction, thereby causing the atomizing nozzle 9 to oscillate. This transmission mechanism converts the linear reciprocating motion of the push-pull rod 3 into the rotational oscillation of the three-way pipe 8, resulting in a simple structure and high transmission efficiency.

[0058] Depend on Figure 8 As shown, the fixed pipe 4 is the fixed pipe section in the atomizing spray assembly, and its two ends are provided with first flange rings 401. The first flange ring 401 is provided with flange holes for connection, which are evenly distributed along the circumference and are used to connect to the outer sleeve 5 of the rotating connection pipe section through bolt assembly.

[0059] A reduction zone 402 is connected to the outer side of the first flange ring 401. The reduction zone 402 is a transition section where the diameter of the end of the fixed pipe 4 decreases, and its inner diameter is smaller than the inner diameter of the main body of the fixed pipe 4. The reduction zone 402 serves the following purposes: first, it creates a flow channel contraction, increases the flow velocity of the spray liquid at the connection, enhances the turbulent mixing effect, and allows the spray liquid to obtain a more uniform flow field distribution before entering the tee pipe 8; second, it provides a structural transition for the subsequent insertion pipe 403.

[0060] The outer side of the reduced-diameter section 402 is the insertion tube 403. The insertion tube 403 is a straight tube section with a further reduced diameter, and its inner diameter is smaller than that of the fixed tube 4. During assembly, the insertion tube 403 is inserted into the inner hole of the inner sleeve 6 to achieve radial positioning and alignment between the fixed tube 4 and the rotating connecting tube section. A first inclined surface section 404 is provided on the outer side of the end of the insertion tube 403. The first inclined surface section 404 is a tapered chamfered surface, and its cone angle is adapted to the second inclined surface section 603 at the end of the inner sleeve 6. The two form a tapered sealing fit after assembly.

[0061] A fixing bracket 405 is fixed to the outside of the fixing pipe 4. The fixing bracket 405 is a support structure that is welded or bolted around the outer wall of the fixing pipe 4. The fixing bracket 405 is connected to the mounting plate 11 to achieve the fixed installation of the fixing pipe 4 on the mounting plate 11. The number of fixing brackets 405 is determined according to the length of the fixing pipe 4. Usually, one or two fixing brackets 405 are set for each fixing pipe 4 to ensure the stability of the installation.

[0062] Depend on Figure 9 As shown, the rotating connecting pipe section is a key component connecting the fixed pipe 4 and the tee pipe 8. It allows the tee pipe 8 to rotate freely about the axis relative to the fixed pipe 4, while ensuring the sealing of the pipe connection. The rotating connecting pipe section includes an outer sleeve 5, an inner sleeve 6, and a mechanical seal bearing 7.

[0063] A second flange ring 501 is provided on the outer side of one end of the outer sleeve 5. The second flange ring 501 is detachably connected to the first flange ring 401 at the end of the fixed pipe 4 by a bolt assembly. To improve the sealing effect, a sealing gasket is added between the two. The sealing gasket is preferably a corrosion-resistant polytetrafluoroethylene gasket or an expanded graphite gasket to adapt to the corrosive environment of the spray liquid and ensure the sealing reliability of the flange connection surface.

[0064] A first abutment ring 502 protrudes from the inner wall of the outer sleeve 5. The first abutment ring 502 is an annular boss protruding circumferentially along the inner wall of the outer sleeve 5, and its inner diameter is smaller than the inner diameter of the main body of the outer sleeve 5. It is used to limit and abut against the mechanical seal bearing 7 in the axial direction. The outer sleeve 5 is fitted onto the mechanical seal bearing 7 by a heat-fitting process. The heat-fitting process refers to heating the outer sleeve 5 to a certain temperature to make it expand, and then installing the mechanical seal bearing 7 into its inner hole. After the outer sleeve 5 cools and shrinks, it tightly hugs the outside of the mechanical seal bearing 7, forming an interference fit. The heat-fitting process can ensure the coaxiality and connection strength between the outer sleeve 5 and the mechanical seal bearing 7, while avoiding the application of radial force to the mechanical seal bearing 7 during assembly, which would damage its sealing surface. The end of the mechanical seal bearing 7 abuts against the first abutment ring 502, and is limited and fixed in the axial direction by the first abutment ring 502.

[0065] A third flange 601 is provided on the outer side of one end of the inner sleeve 6. The third flange 601 is connected to the port of the tee pipe 8 by a bolt assembly, realizing a firm connection between the inner sleeve 6 and the tee pipe 8. Since the tee pipe 8 needs to rotate and swing during operation, the inner sleeve 6 rotates with the tee pipe 8. Therefore, the connection between the inner sleeve 6 and the tee pipe 8 must be firm and reliable, and able to withstand the rotational torque and the pressure of the spray liquid.

[0066] A second abutment ring 602 protrudes from the outer wall of the inner sleeve 6. The second abutment ring 602 is an annular boss protruding circumferentially from the outer wall of the inner sleeve 6, with an outer diameter larger than the inner diameter of the mechanical seal bearing 7. It is used to limit the inner ring of the mechanical seal bearing 7 in the axial direction. The inner sleeve 6 is inserted into the inner side of the mechanical seal bearing 7 using a cold-sleeving process. The cold-sleeving process involves cooling the inner sleeve 6 to a low temperature to shrink it, then inserting it into the inner hole of the mechanical seal bearing 7. After the inner sleeve 6 returns to room temperature, it expands, forming an interference fit with the inner ring of the mechanical seal bearing 7. The combined use of cold and hot sleeve processes ensures that the outer sleeve 5 is fixed to the outer ring of the mechanical seal bearing 7, the inner sleeve 6 is fixed to the inner ring of the mechanical seal bearing 7, and the end of the mechanical seal bearing 7 abuts against the second abutment ring 602, achieving axial limitation. This assembly method ensures that the outer sleeve 5 and the inner sleeve 6 can rotate relative to each other through the mechanical seal bearing 7, and that the seal is reliable.

[0067] A second beveled area 603 is provided on the inner side of the port of the inner sleeve 6 furthest from the third flange 601. Figure 7 As shown, after connection, the first beveled area 404 at the end of the fixed pipe 4 abuts against the second beveled area 603 of the inner sleeve 6. The cone angles of the two beveled areas are matched, forming a conical sealing fit after assembly. When the spray liquid flows inside the pipe, the internal pressure of the liquid will make the two beveled areas fit more tightly, further enhancing the sealing effect. This beveled abutment seal, together with the rotary seal of the mechanical seal bearing 7, forms a double sealing guarantee, effectively preventing leakage of spray liquid at the rotary connection.

[0068] The combined use of hot-sleeving and cold-sleeving processes is crucial for the assembly of rotating connecting pipe sections. The outer sleeve 5 is hot-sleeved onto the outer ring of the mechanical seal bearing 7 and then cools and shrinks to form a fixed outer ring. The inner sleeve 6 is cold-sleeved onto the inner ring of the mechanical seal bearing 7 and then expands to form a fixed inner ring. Both processes require high temperature control precision. The heating temperature for hot-sleeving is typically 120℃ to 180℃, and the cooling temperature for cold-sleeving is typically -40℃ to -80℃. Specific temperature difference parameters need to be calculated and determined based on the material expansion coefficients of the outer sleeve 5, inner sleeve 6, and mechanical seal bearing 7 to ensure a suitable interference fit.

[0069] The mechanical seal bearing 7 is the core component in the rotating connecting pipe section, realizing both rotation and sealing functions. Its outer ring is interference-fitted with the outer sleeve 5, and its inner ring is interference-fitted with the inner sleeve 6. The outer ring is stationary, while the inner ring rotates synchronously with the inner sleeve 6 and the tee pipe 8. The sealing end face of the mechanical seal bearing 7 is made of corrosion-resistant silicon carbide or alumina ceramic material, possessing excellent wear resistance, corrosion resistance, and self-lubricating properties, enabling long-term stable operation under conditions containing acidic or alkaline corrosive sprays. The ends of the mechanical seal bearing 7 abut against the first abutment ring 502 and the second abutment ring 602, respectively, forming axial limits at both ends to prevent axial movement during operation.

[0070] The three-way pipe 8 is the main connecting component of the atomizing nozzle assembly. Its two axial ports are connected to the rotating connecting pipe sections on both sides, and the remaining radial port is connected to the atomizing nozzle 9. Driven by the linkage adjustment controller, the three-way pipe 8 rotates around its axis, causing the atomizing nozzle 9 to swing, thereby achieving dynamic spraying.

[0071] Depend on Figure 5 As shown, a spiral groove 801 is recessed on the outer wall of the three-way pipe 8. The spiral groove 801 is a guide groove that extends spirally around the axial direction of the three-way pipe 8. Its cross-sectional shape is preferably U-shaped or rectangular, and the groove width is slightly larger than the diameter of the end of the insertion rod 10 to ensure that the end of the insertion rod 10 can slide smoothly in the groove without excessive radial clearance wobble. The spiral angle of the spiral groove 801 is 80° to 100°. The spiral angle is defined as the angle between the spiral line of the spiral groove 801 and the axial direction of the three-way pipe 8. The selection of this angle range is based on the following principle: the spiral angle determines the conversion relationship between the linear displacement of the push-pull rod 3 and the rotation angle of the three-way pipe 8. The larger the angle, the larger the rotation angle produced by the same linear displacement, and the larger the swing amplitude of the atomizing nozzle 9. The spiral angle of 80° to 100° allows the atomizing nozzle 9 to achieve a sufficient swing range between the vertical and horizontal directions, covering most of the spray chamber cross-section.

[0072] To further improve the exhaust gas treatment effect, in this embodiment, the spiral grooves 801 on two adjacent three-way pipes 8 have opposite rotation directions. That is, if the spiral groove 801 on one three-way pipe 8 is right-handed, then the spiral groove 801 on the adjacent three-way pipe 8 is left-handed. Due to the opposite rotation directions, when the push-pull rod 3 drives all the insert rods 10 to move in the same direction, the rotation directions of the two adjacent three-way pipes 8 are opposite, which in turn makes the rotation directions of the two adjacent atomizing nozzles 9 opposite. The atomizing nozzles 9 swing back and forth from the vertical to the horizontal direction, and the two adjacent nozzles form staggered spray zones. This staggered spraying makes the spray range of the adjacent nozzles complement each other in space, and the edge of the spray area of ​​one nozzle is exactly the center of the spray area of ​​the adjacent nozzle, thereby effectively reducing or even eliminating spray dead angles and realizing full-coverage dynamic spraying of the spray chamber cross section.

[0073] The atomizing nozzle 9 has a swirling core or vortex vane inside. After the spray liquid enters the nozzle, it is accelerated and rotated by the swirling core, and then sprayed out from the nozzle outlet in an atomized state, forming a dense cluster of droplets. The droplet size is typically in the range of 50 to 200 micrometers to ensure sufficient gas-liquid contact area and mass transfer efficiency.

[0074] The nozzle angle of the atomizing nozzle 9 is preferably a solid cone or hollow cone spray pattern, with a spray angle between 60° and 120° to accommodate different spray chamber cross-sectional dimensions and nozzle spacing. The atomizing nozzle 9 is made of corrosion-resistant polypropylene, polyvinylidene fluoride, or silicon carbide ceramic to ensure long-term corrosion resistance in acidic and alkaline spray environments.

[0075] The housing 101 is detachably connected to the mounting plate 11 via a connecting bracket. The connecting bracket is a metal support component, with one end connected to the outer wall of the housing 101 by bolts or welding, and the other end connected to the mounting plate 11 by bolts. The mounting plate 11 serves as the mounting base for the entire atomizing spray assembly, and it is fixedly connected to the inner wall of the housing 15 by bolts. The mounting plate 11 has through holes or slots for components such as the fixing pipe 4 and the push-pull rod 3 to pass through, as well as mounting holes for bolt connections. The dimensions and thickness of the mounting plate 11 are determined according to the weight and working load of the atomizing spray assembly it supports, and it is usually made of stainless steel plate or carbon steel anti-corrosion plate with a thickness of 5 to 10 mm.

[0076] Several limiting sleeves 12 are connected to the mounting plate 11. Each limiting sleeve 12 is a hollow cylindrical component, fitted onto the outside of the push-pull rod 3, providing guidance and support. The limiting sleeves 12 are spaced apart along the length of the push-pull rod 3, with the number determined by the length and rigidity of the push-pull rod 3, typically one every 200 to 400 mm. The inner diameter of the limiting sleeve 12 is slightly larger than the outer diameter of the push-pull rod 3, forming a sliding fit. This ensures that the push-pull rod 3 always moves along a predetermined axis during reciprocating motion, preventing bending deformation and eccentric swaying caused by its own weight or load, and guaranteeing the fitting accuracy between the end of the insertion rod 10 and the spiral groove 801. The limiting sleeves 12 are preferably made of engineering plastics with self-lubricating properties (such as polyoxymethylene (POM) or nylon) to reduce frictional resistance during the sliding of the push-pull rod 3.

[0077] The entire transmission process from the input of the spray liquid to the oscillation of the atomizing nozzle 9 is as follows: The first step is power generation. The spray liquid enters the inlet pipe 103 of the hydraulic drive mechanism 1 through the supply pipeline. The spray liquid impacts the impeller 105 inside the housing 101 at a certain flow rate and pressure, driving the impeller 105 to rotate continuously around the shaft 106. After the spray liquid does work on the impeller 105, it is discharged from the drain pipe 104, enters the fixed pipe 4, and continues to be delivered to each tee pipe 8 and the atomizing nozzle 9, realizing the synchronous completion of spray liquid delivery and power drive.

[0078] The second step is the conversion of rotational motion. The rotation of the impeller 105 is transmitted to the sector gear 107 outside the upper cover 102 via the rotating shaft 106. The sector gear 107 rotates synchronously with the rotating shaft 106, and its toothed arc segment alternately meshes with the upper and lower racks on the inner wall of the waist-shaped rack sleeve 2. Every half revolution of the sector gear 107, the waist-shaped rack sleeve 2 completes one unidirectional displacement; as the sector gear 107 continues to rotate, the waist-shaped rack sleeve 2 reciprocates between two extreme positions.

[0079] The third step is the transmission of linear motion. The reciprocating movement of the waist-shaped rack sleeve 2 is transmitted to each insertion rod 10 via the push-pull rod 3. Since the insertion rod 10 is fixedly connected to the push-pull rod 3, all insertion rods 10 move linearly and reciprocally synchronously with the push-pull rod 3. The push-pull rod 3 maintains the accuracy of linear motion under the guidance and support of the limiting sleeve 12.

[0080] The fourth step is the rotational oscillation output. The end of each insert 10 slides within the spiral groove 801 of the corresponding tee tube 8. Since the spiral groove 801 extends spirally along the axial direction of the tee tube 8, the linear sliding of the insert 10 end is converted into the rotational motion of the tee tube 8 around its axial direction. The rotation of the tee tube 8 causes the atomizing nozzle 9 to oscillate back and forth between the vertical and horizontal directions, achieving dynamic changes in the spray angle. Because the spiral grooves 801 of adjacent tee tubes 8 rotate in opposite directions, the oscillation directions of adjacent atomizing nozzles 9 are always opposite, forming an interlaced and complementary dynamic spray zone.

[0081] The entire transmission process requires no external electrical control, relying entirely on the hydrodynamic power of the spray liquid itself and a purely mechanical transmission mechanism. It boasts significant advantages such as simple structure, reliable operation, and easy maintenance. The oscillation frequency is determined by the flow rate and pressure of the spray liquid. The rotational speed of the impeller 105 can be changed by adjusting the flow parameters of the liquid supply system, thereby adjusting the oscillation frequency of the atomizing nozzle 9 and achieving flexible control of the spray coverage area.

[0082] Depend on Figures 10 to 11 As shown, this invention provides a tail gas treatment spray device for treating tail gas generated in the chemical vapor deposition process of semiconductor and photovoltaic manufacturing. The device includes a tank 16 and the aforementioned atomizing spray assembly. The tank 16 serves as the outer shell of the entire device, made of corrosion-resistant material, and internally houses multiple layers of the atomizing spray assembly and a space for gas-liquid contact reaction. The tail gas enters from below the side wall of the tank 16 and flows upwards, sequentially passing through the spray zones formed by each layer of the atomizing spray assembly. After sufficient contact and reaction with the spray liquid droplets, the purified gas is discharged from the top of the tank 16. The sprayed waste liquid collects at the bottom of the tank 16 under gravity and is discharged thereafter.

[0083] The device employs a countercurrent gas-liquid operation: the exhaust gas flows from bottom to top, while the spray liquid is sprayed from top to bottom. This countercurrent contact ensures that the gas and liquid phases maintain the maximum concentration gradient throughout the entire height of the tank 16. The mass transfer driving force decreases sequentially from bottom to top. The exhaust gas with the highest concentration of harmful components first contacts the spray liquid about to be discharged at the bottom after entering the tank 16, forming a high concentration difference-driven mass transfer process. As the exhaust gas flows upward, its concentration of harmful components gradually decreases, while fresh spray liquid is continuously replenished to the upper layers, ensuring that the mass transfer process maintains high efficiency throughout the entire height of the tank 16.

[0084] Tank 16 is the main outer shell of the exhaust gas treatment spray device, and its preferred geometric shape is a cylindrical vertical structure. The cylindrical cross-section facilitates the uniform distribution of the spray liquid across the cross-section, while also enabling the rising airflow to form a uniform axisymmetric flow field, reducing wall eddies and flow deviation phenomena. The height of tank 16 is determined based on the processing air volume and the required number of spray layers, while the diameter is determined based on the processing air volume and the cross-sectional wind speed. The cross-sectional wind speed is generally controlled within the range of 1 to 3 m / s to ensure sufficient contact time between the gas and liquid phases and to prevent the airflow from entraining a large number of droplets.

[0085] The tank 16 has a waste liquid discharge outlet at its bottom. Located at the lowest point of the tank 16, the outlet facilitates the collection and discharge of waste liquid after spraying under gravity. Valves and pipelines can be connected to the outlet, allowing for periodic or continuous discharge via manual or automatic control. The discharged waste liquid is collected and sent to a waste liquid treatment system for neutralization, solidification, and other subsequent treatments before being discharged or reused after meeting standards. The bottom of the tank 16 can be further designed with a conical or funnel-shaped constriction structure to allow the waste liquid to naturally converge towards the outlet, reducing residual liquid at the bottom.

[0086] A tail gas inlet 1601 is located on the lower side wall of the tank 16. The height of the tail gas inlet 1601 is higher than that of the waste liquid outlet. This height difference serves two purposes: firstly, it allows the bottom of the tank 16 to maintain a liquid seal layer of a certain depth, which provides initial water washing and buffering for the tail gas, while preventing the tail gas from escaping through the waste liquid outlet via a short circuit; secondly, it ensures that the waste liquid outlet is always located at the lowest point, allowing the waste liquid to be discharged smoothly without interference from the airflow of the tail gas inlet 1601. The number of tail gas inlets 1601 can be set to one or more depending on the processing air volume. When multiple inlets are set, they are evenly distributed around the circumference of the tank 16 to ensure that the tail gas flow entering the tank 16 is evenly distributed across the cross-section, avoiding flow deviation.

[0087] The top surface of the tank 16 is provided with an exhaust gas outlet 1602. The exhaust gas outlet 1602 is located at the highest point of the tank 16, allowing the purified gas to flow upwards to the top and then naturally discharge. A demister or gas-liquid separator can be connected to the exhaust gas outlet 1602 to trap liquid droplets entrained in the exhaust gas flow, preventing the spray liquid from being carried out of the tank 16 by the airflow, causing loss and environmental pollution. The demister is preferably a wire mesh demister or a baffle plate demister, and the trapped droplets flow back into the tank 16 under gravity.

[0088] The material of the tank body 16 needs to be selected based on the corrosive components of the exhaust gas being treated. For conditions containing strong acidic gases such as hydrogen fluoride and hydrogen chloride, the preferred material for the tank body 16 is a steel shell made of polypropylene, polyvinylidene fluoride, or lined with fluoroplastics. For conditions containing both acid and alkali mixed gases, the inner wall of the tank body 16 can also be coated with an acid-alkali resistant dual-phase anti-corrosion coating. The wall thickness of the tank body 16 is determined based on the structural load and internal pressure borne by its diameter and height, generally using a wall thickness of 6 to 15 mm, with reinforcing ribs added in key areas to improve structural rigidity.

[0089] The tank 16 contains a multi-layered atomizing spray assembly, with each layer comprising at least six atomizing spray assemblies. This multi-layered arrangement allows the exhaust gas to pass sequentially through each spray zone as it flows upwards, repeatedly contacting the spray liquid in each layer for progressively deeper treatment. The number of layers is typically set to 2 to 5, with the spacing between layers determined by the height of the tank 16 and the spray coverage area, usually between 300 and 800 mm. Sufficient spacing should be maintained between each layer to allow the spray liquid droplets from the previous layer enough space to complete their contact reaction with the exhaust gas before falling to the next layer, while also preventing interference between droplets from adjacent spray zones.

[0090] Depend on Figure 12 as well as Figure 13 As shown, multiple atomizing spray assemblies on the same layer are arranged in a ring array around the axis of the tank 16. This ring array arrangement ensures that the atomizing spray assemblies are evenly spaced along the circumference of the tank 16's cross-section, with the spray direction pointing towards the central axis of the tank 16. Since the tank 16 is a cylindrical structure, the ring array arrangement allows each atomizing spray assembly to form a fan-shaped spray area at an equal angle on the cross-section of the tank 16. These fan-shaped areas converge and overlap at the center, achieving full coverage of the cross-section.

[0091] Each layer contains at least six atomizing spray assemblies. When the number of layers is small or the diameter of the tank 16 is large, the number of assemblies per layer can be increased to eight, ten, or twelve to increase the spray density and reduce the spacing between adjacent nozzles, resulting in more uniform spray coverage. The mounting plate 11 of each atomizing spray assembly is fixed to the support platform 15 with bolts, ensuring that each atomizing spray assembly is securely installed on the support platform 15 and can be disassembled independently. Meanwhile, several observation windows 1603, spaced vertically, are provided on the outer wall of the tank 16, allowing observation of the operation of each layer of atomizing spray assemblies inside the tank 16.

[0092] Since each atomizing spray assembly is equipped with an independent linkage adjustment controller, each atomizing nozzle 9 continuously oscillates back and forth under the drive of the spray liquid. The spiral grooves 801 of the three-way pipes 8 on adjacent atomizing spray assemblies in the same layer rotate in opposite directions, causing the adjacent atomizing nozzles 9 to rotate in opposite directions, forming staggered spray zones. This staggered spraying, in a ring array arrangement, manifests as the spray areas of adjacent nozzles complementing each other in the circumferential direction, with the edge of one nozzle's coverage area exactly being the center of the coverage area of ​​an adjacent nozzle, thus achieving dynamic spraying without dead angles across the entire cross-section.

[0093] The tank body 16 has several layers of support platforms 15 inside. Each support platform 15 is a horizontally arranged plate-like structure, with its outer edge fixedly connected to the inner wall of the tank body 16. The fixing method can be welding, bolting, or clamping. The number of support platform layers corresponds one-to-one with the number of layers in the atomizing spray assembly. Each support platform 15 is used to support and install the corresponding layer of atomizing spray assemblies. The material of the support platform 15 is the same as that of the tank body 16 or is made of the same grade of corrosion-resistant material. Its thickness is determined according to the weight of the atomizing spray assembly it supports and the working load, generally using plates of 8 to 15 mm.

[0094] Depend on Figure 14 As shown, the support platform 15 has a polygonal hole in the center. The polygonal hole is a through-hole in the central area of ​​the support platform 15, preferably a regular hexagon or octagon, but can also be circular or other polygonal shapes. The polygonal hole serves three functions: first, it provides a through-channel for the spray liquid droplets and the rising exhaust gas flow, allowing the gas and liquid phases to flow freely through the support platform 15 between layers; second, it reduces the obstruction area of ​​the support platform 15 on the airflow, thus lowering airflow resistance; and third, the edges of the polygonal hole form installation interfaces for connecting the atomizing spray assembly.

[0095] A connecting plate 1501 is provided at the edge of the polygonal hole. The connecting plate 1501 is a plate-shaped or strip-shaped reinforcing member set along the edge of the polygonal hole. It can be formed by bending the plate of the support platform 15 itself, or it can be welded to the edge of the polygonal hole as an independent reinforcing plate. The setting of the connecting plate 1501 enhances the structural strength of the edge of the polygonal hole, enabling it to withstand the weight of the atomizing spray assembly and the vibration load generated during operation. Bolt holes are provided on the connecting plate 1501, and the mounting plate 11 of the atomizing spray assembly is detachably connected to the connecting plate 1501 by bolts. The bolt connection method allows each atomizing spray assembly to be installed and removed independently. During equipment maintenance, the operator only needs to loosen the bolts at the corresponding positions to remove a single atomizing spray assembly from the support platform 15 without disassembling the entire support structure or affecting the installation status of adjacent spray assemblies, thus greatly facilitating maintenance.

[0096] One or more atomizing spray assemblies can be installed on the connecting plate 1501 of each polygonal hole. When the polygonal hole is large, a connecting plate 1501 can be set on each side and an atomizing spray assembly can be installed on each side, so that multiple spray assemblies are evenly arranged around a polygonal hole, thereby further increasing the spray density at that location.

[0097] To avoid dead airflow zones at the bottom of the support platform 15, an inclined guide plate 1502 is provided at the bottom of the support platform 15. As a horizontal plate structure, the bottom surface of the support platform 15 obstructs the airflow during its ascent. When the airflow passes around the edge of the bottom surface of the support platform 15, eddies and stagnant areas are easily generated, i.e., dead airflow zones. If the exhaust gas stays in the dead airflow zone for too long and cannot effectively contact the spray liquid, it will reduce the treatment efficiency and may also shorten the equipment life due to accelerated local corrosion.

[0098] The guide plate 1502 is an inclined plate-shaped component installed in the area between the bottom surface of the support platform 15 and the inner wall of the tank 16. The lowest point of the guide plate 1502 abuts against the inner wall of the tank 16, and the highest point abuts against the edge of the polygonal through-hole in the center of the support platform 15. That is, the guide plate 1502 extends obliquely upwards from the lowest point of the inner wall of the tank 16 towards the highest point of the edge of the polygonal hole in the center of the support platform 15, forming an inclined guiding surface. This inclined surface structure ensures that when the rising airflow reaches the bottom area of ​​the support platform 15, it is no longer directly obstructed by the horizontal bottom surface, but is smoothly guided along the inclined surface of the guide plate 1502 to the polygonal hole, passing through the hole and entering the upper space.

[0099] The tilt angle of the guide vane 1502 is determined based on the airflow velocity and the structural dimensions of the support platform 15, and is generally controlled between 15° and 45°. If the angle is too small, the guiding effect will be insignificant, and the airflow will still easily form vortices below the slope; if the angle is too large, the guide vane 1502 will occupy too much internal space of the tank 16, reducing the effective spray volume. The guide vane 1502 can be configured as an integral annular conical structure, extending continuously around the bottom of the support platform 15; or it can be configured as multiple independent fan-shaped plates, evenly distributed along the circumference of the bottom of the support platform 15. The material of the guide vane 1502 is the same as that of the support platform 15, and is made of corrosion-resistant material.

[0100] The baffle 1502 transforms the airflow path at the bottom of the support platform 15 from "horizontal obstruction - flow around - vortex dead angle" to "sloping guidance - smooth transition - uniform passage", eliminating the airflow dead angle at the bottom of the support platform 15 and enabling the exhaust gas to flow evenly across the entire cross section of the tank 16 and fully contact each layer of spray liquid, significantly improving the treatment efficiency.

[0101] Key structural features: The support platform 15 simultaneously performs three functions—supporting the atomizing spray assembly, providing a gas-liquid flow channel, and guiding airflow to eliminate dead zones. These three functions are integrated on the same support structure, eliminating the need for additional airflow distribution devices or guide components, resulting in a simple yet functional structure.

[0102] The liquid inlet pipe 103 of the atomizing spray assembly is externally connected to a liquid supply branch pipe 13. The liquid supply branch pipe 13 is a branch pipe that supplies liquid to each atomizing spray assembly individually, and it distributes the spray liquid from the liquid supply main pipe 14 to the hydraulic drive mechanism of each atomizing spray assembly.

[0103] All the liquid supply branch pipes 13 inside the tank 16 are connected to the main liquid supply pipe 14. The main liquid supply pipe 14 is the common main liquid supply pipe for all atomizing spray assemblies inside the tank 16. It is connected from the outside of the tank 16 and arranged vertically along the inner wall of the tank 16. Each liquid supply branch pipe 13 branches off from the main liquid supply pipe 14 and connects to the inlet pipe 103 of each atomizing spray assembly on each floor. The diameter of the main liquid supply pipe 14 is determined according to the total liquid supply volume, and should ensure that the flow velocity inside the pipe is reasonable and the pressure at each branch interface is balanced under the maximum flow condition.

[0104] The main supply pipe 14 connects to an external spray liquid supply system. The spray liquid supply system is equipped with a booster pump, filter, storage tank, and control valves to ensure that the spray liquid is delivered to each atomizing spray assembly at a stable flow rate and pressure. The booster pump provides sufficient water pressure so that the spray liquid, after entering the hydraulic drive mechanism, can drive the impeller 105 to rotate stably and form qualified atomized droplets through the atomizing nozzles 9. The filter is used to remove any solid impurities that may be present in the spray liquid, preventing impurities from entering the pipeline and clogging the nozzles or damaging the mechanical seal bearings. The storage tank stores the prepared spray liquid, and its capacity should meet the requirements of continuous operation.

[0105] The main supply pipe 14 and branch supply pipes 13 are made of corrosion-resistant polypropylene, polyvinylidene fluoride, or fluoroplastic-lined steel pipes to withstand the corrosive environment of the spray liquid. The main supply pipe 14 is fixed to the inner wall of the tank 16 using pipe clamps or supports, with a fixing point at appropriate intervals to prevent displacement due to vibration or hydraulic impact during operation. A sealing through-wall fitting must be installed where the main supply pipe 14 enters the wall of the tank 16 to ensure a tight seal and prevent exhaust gas leakage.

[0106] Since all atomizing spray assemblies in this device share a single main liquid supply pipe 14, the spray liquid in the main liquid supply pipe 14 simultaneously performs two functions: firstly, it serves as a washing medium sprayed through the atomizing nozzles 9 to react with the exhaust gas; secondly, it serves as a power source to drive the impellers 105 of each hydraulic drive mechanism to rotate. The liquid supply system only needs to provide a single pressure source to simultaneously meet the spraying and driving requirements of all spray assemblies in the entire tank. The piping system is simple, and there is no need to configure a separate power pipeline for the driving function.

[0107] The working process of the exhaust gas treatment spray device is as follows: The first stage involves exhaust gas introduction and bottom buffering. Exhaust gas generated by the CVD process enters the tank 16 through exhaust gas inlet 1601. Exhaust gas inlet 1601 is located below the side wall of tank 16, higher than the waste liquid outlet at the bottom. After entering tank 16, the exhaust gas velocity decreases sharply and flows upwards due to the much larger cross-sectional area of ​​tank 16 compared to exhaust gas inlet 1601. The liquid seal layer maintained at the bottom of tank 16 provides initial water washing and buffering for the exhaust gas, trapping large particles and reducing its temperature.

[0108] The second stage involves multi-layer counter-current spray scrubbing. The exhaust gas flows upwards inside the tank 16, sequentially passing through spray zones formed by various atomizing spray assemblies. In each spray zone, at least six atomizing spray assemblies, arranged in a circular array around the axis of the tank 16, simultaneously spray scrubbing liquid towards the center. Each atomizing nozzle 9 oscillates back and forth under the drive of a linkage control controller, and the counter-rotation of adjacent nozzles creates staggered spray zones, achieving full-coverage dynamic spraying of the scrubbing liquid across the entire cross-section of the tank 16. The spray droplets come into counter-current contact with the rising exhaust gas, absorbing and neutralizing harmful components. Each time the exhaust gas passes through a spray zone, the concentration of harmful components decreases, resulting in a significant reduction in concentration after multi-layer, staged treatment.

[0109] In the third stage, airflow is evenly distributed and dead zones are eliminated. As the exhaust gas rises and flows through each support platform 15, the polygonal holes in the center of the support platform 15 provide a through channel for the airflow. The inclined guide plate 1502 at the bottom guides the airflow smoothly across the area at the bottom of the support platform 15, avoiding eddies and stagnant zones caused by the horizontal bottom surface. The airflow remains evenly distributed across the entire cross-section of the tank 16, maximizing the contact area with the spray liquid and improving mass transfer efficiency.

[0110] The fourth stage involves the discharge of purified gas and the collection of waste liquid. The purified gas, after being scrubbed through multiple layers, flows upward to the top of tank 16 and is discharged through exhaust outlet 1602. A demister installed at exhaust outlet 1602 traps liquid droplets entrained in the airflow, ensuring the purified gas meets emission standards before being released into the atmosphere. The sprayed waste liquid, under the influence of gravity, collects along the inner wall of tank 16 and the inclined surface of guide plate 1502 to the bottom of tank 16, and is discharged through the waste liquid outlet to the waste liquid treatment system.

[0111] Throughout the entire process, the linkage control system operates continuously: the spray liquid enters the inlet pipes 103 of each atomizing spray assembly via the main supply pipe 14 and branch supply pipes 13, driving the impellers in the hydraulic drive mechanism to rotate. This rotation is then converted into the reciprocating motion of the push-pull rod via the transmission of the sector gear and the waist-shaped rack sleeve, and further converted into the oscillation of the tee pipe and the atomizing nozzle 9 via the insert rod and the spiral groove. After completing the driving function, the spray liquid is discharged from the drain pipe and transported to the atomizing nozzle 9 through the fixed pipe and the tee pipe, achieving synchronous completion of driving and spraying. All atomizing spray assemblies in the entire tank operate synchronously under the drive of a single liquid supply system, requiring no external electrical control, resulting in a simple structure and reliable operation.

[0112] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. An atomizing spray assembly, characterized in that, It includes a linkage control controller, a fixed pipe (4), a rotating connecting pipe section, an atomizing nozzle assembly, and a mounting plate (11). The atomizing nozzle assembly includes a three-way pipe (8) and an atomizing nozzle (9). The two axial ports of the three-way pipe (8) are connected to the fixed pipe (4) through a rotating connecting pipe section, and the atomizing nozzle (9) and the remaining ports of the three-way pipe (8) are detachably connected. The linkage control controller is located at the inlet end of the spray liquid, and its outlet is connected to the fixed pipe (4).

2. The atomizing spray assembly according to claim 1, characterized in that, The linkage control controller includes a hydraulic drive mechanism (1), a waist-shaped rack sleeve (2), a push-pull rod (3), and a plug rod (10). The push-pull rod (3) is fixedly connected to the waist-shaped rack sleeve (2), and the insert rods (10) arranged in equal number and one-to-one correspondence with the atomizing nozzles (9) are connected to the push-pull rod (3); The moving insert (10) drives the atomizing nozzle assembly to rotate.

3. The atomizing spray assembly according to claim 2, characterized in that, The hydraulic drive mechanism (1) includes a housing (101), and an upper cover (102) is provided at the upper opening of the housing (101) and fixedly connected to it by bolts. An inlet pipe (103) and an outlet pipe (104) are respectively connected through the outer sides of the housing (101). The inlet pipe (103) is connected to the supply pipeline of the spray liquid, and the outlet pipe (104) is connected to the adjacent fixed pipe (4). An impeller (105) is rotatably mounted inside the housing (101). The upper end of the shaft (106) of the impeller (105) passes through the through hole of the upper cover (102) to the outside of the upper cover (102) and is coaxially fixed with a sector gear (107). A sealed bearing is provided between the shaft (106) and the through hole of the upper cover (102). The outer shell (101) is detachably connected to the mounting plate (11) via a connecting bracket.

4. The atomizing spray assembly according to claim 3, characterized in that, The sector gear (107) is inserted in the middle of the waist-shaped rack sleeve (2). As the sector gear (107) rotates, it alternately contacts and meshes with the two racks arranged opposite to each other on the waist-shaped rack sleeve (2), thereby realizing the reciprocating movement of the waist-shaped rack sleeve (2) driven by the rotation of the sector gear (107). The arc of the tooth surface of the sector gear (107) is 80° to 100°.

5. The atomizing spray assembly according to claim 2, characterized in that, The outer wall of the three-way pipe (8) is recessed with a spiral groove (801). The spiral angle of the spiral groove (801) is 80° to 100°. The end of the insertion rod (10) is inserted into the spiral groove (801). When the push-pull rod (3) moves the insertion rod (10), the end of the insertion rod (10) slides inside the spiral groove (801), thereby driving the three-way pipe (8) and the atomizing nozzle (9) to rotate and swing. The spiral grooves (801) on two adjacent three-way pipes (8) rotate in opposite directions. During the movement of the push-pull rod (3), the rotation directions of two adjacent atomizing nozzles (9) are opposite, forming staggered spray zones.

6. The atomizing spray assembly according to claim 1, characterized in that, The two ends of the fixed tube (4) are first flange rings (401), and the first flange rings (401) are provided with flange holes for connection. A diameter reduction area (402) is connected to the outside of the first flange rings (401), and an insertion tube (403) is located outside the diameter reduction area (402). The inner diameter of the insertion tube (403) is smaller than the inner diameter of the fixed tube (4), and a first inclined surface area (404) is provided on the outside of the end of the insertion tube (403). The fixed tube (4) is externally fixed with a fixing bracket (405), which is connected to the mounting plate (11) through the fixing bracket (405).

7. The atomizing spray assembly according to claim 6, characterized in that, The rotating connecting pipe section includes an outer sleeve (5), an inner sleeve (6), and a mechanical seal bearing (7). The outer sleeve (5) has a second flange ring (501) on one side. The second flange ring (501) and the first flange ring (401) are detachably connected by a bolt assembly. A sealing gasket is added between them. The inner wall of the outer sleeve (5) has a first abutment ring (502). The outer sleeve (5) is fitted onto the mechanical seal bearing (7) by a heat fitting process. The end of the mechanical seal bearing (7) abuts against the first abutment ring (502). The inner sleeve (6) has a third flange (601) on the outer side of one end. The third flange (601) is connected to the port of the tee pipe (8) by a bolt assembly. The outer wall of the inner sleeve (6) is provided with a second abutment ring (602). The inner sleeve (6) is inserted into the inner side of the mechanical seal bearing (7) by a cold sleeve process. The end of the mechanical seal bearing (7) abuts against the second abutment ring (602). The inner sleeve (6) has a second inclined area (603) on the inner side of the port away from the third flange (601). After connection, the first inclined area (404) abuts against the second inclined area (603).

8. A tail gas treatment spray device, characterized in that, Includes a tank (16) and an atomizing spray assembly as described in any one of claims 1 to 7; The tank (16) has a waste liquid outlet at the bottom and a tail gas inlet (1601) at the bottom of the side wall of the tank (16). The height of the tail gas inlet (1601) is higher than the waste liquid outlet, and the top surface of the tank (16) has a tail gas outlet (1602). The tank (16) is equipped with a multi-layer atomizing spray assembly. Each layer contains at least 6 atomizing spray assemblies. Multiple atomizing spray assemblies in the same layer are arranged in a ring array around the axis of the tank (16).

9. The exhaust gas treatment spray device according to claim 8, characterized in that, The tank (16) is provided with several layers of support platforms (15) inside. The support platform (15) has a polygonal hole in the middle and a connecting plate (1501) on the edge of the polygonal hole. The mounting plate (11) of the atomizing spray assembly is detachably connected to the connecting plate (1501) by bolts. The bottom of the support platform (15) is provided with an inclined guide plate (1502). The low point of the guide plate (1502) abuts against the inner wall of the tank (16), and the high point abuts against the edge of the polygonal through hole in the middle of the support platform (15).

10. The exhaust gas treatment spray device according to claim 8, characterized in that, The liquid inlet pipe (103) of the atomizing spray assembly is externally connected to a liquid supply branch pipe (13), and all the liquid supply branch pipes (13) inside the tank (16) are connected to the liquid supply main pipe (14), which is connected to the external spray liquid supply system.

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